JP5098715B2 - Rotating motor - Google Patents

Description

  The present invention relates to a rotary electric motor used in a clean room or the like, and more particularly to a rotary electric motor used for a wafer cleaning device, a chemical solution coating device, a wafer transfer device, or the like in a semiconductor manufacturing process.

In recent years, with the higher integration and higher functionality of semiconductor devices, the demand for cleanliness in the semiconductor manufacturing process has become increasingly severe. In particular, contamination by particles on the wafer surface is an important issue because it leads to a deterioration in product yield. It has become. For this reason, the semiconductor manufacturing apparatus is generally installed in a clean room where the cleanliness is strictly controlled to prevent particles from adhering to the wafer. Conventionally, rotary electric motors have been widely used in semiconductor manufacturing processes, for example, for spinners such as wafer cleaning devices and chemical coating devices, and for driving wafer transfer devices. Then, unless measures are taken according to the required cleanliness, the generation of particles from the electric motor cannot be suppressed, and the surrounding environment is contaminated and the wafer is contaminated. In the case of an electric motor, the generation of particles may include rust from components, dirt on the outer cover, peeling of paint, etc., but most particles are emitted from the inside of the motor. Or splashed grease becomes particles and pollutes the surrounding environment.
Therefore, in a conventional rotary motor used in a clean environment, a rotary motor in which the grease on the bearing is replaced with a clean grease that is less scattered may be used, but even in the case of an electric motor that uses clean grease, Particles increase with the increase in motor rotation speed and bearing size, not due to scattering, and may not be adequate when more stringent cleanliness is required. When used in an atmosphere where corrosive gas or chemical mist is present in applications such as a coating device, corrosive gas or mist may be sucked into the motor, causing corrosion inside the motor. There has been a problem that this causes deterioration of performance and increase of particles due to rust.
Therefore, as a conventional rotary electric motor, there is no emission of particles from the inside of the motor to the outside, and corrosive gas or mist in the ambient atmosphere may invade from the outside to the inside of the motor. In order to prevent this, a mechanism for supplying and exhausting the inside of an electric motor has been proposed (for example, see Patent Document 1).
FIG. 4 is a side sectional view showing the structure of a conventional rotary electric motor.
In FIG. 4, 1A is a rotary electric motor, 2A is an outer frame of the rotary electric motor 1A, and has a cylindrical frame 3A and load side brackets 4A attached to both ends in the axial direction of the frame 3A and an anti-load. It is comprised with the side bracket 5A. 6A is a stator fitted to the inner surface of the frame 3A. Reference numeral 7A denotes a rotating shaft, which penetrates the load side bracket 4A and the anti-load side bracket 5A, and is rotatably supported to the load side bracket 4A via a load side bearing 8A. The anti-load side bracket 5A is rotatably supported via an anti-load side bearing 9A. Reference numeral 10A denotes a rotor which is attached to the outer peripheral surface of the rotating shaft 7A so as to face the inner peripheral surface of the stator 6A via a gap. 19A is an exhaust passage provided in the frame 3A, and communicates with the internal space 14A of the rotary electric motor 1A formed by the frame 3A, the load side bracket 4A, and the anti-load side bracket 5A. It is connected to an exhaust means 21A for exhausting gas. 12A is a load side space forming member attached to the load side bracket 4A, and 13A is an anti load side space forming member attached to the anti load side bracket 5A. The load-side space forming member 12A and the anti-load-side space forming member 13A are each configured by a cover, for example, and the load-side space forming member 12A is disposed on the load side of the load-side bracket 4A on the outer peripheral surface of the rotating shaft 7A. The load-side first space 15A is formed so as to surround the outer peripheral surface of the rotary shaft 7A on the anti-load side of the anti-load side bracket 5A. The space 16A is formed. Reference numeral 11A denotes a detector unit that detects the rotational speed and position of the rotary electric motor 1A arranged in the anti-load side first space 16A. 22A is an air supply path communicating with the first load-side space 15A, and 23A is an air supply path communicating with the first anti-load-side space 16A. The air supply path 22A and the air supply path 23A are connected to an air supply means 24A for supplying a clean and dry gas not containing particles.
In the rotary electric motor having such a configuration, when operation of the rotary electric motor 1A is started, particles such as grease scattering and wear powder in the load side bearing 8A and the anti-load side bearing 9A are generated inside the rotary electric motor 1A. Occur. However, since the internal space 14A is evacuated from the surroundings by exhausting the internal space 14A by the exhaust means 21A, particles generated inside the rotary electric motor 1A are attracted to the internal space 14A side and pass through the exhaust path 19A. Discharged. For this reason, particles generated in the rotary electric motor 1A are not released to the ambient atmosphere of the rotary electric motor 1A.
Further, by exhausting the internal space 14A by the exhaust means 21A, the internal pressure of the rotary electric motor 1A becomes lower than the ambient pressure. Therefore, when the gas or mist in the ambient atmosphere of the rotary electric motor 1A is corrosive, Gas or mist may be sucked into the rotary electric motor 1A, which causes corrosion inside the rotary electric motor 1A, and particles increase due to deterioration in performance or rust inside the rotary electric motor 1A. In order to prevent this, in the load-side first space 15A formed by the load-side space forming member 12A and the anti-load-side first space 16A formed by the anti-load-side space forming member 13A In addition, the air supply unit 24A cleans and dries without particles such as high-purity dry nitrogen or dry air filtered through a filter. The ambient atmosphere of the rotary electric motor 1A is set by making the inside of the load-side first space 15A and the anti-load-side first space 16A more positive than the ambient atmospheric pressure of the rotary electric motor 1A by supplying the generated gas. Gas or mist is prevented from entering the rotary electric motor 1A. On the other hand, in the rotary electric motor 1A, a pressure difference occurs between the load-side first space 15A and the anti-load-side first space 16A and the internal space 14A, and the load-side first space 15A and the anti-load-side first space 15A. By forming an air flow from the load-side first space 16A toward the internal space 14A, particles generated inside are carried on the air flow and discharged through the exhaust passage 19A.
Furthermore, even if the gas in the load side first space 15A and the anti-load side first space 16A leaks from the shaft penetrating portions at both ends of the rotary shaft 7A to the ambient atmosphere of the rotary electric motor 1A, the load side first space Since the gas in the space 15A and the first space 16A on the non-load side is a clean and dry gas that does not contain particles, the environment of the surrounding atmosphere of the rotary electric motor 1A is not contaminated.
Japanese Unexamined Patent Publication No. 2000-134857 (FIG. 1)

However, in the conventional rotary electric motor such as Patent Document 1, the load-side bearing 8A is disposed between the internal space 14A for exhausting and the load-side first space 15A for supplying clean and dry gas. Therefore, the load-side bearing 8A becomes a resistance to ventilation and the flow of gas from the load-side first space 15A toward the internal space 14A is obstructed and is contaminated by contact with the load-side bearing 8A. There has been a problem that the air supply flows backward from the shaft penetrating portion on the load side of the rotating shaft 7A to discharge particles to the ambient atmosphere of the rotary electric motor 1A.
The present invention has been made in view of such problems, and there is no emission of particles from the inside of the electric motor, and no rotation of corrosive gas or mist in the surrounding atmosphere enters the electric motor. The object is to provide a type electric motor.

In order to solve the above problems, the present invention is configured as follows.
The present invention includes a cylindrical frame, an outer frame composed of a load-side bracket and an anti-load-side bracket attached to both axial ends of the frame, a stator fitted to the inner surface of the frame, and the load A rotating shaft rotatably supported on the side bracket via a load side bearing and rotatably supported on the anti-load side bracket via an anti-load side bearing, and an outer peripheral surface of the rotating shaft, In a rotary electric motor having an inner peripheral surface and a rotor mounted so as to face each other through a gap, the load is attached to the load side bracket and surrounds the outer peripheral surface of the rotary shaft on the load side of the load side bracket Load side forming a second space in a portion located between the load side bearing and the load side first space on the load side of the load side bearing. Spatial shape A member, an air supply path connected to the load-side first space, connected to an air supply means for supplying a clean and dry gas not containing particles, and an air supply path connected to the second space; And an exhaust passage connected to an exhaust means for exhausting the air.
Further, the present invention provides the above-described rotary electric motor, wherein the rotary electric motor is provided in the frame and communicates with an internal space of the rotary electric motor formed by the frame, the load side bracket, and the anti-load side bracket. An exhaust path connected to an exhaust means for exhausting gas in the space, and an anti-load side first attached to the anti-load side bracket and surrounding the outer peripheral surface of the rotating shaft on the anti-load side of the anti-load side bracket An anti-load side space forming member that forms a space; an air supply path that is connected to the anti-load side first space and is connected to an air supply unit that supplies clean and dry gas not containing particles; It is characterized by comprising.
Further, the present invention provides the above-described rotary electric motor, wherein the load-side first space provided in the load-side space forming member is divided into two portions in the axial direction of the rotating shaft, and the load-side space formation is performed. A third space provided in the member and surrounding the outer peripheral surface of the rotary shaft and disposed between the two load-side first spaces; and provided in the rotary shaft; A process gas injection hole disposed so as to pass through a portion facing the space and a load side end surface of the rotating shaft, and a process gas supply means connected to the third space and supplying process gas And a process gas supply path.

According to the present invention, a rotary electric motor having the following effects can be provided.
According to the present invention, the air supply that is about to flow from the load-side first space toward the load-side bearing is exhausted through the exhaust passage communicated with the second space, and the load-side bearing Particles coming out of the air are also exhausted through the exhaust passage communicated with the second space, so that the air supply contaminated by contact with the load-side bearing is caused by the shaft-through portion on the load side of the rotating shaft. It does not flow backward to release particles to the atmosphere around the motor. Further, by supplying clean dry gas into the load-side first space by the air supply means, the load-side first space becomes a positive pressure from the ambient atmospheric pressure of the motor. The gas or mist in the surrounding atmosphere does not enter the electric motor from the load side of the load side first space. Furthermore, even if the gas in the load-side first space leaks from the shaft-passing portion on the load side of the rotating shaft to the ambient atmosphere of the electric motor, the gas in the load-side first space does not contain particles. Since it is a clean and dry gas, it does not pollute the environment of the surrounding atmosphere on the load side of the rotating shaft.
According to the present invention, in addition to the above-described effects, the internal space is evacuated from the anti-bearing side of the anti-load side bearing by exhausting the internal space by the exhaust means, and the internal space and the counter-pressure are Particles generated on the non-bearing side of the load side bearing are sucked into the internal space side and discharged through the exhaust passage connected to the internal space, so that the particles are released from the rotary electric motor to the ambient atmosphere. There is no. Further, by supplying clean dry gas into the anti-load side first space by the air supply means, the anti-load side first space also becomes a positive pressure from the ambient pressure of the motor. The gas or mist in the ambient atmosphere of the electric motor does not enter the electric motor from the anti-load side of the anti-load side first space. Furthermore, even if the gas in the first space on the anti-load side leaks from the shaft penetration portion on the anti-load side of the rotating shaft to the ambient atmosphere of the electric motor, the gas in the first space on the anti-load side is free from particles. Since it is a clean and dry gas that does not contain, the environment of the ambient atmosphere on the non-load side of the rotating shaft is not contaminated.
According to the present invention, in addition to the above-described effects, the process gas is supplied from the process gas supply means through the process gas supply path and the third space to the process gas on the load side end surface of the rotary shaft. It can be injected from the outlet of the injection hole. Further, since the load-side first space is arranged on both sides of the third space, the process gas passing through the third space is cleanly supplied to the load-side first space. Since the gas flows while being shielded by the dry gas, the process gas injected from the outlet of the process gas injection hole includes the contaminated gas from the inside of the electric motor and the ambient atmosphere on the load side of the rotating shaft. No gas or mist.

  Hereinafter, embodiments of the present invention will be described with reference to the drawings.

FIG. 1 is a diagram showing the structure of a first embodiment of a rotary electric motor according to the present invention, where (a) is a front view seen from the load side, and (b) is a cross-sectional view taken along line AA in (a). is there.
In FIG. 1, reference numeral 1 denotes a rotary electric motor, 2 denotes an outer frame of the rotary electric motor 1, and includes a cylindrical frame 3, load-side brackets 4 attached to both ends of the frame 3 in the axial direction, and an anti-load. It is comprised with the side bracket 5. FIG. Reference numeral 6 denotes a stator fitted to the inner surface of the frame. Reference numeral 7 denotes a rotating shaft, which penetrates the load side bracket 4 and the anti-load side bracket 5 and is rotatably supported by the load side bracket 4 via a load side bearing 8. The anti-load side bracket 5 is rotatably supported via an anti-load side bearing 9. Reference numeral 10 denotes a rotor, which is attached to the outer peripheral surface of the rotating shaft 7 so as to face the inner peripheral surface of the stator 6 through a gap. Reference numeral 12 denotes a load side space forming member attached to the load side bracket 4. The load side space forming member is constituted by, for example, a cover, and a load side first space 15 surrounding the outer peripheral surface of the rotary shaft 7 is formed on the load side of the load side bracket 4. At the same time, a second space 17 is formed on the load side of the load side bearing 8 in a portion located between the load side bearing 8 and the first space 15. Reference numeral 11 denotes a detector that detects the rotational speed and position of the rotary electric motor 1 disposed on the anti-load side of the anti-load side bracket 5. An air supply path 22 communicates with the load-side first space 15 and is connected to an air supply means 24 for supplying clean and dry gas containing no particles. An exhaust passage 20 communicates with the second space 17 and is connected to an exhaust means 21 for exhausting gas. The load side first space 15 and the second space 17 may be formed by deforming the load side bracket 4 regardless of the cover.
The present invention differs from the prior art in the air supply means 24 for supplying clean and dry gas to the load side space forming member 12 between the load side bearing 8 and the load side end of the rotary shaft 7. A load-side first space 15 connected and a second space 17 connected to an exhaust means 21 for exhausting are provided, and the second space 17 is connected to the load-side bearing 8 and the load-side first. This is a portion that is configured to be located between one space 15.

The operation of the rotary electric motor having such a configuration will be described below.
First, when the operation of the rotary motor 1 is started, particles such as grease scattering and wear powder in the load side bearing 8 and the anti-load side bearing 9 are generated inside the rotary motor 1. However, when the second space 17 is exhausted by the exhaust means 21, particles generated inside the rotary electric motor 1 that have come out to the load side of the load side bearing 8 are exhausted through the exhaust path 20. .
In the prior art, since the space located on the side opposite to the load side from the load side bearing 8A is exhausted, the load side bearing 8A serves as a resistance to ventilation, and the load side bearing 8A is counteracted from the load side first space 15A. The flow of gas toward the load side is obstructed, and the air supply contaminated by contact with the load-side bearing 8A flows backward from the shaft-through portion on the load side of the rotating shaft 7A, releasing particles to the ambient atmosphere of the rotary motor 1A. However, in the rotary electric motor of the present invention, since the second space 17 located on the load side from the bearing 8 is exhausted, the load side bearing 8 does not become a resistance to ventilation. The supply air that is about to flow from the load-side first space toward the load-side bearing 8 is exhausted through the exhaust passage 20 that is communicated with the second space 17 and is emitted from the load-side bearing 8. Also communicates with the second space 17 Since the exhaust air is exhausted through the exhaust path 20, the air supply contaminated by contact with the load-side bearing 8 flows backward from the shaft-passing portion on the load side of the rotating shaft 7 and releases particles to the ambient atmosphere of the motor. There is nothing to do.
Then, by supplying a clean and dry gas not containing particles such as high purity dry nitrogen or dry air filtered by a filter into the load side first space 15 by the air supply means 24, the load In the first side space 15, the pressure in the ambient atmosphere of the motor becomes a positive pressure, so that gas or mist in the ambient atmosphere of the motor does not enter the inside of the motor from the load side of the load side first space 15.
Furthermore, even if the gas in the load-side first space 15 leaks from the load-side shaft penetrating portion of the rotary shaft 7 to the ambient atmosphere of the electric motor, the gas in the load-side first space 15 is clean and free of particles. Since it is a dry gas, it does not pollute the environment of the ambient atmosphere on the load side of the rotating shaft 7.
Therefore, the rotary electric motor of the present invention does not emit particles from the inside on the load side of the rotary shaft of the electric motor, and corrosive gas or mist in the surrounding atmosphere enters the rotary electric motor 1. There is nothing.

2A and 2B are views showing the structure of a second embodiment of the rotary electric motor of the present invention. FIG. 2A is a front view seen from the load side, and FIG. 2B is a cross-sectional view taken along the line BB in FIG. is there.
2, the same reference numerals as those in FIG. 1 denote the same or corresponding members, and the description thereof will be omitted.
This second embodiment is the same as that of the first embodiment, but is provided on the frame 3 and is formed by the frame 3, the load side bracket 4, and the anti-load side bracket 5. The exhaust path 19 connected to the exhaust means 21 that communicates with the space 14 and exhausts the gas in the internal space 14 and the anti-load side bracket 5 are attached to the anti-load side bracket 5 on the anti-load side. An anti-load side space forming member 13 that forms an anti-load side first space 16 that surrounds the outer peripheral surface of the rotating shaft 7, and a clean and dry gas that does not contain particles and communicates with the anti-load side first space 16 And an air supply path 23 connected to an air supply means 24 for supplying air. The exhaust path 19 may be provided not in the frame 3 but in the load side bracket 4 or the anti-load side bracket 5, and the anti-load side first space 16 is provided with the anti-load side bracket 5 regardless of the cover. You may make it form by making it deform | transform.
With this configuration, the exhaust unit 21 exhausts the internal space 14 together with the second space 17, whereby particles generated in the internal space 14 are discharged through the exhaust path 19 and the air supply By supplying clean dry gas into the load-side first space 15 and the anti-load-side first space 16 by the means 24, the space between the load-side first space 15 and the second space 17 is provided. A pressure difference and a pressure difference between the anti-load-side first space 16 and the internal space 14 are generated, and the exhaust gas is exhausted from the load-side first space 15 through the second space 17 through the exhaust passage 20. And the air flow exhausted through the exhaust path 19 from the first load space 16 on the anti-load side through the internal space 14, the particles generated inside the rotary electric motor 1 are The exhaust path 20 and exhaust It is discharged respectively through the road 19.
Further, the clean air is supplied into the load-side first space 15 as well as the load-side first space 15 by the air supply means 24, so Since the load-side first space 16 also has a positive pressure from the ambient atmosphere pressure of the motor, gas or mist in the ambient atmosphere of the motor does not enter the interior of the motor from the ambient atmosphere of the motor.
Furthermore, even if gas in the load-side first space 15 and the anti-load-side first space 16 leaks from the shaft penetration portions at both ends of the rotating shaft 7 to the external atmosphere of the motor, the load-side first space 15 Since the gas in the inner and anti-load side first spaces 16 is a clean and dry gas that does not contain particles, it does not pollute the environment of the ambient atmosphere of the motor.
Therefore, in the rotary electric motor of the present invention, at both ends of the rotary shaft of the electric motor, there is no emission of particles from the inside of the electric motor, and corrosive gas or mist in the ambient atmosphere is inside the rotary electric motor 1. There is no invasion.

FIG. 3 is a view showing the structure of a third embodiment of the rotary electric motor of the present invention, (a) is a front view seen from the load side, (b) is a cross-sectional view taken along line CC in (a), (C) is sectional drawing which follows the DD line in (a).
In FIG. 3, the same reference numerals as those in FIG. 2 denote the same or corresponding members, and a description thereof will be omitted. In the third embodiment, in the rotary electric motor of the second embodiment, process gas can be injected from the load side end face of the rotary shaft 7, and the rotary electric motor of the second embodiment is used. The load side first space 15 provided in the load side space forming member 12 is changed so as to be divided into two portions in the axial direction of the rotary shaft 7, and the rotary side shaft is provided in the load side space forming member 12. 7, and the third space 18 disposed so as to be sandwiched between the two load-side first spaces 15, and provided on the rotary shaft 7, facing the third space 18. Connected to the process gas injection hole 26 disposed so as to penetrate the load portion and the load side end surface of the rotary shaft 7, and the process gas supply means 27 connected to the third space 18 and supplying process gas. Process ga A supply passage, with the addition of a.
By adopting such a configuration, in addition to the effect of the second embodiment, the process gas supply means 27 allows the process gas to pass through the process gas supply path 25 and the third space 18 and the load side end surface of the rotary shaft 7. Further, since the load-side first space 15 is arranged on both sides of the third space 18, the process gas passing through the third space can be loaded. The process gas injected from the outlet of the process gas injection hole 26 is contaminated gas from the inside of the electric motor because it flows while being shielded by the clean dry gas supplied to the first side space. In addition, gas and mist in the ambient atmosphere on the load side of the rotating shaft 7 are not mixed.

In each of the above embodiments, the case of a permanent magnet type synchronous motor is shown as an example, but the present invention can also be applied to other types of rotary electric motors such as an induction motor.
Moreover, in the figure which shows each said Example, although the rotating shaft 7 is illustrated as hollow, it may be solid.
Further, in each of the above embodiments, the detector unit 11 for detecting the rotational speed and position of the rotary electric motor 1 is arranged on the anti-load side of the anti-load side bracket 5, but the frame 3 and the load side bracket 4 You may arrange | position in the internal space formed with the anti-load side bracket 5, and the 2nd space 17. FIG.
In addition, the configuration of the first embodiment is configured such that there is no emission of particles from the load side of the rotating shaft 7 and no intrusion of gas in the ambient atmosphere into the rotary motor. By providing the configuration of the first embodiment also on the anti-load side of the rotary shaft 7, not only the load side of the rotary shaft 7 but also the release of particles from the anti-load side of the rotary shaft 7, and the ambient atmosphere It is good also as a structure which does not penetrate | invade in the rotary electric motor of gas.

  In the rotary electric motor of the present invention, it is possible to provide a rotary electric motor that does not emit particles from the inside of the electric motor and that does not allow corrosive gas or mist in the surrounding atmosphere to enter the electric motor. Applications such as wafer cleaning equipment, chemical coating equipment spinners, and wafer transfer equipment drive in semiconductor manufacturing processes where corrosive gases and mists in the surrounding atmosphere that may be extremely hated from particle generation may exist Widely applicable to.

BRIEF DESCRIPTION OF THE DRAWINGS It is a figure which shows the structure of the 1st Example of the rotary electric motor of this invention, (a) is the front view seen from the load side, (b) is sectional drawing which follows the AA line in (a). It is a figure which shows the structure of the 2nd Example of the rotary electric motor of this invention, (a) is the front view seen from the load side, (b) is sectional drawing which follows the BB line in (a). It is a figure which shows the structure of the 3rd Example of the rotary electric motor of this invention, (a) is the front view seen from the load side, (b) is sectional drawing which follows the CC line in (a), (c). These are sectional drawings which follow the DD line in (a). It is a sectional side view which shows the structure of the conventional rotary electric motor.

Explanation of symbols

1, 1A Rotary motor 2, 2A Outer frame 3, 3A Frame 4, 4A Load side bracket 5, 5A Anti-load side bracket 6, 6A Stator 7, 7A Rotating shaft 8, 8A Load side bearing 9, 9A Anti-load side Bearing 10, 10A Rotor 11, 11A Detector section 12, 12A Load side space forming member 13, 13A Anti-load side space forming member 14, 14A Internal space 15, 15A Load side first space 16, 16A Anti load side first 1 space 17 2nd space 18 3rd space 19, 19A, 20 Exhaust passage 21, 21A Exhaust means 22, 22A, 23, 23A Supply passage 24, 24A Supply means 25 Process gas supply passage 26 Process gas injection Hole 27 Process gas supply means

Claims (1)

An outer frame comprising a cylindrical frame, a load side bracket and an anti-load side bracket attached to both axial ends of the frame, a stator fitted to the inner surface of the frame, and a load side to the load side bracket A rotating shaft rotatably supported via a bearing and rotatably supported by an anti-load side bracket via an anti-load side bearing, and an outer peripheral surface of the rotating shaft, an inner peripheral surface of the stator and a gap A rotary electric motor having a rotor attached so as to face each other through
A load side first space is formed on the load side of the load side bracket and is attached to the load side bracket and surrounds the outer peripheral surface of the rotary shaft and is divided into two axial positions of the rotary shaft. A load-side space forming member that forms a second space in a portion of the load-side bearing that is located between the load-side bearing and the load-side first space;
An air supply path which is connected to the load-side first space and is connected to an air supply means for supplying a clean and dry gas containing no particles;
An exhaust passage connected to the second space and connected to exhaust means for exhausting gas;
Provided in front Symbol load space forming member, said surrounds the outer peripheral surface of the rotary shaft, the third space being arranged to be sandwiched between said load side first space two places,
A process gas injection hole disposed in the rotating shaft and disposed so as to penetrate a portion facing the third space and a load side end surface of the rotating shaft;
A process gas supply path communicating with the third space and connected to process gas supply means for supplying process gas ;
It characterized in that the Ru with the times Tenkei motor.

Images