JP5090225B2 - Table lifter and substrate processing apparatus - Google Patents

Description

  The present invention relates to a table lifter in which a mounting table is moved up and down by an expansion / contraction operation of a pantograph mechanism, and a substrate processing apparatus including the table lifter.

  As this type of table lifter, a pantograph mechanism is configured by arm members pivoted to each other, and a lower fulcrum part of the pantograph mechanism is connected to and supported by a support base, and an upper fulcrum part of the pantograph mechanism is supported on the mounting table. Some are connected and supported.

  Then, by moving one fulcrum part at the lower part toward the other fulcrum part, the pantograph mechanism is extended vertically to raise the mounting table, and the one fulcrum part is moved from the other fulcrum part. By moving it away, the pantograph mechanism is shortened in the vertical direction to lower the mounting table.

  However, a very large thrust is required when the height of the placement table is low during the raising operation of the placement table. For this reason, there is a problem in that the lowering of the mounting surface of the mounting table is hindered, the lifting stroke is difficult to ensure effectively, and the lifting stroke is shortened.

  Therefore, a table lifter has been proposed in which the initial extension operation of the pantograph mechanism is performed by a cam mechanism to reduce the initial thrust (see, for example, Patent Document 1).

Japanese Patent Laid-Open No. 7-187487

  On the other hand, in the conventional table lifter as described above, when the mounting load mounted on the mounting table becomes large, there is a risk of so-called free fall in which the mounting table naturally descends without being able to withstand that load. There is a problem that the table cannot be stopped at a desired height position.

  In view of the above-described problems, an object of the present invention is to provide a table lifter that reduces thrust in the initial operation and effectively prevents free fall.

  Technical means for solving the above problems include a mounting table that is lifted and lowered by an expansion and contraction operation of a pantograph mechanism having arm members pivoted to each other, and an initial extension operation of the pantograph mechanism by pushing up the arm member And a pantograph expansion / contraction operation mechanism that moves the one fulcrum part of the pantograph mechanism toward the other fulcrum part following the initial extension operation by the cam drive mechanism, and performs the extension operation of the pantograph mechanism. The provided table lifter is provided with a free fall prevention device for stopping the operation of the pantograph expansion / contraction operation mechanism.

  The pantograph expansion / contraction operation mechanism includes a screw shaft body that is rotatably supported and a nut body screwed into the screw shaft body, and the nut body is interlocked and connected to the one fulcrum portion. In addition, the cam driving mechanism may be provided between the nut body and the arm member, and the rotation operation of the screw shaft body may be releasably restricted by the free fall prevention device.

  Furthermore, it is good also as a structure provided with the unidirectional rotary damper which provides load to rotation of the said screw shaft body of the direction to which the said mounting table descend | falls.

  Further, the free fall preventing device includes a ratchet gear fixed to the screw shaft body, and a rotation of the screw shaft body in a direction in which the mounting table is lowered by being detachably locked to a tooth portion of the ratchet gear. It is good also as a structure provided with the ratchet nail | claw which regulates.

  Furthermore, the said free fall prevention apparatus is good also as a structure which consists of an electromagnetic brake which controls rotation of the said screw shaft body.

  A pull rod pivotally supported by the one fulcrum portion is inserted into the nut body with an axis parallel to the screw shaft body, and the nut following the initial extension operation by the cam drive mechanism. When the body is moved along the screw shaft body, the pull rod is pulled by the nut body, and the one fulcrum portion may be moved toward the other fulcrum portion.

  Further, the arm member may have a rising angle in a range of 15 to 30 degrees when switching from the initial extension operation by the cam drive mechanism to the extension operation by the pantograph expansion / contraction operation mechanism.

  Moreover, it is good also as a structure by which the operation handle for screw shaft body rotation operation is detachably provided in the one end part of the said screw shaft body.

  Furthermore, the substrate processing apparatus is detachably disposed in a heat treatment chamber in which a substrate to be heat-treated is detachably set, an upper lamp house disposed on the upper side of the heat treatment chamber, and a lower side of the heat treatment chamber. A lower lamp house, and the lower lamp house placed on the mounting table at the raised position of the table lifter disposed so as to be movable up and down below the lower lamp house. It is good also as a structure made free.

  According to the table lifter of the present invention, since the free fall prevention device for stopping the operation of the pantograph expansion / contraction operation mechanism is further provided, the cam drive mechanism can not only reduce the thrust in the initial extension operation of the pantograph mechanism, but also can freely By stopping the operation of the pantograph expansion / contraction operation mechanism by the fall prevention device, there is an advantage that free fall of the placement table can be effectively controlled and the placement table can be held at a desired height position.

  The pantograph expansion / contraction operation mechanism includes a screw shaft body that is rotatably supported and a nut body screwed into the screw shaft body, and the nut body is interlocked and connected to one fulcrum portion. If the cam drive mechanism is provided between the nut body and the arm member and the rotation operation of the screw shaft body is releasably restricted by the free fall prevention device, by restricting the rotation operation of the screw shaft body, The free fall of the mounting table can be effectively controlled.

  Furthermore, if the structure is equipped with a one-way rotary damper that applies a load to the rotation of the screw shaft body in the direction in which the mounting table descends, the damper function of the one-way rotary damper during the lowering operation of the mounting table Thus, the descent speed can be slowed down, and rapid descent can be effectively prevented even when the load is large. On the other hand, during the raising operation of the mounting table, the damper function does not act at all, and the raising operation may be performed against the loading load.

  The free fall prevention device restricts the rotation of the ratchet gear fixed to the screw shaft body and the rotation of the screw shaft body in the direction in which the mounting table descends by being detachably locked to the teeth of the ratchet gear. If the structure is provided with a ratchet claw, the free fall of the mounting table can be effectively restricted with a simple structure.

  Furthermore, the free fall prevention device can effectively regulate the free fall of the mounting table with a simple structure, even if it is configured by an electromagnetic brake that regulates the rotation of the screw shaft body.

  A pull rod pivotally supported on one fulcrum is inserted into the nut body with an axis parallel to the screw shaft body, and the nut body is moved following the initial extension operation of the pantograph mechanism by the cam drive mechanism. If the pull rod is pulled by the nut body when moving along the screw shaft body and one fulcrum is moved toward the other fulcrum, the pantograph mechanism is initially extended by the cam drive mechanism. And the subsequent expansion operation of the pantograph mechanism by the pantograph expansion / contraction operation mechanism can be efficiently switched.

  Further, if the structure is such that the rising angle of the arm member when switching from the initial extension operation by the cam drive mechanism to the extension operation by the pantograph extension / contraction operation mechanism is in the range of 15 to 30 degrees, a large thrust is applied during the lifting operation of the mounting table. Therefore, the cam drive mechanism can effectively cover the initial stage where the pantograph mechanism is required, and the pantograph mechanism can be smoothly extended by the subsequent pantograph expansion / contraction operation mechanism.

  In addition, if the screw shaft body is provided with a detachable operation handle at one end of the screw shaft body, the operation handle can be manually rotated by attaching the operation handle to the screw shaft body. By doing so, it is possible to move up and down while confirming the movement status of the mounting table. When the table lifter is not used, a compact standby state can be obtained by removing the operation handle.

  The substrate processing apparatus further includes a heat treatment chamber in which a substrate to be heat-treated is detachably set, an upper lamp house disposed on the upper side of the heat treatment chamber, and a lower portion detachably disposed on the lower side of the heat treatment chamber. The lower lamp house placed on the placing table is freely attachable and detachable at a raised position of a table lifter which is provided with a side lamp house and is arranged so as to be movable up and down below the lower lamp house. If it is a structure, normally the table lifter is made to stand by in a folded posture, and at the time of maintenance of the lower lamp house, the lower lamp house can be immediately removed via the lifting operation of the table lifter arranged below, There is an advantage that maintenance work of the lower lamp house which is a heavy object can be efficiently performed.

  Hereinafter, an embodiment of the present invention will be described with reference to the drawings. FIGS. 1 to 7 show a table lifter 1, a support base 2 disposed at a lower portion, a mounting table 3 disposed at an upper portion, A pantograph mechanism 4 disposed between the support table 2 and the mounting table 3 and a drive operation device 5 for expanding and contracting the pantograph mechanism 4 are provided. For convenience of explanation, the front / rear, left / right, and up / down directions will be defined with reference to the front view of FIG.

  As shown in FIG. 3, the support base 2 has a substantially rectangular shape in plan view, and a lower guide base 7 is detachably attached to the right half of the front and rear sides of the support base 2. The lower guide rails 8 along the left-right direction are detachably mounted on the inner surfaces of the lower guide bases 7 facing each other.

  Further, bearing brackets 9 are detachably attached to the center portions in the front-rear direction of the left and right side portions of the support base 2, and the screw shaft body 10 is rotatably supported by both bearing brackets 9 via bearings. ing. On the support base 2 positioned on both sides of the screw shaft body 10, guide rails 11 extending in a direction parallel to the axis of the screw shaft body 10 are detachably mounted in a distributed manner. Here, the screw shaft body 10 has an axial center in the left-right direction, and each guide rail 11 has a structure extending in the left-right direction.

  A nut body 12 is screwed into the screw shaft body 10, and the nut body 12 is provided with an overhanging portion 12a extending in the front-rear direction. As shown in FIG. 4, a slider 13 slidably mounted along each guide rail 11 is detachably attached to the lower surface of each overhanging portion 12a, and the screw shaft body 10 is rotated. Then, the nut body 12 is configured to be reciprocally movable along the axial direction of the screw shaft body 10 under the guide rails 11 guided by the sliders 13. In the present embodiment, the screw shaft body 10 and the nut body 12 have a ball screw structure.

  As shown in FIG. 2, the mounting table 3 is configured in a rectangular shape in plan view having substantially the same size as the support base 2, and the right half of the front and rear sides on the lower surface side of the mounting table 3 Upper guide bases 15 are detachably attached, and upper guide rails 16 are detachably attached to the inner surfaces of the upper guide bases 7 facing each other.

  As shown in FIGS. 1 and 5 to 7, the pantograph mechanism 4 includes arm members 18 and 19 that are pivotally supported by a support shaft 17 in the middle in the longitudinal direction and connected in a so-called X shape. The structure is provided with two sets separated in the front-rear direction.

  The right end of each arm member 18 disposed on the front and rear sides is supported by each lower slider 20 that is slidable along the lower guide rails 8 on both front and rear sides of the support base 2. A shaft 21 is pivotally supported around the axis in the front-rear direction (around the axis of the support shaft 21). Further, the left end portion of each arm member 18 is attached to a support bracket 22 detachably attached to the lower left surface of the mounting table 3 via a support shaft 23 (the axis center of the support shaft 23). It is pivotally supported so that it can rotate freely.

  On the other hand, the right end portion of each arm member 19 disposed inside the front and rear is supported by each upper slider 24 slidable along the upper guide rail 16 on both sides of the front and rear provided on the mounting table 3. The shaft 25 is pivotally supported around the axis in the front-rear direction (around the axis of the support shaft 25). Further, the left end portion of each arm member 19 is attached to a support bracket 26 detachably attached to the upper left surface of the support base 2 via a support shaft 27 (around the axis of the support shaft 27). ) Is pivotally supported.

  Here, the upper part and the lower part on the right side as one fulcrum part in the pantograph mechanism 4 are movable fulcrum parts slidable along the guide rails 8 and 9, and the upper part and the lower part on the left side as the other fulcrum parts are The fixed fulcrum portions are pivotally supported by the support brackets 22 and 26, respectively. Further, as shown in FIG. 7, the arm members 18 arranged on the outer side are connected to each other via the connecting rod 28, and the arm members 19 arranged on the inner side are also connected to the connecting rod 29. Are connected to each other.

  As shown in FIGS. 3 and 4, the right end portion of the pull rod 31 having an appropriate length is supported on the inner projecting end portion of each support shaft 21 that pivotally supports the lower end portion of each outer arm member 18. The shaft 21 is pivotally supported around the axis of the shaft 21. Further, the intermediate portion of each pull rod 31 has an axial center parallel to the screw shaft body 10 on each of the protruding end portions 12b provided in a protruding manner in the front-rear direction than the protruding portions 12a on both front and rear sides of the nut body 12. It is inserted and has. Further, a pulling stopper 32 is provided at the left end of each pull rod 31. In this embodiment, a double nut is screwed and fastened so as to be movable and adjustable in the axial direction of the pull rod 31. Yes.

  When the nut body 12 is moved from the right side to the left side along the screw shaft body 10 as shown in FIG. 3, the protruding end portions 12 b of the nut body 12 and the pull rods 31 are relatively moved. By sliding, each overhanging end portion 12 b moves in the direction of the pulling stopper 32 of each pull rod 31.

  Thereafter, a state is obtained in which each overhanging end portion 12b abuts against each of the traction stoppers 32 in a freely detachable manner, and when the nut body 12 is further moved to the left in this abutment state, the nut The pull rods 31 are pulled leftward by the body 12 via the pulling stoppers 32, and the lower sliders 20 are slid along the lower guide rails 8.

  In addition, on each overhanging portion 12a on both the front and rear sides of the nut body 12, cam rollers 34 are respectively supported on the support shafts so as to be able to roll around an axis in the front-rear direction corresponding to the lower position of each inner arm member 19. It is pivotally supported via 35.

  On the other hand, on the lower surface side of the right half of each arm member 19 corresponding to the upper position of each cam roller 34, a linear cam surface 36 having an appropriate inclination angle as shown in FIGS. It has been.

  As shown in FIGS. 1 to 4, the nut body 12 is positioned at the right end portion of the screw shaft body 10 at the lowermost position of the mounting table 3, and the cam of each arm member 19 is placed on each cam roller 34. The right end portion of the surface 36 is in contact. The lower sliders 20 and the upper sliders 24 are positioned at the right end portions of the lower guide rails 8 and the upper guide rails 16.

  When the screw shaft body 10 is rotated in the upward direction of the table lifter 1 in this state, the nut body 12 is screwed leftward along the screw shaft body 10 and gradually moves to the left. By the leftward movement of the nut body 12, each cam roller 34 rolls along each cam surface 36 on the lower surface side of each arm member 19, and by the relative movement between each cam roller 34 and each cam surface 36, The right end of each arm member 19 is pushed up. Here, an initial extension operation of the pantograph mechanism 4 is performed, and each cam roller 34 and each cam surface 36 constitute a cam drive mechanism. Further, as the nut body 12 moves to the left, the overhanging end portions 12 b of the nut body 12 move relative to the left along the intermediate portions of the pull rods 31.

  Then, as shown in FIG. 5, when each cam roller 34 moves to the left end portion of the cam surface 36 along each cam surface 36, each overhanging end portion 12 b of the nut body 12 becomes each pulling stopper of each pull rod 31. A state of abutting 32 is obtained. From this state, when the nut body 12 is further moved leftward, the pull rods 31 are pulled leftward by the leftward movements of the overhanging end portions 12b and connected to the right end portions of the pull rods 31. Each lower slider 20 constituting the movable fulcrum is slid leftward along each lower guide rail 8.

  Here, the initial extension operation of the pantograph mechanism 4 by the cam drive mechanism is completed at the stage where each overhanging end portion 12b comes into contact with each of the traction stoppers 32, and thereafter, the lower end, which is a movable fulcrum portion. The side slider 20 is gradually moved toward the shaft support portion of the support bracket 26 which is a fixed fulcrum portion, and the pantograph mechanism 4 is extended following the initial extension operation. Then, the movable fulcrum part which is one fulcrum part is moved toward the fixed fulcrum part which is the other fulcrum part by each overhanging end part 12b and each pull rod 31 of the nut body 12, and the pantograph mechanism 4 is extended. A pantograph expansion / contraction operation mechanism that performs the operation is configured.

  It should be noted that the pivotal support portion or the pivotal support portion by the respective support shafts 17, 21, 23, 25, 27, and 35 is configured to be supported via a bearing.

  Further, as shown in FIG. 5, the rising angle θ of each arm member 19 when switching from the initial extension operation of the pantograph mechanism 4 by the cam drive mechanism to the extension operation by the pantograph extension operation mechanism is 15 to 30 degrees, preferably 20-25.

  A one-way rotary damper 38 is mounted on the support 2 at a protruding portion of the screw shaft body 10 that protrudes to the right from the right bearing bracket 9 that supports the screw shaft body 10. That is, a damper function is applied to the rotation of the screw shaft body 10 in the direction in which the mounting table 3 descends to apply a load, and the rotation of the screw shaft body 10 in the direction in which the mounting table 3 rises. On the other hand, the damper function does not work.

  The support base 2 is provided with a free fall prevention device 39 located at a protruding portion of the screw shaft body 10 that protrudes to the left from the left bearing bracket 9 that supports the screw shaft body 10. That is, the free fall prevention device 39 includes a case body 40 fixed to the support base 2, and a portion of the screw shaft body 10 that is inserted through the case body 40 and located in the case body 40 is shown in FIG. 8. Further, the ratchet gear 41 is fixed so as to rotate integrally with the screw shaft body 10. Further, a ratchet pawl 42 that is detachably engaged with a tooth portion 41a of the ratchet gear 41 is swingable around a left and right axis about one side portion of the ratchet gear 41 in the case body 40. It is pivotally supported via a support shaft 43.

  Furthermore, an urging mechanism 44 composed of a coil spring or the like is provided for elastically urging the ratchet pawl 42 in a direction to lock the ratchet claw 42 to the tooth portion 41 a of the ratchet gear 41. Further, a release operation part 45 for releasing the latched state of the ratchet claw 42 with respect to the tooth part 41a is provided in the middle part of the ratchet claw 42. The release operation part 45 is shown in FIGS. As shown in FIG. 5, the structure is arranged so as to protrude from the case body 40 through a guide opening 40a formed in the case body 40.

  Further, as shown in FIG. 7, a translucent window 40 b provided with a transparent plate or the like in which the engagement / disengagement state between the ratchet gear 41 and the ratchet pawl 42 can be visually recognized is provided on the side surface of the case body 40. . Further, as indicated by the phantom line in FIG. 8, a release state holding portion 46 is appropriately provided for holding and holding the release operation portion 45 at the release position where the ratchet pawl 42 is moved away from the ratchet gear 41. Yes. For example, a hole portion may be formed as the release state holding portion 46 and the shaft portion of the release operation portion 45 may be detachably locked.

  And in this embodiment, it is set as the structure which controls rotation of the screw shaft body 10 of the direction which the mounting table 3 descend | falls in the latching state of the ratchet claw 42 with respect to the ratchet gear 41. FIG. Therefore, when the screw shaft body 10 is rotated during the raising operation of the mounting table 3, the ratchet pawl 42 and the ratchet gear are moved under the elastic biasing force of the biasing mechanism 44 as the ratchet pawl 42 rotates. It is set as the structure where engagement / disengagement with 41 each tooth | gear part 41a is repeated sequentially. Then, when the rotation operation of the screw shaft body 10 is stopped, the latched state between the ratchet pawls 42 and the tooth portions 41a at predetermined positions of the 41 is obtained, and the rotation of the screw shaft body 10 in the descending direction of the mounting table 3 is restricted. Thus, the free fall of the mounting table 3 is restricted.

  In addition, a non-circular screw operation portion 10a such as a hexagonal column is integrally provided at the left end portion of the screw shaft body 10 protruding outward from the case body 40. As shown in FIG. 9, the screw operation portion 10 a is provided with a connection body 48 that is detachably fitted and is relatively non-rotatable, and an operation handle 49 that is detachably connected to the connection body 48. It has been. The connecting body 48 and the operating handle 49 are connected to the screw operating portion 10a of the screw shaft body 10, and the screw shaft body 10 is rotated by manually rotating the operating handle 49. . That is, the table lifter 1 in the present embodiment has a structure that allows the mounting table 3 to be lifted and lowered by a manual operation.

  The table lifter 1 of the present embodiment is configured as described above, and when lifting a load that is a predetermined heavy object to a desired height position, as shown in FIG. 1 and FIG. In this mounted state, a mounting body 48 is connected to the screw operating portion 10a at the left end portion of the screw shaft body 10 as shown in FIG. The operating handle 49 is connected to the connecting body 48.

Then, when rotating the threaded shaft 10 in the direction in which the mount table 3 by the operation handle 49 rises, the nut member 12 with the rotation of the screw shaft member 10 is moving operation from the right end to the left Go. By the leftward movement of the nut body 12, each cam roller 34 rolls along each cam surface 36 on the lower surface side of each arm member 19, and by the relative movement between each cam roller 34 and each cam surface 36, The right end of each arm member 19 is pushed up, and the initial extension operation of the pantograph mechanism 4 is performed.

  After that, as shown in FIG. 5, when each cam roller 34 moves along each cam surface 36 to the left end portion of the cam surface 36, the initial extension operation by the cam drive mechanism is finished, and each overhanging end of the nut body 12 is finished. A state in which the portion 12b is in contact with each pulling stopper 32 of each pull rod 31 is obtained.

  Following this initial extension operation, when the screw shaft body 10 is further rotated and the nut body 12 is further moved to the left, that is, the nut body 12 is further moved to the left by the operation of the pantograph expansion / contraction operation mechanism. When moved, each pull rod 31 is pulled leftward by each overhanging end 12b, and each lower slider 20 constituting the movable fulcrum connected to the right end of each pull rod 31 is moved downward. The pantograph mechanism 4 is further extended by sliding to the left along the side guide rail 8.

  When the mounting table 3 is lifted by such an extension operation of the pantograph mechanism 4, the damper function by the one-way rotary damper 38 does not act at all, and the lifting operation may be performed against the mounting load.

  If the rotation operation by the operation handle 49 is stopped at the stage where the mounting table 3 arrives at the desired raised position, a state in which the mounting table 3 is stopped at the desired height position can be obtained. At this time, since the ratchet pawl 42 is engaged with the tooth portion 41a of the ratchet gear 41 fixed to the screw shaft body 10 in the free fall prevention device 39, the mounting table 3 of the screw shaft body 10 is The rotating operation in the descending direction is restricted, and free fall due to the load of the heavy load mounted on the mounting table 3 can be effectively prevented, and the mounting table 3 is moved to the desired height position. The state stopped by can be kept effective.

  Moreover, the simple structure by engagement / disengagement of the ratchet gear 41 and the ratchet claw 42 has an advantage that the free fall of the mounting table 3 can be effectively regulated and can be provided inexpensively and easily.

  On the other hand, when the mounting table 3 on which the load is mounted at the predetermined height position is lowered, the ratchet pawl 42 is locked to the tooth portion 41a of the ratchet gear 41 as shown by the phantom line in FIG. Is released and the ratchet pawl 42 is held in the released state by the released state holding unit 46, the mounting table 3 is freely dropped by the load due to the weight of the load. At this time, since the load is applied to the rotation of the screw shaft body 10 in the descending direction by the damper function of the one-way rotary damper 38, the descending speed of the mounting table 3 can be slowed down, even when the mounting load is large. Rapid lowering of the mounting table 3 can be effectively prevented, and safety can be improved. It should be noted that if the load is such that the mounting table 3 does not fall freely, it can be lowered by rotating the operation handle 49.

  Further, the cam drive mechanism of the cam roller 34 and the cam surface 36 is disposed below each arm member 19, and the initial extension operation of the pantograph mechanism 4 by the cam drive mechanism and the subsequent extension of the pantograph mechanism 4 by the pantograph extension / contraction operation mechanism. Since the operation is switched using each pull rod 31, there is an advantage that it can be configured compactly and can be switched efficiently in the lower region of the mounting table 3.

  Furthermore, since the rising angle of the arm member when switching from the initial extension operation by the cam drive mechanism to the extension operation by the pantograph expansion / contraction operation mechanism is in the range of 15 to 30 degrees, preferably in the range of 20 to 25 degrees, the mounting table 3 In the ascending operation, the initial stage where a large thrust is required can be effectively covered by the cam drive mechanism, and the subsequent expansion operation of the pantograph mechanism 4 by the pantograph expansion / contraction operation mechanism can be performed smoothly and efficiently.

  Further, the connection body 48 and the operation handle 49 are connected to the screw operation portion 10 a at the protruding end of the screw shaft body 10, and the mounting table 3 is moved up and down by rotating the operation handle 49. In addition, since the mounting table 3 is lifted and lowered by manual operation, the lifting and lowering operation can be performed while confirming the movement state of the mounting table 3, and the safety is excellent. When the table lifter 1 is not used, the standby state of the table lifter 1 can be obtained by removing the connecting body 48 and the operation handle 49.

  In addition, it can replace with the manual operation system using such an operation handle 49, and can also be set as the structure which rotates the screw shaft body 10 using the motor with an electromagnetic brake.

  Further, as the free fall prevention device 39, a structure in which the rotation of the screw shaft body 10 is regulated by the ratchet gear 41 and the ratchet pawl 42 is shown. It is good also as a structure which controls rotation of the body 10. As described above, even with a structure using an electromagnetic brake, free fall of the mounting table 3 can be effectively prevented with a simple structure.

  FIG. 10 is a schematic explanatory view of the substrate processing apparatus 51, and has a structure in which the table lifter 1 in the embodiment is assembled.

  That is, the substrate processing apparatus 51 includes a heat treatment chamber 53 in which a semiconductor wafer 52 as an example of a substrate to be heat-treated is detachably set, and a flash lamp as an example of an upper lamp house is disposed above the heat treatment chamber 53. House 54 is arranged. In addition, a halogen lamp house 55 as a lower lamp house is disposed below the heat treatment chamber 53. In this embodiment, the heat treatment chamber 53 is structured to be bolted so as to be detachable. The table lifter 1 is arranged below the halogen lamp house 55 so as to be movable up and down.

  When the halogen lamp house 55 is maintained, the mounting table 3 of the table lifter 1 is lifted as indicated by the phantom line, and the heat treatment chamber is placed at the position where the halogen lamp house 55 is mounted on the mounting table 3. If the bolt fastening for fixing the halogen lamp house 55 to 53 is released, a state in which the halogen lamp house 55 is mounted on the mounting table 3 is obtained.

  In this state, if the latching state of the ratchet pawl 42 with respect to the ratchet gear 41 in the free fall prevention device 39 is released, the mounting table 3 is caused by the damper function of the one-way rotary damper 38 due to the weight load of the halogen lamp house 55. Under the action, it falls freely and returned to the lowered position.

  Then, after completion of the predetermined maintenance, when the mounting table 3 is raised and the halogen lamp house 55 is bolted to the heat treatment chamber 53, the maintenance operation is completed. At this time, the connecting body 48 and the operation handle 49 may be removed and stored at appropriate positions.

  As described above, normally, the table lifter 1 is made to stand by in a folded posture, and during the maintenance of the halogen lamp house 55, the halogen lamp house 55 can be easily and instantly moved through the lifting operation of the table lifter 1 disposed below. The halogen lamp house 55, which is a heavy load, can be removed and has an advantage that maintenance work can be performed efficiently.

  In the substrate processing apparatus 51 of the present embodiment, a structure is shown in which the table lifter 1 is placed in a standby state under the halogen lamp house 55 in advance, but the table lifter 1 is attached to the halogen lamp house 55 as necessary. It is good also as a structure which moves and arrange | positions below.

  In addition, a structure in which the one-way rotary damper 38 and the free fall prevention device 39 are directly provided on the screw shaft body 10 to directly restrict the rotation of the screw shaft body 10 is shown. A shaft is provided, and a one-way rotary damper 38 and a free fall prevention device 39 are mounted on a support shaft provided separately, and the screw shaft body 10 is indirectly rotated through an interlocking mechanism such as a belt transmission mechanism or a gear interlocking mechanism. It is good also as a structure to regulate.

  Further, in the present embodiment, the table lifter 1 has a structure including a so-called single-stage pantograph mechanism 4, but has a structure including a multi-stage pantograph mechanism 4 such as a two-stage type or a three-stage type. Also good.

It is a front view which shows the folding attitude | position of the table lifter which concerns on embodiment of this invention. It is the same part notch top view. It is the III-III sectional view taken on the line of FIG. It is a right view of FIG. FIG. FIG. FIG. 7 is a right side view of FIG. 6. It is a principal part left view of a free fall prevention apparatus. It is a partial explanatory view showing the connection state of the operation handle. It is a schematic explanatory drawing of a substrate processing apparatus.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Table lifter 3 Mounting table 4 Pantograph mechanism 10 Screw shaft body 12 Nut body 17 Support shaft 18 Arm member 19 Arm member 20 Lower slider 21 Support shaft 26 Support bracket 27 Support shaft 31 Pull rod 32 Pulling stopper 34 Cam roller 36 Cam surface 38 One-way rotary damper 39 Free fall prevention device 41 Ratchet gear 42 Ratchet claw 49 Operation handle 51 Substrate processing device 52 Semiconductor wafer 53 Heat treatment chamber 54 Flash lamp house 55 Halogen lamp house

Claims (7)

A mounting table that is lifted and lowered by an expansion / contraction operation of a pantograph mechanism having arm members pivotally supported with each other, a cam drive mechanism that performs an initial extension operation of the pantograph mechanism by pushing up the arm member, and the cam drive mechanism In a table lifter provided with a pantograph extension / contraction operation mechanism that moves the one fulcrum part of the pantograph mechanism toward the other fulcrum part following the initial extension operation, and performs the extension operation of the pantograph mechanism,
A free fall prevention device for stopping the operation of the pantograph telescopic operation mechanism ,
The pantograph expansion / contraction operation mechanism includes a screw shaft body that is rotatably supported and a nut body screwed into the screw shaft body,
The nut body is interlocked with the one fulcrum part, and the cam drive mechanism is provided between the nut body and the arm member,
The free fall prevention device restricts the rotational operation of the screw shaft body to be freely releasable,
A pull rod pivotally supported by the one fulcrum is inserted into the nut body with an axis parallel to the screw shaft body, and the nut body is moved following the initial extension operation by the cam drive mechanism. A table lifter characterized in that when the movement operation is performed along the screw shaft body, the pull rod is pulled by the nut body and the one fulcrum portion is moved toward the other fulcrum portion . The table lifter according to claim 1,
A table lifter comprising: a one-way rotary damper that applies a load to the rotation of the screw shaft body in the direction in which the table is lowered . The table lifter according to claim 1 or 2,
The free fall prevention device restricts rotation of the ratchet gear fixed to the screw shaft body and the screw shaft body in a direction in which the mounting table descends by being detachably locked to the tooth portion of the ratchet gear. A table lifter comprising a ratchet claw to perform. The table lifter according to claim 1 or 2 ,
The table lifter according to claim 1, wherein the free fall prevention device comprises an electromagnetic brake that restricts rotation of the screw shaft body . The table lifter according to any one of claims 1 to 4 ,
A table lifter , wherein a rising angle of the arm member when switching from the initial extension operation by the cam drive mechanism to the extension operation by the pantograph expansion / contraction operation mechanism is in a range of 15 to 30 degrees . The table lifter according to any one of claims 1 to 5 ,
A table lifter characterized in that an operation handle for rotating the screw shaft body is detachably provided at one end of the screw shaft body . A substrate processing apparatus comprising the table lifter according to any one of claims 1 to 6,
The substrate processing apparatus includes: a heat treatment chamber in which a substrate to be heat-treated is detachably set; an upper lamp house disposed above the heat treatment chamber; and a lower side detachably disposed below the heat treatment chamber With a lamp house,
The lower lamp house placed on the placing table is freely attachable and detachable at a raised position of the table lifter disposed so as to be movable up and down below the lower lamp house. A substrate processing apparatus .

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