JP4785790B2 - Polarization conversion element - Google Patents

Description

  The present invention relates to a polarization conversion element that realizes high light utilization efficiency and a reduction in the number of optical elements.

Typical polarization control elements include a polarization selection element, a phase shifter, and an optical rotation element.
The polarization selection element has two propagation directions and two absorption characteristics with respect to the incident angle by providing anisotropy in propagation characteristics and absorption characteristics with respect to two orthogonal directions, and transmitting only one component of the polarization direction of incident light. An element having a function of separating the output angle of each polarization component by utilizing the difference in reflectance and transmittance of the polarization component, such as a polarization beam splitter (polarization separation element).

  The phase shifter is an element that converts linearly polarized light into circularly polarized light by using the anisotropy of the refractive index of two orthogonal polarization components, and rotates the plane of polarization by 90 degrees. A plate and a half-wave plate.

  The optical rotatory element is an element that arbitrarily rotates the polarization plane of linearly polarized light and emits the linearly polarized light as it is. Such a polarization control element is used, for example, for turning on / off a pixel of a liquid crystal panel or an organic EL (electroluminescence) display. In addition, there are optical measurement techniques such as ellipsometry (polarization analysis), laser interferometers, optical shutters, etc., which are used in various optical instruments and measurement instruments. In particular, the demand for image projection devices such as liquid crystal projectors is increasing for optical rotatory elements.

  Many of the polarization selective elements used in liquid crystal panels and the like have absorption dichroism by dyeing and adsorbing dichroic materials such as iodine and organic dyes on a substrate film such as polyvinyl alcohol, and by highly stretching and orienting them. To be expressed.

  By the way, a polarization control element using an organic material is easily affected by heat, and has problems such as a decrease in transparency and a burn, and the amount of irradiation light cannot be increased. In addition, when the operating temperature conditions are severe and the projector is used in a liquid crystal projector or the like, there has been a problem to be solved, such as a cold air mechanism being required, making it difficult to reduce the size of the apparatus, and causing image quality defects due to dust adhesion.

Further, as a polarization separation element, a polarization beam splitter in which dielectric multilayer films having different refractive indexes are alternately laminated on a glass prism or a plane substrate surface is also known. By setting the film structure and incident angle so that the Brewster angles are at each interface of the film, P-polarized light (polarized light parallel to the incident surface) goes straight, and S-polarized light (incident on the incident surface). (Vertical polarization) is reflected at right angles, so that the polarization can be separated.
However, compared with a prism type polarizer using the birefringence of the crystal, there is a defect that the separation performance is low (ten and several dB). In addition, phase shifters that use the anisotropy of the refractive index use optical crystal materials that exhibit birefringence. Usually, expensive anisotropic crystals such as rutile and calcite are precisely shaped into a wedge or prism type. It is realized by performing proper polishing. Such an element is extremely expensive, difficult to miniaturize, and has a problem that a usable wavelength region is limited.
In addition, the film thickness, that is, the optical path difference is adjusted by bonding the optical crystal material film, and the polarization state is controlled. Therefore, there is a problem that the dependence on the optical crystal material is strong and the degree of freedom of polarization controllability is low. there were.

  On the other hand, a polarization conversion element combined with the polarization control element as described above is widely used for improving the light utilization efficiency. The polarization conversion element is an element for making available nearly 100% of incident light by separating two orthogonal polarization components, rotating the polarization plane of one linear polarization component by 90 degrees, and synthesizing again. It is.

  Conventionally, in order to realize such an element configuration, a plurality of polarization control elements are required, and it is difficult to reduce the number of optical elements, and there has been a problem in price reduction and size reduction.

In response to the above problems, a wire grid polarizer in which fine wires of gold or aluminum are formed on a transparent substrate has been proposed as a polarization control element made of an inorganic material that is excellent in mass production, can be manufactured at low cost, and has excellent heat resistance. ing. This polarizer has been conventionally known as a polarizing element that functions with respect to light having a wavelength longer than 2.5 μm, but a wire grid that functions even at a visible wavelength (400 to 700 nm) due to recent advances in microfabrication technology. A technique related to the structure is disclosed (for example, see Patent Document 1).
In addition, the code | symbol in description of patent documents 1-9 and the code | symbol in description of best embodiment of invention of this application are unrelated.

The main purpose in Patent Document 1 is to provide a wire grid polarizer that can provide high transmission and reflection efficiency over the entire visible spectrum. Further, a secondary object in Patent Document 1 is to provide a wire grid polarizer capable of realizing high efficiency over a wide range of incident angles.
As shown in FIGS. 27A to 27C, the solution is that the wire grid polarizer has a plurality of elongated elements 1240 supported on the substrate 1210, and has a refractive index lower than that of the substrate. A region 1250 having a gap is disposed between the element and the substrate to reduce the longest wavelength at which resonance occurs.

27A to 27C are manufacturing process diagrams of a wire grid polarizer (prior art 1).
Such a wire grid polarizer can form a fine grid structure with a visible wavelength by forming an aluminum thin film on one surface of a transparent substrate and pattern-etching it. At this time, with respect to the fine line direction of the fine grid, the light whose polarization plane is orthogonal to the light is transmitted, and the light whose polarization plane is parallel is reflected. As a result, the incident angle dependency is relatively small, and a relatively good polarization separation function is provided for the conical ray group.

Further, as a similar inorganic material polarization control element, a technique using a photonic crystal structure is known (for example, see Patent Document 2).
The problem in Patent Document 2 is to make a polarization separation element using a photonic crystal polarizer. The solution is to form a polarizer 13 by alternately laminating wavelike transparent thin films 11 having different refractive indexes on the slope of the glass substrate 10 formed in a wedge shape, as shown in FIG.
FIG. 28 is an explanatory diagram of an inorganic material polarization control element (prior art 2).
In the figure, when the wedge angle is θ and light is incident from the side where the polarizer is not formed, the incident angle with respect to the polarizer is θ, and TM polarized light is transmitted through the polarizer, but is refracted at that time. Go in the direction of φ1. If the refractive index of air is n ₀ and the refractive index of the substrate is n, then φ 1 = sin ⁻¹ (n sin θ / n ₀ ) −θ.

On the other hand, the TE polarized light is reflected by the polarizer, reaches the back surface of the substrate 10, refracts and goes out. At this time, since it is incident on the back surface at an incident angle 2θ, the emission angle φ 2 = sin ⁻¹ (n sin 2θ / n ₀ ). Therefore, the angle formed by the two outgoing lights can be controlled by the refractive index n and the wedge angle θ of the substrate. For example, when n = 1.5 and θ = 20 °, the two beams are orthogonal to each other. .

A polarization separation element and a manufacturing method thereof, and a configuration of a polarization conversion element realized by a combination of a composite structure of a phase shifter and a polarization separation element and a microlens array are known (see, for example, Patent Document 3).
The problem in Patent Document 3 is to realize video display with high light source efficiency, that is, high luminance or low power consumption. FIG. 29 is a diagram showing a configuration of a polarization separation element (prior art 3).

  In FIG. 29, the light source light 1 is non-polarized light in which various polarized lights are mixed, and this light converges on the working surface of the splitter 4 through each lens element of the lens plate 2 over the entire surface. Then, the splitter 4 passes the P wave component as it is through the working surface.

  On the other hand, the S-wave component is separated by the working surface of the splitter 4 and reflected by the prism 5, and is converted into polarized light at the exit surface, for example, a 90 ° conversion device by a combination of a mirror or a right-angle prism, or a half wavelength. By passing the phase plate (half-wave plate 6 in Patent Document 3), the S wave becomes a P wave and is emitted in parallel with the transmitted light of the splitter 4. As described above, all the light incident on the lens element of the lens plate 2 is emitted as polarized light of the P wave by the polarization conversion plate 3 and supplied to the liquid crystal display plate 10.

  Regarding the polarization control element, there are the following related techniques that the present inventors have proposed so far.

A polarization control element and a polarization control method of the polarization control element (see, for example, Patent Document 4).
The purpose of Patent Document 4 is to provide a polarization control element having excellent heat resistance and light resistance, high light transmittance or high reflectance, and a polarization control element having a high degree of design freedom.
FIGS. 30A to 30D are explanatory views of a conventional polarization control element (prior art 4).
As shown in FIG. 30 (a), the solution is a metal composite structure composed of two or more metal microstructures arranged in a region below the wavelength of incident light and periodically arranged. 6 is formed on the support substrate, and the structure in which the interaction by the near-field light works, the light transmittance is high, a sufficient phase difference can be given, and the heat resistance and It can be set as the polarization control element excellent in light resistance.

Examples thereof include a polarization control element (for example, see Patent Document 5).
The purpose of the polarization control element is to provide a polarization control element that has a high light transmittance, can provide a sufficient phase difference, has a high degree of design freedom, and is excellent in heat resistance and light resistance.
As shown in FIG. 30 (b), the solution means that a metal structure (metal particles 2) smaller than the wavelength of incident light is formed on the flat surface of the transparent glass substrate 1 from the wavelength of incident light. The polarization control element 10 having a high degree of design freedom, high heat resistance and light resistance, which can provide a sufficient phase difference, has a high light transmittance by being two-dimensionally arranged at a small distance. Is. In addition to a flat substrate, there is a configuration in which a metal structure is provided on a lens or a microlens.

Examples include a polarization control element and an optical element (see, for example, Patent Document 6).
An object of the polarization control element and the optical element is to provide a polarization control element having excellent heat resistance while realizing a wave plate that generates a phase difference.
As shown in FIG. 30 (c), the solution means that metal particles (first metal particles 2 and second metal particles) made of two or more kinds of metals or alloys are formed on a transparent dielectric substrate 1 such as a glass substrate. By forming a pattern of metal particles 3) continuously, a polarization plate that generates a phase difference in the polarization component of transmitted light or reflected light is realized, and also has excellent heat resistance and polarization control with a high degree of freedom in designing the polarization state. An element 10 can be provided.

Examples thereof include a polarization control element (see, for example, Patent Document 7).
The purpose of the polarization control element is to make the support substrate on which the metal microstructures are arranged have a sub-wavelength structure, generate strong evanescent light on the substrate surface layer, and combine the near-field light and evanescent light to emit light. In addition, light absorption is generated more strongly, and the control performance of the light characteristics is improved.
As shown in FIG. 30 (d), the object is to place a metal composite structure composed of metal microstructures 6 arranged in a region below the wavelength of incident light and periodically arranged on a glass substrate. 1 is a polarization control element 10 formed on a surface of a glass substrate 1 having a periodic structure whose height is periodically modulated, the periodic structure having a period smaller than the wavelength of the incident light. Has been.
Moreover, the following technique is mentioned as a polarization control element of the structure using the magnetic material relevant to this invention.

A magneto-optical element is mentioned (for example, refer patent document 8).
The purpose of the magneto-optical element is to provide a magneto-optical element that has a large optical rotation angle and excellent in high-speed response, and that can display a bright image, high contrast, and can be used for color images and moving images. There is.
FIG. 31 is a sectional view of a magneto-optical element (prior art 5).
As shown in FIG. 31, the solution is a laminate of a transparent non-magnetic single crystal substrate 11 and a single crystal transparent magnetic layer 12 having magnetic anisotropy perpendicular to the layer surface formed on the surface. The upper and lower sides of the first and second layers are a pair of two-layered dielectric films having a refractive index different from that of the single crystal transparent magnetic layer 12, and the two-layered dielectric films are laminated in one or more pairs. The dielectric multilayer films 13a and 13b are sandwiched symmetrically in the vertical direction. The polarization axes are rotated relative to each other above and below the device composed of the second dielectric multilayer film 13b / transparent nonmagnetic single crystal substrate 11 / single crystal transparent magnetic layer 12 / first dielectric multilayer film 13a. First and second polarizers 14a and 14b forming a pair of polarizers are provided to face each other.

Another example is a magneto-optical element as shown in FIG. 32 (Prior Art 6: see, for example, Patent Document 9).
FIG. 32 is a sectional view of another magneto-optical element. As shown in FIG. 32, a groove structure is formed on a transparent substrate 1 and a film made of a ferromagnetic material is formed on the side wall surface 2 thereof, thereby realizing a magneto-optical element having both a polarizing layer and a magnetic layer. This magneto-optical element is excellent in transparency, and can be repeatedly recorded, read (recorded reproduction) and erased by a magnetic head, can also be used as a polarizer, and can be imaged by applying a magnetic field and light. It is also suitable for applications such as displays that can visualize It is also suitable for applications such as spatial light modulators and magnetic field sensors.
Special table 2003-502708 gazette JP 2003-279746 A JP 07-294906 A JP 2006-330105 A JP 2006-330106 A JP 2006-330107 A JP 2006-330108 A JP 2001-311925 A Japanese Patent No. 3853512

  The wire grid polarizer disclosed in Patent Document 1 has only a polarization selection function, and an optical element using a phase difference between two orthogonal polarization components such as a wave plate cannot be realized. In order to realize the polarization conversion function, it is necessary to align one polarization component of the two orthogonal polarization components with the other, and one polarization component separated by this optical element is passed through the wave plate. An optical system for 90 ° rotation and recombination is required outside, complicating the configuration of the apparatus, and there are problems in increasing the number of optical elements and reducing the size of the apparatus.

  In addition, the polarization control element using the photonic crystal structure disclosed in Patent Document 2 obtains its characteristics using the light interference effect, and thus has a periodic fine structure over a large area. There is a problem that extremely high processing accuracy is required. Further, it is an element that separates two polarization components according to the emission angle, and in order to realize the polarization conversion function, a mechanism for rotating one polarization component and recombining it is required outside.

  Patent Documents 3 to 9 also have a polarization separation function, a phase shift function, and an optical rotation function, but the polarization conversion function cannot be realized unless an optical system that combines these functions is configured. There were problems in reducing the number, reducing the price, and reducing the size of the optical device. These problems are elements in which the conventional polarization control element and the polarization conversion element independently modulate the amplitude or phase of two orthogonal polarization components by the difference in film thickness or absorption rate. This is because it does not have a mechanism for converting only the component to the other.

  Accordingly, an object of the present invention has been made in view of the above problems, and provides a polarization conversion element having different polarization control functions for two orthogonal polarization components.

  In order to solve the above problems, the invention according to claim 1 has at least a structure in which a pair of magnetic structures is arranged two-dimensionally on or inside a support, and the pair of magnetic structures is: It is characterized by having main magnetization components that are adjacent to each other at an interval equal to or less than the wavelength of incident light and that are parallel to a straight line connecting the central points of the magnetic structure and are opposite to each other.

  The invention described in claim 2 is the invention described in claim 1, characterized in that the width and depth of the magnetic structure are set to be equal to or less than the wavelength of incident light.

  The invention described in claim 3 is the invention described in claim 1, characterized in that the magnetic structure is constituted by a line pattern made of a magnetic material having a width equal to or smaller than the wavelength of incident light.

  The invention according to claim 4 is the invention according to any one of claims 1 to 3, wherein a conductive member is disposed on the support so as to contact the pair of the magnetic structures. And

  The invention described in claim 5 is the invention described in claim 4, characterized in that the conductive member is formed of a flat film.

  The invention described in claim 6 is the invention described in claim 4, characterized in that the conductive member is constituted by a two-dimensional pattern having a size equal to or smaller than the wavelength of incident light.

  A seventh aspect of the present invention is the fourth aspect of the present invention, wherein the conductive member is constituted by a line pattern having a width equal to or less than a wavelength of incident light.

  The invention according to claim 8 is the invention according to any one of claims 1 to 7, wherein a multiple reflection structure is provided on at least one of an upper side or a lower side of the pair of magnetic structures and the conductive member. It is characterized by having arranged.

  The invention according to claim 9 is the invention according to any one of claims 1, 2, 4 to 8, wherein the magnetic structure has a single magnetic domain structure.

  According to the present invention, the magnetic nanostructure pair in which the directions of the main components of the magnetization vector are opposite to each other is arranged on the support or inside the support, so that only one of the two orthogonal polarization components of the incident light is orthogonal. Conversion to the other is possible, and the polarization conversion function is realized only by the fine structure of the magnetic material in the two-dimensional plane, so that the number of optical elements can be reduced and the optical device can be downsized.

(First embodiment: claims 1, 2 and 9)
The polarization conversion element according to the first embodiment of the present invention will be described with reference to FIGS.
FIG. 1 is an explanatory diagram showing the function of the polarization conversion element according to the first embodiment of the present invention.
In FIG. 1, 1 indicates an incident polarization state (random deflection), 2 indicates an example of a polarization conversion element according to the present invention, and 3 indicates an output polarization state (linear polarization).
The polarization conversion element 2 according to the present invention converts the polarization component in the y-axis direction into the x-axis by the interaction of light with a magnetic structure having a size equal to or smaller than the wavelength of incident light included in the element with respect to incident random polarized light. By converting into the direction, most of the incident light is converted into linearly polarized light having a polarization plane in the x-axis direction.

A configuration of an example of the polarization conversion element according to the present invention will be described with reference to FIGS.
2A is a cross-sectional view of the polarization conversion element according to the present invention, and FIG. 2B is a plan view of FIG.
As shown in FIG. 2A, this polarization conversion element is formed on a support substrate 201 serving as a support from a magnetic material having a size that is equal to or smaller than the wavelength of incident light (a size perpendicular to the incident light). As shown in FIG. 2 (b), a pair of magnetic nanostructures separated by a gap distance g is combined into one unit (the magnetic structure of the magnetic structure). The unit 203 is two-dimensionally arranged.
In the polarization conversion element, as will be described later, the main components of the two magnetic nanostructures are magnetized in parallel and opposite directions with respect to the straight line connecting the center points.

  Here, the main component of the polarization conversion element is defined as a component in which the direction of the magnetization vector is oriented at an angle of at least 45 ° or less with respect to a straight line connecting the centers. The reason why the size of the magnetic nanostructure needs to be smaller than the wavelength of incident light is to prevent a spatial intensity distribution from occurring in the light transmitted or reflected by the polarization conversion element.

  2A and 2B exemplify the case where the magnetic nanostructure is a disk-shaped structure having a diameter d, the present invention is not limited to this, but a spherical shape, Various shapes such as a hemispherical shape, a triangular / square prism shape, a conical shape, and an elliptical column shape can be used. For these various shapes, the size of the magnetic nanostructure cannot be strictly defined.

Therefore, the size of the magnetic nanostructure is defined as shown in FIGS.
3A to 3E are plan views for explaining various shapes of the magnetic nanostructure.
In the case of a magnetic nanostructure having a spatially asymmetric shape, where d is the diameter of a circle having the same area as the magnetic nanostructure with respect to the two-dimensional shape viewed from above (FIG. 3A). The major axis d1 and minor axis d2 of an ellipse having the same area as the magnetic nanostructure are defined as the size of the magnetic nanostructure (FIG. 3B). At this time, the major axis d1 of the ellipse is set smaller than the wavelength of the incident light. When the planar shape of the magnetic nanostructure is triangular as shown in FIG. 3C, the size is the diameter d of a circle having the same area, and the planar shape of the magnetic nanostructure is rectangular as shown in FIG. In this case, the major axis d1 and the minor axis d2 of the ellipse having the same area are used. When the planar shape of the structure is a deformed ellipse as shown in FIG. 3E, the major axis d1 and the minor axis d2 of the ellipse having the same area are used. .

The support substrate used in this polarization conversion element is preferably made of a material having low absorption at a wavelength in the visible region in order to increase the efficiency when constituting a transmissive element, such as quartz glass, BK7, Pyrex (registered trademark). ) And other optical crystal materials such as CaF ₂ , Si, ZnSe, and Al ₂ O ₃ .
2A and 2B show examples using the support substrate 201. However, the protection of the magnetic structure surface, the selection of the operating wavelength by adjusting the surrounding refractive index, and the efficiency due to the reflection at the substrate interface are shown. In order to avoid a decrease in the thickness, the surface may be covered with a support film. A transparent dielectric material similar to the material of the support substrate 201 is also suitable for the material constituting the support film.

FIG. 4 shows an example in which a support body 402 is configured by a support substrate 201 and a support film 401.
FIG. 4 is a cross-sectional view for explaining the configuration of the first embodiment of the polarization conversion element according to the present invention.
The support film 401 may be provided with a total reflection coating using a dielectric multilayer film. Moreover, the structure which embedded the magnetic structure inside the support substrate 201 by patterning support substrate 201 itself may be sufficient.

Next, the magnetic material constituting the magnetic nanostructure will be described.
In the present polarization conversion element, the magnetic nanostructure 202 needs to have a specific magnetization vector orientation. For this purpose, the material needs to be ferromagnetic at room temperature, and Fe, Co, Ni, and the like can be used. Also, it is a general magnetic material, such as ferrite such as γ-Fe ₂ O ₃ , Fe ₃ O ₄ , FeNx, Ba ferrite, Co ferrite, garnet such as rare earth iron garnet, composite material such as PtCo, FeTb, FePtCu, etc. There may be.

It is known that when the size of the magnetic material is about 20 nm or less, the magnetic domain structure in the magnetic body takes a single domain structure. In this case, since the magnitude of the magnetization vector per unit area increases, if the size of the magnetic nanostructure is set to 20 nm or less, the magneto-optical effect becomes remarkable and further advantageous. Such a magnetic nanostructure can utilize various production methods.
For example, as a method for producing a magnetic nanostructure having a wavelength equal to or less than a wavelength, a method using a self-organized arrangement using a diblock copolymer is known (for example, see Reference 1).
Reference 1: Toshiba Review Vol. 57, no. 12 (2002)

  The diblock copolymer is a composite polymer in which two or more kinds of different polymer chains are combined. In this production method, polystyrene and polymethyl methacrylate are used. A film made of the above-described magnetic material is formed on a supporting substrate by a sputtering method, and a diblock copolymer is applied by spin coating. Thereafter, by performing an annealing treatment, the diblock polymer causes microphase separation inside, and a self-organized fine pattern can be formed. By controlling the length of the polymer chain, it is possible to produce a periodic structure of tens of nanometers to several hundreds of nanometers.

  Since polystyrene and polymethylmethacrylate that form the diblock polymer have different etching resistances, a film made of a magnetic material formed under the pattern by performing etching using the pattern formed by this self-assembly as a mask. The pattern is transferred to. The two-dimensional arrangement of magnetic nanostructures or units made of magnetic nanostructures can be done by patterning the substrate on which the fine periodic structure is formed in advance by patterning a mold called a mold using a nanoimprint method that applies heat to the substrate. Can be done.

FIG. 5 is an explanatory diagram for explaining a method for producing a magnetic nanostructure, and is an explanatory diagram of a magnetic recording medium using FePtCu magnetic dots, cited from Reference 1, in which magnetic dots are periodically formed in the groove portion. It is arranged.
In addition to using a self-organized structure, direct drawing using electron beam lithography, which is a general microfabrication process, and batch exposure using DUV (far ultraviolet) / EUV (deep ultraviolet) lithography It is possible to form the same magnetic nanostructure by using an artificial fine pattern manufacturing technique by a nanoimprint processing technique or the like.

Next, the direction of the magnetization vector of the magnetic nanostructure constituting the polarization conversion element will be described with reference to FIGS.
FIGS. 6A and 6B are explanatory diagrams of the direction of the magnetization vector in the pair of magnetic nanostructures.
Since the magnetic nanostructure produced in a self-organized manner as described above generally has a random magnetization vector orientation, by applying a magnetic field in a specific direction locally using a magnetic recording head, The pairs of magnetic nanostructures can be oriented to have magnetization vectors in opposite directions.

  The magnetic recording head uses an electromagnet having a structure in which a coil is wound around an iron core, which is used for recording on an in-plane recording type hard disk, and the direction of the magnetization vector can be aligned in a predetermined direction depending on the direction of the current flowing through the coil. Is possible. As shown in FIGS. 6 (a) and 6 (b), the magnetization directions are parallel to the straight line connecting the centers of the magnetic nanostructures represented by dotted lines in the figure and have opposite directions. If the angle is 45 ° or less with respect to a straight line connecting at least the centers, the polarization anisotropy with respect to the parallel / vertical components of the magnetic dot pair arrangement direction can be obtained.

  FIG. 6A shows the case where the magnetization direction is directed to the adjacent direction of the magnetic nanostructure, and FIG. 6B shows the case where the magnetization direction is directed outward. Even so, the same polarization conversion function can be realized. The direction of the magnetization vector may be controlled by a method other than the method using the magnetic recording head. For example, after making a fine pattern with a magnetic material having a different Curie temperature and magnetizing the whole in one direction at a temperature higher than the Curie temperature of both materials, one magnetic material having a lower Curie temperature is By magnetizing at a slightly high temperature, it is possible to align the magnetization directions of the large-area magnetic structure at once.

A two-dimensional arrangement method of the above-described pairs of magnetic nanostructures (units) will be described with reference to FIGS.
Individual units need to be well separated from the spacing of the magnetic nanostructures within the unit. 7-12 is explanatory drawing which shows the example of the two-dimensional arrangement | sequence of the magnetic nanostructure distribute | arranged on the support substrate, and its unit. FIG. 7 is a plan view showing an example in which the units are arranged on the lattice points of the square lattice arrangement, and FIG. 8 is a plan view showing an example of the arrangement of the units on the lattice points in the square lattice arrangement. FIG. 5 is a plan view showing an example in which units are arranged on lattice points of a hexagonal lattice arrangement.

  FIG. 10 is a plan view showing an example (line arrangement) in which the units are arranged on the line in a direction orthogonal to the line. FIG. 11 is a unit of the magnetic structure arranged on the line in a direction parallel to the line. It is a top view which shows an example (line arrangement | sequence) which arranged these by equal intervals. FIG. 12 is a plan view showing an example (random arrangement) in which units are randomly arranged in a two-dimensional plane. When the two-dimensional array has a periodic array structure as shown in FIGS. 7 to 11, depending on the configuration of the present polarization conversion element, an angle dependency and a wavelength dependency occur, and the symmetry depends on the purpose of use of the polarization conversion element. It is possible to adjust the characteristics, period, pitch and the like. Even in the case of random arrangement, the polarization conversion function can be obtained as long as the orientation of the units by all the magnetic nanostructures is aligned.

Next, a numerical simulation performed for confirming the operation of the polarization conversion element will be described with reference to FIGS. 13 (a), 13 (b), and 14. FIG. The numerical simulation used a finite difference time domain method (FDTD method) in which Maxwell's equations describing the time-space response of an electromagnetic field are differentiated into a time domain and a spatial domain.
FIG. 13A is a cross-sectional view illustrating a numerical simulation model, and FIG. 13B is a plan view of FIG. As shown in the figure, the diameter of the disk-shaped magnetic nanostructure was set to 100 nm, the height was set to 70 nm, and the gap distance between the two magnetic nanostructures was set to 20 nm.
Further, since the value of the optical constant of the magnetic material is not well known, the magnetic material has the same optical constant as that of Au (at a wavelength of 500 nm, refractive index n = 0.976, extinction coefficient k = 1.855). The dielectric tensor values were calculated from the Drude model describing the behavior of electrons in the substance and given as ε ₁ and ε ₂ below.

The subscripts 1 and 2 of the dielectric tensor indicate the two disks in FIG. 13B, respectively, and the direction of magnetization is expressed by the difference in the sign of the off-diagonal component. For such a magnetic nanostructure model, the polarization of the incident plane wave is linear y-polarization perpendicular to the magnetic nanostructure alignment direction, and a straight line parallel to the alignment direction. Calculation was performed for the case of “x-polarized light incidence”, which is polarized light. Further, in order to quantitatively evaluate the polarization conversion function from the calculation results, the degree of polarization conversion with respect to the transmitted light component was defined as in the following formulas (1) and (2).
(Degree of polarization conversion) = I _xy / (I _xx + I _xy ) (when x-polarized light is incident) (1)
(Degree of polarization conversion) = I _yx / (I _yy + I _yx ) (in the case of y-polarized light incident) (2)

Here, I _xx , I _xy , I _yy , and I _yx are the transmission intensity of the x component when x polarized light is incident, the transmission intensity of the y component when x polarized light is incident, and the y component when y polarized light is incident, respectively. The transmission intensity and the transmission intensity of the x component when y-polarized light is incident are shown.
Therefore, the polarization conversion degree represents the ratio of the polarized light component orthogonal to the incident linearly polarized light in the transmitted light.

  FIG. 14 is a diagram showing the calculation result of the degree of polarization conversion in the case of incident x-polarized light and incident y-polarized light, and shows the dependence on the wavelength of incident light. In FIG. 14, the horizontal axis indicates the wavelength, and the vertical axis indicates the degree of polarization conversion. From the result of FIG. 14, it can be seen that in the vicinity of the wavelength of 385 nm, the ratio of the transmitted light intensity when x-polarized light is incident and the transmitted light intensity when y-polarized light is incident is about 14 times. It was confirmed that

The qualitative principle that causes the polarization conversion function can be understood as follows.
Due to the opposite magnetization directions of the magnetic nanostructure, the Lorentz force acting between the polarization and magnetization of the incident electric field exerts a reverse force on the two magnetic nanostructures and moves the charge in the magnetic body. Let This bias of charge interacts due to the proximity of the pair of magnetic nanostructures and causes secondary electric field vibration in the direction in which the magnetic nanostructures are arranged, that is, in the direction perpendicular to the polarization direction of the incident light. Cause it to occur. Since the Lorentz force is maximized when y-polarized light is incident, an electric field is generated in the direction of the x-axis where the magnetic nanostructures are arranged, and light of orthogonal polarization components is induced.
In the present polarization conversion element, by selecting the size, height, and material of the magnetic nanostructure optimally, it is possible to further select the operating wavelength range and to improve the polarization conversion efficiency.

  As described above, this polarization conversion element has a mechanism for non-uniformly converting one of two orthogonal polarization components to the other, and therefore, a plurality of optical elements are combined. Thus, the polarization conversion function is realized, and the number of optical elements can be reduced, and the optical device can be reduced in size and price.

(Second Embodiment: Claims 1, 2, 4, 5, 9)
The polarization conversion device according to the second embodiment of the polarization conversion device of the present invention will be described with reference to FIGS. 1, 6A and 6B, FIGS. 7 to 12, and FIGS. To do.
As shown in FIG. 1, the polarization conversion element according to the second embodiment of the present invention is an element that emits incident random polarized light in alignment with linearly polarized light, and has a configuration different from that of the first embodiment. It is what has.
The configuration of the polarization conversion element of the present invention will be described with reference to FIGS.
FIG. 15A is a cross-sectional view of a second embodiment of the polarization conversion element of the present invention, and FIG. 15B is a plan view of FIG.
As shown in FIG. 15A, this polarization conversion element has the same basic configuration as that of the first embodiment, but is a flat conductive film 1501 in contact with the bottom of the magnetic nanostructure 202. The magnetic nanostructure 202 interacts with the incident light through the conductive member, so that the polarization conversion efficiency can be increased.

  The directions of the magnetization vectors of the two magnetic nanostructures 202 are opposite to each other in a direction parallel to a straight line connecting the centers of the magnetic nanostructures, as shown in FIGS. It needs to be configured in the direction. The shape of the magnetic nanostructure 202 exemplifies the columnar magnetic nanostructure 202 in FIGS. 15A and 15B, but the present invention is not limited to this, and a spherical shape, Various shapes such as a hemispherical shape, a triangular / square prism shape, a conical shape, and an elliptical column shape can be used. In addition, as shown in FIGS. 7 to 12, the magnetic nanostructure 202 pairs (units) can be arranged in various ways such as a square lattice, a rectangular lattice, a hexagonal lattice, a line array, and a random array.

The support substrate 201 used in the present polarization conversion element is the same as that of the first embodiment. When a transmissive element is formed, quartz glass, borosilicate such as BK7 and Pyrex (registered trademark) are used. An optical crystal material such as glass, CaF ₂ , Si, ZnSe, Al ₂ O ₃ is used.

FIG. 15 shows an example in which a magnetic nanostructure is configured on a support substrate, but a film structure made of a transparent dielectric material similar to the material of the support substrate 201 and a substrate are patterned to embed a magnetic material. It may be a structure.
The magnetic material constituting the magnetic nanostructure is preferably a material exhibiting ferromagnetism at room temperature, such as Fe, Co, Ni, γ-Fe ₂ O ₃ , Fe ₃ O ₄ , FeNx, Ba ferrite, Co ferrite and the like, Garnet such as rare earth iron garnet, PtCo, FeTb, FePtCu and the like can be used. If the size of the magnetic nanostructure is 20 nm or less, the magnetic body has a single domain structure. In this case, since the magnitude of the magnetization vector per unit area increases, the magneto-optical effect is increased. It becomes noticeable and more advantageous.

  The manufacturing method of the magnetic nanostructure is the same as that described in the first embodiment, and transfer of a fine periodic structure by self-organization of a diblock copolymer using a patterned substrate and electron beam lithography technology are used. It can be produced by a direct drawing method, a batch exposure method using DUV (far ultraviolet) / EUV (deep ultraviolet) lithography technology, a nanoimprint processing technology, or the like.

Next, a material constituting the conductive film disposed in contact with the magnetic nanostructure will be described.
The conductive film is arranged to change the polarization state by the movement of electric charges in the film. Accordingly, a material having high conductivity is preferable, and a metal material such as Al, Au, Cu, and Ag, or a transparent conductive material such as ITO, TiO ₂ , and ZnO used as an electrode is suitable. In the case of using a metal material, it is necessary to make the film thinner than the skin depth at which light penetrates into the metal because it is necessary to transmit light, and a thin film of 10 nm or less is suitable. When it is necessary to obtain a high transmittance, a film made of a transparent conductive material is suitable. Further, the present element may have a reflection type configuration. In that case, a metal film thicker than the skin depth is suitable. In this case, the metal film may also serve as a support. In order to confirm the operation of the polarization conversion element, a numerical simulation by the FDTD method was performed in the same manner as in the first embodiment. In the numerical simulation, an optical constant of Au (wavelength 500 nm, refractive index n = 0.976, extinction coefficient k = 1.855) was used as the conductive member. The magnetic nanostructure used the dielectric tensor described in the first embodiment.

FIG. 16A is a cross-sectional view for explaining a numerical simulation model, and FIG. 16B is a plan view of FIG.
The difference between the second embodiment and the first embodiment is that an Au layer having a thickness of 20 nm is disposed in contact with a disk-shaped magnetic nanostructure having a diameter of 100 nm and a height of 70 nm. . The gap distance between the two magnetic nanostructures 202a was set to 20 nm.

FIG. 17 is a diagram for explaining the calculation result of the degree of polarization conversion in the case of incident x-polarized light and incident y-polarized light, and plots the degree of polarization conversion on the vertical axis.
From the result of FIG. 17, it can be seen that in the vicinity of the wavelength of 385 nm, the ratio of the transmitted light intensity in the case of x-polarized incident and the transmitted light intensity in the case of y-polarized incident is about 26 times. It was confirmed that the degree of polarization conversion was improved as compared to the case where there was no conductive member.
In addition to the size, height, and material of the magnetic nanostructure, this polarization conversion element can select the operating wavelength range by optimizing the film thickness and material of the conductive member, and further improve the polarization conversion efficiency. Is possible.

  As described above, this polarization conversion element has a mechanism for non-uniformly converting one of two orthogonal polarization components to the other, and therefore, a plurality of optical elements are combined. Thus, the polarization conversion function is realized, and the number of optical elements can be reduced, and the optical device can be reduced in size and price. Further, the polarization conversion efficiency can be improved.

(Third embodiment: claims 1, 2, 4, 6, 9)
The polarization conversion element according to the second embodiment of the present invention will be described with reference to FIGS. 1, 6A and 6B, FIGS. 7 to 12 and FIGS. 18A and 18B. .
FIG. 18A is a cross-sectional view for explaining the configuration of the third embodiment of the polarization conversion element according to the present invention, and FIG. 18B is a plan view of FIG.
As shown in FIG. 1, the present polarization conversion element is an element that emits incident random polarized light in alignment with linearly polarized light, and has a configuration different from that of the first embodiment. The configuration of the polarization conversion element of the present invention will be described with reference to FIGS.

As shown in FIG. 18A, this polarization conversion element has a fine pattern structure made of a conductive material on a support substrate serving as a support, and two magnetic material materials in contact with the pattern structure. It is composed of units with magnetic nanostructures.
Here, the size of the unit 1802 including the conductive pattern 1801 must be equal to or smaller than the wavelength of the incident light so that a spatial intensity distribution does not occur in the transmitted light or reflected light of the present polarization conversion element. is there.

  FIG. 18B is a plan view for explaining the two-dimensional structure and arrangement of the unit 1802. Two magnetic nanostructures 202 are connected by a conductive pattern 1801. In FIG. 18B, the conductive pattern 1801 is represented by a rectangle, but an elliptical structure or the like may be used as long as the two magnetic nanostructures 202 are connected. The directions of the magnetization vectors of the two magnetic nanostructures 202 are the same as in the first embodiment, and connect the centers of the magnetic nanostructures 202 as shown in FIGS. 6 (a) and 6 (b). It is necessary to configure the direction parallel to the straight line and the direction opposite to each other.

The shape of the magnetic nanostructure is exemplified by a cylindrical magnetic nanostructure in FIGS. 18A and 18B, but the present invention is not limited to this, and is spherical or hemispherical. Various shapes such as a triangular prism / square prism shape, a conical shape, and an elliptical column shape can be used.
Moreover, as shown in FIGS. 7 to 12, the arrangement method of units composed of a pair of magnetic nanostructures and a fine pattern of a conductive material is a square lattice, a rectangular lattice, a hexagonal lattice, a line array, a random array, Various configurations such as arrays can be taken.

As in the first embodiment, the support substrate used in the present polarization conversion element is composed of quartz glass, borosilicate glass such as BK7 or Pyrex (registered trademark), CaF, when constituting a transmission type element. ₂ , optical crystal materials such as Si, ZnSe, and Al ₂ O ₃ are used. Further, a coating structure made of the same transparent dielectric material or a buried structure obtained by patterning the substrate may be used. The conductive pattern may be any material having high conductivity that allows the electric charge induced by the magnetization of the magnetic nanostructure and the incident electric field to flow. Metal materials such as Al, Au, Cu, and Ag, ITO, TiO ₂ Transparent conductive materials such as ZnO are suitable.

When a metal material is used in a transmissive element configuration, the film needs to be thinner than the skin depth of the metal material, and a thin film of 10 nm or less is suitable. The magnetic material constituting the magnetic nanostructure is preferably a material exhibiting ferromagnetism at room temperature, such as Fe, Co, Ni, γ-Fe ₂ O ₃ , Fe ₃ O ₄ , FeNx, Ba ferrite, Co ferrite, etc. Garnets such as ferrite and rare earth iron garnet, PtCo, FeTb, FePtCu, and the like can be used.

  If the size of the magnetic nanostructure is 20 nm or less, the magnetic body has a single domain structure. In this case, since the magnitude of the magnetization vector per unit area increases, the magneto-optical effect is increased. It becomes noticeable and more advantageous. As in the description of the first embodiment, such a polarization conversion element has a structure in which a fine periodic structure is transferred by self-organization of a block copolymer using a patterned substrate, or directly using an electron beam lithography technique. It can be manufactured by drawing, a method of performing batch exposure by DUV (far ultraviolet) / EUV (deep ultraviolet) lithography technology, a nanoimprint processing technology, or the like.

  The principle of polarization conversion of the present polarization conversion element is as described using the numerical simulation results in the first and second embodiments. A magnetic nanostructure having magnetization vectors in opposite directions is electrically conductive. Since the structure is in contact with the pattern of the magnetic nanostructures, a charge that moves in the direction of the arrangement of the magnetic nanostructures can be generated through the magnetization of the two magnetic nanostructures and the Lorentz force acting on the incident electric field. A part of the incident polarization component perpendicular to the straight line connecting the centers of the structures can be converted into a polarization component parallel to the alignment line and radiated.

Furthermore, a feature of the polarization conversion element of the present embodiment is that since the conductive pattern is cut by each unit, a decrease in conversion efficiency caused by a loss accompanying the movement of charges can be reduced. Furthermore, in a metal microstructure smaller than the wavelength of light, plasmons that are collective motions of electrons are resonantly excited. When using a metal pattern, select the wavelength of the incident light by adjusting the size and shape of the metal pattern so that plasmons in the direction perpendicular to the magnetization vector direction of the magnetic nanostructure are excited. By doing so, the electric field strength is enhanced and higher polarization conversion efficiency can be realized.
As described above, this polarization conversion element has a mechanism for non-uniformly converting one of two orthogonal polarization components to the other, and therefore, a plurality of optical elements are combined. Thus, the polarization conversion function is realized, and the number of optical elements can be reduced, and the optical device can be reduced in size and price.

(Fourth embodiment: claims 1, 2, 4, 7, 9)
A polarization conversion element according to a fourth embodiment of the present invention will be described with reference to FIGS. 1, 19A, and 19B.
As shown in FIG. 1, the polarization conversion element according to the fourth embodiment of the present invention is an element that emits incident random polarized light in alignment with linearly polarized light, and is different from the first to third embodiments. It has a different configuration.

The configuration of the polarization conversion element of the present invention will be described with reference to FIGS. 19 (a) and 19 (b).
FIG. 19 (a) is a cross-sectional view showing a fourth embodiment of the polarization conversion element according to the present invention, and FIG. 19 (b) is a plan view of FIG. 19 (a).
As shown in FIG. 19B, the present polarization conversion element has a line-shaped pattern made of a metal material on a support substrate serving as a support, and a plurality of magnetic material materials are formed on the line pattern. The magnetic nanostructure is arranged.

  In the embodiment shown in FIGS. 19A and 19B, two magnetic nanostructures 202 form one unit 203, and this unit (a pair of magnetic structures) 203 has a conductive line pattern ( Metal patterns) 1901 are arranged at equal intervals. The units 203 are arranged at an interval larger than the size of the magnetic nanostructure 202.

  Here, the size of the unit 203 needs to be equal to or smaller than the wavelength of the incident light so that light transmitted through or reflected by the polarization conversion element does not have a spatial intensity distribution. The magnetization vectors of the two magnetic nanostructures in the present embodiment need to be configured in parallel to the line pattern 1901 made of a metal material and in opposite directions. The shape of the magnetic nanostructure 202 is exemplified by a cylindrical magnetic nanostructure in FIGS. 19A and 19B. However, the present invention is not limited to this, but a spherical shape or a hemisphere. Various shapes such as a shape, a triangular / square prism shape, a conical shape, and an elliptical column shape can be used.

Since the arrangement method of the units 203 by the pair of magnetic nanostructures 202 is limited to the line pattern 1901 made of a metal material, it is limited to the line arrangement. As in the first and second embodiments, the support substrate 201 used in the present polarization conversion element is made of quartz glass, boron such as BK7, Pyrex (registered trademark), etc. An optical crystal material such as silicate glass, CaF ₂ , Si, ZnSe, Al ₂ O ₃ is used. Further, it may include a film structure made of a transparent dielectric material and an embedded structure formed by patterning a substrate. The line pattern 1901 made of a metal material is a highly conductive material that allows a current induced by the magnetization of the magnetic nanostructure 202 and an incident electric field to pass therethrough, and needs to be high enough not to transmit light. A metal material such as Ag is suitable.
As is known as a wire grid polarizer, such a metal material line pattern 1901 transmits only the component perpendicular to the incident polarization component line pattern and reflects the component parallel to the line pattern. For this reason, the height of the pattern is required to be equal to or greater than the depth of the metal skin so that the polarization component parallel to the line pattern does not ooze out on the transmission surface.

Specifically, a height of 20 nm to 50 nm is suitable. The width and interval of the line pattern 1901 must be sufficiently smaller than the wavelength of incident light, and preferably 100 nm or less. The magnetic material constituting the magnetic nanostructure 202 is preferably a material exhibiting ferromagnetism at room temperature, and ferrite such as Fe, Co, Ni, γ-Fe ₂ O ₃ , Fe ₃ O ₄ , FeNx, Ba ferrite, and Co ferrite. Further, garnet such as rare earth iron garnet, PtCo, FeTb, FePtCu, etc. can be used.

  If the size of the magnetic nanostructure is 20 nm or less, the magnetic body has a single domain structure. In this case, since the magnitude of the magnetization vector per unit area increases, the magneto-optical effect is increased. It becomes noticeable and more advantageous. As in the description of the first embodiment, such a polarization conversion element has a structure in which a fine periodic structure is transferred by self-organization of a block copolymer using a patterned substrate, or directly using an electron beam lithography technique. It can be manufactured by drawing, a method of performing batch exposure by DUV (far ultraviolet) / EUV (deep ultraviolet) lithography technology, a nanoimprint processing technology, or the like.

  The principle of polarization conversion of this polarization conversion element is as described using the numerical simulation results in the first and second embodiments, and the magnetic nanostructure having magnetizations in opposite directions is a conductive metal. Due to the configuration in contact with the line pattern, it is possible to cause the movement of electric charges in the orientation direction of the magnetic nanostructures through the magnetization of the two magnetic nanostructures and the Lorentz force acting on the incident electric field. A part of the incident polarization component perpendicular to the arrangement direction of the structures can be converted into a polarization component parallel to the arrangement direction and emitted.

Furthermore, the polarization conversion element of this embodiment is composed of a line pattern made of a metal material. Since this line pattern functions as a wire grid polarizer, it does not undergo polarization conversion having the same polarization as the incident polarization. Leakage of light components can be prevented, and linearly polarized light that has undergone polarization conversion with high contrast can be obtained.
As described above, this polarization conversion element has a mechanism for non-uniformly converting one of two orthogonal polarization components to the other, and therefore, a plurality of optical elements are combined. Thus, the polarization conversion function is realized, and the number of optical elements can be reduced, and the optical device can be reduced in size and price.

(Fifth embodiment: claims 1 and 3)
A polarization conversion element according to a fifth embodiment of the present invention will be described with reference to FIGS. 1, 20A, 20B, 21A, and 21B.
As shown in FIG. 1, the polarization conversion element according to the fifth embodiment of the present invention is an element that emits incident random polarized light in alignment with linearly polarized light. What is the first to fourth embodiments? It has a different configuration. The configuration of the polarization conversion element of the present invention will be described with reference to FIGS. 20 (a) and 20 (b).

20A and 20B are plan views showing a fifth embodiment of the polarization conversion element according to the present invention.
This polarization conversion element has a configuration in which a pair of line patterns made of a magnetic material is arranged as a magnetic structure 202-1 on a support substrate serving as a support. This magnetic line pattern has a width equal to or smaller than the wavelength of incident light, and is composed of pairs that are close to each other at an interval equal to or smaller than the wavelength.

Here, in the line pattern of two magnetic structures, the direction of the main magnetization vector needs to be opposite to each other in the direction perpendicular to the line pattern. As in the first to fourth embodiments, the support substrate used in the present polarization conversion element is composed of quartz glass or borosilicate glass such as BK7 or Pyrex (registered trademark) in the case of constituting a transmission type element. An optical crystal material such as CaF ₂ , Si, ZnSe, or Al ₂ O ₃ is used.

Further, it may be a film structure made of a similar transparent dielectric material, or a buried structure manufactured by patterning a substrate. The magnetic material constituting the line pattern of the magnetic structure is preferably a material exhibiting ferromagnetism at room temperature, such as Fe, Co, Ni, γ-Fe ₂ O ₃ , Fe ₃ O ₄ , FeNx, Ba ferrite, Co ferrite, etc. Garnets such as ferrite and rare earth iron garnet, PtCo, FeTb, FePtCu, and the like can be used.
As in the description of the first embodiment, such a polarization conversion element has a structure in which a fine periodic structure is transferred by self-organization of a block copolymer using a patterned substrate, or directly using an electron beam lithography technique. It can be manufactured by drawing, a method of performing batch exposure by DUV (far ultraviolet) / EUV (deep ultraviolet) lithography technology, a nanoimprint processing technology, or the like.

  The principle of polarization conversion of the present polarization conversion element is as described using the numerical simulation result in the first embodiment, and the magnetic nanostructure pair is formed by the magnetic line pattern having magnetization vectors in opposite directions. And the Lorentz force acting on the incident electric field acts in opposite directions in each of the pairs of magnetic line patterns, and can cause polarization oscillation in the adjacent direction of the magnetic line patterns, resulting in parallel to the magnetic line patterns. A part of the incident polarization component can be converted into a polarization component perpendicular to the magnetic material line pattern and emitted.

FIGS. 21A and 21B are diagrams showing the direction of the magnetization vector of the line pattern of the magnetic structure. Two directions of the magnetization vector can be used, and both perform the same operation.
As described above, this polarization conversion element has a mechanism for non-uniformly converting one of two orthogonal polarization components to the other, and therefore, a plurality of optical elements are combined. Thus, the polarization conversion function is realized, and the number of optical elements can be reduced, and the optical device can be reduced in size and price.

(Sixth embodiment: claims 1, 3, 4 and 5)
A polarization conversion device according to a sixth embodiment of the present invention will be described with reference to FIGS. 1, 21A, 21B, 22A, and 22B.
As shown in FIG. 1, the polarization conversion element according to the sixth embodiment of the present invention is an element that emits incident random polarized light in alignment with linearly polarized light, and is different from the first to fifth embodiments. It has a different configuration. The configuration of the polarization conversion element of the present invention will be described with reference to FIGS.

FIG. 22A is a cross-sectional view for explaining the configuration of the sixth embodiment of the polarization control element according to the present invention, and FIG. 22B is a plan view of FIG.
The difference between the sixth embodiment and the fifth embodiment is that a conductive film 2201 is disposed on a support substrate 201 serving as a support, and is disposed so as to be in contact with the film 2201. The line pattern pairs 203-1 of the magnetic material thus arranged are arranged. This magnetic line pattern has a width equal to or smaller than the wavelength of incident light, and is composed of pairs that are close to each other at an interval equal to or smaller than the wavelength.

Here, in the line pattern of two magnetic structures, the direction of the main magnetization vector needs to be opposite to each other in the direction perpendicular to the line pattern. The support substrate used in the present polarization conversion element is the same as that in the first to sixth embodiments. When a transmission type element is configured, quartz glass, BK7, borosilicate such as Pyrex (registered trademark), etc. An optical crystal material such as glass, CaF ₂ , Si, ZnSe, Al ₂ O ₃ is used. Further, it may be a film structure made of a similar transparent dielectric material, or a buried structure manufactured by patterning a substrate.

The material constituting the conductive film may be a material having high conductivity, and a metal material such as Al, Au, Cu, and Ag, and a transparent conductive material such as ITO, TiO ₂ , and ZnO are suitable. In the case where a metal material is used in the transmission type polarization conversion element, it is necessary to make the film thinner than the skin depth at which light penetrates into the metal because it is necessary to transmit light, and a thin film of 10 nm or less is preferable. Magnetic material forming the line pattern of the magnetic structure is preferably a material showing the ferromagnetism at room temperature, Fe, Co, Ni, γ -Fe2O3, Fe 3 O 4, FeNx, Ba ferrite, ferrite such as Co ferrite, rare earth Garnet such as iron garnet, PtCo, FeTb, FePtCu, etc. can be used.

  As in the description of the first embodiment, such a polarization conversion element has a structure in which a fine periodic structure is transferred by self-organization of a block copolymer using a patterned substrate, or directly using an electron beam lithography technique. It can be manufactured by drawing, a method of performing batch exposure by DUV (far ultraviolet) / EUV (deep ultraviolet) lithography technology, a nanoimprint processing technology, or the like.

  The principle of polarization conversion of this polarization conversion element is as described using the numerical simulation results in the first and second embodiments, and a magnetic line pattern having magnetization vectors in opposite directions is applied to the conductive member. Due to the configuration in contact with each other, the movement of charges can be generated in the direction perpendicular to the magnetic line pattern via the Lorentz force acting on the magnetization and incident electric field of the two magnetic nanostructures, and parallel to the magnetic line pattern. A part of the incident polarization component can be converted into a polarization component perpendicular to the magnetic line pattern and emitted.

The direction of the magnetization vector of the magnetic line pattern is the same as that of the fifth embodiment as shown in FIGS. 21A and 21B. Two magnetization vector directions can be used, and both operate in the same manner. . As described in the second embodiment, this embodiment has a conductive film in contact with the magnetic line pattern, so that higher polarization conversion efficiency is realized than when there is no conductive member. it can.
As described above, this polarization conversion element has a mechanism for non-uniformly converting one of two orthogonal polarization components to the other, and therefore, a plurality of optical elements are combined. Thus, the polarization conversion function is realized, and the number of optical elements can be reduced, and the optical device can be reduced in size and price. In addition, the polarization conversion element can improve the polarization conversion efficiency.

(Seventh embodiment: claims 1, 3, 4 and 7)
A polarization conversion element according to a seventh embodiment of the present invention will be described with reference to FIGS. 1, 23 (a), (b) to 25 (a), (b).
As shown in FIG. 1, the polarization conversion element according to the seventh embodiment of the present invention is an element that emits incident random polarized light in alignment with linearly polarized light. What are the first to sixth embodiments? It has a different configuration.
The configuration of the polarization conversion element of the present invention will be described with reference to FIGS.
FIG. 23A is a sectional view showing a seventh embodiment of the polarization conversion element according to the present invention, and FIG. 23B is a plan view of FIG.

  As shown in FIG. 23B, this polarization conversion element intersects a line pattern (conductive pattern) 2301 made of metal material at equal intervals on a support substrate 201 serving as a support, in contact with the line pattern 2301. The line pattern pairs made of magnetic material are arranged. This pair of magnetic line patterns has a width equal to or smaller than the wavelength of incident light, and is composed of pairs that are close to each other at an interval equal to or smaller than the wavelength.

The direction of the main component of the magnetization vector of the magnetic line pattern is parallel to the metal line pattern (conductive pattern) 2301 and needs to be configured in opposite directions. 23A and 23B show the case where the line pattern made of a magnetic material and the line pattern made of a metal material are orthogonal to each other, the present invention is not limited to this, and is illustrated in FIG. Such a cross structure having an inclination of 45 ° or more may be used. In this case, the direction of the main component of the magnetization vector in the pair of magnetic line patterns needs to be configured in a direction opposite to each other in a direction parallel to the line pattern of the metal material indicated by a dotted line in FIG.
FIG. 24 is a plan view for explaining a different configuration of the polarization control element of the seventh embodiment according to the present invention.

The support substrate used in the present polarization conversion element is the same as in the first to sixth embodiments. When a transmission type element is configured, quartz glass, boron such as BK7, Pyrex (registered trademark), or the like is used. silicate glass, CaF2, Si, ZnSe, utilizing such optical crystal material such as Al ₂ O _3. Further, it may be a coating structure made of a similar transparent dielectric material or a buried structure manufactured by patterning a substrate. The material constituting the metal line pattern may be any material having high electrical conductivity, and metal materials such as Al, Au, Cu, and Ag, and transparent conductive materials such as ITO, TiO ₂ , and ZnO are suitable.

Since the metal line pattern (conductive pattern) 2301 needs to realize polarization selectivity, the height of the pattern needs to be equal to or greater than the skin depth of the metal. Specifically, a height of 20 nm to 50 nm is suitable. ing. Further, the width of the pattern 2301 needs to be equal to or less than the wavelength of incident light, and is preferably equal to or less than 100 nm. The magnetic material constituting the magnetic line pattern is preferably a material exhibiting ferromagnetism at room temperature, such as Fe, Co, Ni, γ-Fe ₂ O ₃ , Fe ₃ O ₄ , FeNx, Ba ferrite, Co ferrite, and the like, rare earth Garnet such as iron garnet, PtCo, FeTb, FePtCu, etc. can be used. As in the description of the first embodiment, such a polarization conversion element has a structure in which a fine periodic structure is transferred by self-organization of a block copolymer using a patterned substrate, or directly using an electron beam lithography technique. It can be manufactured by drawing, a method of performing batch exposure by DUV (far ultraviolet) / EUV (deep ultraviolet) lithography technology, a nanoimprint processing technology, or the like.

  The principle of polarization conversion of this polarization conversion element is as described using the numerical simulation results in the first and second embodiments, and a magnetic line pattern having magnetization vectors in opposite directions is a conductive metal. Due to the configuration in contact with the line pattern, the movement of charges in the direction perpendicular to the magnetic line pattern is generated in the metal line pattern through the magnetization of the two magnetic nanostructures and the Lorentz force acting on the incident electric field. A part of the incident polarization component parallel to the magnetic line pattern can be converted into a polarization component perpendicular to the magnetic line pattern and emitted.

  FIGS. 25A and 25B are diagrams showing the direction of the magnetization vector with respect to the direction of the magnetic line pattern. Two directions of the magnetization vector can be used, and both perform the same operation. Furthermore, since the polarization conversion element of this embodiment also has a function as a wire grid polarizer using a metal line pattern, it reflects incident polarization components parallel to the metal line pattern with high efficiency, and this polarization component converts the polarization. Therefore, a reflective polarization conversion element in which two orthogonal polarization components are not mixed can be realized.

  As described above, this polarization conversion element has a mechanism that non-uniformly converts one of the two orthogonal polarization components to the other component, and separates the component that has not been converted in polarization. Thus, one polarized component can be extracted as reflected light with high contrast.

(Eighth embodiment: Claim 8)
A polarization conversion element according to an eighth embodiment of the present invention will be described with reference to FIG. The polarization conversion element according to the eighth embodiment of the present invention presents a configuration for improving the polarization conversion efficiency of the polarization conversion element in the first to seventh embodiments.
FIG. 26 is a cross-sectional view of the polarization conversion element according to the seventh embodiment of the present invention, and the magnetic structure described in the first to seventh embodiments on or inside the support substrate serving as the support. A polarization conversion element structure comprising a body or a magnetic structure and a conductive member, and having a configuration in which a multiple reflection structure for controlling reflection characteristics is provided at least above or below the polarization conversion element structure. Yes.

FIG. 26 shows a configuration in which multiple reflection films 2601 and 2604 are arranged on both surfaces of the support substrate 201 as a multilayer film structure. As the multiple reflection structure, it is easy to use a multiple reflection film on the processed surface. The material constituting the multiple reflection film may be a dielectric material generally used for a multilayer film. For example, MgF ₂ , CeF ₃ , Al ₂ O ₃ , AiO ₂ , ZrO ₂ , TiO ₂ , ZnS, ZnS such as -SiO ₂ can be used.

FIG. 26 shows an example in which the multiple reflection films 2601 and 2604 are configured, but the film structure does not necessarily have to be a film structure. For example, a dielectric periodic structure having a two-dimensional structure and a three-dimensional structure such as a photonic crystal may be used. . The advantage of using a dielectric periodic structure is that incident light can be confined efficiently and polarization conversion efficiency can be improved, and polarization selectivity can be provided by using an anisotropic periodic structure. It is that it can give a special function.
By providing such a multiple reflection structure in the polarization conversion element described in the first to seventh embodiments, multiple reflection of light occurs in the polarization conversion element, and the magnetic structure and the light contributing to the polarization conversion. The frequency of the interaction can be increased.

In general, the magneto-optical effect that is the origin of the polarization conversion function is not strong in the frequency range of visible light, but a large polarization conversion efficiency can be obtained through a multiple reflection process.
As described above, the present polarization conversion element includes a structure in which one of the two orthogonally polarized light components is converted non-uniformly into the other component in a configuration that passes multiple times. Thus, the polarization conversion efficiency can be improved. Further, it is possible to add polarization selectivity.

  The above-described embodiment shows an example of a preferred embodiment of the present invention, and the present invention is not limited thereto, and various modifications can be made without departing from the scope of the invention. is there.

[Function and effect]
(Claims 1 and 2)
In this polarization conversion element, a pair of magnetic nanostructures in which the directions of the main components of the magnetization vector are opposite to each other are arranged on or inside the support, so that only one of two orthogonal polarization components of incident light is orthogonal. It is possible to convert to the other, and since the polarization conversion function is realized only by the fine structure of the magnetic material in the two-dimensional plane, the number of optical elements can be reduced and the optical device can be downsized. Play.

(Claims 1, 2, 4, 5)
This polarization conversion element realizes a polarization conversion function by arranging a pair of magnetic nanostructures having opposite directions of main components of the magnetization vector on or inside the support, By arranging the conductive film in contact with the pair, there is an effect that the polarization conversion efficiency can be improved.

(Claims 1, 2, 4, 6)
This polarization conversion element realizes a polarization conversion function by arranging a pair of magnetic nanostructures having opposite directions of main components of the magnetization vector on or inside the support, By arranging the fine pattern made of the conductive material in contact with the pair, there is an effect that the polarization conversion efficiency can be improved.

(Claims 1, 2, 4, 7)
This polarization conversion element realizes a polarization conversion function by arranging a pair of magnetic nanostructures having opposite directions of main components of the magnetization vector on or inside the support, By arranging a line pattern made of a conductive material in contact with the pair, there is an effect that the polarization conversion efficiency can be improved. In addition, there is an effect that a polarization conversion element having polarization selectivity can be realized.

(Claims 1 and 3)
In this polarization conversion element, a pair of magnetic line patterns in which the directions of main components of the magnetization vector are opposite to each other are arranged on or inside the support, so that only one of two orthogonal polarization components of incident light is orthogonal to the other. In addition, since the polarization conversion function is realized only by the configuration of the magnetic material in the two-dimensional plane, the number of optical elements can be reduced and the optical device can be downsized. .

(Claims 1, 3, 4, 5)
This polarization conversion element realizes a polarization conversion function by arranging a pair of magnetic line patterns in which the directions of the main components of the magnetization vector are opposite to each other on the support or inside the support. By arranging the conductive film in contact with the pair, there is an effect that the polarization conversion efficiency can be improved. In addition, there is an effect that a polarization conversion element having polarization selectivity can be realized.

(Claims 1, 3, 4, 7)
The polarization conversion element realizes a polarization conversion function and is in contact with the magnetic line pattern pair by arranging a pair of magnetic line patterns with opposite directions of main components of the magnetization vector on or inside the support. By arranging the line pattern made of a conductive material, it is possible to improve the polarization conversion efficiency and to realize a polarization conversion element having polarization selectivity.

(Claim 8)
This polarization control element is provided with a multiple reflection structure at least one end of a polarization conversion element structure comprising a magnetic structure or a magnetic structure and a conductive member. The frequency of interaction can be increased, and the polarization conversion efficiency can be improved.

(Claim 9)
This polarization control element can increase the strength of the interaction between the incident light and the magnetic structure by using a magnetic structure having a single magnetic domain structure as the magnetic structure constituting the polarization conversion element. As a result, the polarization conversion efficiency can be improved.

  That is, the invention according to claim 1 can provide a polarization conversion element having a polarization conversion function of converting only one polarization component of two orthogonal polarization components into the other. In addition, a polarization conversion element that can reduce the number of optical elements can be provided.

  According to the second and third aspects of the invention, a specific configuration of the pair of magnetic structures in the polarization conversion element according to the first aspect can be provided.

  The invention according to claim 4 can provide a configuration for increasing the polarization conversion efficiency of the polarization conversion element according to any one of claims 1 to 3.

  The invention according to claims 5 to 7 can provide a specific configuration of the conductive member in the polarization conversion element according to claim 4.

  The invention according to claim 8 can provide a configuration for increasing the polarization conversion efficiency of the polarization conversion element according to any one of claims 1 to 7.

  According to the ninth aspect of the present invention, it is possible to provide a configuration that increases the polarization conversion efficiency of the polarization conversion element according to any one of the first, second, fourth, and eighth aspects.

  The polarization conversion element according to the present invention can be used for an image projection apparatus such as a liquid crystal projector and a display apparatus.

It is explanatory drawing which shows the function of the polarization conversion element concerning the 1st Embodiment of this invention. (A) is sectional drawing of the polarization conversion element concerning this invention, (b) is a top view of (a). (A)-(e) is a top view for demonstrating the various shapes of a magnetic nanostructure. It is sectional drawing for demonstrating the structure of 1st Embodiment of the polarization conversion element which concerns on this invention. It is explanatory drawing for demonstrating the production method of a magnetic body nanostructure. (A), (b) is explanatory drawing of the direction of the magnetization vector in the pair of magnetic nanostructure. It is a figure which shows an example which arranged each unit on the lattice point of a square lattice. It is a figure which shows an example which arranged each unit on the lattice point of a rectangular lattice. In this example, units are arranged on lattice points of a hexagonal lattice. It is a figure which shows an example which arranged each unit on the line in the direction orthogonal to a line. It is a figure which shows an example which arranged the unit of the magnetic structure arranged in the direction parallel to a line on a line at equal intervals. It is a top view which shows an example which arranged the unit at random in a two-dimensional surface. (A) is sectional drawing explaining the model of numerical simulation, (b) is a top view of (a). It is a figure which shows the calculation result of the polarization conversion degree in the case of x polarized light incidence and y polarized light incidence. (A) is sectional drawing of 2nd Embodiment which concerns on the polarization conversion element of this invention, (b) is a top view of (a). (A) is sectional drawing for demonstrating the model of numerical simulation, (b) is a top view of (a). It is a figure explaining the calculation result of the polarization conversion degree in the case of x polarization incidence and y polarization incidence. (A) is sectional drawing for demonstrating the structure of 3rd Embodiment of the polarization conversion element which concerns on this invention, (b) is a top view of (a). (A) is sectional drawing which shows 4th Embodiment of the polarization conversion element which concerns on this invention, (b) is a top view of (a). (A) is a top view which shows 5th Embodiment of the polarization conversion element which concerns on this invention, (b) is a top view of (a). (A), (b) is the figure which showed direction of the magnetization vector of the line pattern of a magnetic structure. (A) is sectional drawing for demonstrating the structure of 6th Embodiment of the polarization control element which concerns on this invention, (b) is a top view of (a). (A) is sectional drawing which shows 7th Embodiment of the polarization conversion element which concerns on this invention, (b) is a top view of (a). It is a top view for demonstrating a different structure of the polarization control element of the 7th Embodiment which concerns on this invention. (A), (b) is a figure which shows the direction of the magnetization vector with respect to the direction of a magnetic line pattern. It is sectional drawing of the polarization conversion element of the 7th Embodiment concerning this invention. (A)-(c) is a manufacturing-process figure of a wire grid polarizer (prior art 1). It is explanatory drawing of an inorganic material polarization control element (prior art 2). It is a figure which shows the structure of a polarization separation element (prior art 3). (A)-(d) is explanatory drawing of the conventional polarization control element (prior art 4). It is sectional drawing of a magneto-optical element (prior art 5). It is sectional drawing of another magneto-optical element (prior art 6).

Explanation of symbols

1 Incident polarization state (random polarization)
2 Polarization conversion element 3 Output polarization state (linear polarization)
201 support substrate 202 magnetic nanostructure 203 pair of magnetic structure (unit)

Claims (9)

  It has at least a structure in which a pair of magnetic structures is arranged two-dimensionally on or inside the support, the pairs of magnetic structures are adjacent to each other at an interval equal to or smaller than the wavelength of incident light, and the magnetic structure A polarization conversion element characterized by having a main magnetization component in a direction opposite to each other parallel to a straight line connecting the center points of the structures.   2. The polarization conversion element according to claim 1, wherein a width and a depth of the magnetic structure are equal to or less than a wavelength of incident light.   2. The polarization conversion element according to claim 1, wherein the magnetic structure is configured by a line pattern made of a magnetic material having a width equal to or less than a wavelength of incident light.   4. The polarization conversion element according to claim 1, wherein a conductive member is disposed on the support so as to be in contact with the pair of the magnetic structures. 5.   5. The polarization conversion element according to claim 4, wherein the conductive member is formed of a flat film.   5. The polarization conversion element according to claim 4, wherein the conductive member is formed of a two-dimensional pattern having a size equal to or smaller than a wavelength of incident light.   5. The polarization conversion element according to claim 4, wherein the conductive member is formed of a line pattern having a width equal to or less than a wavelength of incident light.   The polarization conversion element according to any one of claims 1 to 7, wherein a multiple reflection structure is disposed on at least one of an upper side or a lower side of the pair of magnetic structures and the conductive member. Polarization conversion element.   9. The polarization conversion element according to claim 1, wherein the magnetic structure has a single domain structure.

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