JP4848380B2 - Parts transfer device - Google Patents

Description

  The present invention relates to a linear motor that moves a movable part linearly with respect to a base plate, and a component transfer apparatus using the linear motor.

  The applications of linear motors are increasing year by year, mainly in parts transfer equipment for handling parts such as electronic parts, manufacturing equipment for manufacturing semiconductor devices, liquid crystal display devices, and the like. The linear motor has a primary side element in which a plurality of coils are arranged in a magnetic core, and a secondary side element in which a plurality of permanent magnets are arranged in a yoke formed of a ferromagnetic material. Permanent magnets are spaced apart while facing the coil. Then, by moving the magnetic field of the magnetic pole core by controlling the drive current applied to the coil, the primary side element (or the secondary side element) is relative to the secondary side element (or the primary side element). Moving.

  In a linear motor constructed in this way, it is desirable to set the gap between the magnetic pole side surface and the magnet side surface, the so-called air gap, as small as possible. May end up. Therefore, in order to prevent this, a technique for protecting a permanent magnet by covering it with a resin magnet case or magnet cover has been proposed (see, for example, Patent Document 1).

Japanese Patent Laid-Open No. 2002-119093 (FIGS. 1 and 2)

  By the way, the main purpose of installing the magnet cover is not only to protect the surface of the permanent magnet, but also to protect the armature pole surface by being buried in the resin when a foreign object enters the air gap. There is also. However, the following problems may occur due to heat generated during driving of the linear motor. That is, in a linear motor, heat is generated on the armature side by applying a drive current to the coil of the armature, and radiant heat from the magnetic pole side surface is radiated to the permanent magnet side. As described above, various heat is applied to the magnet cover for protecting the permanent magnet, and the resin constituting the magnet cover may be deteriorated and hardened during long-term use of the linear motor. As a result, when a foreign object enters the air gap, the magnet cover cannot be flexibly deformed according to the foreign object, and it may be difficult to bury the foreign object. Further, due to the deterioration of the resin material, part or all of the magnet cover may fall off and the permanent magnet may be exposed. As a result, it has been difficult to stably use the linear motor for a long time.

The present invention has been made in view of the above-described problems, and uses a linear motor that drives a movable part by the interaction between a magnetic flux generated by a permanent magnet protected by a resin magnet cover and a magnetic flux generated by an armature . in component transfer apparatus, and purpose of driving the movable unit stably for a long period of time.

  Moreover, this invention makes it the 2nd objective to provide the components transfer apparatus using the said linear motor.

A component transfer device according to the present invention is a component transfer device that transfers a component from a component accommodating portion to a component mounting region. In order to achieve the above object, a base member and a vertical direction with respect to the base member The suction shaft is attached to the front end of the suction nozzle, and a negative shaft supplied to the suction nozzle through a negative pressure pipe connected to the rear end, and the nozzle shaft in the vertical direction A head unit having a vertical driving mechanism for driving, and a head driving means for moving the head unit between an upper position of the component housing portion and an upper position of the component mounting area. The vertical driving mechanism includes a base plate and a base plate. a movable portion which is movable in a predetermined direction of movement relative to, Yo which extends in the moving direction with respect to one end side of the movable portion in a width direction orthogonal to the moving direction A linear motor having an armature which extends in the moving direction relative to the base plate so as to face apart mover, and in the width direction from the movable element having a click, state armature arranged in the moving direction The linear motor is attached to the base member so that the moving direction is parallel to the up-down direction, and a plurality of permanent magnets fixed to the yoke at the yoke and a resin magnet cover provided so as to cover the plurality of permanent magnets. The movable part of the linear motor is connected to the nozzle shaft, and the movable part is formed of a through-hole formed in a surface located in the thickness direction orthogonal to the moving direction and the width direction, An internal space communicating with the hole, and the heat transferred from the mover through the one end side surface is dissipated by the heat dissipating part at a position away from the one end side surface. In the hole Air is stirred by moving a movable part having a plurality of cut ribs and provided with a through hole, and is heated by heat radiated from the heat radiating part during driving of the movable part in the moving direction. The air can be discarded to the outside of the movable part through the through hole and the internal space.

  In the invention configured as described above, a movable element is provided on one side surface of the movable portion, and a heat radiating portion is provided at a position spaced from the one side surface. For this reason, the radiant heat which generate | occur | produces with an armature and is given to a needle | mover is transmitted to a thermal radiation part via the one end part side surface of a movable part. The heat dissipating part is provided in the movable part, and the heat transmitted to the heat dissipating part via the one end side surface during the movement of the movable part is efficiently dissipated. For this reason, the heat storage to a magnet cover is suppressed and deterioration of a magnet cover is prevented effectively. In addition, since the yoke for holding the permanent magnet is provided on the side surface of the one end portion of the movable part, the yoke is not easily deformed. By holding the permanent magnet in the yoke, the magnetic pole side surface of the armature and the magnet side of the movable part Variations in surface spacing, so-called air gap, are suppressed. Therefore, the movable part can be driven with a propulsive force that is stable for a long period of time.

Moreover, in this invention, the thermal radiation efficiency in movement is improved by comprising a thermal radiation part as follows . That is , the heat radiating portion is configured by a plurality of ribs provided in a surface region different from the one end side surface in the surface region of the movable portion . According to this heat dissipation part, the heat dissipation area can be increased and the heat dissipation efficiency can be increased.

Moreover, the through-hole is provided as a heat radiating part in the surface area different from the one end side surface in the surface area of the movable part . When the through hole is provided in this way, the air is agitated in the vicinity of the opening of the through hole due to the movement of the movable portion, and the heat dissipation efficiency in the surface region near the through hole is increased. In addition, an internal space communicating with the thus configured through hole is formed in the movable portion, and the air heated by the heat radiated from the heat radiating portion during driving of the movable portion can be moved through the through hole and the internal space. It is configured to be disposable outside the department . By adopting such a configuration, instead of discarding the warmed air around the heat radiating portion, relatively cool air can flow into the periphery of the heat radiating portion to further increase the heat radiation efficiency. In addition, a plurality of ribs are provided in the through hole to further improve the heat dissipation efficiency .

Further, in the component transfer apparatus configured as described above, the movable portion of the linear motor is connected to the nozzle shaft, and the movable portion is driven to drive the nozzle shaft in the vertical direction. Since it is configured to drive the nozzle shaft using a linear motor that can stably drive the movable part for a long period of time in this way, component transfer by the suction nozzle attached to the tip of the nozzle shaft is stable. The reliability of the apparatus can be improved.

  The present invention relates to a linear motor that linearly moves a movable portion with respect to a base plate, and a component transfer apparatus using the linear motor. In the following, the linear motor according to the present invention and the linear motor according to the present invention will be described. This will be described in detail separately for the surface mounter which is an embodiment of the used component transfer apparatus.

<Linear motor>
FIG. 1 is a perspective view showing a first embodiment of a linear motor according to the present invention. FIG. 2 is a cross-sectional view of the linear motor of FIG. FIG. 3 is an exploded perspective view of the linear motor of FIG. In these drawings and the drawings to be described later, XYZ rectangular coordinate axes are shown in order to clarify the directional relationship between the drawings. Of these three directions X, Y, and Z, the Z direction corresponds to the “movement direction” of the present invention, the Y direction corresponds to the “width direction” of the present invention, and the X direction corresponds to the “movement direction” and the “width direction”. Corresponds to the “thickness direction” orthogonal to both directions.

  This single-axis linear motor LM has a thin tray-like base plate 1 extending in a predetermined movement direction Z. In this base plate 1, as shown in FIG. 3, the inner bottom surface is a base surface 1a, and the (+ Y) direction end, the (−Y) direction end, and the (+ Z) direction end of the base plate 1 Standing walls 1b to 1d are respectively erected in the thickness direction (+ X), and a recessed portion 1e that opens upward (+ X) is formed by the standing walls 1b to 1d and the base surface 1a. And the component of linear motor LM is accommodated in the said recessed part 1e so that it may mention later. In this embodiment, the base surface 1a and the standing walls 1b to 1d are integrally formed with an aluminum alloy or the like to form the nonmagnetic base plate 1, but the base surface 1a and the standing walls 1b to 1d are individually formed. In addition, the base plate 1 may be configured by assembling these components. Although the base plate 1 is made of a non-magnetic material in this way, it goes without saying that the base plate 1 may be made of a resin material. 1 and 2 denotes a spring engaging portion for attaching a return spring.

  Thus, in this embodiment, the (+ X) direction corresponds to the normal direction of the base surface 1a, and the space surrounded by the standing walls 1b to 1d extending in the normal direction (+ X) and the base surface 1a, That is, the internal space of the recess 1e is a storage space for storing each component of the linear motor. Moreover, in this embodiment, the standing wall is not formed in the (-Z) side edge part among the both ends of the base plate 1 of the moving direction Z, and the (-Z) side edge part becomes the open part 1j, and is a recessed part. The internal space (storage space) 1e communicates with the outside of the space. By providing the opening 1j in this manner, in this embodiment, the (−Z) side end of the movable base and a part of the block member which will be described later are disposed inside the recess 1e according to the drive of the movable base in the movement direction Z. It is configured to move in and out of space.

  On the base surface 1a, one linear guide 2 extends in the Z direction. That is, a linear rail 2a extending in the movement direction Z is fixed to the base plate 1, and two sliders 2b1, 2b2 are slidable in the movement direction Z along the rail 2a (restricted in the Y direction and the X direction). Has been attached). Further, two linear guide stoppers 2c1 and 2c2 can be attached to the base surface 1a of the base plate 1 in order to prevent the sliders 2b1 and 2b2 from falling off from the rail 2a.

  Further, a movable base 4 having a reverse concave shape or an H-shaped cross section is attached to the sliders 2b1 and 2b2, and is movable in the Z direction. More specifically, the movable base 4 has an internal space 4c (FIGS. 3 and 4) having a reverse concave shape in the XY section, and the ceiling surface of the internal space is located on the upper surfaces of the sliders 2b1 and 2b2. In this state, the movable base 4 is fixed to the sliders 2b1 and 2b2. In order to reduce the weight of the movable base 4, a plurality of through holes 4 a are formed on the ceiling surface of the movable base 4 in the present embodiment. As described above, in this embodiment, the movable base 4 and the sliders 2b1 and 2b2 are integrally movable in the movement direction Z, which corresponds to the “movable part” of the present invention. As described below, the mover is attached to the (−Y) side end side surface of the movable base 4, while the linear scale 7 b is attached to the (+ Y) side end side surface.

  Each through-hole 4a functions not only as a weight reduction of the movable base 4, but also as a "heat radiating part" of the present invention, and radiates heat generated when the movable base 4 is driven as will be described later. Moreover, each through-hole 4a is connected with the internal space 4c, and the air around the heat radiating part, which is radiated from the heat radiating part as described above, can be discarded outside the movable base 4 through the internal space 4c. It has become. These heat dissipation structures and operational effects will be described in detail later.

  FIG. 4 is a perspective view showing the mounting structure of the movable member and the movable element, and FIG. 5 is a diagram showing the mounting structure of the movable member and the movable element. As shown in these drawings, a yoke 5 made of a ferromagnetic material is attached to the (−Y) side end side surface of the movable base 4, and the N pole side faces the surface of the yoke 5. A plurality of permanent magnets 6 and 14 permanent magnets whose S poles face the surface are alternately arranged along the Z direction (14 in this embodiment). Thus, the mover of the linear motor LM is configured. Moreover, in this embodiment, the permanent magnet 6 is molded by the resin layer 10 to protect the surface, and the permanent magnet 6 can be effectively prevented from being damaged. Thus, in this embodiment, the resin layer 10 corresponds to the “magnet cover” of the present invention. Further, on the (−Y) side end side surface of the movable base 4, two female screw portions 4 b are formed on the (−Z) side of the mover (resin layer 10 + permanent magnet 6 + yoke 5). These female screw portions 4b are for attaching a driven object to the (−Y) side end portion of the movable base 4 directly or via a connecting portion. For example, in a surface mounter described later, a connecting portion is connected to the movable base 4 using a female screw portion 4b, and a nozzle shaft is connected to the connecting portion as a driven object. That is, the driven object can be attached to the movable base 4 via the coupling portion that is coupled to the end portion of the movable base 4 using the female screw portion 4b. This will be described in detail later in the section “Surface Mounter”.

  The armature 3 is disposed on the width direction (−Y) side of the mover (resin layer 10 + permanent magnet 6 + yoke 5) configured as described above, and is fixed to the base surface 1a of the base plate 1. The armature 3 includes a core 3a, a plurality of hollow bobbins 3b, and a coil 3c formed by winding an electric wire around the outer periphery of each bobbin 3b. The core 3a is formed by laminating a plurality of comb-shaped silicon steel plates having tooth portions provided in a (+ Y) direction at regular intervals from a rectangular plate portion extending in the Z direction in the X direction. In the core 3a configured as described above, a plurality of tooth portions are arranged in parallel in the Z direction at a constant interval to form a tooth portion row. A bobbin 3b around which a coil 3c is wound is attached to each tooth portion. Thus, a plurality of (9 in this embodiment) tooth portions of the core 3a and coils 3c wound around the tooth portions are provided at the same interval in the Z direction to constitute the armature 3, and the mover The resin layer 10 + the permanent magnet 6 + the yoke 5 are disposed to face each other. In this embodiment, as shown in FIG. 2B, the front end surface 8 of the tooth portion of the core 3a around which the coil 3c is wound and the permanent magnet 6 of the mover that is the opposing surface of the front end surface 8 are opposed to each other. The armature 3 is configured so that a common normal 8a with the surface 8 ′ is parallel to the YZ plane including the moving direction Z and the width direction Y. When a motor controller (not shown) energizes each coil 3c in a predetermined order, the mover (resin layer 10 + permanent) is caused by the interaction between the magnetic poles of the tip surface 8 and the opposing surface 8 'as described above. A thrust in the Z direction is generated in the magnet 6 + yoke 5) to drive the movable base 4 in the Z direction.

  In this embodiment, since the mover uses a permanent magnet and the stator uses a core 3a made of a magnetic material, there is a cogging force between the teeth of the core 3a and the mover permanent magnet. appear. “Generation of cogging force” means the pulsation of electromagnetic force acting on the armature 3 because the magnetic flux density of the permanent magnet 6 changes according to the position of the tooth portion of the core 3a and the magnetic energy changes accordingly. Is a phenomenon that occurs. Therefore, in order to reduce the cogging force, sub teeth 9 a and 9 b made of a magnetic material are provided at both ends of the tooth row of the armature 3. That is, the sub-tooth 9a is located at a desired position that matches or is different from the tooth pitch on the (+ Z) side of the tooth row, and the sub-tooth 9b is located at a desired position that matches or differs from the tooth row pitch on the (−Z) side. The base plate 1 is detachably provided on the base surface 1a so that the distance from the permanent magnet 6 is a desired distance.

  By the way, in the linear motor LM configured as described above, the plate portion connected to the core 3a extends to the vicinity of the sub teeth 9a and 9b, the armature core and the sub teeth are magnetically coupled, and the magnetic flux density distribution. Will be unevenly distributed. For this reason, there is a case where a stable cogging force reduction function cannot be exhibited only by arranging the sub teeth 9a and 9b at predetermined positions. In particular, during acceleration / deceleration, etc., or when the operating condition (constant moving speed after acceleration) itself changes, the amount of current flowing through the coil 3c changes from the assumed value, and the permanent magnets in the sub teeth 9a, 9b In some cases, the magnetic poles on the opposing surface or the strength thereof are not desired, and the effect of reducing the cogging force by the sub teeth 9a, 9b may not necessarily be obtained. Therefore, in the present embodiment, the magnetic material plate 11 is provided between the sub teeth 9a and 9b and the base plate 1 in order to supplement the effect of reducing the cogging force by the sub teeth 9a and 9b. More specifically, the configuration is as follows.

  FIG. 6 is a plan view showing the positional relationship between the sub teeth and the magnetic plate. In the figure, the magnetic plate 11 is hatched in order to clarify the relative position of the magnetic plate 11 with respect to the sub teeth 9a and 9b and the planar shape of the magnetic plate 11. On the base surface 1a of the base plate 1, a plate fitting portion 1g having substantially the same shape as the planar shape of the magnetic plate 11 is formed in the (−X) direction (see FIG. 2A). The magnetic plate 11 is fitted to the plate fitting portion 1g, and the surface of the magnetic plate 11 is flush with the base surface 1a. By the arrangement of the magnetic plate 11, the magnetic flux reaching the core 3a through the core 3a, the sub teeth 9a, the permanent magnet 6, the yoke 5, the adjacent permanent magnet 6 and the adjacent tooth portion on the YZ plane. In addition, a magnetic flux on the XY plane that reaches the sub teeth 9a through the sub teeth 9a, the permanent magnet 6, the yoke 5, and the magnetic material plate 11 is generated, and the cogging force is effectively reduced.

  As described above, the movable base 4 is driven in the movement direction Z by the interaction of the magnetic flux generated in the armature 3 with the mover (resin layer 10 + permanent magnet 6 + yoke 5), but the movable base 4 has a predetermined movement range. In order to prevent it from exceeding, two movement restricting stoppers 12 a and 12 b can be attached to the base surface 1 a of the base plate 1.

  Further, in order to accurately detect the position of the movable base 4, a detection unit 7 having a sensor 7a and a linear scale 7b is provided on the non-armature side of the movable base 4, that is, the (+ Y) side. The linear scale 7 b extends in the Z direction with respect to the (+ Y) side end side surface of the movable base 4. The sensor 7a is fixedly disposed on the base plate 1 on the (−Y) side of the linear scale 7b. For this reason, the region of the linear scale 7b facing the sensor 7a is displaced according to the movement of the movable base 4 in the Z direction, and the position of the movable base 4 in the movement direction Z can be accurately detected based on the displacement. It has become.

  The sensor 7a is integrally formed with the sensor control unit 7c, and this structure (sensor 7a + sensor control unit 7c) is formed in the recess 1e via a notch 1f formed in the standing wall 1b as shown in FIG. On the other hand, it is removable. That is, the structure is inserted into the base plate 1 through the notch 1f, and as shown in FIG. 2, the sensor 7a is arranged to face the linear scale 7b in the width direction Y, and the sensor control unit 7c is connected to the sensor 7a. It is fixed to the base plate 1 in a state of being arranged on the anti-linear scale side, that is, on the (+ Y) side. In particular, in this embodiment, as shown in FIG. 2C, a common normal line 7f between the surface 7e of the linear scale 7b and the sensing surface 7e 'of the sensor 7a opposite to the surface 7e has a movement direction Z and The mounting positions of the sensor 7a and the linear scale 7b are set so as to be parallel to the YZ plane including the width direction Y. In order to prevent foreign matters such as dust and dirt from entering the sensor control unit 7c, the sensor cover 7d is attached to the standing wall 1b of the base plate 1 so as to cover the sensor control unit 7c after the structure is attached.

  In this embodiment, the linear scale 7b is attached to the movable base 4, while the sensor 7a is disposed on the base plate 1. However, the sensor 7a and the linear scale 7b may be disposed in reverse. Moreover, you may comprise so that one of the components (sensor 7a, linear scale 7b) of the detection unit 7 may be attached to slider 2b1, 2b2 instead of attaching to the movable base 4. FIG. Further, the detection method of the detection unit 7 may be a magnetic method using magnetism or an optical method.

  Next, the heat dissipation structure provided in the movable base 4 and the operation and effect will be described with reference to FIGS. In the first embodiment, the mover (permanent magnet 6 + yoke 5) is attached to the one end side surface of the movable base 4, but the heat radiating portion 4d is provided at a position away from the one end side surface. More specifically, a through hole 4 a is formed in the ceiling surface of the movable base 4, and a through hole forming region separated from one side surface of the surface region of the movable base 4 functions as the heat radiating portion 4 d. That is, by providing the through hole 4a in this way, the air existing in the vicinity of the opening of the through hole 4a is agitated by the movement of the movable base 4, and the unit is formed in the surface region (through hole forming region) near the through hole 4a. The amount of heat dissipated per hour increases and the heat dissipation efficiency increases.

  Further, these through holes 4 a communicate with the internal space 4 c of the movable base 4. For this reason, air around the through hole 4a (around the heat dissipating part) heated by the heat radiated from the heat dissipating part 4d during driving of the movable base 4 is transferred to the outside of the movable base 4 through the through hole 4a and the internal space 4c. Discarded. In particular, in the first embodiment, the (−Z) side end portion of both end portions of the base plate 1 in the moving direction Z is the open portion 1j, and the warm air guided to the internal space 4c through the through hole 4a. Furthermore, it is discarded outside the linear motor LM through the opening 1j as the movable base 4 moves. Since such an air flow is generated, relatively cool air flows in place of the warmed air around the heat radiating portion 4d, so that the heat radiation efficiency can be further improved.

  As described above, according to the first embodiment, the heat generated in the permanent magnet 6 and the radiant heat generated in the armature 3 and applied to the mover (resin layer 10 + permanent magnet 6 + yoke 5) are the movable base 4. Is transmitted to the heat dissipating part 4d via the one end side surface. The heat thus transmitted to the heat radiating portion 4d is efficiently radiated while the movable base 4 is moving. As a result, heat storage in the resin layer 10 functioning as a magnet cover is suppressed, and deterioration of the resin layer 10 can be effectively prevented. In addition, since the yoke 5 that holds the permanent magnet 6 is attached to one side surface of the movable base 4, the yoke 5 is difficult to deform. And since the permanent magnet 6 is hold | maintained at the said yoke 5, the fluctuation | variation of the space | interval of the armature 3 magnetic pole side surface and the magnet side surface of a needle | mover, what is called an air gap, is suppressed. Therefore, the movable base 4 can be driven with a stable propulsion force for a long period.

  The linear motor according to the present invention is not limited to the above-described embodiment, and various modifications other than those described above can be made without departing from the gist thereof. For example, in the first embodiment, the heat radiating portion 4d is formed by the through hole 4a, but another heat radiating portion may be provided instead of or in addition to the heat radiating portion 4d. For example, in the linear motor LM according to the second embodiment of the present invention shown in FIG. 7A, a plurality of ribs 4e are integrated with the movable base 4 or separately from the ceiling surface of the movable base 4 in addition to the heat radiating portion 4d. A heat dissipating part 4f is provided. By providing the heat dissipating part 4f having such a large heat dissipating area, the heat transmitted through the one end side surface of the movable base 4 is efficiently dissipated and the heat accumulation in the resin layer 10 is suppressed.

  Here, it is desirable to set the height of the rib 4e in the X direction so as not to exceed the ceiling surface of the movable base 4 as shown in FIG. That is, it is desirable to form the recess 4g on the ceiling surface of the movable base 4 (finish the cross-sectional shape of the movable base 4 into a substantially H shape) and to form the rib 4e within the depth of the recess 4g. With this configuration, it is possible to prevent the rib 4e from protruding in the (+ X) direction from the ceiling surface of the movable base 4, and as described later, a plurality of linear motors LM are well stacked in the X direction. It becomes possible.

  Further, the arrangement position of the rib 4e is not limited to the concave portion 4g, and may be provided in the through hole 4a as shown in FIG. 5B, for example. In this case, (−X) of each rib 4e. The side end portion can be extended to the internal space 4c of the movable base 4 to increase the heat radiation area. Moreover, the air stirring in the through-hole 4a becomes active, and the heat radiation efficiency can be increased. Further, each rib 4e can efficiently guide the air warmed around the through hole 4a to the internal space 4c to promote disposal from the movable base 4.

  In the first embodiment, as shown in FIG. 2C, the normal line 7f of the facing surface 7e of the sensor 7a and the linear scale 7b is parallel to a plane including the moving direction Z and the width direction Y. Thus, although the detection unit 7 is provided, the structure of the detection unit 7 is not limited to this.

  In the above-described embodiment, the movable base 4 is driven by arranging the mover and the armature (stator) 3 only on the (−Y) side of the movable base 4, but the (+ Y) side of the movable base 4 is driven. Alternatively, a mover and an armature (stator) 3 may be disposed. With this configuration, the driving force for driving the movable base 4 can be further increased.

  Moreover, in the said embodiment, although comprised so that the linear motor LM may be operated with the (+ X) side of the base plate 1 opened, for example, a side plate is disposed on the (+ X) side of the linear motor LM, The internal space (housing space) of the recess 1e and the movable portions (sliders 2b1 and 2b2), the stator (armature 3) and the mover (permanent magnet 6 + yoke 5) inserted and arranged in the internal space are in the normal direction (+ X It may be attached to the tops of the standing walls 1b to 1d so as to cover from the side. The attachment of the side plate can effectively prevent foreign matter from entering from the outside of the motor, and can also prevent the linear motor and components other than the motor from interfering with each other.

  In the first and second embodiments, the yoke 5 is attached to the side surface in the width direction Y of the movable base 4 fixed to the sliders 2 b 1 and 2 b 2, and the permanent magnet 6 is attached to the yoke 5. However, the movable base 4 may be formed of a ferromagnetic material, and the permanent magnet 6 may be directly extended in the Z direction on the side surface of the movable base 4 in the width direction Y to form a magnetic circuit. In this case, the movable base 4 not only corresponds to the “movable part” of the present invention but also functions as a “yoke”.

  Each of the above embodiments is a so-called single-axis linear motor, but a multi-axis linear motor MLM may be configured by combining two single-axis linear motors LM1 and LM2 as shown in FIG.

  FIG. 8 is a perspective view showing an embodiment of a multi-axis linear motor according to the present invention. In this embodiment, two units having the same configuration as the single-axis linear motor according to the first embodiment are prepared, and (+ X) side end surfaces of the standing walls 1b to 1d of one linear motor LM1 are the other linear motor. The linear motors LM1 and LM2 are stacked in the X direction in contact with the back surface of the base plate 1 of the LM2 to form a multi-axis linear motor MLM. Further, three through holes 1p to 1r are formed in the base plate 1 of each of the linear motors LM1 and LM2. Then, a bolt 13p is inserted so as to pass through the through holes 1p of the linear motors LM1 and LM2, and a nut 14p is screwed to the tip of the bolt 13p. As for the other through holes 1q and 1r, the bolts 13q and 13r are inserted and the nuts are screwed together in the same manner as the through hole 1p. Further, two positioning pins 20 attached to each of the single-axis linear motors LM1 and LM2 are fitted to the (−X) side end portions of the through holes 21 (see FIG. 3) to achieve positioning. In this way, the linear motors LM1 and LM2 are fastened and fixed to each other at three locations and integrated to form a two-axis linear motor MLM.

  In the two-axis linear motor MLM configured as described above, the thin linear motors LM1 and LM2 according to the first embodiment are stacked in the X direction, and therefore the two-axis X-direction pitch is set narrow. Can do. Further, in each of the linear motors LM1, LM2, the thickness (length in the X direction) of all components such as the mover and the armature (stator) is less than that of the standing walls 1b to 1d of the base plate 1, and The main components of the linear motor (movable part, armature 3 and movable element) are housed in an internal space (housing space) of a recess 1e surrounded by a base surface 1a and standing walls 1b to 1d. For this reason, motor assembly can be easily performed while maintaining the relative positions of the two axes with high accuracy.

  Since the multi-axis linear motor MLM is configured by stacking a plurality of single-axis linear motors configured as described above in a stacking direction parallel to the normal direction (+ X) of the base surface 1a, The two movable parts can be independently driven in the moving direction without interfering with each other. Further, as a result of adopting this laminated structure, the internal space (housing space) of the recess 1e of the upstream single-axis linear motor LM1 located upstream in the stacking direction (+ X) is downstream of the upstream single-axis linear motor LM1. It is covered with the back surface of the base plate 1 of the adjacent downstream single-axis linear motor LM2, that is, the anti-base surface 1k. For this reason, it is possible to effectively prevent foreign matter from entering the upstream single-axis linear motor LM1. Here, a side plate (not shown) is disposed on the (+ X) side of the downstream single-axis linear motor LM2, and the inner space (housing space) of the recess 1e and the movable portion (slider 2b1, 2b2), the stator (armature 3) and the mover (permanent magnet 6 + yoke 5) may be attached to the tops of the standing walls 1b to 1d so as to cover from the normal direction (+ X) side. By attaching the side plate SP, it is possible to effectively prevent foreign matter from entering the downstream single-axis linear motor LM2.

  In the multi-axis linear motor MLM, two single-axis linear motors LM according to the first embodiment are combined, but the single-axis linear motor LM according to the second embodiment (FIGS. 7A and 7B). ) May be combined. Further, the single-axis linear motor LM according to the first embodiment (FIG. 1) and the single-axis linear motor LM according to the second embodiment (FIGS. 7A and 7B) are stacked in the stacking direction (+ X). A multi-axis linear motor may be configured.

  The number of single-axis linear motors to be combined is not limited to “2”, and a multi-axis linear motor MLM can be configured by combining three or more single-axis linear motors. For example, the surface mounting machine described below is equipped with a vertical drive mechanism that drives each suction nozzle in the vertical direction in order to transfer components using 10 suction nozzles. A multi-axis linear motor MLM combining LM1 to LM10 can be used as the vertical drive mechanism.

<Surface mounter>
FIG. 9 is a plan view showing a schematic configuration of a surface mounter as an embodiment of the component transfer apparatus according to the present invention. FIG. 10 is a front view and a side view of the head unit. Further, FIG. 11 is a block diagram showing an electrical configuration of the surface mounter shown in FIG. In these drawings and drawings to be described later, a three-dimensional coordinate system corresponding to the moving direction Z, the width direction Y, and the thickness direction X of the linear motor described above is adopted.

  In the surface mounter MT, the substrate transport mechanism 102 is disposed on the base 111 so that the substrate 103 can be transported in a predetermined transport direction X. More specifically, the substrate transport mechanism 102 has a pair of conveyors 121 and 121 that transport the substrate 103 from the right side to the left side of FIG. These conveyors 121 and 121 are controlled by a drive control unit 141 of a control unit 104 that controls the entire surface mounter MT. That is, the conveyors 121 and 121 operate according to a drive command from the drive control unit 141, and stop the board 103 that has been carried in at a predetermined mounting work position (the position of the board 103 shown in the figure). The substrate 103 thus transported is fixed and held by a holding device (not shown). An electronic component (not shown) supplied from the component storage unit 105 is transferred to the substrate 103 by a suction nozzle 161 mounted on the head unit 106. When the mounting process is completed for all components to be mounted on the substrate 103, the substrate transport mechanism 102 carries out the substrate 103 in accordance with a drive command from the drive control unit 141.

  On both sides of the substrate transport mechanism 102, the component storage portions 105 described above are arranged. These component storage units 105 include a number of tape feeders 151. Each tape feeder 151 is provided with a reel (not shown) around which a tape storing and holding electronic components is wound, so that the electronic components can be supplied. That is, each tape stores and holds small chip electronic components such as an integrated circuit (IC), a transistor, a resistor, and a capacitor at predetermined intervals. Then, the tape feeder 151 feeds the tape from the reel to the head unit 106 side, so that the electronic components in the tape are intermittently fed out. As a result, the electronic components can be picked up by the suction nozzle 161 of the head unit 106. .

  In this embodiment, in addition to the substrate transport mechanism 102, a head drive mechanism 107 is provided. The head drive mechanism 107 is a mechanism for moving the head unit 106 in the X direction and the Y axis direction (direction orthogonal to the X axis and Z direction) over a predetermined range of the base 111. Then, the electronic component sucked by the suction nozzle 161 by the movement of the head unit 106 is transported from the position above the component storage unit 105 to the position above the substrate 103. That is, the head drive mechanism 107 has a mounting head support member 171 extending in the X direction, and the mounting head support member 171 supports the head unit 106 so as to be movable along the X axis. Further, both ends of the mounting head support member 171 are supported by a fixed rail 172 in the Y-axis direction, and are movable along the fixed rail 172 in the Y-axis direction. Further, the head drive mechanism 107 includes an X-axis servo motor 173 that is a drive source for driving the head unit 106 in the X direction, and a Y-axis servo motor 174 that is a drive source for driving the head unit 106 in the Y-axis direction. Yes. The motor 173 is connected to the ball screw 175, and the head unit 106 is driven in the X direction via the ball screw 175 when the motor 173 operates according to an operation command from the drive control unit 141. On the other hand, the motor 174 is connected to the ball screw 176, and the mounting head support member 171 is driven in the Y-axis direction via the ball screw 176 by operating the motor 174 in accordance with an operation command from the drive control unit 141. Is done.

  The head drive mechanism 107 causes the head unit 106 to transport the electronic component to the substrate 103 while being sucked and held by the suction nozzle 161 and to transfer it to a predetermined position (component transfer operation). More specifically, the head unit 106 is configured as follows. In the head unit 106, ten mounting heads extending in the vertical direction Z are arranged in a row at equal intervals in the X direction (the conveyance direction of the substrate 103 by the substrate conveyance mechanism 102). A suction nozzle 161 is attached to each tip of the mounting head. That is, as shown in FIG. 10, each mounting head includes a nozzle shaft 163 extending in the Z direction. An air passage extending upward (Z direction) is formed in the axial center portion of the nozzle shaft 163. The suction nozzle 161 is connected to the lower end of the nozzle shaft 163 and communicates with the air passage. On the other hand, the upper end is open and connected to a vacuum suction source and a positive pressure source via a connecting portion 164, a connecting member 165, an air pipe 166, and a vacuum switching valve mechanism 167.

  Further, the head unit 106 is provided with a vertical drive mechanism 168 that moves the nozzle shaft 163 up and down in the vertical direction Z. The motor controller 142 of the drive control unit 141 controls the vertical drive mechanism 168 to move the nozzle shaft 163 up and down. The suction nozzle 161 is moved up and down in the direction Z, thereby moving the suction nozzle 161 in the up and down direction Z and positioning. In this embodiment, a multi-axis linear motor MLM in which ten single-axis linear motors LM1 to LM10 are combined is used as the vertical drive mechanism 168. Details of this configuration will be described later.

  Further, an R-axis servo motor 169 that rotates the suction nozzle 161 in the R direction is provided, and the R-axis servo motor 169 is operated based on an operation command from the drive control unit 141 of the control unit 104 to make the suction nozzle 161 R Rotate in the direction. Accordingly, the head unit 106 is moved to the component storage unit 105 by the head drive mechanism 107 as described above, and the electrons supplied from the component storage unit 105 are driven by driving the vertical drive mechanism 168 and the R-axis servo motor 169. The tip of the suction nozzle 161 comes into contact with the component in an appropriate posture.

  FIG. 12 is a diagram showing the configuration of the vertical drive mechanism. In this embodiment, the multi-axis linear motor MLM used as the vertical drive mechanism 168 is composed of ten single-axis linear motors LM1 to LM10 and two side plates SPa and SPb as shown in FIG. . These single-axis linear motors LM1 to LM10 are stacked in the X direction. Further, a side plate SPa is disposed on the (−X) side of the linear motor LM1, while a side plate SPb is disposed on the (+ X) side of the linear motor LM10. The shaft linear motors LM1 to LM10 are sandwiched. Three fastening through holes are formed at preset positions in each of the side plates SPa and SPb and the single-axis linear motors LM1 to LM10, and bolts 13p to 13p are formed so as to penetrate these fastening through holes. 13q is inserted and fastened by a nut, and the side plate SPa, single-axis linear motors LM1 to LM10, and side plate SPb are integrated to form a multi-axis linear motor MLM. The multi-axis linear motor MLM is attached to the base plate 160 of the head unit 106 as shown in FIG. The side plate SPb also functions as a cover that covers the concave portion 1e (see FIG. 3) of the linear motor LM10 at the end.

  Further, a nozzle shaft 163 is connected to the movable base 4 of each of the linear motors LM1 to LM10 via a connecting portion 164. Each connecting portion 164 includes an L-shaped block member 164a and a shaft holder 164b as shown in FIG. Each block member 164a is screwed to the movable base 4 with a screw by an end extending in the (+ Z) direction. Accordingly, the block member 164a is coupled to the lower end portion of the movable base 4, that is, the (−Z) side end portion by each of the linear motors LM1 to LM10. Further, the shaft holder 164b is attached to the lower surface of the end portion extending in the (−Y) direction of each block member 164a, and the nozzle shaft 163 can be held on the lower surface side of the shaft holder 164b, that is, the (−Z) direction side. Yes. A connecting member 165 is attached to the side surface of the (−Y) side end of the shaft holder 164b. One end of an air pipe 166 is connected to the connecting member 165, and air sent from the vacuum switching valve mechanism 167 is sent to the shaft holder 164b via the air pipe 166, or conversely from the shaft holder 164b. Air can be sucked into the vacuum switching valve mechanism 167 via the air pipe 166. In this way, the vacuum switching valve mechanism 167 and the suction nozzle 161 are connected by the air path (not shown) in the air pipe 166-shaft holder 164b and the nozzle shaft 163, and a positive pressure is supplied to each suction nozzle 161. Conversely, negative pressure can be supplied to each suction nozzle 161.

  In this embodiment, the multi-axis linear motor MLM is used as the vertical drive mechanism 168, and the moving direction of each movable base 4 is parallel to the vertical direction Z. For this reason, a vertical load is always applied to each movable base 4. Therefore, in each of the linear motors LM1 to LM10, the upper end portion of the return spring 15 is engaged with the spring engaging portion 1h of the base plate 1, and the lower end portion is provided at the (−Y) side end portion of the block member 164a. The movable base 4 is urged upward by the return spring 15, that is, in the (+ Z) direction side. Accordingly, the movable base 4 is accommodated in the base plate 1 while the current supply to the coils 3c of the linear motors LM1 to LM10 is stopped. As a result, each suction nozzle 161 is positioned above, and even if the X-axis servo motor 173 and the Y-axis servo motor 174 are operated in a state where the vertical drive mechanism 168 does not function due to the current stop, for example, each suction nozzle 161 Or, the adsorbed electronic component does not cause an interference accident with the substrate 103, the conveyor 121, or the like.

  In the surface mounter configured as described above, the main control unit 143 of the control unit 104 controls each part of the apparatus according to a program stored in advance in a memory (not shown) of the control unit 104, so that the head unit 106 is placed in the component storage unit. A reciprocal movement is performed between the upper position of 105 and the upper position of the substrate 103. In addition, the head unit 106 is controlled to drive the vertical drive mechanism 168 and the R-axis servo motor 169 in a state where the head unit 106 is stopped at an upper position of the component storage unit 105, so that the suction nozzle 161 The tip part is brought into contact with a proper posture, and a negative pressure suction force is applied to the suction nozzle 161, thereby holding the component by the suction nozzle 161. Then, the head unit 106 moves to a position above the substrate 103 while holding the components by suction, and then moves to a predetermined position. In this way, the component transfer operation of transferring components from the component storage unit 105 to the component mounting area of the substrate 103 is repeatedly performed.

  As described above, in the surface mounter according to this embodiment, a multi-axis linear motor in which ten linear motors LM1 to LM10 having the same configuration as the single-axis linear motor LM shown in FIG. 1 are stacked in the X direction. Since the nozzle shaft 163 is driven to move up and down in the vertical direction Z using the MLM, the following operational effects can be obtained. That is, since the vertical drive mechanism 168 is configured using the linear motors LM1 to LM10 that can stably drive the movable base 4 for a long period of time by the excellent heat dissipation structure as described above, the tip end portion of the nozzle shaft 163 The components can be stably transferred by the suction nozzle 161 attached to the device, and the reliability of the apparatus can be improved.

  In the above embodiment, the multi-axis linear motor MLM using the same configuration as the single-axis linear motor LM according to the first embodiment is used as the vertical drive mechanism. However, the single-axis linear motor according to the second embodiment is used. A plurality of linear motors according to the present invention are provided, such as a multi-axis linear motor using the same configuration as the motor LM and a multi-axis linear motor combining the single-axis linear motor according to the first and second embodiments. Things can be used.

  Further, in the above embodiment, the present invention is applied to the surface mounter MT that functions as a component transfer device, but the application target of the present invention is not limited to this, and components such as an IC handler The present invention can also be applied to a transfer device.

1 is a perspective view showing a first embodiment of a linear motor according to the present invention. It is the sectional view on the AA line of the linear motor of FIG. FIG. 2 is an exploded perspective view of the linear motor of FIG. 1. It is a perspective view which shows the attachment structure of a movable member and a needle | mover. It is a figure which shows the attachment structure of a movable member and a needle | mover. It is a top view which shows the arrangement | positioning relationship between a sub-tooth and a magnetic body plate. It is the elements on larger scale which show 2nd Embodiment of the linear motor concerning this invention. 1 is a perspective view showing an embodiment of a multi-axis linear motor according to the present invention. It is a top view which shows schematic structure of the surface mounter which is one Embodiment of the components transfer apparatus concerning this invention. It is the front view and side view of a head unit. FIG. 10 is a block diagram showing an electrical configuration of the surface mounter shown in FIG. 9. It is a figure which shows the structure of an up-down drive mechanism.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 ... Base plate 2a ... Rail 2b1, 2b2 ... Slider 3 ... Armature 4 ... Movable base (movable part)
4a ... Through-hole 4c ... Internal space 4d, 4f ... Radiating part 4e ... Rib 5 ... Yoke 6 ... Permanent magnet 10 ... Resin layer (magnet cover)
DESCRIPTION OF SYMBOLS 106 ... Head unit 107 ... Head drive mechanism 161 ... Adsorption nozzle 163 ... Nozzle shaft 168 ... Vertical drive mechanism LM, LM1-LM10 ... Single-axis linear motor MLM ... Multi-axis linear motor MT ... Surface mounter (component transfer device)
X: Thickness direction (normal direction of base surface)
Y ... width direction Z ... moving direction

Claims (1)

In the component transfer device that transfers components from the component storage unit to the component mounting area,
The base member is supported so as to be movable in the vertical direction with respect to the base member, and a suction nozzle is attached to the front end portion, and the negative pressure supplied through a negative pressure pipe connected to the rear end portion is suctioned. A head unit having a nozzle shaft to be provided to the nozzle and a vertical drive mechanism for driving the nozzle shaft in the vertical direction;
A head driving means for moving the head unit between an upper position of the component housing portion and an upper position of the component mounting area;
The vertical drive mechanism includes a base plate, a movable part that is movable in a predetermined movement direction with respect to the base plate, and a movement direction with respect to a side surface of one end of the movable part in a width direction orthogonal to the movement direction. A linear motor having an armature extending in the moving direction with respect to the base plate so as to be opposed to the movable element spaced apart from the movable element in the width direction.
The mover has a plurality of permanent magnets fixed to the yoke in a state arranged in the moving direction, and a resin magnet cover provided so as to cover the plurality of permanent magnets,
The linear motor is attached to the base member so that the moving direction is parallel to the vertical direction,
The movable part of the linear motor is connected to the nozzle shaft;
The movable part has a heat radiating part composed of a through hole formed in a surface located in a thickness direction perpendicular to the moving direction and the width direction, and an internal space communicated with the through hole. The heat transferred from the mover through the one end side surface is dissipated by the heat radiating portion at a position away from the one end side surface,
The heat dissipation portion has a plurality of ribs provided in the through hole,
While stirring the air by moving the movable part provided with the through hole,
During the driving of the movable part in the moving direction, the air heated by the heat radiated from the heat radiating part can be disposed outside the movable part via the through hole and the internal space. A component transfer device characterized by the above.

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