JP4972386B2 - Test equipment and measuring equipment - Google Patents

Description

  The present invention relates to a test apparatus and a measurement apparatus. In particular, the present invention relates to a test apparatus and a measurement apparatus having a function of measuring the degree of deterioration of a connector provided in a test head.

  A test apparatus such as a semiconductor device includes a test head and a performance board that is attached to and detached from the test head. Then, the test apparatus places the device under test on a performance board attached to the test head, and tests the device under test. The test head has a plurality of connectors that are electrically connected to connectors provided on the performance board when the performance board is mounted.

  Here, the connector provided on the test head is worn out or the like every time the connector provided on the performance board is attached / detached, and therefore deteriorates according to the number of attachments / detachments. Accordingly, in the test apparatus, the number of attachments / detachments between the test head connector and the performance board connector must be counted by a counter or the like, and the test head connector must be replaced when the appropriate number of attachments / detachments is reached.

  In addition, since the presence of a prior art document is not recognized at this time, the description regarding a prior art document is abbreviate | omitted.

  By the way, a plurality of connectors provided in the test head have different degrees of deterioration depending on the arrangement and the like, and there are cases where appropriate replacement timings are different. However, the test apparatus includes one counter for a plurality of connectors, and when the count value reaches a predetermined number of times, the plurality of connectors are collectively replaced. Therefore, such a test apparatus is costly because the connectors that are not deteriorated are also replaced at a time.

  The test apparatus may include a counter for each of the plurality of connectors. As a result, the test apparatus can detect the degree of deterioration of each connector, so that only the connector that has been deteriorated can be replaced. However, such a test apparatus has a very complicated configuration and high cost.

  In addition, it is desirable that a test apparatus including a connector that allows a high-frequency signal to pass through be replaced with a connector based on the value of a counter that can count attachment / detachment more strictly. For example, in the test apparatus, it is desirable that the connector is replaced based on the value of a counter that can count, for example, mounting when the power is not turned on, manual mounting, and the like. However, a test apparatus equipped with such a counter has a complicated configuration and a high cost.

  Therefore, an object of the present invention is to provide a test apparatus and a measurement apparatus that can solve the above-described problems. This object is achieved by a combination of features described in the independent claims. The dependent claims define further advantageous specific examples of the present invention.

  In order to solve the above-described problem, in the first embodiment of the present invention, a test apparatus for testing a device under test, a test head having a plurality of head side connectors, and a test head that is attached to and detached from the test head. A performance board having a plurality of board-side connectors electrically connected to the plurality of head-side connectors on a one-to-one basis when attached to the head-side connector, and a measuring device for measuring the degree of deterioration of the plurality of head-side connectors, Is mounted on the test head instead of the performance board, and includes a measurement board including a plurality of measurement connectors that are electrically connected to the plurality of head-side connectors in a one-to-one manner at the time of mounting, and a plurality of head-side connectors. For each, a signal generator for passing measurement signals through the head side connector and the measurement connector, and a plurality of head side connectors Based on the signal detector that detects multiple measurement signals that have passed through the sensor and the multiple measurement signals that have passed through the multiple head-side connectors, it calculates multiple measurement frequency characteristics that are the respective frequency characteristics of the multiple head-side connectors. A test apparatus comprising: a frequency characteristic calculating unit that calculates a degree of deterioration based on a difference between a reference frequency characteristic that is a reference frequency characteristic and a measured frequency characteristic for each of the plurality of head-side connectors. provide.

  In the second embodiment of the present invention, a plurality of devices in a target device having a plurality of first connectors and a unit having a plurality of second connectors electrically connected to the plurality of first connectors on a one-to-one basis. A measuring device for measuring the degree of deterioration of the first connector, which is attached to the target device instead of the unit, and is electrically connected to the plurality of first connectors in a one-to-one manner at the time of attachment. For each of a measurement board having a connector and a plurality of first connectors, a signal generator for passing measurement signals through the first connector and the measurement connector, and a signal for detecting a plurality of measurement signals that have passed through the plurality of first connectors A frequency for calculating a plurality of measurement frequency characteristics which are respective frequency characteristics of the plurality of first connectors based on the detection unit and the plurality of measurement signals passing through the plurality of first connectors. Provided is a measuring apparatus including a characteristic calculation unit and a deterioration degree calculation unit that calculates a deterioration degree based on a difference between a reference frequency characteristic that is a reference frequency characteristic and a measurement frequency characteristic for each of the plurality of first connectors. .

  The above summary of the invention does not enumerate all the necessary features of the present invention, and sub-combinations of these feature groups can also be the invention.

  Hereinafter, the present invention will be described through embodiments of the invention. However, the following embodiments do not limit the invention according to the scope of claims, and all combinations of features described in the embodiments are included. It is not necessarily essential for the solution of the invention.

  FIG. 1 shows a configuration of a test apparatus 10 according to this embodiment together with a device under test 100. The test apparatus 10 includes a test head 14, a performance board 16, an apparatus main body 18, and a measurement apparatus 20. The test apparatus 10 tests the device under test 100 by placing the device under test 100 on the performance board 16 attached to the test head 14. The device under test 100 may be placed on a motherboard on the performance board 16, for example.

  The test head 14 has a plurality of head side connectors 30. The test head 14 generates a test signal corresponding to the given test pattern, and outputs the generated test signal via the head side connector 30. The test head 14 receives the output signal output from the device under test 100 via the head-side connector 30 and generates a comparison signal obtained by converting the input output signal into a logical value. Each of the plurality of head-side connectors 30 may be a coaxial connector as an example.

  The performance board 16 is attached to and detached from the test head 14. The performance board 16 has a plurality of board-side connectors 32 that are electrically connected to the plurality of head-side connectors 30 on a one-to-one basis when mounted on the test head 14. As an example, each of the plurality of board-side connectors 32 may be a coaxial connector that is electrically connected to the head-side connector 30 by fitting with the corresponding head-side connector 30.

  Further, when the device under test 100 is mounted in a state where the performance board 16 is mounted on the test head 14, each of the plurality of head side connectors 30 and the corresponding terminal of the device under test 100 are electrically connected. Connect to. Thereby, the performance board 16 transmits the test signal output via the head-side connector 30 to the corresponding terminal of the device under test 100, and also corresponds the output signal output from the terminal of the device under test 100. It can be transmitted to the head side connector 30.

  The apparatus main body 18 generates a test pattern and supplies it to the test head 14. Further, the apparatus body 18 receives the comparison signal generated by the test head 14 and compares the comparison signal with an expected value signal to determine whether the device under test 100 is good or bad.

  The measuring device 20 measures the degree of deterioration of the plurality of head side connectors 30. That is, the measuring device 20 measures the degree of deterioration that represents the degree of deterioration that occurs when the head-side connector 30 is repeatedly attached to and detached from the board-side connector 32. As an example, the measurement apparatus 20 may be configured using a part of the configuration included in the test head 14. Further, the measuring device 20 may be provided in the device main body 18 with some components and functions.

  FIG. 2 shows the configuration of the measuring apparatus 20 according to this embodiment together with the test head 14. The measurement apparatus 20 includes a measurement board 40, a signal generation unit 42, a signal detection unit 44, a frequency characteristic calculation unit 46, and a deterioration degree calculation unit 48.

  The measurement board 40 is attached to the test head 14 instead of the performance board 16. In this case, the measurement board 40 may be attached to the test head 14 instead of the performance board 16 including the mother board. The measurement board 40 includes a plurality of measurement connectors 50. The plurality of measurement connectors 50 are electrically connected to the plurality of head-side connectors 30 on a one-to-one basis when attached to the test head 14. As an example, each of the plurality of measurement connectors 50 may be a coaxial connector that is electrically connected to the head-side connector 30 by fitting with the corresponding head-side connector 30.

  The signal generator 42 generates a measurement signal. Then, the signal generator 42 passes the measurement signal through the head-side connector 30 and the measurement connector 50 connected to each of the plurality of head-side connectors 30. The signal detection unit 44 detects a plurality of measurement signals that have passed through the plurality of head-side connectors 30. As an example, the signal generation unit 42 and the signal detection unit 44 may be configured by diverting a signal generation device and a signal detection device that are included in the test head 14 and perform input / output with respect to the debiased device under test 100. .

  Here, in the present embodiment, the signal generator 42 is connected to a plurality of first head-side connectors 30-1 that are the head-side connectors 30. In the present embodiment, the signal detection unit 44 is connected to a plurality of second head-side connectors 30-2 that are head-side connectors 30 different from the first head-side connector 30-1. Further, in the present embodiment, the measurement board 40 further includes a wiring part 52. The wiring unit 52 measures each of the plurality of first measurement connectors 50-1 that are measurement connectors 50 that are connected to the first head-side connector 30-1 when the measurement board 40 is attached to the test head 14. When the board 40 is attached to the test head 14, the board 40 is electrically connected to any one of the second measurement connectors 50-2 which are measurement connectors 50 connected to the second head-side connector 30-2.

  Accordingly, in the present embodiment, each of the plurality of first head-side connectors 30-1 is connected to any one of the plurality of second head-side connectors 30-2 via the wiring portion 52, and thus a plurality of A set of the first head-side connector 30-1 and the second head-side connector 30-2 can be formed. Then, the signal generator 42 can pass the generated measurement signal through a plurality of sets of the first head-side connector 30-1 and the second head-side connector 30-2 connected via the wiring portion 52. In the present embodiment, the signal detection unit 44 outputs a plurality of measurement signals that have passed through the plurality of sets of the first head side connector 30-1 and the second head side connector 30-2 connected via the wiring unit 52. Can be detected.

  The frequency characteristic calculation unit 46 calculates a plurality of measurement frequency characteristics that are the respective frequency characteristics of the plurality of head-side connectors 30 based on the plurality of measurement signals that have passed through the plurality of head-side connectors 30. In the present embodiment, the frequency characteristic calculation unit 46 is based on a plurality of measurement signals that have passed through a plurality of sets of the first head-side connector 30-1 and the second head-side connector 30-2, and the first head-side connector 30-1. And the measurement frequency characteristic which synthesize | combined the frequency characteristic of the 2nd head side connector 30-2 is calculated about each of several sets.

  For example, the frequency characteristic calculation unit 46 may generate a measurement signal including each frequency component within the measurement frequency range from the signal generation unit 42. Then, the frequency characteristic calculation unit 46 calculates the amplitude change amount and the phase change amount for each frequency between the original measurement signal generated from the signal generation unit 42 and the measurement signal after passing detected by the signal detection unit 44. By calculating, the frequency characteristics of the head-side connector 30 (or the combined characteristics of the frequency characteristics of the first head-side connector 30-1 and the frequency characteristics of the second head-side connector 30-2) may be calculated.

  The deterioration degree calculation unit 48 calculates the deterioration degree of each of the plurality of head-side connectors 30 based on the difference between the reference frequency characteristic that is the reference frequency characteristic and the measurement frequency characteristic. In the present embodiment, the deterioration degree calculation unit 48 determines the first and second head side connectors 30-1 and 30-2 based on the difference between the reference frequency characteristic and the measurement frequency characteristic. A degree of deterioration is calculated by combining the degree of deterioration of the first head-side connector 30-1 and the degree of deterioration of the second head-side connector 30-2.

  For example, the reference frequency characteristic may be a measurement frequency characteristic at the time of the first measurement after the head-side connector 30 is attached to the test head 14. For example, the reference frequency characteristic may be a frequency characteristic of the head-side connector 30 measured in advance at the time of shipment from the factory, or may be a frequency characteristic of the head-side connector 30 determined by specifications.

  FIG. 3 shows a measurement flow by the measuring apparatus 20 according to the present embodiment. The measuring device 20 repeats the degradation degree measurement processing in steps S1001 to S1007 every arbitrary period (S1000, S1008). As an example, the measurement device 20 may perform the deterioration degree measurement processing in steps S1001 to S1007 every time the test device 10 is calibrated.

  In the deterioration degree measurement process, first, the measurement board 40 is mounted on the test head 14, and the plurality of head-side connectors 30 provided on the test head 14 are in one-to-one correspondence with the plurality of measurement connectors 50 provided on the measurement board 40. Electrical connection is made (S1001). As a result, each of the plurality of first head-side connectors 30-1 is electrically connected to the corresponding second head-side connector 30-2 via the wiring portion 52.

  Next, the measuring apparatus 20 sequentially selects a set of the first head side connector 30-1 and the second head side connector 30-2 connected to each other via the wiring portion 52 for each set. Then, the measuring device 20 performs the processes of steps S1003 to S1005 for each set of the first head-side connector 30-1 and the second head-side connector 30-2 to calculate the degree of deterioration (S1002, S1006).

  In the processing of steps S1003 to S1005, first, the signal generator 42 generates a measurement signal and passes the measurement signal to the selected pair of first head-side connector 30-1 and second head-side connector 30-2. Let Then, the signal detection unit 44 detects the measurement signal that has passed through the selected pair of the first head-side connector 30-1 and the second head-side connector 30-2 (S1003).

  Next, the frequency characteristic calculation unit 46 based on the measurement signal detected by the signal detection unit 44 measures the measurement frequency characteristics of the selected first head side connector 30-1 and second head side connector 30-2. Is calculated (S1004). Next, the deterioration degree calculation unit 48 determines the deterioration degree of the selected pair of the first head side connector 30-1 and the second head side connector 30-2 based on the difference between the reference frequency characteristic and the measurement frequency characteristic. Calculate (S1005).

  When the calculation of the deterioration degree is completed for all the groups (S1006), the measurement board 40 attached to the test head 14 is then removed (S1007). Thus, the deterioration degree measurement process in steps S1001 to S1007 ends (S1008). Then, when the first head-side connector 30-1 and the second head-side connector 30-2 with a deterioration degree equal to or greater than a specified value are present, the measuring device 20 includes the first head with a deterioration degree equal to or greater than a specified value. Notification may be made to the outside for the purpose of exchanging the side connector 30-1 and the second head side connector 30-2.

  According to such a measuring apparatus 20 according to the present embodiment, the deterioration degree of the plurality of head-side connectors 30 included in the test head 14 is determined based on a set of the first head-side connector 30-1 and the second head-side connector 30-. Every two can be measured easily and accurately. Therefore, according to such a measuring apparatus 20, it is possible to replace each of the plurality of head-side connectors 30 provided on the test head 14 at an appropriate timing, instead of replacing them at once.

  Note that the measuring device 20 may measure the degree of deterioration of a connector provided in a device other than the test device. That is, the measuring device 20 has a plurality of first connectors, and a plurality of first connectors in a target device to which a unit having a plurality of second connectors electrically connected to the plurality of first connectors one-on-one is attached and detached. The degree of deterioration of one connector may be measured. In this case, the measuring device 20 handles the plurality of first connectors in the target device in the same manner as the plurality of head-side connectors 30, handles the unit in the same manner as the performance board 16, and treats the second connector in the same manner as the board-side connector 32. handle. Thereby, the measuring apparatus 20 can measure the deterioration degree of the some 1st connector with which the target apparatus was equipped similarly to the case where the deterioration degree of the some head side connector 30 of the test apparatus 10 is measured.

  FIG. 4 shows an example of the configuration of the deterioration degree calculation unit 48 according to the present embodiment. As an example, the deterioration degree calculation unit 48 may include a reference frequency characteristic storage unit 62, an amplitude difference calculation unit 64, and a deterioration degree calculation unit 66.

  The reference frequency characteristic storage unit 62 stores the reference frequency characteristic. As an example, the reference frequency characteristic storage unit 62 may store the measurement frequency characteristic detected at the first measurement for each head-side connector 30 as the reference frequency characteristic. For each of the plurality of head-side connectors 30, the amplitude difference calculation unit 64 has an amplitude for each frequency between the reference frequency characteristic stored in the reference frequency characteristic storage unit 62 and the measured frequency characteristic detected by the frequency characteristic calculation unit 46. Calculate the difference.

  The deterioration degree calculation unit 66 calculates the deterioration degree of each of the plurality of head side connectors 30 based on the difference value between the maximum value and the minimum value in the amplitude difference for each frequency within the measurement frequency range. Instead, the deterioration degree calculation unit 66 may calculate the deterioration degree for each of the plurality of head side connectors 30 based on the integral value of the absolute value of the amplitude difference for each frequency within the measurement frequency range.

  FIG. 5 shows an example (A, B, C) of measurement frequency characteristics input to the deterioration degree calculation unit 48. FIG. 5A shows an example of the measured frequency characteristics of the head-side connector 30 when there is no deterioration. B and C in FIG. 5 show an example of the measured frequency characteristics of the head-side connector 30 when it is deteriorated.

  When the head-side connector 30 is not deteriorated, the frequency characteristic calculation unit 46 outputs a measurement frequency characteristic as shown in FIG. 5A as an example. The head-side connector 30 is deteriorated by repeated attachment and detachment with the board-side connector 32, and the amplitude characteristic is attenuated. For example, in the head-side connector 30, the attenuation of the amplitude characteristic due to deterioration is larger on the high frequency side than on the low frequency side. In this case, for example, the frequency characteristic calculation unit 46 outputs the measured frequency characteristic changed as shown in FIG. 5A to FIG. 5B. Further, the head-side connector 30 may have an amplitude characteristic having a peak on the plus side or the minus side at a specific frequency due to deterioration. In this case, for example, the frequency characteristic calculation unit 46 outputs the measured frequency characteristic changed as shown in FIG. 5A to FIG. 5C.

  FIG. 6 shows the amplitude difference for each frequency calculated by the amplitude difference calculation unit 64 and the maximum value and the minimum value of the amplitude difference when the measurement frequency characteristic of FIG. 5 is input. FIG. 7 shows the amplitude difference for each frequency calculated by the amplitude difference calculation unit 64 and the integral value of the absolute value of the amplitude difference when the measurement frequency characteristic of FIG. 5 is input.

  6 and FIG. 7D show the amplitude difference for each frequency calculated by the amplitude difference calculation unit 64 when the measured frequency characteristic of FIG. 5A is input, and E in FIG. 6 and FIG. 5 shows the amplitude difference for each frequency calculated by the amplitude difference calculation unit 64 when the measurement frequency characteristic of B is input, and F in FIGS. 6 and 7 indicates that the measurement frequency characteristic of C in FIG. 5 is input. In this case, the amplitude difference for each frequency calculated by the amplitude difference calculation unit 64 is shown. Further, Fmax in FIG. 6 represents the maximum value of the amplitude difference of F within the measurement frequency range, and Fmin of FIG. 6 represents the minimum value of the amplitude difference of F within the measurement frequency range. Further, S in FIG. 7 indicates the integral value of the absolute value of the amplitude difference of F within the measurement frequency range.

  When there is no deterioration, the head-side connector 30 has almost no amplitude difference between the reference frequency characteristic and the measurement frequency characteristic at each frequency within the measurement frequency range, as shown in D of FIG. On the other hand, when the head side connector 30 is deteriorated, an amplitude difference is generated between the reference frequency characteristic and the measurement frequency characteristic at each frequency within the measurement frequency range as shown in E of FIG. This amplitude difference increases as the deterioration progresses. Therefore, the deterioration degree calculation unit 48 can measure the deterioration degree of the head-side connector 30 based on the amplitude difference between the reference frequency characteristic and the measurement frequency characteristic.

  Further, when a peak occurs in the amplitude difference at a specific frequency due to deterioration, the head-side connector 30 has a maximum value of the amplitude difference between the reference frequency characteristic and the measured frequency characteristic (FIG. 6), as shown in F of FIG. Fmax) and the minimum value (Fmim in FIG. 6) increase. Therefore, the deterioration degree calculation unit 48 uses the difference value between the maximum value and the minimum value of the amplitude difference for each frequency within the measurement frequency range as the deterioration degree of the head-side connector 30, so that the peak characteristic appears at a specific frequency of the passing signal. Even when this occurs, an appropriate degree of deterioration can be output.

  Further, when a peak occurs in the amplitude of a signal at a specific frequency due to deterioration, the head-side connector 30 integrates the absolute value of the absolute value of the amplitude difference for each frequency within the measurement frequency range as shown in S of FIG. Becomes larger. Therefore, the deterioration degree calculation unit 48 uses the integral value of the absolute value of the amplitude difference for each frequency within the measurement frequency range as the deterioration degree of the head-side connector 30, thereby causing a peak characteristic at a specific frequency of the passing signal. In addition, an appropriate deterioration degree can be output.

  FIG. 8 shows the configuration of the measuring apparatus 20 according to the first modification of the present embodiment together with the test head 14. The measuring apparatus 20 according to the present modification employs substantially the same configuration and function as the members having the same reference numerals shown in FIG.

  The measuring device 20 may further include a storage unit 72 and a wearing frequency estimated value calculation unit 74. The storage unit 72 stores the relationship between the number of times the head-side connector 30 and the board-side connector 32 are attached and the degree of deterioration. More specifically, as an example, the storage unit 72 is an arithmetic expression that converts the degree of deterioration calculated by the deterioration degree calculating unit 48 into the number of times the head-side connector 30 and the board-side connector 32 are mounted, or a deterioration degree calculating unit. A table representing the correspondence between the degree of deterioration calculated by 48 and the number of times the head-side connector 30 and the board-side connector 32 are attached may be stored as information representing the relation between the number of attachments and the degree of deterioration. Since the difference value between the maximum value and the minimum value of the amplitude difference for each frequency within the measurement frequency range and the number of times the head-side connector 30 and the board-side connector 32 are mounted have a substantially proportional relationship, the storage unit 72 includes, as an example, An arithmetic expression or a table representing the proportional relationship may be stored.

  Based on the relationship between the number of times the head-side connector 30 and the board-side connector 32 are mounted and the degree of deterioration stored in the storage unit 72, the number-of-attachment-estimated value calculation unit 74 determines the degree of deterioration for each of the plurality of head-side connectors 30. An estimated value of the number of times of wearing corresponding to the degree of deterioration calculated by the calculation unit 48 is obtained. For example, the wearing number estimated value calculation unit 74 may convert the degree of deterioration calculated by the deterioration degree calculating unit 48 into an estimated value of the number of wearing using an arithmetic expression or a table stored in the storage unit 72. .

  According to the measuring apparatus 20 according to the first modified example as described above, an estimated value of the number of times of mounting with the board-side connector 32 is presented to the user for each of the plurality of head-side connectors 30 without providing a plurality of counters. be able to. Therefore, according to the measuring device 20, it is possible to present the user with the appropriate replacement timing for each of the plurality of head-side connectors 30 in an easily understandable manner.

  FIG. 9 shows the configuration of the measuring apparatus 20 according to the second modification of the present embodiment together with the test head 14. The measuring apparatus 20 according to the present modification employs substantially the same configuration and function as the members having the same reference numerals shown in FIG.

  In the present modification, the wiring unit 52 of the measurement board 40 includes a switching unit 80. The switching unit 80 includes a first switching circuit 84, a second switching circuit 86, and a connection line 88.

  The first switching circuit 84 selects any one of the plurality of first measurement connectors 50-1. The second switching circuit 86 selects any one of the plurality of second measurement connectors 50-2. The connection line 88 electrically connects one first measurement connector 50-1 selected by the first switching circuit 84 and one second measurement connector 50-2 selected by the second switching circuit 86. Connecting. In such a switching unit 80, when the measurement board 40 is attached to the test head 14, each of the plurality of first measurement connectors 50-1 connected to the first head-side connector 30-1 is used by the measurement board 40. When attached to the test head 14, it is connected to any one of the second measurement connectors 50-2 connected to the second head side connector 30-2.

  FIG. 10 shows a processing flow of the measuring apparatus 20 according to the second modification. The measuring apparatus 20 according to the present modification first selects each of the plurality of first head-side connectors 30-1 one by one, and the following first measurement is performed on the selected first head-side connector 30-1. A phase (S1101) and a second measurement phase (S1102) are performed (S1100, S1103).

  In the first measurement phase (S1101), the switching unit 80 selects the selected first head-side connector 30-1 and one second head-side connector 30-2 among the plurality of second head-side connectors 30-2. Connect. The signal generator 42 passes the measurement signal through a pair of the first head-side connector 30-1 and the second head-side connector 30-2 that are connected to each other via the switching unit 80. The signal detection unit 44 detects a measurement signal that has passed through a pair of the first head-side connector 30-1 and the second head-side connector 30-2 that are connected to each other via the switching unit 80. Then, the frequency characteristic calculation unit 46 is based on the measurement signal detected by the signal detection unit 44, and a pair of the first head side connector 30-1 and the second head side connector 30 that are connected to each other via the switching unit 80. -2 is a measurement frequency characteristic that is a composite frequency characteristic.

  Next, in the second measurement phase (S1102), the switching unit 80 is different from the selected first head side connector 30-1 and the second head side connector 30-2 connected in the first measurement phase. The two second head side connectors 30-2 are connected. The signal generator 42 passes the measurement signal through a pair of the first head-side connector 30-1 and the second head-side connector 30-2 that are connected to each other via the switching unit 80. The signal detection unit 44 detects a measurement signal that has passed through a pair of the first head-side connector 30-1 and the second head-side connector 30-2 that are connected to each other via the switching unit 80. Then, the frequency characteristic calculation unit 46 is based on the measurement signal detected by the signal detection unit 44, and a pair of the first head side connector 30-1 and the second head side connector 30 that are connected to each other via the switching unit 80. -2 is a measurement frequency characteristic that is a composite frequency characteristic.

  Note that the measurement apparatus 20 may perform measurement phases after the third measurement phase in addition to the first measurement phase and the second measurement phase. After the third measurement phase, the measuring apparatus 20 connects one second head side connector 30-2 different from the second head side connector 30-2 connected in the previous measurement phase, The measurement frequency characteristic is calculated in the same manner as in the first measurement phase and the second measurement phase.

  When the first measurement phase and the second measurement phase are finished for each of the plurality of first head-side connectors 30-1 (S1103), the deterioration degree calculation unit 48 subsequently calculates the first measurement phase calculated in the first measurement phase. A plurality of measurement frequency characteristics for each set of the head side connector 30-1 and the second head side connector 30-2, and the first head side connector 30-1 and the second head side connector 30- calculated in the second measurement phase. Based on the plurality of measurement frequency characteristics for each of the two groups, the degree of deterioration of each of the plurality of head side connectors 30 is calculated (S1104).

  As an example, the deterioration degree calculation unit 48 includes a combination relationship between the first head-side connector 30-1 and the second head-side connector 30-2 that are connected to each other via the switching unit 80 in each of a plurality of measurement phases. The matrix calculation formula based on the measurement frequency characteristics for each set of the first head side connector 30-1 and the second head side connector 30-2 calculated in each of the plurality of measurement phases is solved. Then, the degradation degree calculation unit 48 calculates the measurement frequency characteristics of each of the plurality of first head-side connectors 30-1 and each of the plurality of second head-side connectors 30-2 by solving the matrix arithmetic expression. It's okay.

  According to such a measuring apparatus 20 according to this modification, it is possible to independently measure the deterioration degrees of the plurality of head-side connectors 30 included in the test head 14. Therefore, according to the test apparatus 10 including such a measuring apparatus 20, each of the plurality of head-side connectors 30 can be replaced at an appropriate timing.

  Further, the deterioration degree calculation unit 48 may further determine whether or not the deterioration degree is equal to or greater than a specified value indicating a deterioration degree at which the head-side connector 30 should be replaced. Thereby, the deterioration degree calculation part 48 can make a user recognize more clearly the timing which should replace | exchange the head side connector 30. FIG.

  Furthermore, as an example, the deterioration degree calculation unit 48 determines a total deterioration degree in a set of the first head side connector 30-1 and the second head side connector 30-2 calculated in the first measurement phase. A set larger than the value and a set having a total deterioration degree larger than a predetermined value among the set of the first head side connector 30-1 and the second head side connector 30-2 calculated in the second measurement phase. The head-side connector 30 that is included in common with each other may be determined to have a degree of deterioration greater than a specified value. Thereby, the deterioration degree calculation unit 48 can more easily determine the appropriate replacement timing of each head-side connector 30.

  FIG. 11 shows the configuration of the measuring apparatus 20 according to the third modification of the present embodiment together with the test head 14. The measuring apparatus 20 according to the present modification employs substantially the same configuration and function as the members having the same reference numerals shown in FIG.

  The test head 14 according to this modification includes at least one connector module 90 that serves as a replacement unit for the head-side connector 30 with respect to the test head 14. In the test head 14, a plurality of head side connectors 30 can be exchanged in units of connector modules 90. Each connector module 90 includes a plurality of first head-side connectors 30-1 that are head-side connectors 30 to which the signal generation unit 42 is connected and a plurality of second heads 30 that are head-side connectors 30 to which the signal detection unit 44 is connected. Head side connector 30-2.

  The wiring part 52 in this modification is a second measurement connector that connects each of the plurality of first measurement connectors 50-1 connected to the first head side connector 30-1 to the first head side connector 30-1. 50-2 and connected to the second measurement connector 50-2 provided in the same connector module 90 as the corresponding first head-side connector 30-1. The frequency characteristic calculation unit 46 calculates a measurement frequency characteristic for each set of the first head-side connector 30-1 and the second head-side connector 30-2 connected to each other via the wiring unit 52. The deterioration degree calculation unit 48 calculates the deterioration degree for each set of the plurality of head side connectors 30 based on the plurality of measurement frequency characteristics for each set of the first head side connector 30-1 and the second head side connector 30-2. To do.

  According to such a measuring apparatus 20, when the deterioration degree of a pair of the first head side connector 30-1 and the second head side connector 30-2 connected to each other via the wiring portion 52 is larger than a specified value, for example. If determined, the one set of the first head side connector 30-1 and the second head side connector 30-2 can be exchanged by exchanging one connector module 90. Thereby, according to the measuring apparatus 20, the head side connector 30 can be exchanged efficiently.

  FIG. 12 shows the configuration of the measuring apparatus 20 according to the fourth modification of the present embodiment together with the test head 14. The measuring apparatus 20 according to the present modification employs substantially the same configuration and function as the members having the same reference numerals shown in FIG.

  In the measurement apparatus 20 according to this modification, one of the signal generation unit 42 and the signal detection unit 44 is provided on the measurement board 40, and the other is provided on the test head 14. Thereby, according to the measuring apparatus 20, it is possible to calculate the degree of deterioration of each of the plurality of head side connectors 30 without using, for example, matrix calculation or the like.

  As mentioned above, although this invention was demonstrated using embodiment, the technical scope of this invention is not limited to the range as described in the said embodiment. It will be apparent to those skilled in the art that various modifications or improvements can be added to the above-described embodiment. It is apparent from the scope of the claims that the embodiments added with such changes or improvements can be included in the technical scope of the present invention.

A configuration of a test apparatus 10 according to the present embodiment is shown together with a device under test 100. The structure of the measuring apparatus 20 which concerns on this embodiment is shown with the test head 14. FIG. The measurement flow by the measuring apparatus 20 which concerns on this embodiment is shown. An example of the structure of the deterioration degree calculation part 48 which concerns on this embodiment is shown. An example (A, B, C) of the measurement frequency characteristic input to the deterioration degree calculation unit 48 is shown. FIG. 6 shows the amplitude difference for each frequency calculated by the amplitude difference calculation unit 64 and the maximum value and the minimum value of the amplitude difference when the measurement frequency characteristic of FIG. 5 is input. FIG. 6 shows the amplitude difference for each frequency calculated by the amplitude difference calculation unit 64 and the integral value of the absolute value of the amplitude difference when the measurement frequency characteristic of FIG. 5 is input. The structure of the measuring apparatus 20 which concerns on the 1st modification of this embodiment is shown with the test head 14. FIG. The structure of the measuring apparatus 20 which concerns on the 2nd modification of this embodiment is shown with the test head 14. FIG. The processing flow of the measuring apparatus 20 which concerns on a 2nd modification is shown. The structure of the measuring apparatus 20 which concerns on the 3rd modification of this embodiment is shown with the test head 14. FIG. The measuring apparatus 20 according to the present modification employs substantially the same configuration and function as the members having the same reference numerals shown in FIG. The structure of the measuring apparatus 20 which concerns on the 4th modification of this embodiment is shown with the test head 14. FIG.

Explanation of symbols

DESCRIPTION OF SYMBOLS 10 Test apparatus 14 Test head 16 Performance board 18 Apparatus main body 20 Measuring apparatus 30 Head side connector 32 Board side connector 40 Measurement board 42 Signal generation part 44 Signal detection part 46 Frequency characteristic calculation part 48 Degradation degree calculation part 50 Measurement connector 52 Wiring Unit 62 Reference frequency characteristic storage unit 64 Amplitude difference calculation unit 66 Deterioration degree calculation unit 72 Storage unit 74 Wearing number estimated value calculation unit 80 Switching unit 82 Determination unit 84 First switching circuit 86 Second switching circuit 88 Connection line 90 Connector module 100 Device under test

Claims (9)

A test apparatus for testing a device under test,
A test head having a plurality of head side connectors;
A performance board having a plurality of board-side connectors that are attached to and detached from the test head and electrically connected to the plurality of head-side connectors on a one-to-one basis when attached to the test head;
A measuring device for measuring the degree of deterioration of the plurality of head side connectors,
The measuring device is
A measurement board that is attached to the test head instead of the performance board and includes a plurality of measurement connectors that are electrically connected to the plurality of head-side connectors on a one-to-one basis when attached;
For each of the plurality of head-side connectors, a signal generator that passes measurement signals to the head-side connector and the measurement connector;
A signal detector that detects the plurality of measurement signals that have passed through the plurality of head-side connectors;
Based on the plurality of measurement signals that have passed through the plurality of head-side connectors, a frequency characteristic calculation unit that calculates a plurality of measurement frequency characteristics that are respective frequency characteristics of the plurality of head-side connectors;
A test apparatus comprising: a deterioration degree calculating unit that calculates the deterioration degree based on a difference between a reference frequency characteristic that is a reference frequency characteristic and the measurement frequency characteristic for each of the plurality of head-side connectors. The test apparatus according to claim 1, wherein the deterioration degree calculation unit calculates the deterioration degree for each of the plurality of head-side connectors based on an amplitude difference for each frequency between the reference frequency characteristic and the measurement frequency characteristic. The degree of deterioration calculation unit calculates the degree of deterioration for each of the plurality of head-side connectors based on a difference value between a maximum value and a minimum value in an amplitude difference for each frequency within a measurement frequency range. The test apparatus described. The test apparatus according to claim 2, wherein the deterioration degree calculation unit calculates the deterioration degree for each of the plurality of head side connectors based on an integral value of an absolute value in an amplitude difference for each frequency. A storage unit that stores a relationship between the number of times the head-side connector and the board-side connector are attached and the degree of deterioration;
The test apparatus according to claim 1, further comprising: a mounting number estimated value calculation unit that calculates an estimated value of the number of mountings corresponding to the degree of deterioration for each of the plurality of head-side connectors. The signal generator is connected to a plurality of first head-side connectors that are the head-side connectors,
The signal detection unit is connected to a plurality of second head side connectors which are the head side connectors different from the first head side connectors,
In the first measurement phase, when the measurement board is attached to the test head, the measurement board is configured to connect each of the plurality of first board side connectors connected to the first head side connector to the test board. Connected to any one of the second board-side connectors connected to the second head-side connector when attached to the head, and in the second measurement phase, each of the plurality of first head-side connectors is connected to the first head-side connector. A switching unit for connecting to any one of the second board side connectors different from the second board side connector connected in one measurement phase;
In the first measurement phase and the second measurement phase, the frequency characteristic calculation unit performs measurement for each set of the first head-side connector and the second head-side connector connected to each other via the switching unit. Calculate frequency characteristics,
The deterioration degree calculation unit includes a plurality of measurement frequency characteristics for each set of the first head-side connector and the second head-side connector calculated in the first measurement phase, and the calculation calculated in the second measurement phase. The test apparatus according to claim 1, wherein the degree of deterioration of each of the plurality of head-side connectors is calculated based on a plurality of measurement frequency characteristics for each set of the first head-side connector and the second head-side connector. The deterioration degree calculation unit includes a set having a total deterioration degree larger than a predetermined value among a set of the first head side connector and the second head side connector calculated in the first measurement phase; The head-side connector that is commonly included in the set of the first head-side connector and the second head-side connector calculated in the second measurement phase and having a total deterioration degree larger than a predetermined value. The test apparatus according to claim 6, wherein the deterioration degree is determined to be greater than a specified value. The test head has at least one connector module serving as a replacement unit for the head-side connector with respect to the test head,
The connector module includes a plurality of first head-side connectors that are the head-side connectors to which the signal generation unit is connected, and a plurality of second head-side connectors that are the head-side connectors to which the signal detection unit is connected. Including
When the measurement board is attached to the test head, each of the plurality of first board side connectors connected to the first head side connector when the measurement board is attached to the test head. A wiring portion connected to a second board side connector provided in the same connector module as the corresponding first head side connector, which is a second board side connector connected to the second head side connector,
The frequency characteristic calculation unit calculates a measurement frequency characteristic for each set of the first head side connector and the second head side connector connected to each other via the wiring unit,
The deterioration degree calculating unit is configured to deteriorate the first head side connector and the second head side connector for each set based on a plurality of measurement frequency characteristics for each set of the first head side connector and the second head side connector. The test apparatus according to claim 1, wherein the degree is calculated. Deterioration degree of the plurality of first connectors in a target device having a plurality of first connectors and a unit having a plurality of second connectors electrically connected to the plurality of first connectors on a one-to-one basis. A measuring device for measuring
A measurement board that is mounted on the target device instead of the unit and has a plurality of measurement connectors that are electrically connected to the plurality of first connectors on a one-to-one basis when mounted;
For each of the plurality of first connectors, a signal generator that passes measurement signals to the first connector and the measurement connector;
A signal detector that detects the plurality of measurement signals that have passed through the plurality of first connectors;
A frequency characteristic calculation unit that calculates a plurality of measurement frequency characteristics that are respective frequency characteristics of the plurality of first connectors based on the plurality of measurement signals that have passed through the plurality of first connectors;
A measurement apparatus comprising: a deterioration degree calculation unit that calculates the deterioration degree based on a difference between a reference frequency characteristic that is a reference frequency characteristic and the measurement frequency characteristic for each of the plurality of first connectors.

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