JP4842441B2 - Convergent light polarization microscope apparatus and convergent light polarization microscope observation method - Google Patents

Description

[0001]
BACKGROUND OF THE INVENTION
The present invention relates to a convergent light polarization microscope apparatus and a convergent light polarization microscope observation method suitable for observing the structure of various materials. Materials that can be observed by the convergent light polarizing microscope apparatus and the convergent light polarizing microscope observation method of the present invention include polymer materials such as polyethylene film and polypropylene film, biological materials such as plants and pathological tissues, coating liquids, and emulsions. And suspensions such as semiconductor materials.
[0002]
[Prior art]
Since the structure of various materials is closely correlated with their physical properties, it is important to accurately evaluate and analyze the structure. For this purpose, many techniques have been developed and utilized, but among them, the optical microscope apparatus is most commonly used as a method for observing the structure of materials because of its ease of use and the diversity of information obtained. It is a method.
[0003]
In the conventional optical microscope apparatus, as an illumination method for the inspection object, a Koehler illumination method in which parallel light is incident is usually used in order to uniformly irradiate the inspection object and increase the resolution of the image. . In addition, a polarization microscope apparatus in which incident light is polarized and a polarization microscope apparatus in which an analyzer for detection is provided after being transmitted or reflected by an inspection object are often used. Hereinafter, these are collectively referred to as a conventional microscope apparatus.
[0004]
[Problems to be solved by the invention]
However, observation with a conventional optical microscope apparatus is simply performed by forming an enlarged optical image of an object to be inspected with an objective lens and further enlarging it with an eyepiece. In other words, since only the image due to the intensity of the light reflected or transmitted by the object to be inspected is observed, sufficient knowledge about the distribution of the structure that gives orientation and birefringence can be obtained even if a polarization microscope apparatus is used. I couldn't.
[0005]
[Means for Solving the Problems]
The convergent-light polarization microscope apparatus and the convergent-light polarization microscope observation method of the present invention have been made to solve such problems.
[0006]
The convergent light polarization microscope apparatus of the present invention includes an illumination unit that irradiates convergent light that converges to one point in space as illumination light, a polarizer that converts the illumination light into linearly polarized light or circularly polarized light in front of the inspection object, and An inspection object mounting table for mounting the inspection object before the convergence point of the illumination light, and the illumination light incident after the light transmitted or reflected by the inspection object is converged to the convergence point once. An objective lens that is arranged in such a manner, and an analyzer that converts the light transmitted or reflected by the inspection object into linearly polarized light or circularly polarized light again. An adjustment mechanism that can arbitrarily change the relative position between the diffraction image plane that includes the convergence point and is orthogonal to the optical axis of the illumination light, and the inspection object; It is characterized by providing.
[0007]
Thus, instead of the conventional non-polarized parallel light, using the convergent light polarized by the polarizer as the illumination light and using an analyzer that re-polarizes the transmitted or reflected light of the inspection object, the contrast is extremely high. It is possible to obtain a polarization microscope image having a deep focal depth and a diffraction image based on the use of polarized light.
[0008]
Here, linearly polarized light and circularly polarized light are linear and circular, respectively, of trajectories drawn with time by the end of the electric field vector representing the vibration direction and magnitude of the electric field in a certain place when opposed to a traveling light wave. And that state. In the case of linearly polarized light, the plane including the vibration direction and propagation direction of the magnetic field oscillating with the electric field is a plane, and this plane is referred to as a polarization plane here. For a polarizer and analyzer that convert incident light into linearly polarized light, the polarization plane of the converted light may be referred to as the polarization plane of the polarizer and analyzer. On the other hand, in the case of circularly polarized light, there is a difference between clockwise and counterclockwise depending on the locus drawn by the electric field vector, which are referred to as right circularly polarized light and left circularly polarized light, respectively. Polarization can be achieved by transmitting light through a polarizer or analyzer.
[0009]
On the other hand, birefringence is a phenomenon in which two refracted lights generally appear when light is incident on a medium having optical anisotropy. Since the two refracted lights are linearly polarized light, a structure giving birefringence can be observed by using polarized light for incident light.
[0010]
In this convergent light polarization microscope apparatus, a Fourier transform image, that is, a diffraction image of an object to be inspected by polarized illumination light is formed on a plane (hereinafter referred to as a diffraction image plane) that includes the convergence point of the illumination light and is orthogonal to the optical axis of the illumination light. Is done. According to this convergent light polarization microscope apparatus, since this diffraction image can be formed in front of the objective lens, the diffraction image itself is observed or a desired process is applied to the diffraction image. be able to.
[0011]
In the conventional optical microscope apparatus, since the incident light is parallel light, the diffraction image is formed on the back focal plane of the objective lens, that is, inside the lens barrel. It is impossible to do.
[0012]
In the diffraction image, the structure information of the inspection object is collected. In other words, a diffraction image corresponding to the tissue structure of the inspection object is formed. If the tissue structure of the inspection object is different, the diffraction image is also different. Therefore, if the relationship between the tissue structure and the diffraction image is known, the tissue structure of the object to be inspected can be known from the diffraction image. One of the major features of this convergent light polarizing microscope apparatus is that it can simultaneously obtain a diffraction image under polarized light in addition to a polarizing microscope image.
[0013]
It is desirable that the objective lens can be focused on both the diffraction image plane and the inspection object. Thereby, both the optical image and the diffraction image of the inspection object can be observed, and the acquisition of the structure information of the inspection object can be increased.
[0014]
This convergent light polarization microscope apparatus is preferably provided with a spatial aperture that is arranged at the position of the diffraction image plane and selectively shields part of the light transmitted or reflected by the illumination light on the inspection object.
[0015]
This is because this spatial aperture allows desired diffracted light and direct light to be selected and made incident on the objective lens. If the focus of the objective lens is adjusted to the object to be inspected and only the selected diffracted light is transmitted through the spatial aperture, the optical image (dark field image) of the object to be inspected by only the selected diffracted light is observed. Can do. Moreover, since the diffracted light can be freely selected, various dark field images corresponding to the desired diffracted light can be observed for the same inspection object. Since a polarizer and an analyzer are used at this time, a dark field image reflecting the polarization state of diffracted light can be observed. Note that a bright field image can be obtained if selection is made including direct light.
[0016]
This convergent light polarization microscope apparatus includes an adjustment mechanism that can arbitrarily change the relative position of the diffraction image plane and the inspection object. Usually, the position of the converging point, that is, the position of the diffraction image plane is changed by changing the position of the condenser lens serving as the exit surface of the convergent illumination light. When the distance between the diffraction image plane and the inspection object is changed, the size of the diffraction image changes. As the distance is increased, the size of the diffraction image can be increased, and the diffraction image can be observed in more detail.
[0017]
It is desirable that the polarizer and analyzer of the convergent light polarization microscope apparatus can be rotated around the optical axis of the incident light. This is because, among the structures that give birefringence in various directions in the inspection object, the optimum angle of each of the polarizer and analyzer with respect to the target structure can be selected while keeping the direction of the inspection object constant. .
[0018]
It is desirable that the inspection object mounting table of the convergent light polarization microscope apparatus can be rotated around the optical axis of incident light. This is because, among the structures providing birefringence having various directions in the inspection object, the optimum direction of the inspection object with respect to the target structure can be selected while keeping the angle of the polarizer and the analyzer constant.
[0019]
At this time, when the polarizer and analyzer are linearly polarizing elements and the polarization planes of both elements are parallel to each other, an image in which the area in which the polarization plane in the inspection object rotates is brighter than the area that does not rotate is observed. On the other hand, when the polarization planes of the two elements are perpendicular to each other, it is possible to observe an image in which the polarization plane in the inspection object is a darker area than the non-rotated area. From these, the distribution of the structure giving birefringence can be known.
[0020]
Also, the polarizer and analyzer are circularly polarizing elements, and the rotation directions of the polarization planes of both elements are the same (if the polarizer is right circularly polarized, the analyzer is right circularly polarized, and if the polarizer is left circularly polarized, the analyzer is Left circularly polarized light), an image in which the polarization plane in the object to be rotated is a brighter area than the non-rotation area can be observed, while the directions in which the polarization planes of both elements rotate are mutually In the reverse direction (if the polarizer is right circularly polarized, the analyzer is left circularly polarized; if the polarizer is left circularly polarized, the analyzer is right circularly polarized), the area that rotates the plane of polarization in the specimen is not rotated. An image that is a darker area can be observed. By these, the distribution of the structure giving birefringence can be known.
[0021]
Furthermore, when the polarizer is a circularly polarizing element and the analyzer is a linearly polarizing element, it is possible to detect the distribution of structures that give minute birefringence in the inspection object.
[0022]
That is, when the distribution of the structure giving the birefringence of the object to be inspected is small, when both the polarizer and the analyzer convert the illumination light into linearly polarized light, there is almost no change in the light intensity due to the structure giving the orientation or birefringence. Although it is difficult to observe these structures, birefringence occurs when the polarizer converts the illumination light into circularly polarized light, and the analyzer converts the light transmitted through the object to be inspected or reflected light into linearly polarized light. The intensity of light based on the above increases, and it becomes possible to observe these structures. Therefore, when the polarizer converts the illumination light into circularly polarized light and the analyzer converts the illumination light into linearly polarized light, it is convenient to identify the distribution of the structure that gives the minute birefringence of the inspection object.
[0023]
The convergent light polarization microscope apparatus preferably includes an adjustment mechanism that substantially matches the direction of light that has passed through the spatial aperture and the optical axis of the objective lens. Although the amount of light is reduced by the spatial stop, a bright image with little distortion can be obtained by making these two optical axes substantially coincident with each other.
[0024]
This convergent light polarization microscope apparatus may use monochromatic light as illumination light. By using monochromatic light, it is possible to obtain an image that is important for knowing the tissue structure, which cannot be obtained with white light.
[0025]
It is desirable that the polarizer and analyzer of the convergent light polarization microscope apparatus are detachable. Various observations can be performed, such as observation using only a polarizer or an analyzer, or observation using neither a polarizer nor an analyzer.
[0026]
One of the microscope observation methods of the present invention using such a convergent light polarization microscope apparatus is to observe the inspection object by aligning the focus of the objective lens with the inspection object. Since the convergent light is used as the illumination light, it is possible to obtain a polarization microscope image having a very high contrast and a deep focal depth.
[0027]
According to another microscope observation method of the present invention, the polarized light incident on an object to be inspected formed on the diffraction image plane is obtained by focusing the objective lens on the diffraction image plane orthogonal to the optical axis of the objective lens including the convergence point. A diffraction image by light is observed using an analyzer.
[0028]
If the relationship between the diffraction image and the tissue structure is acquired in advance for the inspection object, the tissue structure of the inspection object can be known from the characteristics of the pattern of the diffraction image by directly observing the diffraction image.
[0029]
According to another microscope observation method of the present invention, first, the focus of the objective lens is aligned with the inspection object and the inspection object is observed, and then the focus of the objective lens is formed on the diffraction image plane. The diffraction image is observed according to the diffraction image obtained, or first, the focus of the objective lens is adjusted to the diffraction image formed on the diffraction surface, and then the diffraction image is observed. The object to be inspected is focused on the object to be inspected.
[0030]
It is possible to grasp the overall characteristics of the tissue structure that was difficult to understand only by observing the optical image, or to know the details of the tissue structure from which the diffraction image that was difficult to understand only by observing the diffraction image.
[0031]
According to another microscope observation method of the present invention, only a desired region on the diffraction image plane is allowed to pass using a spatial aperture, and the focus of the objective lens is adjusted to the object to be inspected with respect to the light that has passed through the spatial aperture. The inspection object is observed.
[0032]
Since light (direct light and diffracted light) passed through the spatial aperture can be freely selected, various dark field images and bright field images corresponding to the diffracted light can be observed for the same inspection object under polarized light. Thereby, the tissue structure of the object to be inspected can be known in more detail.
[0033]
According to another microscope observation method of the present invention, the objective lens is focused on the diffraction image plane to observe a diffraction image by the polarized incident light of the inspection object formed on the diffraction image plane. After adjusting the spatial aperture so that only the light in the above region passes, the object is observed by the light passing through the spatial aperture and the analyzer by aligning the focus of the objective lens with the target.
[0034]
Since image observation is performed after selecting diffracted light based on the diffracted image, it is possible to know what diffracted light is based on the optical image. Thereby, the tissue structure of the object to be inspected can be known in more detail.
[0035]
In the microscope observation method of the present invention, it is desirable to observe the inspection object by adjusting the position of the diffraction image surface so that the inspection object is focused when the objective lens is positioned in the vicinity of the diffraction image surface. This is because the diffracted image plane is a position where the irradiation light converges, so that when the objective lens is placed there, the image becomes brightest without losing the diffracted light.
[0036]
Diffraction that contributes to the optical image formation of an object to be inspected by the objective lens by changing the shape of the spatial aperture or the position on the diffraction image plane, or by changing the angle of the optical axis of the illumination light with respect to the optical axis of the objective lens The object can be observed by selecting light.
[0037]
In the microscope observation method of the present invention, it is desirable to observe the object to be inspected with the direction of the light that has passed through the space diaphragm and the optical axis of the objective lens substantially matched. Although the amount of light is reduced by the spatial stop, a bright image with little distortion can be obtained by making these two optical axes substantially coincident with each other.
[0038]
In the microscope observation method of the present invention, it is desirable that the size of the diffraction image can be adjusted by changing the position of the convergence point of the illumination light in the optical axis direction of the objective lens. As the distance is increased, the size of the diffraction image can be increased, and the diffraction image can be observed in more detail.
[0039]
In the microscope observation method of the present invention, monochromatic light may be used as illumination light. By using monochromatic light, it is possible to obtain an image that is important for knowing the tissue structure, which cannot be obtained with white light.
[0040]
The microscope observation method of the present invention can be suitably used for a polymer material. With respect to the important structure of the polymer material, detailed knowledge that cannot be obtained by the conventional microscope observation method can be obtained.
[0041]
DETAILED DESCRIPTION OF THE INVENTION
FIG. 1 is a diagram showing a basic configuration of a convergent light polarization microscope apparatus according to an embodiment of the present invention. The light source 1, the condenser lens 2, and the polarizer 15 constitute an illuminating means 3 that irradiates polarized convergent light that converges at a point 4 in space as illumination light. The light output from the light source 1 may be white light or monochromatic light.
[0042]
An inspection object mounting table (stage) 5 on which an inspection object (specimen) 6 is mounted is disposed above the illumination means 3. The stage 5 has an opening that transmits polarized illumination light from the illumination means 3 at the center thereof, and the illumination light passes through this opening and converges at an upper convergence point 4. As a result, a Fourier transform image by the polarized illumination light of the inspection object 6, that is, a diffraction image under polarization, is formed on the plane 8 that passes through the convergence point 4 and is perpendicular to the optical axis 7 of the illumination light. Here, this plane 8 is called a diffraction image plane.
[0043]
The condenser lens 2 is movable in the direction of the optical axis 7 with respect to the stage 5. By moving the condenser lens 2 in the direction of the optical axis 7, the distance between the inspection object 6 placed on the stage 5 and the convergence point 4, that is, the distance between the inspection object 6 and the diffraction image plane 8 is changed. Can be made.
[0044]
A spatial stop 9 is provided in parallel with the diffraction image surface 8 at a position on or near the diffraction image surface 8. FIG. 2 is a plan view of the space diaphragm 9, and a circular opening having a diameter of several hundred microns, for example, is formed at the center of the light shielding plate. The spatial stop 9 is movable in a direction perpendicular to the optical axis 7 and can select a region through which light should be transmitted among diffraction images formed on the diffraction image plane 8. Further, the space stop 9 can be easily detached even during observation.
[0045]
The opening shape formed in the space stop 9, that is, the observation field of view, is not necessarily circular. A square shape, a semi-circle shape, a sector shape, or the like can be appropriately selected according to the purpose.
[0046]
A lens barrel 13 including an objective lens 10, an analyzer 16, an imaging lens 11, and an eyepiece lens 12 is disposed further above the spatial aperture 9. The internal structure itself of the lens barrel 13 is a conventional one, and can be focused by moving in the direction of the optical axis 7.
[0047]
However, the movable range of the lens barrel for focusing needs to be sufficiently longer than that of a conventional general microscope apparatus. That is, focusing can be performed at least on both the inspection object 6 and the diffraction image plane 8.
[0048]
The objective lens 10 has a focal length such that the position when the object 6 is focused on is behind (upward) the space stop 9. Therefore, the space stop 9 does not get in the way in the focusing operation.
[0049]
As shown in FIG. 3, when the position of the diffraction image plane 8 is adjusted so that the object 6 is focused when the objective lens 10 is closest to the space stop 9, the brightest image is obtained. Can do.
[0050]
The image captured by the objective lens 10 is formed at an intermediate image position 14 behind the imaging lens 11 after passing through the analyzer 16, and the eyepiece 12 is adjusted in focus so that this image can be observed. .
[0051]
Examples of the inspected object according to the present invention include polymer materials (for example, polymer films such as polyethylene and polypropylene), biomaterials, ceramics, metals, and the like. Is the most typical target material.
[0052]
Therefore, a specific example when a polymer film is observed as an object to be inspected will be described.
[0053]
A converging illumination light was obtained by disposing a condenser lens 2 having a numerical aperture of 0.4 in front of a point light source 1 composed of a 100 W halogen lamp and a circular pinhole having a diameter of 100 μm. The condenser lens 2 can be moved up to 25 mm or more in a direction parallel to the optical axis 7. In addition, the filter for monochromating was not attached to the light source.
[0054]
A stage 5 was placed behind the condenser lens 2, and a slide glass with a polymer film fixed thereon was placed thereon. The stage 5 was fixed in a direction parallel to the optical axis 7. On the other hand, it was made possible to move in the direction perpendicular to the optical axis 7 in order to select an observation field.
[0055]
Further, a light-shielding plate provided with a circular pinhole having a diameter of 800 μm was disposed as a space stop 9 behind the stage 5. The light-shielding plate can be moved up to 5 mm in each of two directions perpendicular to the optical axis 7 and perpendicular to each other in order to select direct light or scattered light to be shielded from light transmitted through the sample (polymer film). I was able to do it. In addition, in order to make the converging surface (diffraction image surface) 8 and the pinhole surface coincide with each other, it can be moved up to 5 mm in a direction parallel to the optical axis 7.
[0056]
A long working distance objective lens 10 (CF ICEPI Plan 5 × manufactured by Nikon Corporation, working distance 22.5 mm, numerical aperture 0.13, magnification 5 times), and trinocular tube 13 (Co., Ltd.) ) Nikon TI) were arranged in this order.
[0057]
The trinocular tube 13 is attached with a photography apparatus (not shown) (Nikon Corporation H-3) and an eyepiece 12 (Nikon Corporation CFWN 10 ×, magnification 10 ×), observation with the naked eye, and photography. I was able to. The objective lens 10 and the trinocular tube 13 are integrally moved in a direction parallel to the optical axis 7 so that the focusing can be adjusted to the sample image or the diffraction image, respectively.
[0058]
As the observation result, a high-sensitivity instant black-and-white film (FP-3000B SUPER SPEEDY, ISO 3200 manufactured by Fuji Photo Film Co., Ltd.) was used, and photographs were taken for each of the diffraction image and the sample image at a constant exposure time.
[0059]
<Sample (inspection object)>
A film obtained by sandwiching polypropylene at a melt flow rate of 1.2 g / 10 min between a slide glass and a cover glass, melting at 230 ° C. for 5 minutes, and then isothermally crystallizing at 130 ° C. (referred to as a polymer film) Was used as a sample. The sample image of the obtained sample was observed with the convergent light polarization microscope apparatus of the present invention.
[0060]
Observation example 1
By irradiating the sample 6 with illumination light that converges after removing the spatial aperture 9 from the optical axis 7, and confirming the diameter of the transmitted light beam with a tracing paper or the like, the position of the convergent surface, that is, the diffraction image plane 8 is determined. The position of the condenser lens 2 was adjusted to be between the objective lens 10 and the objective lens 10. Next, a diffraction image was obtained by aligning the focusing of the objective lens 10 with the convergence surface 8. FIG. 4 is a photomicrograph of the diffraction image of the polymer film under polarized light. At this time, the linear polarization plane of the polarizer was aligned with the vertical direction of FIG. 4, and the linear polarization plane of the analyzer was aligned with the horizontal direction of FIG. A state in which the linear polarization planes of the polarizer and the analyzer are arranged so as to be perpendicular to each other will be referred to as crossed Nicols. FIG. 4 is a four-leaf clover-like image. This feature coincided with a light scattering image of a tissue structure called a spherulite composed of a structure that gives birefringence. Since FIG. 4 is not distorted in a specific direction, it can be seen that the spherulites are not oriented in a specific direction as a whole. In FIG. 4, knowledge about the orientation of the spherulites was obtained. However, by observing the diffraction image with the polarizer and analyzer removed from the optical path, it is possible to know the orientation of structures other than the structure that gives birefringence. FIG. 5 is a photomicrograph under crossed Nicols when the focusing of the objective lens 10 is matched to the polymer film. In FIG. 5, an aggregate of structures having a dark cross-shaped contrast was observed. This is consistent with the characteristics of the microscopic image of spherulites under crossed Nicols, and it can be seen that spherulites composed of structures that give birefringence are observed with high contrast.
[0061]
Observation example 2
After obtaining the diffraction image of FIG. 4, a space stop 9 having a circular pinhole with an aperture of 800 μm is inserted as the space stop on the same plane as the converging surface 8, thereby shielding other than direct light and scattered light in the vicinity thereof. did. FIG. 6 is a photomicrograph showing a diffraction image of the polymer film at this time. After that, by moving the focusing of the microscope apparatus to the sample position, an image formed only by the light transmitted through the space stop 9 was obtained as a sample image. FIG. 7 is a photomicrograph showing an image of the polymer film at this time. As a result, it was observed that a circular structure exists inside the spherulite interface. This is a structure that was not seen in FIG.
[0062]
Observation example 3
After obtaining the diffraction image of FIG. 4, a light shielding plate having a circular pinhole with an aperture of 800 μm is inserted as the spatial aperture 9 on the same plane as the converging surface 8 to shield other than the scattered light above the direct light. . FIG. 8 is a photomicrograph showing a diffraction image of the polymer film at this time. After that, by aligning the focus of the microscope apparatus with the sample position, an image formed only by the light transmitted through the space stop 9 was obtained as a sample image. The micrograph of FIG. 9 shows an image of the polymer film at this time. As a result, the upper structure of the spherulite was discriminated from the lower structure by the spatial restriction. It is not known in the conventional optical microscope apparatus that such a structure can be extracted.
[0063]
Observation example 4
After obtaining the diffraction image of FIG. 4, the same spatial aperture 9 as in observation examples 2 and 3 was inserted on the same plane as the converging surface 8, thereby shielding the light other than the scattered light on the right side of the direct light. FIG. 10 is a photomicrograph showing a diffraction image of the polymer film at this time. After that, by aligning the focus of the microscope apparatus with the sample position, an image formed only by the light transmitted through the space stop 9 was obtained as a sample image. The micrograph in FIG. 11 shows an image of the polymer film at this time. As a result, the difference in the left-right direction of the spherulite was also identified by the spatial aperture.
[0064]
Observation example 5
After obtaining the diffraction image of FIG. 4, the same spatial aperture 9 as in observation examples 2 to 4 was inserted on the same plane as the converging surface 8, thereby shielding the light other than the scattered light on the upper right side of the direct light. FIG. 12 is a photomicrograph showing a diffraction image of the polymer film at this time. After that, by aligning the focus of the microscope apparatus with the sample position, an image formed only by the light transmitted through the space stop 9 was obtained as a sample image. The micrograph in FIG. 13 shows an image of the polymer film at this time. As a result, the structure on the upper right side of the spherulite was distinguished from the other structures by the spatial aperture. It was possible to reduce the range of structures to be extracted by reducing the range selected by the spatial aperture.
[0065]
Observation Example 6
After obtaining the diffraction image of FIG. 4, the same spatial aperture 9 as in observation examples 2 to 5 was inserted on the same plane as the converging surface 8, thereby shielding the light other than the scattered light on the lower left side of the direct light. FIG. 14 is a photomicrograph showing a diffraction image of the polymer film at this time. After that, by aligning the focus of the microscope apparatus with the sample position, an image formed only by the light transmitted through the space stop 9 was obtained as a sample image. The micrograph in FIG. 15 shows an image of the polymer film at this time. As a result, the structure at the lower left of the spherulite was distinguished from the other structures by the spatial aperture. From FIGS. 8 to 15, it was possible to extract an arbitrary portion in the spherulite depending on the size and position of the diffraction image selected by the space diaphragm. From these, it became clear which part of each diffractogram originated from the spherulite.
[0066]
【The invention's effect】
As described above, according to the convergent light polarization microscope apparatus of the present invention and the microscope observation method using the same, the polarized illumination light that converges to one point in front of the objective lens is used. The diffraction image can be selectively observed only by moving the objective lens in the optical axis direction. Also, This convergent light polarization microscope apparatus has an adjustment mechanism that can arbitrarily change the relative position between the diffraction image plane and the object to be inspected. Can be enlarged, and a diffraction image can be observed in more detail. further, By appropriately inserting or moving the space stop, it is possible to obtain an optical image and a diffracted image of the object to be inspected by desired diffracted light under polarized light. Therefore, it is possible to sufficiently obtain detailed knowledge about the distribution of the structure giving the orientation and birefringence that could not be obtained by the conventional optical microscope apparatus.
[Brief description of the drawings]
FIG. 1 is a diagram showing a configuration of a convergent light polarization microscope apparatus according to an embodiment of the present invention.
FIG. 2 is a plan view showing a spatial aperture 9
FIG. 3 is a diagram showing a convergent light polarization microscope apparatus in a state where an objective lens 10 is brought close to a spatial aperture 9;
FIG. 4 is a micrograph showing a diffraction image of a polymer film.
FIG. 5 is a micrograph showing an optical image of a polymer film.
FIG. 6 is a micrograph showing a diffraction image of a polymer film by a selected part of diffracted light.
FIG. 7 is a photomicrograph showing an optical image of a polymer film by selected diffracted light.
FIG. 8 is a micrograph showing a diffracted image of a polymer film by selected diffracted light.
FIG. 9 is a photomicrograph showing an optical image of a polymer film by selected diffracted light.
FIG. 10 is a micrograph showing a diffraction image of a polymer film by a selected part of diffracted light.
FIG. 11 is a micrograph showing an optical image of a polymer film by a selected part of diffracted light.
FIG. 12 is a photomicrograph showing a diffraction image of a polymer film by a part of selected diffracted light.
FIG. 13 is a micrograph showing an optical image of a polymer film by a selected part of diffracted light.
FIG. 14 is a micrograph showing a diffraction image of a polymer film by a selected part of diffracted light.
FIG. 15 is a photomicrograph showing an optical image of a polymer film by selected diffracted light.
[Explanation of symbols]
DESCRIPTION OF SYMBOLS 1 ... Light source, 2 ... Condenser lens, 3 ... Illuminating means, 4 ... Convergence point, 5 ... Inspection object mounting stage (stage), 6 ... Inspection object, 7 ... Optical axis, 8 ... Diffraction image plane, 9 ... Space Aperture, 10 ... objective lens, 11 ... imaging lens (not necessarily required), 12 ... eyepiece, 13 ... lens barrel, 14 ... intermediate image position, 15 ... polarizer, 16 ... analyzer

Claims (21)

Illumination means for irradiating convergent light that converges to one point in space as illumination light, a polarizer that converts the illumination light into linearly polarized light or circularly polarized light before the object to be inspected, and the convergence light before the convergence point An object mounting table for mounting the object to be inspected, and an objective lens arranged so that the illumination light is incident on the object after being transmitted or reflected once converged at the convergence point in the object to be inspected; An analyzer that converts light that has been transmitted or reflected through the inspection object into linearly polarized light or circularly polarized light again , a diffraction image plane that includes the convergence point and is orthogonal to the optical axis of the illumination light, and the relative inspection object An optical microscope apparatus comprising an adjustment mechanism capable of arbitrarily changing the position . The objective lens, the optical microscope apparatus according to claim 1, characterized in that is adapted to be able to adjust the focusing to any of the diffraction image plane and the object to be inspected. The space stop which is arrange | positioned in the position of the said diffraction image surface, and selectively shields a part of light which the said illumination light permeate | transmitted or reflected in the said to-be-inspected object is characterized by the above-mentioned. The optical microscope apparatus according to one item. The optical microscope apparatus according to any one of claims 1 to 3 , wherein the polarizer and the analyzer can rotate around an optical axis of incident light. Optical microscope apparatus according to any one of claims 1 to 3, the inspection object table, characterized in that the rotatable around the optical axis of the incident light. Said polarizer and said analyzer is a linear polarizing element for converting the linearly polarized light both incident light, and any one of claims 1 to 5, wherein the polarization plane of the two elements are parallel or perpendicular to each other The optical microscope apparatus described in 1. The polarizer is a circular polarizer for converting incident light into circularly polarized light, and to any one of claims 1 to 5, wherein the analyzer is characterized in that it is a linear polarizing element for converting incident light into linearly polarized light The optical microscope apparatus described. Wherein a polarizer and circular polarizer the analyzer to convert both the incident light into circularly polarized light, and the claims 1-5 where the polarization plane of rotation of both circular polarizer is characterized in that a reverse or same direction The optical microscope apparatus as described in any one. The optical microscope apparatus according to any one of claims 3 to 8 , further comprising an adjustment mechanism that substantially matches a direction of light that has passed through the spatial aperture and an optical axis of the objective lens. Optical microscope apparatus according to any one of claims 1 to 9, wherein the illumination light is monochromatic light. The microscope observation method using the optical microscope apparatus according to claim 1, wherein the inspection object is observed by adjusting a focus of the objective lens to the inspection object. 2. The microscope observation method using the optical microscope apparatus according to claim 1, wherein the object lens is focused on a diffraction image plane that includes the convergence point and is orthogonal to the optical axis of the objective lens. And observing a diffraction image of the illumination light. In the microscope observation method using the optical microscope apparatus according to claim 2, first, after focusing the objective lens on the inspection object and observing the inspection object, focusing of the objective lens is performed on the object Observe the diffraction image according to the diffraction image formed on the diffraction image surface, or first observe the diffraction image by aligning the focus of the objective lens with the diffraction image formed on the diffraction surface. And then observing the inspection object by aligning the focusing of the objective lens with the inspection object. In the microscope observation method using the optical microscope apparatus according to any one of claims 3 to 10 , light of only a desired region on the diffraction image plane is allowed to pass using the spatial aperture, and the spatial aperture is A microscope observation method characterized by observing the inspection object by adjusting the focusing of the objective lens to the inspection object with respect to the passed light. The microscope observation method using the optical microscope apparatus according to any one of claims 3 to 10 , wherein the object formed on the diffractive image plane by focusing the objective lens on the diffractive image plane. By observing a diffraction image of the inspection object and adjusting the spatial aperture so as to selectively pass only light in a desired region of the diffraction image, and then adjusting the focus of the objective lens to the inspection object A microscope observing method, wherein the inspection object is observed with light passing through the space diaphragm. The microscope observation method using the optical microscope apparatus according to any one of claims 3 to 10 , wherein the object is focused when the objective lens is positioned in the vicinity of the diffraction image plane. A microscope observation method, wherein the inspection object is observed by adjusting a position of the diffraction image plane. By changing the shape of the spatial diaphragm or the position of the spatial diaphragm on the diffraction surface, or by changing the angle of the optical axis of the illumination light with respect to the optical axis of the objective lens, the object by the objective lens is changed. The microscope observation method according to any one of claims 14 to 16 , wherein the inspection object is observed by selecting light participating in optical image formation of the inspection object. The microscope observation method according to any one of claims 14 to 16 , wherein the inspection object is observed with a direction of light that has passed through the spatial aperture substantially matched with an optical axis of the objective lens. . In any one of claims 11-15, 17 or 18, characterized by adjusting the size of the diffraction image by changing the position of the convergent point of the illumination light in the optical axis direction of said objective lens The microscope observation method described. The microscope observation method according to any one of claims 11 to 19 , wherein the illumination light is monochromatic light. The microscope observation method according to any one of claims 11 to 20 , wherein the inspection object is a polymer material.

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