JP4783000B2 - Processing machine - Google Patents

Description

  The present invention relates to a processing machine. For example, the present invention relates to a processing machine that performs processing such as cutting, grinding, and drilling on a workpiece.

Conventionally, as a processing machine for processing a workpiece using a tool, a workpiece holding unit that holds a workpiece, a tool holding unit that holds a tool, and a relative movement unit that relatively moves the workpiece holding unit and the tool holding unit. Processing machines equipped are known.
In order to machine a workpiece using such a processing machine, first, the workpiece is fixed to the workpiece holding means, and a tool suitable for the machining is attached to the tool holding means. Next, the work holding means and the tool holding means are relatively moved by the relative moving means while rotating the tool at a high speed. In this way, the workpiece can be processed by the processing machine.

However, it may be difficult to process depending on the material of the workpiece, such as the hardness of the workpiece and the state at room temperature. For example, when the hardness is high like steel, there is a problem that the cutting performance of the tool is lowered due to heat generated during processing. Also, when melting at room temperature, such as frozen foods, it is possible that the workpiece will be elastic when it is melted and cannot be accurately processed, and the quality of the workpiece may be degraded. There is a problem that it cannot be processed easily.
For this reason, in a conventional processing machine, when the workpiece has a high hardness, a method of preventing a decrease in the hardness of the tool by performing a process while injecting a coolant onto the tool, or heat generated during processing by a thermoelectric conversion element. There are devised methods such as a method of absorbing (see Patent Document 1) and a method of maintaining the state of the work by lowering the room temperature of the work chamber when the work is made of a material that changes state at room temperature.

JP 2000-288868 A

However, since the method of performing processing while spraying a coolant on the tool and the method described in Patent Document 1 are for locally cooling the tool or the workpiece in order to maintain the cutting performance of the tool, the material of the workpiece The processing difficulty due to is still not solved.
In particular, in the method of performing processing while spraying coolant on the tool, there is a risk of coolant being sprayed on the worker's body, troubles in processing work such as poor visibility of the work part due to coolant, and cooling. There are problems such as the cost of equipment for circulating the agent. Further, in the method of lowering the room temperature of the work chamber, the equipment such as the cooling device is enlarged and the work is performed at a low temperature, so that energy and labor other than the machining work are required.

  An object of the present invention is to provide a processing machine capable of realizing the most efficient processing according to the material of a workpiece.

The processing machine of the present invention includes a work holding means having a table for placing a work on the upper surface, a tool holding means for holding a tool for processing the work, a relative movement means for relatively moving the work holding means and the tool holding means, And heating means built in the table for heating the upper surface of the table , wherein the heating means is constituted by electrothermal conversion means for converting electrical energy into thermal energy .

According to such a configuration, by the heating means, in accordance with the material of the workpiece to heat the workpiece, it is possible to vary the hardness of the work to the extent that easy machining by the tool. Therefore, it becomes easy to process the workpiece. In addition, since the temperature of the workpiece can be maintained by the heating means and the change in the state of the workpiece can be suppressed, machining can be performed without deteriorating the quality of the workpiece, and the restriction on the time taken by the machining operation can be reduced. As a result, the processing machine can realize the most efficient processing according to the material of the workpiece.
Furthermore, since the heating means is built in the table and the workpiece is heated by heat transfer at the contact surface between the upper surface of the heated table and the workpiece, the work is smoothly and safely performed compared to heating from the outside of the workpiece holding means. be able to. Further, since the heating means is built in the table and the workpiece is heated by heat transfer at the contact surface between the upper surface of the heated table and the workpiece, the tool is difficult to be heated , and the degradation of the cutting performance of the tool due to heating can be reduced.

Furthermore, an electrothermal converting means as a heating means built in the table converts electric energy into heat energy, and the work holding means is heated by this heat energy. Furthermore, the workpiece is heated by heat transfer at the contact surface between the upper surface of the heated table and the workpiece. This heating method by heat transfer can perform the work smoothly and safely compared to heating the workpiece from the outside of the workpiece holding means. Furthermore, since the tool is less likely to be heated, the reduction in the cutting performance of the tool due to heat can be reduced.

The processing machine of the present invention includes a work holding means having a table for placing a work on the upper surface, a tool holding means for holding a tool for processing the work, a relative movement means for relatively moving the work holding means and the tool holding means, have been incorporated in the table provided with a cooling means for cooling the upper surface of said table, said cooling means, characterized in that it is constituted by a circuit including a Peltier element.

According to such a configuration, the cooling means can cool the work in accordance with the material of the work, and can change the hardness of the work to such an extent that it can be easily processed by the tool. Therefore, it becomes easy to process the workpiece. In addition, since the temperature of the workpiece can be maintained by the cooling means and the change in the state of the workpiece can be suppressed, machining can be performed without deteriorating the quality of the workpiece, and the restriction on the time taken by the machining operation can be reduced. As a result, the processing machine can realize the most efficient processing according to the material of the workpiece.
Furthermore, since the cooling means is built in the table and the work is cooled by heat transfer at the contact surface between the upper surface of the cooled table and the work, the work is smoothly and safely performed compared to cooling from the outside of the work holding means. be able to. Further, since the cooling means is built in the table and the work is cooled by heat transfer at the contact surface between the upper surface of the cooled table and the work, the tool is not easily cooled, and the occurrence of condensation on the tool surface due to the cooling can be reduced.
When the Peltier elements used as the cooling means in the present invention are connected to different types of Peltier elements and a direct current flows, a heat generating action is generated on one end side of the connecting portion and an endothermic action is generated on the other end side.
Therefore, according to such a configuration, by causing a direct current to flow through a circuit having different Peltier elements connected to each other, a heat generating action and a heat absorbing action are generated on one end side and the other end side of the connection part of the Peltier elements, respectively. The upper surface of the table can be cooled by the endothermic action of the Peltier element. And a workpiece | work can be cooled by the heat transfer in the upper surface of the cooled table, and the contact surface of a workpiece | work.
Since the work is cooled by heat transfer, the work can be smoothly and safely performed compared to cooling the work from the outside of the work holding means. Furthermore, this makes it difficult for the tool to be cooled, so that the occurrence of condensation on the tool surface due to cooling can be reduced.

The processing machine of the present invention includes a work holding means having a table for placing a work on the upper surface, a tool holding means for holding a tool for processing the work, a relative movement means for relatively moving the work holding means and the tool holding means, anda heating means for heating the upper surface of the table is built in the table, is built into the table and a cooling means for cooling the upper surface of said table, said heating means and cooling means, a Peltier element It is characterized by comprising a heat generation / heat absorption circuit.

According to such a configuration, the heating means and the cooling means can heat or cool the work in accordance with the material of the work, and can change the hardness of the work to such an extent that it can be easily processed by the tool. Therefore, it becomes easy to process the workpiece. Also, since the temperature of the workpiece can be maintained by the heating means and cooling means, and changes in the state of the workpiece can be suppressed, machining can be performed without deteriorating the quality of the workpiece, and the time limit for the machining operation can be reduced. Can do. As a result, the processing machine can realize the most efficient processing according to the material of the workpiece.
Furthermore, since the heating means and the cooling means are built in the table and the work is cooled by heat transfer at the contact surface between the upper surface of the heated and cooled table and the work, compared to heating or cooling from the outside of the work holding means, Work can be done smoothly and safely. In addition, since the heating and cooling means are built into the table and the workpiece is cooled by heat transfer at the contact surface between the heated and cooled table top surface and the workpiece, the tool is difficult to be heated or cooled, and the cutting performance of the tool by heating Can be reduced, or the occurrence of condensation on the tool surface due to cooling can be reduced.
When the Peltier elements used as the heating means and the cooling means in the present invention are connected to different types of Peltier elements and a direct current flows, a heat generation effect occurs at one end side of the connection portion and an endothermic effect occurs at the other end side. That is, by causing a direct current to flow through a heat generation / heat absorption circuit having different Peltier elements connected thereto, a heat generation phenomenon and a heat absorption phenomenon are generated on one end side and the other end side of the connection part of the Peltier elements, respectively.
Therefore, according to such a configuration, when the work is heated , the upper surface of the table can be heated by the heat generation phenomenon of the Peltier element, and when the work is cooled, the heat absorption phenomenon of the Peltier element is used to cool the work table. The top surface can be cooled. The temperature of the workpiece can be adjusted by heat transfer on the upper surface of the heated and cooled table and the contact surface of the workpiece.

  Thereby, the role of a heating means and a cooling means can be fulfill | performed by the heating and endothermic phenomenon of a Peltier device, and both a heating and cooling of a workpiece | work can be performed. Since the temperature of the workpiece is adjusted by heat transfer, the work can be performed smoothly and safely compared to heating and cooling the workpiece from the outside of the workpiece holding means, and furthermore, the tool is difficult to heat and cool. Reduction of the cutting performance of the tool and generation of condensation on the tool surface due to cooling can be reduced. Also, by changing the direction of the direct current flowing through the Peltier element, the position where the Peltier element generates heat and absorbs heat is switched, so that heating and cooling of the workpiece can be switched instantaneously.

Hereinafter, embodiments of the present invention will be described with reference to the drawings. In the description of each embodiment, the same components are denoted by the same reference numerals, and the description thereof is omitted.
<First Embodiment>
FIG. 1 is a perspective view of the processing machine of the first embodiment, and FIG. 2 is a schematic cross-sectional view of the work holding means of the first embodiment.
The processing machine according to the first embodiment is a machine that processes a workpiece with a tool while relatively moving the tool and the workpiece, and as shown in FIG. 1, a relative movement unit 1 that relatively moves the tool and the workpiece, and a tool The tool holding means 2 for holding the workpiece, the workpiece holding means 3 for holding the workpiece on the upper surface, the heating means 4 for heating the workpiece incorporated in the workpiece holding means 3, the relative movement means 1 and the drive of the tool holding means 2 are controlled. Control means (not shown).

  The relative movement means 1 is a three-axis drive mechanism that moves the Z-axis slider 132, which is a movable member, relative to the workpiece holding means 3 in three axial directions (X-axis direction, Y-axis direction, and Z-axis direction) that are orthogonal to each other. It is configured with. That is, the relative movement unit 1 includes a Y-axis drive mechanism 12, an X-axis drive mechanism 11, and a Z-axis drive mechanism 13.

  The Y-axis drive mechanism 12 includes a pair of left and right guide rails 121 arranged along the front-rear direction, a Y-axis beam 122 spanned between the guide rails 121, and the Y-axis beam 122 along the guide rail 121. And a linear motor 123 that moves in the front-rear direction (Y-axis direction). Between one guide rail 121 and one end side of the Y-axis beam 122, a displacement detector 124 for detecting the position (movement displacement amount) of the Y-axis beam 122 in the Y-axis direction is provided. The displacement detector 124 includes a scale 125 disposed along one guide rail 121 and a detection head 126 disposed on one end side of the Y-axis beam 122 so as to face the scale 125 with a slight gap. It is configured.

  The X-axis drive mechanism 11 includes an X-axis slider 111 movably provided on the Y-axis beam 122, and a linear motor that moves the X-axis slider 111 in the left-right direction (X-axis direction) along the Y-axis beam 122. 112. Between the X-axis slider 111 and the Y-axis beam 122, a displacement detector (not shown) that detects the position (movement displacement amount) of the X-axis slider 111 in the X-axis direction is provided. Since this displacement detector has the same configuration as the displacement detector 124, description thereof is omitted.

  The Z-axis drive mechanism 13 is attached to the X-axis slider 111 and extends along the vertical direction, and a Z-axis slider (movable member) 132 provided to be movable along the Z-axis guide plate 131. And a linear motor 133 that moves the Z-axis slider 132 in the vertical direction along the Z-axis guide plate 131. Between the Z-axis guide plate 131 and the Z-axis slider 132, a displacement detector (not shown) that detects the position (movement displacement amount) of the Z-axis slider 132 in the Z-axis direction is provided. Since this displacement detector has the same configuration as the displacement detector 124, the description thereof is omitted.

The tool holding means 2 includes a holder main body 21 installed on the Z-axis slider 132, a main shaft 22 that extends downward from the lower end of the holder main body 21, and rotates around the shaft center, and a tool formed at the lower end of the main shaft 22. And a chuck mechanism 23 for sandwiching the chuck. The tool clamped by the chuck mechanism 23 is rotated integrally with the main shaft 22. The holder main body 21 is connected to a power source that provides rotational driving to the main shaft 22, for example, a motor (not shown).

  The work holding means 3 is a metal member having sufficient heat transfer properties and strength, and includes a base plate 31 and a table 32 that is fixed to the upper surface of the base 31 and places the work on the upper surface. . The table 32 includes a table temperature measuring device 33 for measuring and displaying the temperature of the upper surface, three chuck pieces 34 arranged on the upper surface at intervals of 120 degrees and configured to be advanced and retracted toward the center simultaneously, and these three chuck pieces. And an open / close drive source (not shown) that simultaneously advances and retreats 34. The chuck piece 34 has thermal conductivity, and is clamped and fixed by a work that is moved by an opening / closing drive source and placed on the upper surface of the table 32.

As shown in FIG. 2, the heating means 4 includes an electrothermal conversion means 41 that is built in the table 32 and converts electrical energy into heat energy, and a heat insulating member that is built in the table 32 and covers a part of the electrothermal conversion means 41. 42.
The electrothermal converting means 41 includes a heater 411 that generates heat, a power source 412, a temperature adjustment of the heater, that is, a control device 413 that adjusts the voltage of the power source 412, and an annular conductor that connects these three members in series. 414.
The heater 411 is disposed on the upper edge of the table 32 so as to spread over almost the entire surface of the table 32.
The control device 413 adjusts the voltage of the power source 412 by inputting a voltage value corresponding to the temperature of the upper surface of the table 32 through the control panel, with a control panel installed on the outer surface exposed from the table 32. Can do.
The heat insulating member 42 covers all surfaces except the upper surface of the heater 411.

  The control means is separate from the relative movement means 1 and the work holding means 3, and adjusts the drive of the relative movement means 1 and the rotational speed of the tool. The control means is connected to the relative movement means 1 and the tool holding means 2, and controls the drive of each axis drive mechanism 11, 12, 13 and the motor by transmitting signals as signals.

A workpiece machining method using the machining machine according to the first embodiment will be described.
A tool suitable for processing is clamped by the chuck mechanism 23 formed on the main shaft 22 of the tool holding means 2, the work is placed on the upper surface of the table 32 of the work holding means 3, and is fixed by the chuck piece 34.
Next, a voltage is applied to the circuit by operating a control panel provided in the controller 413 of the electrothermal converting means 41 of the heating means 4. Then, electric energy is converted into heat energy by the heater 411, and the heater 411 heats the upper edge portion of the table 32 by this heat energy. Further, the heat transfer at the upper edge of the table 32 raises the temperature of the upper surface of the table 32 and the chuck piece 34, and the work fixed to the upper surface of the table 32 is heated. At this time, since all surfaces except the upper surface of the heater 411 are covered with the heat insulating member 42, the table side edge and the lower edge are not heated by the heat generated from the heater 411. The temperature of the upper surface of the table 32 can be adjusted by controlling the voltage of the power source 412 by the control device 413, and can be confirmed by the measured value displayed by the table temperature measuring device 33 of FIG.

  In this way, after the workpiece is heated to a temperature suitable for processing and the temperature of the workpiece is stabilized, each axis drive mechanism 11, 12, 13 of the relative movement means 1 and the motor of the tool holding means 2 are appropriately operated. The driving amount is input to the control means. Each axis drive mechanism 11, 12, 13 and motor are driven according to this input signal, and the workpiece is machined by performing relative movement while the tool rotates at high speed with respect to the workpiece.

According to the first embodiment, the following effects can be expected.
(1) The workpiece can be heated in accordance with the material of the workpiece, and the hardness of the workpiece can be softened to such an extent that it can be easily processed. Thereby, it becomes easy to process the workpiece, and the most efficient processing can be realized according to the material of the workpiece.
(2) Since the workpiece can be heated to maintain its temperature and the change in the workpiece state can be suppressed, the workpiece can be processed without degrading the quality of the workpiece, and the time limit for the machining operation can be reduced. it can. Thereby, the most efficient processing can be realized according to the material of the workpiece.

(3) Since the heater 411 is built in the work holding means 3 and heats the work by heat transfer at the contact surface between the upper edge of the heated table 32 and the work, compared to heating from the outside of the work holding means 3 , Work can be done smoothly and safely.
(4) Since the heater 411 is incorporated in the work holding means 3 and heats the work by heat transfer at the contact surface between the upper edge of the heated table 32 and the work, the tool is difficult to be heated and the tool is cut by heat. The decrease in performance can be reduced.
(5) Since there is no member that needs to be frequently replaced in the heating means 4, it is possible to save labor for replacement.

(6) Since the voltage of the power source 412, that is, the amount of heat generated by the heater 411 can be adjusted using the control device 413, the workpiece can be maintained at an appropriate temperature.
(7) Since all surfaces except the upper surface of the heater 411 are covered with the heat insulating member 42, the side edge and the lower edge of the table 32 are not heated too much by the heat generated from the heater 411. The deformation and damage of the work holding means due to heat can be relatively reduced.

  In the first embodiment, the heating unit 4 is built in the table 32. However, at least only the heater 411 needs to be built in the upper edge of the table 32, and each member of the heating unit 4 except the heater 411 is used. May be installed outside the table 32.

Second Embodiment
FIG. 3 shows a schematic cross-sectional view of the work holding means of the second embodiment. In addition, this 2nd Embodiment does not heat the upper surface of a table, and is not contained in this invention.
The second embodiment differs from the first embodiment in the work holding means 3 and the heating means 5.
The work holding means 3 of the second embodiment is different from the work holding means 3 of the first embodiment in that it is made of a non-magnetic material.

The heating means 5 of 2nd Embodiment is comprised from the magnetic field generation means 51 incorporated in the table 32 like FIG.
The magnetic field generating means 51 includes a plurality of coils 511 that generate a magnetic field by passing a current, a power source 512, a control device 513 that adjusts the magnitude of the magnetic field, that is, a voltage of the power source 512, and a coil 511. , A power source 512 and an annular conductor 514 connecting the control device 513 in series.
The plurality of coils 511 are arranged side by side on the upper edge of the table 32.
The control device 513 adjusts the voltage of the power supply 512 by inputting a voltage value corresponding to the temperature of the upper surface of the table 32 through the control panel, with a control panel installed on the outer surface exposed from the table 32. Can do.

The workpiece machining method using the machining machine of the second embodiment is the same as the machining method described in the first embodiment except that the heating action by the heating means 4 becomes the heating action by the heating means 5. is there. Therefore, only the heating action by the heating means 5 will be described here.
The workpiece is heated by IH heating (electromagnetic induction heating) using the magnetic field generator 51 of the heating means 5. First, a voltage is applied to the circuit by operating a control panel installed in the control device 513 of the magnetic field generating means 51. Then, a direct current flows through the coil 511 and a magnetic field is generated around the coil by electromagnetic induction. When the work fixed on the upper surface of the table 32 is a magnetic material, an eddy current is generated inside the work due to the magnetic battle passing through the work, and the work is heated by the Joule heat of the eddy current. At this time, since the table 32 is a nonmagnetic material, no eddy current is generated inside the table 32 and the table 32 is not heated. The temperature of the workpiece can be adjusted by adjusting the magnitude of the magnetic field, that is, by controlling the voltage of the power supply 412 by the control device 413.

According to the second embodiment, the following operational effects can be expected in addition to the operational effects (1) and (2) obtained in the first embodiment.
(8) Since the work holding means 3 is a non-magnetic material, the magnetic field generated from the magnetic field generating means 51 does not heat the work holding means 3, so that the work can be performed smoothly and safely.
(9) Since the workpiece is heated by the magnetic field generated from the magnetic field generating means 51, the tool is hardly heated by adjusting the magnitude of the magnetic field, and the performance degradation of the tool due to heat can be reduced.

(10) Since no heat is generated inside the work holding means 3, it is not necessary to install a heat insulating member around the magnetic field generating means 51.
(11) Since there is no member that needs to be frequently replaced in the heating means 5, it is possible to save the labor of replacement.
(12) Since the voltage of the power supply 512, that is, the magnitude of the magnetic field generated from the coil 511 can be adjusted using the control device 513, the workpiece can be maintained at an appropriate temperature.

  In the second embodiment, the heating means 5 is built in the table 32, but it is sufficient that at least only the coil 511 is built in the upper edge of the table 32. Each of the heating means 5 except the coil 511 is used. The member may be installed outside the table 32.

<Third Embodiment>
FIG. 4 shows a schematic cross-sectional view of the work holding means of the third embodiment.
The third embodiment is different from the first embodiment in that the heating means 4 is omitted and a cooling means 6 for cooling the workpiece is added instead.
The third embodiment is not included in the present invention because the cooling means is different (not a Peltier element as in the fifth embodiment described later).

The cooling means 6 of the third embodiment covers a refrigerant storage space 61 formed in the table 32, dry ice 62 as a cooling medium stored in the refrigerant storage space 61, and a part of the refrigerant storage space 61. And a heat insulating material 63.
The refrigerant storage space 61 is formed at the upper edge of the table 32, and is provided with a refrigerant inlet 611 for introducing the dry ice 62 on the side surface. The refrigerant inlet 611 is provided with a refrigerant inlet door 612 that can seal the refrigerant storage space 61.
The heat insulating member 63 covers all surfaces except the upper surface of the refrigerant storage space 61 and the refrigerant charging door 612.

The workpiece machining method using the machining machine of the third embodiment is the same as the machining method described in the first embodiment except that the heating action by the heating means 4 becomes the cooling action by the cooling means 6. is there. Therefore, only the cooling action by the cooling means 6 will be described here.
The cooling charging door 612 provided in the cooling storage space 61 of the cooling means 6 is opened, and the dry ice 62 is charged into the refrigerant storage space 61 from the cooling charging port 611. The dry ice 62 is arranged on the entire floor of the refrigerant storage space 61 as much as possible, and the cooling charging door 612 is closed. Then, the inner wall of the refrigerant storage space 61 is cooled by the dry ice 62. Further, the temperature of the upper edge of the table 32 and the chuck piece 34 is lowered by heat conduction at the upper edge of the table 32, and the work fixed to the upper surface of the table 32 is cooled.

  At this time, since all the surfaces of the refrigerant storage space 61 excluding the upper surface and the refrigerant charging door 612 are covered with the heat insulating member 63, the cold air inside the refrigerant storage space 61 becomes the side edge and the lower edge of the table 32. And the heat of the table 32 is not easily transmitted to the refrigerant storage space 61. The temperature of the upper surface of the table 32 can be adjusted by the amount of the dry ice 62 stored in the refrigerant storage space 61, and can be confirmed by the measured value displayed by the table temperature measuring device 33 of FIG.

According to the third embodiment, the following effects can be expected.
(13) The workpiece can be cooled according to the material of the workpiece, and the hardness of the workpiece can be hardened to an extent that can be easily processed. Thereby, it becomes easy to process the workpiece, and the most efficient processing can be realized according to the material of the workpiece.
(14) By cooling the workpiece, the temperature of the workpiece can be maintained and the change in the state of the workpiece can be suppressed, so that the workpiece can be processed without degrading the quality of the workpiece, and the time constraint on the machining operation can be reduced. Can do. Thereby, the most efficient processing can be realized according to the material of the workpiece. For example, even when processing frozen foods and the like, they can be processed in a frozen state by cooling, so that the processing is easy and the quality is not deteriorated by dissolution.

(15) Since the refrigerant storage space 61 is built in the work holding means 3, the work can be cooled by heat transfer on the contact surface between the upper edge of the cooled table 32 and the work. Compared to cooling the workpiece from the outside, the work can be performed smoothly and safely.
(16) Since the refrigerant storage space 61 is built in the work holding means 3 and the work is cooled by heat transfer on the contact surface between the upper edge of the table 32 and the work, the tool is not easily cooled, and condensation on the tool surface is caused by the cooling. Can be reduced.
(17) Since the cooling means 6 has a relatively simple structure, the structure can be simplified and the failure rate can be suppressed.

(18) Since the dry ice 62 is a cooling source, an energy source such as electric power is not required.
(19) Since all the surfaces except the upper surface of the refrigerant storage space 61 and the refrigerant charging door 612 are covered with the heat insulating member 63, the cold air inside the refrigerant storage space 61 is separated from the side edges and the lower side of the table 32. Less escape to the edge. Further, since heat hardly enters the refrigerant storage space 61 from the side edge portion and the lower edge portion of the table 32, the melting of the dry ice 62 stored in the refrigerant storage space 61 can be delayed.

  In the third embodiment, the dry ice 62 is used as the cooling medium. However, for example, liquid nitrogen, ice, or the like may be used.

<Fourth embodiment>
In FIG. 5, the cross-sectional schematic diagram of the workpiece holding means of 4th Embodiment is shown.
The fourth embodiment is different from the first embodiment in that the heating unit 4 is omitted and a heating / cooling unit 7 for heating and cooling the workpiece is added instead.
The fourth embodiment is not included in the present invention because the heating / cooling means is different (not a Peltier element as in the fifth embodiment described later).

The heating / cooling means 7 of the fourth embodiment includes a fluid storage space 71 formed in the work holding means 3, a temperature adjustment fluid 72 stored in the fluid storage space 71, and the temperature adjustment fluid 72 into the fluid storage space 71. A fluid moving means 73 that circulates through, a heat converting means 74 that is provided in the middle of the fluid moving means 73 and that heats and cools the temperature adjusting fluid 72, and a heat insulating material 75 that covers a part of the surface of the fluid storage space 71. It consists of.
The fluid storage space 71 is built in the upper edge portion of the table 32, and is connected to the fluid moving means 73 on one side wall and an inlet 711 into which the temperature adjusting fluid 72 flows, and connected to the fluid moving means 73 on the other side wall. And an outlet 712 through which the temperature control fluid 72 flows out.

The fluid moving unit 73 connects the fluid storage space 71 and the heat converting unit 74, and an annular pipe 731 that passes the temperature adjusting fluid 72 therein, and a pump 732 that is provided in the middle of the pipe 731 and that powers the temperature adjusting fluid 72. And.
The heat converting means 74 heats and cools the temperature adjusting fluid 72 that has flowed into the inside, and flows out to the pipe 731 of the fluid moving means 73.
The temperature control fluid 72 is used in a temperature range in which, for example, water, oil, and the like are unlikely to change in state, and circulates through the heating / cooling means 7 with the above configuration.
The heat insulating member 75 covers all surfaces except the upper surface of the fluid storage space 71 and includes two pipe holes (not shown) through which the pipe 731 of the fluid moving means 73 connected to the fluid storage space 71 passes. ing.

The workpiece machining method using the machining machine of the fourth embodiment is different from the machining method described in the first embodiment in that the heating action by the heating means 4 becomes the heating / cooling action by the heating / cooling means 7. It is the same except for this. Therefore, only the heating / cooling action by the heating / cooling means 7 will be described here.
First, the case where it is desired to heat the workpiece will be described. The temperature control fluid 72 is circulated by operating the pump 732 of the heating / cooling means 7. At the same time, the heat conversion means 74 is also operated to heat the temperature control fluid 72 passing through the inside of the heat conversion means. Then, the temperature control fluid 72 that has passed through the heat conversion means 74 becomes high temperature. The temperature-controlled fluid 72 that has reached a high temperature flows into the fluid storage space 71 from the inlet 711 through the pipe 731.

The inner wall of the fluid storage space 71 is heated by the heat of the temperature adjusting fluid 72 that has flowed into the fluid storage space 71. Furthermore, the upper edge of the table 32 is heated by heat transfer from the inner wall of the fluid storage space 71 to the upper edge of the table 32, and the work fixed to the upper surface of the table 32 is heated.
The temperature adjustment fluid 72 whose temperature has decreased due to the application of heat to the inner wall of the fluid storage space 71 flows out from the outlet 712 of the fluid storage space 71 to the pipe 731. Therefore, the temperature control fluid 72 that has passed through the fluid storage space 71 has a low temperature. The low temperature control fluid 72 flows through the pipe 731 again into the heat conversion means 74 and is heated. The work is heated by circulating the temperature adjusting fluid 72 inside the heating / cooling means 7 with such an action. Further, since all the surfaces of the fluid storage space 71 except the upper surface are covered with the heat insulating member 75, the table side edge and the lower edge are heated by the amount of heat applied to the inner wall of the fluid storage space 71. There is nothing.

Next, the cooling action by the heating / cooling means 7 when the work is desired to be cooled is different from the heating action of the heating / cooling means 7 when the work is desired to be heated instead of being heated. That is, the temperature control fluid 72 is cooled by the heat conversion means 74, and the low temperature control fluid flows into the fluid storage space 71, whereby the inner wall of the fluid storage space 71 is cooled, and the upper edge of the table 32 is transferred by heat transfer. The workpiece is further cooled.
The temperature of the upper surface of the table 32 can be adjusted by adjusting the temperature of the temperature adjusting fluid 72 by the heat conversion means 74, and can be confirmed by the measured value displayed by the table temperature measuring device 33 of FIG.

According to the fourth embodiment, in addition to the operational effects (1) and (2) obtained from the first embodiment and the operational effects (13) and (14) obtained from the third embodiment, the following Expected effects.
(20) By adjusting the temperature of the temperature adjusting fluid 72, both heating and cooling of the workpiece can be performed.
(21) Since the fluid storage space 71 is built in the work holding means 3 and the temperature of the work is adjusted by heat transfer at the contact surface between the upper edge of the heated table 32 and the work, the outside of the work holding means 3 Compared to adjusting the temperature of the workpiece, the work can be performed smoothly and safely.

(22) Since the fluid storage space 71 is built in the workpiece holding means 3 and the workpiece is heated and cooled by heat transfer at the contact surface between the upper edge of the heated table 32 and the workpiece, the tool is heated and cooled. This makes it difficult to reduce the cutting performance of the tool due to heat and the occurrence of condensation on the tool surface due to cooling.
(23) Since the heating / cooling means 7 does not have a member that needs to be frequently replaced, labor for replacement can be saved.
(24) Since the temperature of the temperature control fluid 72, that is, the amount of heat generated from the fluid storage space 71 can be adjusted using the heat conversion means 74, the workpiece can be maintained at an appropriate temperature.

(25) Since all surfaces except the upper surface of the fluid storage space 71 are covered with the heat insulating member 75, the side edge portion and the lower edge portion of the table 32 are heated by the amount of heat generated from the fluid storage space 71. The deformation and damage of the work holding means 3 due to heat can be relatively reduced.
(26) Since all surfaces except the upper surface of the fluid storage space 71 are covered with the heat insulating member 75, unnecessary heat exchange between the side and lower edges of the table 32 and the fluid storage space 71 is performed. Since it can be reduced, the temperature inside the fluid storage space 71 can be maintained.

  As the temperature control fluid 72 used in the fourth embodiment, water, oil, air, and other gases can be considered. Further, although the heating / cooling means 7 is built in the work holding means 3, it is sufficient that at least only the fluid storage space 71 is built in the upper edge of the table 32. Each component of the cooling means 7 may be installed outside the table 32.

<Fifth Embodiment>
FIG. 6 is a schematic cross-sectional view of the work holding means of the fifth embodiment.
The fifth embodiment is different from the first embodiment in that the heating unit 4 is omitted and a heating / cooling unit 8 for heating and cooling the workpiece is added instead.

The heating / cooling means 8 includes a heat generation / heat absorption circuit 81 built in the work holding means 3 and a heat receiving plate 82 that receives heat from the heat generation / heat absorption circuit 81.
The heat generation / heat absorption circuit 81 is built in the upper edge portion of the table 32 and adjusts the voltage of the Peltier element unit 811 that generates and absorbs heat, the DC power source 812 that sends a direct current to the Peltier element unit 811, and the DC power source 812. This is a DC circuit constituted by a control device 813 and an annular conductor 814 in which a Peltier element portion 811, a DC power supply 812, and a control device 813 are connected in series.
The Peltier element portion 811 is disposed on the upper edge of the table 32 and includes a plurality of Peltier elements 815 arranged in parallel and an electrode 816 that joins adjacent Peltier elements.

The Peltier element 815 has a rectangular shape and is composed of two types of semiconductors, p-type and n-type. These p-type semiconductors and n-type semiconductors have their longitudinal directions oriented in the vertical direction, and p-type and n-type are alternately arranged in parallel along the horizontal direction.
The electrode 816 is a conductive metal plate and is adjacent to the upper electrode 816A that is installed on the upper end surfaces of the adjacent p-type semiconductor and n-type semiconductor so that all the Peltier elements 815 are connected in series. There is a lower electrode 816B provided on the lower end surfaces of the p-type semiconductor and the n-type semiconductor. Thereby, the p-type semiconductor and the n-type semiconductor are alternately connected in series.

When a p-type semiconductor and an n-type semiconductor of the Peltier element 815 are connected in series by the electrode 816 and a direct current is passed, the Peltier element 815 has a material that causes a heat generation phenomenon at one end and a heat absorption phenomenon at the other end simultaneously. Therefore, here, an exothermic phenomenon or an endothermic phenomenon occurs at the joint portion between each Peltier element 815 and the electrode 816. Further, since condensation may occur on the surface due to an endothermic phenomenon, the surface of the Peltier element 815 is waterproofed.
In the control device 813, a control panel installed on the outer surface is exposed from the table 32, and a voltage value corresponding to the temperature of the upper surface of the table 32 is input from the control panel to adjust the voltage of the DC power supply 812. be able to.

  The heat receiving plate 82 is a ceramic rectangular flat plate, and is provided in contact with upper and lower end surfaces of the Peltier element portion 811, that is, in contact with upper and lower electrodes 816 provided on the Peltier element 815. Thereby, one heat receiving plate 82 provided at one end of the Peltier element part 811 is heated by a heat generation phenomenon at one end of the Peltier element part 811, and at the same time, due to a heat absorption phenomenon at the other end of the Peltier element part 811, the Peltier element part The other heat receiving plate 82 provided at the other end of 811 is cooled.

  The heat radiating means 9 is formed in the work holding means 3, a water storage space 91 built in the lower edge of the table 32, a temperature adjusting fluid 92 stored in the water storing space 91, and the temperature adjusting fluid 92 into the water storing space 91. A fluid moving means 93 that circulates through and a heat converting means 94 that is provided in the middle of the fluid moving means 93 and heats and cools the temperature adjusting fluid 92.

  The water storage space 91 is built in the table 32 and is formed with a slight space between the lower edge of the Peltier element portion 811. An inlet 911 that is connected to the fluid moving means 93 and into which the temperature adjusting fluid 92 flows in is provided on one side wall of the water storage space 91, and an outlet 912 that is connected to the fluid moving means 93 and that outputs the temperature adjusting fluid 92 is provided on the other side wall. I have.

The fluid moving means 93 connects the water storage space 91 and the heat conversion means 94, and has an annular pipe 931 for passing the temperature adjusting fluid 92 therein, and a pump 932 that is provided in the middle of the pipe 931 and powers the temperature adjusting fluid 92. It has.
The heat converting means 94 heats and cools the temperature adjusting fluid 92 that has flowed into the inside, and flows out to the fluid moving means 93. When heating the workpiece, that is, when the lower end side of the Peltier element portion 811 generates an endothermic phenomenon, when the temperature adjustment fluid 92 is heated and the workpiece is cooled, that is, when the lower end side of the Peltier element portion 811 generates an exothermic phenomenon. In this case, the temperature adjustment fluid 92 is cooled.
The temperature control fluid 91 is a fluid that does not change its state even at a certain high temperature or low temperature, and circulates inside the heat dissipation means 9 by the above-described configuration.

The workpiece processing method using the processing machine of the fifth embodiment is different from the processing method described in the first embodiment in that the heating action by the heating means 4 becomes the heating / cooling action by the heating / cooling means 8, And it is the same except for the point to which the thermal radiation effect | action by the thermal radiation means 9 is added. Therefore, here, the heating / cooling action by the heating / cooling means 8 and the heat radiation action by the heat radiating means 9 will be described.
First, the case where it is desired to heat the workpiece will be described. Here, the arrangement of the Peltier elements 815 is as shown in FIG. First, the power is turned on by operating a control panel provided in the controller 813 of the heating / cooling circuit 81 of the heating / cooling means 8, and a direct current flows in the direction of arrow A through the heating / heat absorption circuit 81. At the same time, the pump 931 and the heat conversion means 94 of the heat dissipation means 9 are operated.

  Then, a direct current flows inside the Peltier element 815. At this time, holes and electrons move due to the Peltier effect inside the p-type semiconductor and the n-type semiconductor of the Peltier element 815, but these holes and electrons carry heat energy and flow current in the direction of arrow A. In the case of FIG. 6, a heat generation phenomenon occurs at the joint portion between the upper end of each Peltier element 815 and the upper electrode 816A, and at the same time, an endothermic phenomenon occurs at the joint portion between the lower end of each Peltier element 815 and the lower electrode 816B.

The heat receiving plate 82 provided in contact with the upper electrode 816A is heated by a heat generation phenomenon generated on the upper end side of the Peltier element portion 811. Further, the heat transfer from the heat receiving plate 82 to the upper edge of the table 32 raises the temperature of the upper surface of the table 32 and the chuck piece 34, and the work fixed to the upper surface of the table 32 is heated.
The temperature of the upper surface of the table 32 can be adjusted by controlling the voltage of the DC power supply 812 by the control device 813, and can be confirmed by the measured value displayed by the table temperature measuring instrument 33 in FIG.

At this time, an endothermic phenomenon has occurred at the lower end side of the Peltier element portion 811, and the heat receiving plate 82 is cooled by this endothermic phenomenon, and there is a risk that the temperature of the lower edge portion of the table 32 becomes excessively low. For this reason, the heat radiating means 9 alleviates the heat absorption effect by the lower end side of the Peltier element portion 811 to some extent.
In the heat dissipating means 9, the temperature adjusting fluid 92 is circulated by the fluid moving means 93. At the same time as a direct current is passed through the heat generation / heat absorption circuit 81, the temperature control fluid 92 passing through the inside of the heat conversion means 94 is heated by the heat conversion means 94. Thereby, the high temperature control fluid 92 flows into the water storage space 91, the temperature inside the water storage space 91 rises, and the inner wall is heated.

Then, the table 32 is heated by heat transfer from the inner wall of the water storage space 91 to the table 32, and as a result, a temperature drop at the lower edge of the table 32 can be suppressed. The temperature adjusting fluid 92 may be any temperature that can relax the endothermic action on the lower end side of the Peltier element portion 811 to such an extent that the processing machine is not adversely affected and the safety of work is maintained.
In this way, the work can be heated by the heat generation / heat absorption circuit 81, and the temperature change at the lower edge of the table 32 can be suppressed to some extent by the heat dissipation means 9.
When it is desired to cool the workpiece, a current is passed through the heat generation / heat absorption circuit 81 in the direction opposite to A, and the temperature control fluid 92 is circulated through the heat dissipation means 9 while being cooled by the heat conversion means 94. The action of the heat generation / heat absorption circuit 81 and the heat radiation means 9 at this time is different from that in the case where it is desired to heat the workpiece, in that heating is changed to cooling.

In addition to the operational effects (1) and (2) obtained from the first embodiment and the operational effects (13) and (14) obtained from the third embodiment, the fifth embodiment provides the following effects. You can expect.
(27) Both heating and cooling of the workpiece can be performed by the heat generation and heat absorption phenomenon of the Peltier element portion 811.
(28) Since the Peltier element portion 811 is incorporated in the workpiece holding means 3 and the temperature of the workpiece is adjusted by heat transfer at the contact surface between the upper edge of the heated table 32 and the workpiece, the outside of the workpiece holding means 3 Compared to heating and cooling the workpiece, the work can be performed smoothly and safely.
(29) Since the Peltier element portion 811 is incorporated in the work holding means 3 and the temperature of the work is adjusted by heat transfer at the contact surface between the upper edge of the heated table 32 and the work, the tool is heated and cooled. It is difficult to reduce the cutting performance of the tool due to heat and the occurrence of condensation on the tool surface due to cooling.

(30) Since there is no member in the heating / cooling means 8 that needs to be frequently replaced, the labor of replacement can be saved.
(31) Since the voltage of the DC power supply 812, that is, the amount of heat generated from the Peltier element portion 811 can be adjusted using the control device 813, the temperature of the workpiece can be appropriately maintained.
(32) Since the positions of the heat generating part and the heat absorbing part of the Peltier element part 811 are switched by changing the direction of the direct current of the DC power supply 812, the heating and cooling of the workpiece can be switched instantaneously.
(33) Since the heat generating means 9 can alleviate the excessive heat generation and heat absorption on the lower end side of the Peltier element portion 811, the side edge and the lower edge of the table 32 are not heated and cooled excessively. The deformation and damage of the work holding means 3 can be relatively reduced.

In the fifth embodiment, when the workpiece is heated, the endothermic action on the lower end side of the Peltier element portion 811 is relaxed by the heat dissipating means 9, but the cooling of the lower edge of the table 32 due to this endothermic action causes damage to the table 32. In the case where it does not cause a risk of work, the heat radiating means 9 may not have a function of reducing the heat absorbing action at the lower end of the Peltier element portion 811. In the fifth embodiment, the heat dissipating means 9 using the temperature adjusting fluid 92 is used. However, the heat dissipating means 9 includes, for example, a fan installed below the Peltier element portion 811 of the table 32 and rotates the fan. The structure may be such that excess heat is dissipated by directing the generated wind to the table 32. Further, instead of the heat dissipating means 9, all surfaces except the upper surface of the Peltier element part 811 may be covered with a heat insulating material to make it difficult to transfer heat between the lower end side of the Peltier element part 811 and the table 32. .
The processing machine according to the fifth embodiment is capable of heating and cooling the workpiece. However, when only the workpiece is desired to be cooled, a direct current may be supplied to the circuit including the Peltier element portion 811 in an appropriate direction.

It should be noted that the present invention is not limited to the above-described embodiments, and modifications, improvements, and the like within the scope that can achieve the object of the present invention are included in the present invention.
For example, the processing machines of the first to fifth embodiments perform the relative movement of the tool and the workpiece by driving the relative movement means 1, but the present invention is a type driven by the workpiece holding means 3, The present invention can also be applied to a processing machine that drives both the tool holding means 2 and the work holding means 3.

In the first to fifth embodiments, the driving of the relative movement unit 1 is controlled by a signal input to the control unit. However, in the present invention, the driving control in the triaxial direction is performed by the relative movement unit 1. It may be done manually with a lever or handle.
In the first and fourth embodiments, the temperature change of the side edge portion and the lower edge portion of the table 32 is reduced by the heat insulating materials 42 and 75. For example, a heat radiating means is provided on the lower edge portion of the table 32. It is also possible to reduce the excessive heat generation and heat absorption generated from the heating means 4 or the heating / cooling means 7. As the heat dissipating means, a method using a temperature control fluid, a method of dissipating heat by the wind of a fan, and the like can be considered.
In the first, second, fourth, and fifth embodiments, each temperature adjusting means (heating means 4 and 5 and heating / cooling means 7 and 8) is operated to adjust the temperature of the workpiece. In the present invention, when the set temperature of the upper surface of the table 32 is input, the temperature control means (not shown) automatically controls each temperature adjusting means so that the upper surface of the table 32 is kept constant at the set temperature. ) May be added. According to such a configuration, it is possible to save the trouble of finely operating each temperature adjusting means for temperature adjustment.

  The present invention can be used for a processing machine.

The perspective view which shows the processing machine concerning 1st Embodiment of this invention. The schematic cross section which shows the workpiece | work holding means in 1st Embodiment of this invention. The schematic cross section which shows the workpiece | work holding means in 2nd Embodiment which is not included in this invention. The schematic cross section which shows the workpiece | work holding means in 3rd Embodiment which is not included in this invention. The schematic cross section which shows the workpiece | work holding means in 4th Embodiment which is not included in this invention. The schematic cross section which shows the workpiece | work holding means in 5th Embodiment of this invention.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 ... Relative movement means, 2 ... Tool holding means, 3 ... Work holding means, 4 ... Heating means, 41 ... Electrothermal conversion means, 5 ... Heating means, 51 ... Magnetic field generating means, 6 ... Cooling means, 61 ... Refrigerant storage Space, 62 ... Dry ice, 7 ... Heating / cooling means, 71 ... Fluid storage space, 72 ... Temperature control fluid, 73 ... Fluid moving means, 74 ... Heat conversion means, 8 ... Heating / cooling means 81 ... Heat generation / heat absorption circuit 815: Peltier element

Claims (3)

In a processing machine having a work holding means having a table for placing a work on an upper surface, a tool holding means for holding a tool for processing a work, and a relative movement means for relatively moving the work holding means and the tool holding means ,
A heating means built in the table for heating the upper surface of the table;
The processing machine, wherein the heating means is constituted by electrothermal conversion means for converting electrical energy into thermal energy. In a processing machine having a work holding means having a table for placing a work on an upper surface, a tool holding means for holding a tool for processing a work, and a relative movement means for relatively moving the work holding means and the tool holding means ,
A cooling means built in the table for cooling the upper surface of the table ;
It said cooling means, the processing machine, characterized in that it is constituted by a circuit including a Peltier element. In a processing machine having a work holding means having a table for placing a work on an upper surface, a tool holding means for holding a tool for processing a work, and a relative movement means for relatively moving the work holding means and the tool holding means ,
A heating means built in the table for heating the upper surface of the table and a cooling means built in the table for cooling the upper surface of the table ;
It said heating means and said cooling means, the processing machine, characterized in that it is constituted by the exothermic endothermic circuit including a Peltier element.

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