JP4925056B2 - Motor position control device - Google Patents

Description

  The present invention compensates for fluctuations in response characteristics of a controlled object in a motor position control device for driving a semiconductor manufacturing apparatus, a machine tool, a robot, etc., and provides a very high speed, high accuracy positioning response, and an extremely high tracking follow-up response. It is related with the motor position control apparatus which can implement | achieve.

The configuration of a conventional motor position control device will be described. As shown in FIG. 7, as a first motor position control device, 11 is a command generation unit that generates a position command _xd , and 12 is an input position command _xd . A position control unit that outputs a speed command v _d by performing proportional control (hereinafter referred to as P control) so that the motor position detection signals x coincide with each other, and 13 is a time derivative of the position command x _{d in} order to improve the response to the command. A feed-forward compensation unit for adding the processed signal to the speed command v _d , 14 an adder, and 15 a proportional-integral control (hereinafter referred to as PI control) that performs P control and integration control in parallel so that the motor speed matches the speed command v _d. And a speed control unit that outputs a torque command u.

  Reference numeral 16 denotes a torque control u which inputs a PWM (pulse width modulation), a current control unit which controls an output current by an inverter, 17 is a motor such as a DC brushless motor, 18 is a semiconductor manufacturing apparatus, machine tool, robot, etc. It is a mechanical part and is a load on the motor 17, and many of them have a rapid acceleration / deceleration change. Reference numeral 19 denotes a detector that detects the motor position and feeds back the motor position detection signal x. Reference numeral 20 denotes a speed signal generator that outputs a signal obtained by time-differentiating the motor position detection signal x to the speed controller 15.

（外字１；ｘの１階微分値でありｘの１ドット）の偏差を求める減算器である。また、２７はＰ制御のほかに速度ループ積分ゲインＫ_ｉで積分を行うＰＩ制御の比例積分器、２８は比例積分器２７からの出力とモータ速度検出信号

（外字１）との偏差ｅ_２を求める減算器、２９は速度ループゲインＫ_ｖを乗じる乗算器である。 A control block diagram of the motor position control device will be described. 8, 21 a subtractor for outputting a difference e ₁ position command x _d and the motor position detection signal x, 22 is a multiplier for multiplying the position loop gain K _p, 23 is composed of a Laplace operator s A differentiator 24 that performs time differentiation is a multiplier that multiplies the output from the differentiator 23 by a speed feedforward gain α. In the case of digital control, the differentiator 23 becomes a differentiator. 25 is an adder for adding the output from the speed feedforward compensator 13 and the output from the multiplier 22, and 26 is a signal added by the adder 25 and a motor speed detection signal.

It is a subtractor for obtaining a deviation of (external character 1; first-order differential value of x and 1 dot of x). Further, 27 is proportional integrator PI control for integration at a speed loop integral gain K _i in addition to the P control, 28 outputs and the motor speed detection signal from the proportional integrator 27

(EUDC 1) the deviation e ₂ between obtaining subtractor, 29 is a multiplier for multiplying the speed loop gain K _v.

  Accordingly, the torque command u of the first motor position control device is determined by the following equations (Equation 9) (Equation 10) (Equation 11).

ただし、

However,

このように第１のモータ位置制御装置はＰＩ制御を行うものであるが、同様のモータ位置制御装置として、速度制御部が速度指令ｖ_ｄにモータ速度が一致するように偏差ｅ₂を速度ループ積分ゲインＫ_ｉで積分した値からモータ速度検出信号

（外字１）を減じた値に速度ループゲインＫ_ｖを乗じる積分比例制御（以下Ｉ−Ｐ制御と言う）を行ってトルク指令ｕを出力する第２のモータ位置制御装置も提案されている。これは図８において加算器２５で加算された信号をフィードフォワードできるように結線すると共に、第１のモータ位置制御装置の減算器２８を加減算器に変更し、この加減算器で比例積分器２７からの出力とモータ速度検出信号

（外字１）との偏差に追加的に減算するものである。このとき（数９）に代えて、以下に示す（数１２）に従ったトルク指令ｕとなる。（数１０）（数１１）は第１のモータ位置制御装置と変わらない。この第２のモータ位置制御装置の制御ブロック図は図示しないが、後述する図２においてβ＝１の場合となる。

As described above, the first motor position control device performs the PI control. As a similar motor position control device, the speed control unit sets the deviation e ₂ so that the motor speed matches the speed command v _d. motor speed detection signal from the integrated value by the integration gain K _i

It has also been proposed a second motor position control device that outputs an integration proportional control (hereinafter I-P say control) performed a torque command u multiplied by the speed loop gain K _v to a value obtained by subtracting (EUDC 1). In FIG. 8, the signal added by the adder 25 is wired so that it can be fed forward, and the subtracter 28 of the first motor position controller is changed to an adder / subtractor. Output and motor speed detection signal

This is additionally subtracted from the deviation from (external character 1). At this time, instead of (Equation 9), a torque command u according to (Equation 12) shown below is obtained. (Equation 10) (Equation 11) is the same as that of the first motor position control device. Although the control block diagram of the second motor position control device is not shown, it is the case where β = 1 in FIG.

従って、これら第１及び第２のモータ位置制御装置では、トルク指令ｕはＰＩ制御、Ｉ−Ｐ制御によって制御され、位置制御部１２、速度制御部１５から出力される。

Therefore, in these first and second motor position control devices, the torque command u is controlled by PI control and IP control, and is output from the position control unit 12 and the speed control unit 15.

Incidentally, in addition to the first and second motor position control devices described above, a third motor position control device has also been proposed. This is provided with a position control unit that outputs a torque command u by performing proportional / integral / differential control (hereinafter referred to as PID control) so that the motor position detection signal x matches the input position command _xd . Is.

9, 31 is commanded generator for generating a position command x _d, 32 a position for outputting by performing the PID control so that the motor position detection signal x coincides with the position command x _d input velocity command v _d A control unit 33 is a current control unit that inputs a torque command u and controls an output current by PWM, an inverter, etc. 34 is a motor such as a DC brushless motor, and 35 is a mechanical unit such as a semiconductor manufacturing apparatus, a machine tool, and a robot. A load 36 is applied to the motor 34. A detector 36 detects the motor position and feeds back a motor position detection signal x.

In the third motor position control device, the torque command u is determined by the control block diagram shown in FIG. In FIG. 10, 41 is a subtractor for outputting a deviation e ₁ between the position command x _d and the motor position detection signal x, 42 is a multiplier having a proportional gain λ ₁ and outputting in proportion to the deviation e ₁ , 43 is an integral multiplier that integrates the deviation e ₁ with an integral gain λ ₂ , 44 is a differentiator composed of a Laplace operator s, and 45 is an adder.

  Therefore, in the third motor position control device, the torque command u is determined by the following (Equation 13).

以上説明した第１、第２、第３の従来のモータ位置制御装置によれば、かなり高速で高精度な位置決め応答、また追従性のある軌跡追従応答が実現できる。しかし、最近の技術の進歩によって、これら第１、第２、第３のモータ位置制御装置では、外乱抑圧機能が十分とは言えなくなってきている。例えば半導体製造装置、工作機械、ロボット等で使用されるモータ位置制御装置においては、制御対象である負荷イナーシャや粘性摩擦力等が変化し、制御に伴って位置決め特性や軌跡追従特性が変化する。しかも、これに起因してフィードバックループの安定性が崩れて結果的に振動を起こしてしまう。

According to the first, second, and third conventional motor position control devices described above, it is possible to realize a positioning response with high speed and high accuracy, and a trajectory tracking response with tracking ability. However, due to recent technological advances, the first, second, and third motor position control devices cannot be said to have sufficient disturbance suppression functions. For example, in a motor position control device used in a semiconductor manufacturing apparatus, a machine tool, a robot, or the like, a load inertia, a viscous frictional force, or the like that is a control object changes, and a positioning characteristic or a trajectory tracking characteristic changes with control. Moreover, due to this, the stability of the feedback loop is lost, resulting in vibration.

  Therefore, it has been proposed to obtain a servo motor with good followability by improving disturbance suppression. This uses sliding mode control (nonlinear control) for servo motor control. However, this conventional sliding mode control is not related to the existing motor position control (linear control such as P control by position loop and PI control by speed loop control), and is a sliding mode control with strong originality. . For this reason, it has been impossible to make use of the linear control technology that is familiar to us.

  Thus, a so-called hybrid servo motor control system has been proposed that uses the existing servo motor PI control technology and introduces sliding mode control (see Patent Document 1). This corresponds to a conventional first motor position control device.

In this control method, the switching surface (phase surface) _Suf of the sliding mode control is equivalent to the form derived from the torque command obtained by the existing linear control. That is, (1) is the derivative of the positional deviation ε, (2) is the product K _p ε of the P control gain K _p and the positional deviation ε, and (3) is the integral and gain ratio of {(1) + (2)}. When defined as a product of K1 / K2, the switching surface S _uf is S _uf = {(1+ (2) + (3)). As a result, it is possible to obtain a corrected torque command by adding a switching input obtained by performing a troublesome calculation to the torque command obtained by linear control.

  However, the switching input by this calculation gives a corrected torque command, but the physical (direct) relationship with the state equation of the system to be controlled is poor, and the cumbersome and complicated calculation that cannot be intuitively understood must be performed. It was a must. In addition, it is difficult to suppress chattering in this calculation, and it is difficult to introduce a chattering suppression function. Since this technology is compatible with the conventional first motor position control device, it can cope with P control and PI control, but in the case of control by switching between PI control and IP control, or a combination of both. Was not available.

JP-A-5-134758

  As described above, in the conventional motor position control device that performs linear control, the usage environment has changed greatly, and it cannot be said that the disturbance suppression function is sufficient. Recent servo motors are often used where the load inertia or viscous frictional force to be controlled changes, and the positioning characteristics and the trajectory tracking characteristics change, causing the stability of the feedback loop to be lost and causing vibration. Although it is conceivable to apply sliding mode control (non-linear control) to servo motor control, this is inherently related to existing linear motor control technology (control technology using Laplace transform, Z transform, etc.). However, it was difficult to use for those who were familiar with the conventional technology.

  On the other hand, the servo motor control method of Patent Document 1 introduces sliding mode control while using the existing linear motor control as it is. In other words, the corrected torque command is set as a new torque command by adding a switching input obtained by performing a complicated calculation to the torque command required by the linear motor control technique.

  However, although the switching input of Patent Document 1 gives a corrected torque command, it has a poor relationship with the state equation of the system to be controlled and has to perform complicated calculations that cannot be intuitively understood. In addition, it was difficult to introduce a chattering suppression function.

  Therefore, the present invention does not change the positioning characteristics and the trajectory tracking characteristics even when the load inertia, viscous frictional force and other nonlinear disturbance forces are changed, and the process according to the function form of the control target can be performed without complicated calculation. An object of the present invention is to provide a motor position control device having extremely high stability.

In order to solve the above problem, the motor position control device of the present invention determines the torque command u, outputs a current to the motor, and controls the position so that the motor position detection signal x matches the target position command _xd. A motor position control device for outputting a position command _xd ; a position command generator for outputting the position command _xd ; the position command _xd and the motor position detection signal x being input; and the motor position detection signal x coincides with the position command _xd a position control unit for outputting a speed command v _d to the speed of updating the speed command v _d in addition to the speed command v _d is multiplied by a predetermined value α to the position command x _d to the time derivative signal a feedforward module performs at least one of the control of the integration proportional control and proportional-integral control provided in parallel, the rate is updated command v torque command to the motor speed detection signal _d coincides u A speed control unit for determination, a current control unit for inputting the torque command u and outputting a current to the motor, a detector for detecting the position of the motor, and outputting the motor speed detection signal from the position of the motor A speed generation unit and a nonlinear disturbance compensation calculation unit that performs nonlinear disturbance compensation when determining the torque command u are provided. When nonlinear disturbance compensation is performed, the nonlinear disturbance compensation calculation unit is represented by (Equation 2), (Equation 3), (Equation 4). ) And (Equation 5), and a function described in the control target format using the load inertia maximum value J _max , the viscous friction coefficient maximum value D _max and the disturbance maximum value F _max as parameters, and (Equation 3) taking the product of the function which has been subjected to chattering suppression processing switching function r ₁ represented outputting a nonlinear compensation torque to describing function of this, the torque command u is given by equation (1) non Characterized in that it is Katachigairan compensated.

Where K _p Is the position loop gain, K _v Is the speed loop gain, K _i Is a speed loop integral gain, α (α ≧ 0) is a speed feedforward gain, β (β ≧ 0) is a switching constant for switching between PI control and IP control in the speed control unit, δ is a chattering prevention constant, and c is nonlinear. Switching constant for switching on / off disturbance compensation, s is a Laplace operator, and || is an absolute value.

According to the present invention, even when the load inertia or viscous friction force to be controlled changes, the nonlinear disturbance compensation calculation unit compensates for such changes, so that the positioning characteristics and the trajectory tracking characteristics do not change, and the motor position detection Nonlinear disturbance compensation calculation is performed using the existing position control method so that the signal matches the position command, so that not only high-speed and high-accuracy response can be realized, but also high that is not affected by changes in drive conditions or operating environment A motor position control device with stability can be realized. In addition, the product of the function described in the control target format using the load inertia maximum value, viscous friction coefficient maximum value, and disturbance maximum value and the switching function is used as the description function. Control that makes use of the contents and ease of understanding can be performed without complicated calculations. Furthermore, by adding one signal for nonlinear disturbance compensation to existing linear control technology, there is no need to change the basic (existing) control method and control parameters, and whether or not nonlinear disturbance compensation is performed By changing the size of the parameter that suppresses the chattering, it is possible to easily switch while suppressing chattering, so that the motor position control device is very easy to use.

The first aspect of the present invention is a motor position control device that determines a torque command u, outputs a current to the motor, and controls the position so that the motor position detection signal x matches the target position command _xd. Te, outputs the position command generator for outputting the position command x _d, the position command x _d and the speed command v _d to enter the motor position detection signal x motor position detection signal x coincides with the position command x _d a position control unit, the speed feedforward section for updating the position command x _d in a time differential signal is multiplied by a prescribed value α speed command v in addition to _d the speed command v _d, the proportional provided in parallel integration A speed control unit that determines at least one of control and integral proportional control and determines the torque command u so that the motor speed detection signal matches the updated speed command v _d , and inputs the torque command u to the motor Electric A current control unit that outputs a motor, a detector that detects the position of the motor, a speed generation unit that outputs a motor speed detection signal from the motor position, and a nonlinear disturbance compensation calculation that performs nonlinear disturbance compensation when determining the torque command u The non-linear disturbance compensation calculation unit performs the calculations of (Equation 2), (Equation 3), (Equation 4), and (Equation 5) at the time of nonlinear disturbance compensation, as well as the load inertia maximum value J _max and the viscous friction coefficient maximum. The product of the function described in the control target format with the value D _max and the disturbance maximum value F _max as parameters and the function obtained by subjecting the switching function r ₁ represented by (Equation 3) to the chattering suppression process is obtained. A non-linear compensation torque is output as a descriptive function, and a torque command u is given by (Equation 1) to compensate for non-linear disturbances . K _p is a position loop gain, K _v is a speed loop gain, K _i is a speed loop integral gain, α (α ≧ 0) is a speed feedforward gain, β (β ≧ 0) is a switching constant for switching between PI control and IP control in the speed control unit, δ Is a chattering prevention constant, c is a switching constant for switching the presence or absence of nonlinear disturbance compensation, s is a Laplace operator, and || is an absolute value.

この構成によって、制御対象の負荷イナーシャや粘性摩擦力などが変化した場合でも、それらの変化を非線形外乱補償演算部が補償するため、位置決め特性や軌跡追従特性が変化せず、モータ位置検出信号が位置指令に一致するように既存の位置制御方式を利用して非線形外乱補償演算を行うため、高速で高精度の応答が実現できるばかりでなく、駆動条件や動作環境の変化に影響されない高い安定性を備えたモータ位置制御装置が実現できる。また、負荷イナーシャ最大値、粘性摩擦係数最大値及び外乱最大値を用いた制御対象形式に記述された関数と切換関数との積を記述関数とするので、制御対象の本来の線形性、物理的内容とその理解の容易性をそのまま活かした制御が複雑な演算なしに行える。さらに、既存の線形制御の技術に非線形外乱補償のための一つの信号を加えるだけで、基本（既存）の制御方式と制御パラメータを変える必要がなく、非線形外乱補償を行うか否かを簡単に切り換えることができるため、非常に利用し易いモータ位置制御装置となる。速度フィードフォワードやＰＩ制御とＩ−Ｐ制御の一方から他方へ、また両者の組合せの制御が可能であるという特徴を含めて、既存の位置制御演算の特徴を保ちながら、非線形外乱補償を行うか否かを、チャタリングを抑制するパラメータの大きさを変えることで、チャタリングを抑制しながら簡単に切り換えることができるため、非常に利用し易いモータ位置制御装置となる。

With this configuration, even if the load inertia or viscous friction force to be controlled changes, the nonlinear disturbance compensation calculation unit compensates for those changes, so the positioning characteristics and trajectory tracking characteristics do not change, and the motor position detection signal Nonlinear disturbance compensation calculation is performed using the existing position control method so as to match the position command, so that not only high-speed and high-accuracy response can be realized, but also high stability that is not affected by changes in driving conditions and operating environment A motor position control device equipped with can be realized. In addition, the product of the function described in the control target format using the load inertia maximum value, viscous friction coefficient maximum value, and disturbance maximum value and the switching function is used as the description function. Control that makes use of the contents and ease of understanding can be performed without complicated calculations. Furthermore, simply adding a single signal for nonlinear disturbance compensation to the existing linear control technology, there is no need to change the basic (existing) control method and control parameters, and it is easy to determine whether or not to perform nonlinear disturbance compensation. Since it can be switched, the motor position control device is very easy to use. Whether non-linear disturbance compensation is performed while maintaining the characteristics of existing position control calculations, including the ability to control speed feedforward, PI control and IP control from one to the other, or a combination of both. Since it can be switched easily while suppressing chattering by changing the size of the parameter that suppresses chattering, the motor position control device becomes very easy to use.

The second mode of the present invention is a motor according to the first mode in which a torque command u is determined, a current is output to the motor, and position control is performed so that the motor position detection signal x matches the target position command _xd. in the position control device, by multiplying a position control unit for outputting a speed command v _d to the motor position detection signal x coincides with the position command x _d, the predetermined value α position commands x _d to the time obtained by differentiating the signal speed a speed feed forward unit that updates the command v in addition to _d the speed command v _d, performs at least one of the control of the integration proportional control and proportional-integral control provided in parallel, the motor on the updated velocity command v _d A speed control unit that determines the torque command u so that the speed detection signals match, and a speed creation unit that outputs a motor speed detection signal from the motor position. (Equation 3) , (Equation 4) and (Equation 5) are calculated, and the function described in the control target format using the load inertia maximum value J _max , the viscous friction coefficient maximum value D _max and the disturbance maximum value F _max as parameters, The product of the switching function r ₁ represented by Equation 3) and the function obtained by performing chattering suppression processing is taken to output a nonlinear compensation torque having this as a description function, and the torque command u is given by Equation (1) In place of the nonlinear disturbance compensation, a position control unit that determines the torque command u so that the motor position detection signal x coincides with the position command _xd is provided. (7) and (Equation 8) are calculated, the load inertia maximum value J _max , the viscous friction coefficient maximum value D _max, and the disturbance maximum value F _max are used as parameters, and the function described in the control target format and the motor position detection Nonlinear compensation torque using the product of the switching function r ₂ represented by ( Equation 8), which is a function of only the difference between the output signal x and the position command _xd , and the function obtained by subjecting the chattering suppression process to the product as a description function outputs, is given by a torque command u (6) is non-linear disturbance compensation, it is a motor position control apparatus according to claim, k is a proportional constant, c is the switching換定number for switching the presence or absence of non-linear disturbance compensation , Λ ₁ is a proportional gain, λ ₂ is an integral gain, δ is a chattering prevention constant, s is a Laplace operator, and || is an absolute value.

この構成によって、制御対象の負荷イナーシャや粘性摩擦力などが変化した場合でも、それらの変化を非線形外乱補償演算部が補償するため、位置決め特性や軌跡追従特性が変化せず、既存のＰＩＤ制御演算式を切換関数として利用して非線形外乱補償演算を行うため、高速で高精度の応答が実現できるばかりでなく、駆動条件や動作環境の変化に影響されない高い安定性を備えたモータ位置制御装置が実現できる。また、負荷イナーシャ最大値、粘性摩擦係数最大値及び外乱最大値を用いた制御対象形式に記述された関数と切換関数との積を記述関数とするので、制御対象の本来の線形性、物理的内容とその理解の容易性をそのまま活かした制御が複雑な演算なしに行える。さらに、既存の線形制御の技術に非線形外乱補償のための一つの信号を加えるだけで、従来の基本の制御方式と制御パラメータを変える必要がなく、非線形外乱補償を行うか否かを、チャタリングを抑制するパラメータの大きさを変えることで、チャタリングを抑制しながら簡単に切り換えることができるため、非常に利用し易いモータ位置制御装置となる。

With this configuration, even when the load inertia or viscous frictional force to be controlled changes, the nonlinear disturbance compensation calculation unit compensates for such changes, so the positioning characteristics and trajectory tracking characteristics do not change, and the existing PID control calculation Since the nonlinear disturbance compensation calculation is performed using the equation as a switching function , not only can a high-speed and high-accuracy response be realized, but also a motor position control device with high stability that is not affected by changes in drive conditions or operating environment. realizable. In addition, the product of the function described in the control target format using the load inertia maximum value, viscous friction coefficient maximum value, and disturbance maximum value and the switching function is used as the description function. Control that makes use of the contents and ease of understanding can be performed without complicated calculations. Further, simply by adding one signal for nonlinear disturbance compensation of the existing linear control technology, it is not necessary to change the control method and control parameters of the conventional basic, whether to perform a non-linear disturbance compensation, chattering By changing the size of the parameter to be suppressed, it is possible to easily switch while suppressing chattering, so that the motor position control device becomes very easy to use.

(Embodiment 1)
First, the motor position control apparatus according to the first embodiment of the present invention will be described. The motor position control device of the first embodiment is a combination of the conventional first and second motor position control devices, and it is possible to switch either one of the controls or the mode used in combination. On the other hand, nonlinear disturbance compensation is performed. FIG. 1 is a configuration diagram of a motor position control device in Embodiment 1 of the present invention, FIG. 2 is a control block diagram of the motor position control device in Embodiment 1 of the present invention, and FIG. 3 is in Embodiment 1 of the present invention. FIG. 11 is an explanatory view of a positioning experiment result of the motor position control device, FIG. 11 is an explanatory view of a first positioning experiment result of the conventional first motor position control device, and FIG. 12 is a second view of the conventional first motor position control device. It is explanatory drawing of this positioning experiment result.

  In FIG. 1, 51 is a command generation unit, 52 is a position control unit, 53 is a speed feedforward unit, 54 is an adder, 55 is a speed control unit, 56 is a speed creation unit, 57 is an adder, and 58 is a current control unit. , 59 is a motor, 5a is a load that is a mechanical part of a semiconductor manufacturing apparatus, a machine tool, a robot or the like, 5b is a detector that detects a motor position, and 5c is a nonlinear that performs nonlinear disturbance compensation when determining a torque command u. A disturbance compensation calculation unit. Since the configuration having the same name as that of the conventional technique basically has the same function, a detailed description that will not be described below is given to the conventional technique.

Position control unit 52 inputs the position command x _d and the motor position detection signal x of the motor 59, the speed command determined as motor position detection signal x coincides with the position command x _d, velocity feedforward compensator 53 create a speed feed forward signal v _f a position command x _d at the inner multiplied by the speed feed forward gain α to the time differential value, adds the speed feedforward signal v _f and the output of the position control section by the adder 53 Then, a speed command v _d is created and output to the speed control unit 55.

（外字１）が一致するようにトルク指令ｕを決定し、このトルク指令ｕとモータ位置から算出された非線形外乱補償値を加算器５７で加えて新たにトルク指令ｕを算出して、電流制御部５８へ出力する。電流制御部５８は補正されたトルク指令ｕを入力し、トルク指令を電流指令に換算し、モータ５９の発生する電流が前記電流指令に一致するようにＰＷＭ等で電流制御演算を行い、モータ５９を駆動する。 Speed control unit 55 inputs the speed signal of the speed command v _d and the motor, the motor speed signal to the speed command v _d

The torque command u is determined so that (external character 1) matches, and the torque command u and the nonlinear disturbance compensation value calculated from the motor position are added by the adder 57 to newly calculate the torque command u, and current control is performed. To the unit 58. The current control unit 58 receives the corrected torque command u, converts the torque command into a current command, performs a current control calculation by PWM or the like so that the current generated by the motor 59 matches the current command, and the motor 59 Drive.

（外字１）を算出する。非線形外乱補償演算部５ｃはトルク指令ｕとモータ位置を入力し、制御対象の負荷イナーシャや粘性摩擦力などの変化を補償する非線形外乱補償トルクＴ_ｃを算出する。 A load 5a is connected to the motor 59, and the load 5a is also driven by driving the motor. The detector 5b is attached to the motor 59, and outputs a motor position that is a rotation angle of the motor. The speed signal generation unit 56 detects a motor speed detection signal from the motor position detection signal x detected from the motor position.

(External character 1) is calculated. The nonlinear disturbance compensation calculation unit 5c receives the torque command u and the motor position, and calculates a nonlinear disturbance compensation torque _Tc that compensates for changes in the load inertia and viscous friction force to be controlled.

  The above description is made assuming a rotary motor. However, in the case of a linear motor, a motor position control device can be realized with the same configuration by replacing a torque command with a thrust command and a rotation angle with a linear scale position. .

  The motor position control device according to the first embodiment of the present invention is characterized in that, in the motor position control device in which the position control unit 52 and the speed control unit 55 shown in FIG. Even if the load inertia or viscous frictional force changes, the positioning characteristics and the trajectory tracking characteristics do not change, and a non-linear disturbance compensation function that can ensure stability is provided. Furthermore, it can be switched continuously or freely in response to control of linear control from one of PI control and IP control to the other, or a combination of both. is there.

  Hereinafter, a specific method for realizing this control will be described. When the state equation (function) of the system to be controlled is expressed by inertia J, viscous friction coefficient D, and disturbance F, the relationship between the torque command u and the motor position detection signal x is linear as shown in (Equation 14). Expressed as a function.

（外字２）であり、ｘの１ドットはｘの１階時間微分値

（外字１）であり、それぞれ加速度、速度を意味する。 Here, 2 dots of x are second-order time differential values of x

(External character 2), 1 dot of x is the first-order time differential value of x

(External character 1), which means acceleration and speed, respectively.

（外字２）を（数１７）のように求め、これを（数１４）に代入して整理すると、（数１８）を得ることができる。これを変形すると（数１９）となり、新たに（数２０）で表わされる信号ｒ_１を導入し、（数２０）を時間微分して両辺に慣性モーメントＪを乗じて整理し、（数２１）を得る。このｒ_１が実施の形態１における切換関数となる。 On the other hand, in FIG. 8, the position error e ₁ and the speed error e ₂ are expressed as (Equation 15) and (Equation 16). Here, (Equation 16) is modified to differentiate both sides, and the second-order time differential value of x

If (External character 2) is obtained as in (Equation 17), and this is substituted into (Equation 14) and arranged, (Equation 18) can be obtained. When this is transformed, (Equation 19) is obtained, a signal r ₁ represented by (Equation 20) is newly introduced, (Equation 20) is time-differentiated, and both sides are multiplied by the inertia moment J and rearranged, (Equation 21) Get. This r ₁ is the switching function in the first embodiment.

そこで、さらに（数２２）とおくと、（数２３）が得られる。ここで、トルク指令ｕが、後で与えられる非線形補償トルクＴ_ｃを用いて、下記（数２４）で与えられるとする。この（数２４）を（数２３）代入すれば、（数２５）が得られる。

Therefore, when (Expression 22) is further set, (Expression 23) is obtained. Here, it is assumed that the torque command u is given by the following (Equation 24) using the nonlinear compensation torque _Tc given later. Substituting (Equation 24) into (Equation 23) yields (Equation 25).

ここで、以下の（数２６）で示す正定関数を導入し、正定関数Ｖの微分値

（外字３；Ｖの１階微分値でありＶの１ドット）がゼロ以下であれば（数２５）が安定になるというリアプノフ条件を求めると、（数２７）がゼロ以下になるためには、（数２８）でなければならない。

Here, the positive definite function shown by the following (Equation 26) is introduced, and the differential value of the positive definite function V

If the Lyapunov condition that (Equation 25) is stable if (External character 3; first-order differential value of V and 1 dot of V) is less than or equal to (Equation 25), , (Equation 28).

ここで、予め変動する負荷イナーシャＪ、粘性摩擦係数Ｄ、外乱Ｆの最大値Ｊ_ｍａｘ、Ｄ_ｍａｘ、Ｆ_ｍａｘを与え、（数２４）のＴ_ｃを（数２９）と与えればＶの１階微分値

（外字３）≦０となる。なお、実施の形態１におけるＪ_ｍａｘ、Ｄ_ｍａｘ、Ｆ_ｍａｘをパラメータとして制御対象形式に記述された関数とは、（数１４）で表わされる状態方程式においてこれら係数（パラメータ）を備えた線形形式を保って記述された関数のことである。なお、｜ ｜は絶対値を示す。

Here, if the load inertia J, the viscous friction coefficient D, and the maximum value J _max , D _max , F _max of the disturbance F are given in advance, and the T _c of (Equation 24) is given by (Equation 29), the first floor of V Differential value

(External character 3) ≦ 0. It should be noted that the function described in the control target format using J _max , D _max , and F _max as parameters in Embodiment 1 is a linear format including these coefficients (parameters) in the state equation expressed by (Equation 14). It is a function written in a preserved manner. || represents an absolute value.

However, since the second term on the right side is a sign function of r ₁ , chattering often occurs and becomes vibrational in many cases. Therefore, instead of the sign function as (number 30), a function for performing chattering suppression process in the switching function _{r 1 1 / (δ + |} r 1 |) (| r 1 | δ +) r 1 / multiplied by To prevent chattering.

ここで、δ≧０はチャタリング防止定数、ｃは非線形外乱補償の有無を切り換える切換定数である。ｃ＝０を選択すれば既存の線形制御となる。以上の演算によって図２に示す制御ブロック図が得られる。

Here, δ ≧ 0 is a chattering prevention constant, and c is a switching constant for switching the presence / absence of nonlinear disturbance compensation. If c = 0 is selected, the existing linear control is performed. The control block diagram shown in FIG. 2 is obtained by the above calculation.

（外字１）の偏差を求める減算器である。また、６７はＰ制御のほかに速度ループ積分ゲインＫ_ｉで積分を行うＰＩ制御の比例積分器、６８は加算器６５の信号にフィードフォワードゲインβ（β≧０）を乗算する乗算器であり、６９は加減算器であって、比例積分器６７からの出力とモータ速度検出信号

（外字１）との偏差に追加的に加算するものである。６ａは速度ループゲインＫ_ｖの出力を行う乗算器、６ｂは（数３０）の右辺第２項に示す非線形外乱補償としての記述関数、６ｃは加算器である。 A control block diagram of the motor position control device of FIG. 2 will be described. 2, 61 a subtractor for outputting a difference e ₁ position command x _d and the motor position detection signal x, 62 is a multiplier for multiplying the position loop gain K _p, 63 is composed of the Laplace operator s A differentiator 64 that performs time differentiation is a multiplier that multiplies the output from the differentiator 63 by a speed feedforward gain α (α ≧ 0). In the case of digital control, the differentiator 63 becomes a differentiator. 65 is an adder for adding the output from the speed feedforward compensator 53 and the output from the multiplier 62, and 66 is a signal added by the adder 25 and a motor speed detection signal.

This is a subtractor for obtaining a deviation of (external character 1). Further, 67 is proportional integrator PI control for integration at a speed loop integral gain K _i in addition to the P control, 68 is a multiplier for multiplying the feed forward gain β (β ≧ 0) to a signal of the adder 65 69 and 69 are adders / subtracters, which output from the proportional integrator 67 and a motor speed detection signal.

This is additionally added to the deviation from (external character 1). 6a is a multiplier for outputting a speed loop gain K _v, 6b are describing function, 6c adder as a nonlinear disturbance compensation shown in the second term of the right side of equation (30).

（外字４）と表現が異なるだけの同一信号である。また、ｅｒｒｏｒはテーブル位置誤差であり、目標指令ｄ_Ｘ_ｄを時間積分した値からテーブル位置を減じた値である。なお、目標指令ｄ_Ｘ_ｄは、最高速度０．４ｍ／ｓに達するまでの加速度が１Ｇ→１．５Ｇ→２Ｇ→３Ｇ（なお、Ｇは重力加速度）と変化する指令としている。 Next, an experimental result in the case where the motor position control device of the first embodiment is used for the fully closed position control system when the uniaxial slider is attached to the motor 19 will be described. FIG. 3 shows the positioning experiment result of the motor position control apparatus in the first embodiment, and shows the positioning response when the speed feed forward gain is 0.59. The chattering prevention constant δ is set to 5. In FIG. 3, d_X _d is an increment value for each position command sampling period, and is described in (Equation 16) and the like.

It is the same signal that is different in expression from (external character 4). Further, error is a table position error, which is a value obtained by subtracting the table position from a value obtained by integrating the target command d_X _d with time. The target command d_X _d is a command in which the acceleration until reaching the maximum speed of 0.4 m / s changes from 1G → 1.5G → 2G → 3G (where G is gravitational acceleration).

  On the other hand, FIGS. 11 and 12 show the experimental results when the conventional first motor position control device is used, and the positioning response when the speed feedforward gain is 0.59 and 0.60. Yes, this corresponds to the positioning response of the motor position control device in the first embodiment shown in FIG. As apparent from FIGS. 3, 11, and 12, when the conventional first motor position control device is used, windup and overshoot appear as a result of changes in acceleration / deceleration in both FIGS. As a result, the positioning time becomes longer.

  However, the response of the motor position control device using the first embodiment can realize a high-speed and high-accuracy positioning response without winding up or overshooting even when the acceleration / deceleration changes as shown in FIG. Thus, it can be seen that the response characteristics are remarkably improved in the motor position control device of the first embodiment.

As described above, in the motor position control device of the first embodiment, even when the load inertia or viscous frictional force to be controlled changes, the nonlinear disturbance compensation calculation unit compensates for such changes. Since the non-linear disturbance compensation calculation is performed using the existing position control method so that the motor position detection signal matches the position command , not only can the high-speed and high-accuracy response be realized, but also the driving conditions and A motor position control device having high stability that is not affected by changes in the operating environment can be realized. In addition, the product of the function described in the control target format using the load inertia maximum value, viscous friction coefficient maximum value, and disturbance maximum value and the switching function is used as the description function. Control that makes use of the contents and ease of understanding can be performed without complicated calculations. Further, simply by adding one signal for nonlinear disturbance compensation of the existing linear control technology, it is not necessary to change the control method and control parameters of the conventional basic, whether to perform a non-linear disturbance compensation, chattering By changing the size of the parameter (chattering prevention constant δ) to be suppressed, it is possible to easily switch while suppressing chattering, so that the motor position control device is very easy to use. That is, when the chattering prevention constant δ is increased, the nonlinear disturbance compensation term is decreased, and as a result, nonlinear disturbance compensation is not performed (effect is weak). As the chattering prevention constant δ increases, the chattering also decreases. By changing the switching constant β (β ≧ 0), one of speed feedforward, PI control (β = 0) and IP control (β = 1) or the combination of both (β = β) The nonlinear disturbance compensation can be continuously switched while maintaining the characteristics of the existing position control calculation including the characteristic that the control can be performed.

(Embodiment 2)
A motor position control apparatus according to Embodiment 2 of the present invention will be described with reference to FIGS. 4, 5, 6, and 13. Since the function of each component for control in the motor position control device of the second embodiment is substantially the same as that of the motor position control device of the first embodiment, detailed description thereof is omitted. 4 is a block diagram of the motor position control device according to the second embodiment of the present invention, FIG. 5 is a control block diagram of the motor position control device according to the second embodiment of the present invention, and FIG. 6 is a second embodiment of the present invention. FIG. 13 is an explanatory diagram of the first positioning experiment result in the third conventional motor position control device.

  FIG. 4 is a control block diagram when applied to a drive device in which a load is applied to the motor. In FIG. 4, 71 is a command generation unit, 72 is a position control unit, 73 is an adder, 74 is a current control unit, 75 is a motor, 76 is a load that is a mechanical unit such as a semiconductor manufacturing apparatus, a machine tool, and a robot, 77 Is a detector for detecting the motor position, and 78 is a non-linear disturbance compensation calculation unit that performs non-linear disturbance compensation when the torque command u is determined. The content of nonlinear disturbance compensation will be described later.

Position control unit 72 inputs the position command x _d and the motor position detection signal x of the motor 75, the torque command r determined as motor position detection signal x coincides with the position command xd, torque command r and the motor position The non-linear disturbance compensation value calculated from the detection signal x is added by the adder 73 to newly calculate the torque command u and output to the current control unit 74. The current control unit 74 inputs the torque command u, converts the torque command into a current command, performs current control calculation by PWM or the like so that the current generated by the motor 19 matches the current command, and drives the motor 75. To do.

  A load 76 is connected to the motor 75, and the load 76 is also driven by driving the motor 75. The detector 77 is mounted on the motor 75 and outputs a motor position detection signal x that is the rotation angle of the motor. The nonlinear disturbance compensation calculation unit 78 receives the torque command u and the motor position detection signal x, and calculates a nonlinear disturbance compensation torque that compensates for changes in the load inertia and viscous friction force to be controlled.

And in the motor position control apparatus in Embodiment 2, torque command u is determined by the control block diagram shown in FIG. In FIG. 5, 81 is a subtractor for outputting a deviation e ₁ between the position command x _d and the motor position detection signal x, 82 is a multiplier having a proportional gain λ ₁ and outputting in proportion to the deviation e ₁ , Reference numeral 83 denotes an integral multiplier that integrates the deviation e ₁ with an integral gain λ ₂ , 84 denotes a differentiator composed of a Laplace operator s, 85 denotes an adder, and 86 denotes a multiplier that multiplies a proportionality constant k. Reference numeral 87 is a description function as nonlinear disturbance compensation, and 88 is an adder.

  The above description has been made assuming a rotary motor. However, in the case of a linear motor, a motor position control device can be realized with the same configuration by replacing a torque command with a thrust command and a rotation angle with a linear scale position.

  The feature of the second embodiment is that the position control unit that performs the PID control shown in FIG. 9 outputs a torque command. Even when the load inertia or the viscous frictional force to be controlled changes, the positioning characteristics and locus The tracking characteristic does not change and a nonlinear disturbance compensation function that can secure stability is provided.

Hereinafter, a specific implementation method will be described. When the control target is expressed by inertia J, viscous friction coefficient D, and disturbance F, the relationship between the torque command u and the motor position detection signal x is expressed by the same equation (14) as described in the first embodiment. Is done. On the other hand, in the control block diagram of the present invention shown in FIG. 9, the position error e ₁ is expressed by the same (Equation 15) as described in the first embodiment. Here, when both sides of (Equation 15) are second-order differentiated and substituted into (Equation 14) and rearranged, (Equation 31) is obtained.

Here, when a new signal r ₂ represented by (Equation 33) is introduced, both sides of (Equation 33) are time-differentiated and multiplied by the moment of inertia J, (Equation 34) is obtained. This r ₂ is the switching function in the second embodiment.

さらに、（数３５）とおくと、（数３６）が得られる。

Further, when (Equation 35) is set, (Equation 36) is obtained.

ここで、トルク指令ｕが、後で与えられる非線形補償トルクＴ_ｃを用いて、（数３７）で与えられるとし、（数３７）を（数３６）代入すると（数３８）が得られる。

Here, assuming that the torque command u is given by (Equation 37) using the nonlinear compensation torque T _c given later, (Equation 37) is substituted into (Equation 36), and (Equation 38) is obtained.

ここで、以下の正定関数を導入し、正定関数の微分値がゼロ以下であれば（数３８）が安定になるというリアプノフ条件を求めると、（数４０）がゼロ以下になるためには、（数４１）でなければならない。

Here, when the following positive definite function is introduced and the Lyapunov condition that (Equation 38) is stable if the differential value of the positive definite function is less than or equal to zero, (Equation 40) is less than or equal to zero, It must be (Equation 41).

ここで、予め変動するＪ、Ｄ、Ｆの最大値Ｊ_ｍａｘ、Ｄ_ｍａｘ、Ｆ_ｍａｘを与え、（数３７）のＴ_ｃを（数４２）と与えればＶの微分値

（外字３）≦０となる。なお、実施の形態２におけるＪ_ｍａｘ、Ｄ_ｍａｘ、Ｆ_ｍａｘをパラメータとして制御対象形式に記述された関数とは、（数１４）で表わされる状態方程式において物理的意味を有するこれら係数を備えた線形形式を保って記述された関数のことである。｜ ｜は絶対値を示す。

Here, if the maximum values J _max , D _max , and F _max of J, D, and F that vary in advance are given and T _c in (Equation 37) is given as (Equation 42), the differential value of V

(External character 3) ≦ 0. Note that the function described in the control target format using J _max , D _max , and F _max as parameters in Embodiment 2 is a linear function including these coefficients having physical meanings in the state equation represented by (Equation 14). A function written in a preserving form. || indicates an absolute value.

しかし、右辺第２項は、ｒ_２の符号関数になっているため、チャタリングが起きて振動的になる場合が多い。そこで、（数４３）のように符号関数に代えて、切換関数ｒ_２にチャタリング抑止処理を行うための関数１／（δ＋｜ｒ_２｜）を掛けたｒ_２／（δ＋｜ｒ_２｜）に置換することでチャタリングを防止できる。ここで、δ≧０はチャタリング防止定数、ｃは非線形外乱補償の有無を切り換える切り換え定数である。

However, since the second term on the right side is a sign function of r ₂ , chattering often occurs and it becomes oscillatory. Therefore, instead of the sign function as (number 43), the switching function functions for chattering suppression process on _{r 2 1 / (δ + |} r 2 |) multiplied by _{r 2 / (δ + | r} 2 |) Replacing with can prevent chattering. Here, δ ≧ 0 is a chattering prevention constant, and c is a switching constant for switching the presence / absence of nonlinear disturbance compensation.

次に、モータ７５に一軸スライダを取り付けた場合の位置制御システムに実施の形態２を利用した実験結果を説明する。図６は実施の形態２におけるモータ位置制御装置の位置決め実験結果を示す。図６中、ｄ_Ｘ_ｄは位置指令サンプリング周期ごとの増分値であり、またｅｒｒｏｒはテーブル位置誤差であって、目標指令ｄ_Ｘ_ｄを時間積分した値からテーブル位置を減じた値である。チャタリング防止定数のδは５を採用している。なお、目標指令ｄ_Ｘ_ｄは、目標指令ｄ_Ｘ_ｄは（数３５）などで説明した

（外字４）と表現が異なるだけの同一信号である。最高速度０．４ｍ／ｓに達するまでの加速度が１Ｇ→１．５Ｇ→２Ｇ→３Ｇ（なお、Ｇは重力加速度）と変化する指令としている。

Next, experimental results using the second embodiment in the position control system when the uniaxial slider is attached to the motor 75 will be described. FIG. 6 shows a positioning experiment result of the motor position control apparatus in the second embodiment. In FIG. 6, d_X _d is an increment value for each position command sampling period, and error is a table position error, which is a value obtained by subtracting the table position from the value obtained by time integration of the target command d_X _d . The chattering prevention constant δ is set to 5. Note that the target command d_X _d is the target command d_X _d described in (Equation 35).

It is the same signal that is different in expression from (external character 4). The acceleration is a command that changes from 1G → 1.5G → 2G → 3G (G is gravitational acceleration) until the maximum speed reaches 0.4 m / s.

  On the other hand, FIG. 13 shows the experimental result of the positioning response when the conventional third motor position control device is used, and corresponds to the positioning response of the motor position control device in the second embodiment shown in FIG. Is. As apparent from FIGS. 13 and 6, when the second embodiment is used, the windup and overshoot are greatly reduced as compared with the case where the conventional third motor position control device is used. In particular, the maximum position deviation was 495 μm in the conventional method 2 but decreased to 109 μm in the second embodiment. From the above results, it can be seen that the second embodiment is effective.

As described above, the motor position control apparatus according to the second embodiment compensates for changes in the load inertia and viscous friction force to be controlled by the nonlinear disturbance compensation calculation unit. In addition to realizing a high-speed and high-accuracy response, it is possible to realize a motor position control device having high stability that is not affected by changes in driving conditions or operating environment. In addition, the product of the function described in the control target format using the load inertia maximum value, viscous friction coefficient maximum value, and disturbance maximum value and the switching function is used as the description function. Control that makes use of the contents and ease of understanding can be performed without complicated calculations. Furthermore, by simply adding a single signal for nonlinear disturbance compensation to the existing linear control technology, there is no need to change the conventional basic control method and control parameters, and whether to perform nonlinear disturbance compensation can be switched easily. Therefore, the motor position control device is very easy to use. Non-linear disturbance compensation calculation is performed using the PID control calculation formula as a switching function , and chattering can be reliably suppressed by a simple calculation only by changing the size of one parameter .

  INDUSTRIAL APPLICABILITY The present invention can be used as a motor position control device that drives a semiconductor manufacturing device, an inspection device, a machine tool, and an industrial robot at high speed and high accuracy.

Configuration diagram of motor position control device in Embodiment 1 of the present invention Control block diagram of motor position control device in Embodiment 1 of the present invention Explanatory drawing of the positioning experiment result of the motor position control apparatus in Embodiment 1 of this invention Configuration diagram of motor position control device in Embodiment 2 of the present invention Control block diagram of motor position control device in embodiment 2 of the present invention Explanatory drawing of the positioning experiment result of the motor position control apparatus in Embodiment 2 of this invention Configuration diagram of conventional first motor position control device Control block diagram of a conventional first motor position control device Configuration diagram of conventional third motor position control device Control block diagram of conventional third motor position control device Explanatory drawing of the 1st positioning experiment result in the conventional 1st motor position control apparatus. Explanatory drawing of the 2nd positioning experiment result in the conventional 1st motor position control apparatus. Explanatory drawing of the 1st positioning experiment result in the conventional 3rd motor position control apparatus

DESCRIPTION OF SYMBOLS 11 Command generation part 12 Position control part 13 Speed feedforward part 14 Adder 15 Speed control part 16 Current control part 17 Motor 18 Load 19 Detector 20 Speed signal preparation part 21 Subtractor 22 Multiplier 23 Differentiator 24 Multiplier 25 Addition 26 Subtractor 27 Proportional integrator 28 Subtractor 29 Multiplier 31 Command generator 32 Position controller 33 Current controller 34 Motor 35 Load 36 Detector 41 Subtractor 42 Multiplier 43 Integrating multiplier 44 Differentiator 45 Adder 46 Multiplier 51 Command generation unit 52 Position control unit 53 Speed feedforward unit 54 Adder 55 Speed control unit 56 Speed signal generation unit 57 Adder 58 Current control unit 59 Motor 5a Load 5b Detector 5c Nonlinear disturbance compensation calculation unit 61 Subtractor 62 Multiplier 63 Differentiator 64 Multiplier 65 Adder 66 Subtractor 67 proportional integrator 68 multiplier 69 adder / subtractor 6a multiplier 6b description function 6c adder 71 command generator 72 position controller 73 adder 74 current controller 75 motor 76 load 77 detector 78 nonlinear disturbance compensation calculator 81 subtractor 82 Multiplier 83 Integral Multiplier 84 Differentiator 85 Adder 86 Multiplier 87 Description Function 88 Adder

Claims (2)

A motor position control device for position control so that the position detection signal x of the motor coincides with the position command x _d as a target to output the current to the motor to determine a torque command u, outputs the position command x _d a position command generating unit which, a position control unit that the position command x _d and the motor position detection signal x enter the motor position detection signal x is output a velocity command v _d to match the position command x _d, integrating the velocity feed forward unit to update the speed command v _d in addition to the speed command v _d is multiplied by a predetermined value α to the position command x _d to the time derivative signal, a proportional integral control provided in parallel perform at least one of control of proportional control, enter a speed control section for determining a torque command u as the motor speed detection signal to the speed command v _d that has been updated to match the torque command u wherein A current control unit that outputs a current to the motor, a detector that detects the position of the motor, a speed generation unit that outputs the motor speed detection signal from the position of the motor, and a nonlinear when determining the torque command u A non-linear disturbance compensation calculation unit that performs disturbance compensation is provided , and at the time of non-linear disturbance compensation , the non-linear disturbance compensation calculation unit calculates (Equation 2), (Equation 3), (Equation 4), and (Equation 5), and also performs load inertia. The function described in the control target format with the maximum value J _max , the viscous friction coefficient maximum value D _max and the disturbance maximum value F _max as parameters, and the switching function r ₁ represented by ( Equation 3) were subjected to chattering suppression processing. A motor position control device characterized by taking a product with a function and outputting a nonlinear compensation torque having this as a description function, and the torque command u is given by (Equation 1) and nonlinear disturbance compensation is performed. .

Here, K _p is a position loop gain, K _v is a speed loop gain, K _i is a speed loop integral gain, α (α ≧ 0) is a speed feedforward gain, and β (β ≧ 0) is PI control in the speed control unit. Is a switching constant for switching between non-linear disturbance compensation, s is a Laplace operator, and || is an absolute value. 2. The motor position control device according to claim 1, wherein the position of the motor is controlled so that the position of the motor coincides with a target position command _xd by determining a torque command u and outputting a current to the motor.
The speed command by multiplying the position control unit for outputting a speed command v _d to the motor position detection signal x coincides with the position command x _d, the predetermined value α to the position command x _d to the time derivative signal v perform a speed feedforward section for updating the the speed command v _d in addition to _d, at least one of the control of the integration proportional control and proportional-integral control provided in parallel, the motor speed to the speed command v _d that has been updated A speed control unit that determines the torque command u so that the detection signals match, and a speed creation unit that outputs the motor speed detection signal from the position of the motor,
The nonlinear disturbance compensation calculation unit calculates (Equation 2), (Equation 3), (Equation 4), and (Equation 5), as well as the load inertia maximum value J _max , the viscous friction coefficient maximum value D _max, and the disturbance maximum value. Nonlinear compensation torque using the product of the function described in the control target format with F _max as a parameter and the function obtained by subjecting the switching function r ₁ represented by (Equation 3) to the chattering suppression process and using this as the description function And the torque command u is given by (Equation 1) and compensated for non-linear disturbance,
A position control unit that determines a torque command u so that the motor position detection signal x matches the position command _xd ;
The non-linear disturbance compensation calculation unit calculates (Equation 4), (Equation 7), and (Equation 8), and uses the load inertia maximum value J _max , the viscous friction coefficient maximum value D _max, and the disturbance maximum value F _max as parameters. A function described in the control target format, and a function obtained by performing chattering suppression processing on the switching function r ₂ represented by ( Equation 8) that is a function only of the difference between the motor position detection signal x and the position command _xd. A motor position control device characterized in that a nonlinear compensation torque having this function as a description function is output and the torque command u is given by (Equation 6) and nonlinear disturbance compensation is performed.

Here, k is a proportional constant, c is a switching constant for switching on / off the nonlinear disturbance compensation, λ ₁ is a proportional gain, λ ₂ is an integral gain, δ is a chattering prevention constant, s is a Laplace operator, and || is an absolute value.

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