JP4951654B2 - Static induction generator - Google Patents

Description

  The present invention relates to an electrostatic induction power generation device, and more particularly to an electrostatic induction power generation device including an electret member.

  Conventionally, an electrostatic induction conversion device such as an electrostatic induction power generation device including an electret member is known (see, for example, Patent Document 1).

Patent Document 1 discloses a generator including a first substrate on which a plurality of electrodes are formed at a predetermined interval, and a second substrate on which a plurality of electret films, which are charge holding materials, are formed at a predetermined interval. (Electrostatic induction type generator) is disclosed. The first and second substrates are provided to face each other at a predetermined distance. Further, in the electrostatic induction power generating device disclosed in Patent Document 1, the area of the electret film located in the region facing the electrode is increased or decreased by causing the first and second substrates to vibrate relative to each other. Thus, the amount of charge induced in the electrode is changed by the charge accumulated in the electret film, and the change is output as a current (power generation).
JP 2006-180450 A

  However, in the conventional generator disclosed in Patent Document 1, in order to increase or decrease the area of the electret film located in the region facing the electrodes by vibration, a plurality of electrodes are provided on the first substrate with a predetermined interval. A plurality of electret films are formed on the second substrate at a predetermined interval. In this case, the region between the adjacent electrodes on the first substrate does not directly contribute to power generation. For this reason, since about half of the area of the first substrate does not directly contribute to power generation, there is a problem that it is difficult to improve the power generation efficiency of the generator. That is, conventionally, there is a problem that it is difficult to improve the conversion efficiency between kinetic energy and electric energy in an electrostatic induction conversion device such as a generator.

  The present invention has been made to solve the above-described problems, and one object of the present invention is an electrostatic induction power generating device capable of improving the conversion efficiency between kinetic energy and electric energy. Is to provide.

To achieve the above object, the electrostatic induction generator according to one aspect of the invention, seen including a second electrode which the first electrode and the second wiring which first wiring is connected is connected, first A first substrate in which electrodes and second electrodes are alternately arranged along a predetermined direction; a second substrate including an electret member; the first wiring is connected to the first terminal; and the second wiring is second A first circuit board and a second circuit board are provided so as to face each other with a gap therebetween, and are configured to be movable relative to each other in a predetermined direction . The electret member of the second substrate is reciprocated relatively along a predetermined direction between a first position facing the first electrode of the first substrate and a second position facing the second electrode, Based on the potential difference generated between the first electrode and the second electrode And it is configured so that a current flows to connected rectifier circuit between the first wiring and the second wiring.

  In the electrostatic induction power generating device according to the above aspect, the electret member is preferably formed on an electrode part formed on the second substrate, and a grounded third wiring is connected to the electrode part. Has been.

  In the electrostatic induction power generating device according to the first aspect, preferably, the second substrate further includes a third electrode, and the first electrode and the second electrode are capacitively coupled to at least one of the electret member and the third electrode. It is configured as follows.

  In addition, in order to achieve the said objective, the invention by the other aspects as follows may be sufficient.

  An electrostatic induction conversion device according to another aspect includes a first substrate including a first electrode and a second electrode, the first electrode and the second electrode being installed in a state of being electrically separated from each other at least on the substrate; And a second substrate including an electret member. The first substrate and the second substrate are provided so as to face each other with a gap therebetween, and are configured to be movable relative to each other.

  In the electrostatic induction conversion device according to the other aspect, preferably, the first electrode includes a plurality of first electrode portions formed at intervals, and the second electrode is formed between the first electrode portions. A plurality of second electrode portions.

  The electrostatic induction conversion device according to the other aspect preferably further includes a plurality of conductive layers formed at intervals on the surface of the electret member.

  In this case, preferably, when the first electrode is located in a region corresponding to the conductive layer, the second electrode is located in a region corresponding to a region where the conductive layer is not formed, and the second electrode is connected to the conductive layer. When positioned in the corresponding region, the first electrode is configured to be positioned in the region corresponding to the region where the conductive layer is not formed.

  In the electrostatic induction conversion device according to the other aspect, a charge outflow suppression film is preferably formed on the surface of the electret member.

  The electrostatic induction conversion device according to the other aspect is provided so as to face the first substrate including the first electrode and the first electret member capable of accumulating electric charges with a gap from the first substrate. The second substrate including a second electrode and a second electret member capable of storing electric charge, and the first substrate and the second substrate are configured to be movable relative to each other.

  In the electrostatic induction conversion device according to the other aspect described above, preferably, a first guard provided between the first electret member and the first substrate so as to protrude more laterally than the side surface of the first electret member. An electrode is further provided, and the first guard electrode is for suppressing the electric potential accumulated in the first electret member from affecting the potential of the region facing the first guard electrode on the side of the first electret member. Is provided.

  In the electrostatic induction conversion device according to the other aspect described above, preferably, a second guard is provided between the second electret member and the second substrate so as to protrude from the side surface of the second electret member. An electrode is further provided, and the second guard electrode is for suppressing the electric potential accumulated in the second electret member from affecting the potential of the region facing the second guard electrode on the side of the second electret member. Is provided.

  In the electrostatic induction conversion device according to the other aspect described above, preferably, when the first electrode of the first substrate is located in a region facing the second electret member of the second substrate, the first electret member of the first substrate is When the first electrode of the first substrate is located in the region facing the second electrode of the second substrate and the first electrode of the first substrate is located in the region facing the second electrode of the second substrate, the first electret member of the first substrate is It is comprised so that it may be located in the area | region facing the 2nd electret member of 2 substrates.

In the electrostatic induction conversion device according to the other aspect described above, preferably, the electrostatic induction conversion device further includes a circuit unit for outputting electric charges induced in the first electrode and the second electrode as a current, and the first electret member and the second electret member Are stored with the same polarity, and the first electrode and the second electrode are electrically connected to the circuit portion in a state where the first electrode and the second electrode are electrically connected to each other. Yes.

  In the electrostatic induction conversion device according to the other aspect described above, the circuit unit for outputting the charges induced in the first electrode and the second electrode as a current, and the first electrode and the second electrode are preferably electrically The first electret member and the first electret member, further comprising: a second wiring for electrically connecting the first electrode and the circuit portion to each other and electrically connecting the second electrode and the circuit portion. In the second electret member, charges having different polarities are accumulated.

It is sectional drawing which showed the structure of the electrostatic induction type electric power generating apparatus by 1st Embodiment of this invention. It is the top view which showed the structure of the lower side housing | casing of the electrostatic induction type electric power generating apparatus by 1st Embodiment shown in FIG. It is the top view which showed the structure of the fixed board | substrate of the electrostatic induction type electric power generating apparatus by 1st Embodiment shown in FIG. It is the schematic which showed the structure of the electrostatic induction type electric power generating apparatus by 1st Embodiment shown in FIG. It is the schematic which showed the structure of the electrostatic induction type electric power generating apparatus by 1st Embodiment shown in FIG. It is a figure for demonstrating the electric power generation operation | movement of the electrostatic induction type electric power generating apparatus by 1st Embodiment of this invention. It is the schematic which showed the structure of the electrostatic induction type electric power generating apparatus by 2nd Embodiment of this invention. It is the schematic which showed the structure of the electrostatic induction type electric power generating apparatus by 2nd Embodiment shown in FIG. It is a figure for demonstrating the electric power generation operation | movement of the electrostatic induction type electric power generating apparatus by 2nd Embodiment of this invention. It is the schematic which showed the structure of the electrostatic induction type electric power generating apparatus by 3rd Embodiment of this invention. It is the schematic which showed the structure of the electrostatic induction type electric power generating apparatus by 3rd Embodiment shown in FIG. It is the schematic which showed the structure of the electrostatic induction type electric power generating apparatus by 4th Embodiment of this invention. It is the schematic which showed the structure of the electrostatic induction type electric power generating apparatus by 4th Embodiment shown in FIG. It is the top view which showed the structure of the movable substrate of the electrostatic induction type electric power generating apparatus by 4th Embodiment shown in FIG. It is the top view which showed the structure of the stationary board | substrate of the electrostatic induction type electric power generating apparatus by 4th Embodiment shown in FIG. It is a figure for demonstrating the electric power generation operation | movement of the electrostatic induction type electric power generating apparatus by 4th Embodiment of this invention. It is the schematic which showed the structure of the electrostatic induction type electric power generating apparatus by 5th Embodiment of this invention. It is the schematic which showed the structure of the electrostatic induction type electric power generating apparatus by 5th Embodiment shown in FIG. It is the top view which showed the structure of the movable board | substrate of the electrostatic induction power generating device by 5th Embodiment shown in FIG. It is a figure for demonstrating the electric power generation operation | movement of the electrostatic induction type electric power generating apparatus by 5th Embodiment of this invention. It is the schematic which showed the structure of the electrostatic induction type electric power generating apparatus by 6th Embodiment of this invention. It is the schematic which showed the structure of the electrostatic induction type electric power generating apparatus by 6th Embodiment shown in FIG. It is a figure for demonstrating the electric power generation operation | movement of the electrostatic induction type electric power generating apparatus by 6th Embodiment of this invention. It is the graph which showed the relationship between the space | interval of a current collection part calculated | required by simulation, and electric power generation amount.

  Hereinafter, embodiments of the present invention will be described with reference to the drawings. In the following description of the embodiment, an electrostatic induction power generation device including an electret member will be described as an example of the electrostatic induction conversion device according to the present invention.

(First embodiment)
FIG. 1 is a cross-sectional view illustrating the structure of an electrostatic induction power generating device according to a first embodiment of the present invention. 2-5 is a figure for demonstrating the electrostatic induction type electric power generating apparatus by 1st Embodiment shown in FIG. First, the structure of the electrostatic induction power generating device 1 according to the first embodiment of the present invention will be described with reference to FIGS.

  As shown in FIG. 1, the electrostatic induction power generating device 1 according to the first embodiment includes a lower housing 10 in which a housing portion 10a is formed, and an upper surface of the lower housing 10 so as to close the housing portion 10a. And the bridge rectifier circuit 30 (see FIG. 4). Further, a load 2 (see FIG. 4) driven by the electrostatic induction power generation device 1 is connected to the electrostatic induction power generation device 1.

  As shown in FIGS. 1 and 2, the housing portion 10 a of the lower casing 10 of the electrostatic induction power generating device 1 has a pair of spring members 11 (see FIG. 2) and a pair of spring members 11 in the X direction. A movable substrate 12 made of glass or a silicon substrate configured to be movable (see FIG. 2), a guide portion 13 for guiding the movable substrate 12, a spacer 14 for regulating the position of the movable substrate 12, and 15 (see FIG. 1). Each of the spring members 11 is disposed between the inner surface in the X direction of the storage portion 10 a and the movable substrate 12. The guide part 13 and the spacer 14 are provided so as to extend in the X direction along the inner surface in the arrow Y direction of the storage part 10a. Moreover, the guide part 13 is provided in the bottom face of the accommodating part 10a. The spacer 14 has a function of regulating the position of the movable substrate 12 in the Y direction and is provided on the guide portion 13. The spacer 15 has a function of regulating the position of the movable substrate 12 in the Z direction (see FIG. 1).

  As shown in FIG. 1, the upper housing 20 of the electrostatic induction power generating device 1 guides the movable substrate 12 and a fixed substrate 21 made of glass or a silicon substrate provided so as to face the movable substrate 12. And a guide part 22 for the purpose. In the fixed substrate 21, a spacer 23 having a function of regulating the position of the movable substrate 12 in the Z direction is provided in a region corresponding to the spacer 15. Thereby, the movable substrate 12 and the fixed substrate 21 are configured to be arranged at a predetermined interval. Moreover, the guide part 22 is provided so that it may extend in a X direction (refer FIG. 2) along the inner surface of the Y direction of the accommodating part 10a so that the guide part 13 may be opposed.

Here, in the first embodiment, the main surface 12a on the fixed substrate 21 side of the movable substrate 12 provided in the lower housing 10 is seen in a plan view made of Al or Ti as shown in FIG. Thus, an electrode 121 having a comb shape is formed. The electrode 121 connects a plurality of electrode portions 121a formed to extend in the Y direction with a predetermined interval in the X direction and one end of the plurality of electrode portions 121a, and extends in the X direction. And a connecting portion 121b formed on the surface. Further, as shown in FIG. 4, the electrode portion 121a has a width of about 100 μm to about 1000 μm and a thickness of about 3 μm to about 5 μm.

In the first embodiment, as shown in FIGS. 2 and 4, an electret member 122 made of SiO ₂ is formed on the electrode portion 121 a of the electrode 121 in a region corresponding to the electrode portion 121 a. Specifically, as shown in FIG. 2, a plurality of electret members 122 are formed so as to extend in the Y direction at a predetermined interval in the X direction. Further, as shown in FIG. 4, the electret member 122 has a negative charge accumulated, a width of about 100 μm to about 1000 μm, and a thickness of about 3 μm to about 5 μm.

  In the first embodiment, the main surface 12a on the fixed substrate 21 side of the movable substrate 12 provided in the lower housing 10 is seen in a plan view made of Al or Ti as shown in FIG. A collecting electrode 123 having a comb shape is formed. The current collecting electrode 123 includes a plurality of current collecting portions 123a formed to extend in the Y direction with a predetermined interval in the X direction, and the plurality of current collecting portions 123a are opposite to the connecting portion 121b side of the electrode 121. And a connecting portion 123b formed so as to extend in the X direction. As shown in FIG. 4, the current collector 123 a is provided between the electrode portions 121 a of the electrodes 121, and has a width of about 100 μm to about 1000 μm and a thickness of about 3 μm to about 5 μm. Moreover, the electrode part 121a of the electrode 121 and the current collecting part 123a of the current collecting electrode 123 are provided with an interval L1 of about 10 μm to about 100 μm.

  Further, in the first embodiment, the main surface 21a on the movable substrate 12 side of the fixed substrate 21 provided in the upper housing 20 has a comb as viewed in a plane made of Al or Ti as shown in FIG. An electrode 211 having a shape is formed. The electrode 211 connects a plurality of electrode portions 211a formed to extend in the Y direction with a predetermined interval in the X direction and one end of the plurality of electrode portions 211a, and extends in the X direction. And a connecting portion 211b formed on the surface. Further, as shown in FIG. 4, the electrode portion 211a has a width of about 100 μm to about 1000 μm and a thickness of about 3 μm to about 5 μm.

In the first embodiment, as shown in FIGS. 3 and 4, an electret member 212 made of SiO ₂ is formed on the electrode portion 211a of the electrode 211 in a region corresponding to the electrode portion 211a. Specifically, as shown in FIG. 3, a plurality of electret members 212 are formed so as to extend in the Y direction with a predetermined interval in the X direction. Further, as shown in FIG. 4, the electret member 212 has a negative charge accumulated, a width of about 100 μm to about 1000 μm, and a thickness of about 3 μm to about 5 μm.

  Further, in the first embodiment, the main surface 21a on the movable substrate 12 side of the fixed substrate 21 provided in the upper housing 20 has a comb as viewed in a plane made of Al or Ti as shown in FIG. A collecting electrode 213 having a shape is formed. The current collecting electrode 213 includes a plurality of current collecting portions 213a formed so as to extend in the Y direction at a predetermined interval in the X direction, and the plurality of current collecting portions 213a are opposite to the connecting portion 211b side of the electrode 211. And a connecting portion 213b formed so as to extend in the X direction. As shown in FIG. 4, the current collector 213 a is provided between the electrode portions 211 a of the electrode 211, and has a width of about 100 μm to about 1000 μm and a thickness of about 3 μm to about 5 μm. The electrode 211a of the electrode 211 and the current collector 213a of the current collecting electrode 213 are provided with a distance L2 of about 10 μm to about 100 μm.

  In the first embodiment, as shown in FIG. 4, when the electret member 122 of the movable substrate 12 is located in a region facing the electret member 212 of the fixed substrate 21, the current collector 123 a of the movable substrate 12 is When the electret member 122 of the movable substrate 12 is located in a region facing the current collector 213a of the fixed substrate 21 as shown in FIG. The current collector 123 a of the movable substrate 12 is configured to be located in a region facing the electret member 212 of the fixed substrate 21.

  In the first embodiment, as shown in FIG. 4, the bridge rectifier circuit 30 is provided to rectify the generated power, and the collector electrode 123 of the movable substrate 12 and The current collector electrode 213 of the fixed substrate 21 is electrically connected. The bridge rectifier circuit 30 is grounded via the wiring 41 and is electrically connected to the electrode 121 of the movable substrate 12 and the electrode 211 of the fixed substrate 21. Thereby, the electrode 121 of the movable substrate 12 and the electrode 211 of the fixed substrate 21 are grounded. The bridge rectifier circuit 30 is connected to the load 2 driven by the power generated by the electrostatic induction power generation device 1 via wirings 42 and 43. The load 2 is grounded.

  Here, the bridge rectifier circuit 30 includes four diodes 31 to 34 as shown in FIG. Specifically, the anode of the diode 31 is connected to the cathode of the diode 34 and to the wiring 41. The cathode of the diode 31 is connected to the cathode of the diode 33 and is connected to the load 2 via the wiring 42. The anode of the diode 32 is connected to the anode of the diode 34 and is connected to the load 2 through the wiring 43. The cathode of the diode 32 is connected to the anode of the diode 33 and to the wiring 40. The diode 33 has an anode connected to the wiring 40 and a cathode connected to the load 2 via the wiring 42. The diode 34 has an anode connected to the load 2 via the wiring 43 and a cathode connected to the wiring 41.

  FIG. 6 is a diagram for explaining the power generation operation of the electrostatic induction power generating device according to the first embodiment of the present invention. Next, with reference to FIGS. 4-6, the electric power generation operation | movement of the electrostatic induction type generator 1 by 1st Embodiment of this invention is demonstrated.

  First, as shown in FIG. 4, the electret member 122 of the movable substrate 12 and the electret member 212 of the fixed substrate 21 face each other, and the current collector 123 a of the movable substrate 12 and the current collector 213 a of the fixed substrate 21 face each other. Therefore, no electric charge is induced in the current collector 123a of the movable substrate 12 and the current collector 213a of the fixed substrate 21.

  Next, by applying vibration in the X direction to the electrostatic induction power generating device 1, the electret member 122 of the movable substrate 12 and the current collector 213 a of the fixed substrate 21 face each other and move as shown in FIG. 5. The movable substrate 12 moves in the X direction to a position where the current collector 123a of the substrate 12 and the electret member 212 of the fixed substrate 21 face each other. At this time, a positive charge is induced in the current collector 123a of the movable substrate 12 by the negative charge of the electret member 212, and a positive charge is generated in the current collector 213a of the fixed substrate 21 by the negative charge of the electret member 122. Charge is induced. In this case, the positive charge induced to the current collecting part 123a of the movable substrate 12 is supplied via the wiring 40 and the connecting part 123b, and the positive charge induced to the current collecting part 213a of the fixed substrate 21 is 40 and the connecting portion 213b. As a result, a current in the A direction flows through the bridge rectifier circuit 30, so that rectification is performed and a current in the B direction is output to the load 2. Specifically, current flows in the order of the diode 31, the wiring 42, the load 2, the wiring 43, and the diode 32.

  Thereafter, as shown in FIG. 6, the electret member 122 of the movable substrate 12 and the electret member 212 of the fixed substrate 21 face each other, and the current collector 123 a of the movable substrate 12 and the current collector 213 a of the fixed substrate 21 face each other. The movable substrate 12 moves in the X direction to the position where it moves. At this time, since the electret member 212 of the fixed substrate 21 is not positioned in the region facing the current collecting portion 123a of the movable substrate 12, the positive charge induced in the current collecting portion 123a of the movable substrate 12 is released, and the connecting portion Since the electret member 122 of the movable substrate 12 is not located in the region facing the current collector 213a of the fixed substrate 21 while moving toward the bridge rectifier circuit 30 via 123b and the wiring 40, the current collection of the fixed substrate 21 The positive charges induced in the part 213a are released and move toward the bridge rectifier circuit 30 via the connecting part 213b and the wiring 40. As a result, when a current in the C direction flows through the bridge rectifier circuit 30, rectification is performed and a current in the B direction is output to the load 2. Specifically, current flows in the order of the diode 33, the wiring 42, the load 2, the wiring 43, and the diode 34.

  Further, power generation is continuously performed by repeatedly performing the above operation.

  In the first embodiment, as described above, by providing the movable substrate 12 including the current collector 123a and the electret member 122 and the fixed substrate 21 including the current collector 213a and the electret member 212, the movable substrate 12 is vibrated by vibration. Is moved in the X direction to increase or decrease the area of the electret member 212 of the fixed substrate 21 located in the region facing the current collector 123a of the movable substrate 12, and to collect power of the fixed substrate 21. Electricity can be generated by increasing or decreasing the area of the electret member 122 of the movable substrate 12 located in the region facing the portion 213a. Thereby, the area | region in which the current collection part 123a of the movable substrate 12 was formed, the area in which the electret member 212 of the fixed substrate 21 was formed, the area in which the electret member 122 of the movable substrate 12 was formed, and the current collection of the fixed substrate 21 Since power can be directly generated in both the region where the portion 213a is formed, the power generation efficiency of the electrostatic induction power generation device 1 can be improved.

  In the first embodiment, the bridge rectifier circuit 30 is provided for outputting the positive charges induced in the current collectors 123a and 213a as a current, and the current collector 123a and the current collector 213a are electrically connected. In this state, the current collectors 123a and 213a are electrically connected to the bridge rectifier circuit 30 via the wiring 40, whereby the current collectors 123a and 213a are collected by the electret members 122 and 212 in which negative charges are accumulated. The positive charge of the same polarity induced by the current can be easily output as a current through the bridge rectifier circuit 30.

(Second Embodiment)
7 and 8 are schematic views illustrating the configuration of an electrostatic induction power generating device according to a second embodiment of the present invention. In the second embodiment, unlike the first embodiment, a configuration of an electrostatic induction power generating device 60 including a movable substrate 61 provided with an electret member 62 in which positive charges are accumulated will be described.

  In the electrostatic induction power generating device 60 according to the second embodiment, as shown in FIG. 7, on the upper surface of the main surface 61a of the movable substrate 61 made of glass or a silicon substrate, as in the first embodiment, A comb-shaped electrode 121 and a collecting electrode 123 are formed.

In the second embodiment, the electret member 62 made of SiO ₂ is formed on the electrode portion 121a of the electrode 121 in a region corresponding to the electrode portion 121a. Specifically, a plurality of electret members 62 are formed at predetermined intervals in the X direction. Further, the electret member 62 has positive charges accumulated therein and has a thickness of about 100 μm to about 10 μm.
It has a width of 00 μm and a thickness of about 3 μm to about 5 μm.

  In the second embodiment, as shown in FIG. 7, when the electret member 62 of the movable substrate 61 is located in a region facing the electret member 212 of the fixed substrate 21, the current collector 123 a of the movable substrate 61 is When the electret member 62 of the movable substrate 61 is located in a region facing the current collector 213a of the fixed substrate 21 as shown in FIG. The current collector 123 a of the movable substrate 61 is configured to be located in a region facing the electret member 212 of the fixed substrate 21.

  In the second embodiment, the bridge rectifier circuit 30 is electrically connected to the current collecting electrode 213 of the fixed substrate 21 via the wiring 63 and movable via the wiring 64 as shown in FIG. The current collector electrode 123 of the substrate 61 is electrically connected. Further, the electrode 121 of the movable substrate 61 and the electrode 211 of the fixed substrate 21 are grounded.

  Here, the bridge rectifier circuit 30 includes four diodes 31 to 34 as shown in FIG. Specifically, the anode of the diode 31 is connected to the cathode of the diode 34 and to the wiring 64. The cathode of the diode 31 is connected to the cathode of the diode 33 and is connected to the load 2 via the wiring 42. The anode of the diode 32 is connected to the anode of the diode 34 and is connected to the load 2 through the wiring 43. The cathode of the diode 32 is connected to the anode of the diode 33 and to the wiring 63. The diode 33 has an anode connected to the wiring 63 and a cathode connected to the load 2 via the wiring 42. The diode 34 has an anode connected to the load 2 via the wiring 43 and a cathode connected to the wiring 64.

  In addition, the other structure of 2nd Embodiment is the same as that of the said 1st Embodiment.

  FIG. 9 is a diagram for explaining the power generation operation of the electrostatic induction power generating device according to the second embodiment of the present invention. Next, with reference to FIGS. 7-9, the electric power generation operation | movement of the electrostatic induction type generator 60 by 2nd Embodiment of this invention is demonstrated.

  First, as shown in FIG. 7, the electret member 62 of the movable substrate 61 and the electret member 212 of the fixed substrate 21 face each other, and the current collector 123 a of the movable substrate 61 and the current collector 213 a of the fixed substrate 21 face each other. Therefore, no electric charge is induced in the current collector 123 a of the movable substrate 61 and the current collector 213 a of the fixed substrate 21.

  Next, by applying vibration in the X direction to the electrostatic induction power generation device 60, the electret member 62 of the movable substrate 61 and the current collector 213a of the fixed substrate 21 face each other and move as shown in FIG. The movable substrate 61 moves in the X direction to a position where the current collector 123a of the substrate 61 and the electret member 212 of the fixed substrate 21 face each other. At this time, a positive charge is induced in the current collector 123a of the movable substrate 61 by the negative charge of the electret member 212, and a negative charge is generated in the current collector 213a of the fixed substrate 21 by the positive charge of the electret member 62. Charge is induced. In this case, the positive charge induced to the current collecting part 123a of the movable substrate 61 is supplied via the wiring 64 and the connecting part 123b, and the negative charge induced to the current collecting part 213a of the fixed substrate 21 is 63 and the connecting portion 213b. As a result, when a current in the C direction flows through the bridge rectifier circuit 30, rectification is performed and a current in the B direction is output to the load 2. Specifically, current flows in the order of the diode 33, the wiring 42, the load 2, the wiring 43, and the diode 34.

  After that, as shown in FIG. 9, the electret member 62 of the movable substrate 61 and the electret member 212 of the fixed substrate 21 face each other, and the current collector 123 a of the movable substrate 61 and the current collector 213 a of the fixed substrate 21 face each other. The movable substrate 61 moves in the X direction to the position where it moves. At this time, since the electret member 212 of the fixed substrate 21 is not located in the region facing the current collector 123a of the movable substrate 61, the positive charge induced in the current collector 123a of the movable substrate 61 is released, and the connecting portion Since the electret member 62 of the movable substrate 61 is not located in the region facing the current collector 213a of the fixed substrate 21 while moving toward the bridge rectifier circuit 30 via the 123b and the wiring 64, the current collection of the fixed substrate 21 The negative charge induced in the part 213a is released and moves toward the bridge rectifier circuit 30 via the connecting part 213b and the wiring 63. As a result, a current in the A direction flows through the bridge rectifier circuit 30, so that rectification is performed and a current in the B direction is output to the load 2. Specifically, current flows in the order of the diode 31, the wiring 42, the load 2, the wiring 43, and the diode 32.

  Further, power generation is continuously performed by repeatedly performing the above operation.

  In the second embodiment, as described above, the bridge rectifier circuit 30 for outputting the positive charge induced in the current collector 123a and the negative charge induced in the current collector 213a as a current is provided, and the current collector In a state where the part 123a and the current collector 213a are electrically separated, the current collector 123a and the bridge rectifier circuit 30 are electrically connected via the wiring 64, and the current collector 213a and the bridge rectifier circuit 30 are connected. Are electrically connected via the wiring 63, and the negative charge induced in the current collector 213a by the electret member 62 in which the positive charges are accumulated can be easily output as a current via the bridge rectifier circuit 30. In addition, the positive charge induced in the current collector 123a by the electret member 212 in which the negative charge is accumulated can be easily converted into the current via the bridge rectifier circuit 30. It is possible to output Te.

  The remaining effects of the second embodiment are similar to those of the aforementioned first embodiment.

(Third embodiment)
10 and 11 are schematic views illustrating the configuration of an electrostatic induction power generating device according to a third embodiment of the present invention. In the third embodiment, unlike the first embodiment, the movable substrate 80 provided with the electret member 82 having a width smaller than the width of the electrode portion 81a, and the electret having a width smaller than the width of the electrode portion 91a. A configuration of the electrostatic induction power generating device 70 including the fixed substrate 90 provided with the member 92 will be described.

  In the electrostatic induction power generating device 70 according to the third embodiment, as shown in FIG. 10, a plane made of Al or Ti or the like on the main surface 80a of the movable substrate 80 made of glass or a silicon substrate on the fixed substrate 90 side. In particular, an electrode 81 having a comb shape is formed. The electrode 81 includes a plurality of electrode portions 81a formed at predetermined intervals in the X direction and a connecting portion 81b that connects the plurality of electrode portions 81a. The electrode portion 81a has a width of about 100 μm to about 1000 μm and a thickness of about 3 μm to about 5 μm.

In the third embodiment, on the electrode portion 81a of the electrode 81, the region corresponding to the electrode portions 81a, electret member 82 made of SiO ₂ is formed. Specifically, a plurality of electret members 82 are formed at predetermined intervals in the X direction. The electret member 82 has negative charges accumulated therein, and has a width smaller than the width of the electrode portion 81a of the electrode 81 and a thickness of about 3 μm to about 5 μm. Thereby, the guard electrode part 811a is comprised by the part which protrudes to the side rather than the side surface of the electret member 82 of the electrode part 81a. The guard electrode portion 811a has a function of suppressing the influence of the potential of the region facing the guard electrode portion 811a on the side of the electret member 82 due to the negative charge accumulated in the electret member 82.

  Further, in the third embodiment, the main surface 80a of the movable substrate 80 on the fixed substrate 90 side is formed with a collector electrode 83 made of Al or Ti or the like and having a comb shape when viewed in a plan view. The current collecting electrode 83 includes a plurality of current collecting portions 83a formed at predetermined intervals in the X direction and a connecting portion 83b for connecting the plurality of current collecting portions 83a. The current collecting portion 83a is provided between the electrode portions 81a of the electrodes 81, and has a width substantially the same as the width of an electret member 92 described later, and a thickness of about 3 μm to about 5 μm. Have. In addition, the electrode portion 81a of the electrode 81 and the current collecting portion 83a of the current collecting electrode 83 are provided with an interval L3 of about 10 μm to about 100 μm.

  In the third embodiment, the main surface 90a on the movable substrate 80 side of the fixed substrate 90 made of glass or silicon substrate has a comb shape as seen in a plan view made of Al or Ti as shown in FIG. The electrode 91 which has is formed. The electrode 91 includes a plurality of electrode portions 91a formed at predetermined intervals in the X direction, and a connecting portion 91b that connects the plurality of electrode portions 91a. The electrode portion 91a has a width of about 100 μm to about 1000 μm and a thickness of about 3 μm to about 5 μm.

In the third embodiment, an electret member 92 made of SiO ₂ is formed on the electrode portion 91a of the electrode 91 in a region corresponding to the electrode portion 91a. Specifically, a plurality of electret members 92 are formed at predetermined intervals in the X direction. The electret member 92 has negative charges accumulated therein, a width smaller than the width of the electrode portion 91a of the electrode 91, and a thickness of about 3 μm to about 5 μm. Thereby, the guard electrode part 911a is comprised by the part which protrudes to the side rather than the side surface of the electret member 92 of the electrode part 91a. The guard electrode portion 911 a has a function of suppressing the influence of the potential of the region facing the guard electrode portion 911 a on the side of the electret member 92 due to the negative charge accumulated in the electret member 92.

  In the third embodiment, the main electrode 90a on the movable substrate 80 side of the fixed substrate 90 is formed with a collecting electrode 93 made of Al or Ti or the like and having a comb shape when viewed in a plan view. The current collecting electrode 93 includes a plurality of current collecting portions 93a formed at predetermined intervals in the X direction, and a connecting portion 93b that connects the plurality of current collecting portions 93a. The current collector 93 a is provided between the electrode portions 91 a of the electrodes 91, and has a width substantially the same as the width of the electret member 82 and a thickness of about 3 μm to about 5 μm. Further, the electrode portion 91a of the electrode 91 and the current collecting portion 93a of the current collecting electrode 93 are provided with an interval L4 of about 10 μm to about 100 μm.

  Further, in the third embodiment, the bridge rectifier circuit 30 is provided for rectifying the generated electric power as shown in FIG. The current collector electrode 93 of the fixed substrate 90 is electrically connected. The bridge rectifier circuit 30 is grounded via the wiring 41 and is electrically connected to the electrode 81 of the movable substrate 80 and the electrode 91 of the fixed substrate 90. Thereby, the electrode 81 of the movable substrate 80 and the electrode 91 of the fixed substrate 90 are grounded.

  Further, in the third embodiment, as shown in FIG. 10, when the electret member 82 of the movable substrate 80 is located in a region facing the electret member 92 of the fixed substrate 90, the current collector 83 a of the movable substrate 80 is When the electret member 82 of the movable substrate 80 is located in a region facing the current collector 93a of the fixed substrate 90, as shown in FIG. The current collector 83 a of the movable substrate 80 is configured to be located in a region facing the electret member 92 of the fixed substrate 90.

  The remaining configuration of the third embodiment is similar to that of the aforementioned first embodiment.

  The power generation operation of the electrostatic induction power generation device 70 of the third embodiment is the same as the power generation operation of the first embodiment.

  In 3rd Embodiment, while forming the guard electrode part 811a in the part which protrudes to the side rather than the side surface of the electret member 82 of the electrode part 81a as mentioned above, it is a side rather than the side surface of the electret member 92 of the electrode part 91a. By forming the guard electrode portion 911a in the protruding portion, the potential of the region facing the guard electrode portion 811a on the side of the electret member 82 is affected by the negative charge of the electret member 82 by the guard electrode portion 811a. Therefore, the difference between the potential of the region facing the electret member 82 and the potential of the region facing the guard electrode portion 811a on the side of the electret member 82 can be increased. Thereby, in the case where the current collection part 93a is located in the area | region facing the electret member 82, and the case where the current collection part 93a is located in the area | region facing the guard electrode part 811a of the side of the electret member 82, current collection is carried out. The difference in the amount of positive charge induced in the portion 93a can be increased. Further, since the guard electrode portion 911a can suppress the potential of the region facing the guard electrode portion 911a on the side of the electret member 92 from being affected by the negative charge of the electret member 92, the guard electrode portion 911a faces the electret member 92. The difference between the potential of the region to be applied and the potential of the region facing the guard electrode portion 911a on the side of the electret member 92 can be increased. Thereby, in the case where the current collection part 83a is located in the area | region facing the electret member 92, and the case where the current collection part 83a is located in the area | region facing the guard electrode part 911a of the side of the electret member 92, current collection is carried out. The difference in the amount of positive charges induced in the portion 83a can be increased. By these, the power generation efficiency of the electrostatic induction power generation device 70 can be further improved.

  The remaining effects of the third embodiment are similar to those of the aforementioned first embodiment.

(Fourth embodiment)
12 to 15 are views showing an electrostatic induction power generating device according to a fourth embodiment of the present invention. In the fourth embodiment, unlike the first embodiment, a configuration of an electrostatic induction power generating device 300 including a fixed substrate 320 on which current collecting electrodes 321 and 322 are formed will be described.

  In the electrostatic induction power generating device 300 according to the fourth embodiment, as shown in FIGS. 12 and 14, Al or Ti or the like is formed on the main surface 310a on the fixed substrate 320 side of the movable substrate 310 made of glass or a silicon substrate. An electrode 311 having a comb shape as viewed in a plan view is formed. The movable substrate 310 is an example of the “second substrate” in the present invention. As shown in FIG. 14, the electrode 311 connects a plurality of electrode portions 311a formed to extend in the Y direction with a predetermined interval in the X direction and one end portion of the plurality of electrode portions 311a. And a connecting portion 311b formed so as to extend in the X direction. Further, as shown in FIG. 12, the electrode portion 311a has a width of about 100 μm to about 1000 μm and a thickness of about 3 μm to about 5 μm.

In the fourth embodiment, as shown in FIGS. 12 and 14, an electret member 312 made of SiO ₂ is formed on the electrode portion 311a of the electrode 311 in a region corresponding to the electrode portion 311a. Specifically, as shown in FIG. 14, a plurality of electret members 312 are formed so as to extend in the Y direction at a predetermined interval in the X direction. Further, as shown in FIG. 12, the electret member 312 has negative charges accumulated, a width of about 100 μm to about 1000 μm, and a thickness of about 3 μm to about 5 μm.

In the fourth embodiment, the main surface 310a of the movable substrate 310 on the fixed substrate 320 side is
As shown in FIG. 14, a guard electrode 313 made of Al or Ti or the like and having a comb shape when viewed in a plan view is formed. The guard electrode 313 includes a plurality of guard electrode portions 313a formed to extend in the Y direction at a predetermined interval in the X direction, and the plurality of guard electrode portions 313a on the side opposite to the connecting portion 311b side of the electrode 311 And a connecting portion 313b formed so as to extend in the X direction. Further, as shown in FIG. 12, the guard electrode portion 313a is provided between the electrode portions 311a of the electrode 311 and has a width of about 100 μm to about 1000 μm and a height larger than the height of the upper surface of the electret member 312. Have. The electrode portion 311a of the electrode 311 and the guard electrode portion 313a of the guard electrode 313 are provided with a gap L5 of about 10 μm to about 100 μm.

  In the fourth embodiment, the main surface 320a of the fixed substrate 320 on the movable substrate 310 side has a current collecting electrode 321 having a comb shape made of Al, Ti, or the like as seen in a plan view, as shown in FIG. 322 is formed. The fixed substrate 320 is an example of the “first substrate” in the present invention. The current collecting electrode 321 connects a plurality of current collecting portions 321a formed to extend in the Y direction with a predetermined interval in the X direction and one end of the plurality of current collecting portions 321a, and And a connecting portion 321b formed to extend in the X direction. The collecting electrode 321 is an example of the “first electrode” in the present invention, and the collecting part 321a is an example of the “first electrode part” in the present invention. Further, as shown in FIG. 12, the current collector 321a has a width W1 of about 100 μm to about 1000 μm and a thickness of about 3 μm to about 5 μm. Further, as shown in FIG. 15, the current collecting electrode 322 includes a plurality of current collecting portions 322a formed so as to extend in the Y direction at a predetermined interval in the X direction, and a plurality of current collecting portions 322a. The electric electrode 321 has a connection part 322b formed so as to extend in the X direction while being connected at one end opposite to the connection part 321b side. The collector electrode 322 is an example of the “second electrode” in the present invention, and the collector section 322a is an example of the “second electrode section” in the present invention. Further, as shown in FIG. 12, the current collector 322a has a width W2 of about 100 μm to about 1000 μm and a thickness of about 3 μm to about 5 μm. Further, the current collecting portions 321a of the current collecting electrodes 321 and the current collecting portions 322a of the current collecting electrodes 322 are alternately provided with an interval L6 of about 10 μm to about 100 μm.

  In the fourth embodiment, the bridge rectifier circuit 30 is electrically connected to the current collecting electrode 321 of the fixed substrate 320 via the wiring 330 and fixed via the wiring 331 as shown in FIG. The current collector electrode 322 of the substrate 320 is electrically connected. The bridge rectifier circuit 30 is provided on the fixed substrate 320. In addition, the electrode 311 and the guard electrode 313 of the movable substrate 310 are grounded.

  Here, the bridge rectifier circuit 30 includes four diodes 31 to 34 as shown in FIG. Specifically, the anode of the diode 31 is connected to the cathode of the diode 34 and to the wiring 330. The cathode of the diode 31 is connected to the cathode of the diode 33 and is connected to the load 2 via the wiring 42. The anode of the diode 32 is connected to the anode of the diode 34 and is connected to the load 2 through the wiring 43. The cathode of the diode 32 is connected to the anode of the diode 33 and to the wiring 331. The diode 33 has an anode connected to the wiring 331 and a cathode connected to the load 2 via the wiring 42. The diode 34 has an anode connected to the load 2 via the wiring 43 and a cathode connected to the wiring 330.

In the fourth embodiment, as shown in FIG. 12, when the electret member 312 of the movable substrate 310 is located in a region facing the current collector 321 a of the fixed substrate 320, the guard electrode portion 313 a of the movable substrate 310. Is located in a region facing the current collector 322a of the fixed substrate 320, and the electret member 312 of the movable substrate 310 is located in a region facing the current collector 322a of the fixed substrate 320 as shown in FIG. Is configured such that the guard electrode portion 313a of the movable substrate 310 is located in a region facing the current collector portion 321a of the fixed substrate 320.

  In addition, the other structure of 4th Embodiment is the same as that of the said 1st Embodiment.

  FIG. 16 is a diagram for explaining the power generation operation of the electrostatic induction power generating device according to the fourth embodiment of the present invention. Next, a power generation operation of the electrostatic induction power generation device 300 according to the fourth embodiment will be described with reference to FIGS.

  First, as shown in FIG. 12, the electret member 312 of the movable substrate 310 and the current collector 321a of the fixed substrate 320 are opposed to each other, and the guard electrode portion 313a of the movable substrate 310 and the current collector 322a of the fixed substrate 320 are Since they face each other, the negative charge of the electret member 312 induces a positive charge in the current collector 321 a of the fixed substrate 320 and does not induce a positive charge in the current collector 322 a of the fixed substrate 320.

  Next, by applying vibration in the X direction to the electrostatic induction power generation device 300, the electret member 312 of the movable substrate 310 and the current collector 322a of the fixed substrate 320 face each other and move as shown in FIG. The movable substrate 310 moves in the X direction to a position where the guard electrode portion 313a of the substrate 310 and the current collecting portion 321a of the fixed substrate 320 face each other. At this time, the guard electrode portion 313a releases the positive charge induced in the current collecting portion 321a of the fixed substrate 320 and moves toward the bridge rectifier circuit 30 via the connecting portion 321b and the wiring 330, and the electret member Due to the negative charge of 312, a positive charge is induced in the current collector 322 a of the fixed substrate 320 through the wiring 331 and the connecting part 322 b. As a result, a current in the A direction flows through the bridge rectifier circuit 30, so that rectification is performed and a current in the B direction is output to the load 2. Specifically, current flows in the order of the diode 31, the wiring 42, the load 2, the wiring 43, and the diode 32.

  Thereafter, as shown in FIG. 16, the electret member 312 of the movable substrate 310 and the current collector 321 a of the fixed substrate 320 face each other, and the guard electrode portion 313 a of the movable substrate 310 and the current collector 322 a of the fixed substrate 320 are The movable substrate 310 moves in the X direction to the position facing it. At this time, the negative charge of the electret member 312 induces a positive charge to the current collector 321a of the fixed substrate 320 via the wiring 330 and the connecting portion 321b, and the guard electrode 313a collects the fixed substrate 320. The positive charges induced in the electric part 322a are released and move toward the bridge rectifier circuit 30 via the connecting part 322b and the wiring 331. As a result, when a current in the C direction flows through the bridge rectifier circuit 30, rectification is performed and a current in the B direction is output to the load 2. Specifically, current flows in the order of the diode 33, the wiring 42, the load 2, the wiring 43, and the diode 34.

  Further, power generation is continuously performed by repeatedly performing the above operation.

  In the fourth embodiment, as described above, by providing the movable substrate 310 having the electret member 312 and the fixed substrate 320 having the collector electrodes 321 and 322, the current collector 321a of the fixed substrate 320 Electricity can be generated by increasing / decreasing the area of the electret member 312 of the movable substrate 310 located in the facing region, and the area of the electret member 312 of the movable substrate 310 located in the region facing the current collector 322a of the fixed substrate 320. The power can be generated by increasing or decreasing the power. As a result, power can be directly generated in both the region of the fixed substrate 320 where the current collector 321a is formed and the region of the fixed substrate 320 where the current collector 322a is formed. It is possible to improve the power generation efficiency.

In the fourth embodiment, the current collecting electrodes 321 and 322 are formed in a comb shape,
By alternately arranging the current collectors 321a and 322a, it is possible to easily fix while increasing (decreasing) the area of the electret member 312 of the movable substrate 310 located in a region facing the current collector 321a of the fixed substrate 320. It is possible to reduce (increase) the area of the electret member 312 of the movable substrate 310 that is located in a region facing the current collector 322a of the substrate 320.

  In the fourth embodiment, the bridge rectifier circuit 30 to which the current collecting electrodes 321 and 322 are connected is provided on the fixed substrate 320, thereby generating power without electrically connecting the movable substrate 310 and the fixed substrate 320. Therefore, the structure of the electrostatic induction power generation device 300 can be simplified, and durability can be improved.

  In the fourth embodiment, by providing the guard electrode portion 313a between the electret members 312, the potential difference between the region facing the electret member 312 and the region facing the guard electrode portion 313a can be increased. When the substrate 310 vibrates, the amount of charge induced in the current collector 321a or 322a of the fixed substrate 320 can be increased. Also by this, the power generation efficiency of the electrostatic induction power generation device 300 can be improved.

  Further, in the fourth embodiment, the potential difference between the region facing the electret member 312 and the region facing the guard electrode portion 313a is increased by making the height of the guard electrode portion 313a larger than the height of the upper surface of the electret member 312. Can be larger.

(Fifth embodiment)
17 to 19 are views showing an electrostatic induction power generating device according to a fifth embodiment of the present invention. In the fifth embodiment, unlike the fourth embodiment, an electrostatic induction power generation device 350 including an electret member 312 in which negative charges are accumulated and a movable substrate 360 on which an electret member 362 in which positive charges are accumulated is formed. The configuration of will be described.

  In the electrostatic induction power generating device 350 according to the fifth embodiment, as shown in FIGS. 17 and 19, the main surface 360a on the fixed substrate 320 side of the movable substrate 360 made of glass or a silicon substrate has a comb shape. An electrode 311 is formed. The movable substrate 360 is an example of the “second substrate” in the present invention. An electret member 312 is formed on the electrode portion 311a of the electrode 311 in a region corresponding to the electrode portion 311a.

  Further, in the fifth embodiment, the main surface 360a of the movable substrate 360 on the fixed substrate 320 side is formed with an electrode 361 made of Al, Ti or the like and having a comb shape when viewed in plan. The electrode 361 includes a plurality of electrode portions 361 a formed to extend in the Y direction with a predetermined interval in the X direction, and the plurality of electrode portions 361 a at one end opposite to the connection portion 311 b side of the electrode 311. And a connecting portion 361b formed to extend in the X direction. Further, as shown in FIG. 17, the electrode portion 361a is provided between the electrode portions 311a of the electrode 311 and has a width of about 100 μm to about 1000 μm and a thickness of about 3 μm to about 5 μm. Further, the electrode portion 311a of the electrode 311 and the electrode portion 361a of the electrode 361 are provided with an interval L7 of about 10 μm to about 100 μm.

In the fifth embodiment, as shown in FIGS. 17 and 19, an electret member 362 made of SiO ₂ is formed on the electrode portion 361a of the electrode 361 in a region corresponding to the electrode portion 361a. Specifically, as shown in FIG. 19, a plurality of electret members 362 are formed to extend in the Y direction at a predetermined interval in the X direction. Further, as shown in FIG. 17, the electret member 362 has a positive charge accumulated, a width of about 100 μm to about 1000 μm, and a thickness of about 3 μm to about 5 μm.

  In the fifth embodiment, as shown in FIG. 17, when the electret member 312 of the movable substrate 360 is located in a region facing the current collector 321 a of the fixed substrate 320, the electret member 362 of the movable substrate 360 is When the electret member 312 of the movable substrate 360 is located in a region facing the current collector 322a of the fixed substrate 320, as shown in FIG. The electret member 362 of the movable substrate 360 is configured to be positioned in a region facing the current collector 321a of the fixed substrate 320.

  The remaining configuration of the fifth embodiment is similar to that of the aforementioned fourth embodiment.

  FIG. 20 is a diagram for explaining the power generation operation of the electrostatic induction power generating device according to the fifth embodiment of the present invention. Next, the power generation operation of the electrostatic induction power generating device 350 according to the fifth embodiment will be described with reference to FIGS.

  First, as shown in FIG. 17, the electret member 312 of the movable substrate 360 and the current collector 321a of the fixed substrate 320 face each other, and the electret member 362 of the movable substrate 360 and the current collector 322a of the fixed substrate 320 face each other. Therefore, a positive charge is induced in the current collector 321a of the fixed substrate 320 by the negative charge of the electret member 312 and a current in the current collector 322a of the fixed substrate 320 is induced by the positive charge of the electret member 362. , A negative charge is induced.

  Next, by applying vibration in the X direction to the electrostatic induction power generating device 350, the electret member 312 of the movable substrate 360 and the current collector 322a of the fixed substrate 320 face each other and move as shown in FIG. The movable substrate 360 moves in the X direction to a position where the electret member 362 of the substrate 360 and the current collector 321a of the fixed substrate 320 face each other. At this time, due to the positive charge of the electret member 362, a negative charge is induced in the current collector 321 a of the fixed substrate 320 via the wiring 330 and the connecting portion 321 b, and the fixed substrate 320 is caused by the negative charge of the electret member 312. A positive charge is induced in the current collector 322a through the wiring 331 and the connecting part 322b. As a result, a current in the A direction flows through the bridge rectifier circuit 30, so that rectification is performed and a current in the B direction is output to the load 2. Specifically, current flows in the order of the diode 31, the wiring 42, the load 2, the wiring 43, and the diode 32.

  After that, as shown in FIG. 20, the electret member 312 of the movable substrate 360 and the current collector 321a of the fixed substrate 320 face each other, and the electret member 362 of the movable substrate 360 and the current collector 322a of the fixed substrate 320 face each other. The movable substrate 360 moves in the X direction to the position where it moves. At this time, due to the negative charge of the electret member 312, a positive charge is induced in the current collector 321 a of the fixed substrate 320 via the wiring 330 and the connecting portion 321 b, and the positive charge of the electret member 362 causes the fixed substrate 320. A negative charge is induced in the current collector 322a via the wiring 331 and the connecting part 322b. As a result, when a current in the C direction flows through the bridge rectifier circuit 30, rectification is performed and a current in the B direction is output to the load 2. Specifically, current flows in the order of the diode 33, the wiring 42, the load 2, the wiring 43, and the diode 34.

  Further, power generation is continuously performed by repeatedly performing the above operation.

In the fifth embodiment, as described above, by providing the electret member 362 in which positive charges are accumulated between the electret members 312 in which negative charges are accumulated, the region facing the electret member 312 and the electret member 362 are opposed. Since the potential difference with the region can be further increased, the amount of charge induced in the current collector 321a or 322a of the fixed substrate 320 can be increased when the movable substrate 360 vibrates. The power generation efficiency of the induction power generator 350 can be further improved.

  The remaining effects of the fifth embodiment are similar to those of the aforementioned fourth embodiment.

(Sixth embodiment)
21 and 22 are views showing an electrostatic induction power generating device according to a sixth embodiment of the present invention. In the sixth embodiment, unlike the fourth embodiment, a configuration of an electrostatic induction power generating device 400 in which an electret member 411 is formed on the entire main surface of the movable substrate 410 will be described.

In the electrostatic induction power generating device 400 according to the sixth embodiment, as shown in FIG. 21, the electret member 411 is formed on the entire surface of the movable substrate 410 on the fixed substrate 320 side. The movable substrate 410 is made of a silicon substrate having a thickness of about 600 μm. The movable substrate 410 is an example of the “second substrate” in the present invention. The electret member 411 has a thickness of about 2.4 μm and is made of SiO ₂ formed by a thermal oxidation method. Further, in the electret member 411, negative charges are accumulated in a portion 411a corresponding to a region where an insulating film 412 described later is not formed.

A plurality of insulating films 412 are formed on the main surface of the electret member 411 with a predetermined interval (for example, about 1 mm) in the X direction. The insulating film 412 is made of SiO ₂ formed by HDP-CVD (High Density Plasma Chemical Vapor Deposition). The insulating film 412 has a width of about 1 mm and a thickness of about 2 μm. The insulating film 412 is provided to separate a conductive layer 413 (to be described later) from the electret member 411, and has a function of suppressing negative charges accumulated in the electret member 411 from flowing out to the conductive layer 413.

  In addition, a conductive layer 413 made of Al or the like is formed over the insulating film 412. The conductive layer 413 has a thickness of about 0.3 μm and is grounded. In addition, a charge outflow suppression film 414 is formed on the main surface of the electret member 411 so as to cover the insulating film 412 and the conductive layer 413. The charge outflow suppression film 414 has a thickness of about 0.3 μm and is made of MSQ (methyl silsesquioxane) or the like. Further, the charge outflow suppression film 414 is provided in order to suppress the negative charge accumulated in the electret member 411 from flowing out from the surface. Further, the charge outflow suppression film 414 is disposed at a distance D (for example, about 30 μm) from the surface (lower surface) of the current collecting electrodes 321 and 322.

  Further, in the sixth embodiment, the electrostatic induction power generating device 400 is configured such that the current collector 321a of the fixed substrate 320 is located in a region corresponding to the conductive layer 413 of the movable substrate 410, as shown in FIG. The current collector 322a of the fixed substrate 320 is configured to be located in a region corresponding to a region (a portion 411a of the electret member 411) where the conductive layer 413 of the movable substrate 410 is not formed. Further, as shown in FIG. 22, in the electrostatic induction power generating device 400, the current collector 321 a of the fixed substrate 320 corresponds to a region where the conductive layer 413 of the movable substrate 410 is not formed (the portion 411 a of the electret member 411). The current collector 322a of the fixed substrate 320 is configured to be located in a region corresponding to the conductive layer 413 of the movable substrate 410.

  The remaining configuration of the sixth embodiment is similar to that of the aforementioned fourth embodiment.

  FIG. 23 is a diagram for explaining the power generation operation of the electrostatic induction power generating device according to the sixth embodiment of the present invention. Next, the power generation operation of the electrostatic induction power generating device 400 according to the sixth embodiment will be described with reference to FIGS.

  First, as shown in FIG. 21, the current collector 322 a of the fixed substrate 320 is located in a region corresponding to the portion 411 a of the electret member 411 of the movable substrate 410, so the negative charge of the electret member 411 causes the current collector 322 a to A positive charge is induced. Further, since the current collector 321a of the fixed substrate 320 is located in a region corresponding to the conductive layer 413 of the movable substrate 410, no positive charge is induced in the current collector 321a.

  Next, as shown in FIG. 22, the movable substrate 410 moves in the X direction by applying vibration in the X direction to the electrostatic induction power generating device 400. At this time, since the current collector 322a of the fixed substrate 320 is located in a region corresponding to the conductive layer 413 of the movable substrate 410, the positive charge induced in the current collector 322a is released, and the connecting part 322b and the wiring 331 are connected. To the bridge rectifier circuit 30. In addition, since the current collector 321a of the fixed substrate 320 is located in a region corresponding to the portion 411a of the electret member 411 of the movable substrate 410, the current collector 321a has a wiring 330 and a connecting portion due to the negative charge of the electret member 411. A positive charge is induced through 321b. As a result, when a current in the C direction flows through the bridge rectifier circuit 30, rectification is performed and a current in the B direction is output to the load 2. Specifically, current flows in the order of the diode 33, the wiring 42, the load 2, the wiring 43, and the diode 34.

  Thereafter, as shown in FIG. 23, the movable substrate 410 moves in the X direction. At this time, since the current collector 322a of the fixed substrate 320 is located in a region corresponding to the portion 411a of the electret member 411 of the movable substrate 410, the wiring 331 and the connection are connected to the current collector 322a due to the negative charge of the electret member 411. A positive charge is induced through the portion 322b. Further, since the current collector 321 a of the fixed substrate 320 is located in a region corresponding to the conductive layer 413 of the movable substrate 410, the positive charge induced in the current collector 321 a is released and the connection part 321 b and the wiring 330 are interposed. Move toward the bridge rectifier circuit 30. As a result, a current in the A direction flows through the bridge rectifier circuit 30, so that rectification is performed and a current in the B direction is output to the load 2. Specifically, current flows in the order of the diode 31, the wiring 42, the load 2, the wiring 43, and the diode 32.

  Further, power generation is continuously performed by repeatedly performing the above operation.

  In the sixth embodiment, as described above, by forming the conductive layer 413 at a predetermined interval, the negative charge accumulated in the portion 411a of the electret member 411 corresponds to the conductive layer 413 of the electret member 411. In the case of moving to, it is possible to suppress the area corresponding to the conductive layer 413 (the area where the current collector 321a or 322a is located) from being affected by the moved negative charge. Accordingly, a potential difference can be easily generated between a region corresponding to the region where the conductive layer 413 is formed and a region corresponding to the region where the conductive layer 413 is not formed (the portion 411a of the electret member 411). it can.

  Further, in the sixth embodiment, by providing the charge outflow suppression film 414 on the main surface of the electret member 411, it is possible to suppress the potential of the electret member 411 from decreasing, and thus the electrostatic induction power generation device 400 It can suppress that the power generation efficiency of this falls.

  The remaining effects of the sixth embodiment are similar to those of the aforementioned fourth embodiment.

Next, an experiment conducted to confirm the effect of forming the collecting electrodes 321 and 322 on the fixed substrate 320 of the sixth embodiment will be described. In this experiment, an electrostatic induction power generation device according to an example corresponding to the sixth embodiment and an electrostatic induction power generation device according to a comparative example were produced. In the electrostatic induction power generating device according to the example, the width W1 of the current collector 321a and the width W2 of the current collector 322a were set to 1 mm, and the interval L6 between the current collectors 321a and 322a was set to 30 μm. Further, the electrostatic induction power generation device according to the comparative example is the same as the electrostatic induction power generation device according to the above embodiment except that only the collecting electrode 321 is formed on the fixed substrate 320. Then, according to the electrostatic induction power generation device and the comparative example according to the example under the conditions of amplitude (movement amount in the X direction): 1 mm, frequency: 30 Hz, measurement area: 4 cm ² , surface potential of the electret member 411: −272V The amount of power generation per unit area of the electrostatic induction power generator was measured.

Performed 4 times the measurement, the average is an electrostatic induction generator according to the embodiment, a 5.25μW / cm ^2, in the electrostatic induction generator according to the comparative example, 2.51μW / cm ² met It was. From the above measurement results, the electrostatic induction power generating device according to the example in which the collecting electrodes 321 and 322 are formed on the fixed substrate 320 is the electrostatic induction power generating device according to the comparative example in which only the collecting electrode 321 is formed on the fixed substrate 320. It has been found that the amount of power generation is about 2.1 times that of.

  Next, a simulation performed to confirm the influence of the distance L6 between the current collectors 321a and 322a formed on the fixed substrate 320 will be described. In this simulation, the width W1 of the current collector 321a and the width W2 of the 322a were set to 1 mm, and the overall width of the current collectors 321a and 322a was set to 10 mm. In addition, the width of the conductive layer 413 was set to 1 mm, and the interval between the conductive layers 413 was set to 1 mm. And the relationship between the space | interval L6 of the current collection parts 321a and 322a and the electric power generation amount was calculated. The result is shown in FIG.

  From the simulation results shown in FIG. 24, the power generation amount was the maximum when the interval L6 was 50 μm. That is, it has been found that the amount of power generation is maximized when the interval L6 is 1/20 (= 50 μm / 1 mm) of the width W1 of the current collector 321a and the width W2 of the current collector 322a. Further, in order to secure a power generation amount of 75% or more of the peak value of the power generation amount, it is considered that the interval L6 is preferably 10 μm to 100 μm. That is, it is found that the interval L6 is preferably 1/100 (= 10 μm / 1 mm) to 1/10 (= 100 μm / 1 mm) with respect to the width W1 of the current collector 321a and the width W2 of the current collector 322a. did.

  The embodiment disclosed this time should be considered as illustrative in all points and not restrictive. The scope of the present invention is shown not by the above description of the embodiments but by the scope of claims for patent, and further includes all modifications within the meaning and scope equivalent to the scope of claims for patent.

For example, the first to sixth embodiments, although an example of using the electret member made of SiO _2, the present invention is not limited to this, polytetrafluoroethylene (PTFE), polypropylene (PP) and polyethylene (PE An electret member made of an organic polymer compound such as) or a silicon compound such as SiN may be used. Examples of polytetrafluoroethylene include Teflon (registered trademark) and Cytop (registered trademark).

  Moreover, in the said 1st-6th embodiment, although the electrostatic induction type electric power generating apparatus was shown as an example of an electrostatic induction type conversion apparatus, this invention is not limited to this, The electrostatic induction type conversion apparatus containing an electret member If so, the present invention can also be applied to other electrostatic induction conversion devices such as an electrostatic induction actuator.

  Moreover, in the said 1st-6th embodiment, while showing the example which forms a current collection electrode in a comb shape and forms an electret member on the electrode part of an electrode, this invention is not restricted to this, Current collection The current collecting portion of the electrode and the electret member may be formed in other shapes as long as the opposing areas change due to vibration.

  Moreover, in the said 1st-6th embodiment, although the example which provides the bridge rectifier circuit 30 was shown as a circuit part of this invention, this invention is not limited to this, The circuit part which consists of a bridge rectifier circuit and a DC-DC converter May be provided, or a circuit unit including only a DC-DC converter may be provided.

  In the first to third embodiments, the example in which the plurality of electret members are formed on the electrode portions of the electrodes of the movable substrate and the fixed substrate is shown. However, the present invention is not limited to this, and the movable substrate and the fixed substrate are also provided. One comb-shaped electret member may be formed on the electrode portion and the connecting portion of the electrode.

  In the first and third embodiments, the example in which the electret member in which negative charges are accumulated on the movable substrate and the fixed substrate is formed. However, the present invention is not limited to this, and the movable substrate and the fixed substrate are not positively connected. You may form the electret member in which the electric charge was accumulate | stored.

  In the second embodiment, the electret member 62 in which the positive charges are accumulated is formed on the movable substrate 61 and the electret member 212 in which the negative charges are accumulated is formed on the fixed substrate 21. The invention is not limited thereto, and an electret member in which negative charges are accumulated on the movable substrate may be formed, and an electret member in which positive charges are accumulated on the fixed substrate may be formed.

  In the third embodiment, the guard electrode portion 811a having a height smaller than the upper surface of the electret member 82 is formed on the movable substrate 80, and the guard electrode portion 911a having a height smaller than the upper surface of the electret member 92 is formed. However, the present invention is not limited to this, and a guard electrode portion having a height higher than the upper surface of the electret member may be formed on the movable substrate and the fixed substrate.

  In the fourth to sixth embodiments, the electret member is formed on the movable substrate and the current collecting electrode is formed on the fixed substrate. However, the present invention is not limited to this, and the electret member is formed on the fixed substrate. The current collecting electrode may be formed on the movable substrate.

300, 350, 400 Static induction type power generation device (static induction type conversion device)
310, 360, 410 Movable substrate (second substrate)
312, 362, 411 electret member 320 fixed substrate (first substrate)
321 Current collecting electrode (first electrode)
321a Current collector (first electrode)
322 Current collecting electrode (second electrode)
322a Current collector (second electrode part)
413 Conductive layer 414 Charge outflow suppression film

Claims (3)

Look including a second electrode which the first electrode and the second wiring which first wiring is connected is connected, a first substrate on which the first electrode and the second electrode are arranged side by side alternately along a predetermined direction When,
A second substrate including an electret member;
A rectifier circuit in which the first wiring is connected to a first terminal and the second wiring is connected to a second terminal;
The first substrate and the second substrate are provided so as to face each other with a gap therebetween, and are configured to be movable relative to each other in the predetermined direction .
The electret member of the second substrate relatively reciprocates along the predetermined direction between a first position of the first substrate facing the first electrode and a second position facing the second electrode. By being moved, a current flows through the rectifier circuit connected between the first wiring and the second wiring based on a potential difference generated between the first electrode and the second electrode. An electrostatic induction generator. The electret member is formed on an electrode portion formed on the second substrate,
The electrostatic induction power generating device according to claim 1, wherein a grounded third wiring is connected to the electrode portion. The second substrate further includes a third electrode;
The electrostatic induction power generating device according to claim 1, wherein the first electrode and the second electrode are configured to be capacitively coupled to at least one of the electret member and the third electrode.

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