JP5135017B2 - Temperature controller and mounting method of temperature controller - Google Patents

Description

  The present invention relates to a temperature regulator and a method for attaching the temperature regulator, and is particularly applicable to a temperature regulator for a jacket heater that heats while covering an outer peripheral surface of a pipe.

  Various gases are used in the manufacture of semiconductor products. For example, in a CVD apparatus, an exhaust pump is connected from a reaction chamber by a pipe, and a reaction gas (exhaust gas) is exhausted through the pipe. This exhaust gas is liable to cause adverse effects such as solidification on the wall surface of the flow path due to solidification, increasing the load on the exhaust pump. Therefore, the pipe is kept at a constant temperature so that the gas does not condense inside the pipe. Cover the outer periphery of the pipe with a planar jacket heater with a planar flexible heater inside, connect the jacket heater and the temperature controller, and supply power for heating from the temperature controller to the jacket heater At the same time, the output of the temperature sensor provided in the jacket heater is fed back to the temperature controller, and the temperature controller is adjusted so as to maintain a constant temperature.

The jacket heater has a length in the longitudinal direction of the pipe of about several tens of centimeters. The pipe is provided with a plurality of jacket heaters, and one temperature controller is connected to each jacket heater. These temperature controllers are connected to each other by daisy chain connection of signal lines such as a power supply line and abnormality notification. From the jacket heater, a lead wire for taking in the power supply, a lead wire for taking out the sensor output, and the like are extended, and a connector is provided at the tip, and a temperature controller is connected to this connector (Patent Document) 1). In addition, the connection member that connects the temperature controllers in a daisy chain has a T-shaped configuration of cables with bundled lead wires, and a connector is provided at each end, and one of the connectors is temperature controlled. The other two connectors are connected to connectors of other T-shaped cables (see Patent Document 1).
US 2007/0235440 A1

  However, since the conventional temperature controller is connected to other elements by a connector, it is easy to apply a load to the connector. For example, when a pipe vibrates due to the operation of a gas exhaust pump or gas utilization device, the connector must absorb the vibration. If the vibration cannot be absorbed, the life of the connector may be shortened. is there. In addition, since the connection with other elements is made via a cable and the position of the temperature controller is not stable, when viewed as a system that keeps the temperature of the entire pipe constant, the occupied space required for the system is not sufficient. It was quite big.

  Therefore, there is a need for a temperature controller that can reduce the load on the connector and prevent damage, and can reduce the occupied space of the entire system, and a method for mounting the temperature controller.

1st this invention adjusts the temperature of the planar heater which covered the outer peripheral surface of the pipe, is a separate body from the said planar heater, and is connected to the said planar heater via the lead wire. In the vessel, (1) a temperature regulator body having a box shape, (2) left and right legs provided on the bottom surface of the temperature regulator body and extending in the piping direction of the pipe, and (3) left and right A through hole provided in each of the leg portions, through which a locking belt for locking the temperature controller can pass , and (4) a piping direction of the pipe provided in the bottom surface of the temperature controller body. And a groove having a shape matching a part of a cylinder having the smallest radius among the radii to which the temperature controller can be attached .

  A second aspect of the present invention is a method of attaching a temperature controller according to the first aspect of the present invention, wherein the temperature controller is attached to an attachment target composed of a pipe and a planar heater covering the outer peripheral surface of the pipe. The locking belt is passed through the two through holes, and the locking belt is tied by winding almost the entire circumference of the attachment target, and the left and right leg portions are attached to the covered belt. The temperature controller is attached to the attachment target by being pressed against the outer periphery of the attachment target.

  A third aspect of the present invention is a method of attaching a temperature controller according to the first aspect of the present invention, wherein the temperature controller of the first aspect of the present invention is attached to an attachment target composed of a pipe and a planar heater covering the outer peripheral surface of the pipe. A fastening belt is passed through the two through holes, and the locking belt in this state is tightened so as to be in contact with a substantially lower half circumference of the outer periphery of the attachment target, and an upper half circumference of the outer periphery of the attachment target is tightened. A part of the temperature controller is pressed against the bottom surface of the temperature controller body, and the temperature controller is attached to an attachment target.

  ADVANTAGE OF THE INVENTION According to this invention, the temperature regulator which can reduce the load of a connector, can prevent damage beforehand, can reduce the occupation space as the whole system, and its attachment method can be provided.

(A) Main Embodiment Hereinafter, an embodiment of a temperature controller and a method of attaching a temperature controller according to the present invention will be described in detail with reference to the drawings. The temperature controller of this embodiment is also for a jacket heater that heats while covering the outer peripheral surface of the pipe.

  FIG. 1 is a perspective view showing an external shape of a temperature controller according to the embodiment.

  In FIG. 1, the temperature controller 1 of the embodiment has a substantially rectangular parallelepiped shape, and the longitudinal direction of the rectangular parallelepiped is intended to be parallel to the extension direction of a pipe (not shown) to be kept warm.

  A connector portion 2 formed of a spring connector for attaching a pair of lead wires (not shown) for supplying heating power to a jacket heater (not shown) at one corner along the longitudinal direction from the side surface to the upper surface, and the inside of the jacket heater A connector portion 3 formed of a spring connector to which a pair of lead wires (not shown) connected to a temperature sensor provided in the connector is attached, and a length guideline for excluding the covering portion from the lead wire connected to the spring connector is given. A gauge 4 made of a small semi-cylindrical depression is provided.

  A pair of lead wires for transmitting / receiving electric power to / from a temperature controller (or power supply source) on the near side (not shown) at a corner from one side surface (front side in FIG. 1) to the upper surface along the short direction. Four lead wires (not shown) for performing digital communication between a connector portion 5 made of a spring connector to which a (not shown) is attached and a temperature controller (or center device) on the near side (not shown) are provided. A connector portion 6 formed of a spring connector to be attached and a gauge 7 formed of a small semi-cylindrical recess that provides a guide for a length excluding a covering portion from a lead wire connected to the spring connector are provided.

  A pair of lead wires (not shown) for transmitting / receiving electric power to / from a temperature controller on the back side (not shown) is provided at the corner from the other side surface (back side in FIG. 1) to the top surface along the short direction. A connector part 8 consisting of a spring connector to be attached; a connector part 9 consisting of a spring connector to attach four lead wires (not shown) for digital communication between a temperature controller on the back side (not shown); and a spring A gauge 10 is provided that is a small semi-cylindrical depression that provides a measure of the length of the lead wire connected to the connector that excludes the covering portion.

  On the upper surface, there are three 7-segment temperature display parts 11 (also used for setting operation) for displaying the temperature of the jacket heater, and an error display lamp 12 that is turned on when the temperature controller 1 is abnormal. A control display lamp 13 that blinks in conjunction with control during temperature adjustment, and an up key 14, a down key 15, and a set key 16 that are used for setting temperature input and device ID input are provided. .

  Legs 17 and 18 extend downward from two side surfaces along the longitudinal direction, respectively. The leg portions 17 and 18 have corners at their tips. At the center of the legs 17 and 18 in the longitudinal direction, there are provided mounting holes 19 and 20 which are through holes through which the locking belt 25 (see FIG. 2) passes (the mounting holes 20 are not visible in FIG. 1). Provided).

  A concave strip 21 extending in the longitudinal direction is provided on the bottom surface. The concave strip 21 has a shape that matches a part of the cylinder. The radius of the pipe to which the temperature controller 1 corresponds is not limited, but corresponds to a pipe having a predetermined radius range. The radius of the concave strip 21 is determined in consideration of the radius when the jacket heater is wound around the pipe having the minimum radius.

  The temperature controller 1 is commercially available as a pair with the locking belt 25 (see FIG. 2). The locking belt 25 has a width and thickness that can pass through the mounting holes 19 and 20 described above. The locking belt 25 has a male configuration of Velcro (registered trademark) applied to the entire surface of one surface or one tip side portion, and a female configuration of the Velcro tape to the entire surface of the other surface or the other tip side portion. It has been applied.

  FIG. 2 is an explanatory diagram showing an attachment image of the temperature controller 1 according to the embodiment in the case where a thick pipe is a temperature adjustment target.

  In FIG. 2, a circle (hereinafter referred to as an attachment target) 30 indicated by an imaginary line (two-dot chain line) represents an outer periphery in a state where a jacket heater is wound around a circular pipe. When a thick pipe is to be temperature controlled, after passing the locking belt 25 through the mounting holes 19 and 20 of the temperature controller 1, the left and right portions of the locking belt 25 are turned to the mounting target 30. After that, the fastening belt 25 is fastened at the front end side (the velcro tape) of the left and right portions.

  When the thick pipe is a temperature adjustment target, the bottom surface of the temperature controller 1 does not contact the attachment target 30, but the left and right legs 17 and 18 are attached to the attachment target 30 by tightening the locking belt 25. A force acts in the direction of biting into the two (two-point support), and stable mounting can be realized.

  FIG. 3 is an explanatory view showing an attachment image of the temperature controller 1 according to the embodiment in the case where a thin pipe is a temperature adjustment target.

  When a thin pipe is a temperature control target, the bottom surface of the temperature controller 1 is in contact with the mounting target 30, and in this state, the locking belt 25 is passed through the mounting holes 19 and 20 of the temperature controller 1. After that, the left and right portions of the locking belt 25 are turned to the peripheral surface of the attachment target 30 far from the temperature controller 1, and then the left and right ends of the locking belt 25 (the magic side) Fasten with tape. That is, when a thin pipe is a temperature adjustment target, the temperature controller 1 is attached so that the attachment target 30 is sandwiched between the bottom surface of the temperature controller 1 and the locking belt 25.

  If the attached object 30 has the thinnest diameter that the temperature controller 1 can handle, the entire surface of the bottom concave strip 21 and the outer peripheral surface of the attached object 30 are in surface contact to realize stable attachment. Can do. If the attached object 30 has a diameter larger than the thinnest diameter that can be accommodated by the temperature controller 1, as shown in FIG. 4, the left and right corners of the concave strip 21 are forced to bite into the attached object 30. Acts (two-point support), and stable mounting can be realized.

  A pair of lead wires for supplying power for heating extending from the jacket heater to the temperature controller 1 attached to the attachment target 30 is connected to the connector portion 2 and connected to the temperature sensor of the jacket heater. Lead wires are connected to the connector portion 3. In addition, electrical connection for power transfer and data communication is performed with another temperature controller (1) adjacent in the piping direction. FIG. 5 shows a state in which a plurality of temperature controllers 1 according to the embodiment are attached and connected to each other.

  For example, when there is not enough room for installation of the temperature controller 1 in which piping is formed at the corner of the ceiling, as shown in FIG. 6, the locking belt 25 is connected to the temperature controller. The temperature controller 1 may be attached by passing only the one attachment hole 19 or 20 of 1 and binding the locking belt 25 to the attachment target 30.

  As described above, according to this embodiment, since the temperature controller 1 is directly bound and attached to the attachment target 30 by the locking belt 25, the connector portions (2, 3, 5, 6, 7 and 8) can be prevented from being mechanically loaded.

  Even if the pipe vibrates, the temperature controller 1 vibrates integrally with the pipe (attachment target), so that the load fluctuation of the connector portion hardly occurs and the connector portion is not damaged.

  Further, since the temperature controller 1 is directly bound and attached to the attachment target 30 by the locking belt 25, the occupied space of the entire pipe heat insulation system can be made smaller than before.

  Furthermore, since the temperature controller 1 is attached to the attachment target 30 by two-point support or surface contact regardless of the pipe diameter, the temperature controller 1 is prevented from sliding and rotating in the attached state. And stable mounting can be realized.

(B) Other embodiment In the said embodiment, although the leg part or bottom face of the temperature regulator 1 showed what touches the to-be-attached object 30, as shown to FIG. 7 (A) or (B), temperature An inclusion 35 may be interposed between the leg or bottom surface of the adjuster 1 and the attachment target 30. Here, the inclusion 35 may be fixed to the leg portion or the bottom surface of the temperature controller 1, or may be inserted or adhered when the temperature controller 1 is attached to the attachment target 30. good.

  The inclusion 35 includes (1) a vibration-proof function that absorbs vibration of the pipe, (2) a heat-insulating function that does not transmit the temperature of the attachment target 30 to the temperature controller 1, and (3) the temperature controller 1 with a large friction coefficient. What is necessary is just to apply the member which exhibits the holding | maintenance function which stabilizes the attachment with the to-be-attached object 30, (4) the insulation function which raises the electrical insulation with the temperature regulator 1 and the to-be-attached object 30 at least 1 or more. For example, foamed silicone rubber can be applied to the inclusion 35.

  In the above-described embodiment, one mounting hole is provided in each of the left and right leg portions. However, two or more mounting holes may be provided, and attachment by the locking belt 25 may be performed at two or more locations. .

  Further, in the description of the above embodiment, the magic tape is given as a specific example of the locking belt 25, but other configurations may be used. For example, any of the trouser belt locking methods can be used. Moreover, you may apply a metal to a material.

  Further, in the above-described embodiment, the attachment holes 19 and 20 of the temperature controller 1 are used by passing the engagement belt 25, but one end of the engagement belt 25 is fixed to the attachment holes 19 and 20. It may be what was done.

  In the said embodiment, although the leg parts 17 and 18 of the temperature regulator 1 showed what extended below in the surface position from the side surface, what was provided in the position shifted | deviated from the position to the center side of a bottom face. Alternatively, it may be provided at a position shifted to the outside of the bottom surface.

  In the above embodiment, the main body of the temperature controller 1 has a substantially rectangular parallelepiped shape, but may have other housing shapes such as a semi-cylindrical shape or a kamaboko shape.

It is a perspective view which shows the external appearance shape of the temperature controller which concerns on embodiment. It is explanatory drawing which shows the attachment image of the temperature controller of embodiment in case a thick pipe is temperature control object. It is explanatory drawing which shows the attachment image of the temperature controller of embodiment in the case where a thin pipe is a temperature control object. It is explanatory drawing of the contact with the recessed strip and to-be-attached object in the case of attachment of FIG. It is explanatory drawing which shows the state which attached multiple temperature regulators of embodiment. It is explanatory drawing which shows the exceptional attachment state of the temperature controller of embodiment. It is explanatory drawing which shows the modification of embodiment.

Explanation of symbols

  DESCRIPTION OF SYMBOLS 1 ... Temperature controller, 17, 18 ... Legs are 19, 20 ... Mounting hole, 21 ... Recess, 25 ... Locking belt, 30 ... Attachment object, 35 ... Inclusion.

Claims (5)

In the temperature controller that adjusts the temperature of the planar heater that covers the outer peripheral surface of the pipe, is separate from the planar heater and is connected to the planar heater via a lead wire ,
A temperature controller body having a housing shape;
Left and right legs provided on the bottom surface of the temperature controller body and extending in the piping direction of the pipe;
A through hole provided in each of the left and right leg portions, through which a locking belt for locking the temperature controller can pass ;
A concave line provided on the bottom surface of the temperature controller body and extending in the piping direction of the pipe, and having a shape matching a part of a cylinder having the smallest radius among the radii to which the temperature controller can be attached ; A temperature controller characterized by comprising:   Anti-vibration function that absorbs vibration of pipes, heat insulation function that does not transmit the temperature of the surface heater to the temperature controller body, holding function that stabilizes the attachment between the temperature controller body and the sheet heater due to increased friction during contact, electrical The temperature controller according to claim 1, wherein an interposition member that exhibits at least one of the various insulating functions is provided at the tip of each leg portion.   Anti-vibration function that absorbs vibration of pipes, heat insulation function that does not transmit the temperature of the surface heater to the temperature controller body, holding function that stabilizes the attachment between the temperature controller body and the sheet heater due to increased friction during contact, electrical The temperature regulator according to claim 1, wherein an interposition member exhibiting at least one of an insulating function is provided on the bottom surface of the temperature regulator body so as to cover the concave stripe. A method for attaching a temperature regulator according to claim 1 or 2, wherein the temperature regulator is attached to an attachment target comprising a pipe and a planar heater covering the outer peripheral surface of the pipe,
The locking belt is passed through the two through-holes, and the locking belt in the passed state is tied by winding almost the entire circumference of the attachment target, and the left and right leg portions are A method of attaching a temperature controller, wherein the temperature controller is attached to an attachment target by pressing against the outer periphery of the attachment target. A method for attaching a temperature regulator according to claim 1 or 3, wherein the temperature regulator is attached to an attachment target composed of a pipe and a planar heater covering the outer peripheral surface of the pipe,
The locking belt is passed through the two through holes, and the locking belt in this state is tightened so as to be in contact with the substantially lower half circumference of the outer periphery of the attachment target, and the upper half circumference of the outer periphery of the attachment target A method of attaching a temperature controller, wherein a part of the temperature controller is pressed against a bottom surface of the temperature controller body, and the temperature controller is attached to an attachment target.

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