JP4942099B2 - Filling equipment - Google Patents

Description

  The present invention relates to a filling device for filling a container with a liquid such as a beverage, and more particularly to a filling device for filling in a sterile environment.

  A rotary filling device is used as a device for filling a container such as a PET bottle, a glass bottle, or a bottle can with a liquid such as drinking water. This rotary filling device is provided with a plurality of filling valves on the outer peripheral portion of a rotating circular wheel. While the wheel is rotated almost once and the container is conveyed in the circumferential direction, the filling valve is moved into the container. Fill in. After the filling of the liquid into the container is completed, the cap is attached to the container by a capper (plugging machine).

  By the way, in the case of drinking water and the like, it is essential to prevent contamination of germs and the like into the container. For this reason, a series of processes such as container sterilization, cap sterilization, product liquid filling and cap mounting are performed in a clean room. The so-called aseptic filling method or the liquid to be filled is heated to a high temperature, and the entire container capped in the conveying process is turned over to the side or upside down to sterilize the liquid non-contact portion in the container. A high-temperature filling method is used, which is performed by its own heat.

  In the former aseptic filling method, the filling device is provided with a chamber wall (enclosure) in the space above the base frame of the device, and peracetic acid, hydrogen peroxide, hot water, hypochlorous acid water, etc. A liquid or gaseous sterilizing agent having a sterilizing effect necessary for aseptic filling is supplied, whereby the space in the chamber wall is made a sterile room. The wheel provided with the filling valve is exposed to the aseptic atmosphere of the aseptic chamber, and the container is filled with the liquid in an aseptic environment inside the chamber wall. In addition, the drive mechanism and drive source for rotating a wheel are arrange | positioned out of the aseptic room, and these are not exposed in an aseptic atmosphere. This is to prevent the lubricating oil or the like used for the drive part from entering the aseptic atmosphere and damaging the aseptic environment.

A plurality of filling valves provided on the wheel are supplied with liquid supplied from a liquid tank provided outside the sterilization chamber via a supply pipe by a liquid distribution device.
Here, since the filling valve rotates together with the wheel, in the liquid distributor, the supply pipe from the liquid tank branches to each filling valve, and each pipe branched from the supply pipe rotates together with the wheel. It has a mechanism. In such a rotary mechanism, it is necessary to take measures such as providing a sealing member in order to prevent contamination of an aseptic environment due to intrusion of lubricating oil or the like used in the rotating part.
Here, the liquid distributor is usually provided above the wheel, and is provided so as to penetrate a chamber wall provided to constitute a sterile room. The gap between the chamber wall and the liquid distributor must also be reliably closed in order to prevent contamination of the sterile environment, and a structure using a rubber diaphragm has been proposed (see Patent Document 1).

Japanese Patent No. 3460415

By the way, a liquid distribution apparatus is supported and provided in the base stand of a filling apparatus. On the other hand, the chamber wall for constituting the sterilization chamber is provided with a frame on the base frame of the filling device, etc., and a side cover that encloses the side of the space that should be an aseptic environment, a top cover that covers the top, It is comprised by being attached. An opening is formed in the top cover, and the liquid distributor is disposed so as to penetrate the opening.
In such a structure, at the time of manufacturing and assembling the filling device, misalignment due to an assembly error occurs between the liquid distributor and the chamber wall. Further, the top cover is bent by its own weight, and this also leads to the positional deviation of the opening of the chamber wall. The technology described in Patent Document 1 uses a rubber diaphragm so that the sealing performance between the liquid distributor and the chamber wall is not impaired by such misalignment, but the rubber diaphragm is expensive. There is also a problem with durability.

In addition, the weight of the supply pipe for feeding the liquid from the liquid tank to the liquid distribution device acts on the liquid distribution device. Thus, when the liquid distributor is subjected to stress, the sealing performance may be impaired in the rotating mechanism such as the liquid distributor and the wheel. There is also a problem that abnormal wear of the bearing occurs because an excessive load acts on the bearing of the rotating portion of the liquid distributor due to its own weight. The maintenance frequency of the liquid distributor increases due to abnormal wear of the bearings, and the aseptic environment may be impaired by dust generated by the abnormal wear.
Thus, in the aseptic filling type filling apparatus, it is important to maintain the aseptic environment how to suppress the contamination from the outside of the chamber wall and the contamination by the mechanism part inside the chamber wall.
The present invention has been made based on such a technical problem, and an object of the present invention is to provide a filling apparatus that can reliably maintain an aseptic environment in a space for filling a container with a liquid.

The filling device of the present invention based on such a purpose is a filling device that supplies a liquid into a container while conveying the container held by a holder in the circumferential direction, and is rotatable on the base of the filling device. It is provided and connected to a wheel provided with a plurality of container holders at intervals in the circumferential direction on the outer periphery and a supply pipe for feeding liquid from the outside, and distributes the liquid to the containers held by each holder In order to perform filling of the liquid into the container in a predetermined environment, a chamber wall surrounding the space including the wheel on the base is provided. The liquid distributor has a cylindrical holder member whose upper end is connected to the supply pipe, a part of the upper end passes through the chamber wall and protrudes outside, and is provided on the wheel so as to be integrated with the wheel. The upper part is inserted into the holder member and held in a relatively rotatable state, and the lower part has a plurality of distribution pipes for supplying liquid to the containers held by the respective holders. And a manifold. In the portion where the holder member penetrates the chamber wall, the gap between the opening formed in the chamber wall and the outer periphery of the holder member is blocked by a ring-shaped plate, and the plate is outside the inner diameter of the opening. The plate has a diameter, the inner periphery of the plate is fixed to the holder member, and the outer periphery of the plate is placed on the chamber wall, so that the plate is within a certain dimension within a plane perpendicular to the axis of the holder member. together are fixed so as to be movable in the outer peripheral portion of the holder member, that force which is perpendicular to the axis of the holder member through the plate is deformed when applied, the stress acting on the holder member A stress relieving member for relieving is provided .
Because the plate has an outer diameter larger than the inner diameter of the opening of the chamber wall, the plate can be placed with its outer periphery placed on the chamber wall, as long as there is no member in contact with the outer periphery of the plate The position of the plate is free. Then, when the inner peripheral portion of the plate is fixed prior to the holder member, the plate is positioned concentrically on the holder member side. If the outer periphery of the plate is fixed to the chamber wall in this state, even if there is a misalignment between the holder member and the chamber wall, no stress acts on the holder member from the chamber wall via the plate.
To do this, after installing the holder member and the chamber wall, the inner peripheral portion of the plate is first fixed to the holder member, and in this state, the outer peripheral portion of the plate is fixed to the chamber wall.

  In such a plate, if the inner peripheral part is fixed to the holder member, the outer peripheral part of the plate can be pressed against the upper surface of the chamber wall by the weight of the holder member, and the airtightness between the plate and the chamber wall is improved. Can do.

In addition to the above, a certain measure in each part of the filling apparatus is required to maintain a sterile environment in the chamber wall.
For example, a seal member having a thickness larger than the gap between the lower end portion of the holder member and the manifold is preferably interposed at the boundary portion between the lower end portion of the holder member and the manifold. When the seal member is pressed by the weight of the holder member, the sealing performance at this portion can be improved, and leakage of a lubricant or the like used for rotatably supporting the upper portion of the manifold inside the holder member can be prevented.
It is also preferable to provide a nozzle for spraying the sterilizing liquid in this portion. Thereby, even if leakage of lubricant etc. should arise, contamination of an aseptic environment can be suppressed.

By the way, the supply pipe for feeding the liquid into the liquid distributor from the outside has a support structure in which the weight of the supply pipe and the internal liquid acts on the liquid distributor, and the bearing of the liquid distributor and the wheel below the liquid distributor Excessive load will act on them. As a result, abnormal wear occurs in the bearing, and if the wear powder enters the aseptic environment, the aseptic environment is contaminated. Therefore, it is preferable to attach the support member of the supply pipe to other parts excluding the liquid distributor and the wheel, for example, a column on the chamber wall or a floor around the apparatus. Thereby, the load received from the supply pipe | tube which acts on a liquid distribution apparatus and a wheel can be reduced.
In addition, providing a flexible hose having flexibility between the supply pipe and the liquid distributor is effective in reducing the load received from the supply pipe acting on the liquid distributor and the wheel. .
In addition, it is preferable to provide a water-sealed seal portion having a labyrinth shape at the lower end portion of the outer peripheral portion of the wheel and the boundary portion with the base. As a result, a mechanism for rotating the wheel, including a bearing, provided at the lower portion of the wheel can be reliably placed outside the sterile environment, and contamination of the sterile environment can be prevented even in the unlikely event.

According to the present invention, the ring-shaped plate that closes the gap between the opening formed in the chamber wall and the outer peripheral portion of the holder member is provided in a portion where the holder member passes through the chamber wall. The plate has an outer diameter larger than the inner diameter of the opening, and the outer peripheral portion of the plate is placed on the chamber wall and fixed with the inner peripheral portion of the plate being fixed to the holder member. did.
In this way, after the inner periphery of the plate is fixed in advance to the holder member, the outer periphery of the plate can be fixed to the chamber wall, and there is a misalignment between the holder member and the chamber wall. However, it can suppress that a stress acts on a holder member from a chamber wall via a plate. Further, since such a plate is formed of a rigid material such as a metal, the manufacturing cost can be reduced compared to a rubber manifold or the like, and the durability is excellent.
Further, the supply pipe that supplies the liquid to the liquid distributor from the outside also has a support structure that reduces the load acting on the liquid distributor and the wheel, so that the stress on the holder member can be suppressed.
As a result, it is possible to prevent the sealing performance from being deteriorated due to the stress acting on the liquid distributor and the occurrence of abnormal wear of the bearing, thereby preventing the aseptic environment from being damaged.
In addition to this, it is possible to prevent the aseptic environment from being damaged by improving the sealing performance at each part such as the boundary part of the holder member and the manifold of the liquid distributor and the plate.

Hereinafter, the present invention will be described in detail based on embodiments shown in the accompanying drawings.
FIG. 1 is a diagram for explaining the overall configuration of a beverage filling machine according to the present embodiment. The beverage filling machine shown in FIG. 1 is applied to an aseptic filling method.
As shown in FIG. 1, the beverage filling machine includes a sterilizing device 11 for sterilizing the container 100, a rinsing device 12 for rinsing the container 100, a filling device 20 for filling the container 100 with a liquid, and a cap for the container 100 filled with the liquid. A capper (not shown) to be mounted is mainly provided.
Between the sterilizer 11, the rinsing device 12, the filling device 20, and the capper, a conveying star wheel 13 and the like are provided so that the container 100 is delivered and the like.

FIG. 2 is a diagram illustrating a configuration of the filling device 20.
As shown in FIG. 2, the filling device 20 is provided with a rotating shaft 23 that is rotatably supported by a bearing 22 on a base frame (base) 21. A disk-like wheel 24 is supported on the rotating shaft 23, and the wheel 24 is rotated in a substantially horizontal plane by being driven to rotate by a driving source 25 such as a motor.
On the outer periphery of the wheel 24, a gripper (holding tool) 26 that holds the container 100 to be filled with a liquid and a filling nozzle 27 that fills the container 100 held by the gripper 26 with a liquid are provided. It is arranged at regular intervals in the direction.

  Above the wheel 24, a liquid distributor 30 that distributes the liquid to the filling nozzles 27 is provided. The liquid distributor 30 is supplied with liquid through a pipe 40 from a liquid tank (not shown) provided outside, and is divided into a plurality of pipes 31 connected to the filling nozzles 27 and connected to the respective filling nozzles 27. Dispense and dispense liquid.

A chamber wall 50 that covers the wheel 24, the filling nozzle 27, and the like is provided on the base frame 21 in order to perform liquid filling of the container 100 in the filling device 20 in an aseptic environment.
The chamber wall 50 is configured by providing a column cover (support member) 51 provided on the table 21 a of the base frame 21 with a side cover 52 surrounding the side and a top cover 53 covering the top. ing.
The space in the chamber wall 50 is supplied with a mist of a sterilizing liquid (for example, peracetic acid, hydrogen peroxide, caustic soda, or the like) from the outside, so that the space is an aseptic environment.
At this time, a boundary portion between the lower end of the outer peripheral portion of the wheel 24 and the upper surface of the table 21a of the base gantry 21 is a water seal portion 28 using a labyrinth structure. This ensures airtightness at the lower end portion of the wheel 24 and maintains an aseptic environment.

As shown in FIG. 3, the liquid distributor 30 includes a joint holder (holder member) 32 connected to the pipe 40 and a rotary manifold (manifold) 33 provided to rotate integrally with the wheel 24. ing.
The joint holder 32 has a cylindrical shape as a whole, and rotatably holds the rotary manifold 33 therein. In the upper part of the joint holder 32, a connection port 32a for the pipe 40 is formed, and liquid is fed from the connection port 32a. The joint holder 32 is connected to the top cover 53 via a ring plate (plate) 60A, which will be described later, and its rotation and position are restricted.
The rotary manifold 33 is a cylindrical body 34 whose upper part is inserted into the joint holder 32. A disc-shaped distribution rotor 35 is integrally formed at the lower end of the cylindrical body 34. As shown in FIG. 2, the distribution rotor 35 is connected to the wheel 24 via a connecting member 36, whereby the rotary manifold 33 rotates together with the wheel 24. As shown in FIG. 3, a distribution flow path 35 a is formed in the distribution rotor 35 so as to be continuous with the flow path 34 a of the cylindrical body 34 and branch the flow path 34 a radially into a plurality. And the connection port 35b is formed in the outer peripheral part of the distribution rotor 35 in the position corresponding to each distribution flow path 35a, and the said distribution pipe 31 is connected to this connection port 35b.

  Slide bushes 70A and 70B are interposed in such a rotational sliding portion between the joint holder 32 and the rotary manifold 33, whereby the joint holder 32 and the rotary manifold 33 can be relatively rotated. ing.

  Further, between the upper end portion of the cylindrical body 34 of the rotary manifold 33 and the lower portion of the connection port 32 a of the joint holder 32, from this portion to the inner peripheral surface of the joint holder 32 and the outer peripheral surface of the cylindrical body 34. In order to prevent leakage of the liquid, a mechanical seal unit 71 is provided. The mechanical seal unit 71 is an off-the-shelf product. The upper portion 71a is fixed to the joint holder 32 side, and the lower portion 71b is fixed to the cylindrical body 34 side, allowing the relative rotation of both, and between the fixed side and the rotating side. In addition, a sealing liquid is sent to the outer peripheral portion by a supply pump 71c from the outside to enhance the sealing performance.

  Further, a disc-shaped seal ring (seal member) 72 is provided between the lower end portion of the joint holder 32 and the rotary manifold 33. The seal ring 72 is interposed between the upper surface 35 c of the distribution rotor 35 of the rotary manifold 33 and a surface 32 b parallel to the upper surface 35 c at the lower end portion of the joint holder 32. The thickness of the seal ring 72 is set to be slightly larger than the gap between the upper surface 35 c of the distribution rotor 35 and the surface 32 b of the joint holder 32. The seal ring 72 is made of a material having elasticity that can be elastically deformed by being pressed by the weight of the joint holder 32 and a low friction coefficient that does not hinder the relative rotation of the joint holder 32 and the rotary manifold 33. For example, it is made of a resin material. As a result, the seal ring 72 is interposed between the joint holder 32 and the rotary manifold 33 in a state where the seal ring 72 is elastically deformed by being pressed by the weight of the joint holder 32, thereby improving the sealing performance at the lower end portion of the joint holder 32. ing.

  In addition, the sterilizing liquid is preferably sprayed from the spray nozzle (nozzle) 75 to the boundary portion between the lower end of the joint holder 32 and the distribution rotor 35 of the rotary manifold 33. As a result, even if lubricating oil or the like leaks from the joint portion, a sterile environment can be maintained.

In such a liquid distributor 30, the joint holder 32 is provided so that most of the joint holder 32 is accommodated in the chamber wall 50, and only a part projects upward from the top cover 53. For this reason, an opening 53a is formed in the top cover 53, and the space between the joint holder 32 and the opening 53a of the top cover 53 is closed by the ring plate 60A, so that the aseptic environment in the chamber wall 50 is reduced. To maintain.
The outer diameter of the ring plate 60 </ b> A is formed larger than the inner diameter of the opening 53 a of the top cover 53. Thereby, the outer peripheral portion 60 a of the ring plate 60 </ b> A is placed on the flange 53 b provided on the inner peripheral edge of the opening 53 a of the top cover 53. In this state, the ring plate 60A is fixed by a presser fitting 61 provided on the top cover 53 side. The presser fitting 61 is disposed at a position where it does not interfere with the outer peripheral portion of the ring plate 60A so that the ring plate 60A can move within a fixed dimension within a plane orthogonal to the axis of the joint holder 32.

A cylindrical ring member (stress relaxation member) 37 is provided on the outer periphery of the joint holder 32. The lower end of the ring member 37 is held by a support member 38. The inner diameter of the ring member 37 is set to be larger than the outer diameter of the joint holder 32 at the position where the ring member 37 is provided, whereby the ring member 37 is separated from the outer peripheral surface of the joint holder 32 to the outer peripheral side. Is retained.
The ring plate 60A has an opening 60b formed at the center, and the ring member 37 faces the inner peripheral surface of the opening 60b. A protrusion 37a that protrudes outward is provided on the outer peripheral surface of the ring member 37, and the upper end of the ring plate 60A is connected and fixed to the lower surface of the protrusion 37a. An O-ring 62 is provided between the opening 60b of the ring plate 60A and the outer peripheral surface of the ring member 37, and airtightness at this portion is ensured. Further, an O-ring 63 is provided between the lower surface of the outer peripheral portion 60a of the ring plate 60A and the flange 53b of the top cover 53, and airtightness in this portion is ensured.

When the filling device 20 is manufactured and assembled, the liquid distribution device 30 has the bearing 22, the rotary shaft 23, the wheel 24, the rotary manifold 33, and the joint holder 32 within a predetermined positional accuracy from the base mount 21 side upward. Assemble sequentially. On the other hand, the chamber wall 50 is sequentially assembled on the base frame 21 so that the column 51, the side cover 52, and the top cover 53 are within a predetermined positional accuracy. However, since the liquid distributor 30 itself and the chamber wall 50 are assembled separately, even if each is within a predetermined positional accuracy, a positional deviation may occur between them.
As described above, the ring plate 60 </ b> A has an outer diameter larger than that of the opening 53 a of the top cover 53 and the outer peripheral portion 60 a is placed on the opening 53 a of the top cover 53. It can move within a range of a certain dimension in the radial direction of 60A, and does not interfere with the presser fitting 61 that fixes the ring plate 60A. As a result, even if there is a misalignment between the joint holder 32 and the top cover 53, the outer peripheral portion 60 a of the top plate 53 is attached to the ring member 37 on the joint holder 32 side. Further, it does not come into contact with the presser fitting 61 and receive stress in the radial direction. When excessive stress is applied, the seal ring 72 at the lower end of the joint holder 32 and the sealing performance of the mechanical seal unit 71 may be impaired, but this can be avoided by the above structure.
Moreover, since such a ring plate 60A can be formed of a material other than rubber, such as metal or resin, the manufacturing cost can be suppressed, and the durability and corrosion resistance are excellent.

Furthermore, the ring plate 60 </ b> A is configured such that the weight of the joint holder 32 is transmitted to the ring plate 60 </ b> A via a protrusion 37 a provided on the ring member 37. As a result, the outer peripheral portion of the ring plate 60 </ b> A is pressed against the flange 53 b of the opening 53 a of the top cover 53, and the air tightness at the outer peripheral portion of the ring plate 60 </ b> A by the O-ring 63 can be maintained.
In addition, the ring member 37 is provided so as to extend upward from the support member 38. As a result, if an external force in the radial direction is input via the ring plate 60A, the ring member 37 rising from the support member 38 of the ring member 37 is elastically deformed (in some cases, plastically deformed), thereby reducing the external force. Can be absorbed. As a result, it is possible to prevent an excessive stress from acting on the liquid distribution device 30 due to a dimensional error during assembly, and to ensure a reliable sealing property.

As shown in FIG. 2, the pipe 40 for supplying the liquid to the liquid distributor 30 as described above has a support member 41 as shown in FIG. 2 so that its own weight (including the liquid in the pipe) does not act on the liquid distributor 30. The other end of the chamber wall 50 except for the liquid distributor 30 and the wheel 24 is supported by the column 51 and the ceiling and floor of the building. Further, a flexible hose 42 formed of a material such as resin or rubber having flexibility is interposed between the distal end of the pipe 40 and the connection port 32a of the joint holder 32 of the liquid distributor 30. This also contributes to preventing the weight of the pipe 40 from acting on the liquid distributor 30.
In this way, by devising not only the fixing structure of the ring plate 60A but also the support / connection structure of the pipe 40, an unnecessary external force is prevented from acting on the liquid distributor 30 and the bearing 22 is excessively large. It is possible to suppress the action of force. As a result, the bearing 22 is prevented from being abnormally worn to generate wear powder and the like, and the aseptic environment is prevented from being contaminated.

Incidentally, in the configuration shown in FIG. 3, the airtightness is ensured by the ring plate 60A and the O-rings 62 and 63, but this is not restrictive. For example, as shown in FIG. 4, a bellows 65 made of elastic rubber or the like that contacts the lower surface of the outer peripheral portion of the ring plate (plate) 60B is provided on the inner peripheral portion of the opening 53a of the top cover 53. The bellows 65 can be pressed against the lower surface of the outer peripheral portion of the ring plate 60B to ensure a sealing property between the outer peripheral portion of the ring plate 60B and the top cover 53. is there.
Also, the ring plate 60B fixing structure uses a cock handle 66 in which instead of the presser fitting 61, when the handle 66a is rotated, the presser part 66b is lowered while rotating to exert a tightening force. The outer peripheral portion of the plate 60B may be pressed and fixed to the flange 53b of the opening 53a of the top cover 53.
In such a configuration, the ring plate 60B can be pressed downward by the cock handle 66. Compared to the configuration in which the outer periphery of the ring plate 60A is pressed against the flange 53b by transmitting the weight of the liquid distributor 30 to the ring plate 60A as in the configuration shown in FIG. 3, the ring plate 60B is thinner and lighter. It can be.

Further, instead of the slide bushes 70A and 70B, as shown in FIG. 5, it is possible to relatively rotate the joint holder 32 and the rotary manifold 33 using bearings 73A and 73B. In this case, oil seals 74A and 74B are provided between the joint holder 32 and the rotary manifold 33 in order to prevent leakage of lubricating oil necessary for the bearings 73A and 73B.
Furthermore, in order to improve the sealing performance in the gap between the lower end portion of the joint holder 32 and the upper surface of the rotary manifold 33, it is preferable to include a bellows 76 having elasticity such as rubber.
Other than this, unless departing from the gist of the present invention, the configuration described in the above embodiment is selected, the assembly parts are integrated, the order of assembly is changed, or other configurations are appropriately changed. Is possible.

It is a schematic layout figure which shows the structure of the drink filling machine in this Embodiment. It is an elevation view which shows a filling apparatus. It is sectional drawing which shows the liquid distribution apparatus of a filling apparatus. It is sectional drawing which shows the other example of a liquid distribution apparatus. It is sectional drawing which shows the further another example of a liquid distribution apparatus.

Explanation of symbols

  DESCRIPTION OF SYMBOLS 20 ... Filling device, 21 ... Base mount (base), 22 ... Bearing, 24 ... Wheel, 26 ... Gripper (holder), 28 ... Water seal part, 30 ... Liquid distribution device, 31 ... Distribution pipe, 32 ... Joint Holder (holder member), 33 ... Rotary manifold (manifold), 34 ... Cylinder, 35 ... Distributor rotor, 37 ... Ring member (stress relief member), 40 ... Piping, 41 ... Support member, 42 ... Flexible hose, 50 ... Chamber wall 51. Column (support member) 53. Top cover 53 a Opening 60 A, 60 B Ring plate (plate) 72 Seal ring (seal member) 75 Spray nozzle (nozzle) 100 …container

Claims (8)

A filling device for supplying a liquid into the container while conveying the container held by a holder in the circumferential direction,
A wheel provided rotatably on a base of the filling device, and provided with a plurality of the holders of the container with a circumferential interval on an outer peripheral portion;
A liquid distributor connected to a supply pipe for supplying the liquid from the outside, and distributing and supplying the liquid to the containers held by the holders;
A chamber wall surrounding the space including the wheel on the base in order to fill the container with the liquid in a predetermined environment;
The liquid distributor is
A cylindrical holder member having an upper end connected to the supply pipe and a part of the upper end side penetrating the chamber wall and projecting to the outside;
The container provided on the wheel and rotated integrally with the wheel, the upper part being inserted into the holder member and held in a relatively rotatable state, and held at the lower part by the holding tool. And a manifold having a plurality of distribution pipes for supplying the liquid to
In the portion where the holder member passes through the chamber wall, a gap between the opening formed in the chamber wall and the outer periphery of the holder member is closed by a ring-shaped plate, and the plate The inner periphery of the plate is fixed to the holder member, and the outer periphery of the plate is placed on the chamber wall so that the plate is attached to the holder member. It is fixed so that it can move within a certain range within a plane perpendicular to the axis ,
A stress relieving member that relieves stress acting on the holder member by being deformed when a force in a direction perpendicular to the axis of the holder member is applied to the outer peripheral portion of the holder member via the plate. filling apparatus characterized by being.   2. The filling device according to claim 1, wherein an outer peripheral portion of the plate is fixed to the chamber wall in a state in which an inner peripheral portion is fixed to the holder member after the holder member and the chamber wall are installed. .   The filling device according to claim 1, wherein an inner peripheral portion of the plate is fixed to the holder member, and an outer peripheral portion is pressed against the upper surface of the chamber wall by the weight of the holder member. A seal member having a thickness larger than a clearance between the lower end portion of the holder member and the manifold is interposed at a boundary portion between the lower end portion of the holder member and the manifold, and the seal member is pressed by its own weight. The filling device according to any one of claims 1 to 3 , wherein: The filling device according to any one of claims 1 to 4 , wherein a nozzle for spraying a sterilizing liquid is provided at a boundary between the lower end portion of the holder member and the manifold. The filling device according to any one of claims 1 to 5 , wherein a support member of the supply pipe is attached to a portion other than the liquid distributor and the wheel. The filling device according to any one of claims 1 to 6 , wherein a flexible hose having flexibility is provided between the supply pipe and the liquid distributor. The water-seal seal | sticker part which has the labyrinth shape is provided in the lower end part of the outer peripheral part of the said wheel, and the boundary part with the said base, It is any one of Claim 1 to 7 characterized by the above-mentioned. Filling equipment.

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