JP5113813B2

JP5113813B2 - X-ray generator

Info

Publication number: JP5113813B2
Application number: JP2009202110A
Authority: JP
Inventors: 勝巳川崎
Original assignee: Bruker AXS KK
Current assignee: Bruker AXS KK
Priority date: 2009-09-01
Filing date: 2009-09-01
Publication date: 2013-01-09
Anticipated expiration: 2029-09-01
Also published as: JP2011054412A

Description

本発明は、回転対陰極型のＸ線発生装置に関するものである。 The present invention relates to a rotating counter cathode type X-ray generator.

図１１は従来の回転対陰極型のＸ線発生装置の一例を示す側断面図、図１２はその外観を一部を分解して示す斜視図である。
このＸ線発生装置は、例えば、特許文献１などにおいて知られているＸ線発生装置と類似のものである。 FIG. 11 is a side sectional view showing an example of a conventional rotating cathode type X-ray generator, and FIG. 12 is a perspective view showing a part of the appearance thereof.
This X-ray generator is similar to the X-ray generator known in Patent Document 1, for example.

図１１に示すように、このＸ線発生装置は、回転対陰極３０１と、それを回転自在に支持するハウジング３１０、３２０とを有している。ハウジングは、軸方向の一端である前端側（図中左端側）が真空ケース内Ａに臨み、軸方向の他端である後端側（図中右端側）が真空ケース外Ｂに臨むように真空ケースのケース壁５００に取り付けられるもので、前側ハウジング３１０と後側ハウジング３２０に二分割されており、前側ハウジング３１０に設けたフランジ３１１により、真空ケースのケース壁５００に取り付けられるようになっている。前側ハウジング３１０及び後側ハウジング３２０には、軸方向に沿って貫通孔３１３、３２３が形成されており、前側ハウジング３１０の貫通孔３１３の内周には、該貫通孔３１３の内周に嵌合された円筒状スリーブ部材３１４を介して、前後方向に相互に離間して前側軸受３０６と後側軸受３０７が装備されている。 As shown in FIG. 11, the X-ray generator includes a rotating anti-cathode 301 and housings 310 and 320 that rotatably support it. The housing is such that the front end side (left end side in the figure) which is one end in the axial direction faces the inside A of the vacuum case, and the rear end side (right end side in the figure) which is the other end in the axial direction faces the outside B of the vacuum case. It is attached to the case wall 500 of the vacuum case, and is divided into a front housing 310 and a rear housing 320, and is attached to the case wall 500 of the vacuum case by a flange 311 provided on the front housing 310. Yes. Through holes 313 and 323 are formed in the front housing 310 and the rear housing 320 along the axial direction, and the inner periphery of the through hole 313 of the front housing 310 is fitted to the inner periphery of the through hole 313. A front bearing 306 and a rear bearing 307 are provided so as to be separated from each other in the front-rear direction via the cylindrical sleeve member 314.

回転対陰極３０１は、貫通孔３１３、３２３内に挿入されて前側軸受３０６及び後側軸受３０７により回転自在に支持された中空軸部３０３と、その中空軸部３０３の前端部に一体に設けられ、前記真空ケース内Ａに挿入されて、外周の対陰極面３０２ａに熱電子の照射を受けることによりＸ線を発生する円筒型の対陰極部３０２とを有するものである。 The rotating anti-cathode 301 is integrally provided at the front end portion of the hollow shaft portion 303 inserted into the through holes 313 and 323 and rotatably supported by the front bearing 306 and the rear bearing 307. And a cylindrical counter cathode portion 302 that is inserted into the vacuum case A and generates X-rays when the outer counter cathode surface 302a is irradiated with thermoelectrons.

この回転対陰極３０１の対陰極部３０２と前側ハウジング３１０の前端部との間には、回転対陰極３０１を回転駆動するための電動機３０４が配設されており、対陰極部３０２側に永久磁石からなるロータ３０４ａが設けられ、前側ハウジング３１０の前端部側に、ロータ３０４ａに回転力を与えるためのコイル３０４ｂが設けられている。 An electric motor 304 for rotationally driving the rotating counter cathode 301 is disposed between the counter cathode portion 302 of the rotating counter cathode 301 and the front end portion of the front housing 310, and a permanent magnet is provided on the counter cathode portion 302 side. And a coil 304 b for applying a rotational force to the rotor 304 a is provided on the front end side of the front housing 310.

また、回転対陰極３０１の内部には、対陰極部３０２と中空軸部３０３とを冷却するための冷媒を流通させる冷媒流路が設けられており、その冷媒通路は、回転対陰極３０１の内部に同心状に挿入されたセパレータ部材３６０により、往路と復路の２つの流路に仕切られている。往路は、最も高温化する対陰極部３０２に冷媒を流入させる流入側通路３７０の一部を構成する部分、復路は、対陰極部３０２の冷媒を外部に向けて流出させる流出側通路３８０の一部を構成する部分である。 In addition, inside the rotating counter cathode 301, a coolant channel for circulating a coolant for cooling the counter cathode portion 302 and the hollow shaft portion 303 is provided. By a separator member 360 inserted concentrically, it is partitioned into two flow paths, an outward path and a return path. The forward path is a portion constituting a part of the inflow side passage 370 that allows the refrigerant to flow into the counter-cathode part 302 that is heated to the highest temperature, and the return path is a part of the outflow side path 380 that allows the refrigerant of the counter-cathode part 302 to flow outward. It is a part which comprises a part.

セパレータ部材３６０は、対陰極部３０２の内部を効率良く冷媒が流れるように２つの流路空間に仕切るディスク状部３６１を前端に有し、その後側に、ディスク状部３６１の中心部から後方に垂直に延びる管状軸部３６２を有するものであり、管状軸部３６２の後端が後側ハウジング３２０の後端部に固定されることで、回転対陰極３０１の内部に支持されている。そして、セパレータ部材３６０の管状軸部３６２は、回転対陰極３０１の中空軸部３０３の内部に同心状に挿入されていることで、中空軸部３０３の内部の冷媒流路を、管状軸部３６２の内側の流路と外側の流路とに仕切っている。ここでは、例えば管状軸部３６２の外側の流路が往路として設定され、管状流路３６２の外側の流路が復路として設定されている。 Separator member 360 has a disk-like part 361 at the front end that divides into two flow path spaces so that the refrigerant efficiently flows inside counter-cathode part 302, and rearward from the center of disk-like part 361 on the rear side. The tubular shaft portion 362 extends vertically, and the rear end of the tubular shaft portion 362 is fixed to the rear end portion of the rear housing 320 so as to be supported inside the rotating counter cathode 301. The tubular shaft portion 362 of the separator member 360 is concentrically inserted into the hollow shaft portion 303 of the rotating anti-cathode 301, so that the coolant channel inside the hollow shaft portion 303 is connected to the tubular shaft portion 362. Is divided into an inner channel and an outer channel. Here, for example, the flow path outside the tubular shaft portion 362 is set as the forward path, and the flow path outside the tubular flow path 362 is set as the return path.

また、後側ハウジング３２０には、外部の冷媒供給管に接続されることで、中空軸部３０３内の往路に向けて冷媒を流入させる冷媒流入口３７０Ａ（図１２参照）と、外部の冷媒排出管に接続されることで、中空軸部３０３内の復路からの冷媒を外部に排出する冷媒流出口３８０Ａ（図１２参照）とが設けられている。これらの冷媒流入口３７０Ａ及び冷媒排出口３８０Ａは、前側ハウジング３１０内及び後側ハウジング３２０内に形成された内部流路３２７、３２８を介して、前記中空軸部３０３内の往路及び復路にそれぞれ接続されている。 Further, the rear housing 320 is connected to an external refrigerant supply pipe, whereby a refrigerant inflow port 370A (see FIG. 12) through which the refrigerant flows toward the forward path in the hollow shaft portion 303, and an external refrigerant discharge A refrigerant outlet 380A (see FIG. 12) that discharges the refrigerant from the return path in the hollow shaft portion 303 to the outside by being connected to the pipe is provided. The refrigerant inlet 370A and the refrigerant outlet 380A are connected to the forward path and the return path in the hollow shaft portion 303 through internal flow paths 327 and 328 formed in the front housing 310 and the rear housing 320, respectively. Has been.

また、貫通孔３１３、３２３と回転対陰極３０１の中空軸部３０３の間の空間のうち、前側軸受３０６よりも真空ケース内Ａ側に位置する箇所には、前側ハウジング３１０と回転対陰極３０１の間の隙間を気密シールする真空シール３０５が配設されている。真空シールとしては、磁気シールが設けられている。 Further, in the space between the through-holes 313 and 323 and the hollow shaft portion 303 of the rotating counter cathode 301, the position of the front housing 310 and the rotating counter cathode 301 is located at the position closer to the A side in the vacuum case than the front bearing 306. A vacuum seal 305 is provided to hermetically seal the gap between them. A magnetic seal is provided as the vacuum seal.

また、貫通孔３１３、３２３と回転対陰極３０１の中空軸部３０３の間の空間のうち、後側軸受３０７よりも真空ケース外Ｂ側に位置する箇所には、後側ハウジング３２０と回転対陰極３０１の中空軸部３０３との間の隙間を液密シールする冷媒シール３５０が配設されている。 Further, in the space between the through-holes 313 and 323 and the hollow shaft portion 303 of the rotating counter cathode 301, the rear housing 320 and the rotating counter cathode are located at a position located on the B-case side outside the rear bearing 307. A refrigerant seal 350 is provided to liquid-tightly seal a gap between the hollow shaft portion 303 of 301.

また、この種の回転対陰極型Ｘ線発生装置においては、運転中に回転対陰極３０１に電子ビームの形で電流（管電流と呼ばれる）が流れるので、回転している回転対陰極３０１から固定側のハウジング３１０、３２０へと電流を逃がす必要がある。この場合、回転対陰極３０１からハウジング３１０に鋼製の軸受を経由して電流を流すと、軸受を構成している転動体（例えば鋼球）と内外輪（軌道輪）との接触部に電食現象が発生して故障の原因となる。 Further, in this type of rotating counter-cathode X-ray generator, a current (referred to as tube current) flows in the form of an electron beam through the rotating counter-cathode 301 during operation. It is necessary to release the current to the side housings 310, 320. In this case, when a current is passed from the rotating anti-cathode 301 to the housing 310 via the steel bearing, an electric current is applied to the contact portion between the rolling elements (for example, steel balls) and the inner and outer rings (tracking rings) constituting the bearing. An erosion phenomenon occurs and causes failure.

そこで、この電食現象を防止するために、回転部と固定部との間に導電ブラシを配置し、導電ブラシを経由して回転部から固定部へ電流が流れるようにしている。例えば、この従来のＸ線発生装置では、前側軸受３０６と後側軸受３０７の間に導電ブラシ３４０を配置し、導電ブラシ３４０の摺動面（内周面）を、回転対陰極３０１の中空軸部３０３の外周に直接または導電性スペーサ等を介して間接的に摺動接触させることにより、導電ブラシ３４０を経由して、回転対陰極３０１からハウジング３１０、３２０に電流を逃がすようにしている。 Therefore, in order to prevent this electrolytic corrosion phenomenon, a conductive brush is disposed between the rotating part and the fixed part so that a current flows from the rotating part to the fixed part via the conductive brush. For example, in this conventional X-ray generator, the conductive brush 340 is disposed between the front bearing 306 and the rear bearing 307, and the sliding surface (inner peripheral surface) of the conductive brush 340 is used as the hollow shaft of the rotating counter cathode 301. By making sliding contact with the outer periphery of the part 303 directly or indirectly through a conductive spacer or the like, a current is released from the rotating counter cathode 301 to the housings 310 and 320 via the conductive brush 340.

特開２００９−１５８３４７号公報JP 2009-158347 A

ところで、摺動部材である冷媒シール３５０は、摩耗が進んだ場合に適当なタイミングでの交換が必要となるが、従来のＸ線発生装置においては、図１２に示すように、後側ハウジング３２０を外した上でないと、冷媒シール３５０を交換することができなかった。また、後側ハウジング３２０をばらすには、冷媒の配管類も取り外す必要があるうえ、光学系の調整も後から必要になることがあるため、交換が非常に面倒であった。 By the way, the refrigerant seal 350 which is a sliding member needs to be replaced at an appropriate timing when the wear progresses. However, in the conventional X-ray generator, as shown in FIG. The refrigerant seal 350 could not be exchanged without removing the. Further, in order to separate the rear housing 320, it is necessary to remove the piping of the refrigerant, and the adjustment of the optical system may be necessary later, so that the replacement is very troublesome.

本発明は、上記事情を考慮し、ハウジングを全くばらさずに簡単に冷媒シールの交換を行うことができるようにしたＸ線発生装置を提供することを目的とする。 In view of the above circumstances, an object of the present invention is to provide an X-ray generator capable of easily replacing a refrigerant seal without separating the housing.

本発明の上記課題は、以下の構成によって達成される。
（１）軸方向の一端である前端側が真空ケース内に臨み、軸方向の他端である後端側が真空ケース外に臨むように取り付けられるハウジングと、
該ハウジングに軸方向に沿って形成された貫通孔と、
該貫通孔の内周に装備された軸受と、
前記貫通孔内に挿入され前記軸受によって回転自在に支持された中空軸部を有すると共に、該中空軸部の前端部に、前記真空ケース内に挿入されて熱電子の照射を受けることによりＸ線を発生する対陰極部が一体に設けられた回転対陰極と、
該回転対陰極を回転駆動する電動機と、
前記回転対陰極の内部に形成され、前記対陰極部と中空軸部とを冷却するための冷媒を流通させる冷媒流路と、
前記回転対陰極の少なくとも中空軸部の内部に同心状に挿入されて、前記冷媒流路を往路と復路に仕切るセパレータ部材と、
前記ハウジングに形成され、外部の冷媒供給管に接続されることで、前記往路に冷媒を流入させる冷媒流入口と、
前記ハウジングに形成され、外部の冷媒排出管に接続されることで、前記復路からの冷媒を外部に排出する冷媒流出口と、
前記貫通孔と回転対陰極の中空軸部の間の空間のうち、前記軸受よりも真空ケース内側に位置する箇所に配設されて、前記ハウジングと回転対陰極の間の隙間をシールする真空シールと、
前記貫通孔と回転対陰極の中空軸部の間の空間のうち、前記軸受よりも真空ケース外側に位置する箇所に配設されて、前記ハウジングと回転対陰極の間の隙間をシールする冷媒シールと、
を有するＸ線発生装置において、
前記ハウジングの貫通孔の後端にシールキャップが着脱可能に液密状態で嵌合されており、そのシールキャップに前記冷媒シールが取り付けられると共に、該シールキャップに、前記ハウジングに形成された冷媒流入口を前記往路に連通させる流入側連通路と、前記ハウジングに形成された冷媒流出口を前記復路に連通させる流出側連通路とが設けられていることを特徴とするＸ線発生装置。
（２）上記（１）の構成において、
前記シールキャップの軸方向の前部に、前記冷媒シールの外周を着脱自在に嵌合するシール嵌合孔が設けられ、そのシール嵌合孔より軸方向の後側に、前記流入側連通路と流出側連通路とが互いに流路を分けて設けられていることを特徴とする請求項１に記載のＸ線発生装置。
（３）上記（２）の構成において、
前記セパレータ部材は、
後端が前記シールキャップに固定されて前記回転対陰極の中空軸部の内部に同心状に挿入されることで、前記中空軸部の内部の前記冷媒流路を、前記管状軸部の内側の流路と外側の流路とに仕切り、前記内側の流路及び外側の流路のいずれか一方を前記往路とし他方を前記復路とする管状軸部を有しており、
前記シールキャップのシール嵌合孔より軸方向の後側に、前記管状軸部の外周の嵌まる軸部嵌合孔が設けられ、
前記軸部嵌合孔の内壁面に、前記流入側連通路と流出側連通路のうちの一方の開口が設けられ、
前記軸部嵌合孔と前記シール嵌合孔に嵌合される冷媒シールとの間に位置するシールキャップの内壁面に、前記流入側連通路と流出側連通路のうちの他方の開口が設けられていることを特徴とする請求項２に記載のＸ線発生装置。
（４）上記（１）〜（３）のいずれかの構成において、
前記電動機が、前記ハウジングの前端部と前記対陰極部との間に配設されており、対陰極部側にロータが設けられ、前記ハウジングの前端部側に、前記ロータを回転させるためのコイルが設けられていることを特徴とする請求項１〜３のいずれか１項に記載のＸ線発
生装置。 The above object of the present invention is achieved by the following configurations.
(1) a housing attached so that a front end side which is one end in the axial direction faces the inside of the vacuum case and a rear end side which is the other end in the axial direction faces the outside of the vacuum case;
A through hole formed in the housing along the axial direction;
A bearing provided on the inner periphery of the through hole;
The hollow shaft portion is inserted into the through hole and is rotatably supported by the bearing, and the front end portion of the hollow shaft portion is inserted into the vacuum case and irradiated with thermionic electrons to receive X-rays. A rotating counter cathode provided integrally with a counter cathode portion for generating
An electric motor for rotationally driving the rotating anti-cathode;
A refrigerant flow path formed inside the rotating counter cathode and through which a refrigerant for cooling the counter cathode portion and the hollow shaft portion flows;
A separator member that is concentrically inserted into at least the hollow shaft portion of the rotating counter-cathode and partitions the refrigerant flow path into a forward path and a return path;
Formed in the housing and connected to an external refrigerant supply pipe, whereby a refrigerant inlet for allowing the refrigerant to flow into the forward path;
A refrigerant outlet that is formed in the housing and connected to an external refrigerant discharge pipe to discharge the refrigerant from the return path to the outside;
A vacuum seal that seals a gap between the housing and the rotating counter-cathode, which is disposed in a space between the through hole and the hollow shaft portion of the rotating counter-cathode and located inside the vacuum case with respect to the bearing. When,
A refrigerant seal that is disposed in a space between the through hole and the hollow shaft portion of the rotating anti-cathode and located outside the vacuum case with respect to the bearing, and seals a gap between the housing and the rotating anti-cathode. When,
In an X-ray generator having
A seal cap is detachably fitted to the rear end of the through hole of the housing, and the refrigerant seal is attached to the seal cap, and a refrigerant flow formed in the housing is attached to the seal cap. An X-ray generating apparatus, comprising: an inflow side communication path that communicates an inlet with the forward path; and an outflow side communication path that communicates a refrigerant outlet formed in the housing with the return path.
(2) In the configuration of (1) above,
A seal fitting hole for detachably fitting the outer periphery of the refrigerant seal is provided in the axial front portion of the seal cap, and the inflow side communication path is provided on the rear side in the axial direction from the seal fitting hole. The X-ray generator according to claim 1, wherein the outflow side communication passage is provided with a separate flow path.
(3) In the configuration of (2) above,
The separator member is
A rear end is fixed to the seal cap and is inserted concentrically into the hollow shaft portion of the rotating anti-cathode, so that the refrigerant flow path inside the hollow shaft portion is placed inside the tubular shaft portion. Partitioning into a flow path and an outer flow path, and having a tubular shaft portion with one of the inner flow path and the outer flow path as the forward path and the other as the return path,
On the rear side in the axial direction from the seal fitting hole of the seal cap, there is provided a shaft fitting hole on which the outer periphery of the tubular shaft is fitted,
One opening of the inflow side communication path and the outflow side communication path is provided on the inner wall surface of the shaft portion fitting hole,
The other opening of the inflow side communication path and the outflow side communication path is provided on the inner wall surface of the seal cap positioned between the shaft portion fitting hole and the refrigerant seal fitted in the seal fitting hole. The X-ray generator according to claim 2, wherein the X-ray generator is provided.
(4) In any one of the constitutions (1) to (3),
The electric motor is disposed between a front end portion of the housing and the counter cathode portion, a rotor is provided on the counter cathode portion side, and a coil for rotating the rotor on the front end portion side of the housing The X-ray generator according to claim 1, wherein the X-ray generator is provided.

本発明は、次の効果を奏する。
（１）の構成によれば、ハウジングの貫通孔の後端にシールキャップを着脱自在に嵌合させ、そのシールキャップに冷媒シールを取り付けているので、真空ケースの真空状態を保持したまま、また、ハウジングに形成してある冷媒流入口と冷媒流出口に外部の冷媒供給管や冷媒排出管を接続した状態のまま、冷媒シールを交換することができる。しかも、ハウジング自体はばらさないでよいので、簡単に且つ光学系への影響を及ぼさずに冷媒シールの交換を行うことができる。また、シールキャップに流入側連通路及び流出側連通路を設けることにより、冷媒の流路（往路と復路）の振り分け機能を持たせているので、流路の複雑な構成をシールキャップに集約することができ、他の部品の構造のシンプル化が図れる。
（２）の構成によれば、シールキャップに着脱自在に冷媒シールを嵌合させているので、シールキャップをハウジングから取り外すことで、冷媒シールだけを簡単に交換することができる。
（３）の構成によれば、シールキャップのシール嵌合孔に冷媒シールを嵌合させ、シールキャップの軸部嵌合孔にセパレータ部材の管状軸部を嵌合させることより、冷媒流路の往路と復路を構成する管状軸部の内側の流路と外側の流路に、シールキャップ内のそれぞれの連通路を容易に連通させることができ、組み付けの容易化が図れる。
（４）の構成によれば、ハウジングの前端部に電動機が設けられているので、ハウジングの後部の構成を単純化することができ、シールキャップの取付条件を楽に設定することができる。 The present invention has the following effects.
According to the configuration of (1), the seal cap is detachably fitted to the rear end of the through hole of the housing, and the refrigerant seal is attached to the seal cap, so that the vacuum state of the vacuum case is maintained. The refrigerant seal can be exchanged while the external refrigerant supply pipe and the refrigerant discharge pipe are connected to the refrigerant inlet and the refrigerant outlet formed in the housing. In addition, since the housing itself does not need to be separated, the refrigerant seal can be replaced easily and without affecting the optical system. In addition, since the inflow side communication path and the outflow side communication path are provided in the seal cap, the refrigerant flow path (forward path and return path) distribution function is provided, so the complicated configuration of the flow path is concentrated in the seal cap. It is possible to simplify the structure of other parts.
According to the configuration of (2), since the refrigerant seal is detachably fitted to the seal cap, only the refrigerant seal can be easily replaced by removing the seal cap from the housing.
According to the configuration of (3), the refrigerant seal is fitted into the seal fitting hole of the seal cap, and the tubular shaft part of the separator member is fitted into the shaft part fitting hole of the seal cap. The respective communication paths in the seal cap can be easily communicated with the flow path on the inner side and the outer flow path of the tubular shaft portion constituting the forward path and the return path, and assembling can be facilitated.
According to the structure of (4), since the electric motor is provided in the front-end part of the housing, the structure of the rear part of a housing can be simplified and the attachment conditions of a seal cap can be set easily.

本発明の実施形態のＸ線発生装置の一部を分解して示す斜視図である。It is a perspective view which decomposes | disassembles and shows a part of X-ray generator of embodiment of this invention. 同Ｘ線発生装置の他の一部を分解して示す斜視図である。It is a perspective view which decomposes | disassembles and shows the other part of the same X-ray generator. 同Ｘ線発生装置の軸方向後側から見た正面図である。It is the front view seen from the axial direction rear side of the X-ray generator. 図３のＩＶ−ＩＶ矢視断面図である。FIG. 4 is a cross-sectional view taken along arrow IV-IV in FIG. 3. 図３のＶ−Ｖ矢視断面図である。It is a VV arrow directional cross-sectional view of FIG. 図５のＶＩ−ＶＩ矢視断面図である。It is VI-VI arrow sectional drawing of FIG. （ａ）は図３のＶＩＩａ−ＶＩＩａの矢視断面図、（ｂ）は（ａ）のＶＩＩｂ−ＶＩＩｂの矢視断面図である。(A) is the arrow directional cross-sectional view of VIIa-VIIa of FIG. 3, (b) is the arrow directional cross-sectional view of VIIb-VIIb of (a). 同Ｘ線発生装置の導電ブラシカセットの構成図で、（ａ）は斜視図、（ｂ）は別の角度から見た斜視図、（ｃ）は断面図、（ｄ）はカセット取付状態における導電ブラシの形態を示す図である。FIG. 2 is a configuration diagram of a conductive brush cassette of the X-ray generator, where (a) is a perspective view, (b) is a perspective view seen from another angle, (c) is a cross-sectional view, and (d) is a conductive state in a cassette mounting state. It is a figure which shows the form of a brush. 同Ｘ線発生装置のシールキャップの構成図で、（ａ）は斜視図、（ｂ）は別の角度から見た斜視図、（ｃ）は（ａ）のＩＸｃ−ＩＸｃ矢視断面図、（ｄ）は（ｃ）のＩＸｃ−ＩＸｃ矢視断面図である。It is a block diagram of the seal cap of the X-ray generator, (a) is a perspective view, (b) is a perspective view seen from another angle, (c) is a cross-sectional view taken along arrow IXc-IXc in (a), ( d) is a sectional view taken along arrow IXc-IXc in (c). 本発明の実施形態のＸ線発生装置の原理構成を示す断面図である。It is sectional drawing which shows the principle structure of the X-ray generator of embodiment of this invention. 従来のＸ線発生装置の断面図である。It is sectional drawing of the conventional X-ray generator. 従来のＸ線発生装置の一部を分解して示す外観斜視図である。It is an external appearance perspective view which decomposes | disassembles and shows a part of conventional X-ray generator.

以下、本発明の実施形態のＸ線発生装置を説明する。
図１〜図１０は本発明の実施形態のＸ線発生装置の説明図で、図１は同Ｘ線発生装置の一部を分解して示す斜視図、図２は同Ｘ線発生装置の他の一部を分解して示す斜視図、図３は同Ｘ線発生装置の軸方向後側から見た正面図、図４は図３のＩＶ−ＩＶ矢視断面図、図５は図３のＶ−Ｖ矢視断面図、図６は図５のＶＩ−ＶＩ矢視断面図、図７（ａ）は図３のＶＩＩａ−ＶＩＩａの矢視断面図、（ｂ）は（ａ）のＶＩＩｂ−ＶＩＩｂの矢視断面図
、図８は同Ｘ線発生装置の導電ブラシカセットの構成図で、（ａ）は斜視図、（ｂ）は別の角度から見た斜視図、（ｃ）は断面図、（ｄ）はカセット取付状態における導電ブラシの形態を示す図、図９は同Ｘ線発生装置のシールキャップの構成図で、（ａ）は斜視図、（ｂ）は別の角度から見た斜視図、（ｃ）は（ａ）のＩＸｃ−ＩＸｃ矢視断面図、（ｄ）は（ｃ）のＩＸｃ−ＩＸｃ矢視断面図、図１０は同Ｘ線発生装置の原理構成を示す断面図である。 Hereinafter, an X-ray generator according to an embodiment of the present invention will be described.
1 to 10 are explanatory diagrams of an X-ray generator according to an embodiment of the present invention. FIG. 1 is an exploded perspective view showing a part of the X-ray generator. FIG. FIG. 3 is a front view of the X-ray generator as viewed from the rear side in the axial direction, FIG. 4 is a sectional view taken along the line IV-IV in FIG. 3, and FIG. 6 is a sectional view taken along the line VI-VI in FIG. 5, FIG. 7A is a sectional view taken along the line VIIa-VIIa in FIG. 3, and FIG. 6B is a sectional view taken along the line VIIb- in FIG. FIG. 8 is a configuration diagram of a conductive brush cassette of the X-ray generator, (a) is a perspective view, (b) is a perspective view seen from another angle, and (c) is a sectional view. FIGS. 9A and 9D are views showing the shape of the conductive brush in the cassette mounting state, FIG. 9 is a configuration diagram of the seal cap of the X-ray generator, FIG. 9A is a perspective view, and FIG. 9B is seen from another angle. Perspective , (C) is a sectional view taken along arrow IXc-IXc in (a), (d) is a sectional view taken along arrow IXc-IXc in (c), and FIG. 10 is a sectional view showing the basic configuration of the X-ray generator. .

ここでは、図１〜図９に示す具体的な構成のＸ線発生装置の説明に先だって、理解を容易にするために、図１０を参照しながら実施形態のＸ線発生装置の原理構成について説明する。なお、図１０中の（）内の符号は、図１〜図９において示す具体的な要素（後述）と対応していることを示している。 Here, prior to the description of the X-ray generator having the specific configuration shown in FIGS. 1 to 9, the principle configuration of the X-ray generator of the embodiment will be described with reference to FIG. 10 in order to facilitate understanding. To do. In addition, the code | symbol in () in FIG. 10 has shown corresponding with the concrete element (after-mentioned) shown in FIGS.

図１０に示すように、このＸ線発生装置Ｍは、軸方向の一端である前端側（Ｆ）が真空ケース内Ａに臨み、軸方向の他端である後端側（Ｂ）が真空ケース外Ｂに臨むように取り付けられるハウジング１０００と、ハウジング１０００に軸方向に沿って形成された貫通孔１００２と、この貫通孔１００２の内周に装備された軸受１００４と、前記貫通孔１００２内に挿入され、軸受１００４によって回転自在に支持された中空軸部１００６を有すると共に、中空軸部１００６の前端部に、真空ケース内Ａに挿入されて熱電子の照射を受けることによりＸ線を発生する対陰極部１００８が一体に設けられた回転対陰極１０１０と、回転対陰極１０１０を回転駆動する電動機（図示略）と、回転対陰極１０１０の内部に形成され、対陰極部１０１０と中空軸部１００６とを冷却するための冷媒を流通させる冷媒流路１０１２と、回転対陰極１０１０の少なくとも中空軸部１００６の内部に同心状に挿入されて、冷媒流路１０１２を往路１０１４と復路１０１６に仕切るセパレータ部材１０１８と、ハウジング１０００に形成され、外部の冷媒供給管に接続されることで、往路１０１４に冷媒を流入させる冷媒流入口１０２０と、ハウジング１０００に形成され、外部の冷媒排出管に接続されることで、復路１０１６からの冷媒を外部に排出する冷媒流出口１０２２と、ハウジング１０００内の貫通孔１００２と回転対陰極１０１０の中空軸部１００６の間の空間のうち、軸受１００４よりも真空ケース内Ａ側に位置する箇所に配設されて、ハウジング１０００と回転対陰極１０１０の間の隙間をシールする真空シール１０２４と、貫通孔１００２と回転対陰極１０１０の中空軸部１００６の間の空間のうち、軸受１００４よりも真空ケース外Ｂ側に位置する箇所に配設されて、ハウジング１０００と回転対陰極１０１０の間の隙間をシールする冷媒シール１０２６と、回転対陰極１０１０の外周に摺動接触することで、回転対陰極１０１０からハウジング１０００に電流を逃がす導電ブラシ１０２８と、を有している。 As shown in FIG. 10, the X-ray generator M has a front end side (F) that is one end in the axial direction facing the inside A of the vacuum case, and a rear end side (B) that is the other end in the axial direction. A housing 1000 mounted so as to face the outer side B, a through hole 1002 formed in the housing 1000 along the axial direction, a bearing 1004 provided on the inner periphery of the through hole 1002, and inserted into the through hole 1002 And a hollow shaft portion 1006 rotatably supported by a bearing 1004, and inserted into the vacuum case A at the front end portion of the hollow shaft portion 1006 to receive X-rays when irradiated with thermoelectrons. A rotating counter cathode 1010 integrally provided with a cathode portion 1008, an electric motor (not shown) for rotating the rotating counter cathode 1010, and an inside of the rotating counter cathode 1010 are formed. A coolant channel 1012 for circulating a coolant for cooling the hollow shaft portion 1006, and a concentric insertion into at least the hollow shaft portion 1006 of the rotating anti-cathode 1010, the coolant channel 1012 through the forward path 1014 and the return path 1016. The separator member 1018 is divided into a housing 1000, and is connected to an external refrigerant supply pipe so that the refrigerant is introduced into the forward path 1014. The refrigerant inlet 1020 is formed in the housing 1000 and is connected to the external refrigerant discharge pipe. By being connected, the refrigerant outlet 1022 for discharging the refrigerant from the return path 1016 to the outside, and the space between the through hole 1002 in the housing 1000 and the hollow shaft portion 1006 of the rotating anti-cathode 1010 than the bearing 1004. It is arrange | positioned in the location located in the vacuum case A side, and between the housing 1000 and the rotation counter-cathode 1010. Among the spaces between the vacuum seal 1024 that seals the gap and the hollow shaft portion 1006 of the through hole 1002 and the rotating counter cathode 1010, the housing 1000 And a refrigerant seal 1026 that seals the gap between the rotating counter cathode 1010 and a conductive brush 1028 that allows the current to flow from the rotating counter cathode 1010 to the housing 1000 by sliding contact with the outer periphery of the rotating counter cathode 1010. ing.

この場合、本実施形態の第１の特徴的な点として、ハウジング１０００の胴部には、ハウジング１０００の外表面から貫通孔１００２の内部に臨むブラシ取付窓１０３０が設けられており、そのブラシ取付窓１０３０に、複数の導電ブラシ１０２８を一体に具備した導電ブラシカセット１０３２が着脱自在に装着されている。 In this case, as a first characteristic point of the present embodiment, the body portion of the housing 1000 is provided with a brush attachment window 1030 facing the inside of the through hole 1002 from the outer surface of the housing 1000. A conductive brush cassette 1032 integrally including a plurality of conductive brushes 1028 is detachably attached to the window 1030.

また、第２の特徴的な点として、ハウジング１０００の貫通孔１００２の後端にはシールキャップ１０３６が着脱可能に液密状態で嵌合されており、そのシールキャップ１０３６に冷媒シール１０２６が取り付けられると共に、シールキャップ１０３６に、ハウジング１０００に形成された冷媒流入口１０２０を往路１０１４に連通させる流入側連通路１０３８と、ハウジング１０００に形成された冷媒流出口１０２２を復路１０１６に連通させる流出側連通路１０４０とが設けられている。 Further, as a second characteristic point, a seal cap 1036 is detachably fitted in the rear end of the through hole 1002 of the housing 1000 in a liquid-tight state, and the refrigerant seal 1026 is attached to the seal cap 1036. In addition, an inflow side communication passage 1038 that connects the refrigerant inlet 1020 formed in the housing 1000 to the forward path 1014 and an outflow side communication path that connects the refrigerant outlet 1022 formed in the housing 1000 to the return path 1016 to the seal cap 1036. 1040 is provided.

次に、そのような原理構成を盛り込んだ具体的な構成のＸ線発生装置Ｍの詳細について図１〜図９を参照しながら説明する。 Next, details of the X-ray generator M having a specific configuration incorporating such a principle configuration will be described with reference to FIGS.

このＸ線発生装置Ｍは、回転対陰極１と、それを回転自在に支持するハウジング１０、２０とを有している。ハウジングは、軸方向の一端である前端側（図中左端側）が真空ケース内Ａに臨み、軸方向の他端である後端側（図中右端側）が真空ケース外Ｂに臨むように真空ケースのケース壁５００に取り付けられるもので、前側ハウジング１０と後側ハウジング２０に二分割されており、前側ハウジング１０に設けたフランジ１１により、真空ケースのケース壁５００に取り付けられるようになっている。 The X-ray generator M includes a rotating anti-cathode 1 and housings 10 and 20 that rotatably support the cathode. The housing is such that the front end side (left end side in the figure) which is one end in the axial direction faces the inside A of the vacuum case, and the rear end side (right end side in the figure) which is the other end in the axial direction faces the outside B of the vacuum case. It is attached to the case wall 500 of the vacuum case and is divided into a front housing 10 and a rear housing 20 and is attached to the case wall 500 of the vacuum case by a flange 11 provided on the front housing 10. Yes.

図４に示すように、前側ハウジング１０及び後側ハウジング２０には、それぞれ軸方向に沿って貫通孔１３、２３が形成されており、前側ハウジング１０の貫通孔１３の内周には、該貫通孔１３の内周に嵌合された円筒状スリーブ部材１４を介して、前後方向に相互に離間して前側軸受６と後側軸受７が装備されている。円筒状スリーブ部材１４を介在させる理由は、円筒状スリーブ部材１４の外周面と前側ハウジング１０の貫通孔１３の内周面との間に、冷媒の流れる環状流路７３（後述）を確保するためである。 As shown in FIG. 4, through holes 13 and 23 are formed in the front housing 10 and the rear housing 20 along the axial direction, respectively. A front bearing 6 and a rear bearing 7 are provided spaced apart from each other in the front-rear direction via a cylindrical sleeve member 14 fitted to the inner periphery of the hole 13. The reason for interposing the cylindrical sleeve member 14 is to ensure an annular flow path 73 (described later) through which the refrigerant flows between the outer peripheral surface of the cylindrical sleeve member 14 and the inner peripheral surface of the through hole 13 of the front housing 10. It is.

また、前側軸受６及び後側軸受７としては、例えば、内輪と外輪と転動体の少なくともいずれかの部品が絶縁材料（セラミック等）で構成された絶縁ベアリングが使用されている。なお、前側軸受６と後側軸受７の間には、それらの相互間隔を保つための外周側及び内周側の各スペーサ８、９が配置されている。 In addition, as the front bearing 6 and the rear bearing 7, for example, an insulating bearing in which at least one of the inner ring, the outer ring, and the rolling element is made of an insulating material (ceramic or the like) is used. In addition, between the front bearing 6 and the rear bearing 7, spacers 8 and 9 on the outer peripheral side and the inner peripheral side for maintaining the mutual distance are arranged.

前側ハウジング１０と後側ハウジング２０は、前側ハウジング１０の後端の合わせ面１５と後側ハウジング２０の前端の合わせ面２５をパッキン１８を介して互いに合わせ、その状態で図示しないボルトにより結合されることで一体化されている。 The front housing 10 and the rear housing 20 are joined together by a bolt (not shown) in which the mating surface 15 at the rear end of the front housing 10 and the mating surface 25 at the front end of the rear housing 20 are aligned with each other via the packing 18. Is integrated.

回転対陰極１は、貫通孔１３、２３内に挿入されて前側軸受６及び後側軸受７により回転自在に支持された中空軸部３と、その中空軸部３の前端部に一体に設けられ、真空ケース内Ａに挿入されて、外周の対陰極面２ａに電子銃５１０から発せられた熱電子５１２の照射を受けることによりＸ線５１４を発生する円筒型の対陰極部２とを有するものである。 The rotating anti-cathode 1 is provided integrally with the hollow shaft portion 3 inserted into the through holes 13 and 23 and rotatably supported by the front bearing 6 and the rear bearing 7, and the front end portion of the hollow shaft portion 3. A cylindrical counter-cathode portion 2 that generates X-rays 514 by being irradiated with thermoelectrons 512 emitted from the electron gun 510 onto the outer counter-cathode surface 2a by being inserted into the vacuum case A It is.

この回転対陰極１の対陰極部２と前側ハウジング１０の前端部との間には、回転対陰極１を回転駆動するための電動機４が配設されており、対陰極部２側に永久磁石からなるロータ４ａが設けられ、前側ハウジング１０の前端部側に、ロータ４ａに回転力を与えるためのコイル４ｂが設けられている。 An electric motor 4 for rotationally driving the rotating counter cathode 1 is disposed between the counter cathode portion 2 of the rotating counter cathode 1 and the front end portion of the front housing 10, and a permanent magnet is provided on the counter cathode portion 2 side. And a coil 4b for applying a rotational force to the rotor 4a is provided on the front end side of the front housing 10.

また、回転対陰極２の内部には、対陰極部２と中空軸部３とを冷却するための冷媒を流通させる冷媒流路が設けられ、その冷媒通路は、回転対陰極１の内部に同心状に挿入されたセパレータ部材６０により、往路７７と復路８１の２つの流路に仕切られている。往路７７は、最も高温化する対陰極部２に冷媒を流入させる流入側通路７０の一部を構成する部分、復路８１は、対陰極部２の冷媒を外部に向けて流出させる流出側通路８０の一部を構成する部分である。 In addition, inside the rotating counter cathode 2, there is provided a coolant channel for circulating a coolant for cooling the counter cathode portion 2 and the hollow shaft portion 3, and the coolant passage is concentric with the inside of the rotating counter cathode 1. The separator member 60 inserted in a shape is partitioned into two flow paths, an outward path 77 and a return path 81. The forward path 77 constitutes a part of the inflow side passage 70 for allowing the refrigerant to flow into the counter-cathode part 2 that is at the highest temperature, and the return path 81 is an outflow side passage 80 for allowing the refrigerant of the counter-cathode part 2 to flow outward It is a part which comprises a part of.

セパレータ部材６０は、対陰極部１の内部を効率良く冷媒が流れるように２つの流路空間に仕切るディスク状部６１を前端に有し、その後側に、ディスク状部６１の中心部から後方に垂直に延びる管状軸部６２を有するものであり、管状軸部６２の後端が後側ハウジング２０の後端部に固定されることで、回転対陰極１の内部に支持されている。そして、セパレータ部材６０の管状軸部６２は、回転対陰極１の中空軸部３の内部に同心状に挿入されていることで、中空軸部３の内部の冷媒流路を、管状軸部６２の内側の流路と外側の流路とに仕切っている。ここでは、管状軸部６２の外側の流路が往路７７として設定され、管状流路６２の外側の流路が復路８１として設定されている。 The separator member 60 has a disk-like part 61 that partitions into two flow path spaces at the front end so that the refrigerant efficiently flows inside the counter-cathode part 1, and on the rear side from the center part of the disk-like part 61 to the rear. The tubular shaft portion 62 extends vertically, and the rear end of the tubular shaft portion 62 is fixed to the rear end portion of the rear housing 20 so as to be supported inside the rotating cathode 1. The tubular shaft portion 62 of the separator member 60 is inserted concentrically inside the hollow shaft portion 3 of the rotating anti-cathode 1, so that the coolant channel inside the hollow shaft portion 3 is connected to the tubular shaft portion 62. Is divided into an inner channel and an outer channel. Here, the flow path outside the tubular shaft portion 62 is set as the forward path 77, and the flow path outside the tubular flow path 62 is set as the return path 81.

また、後側ハウジング２０には、外部の冷媒供給管に接続されることで、中空軸部３内の往路７７に向けて冷媒を流入させる冷媒流入口７０Ａと、外部の冷媒排出管に接続されることで、中空軸部３内の復路からの冷媒を外部に排出する冷媒流出口８０Ａとが設けられている。これらの冷媒流入口７０Ａ及び冷媒排出口８０Ａは、前側ハウジング１０内及び後側ハウジング２０内に形成された内部流路７１〜７５、８３を介して、中空軸部３内の往路７７及び復路８１にそれぞれ接続されている。この冷媒の流れる流路については、後で詳しく述べる。 Further, the rear housing 20 is connected to an external refrigerant supply pipe, so that the rear housing 20 is connected to a refrigerant inlet 70A through which the refrigerant flows into the forward path 77 in the hollow shaft portion 3 and an external refrigerant discharge pipe. Thus, a refrigerant outlet 80A for discharging the refrigerant from the return path in the hollow shaft portion 3 to the outside is provided. The refrigerant inlet 70A and the refrigerant outlet 80A are connected to the forward path 77 and the return path 81 in the hollow shaft portion 3 through internal flow paths 71 to 75 and 83 formed in the front housing 10 and the rear housing 20, respectively. Are connected to each. The flow path through which this refrigerant flows will be described in detail later.

また、貫通孔１３、２３と回転対陰極１の中空軸部３の間の空間のうち、前側軸受６よりも真空ケース内Ａ側に位置する箇所には、前側ハウジング１０と回転対陰極１の間の隙間を気密シールする真空シール５が配設されている。真空シール５としては、磁力で保持した磁性流体によりシール性能を保持する磁気シールが採用されている。 Further, in the space between the through holes 13 and 23 and the hollow shaft portion 3 of the rotating anti-cathode 1, the front housing 10 and the rotating anti-cathode 1 are located in a position located on the A side in the vacuum case with respect to the front bearing 6. A vacuum seal 5 is provided to hermetically seal the gap between them. As the vacuum seal 5, a magnetic seal that retains sealing performance with a magnetic fluid held by magnetic force is employed.

また、貫通孔１３、２３と回転対陰極１の中空軸部３の間の空間のうち、後側軸受７よりも真空ケース外Ｂ側に位置する箇所には、後側ハウジング２０と回転対陰極１の中空軸部３との間の隙間を液密シールする冷媒シール５０が配設されている。この冷媒シール５０の取付の詳細については後で述べる。 Further, in the space between the through-holes 13 and 23 and the hollow shaft portion 3 of the rotating counter cathode 1, the rear housing 20 and the rotating counter cathode are positioned at a position located on the B-case outer side of the rear bearing 7. A refrigerant seal 50 is provided for liquid-tightly sealing a gap between the first hollow shaft portion 3 and the hollow shaft portion 3. Details of the attachment of the refrigerant seal 50 will be described later.

また、図５に示すように、回転部分である回転対陰極１と固定部分であるハウジング１０、２０の間には、回転対陰極１側からハウジング１０、２０側に電流を逃がすための導電ブラシ１２０（例えばカーボンブラシ）が配設されている。この場合、図２に示すように、取付状態において真空ケース外Ｂに位置する後側ハウジング２０の胴部に、導電ブラシカセット１００に搭載された形で、複数の導電ブラシ１２０がハウジング１０、２０の外部から交換できるように配設されている。 Further, as shown in FIG. 5, a conductive brush for releasing current from the rotating anti-cathode 1 side to the housing 10, 20 side is provided between the rotating anti-cathode 1 as the rotating part and the housings 10 and 20 as the fixed parts. 120 (for example, carbon brush) is disposed. In this case, as shown in FIG. 2, a plurality of conductive brushes 120 are mounted in the housings 10, 20 in the form of being mounted on the conductive brush cassette 100 on the body portion of the rear housing 20 located outside the vacuum case B in the attached state. It is arranged so that it can be exchanged from the outside.

即ち、後側ハウジング２０の胴部外周の周方向の１箇所にはフラット面２６が形成され、そのフラット面２６に一段低くして形成されたカセット取付座２７にブラシ取付窓２８が設けられている。このブラシ取付窓２８は、後側軸受７と冷媒シール５０との間に位置する後側ハウジング２０の胴部に配置され、後側ハウジング２０の外表面から貫通孔２３の内部に臨むように設けられており、そのブラシ取付窓２８に、複数の導電ブラシ１２０を一体に具備した導電ブラシカセット１００が着脱自在に装着されている。 That is, a flat surface 26 is formed at one circumferential position on the outer periphery of the body portion of the rear housing 20, and a brush mounting window 28 is provided on a cassette mounting seat 27 that is formed one step lower on the flat surface 26. Yes. The brush mounting window 28 is disposed on the body portion of the rear housing 20 located between the rear bearing 7 and the refrigerant seal 50 and is provided so as to face the inside of the through hole 23 from the outer surface of the rear housing 20. A conductive brush cassette 100 integrally including a plurality of conductive brushes 120 is detachably attached to the brush mounting window 28.

ここで、導電ブラシ１２０及び冷媒シール５０は、共にハウジング２０側に固定された状態で、回転対陰極１の中空軸部３の外周面に対して摺接するものであるが、本実施形態では、これら導電ブラシ１２０及び冷媒シール５０が摺接する対象の摺接面は、中空軸部３の外周面に直接確保するのではなく、中空軸部３の後端に嵌合固定した摺動対象リング部材３０上に確保している。つまり、摺動対象リング部材３０にシール摺動円筒部３１とブラシ摺動円筒部３２とを設け、それら各円筒部３１、３２の外周面に摺動面を確保している。特にシール摺動円筒部３１の外周面には、耐摺動性を増すためにセラミックが溶射されている。 Here, the conductive brush 120 and the refrigerant seal 50 are slidably in contact with the outer peripheral surface of the hollow shaft portion 3 of the rotating anti-cathode 1 while being fixed to the housing 20 side. The sliding contact surface to which the conductive brush 120 and the refrigerant seal 50 are slidably contacted is not directly secured to the outer peripheral surface of the hollow shaft portion 3, but is fitted and fixed to the rear end of the hollow shaft portion 3. 30 is secured. That is, the seal sliding cylindrical portion 31 and the brush sliding cylindrical portion 32 are provided on the sliding target ring member 30, and a sliding surface is secured on the outer peripheral surface of each of the cylindrical portions 31 and 32. In particular, ceramic is sprayed on the outer peripheral surface of the seal sliding cylindrical portion 31 in order to increase the sliding resistance.

次に導電ブラシカセット１００について詳しく述べる。
図８に示すように、この導電ブラシカセット１００は、回転対陰極１の中空軸部３の周方向に間隔をおいた少なくとも２箇所の位置（本例では、円周方向に約６０°〜９０°離間した２位置）で、摺動対象リング部材３０のブラシ摺動円筒部３２の外周（中空軸部３と導通関係にある）に摺動接触するように設けられた複数（本例では２個）の導電ブラシ１２０と、それぞれに導電ブラシ１２０が先端に取り付けられ、弾性押圧力を持って、導電ブラシ１２０を摺動対象リング部材３０のブラシ摺動円筒部３２の外周に摺動接触させる複数の板バネ１２１と、各板バネ１２１の基端を支持すると共に、後側ハウジング２０に対し着脱自在に設けられ、後側ハウジング２０の胴部のブラシ取付窓２８に外側から装
着固定されることで、板バネ１２１を介して各導電ブラシ１２０を、摺動対象リング部材３０のブラシ摺動円筒部３２の外周（回転対陰極１の中空軸部３の外周に相当する面）に摺動接触させるカセット本体１１０と、から構成されている。 Next, the conductive brush cassette 100 will be described in detail.
As shown in FIG. 8, the conductive brush cassette 100 has at least two positions spaced in the circumferential direction of the hollow shaft portion 3 of the rotating cathode 1 (in this example, about 60 ° to 90 ° in the circumferential direction). A plurality (two in this example) provided to be in sliding contact with the outer periphery of the brush sliding cylindrical portion 32 of the ring member 30 to be slid (in a conductive relationship with the hollow shaft portion 3). ) Conductive brushes 120 are attached to the tips of the respective conductive brushes 120, and the conductive brush 120 is brought into sliding contact with the outer periphery of the brush sliding cylindrical portion 32 of the ring member 30 to be slid with elastic pressing force. The plurality of leaf springs 121 and the base ends of the leaf springs 121 are supported, and are detachably attached to the rear housing 20, and are attached and fixed from the outside to the brush mounting window 28 of the trunk portion of the rear housing 20. With that, leaf spring 12 1, the cassette main body 110 that causes each conductive brush 120 to slide and contact the outer periphery of the brush sliding cylindrical portion 32 of the sliding target ring member 30 (the surface corresponding to the outer periphery of the hollow shaft portion 3 of the rotating cathode 1). And is composed of.

カセット本体１１０は、ブラシ取付座２７にネジ固定されるフランジ板１１１と、その前面にパッキン１１８を介してネジ１１９により固定された挿入ハウジング部１１２とからなる。挿入ハウジング部１１２は、長方形状のブラシ取付窓２８の中に挿入される厚肉板状体であり、後端面１１５がフランジ板１１１と合わせるために平坦面とされ、内周面１１３が、摺動対象リング部材３０のブラシ摺動円筒部３２の外周に対応させた円筒面として形成されている。そして、その円筒面よりなる内周面１１３の中央に、導電ブラシ１２０が露出する略長方形状の開口１１４が設けられている。 The cassette body 110 includes a flange plate 111 that is fixed to the brush mounting seat 27 with a screw, and an insertion housing portion 112 that is fixed to the front surface with a screw 119 via a packing 118. The insertion housing portion 112 is a thick plate-like body that is inserted into the rectangular brush mounting window 28, and the rear end surface 115 is a flat surface to match the flange plate 111, and the inner peripheral surface 113 is a sliding surface. It is formed as a cylindrical surface corresponding to the outer periphery of the brush sliding cylindrical portion 32 of the moving target ring member 30. A substantially rectangular opening 114 through which the conductive brush 120 is exposed is provided at the center of the inner peripheral surface 113 formed of the cylindrical surface.

また、挿入ハウジング部１１２には、複数の板バネ取付座１１６、１１７が設けられており、それら板バネ取付座１１６、１１７に、先端に導電ブラシ１２０を備えた板バネ１２１の基端が、止めピン１２４及び止めネジ１２６により固定されている。そして、図２に示すように、ブラシ取付窓２８にこの導電ブラシカセット１００を固定ネジ１３０を用いて取り付けることにより、図８（ｄ）に示すように、摺動対象リング部材３０のブラシ摺動円筒部３２の外周に、導電ブラシ１２０の端面を、板バネ１２１の付勢力をもって摺動接触させることができるようになっている。 Further, the insertion housing portion 112 is provided with a plurality of leaf spring mounting seats 116, 117, and the leaf spring mounting seats 116, 117 have a base end of a leaf spring 121 having a conductive brush 120 at the tip thereof. It is fixed by a set pin 124 and a set screw 126. Then, as shown in FIG. 2, by attaching the conductive brush cassette 100 to the brush attachment window 28 using a fixing screw 130, as shown in FIG. 8D, the brush sliding of the sliding target ring member 30 is performed. The end surface of the conductive brush 120 can be brought into sliding contact with the urging force of the leaf spring 121 on the outer periphery of the cylindrical portion 32.

次にシールキャップ４０の取付部分について述べる。
図１及び図４に示すように、後側ハウジング２０の貫通孔２３の後端部には、後側ハウジング２０とは別体に構成されたシールキャップ４０が着脱可能に液密状態で嵌合されている。冷媒シール５０は、このシールキャップ４０に着脱可能に取り付けられており、シールキャップ４０を後側ハウジング２０に適正に取り付けることにより、冷媒シール５０のリップ部分が、摺動対象リング部材３０のシール摺動円筒部３１の外周に摺動接触するようになっている。 Next, the attachment part of the seal cap 40 will be described.
As shown in FIGS. 1 and 4, a seal cap 40 configured separately from the rear housing 20 is detachably fitted to the rear end of the through hole 23 of the rear housing 20 in a liquid-tight state. Has been. The refrigerant seal 50 is detachably attached to the seal cap 40. By properly attaching the seal cap 40 to the rear housing 20, the lip portion of the refrigerant seal 50 is sealed with the seal slide of the ring member 30 to be slid. The outer periphery of the moving cylindrical portion 31 is in sliding contact.

また、このシールキャップ４０には、後側ハウジング２０に形成された冷媒流入口７０Ａを往路７７に連通させる流入側連通路４７と、後側ハウジング２０に形成された冷媒流出口８０Ｂを復路８１に連通させる流出側連通路４８とが設けられている。 In addition, the seal cap 40 includes an inflow side communication passage 47 that communicates the refrigerant inlet 70A formed in the rear housing 20 with the forward passage 77, and a refrigerant outlet 80B formed in the rear housing 20 as a return passage 81. An outflow side communication passage 48 for communication is provided.

図９を用いてシールキャップ４０の詳細について述べると、シールキャップ４０の軸方向の前部には、冷媒シール５０の外周を着脱自在に嵌合するシール嵌合孔４１が設けられている。また、そのシール嵌合孔４１より軸方向の後側には、流入側連通路４７と流出側連通路４８とが互いに流路を分けて設けられている。 The details of the seal cap 40 will be described with reference to FIG. 9. A seal fitting hole 41 for removably fitting the outer periphery of the refrigerant seal 50 is provided at the front portion in the axial direction of the seal cap 40. Further, on the rear side in the axial direction from the seal fitting hole 41, an inflow side communication passage 47 and an outflow side communication passage 48 are provided with their flow paths separated from each other.

即ち、シールキャップ４０のシール嵌合孔４１より軸方向の後側には、図４に示すように、セパレータ部材６０の管状軸部６２の外周に嵌まる軸部嵌合孔４２が設けられており、軸部嵌合孔４２の内壁面には、流出側連通路４８の開口が設けられている。そして、シールキャップ４０を後側ハウジング２０の貫通孔２３に適正に装着して、シールキャップ４０の軸部嵌合孔４２をセパレータ部材６０の管状軸部６２の後端に嵌合させることにより、シールキャップ４０内の流出側連通路４８とセパレータ部材６０の管状軸部６２の内部通路（復路８１）とが、管状軸部６２の連通孔６３を介して連通し、同時に、シールキャップ４０内の流出側連通路４８と後側ハウジング２０の冷媒流出口８０Ａとが連通するようになっている。 That is, on the rear side in the axial direction from the seal fitting hole 41 of the seal cap 40, as shown in FIG. 4, a shaft portion fitting hole 42 that fits on the outer periphery of the tubular shaft portion 62 of the separator member 60 is provided. An opening of the outflow side communication passage 48 is provided on the inner wall surface of the shaft portion fitting hole 42. Then, by properly fitting the seal cap 40 to the through hole 23 of the rear housing 20 and fitting the shaft portion fitting hole 42 of the seal cap 40 to the rear end of the tubular shaft portion 62 of the separator member 60, The outflow side communication passage 48 in the seal cap 40 and the internal passage (return path 81) of the tubular shaft portion 62 of the separator member 60 communicate with each other through the communication hole 63 of the tubular shaft portion 62. The outflow side communication passage 48 and the refrigerant outlet 80A of the rear housing 20 communicate with each other.

また、軸部嵌合孔４２と、シール嵌合孔４１に嵌合される冷媒シール５０との間に位置するシールキャップ４０の内壁面には、流入側連通路４７の開口が設けられている。そして、冷媒シール５０をシール嵌合孔４１に嵌め込み、止めリング５２で冷媒シール５０を
抜け止め固定した状態のシールキャップ４０を後側ハウジング２０の貫通孔２３に適正に装着することにより、シールキャップ４０内の流入側連通路４７とセパレータ部材６０の管状軸部６２の外部通路（往路７７）とが連通し、同時に、シールキャップ４０内の流入側連通路４７と後側ハウジング２０の冷媒流入口７０Ａとが連通するようになっている。 An opening of the inflow side communication passage 47 is provided on the inner wall surface of the seal cap 40 located between the shaft portion fitting hole 42 and the refrigerant seal 50 fitted in the seal fitting hole 41. . Then, the refrigerant seal 50 is fitted into the seal fitting hole 41, and the seal cap 40 in a state in which the refrigerant seal 50 is prevented from coming off and fixed by the retaining ring 52 is properly attached to the through-hole 23 of the rear housing 20, thereby the seal cap. 40 and the external passage (outward passage 77) of the tubular shaft portion 62 of the separator member 60 communicate with each other, and at the same time, the inflow side communication passage 47 in the seal cap 40 and the refrigerant inlet of the rear housing 20 70A communicates.

このような連通関係を保つためには、シールキャップ４０を周方向に位置決めしながら後側ハウジング２０の貫通孔２３に嵌合しなければならないし、セパレータ部材６０の環状軸部６２の後端に嵌合しなけらればならない。そこで、シールキャップ４０には、図１、図９に示すように、位置決め用の切欠４４が形成されたフランジ４３が設けられており、フランジ４３には、シールキャップ取付ネジ６９でハウジング２０に固定するための耳部４３ａが設けられている。また、シールキャップ４０の後端開口には、フランジ４３の切欠４４に嵌まる位置決め凸部６５ａと、セパレータ部材６０の管状軸部６２の後端の切欠６２ａに嵌まる位置決め突片６５ｂとを有した位置決め板６５が、エンドプレート６６を用いて固定されている。 In order to maintain such a communication relationship, the seal cap 40 must be fitted in the through hole 23 of the rear housing 20 while being positioned in the circumferential direction, and at the rear end of the annular shaft portion 62 of the separator member 60. Must be mated. Therefore, as shown in FIGS. 1 and 9, the seal cap 40 is provided with a flange 43 in which a positioning notch 44 is formed. The flange 43 is fixed to the housing 20 with a seal cap mounting screw 69. The ear | edge part 43a for doing is provided. Further, the rear end opening of the seal cap 40 has a positioning convex portion 65a that fits into the notch 44 of the flange 43, and a positioning protrusion 65b that fits into the notch 62a at the rear end of the tubular shaft portion 62 of the separator member 60. The positioning plate 65 is fixed using an end plate 66.

そして、フランジ４３の耳部４３ａでシールキャップ４０をハウジング２０に固定し、フランジ４３の切欠４４に位置決め板６５の位置決め凸部６５ａを係合し、位置決め板６５の位置決め突片６５ｂをセパレータ部材６０の管状軸部６２の切欠６２ａに係合した状態で、位置決め板６５をエンドプレート６６で固定することにより、ハウジング２０に対するシールキャップ４０の周方向の位置と、シールキャップ４０とセパレータ部材６０の管状軸部６２の周方向の位置が決まるようになっている。 The seal cap 40 is fixed to the housing 20 by the ear 43a of the flange 43, the positioning projection 65a of the positioning plate 65 is engaged with the notch 44 of the flange 43, and the positioning protrusion 65b of the positioning plate 65 is connected to the separator member 60. The positioning plate 65 is fixed by the end plate 66 in a state of being engaged with the notch 62a of the tubular shaft portion 62, so that the circumferential position of the seal cap 40 relative to the housing 20 and the tubular shape of the seal cap 40 and the separator member 60 are obtained. The position in the circumferential direction of the shaft portion 62 is determined.

このように組み立てることで、Ｘ線発生装置Ｍの内部には、冷媒流入口７０Ａから導入した冷媒を装置内で流通させた上で冷媒流出口８０Ａから外部に排出させる一連の冷却ジャケットが形成されている。 By assembling in this way, a series of cooling jackets are formed in the X-ray generator M so that the refrigerant introduced from the refrigerant inlet 70A is circulated in the apparatus and discharged from the refrigerant outlet 80A to the outside. ing.

そして、図４及び図７中に矢印で示すように、この冷却ジャケットのうち、主に流入側として区分される流路７０を流れる冷媒は、後側ハウジング２０の冷媒流入口７０Ａ→後側ハウジング２０の一方の内部流路７１→前側ハウジング１０の一方の内部流路７２→円筒状スリーブ部材１４の外周に確保された環状流路７３→前側ハウジング１０の他方の内部流路７４→後側ハウジング２０の他方の内部流路７５→シールキャップ４０内の流路７６（流入側連通路４７）→回転対陰極１の中空軸部３の内周とセパレータ部材６０の管状軸部６２の外周間の流路（往路）７７の順に通過して、対陰極部２内の流路７８、７９に到達し、この間に中区軸部３や軸受６、７の周辺や対陰極部２などを冷却する。 As shown by arrows in FIGS. 4 and 7, the refrigerant flowing through the flow path 70 which is mainly classified as the inflow side in the cooling jacket is the refrigerant inlet 70 </ b> A of the rear housing 20 → the rear housing. 20, one internal flow path 71 → one internal flow path 72 of the front housing 10 → an annular flow path 73 secured on the outer periphery of the cylindrical sleeve member 14 → the other internal flow path 74 of the front housing 10 → the rear housing. 20 between the other inner flow path 75 → the flow path 76 (inflow side communication path 47) in the seal cap 40 → between the inner periphery of the hollow shaft portion 3 of the rotating cathode 1 and the outer periphery of the tubular shaft portion 62 of the separator member 60. Passing in the order of the flow path (outward path) 77, it reaches the flow paths 78 and 79 in the counter cathode part 2, and during this time, the periphery of the middle section shaft part 3, the bearings 6 and 7, the counter cathode part 2 and the like are cooled. .

また、対陰極２に到達した冷媒は、主に流出側として区分される流路８０、即ち、セパレータ部材６０の管状軸部６２の内部流路（復路）８１→シールキャップ４０内の流路８２（流出側連通路４８）→後側ハウジング２０の内部流路８３→後側ハウジング２０の冷媒流出口８０Ａを順に通過して外部に出て行く。図において、ＩＮは、冷媒がそこから入ってくることを示し、ＯＵＴは、冷媒がそこから出ていくことを示している。 In addition, the refrigerant that has reached the counter-cathode 2 is mainly classified as the outflow side, that is, the internal flow path (return path) 81 of the tubular shaft portion 62 of the separator member 60 → the flow path 82 in the seal cap 40. (Outflow side communication path 48) → the internal flow path 83 of the rear housing 20 → the refrigerant outlet 80A of the rear housing 20 is sequentially passed to the outside. In the figure, IN indicates that the refrigerant enters from there, and OUT indicates that the refrigerant leaves from there.

なお、冷媒としては、通常の水を利用することができるが、電気伝導率の低い純水またはイオン交換水を利用すれば、電食現象をより効果的に防ぐことができる。 In addition, although normal water can be used as the refrigerant, the electrolytic corrosion phenomenon can be more effectively prevented by using pure water or ion-exchanged water having low electrical conductivity.

本実施形態のＸ線発生装置によれば、次の効果を奏することができる。 According to the X-ray generator of this embodiment, the following effects can be achieved.

（１）後側ハウジング２０の胴部の外側から、ブラシ取付窓２８に対して導電ブラシカセット１００を着脱することができるので、それにより、ハウジング１０、２０はもとより、その内部の構造を全くばらすことなく、簡単に複数の導電ブラシ１２０を同時に１回の操作で交換することができる。従って、導電ブラシ１２０の交換作業の容易化が図れる
。 (1) Since the conductive brush cassette 100 can be attached to and detached from the brush mounting window 28 from the outside of the body portion of the rear housing 20, the housing 10 and 20 as well as the internal structure thereof are completely separated. Therefore, the plurality of conductive brushes 120 can be easily exchanged by one operation at the same time. Therefore, the replacement work of the conductive brush 120 can be facilitated.

（２）真空ケース外Ｂに位置する外側ハウジング２０の胴部にブラシ取付窓２８を配置しているので、真空ケース内Ａの真空状態を保持したまま（つまり、真空を破らずに）、導電ブラシ１２０を交換することができる。従って、運転環境をほとんど損わずに済む。 (2) Since the brush mounting window 28 is arranged in the body portion of the outer housing 20 located outside the vacuum case B, the conductive state is maintained while maintaining the vacuum state inside the vacuum case A (that is, without breaking the vacuum). The brush 120 can be replaced. Therefore, the driving environment is hardly impaired.

（３）後側軸受７と冷媒シール５０の間に位置する後側ハウジング２０の胴部にブラシ取付窓２８を配置しているので、冷媒流路に冷媒を流したまま、導電ブラシ１２０を交換することができる。つまり、冷媒系統を全くばらさずに導電ブラシ１２０の交換ができる。 (3) Since the brush mounting window 28 is disposed in the body portion of the rear housing 20 located between the rear bearing 7 and the refrigerant seal 50, the conductive brush 120 is replaced while the refrigerant flows in the refrigerant flow path. can do. In other words, the conductive brush 120 can be replaced without disposing the refrigerant system at all.

（４）導電ブラシ１２０が回転対陰極１の中空軸部３の周方向に間隔をおいた少なくとも２箇所の位置で、中空軸部３の外周（摺動対象リング部材３０のブラシ摺動円筒部３２の外周）に摺動接触するように設けられているので、いずれかの導電ブラシ１２０がたとえ接触不良を起こしても、他の導電ブラシ１２０が接触状態を保っていることにより、回転対陰極１からハウジング１０、２０に電流を逃がすことができ、信頼性を高めることができる。 (4) At least two positions where the conductive brush 120 is spaced in the circumferential direction of the hollow shaft portion 3 of the rotating anti-cathode 1, the outer periphery of the hollow shaft portion 3 (the brush sliding cylindrical portion of the sliding target ring member 30) 32, so that even if one of the conductive brushes 120 is in a poor contact state, the other conductive brush 120 remains in contact with the rotating counter cathode. The current can be released from 1 to the housings 10 and 20, and the reliability can be improved.

（５）前側ハウジング１０の前端部に電動機４が設けられているので、ハウジング１０、２０の後部の構成を単純化することができ、導電ブラシカセット１００やシールキャップ４０の取付条件を楽に設定することができる。 (5) Since the electric motor 4 is provided at the front end portion of the front housing 10, the configuration of the rear portions of the housings 10 and 20 can be simplified, and the mounting conditions for the conductive brush cassette 100 and the seal cap 40 can be set easily. be able to.

（６）後側ハウジング２０の貫通孔２３の後端にシールキャップ４０を着脱自在に嵌合させ、そのシールキャップ４０に冷媒シール５０を取り付けているので、真空ケースの真空状態を保持したまま、また、後側ハウジング２０に形成してある冷媒流入口７０Ａと冷媒流出口８０Ａに外部の冷媒供給管や冷媒排出管を接続した状態のまま、冷媒シール５０を交換することができる。しかも、ハウジング１０、２０自体はばらさないでよいので、簡単に且つ光学系への影響を及ぼさずに冷媒シール５０の交換を行うことができる。また、シールキャップ４０に流入側連通路４７及び流出側連通路４８を設けることにより、冷媒の流路（往路と復路）の振り分け機能を持たせているので、流路の複雑な構成をシールキャップ４０に集約することができ、他の部品の構造のシンプル化が図れる。 (6) Since the seal cap 40 is detachably fitted to the rear end of the through hole 23 of the rear housing 20, and the refrigerant seal 50 is attached to the seal cap 40, the vacuum state of the vacuum case is maintained. In addition, the refrigerant seal 50 can be replaced while the external refrigerant supply pipe and the refrigerant discharge pipe are connected to the refrigerant inlet 70A and the refrigerant outlet 80A formed in the rear housing 20. Moreover, since the housings 10 and 20 themselves do not need to be separated, the refrigerant seal 50 can be replaced easily and without affecting the optical system. In addition, since the inflow side communication passage 47 and the outflow side communication passage 48 are provided in the seal cap 40 so as to have a function of distributing the refrigerant flow paths (the forward path and the return path), the complicated configuration of the flow paths can be improved. 40, and the structure of other parts can be simplified.

（７）シールキャップ４０に着脱自在に冷媒シール５０を嵌合させているので、シールキャップ４０をハウジング２０から取り外すことで、冷媒シール５０だけを簡単に交換することができる。 (7) Since the refrigerant seal 50 is detachably fitted to the seal cap 40, only the refrigerant seal 50 can be easily replaced by removing the seal cap 40 from the housing 20.

（８）シールキャップ４０のシール嵌合孔４１に冷媒シール５０を嵌合させ、シールキャップ４０の軸部嵌合孔４１にセパレータ部材６０の管状軸部６２を嵌合させることより、冷媒流路の往路７７と復路８１を構成する管状軸部６２の内側の流路と外側の流路に、シールキャップ４０内のそれぞれの連通路４７、４８を容易に連通させることができ、組み付けの容易化が図れる。 (8) By fitting the refrigerant seal 50 into the seal fitting hole 41 of the seal cap 40 and fitting the tubular shaft portion 62 of the separator member 60 into the shaft fitting hole 41 of the seal cap 40, the refrigerant flow path The communication passages 47 and 48 in the seal cap 40 can be easily communicated with the flow path on the inner side and the outer flow path of the tubular shaft portion 62 constituting the forward path 77 and the return path 81, thereby facilitating assembly. Can be planned.

ＭＸ線発生装置
１回転対陰極
２対陰極部
２ａ対陰極面
３中空軸部
４電動機
４ａロータ磁石
４ｂコイル
５真空シール
６前側軸受
７後側軸受
１０前側ハウジング
１３貫通孔
２０後側ハウジング
２３貫通孔
４０シールキャップ
４１シール嵌合孔
４２軸部嵌合孔
４７流入側連通路
４８流出側連通路
５０冷媒シール
６０セパレータ部材
６２管状軸部
７０Ａ冷媒流入口
７７往路
８０Ａ冷媒流出口
８１復路
Ａ真空ケース内
Ｂ真空ケース外
５１２熱電子
５１４Ｘ線 M X-ray generator 1 Rotating anti-cathode 2 Anti-cathode part 2a Anti-cathode surface 3 Hollow shaft part 4 Electric motor 4a Rotor magnet 4b Coil 5 Vacuum seal 6 Front bearing 7 Rear bearing 10 Front housing 13 Through hole 20 Rear housing 23 Through Hole 40 Seal cap 41 Seal fitting hole 42 Shaft fitting hole 47 Inflow side communication path 48 Outflow side communication path 50 Refrigerant seal 60 Separator member 62 Tubular shaft part 70A Refrigerant inlet 77 Outward 80A Refrigerant outlet 81 Return path A Vacuum case Inside B Outside vacuum case 512 Thermoelectron 514 X-ray

Claims

A housing attached so that the front end side which is one end in the axial direction faces the vacuum case and the rear end side which is the other end in the axial direction faces the outside of the vacuum case;
A through hole formed in the housing along the axial direction;
A bearing provided on the inner periphery of the through hole;
The hollow shaft portion is inserted into the through hole and is rotatably supported by the bearing, and the front end portion of the hollow shaft portion is inserted into the vacuum case and irradiated with thermionic electrons to receive X-rays. A rotating counter cathode provided integrally with a counter cathode portion for generating
An electric motor for rotationally driving the rotating anti-cathode;
A refrigerant flow path formed inside the rotating counter cathode and through which a refrigerant for cooling the counter cathode portion and the hollow shaft portion flows;
A separator member that is concentrically inserted into at least the hollow shaft portion of the rotating counter-cathode and partitions the refrigerant flow path into a forward path and a return path;
Formed in the housing and connected to an external refrigerant supply pipe, whereby a refrigerant inlet for allowing the refrigerant to flow into the forward path;
A refrigerant outlet that is formed in the housing and connected to an external refrigerant discharge pipe to discharge the refrigerant from the return path to the outside;
A vacuum seal that seals a gap between the housing and the rotating counter-cathode, which is disposed in a space between the through hole and the hollow shaft portion of the rotating counter-cathode and located inside the vacuum case with respect to the bearing. When,
A refrigerant seal that is disposed in a space between the through hole and the hollow shaft portion of the rotating anti-cathode and located outside the vacuum case with respect to the bearing, and seals a gap between the housing and the rotating anti-cathode. When,
In an X-ray generator having
A seal cap is detachably fitted to the rear end of the through hole of the housing, and the refrigerant seal is attached to the seal cap, and a refrigerant flow formed in the housing is attached to the seal cap. An X-ray generating apparatus, comprising: an inflow side communication path that communicates an inlet with the forward path; and an outflow side communication path that communicates a refrigerant outlet formed in the housing with the return path.

A seal fitting hole for detachably fitting the outer periphery of the refrigerant seal is provided in the axial front portion of the seal cap, and the inflow side communication path is provided on the rear side in the axial direction from the seal fitting hole. The X-ray generator according to claim 1, wherein the outflow side communication passage is provided with a separate flow path.

The separator member is
A rear end is fixed to the seal cap and is inserted concentrically into the hollow shaft portion of the rotating anti-cathode, so that the refrigerant flow path inside the hollow shaft portion is placed inside the tubular shaft portion. Partitioning into a flow path and an outer flow path, and having a tubular shaft portion with one of the inner flow path and the outer flow path as the forward path and the other as the return path,
On the rear side in the axial direction from the seal fitting hole of the seal cap, there is provided a shaft fitting hole on which the outer periphery of the tubular shaft is fitted,
One opening of the inflow side communication path and the outflow side communication path is provided on the inner wall surface of the shaft portion fitting hole,
The other opening of the inflow side communication path and the outflow side communication path is provided on the inner wall surface of the seal cap positioned between the shaft portion fitting hole and the refrigerant seal fitted in the seal fitting hole. The X-ray generator according to claim 2, wherein the X-ray generator is provided.

The electric motor is disposed between a front end portion of the housing and the counter cathode portion, a rotor is provided on the counter cathode portion side, and a coil for rotating the rotor on the front end portion side of the housing The X-ray generator according to claim 1, wherein the X-ray generator is provided.