JP4983629B2 - Liquid optical element - Google Patents

Description

  The present invention relates to a liquid optical element that includes a nonpolar liquid and a polar liquid between a pair of electrodes, and changes the amount of transmitted light by applying a voltage between the pair of electrodes.

  Conventionally, there has been known an electrowetting technique in which a liquid is deformed and displaced by controlling electrostatic wettability and a desired effect is obtained by the phenomenon, and its application in various fields has been studied. Yes.

For example, using an electrowetting technique as an optical shutter in a display device to improve light extraction efficiency and response speed has been studied (see, for example, Patent Document 1).
Special table 2007-500876 gazette

  In general, in a liquid optical element using such an electrowetting technique, a polar liquid (for example, water) and a nonpolar liquid (for example, silicon oil) are provided between a pair of electrodes covered with a hydrophobic insulating film. The polar liquid and the nonpolar liquid are deformed by applying a voltage to them, and the amount of transmitted light (the intensity of transmitted light) is controlled.

  FIG. 25 is a schematic diagram for explaining the configuration and operation of a conventional general liquid optical element 110. In the liquid optical element 110, a lower substrate 111 provided with a lower electrode 112 and an upper substrate 118 provided with an upper electrode 117 are supported by a side wall 119 so as to face each other so as to sandwich the nonpolar liquid 115 and the polar liquid 116 therebetween. It is arranged. The lower electrode 112 is covered with a hydrophobic insulating film 113, and the cell region Z is defined by a partition wall 114 standing on the hydrophobic insulating film 113. The nonpolar liquid 115 has a light shielding property by containing, for example, a black pigment, and is contained in the cell region Z. Further, the lower electrode 112 and the upper electrode 117 are connected to a control unit 120 having a switch 121 and a power source 122 so as to apply a voltage to the hydrophobic insulating film 113. In such a liquid optical element 110, as shown in FIG. 25A, in the state where no voltage is applied between the lower electrode 112 and the upper electrode 117, the nonpolar liquid 115 extends over the entire cell region Z. As a result, the incident light Lin is hardly transmitted to the opposite side, and the emitted light is hardly emitted (so-called black display state). On the other hand, in a state where a predetermined voltage is applied between the lower electrode 112 and the upper electrode 117, the nonpolar liquid 115 collects in a partial region α of the cell region Z as shown in FIG. Therefore, although the incident light L1in to the region α is blocked, the incident light L2in incident to the other region β is transmitted to the opposite side and is emitted as the emitted light L2out (so-called white display state). Here, for example, when the liquid optical element 110 is used as an image display device, it is desirable that the contrast (the ratio of the emitted light intensity in the white display state to the emitted light intensity in the white display state) is high.

  However, as shown in FIGS. 25A and 25B, unnecessary light Ls from an unintended direction slightly from the vicinity of the boundary between the partition wall 114 partitioning the cell region Z and the hydrophobic insulating film 113. Often leaks. Furthermore, in some cases, the light Ls scattered from the adjacent cell region Z may be mixed, and for example, when used in an image display device, it may cause color mixing. This is because the partition 114 is generally made of a light transmissive resin. Recently, improvement in image display performance such as contrast and color reproducibility in an image display apparatus has been strongly demanded, and thus quality improvement in a liquid optical element applied thereto is desired.

  The present invention has been made in view of such problems, and an object of the present invention is to provide a liquid optical element capable of obtaining higher light transmission performance with a simple configuration.

The first liquid optical element of the present invention includes all of the following constituents (A1) to (A6).
(A1) Insulating film (A2) A partition wall of an insulating film (A3) which is provided on the insulating film, divides the region on the insulating film into a plurality of cell regions and surrounds each cell region, is provided. The first electrode (A4) provided in contact with the insulating film on the opposite side of the first electrode (A4), the second electrode (A5) disposed opposite to the insulating film side, and the second electrode; The polar liquid and the non-polar liquid (A6) cell area that is sealed and kept separated from each other, and occupies a region corresponding to the peripheral portion of the cell region and a region corresponding to the partition wall A light shielding body that electrically separates at least one of the first and second electrodes for each cell region and has a light shielding property.
Here, in the light shielding body, a portion occupying a region corresponding to the peripheral portion of the cell region is made of a conductive material, and is connected to one of the first and second electrodes.

In the first liquid optical element of the present invention, when no voltage is applied between the first and second electrodes, the nonpolar liquid spreads so as to cover the insulating film in the cell region. Here, since the light-shielding body having a light-shielding property is arranged so as to occupy a region corresponding to the peripheral portion of the cell region and a region corresponding to the partition wall, the light-shielding body is incident from another adjacent cell region, Light that passes through the vicinity of the boundary with the insulating film and leaks to the cell region is reliably blocked. In addition, the control of the wettability of the polar liquid to the insulating film is performed with high accuracy.

The second liquid optical element of the present invention is provided with all the following structural requirements (B1) to (B6).
(B1) Insulating film (B2) A wall structure (B3) which stands on the insulating film and surrounds the region on the insulating film, and is in contact with the insulating film on the side opposite to the side where the wall structure is provided. The first electrode (B4) provided between the first electrode (B4) and the second electrode (B5) disposed opposite to the insulating film and the second electrode are sealed and separated from each other. And occupying a region corresponding to the peripheral portion and a region corresponding to the wall structure of the region surrounded by the polar structure and the nonpolar liquid (B6) wall structure , one of which is transparent and the other is opaque. , A light-shielding body with light-shielding properties
Here, in the light shielding body, a portion occupying a region corresponding to the peripheral edge portion of the region surrounded by the wall structure is made of a conductive material, and is connected to one of the first and second electrodes. .

In the second liquid optical element of the present invention, when no voltage is applied between the first and second electrodes, the nonpolar liquid spreads so as to cover the insulating film in the region surrounded by the wall structure. Become. Here, the light shielding member having light shielding properties is arranged so as to occupy a region corresponding to the peripheral portion of a region surrounded by the wall structure and a region corresponding to the wall structure. Light passing through the vicinity of the boundary with the insulating film and leaking to the region surrounded by the wall structure is reliably blocked. In addition, the control of the wettability of the polar liquid to the insulating film is performed with high accuracy.

  According to the first liquid optical element of the present invention, the light-shielding body that electrically separates at least one of the first and second electrodes for each cell region is disposed so as to occupy at least the region corresponding to the partition wall. When no voltage is applied between the first and second electrodes, light leakage from other adjacent cell regions can be reliably suppressed. Therefore, the difference between the transmittance when a voltage is applied between the first and second electrodes and the transmittance when no voltage is applied can be widened, and a higher contrast can be obtained.

  According to the second liquid optical element of the present invention, since the light shielding body is arranged so as to occupy at least the area corresponding to the wall structure, light leakage from areas other than the area surrounded by the wall structure is ensured. Can be suppressed. Therefore, higher contrast can be obtained.

  Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings.

[First Embodiment]
FIG. 1 is a cross-sectional view illustrating the overall configuration of a liquid optical element 10 as a first embodiment of the present invention, and FIG. 2 is a plan view illustrating the overall configuration of the liquid optical element 10. 1 shows a cross-section in the direction of the arrow along the II cutting line shown in FIG. In FIG. 2, illustration of components such as a hydrophobic insulating film 13, a nonpolar liquid 15, a polar liquid 16, an upper electrode 17, an upper substrate 18, and a side wall 19 which will be described later is omitted. The liquid optical element 10 is connected to the control unit 20, generates deformation and displacement of the polar liquid 16 (described later) by controlling electrostatic wettability, and transmits light transmitted through the liquid optical element 10 by the phenomenon. This is a so-called electrowetting element that controls the amount of light. The liquid optical element 10 has a plurality of cell regions Z arranged in an array. In FIG. 2, nine cell regions Z are shown, but the number is not limited to this. As shown in FIG. 2, each cell region Z has, for example, a square shape.

  The liquid optical element 10 includes a lower substrate 11, a lower electrode 12 selectively provided on the lower substrate 11, a light shielding member 1 provided in a gap between the lower electrodes 12, the lower substrate 11, the lower electrode 12, and It has a hydrophobic insulating film 13 covering the light shielding member 1, a partition wall 14, a nonpolar liquid 15, a polar liquid 16, an upper electrode 17, an upper substrate 18, and a side wall 19. On the other hand, the control unit 20 includes a power source 21 and a switch unit 22.

  The lower substrate 11 and the upper substrate 18 are arranged to be supported by the side walls 19 so as to face each other, and are made of a transparent insulating material that transmits visible light, such as glass or transparent plastic. The lower substrate 11 is provided with drive elements (thin film transistors and the like) 41 in each cell region Z, and a signal line pair (not shown) connected to the control unit 20 for individually driving the drive elements 41. (For example, a gate line and a data line) are provided. The drive element 41 and the signal line pair may be provided on a substrate different from the lower substrate 11.

  The lower electrode 12 and the upper electrode 17 are made of a transparent conductive material such as indium tin oxide (ITO) or zinc oxide (ZnO). Further, the lower electrode 12 is connected to one end of the drive element 41, and the upper electrode 17 is kept at a constant potential. That is, as will be described later, the control unit 20 applies a voltage between the lower electrode 12 and the upper electrode 17 for each cell region Z, thereby controlling the amount of incident light transmitted from the outside for each cell region Z. Be able to. The lower electrode 12 is divided into a plurality of cell regions Z and is insulated from each other by the light shielding member 1. It is desirable that the lower electrode 12 extends over the entire surface of the cell region Z, and a part thereof is covered with the light shielding member 1.

  The light shielding member 1 is made of an insulating material containing a pigment or dye that absorbs light of a predetermined wavelength (for example, visible light) such as carbon black, and functions as a so-called black matrix having light shielding properties. The light shielding member 1 occupies a position corresponding to the partition wall 14 in the thickness direction (height direction of the partition wall 14) and also occupies a position corresponding to the peripheral edge of the cell region Z, that is, a part of the lower electrode 12. It is formed so as to cover.

  The hydrophobic insulating film 13 exhibits hydrophobicity (water repellency) with respect to the polar liquid 16. More strictly, the hydrophobic insulating film 13 has an affinity for the nonpolar liquid 15 under no electric field and has an excellent electrical insulating property. It is comprised by the material which has. Specific examples include polyvinylidene fluoride (PVdF) and polytetrafluoroethylene (PTFE), which are fluorine-based polymers. However, for the purpose of further improving the electrical insulation between the lower electrode 12 and the upper electrode 17, another material made of, for example, spin-on-glass (SOG) is provided between the lower electrode 12 and the hydrophobic insulating film 13. An insulating film may be provided.

  The partition wall 14 is a partition member that demarcates the cell region Z that is a unit region through which light is transmitted, and is provided so as to stand on the hydrophobic insulating film 13 at a position corresponding to the light shielding member 1. A nonpolar liquid 15 is held in the cell region Z partitioned by the partition wall 14. That is, the nonpolar liquid 15 is prevented from moving (outflowing) to another cell region Z adjacent by the partition wall 14. The partition wall 14 is desirably made of a material that is hydrophilic to the polar liquid 16 and that does not dissolve in the nonpolar liquid 15 and the polar liquid 16, for example, an epoxy resin or an acrylic resin. Alternatively, it is desirable that the surface of the partition wall 14 be covered with a film made of the above material. By doing so, the shape of the nonpolar liquid 15 can be stabilized, and the outflow of the nonpolar liquid 15 can be more reliably avoided.

  The nonpolar liquid 15 is a liquid material that has almost no polarity and exhibits electrical insulation properties. For example, in addition to hydrocarbon materials such as decane, dodecane, hexadecane, and undecane, silicon oil and the like are suitable. When a voltage is applied to the nonpolar liquid 15, the direct influence hardly affects the wettability with respect to the hydrophobic insulating film 13. The nonpolar liquid 15 has a capacity sufficient to cover the entire surface of the hydrophobic insulating film 13 in each cell region Z when no voltage is applied between the lower electrode 12 and the upper electrode 17. It is desirable.

  On the other hand, the polar liquid 16 is a liquid material having polarity. For example, an aqueous solution in which an electrolyte such as potassium chloride or sodium chloride is dissolved in addition to water is preferable. When a voltage is applied to the polar liquid 16, the wettability with respect to the hydrophobic insulating film 13 (contact angle between the polar liquid 16 and the hydrophobic insulating film 13) changes relatively greatly.

  In this way, the nonpolar liquid 15 and the polar liquid 16 sealed between the hydrophobic insulating film 13 and the upper electrode 17 are separated without being mixed with each other to form two layers. In the present embodiment, the polar liquid 16 is transparent, while the nonpolar liquid 15 is colored and opaque with a pigment or dye that absorbs light of a predetermined wavelength (for example, visible light).

  The side wall 19 seals the nonpolar liquid 15 and the polar liquid 16 together with the lower substrate 11 and the upper substrate 18, and is made of the same material as the lower substrate 11 and the upper substrate 18, for example.

  The control unit 20 performs drive control on the liquid optical element 10. The control unit 20 is provided with a switch 21 and a power source 22. The switch 21 has one terminal connected to the upper electrode 17 by a metal wiring, and the other terminal connected to the lower electrode 12 via the power source 22 and the drive element 41 by a metal wiring. The switch 21 can be selected from two states: a closed state in which both terminals are electrically connected and a disconnected state in which both terminals are electrically disconnected. The power source 22 can change the magnitude of the voltage within a predetermined range and can be arbitrarily set. Therefore, the control unit 20 applies a predetermined voltage between the lower electrode 12 and the upper electrode 17 by the operation of the switch 21 (operation for selecting the on state and the disconnected state) and the voltage control of the power source 22. Can be done. At this time, the drive element 41 in a specific cell region Z can be selected and driven by a gate driver (not shown).

  Next, the operation of the liquid optical element 10 configured as described above will be described with reference to FIG. FIG. 3 is an enlarged view of an arbitrary cell region Z in the liquid optical element 10.

  First, when the switch 21 is disconnected in the control unit 20 and no voltage is applied between the lower electrode 12 and the upper electrode 17, for example, as shown in FIG. It will be in the state expanded so that the whole cell area | region Z might be covered. Therefore, the incident light Lin from the outside irradiated from the side of the lower substrate 11 is blocked by the colored nonpolar liquid 15, for example. Since the light-shielding member 1 is provided in the liquid optical element 10, unlike the liquid optical element 110 having the conventional structure shown in FIG. 25, light transmitted through the partition 14 leaks or is adjacent to another cell region Z. It can suppress that the light from leaks. Further, the incident light Lin is reliably blocked also at the peripheral portion of the cell region Z where the thickness of the nonpolar liquid 115 is relatively thin. Therefore, the incident light Lin does not leak at all on the opposite side (upper substrate 18 side). On the other hand, when the switch 21 is turned on in the control unit 20 and a voltage is applied between the lower electrode 12 and the upper electrode 17, for example, as shown in FIG. 3B, the polar liquid 16 is hydrophobic. The insulating film 13 comes into contact, and the nonpolar liquid 15 is collected in an arbitrary region α of each cell region Z. Therefore, for example, of the external light Lin irradiated from the lower substrate 11 side, a part of the light L1in incident on the region α is blocked from traveling by the nonpolar liquid 15, while the remaining light incident on the region β The light L2in is transmitted to the opposite side (upper substrate 18 side) and emitted as transmitted light Lout. Even in this case, light leakage from the partition wall 14 and other cell regions Z is reliably suppressed by the presence of the light shielding member 1, so that the transmittance is stabilized. The behavior of the nonpolar liquid 15 is caused by the change in wettability between the polar liquid 16 and the hydrophobic insulating film 13 due to voltage application. Specifically, when a voltage is applied between the lower electrode 12 and the upper electrode 17, charges are accumulated on the surface of the hydrophobic insulating film 13, so that the polar liquid 16 having polarity is generated by the Coulomb force of the charges. It is attracted to the hydrophobic insulating film 13. Therefore, it is considered that the nonpolar liquid 15 moves (deforms) so as to be excluded from the surface of the hydrophobic insulating film 13 by the polar liquid 16, and as a result, collects in an arbitrary region α.

  Note that FIG. 3B shows a state in which the maximum transmittance (maximum aperture ratio) is obtained, but the size of the nonpolar liquid 15 is controlled by adjusting the applied voltage, so that arbitrary transmission is possible. It is also possible to obtain light intensity (transmittance).

  Thus, in the liquid optical element 10 of the present embodiment, the light shielding member 1 is arranged in the region corresponding to the peripheral portion of the cell region Z and the partition wall 14 in the thickness direction. Therefore, the lower electrode 12 and the upper electrode In the case where no voltage is applied between them, light leakage from the peripheral portion of the cell region Z and the boundary between the partition wall 14 and the hydrophobic insulating film 13 can be reliably suppressed. Therefore, the difference between the transmittance when a voltage is applied between the lower electrode 12 and the upper electrode 17 and the transmittance when no voltage is applied can be widened, and higher contrast can be obtained. Furthermore, since the lower electrode 12 extends over the entire surface of the cell region Z, the nonpolar liquid 15 is quickly deformed without being separated into a plurality of times when a voltage is applied, and is excellent in responsiveness and transmission. The development of rate hysteresis is suppressed. Further, since the light shielding member 1 is covered with the hydrophobic insulating film 13, the light shielding member 1 does not affect the wettability of the nonpolar liquid 15 and the polar liquid 16, and the nonpolar liquid 15 and the polar liquid are not affected. 16 shows a stable behavior.

Next, a method for manufacturing the liquid optical element 10 will be described with reference to the schematic cross-sectional views shown in FIGS. 5 to 11 together with the flowchart shown in FIG.
explain.

  First, as shown in FIG. 5, a lower substrate 11 made of a transparent insulating material such as glass or plastic is prepared, and a plurality of lower electrodes 12 are selectively formed on the lower substrate 11 using ITO or the like. (Step S101). Specifically, the lower substrate 11 is covered with an ITO film over the entire surface, and then the ITO film is patterned by, for example, a photolithography method so that a gap 12V is formed for each cell region Z. Further, after cleaning the lower substrate 11 on which the lower electrode 12 is formed, as shown in FIG. 6, the light shielding member 1 is filled so as to fill the gap 12V between the lower electrodes 12 and also cover the upper surface of the peripheral edge of the lower electrode 12. Are selectively formed (step S102). At this time, for example, a film covering the entire surface of the lower substrate 11 and the lower electrode 12 with a resist containing carbon black is formed, and then the film is patterned by, for example, a photolithography method. On the other hand, as shown in FIG. 7, the upper electrode 17 is formed on the upper substrate 18 (step S103). However, it is not necessary to provide a gap in the upper electrode 17.

  Subsequently, a hydrophobic insulating film 13 is formed so as to cover the lower substrate 11 and the lower electrode 12 as shown in FIG. 8 by a wet method such as a spin coating method or a dip coating method, or a dry method such as an evaporation method. (Step S104). At this time, it is desirable that the thickness of the hydrophobic insulating film 13 be flat. Thereafter, the surface treatment (ultraviolet ozone treatment or oxygen plasma ashing treatment) of the hydrophobic insulating film 13 or the application of a surfactant to the surface of the hydrophobic insulating film 13 may be performed as necessary.

  After forming the hydrophobic insulating film 13, as shown in FIG. 9, the partition wall 14 is formed on the hydrophobic insulating film 13 so as to stand at a position corresponding to the gap 12V between the lower electrodes 12 ( Step S105). Specifically, a predetermined resin is uniformly applied on the hydrophobic insulating film 13 by, for example, a spin coating method, and then patterned so as to have the pattern shape shown in FIG. After the partition 14 is formed, the surface treatment (ultraviolet ozone treatment or oxygen plasma ashing treatment) may be performed as necessary. Further, a coating film that is hydrophilic to the polar liquid 16 may be applied to the surface of the partition wall 14.

  Subsequently, as shown in FIG. 10, the nonpolar liquid 15 is applied to the surface of the hydrophobic insulating film 13 in each cell region Z partitioned by the partition walls 14 (step S106). Further, as shown in FIG. 11, after cleaning the upper substrate 18 formed in step S103 with the upper electrode 17 provided, the side walls 19 are arranged so that the lower substrate 11 and the upper substrate 18 are spaced at a certain distance. It arranges opposite through. After that, the polar liquid 16 is filled from a predetermined injection port (not shown) into a space surrounded by the hydrophobic insulating film 13, the side wall 19, and the upper electrode 17, and the injection port is sealed (step S107). By the above procedure, the liquid optical element 10 having excellent responsiveness can be easily manufactured.

(First modification)
FIG. 12 shows a liquid optical element 10A as a first modification in the present embodiment, and shows a cross-sectional configuration corresponding to FIG. This liquid optical element 10 </ b> A is the same as the liquid optical element 10 </ b> A except that it includes a light shielding member 1 </ b> A that matches the width of the gap between the lower electrodes 12 (that is, has the same width as that of the partition wall 14). It has the same configuration as the liquid optical element 10 shown in FIG.

  Even in such a liquid optical element 10A, the partition wall in both a state where no voltage is applied between the lower electrode 12 and the upper electrode 17 (black display state) and a state where a voltage is applied (white display state). It is possible to prevent light leakage from the boundary between the insulating film 14 and the hydrophobic insulating film 13 and other cell regions Z. In addition, unlike the liquid optical element 10, the light shielding member 1A does not cover the cell region Z at all, so that more light incident on the cell region Z can be transmitted and a higher aperture ratio can be obtained. Furthermore, as shown in FIG. 12, if the thickness of the light shielding member 1A is equal to or less than the thickness of the lower electrode 12, the thickness of the hydrophobic insulating film 13 can be reduced while maintaining the flatness of the upper surface. Therefore, the applied voltage required for the deformation of the nonpolar liquid 15 can be kept low (that is, low voltage driving is possible). However, the liquid optical element 10A has a structure in which the emitted light easily leaks from the peripheral edge of the cell region Z. This is because the upper surface of the nonpolar liquid 15 covering the hydrophobic insulating film 13 swells in a convex shape due to its surface tension, so that the thickness of the nonpolar liquid 15 is relatively smaller at the peripheral portion of the cell region Z than at the central portion. This is because the transmission of incident light cannot be sufficiently blocked. In that respect, the liquid optical element 10 shown in FIG. 1 and the like is superior.

(Second modification)
FIG. 13 shows a liquid optical element 10B as a second modified example in the present embodiment, and shows a cross-sectional configuration corresponding to FIG. The liquid optical element 10B has the same configuration as that of the liquid optical element 10 shown in FIG. 1 and the like except that the lower electrode 12 has an opening 12K substantially at the center of the cell region Z. The opening 12K has, for example, a similar shape (in this case, a square) with the cell region Z, and the center position thereof preferably coincides with the center position of the cell region Z.

  Also in such a liquid optical element 10B, a voltage is not applied between the lower electrode 12 and the upper electrode 17 (black display state in FIG. 13A), and a voltage is applied (FIG. 13B). In both of the white display states), light leakage from the partition walls 14 and other cell regions Z can be prevented. In addition, when a voltage is applied between the lower electrode 12 and the upper electrode 17 (FIG. 13B), the nonpolar liquid 15 collects in the region α corresponding to the opening 12K in each cell region Z. It becomes. This is because, when a voltage is applied between the lower electrode 12 and the upper electrode 17, charges are accumulated in the region β corresponding to the lower electrode 12 in the surface of the hydrophobic insulating film 13, while in the region α. This is probably because no charge is generated. As a result of the nonpolar liquid 15 always moving so as to gather at a certain location (region α), the nonpolar liquid 15 is deformed in a shorter path with respect to a voltage change, and high responsiveness is obtained. Furthermore, the variation in transmittance due to the development of hysteresis in the relationship between the applied voltage and the transmittance is also suppressed. In particular, if the center position of the opening 12K is made to coincide with the center position of the cell region Z, the average moving distance of the nonpolar liquid 15 at the time of voltage application becomes the shortest, and the response speed can be further improved.

  Next, a specific application example of the liquid optical element 10 in the above-described embodiment will be described.

  FIG. 14 is a block diagram illustrating a schematic configuration of the image display device 30 on which the liquid optical element 10 according to the present embodiment is mounted.

  The image display device 30 includes an image display unit 31 that displays an image, a light source unit 32 that emits light for image display toward the image display unit 31, and a drive unit 33 that performs drive control of the image display unit 31. The transmissive display is configured such that light emitted from the light source unit 32 passes through the image display unit 31 and reaches the viewer.

  The light source unit 32 is a mechanism that emits light for image display called a so-called backlight, and includes, for example, a hot cathode tube, a cold cathode tube, or a light emitting diode.

  The drive unit 33 is a mechanism that controls the operation of the image display unit 31 based on image information (for example, a video signal) J supplied from the outside.

  The image display unit 31 includes the liquid optical element 10 in which a plurality of cell regions Z are arranged in an array, and is arranged to face the light source unit 32. The image display unit 31 performs video display by controlling the amount of incident light transmitted from the light source unit 32 (controlling the intensity of the emitted light) based on the control signal S from the drive unit 33. Yes. Here, the image display unit 31 and the light source unit 32 are arranged so that incident light from the light source unit 32 enters from the lower substrate 11 side, for example.

  In the image display device 30 including such a liquid optical element 10, the predetermined image information J is input to the drive unit 33, and the control signal S is transmitted from the drive unit 33 to the image display unit 31. A voltage is applied to. For example, as shown in FIG. 15, the nonpolar liquid 15 is deformed by applying a voltage only between the upper electrode 17 and the lower electrode 12 corresponding to the cell regions Z1 and Z3 among the three cell regions Z1 to Z3. Thus, when the incident light Lin is irradiated from the light source unit 32, the transmitted light Lout can be extracted only from the cell regions Z1 and Z3 (region β of them). As a result, for example, when the light source unit 32 emits white light, the portions corresponding to the cell regions Z1 and Z3 are expressed as white, while the portions corresponding to the cell region Z2 are expressed as black. Therefore, a binary image is displayed as the entire liquid optical element 40.

  Further, in the image display device 30, the intensity of the transmitted light in each cell region Z is set to be arbitrary or high by controlling the magnitude of the voltage applied between the upper electrode 17 and the lower electrode 12 arbitrarily or in multiple stages. Gradation can also be expressed by controlling in stages.

  Furthermore, the nonpolar liquid 15 in each cell region Z is colored not only black but red (R), green (G), or blue (B), and the incident light from the light source unit 32 is respectively A color image can also be displayed on the image display unit 31 by transmitting only the same color. Alternatively, for example, a color image may be displayed by providing a color filter between the upper substrate 18 and the upper electrode 17.

  In the image display device 30 according to the present embodiment, in the liquid optical element 10, the light shielding member 1 is arranged in the peripheral direction of each cell region Z and the region corresponding to the partition wall 14 in the thickness direction, so that the configuration is simple. However, higher contrast can be obtained. Furthermore, even when a voltage is applied, light leakage from the vicinity of the boundary between the partition wall 14 and the hydrophobic insulating film 13 and from other cell regions Z can be surely prevented, thereby preventing color mixing and excellent color reproducibility. It becomes easy to secure. That is, it is possible to control the transmitted light with high accuracy, and it is possible to express gradation with higher definition.

[Second Embodiment]
FIG. 16 is a cross-sectional view showing the overall configuration of a liquid optical element 40 as a second embodiment of the present invention. In this liquid optical element 40, instead of the light shielding member 1, the light shielding member 2 constituted by a portion 2A that fills the gap between the lower electrodes 12 and a portion 2B that occupies a region corresponding to the peripheral portion of the cell region Z. Is included. Here, the portion 2A is made of an insulating material such as aluminum oxide, and the portion 2B is made of a conductive material. As a material constituting the portion 2B, for example, a metal having high conductivity such as gold (Au), silver (Ag), copper (Cu), platinum (Pt), or aluminum (Al), or transparent such as ITO Examples include conductive materials.

  Even with such a liquid optical element 40, the same effect as the liquid optical element 10 in the first embodiment can be obtained. In addition, the wettability of the polar liquid 16 with respect to the hydrophobic insulating film 13 can be controlled with high accuracy, and the nonpolar liquid 15 can be moved with a lower applied voltage.

(First modification)
FIG. 17 is a cross-sectional view showing a liquid optical element 40A as a first modified example in the present embodiment. In this liquid optical element 40A, since the portions 2A and 2B of the light shielding member 2 are both equal to or less than the thickness of the lower electrode 12, while maintaining the flatness of the upper surface of the hydrophobic insulating film 13, The thickness can be reduced to the minimum. Therefore, the applied voltage required for deformation of the nonpolar liquid 15 can be kept low, and low voltage driving is possible.

  Hereinafter, specific examples of the present invention will be described.

  As Examples 1 to 3, the liquid optical element 10A shown in FIG. 12 was produced by changing the dimensions of the cell region as shown in Table 1 (described later). Specifically, the dimensions Zx and Zy of the cell region Z shown in FIG. 18, the dimensions Wx and Wy of the partition 14, and the dimensions Bx and By of the light shielding member are set to the ratios shown in Table 1. Each dimension in Table 1 indicates a value normalized with reference to the dimensions Wx and Wy of the partition wall 14. Here, the dimensions Wx and Wy represent the width of the partition wall 14 as shown in FIG. Further, glass substrates were used as the lower substrate 11 and the upper substrate 18, and ITO was used as the lower electrode 12 and the upper electrode 17. The hydrophobic insulating film 13 was formed using Teflon (registered trademark) AF (manufactured by DuPont), and the partition wall 14 was formed using "SU8 (manufactured by Kayaku Microchem Co., Ltd.)". Further, as the nonpolar liquid 15, carbon black dispersed in dodecane was used, and water was used as the polar liquid 16. The light shielding member 1 was formed using “alkali development type black resist ink NSBK (manufactured by Nippon Steel Chemical Co., Ltd.)”. The distance between the lower electrode 12 and the upper electrode 17 was 20 times the dimensions Wx and Wy of the partition wall 14.

  Further, as Examples 4 to 6, the liquid optical elements 10 shown in FIG. 1 and the like were prepared by changing the cell region dimensions as shown in Table 1, respectively. Other conditions were the same as in Examples 1 to 3, respectively.

  Further, as Examples 7 to 9, the liquid optical elements 40 shown in FIG. 16 were produced by changing the cell region dimensions as shown in Table 1, respectively. Here, the portion 2B of the light shielding member 2 is formed of copper. Other conditions were the same as in Examples 1 to 3, respectively.

  Further, as Comparative Examples 1 to 3, liquid optical elements were produced in the same manner as in Examples 1 to 9, except that no light shielding member was provided.

For each of the above examples and comparative examples, the dependency of the transmittance on the applied voltage was investigated and the contrast was calculated. The results are collectively shown in FIGS. FIG. 19 to FIG. 21 are characteristic diagrams showing the relationship between the transmittance and the applied voltage when the dimensions of the cell regions are the same. The horizontal axis represents the applied voltage (arbitrary unit), and the vertical axis represents the transmittance. (%). FIG. 22 compares the contrasts calculated based on FIGS. 19 to 21. The horizontal axis represents the area of the cell region (arbitrary unit), and the vertical axis represents the contrast. The contrast was the ratio of the maximum transmittance T _{max to} the transmittance T ₀ when the applied voltage was 0 (T _max / T ₀ ).

  As shown in Table 1 and FIGS. 19 to 22, if the dimensions of the cell region Z are the same, by providing the light shielding member as in this embodiment, the contrast is higher than that of the comparative example having no light shielding member. It was confirmed that it was obtained. That is, it was found that by providing a light blocking member as a black matrix, the maximum value of transmittance is slightly reduced, but light leakage at an applied voltage of 0 can be suppressed. In particular, in Examples 4 to 9 in which a part of the light shielding member was disposed so as to cover the peripheral edge of the cell region, light leakage in the low voltage region could be further reduced. Furthermore, in Examples 7 to 9, a part of the light shielding member (part 2B) functions as a part of the lower electrode, so that the transmittance in the high voltage region was higher than in Examples 4 to 6.

  Although the present invention has been described with reference to some embodiments, the present invention is not limited to these embodiments and the like, and various modifications are possible. For example, in the above embodiment, one lower electrode corresponding to one cell region is arranged, but a plurality of divided lower electrodes may be arranged. Specifically, as in the liquid optical element 10D shown in FIG. 23A, a plurality of electrode patterns 12A to 12D arranged concentrically and insulated from each other may be configured as the lower electrode. . Alternatively, as in the liquid optical element 10E shown in FIG. 23B, a plurality of electrode patterns 12B to 12B are provided at a given distance so that one electrode pattern 12A is provided at the corner of the cell region Z and away from the electrode pattern 12A. 12D may be arranged. In such a case, if each of the electrode patterns 12A to 12D is individually energized, multi-stage adjustment of the intensity of transmitted light can be performed with higher accuracy. Therefore, if such a liquid optical element having a lower electrode divided into a plurality of parts is used in an image display unit of an image display device, it is expected that higher-definition gradation expression can be performed.

  Further, as in the liquid optical element 10C shown in FIG. 24, when the nonpolar liquid 15 applies a voltage between the lower electrode 12 and the upper electrode 17, the hydrophobic insulating film 13 and the upper electrode in a certain region α. 17 may be in contact with both. In that case, for example, if the nonpolar liquid 15 is transparent and the polar liquid 16 is colored with carbon black to form a light shielding body, the light L is blocked when no voltage is applied (FIG. 24A). The optical shutter can be used as an optical shutter capable of transmitting the light L in the region α when a predetermined voltage is applied (FIG. 24B).

It is sectional drawing showing the whole structure of the liquid optical element which concerns on the 1st Embodiment of this invention. It is a top view showing the whole structure of the liquid optical element shown in FIG. FIG. 2 is a schematic diagram for explaining the operation of the liquid optical element shown in FIG. 1. 2 is a flowchart for explaining a method of manufacturing the liquid optical element shown in FIG. It is a cross-sectional schematic diagram for demonstrating the manufacturing method of the liquid optical element of FIG. FIG. 6 is a schematic cross-sectional view for explaining a process following the process in FIG. 5. It is a cross-sectional schematic diagram for demonstrating the process following FIG. FIG. 8 is a schematic cross-sectional view for explaining a step following the step in FIG. 7. It is a cross-sectional schematic diagram for demonstrating the process following FIG. FIG. 10 is a schematic cross-sectional view for illustrating a step following the step in FIG. 9. It is a cross-sectional schematic diagram for demonstrating the process following FIG. FIG. 10 is a cross-sectional view illustrating a first modification of the liquid optical element illustrated in FIG. 1. FIG. 10 is a cross-sectional view illustrating a second modification of the liquid optical element illustrated in FIG. 1. 1 is a block diagram illustrating an overall configuration of an image display apparatus having a liquid optical element according to an embodiment of the present invention. It is the schematic for demonstrating operation | movement of the liquid optical element mounted in the image display apparatus shown in FIG. It is sectional drawing showing the whole structure of the liquid optical element which concerns on the 2nd Embodiment of this invention. FIG. 17 is a cross-sectional view illustrating a first modification of the liquid optical element illustrated in FIG. 16. It is explanatory drawing for demonstrating the dimension of the liquid optical element as an Example of this invention. It is a characteristic view showing the applied voltage dependence of the transmittance | permeability in Example 1, 4, 7 of this invention. It is a characteristic view showing the applied voltage dependence of the transmittance | permeability in Example 2, 5, 8 of this invention. It is a characteristic view showing the applied voltage dependence of the transmittance | permeability in Example 3, 6, 9 of this invention. It is a characteristic view showing the contrast in Examples 1-9 of the present invention. It is a top view showing the other modification in the liquid optical element of this invention. FIG. 10 is a plan view illustrating a third modification of the liquid optical element illustrated in FIG. 1. It is the schematic for demonstrating operation | movement of the conventional liquid optical element.

Explanation of symbols

  DESCRIPTION OF SYMBOLS 1, 2 ... Light-shielding member 10, 40 ... Liquid optical element, 11 ... Lower substrate, 12 ... Lower electrode, 13 ... Hydrophobic insulating film, 14 ... Partition, 15 ... Nonpolar liquid, 16 ... Polar liquid, 17 ... Upper Electrode, 18 ... Upper substrate, 19 ... Side wall, 20 ... Control unit, 21 ... Switch, 22 ... Power source, 30 ... Image display device, 31 ... Image display unit, 32 ... Light source unit, 33 ... Drive unit, Z ... Cell region .

Claims (8)

An insulating film ;
A partition wall standing on the insulating film, dividing a region on the insulating film into a plurality of cell regions, and surrounding each of the cell regions;
A first electrode provided in contact with the insulating film on a side opposite to the side on which the partition wall is provided;
A second electrode disposed opposite to the insulating film on the first electrode;
A polar liquid and a non-polar liquid sealed between the insulating film and the second electrode and kept separated from each other, one transparent and the other opaque;
The cell region occupies a region corresponding to a peripheral portion and a region corresponding to the partition, and at least one of the first and second electrodes is electrically separated for each cell region, and has a light shielding property. Bei to give a light-shielding body having,
The light shielding element is a liquid optical element in which a portion occupying a region corresponding to a peripheral portion of the cell region is made of a conductive material, and is connected to one of the first and second electrodes . The light shield, electrically separating said first electrode for each of the cell area, and that covered by the insulating film
Liquid optical element 請 Motomeko 1 wherein. The electrodes that are extended over the entire surface of the cell region
Liquid optical element 請 Motomeko 1 wherein. The insulating layer, shows the affinity for the nonpolar liquid under no electric field
Liquid optical element 請 Motomeko 1 wherein. Said polar a liquid transparent, the Ru nonpolar liquid is opaque der
Liquid optical element 請 Motomeko 1 wherein. The polar liquid is opaque, the nonpolar liquid is transparent, and the polar liquid is applied to the insulating film and the second electrode when a voltage is applied between the first and second electrodes. that Sessu to both of
Liquid optical element 請 Motomeko 1 wherein. Wall surface of the partition wall, that Teisu hydrophilic
Liquid optical element 請 Motomeko 1 wherein. An insulating film ;
A wall structure standing on the insulating film and surrounding a region on the insulating film;
A first electrode provided in contact with the insulating film on a side opposite to the side on which the wall structure is provided of the insulating film;
A second electrode disposed opposite to the insulating film on the first electrode;
A polar liquid and a non-polar liquid sealed between the insulating film and the second electrode and kept separated from each other, one transparent and the other opaque;
Together occupy a region corresponding to the corresponding region and the wall structure in the peripheral portion of the region surrounded by the wall structure, e Bei and a light shielding member having a light shielding property,
In the light shielding body, a portion occupying a region corresponding to a peripheral edge portion of a region surrounded by the wall structure is made of a conductive material, and is connected to one of the first and second electrodes. Liquid optical element.

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