JP4985868B1 - Metal plate manufacturing method - Google Patents

Abstract

A method of manufacturing a metal plate, a method of manufacturing a metal electrode, a metal electrode, a charging member, and a charge eliminating member that can obtain a product shape substantially equal to a design value when forming a metal plate with protrusions by wet etching. An image forming apparatus is obtained.
A resist offset amount of a tip portion 122A of a metal electrode projection 122 is made larger than a resist offset amount of a straight portion 122B based on a radius of curvature of the tip portion 122A. For this reason, the product shape of 122 A of front-end | tip parts approaches a design value. That is, when the projection is formed by wet etching, the product shape of the projection 122 can be brought close to the design value.
[Selection] Figure 1

Description

The present invention relates to a method for producing a metal plate.

  Patent Document 1 describes a charging member having a sawtooth electrode. That is, this electrode is formed from a plate-shaped metal plate and has a sawtooth-shaped projection.

JP-A-8-137202

  An object of the present invention is to obtain a product shape substantially equal to a design value when a metal plate having protrusions is formed by wet etching.

According to a first aspect of the present invention, there is provided a method of manufacturing a metal plate, wherein a protrusion having a straight portion extending in a straight line from the distal end portion to the proximal end side is formed from the plate surface of the metal plate to the metal plate. to shaped in a direction perpendicular to the thickness direction of the metal plate a plate by wet etching, the protrusion is to form a resist covering the protrusions so as not to be eroded by wet etching the plate surface of the metal plate The resist offset amount between the edge portion of the resist and the tip portion at the tip portion is larger than the resist offset amount between the edge portion of the resist and the straight portion in the straight portion. A resist forming step of forming the resist on the plate surface of the metal plate based on a radius of curvature of the metal plate, and the metal plate on which the resist is formed in the resist forming step. Etching liquid reacted with, characterized in that it comprises, an etching step of etching the metal plate.

According to a second aspect of the present invention, there is provided the metal plate manufacturing method according to the first aspect, wherein the radius of curvature of the tip of the protrusion is r [μm], and the resist offset amount of the linear portion is s [μm]. When the resist offset amount at the tip is p [μm],
0.03r ² −3.2r + 90 + s ≦ p ≦ 0.03r ² −3.2r + 130 + s
It is characterized by satisfying the relationship.

  According to the metal plate manufacturing method of the first aspect of the present invention, the metal plate having protrusions is formed by wet etching as compared with the case where the resist offset amount at the tip portion and the resist offset amount at the straight portion are the same. In this case, a product shape substantially equal to the design value can be obtained.

  According to the method for manufacturing a metal plate of claim 2 of the present invention, compared to the case where the resist offset amount of the tip is set outside the range described in claim 2, it is effectively reduced to the design value. A nearly equal product shape can be obtained.

(A) (B) It is explanatory drawing which showed the projection pattern used for the manufacturing method of the metal electrode which concerns on embodiment of this invention, and the product shape of a protrusion. (A) (B) It is explanatory drawing which showed the protrusion pattern used for the manufacturing method of the metal electrode which concerns on the comparison form of embodiment of this invention, and the product shape of a protrusion. (A) (B) It is the top view and enlarged plan view which showed the metal electrode which concerns on embodiment of this invention. (A) (B) (C) (D) (E) (F) It is explanatory drawing which showed each process of the manufacturing method of the metal electrode which concerns on embodiment of this invention. It is the disassembled perspective view which showed the charging member which concerns on embodiment of this invention. It is the perspective view which showed the charging member which concerns on embodiment of this invention. (A) (B) It is the disassembled perspective view and perspective view which showed the static elimination member which concerns on embodiment of this invention. It is drawing which showed the result of the simulation used when determining the resist offset amount in the manufacturing method of the metal electrode which concerns on embodiment of this invention with the graph. It is drawing which showed the result of having corrected the result of the simulation used when determining the resist offset amount in the manufacturing method of the metal electrode which concerns on embodiment of this invention according to the measured value, with the graph. It is drawing which showed the tolerance | permissible_width | variety of the resist offset amount in the manufacturing method of the metal electrode which concerns on embodiment of this invention with the graph. It is drawing which showed the variation of the product shape at the time of using the manufacturing method which concerns on the case where the manufacturing method of the metal electrode which concerns on embodiment of this invention is used, and the conventional comparative example. 1 is a side view showing the vicinity of an image carrier of an image forming apparatus according to an embodiment of the present invention. 1 is a side view showing the vicinity of an image carrier of an image forming apparatus according to an embodiment of the present invention. 1 is a schematic configuration diagram illustrating an image forming apparatus according to an embodiment of the present invention. It is drawing which showed the tolerance | permissible_width | variety of the resist offset amount in the manufacturing method of the metal electrode which concerns on embodiment of this invention with the graph. It is explanatory drawing which showed the protrusion pattern used for the manufacturing method of the metal electrode which concerns on embodiment of this invention, and the product shape of a protrusion.

An example of a metal electrode manufacturing method, a metal electrode, a charging member, a charge removal member, and an image forming apparatus according to an embodiment of the present invention will be described with reference to FIGS.
[First Embodiment]
(overall structure)
As shown in FIG. 14, the image forming apparatus 10 according to the present embodiment accommodates a sheet member P as an example of a recording medium from the lower side to the upper side in the vertical direction (arrow V direction). 12, an image forming unit 14 that forms an image on a sheet member P that is provided on the storage unit 12 and is supplied from the storage unit 12, and a document reading unit 16 that is provided on the image forming unit 14 and reads a read document G And a control unit 20 that is provided in the image forming unit 14 and controls the operation of each unit of the image forming apparatus 10. In the following description, the vertical direction (arrow V direction) of the apparatus main body 10A of the image forming apparatus 10 is simply referred to as the vertical direction, and the horizontal direction (arrow H direction) is simply referred to as the horizontal direction.

  The storage unit 12 is provided with a first storage unit 22, a second storage unit 24, and a third storage unit 26 that store sheet members P having different sizes. Further, the first storage unit 22, the second storage unit 24, and the third storage unit 26 are provided with a delivery roll 32 that sends out the stored sheet member P to a conveyance path 28 provided in the image forming apparatus 10. ing.

  Further, on the downstream side in the conveyance direction of the sheet member P with respect to the delivery roll 32 in the conveyance path 28 (hereinafter sometimes simply referred to as the downstream side in the conveyance direction), a conveyance roll 34 that conveys the sheet member P one by one, and A transport roll 36 is provided. An alignment roll 38 that stops the sheet member P at one end and feeds the sheet member P to a secondary transfer position, which will be described later, at a predetermined timing on the downstream side in the conveyance direction with respect to the conveyance roll 36 in the conveyance path 28. Is provided.

  Further, the downstream portion of the conveyance path 28 provided on the lower side of the image forming unit 14 is provided on the right side surface of the image forming unit 14 from the lower left side of the image forming unit 14 in the front view of the image forming apparatus 10. The paper discharge unit 15 is provided. The conveyance path 28 is connected to a double-side conveyance path 29 through which the sheet member P is conveyed and reversed in order to form an image on both sides of the sheet member P.

  The double-sided conveyance path 29 includes a first switching member 31 that switches between the conveyance path 28 and the double-sided conveyance path 29 from the lower right side of the image forming unit 14 to the right side of the storage unit 12 in the front view of the image forming apparatus 10. The reversing unit 33 provided in a straight line in the vertical direction, the rear end of the sheet member P conveyed to the reversing unit 33 enters and is conveyed in the horizontal direction, and the reversing unit 33 and the conveying unit 37 And a second switching member 35 that is switched. The reversing unit 33 is provided with a plurality of conveyance rollers 42 at intervals, and the conveyance unit 37 is provided with a plurality of conveyance rollers 44 at intervals.

  The first switching member 31 is a member having a triangular prism shape in cross section, and the conveyance direction of the sheet member P is switched by moving the leading end portion to either the conveyance path 28 or the double-sided conveyance path 29 by a driving unit (not shown). It is like that. Similarly, the second switching member 35 is a member having a triangular prism shape in cross section, and the conveyance direction of the sheet member P is changed by moving the leading end to either the reversing unit 33 or the conveyance unit 37 by a driving unit (not shown). It is supposed to switch.

  Note that the end of the transport unit 37 on the downstream side in the transport direction is connected to the transport path 28 by a guide member (not shown). Further, a foldable manual sheet feeding unit 46 is provided on the left wall surface of the image forming unit 14, and is connected from the manual sheet feeding unit 46 to a position in front of the alignment roll 38 in the conveyance path 28. Yes.

  On the other hand, an original reading unit 16 provided on the upper side of the image forming apparatus 10 includes an original conveying device 52 that automatically conveys the read original G one by one, and a single reading that is disposed below the original conveying device 52. A platen glass 54 on which the document G is placed and a document reading device 56 that reads the read document G conveyed by the document conveying device 52 or the read document G placed on the platen glass 54 are provided.

  The document conveying device 52 has an automatic conveying path 55 in which a plurality of conveying rolls 53 are arranged, and a part of the automatic conveying path 55 is arranged so that the sheet member P passes over the platen glass 54. The document reading device 56 reads the read document G conveyed by the document conveying device 52 while being stationary at the left end of the platen glass 54, or reads the read document G placed on the platen glass 54 while moving in the horizontal direction. Is supposed to read.

  Further, the image forming unit 14 provided on the lower side of the document reading unit 16 is provided with a cylindrical image holding body 62 that forms and holds a toner image on the surface of the main body 10A of the image forming apparatus 10. ing.

  As shown in FIGS. 13 and 14, the image holding body 62 is rotated in the direction of the arrow + R (clockwise direction shown in the figure) by driving means (not shown) and holds the electrostatic latent image formed by light irradiation. It has become. A scorotron charging member 64 that charges the surface of the image carrier 62 is provided above the image carrier 62 and at a position facing the surface of the image carrier 62.

  Further, an exposure device 66 as an example of an exposure member is provided at a position downstream of the charging member 64 in the rotation direction of the image carrier 62 and facing the surface of the image carrier 62. The exposure device 66 is an LED print head composed of an LED (Light Emitting Diode), a lens array, and the like. The exposure device 66 has a light beam on the surface of the image carrier 62 charged by the charging member 64 based on the image signal corresponding to each toner color. Is exposed (exposed) to form an electrostatic latent image. The exposure device 66 is not limited to an LED type print head, and may be, for example, an optical scanning device including an optical deflector that scans laser light with a polygon mirror.

  Further, the electrostatic latent image formed on the surface of the image holding body 62 is formed with toner of a predetermined color on the downstream side of the portion irradiated with the exposure light of the exposure device 66 in the rotation direction of the image holding body 62. A developing device 70 is provided as an example of a rotation switching type developing member that develops and visualizes.

  As shown in FIG. 13, the developing device 70 includes yellow (Y), magenta (M), cyan (C), black (K), first special color (E), and second special color (F). Developing units 72Y, 72M, 72C, 72K, 72E, and 72F corresponding to the toner colors are arranged side by side in the circumferential direction (counterclockwise in this order). Then, the developing devices 72Y, 72M, 72C, 72K, 72E, and 72F that perform the development processing are switched by rotating the central unit by 60 ° by a motor (not shown) that is a rotating means, and the surface of the image holding body 62 is switched. It comes to oppose. Since the developing units 72Y, 72M, 72C, 72K, 72E, and 72F have the same configuration, the developing unit 72Y will be described here, and the other developing units 72M, 72C, 72K, 72E, and 72F will be described. Is omitted.

  The developing device 72Y has a case member 76 serving as a main body. From the toner and carrier supplied into the case member 76 from a toner cartridge 78Y (see FIG. 14) via a toner supply path (not shown). The developer (not shown) is filled. Further, the case member 76 is formed with a rectangular opening 76 </ b> A facing the surface of the image holding body 62, and the developing roll 74 whose surface faces the surface of the image holding body 62 is formed in the opening 76 </ b> A. Is provided. Further, a plate-like regulating member 79 for regulating the layer thickness of the developer is provided along the longitudinal direction of the opening 76A at a portion near the opening 76A in the case member 76.

  The developing roller 74 includes a cylindrical developing sleeve 74A that is rotatably provided, and a magnetic member 74B that includes a plurality of magnetic poles fixed inside the developing sleeve 74A. The developing sleeve 74A rotates. Thus, the developer (carrier) magnetic brush is formed, and the layer thickness is regulated by the regulating member 79, whereby the developer layer is formed on the surface of the developing sleeve 74A. The developer layer on the surface of the developing sleeve 74A is conveyed to a position facing the image carrier 62, and a toner corresponding to a latent image (electrostatic latent image) formed on the surface of the image carrier 62 is attached. To develop.

  Further, in the case member 76, two conveying augers 77 formed in a spiral shape are arranged in parallel so as to be rotatable, and the two conveying augers 77 are rotated to be filled in the case member 76. The developer is circulated and conveyed in the axial direction of the developing roll 74 (longitudinal direction of the developing device 72Y). The six developing rolls 74 provided in each of the developing units 72Y, 72M, 72C, 72K, 72E, and 72F are arranged in the circumferential direction so that the distance from the adjacent developing roll 74 is a central angle of 60 °. The next developing roller 74 is opposed to the surface of the image holding member 62 by switching the developing device 72.

  Further, an intermediate transfer belt to which a toner image formed on the surface of the image carrier 62 is transferred is downstream of the developing device 70 in the rotation direction of the image carrier 62 and below the image carrier 62. 68 is provided. The intermediate transfer belt 68 is endless, and includes a drive roll 61 that is rotationally driven by the control unit 20 (see FIG. 14), a tension applying roll 63 for applying tension to the intermediate transfer belt 68, and an intermediate transfer belt 68. It is wound around a plurality of conveying rolls 65 that rotate following contact with the back surface and an auxiliary roll 69 that rotates following contact with the back surface of the intermediate transfer belt 68. The intermediate transfer belt 68 rotates in the direction of the arrow -R (the counterclockwise direction in the drawing) as the driving roll 61 rotates.

  A primary transfer roll 67 is provided on the opposite side of the image carrier 62 across the intermediate transfer belt 68 to primarily transfer the toner image formed on the surface of the image carrier 62 to the intermediate transfer belt 68. The primary transfer roll 67 is in contact with the back surface of the intermediate transfer belt 68 at a position away from the position where the image carrier 62 and the intermediate transfer belt 68 are in contact with the downstream side in the moving direction of the intermediate transfer belt 68. When the primary transfer roll 67 is energized from a power source (not shown), the toner image on the image carrier 62 is primarily transferred to the intermediate transfer belt 68 by a potential difference from the grounded image carrier 62. Yes.

  Further, on the opposite side of the auxiliary roll 69 with the intermediate transfer belt 68 interposed therebetween, a secondary transfer roll 71 as an example of a transfer member that secondarily transfers the toner image primarily transferred onto the intermediate transfer belt 68 onto the sheet member P. Is provided. The secondary transfer position between the secondary transfer roll 71 and the auxiliary roll 69 is a secondary transfer position for transferring the toner image to the sheet member P. The secondary transfer roll 71 is in contact with the surface of the intermediate transfer belt 68. The secondary transfer roll 71 is grounded, and the toner image of the intermediate transfer belt 68 is transferred to the sheet by a potential difference between the auxiliary roll 69 biased to the shaft from a power source (not shown) and the grounded secondary transfer roll 71. Secondary transfer is performed on the member P.

  Further, on the opposite side of the drive roll 61 across the intermediate transfer belt 68, a cleaning device 90 provided with a blade 90A that scrapes off residual toner after secondary transfer of the intermediate transfer belt 68 is provided.

  Further, a predetermined reference on the intermediate transfer belt 68 is detected by detecting a mark (not shown) on the surface of the intermediate transfer belt 68 at a position facing the tension applying roll 63 around the intermediate transfer belt 68. A position detection sensor 83 is provided for detecting a position and outputting a position detection signal that serves as a reference for the start timing of the image forming process.

  Further, a corotron type adjustment charger 86 is provided on the downstream side of the primary transfer roll 67 in the rotation direction of the image holding body 62 to adjust the charging potential on the surface of the image holding body 62 to the minus side. Yes. Further, a cleaning device 73 that cleans residual toner remaining on the surface of the image carrier 62 without being primarily transferred to the intermediate transfer belt 68 on the downstream side of the adjustment charger 86 in the rotation direction of the image carrier 62. Is provided.

  Further, on the downstream side of the cleaning device 73 in the rotation direction of the image holding body 62 (upstream side of the charging member 64), a static elimination device 75 that performs static elimination by irradiating light on the surface of the image holding body 62 is provided. Yes.

  On the other hand, as shown in FIG. 14, the secondary transfer position for transferring the toner image by the secondary transfer roll 71 to the conveyed sheet member P is in the middle of the above-described conveyance path 28 (see FIGS. 13 and 14). Is set. A neutralizing member 88 (see FIG. 13) for neutralizing the sheet member P charged by transferring the toner image is provided downstream of the secondary transfer roll 71 in the conveying direction. Details of the charge removal member 88 will be described later.

  Further, a fixing device 80 for fixing the toner image to the sheet member P on which the toner image has been transferred by the secondary transfer roll 71 is provided on the downstream side in the transport direction of the static elimination member 88 (see FIG. 13).

  The fixing device 80 is disposed on the toner image surface side (upper side) of the sheet member P and has a heating roll 82 having a heat source that generates heat when energized, and the sheet member P disposed on the lower side of the heating roll 82 and the surface of the heating roll 82. It is comprised with the pressurization roll 84 which pressurizes toward. A transport roll 39 that transports the sheet member P toward the paper discharge unit 15 or the reversing unit 33 is provided downstream of the fixing device 80 in the transport direction of the sheet member P in the transport path 28.

  On the other hand, below the document reading device 56 and above the developing device 70, yellow (Y), magenta (M), cyan (C), black (K), first special color (E), and second special color. Toner cartridges 78Y, 78M, 78C, 78K, 78E, and 78F that store the respective color (F) toners are provided to be replaceable in the horizontal direction. The first special color E and the second special color F are selected from special colors (including transparent) other than yellow, magenta, cyan, and black, or are not selected. Then, when the first special color E and the second special color F are selected, the developing device 70 forms an image with six colors of Y, M, C, K, E, and F, and the first special color E When the second special color F is not selected, image formation with four colors Y, M, C, and K is performed. In this embodiment, as an example, a case where image formation is performed with four colors Y, M, C, and K and the first special color E and the second special color F are unused will be described. As an example, image formation may be performed with five colors using four colors Y, M, C, and K and the first special color E or the second special color F.

  With the above configuration, as shown in FIG. 14, when the image forming apparatus 10 is operated, yellow (Y), magenta (M), cyan (C), black (from the image processing apparatus (not shown) or from the outside. The image data of each color of K) is sequentially output to the exposure device 66. At this time, as an example, the developing device 70 is rotated and held so that the developing device 72 </ b> Y (see FIG. 13) faces the surface of the image holding body 62. Further, the blade 90 </ b> A and the secondary transfer roll 71 of the cleaning device 90 are separated from the surface of the intermediate transfer belt 68 until the toner images of the respective colors are multiplexed (primary) transferred to the intermediate transfer belt 68.

  Subsequently, the light emitted from the exposure device 66 according to the image data exposes the surface of the image carrier 62 charged by the charging member 64. For example, an electrostatic latent image corresponding to yellow image data is formed on the surface of the image carrier 62. Further, the electrostatic latent image formed on the surface of the image carrier 62 is developed as a yellow toner image by the developing device 72Y. Then, the yellow toner image on the surface of the image carrier 62 is transferred to the intermediate transfer belt 68 by the primary transfer roll 67.

  Subsequently, the developing device 70 is rotated by 60 ° in the direction of the arrow + R, and the developing device 72M faces the surface of the image carrier 62. Then, charging, exposure, and development steps are performed, and the magenta toner image on the surface of the image carrier 62 is transferred onto the yellow toner image on the intermediate transfer belt 68 by the primary transfer roll 67. Similarly, cyan (C) and black (K) toner images are sequentially transferred onto the intermediate transfer belt 68 in a multiple transfer manner. When the transfer of the toner image to the intermediate transfer belt 68 is completed, the blade 90A and the secondary transfer roll 71 of the cleaning device 90 are in contact with the surface of the intermediate transfer belt 68.

  On the other hand, the sheet member P sent out from the storage unit 12 and conveyed through the conveyance path 28 is moved to the secondary transfer position by the alignment roll 38 in synchronism with the multiple transfer of each toner image to the intermediate transfer belt 68. Be transported. The toner image that has been multiple-transferred onto the intermediate transfer belt 68 is secondarily transferred by the secondary transfer roll 71 onto the sheet member P that has been conveyed to the secondary transfer position. Further, residual toner adhering to the surface of the intermediate transfer belt 68 is scraped off from the intermediate transfer belt 68 by the blade 90A and collected.

  Subsequently, the sheet member P to which the toner image has been transferred is conveyed toward the fixing device 80 in the direction of arrow A (right direction in the drawing). In the fixing device 80, the toner image is fixed on the sheet member P by being heated and pressed by the heating roll 82 and the pressure roll 84. Furthermore, the sheet member P on which the toner image is fixed is discharged to the paper discharge unit 15 as an example.

  When images are formed on both surfaces of the sheet member P, after the image is fixed on the surface by the fixing device 80, the sheet member P is sent to the reversing unit 33 along the arrow -V direction and along the arrow + V direction. The leading end and the trailing end of the sheet member P are exchanged. Then, the sheet member P is conveyed in the direction of arrow B (left direction in the figure) by the double-sided conveyance path 29 and further fed into the conveyance path 28 to perform image formation and fixing on the back surface of the sheet member P in the same manner as the front surface.

(Main part configuration)
Next, the charge removal member 88 will be described.

<Static elimination material>
As shown in FIGS. 7A and 7B, the charge removal member 88 is a plate-like metal electrode 120 in which a plurality of protrusions 122 are formed in a sawtooth shape, and a support that supports the metal electrode 120 so as to sandwich the metal electrode 120. A member 124 and a support member 126 are provided.

  The metal electrode 120 is provided so as to extend in the rotation axis direction of the image carrier 62 (hereinafter referred to as “axial direction”). In addition, the metal electrode 120 is formed with a circular hole 120A and a long hole 120B that are used to determine a support position of the metal electrode 120 with respect to the support members 124 and 126. The long hole 120B is disposed at a position away from the circular hole 120A, and is formed to extend in the axial direction.

  Further, the support member 124 is provided so as to extend in the axial direction, and is disposed so as to support the metal electrode 120 from the lower side in the vertical direction. Further, the support member 124 is formed with two convex cylindrical portions 124A inserted into the circular holes 120A and the long holes 120B formed in the metal electrode 120.

  On the other hand, the support member 126 is provided to extend in the axial direction similarly to the support member 124, and is disposed on the opposite side of the support member 124 with the metal electrode 120 interposed therebetween. Further, the support member 126 is formed with two concave recesses 126A into which the convex cylindrical portions 124A formed on the support member 124 are inserted while the metal electrode 120 is sandwiched between the support member 124 and the support member 124. ing. The material, detailed shape and manufacturing method of the metal electrode 120 will be described later.

<Metal electrode>
Next, the material and shape of the metal electrode 120 will be described.

  As shown in FIGS. 3A and 3B, the metal electrode 120 is formed using SUS304 (stainless steel plate) having a thickness of 100 μm and includes a plurality of sawtooth-shaped protrusions 122.

  The outer edge of the protrusion 122 is composed of an arcuate distal end portion 122A provided at the distal end of the protrusion 122 and a linear portion 122B extending linearly from the distal end portion 122A to the proximal end side (see FIG. 1).

  In the present embodiment, as an example, the radius of curvature of the distal end portion 122A is 40 [μm], and the tolerance of this radius of curvature is set to ± 20 [μm]. Further, the circular hole 120 </ b> A and the long hole 120 </ b> B formed in the metal electrode 120 serve as a reference (datum) for the protruding direction of the protrusion 122. The distance from the circular hole 120A and the long hole 120B to the tip 122A (A dimension in the figure) is managed so as to fall within a predetermined range.

<Method for producing metal electrode>
Next, the manufacturing method of a metal electrode is demonstrated as an example of the manufacturing method of a metal plate.

  As shown in FIGS. 4A and 4B, first, in the resist coating step, a positive photoresist 152 is applied to both sides of a SUS304 plate 150 having a thickness of 100 [μm] to a thickness of 1 [μm]. To do.

  Next, as shown in FIG. 4C, in the exposure process, the film original plate 154 on which the sawtooth projection pattern (etching pattern) is formed is brought into close contact with the plate material 150 coated with the photoresist 152 and fixed. . Then, exposure is performed toward the film original plate 154, and the protrusion pattern 160 (see FIG. 1A) is baked on the photoresist 152. Details of the protrusion pattern 160 will be described later.

  Next, as shown in FIG. 4D, in the development process, the developing process is performed on the plate material 150 on which the projection pattern 160 is exposed and transferred to the photoresist 152 using a developer. As a result, the photoresist 152 in the exposed area is dissolved in the developer, and the photoresist 152 is formed on the sawtooth projection pattern 160.

  Next, as shown in FIG. 4E, in the etching process, the plate material 150 is immersed in an etchant (in the present embodiment, ferric chloride solution as an example), or the etchant is sprayed onto the plate material 150 (shower). The exposed portion of the plate material 150 exposed by development is etched.

  Next, as shown in FIG. 4F, in the resist stripping step, the photoresist 152 applied to the plate 150 is removed using a sodium hydroxide solution. In this way, the metal electrode 120 is manufactured.

  The circular hole 120A and the long hole 120B of the metal electrode 120 are also simultaneously formed by etching.

<Projection pattern>
Next, the protrusion pattern 160 baked on the photoresist 152 will be described.

  As shown in FIG. 1A, in order to obtain the protrusion 122 having a shape indicated by a two-dot chain line by wet etching, the protrusion pattern 160 needs to be offset outward from the edge of the protrusion 122.

  This is because in the etching process, the etchant enters the back surface of the projection pattern 160 to etch the plate 150 more than necessary (so-called side etching), and the projection 122 is formed smaller than the projection pattern 160. . Note that the amount of offset of the photoresist with respect to the designed product edge (two-dot chain line shown in FIG. 1A) is referred to as the resist offset amount.

  In this embodiment, the resist offset amount (C dimension in the drawing) of the tip 122A in the protrusion 122 is different from the resist offset amount (D dimension in the drawing) of the straight portion 122B based on the radius of curvature of the tip 122A. The resist offset amount of the straight portion 122B is larger. This is because the side etching invades from the periphery at the front end portion 122A, and therefore the amount of the side etching invasion is larger than that of the straight portion 122B.

  That is, as shown in FIG. 2A, when the resist offset amount is the same amount (distance) of the protrusion pattern 161 in the tip portion 122A and the straight portion 122B, etching is performed as shown in FIG. The shape (solid line) of the tip obtained after the process is smaller than the shape (broken line) of the designed tip.

  Here, a procedure for determining the resist offset amount of the tip 122A of the protrusion 122 will be described.

  First, the graph shown in FIG. 8 will be described. The horizontal axis of the graph shown in FIG. 8 is the radius of curvature [μm] of the tip 122A of the protrusion 122, and the vertical axis is the amount of recession [μm] that the product end has receded from the photoresist by side etching. ing. Here, the retraction amount [μm] is the E dimension (= C dimension−D dimension) in FIG. 1. The relationship between the radius of curvature calculated by simulation and the amount of retraction is shown by a curve. That is, it can be seen from the simulation result that the smaller the radius of curvature [μm] of the tip 122A (the sharper the tip), the larger the retraction amount.

  As described above, the simulation is performed in consideration of using SUS304 having a thickness of 100 [μm] as the plate material.

  Next, the graph shown in FIG. 9 will be described. The horizontal axis of the graph shown in FIG. 9 is the radius of curvature [μm] of the tip 122A of the protrusion 122. On the other hand, the vertical axis indicates the enlargement amount [μm] obtained by enlarging the resist offset amount for forming the front end portion 122A with respect to the resist offset amount (D dimension) for forming the straight portion 122B (FIG. 1 (A) E dimension).

  Specifically, in the case of a SUS304 plate having a thickness of 100 [μm], as an example, the resist offset amount is set to 35 [μm] in the linear portion 122B (D dimension). The vertical axis indicates the amount of enlargement (E dimension) further enlarged with respect to the 35 [μm] photoresist. In other words, when the enlargement amount is 70 [μm], the resist offset amount is 35 [μm] +35 [μm], which is 105 [μm].

  In order to compensate for the retraction amount shown in FIG. 8, it is considered that an enlargement amount having the same value as the retraction amount may be set, so wet etching of the plate material was actually performed with the retraction amount = enlargement amount (FIG. 15). As a result, the simulation result shown in FIG. 8 needs to be corrected. Therefore, the relationship (graph) between the radius of curvature and the enlargement amount shown in FIG. 9 is the same as the actual curve (graph) shown in FIG. FIG. 9 is a curve obtained by correcting the simulation result of FIG. 8 in consideration of a value measured by performing wet etching on a plate material. According to the curve shown in FIG. 9, when the curvature radius of the tip is r [μm], the enlargement amount b [μm] can be approximated by the following equation (1).

b = 0.03r ² −3.2r + 110 [μm] (1)

  This equation (1) is approximated based on the average value of a plurality of data collected for each radius of curvature R (μm) of the tip 122A shown in FIG. That is, an average value of a plurality of data having a curvature radius R = 15 μm, an average value of a plurality of data having a curvature radius R = 35 μm, an average value of a plurality of data having a curvature radius R = 40 μm, and a curvature radius R = 45 μm The approximation is based on the average value of a plurality of data and the average value of a plurality of data with a radius of curvature R = 50 μm. The meanings of the horizontal axis and the vertical axis of the graph shown in FIG. 15 are the same as those in FIG.

  Also, the horizontal axis of FIG. 11 describes the radius of curvature [μm] of the tip 122A of the protrusion 122, and the vertical axis represents the design value at the height of the protrusion (dimension A shown in FIG. 3B). The difference (average value) from the product shape is described. The case where the resist offset amount at the tip portion is increased by the result of b obtained by the expression (1) from the resist offset amount at the straight portion as in this embodiment is represented by ◯, and the resist offset amount at the tip portion and the straight portion A case where the resist offset amount is the same as that of the resist offset is represented by Δ. As can be seen from FIG. 11, the amount of enlargement shown in FIG. 9 is added to the resist offset amount of the front end portion 122A (the amount of enlargement of FIG. 9 is added to the resist offset amount of the straight portion to add the resist of the front end portion 122A. A product shape close to the design value can be obtained by setting the offset amount.

  Further, FIG. 10 shows a curve shown in FIG. 9 and an upper limit curve and a lower limit curve of an allowable value with respect to the variation of the enlargement amount b [μm]. The allowable enlargement amount b [μm] is expressed by the following formula (2).

0.03r ² −3.2r + 90 ≦ b ≦ 0.03r ² −3.2r + 130 [μm] (2)

  Further, when the resist offset amount at the tip is p [μm], the resist offset amount s [μm] at the linear portion is added to the enlarged amount b [μm]. Therefore, in this embodiment, the resist offset amount p [μm] at the tip is expressed by the following formula (3).

0.03r ² −3.2r + 90 + s ≦ p ≦ 0.03r ² −3.2r + 130 + s (3)

  In this way, by defining the resist offset amount p [μm] at the tip, the defective rate with respect to the tolerance ± 20 [μm] of the curvature radius of the tip described above is reduced.

  Next, an example of a resist shape determination method using the formula (1) will be described with reference to FIG. The dimension E is the enlargement amount b [μm], the dimension D is the resist offset amount s [μm], and the dimension F is the curvature radius r [μm] of the tip. Further, the tip A of the protrusion 122 is an arc having a radius of F around the point P. First, a virtual resist having a D dimension is uniformly formed on the entire metal electrode 120. In this case, the virtual resist at the front end 122A is an arc UV with the point P as the center and the radius as F dimension + D dimension (U, P, and V are straight points). Note that the intersections of the virtual resist of the straight portion 122B of the protrusion 122 and the virtual resist of the straight portion 122C of the main body of the metal electrode 120 are S and T.

  Next, after the enlargement amount b is determined by the above equation (1), the arc UV is projected as it is with the dimension E, and one end U of the arc UV and the intersection S and the other end V and the intersection T are connected by a straight line. As a result, the shape formed by the straight line SU, the circular arc UV, and the straight line VT becomes the resist of the protrusion 122.

  Note that the resist shape determination method described here is merely an example, and the present invention is not construed as being limited thereto.

(Effects of main components)
As described above, according to the metal electrode manufacturing method according to the present embodiment, the resist offset amount of the tip portion 122A of the protrusion 122 is larger than the resist offset amount of the straight portion 122B based on the radius of curvature of the tip portion 122A. Then, the resist offset amount of the tip 122A is determined using the above-described equation (3). For this reason, it can be set as the product shape substantially equal to a design value.

  Moreover, since the product shape of the front end portion 122A approaches the design value, a discharge is effectively generated between the front end portion 122A and the object (for example, the image holding body 62, the sheet member).

Further, according to the metal electrode manufacturing method of the present embodiment, the radius of curvature of the tip portion 122A is r, the resist offset amount of the straight portion 122B is s [μm], and the resist offset amount of the tip portion is p [μm]. ]
0.03r ² −3.2r + 90 + s ≦ p ≦ 0.03r ² −3.2r + 130 + s
The relationship is satisfied. For this reason, for example, when the tolerance of the radius of curvature is ± 20 [μm], the defective rate of the product is reduced (yield is improved).

  Further, according to the charging member 64 according to the present embodiment, since the discharge is effectively generated between the tip portion of the metal electrode 100 and the image holding body 62, the surface of the image holding body 62 is efficiently charged.

  Moreover, according to the static elimination member 88 which concerns on this embodiment, since discharge generate | occur | produces effectively between the front-end | tip part 122A of the metal electrode 120 and the sheet member P, the sheet member P is neutralized efficiently.

  Further, since the image forming apparatus 10 according to the present embodiment includes the charging member 64, the image quality of the output image is improved.

  Further, according to the image forming apparatus 10 according to the present embodiment, since the neutralization member 88 is provided, the sheet members P discharged and stacked outside the apparatus main body after image formation try to attract each other by electrostatic force. Is suppressed.

[Second Embodiment]
Other embodiments of the present invention will be described below. For ease of explanation, only differences from the first embodiment will be described, and the same parts as those of the first embodiment will be denoted by the same reference numerals and description thereof will be omitted.

  The first embodiment shows a scorotron type using a corotron wire as the charging member 64, but the second embodiment is different in that the charging member 164 is constituted by a needle electrode.

  That is, as shown in FIGS. 5, 6, and 12, the charging member 164 includes a plate-like metal electrode 100 in which a plurality of protrusions 102 are formed in a sawtooth shape, and a support member that supports the metal electrode 100. 104. The metal electrode 100 is provided so as to extend in the rotation axis direction of the image carrier 62. In addition, the metal electrode 100 is formed with a first groove 100A and a second groove 100B that are used to determine a support position of the metal electrode 100 with respect to the support member 104. The second groove 100B is disposed at a position away from the first groove 100A and is wider than the first groove 100A (see FIG. 5).

  The support member 104 is provided so as to extend in the rotation axis direction of the image holding body 62, and projecting portions 104 </ b> A that protrude toward the image holding body 62 are formed on both ends in the axial direction of the support member 104. Further, the support member 104 is formed with a groove 104B that extends in the axial direction and into which the metal electrode 100 is inserted. In addition, in the groove of this groove 104B, a contact portion (not shown) that contacts the first groove 100A and the second groove 100B formed in the metal electrode 100 is provided. Then, by inserting the metal electrode 100 into the groove 104B, the tip 102A of the protrusion 102 is directed toward the image carrier 62 (see FIGS. 6 and 12).

  In addition, a pair of side plates 106 attached to the support member 104 so as to sandwich the metal electrode 100 supported by the support member 104 from the plate thickness direction of the metal electrode 100 is provided. Further, the net-like grid electrode 110 attached to the end face of the protrusion 104 </ b> A of the support member 104 is disposed between the metal electrode 100 and the image carrier 62.

  As described above, the charging member 164 includes the metal electrode 100, the support member 104, the pair of side plates 106, and the grid electrode 110. The material, detailed shape, manufacturing method, and the like of the metal electrode 100 are the same as those described in the first embodiment.

  The metal electrode 100 differs from the metal electrode 120 in that the reference (datum) of the metal electrode 100 is the first groove 100A and the second groove 100B (see FIG. 5), but other configurations The same applies to the metal electrode 120.

  Although the present invention has been described in detail with respect to specific embodiments, the present invention is not limited to such embodiments, and various other embodiments are possible within the scope of the present invention. It is clear to the contractor. For example, in the above-described embodiment, the method for manufacturing the metal electrode including the protrusion has been described as an example, but the present invention is used for manufacturing an IC lead frame, a filter, a mesh, a screen, a blade, a metal dome, a name plate, a metal decoration, and the like including the protrusion. You may use the manufacturing method of the metal plate which concerns on embodiment.

  Moreover, although the said embodiment demonstrated using the plate material of SUS304 with a thickness of 100 micrometers, you may manufacture the metal plate which provides a processus | protrusion using the metal plate of another thickness and material.

DESCRIPTION OF SYMBOLS 10 Image forming apparatus 62 Image holding body 64 Charging member 66 Exposure apparatus (an example of exposure member)
70 Developing Device (Example of Developing Member)
71 Secondary transfer roll (an example of a transfer member)
88 Neutralizing member 100 Metal electrode 120 Metal electrode 122 Protrusion 122A Tip 122B Straight line

Claims (2)

A protrusion provided tip straight portions extending linearly toward the proximal side from the distal end portion a circular arc shape, perpendicular to the thickness direction of the metal plate by wet etching the metal plate from the plate surface of the metal plate When forming a resist that covers the projections so that the projections are not eroded by wet etching on the plate surface of the metal plate in order to form in any direction , the edges of the resist and the tips at the tip as resist offset amount between the parts is greater than the resist offset amount between the resist edge and the straight portion in the linear portion, the plate surface of the metal plate using the resist based on the radius of curvature of the tip portion A resist forming step to be formed on,
An etching step of etching the metal plate by applying an etching solution to the metal plate on which the resist is formed in the resist forming step;
A method for manufacturing a metal plate. When the radius of curvature of the tip portion is r [μm], the resist offset amount of the linear portion is s [μm], and the resist offset amount of the tip portion is p [μm],
0.03r ² −3.2r + 90 + s ≦ p ≦ 0.03r ² −3.2r + 130 + s
The manufacturing method of the metal plate of Claim 1 which satisfy | fills these relationships.

Images