JP5085228B2 - Piezoelectric fan device - Google Patents

Piezoelectric fan device Download PDF

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JP5085228B2
JP5085228B2 JP2007215432A JP2007215432A JP5085228B2 JP 5085228 B2 JP5085228 B2 JP 5085228B2 JP 2007215432 A JP2007215432 A JP 2007215432A JP 2007215432 A JP2007215432 A JP 2007215432A JP 5085228 B2 JP5085228 B2 JP 5085228B2
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plate
piezoelectric
fan device
piezoelectric fan
elastic metal
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JP2009049255A (en
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和寛 山本
彰治 味村
亮 菊竹
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Fujikura Ltd
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    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D33/00—Non-positive-displacement pumps with other than pure rotation, e.g. of oscillating type
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/0001—Technical content checked by a classifier
    • H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Cooling Or The Like Of Semiconductors Or Solid State Devices (AREA)

Description

本発明は、各種電子機器内のＬＳＩやＣＰＵなどのチップ周辺を局所的に冷却する圧電素子からなる圧電ファン装置に関するものである。   The present invention relates to a piezoelectric fan device including a piezoelectric element that locally cools the periphery of a chip such as an LSI or a CPU in various electronic devices.

各種電子機器に組み込まれているＬＳＩやＣＰＵなどのチップは、局所的な発熱源となっているため、製品によっては適宜冷却することが必要とされる。
このような要求に答えるものとして、多数の放熱片などを有する単なる放熱体（板）なども使用されているが、小型で、より効率的な冷却ができる、圧電素子（セラミック素子）を用いた圧電ファン装置が提供されている（例えば引用文献１）。
特開２０００−３２３８８２号 Since chips such as LSIs and CPUs incorporated in various electronic devices are local heat sources, depending on the product, it is necessary to cool them appropriately.
As a response to such a demand, a simple heat radiating body (plate) having a large number of heat radiating pieces is also used, but a small piezoelectric element (ceramic element) that can be cooled more efficiently is used. A piezoelectric fan device is provided (for example, cited document 1).
JP 2000-323882 A

圧電ファン装置の概略構造を示すと、図５や図６の如くである。これらの装置では、１枚又は２枚の板状圧電素子（通常ＰＺＴなどからなるセラミック素子）１１を、これより長さの長い弾性金属板（ブレード）１２の片面又は両面に接着層１３を介して貼り付けてある。この板状圧電素子１１は、通常その両面に電極１４、１４が形成されていて、弾性金属板１２と一体化された形で圧電ファン部１０としてある。
そして、板状圧電素子１１の両電極１４、１４間に通電されるように、圧電ファン部１０に交流電圧を印加するための交流回路２０を接続する一方、圧電ファン部１０の一端（中央などの途中も可）を、固定部品である支持部３０で、片持ち型として支持・固定してある。また、通常板状圧電素子１１が１枚のものをモノモルフ型（ユニモルフ型）といい、２枚のものをバイモルフ型という。 The schematic structure of the piezoelectric fan device is shown in FIGS. In these apparatuses, one or two plate-like piezoelectric elements (usually ceramic elements made of PZT or the like) 11 are placed on one or both sides of a longer elastic metal plate (blade) 12 via an adhesive layer 13. Pasted. The plate-like piezoelectric element 11 is usually provided with electrodes 14 and 14 on both sides thereof, and is integrated with the elastic metal plate 12 as the piezoelectric fan unit 10.
An AC circuit 20 for applying an AC voltage to the piezoelectric fan unit 10 is connected to the piezoelectric fan unit 10 so as to be energized between the electrodes 14 and 14 of the plate-like piezoelectric element 11, while one end (center, etc.) of the piezoelectric fan unit 10 is connected. Is also supported and fixed as a cantilever type by a support part 30 which is a fixed part. In addition, a single plate-like piezoelectric element 11 is called a monomorph type (unimorph type), and a two-sheet piezoelectric element 11 is called a bimorph type.

このような圧電ファン装置の場合、交流電圧を印加すると、板状圧電素子１１が伸びたり、縮んだりするため、圧電ファン部１０は、全体として正逆方向に交互に屈曲運動するようになる。従って、圧電ファン装置を、電子機器内のＬＳＩやＣＰＵなどのチップ周辺に組み付けて、交流電圧として、共振周波数となる正弦波を加えれば、弾性金属板１２の遊端（自由端）側が扇子状に振動するため、冷却風が発生する。つまり、所望のファン機能が得られる。   In the case of such a piezoelectric fan device, when an AC voltage is applied, the plate-like piezoelectric element 11 expands or contracts, so that the piezoelectric fan unit 10 is bent alternately in the forward and reverse directions as a whole. Therefore, when a piezoelectric fan device is assembled around a chip such as an LSI or CPU in an electronic device and a sine wave having a resonance frequency is applied as an AC voltage, the free end (free end) side of the elastic metal plate 12 has a fan shape. Cooling air is generated. That is, a desired fan function can be obtained.

また、２枚の板状圧電素子１１がある場合、一方の板状圧電素子１１が伸びるときには、他方の板状圧電素子１１が縮み、逆に、一方の板状圧電素子１１が縮むと、他方の板状圧電素子１１が伸びるため、正逆方向の屈曲運動が増幅されるようになる。このため、より大きな冷却風が発生する。つまり、より良好なファン機能が得られる。   In addition, when there are two plate-like piezoelectric elements 11, when one plate-like piezoelectric element 11 extends, the other plate-like piezoelectric element 11 shrinks. Conversely, when one plate-like piezoelectric element 11 shrinks, the other Since the plate-like piezoelectric element 11 is extended, the bending motion in the forward and reverse directions is amplified. For this reason, larger cooling air is generated. That is, a better fan function can be obtained.

このような構造の圧電ファン装置において、冷却性能を高めるため、弾性金属板１２のより大きな高振動を得るには、弾性金属板１２の長さを長くするか、或いは、通電する電圧を高くすることが必要となる。   In the piezoelectric fan device having such a structure, in order to increase the cooling performance, in order to obtain larger high vibration of the elastic metal plate 12, the length of the elastic metal plate 12 is increased or the voltage to be energized is increased. It will be necessary.

しかしながら、近年、電子機器の小型化に伴い冷却部品である、圧電ファン装置を設置するスペースも制限されてきており、装置サイズを大きくすることは困難となってきている。また、一方では、電子機器では多機能化の進行によって、消費電力が上がってきており、圧電ファン装置を高電圧で駆動させることは困難な状況となってきている。   However, in recent years, with the downsizing of electronic equipment, the space for installing a piezoelectric fan device, which is a cooling component, has also been limited, and it has become difficult to increase the size of the device. On the other hand, the power consumption of electronic devices has increased due to the progress of multi-functionalization, and it has become difficult to drive the piezoelectric fan device at a high voltage.

つまり、上記従来構造と同等サイズで、より大きな冷却性能を有する圧電ファン装置が求められている。さらには、従来構造より小サイズても、同等の冷却性能を有する圧電ファン装置が求められている。   That is, there is a need for a piezoelectric fan device having a size equivalent to that of the conventional structure and higher cooling performance. Furthermore, there is a need for a piezoelectric fan device that has the same cooling performance even if it is smaller than the conventional structure.

そこで、本発明者等は、弾性金属板１２に着目し、この板の遊端側に、この板を一旦切断するなどして、接合板を添え板として、その切断片を、平板状の振幅増長板として、接合させたところ、後述する試験結果から明らかなように、高い振幅が得られることを見出した。   Therefore, the present inventors pay attention to the elastic metal plate 12, and once cut the plate on the free end side of the plate, the joining plate is used as an auxiliary plate, and the cut piece is converted into a flat plate-like amplitude. As a result, it was found that a high amplitude can be obtained as is apparent from the test results described later.

本発明は、この点に着目して発明されたものであり、弾性金属板の支持部側とは反対方向の遊端側に、接合板を添え板として、平板状の振幅増長板を設けることにより、高い振幅、即ち高冷却性能を有する、優れた圧電ファン装置を提供するものである。   The present invention was invented paying attention to this point, and provided with a flat plate-like amplitude increasing plate on the free end side of the elastic metal plate in the direction opposite to the support portion side, with the joining plate as an auxiliary plate. Thus, an excellent piezoelectric fan device having a high amplitude, that is, a high cooling performance is provided.

請求項１記載の本発明は、１枚の板状圧電素子と当該板状圧電素子が固定されると共に、当該板状圧電素子より長い長さを有する平板状の弾性金属板とからなる圧電ファン部の一端側又は途中を、支持部で片持ち型に支持・固定すると共に、前記板状圧電素子の外側面の電極と前記弾性金属板に交流電圧を印加する交流回路を備えた圧電ファン装置において、
前記弾性金属板の支持部側とは反対方向の遊端側に、接合板を添え板として、平板状の振幅増長板を設けたことを特徴とする圧電ファン装置にある。 According to a first aspect of the present invention, there is provided a piezoelectric fan comprising a single plate-like piezoelectric element and a plate-like elastic metal plate to which the plate-like piezoelectric element is fixed and having a longer length than the plate-like piezoelectric element. A piezoelectric fan device comprising an AC circuit for supporting and fixing one end side or a halfway of the unit in a cantilevered manner with a support unit and applying an AC voltage to the electrode on the outer surface of the plate-like piezoelectric element and the elastic metal plate In
The piezoelectric fan device is characterized in that a flat amplitude increasing plate is provided on the free end side of the elastic metal plate in the direction opposite to the support portion side, with a joining plate as an auxiliary plate.

請求項２記載の本発明は、２枚の板状圧電素子と前記両板状圧電素子より長い長さを有しこれらの板状圧電素子の間に挟まれた平板状の弾性金属板とからなる圧電ファン部の一端側又は途中を、支持部で片持ち型に支持・固定すると共に、前記両板状圧電素子の外側面の電極間に交流電圧を印加する交流回路を備えた圧電ファン装置において、
前記弾性金属板の支持部側とは反対方向の遊端側に、接合板を添え板として、平板状の振幅増長板を設けたことを特徴とする圧電ファン装置。にある。 According to a second aspect of the present invention, there are provided two plate-like piezoelectric elements and a flat elastic metal plate having a longer length than the two plate-like piezoelectric elements and sandwiched between these plate-like piezoelectric elements. A piezoelectric fan device comprising an AC circuit that supports and fixes one end side or a middle of the piezoelectric fan unit to be cantilevered by a support unit and applies an AC voltage between the electrodes on the outer surfaces of the two plate-like piezoelectric elements. In
A piezoelectric fan device characterized in that a flat amplitude increasing plate is provided on the free end side of the elastic metal plate in the direction opposite to the support portion side, with a joining plate as an auxiliary plate. It is in.

請求項３記載の本発明は、前記接合板が、前記平板状の低弾性材料板からなることを特徴とする請求項１又は２記載の圧電ファン装置にある。   According to a third aspect of the present invention, there is provided the piezoelectric fan device according to the first or second aspect, wherein the joining plate is made of the flat low-elastic material plate.

請求項４記載の本発明は、前記振幅増長板が、前記平板状の弾性金属板と同一又は同種の金属板であることを特徴とする請求項１、２又は３記載の圧電ファン装置にある。   A fourth aspect of the present invention is the piezoelectric fan device according to the first, second or third aspect, wherein the amplitude increasing plate is the same or the same type of metal plate as the flat elastic metal plate. .

本発明の圧電ファン装置によると、モノモルフ型やバイモルフ型のものにおいて、弾性金属板（ブレード）の支持部側とは反対方向の遊端側に、接合板を添え板として、平板状の振幅増長板を設けてあるため、接合板の弾性などの特性を最適ものとして選択することにより、高い振幅が得られる。即ち、高い冷却性能が得られる。
この結果、冷却性能を向上させるに際して、弾性金属板の長さを長くしたり、或いは、通電電圧を高くする必要がないため、装置サイズの小型化が可能となり、また、高電圧駆動が必要とされることもなくなる。 According to the piezoelectric fan device of the present invention, in a monomorph type or bimorph type, a flat plate-like amplitude increase with a joining plate as an auxiliary plate on the free end side opposite to the support side of the elastic metal plate (blade). Since the plate is provided, a high amplitude can be obtained by selecting the optimum properties such as elasticity of the bonding plate. That is, high cooling performance can be obtained.
As a result, it is not necessary to increase the length of the elastic metal plate or increase the energization voltage when improving the cooling performance, so that the size of the apparatus can be reduced, and high voltage driving is required. It will not be done.

図１〜図２は、本発明に係る圧電ファン装置の一例を示したものである。
図中、１００Ａはモノモルフ型の圧電ファン装置で、１１０はその圧電ファン部である。この圧電ファン部１１０は、１枚の板状圧電素子１１１を、これより長さの長い弾性金属板１１２の片面に接着層１１３を介して貼り付けてあり、また、板状圧電素子１１１の両面には電極１１４、１１４が設けてある。１２０は板状圧電素子１１１の外側面の電極１１４と弾性金属板１１２間に交流電圧を印加するための交流回路、１３０は圧電ファン部１１０の一端側（中央などの途中も可）を、片持ち型に支持する固定部品からなる支持部である。 1 to 2 show an example of a piezoelectric fan device according to the present invention.
In the figure, reference numeral 100A denotes a monomorph type piezoelectric fan device, and 110 denotes the piezoelectric fan unit. In the piezoelectric fan unit 110, one plate-like piezoelectric element 111 is attached to one side of an elastic metal plate 112 having a longer length via an adhesive layer 113, and both sides of the plate-like piezoelectric element 111 are also attached. Are provided with electrodes 114, 114. Reference numeral 120 denotes an AC circuit for applying an AC voltage between the electrode 114 on the outer surface of the plate-like piezoelectric element 111 and the elastic metal plate 112, and 130 denotes one end side of the piezoelectric fan unit 110 (possibly in the middle or the like). It is a support part which consists of a fixed component supported by a holding type.

なお、板状圧電素子１１１の内側の電極１１４への通電は通常の方法で行う。上記のように弾性金属板１１２側から通電するときには、弾性金属板１１２側の接着層１１３を導電性接着層として行う。このように導電性接着層とする場合、本発明では、板状圧電素子１１１の内側の電極１１４を省略することもできる。これにより、装置の薄型化が得られる。また、接着層１１３が非導電性接着層の場合には、交流回路１２０側のリード線などを直接板状圧電素子１１１の内側の電極１１４側に接続すればよい。   Note that energization of the electrode 114 inside the plate-like piezoelectric element 111 is performed by a normal method. When energizing from the elastic metal plate 112 side as described above, the adhesive layer 113 on the elastic metal plate 112 side is used as a conductive adhesive layer. When the conductive adhesive layer is thus formed, in the present invention, the electrode 114 inside the plate-like piezoelectric element 111 can be omitted. Thereby, thickness reduction of an apparatus is obtained. When the adhesive layer 113 is a non-conductive adhesive layer, a lead wire or the like on the AC circuit 120 side may be directly connected to the inner electrode 114 side of the plate-like piezoelectric element 111.

上記弾性金属板１１２（ブレード）は、通常平板状の真鍮やＳＵＳなどの金属板などからなる。そして、その先端側には、接合板１４０を添え板として、平板状の振幅増長板１５０を設けてある。この接合板１４０としては、特に限定されないが、薄板状で強度の大きい低弾性材料のものの使用が望ましい。例えば、硬質で弾性の低いＰＥＴなどの硬質樹脂板などがある。弾性の低い金属板も使用可能である。
また、振幅増長板１５０側の板材も特に限定されないが、予め長め製造した弾性金属板１１２を切断し、その切断片側を用いるとよい。勿論、同種の他の板材として提供することもできる。接合板１４０の接合にあたっては接着剤で接合する。接合板１４０、弾性金属板１１２、振幅増長板１５０のいずれもが、溶接可能な金属製の場合には、溶接接合することもできる。このとき、接合板１４０の厚さや、弾性金属板１１２と振幅増長板１５０間の間隔（ギャップ）は、板状圧電素子１１１の振動時、これらの接合体の振動が増長（増幅）される寸法に設定する。つまり、弾性金属板１１２単体の同一長さのものに比較して、上記接合体の剛性が小さくなるように設定する。 The elastic metal plate 112 (blade) is usually made of a flat metal plate such as brass or SUS. A flat amplitude increasing plate 150 is provided on the front end side with the joining plate 140 as an attached plate. The bonding plate 140 is not particularly limited, but it is desirable to use a thin plate-like and low-elasticity material having high strength. For example, there is a hard resin plate such as PET which is hard and has low elasticity. A metal plate with low elasticity can also be used.
Further, the plate material on the amplitude increasing plate 150 side is not particularly limited, but it is preferable to cut the elastic metal plate 112 manufactured in advance and use the cut piece side. Of course, it can also provide as another board | plate material of the same kind. When joining the joining plate 140, it joins with an adhesive agent. When all of the joining plate 140, the elastic metal plate 112, and the amplitude increasing plate 150 are made of weldable metal, they can be welded. At this time, the thickness of the bonding plate 140 and the interval (gap) between the elastic metal plate 112 and the amplitude increasing plate 150 are dimensions that increase (amplify) the vibration of these bonded bodies when the plate-like piezoelectric element 111 vibrates. Set to. That is, the rigidity of the joined body is set to be smaller than that of the elastic metal plate 112 having the same length.

この剛性の低下により、弾性金属板１１２、接合板１４０、振幅増長板１５０の接合体の可撓性が増して、撓み易くなるため、結果として、振幅増長効果が得られる。
このような接合板１４０の使用による振幅増長効果からすると、この接合板１４０は、図２に示すような、弾性金属板１１２とほぼ同一の幅の１枚の板材に限定されない。複数の分割された分割板材として接合することもできる。また、図示のように、裏側から接合する場合の他に、弾性金属板１１２と振幅増長板１５０側に嵌め込み用の切欠き部を設け、これに分割板材を嵌め込んで接合することも可能である。また、１枚の接合板１４０の接合側縁部に、上記弾性金属板１１２と振幅増長板１５０側の切欠き部に嵌め込れる突起部を１又は複数設けて嵌め込み接合させてもよい。つまり、接合板１４０の接合方法は特に限定されない。 Due to the decrease in rigidity, the flexibility of the joined body of the elastic metal plate 112, the joining plate 140, and the amplitude increasing plate 150 is increased and is easily bent. As a result, an amplitude increasing effect is obtained.
In view of the amplitude increasing effect by using such a joining plate 140, the joining plate 140 is not limited to a single plate material having substantially the same width as the elastic metal plate 112 as shown in FIG. It can also be joined as a plurality of divided plate members. Further, as shown in the figure, in addition to the case of joining from the back side, it is also possible to provide a notch for fitting on the elastic metal plate 112 and the amplitude increasing plate 150 side, and to fit and join the divided plate material thereto. is there. Further, one or a plurality of protrusions that fit into the cutouts on the elastic metal plate 112 and the amplitude increasing plate 150 side may be provided and joined to the joining side edge portion of one joining plate 140. That is, the joining method of the joining plate 140 is not particularly limited.

図３は、本発明に係る圧電ファン装置の他の例を示したものである。
図中、この圧電ファン装置１００Ｂはバイモルフ型の圧電ファン装置で、圧電ファン部１１０が、２枚の板状圧電素子１１１、１１１とこれが接着層１１３、１１３を介して貼り付られる弾性金属板１１２の他、接合板１４０、振幅増長板１５０からなる点以外は、上記圧電ファン装置１００Ａと同構造のものである。そして、板状圧電素子１１１、１１１が２枚あるため、上記圧電ファン装置１００Ａに比較すると、弾性金属板１１２のより大きな振幅増長効果が得られる。 FIG. 3 shows another example of the piezoelectric fan device according to the present invention.
In the figure, the piezoelectric fan device 100B is a bimorph type piezoelectric fan device, and a piezoelectric fan unit 110 is attached to two plate-like piezoelectric elements 111 and 111 and an elastic metal plate 112 to which the piezoelectric fan unit 110 is attached via adhesive layers 113 and 113. In addition, the piezoelectric fan device 100A has the same structure as that of the piezoelectric fan device 100A except that it includes a joining plate 140 and an amplitude increasing plate 150. Since there are two plate-like piezoelectric elements 111, 111, a larger amplitude increasing effect of the elastic metal plate 112 can be obtained as compared with the piezoelectric fan device 100A.

〈実施例・比較例〉
このような本発明に係る圧電ファン装置の効果を確認するため、図１〜図３に示す本発明の構成に対応するモノモルフ型及びバイモルフ型の圧電ファン装置（実施例１〜２）と、図５〜図６に示す従来型の構成に対応するモノモルフ型及びバイモルフ型の圧電ファン装置（比較例１〜２）とからなる各サンプルを製造して、±１２Ｖの交流電圧を印加し、弾性金属板の振幅試験を行なった。その結果は、図４の如くであった。 <Examples and comparative examples>
In order to confirm the effects of the piezoelectric fan device according to the present invention, monomorph type and bimorph type piezoelectric fan devices (Examples 1 and 2) corresponding to the configuration of the present invention shown in FIGS. 5 to 6, each sample consisting of a monomorph type and bimorph type piezoelectric fan device (Comparative Examples 1 and 2) corresponding to the conventional configuration shown in FIG. 6 is manufactured, an AC voltage of ± 12 V is applied, and an elastic metal A plate amplitude test was performed. The result was as shown in FIG.

なお、上記各サンプルの圧電ファン装置において、弾性金属板１１２、接合板１４０、振幅増長板１５０の接合体の長さ、及び弾性金属板１２の長さは共に２０ｍｍ、これらの幅は４．０ｍｍ、板状圧電素子１１１、１１の長さは７．５ｍｍである。また、上記弾性金属板１１２、１２の厚さは０．０５ｍｍ、接合板１４０の長さは４ｍｍ、接合板１４０の厚さは０．０５ｍｍ、振幅増長板１５０の長さは６ｍｍ、振幅増長板１５０の厚さは０．０５ｍｍ、弾性金属板１１２と振幅増長板１５０との接合部分の隙間は０．５ｍｍである。   In the piezoelectric fan device of each sample, the length of the bonded body of the elastic metal plate 112, the bonding plate 140, and the amplitude increasing plate 150, and the length of the elastic metal plate 12 are both 20 mm, and the width thereof is 4.0 mm. The lengths of the plate-like piezoelectric elements 111 and 11 are 7.5 mm. The elastic metal plates 112 and 12 have a thickness of 0.05 mm, the length of the joining plate 140 is 4 mm, the thickness of the joining plate 140 is 0.05 mm, the length of the amplitude increasing plate 150 is 6 mm, and the amplitude increasing plate. The thickness of 150 is 0.05 mm, and the gap at the joint between the elastic metal plate 112 and the amplitude increasing plate 150 is 0.5 mm.

図４の振幅データから、接合板１４０を用いて接合された弾性金属板１１２（接合体）を有する本発明に係る圧電ファン装置（実施例１〜２）は、同等の長さの単独の弾性金属板１２を有する圧電ファン装置（比較例１〜２）に比較して、いずもの場合も、振幅が大きくなっていることが分かる。つまり、４５％〜４８％程度の振幅増長効果が得られていることが分かる。なお、同図４における縦軸の振幅値は、図５に対応するモノモルフ型の圧電ファン装置（比較例１）の振幅値を１．０とした場合の比で示してある。   From the amplitude data of FIG. 4, the piezoelectric fan device (Examples 1 and 2) according to the present invention having the elastic metal plate 112 (joined body) joined by using the joining plate 140 is a single elastic having the same length. It can be seen that the amplitude is increased in all cases as compared with the piezoelectric fan device having the metal plate 12 (Comparative Examples 1 and 2). That is, it can be seen that an amplitude increasing effect of about 45% to 48% is obtained. Note that the amplitude value on the vertical axis in FIG. 4 is a ratio when the amplitude value of the monomorph type piezoelectric fan device (Comparative Example 1) corresponding to FIG. 5 is 1.0.

なお、本発明に係る圧電ファン装置の場合、モノモルフ型やバイモルフ型であれば、図１〜図３の構造ものに限定されず、弾性金属板に、接合板を添え板として、振幅増長板を接合するものであれば、その他の形状、構造などを広く含むものである。   In the case of the piezoelectric fan device according to the present invention, as long as it is a monomorph type or a bimorph type, the structure is not limited to that shown in FIGS. If it joins, it will include widely other shapes and structures.

本発明に係る圧電ファン装置の一例を示した概略縦断側面図である。It is the general | schematic longitudinal section side view which showed an example of the piezoelectric fan apparatus which concerns on this invention. 図１の圧電ファン装置の一部省略斜視図である。FIG. 2 is a partially omitted perspective view of the piezoelectric fan device of FIG. 1. 本発明に係る圧電ファン装置の他の例を示した概略縦断側面図である。It is the general | schematic longitudinal section side view which showed the other example of the piezoelectric fan apparatus which concerns on this invention. 本発明に係る圧電ファン装置の効果を確認する図（棒グラフ）である。It is a figure (bar graph) which confirms the effect of the piezoelectric fan apparatus which concerns on this invention. 従来の圧電ファン装置を示した概略縦断側面図である。It is the general | schematic longitudinal side view which showed the conventional piezoelectric fan apparatus. 従来の他の圧電ファン装置を示した概略縦断側面図である。It is the general | schematic longitudinal side view which showed the other conventional piezoelectric fan apparatus.

符号の説明Explanation of symbols

１００Ａ〜１００Ｂ・・・圧電ファン装置、１１０・・・圧電ファン部、１１１・・・板状圧電素子、１１２・・・弾性金属板、１１３・・・接着層、１１４・・・電極、１２０・・・交流回路、１３０・・・支持部、１４０・・・接合板、１５０・・・振幅増長板   DESCRIPTION OF SYMBOLS 100A-100B ... Piezoelectric fan apparatus, 110 ... Piezoelectric fan part, 111 ... Plate-shaped piezoelectric element, 112 ... Elastic metal plate, 113 ... Adhesive layer, 114 ... Electrode, 120 * ..AC circuit, 130 ... support section, 140 ... joining plate, 150 ... amplitude increasing plate

Claims (4)

１枚の板状圧電素子と当該板状圧電素子が固定されると共に、当該板状圧電素子より長い長さを有する平板状の弾性金属板とからなる圧電ファン部の一端側又は途中を、支持部で片持ち型に支持・固定すると共に、前記板状圧電素子の外側面の電極と前記弾性金属板に交流電圧を印加する交流回路を備えた圧電ファン装置において、
前記弾性金属板の支持部側とは反対方向の遊端側に、接合板を添え板として、平板状の振幅増長板を設けたことを特徴とする圧電ファン装置。 One plate-like piezoelectric element and the plate-like piezoelectric element are fixed, and supports one end side or the middle of a piezoelectric fan portion composed of a plate-like elastic metal plate having a longer length than the plate-like piezoelectric element. In the piezoelectric fan device comprising an AC circuit for applying an AC voltage to the electrode on the outer surface of the plate-like piezoelectric element and the elastic metal plate, while being supported and fixed to the cantilever at the part,
A piezoelectric fan device characterized in that a flat amplitude increasing plate is provided on the free end side of the elastic metal plate in the direction opposite to the support portion side, with a joining plate as an auxiliary plate. ２枚の板状圧電素子と前記両板状圧電素子より長い長さを有しこれらの板状圧電素子の間に挟まれた平板状の弾性金属板とからなる圧電ファン部の一端側又は途中を、支持部で片持ち型に支持・固定すると共に、前記両板状圧電素子の外側面の電極間に交流電圧を印加する交流回路を備えた圧電ファン装置において、
前記弾性金属板の支持部側とは反対方向の遊端側に、接合板を添え板として、平板状の振幅増長板を設けたことを特徴とする圧電ファン装置。 One end side or midway of a piezoelectric fan unit comprising two plate-like piezoelectric elements and a flat elastic metal plate sandwiched between the two plate-like piezoelectric elements and having a longer length than the two plate-like piezoelectric elements Is supported and fixed in a cantilevered manner by a support portion, and in the piezoelectric fan device including an AC circuit that applies an AC voltage between the electrodes on the outer surfaces of the two plate-like piezoelectric elements,
A piezoelectric fan device characterized in that a flat amplitude increasing plate is provided on the free end side of the elastic metal plate in the direction opposite to the support portion side, with a joining plate as an auxiliary plate. 前記接合板が、前記平板状の低弾性材料板からなることを特徴とする請求項１又は２記載の圧電ファン装置。 3. The piezoelectric fan device according to claim 1, wherein the joining plate is made of the flat low-elastic material plate. 前記振幅増長板が、前記平板状の弾性金属板と同一又は同種の金属板であることを特徴とする請求項１、２又は３記載の圧電ファン装置。 The piezoelectric fan device according to claim 1, 2 or 3, wherein the amplitude increasing plate is the same or the same type of metal plate as the flat elastic metal plate.
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CN101772632B (en) * 2007-08-21 2014-03-12 丰田自动车株式会社 Device for controlling vehicle drive unit

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