JP4969890B2 - Piezoelectric device - Google Patents
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- JP4969890B2 JP4969890B2 JP2006099437A JP2006099437A JP4969890B2 JP 4969890 B2 JP4969890 B2 JP 4969890B2 JP 2006099437 A JP2006099437 A JP 2006099437A JP 2006099437 A JP2006099437 A JP 2006099437A JP 4969890 B2 JP4969890 B2 JP 4969890B2
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- 239000002184 metal Substances 0.000 claims description 47
- 229910052751 metal Inorganic materials 0.000 claims description 47
- 238000003466 welding Methods 0.000 claims description 13
- 239000013078 crystal Substances 0.000 description 20
- XEEYBQQBJWHFJM-UHFFFAOYSA-N iron Substances [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 13
- 239000000463 material Substances 0.000 description 10
- 238000007639 printing Methods 0.000 description 5
- 230000005284 excitation Effects 0.000 description 3
- 230000000007 visual effect Effects 0.000 description 3
- 239000000853 adhesive Substances 0.000 description 2
- 230000001070 adhesive effect Effects 0.000 description 2
- 230000032683 aging Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000007772 electroless plating Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- JEIPFZHSYJVQDO-UHFFFAOYSA-N iron(III) oxide Inorganic materials O=[Fe]O[Fe]=O JEIPFZHSYJVQDO-UHFFFAOYSA-N 0.000 description 2
- 230000010355 oscillation Effects 0.000 description 2
- 239000000919 ceramic Substances 0.000 description 1
- 229910017052 cobalt Inorganic materials 0.000 description 1
- 239000010941 cobalt Substances 0.000 description 1
- GUTLYIVDDKVIGB-UHFFFAOYSA-N cobalt atom Chemical compound [Co] GUTLYIVDDKVIGB-UHFFFAOYSA-N 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 239000008151 electrolyte solution Substances 0.000 description 1
- 238000009713 electroplating Methods 0.000 description 1
- 238000000605 extraction Methods 0.000 description 1
- 230000001771 impaired effect Effects 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- 230000001678 irradiating effect Effects 0.000 description 1
- 238000007648 laser printing Methods 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
- 238000005549 size reduction Methods 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
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- Laser Beam Processing (AREA)
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
Description
本発明は金属カバーを有する圧電デバイスを技術分野として、特に金属カバーに対するレーザの印字に関する。 The present invention relates to a piezoelectric device having a metal cover as a technical field, and more particularly to laser printing on a metal cover.
（発明の背景）
圧電デバイス例えば水晶振動子は周波数や時間の基準源として発振回路に組み込まれ、通信機器を含む各種の電子機器に不可欠部品として内蔵される。通常では、水晶片を密閉封入する金属カバーに周波数や製造元等が印字（表示）され、近年では生産性の点からレーザが用いられている。
(Background of the Invention)
A piezoelectric device such as a crystal resonator is incorporated in an oscillation circuit as a reference source for frequency and time, and is incorporated as an indispensable component in various electronic devices including communication devices. Usually, the frequency, manufacturer, etc. are printed (displayed) on a metal cover that hermetically encloses the crystal piece, and in recent years, a laser is used from the viewpoint of productivity.
（従来技術の一例）
第３図は一従来例を説明する図で、同図（ａ）は水晶振動子の断面図、同図（ｂ）は上面図、同図（ｃ）は文字の拡大図である。
(Example of conventional technology)
3A and 3B are diagrams for explaining a conventional example. FIG. 3A is a cross-sectional view of a crystal resonator, FIG. 3B is a top view, and FIG. 3C is an enlarged view of characters.
水晶振動子は容器本体としての金属ベース１に水晶片２を保持し、金属カバー８を被せて密閉封入してなる。金属ベース１はサポート部３ａを有する一対の気密端子３が貫通してなり、外周にフランジを有する。フランジには溶接用の図示しない周回する環状突起を有する。符号４はガラスである。 The crystal resonator is formed by holding a crystal piece 2 on a metal base 1 serving as a container body and covering a metal cover 8 in a hermetically sealed manner. The metal base 1 includes a pair of airtight terminals 3 having support portions 3a, and has a flange on the outer periphery. The flange has an annular projection (not shown) for welding. Reference numeral 4 is glass.
水晶片２は両主面に励振電極５ａを有する。励振電極５ａからは両端側に引出電極５ｂが延出し、導電性接着剤６によって気密端子３のサポート部３ａに固着される。これにより、水晶片２は金属ベース１上に保持される。 The crystal piece 2 has excitation electrodes 5a on both main surfaces. Lead electrodes 5 b extend from both ends of the excitation electrode 5 a and are fixed to the support portion 3 a of the airtight terminal 3 by the conductive adhesive 6. Thereby, the crystal piece 2 is held on the metal base 1.
金属カバー８は凹状としてフランジを有し、母材をＦe（鉄）として両主面（内周面及び外周面）にＮi膜を有する。Ｎi膜は電界メッキや無電界メッキによって、例えば厚みを５μｍとして形成される。そして、金属カバー８と金属ベース１とのフランジが抵抗溶接によって接合され、水晶片２を密閉封入する。そして、金属カバー８にはレーザによって例えば周波数や製造元及び不図示のロット番号が印字される。 The metal cover 8 has a concave flange and a base material Fe (iron) and Ni films on both main surfaces (inner and outer peripheral surfaces). The Ni film is formed, for example, with a thickness of 5 μm by electroplating or electroless plating. And the flange of the metal cover 8 and the metal base 1 is joined by resistance welding, and the crystal piece 2 is hermetically sealed. For example, a frequency, a manufacturer, and a lot number (not shown) are printed on the metal cover 8 by a laser.
四角で示す周波数は一般に算用数字が、製造元は略称としてのアルファベットからなる記号（ここではＮＤＫ）が印字される。なお、図では周波数は単位（ＭＨｚ）が示されているが、小型化に伴い省略される。そして、これらの印字は、各文字の筆順方向に沿ってレーザを順次に照射し、これによる穴７を点とした一本の点線によって形成される。 The frequency indicated by the square is generally printed with a mathematical number, and the manufacturer is printed with an alphabetic symbol (NDK in this case). In addition, although the unit (MHz) is shown for the frequency in the figure, it is abbreviate | omitted with size reduction. These prints are formed by a single dotted line with the hole 7 as a point by sequentially irradiating the laser along the stroke direction of each character.
この場合、数字の４を例示したように、点となる穴７を比較的大きく例えば直径を６０μｍとして線幅を太くし、印字された文字の視認度を高める。なお、ここでの文字の筆順は任意である。なお、Ｎi膜はスパッタや蒸着によっても形成できるが、付着力が弱いのでメッキが採用される。 In this case, as exemplified by the numeral 4, the hole 7 to be a point is relatively large, for example, the diameter is set to 60 μm, and the line width is increased to increase the visibility of the printed characters. Here, the stroke order of the characters is arbitrary. The Ni film can also be formed by sputtering or vapor deposition, but plating is adopted because of its weak adhesion.
（従来技術の問題点）
しかしながら、上記構成の水晶振動子では、金属カバー８に対する印字（文字）が視認されやすくするため、点となる穴７を大きくし、線幅を太くすることに起因して次の問題があった。
(Problems of conventional technology)
However, in the crystal resonator having the above-described configuration, the printing (characters) on the metal cover 8 is easy to be visually recognized. Therefore, the hole 7 as a point is enlarged and the line width is increased. .
すなわち、穴（点）７の直径を大きくするにはレーザの出力レベルを高くするので、穴７の深さ（深度）も大きくなる。この場合、第４図（一部断面図）に示したように、符号Ｐで示すレーザによって、穴７がＮi膜層（約５μｍ）を突き抜けて母材であるＦeまでに到達する。そして、Ｆeが表面に露出する。したがって、母材のＦeは酸化等によって錆やすいため、経年変化を経て致命的欠陥となる気密漏れを生ずる問題があった。 That is, in order to increase the diameter of the hole (point) 7, the laser output level is increased, so that the depth (depth) of the hole 7 is also increased. In this case, as shown in FIG. 4 (partial sectional view), the hole 7 penetrates the Ni film layer (about 5 μm) and reaches the base material Fe by the laser indicated by the reference symbol P. Then, Fe is exposed on the surface. Therefore, since the Fe of the base material is easily rusted by oxidation or the like, there has been a problem of causing an airtight leak that becomes a fatal defect through aging.
そこで、Ｎi膜の厚みを大きくして母材（Ｆe）への穴７の到達を防止することが考えられた。しかし、この場合は、金属カバー８の両主面のいずれにも厚みの大きいＮi膜を有する。したがって、金属カバー８のフランジを金属ベース１の環状突起に抵抗溶接によって接合する際の金属屑、即ちＮi膜の溶融時に生じて飛散する金属屑（Ｎi屑）の量が多くなる問題があった（所謂スプラッシュ）。 Thus, it has been considered to increase the thickness of the Ni film to prevent the hole 7 from reaching the base material (Fe). However, in this case, both the main surfaces of the metal cover 8 have a Ni film having a large thickness. Therefore, there has been a problem that the amount of metal scrap (Ni scrap) generated when the flange of the metal cover 8 is joined to the annular protrusion of the metal base 1 by resistance welding, that is, the metal scrap (Ni scrap) scattered when the Ni film is melted is increased. (So-called splash).
なお、スプラッシュによる金属屑が水晶片２に付着すると振動特性を損ない、例えば周波数変動やクリスタルインピーダンスの増加、さらには質量負荷が過重となって振動自体が停止する。また、電解液中へ金属カバー８を投入してメッキするので、両主面にＮi膜が形成される。 In addition, if the metal scrap due to the splash adheres to the crystal piece 2, the vibration characteristics are impaired, for example, the frequency fluctuation, the crystal impedance increase, and the mass load is excessive, and the vibration itself stops. Further, since the metal cover 8 is put into the electrolytic solution and plated, Ni films are formed on both main surfaces.
このことから、インクを使用した捺印による一般的な表示も考えられたが、この場合はインクの乾燥等が必要で、レーザを使用した印字と比較して作業性が悪化する。また、レーザの出力レベルを小さくして穴７を小さくすればよいが、この場合は文字の線が細くなって視認を困難にする。 For this reason, a general display by a seal using ink has been considered, but in this case, the ink needs to be dried and the workability is deteriorated as compared with printing using a laser. In addition, the laser output level may be reduced to make the hole 7 small, but in this case, the character line becomes thin and the visual recognition becomes difficult.
（発明の目的）
本発明は文字の視認を確実にして、Ｎi膜の厚みを小さくしてスプラッシュを防止した圧電デバイスを提供することを目的とする。
(Object of invention)
It is an object of the present invention to provide a piezoelectric device that prevents the splash by ensuring the visibility of characters and reducing the thickness of the Ni film.
本発明は、特許請求の範囲（請求項１）に示したように、主成分をＦeとした母体にＮi膜を形成した金属カバーが少なくとも圧電片を保持した容器本体に抵抗溶接によって接合され、前記金属カバーにはレーザによる穴を点とした点線から文字が形成された圧電デバイスにおいて、前記点線は前記文字の筆順方向のみならず、前記筆順方向に対する幅方向にも複数の点を有して線幅を太くして、前記穴は前記Ｎi膜の厚み内に形成された構成とする。 In the present invention, as shown in the claims (Claim 1), a metal cover in which a Ni film is formed on a base body having Fe as a main component is joined to a container body holding at least a piezoelectric piece by resistance welding, In the piezoelectric device in which characters are formed from a dotted line with a laser hole as a point on the metal cover, the dotted line has a plurality of points not only in the stroke direction of the character but also in the width direction with respect to the stroke direction. The line width is increased and the hole is formed within the thickness of the Ni film .
このような構成であれば、印字される文字の線幅を太くするので、文字の視認を確実にする。また、線幅は複数の点によって太くするので、複数の点に対応したレーザによる穴の一つひとつは小さくできる。したがって、レーザの出力レベルは低レベルでもよく、穴の深さも小さくできる。 With such a configuration, since the line width of the printed character is increased, the visual recognition of the character is ensured. Further, since the line width is thickened by a plurality of points, each of the laser holes corresponding to the plurality of points can be made small. Therefore, the laser output level may be low and the hole depth can be reduced.
これにより、Ｎi膜の厚みを大きくすることなく、レーザによる穴が母材（Ｆe）にまで到達することなく、母材を露出させることがない。したがって、錆等を発生することもなく、経年変化による気密封止の漏れを防止できる。そして、Ｎi膜の厚みが小さいことによって、抵抗溶接時のスプラッシュによる問題も抑止できる。 As a result, the thickness of the Ni film is not increased, the laser hole does not reach the base material (Fe), and the base material is not exposed. Therefore, the leakage of the hermetic seal due to aging can be prevented without generating rust and the like. And since the thickness of Ni film is small, the problem by the splash at the time of resistance welding can also be suppressed.
（実施態様項）
本発明の請求項２に示したように、前記Ｎi膜の厚さが５μｍであり、前記穴の深度が３μｍである構成とする。
本発明の請求項３に示したように、前記穴の直径が３０μｍである構成とする。
本発明の請求項４に示したように、前記金属カバーはフランジを有する凹状として、前記容器本体は前記水晶片と電気的に接続する一対の気密端子及び外周にフランジを有する金属ベースとし、前記金属カバーと前記金属ベースとの前記フランジを抵抗溶接によって接合する。これにより、本発明による金属カバー及び金属ベースの一例を具体的にする。
(Embodiment section)
According to a second aspect of the present invention, the thickness of the Ni film is 5 μm, and the depth of the hole is 3 μm.
According to a third aspect of the present invention, the hole has a diameter of 30 μm.
According to a fourth aspect of the present invention, the metal cover has a concave shape having a flange, the container body has a pair of airtight terminals electrically connected to the crystal piece and a metal base having a flange on the outer periphery, The flanges of the metal cover and the metal base are joined by resistance welding. Thereby, an example of the metal cover and the metal base according to the present invention is made concrete.
第１図は本発明の一実施形態を説明する水晶振動子の金属カバーに印字される文字の一例を示す拡大図である。なお、前従来例と同一部分には同番号を付与してその説明は簡略又は省略する。 FIG. 1 is an enlarged view showing an example of characters printed on a metal cover of a crystal unit for explaining an embodiment of the present invention. In addition, the same number is attached | subjected to the same part as a prior art example, and the description is simplified or abbreviate | omitted.
水晶振動子は、前述したように一対の気密端子３のサポート部３ａに水晶片２を固着して金属ベース１上に保持し、電界又は無電界メッキによるＮi膜が母材（Ｆe）の両主面に形成された金属カバー８を膜抵抗溶接によって接合してなる（前第３図参照）。 As described above, the crystal resonator is configured such that the crystal piece 2 is fixed to the support portion 3a of the pair of hermetic terminals 3 and held on the metal base 1, and the Ni film formed by electric field or electroless plating is formed on both the base materials (Fe). A metal cover 8 formed on the main surface is joined by membrane resistance welding (see FIG. 3 above).
そして、金属カバー８には周波数や製造元を表示する文字がレーザによる穴７によって点線として形成される。ここでの点線よる各文字（印字）は、各文字の筆順方向に対する幅方向にも複数の点としての穴７が設けられる。これにより、各文字の線幅を太くする。 The metal cover 8 is formed with a dot indicating a frequency and a letter indicating the manufacturer by the laser hole 7. Each character (printing) by a dotted line here is provided with holes 7 as a plurality of points in the width direction with respect to the stroke direction of each character. This increases the line width of each character.
数字の４を例にすると、筆順に沿って例えば二列の４を形成する。各穴７の直径３０μｍとして従来例（６０μｍ）の１／２とし、線幅をほぼ同等とする。そして、４の垂直部と水平部との交差箇所は、垂直部と水平部とを重畳させず、この例では垂直部を上下に分割する。これにより、交差箇所での穴７が二重にならず、穴７の深さを小さく維持する。４以外の８や、数字以外のＱやＸ及び漢字やかな等の文字であっても同様である。 Taking the number 4 as an example, for example, two rows of 4 are formed along the stroke order. The diameter of each hole 7 is set to 30 μm, which is ½ of the conventional example (60 μm), and the line widths are substantially equal. And the intersection of 4 vertical parts and a horizontal part does not overlap a vertical part and a horizontal part, and in this example, a vertical part is divided | segmented up and down. Thereby, the hole 7 at the intersection is not doubled, and the depth of the hole 7 is kept small. The same applies to characters other than 4, such as 8 other than numbers, such as Q and X, and kanji characters.
このような構成であれば、レーザによる各穴７を小さくするので、穴７の深度も例えば３μｍ程度に浅くなる。これにより、第２図（一部断面図）に示したように、Ｎi膜層を厚くしなくとも、穴７が母材（Ｆe）に到達することなく、Ｎi膜の厚み内に穴７を形成できる。したがって、母材であるＦeが露出しないので、経年変化による錆を防止して気密漏れを防止できる。 With such a configuration, since each hole 7 by the laser is made small, the depth of the hole 7 is also reduced to about 3 μm, for example. As a result, as shown in FIG. 2 (partially sectional view), the hole 7 does not reach the base material (Fe) without increasing the thickness of the Ni film layer, and the hole 7 is formed within the thickness of the Ni film. Can be formed. Therefore, since Fe as a base material is not exposed, rust due to secular change can be prevented and airtight leakage can be prevented.
そして、Ｎｉ膜の厚み（５μｍ）を従来同様として小さくしたままなので、抵抗溶接時のスプラッシュによる問題発生も抑止できる。また、前述のように各文字の筆順方向に対する幅方向即ち線幅方向にも２個の点を設けるので、穴７の線幅を太くできる。したがって、文字の視認を確実にする。 And since the thickness (5 μm) of the Ni film is kept small as in the conventional case, the occurrence of problems due to splash during resistance welding can be suppressed. Further, as described above, since two points are provided in the width direction with respect to the stroke direction of each character, that is, in the line width direction, the line width of the hole 7 can be increased. Therefore, the visual recognition of the characters is ensured.
（他の事項）
上記実施形態では容器本体は金属ベースとしたが、例えば表面実装用と知られる開口端面に金属リング等を有する凹状のセラミックとし、シーム溶接によって接合された金属カバーに印字する場合でも同様に適用できる。この場合、平板状の金属カバーは母材をＦeを主成分としてコバルト等が混入されるのでＮｉ膜が破られても母材は錆にくいものの、同様の効果を期待できる。
(Other matters)
In the above embodiment, the container body is a metal base, but it can be similarly applied to, for example, a concave ceramic having a metal ring or the like on an open end face known for surface mounting and printing on a metal cover joined by seam welding. . In this case, since the flat metal cover contains Fe as a main component and cobalt or the like is mixed therein, even if the Ni film is broken, the base material is hardly rusted, but the same effect can be expected.
また、圧電デバイスは水晶振動子としたが、これに限らず例えばフィルタとする場合や、容器本体内に例えは発振回路を形成するＩＣチップ等を収容して水晶発振器とした場合であっても、同様に適用できる。要は、シーム溶接を含んで抵抗溶接によって接合される金属カバーに印字する場合には基本的に適用できる。 Although the piezoelectric device is a crystal resonator, the present invention is not limited to this. For example, even when a filter is used, or when a crystal oscillator is formed by housing an IC chip or the like that forms an oscillation circuit in a container body, for example. Can be applied as well. In short, it can be basically applied when printing on a metal cover joined by resistance welding including seam welding.
１ 金属ベース（容器本体）、２ 水晶片、３ 気密端子、３ａ サポート部、４ ガラス、５ａ 励振電極、５ｂ 引出電極、６ 導電性接着剤、７ 穴、８ 金属カバー。 DESCRIPTION OF SYMBOLS 1 Metal base (container main body), 2 Crystal piece, 3 Airtight terminal, 3a Support part, 4 Glass, 5a Excitation electrode, 5b Extraction electrode, 6 Conductive adhesive, 7 holes, 8 Metal cover.
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|---|---|---|---|---|
| JPS62256567A (en) * | 1986-04-30 | 1987-11-09 | Canon Inc | Dot image output device |
| JPH07115046B2 (en) * | 1986-11-20 | 1995-12-13 | 川崎製鉄株式会社 | Patterned metal plate |
| JPH0260768A (en) * | 1988-08-26 | 1990-03-01 | Canon Inc | Recording device |
| JPH04339581A (en) * | 1991-05-16 | 1992-11-26 | Nec Corp | Laser marking device |
| JPH06110439A (en) * | 1992-09-24 | 1994-04-22 | Canon Inc | Method and device for character pattern generation |
| JP4077563B2 (en) * | 1998-09-07 | 2008-04-16 | シチズンホールディングス株式会社 | Quartz crystal container and manufacturing method thereof |
| JP2000223177A (en) * | 1999-01-29 | 2000-08-11 | Nec Kansai Ltd | Air-tight terminal, and electronic component using it |
| JP2000236228A (en) * | 1999-02-12 | 2000-08-29 | Daishinku Corp | Airtight sealing structure of piezoelectric vibrator |
| JP3365363B2 (en) * | 1999-08-27 | 2003-01-08 | 日本電気株式会社 | Laser marking device and processing method thereof |
| JP2003088966A (en) * | 2001-09-14 | 2003-03-25 | Hoya Photonics Corp | Laser marking device |
| JP4071191B2 (en) * | 2003-12-22 | 2008-04-02 | 田中貴金属工業株式会社 | Electronic component package lid |
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2006
- 2006-03-31 JP JP2006099437A patent/JP4969890B2/en active Active
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