JP4806530B2 - Propulsion mechanism, processing device and measuring device - Google Patents

Description

  The present invention relates to a propulsion mechanism, a processing apparatus, and a measurement apparatus.

  2. Description of the Related Art Conventionally, a propulsion mechanism is known that includes a sub table that is propulsion driven by power generated by a motor and a main table that is coupled to the sub table via a hydrostatic joint. In such a propulsion mechanism, when the sub-table is propelled, the main table on which the workpiece (workpiece, workpiece to be measured, etc.) is placed is propelled in conjunction with it. Since the sub-table and the main table are connected by a hydrostatic joint, displacement and vibration along the direction crossing the propulsion direction that occurs when the sub-table is propelled and driven by the motor are not easily transmitted to the main table, and the workpiece is loaded. The propulsion accuracy of the placed main table can be improved.

The structure of a conventional propulsion mechanism, particularly its hydrostatic joint, will be described with reference to Patent Document 1 and FIGS.
The hydrostatic joint of Patent Document 1 is composed of two joint parts, a disk joint part and a ball joint part. The disc joint portion is fitted into the sub table, and the ball joint portion is fitted into the main table. A minute gap exists between each joint and each table, and pressure oil is supplied to this gap, so that each joint and each table are in a non-contact state. For this reason, the sub table and the main table are connected in a non-contact manner via the hydrostatic joint based on the static pressure of the pressure oil, and the main table can be propelled with high accuracy.

FIG. 5 shows an example of a conventional propulsion mechanism 1.
The propulsion mechanism 1 includes a drive unit 2, a sub table 3, a main table 4, and a hydrostatic joint 5.
The drive unit 2 includes a ball screw 22 that converts rotational power generated by a motor 21 (not shown in FIG. 5) into linear power.
The sub-table 3 is fixed to the female screw portion 221 of the ball screw 22, and along the axial direction of the male screw shaft 222 of the ball screw 22 (in the left-right direction in FIG. 5) based on linear power generated by the ball screw 22. It can be promoted.
The main table 4 is connected to the sub-table 3 via the hydrostatic joint 5 and can be propelled in conjunction with the sub-table 3. A work is placed on the main table 4.

The hydrostatic joint 5 includes a first joint member 51 that is fixed to the sub-table 3 and a second joint member 52 that is fixed to the main table 4.
The first joint member 51 extends from the end of the sub-table 3 along the propulsion direction, and projects from the tip of the extension plate portion 511 in a direction perpendicular to the propulsion direction, and is directed in the propulsion direction. And a thrust transmission plate portion 512 having two thrust transmission surfaces 512A and 512B perpendicular to each other. An air passage 513 for flowing pressurized air supplied from a compressor (not shown) is formed in the first joint member 51. The pressurized air that has flowed through the air passage 513 is discharged into a plurality of discharge holes 514 (in FIG. 5, each of the thrust transmission surfaces 512A and 512B, respectively) on each of the thrust transmission surfaces 512A and 512B of the thrust transmission plate portion 512. 2), and is discharged along the propulsion direction.
The second joint member 52 has a substantially concave shape in cross section, and is formed so as to cover the thrust transmission plate portion 512 of the first joint member 51 by the substantially concave shape. The second joint member 52 has thrust transmitted surfaces 52A and 52B opposed to the two thrust transmission surfaces 512A and 512B of the first joint member 51, respectively.

  In the conventional propulsion mechanism 1 configured as described above, the thrust transmission surfaces 512A and 512B of the first joint member 51 and the second joint member 52 are compressed by the pressurized air discharged from the discharge hole 514 of the first joint member 51. Since the thrust receiving surfaces 52A and 52B are in a non-contact state, the sub-table 3 and the main table 4 are connected in a non-contact manner. For this reason, the displacement and vibration along the direction intersecting the propulsion direction generated when the sub-table 3 is propelled and driven by the drive unit 2 are not easily transmitted to the main table 4, and the propulsion accuracy of the main table 4 on which the workpiece is placed is improved. Can be improved.

FIG. 6 shows an example of a conventional propulsion mechanism 1 (different from the propulsion mechanism of FIG. 5).
The configuration of the propulsion mechanism 1 in FIG. 6 is almost the same as the configuration of the propulsion mechanism 1 in FIG. 5. Therefore, the same or corresponding components are denoted by the same reference numerals and the description thereof will be given. Omitted or simplified.
The propulsion mechanism 1 in FIG. 6 includes a rod 3 instead of the sub-table 3 in FIG. The rod 3 is formed in parallel to the axial direction of the male screw shaft 222 of the ball screw 22 (the propulsion direction of the main table 4), and propels the main table 4 through the hydrostatic joint 5.
A disc-shaped first joint member 51 is fixed to the distal end portion (left end portion in FIG. 6) of the rod 3, and the first joint member is attached to the end portion (right end portion in FIG. 6) of the main table 4. A second joint member 52 formed so as to cover substantially the entire surface of 51 is fixed. Here, the two circular surfaces of the disk-shaped first joint member 51 constitute the thrust transmission surfaces 512A and 512B, respectively, and are opposed to both the thrust transmission surfaces 512A and 512B in the second joint member 52. The surfaces constitute thrust transmitted surfaces 52A and 52B, respectively.
Similarly to FIG. 5, each thrust transmission surface 512 </ b> A, 512 </ b> B is provided with a discharge hole 514 (not shown in FIG. 6), and pressurized air is discharged from each discharge hole 514. ing.

FIG. 7 shows an example of a conventional propulsion mechanism 1 (different from the propulsion mechanisms of FIGS. 5 and 6).
The propulsion mechanism 1 in FIG. 7 is different from the propulsion mechanism 1 in FIG. 6 only in the configuration of the drive unit 2.
The drive unit 2 includes a main driving roller 23 and a driven roller 24 for driving and driving the rod 3. Both rollers 23 and 24 are disposed so as to sandwich the rod 3, and are provided so as to be rotatable around an axis orthogonal to the propulsion direction of the rod 3. When the main driving roller 23 is rotated by the motor 21, the rod 3 is propelled, and the driven roller 24 is rotated accordingly. That is, the main driving roller 23 mainly plays a role of driving and driving the rod 3, and the driven roller 24 mainly plays a role of guiding the driving of the rod 3.

Japanese Utility Model Publication No. 1-64338 (FIG. 3)

  However, in the propulsion mechanism of Patent Document 1 and FIGS. 5 to 7 as described above, in order to achieve sufficiently high propulsion accuracy, the static pressure gap dimension in the hydrostatic joint (in Patent Document 1, each joint is The gap dimension between the portion (disk and sphere) and each table (in FIG. 5 to FIG. 7, the gap dimension between each thrust transmission surface 512A, 512B and each thrust transmitted surface 52A, 52B.) Therefore, it was necessary to uniformly supply pressurized oil, air, and the like to the static pressure gap. For this reason, in order to implement | achieve an appropriate static pressure gap dimension, the precision process of each component which comprises a hydrostatic joint is required, and there existed a problem that manufacturing cost will become high.

For example, in the hydrostatic joint of Patent Document 1, since the inner surface of each table covers the substantially entire surface of each joint part (disk and sphere), the substantially entire surface of each joint part is processed with high accuracy. In addition, the inner surface of each table that faces the surface of each joint portion needs to be processed with high accuracy in accordance with the shape (disk and sphere) of each joint portion, which increases the manufacturing cost.
In addition, in the hydrostatic joint 5 of FIGS. 5 to 7, each of the two pairs of opposing surfaces of the thrust transmission surface 512A and the thrust transmitted surface 52A, and the thrust transmission surface 512B and the thrust transmitted surface 52B is highly accurate. It is necessary to process, and the manufacturing cost becomes high.

  An object of the present invention is to provide a propulsion mechanism that can reduce the manufacturing cost with a simple structure and realize sufficiently high propulsion accuracy, and a processing apparatus and a measurement apparatus including the propulsion mechanism.

The propulsion mechanism of the present invention is connected to the first propulsion body via a hydrostatic joint and a first propulsion body that can be propelled along a predetermined propulsion direction by power generated by a power source, and the first propulsion mechanism A second propulsion body that can be propelled along the propulsion direction in conjunction with a body, and the hydrostatic joint includes a plate-like first joint member provided on the first propulsion body, and the first joint member In contrast, a plate-like second joint member provided on the second propulsion body so that the plate surfaces face each other, and the plate surfaces of the first joint member and the second joint member are respectively In the case of the first facing surface and the second facing surface, either one of the first joint member and the second joint member exhales air between the first facing surface and the second facing surface, For bringing the first facing surface and the second facing surface into a non-contact state. A suction hole communicates with the vacuum generated by the vacuum generating means for generating a vacuum and sucks air between the first opposing surface and the second opposing surface, and the first opposing surface and the second opposing surface And a suction hole for attracting each other in a non-contact state, and at least one of the first joint member and the second joint member is rotatably provided around an axis that intersects the propulsion direction. It is characterized by that.

In the propulsion mechanism of the present invention configured as described above, the first opposed surface and the second opposed surface are brought into a non-contact state by discharging the air from the discharge hole , and the first opposed surface is drawn by sucking air by the suction hole. And the second opposing surfaces are attracted to each other. Thus, since the first opposing surface and the second opposing surface are attracted to each other while maintaining a non-contact state with a predetermined dimension therebetween, the first propulsion unit and the second propulsion unit are connected in a non-contact manner. . For this reason, when the first propulsion body is propelled along the predetermined propulsion direction by the power generated by the power source, the second propulsion body is propelled along the propulsion direction in conjunction with each other. At this time, since the first propulsion body and the second propulsion body are connected in a non-contact manner, displacement and vibration along the direction crossing the propulsion direction generated when the first propulsion body is propelled and driven by the power source are the first. It becomes difficult to transmit to the two propulsion bodies, and the second propulsion body can be propelled with high accuracy.

  In the propulsion mechanism of the present invention, a non-contact joint is configured only between a pair of opposed surfaces of the first opposed surface of the first propelled body and the second opposed surface of the second propelled body. In this regard, the joint mechanism (disk and sphere) is fitted into each table, and the propulsion mechanism of Patent Document 1 that constitutes the hydrostatic joint between the substantially entire surface of each joint part and the inner surface of each table, Compared with the propulsion mechanism of FIGS. 5 to 7 in which a hydrostatic joint is configured between two sets of opposing surfaces, the structure of the propulsion mechanism of the present invention can be remarkably simplified.

Further, in the propulsion mechanism of the present invention, the gap dimension between the first facing surface and the second facing surface that affects propulsion accuracy is mainly between the discharge of air through the discharge hole and the suction of air through the suction hole. Therefore, high processing accuracy is not required for the first facing surface and the second facing surface, and the manufacturing cost can be reduced.
In order to further improve the propulsion accuracy, when increasing the processing accuracy of the first facing surface and the second facing surface, substantially the entire surface of each joint (disk and sphere) and the inner surface of each table are increased. As precise processing as the propulsion mechanism of Patent Document 1 that needs to be processed with high precision and the propulsion mechanism of FIGS. Since it is not required, manufacturing costs can be reduced compared to these conventional propulsion mechanisms.
Further, since the suction hole communicates with the vacuum, the suction pressure can be remarkably increased, and air can be efficiently sucked. With this strong suction pressure, the first and second opposing surfaces can be strongly attracted to each other, the air stiffness between the opposing surfaces can be increased, and the propulsive force transmission accuracy between the opposing surfaces can be improved. Since it can be improved, the propulsion accuracy can be improved.
The term “vacuum” as used herein means not only a vacuum in a strict sense, that is, a space where no substance exists, but also a vacuum in a practical sense, that is, the pressure is an external pressure (high pressure). It also means a space considerably lower than the atmospheric pressure.
Furthermore, since the non-contact joint can be configured using air, it is not necessary to prepare a fluid for the non-contact joint in advance, and labor and cost can be reduced.
As described above, in the propulsion mechanism of the present invention, the first propulsion unit is propelled and driven by the power source, and the second propulsion unit connected to the first propulsion unit via the non-contact joint is the first propulsion unit. It is designed to promote in conjunction with. At this time, the action of the non-contact joint makes it difficult for displacement and vibration along the direction intersecting the propulsion direction generated when the power source propulsion-drives the first propulsion unit to be transmitted to the second propulsion unit.
However, when the power source propels and drives the first propelling body, rotational displacement (so-called pitching, yawing, etc.) around an axis that intersects the propulsion direction can also occur. Then, the facing state between the first facing surface and the second facing surface is changed, and the propulsive force is not smoothly transmitted between the facing surfaces, so that the propulsion accuracy is deteriorated.
Therefore, in the present invention, by adopting the propulsion mechanism configured as described above, deterioration of propulsion accuracy based on rotational displacement around an axis that intersects the propulsion direction is prevented. That is, when the rotational displacement occurs when the power source propels and drives the first propelling body, at least one of the first joint member and the second joint member is rotated in a direction that cancels the rotational displacement. Thereby, since the facing state of the first facing surface and the second facing surface is maintained, the propulsive force can be smoothly transmitted between the facing surfaces before and after the rotational displacement occurs. The deterioration of the propulsion accuracy based can be prevented.

The propulsion mechanism of the present invention, is provided a fluid pressurizing means for pressurizing the air, the discharge hole, the second facing surface and the pressurized pressurized air the first opposing surface in said fluid pressure means It is preferable to exhale between.
According to the propulsion mechanism with such a configuration, since the pressurized air from the fluid pressure means is supplied between the first opposing face and the second opposing surface, to increase the rigidity of the air between the two facing surfaces Since the transmission accuracy of the propulsive force between the opposing surfaces can be improved, the propulsion accuracy can be improved.

Further, in the propulsion mechanism of the present invention, the discharge hole discharges air between the opposing surfaces on the outer peripheral side of the first opposing surface and the second opposing surface, and the suction hole includes the first opposing surface and It is preferable that the air between the opposing surfaces is sucked at the center side of the second opposing surface.
According to the propulsion mechanism of this structure, the discharge holes so expel air at the outer peripheral side of the two facing surfaces, it is possible to prevent the outside air coming from the outer peripheral side between the two facing surfaces. For this reason, the suction holes for sucking air at the center side of both opposing surfaces almost suck only the air discharged by the discharge holes , and hardly suck the external air that may contain foreign substances. Therefore, the possibility that the suction hole sucks in the foreign matter is remarkably reduced, and it is possible to accurately prevent the occurrence of problems such as a reduction in suction pressure due to the suction of the foreign matter.

Further, in propulsion mechanism of the present invention, the first coupling member and the second coupling member, their respective pivotably mounted around an axis intersecting the propulsion direction, the first coupling member, The second joint member is rotatably provided about a first orthogonal axis orthogonal to the propulsion direction, and the second joint member is rotatable about a second orthogonal axis orthogonal to the propulsion direction and the first orthogonal axis. It is preferable to be provided.

The rotational displacement around the axis that intersects the propulsion direction that occurs when the power source propels and drives the first propellant is the first rotational displacement around the first orthogonal axis and the second rotational displacement around the second orthogonal axis. However, according to the propulsion mechanism configured as described above, the first rotational displacement can be offset by the rotation of the first joint member provided to be rotatable around the first orthogonal axis, The second rotational displacement can be offset by the rotation of the second joint member provided so as to be rotatable about the second orthogonal axis. Thus, by canceling the first rotational displacement and the second rotational displacement around the first orthogonal axis and the second orthogonal axis, the rotational displacement around the axis that intersects the propulsion direction can be almost completely canceled. Therefore, it is possible to almost completely prevent the deterioration of propulsion accuracy based on the rotational displacement.

The processing apparatus of the present invention includes the propulsion mechanism and a tool for processing the workpiece, and the second propulsion body is a mounting board on which the workpiece is mounted. .
The measuring apparatus according to the present invention includes the propulsion mechanism and a measuring unit involved in measurement of the object to be measured, and the second propulsion body is a mounting board on which the object to be measured is mounted. Features.

  Since the processing apparatus and the measuring apparatus of the present invention configured as described above include the above-described propulsion mechanism of the present invention, the above-described functions and effects of the propulsion mechanism of the present invention can be achieved.

Next, embodiments of the present invention will be described with reference to the drawings.
<First Embodiment>
FIG. 1 shows a propulsion mechanism 1 according to a first embodiment of the present invention.
In the propulsion mechanism 1 of the first embodiment, the present invention is applied to the configuration of the conventional propulsion mechanism 1 shown in FIG. 5, and the configuration is almost the same as that of the propulsion mechanism 1 shown in FIG. For this reason, the same or corresponding components are denoted by the same reference numerals, and the description thereof is omitted or simplified.

The propulsion mechanism 1 of the first embodiment includes a drive unit 2 (not shown in FIG. 1), a sub table 3, a main table 4, and a hydrostatic joint 5.
The sub-table 3 can be propelled along a predetermined propulsion direction (left-right direction in FIG. 1) by power generated by the motor 21 (power source) of the drive unit 2.
The main table 4 is connected to the sub-table 3 via the hydrostatic joint 5 and can be propelled in conjunction with the sub-table 3.

  The hydrostatic joint 5 is fixed to the disc-shaped first joint member 51 fixed to the end portion (right end portion in FIG. 1) of the sub-table 3 and the end portion (left end portion in FIG. 1) of the main table 4. The disc-shaped second joint member 52 is provided. Here, the sub-table 3 and the first joint member 51 constitute a first propulsion body of the present invention that can be propelled by the power generated by the motor 21, and the main table 4 and the second joint member 52 are The second propulsion unit of the present invention that can be propelled in conjunction with the first propulsion unit is configured.

  Now, the circular end surface 51C of the first joint member 51 and the circular end surface 52C of the second joint member 52 are opposed to each other, and the first opposing surface and the second opposing surface of the present invention, respectively. It is composed. Here, the second propulsion body (the main table 4 and the second joint member 52) can be propelled by the propulsive force that the end surface 52C receives from the end surface 51C.

On the outer peripheral side of the circular end surface 51C of the first joint member 51, a plurality of discharge holes 514 for discharging pressurized air between both end surfaces on the outer peripheral side of the end surface 51C and the end surface 52C are formed, and the center side of the circular end surface 51C Are formed with one suction hole 515 for sucking air between both end faces on the center side of the end face 51C and the end face 52C.
The discharge hole 514 constitutes a fluid discharge means of the present invention that discharges air compressed and pressurized by a compressor (fluid pressurization means of the present invention) not shown between the end face 51C and the end face 52C. Further, a plurality of (for example, eight) discharge holes 514 are formed at equal intervals along the circumferential direction of the circular end surface 51C, and the compressed air can be discharged between the both end surfaces 51C and 52C in a well-balanced manner. It can be done.
The suction hole 515 is a bottomed hole concentric with the circular end surface 51C. A plurality of vacuum supply passages 516 are formed at the bottom of the suction hole 515 and communicated with a vacuum generated by a vacuum pump (vacuum generation means) (not shown). Thereby, the suction hole 515 communicates with the vacuum and constitutes the fluid suction means of the present invention that sucks air between the end face 51C and the end face 52C. Note that a plurality of (for example, eight) vacuum supply paths 516 are formed at equal intervals along the circumferential direction of the bottom (circular surface) of the suction hole 515, and the suction holes 515 are formed at both end surfaces 51C and 52C. The air in between can be sucked in a good balance.

  In the propulsion mechanism 1 configured as described above, the discharge hole 514 of the first joint member 51 discharges pressurized air, so that the end surface 51C of the first joint member 51 and the end surface 52C of the second joint member 52 are not. The contact state is established, and the suction hole 515 of the first joint member 51 sucks air, whereby the end face 51C of the first joint member 51 and the end face 52C of the second joint member 52 are attracted to each other. Thus, since the end surface 51C of the first joint member 51 and the end surface 52C of the second joint member 52 are attracted to each other while maintaining a non-contact state with a predetermined dimension therebetween, the first joint member 51 and The second joint member 52 is connected without contact. Therefore, since the sub table 3 and the main table 4 are connected in a non-contact manner via the hydrostatic joint 5, when the sub table 3 is propelled by the power generated by the motor 21 (left and right in FIG. 1), The main table 4 is driven in conjunction.

<Effects of First Embodiment>
According to 1st Embodiment of the above structures, there can exist the following effects.
Since the sub-table 3 and the main table 4 are connected in a non-contact manner via the hydrostatic joint 5, displacement and vibration along the direction intersecting the propulsion direction generated when the sub-table 3 is propelled and driven by the motor 21. It becomes difficult to be transmitted to the main table 4, and the main table 4 on which a workpiece or the like is placed can be propelled with high accuracy.

  Since the hydrostatic joint 5 is configured only between a pair of opposed surfaces of the end surface 51C of the first joint member 51 and the end surface 52C of the second joint member 52, a conventional propulsion mechanism (Patent Document 1 and FIG. The structure of the hydrostatic joint 5 can be simplified as compared with the propulsion mechanism of FIGS.

  The clearance dimension between the end surface 51C of the first joint member 51 and the end surface 52C of the second joint member 52 that affects the propulsion accuracy of the main table 4 is mainly due to the discharge of pressurized air through the discharge hole 514 and the suction hole 515. Since it is determined by the balance with the suction of air, high processing accuracy is not required for the end face 51C and the end face 52C, and the manufacturing cost can be reduced.

  In order to further improve the propulsion accuracy of the main table 4, it is only necessary to increase the processing accuracy of only one set of opposing surfaces of the end surface 51C of the first joint member 51 and the end surface 52C of the second joint member 52. As precise processing as the conventional propulsion mechanism is not required, the manufacturing cost can be reduced as compared with the conventional propulsion mechanism.

  Pressurized air from the compressor is supplied between the end face 51C of the first joint member 51 and the end face 52C of the second joint member 52 through the discharge hole 514, so that the rigidity of the air between the both end faces 51C and 52C is increased. Since the transmission accuracy of the propulsive force between the both end faces 51C and 52C can be improved, the propulsion accuracy of the main table 4 can be improved.

  Since the suction hole 515 communicates with the vacuum via the vacuum supply path 516, the suction pressure can be remarkably increased, and air can be efficiently sucked into the suction hole 515. By this strong suction pressure, the end surface 51C of the first joint member 51 and the end surface 52C of the second joint member 52 can be strongly attracted to each other, and the rigidity of the air between the both end surfaces 51C, 52C can be increased. Since the transmission accuracy of the propulsive force between the surfaces 51C and 52C can be improved, the propulsion accuracy of the main table 4 can be improved.

  Since the static pressure joint 5 is configured using air, it is not necessary to prepare a fluid (liquid or gas) for configuring the static pressure joint 5 in advance, and labor and cost can be reduced.

  Since the discharge hole 514 discharges pressurized air on the outer peripheral side of both end faces 51C and 52C, it is possible to prevent external air from entering between the both end faces 51C and 52C from the outer peripheral side. Therefore, the suction hole 515 that sucks in air at the center side of both end faces 51C and 52C sucks almost only the pressurized air discharged from the discharge hole 514, and almost sucks in external air that may contain foreign matters such as dust. Absent. Therefore, the possibility that the suction hole 515 sucks in the foreign matter is remarkably reduced, and various problems caused by the suction of the foreign matter, such as clogging of the suction hole 515 and the vacuum supply path 516, a reduction in suction pressure, a failure of the vacuum pump, etc. The occurrence of this problem can be prevented accurately. Further, when foreign matter is mixed between the both end faces 51C and 52C, the foreign matter may damage each of the end faces 51C and 52C. According to the present embodiment as described above, such foreign matter is prevented from being mixed. Thus, damage to the end faces 51C and 52C can be prevented.

  Since the discharge hole 514 discharges pressurized air on the outer peripheral side of both end faces 51C and 52C, the rigidity of the air on the outer peripheral side can be increased. For this reason, the dimension between both end surfaces 51C and 52C can be easily held at an appropriate gap size, and the end surfaces 51C and 52C can be prevented from being inclined. Therefore, since both end surfaces 51C and 52C are held in a posture parallel to each other, the propulsive force can be transmitted between the both end surfaces 51C and 52C with high accuracy, and the propulsion accuracy of the main table 4 can be improved. .

For example, in the conventional propulsion mechanism 1 shown in FIG. 5, when the propulsive force is transmitted from the sub table 3 to the main table 4, the thrust transmission plate portion 512 of the first joint member 51 extends along the normal direction. Great power is added. Here, since the thrust transmission plate portion 512 is a cantilever plate-like member whose end is fixed to the extension plate portion 511, the thrust transmission plate portion 512 is bent by the applied force, and the propulsive force is transmitted smoothly. However, the propulsion accuracy may be deteriorated.
In contrast, in the present embodiment, one circular bottom surface of each of the disk-shaped joint members 51 and 52 is fixed to the end of each table 3 and 4, and the hydrostatic joint 5 is secured by the other circular bottom surfaces 51C and 52C. Is configured. According to such a structure, since one bottom face of each joint member 51 and 52 is firmly supported by the edge part of each table 3 and 4, each joint member 51 and 52 is transmitted with transmission of a propulsive force. Even if a large force (mainly a force along the normal direction of the bottom surfaces 51C and 52C) is applied to the other bottom surfaces 51C and 52C, the joint members 51 and 52 are not easily deformed. Therefore, according to this embodiment, the deformation of the joint members 51 and 52 can be prevented to prevent the propulsion accuracy from deteriorating.

Second Embodiment
Next, the propulsion mechanism 1 according to the second embodiment of the present invention will be described using FIG. 2 with emphasis on the differences from the propulsion mechanism 1 according to the first embodiment. In addition, since the structure of the propulsion mechanism 1 of 2nd Embodiment is almost the same as the structure of the propulsion mechanism 1 of 1st Embodiment, the same code | symbol is attached | subjected about the same or corresponding component between both. Therefore, the description is omitted or simplified.

In the propulsion mechanism 1 of the second embodiment, each of the first joint member 51 and the second joint member 52 is provided so as to be rotatable around an axis that intersects the propulsion direction (left-right direction in FIG. 2). The 1st rotation member and 2nd rotation member of invention are comprised.
The first joint member 51 is provided to be rotatable in the pitching direction around a first orthogonal axis 517 orthogonal to the propulsion direction.
The second joint member 52 is provided to be rotatable in the yawing direction around the second orthogonal axis 521 orthogonal to the propulsion direction and the first orthogonal axis 517.

  In the propulsion mechanism 1 of the second embodiment having such a configuration, when the motor 21 propels and drives the sub-table 3, rotational displacement around an axis that intersects the propulsion direction, that is, pitching (pitch) and yawing (bias). 1), the first joint member 51 that can rotate in the pitching direction is rotated in a direction that cancels the pitching, and the second joint member 52 that can rotate in the yawing direction cancels the yawing. It is turned in the direction to do. Thereby, the effects of pitching and yawing can be canceled out almost completely, and the facing state between the end face 51C of the first joint member 51 and the end face 52C of the second joint member 52 is maintained almost completely. The propulsive force can be smoothly transmitted between the end faces 51C and 52C before and after the yawing occurs, and the deterioration of the propulsion accuracy of the main table 4 based on pitching or yawing can be prevented almost completely.

<Third Embodiment>
Next, a propulsion mechanism 1 according to a third embodiment of the present invention will be described using FIG.
In the propulsion mechanism 1 of the third embodiment, the present invention is applied to the configuration of the conventional propulsion mechanism 1 shown in FIG. 7, and the configuration is almost the same as that of the propulsion mechanism 1 shown in FIG. For this reason, the same or corresponding components are denoted by the same reference numerals, and the description thereof is omitted or simplified.

  The propulsion mechanism 1 of the third embodiment has a hydrostatic joint 5 similar to the propulsion mechanism 1 (see FIG. 1) of the first embodiment. The hydrostatic joint 5 includes a disk-shaped first joint member 51 and a disk-shaped second joint member 52 that face each other. The rod 3 and the first joint member 51 constitute a first propulsion body of the present invention that can be propelled by power generated by the motor 21. Similar to the first embodiment, the first joint member 51 has a plurality of discharge holes 514 for discharging pressurized air between both end faces 51C and 52C, and a suction hole 515 for sucking air between the both end faces 51C and 52C. (Both are not shown in FIG. 3).

  Thus, since the propulsion mechanism 1 of 3rd Embodiment has the static pressure coupling 5 similar to the propulsion mechanism 1 of 1st Embodiment, according to 3rd Embodiment, the effect similar to 1st Embodiment is obtained. Can play.

<Fourth embodiment>
Next, the propulsion mechanism 1 according to the fourth embodiment of the present invention will be described using FIG. 4 with emphasis on differences from the propulsion mechanism 1 according to the third embodiment. In addition, since the structure of the propulsion mechanism 1 of 4th Embodiment is almost the same as the structure of the propulsion mechanism 1 of 3rd Embodiment, it attaches | subjects the same code | symbol about the same or corresponding component between both. Therefore, the description is omitted or simplified.

In the propulsion mechanism 1 of the fourth embodiment, the hydrostatic joint 5 in the third embodiment (see FIG. 3) is changed to one having almost the same structure as the hydrostatic joint 5 in the second embodiment (see FIG. 2). It is.
The hydrostatic joint 5 according to the fourth embodiment is provided so as to be rotatable about the first orthogonal axis 517 in the pitching direction and the first joint member 51 provided to be rotatable about the first orthogonal axis 517 and the second orthogonal axis 521. The second joint member 52 is provided. Thus, in the hydrostatic joint 5 in the fourth embodiment, the first joint member 51 and the second joint member 52 have the respective rotating directions (pitching direction and yawing direction) in the hydrostatic joint in the second embodiment. 5 is different from the respective rotation directions of the first joint member 51 and the second joint member 52 of FIG.

  Thus, since the propulsion mechanism 1 of 4th Embodiment has the static pressure joint 5 similar to the propulsion mechanism 1 of 2nd Embodiment, according to 4th Embodiment, the effect similar to 2nd Embodiment is obtained. Can play.

<Modification>
The present invention is not limited to the embodiment described above, and any modification of this embodiment within the scope that can achieve the object of the present invention is included in the technical scope of the present invention.

  For example, in each of the above embodiments, the main table 4 is propelled and driven only in one direction by one sub-table 3 or rod 3, but by providing a plurality of sub-tables or rods, the main table can be two-dimensionally or You may drive in three dimensions.

  Moreover, in each said embodiment, although the discharge hole 514 which discharges pressurized air and the suction hole 515 which suck | inhales air were formed in the 1st joint member 51, you may form these in the 2nd joint member 52. One of the discharge hole 514 and the suction hole 515 may be formed in the first joint member 51 and the other may be formed in the second joint member 52.

  In each of the above embodiments, the discharge hole 514 is formed on the outer peripheral side of the circular end surface 51C of the first joint member 51 and the suction hole 515 is formed on the center side of the circular end surface 51C. A suction hole 515 may be formed on the outer peripheral side. Further, the discharge hole 514 and the suction hole 515 may be formed over the entire surface of the circular end surface 51C without being formed separately on the outer peripheral side and the center side of the circular end surface 51C.

  Moreover, in each said embodiment, although the pressurized air was discharged in the discharge hole 514 and the static pressure joint 5 using air was comprised by sucking in the air in the suction hole 515, it was not limited to air, but various various things were comprised. The hydrostatic joint 5 may be configured using a fluid such as oil.

  Moreover, in each said embodiment, although the end surfaces 51C and 52C as a 1st opposing surface and 2nd opposing surface of this invention were each made circular, the shape of a 1st opposing surface and a 2nd opposing surface is circular. It is not limited to. For example, it may be rectangular. Moreover, it is not necessary to make the shape of a 1st opposing surface and the shape of a 2nd opposing surface correspond, and a mutually different shape may be sufficient.

  In the second and fourth embodiments, both the first joint member 51 and the second joint member 52 are rotatably provided, but only one of them may be rotatably provided.

  In the second and fourth embodiments, one of the first joint member 51 and the second joint member 52 is provided to be rotatable in the pitching direction, and the other is provided to be rotatable in the yawing direction. The joint members 51 and 52 do not have to be rotatable in the pitching direction or the yawing direction, and may be rotated around an axis that intersects the propulsion direction of the main table 4.

  In the second and fourth embodiments, the first joint member 51 and the second joint member 52 rotate only around one axis, that is, around the first orthogonal axis 517 and the second orthogonal axis 521, respectively. The joint members 51 and 52 may be provided so as to be rotatable around the two orthogonal axes 517 and 521. For example, by fitting a first joint member 51 having a spherical recess that can be fitted to the sphere part into one sphere part that is provided protruding from the end of the sub-table 3, the first joint member 51. May be provided so as to be rotatable around the sphere. At this time, since the first joint member 51 is supported by the sphere and can be rotated in both the pitching direction and the yawing direction, the effects of both pitching and yawing are almost completely achieved by the first joint member 51 alone. Can be offset. For this reason, it is not necessary to provide the 2nd joint member 52 so that rotation is possible, and the structure of the propulsion mechanism 1 can be simplified. In addition, as a mechanism for enabling the joint members 51 and 52 to rotate around the two orthogonal axes 517 and 521, a known mechanism may be appropriately used, and the above-described spherical portion and spherical concave portion are used. It is not limited to the mechanism.

  In the second and fourth embodiments, one of the first joint member 51 and the second joint member 52 is provided to be rotatable in the pitching direction, and the other is provided to be rotatable in the yawing direction. In particular, when it is desired to completely cancel the influence of only the pitching, both the joint members 51 and 52 may be provided so as to be rotatable in the pitching direction, and particularly when the influence of only the yawing is to be canceled more completely. Both joint members 51 and 52 may be provided so as to be rotatable in the yawing direction.

  Moreover, although each said embodiment demonstrated the propulsion mechanism 1 which propels the main table 4, this invention is the propulsion mechanism 1 in any one of the said 1st Embodiment to 4th Embodiment, and a to-be-processed object. The main table 4 is also applicable to a processing apparatus that is a mounting board on which the workpiece is mounted, and the first to fourth embodiments are also applicable. The propulsion mechanism 1 according to any one of the above and a measuring unit that is involved in the measurement of the object to be measured, and the main table 4 can be applied to a measuring device that is a mounting board on which the object to be measured is placed. is there. In addition, this invention is applicable not only to a processing apparatus and a measuring apparatus but to various apparatuses provided with the propulsion mechanism 1, especially an apparatus that requires high propulsion accuracy.

It is a front view which shows the propulsion mechanism which concerns on 1st Embodiment of this invention. It is a front view which shows the propulsion mechanism which concerns on 2nd Embodiment of this invention. It is a front view which shows the propulsion mechanism which concerns on 3rd Embodiment of this invention. It is a front view which shows the propulsion mechanism which concerns on 4th Embodiment of this invention. It is a front view which shows an example of the conventional propulsion mechanism. It is a front view which shows an example of the conventional propulsion mechanism. It is a front view which shows an example of the conventional propulsion mechanism.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 ... Propulsion mechanism 2 ... Drive part 3 ... Subtable, rod 4 ... Main table 5 ... Static pressure joint 21 ... Motor 51 ... First joint member 52 ... Second joint member 51C ... End face 52C ... End face 514 ... Discharge hole 515 ... Suction hole 517 ... first orthogonal axis 521 ... second orthogonal axis

Claims (6)

A first propulsion body capable of propelling along a predetermined propulsion direction by power generated by a power source;
Static圧継hand is connected to the first propellant through, in conjunction with the first propellant and a second propellant capable propelled along the propulsion direction,
The hydrostatic joint is
A plate-like first joint member provided in the first propellant;
With respect to the first joint member, a plate-like second joint member provided on the second propulsion body so that the plate surfaces face each other,
When the plate surfaces of the first joint member and the second joint member are the first facing surface and the second facing surface, respectively,
In either one of the first joint member and the second joint member,
A discharge hole for exhaling air between the first facing surface and the second facing surface, and bringing the first facing surface and the second facing surface into a non-contact state;
In communication with the vacuum generated by the vacuum generating means for generating a vacuum, the air between the first opposing surface and the second opposing surface is sucked, and the first opposing surface and the second opposing surface are in a non-contact state And suction holes are formed to attract each other,
At least one of the first joint member and the second joint member is
A propulsion mechanism provided so as to be rotatable about an axis that intersects the propulsion direction . The propulsion mechanism according to claim 1,
Fluid pressurizing means for pressurizing air is provided;
The discharge holes, spit pressurized pressurized air at said fluid pressure means between said first opposing surface second opposing surfaces,
A propulsion mechanism characterized by that. In the propulsion mechanism according to claim 1 or claim 2 ,
The discharge hole discharges air between the opposing surfaces on the outer peripheral side of the first opposing surface and the second opposing surface,
The suction hole sucks in air between the opposing surfaces on the center side of the first opposing surface and the second opposing surface,
A propulsion mechanism characterized by that. In the propulsion mechanism according to any one of claims 1 to 3 ,
It said first coupling member and the second coupling member, their respective pivotably mounted around an axis intersecting the propulsion direction,
The first joint member is rotatably provided around a first orthogonal axis orthogonal to the propulsion direction,
The second joint member is provided to be rotatable around a second orthogonal axis orthogonal to the propulsion direction and the first orthogonal axis.
A propulsion mechanism characterized by that. A propulsion mechanism according to any one of claims 1 to 4 ,
A tool for processing a workpiece,
The second propulsion body is a placement board on which the workpiece is placed.
A processing apparatus characterized by that. A propulsion mechanism according to any one of claims 1 to 4 ,
Measuring means involved in the measurement of the object to be measured,
The second propulsion body is a mounting board on which the object to be measured is mounted.
A measuring device.

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