JP5017648B2 - Actuator control device and actuator control method - Google Patents

Description

  The present invention relates to an actuator control device and an actuator control method effective for countermeasures such as torque saturation.

  2. Description of the Related Art In recent years, motion control devices typified by positioning control of various machine tools, semiconductor manufacturing devices, and robots in the industry are demanded for high-speed and high-precision control for the purpose of improving productivity. A typical example of a conventional motion control system has a current control system that performs torque control in a minor loop, as shown in FIG. 10, for example, and a speed control system and a position control system are configured outside the minor loop.

FIG. 10 shows a system configuration of a general servo system. Here, a servo motor 501 to be controlled is driven by a current value I given from the control device 502. The control device 502 includes subtracters 503 to 505, a position controller 506, a speed controller 507, a current controller 508, and a current limiter 509, and locally monitors the current value I to the servo motor 501 as described above. The position control loop 512 for monitoring the position θ _m of the servo motor 501 and the speed control loop 513 for monitoring the response speed (angular velocity) ω _m of the servo motor 501 are provided outside the current control loop 511. Is done.

The control device 502 here calculates a position deviation between the actual position θ _m of the servo motor 501 and the target position reference value θ _ref by the subtractor 503, and this position deviation is calculated by the position controller 506. Convert to speed reference value ω _ref . A deviation between the speed reference value ω _ref and the actual response speed ω _m of the servo motor 501 is calculated by a subtractor 504 connected to the subsequent stage of the position controller 506, and converted into a current reference value I _ref by the speed controller 507. Further, a deviation between the current reference value I _ref and an actual current value I given to the servo motor 501 is calculated by a subtracter 505 connected to a later stage of a current limiter 509 described later, and this is a control for the servo motor 501. A signal, that is, a current value I is output from the current controller 508. As a result, the servo motor 501 is controlled such that the actual position θ _m of the servo motor 501 follows the position reference value θ _ref given to the control device 502.

In addition, a current limiter 509 is connected between the speed controller 507 and the subtractor 505 so that the current reference value I _ref converted by the speed controller 507 does not exceed a certain range in this series of controls. . Thereby, even when the current reference value I _ref that the servo motor 501 is likely to cause torque saturation is output from the speed controller 507, the current value I to the servo motor 501 is suppressed by the current limiter 509 within a certain range. Torque saturation of the servo motor 501 can be prevented.

  On the other hand, the applicant of the present application has realized an acceleration control system (acceleration controller) that drives an actuator represented by a motor with an acceleration command, and has proposed the implementation of a high-speed, high-performance motion control system. The acceleration control system enables high-speed motion control, but on the other hand, the current command and voltage command for the operation amount to the motor are often limited (saturated). In particular, at the time of starting and braking the motor, there is a problem that a limit (saturation) in the acceleration dimension is generated, and the target locus cannot be tracked due to vibration or unstable response.

With respect to such a problem, a limiter (saturation) countermeasure technique for satisfying a desired motion control performance has been developed a lot and proposed in Patent Document 1 and the like. However, the techniques as shown in Patent Document 1 and FIG. 10 are all techniques based on position servo and speed servo, and are insufficient as countermeasures for the acceleration control system.
JP-A-7-62052

  Thus, since the conventional countermeasure against torque saturation is a method based on the speed PI control system, it is often not always suitable for a motion control system based on a robust acceleration control system.

  The present invention has been made in view of the above problems, and an object thereof is to provide an actuator control device and an actuator control method capable of realizing a limit (saturation) countermeasure suitable for a motion control system of a robust acceleration control system. It is in.

In order to solve the above problems, an actuator control apparatus according to the present invention includes a disturbance observer that estimates disturbance to the actuator, converts a disturbance estimated value obtained by the disturbance observer into a disturbance compensation current value , and outputs the disturbance compensation current value to the actuator. The current reference value obtained by converting the acceleration reference value is feedback-compensated with the disturbance compensation current value , and the acceleration control unit that performs robust acceleration control of the actuator, and the acceleration reference value for controlling the tracking of the actuator. A locus tracking control unit for calculating, and an acceleration limiter for limiting an acceleration reference value to the actuator to a predetermined maximum acceleration value or less.

  In the actuator control apparatus, it is preferable that the pole of the disturbance observer is infinite.

The acceleration limiter includes a disturbance compensation acceleration value obtained from a disturbance estimated value from the disturbance observer, an acceleration reference value of a feedback system of the trajectory tracking control unit, and an acceleration of a feedforward system of the trajectory tracking control unit. When the first value obtained by adding the reference values exceeds the maximum acceleration value , the acceleration reference value to the actuator is preferably limited to the maximum acceleration value .

The acceleration limiter in this case uses the first value as an acceleration reference value to the actuator when the first value does not exceed the maximum acceleration value , while the first value is the maximum acceleration. When the value is exceeded, a value obtained by multiplying the disturbance compensation acceleration value by a first adjustment rate, a value obtained by multiplying the acceleration reference value of the feedback system by a second adjustment rate, and an acceleration reference of the feedforward system The first, second, and third adjustment rates are adjusted so that a second value obtained by adding a value obtained by multiplying the value by a third adjustment rate becomes the maximum acceleration value. .

  Furthermore, it is preferable that the acceleration limiter is configured so that the value of the first adjustment rate is fixed to 1 regardless of the magnitude of the first value.

The actuator control method according to the present invention includes a disturbance observer that estimates disturbance to the actuator, converts a disturbance estimated value obtained by the disturbance observer into a disturbance compensation current value, and converts an acceleration reference value to the actuator. Feedback compensation of the current reference value with the disturbance compensation current value , and an acceleration control step for robust acceleration control of the actuator, a tracking control step for calculating the acceleration reference value for controlling the locus tracking of the actuator, An acceleration limiting step of limiting an acceleration reference value to the actuator to be equal to or less than a preset maximum acceleration value.

  In the actuator control method, it is preferable that the pole of the disturbance observer is infinite.

The acceleration limiting step includes a disturbance compensation acceleration value obtained from a disturbance estimated value from the disturbance observer, a feedback reference acceleration value of the locus following step, and a feed forward acceleration reference of the locus following step. When the first value summed with the value exceeds the maximum acceleration value , the acceleration reference value to the actuator is preferably limited to the maximum acceleration value .

In this case, the acceleration limiting step uses the first value as an acceleration reference value to the actuator when the first value does not exceed the maximum acceleration value , while the first value is When the maximum acceleration value is exceeded, a value obtained by multiplying the disturbance compensation acceleration value by a first adjustment rate, a value obtained by multiplying the acceleration reference value of the feedback system by a second adjustment rate, and a value of the feedforward system The first, second, and third adjustment rates are adjusted so that a second value obtained by summing a value obtained by multiplying the acceleration reference value by the third adjustment rate becomes the maximum acceleration value .

  Further, in the acceleration limiting step, it is preferable that the value of the first adjustment rate is fixed to 1 regardless of the magnitude of the first value.

  According to the apparatus of claim 1 and the method of claim 6, high-speed motion based on the robust acceleration control is achieved by causing the actuator to track the target value while realizing robust acceleration control that compensates for disturbance to the actuator. Trajectory tracking control is possible. In addition, under such control, the acceleration reference value to the actuator can be limited to the maximum acceleration value or less when the acceleration of the actuator is saturated. Therefore, it is possible to realize a limit (saturation) countermeasure suitable for the motion control system of the robust acceleration control system.

  According to the apparatus of claim 2 and the method of claim 7, the transfer function from the acceleration reference value to the acceleration response value to the actuator can be regarded as 1, and the actuator follows the target command value almost without delay. Therefore, robust trajectory tracking control can be realized more completely.

According to the device and method of claim 8 of the claims 3, based disturbance accessory 償加 velocity value, and the acceleration reference value Ford forward system, to a first value which is the sum of the acceleration reference value of the feedback system, When the robust acceleration control system is saturated, the acceleration reference value to the actuator can be limited to the maximum acceleration value.

According to the apparatus of claim 4 and the method of claim 9, as long as the first value does not exceed the maximum acceleration value, the disturbance compensation acceleration value , the feedback reference value of the feedback system, and the acceleration reference value of the feedforward system The track following control based on the acceleration control that is robust to the actuator can be performed by using as it is. In addition, when the first value exceeds the maximum acceleration value and the acceleration is saturated, the first, second, and third adjustment rates are adjusted so that the acceleration reference value to the actuator does not exceed the maximum acceleration value. By adjusting the optimal motion command from the state of acceleration saturation, it is possible to realize trajectory tracking control in which no trajectory error occurs even when the acceleration is saturated.

According to the device and method of claim 10 of the claims 5, if it is maintained the value of the first adjustment rate even when acceleration saturation to 1, the disturbance compensation acceleration value obtained by the disturbance estimated value itself Thus, the disturbance compensation of the actuator can be performed, and the robust acceleration control for the actuator can be reliably performed.

  Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings. First, an example of a robust acceleration control system using a disturbance observer applied by the actuator control apparatus of the present invention will be described with reference to FIG.

In the figure, reference numeral 1 denotes a control system of a robust acceleration control system. The acceleration control system 1 serving as an acceleration control unit applies a disturbance in an acceleration dimension to a control target actuator 2 by a disturbance observer 3 serving as a disturbance compensation unit. It is configured to perform torque compensation. The movable actuator 2 that converts energy into motive power is provided as a target for estimating the disturbance torque T _dis to the actuator 2, and this operates by inputting a current value i to a drive source such as a servo motor. It is. Actuator 2 has an actual speed response value θ ^· _res (hereinafter, except for figures and formulas, the first-order differential is indicated as “ ^• ” and the second-order differential is indicated as “ ^•• ” for convenience. ) Is converted into an electrical speed response signal and detected and output, a speed sensor 4 as a speed detecting means is attached. The speed sensor 4 includes a position sensor that detects the actual position of the actuator 2 and converts it into an electrical signal, and a pseudo-differentiator that obtains an estimated speed response signal by pseudo-differentiating the detection signal from the position sensor. It may be used instead of.

On the other hand, the disturbance observer 3 corresponds to an estimated value of disturbance torque ^ T _dis (hereinafter, “^” representing this estimated value except for the figures and mathematical expressions) as a command value for removing disturbance to the actuator 2. In particular, the estimated value ^ T _dis here can estimate not only the disturbance torque T _dis but also parameter variation errors such as inertia variation torque. Specifically, the current value i which is the operation amount to the actuator 2 is input, and the speed response value θ ^{· res} from the speed sensor 4 is input, and the estimated value of the disturbance torque ^ T _dis from these values. Is calculated and output, and is actually composed of computer software. The disturbance observer 3 incorporates an inverse model equivalent to the actuator 2, converts the current value i into a first signal in a torque (force) unit, and the speed response value detected by the first signal and the speed sensor 4. an inverse model unit 6 for outputting a third signal obtained by comparing the second signal obtained by differentiating θ ^{· res} , and setting a cutoff frequency upon differentiation in the inverse model unit 6; A low-pass filter 7 that extracts a third signal of a low-frequency band component from the inverse model unit 6 and outputs the third signal as a disturbance torque estimated value ^ T _dis . Reference _numeral 8 denotes torque-current conversion means for inversely converting the disturbance torque estimated value ^ T _dis into a disturbance compensation current value I ^cmp in the same unit as the target current reference value I ^ref , and this disturbance compensation current value I ^The current input to the actuator 2 is added by adding the ^cmp and the current reference value I ^ref obtained by converting the reference acceleration reference value θ ^{·· ref} by the acceleration-current conversion means 9 with the adder 10. The value i is calculated. Thereby, in the acceleration control system 1 which consists of each structure of FIG. 1, the influence of the disturbance torque _Tdis added to the actuator 2 from the outside can be removed.

In the actuator 2, the deviation between the torque value calculated by the product of the input current value i and the torque constant Kt and the disturbance torque T _dis becomes the actual output torque value, and this output torque value is converted to the moment of inertia J. The result of dividing by is the (angular) acceleration response value θ ^{·· res} that is actually output. Further, the speed response value θ ^{· res} from the actuator 2 is a value obtained by integrating (1 / s) the acceleration response value θ ^{·· res} by the integrator 11. In FIG. 1, the operation of the actuator 2 is shown for convenience in each component including the integrator 11.

Here, symbols in each component shown in FIG. 1 will be explained. J is a moment of inertia of the motor, K _t is a torque constant, and a suffix _n after the symbol is a nominal value. Means. Further, assuming that the cutoff frequency of the disturbance observer 3 is g, the disturbance torque estimated value ^ T _dis is calculated by the following equation.

In this way, in the acceleration control system 1 shown in FIG. 1, the disturbance torque estimated value ^ T ^dis calculated by the disturbance observer 3 is converted to the disturbance compensation current value I ^cmp by the torque-current conversion means 8 to perform feedback compensation. Thus, a simple and robust acceleration control system can be realized based on the conventional current control system.

1 is transmitted from the acceleration reference value θ ^{·· ref} to the acceleration response value θ ^{·· res} when the pole (cutoff frequency) g of the disturbance observer 3 is infinite (g = ∞). The function can be regarded as 1. FIG. 2 shows a block diagram of a trajectory tracking control system based on the robust acceleration control system of FIG. 1. The trajectory tracking control system 20 serving as a trajectory tracking control unit here is a target (position) command value. Since θ ^cmd is a time function, the speed command value θ ^{· cmd} is obtained by differentiation of the function of the target command value θ ^cmd by the first-order differentiator 21, and the acceleration command value θ ^{·· cmd} is obtained by the second-order differentiator 22. It has a feedforward system configuration obtained by second-order differentiation of the function of θ ^cmd . The acceleration control system 1 in FIG. 1 includes the main control system unit 23 and the integrator 11.

The trajectory tracking control system 20 has a position and speed control loop as a feedback system, and the deviation between the target command value θ ^cmd and the position response value θ ^res obtained by the subtractor 24 is the position -The speed conversion means 25 multiplies the gain Kp of the position control system to obtain a speed deviation value. This speed deviation value and the speed command value θ ^{· cmd} obtained by the first-order differentiator 21 are added by the adder 26, and The subtractor 27 calculates a deviation between the added value and the speed response value θ ^{· res} . The deviation value obtained by the subtractor 27 is multiplied by the speed control system gain Kv by the speed-acceleration conversion means 28, and the acceleration deviation value obtained thereby and the acceleration command value θ obtained by the second-order differentiator 22 are obtained. ^{.. Cmd} is added by the adder 29 to calculate the acceleration reference value θ ^{... Ref} to the acceleration control system 1.

In the locus tracking control system 20 in which the acceleration control system 1 is incorporated, a position control loop is provided in addition to the speed control loop, so that the actuator 2 is provided with a position response from the speed response value θ ^{· res for} convenience. An integrator 30 is provided as means for converting to the value θ ^res, and a position sensor 31 is provided as position detection means for detecting the position response value θ ^res of the actuator 2.

In FIG. 2, the transfer function from the position command value θ ^cmd to the position response value θ ^res can be expressed by the following equation.

From the above equation (2), the position response value θ ^res , speed response value θ ^{· res} , and acceleration response value θ ^{·· res} of the actuator 2 are the target position command value θ ^cmd , speed command value θ ^{· cmd} , and acceleration command value, respectively. Follows θ ^{·· cmd} almost without delay. Therefore, in the system shown in FIG. 2, a robust trajectory tracking control system can be realized.

Next, FIG. 3 shows a configuration in which a current limiter 41 is incorporated in the acceleration control system 1 shown in FIGS. 1 and 2 in consideration of the motor current limit (saturation). When the acceleration control system 1 of the robust acceleration control system is constructed using the disturbance observer 3 based on the conventional acceleration control system, an adder 10 is used to avoid torque saturation of the motor incorporated in the actuator 2. A current limiter 41 is provided for limiting the current value i obtained by adding the obtained current reference value I ^ref and the disturbance compensation current value I ^cmp within a certain range. Thereby, for example, when a current value i exceeding the maximum torque of the motor is generated due to a high-speed trajectory command value or a load condition, the current limiter 41 limits the current value i to a value within a certain range. Output to the actuator 2 to avoid torque saturation of the motor. However, when the limiter is considered in the current dimension as before, it is difficult to maintain robust acceleration control for the actuator 2 when the current is saturated.

Therefore, as shown in FIGS. 4 to 5, the disturbance observer 3 in FIG. 3 is equivalently converted. In the equivalent conversion diagram shown in FIG. 4, the acceleration-current conversion means 9 divides the acceleration reference value θ ^{·· ref} by the nominal value K _tn of the torque constant, and multiplies this by the nominal value J _n of the moment of inertia. The current reference value I ^ref is obtained. The current limiter 41 acts on this current reference value I ^ref . The current reference value I ^{ref that} has passed through the current limiter 41 is multiplied by the nominal value K _{tn of the} torque constant by the current-torque conversion means 42, and the torque reference value resulting from this multiplication and an element equivalent to the disturbance torque T _dis A torque response value of the actuator 2 input to the torque-speed conversion means 45 is obtained by subtracting the estimated torque value obtained by multiplying the sensitivity function of the mathematical formula shown in 43 by the equivalent subtractor 44. The torque response value is converted into a speed response value θ ^{· res} by the torque-speed conversion means 45, and this speed response value θ ^{· res} is further converted into a position response value θ ^res by an integrator 30 which is a speed-position conversion means. Is done.

  Note that g ′ shown in the element 43 of FIGS. 4 and 5 can be expressed by the following equation.

  On the other hand, in FIG. 5, the current limiting by the current limiter 41 is equivalently replaced with the acceleration limiting by the acceleration limiter 51. 5 that the current limiter 41 shown in FIG. 3 can be expressed as the acceleration limiter 51 in the robust acceleration control system. Therefore, in this embodiment, an acceleration limiting algorithm is incorporated in the computer constituting the control device for the actuator 2 as a technique that considers the limiter in the acceleration dimension.

The acceleration limiter 51 configures the actuator 2 by limiting the acceleration reference value θ ^{·· ref} to a value within a certain range when an acceleration reference value θ ^{·· ref} that exceeds the maximum torque of the motor occurs. This avoids saturation of the motor in the acceleration dimension. The acceleration reference value θ ^{·· ref} obtained through the acceleration limiter 51 and the estimated acceleration value corresponding to the disturbance calculated by multiplying the disturbance torque T _dis and the sensitivity function of the mathematical formula shown in the element 52 are obtained. Subtracted by the equivalent subtractor 53 is the acceleration response value of the actuator 2 that is input to the integrator 54 that is acceleration-speed conversion means. The acceleration response value is converted into a speed response value θ ^{· res} by the integrator 54, and this speed response value θ ^{· res} is further converted into a position response value θ ^res by an integrator 30 which is a speed-position conversion means.

FIG. 6 shows the configuration of acceleration limiting means 61 for executing the acceleration limiting algorithm. Acceleration limitation means 61, and the disturbance compensation acceleration value theta ^{· ·} _RB ^cmp, the acceleration reference value theta ^{· ·} _FB ^ref of the feedback system of the acceleration control system 1, the acceleration control system 1 of the feedforward system acceleration reference value theta ^{· ·} of _FF ^ref is an input, and the acceleration reference value θ ^{·· ref} = θ ^·· _RB ^cmp + θ ^·· _FB ^ref + θ ^·· _FF ^ref and the maximum acceleration value of the motor θ ^·· _MAX From the comparison result, the final acceleration reference value θ ^{·· ˜˜ref} in consideration of the saturation of acceleration (hereinafter, the final value is expressed as “ ^˜ ” for convenience except in the figures and formulas, and is written after the corresponding symbol.) Is calculated.

Here, the disturbance compensation acceleration value θ ^·· _RB ^cmp for realizing the robust acceleration control is a nominal value of the moment of inertia by the torque-acceleration conversion means 62 to the disturbance torque estimated value ^ T _dis calculated by the disturbance observer 3. It is calculated by multiplying the J _n. Also, the acceleration reference value θ ^·· _FB ^ref of the feedback system is obtained by calculating the deviation between the target feedback reference value and the response value obtained from the actual operation of the actuator 2 by the subtractor 63, Calculated by multiplying the appropriate feedback gain G _FB by element 64. The feedback reference value or response value may be other than acceleration, and the acceleration reference value θ ^·· _FB ^ref may be calculated from the element 64 using the feedback reference value and response value.

The acceleration limiter 51 refers to the final acceleration to the actuator 2 when the total acceleration reference value θ ^{·· ref} calculated by the adder 65 exceeds a preset maximum acceleration value θ ^·· _MAX . Although the value ^{θ ··} ~ref is limited to the maximum acceleration value θ ^·· _MAX, this is in fact, in order to adjust the disturbance compensation acceleration value θ ^·· _RB ^{cmp, ·} the disturbance compensation acceleration value θ ^· the RB claim adjustment rate k1 is multiplied _RB ^cmp, to condition the acceleration reference value theta ^{· ·} _FB ^ref of the feedback system, the FB term adjustment rate k2 to be multiplied by the acceleration reference value theta ^{· ·} _FB ^ref In order to adjust the acceleration reference value θ ^·· _FF ^ref of the feedforward system, the FF term adjustment rate k3 multiplied by the acceleration reference value θ ^·· _FF ^ref is determined, and each adjusted value is added to the adder A function that calculates the final acceleration reference value θ ^{··· ~ ref} by summing at 65 Have In FIG. 6, elements 66 to 68 are shown as means for determining the RB term adjustment rate k1, the FB term adjustment rate k2, and the FF term adjustment rate k3.

The acceleration limiting algorithm realized by the acceleration limiting means 61 configured as described above determines the adjustment rates k1, k2, and k3 by the following procedure, and finally adjusts the acceleration reference value θ ^{·・ Calculate ~ ref} .

First, in the first step, the disturbance compensation acceleration value theta ^{· ·} _RB ^cmp, the acceleration reference value theta ^{· ·} _FB ^ref, and the acceleration reference value theta ^{· ·} _FF ^ref, acceleration reference value theta ^{· ·} the sum as the adder 65 It is determined whether or not ^ref (= θ ^·· _RB ^cmp + θ ^·· _FB ^ref + θ ^·· _FF ^ref ) exceeds the maximum acceleration value θ ^·· _MAX . Here, if the acceleration reference value θ ^{·· ref} does not exceed the maximum acceleration value θ ^·· _MAX , that is, if θ ^{·· ref} ≤ θ ^·· _MAX , each adjustment rate k1, k2, k3 is 1. (K1 = k2 = k3 = 1), and the total acceleration reference value θ ^{·· ref} is output as the final acceleration reference value θ ^{··· -ref} as it is.

On the other hand, if the acceleration reference value θ ^{·· ref} exceeds the maximum acceleration value θ ^·· _MAX , that is, if θ ^{·· ref} > θ ^·· _MAX , each adjustment rate is set so that the relationship of the following equation is satisfied. k1, k2, k3 are determined so that the final acceleration reference value θ ^{··· ref} is equal to the maximum acceleration value θ ^·· _MAX .

Here, an example of adjusting each of the adjustment rates k1, k2, and k3 when θ ^{·· ref} > θ ^·· _MAX will be described. In the feedforward adjustment type shown in the following equation, a feedforward (FF) term is used. By adjusting a certain k3 · θ ^·· _FB ^ref , the size of other feedback (FB) terms k2, ^···· _FB ^ref and robust disturbance compensation (RB) terms k1, ^···· _RB ^cmp is maintained. .

  In another feedback adjustment type, the size of other FF terms and RB terms is maintained by adjusting the FB terms. This can be expressed as:

  Further, in the feedback + feedforward adjustment type, the size of the RB term is maintained by adjusting the FB term + FF term. This can be expressed as:

  The trajectory tracking control system 20 performs feedback and feedforward control of the actuator 2 based on the adjusted FB term and FF term.

What is important here is that the disturbance compensation acceleration value θ ^·· _RB ^cmp calculated based on the estimated disturbance torque ^ T _dis calculated by the disturbance observer 3 is an essential component for performing robust acceleration control on the actuator 2. Therefore, it is necessary to maintain the size of the RB term. Therefore, the RB term adjustment rate k1 = 1, whatever the acceleration reference value θ ^{·· ref} is. Further, when the trajectory tracking control completely, because the acceleration reference value theta ^{· ·} _FF ^ref also essential components of the feed forward system, likewise be any value acceleration reference value theta ^{· · ref} is Also, the FF term adjustment rate k3 = 1. Furthermore, in a multi-axis system, considering the values of the three adjustment factors k1, k2, and k3, respectively, it is possible to expand to a multi-axis system expansion problem.

  FIG. 7 shows the appearance and driving system of an experimental apparatus incorporating an acceleration limiting algorithm realized by the acceleration limiting means 61. In the figure, reference numeral 71 denotes a computer as an actuator control apparatus, which incorporates an algorithm for realizing the locus tracking control system based on the above-described robust acceleration control and an acceleration limiting algorithm. The input / output port of the computer 71 is connected to a PCI bus bridge 73 serving as an input / output interface via a PCI bus 72 serving as connection means. The PCI bus bridge 73 includes an AD (analog-digital conversion) board, a counter board, a DIO (digital input / output) board, and the like.

  On the other hand, the actuator 2 is configured by connecting a ball screw 77 to a rotating shaft of an AC motor 75 that is a driving source using a joint 76 and screwing a table 78 that is a movable body to the ball screw 77. A control signal output from the computer 71 to the inverter 79 through the PCI bus bridge 73 converts the inverter 79 into an alternating current sufficient to drive the AC motor 75, and supplies the AC current to the AC motor 75. The screw 77 rotates in the forward direction or the reverse direction, and the table 78 moves along the axial direction of the ball screw 77.

  The current supplied from the inverter 79 to the AC motor 75 is detected by the current sensor 81 and taken into the computer 71 through the PCI bus bridge 73, and the rotational speed of the AC motor 75 is detected by the encoder 82, which is also PCI. The data is taken into the computer 71 through the bus bridge 73.

In the experimental system shown in FIG. 7, the maximum torque current I _MAX of the AC motor 75 is determined, and the acceleration limiting means 61 based on this is incorporated in the computer 71. That is, in this experimental apparatus, in the acceleration limiting means 61 of FIG. 6, the response value to the subtracter 63 is the current response value detected by the current sensor 81, and the feedback reference value is also the feedback current reference value. Therefore, the element 64 incorporates a means for converting the current I _FB ^ref into the acceleration θ ^·· _FB ^ref (the subscript ^ref is omitted). Similarly, the disturbance compensation acceleration value θ ^·· _RB ^cmp and the feed forward acceleration reference value θ ^·· _FF ^ref can also be converted into current values. The final acceleration reference values θ ^{···· ref} obtained by the acceleration limiting means 61 are taken in as the acceleration reference values θ ^{·· ref} shown in FIG.

In the experimental apparatus shown in FIG. 7, the limitation is actually applied based on the FF adjustment type acceleration limiting algorithm as an example. Here, the relational expression between the acceleration θ ^·· and the current I can be expressed as follows.

Accordingly, the adjustment rates k1, k2, k3 and the final torque current command values I to ^ref can be expressed by the following equations.

  FIG. 8 shows an experimental result when the acceleration limiting means 61 is not incorporated in the computer 71 and acceleration saturation is not taken into consideration. FIG. 9 shows the acceleration limiting means 61 incorporated in the computer 71. The experimental results when acceleration saturation is taken into account are shown. In each of these figures, the experimental values of position, velocity, and acceleration with the passage of time are shown from the top. The broken line indicates the command value, while the solid line indicates the response value.

  In FIG. 8, when acceleration saturation is not taken into consideration, it can be seen that the vibration response is caused by acceleration saturation. On the other hand, when the acceleration saturation shown in FIG. 9 is taken into consideration, there is no vibration or instability in each response value, and good trajectory tracking is possible.

  As described above, in the present embodiment, it is shown that the target position, velocity, and acceleration can theoretically follow without delay by using the trajectory tracking control system based on the robust acceleration control using the disturbance observer 3. In addition, as shown in FIG. 6, the newly introduced acceleration so that the saturation (acceleration limit) of the robust acceleration control system can be considered by dividing into three types of feedforward acceleration command, feedback acceleration command, and disturbance compensation acceleration command. A limiter 51 is configured. Then, an algorithm for deriving the optimum acceleration command at the time of acceleration command limit (saturation) is proposed, and the optimum motion command is adjusted from the state of acceleration limit (saturation). As a result, trajectory tracking control that does not cause a trajectory error even at the time of acceleration limit (saturation) becomes possible. Of course, such a concept is also effective for locus tracking control (high-speed motion control) of various mechatronic devices other than the experimental apparatus shown in FIG.

Thus, in this embodiment, the disturbance observer 3 for estimating the disturbance to the actuator 2, that is, the disturbance torque T _dis is provided, and the disturbance estimated value obtained by the disturbance observer 3, that is, the disturbance torque estimated value ^ T _dis is used as the disturbance compensation current value I ^cmp. Acceleration control step for performing robust acceleration control of the actuator 2 by feedback-compensating the current reference value I ^ref obtained by converting the acceleration reference value θ ^{·· ref} to the actuator 2 with the disturbance compensation current value I ^cmp , An acceleration control system 1 that performs feedback tracking, a trajectory tracking control system 20 that executes a trajectory tracking step for calculating an acceleration reference value θ ^{·· ref} for trajectory tracking control of the actuator 2, and an actuator. Acceleration reference value θ ^{·· ref} to 2 below the preset maximum acceleration value θ ^·· _MAX And an acceleration limiter 51 for limiting.

In this case, the acceleration control system 1 realizes robust acceleration control that compensates for disturbance to the actuator 2, and the locus tracking control system 20 causes the actuator 2 to follow the locus to the target value, thereby achieving high speed based on the robust acceleration control. Enables motion tracking control. In addition, under such control, when the acceleration of the actuator 2 is saturated, the acceleration reference value θ ^{·· ref} to the actuator 2 can be limited to the maximum acceleration value θ ^·· _MAX or less. Therefore, it is possible to realize a limit (saturation) countermeasure suitable for the motion control system of the robust acceleration control system.

Further, the disturbance observer 3 in the present embodiment is configured such that the pole g is infinite when the disturbance torque estimated value ^ T _dis is calculated by the relational expression shown in the above formula 1. In this way, the transfer function from the acceleration reference value θ ^{·· ref} to the acceleration response value θ ^{·· res} to the actuator 2 can be regarded as 1, and the actuator 2 follows the target command value almost without delay. Therefore, robust trajectory tracking control can be realized more completely.

The acceleration limiter 51 that executes the acceleration limiting step proposed in this embodiment includes the disturbance compensation acceleration value θ ^·· _RB ^cmp obtained from the disturbance torque estimated value ^ T _dis from the disturbance observer 3 and the trajectory following step. The first reference value (θ ^·· _FB ^ref) of the feedback system acceleration reference value θ ^·· _FB ^ref to be executed and the feedforward system acceleration reference value θ ^·· _FF ^ref to be executed is summed (θ ^{·・ When} _RB ^cmp + θ ^{・ ・} _FB ^ref + θ ^{・ ・} _FF ^ref ) exceeds the maximum acceleration value θ ^{・ ・} _MAX , the acceleration reference value θ ^{・ ・ ref} to the actuator 2 is limited to the maximum acceleration value θ ^{・ ・} _MAX Configured to do.

In this way, disturbance complement and 償加 speed value theta ^{· ·} _RB ^cmp, first value obtained by adding the acceleration reference value theta ^{· ·} _FF ^ref Ford forward system, the acceleration reference value theta ^{· ·} _FB ^ref of the feedback system Therefore, when the robust acceleration control system is saturated, the acceleration reference value θ ^{·· ref} to the actuator 2 can be limited to the maximum acceleration value θ ^·· _MAX .

In particular, the acceleration limiter 51 in this case uses the first value as the acceleration reference value θ ^{·· ref} for the actuator 2 when the first value does not exceed the maximum acceleration value θ ^·· _MAX. When the first value exceeds the maximum acceleration value θ ^·· _MAX , a value obtained by multiplying the disturbance compensation acceleration value θ ^·· _RB ^cmp by the RB term adjustment rate k1, which is the first adjustment rate, and a feedback system The value obtained by multiplying the acceleration reference value by the FB term adjustment rate k2 that is the second adjustment rate, and the acceleration reference value θ ^·· _FF ^ref of the feedforward system is multiplied by the FF term adjustment rate k3 that is the third adjustment rate. The respective adjustment rates k1, k2, and k3 are adjusted so that the second value obtained by summing the obtained values becomes the maximum acceleration value θ ^·· _MAX .

In this way, as long as the first value does not exceed the maximum acceleration value θ ^·· _MAX , the disturbance compensation acceleration value θ ^·· _RB ^cmp , the acceleration reference value θ ^·· _FB ^{ref of} the feedback system, and the feedforward system The acceleration reference value θ ^·· _FF ^ref can be used as it is, and the actuator 2 can be subjected to locus tracking control based on robust acceleration control. When the first value exceeds the maximum acceleration value θ ^·· _MAX and the acceleration is saturated, each adjustment rate k1 is set so that the acceleration reference value θ ^{·· ref} to the actuator 2 does not exceed the maximum acceleration value θ ^·· _MAX. , K2, and k3 are adjusted, and the optimum motion command is adjusted from the state of acceleration saturation, and it is possible to realize locus tracking control that does not cause a locus error even at the time of acceleration saturation.

Further, in this case, regardless of whether or not the first value exceeds the maximum acceleration value θ ^·· _MAX , the value of the RB term adjustment rate k1 that is the first adjustment rate is fixed to 1. The acceleration limiter 51 is preferably configured. That is, if the value of RB claim adjustment rate k1 in the state of acceleration saturation is maintained at 1, that of the estimated disturbance torque ^ T _dis by resultant disturbance compensation acceleration value theta ^{· ·} _RB ^cmp its, the actuator 2 Disturbance compensation can be performed, and robust acceleration control for the actuator 2 can be reliably performed.

  In addition, this invention is not limited to the said Example, A various deformation | transformation implementation is possible in the range of the summary of this invention.

  Since conventional torque saturation countermeasures are basically based on the speed PI control system, they are not always suitable for motion control based on a robust acceleration control system. However, in the above embodiment, an acceleration limit (saturation) based on the robust acceleration control is newly defined and the optimum acceleration command is corrected, so that the conventional problem can be solved.

  In this way, by taking a limit (saturation) measure based on robust acceleration control, it is possible to perform highly accurate trajectory tracking control that far exceeds the barriers of the prior art. It is expected that the motion control in production technology will be renewed by introducing it to robots.

It is a block diagram which shows an example of the system of the robust acceleration control system using the disturbance observer which the actuator control apparatus of this invention applies. FIG. 2 is a block diagram of a trajectory tracking control system based on the robust acceleration control system of FIG. 1. It is a block diagram which shows the structure which incorporated the current limiter in the control system shown in FIG.1 and FIG.2. It is the block diagram which carried out equivalent conversion of the system shown in FIG. FIG. 4 is a block diagram obtained by further equivalently converting the system shown in FIG. 3. It is a block diagram which shows the structure of the acceleration limiting means 61 which performs the acceleration limiting algorithm in this invention. It is the schematic explanatory drawing which showed the external appearance and drive system of the experimental apparatus incorporating the acceleration limiting algorithm of FIG. It is a wave form diagram which shows the experimental result at the time of not considering acceleration saturation. It is a wave form diagram which shows the experimental result at the time of considering acceleration saturation. It is a block diagram which shows the system configuration | structure of a general servo type.

1 Acceleration control system (acceleration control unit)
2 Actuator 3 Disturbance observer 20 Trajectory tracking control system (trajectory tracking control unit)
51 Acceleration limiter

Claims (10)

A disturbance observer for estimating the disturbance to the actuator is provided, the disturbance estimated value obtained by the disturbance observer is converted into a disturbance compensation current value, and the current reference value obtained by converting the acceleration reference value to the actuator is used as the disturbance compensation. An acceleration controller that performs feedback compensation with a current value and performs robust acceleration control of the actuator;
A trajectory tracking control unit that calculates the acceleration reference value for controlling the trajectory tracking of the actuator;
An actuator control device, comprising: an acceleration limiter that limits an acceleration reference value to the actuator to a preset maximum acceleration value or less.   2. The actuator control device according to claim 1, wherein the disturbance observer has an infinite pole. The acceleration limiter includes a disturbance compensation acceleration value obtained by a disturbance estimated value from the disturbance observer, a feedback reference acceleration value of the trajectory tracking control unit, and a feedforward acceleration reference value of the trajectory tracking control unit 3. The acceleration reference value to the actuator is limited to the maximum acceleration value when the first value obtained by summing the values exceeds the maximum acceleration value . Actuator control device. The acceleration limiter sets the first value as an acceleration reference value to the actuator when the first value does not exceed the maximum acceleration value ,
When the first value exceeds the maximum acceleration value , a value obtained by multiplying the disturbance compensation acceleration value by a first adjustment rate, and a value obtained by multiplying the acceleration reference value of the feedback system by a second adjustment rate. And each of the first, second and third values so that a second value obtained by summing up the acceleration reference value of the feedforward system and a value obtained by multiplying the third adjustment rate is the maximum acceleration value. 4. The actuator control device according to claim 3, wherein the adjustment rate is adjusted.   5. The actuator control device according to claim 4, wherein the acceleration limiter fixes the value of the first adjustment rate to 1 regardless of the magnitude of the first value. A disturbance observer for estimating the disturbance to the actuator is provided, the disturbance estimated value obtained by the disturbance observer is converted into a disturbance compensation current value, and the current reference value obtained by converting the acceleration reference value to the actuator is used as the disturbance compensation. An acceleration control step for performing robust acceleration control of the actuator by performing feedback compensation with a current value ;
A tracking control step of calculating the acceleration reference value for controlling the tracking of the actuator;
An actuator control method, comprising: an acceleration limiting step of limiting an acceleration reference value to the actuator to a preset maximum acceleration value or less.   The actuator control method according to claim 6, wherein a pole of the disturbance observer is made infinite. The acceleration limiting step includes a disturbance compensation acceleration value obtained by a disturbance estimated value from the disturbance observer, a feedback reference acceleration value of the trajectory tracking step, and a feedforward acceleration reference value of the trajectory tracking step. 8. The actuator control method according to claim 6, wherein when the first value obtained by summing exceeds the maximum acceleration value , an acceleration reference value to the actuator is limited to the maximum acceleration value . 9. In the acceleration limiting step, when the first value does not exceed the maximum acceleration value , the first value is set as an acceleration reference value to the actuator,
When the first value exceeds the maximum acceleration value , a value obtained by multiplying the disturbance compensation acceleration value by a first adjustment rate, and a value obtained by multiplying the acceleration reference value of the feedback system by a second adjustment rate. And each of the first, second and third values so that a second value obtained by summing up the acceleration reference value of the feedforward system and a value obtained by multiplying the third adjustment rate is the maximum acceleration value. 9. The actuator control method according to claim 8, wherein the adjustment rate is adjusted.   10. The actuator control method according to claim 9, wherein the acceleration limiting step fixes the value of the first adjustment rate to 1 regardless of the magnitude of the first value.