JP5078261B2 - Temperature detection apparatus and temperature detection method - Google Patents

Temperature detection apparatus and temperature detection method Download PDF

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JP5078261B2
JP5078261B2 JP2006014123A JP2006014123A JP5078261B2 JP 5078261 B2 JP5078261 B2 JP 5078261B2 JP 2006014123 A JP2006014123 A JP 2006014123A JP 2006014123 A JP2006014123 A JP 2006014123A JP 5078261 B2 JP5078261 B2 JP 5078261B2
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temperature
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宏之 河西
正久 木村
弘隆 熊倉
乙元 池田
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IHI Aerospace Co Ltd
Seiko NPC Corp
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Description

本発明は、温度検出装置及び温度検出方法に関するものである。   The present invention relates to a temperature detection device and a temperature detection method.

従来より、赤外線センサを用いて測定対象物の温度を検出する温度検出装置が知られている（例えば、特許文献１参照）。かかる温度センサは、赤外線センサと赤外線センサの温度を測定するサーミスタと、を備え、数１に従って温度換算補正を行うようにしている。

Figure 0005078261
尚、数１に示す係数Ｋは、例えば、黒体温度を、それぞれ、３５°Ｃ，４０°Ｃに設定し、赤外線センサ自体のセンサ温度（サーミスタで測定した温度）を３０°Ｃに設定して、黒体のそれぞれのエネルギー量を測定することにより求められた値である。
特開２００５−５５３２３号公報（第２，３頁、図１） Conventionally, a temperature detection device that detects the temperature of an object to be measured using an infrared sensor is known (see, for example, Patent Document 1). Such a temperature sensor includes an infrared sensor and a thermistor that measures the temperature of the infrared sensor, and performs temperature conversion correction according to Equation 1.
Figure 0005078261
 Note that the coefficient K shown in Equation 1 sets the black body temperature to 35 ° C. and 40 ° C., respectively, and sets the sensor temperature of the infrared sensor itself (temperature measured by the thermistor) to 30 ° C. The value obtained by measuring the energy amount of each black body.
Japanese Patent Laying-Open No. 2005-55323 (Pages 2, 3 and 1)

しかし、従来の温度検出装置では、数１の測定対象物のエネルギー量に関する係数と、赤外線センサのエネルギー量に関する係数と、が同一であるため、温度センサ自体の温度変化の要素に対して、温度補正の精度は良好でなかった。   However, in the conventional temperature detection device, the coefficient related to the energy amount of the measurement object of Equation 1 and the coefficient related to the energy amount of the infrared sensor are the same, so the temperature of the temperature sensor itself has a temperature change factor. The accuracy of correction was not good.

即ち、係数Ｋを求めるときに設定したセンサ温度３０°Ｃ、４０°Ｃ付近において、数１に示す温度補正式を用いて温度補正を行った場合には、測定対象物の温度誤差は小さい。しかし、このセンサ温度３０°Ｃ、４０°Ｃとは異なった温度で温度補正を行った場合には、測定対象物の温度誤差が±１０°Ｃ程度になってしまう。   That is, when the temperature correction is performed using the temperature correction formula shown in Equation 1 near the sensor temperatures of 30 ° C. and 40 ° C. set when the coefficient K is obtained, the temperature error of the measurement object is small. However, when temperature correction is performed at a temperature different from the sensor temperatures of 30 ° C. and 40 ° C., the temperature error of the measurement object becomes about ± 10 ° C.

また、パッケージ内部の温度分布が不均一の場合、センサ温度が変動すると、温度検出精度が低下してしまう。   Further, when the temperature distribution inside the package is non-uniform, if the sensor temperature fluctuates, the temperature detection accuracy decreases.

本発明は、このような従来の問題点に鑑みてなされたもので、測定対象物の温度を精度良く取得することが可能な温度検出装置及び温度検出方法を提供することを目的とする。   The present invention has been made in view of such conventional problems, and an object of the present invention is to provide a temperature detection device and a temperature detection method that can accurately acquire the temperature of a measurement object.

この目的を達成するため、本発明の第１の観点に係る温度検出装置は、
測定対象物が発する赤外線を検知して前記測定対象物の温度に対応する第１の電圧を出力する赤外線センサと、
前記赤外線センサのセンサ温度を検出し、前記センサ温度に対応する第２の電圧を出力する温度センサと、
前記赤外線センサ、前記温度センサから、それぞれ、出力された前記第１の電圧、前記第２の電圧を取得し、前記測定対象物の温度を前記第１の電圧に換算するための係数を第１の係数、前記センサ温度を前記第２の電圧に換算するための係数を第２の係数として、前記第１の係数と前記第２の係数とが異なる値に設定され、数２に従って、前記測定対象物の温度を取得する温度演算部と、を備え、
前記第１の係数（Ａ１）および前記第２の係数（Ｂ１）は、実験によって得られた第１，第２，第３測定値から取得された、前記測定対象物の温度と前記赤外線センサの温度とのセットに基づいて互いに独立に設定され、且つ、１＜（Ｂ１）／（Ａ１）≦１．５の関係を満たすことを特徴とする。

Figure 0005078261
In order to achieve this object, a temperature detection device according to the first aspect of the present invention provides:
An infrared sensor that detects infrared rays emitted from the measurement object and outputs a first voltage corresponding to the temperature of the measurement object;
A temperature sensor that detects a sensor temperature of the infrared sensor and outputs a second voltage corresponding to the sensor temperature;
The output first voltage and second voltage are obtained from the infrared sensor and the temperature sensor, respectively, and a coefficient for converting the temperature of the measurement object into the first voltage is a first coefficient. The first coefficient and the second coefficient are set to different values, the coefficient for converting the sensor temperature into the second voltage as the second coefficient, and the measurement is performed according to Equation 2. A temperature calculation unit for acquiring the temperature of the object,
The first coefficient (A1) and the second coefficient (B1) are obtained from the first, second, and third measurement values obtained by experiments, and the temperature of the measurement object and the infrared sensor. Based on the set with the temperature, they are set independently from each other , and satisfy the relationship of 1 <(B1) / (A1) ≦ 1.5 .
Figure 0005078261

本発明の第２の観点に係る温度検出装置は、
測定対象物が発する赤外線を検知して前記測定対象物の温度に対応する第１の電圧を出力する赤外線センサと、
前記赤外線センサのセンサ温度を検出し、前記センサ温度に対応する第２の電圧を出力する温度センサと、
前記赤外線センサ、前記温度センサから、それぞれ、出力された前記第１の電圧、前記第２の電圧を取得し、前記測定対象物の温度を前記第１の電圧に換算するための係数を第１の係数、前記センサ温度を前記第２の電圧に換算するための係数を第２の係数として、前記第１の係数と前記第２の係数とが異なる値に設定され、数３に従って、前記測定対象物の温度を取得する温度演算部と、を備え、
前記第１の係数（Ａ２）および前記第２の係数（Ｂ２）は、実験によって得られた第１，第２，第３測定値から取得された、前記測定対象物の温度と前記赤外線センサの温度とのセットに基づいて互いに独立に設定され、且つ、１＜（Ｂ２）／（Ａ２）≦１．５の関係を満たすことを特徴とする。

Figure 0005078261
The temperature detection device according to the second aspect of the present invention is:
An infrared sensor that detects infrared rays emitted from the measurement object and outputs a first voltage corresponding to the temperature of the measurement object;
A temperature sensor that detects a sensor temperature of the infrared sensor and outputs a second voltage corresponding to the sensor temperature;
The output first voltage and second voltage are obtained from the infrared sensor and the temperature sensor, respectively, and a coefficient for converting the temperature of the measurement object into the first voltage is a first coefficient. The first coefficient and the second coefficient are set to different values, the coefficient for converting the sensor temperature into the second voltage as the second coefficient, and the measurement according to Equation 3 A temperature calculation unit for acquiring the temperature of the object,
The first coefficient (A2) and the second coefficient (B2) are obtained from the first, second, and third measurement values obtained by experiments, and the temperature of the measurement object and the infrared sensor. It is characterized by being set independently of each other based on a set with temperature and satisfying a relationship of 1 <(B2) / (A2) ≦ 1.5 .
Figure 0005078261

本発明の第３の観点に係る温度検出装置は、
測定対象物が発する赤外線を検知して前記測定対象物の温度に対応する第１の電圧を出力する赤外線センサと、
前記赤外線センサのセンサ温度を検出し、前記センサ温度に対応する第２の電圧を出力する温度センサと、
前記赤外線センサを収納する外囲器内の温度を検出する内部温度検出部と、
前記赤外線センサ、前記温度センサ、前記内部温度検出部から、それぞれ、出力された前記第１の電圧、前記第２の電圧、前記内部温度検出部の出力電圧を取得し、前記測定対象物の温度を前記第１の電圧に換算するための係数を第１の係数、前記センサ温度を前記第２の電圧に換算するための係数を第２の係数として、前記第１の係数と前記第２の係数とが異なる値に設定され、数４に従って、前記測定対象物の温度を取得する温度演算部と、を備え、
前記第１の係数（Ａ３）および前記第２の係数（Ｂ３）は、実験によって得られた第１，第２，第３測定値から取得された、前記測定対象物の温度と前記赤外線センサの温度とのセットに基づいて互いに独立に設定され、且つ、１＜（Ｂ３）／（Ａ３）≦１．５の関係を満たすことを特徴とする。

Figure 0005078261
The temperature detection device according to the third aspect of the present invention is:
An infrared sensor that detects infrared rays emitted from the measurement object and outputs a first voltage corresponding to the temperature of the measurement object;
A temperature sensor that detects a sensor temperature of the infrared sensor and outputs a second voltage corresponding to the sensor temperature;
An internal temperature detector for detecting the temperature in the envelope housing the infrared sensor;
The output of the first voltage, the second voltage, and the output voltage of the internal temperature detection unit is obtained from the infrared sensor, the temperature sensor, and the internal temperature detection unit, respectively, and the temperature of the measurement object is obtained. A first coefficient is a coefficient for converting the sensor temperature to the first voltage, and a second coefficient is a coefficient for converting the sensor temperature to the second voltage. The coefficient is set to a different value, and according to Equation 4, a temperature calculation unit that acquires the temperature of the measurement object,
The first coefficient (A3) and the second coefficient (B3) are obtained from the first, second, and third measured values obtained by experiments, and the temperature of the measurement object and the infrared sensor. It is characterized by being set independently of each other based on a set with temperature and satisfying a relationship of 1 <(B3) / (A3) ≦ 1.5 .
Figure 0005078261

本発明の第４の観点に係る温度検出装置は、
測定対象物が発する赤外線を検知して前記測定対象物の温度に対応する第１の電圧を出力する赤外線センサと、
前記赤外線センサのセンサ温度を検出し、前記センサ温度に対応する第２の電圧を出力する温度センサと、
前記赤外線センサを収納する外囲器内の温度を検出する内部温度検出部と、
前記赤外線センサ、前記温度センサ、前記内部温度検出部から、それぞれ、出力された前記第１の電圧、前記第２の電圧、前記内部温度検出部の出力電圧を取得し、前記測定対象物の温度を前記第１の電圧に換算するための係数を第１の係数、前記センサ温度を前記第２の電圧に換算するための係数を第２の係数として、前記第１の係数と前記第２の係数とが異なる値に設定され、数５に従って、前記測定対象物の温度を取得する温度演算部と、を備え、
前記第１の係数（Ａ４）および前記第２の係数（Ｂ４）は、実験によって得られた第１，第２，第３測定値から取得された、前記測定対象物の温度と前記赤外線センサの温度とのセットに基づいて互いに独立に設定され、且つ、１＜（Ｂ４）／（Ａ４）≦１．５の関係を満たすことを特徴とする。

Figure 0005078261
The temperature detection device according to the fourth aspect of the present invention is:
An infrared sensor that detects infrared rays emitted from the measurement object and outputs a first voltage corresponding to the temperature of the measurement object;
A temperature sensor that detects a sensor temperature of the infrared sensor and outputs a second voltage corresponding to the sensor temperature;
An internal temperature detector for detecting the temperature in the envelope housing the infrared sensor;
The output of the first voltage, the second voltage, and the output voltage of the internal temperature detection unit is obtained from the infrared sensor, the temperature sensor, and the internal temperature detection unit, respectively, and the temperature of the measurement object is obtained. A first coefficient is a coefficient for converting the sensor temperature to the first voltage, and a second coefficient is a coefficient for converting the sensor temperature to the second voltage. The coefficient is set to a different value, and according to Equation 5, a temperature calculation unit that acquires the temperature of the measurement object,
The first coefficient (A4) and the second coefficient (B4) are obtained from the first, second, and third measurement values obtained by experiments, and the temperature of the measurement object and the infrared sensor. It is characterized by being set independently of each other based on a set with temperature and satisfying a relationship of 1 <(B4) / (A4) ≦ 1.5 .
Figure 0005078261

前記赤外線センサと前記温度センサとは、センサ部に備えられたものであり、
前記センサ部の熱時定数以下の遅延特性を有し、前記赤外線センサ及び前記温度センサの少なくとも一方の出力端に接続されて、接続されたセンサが出力する電圧を平滑化するローパスフィルタを備えてもよい。 The infrared sensor and the temperature sensor are provided in a sensor unit,
A low-pass filter having delay characteristics equal to or less than a thermal time constant of the sensor unit, connected to an output terminal of at least one of the infrared sensor and the temperature sensor, and smoothing a voltage output from the connected sensor; Also good.

本発明の第５の観点に係る温度検出方法は、
測定対象物が発する赤外線を検知する赤外線センサを備えて温度を検出する温度検出方法であって、
前記赤外線センサの温度を検出するステップと、
前記赤外線センサが前記測定対象物の赤外線を検知したときの前記測定対象物の温度を電圧に換算するための係数を第１の係数、前記赤外線センサのセンサ温度を電圧に換算するための係数を第２の係数として、前記第１の係数と前記第２の係数とが異なる値に設定され、数２に従って、前記測定対象物の温度を取得するステップと、を備え、
前記第１の係数（Ａ１）および前記第２の係数（Ｂ１）は、実験によって得られた第１，第２，第３測定値から取得された、前記測定対象物の温度と前記赤外線センサの温度とのセットに基づいて互いに独立に設定され、且つ、１＜（Ｂ１）／（Ａ１）≦１．５の関係を満たすことを特徴とする。 The temperature detection method according to the fifth aspect of the present invention is:
A temperature detection method for detecting temperature by including an infrared sensor for detecting infrared rays emitted from a measurement object,
Detecting the temperature of the infrared sensor;
A coefficient for converting the temperature of the measurement object to voltage when the infrared sensor detects infrared rays of the measurement object is a first coefficient, and a coefficient for converting the sensor temperature of the infrared sensor to voltage The first coefficient and the second coefficient are set to different values as a second coefficient, and the temperature of the measurement object is obtained according to Equation 2,
The first coefficient (A1) and the second coefficient (B1) are obtained from the first, second, and third measurement values obtained by experiments, and the temperature of the measurement object and the infrared sensor. Based on the set with the temperature, they are set independently from each other , and satisfy the relationship of 1 <(B1) / (A1) ≦ 1.5 .

本発明の第６の観点に係る温度検出方法は、
測定対象物が発する赤外線を検知する赤外線センサを備えて温度を検出する温度検出方法であって、
前記赤外線センサの温度を検出するステップと、
前記赤外線センサが前記測定対象物の赤外線を検知したときの前記測定対象物の温度を電圧に換算するための係数を第１の係数、前記赤外線センサのセンサ温度を電圧に換算するための係数を第２の係数として、前記第１の係数と前記第２の係数とが異なる値に設定され、数３に従って、前記測定対象物の温度を取得するステップと、を備え、
前記第１の係数（Ａ２）および前記第２の係数（Ｂ２）は、実験によって得られた第１，第２，第３測定値から取得された、前記測定対象物の温度と前記赤外線センサの温度とのセットに基づいて互いに独立に設定され、且つ、１＜（Ｂ２）／（Ａ２）≦１．５の関係を満たすことを特徴とする。 A temperature detection method according to a sixth aspect of the present invention includes:
A temperature detection method for detecting temperature by including an infrared sensor for detecting infrared rays emitted from a measurement object,
Detecting the temperature of the infrared sensor;
A coefficient for converting the temperature of the measurement object to voltage when the infrared sensor detects infrared rays of the measurement object is a first coefficient, and a coefficient for converting the sensor temperature of the infrared sensor to voltage The first coefficient and the second coefficient are set to different values as a second coefficient, and the temperature of the measurement object is obtained according to Equation 3,
The first coefficient (A2) and the second coefficient (B2) are obtained from the first, second, and third measurement values obtained by experiments, and the temperature of the measurement object and the infrared sensor. It is characterized by being set independently of each other based on a set with temperature and satisfying a relationship of 1 <(B2) / (A2) ≦ 1.5 .

本発明の第７の観点に係る温度検出方法は、
測定対象物が発する赤外線を検知する赤外線センサを備えて温度を検出する温度検出方法であって、
前記赤外線センサの温度を検出するステップと、
前記赤外線センサが収納された内部の温度を検出するステップと、
前記赤外線センサが前記測定対象物の赤外線を検知したときの前記測定対象物の温度を電圧に換算するための係数を第１の係数、前記赤外線センサのセンサ温度を電圧に換算するための係数を第２の係数として、前記第１の係数と前記第２の係数とが異なる値に設定され、数４に従って、前記測定対象物の温度を取得するステップと、を備え、
前記第１の係数（Ａ３）および前記第２の係数（Ｂ３）は、実験によって得られた第１，第２，第３測定値から取得された、前記測定対象物の温度と前記赤外線センサの温度とのセットに基づいて互いに独立に設定され、且つ、１＜（Ｂ３）／（Ａ３）≦１．５の関係を満たすことを特徴とする。 The temperature detection method according to the seventh aspect of the present invention is:
A temperature detection method for detecting temperature by including an infrared sensor for detecting infrared rays emitted from a measurement object,
Detecting the temperature of the infrared sensor;
Detecting the temperature inside the infrared sensor;
A coefficient for converting the temperature of the measurement object to voltage when the infrared sensor detects infrared rays of the measurement object is a first coefficient, and a coefficient for converting the sensor temperature of the infrared sensor to voltage The first coefficient and the second coefficient are set to different values as a second coefficient, and the temperature of the measurement object is obtained according to Equation 4,
The first coefficient (A3) and the second coefficient (B3) are obtained from the first, second, and third measured values obtained by experiments, and the temperature of the measurement object and the infrared sensor. It is characterized by being set independently of each other based on a set with temperature and satisfying a relationship of 1 <(B3) / (A3) ≦ 1.5 .

本発明の第８の観点に係る温度検出方法は、
測定対象物が発する赤外線を検知する赤外線センサを備えて温度を検出する温度検出方法であって、
前記赤外線センサの温度を検出するステップと、
前記赤外線センサが収納された内部の温度を検出するステップと、
前記赤外線センサが前記測定対象物の赤外線を検知したときの前記測定対象物の温度を電圧に換算するための係数を第１の係数、前記赤外線センサのセンサ温度を電圧に換算するための係数を第２の係数として、前記第１の係数と前記第２の係数とが異なる値に設定され、数５に従って、前記測定対象物の温度を取得するステップと、を備え、
前記第１の係数（Ａ４）および前記第２の係数（Ｂ４）は、実験によって得られた第１，第２，第３測定値から取得された、前記測定対象物の温度と前記赤外線センサの温度とのセットに基づいて互いに独立に設定され、且つ、１＜（Ｂ４）／（Ａ４）≦１．５の関係を満たすことを特徴とする。 The temperature detection method according to the eighth aspect of the present invention is:
A temperature detection method for detecting temperature by including an infrared sensor for detecting infrared rays emitted from a measurement object,
Detecting the temperature of the infrared sensor;
Detecting the temperature inside the infrared sensor;
A coefficient for converting the temperature of the measurement object to voltage when the infrared sensor detects infrared rays of the measurement object is a first coefficient, and a coefficient for converting the sensor temperature of the infrared sensor to voltage The first coefficient and the second coefficient are set to different values as a second coefficient, and the temperature of the measurement object is obtained according to Equation 5,
The first coefficient (A4) and the second coefficient (B4) are obtained from the first, second, and third measurement values obtained by experiments, and the temperature of the measurement object and the infrared sensor. It is characterized by being set independently of each other based on a set with temperature and satisfying a relationship of 1 <(B4) / (A4) ≦ 1.5 .

本発明によれば、測定対象物の温度を精度良く取得することができる。   According to the present invention, the temperature of the measurement object can be obtained with high accuracy.

以下、本発明の実施形態に係る温度検出装置を図面を参照して説明する。
（実施形態１）
実施形態１に係る温度検出装置の構成を図１に示す。
実施形態１に係る温度検出装置は、センサ部１と、アンプ２ａ，２ｂと、Ａ／Ｄ変換器３と、温度演算部４と、メモリ５と、からなる。 Hereinafter, a temperature detection device according to an embodiment of the present invention will be described with reference to the drawings.
(Embodiment 1)
The configuration of the temperature detection apparatus according to the first embodiment is shown in FIG.
The temperature detection apparatus according to the first embodiment includes a sensor unit 1, amplifiers 2a and 2b, an A / D converter 3, a temperature calculation unit 4, and a memory 5.

この温度検出装置は、例えば、防災システム等に利用される。この温度検出装置を防災システムに利用した場合、温度検出装置は、火災による火を測定対象物として、この火の温度を検出する。   This temperature detection device is used in, for example, a disaster prevention system. When this temperature detection device is used in a disaster prevention system, the temperature detection device detects the temperature of this fire using a fire caused by a fire as a measurement object.

センサ部１は、赤外線センサ１１と、温度センサ１２ａと、抵抗１２ｂと、からなる。赤外線センサ１１は、測定対象物から放射された赤外線を検知するものであり、測定対象物の温度Ｔbbに対応する電圧Ｖoを示す信号Ｓ１１を出力する。   The sensor unit 1 includes an infrared sensor 11, a temperature sensor 12a, and a resistor 12b. The infrared sensor 11 detects infrared rays radiated from the measurement object, and outputs a signal S11 indicating a voltage Vo corresponding to the temperature Tbb of the measurement object.

サーミスタ１２ａは、赤外線センサ１１のセンサ温度Ｔthを検出するためのものであり、その電気抵抗が温度によって変化する。抵抗１２ｂは、プルアップ抵抗であり、その一端が電圧Ｖddの電源に接続される。サーミスタ１２ａの一端は、この抵抗１２ｂの他端に接続され、サーミスタ１２ａの他端は接地される。このサーミスタ１２ａと抵抗１２ｂとの接続点の電圧をＶthとする。電圧Ｖthは、赤外線センサ１１自体のセンサ温度Ｔthに対応する電圧である。   The thermistor 12a is for detecting the sensor temperature Tth of the infrared sensor 11, and its electrical resistance changes with temperature. The resistor 12b is a pull-up resistor, and one end of the resistor 12b is connected to a power source having a voltage Vdd. One end of the thermistor 12a is connected to the other end of the resistor 12b, and the other end of the thermistor 12a is grounded. The voltage at the connection point between the thermistor 12a and the resistor 12b is Vth. The voltage Vth is a voltage corresponding to the sensor temperature Tth of the infrared sensor 11 itself.

一般にサーミスタの特性は次の数６に示す式によって表される。

Figure 0005078261
サーミスタ１２ａを赤外線センサ１１に近接させると、サーミスタ１２ａの温度は、赤外線センサ１１自体のセンサ温度Ｔthとみなすことができ、数６は、数７によって表される。
Figure 0005078261
 この数７から、数８が得られる。
Figure 0005078261
 また、電圧Ｖthは、次の数９に従って求められる。
Figure 0005078261
 この数９において、電圧Ｖthは、赤外線センサ１１自体のセンサ温度Ｔthに対応する。センサ部１は、この電圧Ｖthを示す信号Ｓ１２を出力する。 In general, the characteristics of the thermistor are expressed by the following equation (6).
Figure 0005078261
 When the thermistor 12 a is brought close to the infrared sensor 11, the temperature of the thermistor 12 a can be regarded as the sensor temperature Tth of the infrared sensor 11 itself, and Expression 6 is expressed by Expression 7.
Figure 0005078261
 From this equation 7, equation 8 is obtained.
Figure 0005078261
 The voltage Vth is obtained according to the following equation (9).
Figure 0005078261
 In Equation 9, the voltage Vth corresponds to the sensor temperature Tth of the infrared sensor 11 itself. The sensor unit 1 outputs a signal S12 indicating this voltage Vth.

このセンサ部１の構造を図２に示す。赤外線センサ１１は、赤外線センサ１０１〜１０４からなり、赤外線センサ１０１〜１０４は、ＩＣチップ１３上に形成される。   The structure of the sensor unit 1 is shown in FIG. The infrared sensor 11 includes infrared sensors 101 to 104, and the infrared sensors 101 to 104 are formed on the IC chip 13.

このＩＣチップ１３は、熱伝導性が良好な金属製の外囲器（パッケージ）１４に収納される。外囲器１４には、赤外線センサ１０１〜１０４が赤外線を受光できるような窓１４ａが形成される。サーミスタ１２ａは、この外囲器１４上であって、赤外線センサ１０１〜１０４との熱的結合を良くするため、赤外線センサ１０１〜１０４の近傍に配置される。   The IC chip 13 is housed in a metal envelope (package) 14 having good thermal conductivity. The envelope 14 is formed with a window 14a through which the infrared sensors 101 to 104 can receive infrared rays. The thermistor 12a is disposed on the envelope 14 and in the vicinity of the infrared sensors 101-104 in order to improve thermal coupling with the infrared sensors 101-104.

また、図１において、アンプ２ａは、赤外線センサ１１から出力された信号Ｓ１１を増幅するものである。アンプ２ｂは、入力端がサーミスタ１２ａと抵抗１２ｂとの接続点に接続されて、センサ部１から出力された信号Ｓ１２を増幅するものである。   In FIG. 1, an amplifier 2a amplifies the signal S11 output from the infrared sensor 11. The amplifier 2b is connected to a connection point between the thermistor 12a and the resistor 12b, and amplifies the signal S12 output from the sensor unit 1.

Ａ／Ｄ変換器３は、アンプ２ａ，２ｂから出力された信号Ｓ１１，Ｓ１２を、それぞれ、デジタル信号に変換するものである。   The A / D converter 3 converts the signals S11 and S12 output from the amplifiers 2a and 2b into digital signals, respectively.

温度演算部４は、赤外線センサ１１から出力された信号Ｓ１１とサーミスタ１２ａから出力された信号Ｓ１２とを取得して、測定対象物の温度Ｔbbを取得するものである。   The temperature calculation unit 4 acquires the signal S11 output from the infrared sensor 11 and the signal S12 output from the thermistor 12a, and acquires the temperature Tbb of the measurement object.

まず、温度換算補正を行う演算式について説明する。本実施形態におけるこの演算式は次の数１０に示す式とする。

Figure 0005078261
温度Ｔbbは、赤外線センサ１１の視野に入った赤外線エネルギーの黒体温度換算値を示し、絶対温度で表される。係数Ａは、温度Ｔbbをエネルギー量、あるいは電圧値に換算するための係数であって、シュテファン−ボルツマン定数とエミッション係数とを含む。 First, an arithmetic expression for performing temperature conversion correction will be described. This arithmetic expression in this embodiment is an expression shown in the following equation (10).
Figure 0005078261
 The temperature Tbb indicates the black body temperature converted value of the infrared energy that has entered the field of view of the infrared sensor 11, and is expressed in absolute temperature. The coefficient A is a coefficient for converting the temperature Tbb into an energy amount or a voltage value, and includes a Stefan-Boltzmann constant and an emission coefficient.

さらに、この係数Ａには、アンプ２ａの増幅率等、諸々の条件も含まれる。従って、数１０の第１項は、この温度Ｔbbに対応するエネルギー量、あるいは電圧値を示す。   Furthermore, the coefficient A includes various conditions such as the amplification factor of the amplifier 2a. Therefore, the first term of Formula 10 represents the energy amount or voltage value corresponding to this temperature Tbb.

係数Ｂは、センサ温度Ｔthをエネルギー量、あるいは電圧値に換算するための係数であって、係数Ａと同様に、シュテファン−ボルツマン定数とエミッション係数とを含む。   The coefficient B is a coefficient for converting the sensor temperature Tth into an energy amount or a voltage value. Like the coefficient A, the coefficient B includes a Stefan-Boltzmann constant and an emission coefficient.

さらに、係数Ｂには、アンプ２ｂの増幅率等、諸々の条件も含まれる。従って、数１０の第２項は、センサ温度Ｔthに対応するエネルギー量、あるいは電圧値を示す。   Further, the coefficient B includes various conditions such as the amplification factor of the amplifier 2b. Therefore, the second term of Formula 10 indicates the energy amount or voltage value corresponding to the sensor temperature Tth.

尚、オフセット値Ｒ１は、測定対象物の温度Ｔbbと赤外線センサ１１のセンサ温度Ｔthとの差を調整するための値である。   The offset value R1 is a value for adjusting the difference between the temperature Tbb of the measurement object and the sensor temperature Tth of the infrared sensor 11.

係数Ａ、Ｂに含まれているシュテファン−ボルツマン定数は、測定対象物と赤外線センサ１１とで同じ値である。しかし、エミッション係数は、測定対象物と赤外線センサ１１とで異なる値になる。そこで、この係数Ａ，Ｂは、測定対象物の温度検出の精度を高めるように異なる値に設定され、係数Ａ，Ｂを分離、独立させている。本実施形態で用いられる数１０に示す式は、この点で従来の数１に示す式とは相違する。   The Stefan-Boltzmann constant included in the coefficients A and B is the same value for the measurement object and the infrared sensor 11. However, the emission coefficient differs between the measurement object and the infrared sensor 11. Therefore, the coefficients A and B are set to different values so as to improve the accuracy of temperature detection of the measurement object, and the coefficients A and B are separated and made independent. The equation shown in Equation 10 used in the present embodiment is different from the equation shown in Equation 1 in this respect.

尚、係数Ａ，Ｂは、実験に基づいて設定されるものであって、係数Ａ，Ｂの値は、１＜Ｂ／Ａ≦1.5であることが好ましい。メモリ５は、この数１０の式及び各係数の値Ａ，Ｂ，Ｒ1を記憶する。   The coefficients A and B are set based on experiments, and the values of the coefficients A and B are preferably 1 <B / A ≦ 1.5. The memory 5 stores the equation (10) and the values A, B, R1 of each coefficient.

そして、前述の数８で求められる温度Ｔthを数１０に代入し、数１０を測定対象物の温度Ｔbbを求める式に変形すると、数１１に示す演算式が得られる。

Figure 0005078261
メモリ５は、この数１１の演算式も記憶する。温度演算部４は、この数１１に示す演算式に基づいて、測定対象物の温度Ｔbbを取得し、この温度Ｔbbを示す信号Ｓoutを出力する。 Then, substituting the temperature Tth obtained by the above equation 8 into the equation 10 and transforming the equation 10 into an equation for obtaining the temperature Tbb of the object to be measured, an arithmetic expression shown in the equation 11 is obtained.
Figure 0005078261
 The memory 5 also stores the arithmetic expression of Equation 11. The temperature calculation unit 4 acquires the temperature Tbb of the measurement object based on the calculation formula shown in Equation 11, and outputs a signal Sout indicating the temperature Tbb.

次に実施形態１に係る温度検出装置の動作を説明する。
赤外線センサ１１は、測定対象物から放射された赤外線を検知して、電圧Ｖoを示す信号Ｓ１１を出力する。アンプ２ａは、この信号Ｓ１１を増幅する。Ａ／Ｄ変換器３は、アンプ２ａが増幅した信号をデジタル信号に変換して、変換したデジタル信号を温度演算部４に供給する。 Next, the operation of the temperature detection device according to the first embodiment will be described.
The infrared sensor 11 detects the infrared ray radiated from the measurement object and outputs a signal S11 indicating the voltage Vo. The amplifier 2a amplifies this signal S11. The A / D converter 3 converts the signal amplified by the amplifier 2 a into a digital signal, and supplies the converted digital signal to the temperature calculation unit 4.

サーミスタ１２ａの抵抗値は、赤外線センサ１１のセンサ温度Ｔthの変化に対応して変化する。これにより、電圧Ｖthも変化する。センサ部１は、電圧Ｖthを示す信号Ｓ１２を出力する。アンプ２ｂは、信号Ｓ１２を増幅する。Ａ／Ｄ変換器３は、アンプ２ｂが増幅した信号をデジタル信号に変換し、変換したデジタル信号を温度演算部４に供給する。   The resistance value of the thermistor 12a changes corresponding to the change in the sensor temperature Tth of the infrared sensor 11. As a result, the voltage Vth also changes. The sensor unit 1 outputs a signal S12 indicating the voltage Vth. The amplifier 2b amplifies the signal S12. The A / D converter 3 converts the signal amplified by the amplifier 2 b into a digital signal, and supplies the converted digital signal to the temperature calculation unit 4.

温度演算部４は、Ａ／Ｄ変換器３から供給されたデジタル信号に基づき、数１１に従って、測定対象物の温度Ｔbbを取得する。   Based on the digital signal supplied from the A / D converter 3, the temperature calculation unit 4 acquires the temperature Tbb of the measurement object according to Equation 11.

ここで、従来の温度換算補正を示す数１を、次の数１２に示すような測定対象物の温度Ｔbbを求める式に変形してみる。

Figure 0005078261
尚、数１１、数１２において、オフセット量を含めて、電圧Ｖoを含む項を第１項、センサ温度Ｔthを含む項を第２項とする。この数１１と数１２とを比較すると、従来の温度補正方式を示す数１２の第２項の係数は１となる。 Here, Equation 1 representing the conventional temperature conversion correction is transformed into an equation for obtaining the temperature Tbb of the measurement object as shown in Equation 12 below.
Figure 0005078261
 In Equations 11 and 12, the term including the voltage Vo including the offset amount is referred to as a first term, and the term including the sensor temperature Tth is referred to as a second term. Comparing Equation 11 and Equation 12, the coefficient of the second term of Equation 12 indicating the conventional temperature correction method is 1.

一方、実施形態１の温度補正方式を示す数１１の第２項の係数はＢ／Ａとなり、この係数Ａ，Ｂは、前述のように異なる値に設定され、Ｂ／Ａは１にはならない。このため、温度演算部４は、係数Ａ，Ｂが分離、独立した数１１に基づいて演算を行うことにより、精度の高い温度Ｔbbを取得することになる。そして、温度演算部４は、この温度Ｔbbを示す信号Ｓoutを出力する。   On the other hand, the coefficient of the second term of Equation 11 indicating the temperature correction method of the first embodiment is B / A, and the coefficients A and B are set to different values as described above, and B / A does not become 1. . For this reason, the temperature calculation unit 4 obtains the temperature Tbb with high accuracy by performing the calculation based on Equation 11 where the coefficients A and B are separated and independent. And the temperature calculating part 4 outputs the signal Sout which shows this temperature Tbb.

図３は、温度Ｔbbとセンサ温度Ｔthと出力電圧Ｖoとの関係を、２値補正、３値補正、測定値の場合について比較した図である。   FIG. 3 is a diagram comparing the relationship among the temperature Tbb, the sensor temperature Tth, and the output voltage Vo for binary correction, ternary correction, and measurement values.

２値補正とは、測定対象物の温度Ｔbbとセンサ温度Ｔthとをセットにして２値、例えば、Ｔbb/Ｔth＝35/25°C，70/25°Cの２値で行う補正をいい、数１に従って行われる従来の補正方式による補正である。   The binary correction is a correction performed by setting the temperature Tbb of the measurement object and the sensor temperature Tth as a set, for example, binary values of Tbb / Tth = 35/25 ° C, 70/25 ° C, This is a correction by a conventional correction method performed according to Equation 1.

３値補正とは、測定対象物の温度Ｔbbとセンサ温度Ｔthとをセットにして３値、例えば、Ｔbb/Ｔth＝35/0°C，35/50°C，70/25°Cの３値で行う補正をいい、数１１に従って行われる実施形態１の補正である。   The ternary correction is a ternary value obtained by setting the temperature Tbb of the measurement object and the sensor temperature Tth, for example, ternary values of Tbb / Tth = 35/0 ° C, 35/50 ° C, and 70/25 ° C. The correction of the first embodiment is performed according to Equation 11.

この図３から分かるように、３値補正の場合、出力電圧Ｖoは、温度Ｔbbが３５°Ｃ，５０°Ｃ，７０°Ｃのいずれであっても、２値補正の場合と比較して、より測定値に近似していることが分かる。 As can be seen from FIG. 3, in the case of the ternary correction, the output voltage Vo is compared with the case of the binary correction regardless of whether the temperature Tbb is 35 ° C., 50 ° C., or 70 ° C. It can be seen that the measured values are approximated.

また、図４は、２値補正の場合のセンサ温度Ｔthと温度Ｔbbに対する温度誤差との関係を示す。この図４に示すように、２値補正の場合、センサ温度Ｔth＜20°Ｃ及びＴth＞40°Ｃにおいて、実測値カーブからの温度誤差が大きくなる。   FIG. 4 shows the relationship between the sensor temperature Tth and the temperature error with respect to the temperature Tbb in the case of binary correction. As shown in FIG. 4, in the case of binary correction, the temperature error from the actually measured value curve becomes large at the sensor temperature Tth <20 ° C. and Tth> 40 ° C.

図５は、３値補正の場合のセンサ温度Ｔthと温度Ｔbbに対する温度誤差との関係を示す。この図５に示すように、３値補正の場合、温度誤差は、広い温度範囲に渡って実測値カーブに対応している。   FIG. 5 shows the relationship between the sensor temperature Tth and the temperature error with respect to the temperature Tbb in the case of ternary correction. As shown in FIG. 5, in the case of ternary correction, the temperature error corresponds to the actually measured value curve over a wide temperature range.

以上説明したように、本実施形態によれば、温度演算部４は、異なる値に設定された係数Ａ，Ｂを用いて行われる温度換算補正式を変形した数１１に従って測定対象物の温度Ｔbbを取得するようにした。   As described above, according to the present embodiment, the temperature calculation unit 4 determines the temperature Tbb of the measurement object according to Equation 11 obtained by modifying the temperature conversion correction formula performed using the coefficients A and B set to different values. To get.

従って、係数Ａ，Ｂを、それぞれ、測定対象物、赤外線センサ１１に対応した値に設定することにより、精度良く測定対象物の温度Ｔbbを取得することができる。   Therefore, by setting the coefficients A and B to values corresponding to the measurement object and the infrared sensor 11, respectively, the temperature Tbb of the measurement object can be obtained with high accuracy.

（実施形態２）
実施形態２に係る温度検出装置は、数１１に示す式において、サーミスタが検出したセンサ温度の時間変化量に係数を乗算し、この値を、さらに加算することにより、精度よく測定対象物の温度を取得するようにしたものである。 (Embodiment 2)
The temperature detection apparatus according to the second embodiment multiplies the time change amount of the sensor temperature detected by the thermistor by a coefficient in the equation shown in Equation 11, and further adds this value, thereby accurately measuring the temperature of the measurement object. Is to get.

測定対象物の温度に対して、赤外線センサ１１の温度は、設置場所の温度等によって大きく左右され、この影響は、温度換算補正に大きな影響を及ぼす。従って、温度演算部４は、この赤外線センサ１１の温度変化の影響を少なくするため、係数Ｃを設定し、次の数１３に従って、測定対象物の温度Ｔbbを取得する。

Figure 0005078261
The temperature of the infrared sensor 11 greatly depends on the temperature of the object to be measured, depending on the temperature at the installation location, and this influence greatly affects the temperature conversion correction. Therefore, in order to reduce the influence of the temperature change of the infrared sensor 11, the temperature calculation unit 4 sets the coefficient C and acquires the temperature Tbb of the measurement object according to the following equation (13).
Figure 0005078261

具体的に、温度演算部４は、センサ部１から出力された信号Ｓ１２に基づいて温度Ｔthをサンプリングし、この温度Ｔthの４乗値をメモリ５に記憶する。そして、温度演算部４は、次のサンプリングタイミングで温度Ｔthをサンプリングして４乗値を求め、求めた４乗値とメモリ５に記憶した４乗値との差を求めて、数１３の第３項を求める。   Specifically, the temperature calculation unit 4 samples the temperature Tth based on the signal S12 output from the sensor unit 1, and stores the fourth power value of the temperature Tth in the memory 5. Then, the temperature calculation unit 4 samples the temperature Tth at the next sampling timing to obtain the fourth power value, obtains the difference between the obtained fourth power value and the fourth power value stored in the memory 5, Find 3 terms.

そして、温度演算部４は、この数１３により補正した結果の電圧値Ｖoを有する信号Ｓoutを出力する。   Then, the temperature calculation unit 4 outputs a signal Sout having a voltage value Vo as a result of correction by the equation (13).

このように、実施形態２によれば、赤外線センサ１１の温度が設置場所等によって変化しても、温度演算部４は、この影響が少なくなるようにして精度良く測定対象物の温度Ｔbbを取得することができる。   As described above, according to the second embodiment, even if the temperature of the infrared sensor 11 changes depending on the installation location or the like, the temperature calculation unit 4 accurately obtains the temperature Tbb of the measurement object so that this influence is reduced. can do.

（実施形態３）
実施形態３に係る温度検出装置は、外囲器内壁の温度を検知する専用の赤外線センサを備え、この赤外線センサの出力電圧に係数を乗算した値を、さらに加算することにより、精度よく測定対象物の温度を取得するようにしたものである。 (Embodiment 3)
The temperature detection apparatus according to the third embodiment includes a dedicated infrared sensor that detects the temperature of the inner wall of the envelope, and further adds a value obtained by multiplying the output voltage of the infrared sensor by a coefficient, thereby accurately measuring the object. The temperature of the object is acquired.

実施形態３に係る温度検出装置のセンサ部１は、図６に示すように、赤外線センサ１５と、アンプ２ｃと、を備える。赤外線センサ１５は、外囲器１４の内壁の温度を検出する内部温度検出部であって、図７に示すように、外囲器１４の近傍となるように、ＩＣチップ１３上に形成される。   As shown in FIG. 6, the sensor unit 1 of the temperature detection device according to the third embodiment includes an infrared sensor 15 and an amplifier 2 c. The infrared sensor 15 is an internal temperature detector that detects the temperature of the inner wall of the envelope 14 and is formed on the IC chip 13 so as to be in the vicinity of the envelope 14 as shown in FIG. .

また、外囲器１４には、遮蔽板１６が備えられる。この遮蔽板１６は、外囲器１４の外部からのエネルギーを遮蔽するためのものである。   The envelope 14 is provided with a shielding plate 16. The shielding plate 16 is for shielding energy from the outside of the envelope 14.

赤外線センサ１５は、内部温度として、外囲器１４の内壁の温度を検出して、その内壁温度に対応する電圧Ｖorefを有する信号Ｓ１５を出力する。アンプ２ｃは、この赤外線センサ１５が出力した信号Ｓ１５を増幅して、Ａ／Ｄ変換器３に供給する。   The infrared sensor 15 detects the temperature of the inner wall of the envelope 14 as the internal temperature, and outputs a signal S15 having a voltage Voref corresponding to the inner wall temperature. The amplifier 2c amplifies the signal S15 output from the infrared sensor 15 and supplies the amplified signal S15 to the A / D converter 3.

温度演算部４は、この赤外線センサ１５が出力した信号Ｓ１５を取得して、次の数１４に従って演算を行い、精度よく測定対象物の温度Ｔbbを取得する。

Figure 0005078261
温度演算部４は、この数１４により補正された温度Ｔbbを示す信号Ｓoutを出力する。 The temperature calculation unit 4 acquires the signal S15 output from the infrared sensor 15, performs calculation according to the following equation 14, and acquires the temperature Tbb of the measurement object with high accuracy.
Figure 0005078261
 The temperature calculation unit 4 outputs a signal Sout indicating the temperature Tbb corrected by the equation (14).

以上説明したように、本実施形態３によれば、外囲器１４内壁の検知温度に係数Ｄを乗算し、この値も含めて補正を行うようにしたので、精度良く測定対象物の温度Ｔbbを取得することができる。   As described above, according to the third embodiment, the detected temperature of the inner wall of the envelope 14 is multiplied by the coefficient D, and the correction is performed including this value. Can be obtained.

（実施形態４）
実施形態４に係る温度検出装置は、内部の温度を検出する赤外線センサの出力電圧と、サーミスタが検出したセンサ温度の時間変化量と、をさらに用いて精度よく測定対象物の温度を取得するようにしたものである。 (Embodiment 4)
The temperature detection device according to the fourth embodiment further accurately obtains the temperature of the measurement object by further using the output voltage of the infrared sensor that detects the internal temperature and the temporal change amount of the sensor temperature detected by the thermistor. It is a thing.

実施形態４に係る温度検出装置は、実施形態３と同様に図６に示す構成を有する。温度演算部４は、次の数１５に従って演算を行い、精度よく測定対象物の温度Ｔbbを取得する。

Figure 0005078261
温度演算部４は、この数１５により補正された温度Ｔbbを示す信号Ｓoutを出力する。 The temperature detection apparatus according to the fourth embodiment has the configuration shown in FIG. The temperature calculation unit 4 performs calculation according to the following equation 15 and obtains the temperature Tbb of the measurement object with high accuracy.
Figure 0005078261
 The temperature calculation unit 4 outputs a signal Sout indicating the temperature Tbb corrected by this equation 15.

以上説明したように、本実施形態４によれば、温度演算部４は、外囲器１４内壁の検知温度と、サーミスタ１２ａが検出したセンサ温度Ｔthの時間変化量と、をさらに含めて補正を行うようにした。従って、さらに精度良く測定対象物の温度Ｔbbを取得することができる。   As described above, according to the fourth embodiment, the temperature calculation unit 4 performs the correction by further including the detected temperature of the inner wall of the envelope 14 and the temporal change amount of the sensor temperature Tth detected by the thermistor 12a. I did it. Therefore, the temperature Tbb of the measurement object can be acquired with higher accuracy.

（実施形態５）
実施形態５に係る温度検出装置は、センサ温度を検知するサーミスタの出力信号を、センサ部の熱時定数以下の遅延特性を有するローパスフィルタを介して出力するようにしたものである。 (Embodiment 5)
The temperature detection apparatus according to the fifth embodiment outputs an output signal of a thermistor that detects a sensor temperature via a low-pass filter having a delay characteristic that is equal to or less than the thermal time constant of the sensor unit.

実施形態５に係る温度検出装置は、図８に示すように、アンプ２ｂの出力端とＡ／Ｄ変換器３の入力端との間に、移動平均フィルタ６が介挿される。この移動平均フィルタ６は、ローパスフィルタであって、センサ部１の熱伝導等による温度変動が安定するまでの熱時定数以下の遅延特性を有する。   In the temperature detection apparatus according to the fifth embodiment, a moving average filter 6 is interposed between the output terminal of the amplifier 2b and the input terminal of the A / D converter 3, as shown in FIG. The moving average filter 6 is a low-pass filter, and has a delay characteristic that is equal to or less than a thermal time constant until temperature fluctuation due to heat conduction or the like of the sensor unit 1 is stabilized.

この移動平均フィルタ６がこのような特性を有することにより、センサ部１における温度が安定するまでの熱時定数で決まる応答時間内で、赤外線センサ１１のセンサ温度Ｔthが変化しても、移動平均フィルタ６は、アンプ２ｂの出力信号の信号レベルを平均化することにより、このセンサ部１の局部における急激な温度変化の影響、及び電気的ノイズを抑制する。   Since the moving average filter 6 has such characteristics, even if the sensor temperature Tth of the infrared sensor 11 changes within the response time determined by the thermal time constant until the temperature in the sensor unit 1 is stabilized, the moving average filter 6 The filter 6 averages the signal level of the output signal of the amplifier 2b, thereby suppressing the influence of a rapid temperature change in the local part of the sensor unit 1 and electrical noise.

一方、センサ部１の熱時定数で決まる応答時間を越えて、赤外線センサ１１のセンサ温度Ｔthが変化した場合、移動平均フィルタ６を通過した信号は、赤外線センサ１１の温度変化による影響を受けないように補正される。   On the other hand, when the sensor temperature Tth of the infrared sensor 11 changes beyond the response time determined by the thermal time constant of the sensor unit 1, the signal passing through the moving average filter 6 is not affected by the temperature change of the infrared sensor 11. It is corrected as follows.

温度演算部４は、移動平均フィルタ６を介して供給された信号を取得し、数１１、数１３〜数１５のいずれかの式を用いて演算を行い、精度よく測定対象物の温度Ｔbbを取得する。   The temperature calculation unit 4 acquires the signal supplied via the moving average filter 6 and performs calculation using any one of the equations (11), (13) to (15), and accurately calculates the temperature Tbb of the measurement object. get.

以上説明したように、本実施形態５によれば、温度検出装置は、センサ部１の熱時定数以下の遅延特性を有するローパスフィルタとして移動平均フィルタ６を備え、移動平均フィルタ６が、センサ部１の急激な温度変化、及び電気的ノイズを抑制するようにした。   As described above, according to the fifth embodiment, the temperature detection apparatus includes the moving average filter 6 as a low-pass filter having a delay characteristic that is equal to or less than the thermal time constant of the sensor unit 1, and the moving average filter 6 includes the sensor unit. The rapid temperature change of 1 and electrical noise were suppressed.

従って、赤外線センサ１１の温度が設置場所等の影響により急激に変化しても、温度検出装置は、この影響を少なくすることができ、さらに精度良く測定対象物の温度Ｔbbを取得することができる。   Therefore, even if the temperature of the infrared sensor 11 changes abruptly due to the influence of the installation location or the like, the temperature detection device can reduce this influence and can obtain the temperature Tbb of the measurement object with higher accuracy. .

尚、本発明を実施するにあたっては、種々の形態が考えられ、上記実施形態に限られるものではない。
例えば、上記実施の形態では、サーミスタ１２ａは、外囲器１４上に形成されるものとした。しかし、赤外線センサ１０１〜１０４との熱的結合をさらに良くするため、ＩＣチップ１３上に形成されるようにしてもよい。 In carrying out the present invention, various forms are conceivable and the present invention is not limited to the above embodiment.
For example, in the above embodiment, the thermistor 12 a is formed on the envelope 14. However, it may be formed on the IC chip 13 in order to further improve the thermal coupling with the infrared sensors 101-104.

また、温度検出装置は、測定対象物の情報、あるいは、周囲の環境情報に基づいて、係数Ａ，Ｂを設定するように構成されることもできる。   In addition, the temperature detection device can be configured to set the coefficients A and B based on the information on the measurement object or the surrounding environment information.

即ち、温度検出装置は、測定対象物を完全黒体として、この測定対象物の温度を検出する。しかし、赤外線の放射量は、測定対象物、その表面状態によって異なってくる。例えば、人が放出する赤外線エネルギーとその他の物体の赤外線エネルギーとでは、異なってくる場合がある。   That is, the temperature detection device detects the temperature of the measurement object with the measurement object as a complete black body. However, the amount of infrared radiation varies depending on the object to be measured and its surface condition. For example, the infrared energy emitted by a person may differ from the infrared energy of other objects.

また、測定対象物が設置されている環境、温度検出装置の設置場所等によっても、赤外線エネルギーは異なる値となる場合がある。   In addition, the infrared energy may have a different value depending on the environment in which the measurement object is installed, the installation location of the temperature detection device, and the like.

この場合、メモリ５は、測定対象物、環境に基づいて予め設定された複数の係数Ａ，Ｂを記憶するようにする。そして、測定対象物の情報、環境情報を温度演算部４に供給し、温度演算部４が、この情報に基づいて、対応する係数Ａ，Ｂを選択するようにすれば、温度演算部４は、より精度の高い温度Ｔbbを取得することができる。   In this case, the memory 5 stores a plurality of coefficients A and B set in advance based on the measurement object and the environment. And if the information of a measurement object and environmental information are supplied to the temperature calculating part 4, and the temperature calculating part 4 selects the corresponding coefficients A and B based on this information, the temperature calculating part 4 will be The temperature Tbb with higher accuracy can be acquired.

また、上記実施形態５では、移動平均フィルタ６をアンプ２ｂの出力端とＡ／Ｄ変換器３の入力端との間に介挿するようにした。しかし、図９に示すように、アンプ２ａの出力端とＡ／Ｄ変換器３の入力端との間に、センサ部１の熱時定数以下の遅延特性を有する移動平均フィルタ７を介挿するように構成されてもよい。このようにすれば、赤外線センサ１１の急激な温度変化の影響、及び電気的ノイズを抑制することができる。   In the fifth embodiment, the moving average filter 6 is interposed between the output end of the amplifier 2 b and the input end of the A / D converter 3. However, as shown in FIG. 9, a moving average filter 7 having a delay characteristic equal to or less than the thermal time constant of the sensor unit 1 is interposed between the output terminal of the amplifier 2a and the input terminal of the A / D converter 3. It may be configured as follows. In this way, the influence of a rapid temperature change of the infrared sensor 11 and electrical noise can be suppressed.

さらに、アンプ２ｂの出力端とＡ／Ｄ変換器３の入力端との間に移動平均フィルタ６を介挿し、アンプ２ａの出力端とＡ／Ｄ変換器３の入力端との間に移動平均フィルタ７を介挿するように構成されてもよい。このようにすれば、さらに、センサ部１全体の急激な温度変化の影響、及び電気的ノイズを抑制することができる。   Further, a moving average filter 6 is inserted between the output terminal of the amplifier 2b and the input terminal of the A / D converter 3, and the moving average is interposed between the output terminal of the amplifier 2a and the input terminal of the A / D converter 3. You may comprise so that the filter 7 may be inserted. In this way, it is possible to further suppress the influence of a rapid temperature change of the entire sensor unit 1 and electrical noise.

本発明の実施形態１に係る温度検出装置の構成を示す図である。It is a figure which shows the structure of the temperature detection apparatus which concerns on Embodiment 1 of this invention. 図１に示すセンサ部の構成を示す図であり、（ａ）は斜視図、（ｂ）は平面図である。It is a figure which shows the structure of the sensor part shown in FIG. 1, (a) is a perspective view, (b) is a top view. 図１に示す温度検出装置の特性として、従来のものと比較して、センサ温度と出力電圧との関係を示す図である。It is a figure which shows the relationship between sensor temperature and an output voltage as a characteristic of the temperature detection apparatus shown in FIG. 1 compared with the conventional one. 従来の温度検出装置のセンサ温度と温度誤差との関係を示す図である。It is a figure which shows the relationship between the sensor temperature and temperature error of the conventional temperature detection apparatus. 図１に示す温度検出装置のセンサ温度と温度誤差との関係を示す図である。It is a figure which shows the relationship between the sensor temperature and temperature error of the temperature detection apparatus shown in FIG. 本発明の実施形態３に係る温度検出装置の構成を示す図である。It is a figure which shows the structure of the temperature detection apparatus which concerns on Embodiment 3 of this invention. 図６に示すセンサ部の構成を示す図であり、（ａ）は斜視図、（ｂ）は平面図である。It is a figure which shows the structure of the sensor part shown in FIG. 6, (a) is a perspective view, (b) is a top view. 本発明の実施形態５に係る温度検出装置の構成を示す図である。It is a figure which shows the structure of the temperature detection apparatus which concerns on Embodiment 5 of this invention. 本発明の実施形態５に係る温度検出装置の応用例として、センサ部の赤外線センサ側に移動平均フィルタを介挿した場合の構成を示す図である。It is a figure which shows the structure at the time of inserting the moving average filter in the infrared sensor side of a sensor part as an application example of the temperature detection apparatus which concerns on Embodiment 5 of this invention.

符号の説明Explanation of symbols

１ センサ部
４ 温度演算部
５ メモリ
６，７ 移動平均フィルタ
１１（１０１〜１０４） 赤外線センサ
１５ 赤外線センサ（外囲器内壁温度測定用） DESCRIPTION OF SYMBOLS 1 Sensor part 4 Temperature calculating part 5 Memory 6, 7 Moving average filter 11 (101-104) Infrared sensor 15 Infrared sensor (for envelope inner wall temperature measurement)

Claims (9)

測定対象物が発する赤外線を検知して前記測定対象物の温度に対応する第１の電圧を出力する赤外線センサと、
前記赤外線センサのセンサ温度を検出し、前記センサ温度に対応する第２の電圧を出力する温度センサと、
前記赤外線センサ、前記温度センサから、それぞれ、出力された前記第１の電圧、前記第２の電圧を取得し、前記測定対象物の温度を前記第１の電圧に換算するための係数を第１の係数、前記センサ温度を前記第２の電圧に換算するための係数を第２の係数として、前記第１の係数と前記第２の係数とが異なる値に設定され、数１に従って、前記測定対象物の温度を取得する温度演算部と、を備え、
前記第１の係数（Ａ１）および前記第２の係数（Ｂ１）は、実験によって得られた第１，第２，第３測定値から取得された、前記測定対象物の温度と前記赤外線センサの温度とのセットに基づいて互いに独立に設定され、且つ、１＜（Ｂ１）／（Ａ１）≦１．５の関係を満たす、
ことを特徴とする温度検出装置。
Figure 0005078261
 An infrared sensor that detects infrared rays emitted from the measurement object and outputs a first voltage corresponding to the temperature of the measurement object;
A temperature sensor that detects a sensor temperature of the infrared sensor and outputs a second voltage corresponding to the sensor temperature;
The output first voltage and second voltage are obtained from the infrared sensor and the temperature sensor, respectively, and a coefficient for converting the temperature of the measurement object into the first voltage is a first coefficient. The first coefficient and the second coefficient are set to different values with the coefficient for converting the sensor temperature into the second voltage as the second coefficient, and the measurement is performed according to Equation 1. A temperature calculation unit for acquiring the temperature of the object,
The first coefficient (A1) and the second coefficient (B1) are obtained from the first, second, and third measurement values obtained by experiments, and the temperature of the measurement object and the infrared sensor. Set independently of each other based on the set with the temperature, and satisfies the relationship of 1 <(B1) / (A1) ≦ 1.5.
A temperature detecting device characterized by that.
Figure 0005078261
 測定対象物が発する赤外線を検知して前記測定対象物の温度に対応する第１の電圧を出力する赤外線センサと、
前記赤外線センサのセンサ温度を検出し、前記センサ温度に対応する第２の電圧を出力する温度センサと、
前記赤外線センサ、前記温度センサから、それぞれ、出力された前記第１の電圧、前記第２の電圧を取得し、前記測定対象物の温度を前記第１の電圧に換算するための係数を第１の係数、前記センサ温度を前記第２の電圧に換算するための係数を第２の係数として、前記第１の係数と前記第２の係数とが異なる値に設定され、数２に従って、前記測定対象物の温度を取得する温度演算部と、を備え、
前記第１の係数（Ａ２）および前記第２の係数（Ｂ２）は、実験によって得られた第１，第２，第３測定値から取得された、前記測定対象物の温度と前記赤外線センサの温度とのセットに基づいて互いに独立に設定され、且つ、１＜（Ｂ２）／（Ａ２）≦１．５の関係を満たす、
ことを特徴とする温度検出装置。
Figure 0005078261
 An infrared sensor that detects infrared rays emitted from the measurement object and outputs a first voltage corresponding to the temperature of the measurement object;
A temperature sensor that detects a sensor temperature of the infrared sensor and outputs a second voltage corresponding to the sensor temperature;
The output first voltage and second voltage are obtained from the infrared sensor and the temperature sensor, respectively, and a coefficient for converting the temperature of the measurement object into the first voltage is a first coefficient. The first coefficient and the second coefficient are set to different values, the coefficient for converting the sensor temperature into the second voltage as the second coefficient, and the measurement is performed according to Equation 2. A temperature calculation unit for acquiring the temperature of the object,
The first coefficient (A2) and the second coefficient (B2) are obtained from the first, second, and third measurement values obtained by experiments, and the temperature of the measurement object and the infrared sensor. Set independently of each other based on the set with the temperature, and satisfies the relationship of 1 <(B2) / (A2) ≦ 1.5.
A temperature detecting device characterized by that.
Figure 0005078261
 測定対象物が発する赤外線を検知して前記測定対象物の温度に対応する第１の電圧を出力する赤外線センサと、
前記赤外線センサのセンサ温度を検出し、前記センサ温度に対応する第２の電圧を出力する温度センサと、
前記赤外線センサを収納する外囲器内の温度を検出する内部温度検出部と、
前記赤外線センサ、前記温度センサ、前記内部温度検出部から、それぞれ、出力された前記第１の電圧、前記第２の電圧、前記内部温度検出部の出力電圧を取得し、前記測定対象物の温度を前記第１の電圧に換算するための係数を第１の係数、前記センサ温度を前記第２の電圧に換算するための係数を第２の係数として、前記第１の係数と前記第２の係数とが異なる値に設定され、数３に従って、前記測定対象物の温度を取得する温度演算部と、を備え、
前記第１の係数（Ａ３）および前記第２の係数（Ｂ３）は、実験によって得られた第１，第２，第３測定値から取得された、前記測定対象物の温度と前記赤外線センサの温度とのセットに基づいて互いに独立に設定され、且つ、１＜（Ｂ３）／（Ａ３）≦１．５の関係を満たす、
ことを特徴とする温度検出装置。
Figure 0005078261
 An infrared sensor that detects infrared rays emitted from the measurement object and outputs a first voltage corresponding to the temperature of the measurement object;
A temperature sensor that detects a sensor temperature of the infrared sensor and outputs a second voltage corresponding to the sensor temperature;
An internal temperature detector for detecting the temperature in the envelope housing the infrared sensor;
The output of the first voltage, the second voltage, and the output voltage of the internal temperature detection unit is obtained from the infrared sensor, the temperature sensor, and the internal temperature detection unit, respectively, and the temperature of the measurement object is obtained. A first coefficient is a coefficient for converting the sensor temperature to the first voltage, and a second coefficient is a coefficient for converting the sensor temperature to the second voltage. A coefficient is set to a different value, and according to Equation 3, a temperature calculation unit that acquires the temperature of the measurement object,
The first coefficient (A3) and the second coefficient (B3) are obtained from the first, second, and third measured values obtained by experiments, and the temperature of the measurement object and the infrared sensor. Set independently of each other based on the set with the temperature, and satisfies the relationship of 1 <(B3) / (A3) ≦ 1.5.
A temperature detecting device characterized by that.
Figure 0005078261
 測定対象物が発する赤外線を検知して前記測定対象物の温度に対応する第１の電圧を出力する赤外線センサと、
前記赤外線センサのセンサ温度を検出し、前記センサ温度に対応する第２の電圧を出力する温度センサと、
前記赤外線センサを収納する外囲器内の温度を検出する内部温度検出部と、
前記赤外線センサ、前記温度センサ、前記内部温度検出部から、それぞれ、出力された前記第１の電圧、前記第２の電圧、前記内部温度検出部の出力電圧を取得し、前記測定対象物の温度を前記第１の電圧に換算するための係数を第１の係数、前記センサ温度を前記第２の電圧に換算するための係数を第２の係数として、前記第１の係数と前記第２の係数とが異なる値に設定され、数４に従って、前記測定対象物の温度を取得する温度演算部と、を備え、
前記第１の係数（Ａ４）および前記第２の係数（Ｂ４）は、実験によって得られた第１，第２，第３測定値から取得された、前記測定対象物の温度と前記赤外線センサの温度とのセットに基づいて互いに独立に設定され、且つ、１＜（Ｂ４）／（Ａ４）≦１．５の関係を満たす、
ことを特徴とする温度検出装置。
Figure 0005078261
 An infrared sensor that detects infrared rays emitted from the measurement object and outputs a first voltage corresponding to the temperature of the measurement object;
A temperature sensor that detects a sensor temperature of the infrared sensor and outputs a second voltage corresponding to the sensor temperature;
An internal temperature detector for detecting the temperature in the envelope housing the infrared sensor;
The output of the first voltage, the second voltage, and the output voltage of the internal temperature detection unit is obtained from the infrared sensor, the temperature sensor, and the internal temperature detection unit, respectively, and the temperature of the measurement object is obtained. A first coefficient is a coefficient for converting the sensor temperature to the first voltage, and a second coefficient is a coefficient for converting the sensor temperature to the second voltage. The coefficient is set to a different value, and according to Equation 4, a temperature calculation unit that acquires the temperature of the measurement object,
The first coefficient (A4) and the second coefficient (B4) are obtained from the first, second, and third measurement values obtained by experiments, and the temperature of the measurement object and the infrared sensor. Set independently of each other based on the set with the temperature, and satisfies the relationship of 1 <(B4) / (A4) ≦ 1.5.
A temperature detecting device characterized by that.
Figure 0005078261
 前記赤外線センサと前記温度センサとは、センサ部に備えられたものであり、
前記センサ部の熱時定数以下の遅延特性を有し、前記赤外線センサ及び前記温度センサの少なくとも一方の出力端に接続されて、接続されたセンサが出力する電圧を平滑化するローパスフィルタを備えた、
ことを特徴とする請求項１乃至４のいずれか１項に記載の温度検出装置。 The infrared sensor and the temperature sensor are provided in a sensor unit,
The sensor unit has a delay characteristic equal to or less than a thermal time constant of the sensor unit, and is connected to an output terminal of at least one of the infrared sensor and the temperature sensor, and includes a low-pass filter that smoothes a voltage output from the connected sensor. ,
The temperature detection device according to any one of claims 1 to 4, wherein 測定対象物が発する赤外線を検知する赤外線センサを備えて温度を検出する温度検出方法であって、
前記赤外線センサの温度を検出するステップと、
前記赤外線センサが前記測定対象物の赤外線を検知したときの前記測定対象物の温度を電圧に換算するための係数を第１の係数、前記赤外線センサのセンサ温度を電圧に換算するための係数を第２の係数として、前記第１の係数と前記第２の係数とが異なる値に設定され、数５に従って、前記測定対象物の温度を取得するステップと、を備え、
前記第１の係数（Ａ１）および前記第２の係数（Ｂ１）は、実験によって得られた第１，第２，第３測定値から取得された、前記測定対象物の温度と前記赤外線センサの温度とのセットに基づいて互いに独立に設定され、且つ、１＜（Ｂ１）／（Ａ１）≦１．５の関係を満たす、
ことを特徴とする温度検出方法。
Figure 0005078261
 A temperature detection method for detecting temperature by including an infrared sensor for detecting infrared rays emitted from a measurement object,
Detecting the temperature of the infrared sensor;
A coefficient for converting the temperature of the measurement object to voltage when the infrared sensor detects infrared rays of the measurement object is a first coefficient, and a coefficient for converting the sensor temperature of the infrared sensor to voltage The first coefficient and the second coefficient are set to different values as a second coefficient, and the temperature of the measurement object is obtained according to Equation 5,
The first coefficient (A1) and the second coefficient (B1) are obtained from the first, second, and third measurement values obtained by experiments, and the temperature of the measurement object and the infrared sensor. Set independently of each other based on the set with the temperature, and satisfies the relationship of 1 <(B1) / (A1) ≦ 1.5.
The temperature detection method characterized by the above-mentioned.
Figure 0005078261
 測定対象物が発する赤外線を検知する赤外線センサを備えて温度を検出する温度検出方法であって、
前記赤外線センサの温度を検出するステップと、
前記赤外線センサが前記測定対象物の赤外線を検知したときの前記測定対象物の温度を電圧に換算するための係数を第１の係数、前記赤外線センサのセンサ温度を電圧に換算するための係数を第２の係数として、前記第１の係数と前記第２の係数とが異なる値に設定され、数６に従って、前記測定対象物の温度を取得するステップと、を備え、
前記第１の係数（Ａ２）および前記第２の係数（Ｂ２）は、実験によって得られた第１，第２，第３測定値から取得された、前記測定対象物の温度と前記赤外線センサの温度とのセットに基づいて互いに独立に設定され、且つ、１＜（Ｂ２）／（Ａ２）≦１．５の関係を満たす、
ことを特徴とする温度検出方法。
Figure 0005078261
 A temperature detection method for detecting temperature by including an infrared sensor for detecting infrared rays emitted from a measurement object,
Detecting the temperature of the infrared sensor;
A coefficient for converting the temperature of the measurement object to voltage when the infrared sensor detects infrared rays of the measurement object is a first coefficient, and a coefficient for converting the sensor temperature of the infrared sensor to voltage The first coefficient and the second coefficient are set to different values as a second coefficient, and the temperature of the measurement object is obtained according to Equation 6, and
The first coefficient (A2) and the second coefficient (B2) are obtained from the first, second, and third measurement values obtained by experiments, and the temperature of the measurement object and the infrared sensor. Set independently of each other based on the set with the temperature, and satisfies the relationship of 1 <(B2) / (A2) ≦ 1.5.
The temperature detection method characterized by the above-mentioned.
Figure 0005078261
 測定対象物が発する赤外線を検知する赤外線センサを備えて温度を検出する温度検出方法であって、
前記赤外線センサの温度を検出するステップと、
前記赤外線センサが収納された内部の温度を検出するステップと、
前記赤外線センサが前記測定対象物の赤外線を検知したときの前記測定対象物の温度を電圧に換算するための係数を第１の係数、前記赤外線センサのセンサ温度を電圧に換算するための係数を第２の係数として、前記第１の係数と前記第２の係数とが異なる値に設定され、数７に従って、前記測定対象物の温度を取得するステップと、を備え、
前記第１の係数（Ａ３）および前記第２の係数（Ｂ３）は、実験によって得られた第１，第２，第３測定値から取得された、前記測定対象物の温度と前記赤外線センサの温度とのセットに基づいて互いに独立に設定され、且つ、１＜（Ｂ３）／（Ａ３）≦１．５の関係を満たす、
ことを特徴とする温度検出方法。
Figure 0005078261
 A temperature detection method for detecting temperature by including an infrared sensor for detecting infrared rays emitted from a measurement object,
Detecting the temperature of the infrared sensor;
Detecting the temperature inside the infrared sensor;
A coefficient for converting the temperature of the measurement object to voltage when the infrared sensor detects infrared rays of the measurement object is a first coefficient, and a coefficient for converting the sensor temperature of the infrared sensor to voltage The first coefficient and the second coefficient are set to different values as a second coefficient, and the temperature of the measurement object is obtained according to Equation 7,
The first coefficient (A3) and the second coefficient (B3) are obtained from the first, second, and third measured values obtained by experiments, and the temperature of the measurement object and the infrared sensor. Set independently of each other based on the set with the temperature, and satisfies the relationship of 1 <(B3) / (A3) ≦ 1.5.
The temperature detection method characterized by the above-mentioned.
Figure 0005078261
 測定対象物が発する赤外線を検知する赤外線センサを備えて温度を検出する温度検出方法であって、
前記赤外線センサの温度を検出するステップと、
前記赤外線センサが収納された内部の温度を検出するステップと、
前記赤外線センサが前記測定対象物の赤外線を検知したときの前記測定対象物の温度を電圧に換算するための係数を第１の係数、前記赤外線センサのセンサ温度を電圧に換算するための係数を第２の係数として、前記第１の係数と前記第２の係数とが異なる値に設定され、数８に従って、前記測定対象物の温度を取得するステップと、を備え、
前記第１の係数（Ａ４）および前記第２の係数（Ｂ４）は、実験によって得られた第１，第２，第３測定値から取得された、前記測定対象物の温度と前記赤外線センサの温度とのセットに基づいて互いに独立に設定され、且つ、１＜（Ｂ４）／（Ａ４）≦１．５の関係を満たす、
ことを特徴とする温度検出方法。
Figure 0005078261
 A temperature detection method for detecting temperature by including an infrared sensor for detecting infrared rays emitted from a measurement object,
Detecting the temperature of the infrared sensor;
Detecting the temperature inside the infrared sensor;
A coefficient for converting the temperature of the measurement object to voltage when the infrared sensor detects infrared light of the measurement object is a first coefficient, and a coefficient for converting the sensor temperature of the infrared sensor to voltage The first coefficient and the second coefficient are set to different values as a second coefficient, and the temperature of the measurement object is obtained according to Equation 8,
The first coefficient (A4) and the second coefficient (B4) are obtained from the first, second, and third measurement values obtained by experiments, and the temperature of the measurement object and the infrared sensor. Set independently of each other based on the set with the temperature, and satisfies the relationship of 1 <(B4) / (A4) ≦ 1.5.
The temperature detection method characterized by the above-mentioned.
Figure 0005078261
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