JP5096903B2 - 3D processing method of glass foil - Google Patents

Description

The present invention relates to a processing method of applying three-dimensional processing to the glass foil, in particular, it is obtained by allowing forming glass foil into complex three-dimensional shape using a laser.

Glass has been used in many fields in the past, but in recent years, it has begun to be frequently used in advanced fields that require fine processing, such as nanotechnology, MEMS (Micro Electro Mechanical System), and biochips.
As a fine processing technique for glass, a technique of forming a micron-order groove or small hole in a glass thin plate is known.

Non-Patent Document 1 below proposes a method for finely forming glass using a hot embossing molding technique in which a material softened by heating is pressed against a mold and the mold shape is transferred to the material. .
In this method, amorphous carbon is used as a mold material in order to improve mold separation. This document shows a pyramid formed by this three-dimensional fine mold processing.
Masaharu Takahashi “Development of Hot Embossing Molding Technology-Toward Cost Reduction of MEMS Manufacturing Technology” “AIST Today” 2004, 8 (AIST)

  However, the processing method using a mold requires much time and cost to mold the mold. Further, since the molded product needs to be extracted from the mold, only a simple shape can be molded. In addition, this processing method cannot be applied to forming a glass thin plate such as a glass foil.

The present invention was devised in consideration of such circumstances, and it is possible to provide a three-dimensional processing method that can perform complicated three-dimensional fine processing on glass foil and that can be easily processed. It is aimed.

Three-dimensional processing method of a glass foil of the present invention, a laser absorber thickness that can be rubbed removed scans the laser machining spot of the glass foil is deposited, bending the glass foil scanning position of the laser, The laser absorber is rubbed and removed after processing .
The glass that has absorbed the laser light is softened and expanded, and the glass foil bends due to the surface tension when cooled and contracted.

Moreover, in the three-dimensional processing method of the glass foil of this invention, a laser can be incident from the surface of the glass foil with which the said laser absorber was adhered, and the said glass foil can be bent to the laser incident surface side.
When the laser absorber is present on the laser incident surface, the glass is softened and expanded on the laser incident surface, so that the glass foil is bent toward the laser incident surface.

Moreover, in the three-dimensional processing method of the glass foil of this invention, a laser is incident from the surface opposite to the surface of the glass foil on which the laser absorbent is applied, using a laser that transmits the glass, and the glass foil is lasered. It can be bent to the opposite side of the entrance surface.
When the laser absorber is present on the opposite surface of the laser incident surface, the glass is softened and expanded on the opposite surface, so that the glass foil bends on the opposite side of the laser incident surface.

Moreover, in the three-dimensional processing method of the glass foil of this invention, the frequency | count of repeated scanning of the said laser is set according to the bending angle of the said process location.
The angle at which the glass foil bends increases as the number of times of scanning with laser light increases.

Moreover, in the three-dimensional processing method of the glass foil of this invention, the said laser can be scanned to the several places which the glass foil spaced apart, and the molded object which bent the flat plate in the several places can be formed.

Moreover, in the three-dimensional processing method of the glass foil of this invention, the said laser can be scanned along the several radial line which goes to the point on glass foil , and a spherical-shaped molded object can be formed.
Further, in the three-dimensional processing method of Gagarasu foil of the present invention, it is possible to scan the laser along a curve, such as a spiral or concentric circle on the glass foil, forming a shaped body having a curved surface.

Moreover, in the three-dimensional processing method of the glass foil of the present invention, when forming a spherical or curved shaped body, the laser absorbent is applied to the opposite surface of the glass foil to which the laser absorbent is applied. A laser absorber layer having a small thickness is formed, and a laser is incident from the opposite surface.
By doing so, the opposite surface on which the thin laser absorber layer is formed is also softened, and the bending action of the glass surface on which the thick laser absorber layer is formed is not hindered, so that the radius of curvature of the spherical surface or curved surface is reduced.

Moreover, in the three-dimensional processing method of the glass foil of this invention, the said glass foil can be relatively moved to the direction which cross | intersects the scanning direction of this laser with the scanning of the said laser, and a cylindrical molded object can be formed. .

Moreover, in the three-dimensional processing method of the glass foil of this invention, when forming a cylindrical molded object, the direction of relative movement of the said glass foil can be set to the direction orthogonal to the scanning direction of a laser.
By doing so, a cylindrical body having a joint parallel to the axis can be formed.

Further, in the three-dimensional processing method of the glass foil of the present invention, when forming the cylindrical shaped body, the relative movement direction of the glass foil may be set to a direction that forms 45 ° with the laser scanning direction. good.
By doing so, a cylindrical body having a spiral joint can be formed.

Further, in the three-dimensional processing method of a glass foil of the present invention, on one surface of a glass foil, a layer of the laser absorber with a gap formed in stripes, the other surface of the glass foil, the gap The laser absorber layer is formed in a striped pattern so as to fill, and the laser is scanned in a direction parallel to the stripe of the laser absorbent, and the glass foil is relatively moved in a direction perpendicular to the stripe. A wave-shaped molded body can be formed.
In this case, the glass foil is formed into a corrugated shape because it bends in a concave shape at each location where the laser absorber is applied.

In the three-dimensional processing method of the present invention, the glass foil can be processed into a complicated three-dimensional shape, such as being bent linearly, curved into a spherical shape, or formed into a cylinder or wave shape. Moreover, the fine processing to this glass foil can be easily implemented using a laser.

Embodiments of the present invention will be described with reference to the drawings.
FIG. 1 shows a laser device used for three-dimensional processing of a glass foil. FIG. 2 shows the principle of bending the glass foil by this processing method. FIG. 3 shows laser scanning when the glass foil is bent linearly, and FIG. 4 shows an example of the glass foil bent linearly. FIG. 5 shows the relationship between the laser absorber deposition surface and the bending direction of the glass foil, and FIG. 6 shows the relationship between the number of repeated laser scannings and the bending angle. FIG. 7 shows a laser scanning position in “continuous bending” where a plurality of spaced apart glass foils are bent, and FIG. 8 shows an example of continuous bending. FIG. 9 shows the laser scanning position when the glass foil is formed into a spherical shape, FIG. 10 shows an example of the glass foil formed into a spherical shape, and FIG. 11 shows the measurement of the curvature of the spherical shape. Results are shown. FIG. 12 shows a method for reducing the radius of curvature of the spherical shape, and FIG. 13 shows an example of the spherical shape formed by the method. FIG. 14 shows a laser scanning position when the glass foil is formed into a cylindrical shape, FIG. 15 shows a relationship between the laser scanning direction and the glass foil moving direction at this time, and FIG. The example of the glass foil shape | molded in the shape is shown. FIG. 17 shows a case where the angle between the laser scanning direction and the glass foil moving direction is set to 45 °, and FIG. 18 shows an example of a cylindrical shape formed at this time. FIG. 19 shows the arrangement of the laser absorbent when the glass foil is formed into a wave shape, FIG. 20 shows the relationship between the laser scanning direction at this time and the movement direction of the glass foil, and FIG. The example of the glass foil shape | molded by the wave shape is shown.

As shown in FIG. 1, the rotation angle of the laser device used in this processing method is controlled by a YAG laser 10 (TEM ₀₀ : 18 W _max ) that continuously emits laser light of λ = 1064 nm or 532 nm and a control device 19. Galvanometer mirrors 11 and 12, a dichroic mirror 13 for branching laser light, an objective lens 16 for condensing the laser light, and an XYZ stage 17 for supporting a slide glass 21 to which a glass foil 20 to be processed is fixed. And CCD cameras 14 and 18 for observing the fine processing of the glass foil 20 and an imaging lens 15 for connecting an image at the position of the CCD camera 14.
Here, glass having a length of 10 mm, a width of 1.5 mm, and a thickness of 50 μm was used as the glass foil 20. The composition and physical properties of the glass foil 20 are as follows.

(Composition of glass foil) (Wt%)
SiO ₂ : 64.2
Al ₂ O ₃ : 3.0
BaO: 3.1
B ₂ O ₃ : 8.9
Na ₂ O: 7.2
K ₂ O: 6.4
ZnO: 7.1

(Physical properties of glass foil)
Young's modulus: 72.9 GPa
Density: 2.51 g / cm ³
Refractive index: 1.52
Softening point: 736 ° C

As shown in an enlarged view in FIG. 3, the laser beam 22 of the YAG laser 10 is focused by the objective lens 16 at a position 1.5 mm above the glass foil 20 fixed to the slide glass 21 and enters the glass foil 20. To do. Further, the rotation of the galvanometer mirrors 11 and 12 is controlled, and scanning with the incident laser light 22 is performed at a predetermined position of the glass foil 20.
An Au layer having a film thickness of 49 nm is preliminarily deposited as a laser absorber on the laser incident surface or the opposite surface of the glass foil 20. The laser absorber layer can be removed by lightly rubbing the surface of the glass foil 20 after the processing.
The conditions for this laser irradiation are summarized as follows.

Objective lens: × 5 (NA = 0.13)
Laser output: 0.96W
Scanning frequency: 1.38 Hz
Scanning distance: 1.5mm
Defocus amount: 1.5mm above the sample
Glass foil length: 10mm
Scanning position: 2mm from the tip
Laser absorber film thickness: 49nm

The glass foil 20 scanned with the laser light is bent from the scanning position of the laser light. This is thought to be due to the following phenomenon.
That is, as shown in FIG. 2, the laser light 22 is absorbed by the surface of the glass foil 20 to which the laser absorbent 30 is applied, and the surface of the glass foil 20 is softened and expanded (FIG. 2 (a)). . Since heating by laser light irradiation is local, the expanded portion is restrained from the surroundings, and the surface of the glass foil 20 is raised. The raised portion is then cooled and contracted, and the glass foil 20 on both sides of the softened portion is drawn and bent by the surface tension at that time (FIG. 2B).
It is also conceivable that the glass melted by absorbing the laser light is recessed by convection, and the glass foil bends due to shrinkage when this portion cools.

FIG. 4 shows an example of a bent glass foil. (A1) shows an SEM image of the bent surface (laser incident surface), and (a2) shows an enlarged image of the bent portion. (B1) shows an SEM image on the back side, and (b2) shows an enlarged image of the bent portion. As is clear from (a2), the laser scanning position irradiated with the laser is slightly raised. Further, as is clear from (b2), on the back side, a smooth surface is maintained without causing cracks.
As shown in FIG. 5, the glass foil 20 irradiated with the laser is bent toward the surface on which the laser absorbent 30 is applied, regardless of the incident direction of the laser.

Moreover, as shown in FIG. 6, the bending angle of the glass foil 20 increases by repeating the scanning of the laser beam. In FIG. 6, the horizontal axis represents the number of scans, and the vertical axis represents the bending angle. This measurement is performed with the laser output set to 1.94 W and 1.51 W. The change in the bending angle is the largest at the beginning of the period enclosed by the ellipse, and the bending angle increases by about 0.6 ° per scan.
Therefore, the bending angle of the glass foil can be arbitrarily set by controlling the number of times of laser scanning.

Further, the strength of the glass foil is improved by bending. In order to measure the strength of the glass foil, the results of a three-point bending test using a glass foil having a width of 1.5 mm, a length of 10 mm, and a thickness of 50 μm are as follows.
In this three-point bending test, glass foil was passed through a gap of 6 mm, and the middle was pushed with a spherical indenter, and the strength until the glass foil was broken was measured. The average strength of the flat glass foil (unprocessed) of the size is 0.12N. When a laser was scanned in the longitudinal direction of the glass foil of the same size, the glass foil was bent to about 20 ° like a roof, and the same test was conducted with the apex angle down, the average strength was 0.25N. . Thus, double strength can be obtained by bending the glass foil.

In this manner, the glass foil can be formed into a complicated shape by utilizing the bending of the glass foil by scanning with laser light. The molding example is shown below.
(Continuous bending)
As shown in FIG. 7A, the glass foil 20 bends at the scanning position of the laser beam. Therefore, as shown in FIG. 7B, a plurality of spaced locations of the glass foil 20 are sequentially scanned with the laser beam. By doing so, the glass foil 20 can be continuously bent several times. Here, this forming is referred to as “continuous bending”.
As shown in FIG. 7C, if laser light is incident from the opposite surface of the glass foil 20 to which the laser absorber 30 is applied, the glass foil 20 is opposite to the laser incident surface at each laser scanning position. Turn to the side.
FIG. 8 shows an example of continuous bending. FIG. 8A shows a laser scanning position on the glass foil 20, and FIG. 8B shows an SEM image of the glass foil subjected to continuous bending.

During the continuous bending, the laser irradiation conditions were set as follows.
Laser output: 0.96W
Scanning frequency: 1.38 Hz
Scanning distance: 1.5mm
Defocus amount: 1.5mm above the sample
Laser absorber film thickness: 49nm (back side)

(Spherical shape)
As shown in FIG. 9A, if the laser is scanned along a plurality of radial lines directed to one point on the glass foil, the glass foil 20 is formed into a spherical shape as shown in FIG. 9B. be able to. FIG. 10 shows an SEM image of the glass foil formed into a spherical shape.
In forming this spherical shape, the laser irradiation conditions were set as follows.
Laser output: 0.42 W × 2 rounds, 0.96 W × 2 rounds, 2.42 W × 2 rounds Scanning speed: 2.97 mm / s
Scanning radius: 1.5mm
Laser absorber film thickness: 49nm (back side)

Actual laser scanning is performed by the following procedure.
First, it sets so that the laser absorber adhering surface of glass foil may become the back side of a laser incident surface. Next, the laser output is set to 0.42 W, and the laser is scanned from the start point to the center, starting from a position where the distance from the center of the glass foil 20 is 1.5 mm. Next, the starting point is slightly shifted in the circumferential direction, and laser scanning to the center is performed again. This is repeated until it makes two rounds around the center, then the laser power is increased to 0.96 W, and the same scanning is repeated until it makes two rounds around the center, and further the laser power is increased to 2.42 W. The laser scanning was repeated until it was raised twice around the center.
FIG. 11 shows the result of measuring the curvature of this spherical shape. The curvature radius was 4.45 mm.

The curvature radius of this spherical shape can be reduced by providing a small amount of the laser absorbent 31 on the laser incident surface side of the glass foil 20 as shown in FIG.
As shown in FIG. 12 (a), when there is no laser absorber on the laser incident surface (surface) of the glass foil 20, even when the laser is irradiated, the surface is hardly softened and the glass foil is flattened. Power to keep is working. This force reduces the force of bending the back surface of the glass foil, so that the radius of curvature of the spherical shape cannot be reduced.

On the other hand, as shown in FIG. 12B, when a small amount of the laser absorbent layer 31 is formed on the laser incident surface (surface) of the glass foil 20, the surface side is also slightly softened and easily bent during laser irradiation. Then, the “force to keep the glass foil flat” on the surface side is eliminated (FIG. 12C). As a result, the bending of the glass foil increases.
FIG. 13A shows an SEM image of a glass foil formed into a spherical shape by forming a 49 nm-thick laser absorber on the back surface of the glass foil and forming a 7 nm laser absorber on the front surface. ing. FIGS. 13B and 13C show the measurement results of the curvature of this spherical shape. The curvature radius was 1.31 mm.

(Cylindrical shape)
As shown in FIG. 14A, when a plurality of spaced apart portions of the glass foil 20 are scanned with laser light, the glass foil 20 is bent at the scanning position and formed into a polygonal shape. As shown in FIG. 14B, the glass foil 20 is formed into a cylindrical shape.
Here, in order to narrow the scanning interval, as shown in FIG. 15, the laser beam is scanned in the Y-axis direction, and the direction of the glass foil 20 fixed to the slide glass 21 is orthogonal to the scanning direction of the laser beam. It moves in the (X-axis direction). The glass foil 20 is moved by moving the slide glass 21 on which the glass foil 20 is fixed by the XYZ stage 17.
In FIG. 16, the SEM image of the glass foil shape | molded by the cylindrical shape is shown.

In forming this cylindrical shape, the laser irradiation conditions were set as follows.
Objective lens: × 5 (NA = 0.46)
Laser output: 0.96W
Scanning frequency: 1.38 Hz
Scanning distance: 1.5mm
Defocus amount: 1.5mm above the sample
Glass foil length: 10mm
Movement speed of glass foil: about 5 μm / s
Laser absorber film thickness: 49nm (back side)
Here, since the laser scanning direction and the moving direction of the glass foil 20 are orthogonal to each other, the joint of the formed cylinders is parallel to the axis of the cylinder.

As shown in FIG. 17, when the angle formed by the scanning direction of the laser and the moving direction of the glass foil 20 is set to 45 °, as shown in the SEM image of FIG. A cylindrical body having a spiral joint can be formed.
In forming this cylindrical shape, the laser irradiation conditions were set as follows.
Objective lens: × 5 (NA = 0.46)
Laser output: 0.96W
Scanning frequency: 0.98Hz
Scanning distance: 2.12mm
Defocus amount: 1.5mm above the sample
Glass foil length: 10mm
Glass foil moving speed: about 5 μm / s
Laser absorber film thickness: 49nm (back side)

(Wave shape)
As shown in FIG. 19 (a), when a laser absorber layer is provided on the surface of the glass foil and laser scanning is performed, the glass foil bends to the surface side, and as shown in FIG. When laser scanning is performed with a laser absorber layer provided on the back side of the foil, the glass foil is bent to the back side.
Therefore, as shown in FIG. 19C, the glass foil can be formed into a wave shape by performing laser scanning by alternately providing laser absorbent layers on both surfaces of the glass foil.
FIG. 20 shows laser scanning and glass foil movement when the glass foil 20 is formed into a wave shape. On one surface of the glass foil 20, a layer of the laser absorber 30 is formed in a striped shape with a gap between them, and on the other surface of the glass foil 20, a layer of the laser absorber 31 is formed so as to fill this gap. It is formed in stripes. Further, the laser light scans in the Y-axis direction, and the glass foil 20 moves in a direction (X-axis direction) orthogonal to the laser light scanning direction.
In FIG. 21, the SEM image of the glass foil shape | molded by the wave shape is shown.

In forming this wave shape, the conditions for laser irradiation were set as follows.
Objective lens: × 5 (NA = 0.46)
Laser output: 0.96W
Scanning frequency: 1.38 Hz
Scanning distance: 1.5mm
Defocus amount: 1.5mm above the sample
Glass foil length: 10mm
Movement speed of glass foil: about 8 μm / s
Laser absorber film thickness: 49nm

Thus, the glass thin plate three-dimensional processing method of the present invention can process a glass thin plate into a complicated three-dimensional shape. This processing method can be easily performed using a laser.
The molded body shown here is an example of a molded body that can be molded using the processing method of the present invention, and the present invention can also be used when generating molded bodies of other shapes.
Laser scanning can be performed not only for scanning a linear trajectory, but also for scanning a curved trajectory. By scanning a thin glass plate with a laser along a curved line such as a spiral or concentric circle, various curved surfaces can be obtained. A shaped molded body can be obtained.
Although the case of using a YAG laser has been described here, the present invention can also be implemented using other lasers such as a carbon dioxide laser, a semiconductor laser, an excimer laser, an argon laser, a YVO4 laser, and a YLF laser.

The laser absorbent can be used regardless of whether it is an inorganic material or an organic material as long as it can absorb the laser light of the laser device to be used.
Moreover, in order to form a layer of a laser absorber on a glass thin plate, a general film forming method such as coating, vapor deposition, or sputtering can be applied.
The laser absorber can be easily removed by rubbing with a finger or wiping with a cloth after forming the glass sheet. Therefore, the laser absorber is not a hindrance to the glass sheet compact.

Glass has many possibilities in various fields, such as optical equipment, MEMS, electronics, and medical equipment. However, it also has drawbacks, and one of them is that it is difficult to mold glass foil.
The present invention can eliminate such drawbacks of glass, and can dramatically increase the usefulness of glass.

  The present invention can be used for molding a glass thin plate in a wide range of fields such as optical equipment, MEMS, electronics, and medical equipment.

The figure which shows the laser apparatus used with the three-dimensional processing method which concerns on embodiment of this invention The figure explaining the principle which glass foil bends with the three-dimensional processing method of this invention The figure which shows the laser scanning to the glass foil in the three-dimensional processing method of this invention The figure which shows the glass foil bent linearly with the three-dimensional processing method of this invention The figure which shows the relationship between a laser absorber adhering surface and a glass foil bending direction by the three-dimensional processing method of this invention. The figure which shows the relationship between the frequency | count of repeated scanning of the laser in the three-dimensional processing method of this invention, and a bending angle. The figure explaining the laser scanning in the continuous bending by the three-dimensional processing method of this invention The figure which shows the example of the continuous bending implemented with the three-dimensional processing method of this invention The figure which shows the laser scanning at the time of shape | molding glass foil in a spherical shape with the three-dimensional processing method of this invention The figure which shows the example of the glass foil shape | molded by the spherical shape with the three-dimensional processing method of this invention The figure which shows the measurement result about the curvature of the spherical shape of FIG. The figure which shows the method of reducing the curvature radius of a spherical shape with the three-dimensional processing method of this invention The figure which shows the example of the spherical shape formed by the method of FIG. The figure which shows the laser scanning which shape | molds glass foil in a cylindrical shape with the three-dimensional processing method of this invention The figure which shows the laser scanning direction and glass foil movement direction when shape | molding cylindrical shape with the three-dimensional processing method of this invention The figure which shows the example of the cylindrical shape formed with the three-dimensional processing method of this invention The figure which shows the laser scanning direction and glass foil moving direction when shape | molding the stretched cylindrical shape with the three-dimensional processing method of this invention The figure which shows the example of the cylindrical shape formed by the method of FIG. The figure which shows arrangement | positioning of the laser absorber when shape | molding a wave shape with the three-dimensional processing method of this invention The figure which shows the laser scanning direction and glass foil movement direction when forming a wave shape with the three-dimensional processing method of this invention The figure which shows the example of the wave shape formed with the three-dimensional processing method of this invention

Explanation of symbols

DESCRIPTION OF SYMBOLS 10 YAG laser 11 Galvano mirror 12 Galvano mirror 13 Dichroic mirror 14 CCD camera 15 Imaging lens 16 Objective lens 17 XYZ stage 18 CCD camera 19 Controller 20 Glass foil 21 Slide glass 30 Laser absorber 31 Laser absorber

Claims (12)

A laser is scanned at a processing position of a glass foil coated with a laser absorber having a thickness that can be rubbed and removed , the glass foil is bent at a laser scanning position, and the laser absorber is rubbed and removed after processing. 3D processing method of glass foil characterized by these. It is a three-dimensional processing method of the glass foil of Claim 1, Comprising: A laser is incident from the surface of the glass foil with which the said laser absorber was adhered, and the said glass foil is bent to the laser incident surface side. A three-dimensional processing method for glass foil . The method of three-dimensional processing of a glass foil according to claim 1, wherein a laser is incident from a surface opposite to the surface of the glass foil to which the laser absorber is applied, using a laser that transmits the glass, and the glass three-dimensional processing method of a glass foil, characterized in that bending the foil to the opposite side of the laser incident surface. A three-dimensional processing method of a glass foil according to any one of claims 1 to 3, depending on the bending angle of the machining spot, 3 of the glass foil and sets the repetition number of scans of said laser Dimensional processing method. 5. The three-dimensional processing method of glass foil according to claim 1, wherein the laser is scanned at a plurality of spaced locations of the glass foil to form a molded body in which a flat plate is bent at a plurality of locations. 3D processing method of glass foil characterized by these. A three-dimensional processing method of a glass foil according to any one of claims 1 to 4, wherein the laser is scanned along a plurality of radial lines directed to points on the glass foil , thereby forming a spherical shaped molded body. A three-dimensional processing method of a glass foil characterized by forming. 5. The glass foil three-dimensional processing method according to claim 1, wherein the laser is scanned along a curved line such as a spiral or a concentric circle on the glass foil to form a curved body. A three-dimensional processing method of glass foil characterized by the above. 8. The method for three-dimensional processing of a glass foil according to claim 6 or 7, wherein a laser absorber having a thickness smaller than that of the laser absorber is provided on a surface opposite to the surface of the glass foil to which the laser absorber is applied. three-dimensional processing method of a glass foil, characterized in that the layer is formed, and enters the laser from the opposite surface. 5. The glass foil three-dimensional processing method according to claim 1, wherein the glass foil is relatively moved in a direction intersecting with the laser scanning direction along with the laser scanning, to form a cylindrical shape. A three-dimensional processing method of glass foil , comprising forming a molded body. A three-dimensional processing method of a glass foil according to claim 9, the direction of relative movement of the glass foil, three-dimensional processing method of a glass foil and sets the direction perpendicular to the scanning direction of the laser . A three-dimensional processing method of a glass foil according to claim 9, the direction of relative movement of the glass foil, three-dimensional glass foil and sets the direction forming an scanning direction and 45 ° of the laser Processing method. A three-dimensional processing method of a glass foil according to any one of claims 1 to 4, on one surface of a glass foil, a layer of the laser absorber with a gap formed in stripes, the glass foil The laser absorber layer is formed in stripes on the other surface of the laser beam so as to fill the gap, and the laser is scanned in a direction parallel to the stripes of the laser absorber, and in a direction perpendicular to the stripes. A three-dimensional processing method of a glass foil , wherein the glass foil is relatively moved to form a corrugated shaped body.