JP4991708B2 - 光音響システムにおける波長効果により構造の特性を測定する方法および装置 - Google Patents
光音響システムにおける波長効果により構造の特性を測定する方法および装置 Download PDFInfo
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- JP4991708B2 JP4991708B2 JP2008517531A JP2008517531A JP4991708B2 JP 4991708 B2 JP4991708 B2 JP 4991708B2 JP 2008517531 A JP2008517531 A JP 2008517531A JP 2008517531 A JP2008517531 A JP 2008517531A JP 4991708 B2 JP4991708 B2 JP 4991708B2
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- 238000000034 method Methods 0.000 title claims description 11
- 230000000694 effects Effects 0.000 title description 8
- 230000005855 radiation Effects 0.000 claims description 39
- 239000000523 sample Substances 0.000 claims description 35
- 230000003287 optical effect Effects 0.000 claims description 23
- 238000012545 processing Methods 0.000 claims description 4
- 230000005670 electromagnetic radiation Effects 0.000 claims 4
- 238000002310 reflectometry Methods 0.000 description 12
- 239000000463 material Substances 0.000 description 7
- 239000010409 thin film Substances 0.000 description 7
- 238000005259 measurement Methods 0.000 description 5
- 230000005540 biological transmission Effects 0.000 description 4
- 238000001514 detection method Methods 0.000 description 3
- 238000002604 ultrasonography Methods 0.000 description 3
- PMHQVHHXPFUNSP-UHFFFAOYSA-M copper(1+);methylsulfanylmethane;bromide Chemical compound Br[Cu].CSC PMHQVHHXPFUNSP-UHFFFAOYSA-M 0.000 description 2
- 239000013078 crystal Substances 0.000 description 2
- 229910004298 SiO 2 Inorganic materials 0.000 description 1
- 229910002370 SrTiO3 Inorganic materials 0.000 description 1
- 230000002745 absorbent Effects 0.000 description 1
- 239000002250 absorbent Substances 0.000 description 1
- 238000013459 approach Methods 0.000 description 1
- 229910002113 barium titanate Inorganic materials 0.000 description 1
- 238000012790 confirmation Methods 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 239000010408 film Substances 0.000 description 1
- 230000003993 interaction Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 239000013307 optical fiber Substances 0.000 description 1
- 230000000704 physical effect Effects 0.000 description 1
- 238000012552 review Methods 0.000 description 1
- 229910052594 sapphire Inorganic materials 0.000 description 1
- 239000010980 sapphire Substances 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 230000001360 synchronised effect Effects 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/1702—Systems in which incident light is modified in accordance with the properties of the material investigated with opto-acoustic detection, e.g. for gases or analysing solids
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
- G01N21/1702—Systems in which incident light is modified in accordance with the properties of the material investigated with opto-acoustic detection, e.g. for gases or analysing solids
- G01N2021/1706—Systems in which incident light is modified in accordance with the properties of the material investigated with opto-acoustic detection, e.g. for gases or analysing solids in solids
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Description
ポンプ第1放射を前記構造に印加するステップと、
前記ポンプ第1放射に対して時間シフトしたプローブ第2放射を前記構造に印加するステップと、
前記構造での反射または通過後の前記第2放射を検出して、反射または通過後の前記第2放射を表す信号を発生するステップと、
前記信号内の振幅ジャンプを確認するステップと、
波長の関数として第1のジャンプのプロフィールを得るように、前記第2放射の波長を変化させるステップと、
前記第1のプロフィールを、波長および前記構造の厚さと光学指数の関数に依存する理論的な第2のプロフィールと比較するステップと、
前記構造の厚さおよび光学指数に関係する値を推論するステップと、を備える。
Claims (8)
- 構造の特性を測定する装置であって、
異なる波長で放射を出力するように適合され、出力手段からポンプ第1放射およびプローブ第2放射を発生する放射発生手段(1,2)と、
前記放射発生手段と前記構造の間で、前記プローブ第2放射と前記ポンプ第1放射の間に、時間シフトを発生する時間シフト発生手段(3)と、
前記構造からの反射またはその通過後の前記プローブ第2放射を検出して、解析される信号を発生する検出器手段(6)と、
前記信号を処理するプロセッサ手段(7)と、を備え、
前記プロセッサ手段(7)は、前記信号の振幅がジャンプを生じる時間差を確認し、前記信号の振幅の前記時間差の前後の違いをジャンプの振幅とし、前記ジャンプの振幅を前記異なる波長の関数として決定し、前記ジャンプの振幅を前記ジャンプの振幅の変化の理論的なモデルと波長の関数として比較し、そして前記理論的なモデルの特徴的な波長について、前記構造の厚さおよび前記構造内の放射伝播速度に関係する特徴値を決定する、ことを特徴とする装置。 - 前記異なる波長で電磁放射を発生する放射発生手段は、少なくとも1つの波長調整可能なレーザ源を備えることを特徴とする請求項1に記載の装置。
- 前記異なる波長で電磁放射を発生する放射発生手段は、少なくとも1つの連続した光を出射する放射手段を備えることを特徴とする請求項1に記載の装置。
- 前記プローブ第2放射は、前記構造の層の少なくとも2つの界面と相互作用するようにされていることを特徴とする請求項1に記載の装置。
- 前記異なる波長に対応する波長範囲に渡って前記放射を送る1組の光学手段をさらに備えることを特徴とする請求項1に記載の装置。
- 前記異なる波長で電磁放射を発生する放射発生手段は、2台の波長調整可能なレーザ源を備えることを特徴とする請求項1に記載の装置。
- 前記異なる波長で電磁放射を発生する放射発生手段は、少なくとも1つの固定レーザ源と1つの波長調整可能なレーザ源とを備えることを特徴とする請求項1に記載の装置。
- 構造の特性を測定する方法であって、
ポンプ第1放射を前記構造に印加するステップと、
前記ポンプ第1放射に対して時間シフトしたプローブ第2放射を前記構造に印加するステップと、
前記構造での反射または通過後の前記プローブ第2放射を検出して、反射または通過後の前記プローブ第2放射を表す信号を発生するステップと、
前記信号内の振幅のジャンプを確認するステップと、
前記ジャンプの振幅を波長の関数として定義した第1のプロフィールを得るように、前記プローブ第2放射の波長を変化させるステップと、
前記第1のプロフィールを、波長および前記構造の厚さと光学指数の関数に依存する理論的な第2のプロフィールと比較するステップと、
前記構造の厚さおよび光学指数に関係する値を推論するステップと、を備えることを特徴とする方法。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR0551673 | 2005-06-20 | ||
FR0551673A FR2887334B1 (fr) | 2005-06-20 | 2005-06-20 | Dispositif et procede de caracterisation de structure par effet de longueur d'onde dans un systeme photo-acoustique |
PCT/FR2006/001386 WO2006136690A1 (fr) | 2005-06-20 | 2006-06-19 | Dispositif et procede de caracterisation de structure par effet de longueur d'onde dans un systeme photo-acoustique |
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JP2008544269A JP2008544269A (ja) | 2008-12-04 |
JP4991708B2 true JP4991708B2 (ja) | 2012-08-01 |
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JP2008517531A Active JP4991708B2 (ja) | 2005-06-20 | 2006-06-19 | 光音響システムにおける波長効果により構造の特性を測定する方法および装置 |
Country Status (5)
Country | Link |
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US (1) | US7852488B2 (ja) |
EP (1) | EP1893976B1 (ja) |
JP (1) | JP4991708B2 (ja) |
FR (1) | FR2887334B1 (ja) |
WO (1) | WO2006136690A1 (ja) |
Cited By (2)
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KR102226094B1 (ko) * | 2019-12-31 | 2021-03-11 | 한국과학기술원 | 3d 프린팅 공정 중 펨토초 레이저 빔을 이용하여 프린팅 대상물의 적층 품질을 검사하는 방법, 장치 및 이를 구비한 3d 프린팅 시스템 |
KR102262247B1 (ko) * | 2019-12-31 | 2021-06-09 | 한국과학기술원 | 3d 프린팅 공정의 펨토초 레이저 기반 초음파 계측 장치 및 이를 구비한 3d 프린팅 시스템 |
Families Citing this family (8)
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FR2887334B1 (fr) * | 2005-06-20 | 2007-08-24 | Centre Nat Rech Scient | Dispositif et procede de caracterisation de structure par effet de longueur d'onde dans un systeme photo-acoustique |
FR2935845B1 (fr) | 2008-09-05 | 2010-09-10 | Centre Nat Rech Scient | Cavite optique amplificatrice de type fabry-perot |
FR2939524B1 (fr) * | 2008-12-10 | 2011-03-11 | Centre Nat Rech Scient | Dispositif et procede d'imagerie par detection non-lineaire |
US9048632B1 (en) | 2013-03-15 | 2015-06-02 | Board Of Trustees Of Michigan State University | Ultrafast laser apparatus |
FR3020683B1 (fr) | 2014-04-30 | 2021-09-10 | Menapic | Dispositif et procede de caracterisation d'une interface d'une structure |
FR3030787B1 (fr) * | 2014-12-23 | 2017-01-27 | Centre Nat Rech Scient | Procede de re-focalisation d'un montage optique d'analyse d'echantillons |
US11415456B2 (en) * | 2015-09-15 | 2022-08-16 | The Board Of Regents Of The University Of Texas System | Electromagnetic dosimeter |
US11668644B2 (en) | 2021-03-30 | 2023-06-06 | Onto Innovation Inc. | Opto-acoustic measurement of a transparent film stack |
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JPH0726816B2 (ja) * | 1991-05-23 | 1995-03-29 | 新日本製鐵株式会社 | 透明薄膜の厚さ及び音速の同時測定法 |
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- 2005-06-20 FR FR0551673A patent/FR2887334B1/fr active Active
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- 2006-06-19 WO PCT/FR2006/001386 patent/WO2006136690A1/fr not_active Application Discontinuation
- 2006-06-19 US US11/922,536 patent/US7852488B2/en active Active
- 2006-06-19 EP EP06778618.6A patent/EP1893976B1/fr active Active
- 2006-06-19 JP JP2008517531A patent/JP4991708B2/ja active Active
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
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KR102226094B1 (ko) * | 2019-12-31 | 2021-03-11 | 한국과학기술원 | 3d 프린팅 공정 중 펨토초 레이저 빔을 이용하여 프린팅 대상물의 적층 품질을 검사하는 방법, 장치 및 이를 구비한 3d 프린팅 시스템 |
KR102262247B1 (ko) * | 2019-12-31 | 2021-06-09 | 한국과학기술원 | 3d 프린팅 공정의 펨토초 레이저 기반 초음파 계측 장치 및 이를 구비한 3d 프린팅 시스템 |
US11815447B2 (en) | 2019-12-31 | 2023-11-14 | Korea Advanced Institute Of Science And Technology | Femtosecond laser-based ultrasonic measuring apparatus for 3D printing process and 3D printing system having the same |
US11858040B2 (en) | 2019-12-31 | 2024-01-02 | Korea Advanced Institute Of Science And Technology | Method of inspecting printing quality of 3D printing object using femtosecond laser beam during 3D printing process, and apparatus and 3D printing system for the same |
Also Published As
Publication number | Publication date |
---|---|
JP2008544269A (ja) | 2008-12-04 |
EP1893976A1 (fr) | 2008-03-05 |
WO2006136690A1 (fr) | 2006-12-28 |
FR2887334A1 (fr) | 2006-12-22 |
US7852488B2 (en) | 2010-12-14 |
EP1893976B1 (fr) | 2017-10-04 |
US20080315131A1 (en) | 2008-12-25 |
FR2887334B1 (fr) | 2007-08-24 |
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