JP5154492B2 - Dew shape distribution measuring device and dew shape distribution measuring method - Google Patents

Description

  The present invention relates to a dew shape distribution measuring apparatus and a dew shape distribution measuring method.

  Conventionally, as disclosed in Patent Document 1 below, a film thickness measuring apparatus capable of measuring the film thickness of a liquid film is known. In the film thickness measuring device of this patent document, the film thickness of the liquid film is obtained by moving the probe in the Z-axis direction (film thickness direction) with respect to the liquid film on the base material and utilizing the vibration attenuation at the probe tip. Can be measured.

  On the other hand, as disclosed in Non-Patent Document 1 below, it is known to directly observe condensed water on the surface of a sample with a microscope. In this method, condensation on the order of several mm to several μm can be observed.

  Further, as disclosed in Non-Patent Document 2 below, it is known that incident light in a known polarization state is reflected on the sample, and the thickness of the thin film on the sample surface is derived from the change in the polarization state of the reflected light. It has been.

  Non-Patent Document 3 below gives a plurality of phase differences between the reference light and the measurement light in the interferometer, and measures the intensity change of the interference light at that time, whereby the phase difference between the reference light and the measurement light. And calculating the height at each point of the sample from the wavelength and phase difference of the measurement light.

International Publication No. WO2005 / 090909 Pamphlet

Ibata et al., Asbil Technical Review December 2006, p52-60, Yamatake Corporation “Basics of Ellipsometry”, JA Woollam Japan Co., Ltd., July 30, 2008 search, Internet <URL: http://www.jawjapan.com/Tutorial_1.html> Shigeaki Matsumoto, “The measurement of tiny dew droplets at the initial deposition stage and dew point using a phase-shift interference microscope”, Meas. Sci. Technol. 14, 2003, 2075-2080, IOP Publishing Ltd.

  In recent years, there has been a concern about an increase in failures in precision devices such as electronic devices due to poor insulation between wires due to condensation. In addition, in lead-free solder and nanomaterials that have been put into practical use in recent years, a new type of failure has occurred due to condensation, and it is desired to clarify the failure mechanism. In addition, since micro-condensation, which previously did not cause malfunctions and failures, may become a factor that affects the life of equipment in the future, development of a technology that can accurately measure micro-condensation is desired. However, some of the conventional techniques described above can accurately measure the thickness of a liquid film or the like, but none can accurately measure the shape of each water droplet. Even though dew condensation can be observed, there is no one that can accurately measure the shape of each dew.

  Therefore, the present invention has been made in view of such a point, and an object of the present invention is to make it possible to measure the shape and distribution of dew with high accuracy after dew condensation on a sample.

  In order to achieve the above object, the present invention is an apparatus for measuring the shape and distribution of dew on a sample surface, the sample table on which a sample is set, a probe, and an excitation that vibrates the tip of the probe. And a determination unit for determining contact or proximity between the probe tip and the dew or the sample according to vibration of the probe tip, and changing a relative position of the probe with respect to the sample stage A displacement mechanism, a relative displacement amount deriving unit for measuring the relative displacement amount of the probe with respect to the sample stage, a cooling mechanism capable of cooling the sample surface to a dew point or less, presence or absence of the contact or proximity by the determination unit, and the relative A dew shape that includes a measurement unit that measures the shape and distribution of dew generated on the sample surface cooled by the cooling mechanism based on the relative displacement amount derived by the displacement amount deriving unit. It is the distribution measurement device.

  In the present invention, it is possible to cause condensation on the sample surface by cooling the sample surface to a dew point or lower by a cooling mechanism. Then, while vibrating the probe tip, the relative position of the probe with respect to the sample stage is changed, and contact or proximity between the probe tip and dew or the sample is determined according to the vibration of the probe tip, and the determination Measure the shape and distribution of dew based on the results. That is, when the tip of the probe contacts or approaches the dew or the sample, a shearing force is applied, so that the amplitude of the probe vibration is attenuated. The shape and distribution of dew can be accurately measured by detecting this attenuation and detecting the relative displacement of the probe at that time. In addition, since a minute dew shape and distribution can be measured, it can be used for measuring physical properties of a sample such as wettability. It can also be used for surface inspection of samples.

  Here, the displacement mechanism can change the relative position of the probe with respect to the sample stage in the orthogonal three-axis directions, and can measure the relative displacement amounts in the orthogonal three-axis directions. It is preferable that a portion is provided. In this aspect, each relative displacement amount in the three orthogonal directions is measured, so that the three-dimensional position of the probe with respect to the sample stage can be accurately calculated, and the shape and distribution of dew are measured using this calculated data. can do.

  The excitation unit preferably includes a crystal resonator disposed so as to be in contact with the probe, and a signal generation unit that generates a signal having a resonance frequency of the crystal resonator. In this aspect, since the change in the resonance characteristics of the crystal resonator caused by the contact between the probe tip and the dew or the sample is used, the contact between the probe and the dew or the sample can be accurately detected.

  The cooling mechanism controls the cooling unit for cooling the sample surface, a sample temperature detecting unit for detecting the temperature of the sample surface, and the cooling unit so that the temperature of the sample surface becomes a predetermined temperature. And a sample temperature controller. In this aspect, since the sample surface can be controlled to a predetermined temperature, the amount of condensation on the sample surface can be accurately controlled. Further, since condensation on the sample surface can be generated with good reproducibility, the reliability of the measurement results of the dew shape and distribution can be improved.

  The cooling unit may be configured by a heat absorption unit of a Peltier element. In this aspect, the cooling capacity can be adjusted by the voltage applied to the Peltier element.

  Alternatively, the cooling unit may include a cold air supply unit that supplies cooling air so that the cooling air contacts the sample. In this embodiment, the cooling capacity can be adjusted by adjusting the flow rate of cooling air or the temperature of the cooling air that is brought into contact with the sample.

  The dew shape distribution measuring device includes a measurement tank having a measurement space in which the sample can be stored, an air-conditioning unit for circulating air of a predetermined temperature and humidity in the measurement space, and a surrounding for detecting the temperature in the measurement space It is preferable to include a temperature detection unit, an ambient humidity detection unit that detects humidity in the measurement space, and an environment control unit that controls the temperature in the measurement space to be a predetermined temperature and humidity. In this aspect, since the temperature and humidity around the sample are adjusted, condensation can be generated with good reproducibility. For this reason, the reliability of the measurement result of dew shape and distribution can be improved.

  The present invention is a method for measuring the shape and distribution of dew on a sample surface, the cooling step for cooling the sample surface below the dew point, and the sample table on which the sample is set while vibrating the probe tip. The relative position of the probe is changed, and contact or proximity between the tip and the dew or the sample is determined according to vibration of the tip, and dew generated on the sample surface cooled in the cooling step A dew shape distribution measuring method including a measuring step for measuring the shape and distribution of the dew shape.

  In the cooling step and the measurement step, the sample is preferably stored in a measurement space controlled to a predetermined temperature.

  As described above, according to the present invention, the dew shape and distribution can be accurately measured after the dew condensation is performed on the sample.

It is a figure which shows schematic structure of the measuring apparatus which concerns on embodiment of this invention. It is the schematic for demonstrating the structure of the displacement measurement part of the said measuring apparatus, and a Z-axis displacement mechanism. It is the schematic for demonstrating the structure of the X-axis and Y-axis displacement mechanism of the said measuring apparatus. It is the schematic for demonstrating the structure of the cooling part of the said measuring apparatus. It is a block diagram which shows a part of control system of the said measuring apparatus. It is a characteristic view for explaining detection of contact or proximity between a probe and dew or a sample. It is a figure which shows schematic structure of the measuring apparatus which concerns on other embodiment of this invention. It is the schematic for demonstrating the structure of the cooling part by other embodiment of this invention.

  Hereinafter, an embodiment of the present invention will be described with reference to the drawings.

  As shown in FIGS. 1 and 2, a dew shape distribution measuring apparatus (hereinafter simply referred to as a measuring apparatus) 10 according to the present embodiment is an apparatus for measuring the dew shape and distribution by causing dew condensation on a sample surface. The apparatus main body 12, the test control unit 14, and the air conditioning unit 42 are provided. The apparatus main body 12 includes a sample table 16 for setting the sample W, a probe 18, an excitation unit 20 that vibrates the tip of the probe 18, and a relative position of the probe 18 with respect to the sample table 16 in three orthogonal directions. A displacement mechanism 22 to be changed.

  As shown in FIG. 3, the displacement mechanism 22 includes an X-axis displacement mechanism 23 for moving the sample stage 16 in the X-axis direction in the horizontal plane, and a Y-axis direction in the horizontal plane (perpendicular to the X-axis direction). A Y-axis displacement mechanism 24 for moving the probe 18 in the vertical direction, and a Z-axis displacement mechanism 25 for moving the probe 18 in the vertical direction.

  As shown in FIG. 2, the Z-axis displacement mechanism 25 is for moving the Z-axis stage 27 in the vertical direction (Z-axis direction) with respect to the stand 30 fixed to the base 29, and performs rough adjustment. It has a mechanism 25a and a fine adjustment mechanism 25b. The coarse adjustment mechanism 25a is, for example, a motor-driven drive mechanism and is driven by a Z-axis driver 32 (see FIG. 5). By driving an unillustrated motor, the Z-axis stage 27 is moved in the Z-axis direction. The fine adjustment mechanism 25b has a piezoelectric actuator using PZT piezoelectric ceramics, and this piezoelectric actuator is driven by a Z-axis driver 32 constituted by, for example, a high voltage amplifier. This piezoelectric actuator can control the amount of displacement with nm accuracy, for example, by driving with a feed width of 100 nm.

  The Y-axis displacement mechanism 24 is a mechanism for moving the Y-axis stage 36 in the Y-axis direction, and includes a coarse adjustment mechanism 24a and a fine adjustment mechanism 24b as shown in FIG. The coarse adjustment mechanism 24a is, for example, a motor-driven drive mechanism and is driven by a Y-axis driver 33 (see FIG. 5). The Y-axis stage 36 is moved in the Y-axis direction by driving a motor (not shown). The fine adjustment mechanism 24b has a piezoelectric actuator using PZT piezoelectric ceramics. The piezoelectric actuator is installed on the base 29 and is driven by a Y-axis driver 33 configured by, for example, a high voltage amplifier. By driving the piezoelectric actuator, the Y-axis stage 36 can be moved in the Y-axis direction. This piezoelectric actuator can control the amount of displacement with nm accuracy, for example, by driving with a feed width of 100 nm.

  The X-axis displacement mechanism 23 is a mechanism for moving the sample stage 16, which is an X-axis stage, in the X-axis direction, and includes a coarse adjustment mechanism 23a and a fine adjustment mechanism 23b. The coarse adjustment mechanism 23a is, for example, a motor-driven drive mechanism and is driven by an X-axis driver 34 (see FIG. 5). The sample stage 16 is moved in the X-axis direction with respect to the Y-axis stage 36 by driving a motor (not shown). The fine adjustment mechanism 23b has a piezoelectric actuator using PZT piezoelectric ceramics. This piezoelectric actuator is installed on the Y-axis stage 36 and is driven by an X-axis driver 34 constituted by, for example, a high voltage amplifier. By driving the piezoelectric actuator, the sample stage 16 can be moved in the X-axis direction on the Y-axis stage 36. Thereby, the sample stage 16 can move to any position in the X-axis direction and the Y-axis direction with respect to the base 29. This piezoelectric actuator can control the amount of displacement with nm accuracy, for example, by driving with a feed width of 100 nm.

  Returning to FIG.

  The sample stage 16 is provided with a measurement tank 40 having a measurement space S in which the sample W can be stored. Since the measurement tank 40 is installed on the sample table 16, it moves in the horizontal direction together with the sample table 16. An opening 40 a through which the probe 18 is inserted is provided on the upper surface of the measurement tank 40. The lower end portion of the probe 18 is arranged in the measurement space S. Although not shown, the measurement tank 40 is provided with an open / close door so that the sample W can be taken in and out.

  In the measurement space S, air adjusted to a predetermined temperature and humidity by the air conditioning unit 42 circulates. The air conditioning unit 42 adjusts the temperature and humidity of the air to a predetermined temperature and humidity, and introduces the adjusted air into the measurement space S through the air supply passage 41. Since the air in the measurement space S is returned to the air conditioning unit 42 through the exhaust passage 43, the air in the measurement space S always flows during measurement.

  The measurement apparatus 10 includes an ambient temperature sensor 44 as an ambient temperature detection unit that detects a temperature in the measurement space S (temperature of the sample atmosphere), and an ambient humidity that detects humidity in the measurement space S (humidity of the sample atmosphere). An ambient humidity sensor 45 as a detection unit is provided, and detection signals from these sensors 44 and 45 are input to the test control unit 14. As shown in FIG. 5, the test control unit 14 is provided with a temperature / humidity measurement unit 47, and the temperature / humidity measurement unit 47 detects the temperature in the measurement space S according to the detection signals from the sensors 44 and 45. And the humidity is derived. The computing device 59 of the test control unit 14 includes the environment control unit 46 as a function. The environment control unit 46 controls the air conditioning unit 42 based on the temperature and humidity derived by the temperature / humidity measurement unit 47. Control. That is, the environment control unit 46 controls the air conditioning unit 42 based on the detection results from the sensors 44 and 45 so that the temperature in the measurement space S becomes a predetermined temperature and humidity. The air conditioning unit 42 can supply dehumidified air or heated air, and can prepare the re-measurement by drying the sample W.

  The sample W is cooled by the cooling mechanism 48 so that the sample surface is below the dew point. The cooling mechanism 48 includes a cooling unit 50 for cooling the sample surface, a sample temperature sensor 51 as a sample temperature detecting unit for detecting the temperature of the sample surface, and the cooling unit 50 so that the temperature of the sample surface becomes a predetermined temperature. And a sample temperature control unit 52 to be controlled. In the present embodiment, the cooling unit 50 includes a heat absorbing unit of a Peltier element, and is placed on the sample stage 16 as shown in FIG. The sample temperature control unit 52 is included as a function of the arithmetic unit 59 of the test control unit 14, and controls the voltage applied to the Peltier element based on the detection result of the sample temperature sensor 51. In addition, the cooling mechanism 48 is not restricted to the structure which has a Peltier element. For example, a mechanism that uses a cooling plate configured to be able to introduce a heat medium and introduces the heat medium into the cooling plate to adjust the temperature of the cooling plate can be exemplified.

  The probe 18 is fixed to the Z-axis stage 27 at the upper end so as to extend downward. The lower end portion (tip portion) of the probe 18 is sharpened and bends easily.

  The excitation unit 20 includes a crystal resonator 55. Although the shape of the crystal unit 55 is not limited, in the present embodiment, for example, the crystal unit 55 is configured as a tuning fork type crystal unit 55 having two symmetrical protrusions like a tuning fork. The crystal resonator 55 is fixed to the Z-axis stage 27 via the resonator fixing portion 57. The probe 18 is in contact with the protrusion of the crystal unit 55.

  The distance between the two protrusions of the crystal unit 55 is, for example, about 0.2 mm, and the diameter of the probe 18 in contact with the crystal unit 55 is, for example, 125 μm. The probe 18 can be made of, for example, an optical fiber, and includes, for example, a core having a diameter of about 10 μm and a clad having a diameter of about 125 μm. By melting and stretching the optical fiber, the tip is sharpened, and the diameter of the tip is processed into a taper shape of, for example, 100 nm or less.

  The crystal unit 55 includes two electrodes 55a and 55b. One electrode 55a is connected to a current detector 58 (see FIG. 5) included in the test control unit 14, and the other electrode 55b is a test control unit. 14 is connected to a signal generator 56 (see FIG. 5). When an AC signal, for example, a sine wave signal is applied between the electrodes 55a and 55b, the projection of the crystal unit 55 vibrates due to the piezoelectric effect of the crystal unit 55. When the crystal unit 55 is vibrated, the probe 18 in contact therewith can be vibrated together. In particular, the amplitude increases when a signal having a resonance frequency of the crystal unit 55 or a frequency in the vicinity thereof is applied.

  As shown in FIG. 5, the current detector 58 is connected to a reference signal obtained by branching a part of the output signal of the signal generator 56. The signal output from the current detector 58 is input to the arithmetic unit 59 described later.

  The test control unit 14 can derive the shape and distribution of dew by calculation.As shown in FIG. 5, the X-axis driver 34, the Y-axis driver 33, the Z-axis driver 32, The signal generator 56, the current detector 58, the temperature / humidity measurement unit 47, the displacement measurement unit 61, an arithmetic device 59, an input device 70, and an output device 71 are provided.

  The displacement measuring unit 61 measures the relative displacement of the probe 18 with respect to the sample stage 16. The displacement measuring unit 61 is for measuring the relative displacement amount of the probe 18 with respect to the sample stage 16 in the three orthogonal axes, and measures the X axis displacement amount of the sample stage 16 with respect to the Y axis stage 36. A direction measuring unit 61a, a Y-axis direction measuring unit 61b that measures the amount of displacement in the Y-axis direction of the Y-axis stage 36 relative to the base 29, and a Z-axis direction measurement that measures the Z-axis direction displacement of the probe 18 relative to the base 29 Part 61c.

  The X-axis direction measuring unit 61a is composed of an ultra-precision length measuring device, and as shown in FIG. 2, a fixed side portion 61e fixed to the Y-axis stage 36 and a traveling side portion fixed to the sample stage 16 The amount of movement in the X-axis direction is measured from these relative displacement amounts in the X-axis direction. Similarly, the Y-axis direction measuring unit 61b and the Z-axis direction measuring unit 61c are configured by ultra-precision length measuring instruments. That is, the Y-axis direction measurement unit 61 b has a fixed side portion 61 g fixed to the base 29 and a traveling side portion 61 h fixed to the Y-axis stage 36. Further, the Z-axis direction measuring unit 61 c has a fixed side portion 61 i fixed to the stand 30 and a traveling side portion 61 j fixed to the Z-axis stage 27.

  The input device 70 includes a keyboard, an external memory, and the like, and the input device 70 is configured to be able to input a command to the arithmetic device 59. The output device 71 includes a display unit, a printer, and the like, and the output device 71 is configured to be able to output a calculation result or the like by the calculation device 59.

  The arithmetic unit 59 includes a CPU, a ROM, a RAM, and the like, and exhibits a predetermined function by executing a program stored in the ROM. The functions of the computing device 59 include at least the environment control unit 46, the sample temperature control unit 52, the relative displacement amount derivation unit 63, the determination unit 60, the measurement unit 62, the analysis unit 66, and probe control. Part 67.

  The relative displacement amount deriving unit 63 derives the relative displacement amount of the probe 18 based on the sample stage 16 using the measurement result of the displacement measuring unit 61. The probe control unit 67 outputs a signal to the X-axis, Y-axis, and Z-axis drivers 34, 33, and 32 based on the relative displacement amount of the probe 18 derived by the relative displacement amount deriving unit 63. Thereby, the probe 18 is accurately controlled to the target position.

  The determination unit 60 determines contact or proximity between the tip of the probe 18 and dew or the sample W according to the vibration of the tip of the probe 18. The measuring unit 62 determines the shape and distribution of dew on the sample surface based on the presence or absence of contact or proximity between the probe 18 and the dew or the sample W by the determining unit 60 and the relative displacement amount measured by the relative displacement amount deriving unit 63. Measure. The above “contact” refers to the case where the tip of the probe 18 is actually in contact with dew and the like, and “proximity” refers to the tip of the probe 18 that is not actually in contact with dew and the like. Is the case where the dew etc. is close to a predetermined range to the extent that the amplitude of the probe 18 changes due to the interaction with the dew etc.

  The determination unit 60 determines contact or proximity between the probe 18 and the dew or the sample W from the change in amplitude of the tip of the probe 18. The principle will be described with reference to FIG. When the tip of the probe 18 is sufficiently separated from the surface of the sample W to be measured, the amplitude when the probe 18 vibrates maintains a constant value (A region in FIG. 6). On the other hand, when the tip of the probe 18 comes into contact with the dew surface or approaches within a predetermined range, the amplitude of the probe 18 is attenuated (region B in FIG. 6). This is because the tip of the probe 18 receives a shearing force (shear force) from the surface of the dew. Since the attenuation of the amplitude is very steep, the contact or proximity between the tip of the probe 18 and the upper surface of the dew can be detected by detecting this change in amplitude. Further, when the tip of the probe 18 contacts or approaches the surface of the sample W, the vibration amplitude of the probe 18 is further attenuated (D region in FIG. 6). Until the amplitude is attenuated, the amplitude of the probe 18 remains constant (C region in FIG. 6). Since the amplitude attenuation in the region D is also very steep, the contact or proximity between the tip of the probe 18 and the sample surface can be detected by detecting this amplitude change.

  The measuring unit 62 derives the dew height from the amount of displacement of the probe 18 from the B region to the D region. The measuring unit 62 measures the height of dew (or the top surface position) at a plurality of locations in the X-axis direction and the Y-axis direction, and derives the dew shape by statistically processing the measurement results using these as continuous points. Measure the distribution of dew. In order to derive the shape of dew, for example, coordinate data (x, y, z) when contact is detected is sequentially stored, and a regression surface is calculated from these coordinate data to derive the particle size. Is possible. The dew shape may be specified as a three-dimensional shape, or may be specified as a two-dimensional shape in a horizontal plane. When specifying as a two-dimensional shape, the shape of dew can be defined by the particle size. The particle diameter may be calculated by regression calculation, or the width of dew in a predetermined direction may be measured at a plurality of locations, and the maximum width among them may be adopted.

  Note that the Z-axis displacement amount instructed by the test control unit 14 is obtained by calibrating the relationship between the Z-axis displacement amount data instructed by the test control unit 14 and the actual displacement amount displaced by the Z-axis displacement mechanism 25 in advance. The actual displacement amount in the Z-axis direction can be acquired from the data. The same applies to the X-axis direction and the Y-axis direction.

  The analysis unit 66 includes a correction processing unit 66a that corrects the shape of the dew measured by the measurement unit 62 in accordance with the inclination of the sample surface, and an image processing unit 66b. When the sample surface is inclined with respect to the reference plane, the correction processing unit 66a performs a process of correcting the dew width (or particle size) according to the inclination angle. The reference plane is a plane in a direction perpendicular to the Z-axis direction and is stored in advance. On the other hand, the sample surface is obtained by obtaining a plurality of contact positions (Z-axis direction) between the tip of the probe 18 and the sample surface and averaging them. The correction processing unit 66a calculates an angle θ between the reference plane and the sample surface, and corrects the dew width (or particle size) derived by the measurement unit 62.

  The image processing unit 66 b is a control unit that performs processing for displaying a dew image on the display unit of the output device 71. The display unit can perform two-dimensional display of the dew shape in the XY plane and perform processing such as color-coding the height in the Z-axis direction.

  Here, the measuring method by the measuring apparatus 10 according to the present embodiment will be described.

  First, the sample W is set on the sample stage 16, and the inside of the measurement tank 40 is adjusted to a predetermined temperature and humidity. Thereafter, the Peltier element is driven to cool the sample W. At this time, cooling is performed so that the sample surface is below the dew point (cooling step). Along with this, condensation occurs on the sample surface.

  Next, the shape of dew on the sample surface is measured (measurement step). Specifically, by driving the X-axis displacement mechanism 23 and the Y-axis displacement mechanism 24, the sample stage 16 is set at a predetermined position, and the tip portion of the probe 18 is vibrated by the crystal resonator 55, while the Z-axis displacement mechanism. The probe 18 is lowered by 25. As a result, the position of the probe 18 in the Z-axis direction with respect to the sample stage 16 on which the sample W is set changes. When the tip of the probe 18 comes into contact with the dew surface or the sample surface or comes close to within a predetermined range, the amplitude of the probe 18 changes abruptly as described above. Based on the amount of movement, the dew height is derived, and this is repeatedly measured at a plurality of locations in the X-axis direction and the Y-axis direction, thereby measuring the shape and distribution of the dew.

  As described above, in the present embodiment, condensation can be caused on the sample surface by cooling the sample surface below the dew point by the cooling mechanism 48. Then, the position of the probe 18 relative to the sample stage 16 is changed while the tip of the probe 18 is vibrated, and contact or proximity between the tip of the probe 18 and dew or the sample W according to the vibration of the tip of the probe 18. And the shape and distribution of dew are measured based on the determination result. That is, when the tip of the probe 18 contacts or approaches the dew or the sample W, it receives a shearing force, so that the vibration amplitude of the probe 18 is attenuated. The measurement unit 62 detects this attenuation, and by detecting the relative displacement of the probe 18 at that time, the shape and distribution of dew can be accurately measured. In addition, since a minute dew shape and distribution can be measured, it can be used for measuring physical properties of the sample W such as wettability. It can also be used for surface inspection of the sample W.

  In addition, in this embodiment, since the relative displacement amounts in the three orthogonal axes directions are measured, the relative position of the probe 18 in the three axis directions with respect to the sample stage 16 can be accurately calculated. Can be measured in shape and distribution.

  In this embodiment, since the change in the resonance characteristics of the crystal resonator 55 caused by contact or proximity between the tip of the probe 18 and the dew or the sample W is used, the contact or proximity between the probe 18 and the dew or sample W is accurately determined. Can be detected.

  In the present embodiment, since the sample surface can be controlled to a predetermined temperature by the cooling mechanism 48, the amount of condensation on the sample surface can be accurately controlled. Further, since condensation on the sample surface can be generated with good reproducibility, the reliability of the measurement results of the dew shape and distribution can be improved.

  Moreover, in this embodiment, since the measurement tank 40 was provided and the temperature and humidity around the sample W were adjusted, dew condensation can be generated with good reproducibility. For this reason, the reliability of the measurement result of dew shape and distribution can be improved.

  Note that the present invention is not limited to the above-described embodiment, and various modifications and improvements can be made without departing from the spirit of the present invention. For example, in the above-described embodiment, the configuration in which the sample stage 16 is installed on the Y-axis stage 36 has been described. Instead, the sample stage 16 is fixed to the base 29 and the stand 30 that supports the probe 18 is provided. It is good also as a structure provided so that it can move to a X-axis direction and a Y-axis direction. In this configuration, the probe 18 can move in the X-axis direction, the Y-axis direction, and the Z-axis direction.

  In the above embodiment, the probe 18 is movable in the Z-axis direction. Instead, the probe 18 is fixed to the stand 30 and the sample stage 16 is also supported by the Z-axis stage. It is good also as a structure which can move to a Z-axis direction by doing. In this configuration, the sample stage 16 can move in the X-axis direction, the Y-axis direction, and the Z-axis direction.

  In the above embodiment, the stand 30, the Z-axis stage 27, and the crystal resonator 55 are arranged outside the measurement tank 40. Instead, as shown in FIG. The stand 30, the Z-axis stage 27, the crystal resonator 55, and the probe 18 may be housed. In the configuration of FIG. 1, since the volume of the measurement space S can be reduced, the change in temperature and humidity in the measurement space S can be accelerated. On the other hand, in the configuration of FIG. 7, it is not necessary to provide the opening 40 a through which the probe 18 is inserted into the measurement tank 40, so that the inside of the measurement tank 40 can be easily configured to be airtight.

  Moreover, although the cooling part 50 demonstrated the example comprised by the heat absorption part of a Peltier element in the said embodiment, it is not restricted to this. For example, as illustrated in FIG. 8, the cooling unit 50 may include a cooling air supply mechanism 78 that is a cold air supply unit that supplies cooling air so that the cooling air contacts the sample W. In this aspect, the cooling air passage 79 through which the cooling air flows is provided in the sample stage 16, and the sample holding unit 80 is provided on the upper surface of the cooling air passage 69. The sample holder 80 may be provided with, for example, punch holes, and the sample W may be directly cooled by cooling air.

  In the embodiment, the configuration in which the measurement tank 40 is provided has been described. However, the measurement tank 40, the air conditioning unit 42, the ambient temperature sensor 44, the ambient humidity sensor 45, the temperature / humidity measurement unit 47, and the environment control unit 46 are omitted. It is good also as a structure.

  In the embodiment, the measurement unit 62 derives the dew upper surface position based on the displacement amount of the probe 18 up to the B region and derives the dew lower surface based on the displacement amount of the probe 18 up to the D region. Although it was configured, it is not limited to this. For example, the position of the sample surface may be stored in advance, and the height of dew may be derived based on the difference between the position of the probe 18 in the region B and the stored position of the sample surface. This makes it possible to perform control to return the probe 18 when it is detected that the tip of the probe 18 has entered the C region. The dew shape can be derived by repeatedly measuring one dew at a plurality of positions in the X-axis direction and the Y-axis direction. In this case, correction processing according to the inclination angle of the lower surface of the dew (sample surface) is omitted.

16 Sample table 18 Probe 20 Excitation unit 22 Displacement mechanism 23 X-axis displacement mechanism 24 Y-axis displacement mechanism 25 Z-axis displacement mechanism 29 Base 40 Measurement tank 42 Air-conditioning unit 44 Ambient temperature sensor 45 Ambient humidity sensor 46 Environmental control unit 48 Cooling mechanism DESCRIPTION OF SYMBOLS 50 Cooling part 51 Sample temperature sensor 52 Sample temperature control part 55 Crystal oscillator 56 Signal generator 60 Judgment part 61 Displacement measurement part 61a X-axis direction measurement part 61b Y-axis direction measurement part 61c Z-axis direction measurement part 62 Measurement part 63 Relative Displacement amount deriving section

Claims (9)

An apparatus for measuring the shape and distribution of dew on a sample surface,
A sample stage on which the sample is set;
A probe,
An excitation unit that vibrates the tip of the probe;
A determination unit that determines contact or proximity between the tip of the probe and the dew or the sample in accordance with vibration of the tip of the probe;
A displacement mechanism for changing the relative position of the probe with respect to the sample stage;
A relative displacement amount deriving unit for deriving a relative displacement amount of the probe with respect to the sample stage;
A cooling mechanism capable of cooling the sample surface below the dew point;
A measuring unit that measures the shape and distribution of dew generated on the sample surface cooled by the cooling mechanism based on the presence or absence of the contact or proximity by the determination unit and the relative displacement amount derived by the relative displacement amount deriving unit. And a dew shape distribution measuring device. The displacement mechanism can change the relative position of the probe with respect to the sample stage in three orthogonal directions,
The dew shape distribution measuring apparatus according to claim 1, further comprising a displacement measuring unit capable of measuring a relative displacement amount in each of the three orthogonal axes.   The dew shape according to claim 1, wherein the excitation unit includes a crystal resonator disposed so as to be in contact with the probe, and a signal generation unit that generates a signal having a resonance frequency of the crystal resonator. Distribution measuring device.   The cooling mechanism includes a cooling unit that cools the sample surface, a sample temperature detection unit that detects the temperature of the sample surface, and a sample temperature that controls the cooling unit so that the temperature of the sample surface becomes a predetermined temperature. The dew shape distribution measuring apparatus according to claim 1, further comprising a control unit.   The dew shape distribution measuring apparatus according to claim 4, wherein the cooling unit is configured by a heat absorption unit of a Peltier element.   The dew shape distribution measuring apparatus according to claim 4, wherein the cooling unit includes a cold air supply unit that supplies cooling air so that cooling air is brought into contact with the sample. A measurement tank having a measurement space in which the sample can be stored;
An air conditioning unit for circulating air of a predetermined temperature and humidity in the measurement space;
An ambient temperature detector for detecting the temperature in the measurement space;
An ambient humidity detector for detecting humidity in the measurement space;
The dew shape distribution measuring apparatus according to any one of claims 1 to 6, further comprising an environment control unit that controls the temperature in the measurement space to be a predetermined temperature and humidity. A method for measuring the shape and distribution of dew on a sample surface,
A cooling step for cooling the sample surface below the dew point;
While vibrating the tip of the probe, the relative position of the probe with respect to the sample table on which the sample is set is changed, and contact or proximity of the tip and the dew or the sample is made according to the vibration of the tip. A measurement step of determining and measuring a shape and distribution of dew generated on the sample surface cooled in the cooling step.   The dew shape distribution measuring method according to claim 8, wherein, in the cooling step and the measuring step, the sample is stored in a measurement space controlled at a predetermined temperature.

Images