JP5084191B2 - Fine recess processing apparatus and fine recess processing method - Google Patents

Description

  The present invention, for example, has a fine structure for realizing low friction on the inner peripheral surface of a cylinder bore (circular hole) in a cylinder block of an automobile engine and the outer peripheral surface of a member such as a crank journal, a crankpin, and a cam journal. The present invention relates to a fine concave portion processing apparatus and a fine concave portion processing method used to form a concave portion (oil sump).

Conventionally, as a method for forming a fine concave portion on the surface of a workpiece, for example, there is a processing method in which a fine concave portion is transferred to a workpiece by pressing a fine indenter together with the workpiece into a known rolling device. is there.
The Japan Society of Mechanical Engineers "Mechanical Engineering Handbook", May 15, 1988, B2-111

  However, as described above, in the processing method of pressing the indenter with a fine shape together with the workpiece into the rolling device, either the displacement of the indenter or the load is controlled so as to be a predetermined amount. If the relationship between indentation displacement and indentation load changes significantly depending on the indenter shape and material characteristics, or the indenter indentation depth and indentation load, the variation in the shape of the fine recess, for example, the processing depth, may increase. It has been a problem to solve this problem.

  The present invention has been made paying attention to the above-described conventional problems, and measures and calculates the load applied to the workpiece and the displacement of the machining tool to control both the workpiece load and the displacement of the machining tool. As a result, it is possible to provide a fine recessed portion processing apparatus and a fine recessed portion processing method capable of suppressing the variation in the shape of the fine recessed portion due to the change in plastic deformation behavior caused by the difference in the workpiece material and the shape of the processing tool. The purpose is to do.

  The fine recessed portion machining apparatus according to the present invention forms fine recessed portions on the surface of a workpiece, and a machining tool having fine irregularities on the surface, and the machining tool is moved closer to and away from the workpiece to thereby remove the surface of the machining tool. A pressing mechanism capable of being pressed against the surface of the work; load measuring means for measuring a load applied to the work by the pressing mechanism; and displacement measuring means for measuring a displacement of the processing tool, the load measuring means, Control means is provided for controlling the load applied to the machining tool and the displacement of the machining tool by calculating signals from both of the displacement measuring means, and the control means is a change rate of the load measured by the load measuring means. And the displacement change rate measured by the displacement measuring means, the relative displacement of the machining tool from the position of the workpiece surface detected by the displacement measuring means is a predetermined change. It is possible to switch between two types of control during machining, ie, displacement control by a displacement measuring means that controls the load so that the workpiece load detected by the load measuring means becomes a predetermined load. It is a thing.

  The fine recess processing method according to the present invention detects the contact of the processing tool with the work surface by the load measuring means when the fine recess is formed on the surface of the work using the above-described fine recess processing apparatus, and the control means Displacement by a displacement measuring means for controlling the relative displacement of the machining tool to be a predetermined displacement by setting the relative displacement from the position of the workpiece surface as the amount of indentation displacement of the machining tool onto the workpiece surface Two types of control, that is, control and load control for controlling the workpiece load detected by the load measuring means to be a predetermined load, are switched during machining.

  In the fine recess processing apparatus and the fine recess processing method of the present invention, the load applied to the workpiece and the displacement of the processing tool are respectively measured and calculated by the control means, and the displacement control by the displacement measurement means and the load control by the load measurement means are performed. If the two types of control are switched during machining, both the workpiece load and machining tool displacement can be controlled, resulting in differences in workpiece material and machining tool shape. Regardless of this, fine concave portions can be formed with almost no variation over the entire region to be processed on the surface of the workpiece.

According to the present invention, it is possible to measure and calculate the load applied to the workpiece and the displacement of the machining tool, and to control both the workpiece load and the displacement of the machining tool. As a result, it is possible to obtain a very excellent effect that the variation in the shape of the fine recesses due to the change in the plastic deformation behavior due to the difference in the shape of each can be suppressed.
Moreover, the variation in the shape of the fine recesses due to the change in the plastic deformation behavior caused by the difference in the workpiece material and the shape of the processing tool can be suppressed.

  In the fine recess processing apparatus of the present invention, the control means includes a displacement control by a displacement measuring means for controlling the relative displacement of the processing tool from the position of the workpiece surface detected by the load measuring means to be a predetermined displacement, Two types of control, load control for controlling the work load detected by the load measuring means to be a predetermined load, can be switched during machining, or the control means is detected by the load measuring means. The workpiece load and the displacement of the machining tool detected by the displacement measuring means are constantly monitored and recorded, and the displacement is calculated based on the calculation results obtained by calculating the rate of change between the detected load and displacement. Control and load control can be switched during machining, and in either case, the plastic deformation behavior caused by the difference in workpiece material and machining tool shape So that the can suppress fewer variations in the shape of the fine recesses by reduction.

  Further, in the fine recess processing apparatus of the present invention, a processing shape measuring means for measuring the shape of the fine recess formed on the surface of the workpiece after processing is provided, and the control means is provided for the fine recess detected by the processing shape measuring means. It is also possible to adopt a configuration that enables switching between displacement control and load control during processing based on the distribution of the processing depth. In this case, the fine recesses formed on the surface of the workpiece after processing are possible. Since the shape can be measured and processing can be performed by selecting either displacement control or load control based on the variation in the shape, it is possible to process fine recesses with less variation.

  Furthermore, in the fine recess processing apparatus of the present invention, the pressing mechanism is configured as an actuator that operates by a piezoelectric element, the pressing mechanism is configured as an actuator that operates by a giant magnetostrictive element, or the pressing mechanism is a coil spring. It can be set as the structure which comprises.

  If the pressing mechanism is an actuator that is operated by a piezoelectric element, the processing tool can be pressed against the surface of the workpiece at high speed, and the processing time can be shortened. When the actuator is operated by a magnetostrictive element, the processing tool can be pressed against the surface of the workpiece at a higher speed, and the processing time can be further shortened. Since a larger displacement can be obtained with a magnetostrictive element, the size of the device can be reduced. If the pressing mechanism has a coil spring, the load due to disturbances such as workpiece accuracy and vibration It is possible to reduce the fluctuations of.

  Furthermore, in the fine recess processing apparatus of the present invention, the processing tool can adopt a configuration having a large number of fine protrusions on the surface, and by adopting this configuration, the surface of the workpiece is covered. A plurality of fine recesses can be processed in a short time over the entire processing site.

  Furthermore, in the fine recess processing apparatus of the present invention, the processing roller having a large number of fine protrusions on the outer peripheral surface and rotating around the roller axis can be used as a processing tool. By performing the processing while rotating the processing roller, the fine recesses can be processed in a short time over the entire region to be processed on the surface of the workpiece.

  On the other hand, in the fine recess machining method of the present invention, the control means constantly monitors and records the workpiece load detected by the load measuring means and the displacement of the machining tool detected by the displacement measuring means, and is detected. Based on the calculation results obtained by calculating each change rate of load and displacement, it can be configured to switch between displacement control and load control during processing. Regardless of the difference in shape, the fine recesses can be formed almost without variation over the entire region to be processed on the surface of the workpiece.

  Further, in the fine recess processing method of the present invention, when forming the fine recess on the surface of the workpiece using the micro recess processing apparatus having the processing shape measuring means, the control means detects the micro recesses detected by the processing shape measuring means. Based on the processing depth distribution, displacement control by the displacement measuring means for controlling the relative displacement of the machining tool from the position of the workpiece surface detected by the displacement measuring means to be a predetermined displacement, and the load measuring means It is possible to adopt a configuration in which two types of control, load control for controlling the detected workpiece load to become a predetermined load, can be switched during machining. The recess can be processed.

  And the sliding member which has the fine recessed part processed using the above-mentioned fine recessed part processing apparatus in a sliding surface, for example, the engine which has the fine recessed part T in the internal peripheral surface Ba of the cylinder bore B, as shown in FIG. The cylinder block SB has a low friction on the inner peripheral surface Ba of the cylinder bore B on which the piston slides. As a result, the cylinder block SB can contribute to an improvement in fuel consumption.

  On the other hand, a sliding member having fine concave portions processed by using the fine concave portion processing apparatus described above on the outer peripheral surface as a sliding surface, for example, as shown in FIG. 16, the crank journal portion Ca and the crank pin portion Cb are fine. The engine member such as the crank C having the recess T, the cam journal portion or cam having the fine recess in the cam lobe portion, and the balancer shaft having the fine recess in the journal portion has low friction on the outer peripheral surface which is a sliding surface. As a result, it can contribute to an improvement in fuel consumption.

  EXAMPLES Hereinafter, although an Example demonstrates this invention still in detail, this invention is not limited to a following example.

  As shown in FIG. 1 and FIG. 2, this fine recess processing apparatus 1 is an NC machine tool that forms fine recesses on the surface of a flat workpiece W, and can be moved in a horizontal plane by placing the workpiece W thereon. Stage 2, a crosshead 4 detachably mounted with a processing tool 3 made of diamond or cemented carbide and having a fine and hard projection 3 a at its tip, and the crosshead 4 is moved in the vertical direction. A servo motor 5 and a ball screw 6 as a pressing mechanism that enables the processing tool 3 to be pressed against the surface Wa of the workpiece W, and an arithmetic / control unit 7 as a control unit that controls the movement of the stage 2 and the cross head 4. The crosshead 4 is provided with a load sensor 8 as a load measuring means for measuring a load applied to the machining tool 3 and outputting the load to the calculation / control unit 7, and measuring a displacement of the machining tool 3 and the workpiece W. And the displacement sensor 9 as a displacement measuring means for outputting the arithmetic and control unit 7 is attached.

  When forming the fine concave portion on the surface Wa of the workpiece W using the fine concave portion processing apparatus 1, first, the workpiece W is attached to the stage 2 (step S1) as shown in FIG. The stage 2 is moved so that the tip of the machining tool 3 is positioned in the vicinity of the workpiece W, and the cross head 4 is lowered so that the machining depth (target push-in) Processing conditions such as depth, indentation load), processing range and processing speed are input (step S2).

  At this time, in the plastic working, the indentation depth of the machining tool 3 and the machining depth do not coincide with each other due to the springback of the material or the plastic flow of the material, and therefore the target indentation depth and indentation load that can obtain a desired machining depth. Is clarified in a preliminary experiment or the like, and the value is input. Control of the processing tool 3 during processing includes load control for controlling the load measured from the load sensor 8 to a target load set before processing, and the amount of pressing from the workpiece surface Wa before the processing. This is performed by one of the displacement control methods for controlling so as to achieve the set target pushing displacement.

  Next, the machining tool 3 is brought close to the workpiece W while measuring the displacement and load of the machining tool 3, and machining is started (steps S3 and S4). Here, as shown in FIG. 5A, until the machining tool 3 and the workpiece W come into contact, only the displacement of the machining tool 3 increases and no load is generated (state I in FIG. 6). And as shown in FIG.5 (b), when the processing tool 3 is made to contact the workpiece | work W, a load will generate | occur | produce (state II of FIG. 6). At this time, the relative displacement of the machining tool 3 from the workpiece surface Wa becomes the pushing amount from the workpiece surface Wa, and in the displacement control, the pushing amount from the workpiece surface Wa is controlled to become the target pushing amount ( Steps S5 and S6).

  Further, as shown in FIG. 5 (c), processing is performed by pressing while measuring the load and displacement applied to the processing tool 3 (state III in FIG. 6). Based on the sequentially measured load and displacement, the pressing load and the change rate (inclination) of the pressing displacement at a predetermined time interval are calculated (step S7).

  First, when the change ratio is larger than a certain ratio A (when the increase in pressing load is large with respect to the pressing displacement: in the case of area A in FIG. 7), load control is performed (steps S8 to S10). On the contrary, when the change rate is smaller than a certain rate A (when the increase in the pressing load is small with respect to the pressing displacement: in the case of the region C in FIG. 7), displacement control is performed (steps S8, S11, S12). .

  Here, the ratio A, which is a reference for the magnitude of the change ratio, is determined and input in advance based on the displacement and load measurement control accuracy of the apparatus to be used, preliminary experiments, and the like. At the same time, the time variation of the change rate of the displacement and the load is also calculated, and by the increase / decrease of the change rate (in the case of region A → i in FIG. 7 or region C → d in FIG. 7), The control method is selected again (steps S9, S13, and S14; steps S11, S15, and S16), and the pressing is terminated by the control method determined based on these determinations.

  Then, after the pressing is completed, when the processing tool 3 is separated from the workpiece W (step S17), the first processing is ended. In the processing during this time, since the control method is changed in accordance with the deformation behavior of the material depending on the depth to be processed and the load, variations in the processing depth of the processed fine recesses can be reduced. Thereafter, the stage 2 is moved to the next processing position and the above processing is performed again, and these operations are repeated a plurality of times to form fine concave portions over the entire processing surface range (steps S18 and S19).

  At this time, as shown in FIG. 2B, when the machining tool 3 having a plurality of fine protrusions 3a is used, the number of machining operations can be reduced, and as a result, the machining time can be shortened.

  Further, it is understood that the final control method at the first machining is load control (in the case of area A or area D in FIG. 7), and that the entire machining range of the workpiece W has uniform material characteristics. If so (step S20), the control method as described above is not changed after the second time, and the load acting on the machining tool 3 is measured and the load is controlled by this measurement value (step S20). S21; Steps S22 to S28 in the flowchart shown in FIG. 4, and it is possible to realize the simplification of the machining control and the improvement of the machining speed while suppressing the variation in the machining depth of the fine recesses.

  In the above-described embodiment, the case where the pressing mechanism capable of pressing the processing tool 3 against the surface Wa of the workpiece W is provided with the servo motor 5 and the ball screw 6 is not limited thereto. As another configuration, for example, as shown in FIG. 8, an actuator 15 that operates by a piezoelectric element (or a giant magnetostrictive element) can be employed as a pressing mechanism.

  When the actuator 15 operated by the piezoelectric element is a pressing mechanism, the processing tool 3 can be pressed against the surface Wa of the workpiece W at a high speed, and the processing time can be shortened. If the actuator 15 is operated by the giant magnetostrictive element, the machining tool 3 can be pressed against the surface Wa of the workpiece W at a higher speed, and the machining time can be further shortened. Thus, if the magnetostrictive elements have the same size, a larger displacement can be obtained, so that the size of the apparatus can be reduced.

  Further, as shown in FIG. 9, the pressing mechanism may include an actuator 25 and a coil spring 26, and in this case, fluctuations in load due to disturbances such as workpiece accuracy and vibration can be reduced. It will be.

  FIG. 10 shows a fine recess processing apparatus according to another embodiment of the present invention. This fine recess processing apparatus 31 forms a fine recess in the circular hole inner peripheral surface WBa of the workpiece WB, and has a main shaft 32 that rotates around a vertical rotation axis L and a fine unevenness at the tip. Machining tool 33, a tool support 34 that supports the machining tool 33, a housing 35 that holds the tool support 34 movably in a direction orthogonal to the main shaft 32, and a central axis that is a rotation axis L of the main shaft 32. Is provided with a pressing mechanism 40 that allows the processing tool 33 to approach and separate from the inner peripheral surface WBa of the circular hole of the workpiece WB matched to the above, and presses the fine irregularities at the tip of the processing tool 33. The spline shaft 34 a provided on the side opposite to the tool 33 is slidably fitted to the spline nut 35 a provided on the housing 35, so that it can move in a direction orthogonal to the main shaft 32.

  The pressing mechanism 40 includes a compression coil spring 41 positioned between the tool support 34 and the housing 35, and a stepping motor (not shown) built in the upper end of the housing 35. The stepping motor of the pressing mechanism 40 By bringing the entire housing 35 close to the circular hole inner peripheral surface WBa of the workpiece WB by the operation of, and applying a load in a direction perpendicular to the main shaft 32 to the processing tool 33 by the compression coil spring 41, The fine irregularities of the processing tool 33 are pressed against the circular hole inner peripheral surface WBa.

  The fine recess processing apparatus 31 includes a calculation / control unit 37 as a control unit that controls the operation of a stepping motor (not shown) of the pressing mechanism 40, and between the housing 35 and the compression coil spring 41, A load sensor 38 is provided as a load measuring unit that measures a load applied to the processing tool 33 and outputs the load to the calculation / control unit 37, and the processing tool 33 is provided between the tool support 34 and the housing 35. And a displacement sensor 39 as a displacement measuring means for measuring the displacement of the workpiece WB and outputting it to the calculation / control section 37.

  Since the fine recess processing apparatus 31 has the above-described configuration, the fine recesses can be formed almost without variation over the entire region to be processed of the circular hole inner peripheral surface WBa of the workpiece WB.

  11 and 12 show a fine recess processing apparatus according to still another embodiment of the present invention. As shown in FIG. 11, the fine recess processing apparatus 51 includes a processing roller 53 having a fine protrusion 53 a on the outer peripheral surface and rotating around the roller shaft 52, and the processing roller 53 parallel to the roller shaft 52. A pressing mechanism 60 that allows the protrusion 53a of the processing roller 53 to be pressed against the outer peripheral surface WCa of the work WC by approaching and separating from the work WC rotating around the main shaft (rotating shaft) 54, and the work roller 53 with respect to the work WC A load sensor 58 as a load measuring means for measuring the pressing load, a displacement sensor 59 as a displacement measuring means for measuring the displacement of the processing roller 53 and the workpiece WC, and signals from both the load sensor 58 and the displacement sensor 59 are calculated. An arithmetic / control unit 57 that controls the load applied to the processing roller 53 and the displacement of the processing roller 53 is provided.

  The pressing mechanism 60 includes a slider 61 that reciprocates in the vertical direction by the operation of an actuator 65 such as hydraulic pressure, a housing 62 that is supported by the slider 61, and a processing roller 53 that is supported by the roller shaft 52. On the other hand, an arm 63 that can be moved back and forth in the vertical direction and a coil spring 64 that presses the processing roller 53 against the workpiece WC via the arm 63 are provided.

  In the fine recess processing apparatus 51, the work WC is attached to the main shaft 54 via the chuck 55, and is moved so that the processing part is positioned directly below the processing roller 53. At the same time, the processing roller 53 is lowered by the actuator 65 so that the tip of the processing roller 53 is positioned in the vicinity of the workpiece WC.

  At this time, as shown in FIG. 12, the arm 63 is provided with a locate pin 65, and by fixing the processing roller 53 with the locate pin 65, any one of the plurality of fine protrusions 53 a arranged on the outer peripheral surface thereof. One fine protrusion 53a can be vertically opposed to the workpiece WC.

  Thereafter, the fine protrusions 53a of the processing roller 53 are pressed against the work WC in the same processing order as in the previous embodiment, and the control method and selection method in this case are the same as in the previous embodiment.

  Then, after the processing roller 53 is pushed to a predetermined position, the locating pin 65 that has fixed the processing roller 53 before the processing is separated from the processing roller 53 so that the processing roller 53 is free to rotate.

  At the same time, the pressing load at this time is recorded by the calculation / control unit 57, and then the workpiece WC is rotated while pressing the processing roller 53 against the workpiece WC to form fine concave portions over the entire region to be processed.

  At this time, in consideration of variation in displacement due to the accuracy of the workpiece WC and the like, if the control is made so that the load recorded at the end of the first pressing is constant during the rotation of the processing roller 53, the entire area to be processed can be obtained. Fine recesses with little variation can be processed at high speed.

  13 and 14 show a fine recess processing apparatus according to still another embodiment of the present invention. As shown in FIG. 13, the micro recess processing apparatus 71 is different from the micro recess processing apparatus 1 according to the previous embodiment in that an actuator 75 operated by a piezoelectric element (or a giant magnetostrictive element) is used as a pressing mechanism. A laser displacement meter 76 (which may be an eddy current measuring instrument or a stylus measuring instrument) is provided as a processing shape measuring means for measuring the shape of the fine recess T formed on the surface Wa of the workpiece W after processing. The other configuration is the same as that of the fine recess processing apparatus 1 according to the previous embodiment.

  In this fine recess processing apparatus 71, the workpiece W is moved so that the processing site is located directly below the processing tool 3. At the same time, after the machining tool 3 is lowered by the actuator 75 so that the tip of the machining tool 3 is positioned in the vicinity of the workpiece W, the machining / control unit 7 sends the machining depth (target pushing depth or pushing force). Input machining conditions such as load), machining range and machining speed.

  Subsequent to this, machining is started, and the control during machining may be any of the load control and the displacement control described in the previous embodiment. Processing is performed a predetermined number of times by either control method of load control or displacement control, the processing depth of the processed fine recess T is measured by the laser displacement meter 76, and the measurement result is output to the calculation / control unit 7. To calculate distribution variations such as standard deviation and variance.

  Next, machining is performed the same number of times by a control method different from the above-described control method, and the machining shape is measured by the laser displacement meter 76 in the same manner as described above to calculate distribution variations such as standard deviation and dispersion.

  Then, these variations are compared as shown in FIG. 14, and subsequent processing is performed with a control method with less variation (referred to as control A in FIG. 14). If the variation increases due to a change in the material characteristics of the processing range, the control method is changed again. Thus, based on the distribution of the processing depth of the fine recess T detected by the laser displacement meter 76, the processing depth varies over the entire processing region by performing processing while changing the displacement control and load control. It is possible to form fine concave portions with a small amount.

It is front explanatory drawing which shows one Example of the fine recessed part processing apparatus of this invention. Example 1 FIG. 2 is a perspective explanatory view (a) of a processing tool tip portion of the fine recess processing apparatus in FIG. 1 and a perspective explanatory view (b) of a processing tool tip portion in which a large number of fine protrusions are arranged. Example 1 It is a control flowchart of the process by the fine recessed part processing apparatus shown in FIG. Example 1 It is a flowchart in the case of only the load control of the process by the fine recessed part processing apparatus shown in FIG. Example 1 It is relative displacement explanatory drawing (a)-(c) of the workpiece | work in process by the micro recessed part processing apparatus shown in FIG. 1, and a processing tool. It is a graph showing the relationship between the pressing load corresponding to the relative displacement of the workpiece | work of FIG. 5, and a processing tool, a displacement, and time. It is a graph showing the relationship between the pressing load and pressing displacement of the processing tool of the fine recessed part processing apparatus shown in FIG. It is front explanatory drawing which shows the other structural example of the fine recessed part processing apparatus in FIG. It is front explanatory drawing which shows the other structural example of the fine recessed part processing apparatus in FIG. It is sectional explanatory drawing which shows the other Example of the fine recessed part processing apparatus of this invention. (Example 2). It is front explanatory drawing which shows other Example of the fine recessed part processing apparatus of this invention. (Example 3). It is an enlarged side view of the processing roller of the fine recessed part processing apparatus in FIG. It is front explanatory drawing which shows other Example of the fine recessed part processing apparatus of this invention. Example 4 It is a graph which shows the dispersion | variation degree of the processing shape of the fine recessed part formed with the fine recessed part processing apparatus of FIG. Plane explanatory drawing (a) of a cylinder block having a fine concave portion processed using the fine concave portion processing apparatus of the present invention on the inner peripheral surface of the cylinder bore, an enlarged sectional explanatory view (b) of a fine concave portion forming portion, and a cross section of the cylinder block It is explanatory drawing (c). It is front explanatory drawing of the crank which has the fine recessed part processed using the fine recessed part processing apparatus of this invention in a crank journal part or a crankpin part.

Explanation of symbols

1,31,51,71 Fine recess processing device 3,33 Processing tool 5 Servo motor (pressing mechanism)
6 Ball screw (pressing mechanism)
7, 37, 57 Calculation / control section (control means)
8, 38, 58 Load sensor (load measuring means)
9, 39, 59 Displacement sensor (displacement measuring means)
15, 25, 65, 75 Actuator (Pressing mechanism)
26, 41, 64 Coil spring (pressing mechanism)
40, 60 Pressing mechanism 53 Processing roller (processing tool)
76 Laser displacement meter (Measuring shape measuring means)
B Cylinder bore Ba Inner circumferential surface of cylinder bore C Crank Ca Crank journal part Cb Crank pin part SB Cylinder block T Fine recess W, WB, WC Workpiece Wa, WBa, WCa Work surface

Claims (18)

This is a fine recess processing device that forms fine recesses on the surface of a workpiece, and a machining tool having fine irregularities on the surface, and this machining tool is moved closer to and away from the workpiece and the surface of the machining tool is pressed against the surface of the workpiece. A pressing mechanism, a load measuring means for measuring a load applied to the workpiece by the pressing mechanism, and a displacement measuring means for measuring the displacement of the processing tool, both from the load measuring means and the displacement measuring means. A control means for controlling the load applied to the machining tool and the displacement of the machining tool,
The control means is a processing tool based on the position of the workpiece surface detected by the displacement measuring means based on the change rate of the load measured by the load measuring means and the change rate of the displacement measured by the displacement measuring means. Displacement control by displacement measuring means for controlling the relative displacement of the workpiece to be a predetermined displacement, and load control for controlling the workpiece load detected by the load measuring means to be a predetermined load A fine recess processing apparatus characterized in that the control can be switched during processing. The control means constantly monitors and records the workpiece load measured by the load measuring means and the displacement of the machining tool measured by the displacement measuring means, and calculates each rate of change between the detected load and displacement. The fine recess processing apparatus according to claim 1, wherein switching during displacement control and load control processing is possible based on a calculation result obtained in this way. A machining shape measuring means for measuring the shape of the fine recess formed on the surface of the workpiece after processing is provided, and the control means controls the displacement based on the processing depth distribution of the fine recess detected by the machining shape measuring means. And the fine recessed part processing apparatus of Claim 1 or 2 which enables switching in the process of load control . The fine recess processing apparatus according to any one of claims 1 to 3 , wherein the pressing mechanism is an actuator operated by a piezoelectric element . The fine recess processing apparatus according to any one of claims 1 to 3 , wherein the pressing mechanism is an actuator operated by a giant magnetostrictive element . The fine recess processing apparatus according to any one of claims 1 to 3 , wherein the pressing mechanism includes a coil spring . The fine recess processing apparatus according to any one of claims 1 to 6 , wherein the processing tool has a large number of fine protrusions on a surface thereof . The micro recessed part processing apparatus as described in any one of Claims 1-7 which used the processing roller which comprises many fine processus | protrusions on an outer peripheral surface and rotates around a roller axis | shaft as a processing tool . When forming a micro recessed part on the surface of a workpiece | work using the micro recessed part processing apparatus as described in any one of Claims 1-8, it detects that a processing tool contacts a workpiece | work surface by a load measurement means, and controls it. Displacement measuring means for setting the relative displacement from the position of the workpiece surface as the amount of indentation displacement of the machining tool onto the workpiece surface by means, and controlling the relative displacement of the machining tool to be a predetermined displacement A fine recess processing method characterized by switching between two types of control, that is, displacement control by a load and load control for controlling the workpiece load detected by the load measuring means to be a predetermined load. . The control means constantly monitors and records the workpiece load detected by the load measuring means and the displacement of the machining tool detected by the displacement measuring means, and calculates each rate of change between the detected load and displacement. The fine recess processing method according to claim 9, wherein switching is performed during processing of displacement control and load control based on a calculation result obtained in this manner. The processing depth of the fine recess detected by the processing shape measuring means by the control means when forming the fine recess on the surface of the workpiece using the fine recess processing apparatus according to any one of claims 3 to 9. Displacement control by a displacement measuring means for controlling the relative displacement of the machining tool from the position of the workpiece surface detected by the load measuring means to be a predetermined displacement, and detected by the load measuring means. A fine recess processing method, wherein two types of control, load control for controlling the work load to become a predetermined load, are switched during processing. A sliding member having a fine concave portion processed by using the fine concave portion processing apparatus according to claim 1 on a sliding surface. A cylinder block having fine concave portions processed by using the fine concave portion processing apparatus according to any one of claims 1 to 8 on an inner peripheral surface of a cylinder bore . A crank having fine concave portions processed by using the fine concave portion processing apparatus according to any one of claims 1 to 8 in a crank journal portion . A crank having a fine concave portion processed by using the fine concave portion processing apparatus according to any one of claims 1 to 8 in a crank pin portion . A cam having a fine concave portion processed by using the fine concave portion processing apparatus according to any one of claims 1 to 8 in a cam journal portion . A cam having a fine concave portion processed by using the fine concave portion processing apparatus according to any one of claims 1 to 8 in a cam lobe portion . A balancer shaft, wherein the journal portion has a fine recess processed by using the fine recess processing device according to claim 1 .

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