JP4989672B2 - Solar cell inspection equipment - Google Patents

Description

  The present invention relates to an apparatus for inspecting general performance of a solar cell, such as a solar cell, a string in which solar cells are connected in a row, and a solar cell panel in which a plurality of strings are arranged in parallel.

  As a method of utilizing solar energy, a silicon type solar cell is known. In the production of solar cells, it is important to evaluate the performance of whether the solar cells have the desired power generation capability. In performance evaluation, output characteristics are usually measured.

  The output characteristic is performed as a photoelectric conversion characteristic for measuring the current-voltage characteristic of the solar cell under light irradiation. Solar light is desirable as the light source, but a solar simulator is used because the irradiation intensity varies depending on the weather. In the solar simulator, a xenon lamp, a metal halide lamp, or the like is used instead of sunlight. Further, when these light sources are turned on for a long time, the light amount changes due to a temperature rise or the like. Therefore, the output characteristic curve of the solar cell is obtained by plotting the collected data using the flash light of these lamps with the horizontal axis representing voltage and the vertical axis representing current (see, for example, Patent Document 1).

  As a method different from the solar simulator, Patent Document 2 proposes a method of generating electroluminescence (EL) by applying a voltage in the forward direction to a polycrystalline silicon solar cell element. By observing the EL emitted from the solar cell element, the current density distribution can be understood, and the defect of the solar cell element can be known from the non-uniform current density distribution. That is, a portion that does not emit light can be determined as a defective portion, and if the area of the defective portion is less than a predetermined amount, it can be determined that it has a predetermined power generation capability.

  FIG. 11 is a diagram schematically showing the configuration of the inspection apparatus described in Patent Document 2. As shown in FIG. The inspection apparatus 10 includes a dark room 11, a CCD camera 12 provided above the dark room 11, a power supply 14 for supplying a current to the solar cells 13 placed on the floor of the dark room 11, And an image processing device 15 for processing an image signal.

  The dark room 11 has a window 11a. A finder 12a of the CCD camera 12 is provided here, and a photographed image of the CCD camera 12 can be confirmed by looking into it with the naked eye. A personal computer is used as the image processing device 15.

JP2007-88419 WO / 2006/059615

  The inspection apparatus 10 shown in FIG. 11 places the solar battery cell 13 downward and takes a picture with a camera from above. The EL emitted from the solar battery cell 13 has a wavelength of 1,000 nm to 1,300 nm. It is faint light and can only be detected in the dark room 11. If the object to be measured is a single solar battery cell, the dark room 11 may be small because it is about 100 mm square.

However, when it becomes a solar cell, it becomes a size of about 2 m × 1 m, and the dark room 11 needs to be large enough to accommodate it. Moreover, since the solar cell used as a to-be-measured object cannot be image | photographed with the camera 12 unless it puts into a dark room, you must provide the door which can take in and out a solar cell in a dark room. When the inspection apparatus is configured to be carried into such a dark room, it is necessary to ensure light shielding when the installed door is closed. Moreover, it is necessary to provide the positioning member and conveyance guide member of the solar cell carried in the inspection apparatus in the darkroom. Furthermore, it is necessary to provide an energizing means for passing a current through the solar cell in the darkroom. Such a structure is complicated and expensive.
Furthermore, the following problems occur when such an inspection device is incorporated as one device of a solar cell production line. When the entire solar cell is photographed and inspected by the camera due to the increase in the size of the solar cell, the distance between the solar cell and the camera is set longer when the camera is provided below the solar cell. There is a need to. Therefore, when trying to unify the solar cell pass line (height dimension from the factory floor to the position where the solar cell is transported) on the production line, it is not necessary to dig down the factory floor only at the place where this inspection device is installed. There are some things that must not be done. Therefore, the incidental cost when the apparatus is introduced becomes expensive.

  The present invention has been made in view of such circumstances, and provides an inspection device for a solar cell that has a simple structure and is inexpensive, and is an EL device that emits EL by flowing a forward current through the solar cell. It is aimed.

  In order to achieve the above object, a solar cell inspection apparatus of the present invention includes a dark room having an opening on an upper surface thereof, a support unit that is provided on the upper surface of the dark room and on which a solar cell to be measured is placed, An inspection device for a solar cell having a camera provided inside a dark room, wherein the opening and a gap between the opening and a boundary between the solar cell placed on the support means and into the dark room It is characterized by having a light shielding cover for shielding incoming light.

  In order to achieve the above object, a solar cell inspection apparatus of the present invention includes a dark room having a flat upper surface, a transparent plate provided on the upper surface of the dark room, on which a solar cell to be measured is placed, An inspection device for a solar cell having a camera provided in the darkroom, wherein the darkness is obtained from the transparent plate and a gap between the transparent plate and the solar cell placed on the transparent plate. It is characterized by having a light shielding cover for shielding light entering the room.

  The light-shielding cover of the inspection apparatus can be configured such that an openable / closable door for loading / unloading a solar cell as an object to be measured is provided on the side surface, and an openable / closable door is provided on the upper surface of the light-shielding cover. It can also be set as the provided structure.

  The inspection apparatus may have a configuration in which a moving mechanism for the photographing camera is provided, or a configuration in which a reflection plate is provided inside the dark room of the inspection apparatus and inclined with respect to the upper surface of the dark room. You can also.

  In the solar cell inspection apparatus of the present invention, when a solar cell to be measured is placed on the upper surface of the dark room from the outside of the dark room, light is emitted from the gap between the dark room upper surface and the solar cell that is the measured object by the light shielding cover. It can be shielded and a camera in the darkroom can take an image. Since current is passed through the solar cell during shooting, the solar cell emits EL light. By photographing this light emission state with a camera and analyzing it with an image processing apparatus connected to the camera, it is possible to know the presence or absence of a solar cell defect.

Since the openable door is provided on the upper surface of the light shielding cover of the inspection apparatus of the present invention, the connector can be easily connected to the electrode of the solar battery when a forward current flows through the solar battery cell. Furthermore, since an openable / closable door is provided on the side surface of the light shielding cover of the inspection apparatus, it is possible to easily carry in and out the solar cell as the object to be measured.
Further, the light shielding cover of the inspection apparatus of the present invention makes it easy to automate the work of carrying in / out the object to be measured and connecting the connector to the electrode of the solar cell when it is installed on the solar cell production line.

The solar cell can be inspected by placing it on the upper surface of the dark room from outside the dark room, and there is no need to provide a door for taking in and out the solar cell as the object to be measured. Therefore, the dark room can be reduced in size and the structure can be simplified.
In particular, since the reflecting plate is provided so as to be inclined with respect to the upper surface of the dark room, the camera can be disposed on the side surface of the dark room. Therefore, the height of the dark room can be lowered even when the solar cell as the object to be measured is enlarged. Thereby, the pass line of a manufacturing line can be unified with the pre-process and post-process of the inspection apparatus of this invention.

  Furthermore, in the case of a solar cell, in a production line (manufacturing apparatus such as a laminating apparatus), it is conveyed with its light receiving surface facing down. Therefore, the solar cell can be mounted on the inspection device without being inverted by providing the inspection device of the present invention with a support means for the solar cell that is the object to be measured on the upper surface of the dark room and a transparent plate on the upper surface of the dark room.

It is a top view which shows the inspection apparatus of the solar cell of this invention. It is a front view which shows the inspection apparatus of the solar cell of this invention. It is a left view which shows the inspection apparatus of the solar cell of this invention. It is explanatory drawing of the light shielding cover of the inspection apparatus of the solar cell of this invention, (a) is a top view, (b) is a front view. It is explanatory drawing of the light-shielding cover of the inspection apparatus of the solar cell of this invention, (a) is a side view seen from the carrying-in direction (A direction) of a to-be-measured object, (b) is the carrying-out direction of a to-be-measured object ( It is the side view seen from (B direction). It is a top view of the light-shielding cover of the inspection apparatus of the solar cell of this invention, and is explanatory drawing of the state which the openable door of the upper surface opened. It is explanatory drawing of the structure of the solar cell measured with the inspection apparatus of this invention, (a) is the top view described so that the photovoltaic cell inside a solar cell might be understood, (b) is the sectional drawing. . It is a top view which shows the inspection apparatus of the solar cell of this invention which provided the reflecting plate in the dark room. It is a left view which shows the inspection apparatus of the solar cell of this invention which provided the reflecting plate in the dark room. It is explanatory drawing of the camera moving mechanism used for the inspection apparatus of this invention, (a) is a top view, (b) is a front view, (c) is a right view. It is a figure which shows typically the structure of the inspection apparatus of the conventional solar cell.

  Hereinafter, embodiments of the present invention will be described with reference to the accompanying drawings.

<1> Object to be measured (solar cell)
First, an example of an object to be measured 200 that is an object handled by the inspection apparatus of the present invention will be described. FIG. 7 is an explanatory view of the configuration of the solar cell measured by the inspection apparatus of the present invention, (a) is a plan view described so that the solar cells inside the solar cell can be seen, and (b) It is sectional drawing.

  As shown in the plan view of FIG. 7A, the solar cell as the device to be measured 200 forms a string 25 in which a plurality of square solar cells 28 are connected in series by lead wires 29, and further the string. Are connected by a plurality of rows of lead wires 29.

  The solar cell that is the device under test 200 may be a single solar cell 28 or a string 25 in which a plurality of solar cells 28 are linearly connected. It may be a solar cell panel 30 in which the solar cells 28 are arranged in a matrix.

  Further, as shown in FIG. 7B, the cross-sectional structure of the object to be measured is interposed between the back material 22 arranged on the upper side and the transparent cover glass 21 arranged on the lower side through the fillers 23 and 24. It has a configuration in which a plurality of strings 25 are sandwiched.

  For the back material 22, for example, a material such as PET or fluorine resin is used. For the fillers 23 and 24, for example, EVA resin (polyethylene vinyl acetate resin) or the like is used. The string 25 has a configuration in which the solar cells 28 are connected via the lead wires 29 between the electrodes 26 and 27 as described above.

  Such a solar cell is obtained by laminating components by laminating constituent members as described above and applying a pressure under a vacuum heating state by using a laminating apparatus or the like to cause a crosslinking reaction of EVA.

  Moreover, as the DUT 200, a solar cell generally called a thin film type can be targeted.

  In this typical thin-film structure example, a power generation element composed of a transparent electrode, a semiconductor, and a back electrode is previously deposited on a transparent cover glass disposed on the lower side. And, such a thin film type solar cell has the same structure in which the transparent cover glass is arranged downward, the solar cell element on the glass is covered with a filler, and the back material is further covered on the filler. Thus, it is obtained by laminating.

  Thus, the thin-film solar cell as the DUT 200 is simply changed to a power generation element on which a crystal cell is deposited, and the basic sealing structure is the same as that of the crystal cell described above.

<2> Overall Structure of Inspection Apparatus FIG. 1 is a plan view showing the configuration of the inspection apparatus of the present invention, FIG. 2 is a front view, and FIG. 3 is a left side view. In the solar cell inspection apparatus 100 of the present invention shown in these drawings, an opening 112 is provided in a square box-shaped dark room 110 and a flat upper surface 111 thereof. The opening 112 can be provided with a transparent plate to prevent dust and foreign matter from entering the inside of the dark room and to prevent the object to be measured from falling into the dark room. The transparent plate may be configured to attach a transparent plate made of synthetic resin such as acrylic resin or glass. A camera 120 that inspects and measures a solar cell that is the device under test 200 is provided in the darkroom. The camera may be used while being fixed in a dark room, or may be used by moving the camera 120. In that case, a moving mechanism may be provided. The camera moving mechanism will be described later.

The dark room 110 is made of a light-shielding material that prevents light from entering the dark room 110 except for the opening (transparent plate) 112 on the upper surface 111. However, if the entire top surface 111 including the device under test 200 is covered with a light shielding unit after a solar cell is placed on the top surface 111 as the device under test 200, the entire top surface 111 may be an opening or transparent. It may be a plate. The four side surfaces and the bottom surface other than the top surface are light-shielding members.
In the case where a transparent plate is not provided in the opening 112 of the dark room upper surface 111, a support means for a solar cell that is an object to be measured is provided. The support means may be a conveyance guide mechanism for the object to be measured, which will be described later, or may be provided with a member that can support both ends and four corners of the solar cell as the object to be measured.

<3> Conveyance and positioning of measured object A conveying device 220 is provided on the upper surface 111 to carry the measured object 200 into the inspection apparatus, and to deliver it to the pre-process and post-process. The conveying device can use a chain conveyor or belt conveyor activated by an electric motor. The transport device 220 is provided with a transport guide portion 221R / L having a function of transporting and guiding the object 200 to be measured. The distance between the conveyance guide portions 221 </ b> R and 221 </ b> L can be changed according to the size of the DUT 200.

  When the solar cell, which is the object to be measured, is transported from the previous step of the inspection apparatus of the present invention, it is transferred to the transport guide portion 221R / L of the inspection apparatus by the carry-in conveyor 210 of the inspection apparatus. The DUT 200 is moved and conveyed by the conveyor device 220 of the conveyance guide unit. Accordingly, the cover glass 21 on the lower surface does not come into contact with the transparent plate 112 on the upper surface of the inspection apparatus 100 while the object to be measured 200 is being conveyed and measured. The DUT 200 is transported through the inspection apparatus and positioned at the measurement position by the following method.

On the side surface of the conveyance guide portion 221R / L, there is a positioning bracket that can be taken in and out by an actuator or the like, and the object to be measured 200 is positioned in the conveyance direction by projecting the positioning bracket. The positioning metal fittings may be configured not to be taken in and out from the side surface of the conveyance guide member 221R / L, but to be configured to be moved up and down from the upper side of the guide member, or to be swung down from the guide member.
Positioning is completed, the conveyor device is stopped, and inspection is started. The inspection method will be described later. When the inspection is completed, the conveyor device 220 is activated, and the object to be measured 200 is transferred to the carry-out conveyor 230 and conveyed to the next process.

  Moreover, as a conveyance means of the solar cell which is a to-be-measured object, a structure as shown in FIG. 10 may be sufficient. A pair of guide members 114 on the upper surface of the dark room are formed in an elongated rail shape having a rectangular cross section, and a pair of guide members 114 are provided on the upper surface of the inspection apparatus 100 of the present invention along the flow direction of the measurement object 200. A plurality of rollers are arranged on the inner side surface of each guide member 114, and the DUT 200 is moved and conveyed on the rollers. The moving means may be manual or may be configured to drive the roller by an electric motor or the like.

<4> Camera for Shooting EL light emitted from the DUT 200 is weak light having a wavelength of 1,000 nm to 1,300 nm, and is emitted in a dark room, and the camera 120 for photographing the weak light. . Therefore, it is necessary to use a CCD camera having high sensitivity to weak light as the photographing camera 120.

  1, 2, and 3 of the embodiment, the camera moving mechanism is not shown, but by providing the camera moving mechanism, the camera 120 is moved to an arbitrary position in the xy plane, and the object 200 to be measured is moved. It is also possible to shoot the entire surface from corner to corner. Further, the camera 120 can be fixed and used without providing a moving mechanism of the camera 120.

<5> Camera Movement Mechanism Inside Dark Room FIG. 10 shows the configuration of the camera movement mechanism. In the dark room 110, there are a camera 120 and a y-axis guide part 130 that moves the camera 120 in the y-axis direction. A motor 132 is provided at one end of the y-axis guide part 130, and the camera 120 can be advanced and retracted in the y-axis direction by rotating the motor 132.

  Both ends of the y-axis guide part 130 are supported by the x-axis guide parts 140 and 140. The y-axis guide part 130 can advance and retreat along the x-axis direction on the x-axis guide part by the motor 142 and the timing belts 144 on both sides. In the above configuration, the x-axis guide portions 140 and 140, the y-axis guide portion 130, the motors 132 and 142, and the timing belt 144 constitute a drive mechanism of the camera 120. As the x-axis guide portions 140 and 140 and the y-axis guide portion 130, various linear actuators can be used. In this embodiment, a ball screw and a motor are used.

  By controlling the rotation of the motors 132 and 142 of the drive mechanism, the camera 120 can be moved to an arbitrary position in the xy plane and the entire surface of the object 200 can be imaged. ing.

  The driving method is not limited to the above-described embodiment using a motor and a ball screw, and various linear actuators can be used.

<6> Reflector in Dark Room The inspection apparatus may be configured such that a reflector 190 is provided in the dark room so as to be inclined with respect to the dark room upper surface 111. FIG. 8 is a plan view showing the configuration of an inspection apparatus provided with a reflector in the darkroom, and FIG. 9 is a left side view thereof. The reflection plate is used by processing a metal plate such as aluminum or stainless steel. However, the material is not limited to metal, and any material having high reflectivity without transmitting and absorbing light can be used. This reflector is supported by the reflector support member 191 so as to be inclined with respect to the opening (transparent plate) 112. Thereby, the camera 120 attached to the side surface of the dark room can take an image of the object 200 to be measured placed on the opening (transparent plate) 112. In FIG. 9 of the embodiment, the inclination angle is approximately 45 °, but is not limited to this angle.

  8 and 9, the moving mechanism of the camera 120 is not provided. The camera 120 is used by being fixed to the camera storage unit 121. Note that by providing the moving mechanism described with reference to FIG. 10, the camera 120 can be moved to an arbitrary position in the zx plane, and the entire surface of the DUT 200 can be imaged. In this case, the camera storage unit 121 in FIGS. 8 and 9 may be configured to extend in the x direction by a moving stroke so that the camera can move.

<7> Other devices In addition to the above, although not shown, the power supply 14 and the image processing device 15 using a personal computer shown in the conventional example of FIG. 11 are provided. These are stored in the control device 400 of FIG. Furthermore, the movement mechanism of the camera 120 is controlled using a personal computer, and the entire solar cell as the object to be measured 200 can be photographed as a single photograph or photographed for each individual solar battery cell 28. it can.

<8> Method of Using Inspection Device Using the solar cell as an example of the object to be measured 200, a method of using the solar cell inspection device of the present invention will be described.

  The solar cell manufactured and carried out by the laminating apparatus or the like is then conveyed by the carry-in conveyor 210 to the front of the solar cell inspection device of the present invention. The transported solar cell is transported and guided between the pair of transport guide portions 221R and 221L and reaches the dark room 110. Thereafter, the positioning in the conveyance direction is performed by projecting a positioning bracket provided on the side surface of the conveyance guide portion 221R / L so that it can be taken in and out by an actuator or the like.

  A light shielding cover 240 is provided so that light does not enter the dark room 110 from a gap between the opening (or transparent plate) 112 of the dark room upper surface 111 and the DUT 200.

  The solar cell that is the device under test 200 that has reached a predetermined position on the upper surface 111 of the darkroom is stopped on the opening (transparent plate) 112 of the darkroom 110 with the transparent cover glass plate facing downward, A connector is connected between the two. Since the DUT 200 is smaller than the opening (transparent plate) 112, light enters from the surroundings into the dark room. Therefore, the entire upper surface of the dark room 110 is covered from above the DUT 200 with a light shielding cover, which will be described later. Next, a forward current is passed through the device under test 200 from the power source. As a result, the DUT 200 emits EL, and the camera 120 takes a picture.

  When the entire object to be measured 200 is photographed by the inspection apparatus 100 and inspected by the image, the camera 120 is placed at substantially the center of the bottom of the dark room 110 without providing a camera moving mechanism or using a moving mechanism. It is possible to shoot with fixed position. When a reflector is used in the dark room, the camera can be fixed at the position shown in FIG. The measured object 200 in this case is any of the solar battery cell 28, a string 25 in which a plurality of solar cells are connected by lead wires, and a matrix-like solar battery panel 30 in which the strings 25 are connected by a plurality of column lead wires. Good.

  When the inspection apparatus 100 shoots the solar cells arranged in a matrix on the solar panel 30 one by one and inspects them with the images, the camera moves as shown in FIG. 10 so that the camera can be moved in the dark room. Provide a mechanism.

  The camera moving mechanism is driven by the control device 400 using a personal computer, and the camera 120 photographs the solar cells 28 arranged in a matrix on the solar cell panel 30 one by one, and is an image processing device including a personal computer. Send image data to. The image processing apparatus takes out and analyzes a portion that does not emit light from the image of each solar battery cell, determines pass / fail for each solar battery 28, and determines whether the solar battery panel 30 as a whole from the pass / fail result for all the solar battery cells. Judgment of pass or fail.

  In addition, the photographing by the camera 120 may be performed by moving the camera for each one of the solar cells, or for each of the several solar cells, or may be fixed without moving the camera, and the entire solar cell panel 30 may be used.

<9> Light-shielding cover An embodiment of the light-shielding cover of the inspection apparatus of the present invention will be described with reference to FIGS. 4, 5, and 6. 4A is a plan view of the light shielding cover, and FIG. 4B is a front view. FIG. 5A is a side view of the light shielding cover as seen from the carry-in side (A direction) of the object to be measured, and FIG. 5B is a view of the light shielding cover as seen from the unloading side of the object to be measured (B direction). FIG. FIG. 6 is an explanatory diagram of a state where the openable door on the upper surface of the light shielding cover is opened.

  As shown in FIG. 4, the light shielding cover 240 is fixed to the dark room and covers the entire upper portion of the dark room upper surface 110. 241 is an openable / closable door for carrying in and out the object to be measured, 242 is an openable / closable door on the upper surface of the light shielding cover, and 243 is a removable cover for maintenance. All of these members are made of light-shielding members. In addition, it is preferable to attach a back sheet such as a rubber sheet on the door side or the main body side of the light shielding cover so that light does not enter the joint portion between the openable door and the main body of the light shielding cover.

  The door 241 may be opened and closed automatically by an air cinder or the like, or may be opened and closed manually by an operator. When the object to be measured is transported from the previous process, moves on the carry-in conveyor and reaches just before the inspection device, the door on the entrance side opens, and the object to be measured has been brought into the inspection device, and this door closes. It has a configuration. When the inspection is completed, the door on the outlet side opens and the object to be measured 200 is carried out. In this way, during the inspection, the door for carrying in / out the object to be measured is closed, and light from the outside does not enter the part where the object to be measured is placed, or the dark room.

  An openable / closable door 242 is provided on the upper surface of the light shielding cover. The door 242 may be opened and closed automatically by an air cinder or the like, or may be configured to be opened and closed manually by an operator. The object to be measured is conveyed from the previous process, and the door 241 on the opening / closing type described above is opened. When the object to be measured is carried into the inspection apparatus and reaches a predetermined position, the door 242 is opened. When the door 242 opens, the DUT 200 appears as shown in FIG. The connector 244 in the light shielding cover is connected to the electrodes 26 and 27 of the object to be measured. When the connection is completed, the doors 241 and 242 are closed. As a result, no light enters the darkroom from the outside, so that the object to be measured is energized to emit EL light for inspection. When the inspection is completed, the door 242 is opened again, and the connector 244 is removed from the electrode. Thereafter, the exit-side door 241 is opened again, and the object to be measured is carried out of the inspection apparatus. The connection and removal of the connector to and from the electrode may be performed manually by an operator or may be automated by a robot or the like.

  It is preferable to appropriately provide an opening for maintenance on the light shielding cover of the inspection apparatus. As an example, in FIG. 4, this opening is provided as a two-dot chain line portion on the upper surface of the light shielding cover and is covered with a lid 243. However, the present invention is not limited to this, and such an opening can be appropriately provided on the upper surface or side surface of the light shielding cover by covering with a lid.

In the description of the present embodiment, the light shielding cover 240 is configured to cover the entire upper surface of the dark room and be fixed to the dark room. However, the light shielding cover 240 may be configured to be movable up and down by an actuator.
Moreover, the resin-made back material 22 of the solar cell is opaque and has sufficient light shielding properties. Further, the upper surface 111 of the dark room 110 is also composed of a light-shielding member except for the opening (transparent plate) 112. Therefore, it is also possible to adopt a configuration in which only the gap between the opening (transparent plate) 112 of the dark room 110 and the DUT 200 is covered with the light shielding member.

In the solar cell inspection apparatus 100 of the present invention, since the solar cell as the object to be measured 200 may be placed outside the dark room, a door for taking the object 200 into and out of the dark room becomes unnecessary. Further, the power source and wiring for supplying current to the solar cell may be outside the dark room 110 and is not required at all in the dark room. Therefore, the structure of the dark room 110 can be simplified.
Since the openable door is provided on the upper surface of the light shielding cover of the inspection apparatus of the present invention, the connector can be easily connected to the electrode of the solar battery when a forward current flows through the solar battery cell. Furthermore, since an openable / closable door is provided on the side surface of the light shielding cover of the inspection apparatus, it is possible to easily carry in and out the solar cell as the object to be measured.

  In addition, the light shielding cover of the inspection apparatus of the present invention makes it easy to automate the work of carrying in / out the object to be measured and connecting the connector to the electrode of the solar cell. Therefore, the inspection apparatus of the present invention is suitable for automation of a solar cell production line.

  In particular, by attaching the reflector 190 to the object to be measured 200 in an inclined manner, the height of the dark room 110 can be lowered by installing the camera sideways in the dark room, and further miniaturization of the apparatus is realized. can do. This eliminates the need for incidental work such as digging down the floor of the part where the device is installed in order to unify the pass lines of the production line.

  Furthermore, the solar cell inspection apparatus 100 of the present invention is used by being arranged on a production line such as a solar cell. At this time, the solar cell inspection device 100 is placed on the upper surface 111 of the dark room 110 with the light receiving surface of the solar cell facing downward. . In a normal processing process such as laminating a solar cell, the light receiving surface of the solar cell is transported downward, so that when it is placed on the inspection apparatus 100, it is not necessary to reverse the manufacturing process.

28 Solar Cell 30 Solar Panel 100 Solar Cell Inspection Device 110 Dark Room 111 Upper Surface 112 Opening (Transparent Plate)
114 Guide member 120 Camera 121 Camera housing part 130 Y-axis guide part 132, 142 Motor 140 X-axis guide part 144 Timing belt 190 Reflector 191 Reflector support member 200 Measured object 210 Carry-in conveyor 220 Conveyor device 221R / L Conveyance guide part 230 Unloading conveyor 240 Shading cover 241 Door 242 Door 243 Cover 244 Connector 400 Control device

Claims (10)

  A solar cell inspection apparatus comprising: a dark room having an opening on an upper surface; a support unit provided on the upper surface of the dark room for placing a solar cell serving as an object to be measured; and a camera provided in the dark room. The sun comprising: the opening and a light shielding cover for shielding light entering the dark room from a gap between the opening and the boundary between the solar cell placed on the support means Battery inspection device.   2. The solar cell inspection apparatus according to claim 1, wherein an openable / closable door for carrying in and out of the solar cell to be measured is provided on a side surface of the light shielding cover of the inspection apparatus.   The solar cell inspection apparatus according to claim 1, wherein an openable / closable door is provided on an upper surface of the light shielding cover of the inspection apparatus.   4. The solar cell inspection apparatus according to claim 1, further comprising a moving mechanism for the camera.   5. The solar cell inspection apparatus according to claim 1, further comprising a reflection plate provided inside the dark room and inclined with respect to the upper surface of the dark room.   A solar cell inspection apparatus comprising: a dark room having a flat upper surface; a transparent plate on the upper surface of the dark room on which a solar cell to be measured is placed; and a camera provided in the dark room. And a light shielding cover for shielding light entering the dark room from a gap between the transparent plate and a boundary between the transparent plate and the solar cell placed on the transparent plate. Solar cell inspection equipment.   The solar cell inspection device according to claim 6, wherein an openable / closable door is provided on a side surface of the light shielding cover of the inspection device for carrying in and out a solar cell to be measured.   The solar cell inspection device according to claim 6, wherein an openable / closable door is provided on an upper surface of the light shielding cover of the inspection device.   The solar cell inspection apparatus according to claim 6, further comprising a moving mechanism of the camera. 10. The solar cell inspection apparatus according to claim 6, further comprising a reflection plate provided inside the dark room and inclined with respect to the upper surface of the dark room. 11.

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