JP4989988B2 - Optical system driving device and laser scanning device - Google Patents

Description

  The present invention relates to an optical system driving apparatus that moves an optical element by electromagnetic force, and also relates to a laser scanning apparatus.

  Japanese Patent Application Laid-Open No. 2003-177348 discloses an apparatus in which a lens holder provided with a scanning lens is supported by a plurality of leaf springs in an actuator that scans a laser beam of an in-vehicle radar. In this apparatus, the scanning lens is supported by a leaf spring, thereby simplifying the apparatus configuration and reducing the cost.

  In this apparatus, the plate spring and the yoke constituting the magnetic circuit are fixed to the fixed base by fitting the unevenness. The leaf spring and the yoke may be fixed by insert molding.

Further, a lens support unit and a drive unit are disposed on the side of the optical axis. Since no member is arranged on the optical axis, the assembly is excellent. Further, by arranging the actuator components on the side of the optical axis, the size can be reduced.
JP 2003-177348 A

  If the fixing to the fixing base is only an uneven fitting, the fitting portion may be deformed and detached when heat or humidity is applied over a long period of use. The fixed base has a complicated shape and is made of a synthetic resin. However, a crack may occur due to a creep phenomenon and may come off. In particular, when used for in-vehicle use, the environment of temperature and humidity is severe and the possibility increases.

  If insert molding is performed, the risk of detachment is reduced, but the mold for molding is expensive. There is a problem that the molding cycle becomes long and the man-hour for setting the insert part is generated, so that the molding cost is increased and the cost is increased.

  In recent years, in order to improve the accuracy of distance measurement, it is required to control the projection position, that is, the position control of the projection lens. In order to control the position of the projection lens, it is necessary to apply feedback control. To increase the response speed, it is necessary to widen the control band to Takagi.

  In the apparatus disclosed in Japanese Patent Laid-Open No. 2003-177348, since the support means and the drive means are arranged on one side of the lens, it is difficult to make the drive point at which the drive force works coincide with the center of gravity of the movable part. If the driving point and the center of gravity of the movable part do not match, the resonance mode of the support means such as a spring appears, and the control band cannot be sufficiently widened, so that the performance of the apparatus is deteriorated. A balancer or the like can be provided so that the center of gravity and the drive point coincide with each other. However, when the balancer is provided, the movable part becomes large and the apparatus becomes large.

  In order to avoid this, support means and drive means may be provided on both sides of the lens. Thereby, the center of gravity and the drive point can be easily matched to improve the characteristics. By the way, in order to make the shape of light have desired characteristics, in addition to the lens to be moved, an optical element such as a lens or a waveguide is often required. At this time, in order to reduce the size, it is necessary to fix these optical elements to the fixed base.

  Regarding the fixing of the optical element to the fixed base, in the case of fitting such as fixing of the leaf spring and the yoke constituting the magnetic circuit, if the heat or humidity is applied over a long period of use, the fitting portion may be deformed and detached. The fixed base has a complicated shape and is made of a synthetic resin. However, a crack may occur due to a creep phenomenon and may come off. In particular, when used for in-vehicle use, the environment of temperature and humidity is severe and the possibility increases.

  Even in insert molding, the risk of detachment is reduced as in the case of fixing the leaf spring and the yoke constituting the magnetic circuit, but the mold for molding is expensive. There is a problem that the molding cycle becomes long and the man-hour for setting the insert part is generated, so that the molding cost is increased and the cost is increased.

  The present invention has been made in consideration of such a situation, and an object of the present invention is to provide an optical system driving device in which components are fixed with high reliability and low cost while being downsized. .

  One aspect of the present invention is an optical system driving device used in an in-vehicle distance measuring device. An optical system driving apparatus according to the present invention includes a first optical element, a second optical element, a first holder provided with the first optical element, and the first holder moved perpendicularly to the optical axis. A support member that supports the support member; a second holder on the fixed side to which the support member is fixed; a magnet for driving the first holder; and a metal that forms a magnetic circuit in cooperation with the magnet. And a yoke, and the second optical element is sandwiched and fixed between the second holder and the metal yoke.

  One aspect of the present invention is a laser scanning device used in an in-vehicle ranging device. A laser scanning device according to the present invention includes the above-described optical system driving device, and scans laser light with the first optical element.

  According to the present invention, there is provided an optical system driving device in which components are fixed with high reliability and low cost while being downsized.

  Hereinafter, embodiments of the present invention will be described with reference to the drawings.

<First Embodiment>
1 to 14 show a laser scanning apparatus which is an example of an optical system driving apparatus according to a first embodiment of the present invention. 1 to 3 are perspective views of the laser scanning device viewed from different angles, and FIGS. 4 and 5 are cross-sectional perspective views of the entire laser scanning device taken along line AA in FIG. 6, respectively. 6 is a cross-sectional view of the entire laser scanning device cut along line BB in FIG. 5, FIG. 7 is an exploded perspective view of the laser scanning device, and FIGS. 8 and 9 are viewed from different angles, FIG. 10 is a cross-sectional view of the entire biaxial actuator section taken along the line CC in FIG. 5, and FIGS. 11 and 12 are different from each other. FIG. 13 is an exploded perspective view of a spring receiving portion set that constitutes a part of the biaxial actuator portion set, and FIG. 14 is an in-vehicle use that uses a laser scanning device. It is a figure explaining the example of a ranging device.

  As shown in FIGS. 5 and 10, the lens 5 is adhered and fixed to the stepped portion 8 of the holder 7 in the Z direction. The holder 7 is made of polyphenylene sulfide resin containing glass. A convex portion 9 is provided at the + X side end of the holder 7. The azimuth coil 15 is an air core wound with a copper clad aluminum wire, and is bonded and fixed to the holder 7 in such a manner that the air core portion at the center thereof is engaged with the convex portion 9. Convex portions 10 a and 10 b are provided at both ends in the Y direction of the holder 7. The elevation coils 16a and 16b are air cores wound with a copper clad aluminum wire, and the center air core portion thereof is bonded and fixed to the holder 7 in such a manner that the center of the air core part is engaged with the convex portions 10a and 10b.

  The substrate 17 is also bonded and fixed to the holder 7. Although not shown, the ends of the azimuth coil 15 and the elevation coils 16 a and 16 b are soldered to the substrate 17.

  The holder 20 is attached to the −Z side of the holder 7, and the stepped portion 21 of the holder 20 is abutted against the tip end portion 14 of the holder 7 and is fixedly bonded. The holder 20 is made of a liquid crystal polymer containing carbon fibers. The stepped portion 23 and the rib-shaped portion 22 of the holder 20 face the lens 5 and the substrate 17 with a very small gap of about 0.05 mm. By applying an adhesive to the gap portion, the gap is filled with the adhesive, and the lens 5 and the substrate 17 are not only bonded and fixed to the holder 7 but also fixed between the holder 7 and the holder 20. As a result, it is fixed more firmly. Furthermore, if heat caulking is used together for fixing the holder 7 and the holder 20, the durability can be further improved.

  As shown in FIG. 11, the holder 20 is provided with slits 24a and 24b. The slit 24a extends in the Y direction, and the slit 24b extends in the X direction. That is, the longitudinal direction of the slit 24a is the Y direction, and the longitudinal direction of the slit 24b is the X direction. In order to allow light to pass through the slits 24a and 24b, the holder 7 is provided with a hole 12 and the substrate 17 is provided with a hole 19 as shown in FIGS.

  The group consisting of the holder 7 and the parts fixed to the holder 7 is referred to as the movable unit 27.

  As shown in FIG. 11, the substrate 17 is provided with holes 18a to 18h (18a and 18e to 18h are not shown by shadows) through which the wire springs 28a to 28h are passed. The wire springs 28a to 28h are made of metal, for example, beryllium copper. The wire springs 28a to 28h are inserted into the holes 18a to 18h of the substrate 17, and one end is fixed to the substrate 17 by soldering (solder is not shown). As shown in FIG. 12, the holder 7 also has holes 13a to 13h through which the wire springs 28a to 28h are passed. As shown in FIG. 11, the holder 20 is also provided with holes 25 a to 25 d through which the wire springs 28 a to 28 h are passed. Soldering of the wire springs 28a to 28h to the substrate 17 is performed using the holes 25a to 25d after the assembly of the movable portion 27 is completed. As a result, the bonding work between the holder 7 and the holder 20 is performed without the wire springs 28a to 28h, and the wire springs 28a to 28h are prevented from being bent or broken, thereby improving workability.

  The wire springs 28 a to 28 h are electrically connected to the azimuth coil 15 and the elevation coils 16 a and 16 b through the substrate 17. Wire springs 28c and 28d are connected to one end of the azimuth coil 15, and wire springs 28g and 28h are connected to the other end. That is, two wire springs are connected in parallel to the azimuth coil 15. The elevation coils 16a and 16b are connected in series via the substrate 17. Similarly, wire springs 28a and 28b are connected to one end, and wire springs 28e and 28f are connected to the other end.

  Next, the spring receiving portion set 29 will be described. As shown in FIGS. 5 and 13, the lens 6 is inserted into the stepped portion 37 of the hole 36 of the spring receiver 30. The spring receiver 30 is made of polyphenylene sulfide resin containing glass. On the −Z side of the lens 6, a pressing spring 45, which is an elastic member, is fitted on the stepped portion 38, and on the −Z side, a holding ring 46 is fitted on the stepped portion 39. The holding spring 45 is made of silicone rubber. The retaining ring 46 is made of glass-filled polyphenylene sulfide resin.

  A substrate 48 is disposed on the + Z side of the spring receiver 30, and an iron yoke 55 is disposed on the −Z side of the spring receiver 30. The yoke 55 is fixed to the spring receiver 30 with screws 54a and 54b. The board 48 is provided with holes 52a and 52b through which the screws 54a and 54b are passed, and the spring receiver 30 is provided with holes 33a and 33b through which the screws 54a and 54b are passed. The yoke 55 is provided with screw holes 57a and 57b corresponding to female screw portions for receiving the screws 54a and 54b. The board 48 and the yoke 55 are brought into close contact with the spring receiver 30 by passing the screws 54a and 54b through the holes 52a and 52b of the board 48 and the holes 33a and 33b of the spring receiver 30 and screwing into the screw holes 57a and 57b of the yoke 55. It is fixed. That is, the base plate 48 and the spring receiver 30 are sandwiched and fixed by the heads of the two screws 54 a and 54 b and the yoke 55.

  As shown in FIG. 9, the substrate 48 is positioned by the engagement of the holes 53 a and 53 b of the substrate 48 and the convex portions 40 a and 40 b of the spring receiver 30. The hole 53a is a long hole, and prevents the assembly by dimensional deviation due to tolerance. In the center of the substrate 48, a hole 50 for passing light is provided.

  On the other hand, as shown in FIGS. 10 and 13, the yoke 55 is positioned in the Y direction such that the −Y side surface 65 of the spring receiver 30 and the −Y side end 61 of the yoke 55 are aligned. In the X direction, positioning is performed by engagement of the convex portion 34 of the spring receiver 30 and the hole 60 of the yoke 55.

  If there is nothing, the presser ring 46 described above protrudes from the spring receiver 30 in the −Z direction due to the elasticity of the presser spring 45. As shown in FIG. 5, the pressing ring 46 is pressed in the + Z direction by the yoke 55, the end surface on the −Z side of the pressing ring 46 is in the same position as the −Z side surface of the spring receiver 30, and the elasticity of the pressing spring 45. Thus, the lens 6 is fixed. In addition to the substrate 48 and the yoke 55, the lens 6 is also fixed by two screws 54a and 54b.

  A light emitting diode 47 is fitted into the spring receiver 30 in a cylindrical hole 32 at the back of the hole 31, and the legs are soldered through the holes 51 a and 51 b of the substrate 48. The light emitting diode 47 is fixed to the spring receiver 30 such that the spring receiver 30 is sandwiched between the light emitting portion of the light emitting diode 47 and the substrate 48.

  In the above, the spring receiver 30 and the part composed of the parts fixed to the spring receiver 30 are referred to as the spring receiver part set 29.

  The opposite side of the wire springs 28 a to 28 h soldered to the movable portion 27 is inserted into the holes 41 a to 41 d of the spring receiver 30 through the holes 56 a to 56 d of the yoke 55.

  The inside of the holes 41a to 41d of the spring receiver 30 is represented by a portion D in FIG. The hole 41d becomes a thin hole 43g on the + Z side via the inclined portion 44d, and further becomes a hole 42g having a diameter slightly larger than the wire spring 28g on the + Z side. Two wire springs 28g and 28h are inserted into the hole 41d, but the number of holes 41d is one. On the other hand, one hole 43g, 43h, 42g, and 42h (43h and 42h are not shown) are provided for each wire spring, and the hole 41d is divided into two at the back. The holes 43g and 43h are connected to the conical side surface from the hole 41d.

  The holes 43g and 43h are filled with an ultraviolet curable silicone gel 67. Filling is performed from the hole 56 d of the yoke 55 and the hole 41 d of the spring receiver 30. The filling operation is performed with the −Z side up, and the silicone gel 67 is guided to the holes 43g and 43h by the inclined portion 44d shaped like a conical side surface. Then, the operation is finished when the silicone gel 67 protrudes into the inclined portion 44d shaped like a conical side surface. At this time, the silicone gel flows accurately through the holes 42g and 42h. However, the silicone gel has a high viscosity and is difficult to flow into a narrow gap even before curing. Therefore, the silicone gel is prevented from flowing into the holes 42g and 42h by quickly working and curing with ultraviolet rays.

  The other wire springs 28a to 28f and the holes 41a to 41c of the spring receiver 30 have the same configuration. The vibration of the wire springs 28a to 28h is damped by the silicone gel.

  The wire springs 28a to 28h protrude from the spring receiver 30 in the + Z direction, are inserted into the holes 49a to 49h of the substrate 48, and are fixed by soldering. The board 48 is connected to a control board (not shown). The azimuth coil 15 and the elevation coils 16a and 16b are connected to the control board via wire springs 28a to 28h. A light emitting diode 47 is also connected to the control board.

  The movable portion 27 is supported by the wire springs 28a to 28h so as to be movable in the X direction and the Y direction. That is, the movable portion 27 is supported by the wire springs 28a to 28h so as to be movable in the direction perpendicular to the optical axis. If the movable part 27 is simply supported so as to be movable in the X direction and the Y direction, four wire springs are sufficient. The reason why the number of wire springs is 8 is that the wiring of the azimuth coil 15 and the wiring of the elevation coils 16a and 16b are arranged in parallel, and the electrical resistance value of the wire spring portion is reduced. Yes.

  Next, as shown in FIG. 12, the iron yoke 68 to which the azimuth magnet 78 and the elevation magnets 79a and 79b are bonded covers the movable portion 27 from the -Z direction as shown in FIG. It is fixed to the receiving part set 29. The yoke 68 is attracted to the yoke 55 by the attraction force of the azimuth magnet 78 and the elevation magnets 79a and 79b. At this time, as shown in FIG. 8, the corner portions 76a and 76b of the yoke 68 are combined with the convex portion 63 of the yoke 55, and the corner portions 74a and 74b of the yoke 68 and the convex portion of the yoke 55 are combined as shown in FIG. Positioning is performed by combining 62a and 62b. The yoke 55 and the yoke 68 form a magnetic circuit in cooperation with the azimuth magnet 78 and the elevation magnets 79a and 79b.

  The Y dimension of the portion of the yoke 55 to which the yoke 68 is attached (the distance between the −Y side end 61 and the + Y side ends 64a and 64b) is the Y dimension of the spring receiver 30 (the −Y side surface 65 and the + Y side surface 66). The distance is larger by about 0.1 mm. As shown in FIG. 10, on the −Y side, the −Y side surface 65 of the spring receiver 30, the −Y side end 61 of the yoke 55, and the contact portion 75 of the yoke 68 are in the same position with respect to the Y direction. On the side, the + Y-side ends 64a and 64b of the yoke 55 and the contact portions 77a and 77b of the yoke 68 are outside the + Y-side surface 66 of the spring receiver 30. This prevents the contact portions 77a and 77b of the yoke 68 from coming into contact with the + Y side surface 66 of the spring receiver 30 and not coming into contact with the + Y side ends 64a and 64b of the yoke 55 due to deviation due to tolerance. An efficient magnetic circuit is formed by contact with 68.

  The yoke 68 is attracted to the yoke 55 only by the attraction force of the azimuth magnet 78 and the elevation magnets 79a and 79b, but screws 84a and 84b as shown in FIGS. Is screwed to the spring receiver 30. The screws 84 a and 84 b are inserted into holes 35 a and 35 b provided in the spring receiver 30, and are fastened to the screw holes 70 a and 70 b of the yoke 68. The holes 35a and 35b are sized so that the heads of the screws 84a and 84b can enter, but the diameter is narrow so that only the screw portion passes through the back.

  As shown in FIGS. 8 and 11, the substrate 68 is screwed to the yoke 68 by screw holes 71a and 71b of the yoke 68, holes 82a and 82b of the substrate 80, and screws 83a and 83b.

  As shown in FIG. 12, position sensors 81a and 81b whose output current changes depending on the light incident position are soldered to the substrate 80. As shown in FIG. 5, the position sensors 81 a and 81 b have a shape protruding to the + Z side in the hole 72 of the yoke 68. The light receiving surfaces 85 a and 85 b of the position sensors 81 a and 81 b face the light emitting diode 47.

  Although not shown, the board 80 is connected to a control board (not shown) via an electric wire, and the position sensors 81a and 81b are connected to the control board.

  As is apparent from FIG. 4, the position sensor 81a is disposed at the slit 24a, and the position sensor 81b is disposed at a position facing the slit 24b. Light from the light emitting diode 47 spreads and enters both the slits 24a and 24b. The yoke 55 in the middle is provided with a hole 58 for passing light. As the movable portion 27 moves, the slits 24a and 24b move, but the light from the light emitting diode 47 is sufficiently spread in the moving range, and the light passing through the slits 24a and 24b reaches the position sensors 81a and 81b. It reaches. The light passing through the slits 24a and 24b moves with the movement of the movable portion 27, so that the incident position of the light on the position sensors 81a and 81b moves, and the position of the movable portion 27 is detected.

  The light emitting diode 47 emits infrared light, and the light is not actually visible. As the position sensors 81a and 81b, those having sensitivity in the infrared region of 760 to 1100 nm are used.

  Each of the position sensors 81a and 81b is a one-dimensional sensor that detects a position in one direction. The position sensor 81a facing the slit 24a whose Y direction is the longitudinal direction is a slit whose detection direction is the X direction and whose X direction is the longitudinal direction. In the position sensor 81b facing 24b, the detection direction is the Y direction.

  By moving the lens 5 mounted on the movable portion 27, the irradiation position of light from a laser diode 1 to be described later is moved. However, the irradiation position becomes a position with a tilt of 0 with respect to the optical axis of the lens 5. The position of the substrate 80 is adjusted and fixed in the XY plane so that the outputs of the position sensors 81a and 81b indicate the 0 position when the desired position is reached. For this reason, the holes 82a and 82b of the substrate 80 are large in view of the adjustment allowance.

  As shown in FIG. 12, the holder 7 is provided with convex portions 11a to 11d, and the holder 20 is provided with convex portions 26a to 26d as shown in FIG. When the movable portion 27 moves, the former hits the hole 59 of the yoke 55 and the latter hits the hole 73 of the yoke 68, which serves as a stopper that limits the amount of movement. Since the convex portions are at the four corners and the holes are also square, movement in the X direction, the Y direction, and both directions can be restricted. If one side is provided on both sides in the Z direction, the movable part 27 rotates around the Y axis in the X direction movement, and around the X axis in the Y direction movement, and the wire springs 28a to 28h may be bent. It is because there is sex.

  The assembly configured as described above is called a biaxial actuator 87.

  As shown in FIGS. 3 and 7, the biaxial actuator 87 is screwed to the main body 89 by screws 88a to 88c. The main body 89 is made of glass-filled polyphenylene sulfide resin. The screws 88 a to 88 c are screwed into the screw holes 69 a to 69 c of the yoke 68 of the biaxial actuator 87. Although not shown, the spring receiver 30 is provided with a recess for escaping the ends of the screws 88a to 88c. A hole is formed in the main body 89 corresponding to the screws 88a to 88c.

  The main body 89 is provided with a convex portion 90 in the + Y direction. The position adjustment of the substrate 80 of the biaxial actuator 87 is performed after the biaxial actuator 87 is attached to the main body 89. As shown in FIGS. 2 and 6, since the screw 83 b is not covered with the convex portion 90, it can be normally tightened even after the biaxial actuator 87 is attached to the main body 89. On the other hand, a hole 91 is provided in the convex portion 90 in order to prevent the screw 83a from being hidden behind the convex portion 90. The screw 83a can be tightened through the hole 91 with a screwdriver.

  The main body 89 is provided with a hole 95 opened in a surface 92 that forms an angle of 45 degrees with respect to the XY plane and the YZ plane, and the mirror 4 is bonded to the surface 92. As shown in FIG. 5, the mirror 4 has a reflective surface on the surface 96 on the hole 95 side.

  As shown in FIGS. 6 and 7, a lens frame 98 is fixed to the main body 89 by screws 103. The screw 103 is passed through the hole 126 of the main body 89, and the tip is screwed into the screw hole 102 of the lens frame 98. The lens frame 98 is fixed to the main body 89 with a so-called pulling screw. The lens 2 is bonded and fixed to the stepped portion 100 of the hole 99 of the lens frame 98, and the lens 3 is bonded and fixed to the stepped portion 101.

  The lens frame 98 is inserted into the hole 93 of the main body 89. The diameter of the hole 93 is slightly larger than the diameter of the lens frame 98. When the lens frame 98 is moved in the X direction along the hole 93 and the lens 2 and the lens 3 are moved, the size of the spot of light emitted from the present apparatus changes. Therefore, the lens frame 98 is moved in the X direction so that the spot size is adjusted to a predetermined size. For this adjustment, the hole 126 of the main body 89 is a long hole extending in the X direction.

  As shown in FIGS. 1 and 7, the laser diode 1 is further fixed in the hole 93 of the main body 89. The laser diode 1 is press-fitted into a brass plate 104. Screws 106 a and 106 b are passed through holes 105 a and 105 b of the plate 104 and screwed into screw holes 94 a and 94 b of the main body 89, so that the plate 104 is screwed to the main body 89. At this time, the position of the plate 104 is adjusted in the YZ plane so that the laser diode 1 and the optical axes of the lenses 2 and 3 coincide. Although not shown, the laser diode 1 is connected to a laser driver substrate.

  As shown in FIGS. 4 and 5, the laser light emitted from the laser diode 1 passes through the lenses 2 and 3, the optical path is bent 90 degrees by the mirror 4, reaches the lens 5, and further passes through the lens 6. At this time, the light emitted from the laser diode 1 first passes through the hole 93 in the convex portion 90 of the main body 89, passes through the hole 99 in the lens frame 98, and then returns to the hole 93. The hole 95 is entered through 107, the direction is changed by the mirror 4, and the hole 95 is advanced. Light exits the body 89 for the first time at the outlet 108 in the hole 95. The convex portion 90 of the main body 89 has a convex portion 97 in the + Z direction so that the distance from the exit 108 to the incident surface 86 of the lens 5 is reduced. Further, the wall 128 of the convex portion 97 has a rough surface. This is to prevent the light from the laser diode 1 from leaking and not to reflect it. The wavelength of the laser diode 1 is 870 nm and infrared rays, and the light is actually not visible.

  Next, the operation of the laser scanning apparatus of the present embodiment configured as described above will be described.

  FIG. 14 simply shows an in-vehicle distance measuring device in which the laser scanning device of the present embodiment is used.

  Laser light emitted from the laser diode 1 reaches the lens 5 of the holder 7 supported by the wire spring 28 via the lenses 2 and 3. The lens 5 is swung left and right as indicated by an arrow 110 by moving the holder 7 left and right as indicated by an arrow 109. In FIG. 14, the mirror 4 is omitted. Further, the light finally passes through the lens 6 to be finally formed into a desired beam shape and is irradiated to the range indicated by the arrow 111. The light 114 reflected by the irradiated light 112 hitting the obstacle 113 reaches the photodetector 116 via the light receiving lens 115, and the distance to the obstacle 113 is calculated by an electric circuit. Actually, the lens 5 is swung not only right and left but also vertically, and light is swung up and down.

  The mechanism for moving the lens 5 up, down, left and right will be described in more detail.

  As shown in FIG. 10, the elevation coils 16 a and 16 b are sandwiched between the elevation magnets 79 a and 79 b fixed to the yoke 68 and the yoke 55. Since the mechanism of operation in the elevation coil 16a and the elevation magnet 79a and the mechanism of operation in the elevation coil 16b and the elevation magnet 79b are the same, here, the elevation coil 16a and the elevation magnet 79a will be described.

  The polarity of the elevation magnet 79a is as shown in FIG. The boundaries of the magnetic poles are indicated by broken lines for easy understanding. The boundary portion of an actual magnet is a neutral region having no magnetic pole having a width of 0.2 to 0.4 mm.

  Magnetic fields in the directions of arrows 119 and 120 act on the sides 117 and 118 of the elevation coil 16a. The magnetic flux emitted from the elevation magnet 79a as indicated by the arrow 119 enters the yoke 55, proceeds in the yoke 55 as indicated by the arrow 121, and returns to the elevation magnet 79a as indicated by the arrow 120. Further, a part returns to the elevation magnet 79a without going to the yoke 55 as shown by the arrow 122.

  Since the direction of the current flowing through the sides 117 and 118 of the elevation coil 16a is reverse and the direction of the acting magnetic field is also reverse as shown by arrows 119 and 120, the direction of the generated force is the same. The direction of the force is the Y direction perpendicular to the direction of the current and the direction of the magnetic field.

  Although forces in the X direction are generated on the remaining sides 123 and 124 (see FIG. 11) of the elevation coil 16a, the directions of the forces received from the magnetic fields indicated by the arrows 119 and 120 are reversed and cancel each other. The coil 16a does not move in the X direction.

  The holder 20 is not covered on the elevation magnet 79a side of the elevation coil 16a. This is because the space for placing the holder 20 is cut down to bring the elevation coil 16a closer to the elevation magnet 79a and the distance 125 therebetween is reduced. The yoke 55 is disposed on the + Z side of the elevation coil 16a, but the elevation magnet 79a is not disposed. Therefore, the magnetic field strength is greater on the side closer to the elevation magnet 79a and on the −Z side. When the distance 125 is reduced, a larger force is received from the magnetic field for the same current, so that power consumption can be reduced.

  Similarly, a force in the Y direction is generated for the elevation coil 16b. They are connected in series so that the forces in the Y direction generated by the elevation coils 16a and 16b are in the same direction. As a result, by passing a current through the elevation coils 16a and 16b, the movable portion 27 and the lens 5 attached thereto can be moved in the Y direction.

  The same applies to the azimuth coil 15 and the azimuth magnet 78 except that the Y direction becomes the X direction, and by passing a current through the azimuth coil 15, the movable portion 27 and the lens 5 attached thereto can be moved in the X direction.

  As described above, the position of the movable portion 27 is detected by detecting the light passing through the slits 24a and 24b of the movable portion 27 by the position sensors 81a and 81b, and the movable portion 27 is moved based on the position information. The

  According to the present embodiment, the lens 6 is fixed to the spring receiver 30 in such a manner that the lens 6 is sandwiched between the spring receiver 30 and the yoke 55 by the screws 54 a and 54 b via the pressing spring 45 and the pressing ring 46.

  By arranging the lens 6 on the spring receiver 30, the device can be miniaturized, and not only simply bonded, but also by being pinched and fixed, it can be firmly fixed, and there is a concern that it may be detached from long-term use. And reliability is improved. By using the yoke 55 that forms the magnetic circuit and the spring receiver 30 as the member that sandwiches the lens 6, an increase in parts can be prevented and the price can be reduced. Preventing the increase in parts also contributes to further miniaturization.

  Further, in the present embodiment, since the screw holes 57a and 57b are provided in the yoke 55 and the screws 54a and 54b are screwed in, it is not necessary to separately provide a component having a female screw portion, and the cost can be further reduced. Yes.

  When the yoke 55 is not used, for example, the presser ring 46 is enlarged and a female screw portion into which the screws 54a and 54b are screwed is provided. When the retaining ring is made of a synthetic resin, it is necessary to insert a nut in order to prevent the internal thread portion to which a large force is continuously applied from being destroyed by creep, resulting in an increase in the part price. When the presser ring is made of metal, it is not necessary to insert a nut, but the shape needs to be made by cutting instead of pressing, resulting in a high part.

  In the present embodiment, the yoke 55 is fixed to the spring receiver 30 with screws 54a and 54b, but instead of using screws, it may be fixed with caulking pins. In that case, a crimping pin is provided on the yoke 55, and the spring receiver 30 is sandwiched and fixed between the yoke 55 and the head of the crimping pin. Thereby, like the screw, the lens 6 can be fixed with high reliability.

  A holding spring 45 is disposed between the yoke 55 and the lens 6. As already described, if the yoke 55 is not provided, the holding ring 46 protrudes in the Z direction from the mounting surface of the yoke 55, and the holding spring 45 is compressed when fixed, and the lens 6 is fixed by its elasticity. It has become. Thereby, even if the dimension of each part in the Z direction varies, the lens 6 can be stably fixed. Regardless of the dimensional variation, it can be fixed more reliably and the variation can be tolerated, so that the required accuracy for each component is reduced and the price can be reduced.

  The holding spring 45 is made of silicone rubber, but may be made of metal or synthetic resin. The packing-shaped holding spring as in this embodiment has a simple shape and is easy to manufacture at low cost. However, since the force continues to be applied to the whole, there is a possibility that the elasticity may be lost due to long-term use. In the case of a spring shape having a bent portion, if the stress applied to the portion is appropriately set within an allowable range, the elasticity can be stably maintained even for long-term use, and the reliability can be improved. In the case of a spring shape, it is easy to obtain these values by calculation, and it is easy to obtain theoretical support. If it is a metal spring, it is excellent in a characteristic and can improve reliability more. Synthetic resin springs are easier to manufacture and less expensive than metal springs.

  In the present embodiment, one ends of wire springs 28 a to 28 h that support the movable portion 27 are soldered to the substrate 48, and the substrate 48 is fixed to the + Z side of the spring receiver 30 by screws 54 a and 54 b. As described above, the yoke 55 is fixed to the -Z side of the spring receiver 30 with the screws 54a and 54b. The yoke 55 and the spring receiver 30 are provided with holes 59 and 36 for passing light and holes 56a to 56d and 41a to 41d for passing the wire springs 28a to 28h, respectively.

  Since the wire springs 28a to 28h are attached to the substrate 48 by soldering, the attachment reliability is higher than the adhesion. Further, since the substrate 48 is fixed in close contact with the spring receiver 30 with screws 54a and 54b so that the spring receiver 30 is sandwiched between the yoke 33, the substrate 48 can be used for a long period of time compared to simple bonding. It is hard to come off and is highly reliable.

  By the way, the hole 36 is provided in the spring receiver 30 and light is allowed to pass therethrough, so that the size can be reduced. However, since the hole 36 in the spring receiver 30 and 41a to 41d for passing the wire springs 28a to 28h are opened, the rigidity of the spring receiver 30 is lowered. When used for a long period of time, sag occurs, and the strength of the fixing portion of the wire springs 28a to 28h is lowered, and the characteristics may be deteriorated.

  In the present embodiment, holes 59 and 56 a to 56 d are provided in the yoke 55, and the rigidity of the spring receiver 30 is reinforced by bringing the spring receiver 30 into close contact with the yoke 55. As a result, a decrease in strength is suppressed even for long-term use, and reliability is improved while achieving miniaturization.

  As in the present embodiment, the laser scanning device used in the vehicle-mounted distance measuring device is for vehicle-mounted use, and therefore it is necessary to maintain stable performance over a long period of time. Therefore, it is important to ensure high reliability.

<Second Embodiment>
FIGS. 15 and 16 show a laser scanning apparatus according to the second embodiment of the present invention. FIG. 15 is a cross-sectional view corresponding to FIG. 5, and FIG. 16 is a trihedral view of the spring shown in FIG. In FIG. 15, the same components as those in the first embodiment are denoted by the same reference numerals.

  In the present embodiment, the mounting portion of the lens 6 is different from that of the first embodiment. In the present embodiment, the lens 6 is not directly fixed to the spring receiver 30 but is bonded to the holder 131 and inserted into the hole 36 of the spring receiver 30. A metal spring 132 is disposed on the −Z side of the lens 6, and a pressing ring 46 is disposed on the −Z side.

  The holding ring 46 protrudes from the spring receiver 30 in the −Z direction if there is nothing due to the elasticity of the spring 132. As shown in FIG. 15, the retaining ring 46 is retained in the + Z direction by the yoke 55, and the end surface on the −Z side of the retaining ring 46 is at the same position as the −Z side surface of the spring receiver 30, The lens 6 is fixed.

  As shown in FIG. 16, the spring 132 is made by pressing stainless steel, and the top portion 134 is bent in the −Z direction. The holding ring 46 is provided with a recess 133 in which the spring 132 is received.

  According to the present embodiment, as described as a modification in the first embodiment, since the spring 132 is made of metal, the reliability of the spring 132 is improved and the mounting reliability of the lens 6 is increased.

  The lens 6 is fixed to the spring receiver 30 through the holder 131. Since various components are fixed to the spring receiver 30, the shape tends to be complicated, but the holder 131 remains a simple shape optimized for fixing the lens 6. The workability at the time of attachment is improved. As a result, work mistakes are prevented and the reliability of fixing is also improved.

  The present invention is not limited to the embodiment described above, and may be variously modified. There are various arrangements of magnets and coils. For example, although the magnet is opposed to one side of the azimuth coil and the elevation coil, the magnet may be disposed on both sides and the coil may be sandwiched between the magnets. Although light from one light emitting diode is put into two slits, one light emitting diode may be arranged for one slit. Further, the light emitting diode may be made small, and the light emitting diode may be mounted on the movable part.

  The optical system is not limited to the above-described embodiment, and various optical systems may be applied. In the embodiment, the laser beam emitted from the lens is received by another lens different from this, but the laser beam emitted from the lens is received again by the same lens, and the received light is, for example, an optical path. It is good also as a device structure which serves as a laser scanning device and a light-receiving device separately detected by a dividing element.

  The lens sandwiched and fixed by the yoke and the spring holder is a lens farther from the laser diode than the lens for scanning light, but the present invention may be applied to a lens closer to the laser diode. . Further, instead of the lens, an optical element such as a waveguide may be fixed.

  The embodiments of the present invention have been described above with reference to the drawings. However, the present invention is not limited to these embodiments, and various modifications and changes can be made without departing from the scope of the present invention. Also good.

1 is a perspective view of a laser scanning device according to a first embodiment of the present invention. FIG. 2 is a perspective view of a laser scanning device viewed from an angle different from that in FIG. 1. FIG. 3 is a perspective view of the laser scanning device viewed from an angle different from both FIG. 1 and FIG. 2. It is a cross-sectional perspective view of the whole laser scanning apparatus cut by the AA line of FIG. It is sectional drawing of the whole laser scanning apparatus cut | disconnected by the AA line of FIG. It is sectional drawing of the whole laser scanning apparatus cut | disconnected by the BB line of FIG. It is a disassembled perspective view of the laser scanning apparatus shown in FIGS. It is a perspective view of the biaxial actuator part group shown in FIG. It is a perspective view of the biaxial actuator part group seen from the angle different from FIG. It is sectional drawing of the whole biaxial actuator part group cut | disconnected by CC line of FIG. FIG. 10 is an exploded perspective view of the biaxial actuator unit set shown in FIGS. 8 and 9. It is a disassembled perspective view of the biaxial actuator part group seen from the angle different from FIG. FIG. 13 is an exploded perspective view of the spring receiving portion set shown in FIGS. 11 and 12. It is a figure explaining the example of the vehicle-mounted ranging apparatus using the laser scanning apparatus shown in FIGS. It is sectional drawing of the laser scanning apparatus by the 2nd Embodiment of this invention corresponded in FIG. FIG. 16 is a trihedral view of the spring shown in FIG. 15.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 ... Laser diode, 2 ... Lens, 3 ... Lens, 4 ... Mirror, 5 ... Lens, 6 ... Lens, 7 ... Holder, 8 ... Stepped part, 9 ... Convex part, 10a, 10b ... Convex part, 11a-11d ... convex part, 12 ... hole, 13a-13h ... hole, 14 ... tip part, 15 ... azimuth coil, 16a, 16b ... elevation coil, 17 ... substrate, 18a-18h ... hole, 19 ... hole, 20 ... holder, 21 ... Stepped portion, 22 ... Rib-shaped portion, 23 ... Stepped portion, 24a, 24b ... Slit, 25a-25d ... Hole, 26a-26d ... Projection, 27 ... Movable portion, 28 ... Wire spring, 28a-28h ... Wire spring, 29 ... Spring receiving part group, 30 ... Spring receiving, 31 ... Hole, 32 ... Cylindrical hole, 33 ... Yoke, 33a, 33b ... Hole, 34 ... Protrusion, 35a, 35b ... Hole, 36 ... Hole, 37 ... Stepped portion, 38 ... Stepped portion, 39 ... Step Part, 40a, 40b ... convex part, 41a-41d ... hole, 42g, 42h ... hole, 43g, 43h ... hole, 44d ... inclined part, 45 ... pressing spring, 46 ... pressing ring, 47 ... light emitting diode, 48 ... substrate 49a to 49h ... hole, 50 ... hole, 51a, 51b ... hole, 52a, 52b ... hole, 53a, 53b ... hole, 54a, 54b ... screw, 55 ... yoke, 56a, 56d ... hole, 57a, 57b ... screw Hole, 58 ... Hole, 59 ... Hole, 60 ... Hole, 61 ... End, 62a, 62b ... Projection, 63 ... Projection, 64a, 64b ... End, 65 ... Surface, 66 ... Surface, 67 ... Silicone gel, 68 ... Yoke, 69a-69c ... Screw hole, 70a, 70b ... Screw hole, 71a, 71b ... Screw hole, 72 ... Hole, 73 ... Hole, 74a, 74b ... Square part, 75 ... Contact part, 76a, 76b ... Square part , 77a, 77b ... contact portions, 8 ... Azimuth magnet, 79a, 79b ... Elevation magnet, 80 ... Substrate, 81a, 81b ... Position sensor, 82a, 82b ... Hole, 83a, 83b ... Screw, 84a, 84b ... Screw, 85a, 85b ... Light receiving surface, 86 ... Incident surface, 87... Biaxial actuator, 88a to 88c... Screw, 89... Main body, 90 .. convex portion, 91. Surface, 97 ... convex portion, 98 ... mirror frame, 99 ... hole, 100 ... stepped portion, 101 ... stepped portion, 102 ... screw hole, 103 ... screw, 104 ... plate, 105a, 105b ... hole, 106a, 106b ... Screw, 107 ... Hole, 108 ... Exit, 109 ... Arrow, 110 ... Arrow, 111 ... Arrow, 112 ... Light, 113 ... Obstacle, 114 ... Light, 115 ... Light receiving lens, 116 ... Photo detector, 117 ... side, 118 ... side, 119 ... arrow, 120 ... arrow, 121 ... arrow, 122 ... arrow, 123 ... side, 124 ... side, 125 ... distance, 126 ... hole, 128 ... wall, 131 ... holder, 132 ... spring 133 ... concave, 134 ... top.

Claims (10)

A first optical element;
A second optical element;
A first holder comprising the first optical element;
A support member that movably supports the first holder perpendicular to the optical axis;
A second holder on the fixed side to which the support member is fixed;
A magnet for driving the first holder;
In an optical system driving device used in an in-vehicle distance measuring device provided with at least a metal yoke that forms a magnetic circuit in cooperation with the magnet,
An optical system driving device characterized in that the second optical element is fixed in such a manner as to be sandwiched between the second holder and the metal yoke.   The optical system driving apparatus according to claim 1, wherein the second optical element is fixed to the second holder via a third holder.   The optical system driving apparatus according to claim 1, wherein the second optical element is fixed to the second holder through an elastic member.   The optical system driving apparatus according to claim 3, wherein the elastic member is formed of silicone rubber.   The optical system driving apparatus according to claim 3, wherein the elastic member is made of a metal spring.   The optical system driving apparatus according to claim 3, wherein the elastic member is formed of a synthetic resin spring.   The metal yoke is fixed to the second holder with a screw, the female yoke is provided with a female screw portion, and the second holder is sandwiched between the metal yoke and the head of the screw. The optical system driving apparatus according to claim 1, wherein the optical system driving apparatus is fixed.   The metal yoke is fixed to the second holder with a caulking pin, the caulking pin is provided on the metal yoke, and the second holder is sandwiched between the metal yoke and the head of the caulking pin. The optical system driving device according to any one of claims 1 to 6, wherein the optical system driving device is fixed.   A laser scanning device used in a vehicle-mounted distance measuring device including the optical system driving device according to any one of claims 1 to 8, wherein the first optical element scans laser light.   The optical system driving apparatus or laser scanning apparatus according to claim 1, wherein the first and second optical elements are optical elements having a lens function.

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