JP5034963B2 - Semiconductor test equipment - Google Patents

Description

  The present invention relates to a semiconductor test apparatus for testing a semiconductor device.

  In general, a semiconductor test apparatus tests a semiconductor device by comparing a signal obtained by applying a test signal to the semiconductor device with a predetermined expected value to determine pass / fail. One type of test performed on this semiconductor test equipment is a Shmoo Plot. Here, the shum plot is used to determine a pass / fail while changing the voltage and timing of a test signal applied to a semiconductor device step by step, and the determination result (sum data) is two-dimensionally measured using a shum tool. Or the test which plots three-dimensionally, or the plot display obtained by the test. In this test, the determination timing of the signal obtained from the semiconductor device may be changed instead of the timing of applying the test signal.

  FIG. 5 is a diagram showing a display example of a shum plot using a conventional shum tool. As shown in FIG. 5, the conventional Schum tool is provided with a plot display area R101 for displaying a shum plot, and a change point display area R102 for displaying a pass / fail change time in the shum plot. In the plot display region R101, a time axis (horizontal direction on the paper surface) and a voltage axis (vertical direction on the paper surface) are set, and the determination result at each voltage value and timing set at the time of the test is classified according to the result. By plotting, the fail region F100 and the pass region P100 shown in FIG. 5 are displayed.

  The change point display region R102 includes voltage values in the plot display region R101 (in the example shown in FIG. 5, voltage values in increments of 0.4 [V] from 0.2 [V] to 5.8 [V]. The pass / fail change time at) is displayed as a numerical value. Since there are a change point for one voltage value from a pass to a fail and a change from a fail to a pass, each change point display area R102 displays each point as a numerical value. The user can analyze the characteristics of the semiconductor device by referring to the Schum plot illustrated in FIG.

For the display method and the comparison method of sum data in a conventional semiconductor test apparatus, see, for example, Patent Document 1 below.
JP-A-10-106295

  By the way, the conventional analysis of the shum data is basically performed by displaying a shum plot including the fail area F100 and the pass area P100 in the plot display area R101 provided in the shum tool as described above. For this reason, when the user analyzes other sum data other than the sum data (sum plot) currently displayed in the plot display area R101, the currently read sum data should be discarded and analyzed. It is necessary to read new sum data into the sum tool and display the sum plot in the plot display region R101.

  In addition, when the user performs a comparative analysis of the sump plots for a plurality of sum data, each sum data is first read by the sum tool and the sum plot is displayed, and the display contents are displayed in a predetermined file format (for example, , PDF (Portable Document Format) format. Next, each file saved by the user is opened using another application, and the contents are visually compared.

  As described above, the conventional Schum tool is basically limited in that only one shum plot can be displayed at a time. For this reason, when the user compares a plurality of sump plots, as described above, each sump plot must be saved as a PDF file or the like and then visually confirmed using another application. The operation is extremely complicated and the analysis efficiency is poor.

  The present invention has been made in view of the above circumstances, and it is an object of the present invention to provide a semiconductor test apparatus capable of reducing the user operation necessary for analyzing a plurality of sump plots and performing an efficient analysis. And

In order to solve the above-described problems, a semiconductor test apparatus according to the present invention includes a test apparatus main body (10) that obtains sum data by performing a test on a semiconductor device (30), and the sum data obtained by the test apparatus main body. In the semiconductor test apparatus (1) including a terminal device (20) having a display unit (26) for displaying, the terminal device is configured to perform at least two sum data among the sum data obtained by the test device body. The display control unit (22a) for displaying the sump plot in the first display area (R1) of the display unit in a superposed state, and the sump plot for the sum data obtained by the test apparatus main body was reduced. Reduction of displaying each of the reduced Schum plots (SN1 to SN7) in a second display area (R3) different from the first display area of the display unit. Display controller and (22b), an operation unit operated by a user (25), the second display of the reduced Hilversum plot displayed in the area, the reduced specified by operation of the operating section by the user Hilversum And a selection unit (22d) that selects the shum data relating to the plot, and the display control unit performs a first display of the display unit in a state in which the shum plots of the shum data selected by the selection unit are overlaid. It is characterized by being displayed in the area.
In addition, the semiconductor test apparatus of the present invention includes a test apparatus body (10) that obtains sum data by performing a test on the semiconductor device (30), and a display unit (26) that displays the sum data obtained by the test apparatus body. In the semiconductor test apparatus (1) including the terminal apparatus (20) having the above-described configuration, the terminal apparatus superimposes the summ plots on at least two of the summ data obtained by the test apparatus main body. A display control unit (22a) that displays the first display region (R1) of the display unit in a combined state, and a reduced shum plot (SN1 to SN1) that is a reduced shum plot for the shum data obtained by the test apparatus main body. SN7) is displayed on a second display area (R3) different from the first display area of the display section. The operation unit (25) operated by the user, and among the reduced sump plots displayed in the second display area, at least the size of the sump plot, the test type, and the evaluation position that are the basis of the reduced sump plot And an automatic selection unit (22e) that selects the sum data relating to a common reduced Shum plot, and the display control unit is designated when selection by the automatic selection unit is specified by an operation of the operation unit by a user In addition, the sump plot of the summ data selected by the automatic selection unit is displayed on the first display area of the display unit in an overlaid state.

According to the present invention, the sump plots for at least two pieces of sum data among the sum data obtained by the test apparatus main body are displayed in the superimposed state in the first display area of the display unit. Thus, it is possible to compare the sump plots without performing complicated operations by the user, and it is possible to analyze the sump plots efficiently.
Further, according to the present invention, the thumbnail of the sump plot is displayed in the second display area different from the first display area of the display unit, so that the user can select the sump plot to be overlapped with reference to the thumbnail, It is possible to perform various operations such as automatically selecting a sump plot having a common size from the thumbnails displayed in the second display area, thereby further improving the efficiency of analysis. is there.
Further, according to the present invention, since the related information related to the thumbnail is displayed in the third display area located on or near the thumbnail, for example, one of the shum plots displayed superimposed on the first display area. Therefore, it is possible to know what kind of test is performed on which semiconductor device, and it is possible to analyze the characteristics of the semiconductor device more efficiently.

  Hereinafter, a semiconductor test apparatus according to an embodiment of the present invention will be described in detail with reference to the drawings. FIG. 1 is a block diagram showing a configuration of a semiconductor test apparatus according to an embodiment of the present invention. As shown in FIG. 1, the semiconductor test apparatus 1 of the present embodiment includes a test apparatus body 10 that performs a test of a semiconductor device (hereinafter referred to as a DUT (Device Under Test)) 30 and a terminal device connected to the test apparatus body 10. 20.

  The test apparatus main body 10 includes a control unit 11, a test unit 12, and a test memory 13, and performs a test by applying a test signal to the DUT 30. Here, when performing the Schum plot, the test apparatus main body 10 determines the pass / fail while changing the voltage or current of the test signal applied to the DUT 30 and its timing step by step, and the determination result (Shum Data). In this embodiment, the case where the test signal application timing is changed when performing the Schum plot will be described as an example. However, the determination timing of the signal obtained from the DUT 30 instead of the test signal application timing is described. It is also possible to obtain shum data by changing.

  The control unit 11 comprehensively controls the operation of the test apparatus main body 10 by controlling the test unit 12 and the test memory 13 according to the test program P1 created in advance by the user. The test unit 12 generates a test signal for performing the test of the DUT 30 under the control of the control unit 11, and compares the signal output from the DUT 30 with a predetermined expected value when the test signal is applied. Determine pass / fail. In addition, when performing the Schum plot, the test unit 12 generates a test signal in which the voltage or current changes stepwise, and determines the application timing of the test signal to the DUT 30 (or the determination timing of the signal obtained from the DUT 30). Change. In the following description, for the sake of simplicity, it is assumed that the test unit 12 changes the voltage of the test signal applied to the DUT 30 when performing the Schum plot.

  The test memory 13 stores the test result of the DUT 30 such as the sum data in association with the related information related to the test result. Here, the related information is information including at least one of information for specifying the DUT 30 and information indicating the type of test for the DUT 30. Here, as information indicating the type of test for the DUT 30, for example, information for specifying the test program used for the test of the DUT 30 (for example, the name of the test program), information indicating the test items listed in the test program (for example, Function test), information for specifying the test pattern used in the test (for example, test pattern name), and the like. Such related information is information obtained by the control unit 11 or the test unit 12.

  The test memory 13 is provided with a test result storage area A1 and a related information storage area A2 by the test program P1. Test results (including sum data) of the DUT 30 are stored in the test result storage area A1, and related information obtained by the control unit 11 or the test unit 12 is stored in the related information storage area A2. FIG. 1 illustrates the case where the test memory 13 has one test result storage area A1 and one related information storage area A2, but these areas are changed by the user changing the test program P1. It is also possible to provide a plurality. As the test memory 13, for example, an internal storage device such as a DRAM (Dynamic Read Only Memory) or an external storage device such as a hard disk can be used.

  The terminal device 20 confirms the test status of the DUT 30 by displaying the test result obtained by the test of the DUT 30 by the user, or confirms whether the test conditions described in the created test program are valid. It is used for this purpose. The terminal device 20 can acquire the shum data obtained by the test apparatus body 10 and display it (shum plot). Here, when there are a plurality of sum data, the terminal device 20 can display the sum plots of the sum data in a superimposed state, and thumbnails SN1 to SN7 of the sum plot (reduced sum plot: diagram). 2) is also possible.

  In addition, when the user performs a predetermined operation (for example, an operation such as placing the mouse cursor at the same position on the thumbnail for a certain period of time) by the user, the terminal device 20 displays related information related to the thumbnail on the thumbnail or Display in the balloon help format (balloon format) in the vicinity. Here, the related information related to the thumbnail is information including at least one of the information specifying the DUT 30 and the information indicating the type of test for the DUT 30 described above.

  Furthermore, the terminal device 20 not only displays the test result, but also transfers the test program P1 to the test device body 10 or outputs a control signal to the test device body 10 to operate the test device body 10. Also used to control. The terminal device 20 is preferably realized by a workstation or a personal computer.

  As illustrated in FIG. 1, the terminal device 20 includes a test data acquisition unit 21, a control unit 22, a memory 23, a hard disk 24, an operation unit 25, and a display unit 26. The test data acquisition unit 21 communicates with the control unit 11 of the test apparatus main body 10 and acquires test results and related information stored in the test memory 13 of the test apparatus main body 10.

  The control unit 22 controls the operation of the terminal device 20 in an integrated manner. By reading and executing various control programs (not shown) stored in the hard disk 24, the control unit 22 has a display control unit 22a. The reduced display control unit 22b, the related information display control unit 22c, the selection unit 22d, and the automatic selection unit 22e are realized. Here, the display control unit 22a displays the sump plots for at least two pieces of sum data (sum data stored in the hard disk 24) obtained by the test apparatus main body 10 in a superimposed state. Displayed on the unit 26. Specifically, when a plurality of sum data is selected by the selection unit 22d or the automatic selection unit 22e, the sum plots for the selected sum data are displayed on the display unit 26 in a superimposed state.

  FIG. 2 is a diagram illustrating a display example of a Schum plot. In the case of displaying the shum plot, a window W1 shown in FIG. The window W1 includes a plot display area R1 (first display area) for displaying a shum plot, a change point display area R2 for displaying a pass / fail change time in the shum plot, and a thumbnail display area R3 (second display). Area) is provided. The above-described display control unit 22a displays the shum plot in a superimposed state in the plot display region R1.

  In the change point display region R2, each voltage value in the plot display region R1 (in the example shown in FIG. 2, voltage values in increments of 0.4 [V] from 0.2 [V] to 5.8 [V]). The change point of pass / fail is displayed numerically. Since there are a change point for one voltage value from a pass to a fail and a change from a fail to a pass, each change point display area R2 displays each point as a numerical value. The display control unit 22 performs display control of the change point display region R2 together with display control of the plot display region R1.

  The plot display region R1 and the change point display region R2 include a scroll bar SB1 for translating (scrolling) both the displayed sump plot and voltage change time point in the vertical direction of the paper, and the shum plot and voltage change time point. Are provided with scroll bars SB2 and SB3 for individually scrolling in the horizontal direction. When the user operates these scroll bars SB1 to SB3, the display position of the sump plot in the plot display area R1 and the display position at the time of voltage change in the change point display area R2 are moved to the user's desired position. Is possible.

  The reduced display control unit 22b differs from the plot display area R1 in the window W1 in each of the thumbnails of the sump plots for the sum data (sum data stored in the hard disk 24) acquired by the test data acquisition unit 21. The image is displayed in the thumbnail display area R3 provided at the position. FIG. 2 shows an example in which six thumbnails SN1 to SN6 and a part of the thumbnail SN7 are displayed in the thumbnail display area R3.

  In the example shown in FIG. 2, the summ plots related to the thumbnails SN3 and SN4 displayed in the thumbnail display region R3 are displayed in the plot display region R1 in a superimposed state. In the example shown in FIG. 2, the shum plot displayed in the plot display region R <b> 1 is different in the part indicated using the symbols D <b> 1 to D <b> 3, and the shum plot is emphasized in such a manner that the different parts D <b> 1 to D <b> 3 are emphasized. Overlaid display. As a method for highlighting the different portions, any method such as color-coded display or highlight display can be used.

  The related information display control unit 22c receives related information related to the thumbnail displayed in the thumbnail display area R3 (information including information specifying at least one of the DUT 30 and information indicating the type of test for the DUT 30) by the user. Depending on the operation of the operation unit 25, it is displayed in a balloon help format (balloon format) on or near the thumbnail. For example, when the user performs an operation such as placing the mouse cursor at the same position on the thumbnail for a certain period of time, related information related to the thumbnail is displayed in a balloon help format (balloon format) on or near the thumbnail. .

  FIG. 3 is a diagram illustrating a display example of related information. For example, as shown in FIG. 3, when a cursor C such as a mouse cursor is placed at the same position on the thumbnail SN4 displayed in the thumbnail display area R3 for a certain time, the thumbnail SN4 or its vicinity (or the display of the cursor C) is displayed. The continuous information display area R4 (third display area) is displayed in a balloon help format in the vicinity of the position. In the example illustrated in FIG. 4, four pieces of related information including “data set”, “judge”, “pattern name”, and “DUT” are displayed.

  Here, “data set” is the name of the test program used for testing the semiconductor device, “judge” is the test item listed in the test program used for the test, and ““ pattern name ”is the test name. This is the name of the test pattern used for. In other words, “data set” corresponds to information for specifying the test program used for the test of DUT 30, “judgment” corresponds to information indicating the test items listed in the test program, and “pattern name” refers to test Corresponds to information specifying the test pattern used in “DUT” is the number of the DUT 30 from which the shum data relating to the thumbnail is obtained, and corresponds to information for specifying the DUT 30.

  By referring to the display contents of the related information display area R4 shown in FIG. 3, the user knows that the shum data regarding the thumbnail SN4 is data obtained by testing the DUT 30 to which the number “2” is assigned. be able to. In addition, the user adds the test pattern name “test2” to the test item to which the number “2001” included in the test program to which the test program name “DST1” is assigned as the sum data regarding the thumbnail SN4. It is possible to know that the data is obtained by executing the test pattern.

  The selection unit 22 d selects, from among the thumbnails displayed in the thumbnail display area R <b> 3, the shum data related to the thumbnail specified by the operation of the operation unit 25 by the user from the shum data stored in the hard disk 24. The automatic selection unit 22e stores, on the hard disk 24, summ data related to thumbnails that share at least one of the size, test type, and evaluation position of the summ plot that is the source of the thumbnails among the thumbnails displayed in the thumbnail display region R3. Select from the summed data. Here, when the automatic overlay button B1 provided in the window W1 shown in FIGS. 2 and 3 is pressed by the user, the automatic selection unit 22e executes the above-described selection of the shum data.

  The memory 23 temporarily stores the processing results and the like of each of the display control unit 22a to the automatic selection unit 22e realized by the control unit 22. The memory 23 is preferably an internal storage device such as a DRAM. The hard disk 24 stores test results and related information acquired by the test data acquisition unit 21 from the test apparatus body 10, and various control programs (not shown) for realizing the display control unit 22a to the automatic selection unit 22e of the control unit 22. Store. As shown in the figure, the hard disk 24 is provided with a test result storage area A11 and a related information storage array A12. The test results acquired by the test data acquisition unit 21 are stored in the test result storage area A11. It is stored in the related information storage array A12. At this time, the test results and the related information are stored so that the correspondence when stored in the test memory 13 of the semiconductor device body 10 is maintained.

  The operation unit 25 is operated by the user and is used to input various instructions of the user to the control unit 22 provided in the terminal device 20. The operation unit 25 is realized by, for example, a keyboard or a mouse. The display unit 26 includes a display device such as a CRT (Cathode Ray Tube) or a liquid crystal display device, for example, and displays according to display control of the display control unit 22a, the reduced display control unit 22b, and the related information display control unit 22c. I do.

  Next, the operation of the semiconductor test apparatus 1 of this embodiment will be described. In the following description, the operation of the test apparatus body 10 when acquiring the shum data will be described first, and then the operation when displaying the shum plot using the shum data obtained by the test apparatus body 10 will be described. When the test of the DUT 30 is started, a control signal according to the test program P1 is output from the control unit 11 to the test unit 12.

  Thereby, in the test unit 12 of the test apparatus main body 10, a test signal set to a predetermined voltage is generated and applied to the DUT 30 at a predetermined timing. When this test signal is applied, the DUT 30 outputs a signal corresponding to the applied test signal. The signal output from the DUT 30 is input to the test unit 12 of the test apparatus main body 10 and compared with a predetermined expected value to determine pass / fail.

  Next, a test signal in which at least one of the voltage of the test signal and the application timing of the test signal is changed by a predetermined amount is generated by the test unit 12, applied to the DUT 30, and a pass / fail using the signal output from the DUT 30 This determination is performed in the same manner. The above operation is performed over a predetermined variable range of voltage and variable range of application timing, and the test ends when the variable range is exceeded. In this way, a test result (sum data) indicating a pass / fail when the voltage of the test signal and the application timing are varied is obtained. The shum data obtained by the test unit 12 is output to the test memory 13 and stored in the test result storage area A1.

  Information specifying the test program used for the DUT 30 test, such as the test program name, information indicating the test items listed in the test program, and information specifying the test pattern used for the test, such as the test pattern name, are as follows: These are acquired by the control unit 11 and stored in the related information storage area A2 of the test memory 13. Further, information specifying the DUT 30 is acquired by the test unit 12 and stored in the related information storage area A2 of the test memory 13.

  FIG. 4 is a flowchart showing processing performed by the terminal device 20 when displaying the shum data obtained by the test apparatus main body 10. The process of the flowchart shown in FIG. 4 is started when the user operates the operation unit 25 and gives an instruction to acquire the shum data. When the process is started, the test data acquisition unit 21 transmits a test data acquisition request to the control unit 11 of the test apparatus body 10 under the control of the control unit 22. When this request is received, the control unit 11 reads the sum data and the related information in the test result storage area A1 and the related information storage area A2 of the test memory 13, and reads them to test the terminal device 20. It transmits to the data acquisition part 21.

  The shum data and the related information transmitted from the test apparatus main body 10 are acquired by the test data acquisition unit 21 and then transferred to the control unit 22, and under the control of the control unit 22, the test result storage area A11 and the hard disk 24 are stored. The information is stored in the related information storage area A12. Through the above processing, the test data acquisition unit 21 acquires the shum data and related information (step S11).

  When the process of step S11 is completed, the window W1 shown in FIGS. 2 and 3 is displayed on the display unit 26 under the control of the control unit 22, and the thumbnail is displayed in the thumbnail display region R3 of the window W1 (step S12). Specifically, the reduced display control unit 22 reads out the shum data stored in the test result storage area A11 of the hard disk 24, creates a thumbnail for each shum data, and displays it in the thumbnail display area R3.

  When the thumbnail is displayed, the control unit 22 determines whether or not the user has performed a specific operation by operating the operation unit 25 (step S13). Specifically, an operation for specifying the thumbnail displayed in the thumbnail display area R3, an operation for pressing the automatic overlay button B1 (see FIGS. 2 and 3) provided in the window W1, or the same position on the thumbnail. It is determined whether or not an operation for placing the cursor C for a certain period of time has been performed.

  Here, if the user operates the operation unit 25 and performs an operation of specifying one or more thumbnails displayed in the thumbnail display region R3, the selection unit 22d displays the thumbnail displayed in the thumbnail display region R3. Among them, the shum data relating to the thumbnail specified by the operation of the operation unit 25 by the user is selected from the shum data stored in the hard disk 24 (step S14). When the selection unit 22d selects the shum data, the display control unit 22a reads the sash data selected by the selection unit 22d from the test result storage area A11 of the hard disk 24 and displays it superimposed on the plot display area R1 of the window W1 ( Step S15).

  For example, in the example illustrated in FIG. 2, if the user operates the operation unit 25 and performs an operation of sequentially specifying the thumbnails SN3 and SN4 among the thumbnails displayed in the thumbnail display region R3, the hard disk 24 is loaded in step S14. From the stored sum data, the sum data related to the thumbnails SN3 and SN4 is selected. An operation for sequentially specifying the thumbnails SN3 and SN4 includes, for example, an operation in which the cursor C shown in FIG. 4 is sequentially moved to the display positions of the thumbnails SN3 and SN4 and clicked at the respective display positions. Then, the sump plot for the sum data regarding the selected thumbnails SN3 and SN4 is displayed in the plot display area R1 of the window W1 in a manner in which the different portions D1 to D3 are emphasized in step S15. The characteristics of the DUT 30 can be efficiently analyzed by referring to the Schum plot displayed in an overlapping manner in the plot display region R1.

  When the sum plot display is completed, the control unit 22 determines whether or not the user has instructed the end (step S16). Here, examples of the termination instruction by the user include an instruction to close the window W1. If the determination result is “YES”, the series of processing ends. On the other hand, if the determination result in step S16 is “NO”, the process returns to step S13 to determine whether or not a specific operation by the user has been performed.

  Here, if the user operates the operation unit 25 to perform an operation of pressing the automatic overlay button B1 provided in the window W1, the automatic selection unit 22e includes the thumbnails displayed in the thumbnail display area R3. From among the shum data stored in the hard disk 24, shum data relating to a thumbnail having at least one of the size, test type, and evaluation position of the shum plot that is the source of the thumbnail is selected (step S17). When the automatic data selection is performed by the automatic selection unit 22e, the display control unit 22a reads the sash data selected by the automatic selection unit 22e from the test result storage area A11 of the hard disk 24, and displays it superimposed on the plot display area R1 of the window W1. (Step S15).

  When the overlay display of the sump plot is completed, the control unit 22 similarly determines whether or not the user has instructed the termination (step S16). If the determination result is “YES”, the series of processing ends, and if the determination result is “NO”, the process returns to step S13 to determine whether or not a specific operation by the user has been performed.

  Here, if the user operates the operation unit 25 to perform an operation of arranging the cursor C at the same position on the thumbnail SN4 for a certain period of time, the related information display control unit 22c relates to the thumbnail SN4 on which the cursor C is arranged. The related information is read from the related information storage area A12 of the hard disk 24 (step S18). Then, as shown in FIG. 3, the related information display area R4 including the related information on or near the thumbnail SN4 is displayed in a balloon help format (balloon format) (step S19). By referring to the display, the user knows what test is performed on which DUT 30 with respect to one of the sum plots superimposed and displayed in the plot display region R1. The characteristics of the DUT 30 can be analyzed efficiently.

  When the display of the related information is completed, the control unit 22 determines whether or not the user has instructed the termination (step S16), as in the case where the superimposing of the sump plots is terminated. If the determination result is “YES”, the series of processing ends, and if the determination result is “NO”, the process returns to step S13 to determine whether or not a specific operation by the user has been performed.

  As described above, in the present embodiment, the sump plots for at least two pieces of sum data obtained by the test apparatus main body 10 are displayed in the plot display region R1 of the window W1 in a superimposed state. . For this reason, it is possible to compare the sump plots without performing a complicated operation by the user as in the prior art, and it is possible to efficiently analyze the sump plots.

  In the present embodiment, the thumbnail of the Schumplot is displayed in the thumbnail display area R3. For this reason, various operations such as the user selecting a sump plot to be overlaid with reference to the thumbnail, or automatically selecting a sump plot having a common size or the like from the thumbnails displayed in the thumbnail display region R3. It is possible to improve the efficiency of analysis.

  In the present embodiment, related information related to the thumbnail is displayed on or near the thumbnail in a balloon help format. With this display, for example, it is possible to know which DUT 30 was tested with respect to one of the sum plots displayed superimposed on the plot display region R1, so that the DUT 30 Characteristic analysis can be performed more efficiently.

  Although the semiconductor test apparatus according to one embodiment of the present invention has been described above, the present invention is not limited to the above-described embodiment, and can be freely changed within the scope of the present invention. For example, in the above-described embodiment, the case where only the different portions of the overlaid display of the sump plot are displayed in an emphasized manner has been described as an example. Is optional. In addition to the information specifying the DUT 30 and the information indicating the type of test for the DUT 30, the related information may include information specifying the pins of the DUT 30 and other various types of information. The display format of the related information is not limited to the balloon help format described above, and any display format can be used.

It is a block diagram which shows the structure of the semiconductor test apparatus by one Embodiment of this invention. It is a figure which shows the example of a display of a sump plot. It is a figure which shows the example of a display of related information. 5 is a flowchart showing processing performed by the terminal device 20 when displaying the shum data obtained by the test apparatus main body 10. It is a figure which shows the example of a display of the shum plot using the conventional shum tool.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Semiconductor test apparatus 10 Test apparatus main body 20 Terminal apparatus 22a Display control part 22b Reduction display control part 22c Related information display control part 22d Selection part 22e Automatic selection part 25 Operation part 26 Display part 30 DUT
R1 Plot display area R3 Thumbnail display area R4 Link information display area SN1 to SN7 Thumbnail

Claims (2)

In a semiconductor test apparatus comprising a test apparatus main body that obtains shum data by performing a test on a semiconductor device, and a terminal device having a display unit that displays the shum data obtained by the test apparatus main body,
The terminal device includes: a display control unit that displays a sum plot of at least two sum data among the sum data obtained by the test apparatus main body in a superimposed state in the first display area of the display unit ; ,
A reduced display control unit that displays each of the reduced sump plots obtained by reducing the sump plot for the sum data obtained by the test apparatus main body in a second display region different from the first display region of the display unit;
An operation unit operated by a user;
A selection unit that selects, among the reduced shum plots displayed in the second display area, a shum data related to the reduced shum plot specified by the operation of the operation unit by the user;
The display control unit displays the sum plot of the sum data selected by the selection unit in a superimposed state in the first display area of the display unit.
The semiconductor test apparatus, characterized in that. In a semiconductor test apparatus comprising a test apparatus main body that obtains shum data by performing a test on a semiconductor device, and a terminal device having a display unit that displays the shum data obtained by the test apparatus main body,
  The terminal device includes: a display control unit that displays a sum plot of at least two sum data among the sum data obtained by the test apparatus main body in a superimposed state in the first display area of the display unit; ,
  A reduced display control unit that displays each of the reduced sump plots obtained by reducing the sump plot for the sum data obtained by the test apparatus main body in a second display region different from the first display region of the display unit;
  An operation unit operated by a user;
  From among the reduced sump plots displayed in the second display area, select shum data relating to a reduced sump plot that has at least one of the size, test type, and evaluation position of the sump plot that is the basis of the reduced sump plot. With an automatic selection section,
  When the selection by the automatic selection unit is designated by the operation of the operation unit by a user, the display control unit is configured to superimpose the sum plots of the sum data selected by the automatic selection unit in the display unit Display in the first display area
  A semiconductor test apparatus.

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