JP5046367B2 - Piezoelectric material, method for manufacturing the same, vibration damping device, and driving device - Google Patents
Piezoelectric material, method for manufacturing the same, vibration damping device, and driving device Download PDFInfo
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この発明は、媒体中に複数の圧電粒子が分散された圧電材とその製造方法、可動部材の振動を圧電材によって抑える制振装置、及び可動部材を圧電材によって駆動する駆動装置に関する。 The present invention relates to a piezoelectric material in which a plurality of piezoelectric particles are dispersed in a medium, a manufacturing method thereof, a vibration damping device that suppresses vibration of a movable member with the piezoelectric material, and a drive device that drives the movable member with the piezoelectric material.
応力を加えると電気分極を発生し、電界（電場）を加えると歪みを発生する強誘電体の焼結体である圧電セラミックなどの圧電材が知られている。従来の圧電材は、シート状の圧電材料に電極を印刷し所定の寸法に切り出して積層体を形成し、脱脂後の積層体を電気炉によって焼成して形成されている（例えば、特許文献１参照）。このような従来の圧電材は、結晶相比率を制御することによって目的とする特性を選定可能にしている。また、圧電セラミックスの粉体をゴム中に分散させた圧電ゴムが知られている。従来の圧電ゴムは、圧電体として径方向に分極された圧電セラミックの粉体をゴム中に含有している（例えば、特許文献２参照）。 2. Description of the Related Art Piezoelectric materials such as piezoelectric ceramics, which are ferroelectric sintered bodies that generate electrical polarization when stress is applied and generate distortion when an electric field (electric field) is applied, are known. A conventional piezoelectric material is formed by printing an electrode on a sheet-like piezoelectric material, cutting out to a predetermined size to form a laminated body, and firing the degreased laminated body with an electric furnace (for example, Patent Document 1). reference). Such a conventional piezoelectric material makes it possible to select desired characteristics by controlling the crystal phase ratio. Further, a piezoelectric rubber in which piezoelectric ceramic powder is dispersed in rubber is known. Conventional piezoelectric rubber contains a piezoelectric ceramic powder polarized in the radial direction as a piezoelectric body (see, for example, Patent Document 2).
電場を加えると粘度が変化する電気粘性流体(Electro-Rheological Fluid(ER流体))を利用して振動を抑える制振装置が知られている。従来の制振装置は、振動発生機器からの振動を受けて往復動作する受振部材と、振動発生機器を固定するための固定部材と、受振部材と固定部材との間に充填される電気粘性流体を収容する収容室と、この収容室内の電気粘性流体の粘度を変化させるためにこの電気粘性流体に加わる電界を制御する電界制御制御手段とを備えている（例えば、特許文献３参照）。このような従来の制振装置では、収容室内の電気粘性流体に加える磁界を制御することによって、この電気粘性流体の粘度を変化させ受振部材の振動を減衰させている。 There is known a vibration damping device that suppresses vibration by using an electro-rheological fluid (ER fluid) whose viscosity changes when an electric field is applied. A conventional vibration damping device includes a vibration receiving member that reciprocates in response to vibration from a vibration generating device, a fixing member that fixes the vibration generating device, and an electrorheological fluid that is filled between the vibration receiving member and the fixing member. And an electric field control control means for controlling the electric field applied to the electrorheological fluid in order to change the viscosity of the electrorheological fluid in the chamber (see, for example, Patent Document 3). In such a conventional vibration damping device, by controlling the magnetic field applied to the electrorheological fluid in the accommodation chamber, the viscosity of the electrorheological fluid is changed to attenuate the vibration of the vibration receiving member.
また、磁場を加えると粘度が変化する磁気粘性流体(Magneto-Rheological Fluid(MR流体))を利用して振動を抑える制振装置が知られている。従来の制振装置は、所定の間隔をあけて配列されたスリットを有する多数の平板と、これらの平板の一方の端部を一枚おきに固定する固定部材と、この第１の固定部材に固定された平板以外の平板の他方の端部に接続されて振動する振動部材と、各平板の間に充填される磁気粘性流体を収容する収容室と、この収容室内の磁気粘性流体の粘度を変化させるためにこの磁気粘性流体に加わる磁束を制御する磁束制御手段とを備えている（例えば、特許文献４参照）。このような従来の制振装置では、収容室内の磁気粘性流体に加える磁束を制御することによって、この磁気粘性流体の粘度を変化させ振動部材の振動を減衰させている。 There is also known a vibration damping device that suppresses vibrations using a magneto-rheological fluid (MR fluid) whose viscosity changes when a magnetic field is applied. The conventional vibration damping device includes a large number of flat plates having slits arranged at a predetermined interval, a fixing member that fixes one end of each of the flat plates every other piece, and the first fixing member. A vibrating member that is connected to the other end of the flat plate other than the fixed flat plate and vibrates, a storage chamber that stores the magnetorheological fluid filled between the flat plates, and the viscosity of the magnetorheological fluid in the storage chamber. Magnetic flux control means for controlling the magnetic flux applied to the magnetorheological fluid in order to change it is provided (for example, see Patent Document 4). In such a conventional vibration damping device, by controlling the magnetic flux applied to the magnetorheological fluid in the accommodation chamber, the viscosity of the magnetorheological fluid is changed to attenuate the vibration of the vibrating member.
従来の圧電材では、圧電材料を焼結させて形成しているため非常に硬く、一般にぜい性材料であることから割れやすく、大きな変形などに追従することができない問題点がある。また、従来の圧電ゴムでは、圧電粒子がゴム中に三次元的に分散しているだけであり、圧電ゴムに応力が加わって個々の圧電粒子が電気分極しても全体として発生する電力が小さく、圧電ゴムに応力が加わっても歪みがゴムに吸収されてしまい十分な圧電性能を発揮しない問題点がある。さらに、従来の粘性流体による制振装置では、無負荷状態で一定時間静置すると粘性流体内に配合されている導電性粒子や磁気粒子が沈殿し、性能を著しく低下させるという問題があった。また、このような制振装置では、電気粘性流体に電場を加えたり磁気粘性流体に磁束を加えたりするための電気回路や、電場や磁束を制御するための制御回路などが必要になって装置が大型化し複雑になってしまう問題点がある。 The conventional piezoelectric material is very hard because it is formed by sintering the piezoelectric material, and since it is generally a brittle material, there is a problem that it is easily broken and cannot follow large deformation. Further, in the conventional piezoelectric rubber, the piezoelectric particles are only three-dimensionally dispersed in the rubber, and the generated electric power is small even when the piezoelectric rubber is subjected to stress and the individual piezoelectric particles are electrically polarized. However, even if stress is applied to the piezoelectric rubber, there is a problem that the strain is absorbed by the rubber and the piezoelectric performance is not sufficiently exhibited. Further, the conventional vibration damping device using viscous fluid has a problem that, when left standing for a certain period of time in a no-load state, conductive particles and magnetic particles mixed in the viscous fluid are precipitated, and the performance is remarkably deteriorated. In addition, in such a vibration damping device, an electric circuit for applying an electric field to the electrorheological fluid or applying a magnetic flux to the magnetorheological fluid, a control circuit for controlling the electric field and the magnetic flux, and the like are required. There is a problem that becomes larger and complicated.
この発明の課題は、簡単な構造で柔軟であり圧電効果を向上させることができる圧電材とその製造方法、制振装置及び駆動装置を提供することである。 An object of the present invention is to provide a piezoelectric material that has a simple structure and is flexible and that can improve the piezoelectric effect, a manufacturing method thereof, a vibration damping device, and a driving device.
この発明は、以下に記載するような解決手段により、前記課題を解決する。
なお、この発明の実施形態に対応する符号を付して説明するが、この実施形態に限定するものではない。
請求項１の発明は、図１及び図２に示すように、媒体（３）中に複数の圧電粒子（２）が分散された圧電材であって、前記媒体に加わる電界（Ｅ）の方向と前記複数の圧電粒子の分極方向とが同一になるように、この電界の方向にこれらの圧電粒子が配向されており、前記複数の圧電粒子が複数列に並んだ状態で前記媒体中に配向するように、未硬化の前記媒体に電圧を加えながらこの媒体を硬化させることによって、これらの圧電粒子がこの媒体に保持されていることを特徴とする圧電材（１）である。
The present invention solves the above-mentioned problems by the solving means described below.
In addition, although the code | symbol corresponding to embodiment of this invention is attached | subjected and demonstrated, it is not limited to this embodiment.
The invention of claim 1 is a piezoelectric material in which a plurality of piezoelectric particles (2) are dispersed in a medium (3) as shown in FIGS. 1 and 2, and the direction of an electric field (E) applied to the medium. wherein as the polarization direction of the plurality of piezoelectric particles become the same as the direction of the electric field is oriented these piezoelectric particles, oriented in the medium said plurality of piezoelectric particles in a state of being aligned in the plurality of rows Thus, the piezoelectric material (1) is characterized in that the piezoelectric particles are held by the medium by curing the medium while applying a voltage to the uncured medium .
請求項２の発明は、請求項１に記載の圧電材において、前記複数の圧電粒子は、ゴム中に配向されており、前記複数の圧電粒子が複数列に並んだ状態で前記ゴム中に配向するように、未硬化の前記ゴムに電圧を加えながらこのゴムを硬化させることによって、これらの圧電粒子がこのゴムに保持されていることを特徴とする圧電材である。 According to a second aspect of the present invention, in the piezoelectric material according to the first aspect, the plurality of piezoelectric particles are oriented in the rubber, and the plurality of piezoelectric particles are oriented in the rubber in a state of being arranged in a plurality of rows. Thus, the piezoelectric material is characterized in that the piezoelectric particles are held by the rubber by curing the rubber while applying voltage to the uncured rubber .
請求項３の発明は、図１〜図３に示すように、媒体（３）中に複数の圧電粒子（２）が分散された圧電材（１）の製造方法であって、前記媒体中に前記複数の圧電粒子を分散させる分散工程（＃２００）と、前記媒体に加わる電界（Ｅ）の方向と前記複数の圧電粒子の分極方向とが同一になるように、この電界の方向にこれらの圧電粒子を配向させる配向工程（＃３００）とを含み、前記配向工程は、前記複数の圧電粒子が複数列に並んだ状態で前記媒体中に配向するように、未硬化の前記媒体に電圧を加えながらこの媒体を硬化させる工程を含むことを特徴とする圧電材の製造方法（＃１００）である。 The invention of claim 3 is a method for producing a piezoelectric material (1) in which a plurality of piezoelectric particles (2) are dispersed in a medium (3) as shown in FIGS. The dispersion step (# 200) for dispersing the plurality of piezoelectric particles, and the direction of the electric field (E) applied to the medium and the polarization direction of the plurality of piezoelectric particles are the same in the direction of the electric field. and a orientation step of orienting the piezoelectric particles (# 300), the alignment step, as the plurality of piezoelectric particles are oriented in the medium in a state aligned in a plurality of columns, the voltage to the medium of uncured A piezoelectric material manufacturing method (# 100) including a step of curing the medium while adding .
請求項４の発明は、請求項３に記載の圧電材の製造方法において、前記分散工程は、未硬化のゴム中に前記圧電粒子を分散させる工程を含み、前記配向工程は、前記未硬化のゴムに電圧を加えながらこの未硬化のゴムを加熱して硬化させる工程を含むことを特徴とする圧電材の製造方法である。 Invention of Claim 4 is a manufacturing method of the piezoelectric material of Claim 3 , The said dispersion | distribution process includes the process of disperse | distributing the said piezoelectric particle in uncured rubber | gum, and the said alignment process is the said uncured process. A method for producing a piezoelectric material comprising a step of heating and curing the uncured rubber while applying a voltage to the rubber.
請求項５の発明は、図５及び図６に示すように、可動部材（５）の振動を圧電材（１）によって抑える制振装置であって、前記圧電材は、媒体（３）中に複数の圧電粒子（２）が分散されており、この媒体に加わる電界（Ｅ）の方向とこれらの圧電粒子の分極方向とが同一になるように、この電界の方向にこれらの圧電粒子が配向されており、前記複数の圧電粒子が複数列に並んだ状態で前記媒体中に配向するように、未硬化の前記媒体に電圧を加えながらこの媒体を硬化させることによって、これらの圧電粒子がこの媒体に保持されていることを特徴とする制振装置（６）である。 The invention of claim 5 is a vibration damping device for suppressing vibration of the movable member (5) by the piezoelectric material (1) as shown in FIGS. 5 and 6, wherein the piezoelectric material is contained in the medium (3). A plurality of piezoelectric particles (2) are dispersed, and these piezoelectric particles are oriented in the direction of the electric field so that the direction of the electric field (E) applied to the medium is the same as the polarization direction of the piezoelectric particles. It is, as the plurality of piezoelectric particles are oriented in the medium in a state aligned in a plurality of columns, by curing the medium while the voltage applied to the medium of the uncured, these piezoelectric particles this The vibration damping device (6) is characterized by being held by a medium .
請求項６の発明は、請求項５に記載の制振装置において、図５に示すように、前記圧電材は、前記可動部材の振動に応じて振動する第１の電極（４Ａ）と第２の電極（４Ｂ）との間に配置され、これらの電極の振動に応じて弾性変形することを特徴とする制振装置である。 According to a sixth aspect of the invention, the vibration damping device according to claim 5, as shown in FIG. 5, the piezoelectric material, a first electrode (4A) and second to vibrate in response to vibration of said movable member The vibration damping device is arranged between the electrode (4B) and elastically deforms according to the vibration of these electrodes.
請求項７の発明は、請求項６に記載の制振装置において、図６に示すように、前記圧電材は、前記可動部材の振動に応じて振動する第１の電極（４Ａ）と固定部材（９）に固定される第２の電極（４Ｂ）との間に配置され、この第１の電極の振動に応じて弾性変形することを特徴とする制振装置である。 According to a seventh aspect of the invention, in the vibration damping device according to claim 6, as shown in FIG. 6, the piezoelectric material, a first electrode (4A) and the fixing member to vibrate in response to vibration of said movable member The vibration damping device is arranged between the second electrode (4B) fixed to (9) and elastically deforms according to the vibration of the first electrode.
請求項８の発明は、請求項５から請求項７までのいずれか１項に記載の制振装置において、前記圧電材は、ゴム中に前記複数の圧電粒子が配向されており、前記複数の圧電粒子が複数列に並んだ状態で前記ゴム中に配向するように、未硬化の前記ゴムに電圧を加えながらこのゴムを硬化させることによって、これらの圧電粒子がこのゴムに保持されていることを特徴とする制振装置である。 The invention of claim 8 is the vibration damping device according to any one of claims 5 to claim 7, wherein the piezoelectric material is oriented during said rubber plurality of piezoelectric particles, the plurality of These rubber particles are held by this rubber by curing the rubber while applying voltage to the uncured rubber so that the piezoelectric particles are aligned in a plurality of rows in the rubber. Is a vibration damping device characterized by
請求項９の発明は、請求項５から請求項８までのいずれか１項に記載の制振装置において、前記圧電材が発生する電力を消費する電力消費部（８）を備えることを特徴とする制振装置である。 A ninth aspect of the present invention is the vibration damping device according to any one of the fifth to eighth aspects, further comprising a power consuming unit (8) that consumes the power generated by the piezoelectric material. It is a vibration control device.
請求項１０の発明は、図７に示すように、可動部材（５）を圧電材（１）によって駆動する駆動装置であって、前記圧電材は、媒体（３）中に複数の圧電粒子（２）が分散されており、この媒体に加わる電界（Ｅ）の方向とこれらの圧電粒子の分極方向とが同一になるように、この電界の方向にこれらの圧電粒子が配向されており、前記複数の圧電粒子が複数列に並んだ状態で前記媒体中に配向するように、未硬化の前記媒体に電圧を加えながらこの媒体を硬化させることによって、これらの圧電粒子がこの媒体に保持されていることを特徴とする駆動装置（１０）である。 The invention of claim 10 is a drive device for driving the movable member (5) by the piezoelectric material (1) as shown in FIG. 7, wherein the piezoelectric material comprises a plurality of piezoelectric particles (in the medium (3)). 2) are dispersed, so that the direction of the electric field (E) applied to the medium and the polarization direction of the piezoelectric particles are the same, and these piezoelectric particles in the direction of the electric field is oriented, the The piezoelectric particles are held on the medium by curing the medium while applying a voltage to the uncured medium so that the plurality of piezoelectric particles are aligned in a plurality of rows in the medium. It is a drive device (10) characterized by being.
請求項１１の発明は、請求項１０に記載の駆動装置において、前記圧電材は、第１の電極（４Ａ）と第２の電極（４Ｂ）との間に配置され、これらの電極間に加わる電圧に応じて弾性変形して前記可動部材を駆動することを特徴とする駆動装置である。 According to an eleventh aspect of the present invention, in the driving device according to the tenth aspect , the piezoelectric material is disposed between the first electrode (4A) and the second electrode (4B), and is applied between these electrodes. It is a drive device characterized by elastically deforming according to voltage and driving the movable member.
請求項１２の発明は、請求項１１に記載の駆動装置において、前記圧電材は、ゴム中に前記複数の圧電粒子が配向されており、前記複数の圧電粒子が複数列に並んだ状態で前記ゴム中に配向するように、未硬化の前記ゴムに電圧を加えながらこのゴムを硬化させることによって、これらの圧電粒子がこのゴムに保持されていることを特徴とする駆動装置である。 According to a twelfth aspect of the present invention, in the drive device according to the eleventh aspect, the piezoelectric material has the plurality of piezoelectric particles oriented in rubber, and the plurality of piezoelectric particles are arranged in a plurality of rows. The drive device is characterized in that the piezoelectric particles are held by the rubber by curing the rubber while applying a voltage to the uncured rubber so as to be oriented in the rubber .
請求項１３の発明は、請求項１０から請求項１２までのいずれか１項に記載の駆動装置において、前記圧電材に加える電圧を制御する電圧制御部（１３）を備えることを特徴とする駆動装置である。 The invention of claim 13 is the drive device according to any one of claims 10 to 12 , further comprising a voltage control unit (13) for controlling a voltage applied to the piezoelectric material. Device.
この発明によると、簡単な構造で柔軟であり圧電効果を向上させることができる。 According to this invention, it is flexible with a simple structure, and the piezoelectric effect can be improved.
（第１実施形態）
以下、図面を参照して、この発明の第１実施形態について詳しく説明する。
図１は、この発明の第１実施形態に係る圧電材の模式図である。
図１に示す圧電材１は、媒体３中に複数の圧電粒子２が分散された部材である。圧電材１は、媒体３に加わる電界Ｅの方向と複数の圧電粒子２の分極方向とが同一になるように、この電界Ｅの方向にこれらの圧電粒子２が連続して配向されている。圧電材１は、例えば、図１に示すように、所定の長さ、幅及び厚さに形成された板状の部材であり、シリコーンゴムなどの媒体３内にチタン酸ジルコン酸鉛などの圧電粒子２が厚さ方向に連続して配向された圧電ゴムの一種である。圧電材１は、図１に示すように、圧電粒子２と媒体３などを備えている。
(First embodiment)
Hereinafter, a first embodiment of the present invention will be described in detail with reference to the drawings.
FIG. 1 is a schematic view of a piezoelectric material according to the first embodiment of the present invention.
A piezoelectric material 1 shown in FIG. 1 is a member in which a plurality of piezoelectric particles 2 are dispersed in a medium 3. In the piezoelectric material 1, the piezoelectric particles 2 are continuously oriented in the direction of the electric field E so that the direction of the electric field E applied to the medium 3 is the same as the polarization direction of the plurality of piezoelectric particles 2. The piezoelectric material 1 is, for example, a plate-like member having a predetermined length, width, and thickness as shown in FIG. 1, and a piezoelectric material such as lead zirconate titanate in a medium 3 such as silicone rubber. This is a kind of piezoelectric rubber in which the particles 2 are continuously oriented in the thickness direction. As shown in FIG. 1, the piezoelectric material 1 includes piezoelectric particles 2 and a medium 3.
圧電粒子２は、圧電効果を示す粒子である。圧電粒子２は、機械的応力が加わると応力に応じた電気分極を発生して電界Ｅを発生（正効果）し、電界Ｅを加えて電気分極を発生させると電界Ｅの大きさに応じた歪みを発生（逆効果）する圧電効果を示す。圧電粒子２は、例えば、図１に示す媒体３がゴムであるときには、ゴム中に連続して配向されている。圧電粒子２は、例えば、チタン酸ジルコン酸鉛(商品名PZT)、チタン酸バリウム、ニオブ酸リチウム、チタン酸鉛、メタニオブ酸鉛、ポリフッ化ビニリデン又は水晶などの粒子である。 The piezoelectric particles 2 are particles that exhibit a piezoelectric effect. When a mechanical stress is applied, the piezoelectric particle 2 generates an electric polarization corresponding to the stress to generate an electric field E (positive effect). When the electric field E is applied to generate the electric polarization, the piezoelectric particle 2 corresponds to the magnitude of the electric field E. The piezoelectric effect which produces distortion (inverse effect) is shown. For example, when the medium 3 shown in FIG. 1 is rubber, the piezoelectric particles 2 are continuously oriented in the rubber. The piezoelectric particles 2 are particles such as lead zirconate titanate (trade name PZT), barium titanate, lithium niobate, lead titanate, lead metaniobate, polyvinylidene fluoride, or quartz.
媒体３は、圧電粒子２を保持する母材（マトリックス）である。媒体３は、図１に示すように、この媒体３に加わる電界Ｅの方向に複数の圧電粒子２が連続して配向されるようにこれらの圧電粒子２を保持しており、複数の圧電粒子２が複数列になって並ぶように保持されている。媒体３は、例えば、シリコーンゴム又はウレタンゴムなどの熱硬化型又は二液硬化型のゴム、スチレン系、オレフィン系又は塩化ビニル系の熱可塑性エラストマー、ポリエチレン又はポリプロピレンなどのオレフィン系又は塩化ビニルなどの熱可塑性樹脂、加熱硬化前のエポキシ又はポリエステルなどの熱硬化性樹脂、シリコーンオイル又はエチレングリコール（不凍液）などの液体が好ましい。媒体３としては、柔軟性及びたわみ性に優れたゴムが特に好ましく、ゴムに比べて柔軟性及びたわみ性の利点は失われるが寸法及び成型の自由度があり、圧電セラミックスに比べてもろくなく、高たわみを示す樹脂が好ましい。 The medium 3 is a base material (matrix) that holds the piezoelectric particles 2. As shown in FIG. 1, the medium 3 holds the piezoelectric particles 2 so that the plurality of piezoelectric particles 2 are continuously oriented in the direction of the electric field E applied to the medium 3. 2 are held in a plurality of rows. The medium 3 is, for example, a thermosetting or two-component curing rubber such as silicone rubber or urethane rubber, a styrene, olefin or vinyl chloride thermoplastic elastomer, an olefin such as polyethylene or polypropylene, or vinyl chloride. A thermoplastic resin, a thermosetting resin such as epoxy or polyester before heat curing, a liquid such as silicone oil or ethylene glycol (antifreeze) is preferable. As the medium 3, rubber excellent in flexibility and flexibility is particularly preferable, and the advantages of flexibility and flexibility are lost as compared with rubber, but there are dimensions and freedom of molding, and it is not as fragile as piezoelectric ceramics. Resins that exhibit high deflection are preferred.
次に、この発明の第１実施形態に係る圧電材の作用について説明する。
図２は、この発明の第１実施形態に係る圧電材の作用を示す模式図であり、図２(Ａ)は機械電気変換部としての作用を示し、図２(Ｂ)は電源が交流であるときの電気機械変換部としての作用を示し、図２(Ｃ)は電源が直流であるときの電気機械変換部としての作用を示す。
図２に示す電極４Ａ，４Ｂは、圧電材１に電気的に接続された接点部分である。電極４Ａ，４Ｂは、圧電材１の両面にそれぞれ積層されており、圧電材１の両面全域を被覆するように形成されている。このような電極４Ａ，４Ｂは、例えば、金属、金属酸化物又はカーボンなどの導電性材料を蒸着、シルクスクリーン印刷又はイオンスパッタリングなどの方法によって圧電材１の両面に形成されたり、導電性材料を含有する樹脂又は導電性高分子などの導電性樹脂を圧電材１の両面に多層化され形成されたりする。
Next, the operation of the piezoelectric material according to the first embodiment of the present invention will be described.
2A and 2B are schematic views showing the action of the piezoelectric material according to the first embodiment of the present invention. FIG. 2A shows the action as the electromechanical conversion unit, and FIG. FIG. 2 (C) shows the operation as an electromechanical conversion unit when the power source is a direct current.
Electrodes 4A and 4B shown in FIG. 2 are contact portions that are electrically connected to the piezoelectric material 1. The electrodes 4 </ b> A and 4 </ b> B are laminated on both surfaces of the piezoelectric material 1, and are formed so as to cover the entire area of both surfaces of the piezoelectric material 1. Such electrodes 4A and 4B are formed on both sides of the piezoelectric material 1 by a method such as vapor deposition, silk screen printing, or ion sputtering, or a conductive material such as metal, metal oxide, or carbon. A conductive resin such as a resin or a conductive polymer is formed on both sides of the piezoelectric material 1 so as to be multilayered.
図２（Ａ）に示すように、圧電材１が振動して応力が加わり変形すると、圧電粒子２にせん断力が作用して歪みが発生し、媒体３内の各圧電粒子２が電気分極する。図１及び図２に示すように、媒体３に加わる電界Ｅの方向と複数の圧電粒子２の分極方向とが同一になるように、この電界Ｅの方向にこれらの圧電粒子２が媒体３内に連続して配向されている。その結果、図２（Ａ）に示すように、連続して配向されている複数の圧電粒子２の集合体が一つの圧電体として大きな電界Ｅを発生し、電極４Ａ，４Ｂ間に抵抗Ｒを接続したときには電極４Ａ，４Ｂ間に発生する電力がこの抵抗Ｒによって消費される。このため、振動エネルギーを電気エネルギーに変換する機械電気変換部として圧電材１が機能し、この電気エネルギーを熱エネルギーに抵抗Ｒが変換して、圧電材１の振動が抑えられる。 As shown in FIG. 2 (A), when the piezoelectric material 1 is vibrated and stress is applied and deformed, a shearing force acts on the piezoelectric particles 2 to generate distortion, and each piezoelectric particle 2 in the medium 3 is electrically polarized. . As shown in FIGS. 1 and 2, the piezoelectric particles 2 are placed in the medium 3 in the direction of the electric field E so that the direction of the electric field E applied to the medium 3 is the same as the polarization direction of the plurality of piezoelectric particles 2. Are continuously oriented. As a result, as shown in FIG. 2 (A), an aggregate of a plurality of continuously oriented piezoelectric particles 2 generates a large electric field E as one piezoelectric body, and a resistance R is generated between the electrodes 4A and 4B. When connected, the power generated between the electrodes 4A and 4B is consumed by the resistor R. For this reason, the piezoelectric material 1 functions as a mechanical-electrical conversion unit that converts vibration energy into electric energy, and the resistance R converts the electric energy into heat energy, so that vibration of the piezoelectric material 1 is suppressed.
一方、図２（Ｂ）に示すように、電極４Ａ，４Ｂ間に交流電源Ｖ1によって電圧を加えて圧電材１に電界Ｅを発生させると、媒体３内の各圧電粒子２が電気分極し電界Ｅの大きさに応じた歪みを発生して圧電材１が伸縮して振動する。また、図２（Ｃ）に示すように、電極４Ａ，４Ｂ間に直流電源Ｖ2によって電圧を加えて圧電材１に電界Ｅを発生させると、媒体３内の各圧電粒子２が電気分極し電界Ｅの大きさに応じた歪みを発生して、電極４Ａ，４Ｂ間の電圧が正であるときには圧電材１が伸び、電極４Ａ，４Ｂ間の電圧が負であるときには圧電材１が縮む。図１及び図２に示すように、媒体３に加わる電界Ｅの方向と複数の圧電粒子２の分極方向とが同一になるように、この電界Ｅの方向にこれらの圧電粒子２が媒体３内に連続して配向されている。その結果、図２（Ｂ）（Ｃ）に示すように、連続して配向されている複数の圧電粒子２の集合体が一つの圧電体として大きな電界Ｅを発生し、圧電材１のたわみが大きくなる。このため、図２（Ｂ）に示すように、電気エネルギーを振動エネルギーに変換する電気機械変換部として圧電材１が機能し、圧電材１が所定の振幅で振動する。また、図２（Ｃ）に示すように、電気エネルギーを弾性エネルギーに変換する電気機械変換部として圧電材１が機能し、圧電材１が所定のたわみ量だけ弾性変形する。 On the other hand, as shown in FIG. 2B, when a voltage is applied between the electrodes 4A and 4B by the AC power source V 1 to generate an electric field E in the piezoelectric material 1, each piezoelectric particle 2 in the medium 3 is electrically polarized. A distortion corresponding to the magnitude of the electric field E is generated, and the piezoelectric material 1 expands and contracts and vibrates. Further, as shown in FIG. 2 (C), electrodes 4A, when added to the voltage by the DC power supply V 2 between 4B to generate an electric field E to the piezoelectric material 1, the piezoelectric particles 2 in the medium 3 is electrically polarized A distortion corresponding to the magnitude of the electric field E is generated, and the piezoelectric material 1 expands when the voltage between the electrodes 4A and 4B is positive, and the piezoelectric material 1 contracts when the voltage between the electrodes 4A and 4B is negative. As shown in FIGS. 1 and 2, the piezoelectric particles 2 are placed in the medium 3 in the direction of the electric field E so that the direction of the electric field E applied to the medium 3 is the same as the polarization direction of the plurality of piezoelectric particles 2. Are continuously oriented. As a result, as shown in FIGS. 2B and 2C, an assembly of a plurality of continuously oriented piezoelectric particles 2 generates a large electric field E as one piezoelectric body, and the bending of the piezoelectric material 1 is caused. growing. For this reason, as shown in FIG. 2B, the piezoelectric material 1 functions as an electromechanical converter that converts electrical energy into vibration energy, and the piezoelectric material 1 vibrates with a predetermined amplitude. As shown in FIG. 2C, the piezoelectric material 1 functions as an electromechanical converter that converts electrical energy into elastic energy, and the piezoelectric material 1 is elastically deformed by a predetermined amount of deflection.
次に、この発明の第１実施形態に係る圧電材の製造方法について説明する。
図３は、この発明の第１実施形態に係る圧電材の製造方法の工程図である。図４は、この発明の第１実施形態に係る圧電材の製造工程を模式的に示す概念図である。
図３に示す製造方法＃１００は、図１及び図２に示す媒体３中に複数の圧電粒子２が分散された圧電材１の製造方法である。製造方法＃１００は、図３に示すように、媒体３中に複数の圧電粒子２を分散させる分散工程＃２００と、媒体３に加わる電界Ｅの方向と複数の圧電粒子２の分極方向とが同一になるように、この電界Ｅの方向にこれらの圧電粒子２が連続して配向させる配向工程＃３００とを含む。
Next, a method for manufacturing a piezoelectric material according to the first embodiment of the present invention will be described.
FIG. 3 is a process diagram of the piezoelectric material manufacturing method according to the first embodiment of the present invention. FIG. 4 is a conceptual diagram schematically showing the manufacturing process of the piezoelectric material according to the first embodiment of the present invention.
Manufacturing method # 100 shown in FIG. 3 is a manufacturing method of piezoelectric material 1 in which a plurality of piezoelectric particles 2 are dispersed in medium 3 shown in FIGS. As shown in FIG. 3, the manufacturing method # 100 includes a dispersion step # 200 for dispersing the plurality of piezoelectric particles 2 in the medium 3, the direction of the electric field E applied to the medium 3, and the polarization direction of the plurality of piezoelectric particles 2. An orientation step # 300 in which the piezoelectric particles 2 are continuously oriented in the direction of the electric field E so as to be the same is included.
分散工程＃２００は、図４（Ａ）に示すように、未硬化のシリコーンゴムなどの流動性の媒体３中に、チタン酸ジルコン酸鉛などの圧電粒子２を分散される工程を含む。配向工程＃３００は、図４（Ｂ）に示すように、未硬化の媒体３に直流電源Ｖ2によって電圧を加えながらこの媒体３を加熱してこの媒体３を硬化させる工程であり、図４（Ｂ）（Ｃ）に示すように未硬化のシリコーンゴムなどの媒体３に直流電源Ｖ2によって電圧を加えながらこのシリコーンゴムを加熱して硬化させる工程を含む。配向工程＃３００は、図３に示すように、未硬化の媒体３に電圧を加える電圧印加工程＃３１０と、未硬化の媒体３を加熱して硬化させる加熱硬化工程＃３２０とを含む。 Dispersing step # 200 includes a step of dispersing piezoelectric particles 2 such as lead zirconate titanate in fluid medium 3 such as uncured silicone rubber, as shown in FIG. As shown in FIG. 4B, the orientation step # 300 is a step of curing the medium 3 by heating the medium 3 while applying a voltage to the uncured medium 3 by the DC power source V 2 . (B) As shown in (C), a step of heating and curing the silicone rubber while applying a voltage to the medium 3 such as uncured silicone rubber by the DC power source V 2 is included. As shown in FIG. 3, the orientation process # 300 includes a voltage application process # 310 for applying a voltage to the uncured medium 3 and a heat curing process # 320 for heating and curing the uncured medium 3.
電圧印加工程＃３１０では、図４（Ｂ）に示すように、電極４Ａ，４Ｂ間に電界Ｅを加えると媒体３中に分散している各圧電粒子２が電気分極して、隣接する圧電粒子２の双極子モーメントの方向が同一方向になり、隣接する圧電粒子２が互に引力（クーロン力）を受けて、電界Ｅの方向に連続して配向する。加熱硬化工程＃３２０では、図４（Ｃ）に示すように、電界Ｅの方向に圧電粒子２が連続して配向した状態で媒体３を加熱して硬化させることによって、媒体３中に圧電粒子２が保持される。 In the voltage application step # 310, as shown in FIG. 4B, when an electric field E is applied between the electrodes 4A and 4B, the piezoelectric particles 2 dispersed in the medium 3 are electrically polarized, and adjacent piezoelectric particles The directions of the dipole moments of the two are the same, and adjacent piezoelectric particles 2 receive an attractive force (Coulomb force) with each other, and are continuously oriented in the direction of the electric field E. In the heat curing step # 320, as shown in FIG. 4C, the medium 3 is heated and cured in a state where the piezoelectric particles 2 are continuously oriented in the direction of the electric field E, so that the piezoelectric particles are contained in the medium 3. 2 is held.
この発明の第１実施形態に係る圧電材とその製造方法には、以下に記載するような効果がある。
(1) この第１実施形態では、媒体３に加わる電界Ｅの方向と複数の圧電粒子２の分極方向とが同一になるように、この電界Ｅの方向にこれらの圧電粒子２が連続して配向されている。このため、従来の圧電ゴムに比べて圧電粒子２の配向方向における分極度が高くなり、機械的応力が加わると大きな電界Ｅを発生するとともに電界Ｅを加えると大きな歪みを発生して、大きな圧電効果を得ることができる。また、各圧電粒子２が電気分極すると圧電粒子２間の引力が強くなるため、圧電粒子２の配向方向及びこの配向方向と交差するせん断方向における力学的な抵抗が強くなる。このため、圧電粒子２間の引力に対抗して圧電材１を弾性変形させることによって大きな電力を得ることができる。さらに、圧電材１、電極４Ａ，４Ｂ及び抵抗Ｒによって電気回路を構成し、振動エネルギーを電気エネルギーに圧電材１が変換し、この電気エネルギーを熱エネルギーに抵抗Ｒが変換することによって、圧電材１の振動を抑えることができる。
The piezoelectric material and the manufacturing method thereof according to the first embodiment of the present invention have the effects described below.
(1) In the first embodiment, the piezoelectric particles 2 are continuously arranged in the direction of the electric field E so that the direction of the electric field E applied to the medium 3 and the polarization direction of the plurality of piezoelectric particles 2 are the same. Oriented. For this reason, the degree of polarization in the orientation direction of the piezoelectric particles 2 is higher than that of the conventional piezoelectric rubber, and when a mechanical stress is applied, a large electric field E is generated. An effect can be obtained. Further, when each piezoelectric particle 2 is electrically polarized, the attractive force between the piezoelectric particles 2 becomes strong, so that the mechanical resistance in the orientation direction of the piezoelectric particles 2 and the shear direction intersecting with the orientation direction becomes strong. For this reason, large electric power can be obtained by elastically deforming the piezoelectric material 1 against the attractive force between the piezoelectric particles 2. Further, the piezoelectric material 1, the electrodes 4A and 4B, and the resistor R constitute an electric circuit, and the piezoelectric material 1 converts vibration energy into electric energy, and the resistor R converts this electric energy into heat energy. 1 vibration can be suppressed.
(2) この第１実施形態では、複数の圧電粒子２がゴム中に連続して配向されている。このため、ゴムに対する圧電粒子２の配合を調整することによって、寸法の自由度を向上させることができ、従来の圧電材に比べて大きな圧電材１を製造することができる。また、従来の脆弱な圧電セラミックスに比べて柔軟性に優れたゴムを媒体３に選択することによって、圧電材１が割れ難くなって大きな変形に耐えることができるとともに、圧電材１を対象物に貼り付けるときに、この対象物の曲面や凹凸面（不陸）に圧電材１を密着させることができる。さらに、従来の圧電セラミックスに比べて弾性率が格段に小さくなるため、振幅やたわみを大きくすることができるとともに、従来の圧電ゴムに比べて圧電粒子２が配向されているため少量の圧電粒子２によって圧電効果を効率的に発揮させることができる。 (2) In the first embodiment, the plurality of piezoelectric particles 2 are continuously oriented in the rubber. For this reason, by adjusting the blending of the piezoelectric particles 2 with respect to rubber, the degree of dimensional freedom can be improved, and the piezoelectric material 1 larger than the conventional piezoelectric material can be manufactured. Further, by selecting rubber having excellent flexibility as compared with the conventional fragile piezoelectric ceramics as the medium 3, the piezoelectric material 1 is difficult to break and can withstand large deformation, and the piezoelectric material 1 is used as an object. When pasting, the piezoelectric material 1 can be brought into close contact with the curved surface or uneven surface (non-land) of the object. Further, since the elastic modulus is remarkably smaller than that of the conventional piezoelectric ceramic, the amplitude and the deflection can be increased, and since the piezoelectric particles 2 are oriented as compared with the conventional piezoelectric rubber, a small amount of the piezoelectric particles 2 is obtained. Thus, the piezoelectric effect can be efficiently exhibited.
（第２実施形態）
図５は、この発明の第２実施形態に係る制振装置を概略的に示す模式図である。以下では、図１〜図４に示す部分と同一の部分については、同一の番号を付して詳細な説明を省略する。
図５に示す可動部材５は、制振装置６によって振動を抑制される制振対象物であり、例えば両端が単純支持された梁状部材又は板状部材である。制振装置６は、可動部材５の振動を圧電材１によって抑える装置であり、図５に示すように圧電材１と、電極４Ａ，４Ｂと、導電部７Ａ，７Ｂと、電力消費部８などを備えている。制振装置６は、可動部材５の振動に応じて振動する電極４Ａと電極４Ｂとの間に圧電材１を配置しており、電極４Ａ，４Ｂの振動に応じて圧電材１が弾性変形すると圧電粒子２が電気分極し、電極４Ａと電極４Ｂとの間に電界Ｅを発生する。制振装置６は、例えば、可動部材５の中央部にこの可動部材５を挟み込むようにそれぞれ１つずつ取り付けられており、可動部材５の表面に電極４Ａを取り付けて、この電極４Ａとの間で圧電材１を挟み込むように圧電材１の表面に電極４Ｂを取り付けている。
(Second Embodiment)
FIG. 5 is a schematic view schematically showing a vibration damping device according to the second embodiment of the present invention. In the following, the same parts as those shown in FIGS. 1 to 4 are denoted by the same reference numerals and detailed description thereof is omitted.
The movable member 5 shown in FIG. 5 is a vibration suppression object whose vibration is suppressed by the vibration suppression device 6, and is, for example, a beam-shaped member or a plate-shaped member that is simply supported at both ends. The vibration damping device 6 is a device that suppresses the vibration of the movable member 5 with the piezoelectric material 1, and as shown in FIG. 5, the piezoelectric material 1, the electrodes 4A and 4B, the conductive portions 7A and 7B, the power consuming portion 8, and the like. It has. In the vibration damping device 6, the piezoelectric material 1 is disposed between the electrode 4 </ b> A and the electrode 4 </ b> B that vibrate according to the vibration of the movable member 5, and when the piezoelectric material 1 is elastically deformed according to the vibration of the electrodes 4 </ b> A and 4 </ b> B. The piezoelectric particles 2 are electrically polarized, and an electric field E is generated between the electrodes 4A and 4B. The damping device 6 is attached, for example, one by one so as to sandwich the movable member 5 in the central portion of the movable member 5, and an electrode 4A is attached to the surface of the movable member 5, and between the electrode 4A The electrode 4B is attached to the surface of the piezoelectric material 1 so as to sandwich the piezoelectric material 1.
導電部７Ａ，７Ｂは、圧電材１が発生する電流が流れる部分であり、導電部７Ａ，７Ｂは、一方の端部が電極４Ａ，４Ｂにそれぞれ接続されており、他方の端部が電力消費部８に接続されている。電力消費部８は、圧電材１が発生する電力を消費する部分であり、電気信号を熱に変換する抵抗素子などの電気熱変換部である。電力消費部８は、電極４Ａ，４Ｂからの電気エネルギーを熱エネルギーに変換するために、抵抗値を調整可能な電気回路などを備えており、電極４Ａ，４Ｂが出力する電流（電気信号）が流れる。 The conductive portions 7A and 7B are portions through which the current generated by the piezoelectric material 1 flows. The conductive portions 7A and 7B are connected at one end to the electrodes 4A and 4B, respectively, and the other end is a power consumption. Connected to the unit 8. The power consuming unit 8 is a part that consumes the electric power generated by the piezoelectric material 1, and is an electrothermal converting unit such as a resistance element that converts an electric signal into heat. The power consuming unit 8 includes an electric circuit capable of adjusting a resistance value in order to convert electric energy from the electrodes 4A and 4B into heat energy, and a current (electric signal) output from the electrodes 4A and 4B is generated. Flowing.
次に、この発明の第２実施形態に係る制振装置の動作を説明する。
例えば、図５に示すように、両端が単純支持された可動部材５が中央部を腹として振動すると、この可動部材５と一体となって制振装置６も振動し、図中二点鎖線で示すように可動部材５がたわむと、圧電材１及び電極４Ａ，４Ｂに曲げ応力が作用する。このため、圧電材１の圧電粒子２が電気分極して電極４Ａと電極４Ｂとの間に電界Ｅが発生し、電力消費部８に電流が流れて圧電材１が発生する電力を電力消費部８が消費する。その結果、制振装置６によって振動エネルギーが熱エネルギーに変換されて、可動部材５の振動が抑えられる。
Next, the operation of the vibration damping device according to the second embodiment of the present invention will be described.
For example, as shown in FIG. 5, when the movable member 5 that is simply supported at both ends vibrates with the central portion as an antinode, the vibration damping device 6 vibrates integrally with the movable member 5, and is indicated by a two-dot chain line in the figure. As shown, when the movable member 5 bends, bending stress acts on the piezoelectric material 1 and the electrodes 4A and 4B. For this reason, the piezoelectric particles 2 of the piezoelectric material 1 are electrically polarized to generate an electric field E between the electrodes 4A and 4B, and a current flows through the power consuming unit 8 to generate electric power generated by the piezoelectric material 1 as a power consuming unit. 8 is consumed. As a result, vibration energy is converted into thermal energy by the vibration damping device 6, and vibration of the movable member 5 is suppressed.
この発明の第２実施形態に係る制振装置には、第１実施形態の効果に加えて、以下に記載するような効果がある。
(1) この第２実施形態では、可動部材５の振動に応じて振動する電極４Ａと電極４Ｂとの間に圧電材１が配置されており、これらの電極４Ａ，４Ｂの振動に応じて圧電材１が弾性変形する。このため、電界Ｅの方向に圧電粒子２が予め連続して配向されているため、従来の制振装置のようなER粒子やMR粒子を配向させるための電気回路などが不要になって、制振装置を簡単に構成することができる。また、圧電効果に優れた圧電材１に曲げ応力が作用したときにこの圧電材１が電気分極し、可動部材５の振動エネルギーを電気エネルギーに効率的に変換することができる。
The vibration damping device according to the second embodiment of the present invention has the following effects in addition to the effects of the first embodiment.
(1) In the second embodiment, the piezoelectric material 1 is disposed between the electrode 4A and the electrode 4B that vibrate according to the vibration of the movable member 5, and the piezoelectric material 1 according to the vibration of the electrodes 4A and 4B. The material 1 is elastically deformed. For this reason, since the piezoelectric particles 2 are continuously oriented in the direction of the electric field E, an electric circuit for orienting ER particles and MR particles as in the conventional vibration damping device becomes unnecessary, and the The vibration device can be configured easily. Further, when a bending stress acts on the piezoelectric material 1 having an excellent piezoelectric effect, the piezoelectric material 1 is electrically polarized, and the vibration energy of the movable member 5 can be efficiently converted into electrical energy.
(2) この第２実施形態では、圧電材１が発生する電力を電力消費部８が消費する。このため、圧電材１によって可動部材５の振動エネルギーを電気エネルギーに変換し、電力消費部８によってこの電気エネルギーを熱エネルギーに変換して、可動部材５の振動を抑えることができる。 (2) In the second embodiment, the power consuming unit 8 consumes the power generated by the piezoelectric material 1. For this reason, the vibration energy of the movable member 5 can be suppressed by converting the vibration energy of the movable member 5 into electric energy by the piezoelectric material 1 and converting the electric energy into heat energy by the power consuming unit 8.
（第３実施形態）
図６は、この発明の第３実施形態に係る制振装置を概略的に示す模式図である。
図６に示す可動部材５は、例えば、内燃機関のシリンダヘッド、車両の座席又は構造物のような振動体を弾性支持する油圧シリンダ又は空気圧シリンダのピストンロッドなどの往復移動する軸状部材である。制振装置６は、可動部材５の振動に応じて振動する電極４Ａと固定部材９に固定される電極４Ｂとの間に圧電材１を配置しており、電極４Ａの振動に応じて圧電材１が弾性変形すると圧電粒子２が電気分極し、電極４Ａと電極４Ｂとの間に電界Ｅを発生する。制振装置６は、例えば、可動部材５の外周部の周方向に所定の間隔をあけて配置されており、可動部材５の外周面に電極４Ａを取り付けて、この電極４Ａとの間で圧電材１を挟み込むように圧電材１の表面に電極４Ｂを取り付けている。固定部材９は、電極４Ｂを固定する部材であり、可動部材５の外周部との間に所定の間隔をあけてこの可動部材５の外側に配置されている。固定部材９は、例えば、鋼材などによって構成された外壁であり、固定部材９の表面には可動部材５の外周面と対向するように電極４Ｂが取り付けられている。
(Third embodiment)
FIG. 6 is a schematic view schematically showing a vibration damping device according to the third embodiment of the present invention.
The movable member 5 shown in FIG. 6 is a shaft member that reciprocates such as a cylinder head of an internal combustion engine, a hydraulic cylinder that elastically supports a vibrating body such as a vehicle seat or a structure, or a piston rod of a pneumatic cylinder. . The vibration damping device 6 has the piezoelectric material 1 disposed between the electrode 4A that vibrates according to the vibration of the movable member 5 and the electrode 4B that is fixed to the fixed member 9, and the piezoelectric material according to the vibration of the electrode 4A. When 1 is elastically deformed, the piezoelectric particles 2 are electrically polarized, and an electric field E is generated between the electrodes 4A and 4B. The vibration damping device 6 is disposed, for example, at a predetermined interval in the circumferential direction of the outer peripheral portion of the movable member 5, and an electrode 4 </ b> A is attached to the outer peripheral surface of the movable member 5, and a piezoelectric element is connected to the electrode 4 </ b> A. An electrode 4B is attached to the surface of the piezoelectric material 1 so as to sandwich the material 1 therebetween. The fixed member 9 is a member that fixes the electrode 4 </ b> B, and is disposed outside the movable member 5 with a predetermined interval from the outer peripheral portion of the movable member 5. The fixed member 9 is an outer wall made of, for example, a steel material, and an electrode 4B is attached to the surface of the fixed member 9 so as to face the outer peripheral surface of the movable member 5.
次に、この発明の第３実施形態に係る制振装置の動作を説明する。
図６に示すように、可動部材５が上下方向に振動するとこの可動部材５と一体となって制振装置６の電極４Ａも振動し、図中二点鎖線で示すように制振装置６の圧電材１がたわむと、圧電材１にせん断応力が作用する。このため、圧電材１の圧電粒子２が電気分極して電極４Ａと電極４Ｂとの間に電界Ｅが発生し、電力消費部８に電流が流れて圧電材１が発生する電力を電力消費部８が消費する。その結果、制振装置６によって振動エネルギーが熱エネルギーに変換されて、可動部材５の振動が抑えられる。
Next, the operation of the vibration damping device according to the third embodiment of the present invention will be described.
As shown in FIG. 6, when the movable member 5 vibrates in the vertical direction, the electrode 4 </ b> A of the vibration damping device 6 vibrates integrally with the movable member 5, and the vibration damping device 6 of the vibration damping device 6 is vibrated as indicated by a two-dot chain line in the drawing. When the piezoelectric material 1 bends, shear stress acts on the piezoelectric material 1. For this reason, the piezoelectric particles 2 of the piezoelectric material 1 are electrically polarized to generate an electric field E between the electrodes 4A and 4B, and a current flows through the power consuming unit 8 to generate electric power generated by the piezoelectric material 1. 8 is consumed. As a result, vibration energy is converted into thermal energy by the vibration damping device 6, and vibration of the movable member 5 is suppressed.
この発明の第３実施形態に係る制振装置には、第１実施形態の効果に加えて、以下に記載するような効果がある。
この第３実施形態では、可動部材５の振動に応じて振動する電極４Ａと固定部材９に固定される電極４Ｂとの間に圧電材１が配置されており、この電極４Ａの振動に応じて圧電材１が弾性変形する。このため、圧電効果に優れた圧電材１にせん断応力が作用したときにこの圧電材１を電気分極させて、可動部材５の振動エネルギーを電気エネルギーに変換することができる。
The vibration damping device according to the third embodiment of the present invention has the following effects in addition to the effects of the first embodiment.
In the third embodiment, the piezoelectric material 1 is disposed between the electrode 4A that vibrates in accordance with the vibration of the movable member 5 and the electrode 4B that is fixed to the fixed member 9, and according to the vibration of the electrode 4A. The piezoelectric material 1 is elastically deformed. Therefore, when shear stress acts on the piezoelectric material 1 having an excellent piezoelectric effect, the piezoelectric material 1 can be electrically polarized, and the vibration energy of the movable member 5 can be converted into electrical energy.
（第４実施形態）
図７は、この発明の第４実施形態に係る駆動装置を概略的に示す模式図である。
図７に示す駆動装置１０は、可動部材５を圧電材１によって駆動する装置であり、圧電材１と、電極４Ａ，４Ｂと、導電部７Ａ，７Ｂと、電圧発生部１１と、動作設定部１２と、電圧制御部１３などを備えている。駆動装置１０は、電極４Ａと電極４Ｂとの間に配置され、これらの電極４Ａ，４Ｂ間に加わる電圧に応じて弾性変形して可動部材５を駆動する。駆動装置１０は、図７に示すように、可動部材５に電極４Ａが固定されており、固定部材９に電極４Ｂが固定されている。駆動装置１０は、電極４Ａ，４Ｂ間に正の電圧を加えるとこれらの間に電界Ｅが発生し、圧電粒子２が電気分極して圧電材１が伸びて可動部材５を前進させる。一方、駆動装置１０は、電極４Ａ，４Ｂ間に負の電圧を加えるとこれらの間に電界−Ｅが発生し、圧電粒子２が電気分極して圧電材１が縮み可動部材５を後退させる。駆動装置１０は、電圧発生部１１が発生する電気エネルギーを運動エネルギーに変換して可動部材５を駆動するアクチュエータとして機能する。
(Fourth embodiment)
FIG. 7 is a schematic diagram schematically showing a drive apparatus according to the fourth embodiment of the present invention.
A driving device 10 shown in FIG. 7 is a device that drives the movable member 5 with the piezoelectric material 1, and includes the piezoelectric material 1, the electrodes 4 </ b> A and 4 </ b> B, the conductive portions 7 </ b> A and 7 </ b> B, the voltage generator 11, and the operation setting unit. 12, a voltage control unit 13, and the like. The driving device 10 is disposed between the electrodes 4A and 4B, and elastically deforms according to the voltage applied between the electrodes 4A and 4B to drive the movable member 5. As shown in FIG. 7, in the driving device 10, the electrode 4 </ b> A is fixed to the movable member 5, and the electrode 4 </ b> B is fixed to the fixed member 9. When a positive voltage is applied between the electrodes 4A and 4B, the driving device 10 generates an electric field E between them, the piezoelectric particles 2 are electrically polarized, and the piezoelectric material 1 extends to advance the movable member 5. On the other hand, when a negative voltage is applied between the electrodes 4 </ b> A and 4 </ b> B, the driving device 10 generates an electric field −E between the electrodes 4 </ b> A and 4 </ b> B, the piezoelectric particles 2 are electrically polarized, and the piezoelectric material 1 is contracted to retract the movable member 5. The driving device 10 functions as an actuator that drives the movable member 5 by converting electric energy generated by the voltage generator 11 into kinetic energy.
電圧発生部１１は、交流電圧及び／又は直流電圧を発生する部分であり、交流電源Ｖ1として機能するときには任意の電圧値及び周波数の交流電圧を発生し、直流電源Ｖ2として機能するときには任意の電圧値の直流電圧を発生する。動作設定部１２は、可動部材５の動作を設定する部分である。動作設定部１２は、例えば、可動部材５を振動させる振動モードと、可動部材５を第１の方向（上方）に駆動する前進モードと、可動部材５を第１の方向とは逆方向の第２の方向（下方）に駆動する後退モードなどから任意の動作モードを選択し動作条件として設定する。動作設定部１２は、例えば、振動モード時の振幅及び周波数、前進モード時又は後退モード時の駆動量（移動量）などを動作条件として設定する。電圧制御部１３は、圧電材１に加える電圧を制御する部分であり、動作設定部１２が設定する動作条件に基づいて電圧発生部１１が発生する電圧を制御する。電圧制御部１３は、例えば、動作設定部１２が設定する動作条件に応じて、電圧発生部１１が交流電圧を発生するときには電圧値及び周波数を可変制御し、電圧発生部１１が直流電圧を発生するときには電圧値を可変制御する。 The voltage generator 11 is a part that generates an AC voltage and / or a DC voltage, generates an AC voltage having an arbitrary voltage value and frequency when functioning as the AC power source V 1 , and is optional when functioning as the DC power source V 2. A DC voltage with a voltage value of The operation setting unit 12 is a part for setting the operation of the movable member 5. The operation setting unit 12 includes, for example, a vibration mode in which the movable member 5 is vibrated, a forward mode in which the movable member 5 is driven in the first direction (upward), and the movable member 5 in the first direction opposite to the first direction. An arbitrary operation mode is selected from the reverse mode for driving in the direction 2 (downward) and set as an operation condition. The operation setting unit 12 sets, for example, the amplitude and frequency in the vibration mode, the drive amount (movement amount) in the forward mode or the reverse mode, and the like as the operation conditions. The voltage control unit 13 is a part that controls the voltage applied to the piezoelectric material 1, and controls the voltage generated by the voltage generation unit 11 based on the operating conditions set by the operation setting unit 12. The voltage control unit 13 variably controls the voltage value and frequency when the voltage generation unit 11 generates an AC voltage, for example, according to the operating conditions set by the operation setting unit 12, and the voltage generation unit 11 generates a DC voltage. When doing so, the voltage value is variably controlled.
次に、この発明の第４実施形態に係る駆動装置の動作を説明する。
例えば、図７に示すように、動作設定部１２が設定する動作条件が振動モードであるときには、電圧発生部１１が交流電圧を発生し、図中二点鎖線で示すように圧電材１が上下方向に振動して可動部材５も上下方向に振動する。また、動作設定部１２が設定する動作条件が前進モードであるときには、電極４Ａ，４Ｂ間の電圧が正になるように電圧発生部１１が直流電圧を発生し、図中二点鎖線で示すように圧電材１が上方向に伸びて可動部材５が上方向に前進する。さらに、動作設定部１２が設定する動作条件が後退モードであるときには、前進モード時とは異なり電極４Ａ，４Ｂ間の電圧が負になるように電圧発生部１１が直流電圧を発生し、図中二点鎖線で示すように圧電材１が下方向に縮み可動部材５が下方向に後退する。
Next, the operation of the driving apparatus according to the fourth embodiment of the present invention will be described.
For example, as shown in FIG. 7, when the operation condition set by the operation setting unit 12 is the vibration mode, the voltage generating unit 11 generates an AC voltage, and the piezoelectric material 1 moves up and down as indicated by a two-dot chain line in the figure. The movable member 5 also vibrates in the vertical direction by vibrating in the direction. When the operation condition set by the operation setting unit 12 is the forward mode, the voltage generation unit 11 generates a DC voltage so that the voltage between the electrodes 4A and 4B becomes positive, as indicated by a two-dot chain line in the figure. Then, the piezoelectric material 1 extends upward and the movable member 5 advances upward. Further, when the operation condition set by the operation setting unit 12 is the reverse mode, the voltage generation unit 11 generates a DC voltage so that the voltage between the electrodes 4A and 4B becomes negative, unlike the forward mode. As indicated by a two-dot chain line, the piezoelectric material 1 is contracted downward, and the movable member 5 is retracted downward.
この発明の第４実施形態に係る駆動装置には、第１実施形態の効果に加えて、以下に記載するような効果がある。
(1) この第４実施形態では、電極４Ａと電極４Ｂとの間に圧電材１が配置されており、これらの電極４Ａ，４Ｂ間に加わる電圧に応じて圧電材１が弾性変形して可動部材５を駆動する。このため、圧電効果に優れた圧電材１を伸縮させて可動部材５を振動させたり、可動部材５を前進又は後退させたりすることができる。
The drive device according to the fourth embodiment of the present invention has the following effects in addition to the effects of the first embodiment.
(1) In the fourth embodiment, the piezoelectric material 1 is disposed between the electrode 4A and the electrode 4B, and the piezoelectric material 1 is elastically deformed and movable according to the voltage applied between the electrodes 4A and 4B. The member 5 is driven. For this reason, the movable member 5 can be vibrated by expanding and contracting the piezoelectric material 1 having an excellent piezoelectric effect, or the movable member 5 can be moved forward or backward.
(2) この第４実施形態では、圧電材１に加わる電圧を電圧制御部１３が制御する。このため、電極４Ａ，４Ｂ間の電界を制御することによって圧電材１の歪みを制御してアクチュエータとして機能させることができる。また、圧電材１が所定の歪みを発生するように電極４Ａ，４Ｂ間の電界Ｅを制御することによって、圧電材１の剛性を可変制御する剛性制御装置として機能させることもできる。 (2) In the fourth embodiment, the voltage controller 13 controls the voltage applied to the piezoelectric material 1. For this reason, by controlling the electric field between the electrodes 4A and 4B, the distortion of the piezoelectric material 1 can be controlled to function as an actuator. Further, by controlling the electric field E between the electrodes 4A and 4B so that the piezoelectric material 1 generates a predetermined strain, the piezoelectric material 1 can function as a stiffness control device that variably controls the stiffness of the piezoelectric material 1.
次に、この発明の実施例について説明する。
図８は、この発明の実施例に係る圧電材のマイクロスコープによる拡大写真である。
硬化前のシリコーンゴム中にチタン酸ジルコン酸鉛の圧電粒子をシリコーンゴム３に対してチタン酸ジルコン酸鉛２の重量比で混合し分散させ、5kV/mmの電界を加えながらチタン酸ジルコン酸鉛を電気分極させて電界の方向に配向させた。次に、シリコーンゴム中にチタン酸ジルコン酸鉛を電界の方向に配向させた状態で、100℃で加熱してシリコーンゴムを加硫し硬化させて圧電材を製作した。その結果、図８に示すように、硬化後のシリコーンゴム中にチタン酸ジルコン酸鉛が電界Ｅの方向に連続して配向していることが確認された。
Next, examples of the present invention will be described.
FIG. 8 is an enlarged photograph of a piezoelectric material according to an embodiment of the present invention using a microscope.
Piezoelectric particles of lead zirconate titanate in silicone rubber before curing are mixed and dispersed in a weight ratio of lead zirconate titanate 2 to silicone rubber 3 and lead zirconate titanate while applying an electric field of 5 kV / mm. Were electrically polarized and oriented in the direction of the electric field. Next, in a state where lead zirconate titanate is oriented in the direction of the electric field in the silicone rubber, the silicone rubber is vulcanized and cured by heating at 100 ° C. to produce a piezoelectric material. As a result, as shown in FIG. 8, it was confirmed that lead zirconate titanate was continuously oriented in the direction of electric field E in the cured silicone rubber.
この発明は、以上説明した実施形態に限定するものではなく、以下に記載するように種々の変形又は変更が可能であり、これらもこの発明の範囲内である。
(1) この実施形態では、圧電粒子２が連続して配向する場合を例に挙げて説明したが、圧電粒子２の全てが連続して配向している場合に限らず、圧電粒子２の一部が分離してほぼ連続して配向している場合についてもこの発明を適用することができる。また、この実施形態では、硬化前の媒体３が流体又は粘性体などの液体である場合を例に挙げて説明したが、媒体３が流体及び粘性体の混合物である場合についてもこの発明を適用することができる。
The present invention is not limited to the embodiment described above, and various modifications or changes can be made as described below, and these are also within the scope of the present invention.
(1) In this embodiment, the case where the piezoelectric particles 2 are continuously oriented has been described as an example. However, the embodiment is not limited to the case where all of the piezoelectric particles 2 are continuously oriented. The present invention can also be applied to the case where the parts are separated and oriented substantially continuously. In this embodiment, the case where the medium 3 before curing is a fluid such as a fluid or a viscous material has been described as an example. However, the present invention is also applied to a case where the medium 3 is a mixture of a fluid and a viscous material. can do.
(2) この第２及び第３実施形態では、圧電材１を利用して振動を抑える場合を例に挙げて説明したが、圧電材１によって騒音を受けて振動を電気エネルギーに変換し、この電気エネルギーを抵抗素子によって熱エネルギーに変換して騒音を低減することもできる。また、この第１及び第２実施形態では、電力消費部８が抵抗素子を備える場合を例に挙げて説明したが、抵抗値、静電容量又はインダクタンスの少なくとも一つを調整可能な電気回路を備えるように電力消費部８を構成することもできる。 (2) In the second and third embodiments, the case where the piezoelectric material 1 is used to suppress vibration has been described as an example. However, the piezoelectric material 1 receives noise and converts the vibration into electric energy. Noise can also be reduced by converting electrical energy into thermal energy by a resistance element. In the first and second embodiments, the case where the power consuming unit 8 includes a resistance element has been described as an example. However, an electric circuit capable of adjusting at least one of resistance value, capacitance, or inductance is used. The power consumption part 8 can also be comprised so that it may be provided.
(3) この第２実施形態では、可動部材５の中央部に２つの制振装置６を配置した場合を例に挙げて説明したが、可動部材５の中央部に１つの制振装置６を配置することもできる。また、この第３実施形態では、可動部材５の外周部の周方向に間隔あけて制振装置６を配置する場合を例に挙げて説明したが、可動部材５の外周部の周方向に連続してこの可動部材５の外周部を囲むように制振装置６を配置することもできる。さらに、この第４実施形態では、電極４Ａを可動部材５に固定し電極４Ｂを固定部材９に固定して電極４Ａ，４Ｂ間に圧電材１を配置する駆動装置１０を例に挙げて説明したが、このような駆動装置１０に限定するものではない。例えば、図５及び図６に示す制振装置６の電力消費部８を図７に示す電圧発生部１１に置き換えてこの電圧発生部１１が発生する電圧を制御してアクチュエータ又は剛性制御装置として構成することもできる。 (3) In the second embodiment, the case where two vibration damping devices 6 are arranged in the central portion of the movable member 5 has been described as an example, but one vibration damping device 6 is disposed in the central portion of the movable member 5. It can also be arranged. Moreover, in this 3rd Embodiment, although the case where the damping device 6 was arrange | positioned at intervals in the circumferential direction of the outer peripheral part of the movable member 5 was mentioned as an example, it demonstrated to the circumferential direction of the outer peripheral part of the movable member 5 as an example. And the damping device 6 can also be arrange | positioned so that the outer peripheral part of this movable member 5 may be enclosed. Furthermore, in the fourth embodiment, the driving device 10 in which the electrode 4A is fixed to the movable member 5 and the electrode 4B is fixed to the fixed member 9 and the piezoelectric material 1 is disposed between the electrodes 4A and 4B has been described as an example. However, the present invention is not limited to such a driving device 10. For example, the power consuming unit 8 of the vibration damping device 6 shown in FIGS. 5 and 6 is replaced with the voltage generating unit 11 shown in FIG. 7, and the voltage generated by the voltage generating unit 11 is controlled to constitute an actuator or a rigidity control device. You can also
１ 圧電材
２ 圧電粒子
３ 媒体
４Ａ，４Ｂ 電極
５ 可動部材
６ 制振装置
７Ａ，７Ｂ 導電部
８ 電力消費部
９ 固定部材
１０ 駆動装置
１１ 電圧発生部
１２ 動作設定部
１３ 電圧制御部
Ｅ 電界
Ｖ1 交流電源
Ｖ2 直流電源
Ｒ 抵抗
First piezoelectric member 2 piezoelectric particles 3 medium 4A, 4B electrode 5 movable member 6 damping device 7A, 7B conductive portion 8 power unit 9 fixed member 10 driver 11 voltage generator 12 operation setting unit 13 voltage control unit E field V 1 AC power supply V 2 DC power supply R Resistance
Claims (13)
前記媒体に加わる電界の方向と前記複数の圧電粒子の分極方向とが同一になるように、この電界の方向にこれらの圧電粒子が配向されており、
前記複数の圧電粒子が複数列に並んだ状態で前記媒体中に配向するように、未硬化の前記媒体に電圧を加えながらこの媒体を硬化させることによって、これらの圧電粒子がこの媒体に保持されていること、
を特徴とする圧電材。 A piezoelectric material in which a plurality of piezoelectric particles are dispersed in a medium,
These piezoelectric particles are oriented in the direction of the electric field so that the direction of the electric field applied to the medium is the same as the polarization direction of the plurality of piezoelectric particles,
The piezoelectric particles are held on the medium by curing the medium while applying a voltage to the uncured medium so that the plurality of piezoelectric particles are aligned in the medium in a plurality of rows. That
A piezoelectric material characterized by
前記複数の圧電粒子は、ゴム中に配向されており、
前記複数の圧電粒子が複数列に並んだ状態で前記ゴム中に配向するように、未硬化の前記ゴムに電圧を加えながらこのゴムを硬化させることによって、これらの圧電粒子がこのゴムに保持されていること、
を特徴とする圧電材。 The piezoelectric material according to claim 1,
Said plurality of piezoelectric particles is oriented in the rubber,
By curing the rubber while applying a voltage to the uncured rubber so that the plurality of piezoelectric particles are aligned in a plurality of rows in a row, the piezoelectric particles are held by the rubber. That
A piezoelectric material characterized by
前記媒体中に前記複数の圧電粒子を分散させる分散工程と、
前記媒体に加わる電界の方向と前記複数の圧電粒子の分極方向とが同一になるように、この電界の方向にこれらの圧電粒子を配向させる配向工程とを含み、
前記配向工程は、前記複数の圧電粒子が複数列に並んだ状態で前記媒体中に配向するように、未硬化の前記媒体に電圧を加えながらこの媒体を硬化させる工程を含むこと、
を特徴とする圧電材の製造方法。 A method of manufacturing a piezoelectric material in which a plurality of piezoelectric particles are dispersed in a medium,
A dispersion step of dispersing the plurality of piezoelectric particles in the medium;
An orientation step of orienting the piezoelectric particles in the direction of the electric field such that the direction of the electric field applied to the medium is the same as the polarization direction of the plurality of piezoelectric particles,
The orientation step includes a step of curing the medium while applying a voltage to the uncured medium so that the plurality of piezoelectric particles are oriented in the medium in a state where the plurality of piezoelectric particles are arranged in a plurality of rows.
A method of manufacturing a piezoelectric material characterized by the above.
前記分散工程は、未硬化のゴム中に前記圧電粒子を分散させる工程を含み、
前記配向工程は、前記未硬化のゴムに電圧を加えながらこの未硬化のゴムを加熱して硬化させる工程を含むこと、
を特徴とする圧電材の製造方法。 In the manufacturing method of the piezoelectric material according to claim 3,
The dispersing step includes a step of dispersing the piezoelectric particles in uncured rubber,
The alignment step includes a step of heating and curing the uncured rubber while applying a voltage to the uncured rubber;
A method of manufacturing a piezoelectric material characterized by the above.
前記圧電材は、媒体中に複数の圧電粒子が分散されており、この媒体に加わる電界の方向とこれらの圧電粒子の分極方向とが同一になるように、この電界の方向にこれらの圧電粒子が配向されており、
前記複数の圧電粒子が複数列に並んだ状態で前記媒体中に配向するように、未硬化の前記媒体に電圧を加えながらこの媒体を硬化させることによって、これらの圧電粒子がこの媒体に保持されていること、
を特徴とする制振装置。 A vibration damping device that suppresses vibration of the movable member with a piezoelectric material,
In the piezoelectric material, a plurality of piezoelectric particles are dispersed in a medium, and the direction of the electric field applied to the medium and the direction of polarization of the piezoelectric particles are the same so that the piezoelectric particles Are oriented,
The piezoelectric particles are held on the medium by curing the medium while applying a voltage to the uncured medium so that the plurality of piezoelectric particles are aligned in the medium in a plurality of rows. That
Damping device characterized by
前記圧電材は、前記可動部材の振動に応じて振動する第１の電極と第２の電極との間に配置され、これらの電極の振動に応じて弾性変形すること、
を特徴とする制振装置。 The vibration damping device according to claim 5,
The piezoelectric material is disposed between a first electrode and a second electrode that vibrate according to the vibration of the movable member, and elastically deforms according to the vibration of these electrodes;
Damping device characterized by
前記圧電材は、前記可動部材の振動に応じて振動する第１の電極と固定部材に固定される第２の電極との間に配置され、この第１の電極の振動に応じて弾性変形すること、
を特徴とする制振装置。 The vibration damping device according to claim 6,
The piezoelectric material is disposed between a first electrode that vibrates according to the vibration of the movable member and a second electrode that is fixed to the fixed member, and is elastically deformed according to the vibration of the first electrode. thing,
Damping device characterized by
前記圧電材は、ゴム中に前記複数の圧電粒子が配向されており、
前記複数の圧電粒子が複数列に並んだ状態で前記ゴム中に配向するように、未硬化の前記ゴムに電圧を加えながらこのゴムを硬化させることによって、これらの圧電粒子がこのゴムに保持されていること、
を特徴とする制振装置。 In the vibration damping device according to any one of claims 5 to 7,
The piezoelectric material is oriented the plurality of piezoelectric particles in the rubber,
By curing the rubber while applying a voltage to the uncured rubber so that the plurality of piezoelectric particles are aligned in a plurality of rows in a row, the piezoelectric particles are held by the rubber. That
Damping device characterized by
前記圧電材が発生する電力を消費する電力消費部を備えること、
を特徴とする制振装置。 In the vibration damping device according to any one of claims 5 to 8,
Comprising a power consuming unit that consumes the power generated by the piezoelectric material;
Damping device characterized by
前記圧電材は、媒体中に複数の圧電粒子が分散されており、この媒体に加わる電界の方向とこれらの圧電粒子の分極方向とが同一になるように、この電界の方向にこれらの圧電粒子が配向されており、
前記複数の圧電粒子が複数列に並んだ状態で前記媒体中に配向するように、未硬化の前記媒体に電圧を加えながらこの媒体を硬化させることによって、これらの圧電粒子がこの媒体に保持されていること、
を特徴とする駆動装置。 A driving device for driving a movable member by a piezoelectric material,
In the piezoelectric material, a plurality of piezoelectric particles are dispersed in a medium, and the direction of the electric field applied to the medium and the direction of polarization of the piezoelectric particles are the same so that the piezoelectric particles Are oriented,
The piezoelectric particles are held on the medium by curing the medium while applying a voltage to the uncured medium so that the plurality of piezoelectric particles are aligned in the medium in a plurality of rows. That
A drive device characterized by the above.
前記圧電材は、第１の電極と第２の電極との間に配置され、これらの電極間に加わる電圧に応じて弾性変形して前記可動部材を駆動すること、
を特徴とする駆動装置。 The drive device according to claim 10, wherein
The piezoelectric material is disposed between the first electrode and the second electrode, and elastically deforms according to a voltage applied between these electrodes to drive the movable member;
A drive device characterized by the above.
前記圧電材は、ゴム中に前記複数の圧電粒子が配向されており、
前記複数の圧電粒子が複数列に並んだ状態で前記ゴム中に配向するように、未硬化の前記ゴムに電圧を加えながらこのゴムを硬化させることによって、これらの圧電粒子がこのゴムに保持されていること、
を特徴とする駆動装置。 The drive device according to claim 11, wherein
The piezoelectric material is oriented the plurality of piezoelectric particles in the rubber,
By curing the rubber while applying a voltage to the uncured rubber so that the plurality of piezoelectric particles are aligned in a plurality of rows in a row, the piezoelectric particles are held by the rubber. That
A drive device characterized by the above.
前記圧電材に加える電圧を制御する電圧制御部を備えること、
を特徴とする駆動装置。 The drive device according to any one of claims 10 to 12,
A voltage control unit for controlling a voltage applied to the piezoelectric material;
A drive device characterized by the above.
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