JP4775431B2 - Manufacturing method of heat plate - Google Patents

Description

The present invention may, for example, a method of manufacturing a heat plates to be used for cooling in the semiconductor manufacturing device.

  In a heat plate used for cooling in a semiconductor manufacturing apparatus, a concave groove serving as a cooling medium flow path is formed in one of a pair of plate materials made of an aluminum alloy in advance, and the periphery of the joint surface of the pair of plate materials is TIG. Welded, MIG welded, electron beam welded, or a pair of plate members bolted along the thickness direction is used. Among these, the heat plate manufactured using TIG welding or MIG welding has a problem in the reliability of the welded portion because pinholes may be generated during welding or shield gas may be involved. In addition, the heat plate manufactured using electron beam welding is expensive because the welding operation is performed in a vacuum, and a positioning jig is necessary to perform high-precision welding positioning.

In order to solve the above problem, an annular groove and an annular protrusion that are fitted to each other and surround the flow path are joined to a joint surface of a pair of plate materials in which a concave groove that serves as a cooling medium flow channel is formed in advance on one plate material. There is also proposed a heat plate in which a fastening portion having a high-density sealing property is formed by fitting the annular groove and the annular projecting portion while forging and compressing a pair of plate materials (see, for example, Patent Document 1). ).
JP 2000-311932 A (pages 1 to 15, FIGS. 1 to 24)

However, in order to obtain a fastening portion, the heat plate formed by joining by forging compression compresses a pair of plates further with an annular groove or an annular protrusion in addition to a concave groove serving as a cooling medium flow path in one plate. Need to form. For this reason, there existed a problem that a process became complicated, for example, a man-hour and cost increased, and high positioning accuracy was required since fitting operation and forging pressure compression were performed simultaneously.
Further, in the conventional heat plate and the heat plate of Patent Document 1, since the pair of plate members are joined by welding or forging pressure compression, the pair of plate members is also located at a position other than the cooling medium flow path. For this reason, there also existed a problem that a heat plate was thick and weight increased.

The present invention is to solve the problems described in the background art, for example, be used in a vacuum, there is no fear of such a gas leak, inexpensively manufactured by small material and man-hours heat plates which is thin and lightweight It is an object of the present invention to provide a method for producing a heat plate.

Means for Solving the Problems and Effects of the Invention

In order to solve the above-mentioned problems, the present invention has been conceived by concealing one substrate having a heat medium flow path and the opening of the flow path in a solid state by a lid plate.
That is, the method for manufacturing a heat plate according to the present invention (Claim 1) comprises, on the surface of a substrate made of a metal or an alloy, at least one of a straight portion and a bent portion along the surface, and close to the surface of the substrate. A pair of step portions located on both sides of the opening of the groove, and a groove formed of a heat medium flow path formed between the pair of step portions and deeper than these step portions are formed. A step of closing the opening of the groove by placing a cover plate made of metal or alloy across a pair of steps in the groove, and the periphery of the cover plate and the substrate A step of joining the lid plate along a pair of steps in the opening of the concave groove by performing friction stir welding along the vicinity of the boundary with For the above-mentioned closing and joining process The lid plate is inserted between the pair of stepped portions to close the opening of the concave groove, and has a pressure-reverse portion integrally entering the upper portion of the heat medium flow path on the bottom surface. or exhibits a hat-shaped, or state, and are not exhibiting cross almost Geta shape having a pair of parallel ridges extending downward along the bottom surface on both side walls of the heating medium flow path integrally, used in the bonding step On the bottom surface of the tool body of the friction welding tool, spiral ridges that project spirally from the base of the agitation pin are provided so as to project between the spiral ridge and the agitation pin. Is located on the tip end face of the stirring pin in the friction welding tool used in the joining step, and the outer peripheral end near the concave groove is one side wall close to the outer peripheral end in the heat medium flow path of the concave groove. The side that is more than the position directly above Located in vertical wall side of the step portion adjacent to the outer peripheral edge of the recessed groove near the distal end surface of the stirring pin of the friction welding tool used in the bonding process, a on the bottom surface of one of the stepped portion in the groove Centering on the position of the height of the stirring pin radius on the position closer to the vertical wall of the stepped portion by the radius of the stirring pin from the upper end of the side wall of the heat medium flow path of the concave groove. More than the circumference of a quarter circle formed by rotating a vertical line with a radius portion hanging down to the bottom surface side of the vertical wall approximately 90 ° toward a position directly above the side wall of the heat medium flow path. The end of the movement path of the stirring pin in the friction welding tool used for the joining step is located on the substrate that is located near the vertical wall of one step portion and that is away from just above the heat medium flow path in the concave groove. It is characterized by being located .

According to this, the lid plate can be easily and accurately positioned and disposed between the pair of step portions sandwiching the heat medium flow path in the concave groove, and it becomes easy to form a heat exchange surface with a flat surface. In addition, since the joint portion by friction stir welding is separated from the heat medium flow path, it is easy to secure the cross-sectional area of the heat medium flow path as set . In addition, since it is possible to reliably prevent misalignment and a defective joint such as a change in the cross-sectional area of the heat medium flow path, it is possible to improve yield and productivity .
In addition, a spiral protrusion that extends in a spiral shape from the base of the stirring pin to the periphery of the bottom surface of the tool body of the friction stirring tool protrudes, and the inner metal pool portion is positioned, so that Since a part of the nearby metal spreads stepwise on the surface of the substrate or the like and solidifies, it is possible to form a bonding portion having a surface with few burrs .

Furthermore, by defining the position of the outer peripheral end near the concave groove on the tip surface of the stirring pin, positioning of the stirring pin is facilitated, and a sound joint can be reliably formed, and positional deviation and It is also possible to reliably prevent joint defects such as a small deformation of the cross-sectional area of the heat medium flow path, and to improve yield and productivity . Moreover, since the end of the stirring pin is surely removed from the position of the heat medium flow path, it is possible to prevent the recessed trace of the stirring pin formed at the end from approaching or communicating with the heat medium flow path, thereby improving reliability. It is done .
Therefore, it is possible to reliably and inexpensively provide a heat plate that is less likely to cause problems such as gas leaks, with fewer materials and man-hours .

The heat plate of the present invention can be used not only for cooling but also for heating .
The material of the substrate and the cover plate also includes the same type or different types of metals such as aluminum, steel, stainless steel, and titanium alloy that can be friction stir welded to the alloy substrate or cover plate metal or alloy .
Furthermore, the lid plate is drooped shortly between the pair of stepped portions in the groove or between the pair of opposing side walls of the heat medium flow path along the cross-section inverted hat shape having a thick wall portion or between the pair of side walls. It has the shape of a cross section with a protruding ridge . By using such a cross-sectional inverted hat-shaped or cross-sectionally shaped cover plate, it is possible to easily prevent the groove in the width direction from being displaced during friction stir welding .
In addition, the heat medium includes both a cooling medium and a heating medium .

Further, according to the present invention, the spiral ridge projecting from the bottom surface of the tool body of the friction welding tool has about one turn or about half turn when viewed from the bottom (claim). 2) is also included .

Further, according to the present invention, the friction stir welding in the joining step is performed by one pass that continuously moves the friction welding tool while rotating around the boundary between the periphery of the lid plate and the substrate. The manufacturing method (Claim 3) is also included .

According to this, a heat plate in which the opening of the concave groove is quickly sealed can be manufactured with a small number of man-hours . Therefore, it is possible to provide a heat plate that is less likely to cause problems such as gas leakage efficiently and at a lower cost .

In the following, the best mode for carrying out the present invention will be described.
FIG. 1 is a plan view of a heat plate 1 of a reference form as a premise of the present invention, FIG. 2 is a vertical sectional view taken along the line B-B in FIG. 1, and FIG. It is an enlarged view of a dashed-dotted line part C. FIG.
1 and 2, the heat plate 1 includes a flat substrate 2 made of an aluminum alloy having a thickness of about 30 mm, and a straight portion and a bent portion in plan view along the surface 3 of the substrate 2. The concave groove 6 is formed in a meandering shape, and the lid plate 5 closes and seals the opening of the concave groove 6.
The substrate 2 is made of, for example, an aluminum alloy of JIS: A6061-T5, and the concave groove 6 having alternating straight portions and curved portions is formed along the surface 3 by counter boring with an end mill. Yes. As shown in an enlarged view in FIG. 3, the groove 6 has a pair of step portions 8, 8 that are located near the surface 3 of the substrate 2 and symmetrically on both sides of the opening of the groove 6, and the step portion 8. , 8 and a heat medium flow path 7 having a square cross section formed at a position deeper than these and near the back surface 4 of the substrate 2.

The cover plate 5 is similar to the opening of the groove 6 in plan view and has a rectangular cross section, and is made of the same aluminum alloy plate as described above. As shown in FIG. 3, the cover plate 5 is inserted and placed on both side edges between the step portions 8 and 8 of the concave groove 6, and a butting surface along the vertical wall of the step portions 8 and 8 ( Along the longitudinal direction of the boundary 9, the opening of the groove 6 is sealed and integrated with the substrate 2 by the joints S, S by friction stir welding. As shown in FIG. 1, the cover plate 5 is bonded to the substrate 2 via the bonding portion S at the entire periphery. In addition, you may use the thing of the form which joined the plate-shaped part of the some linear part and curved part integrally as the cover plate 5 concerned beforehand.
Incidentally, the width of the opening in the groove 6 is about 30 mm, the width and depth of the step 8 are each 5 mm, and the width and depth of the heat medium flow path 7 are each 20 mm. The width is less than about 30 mm and the thickness is 5 mm.

  According to the heat plate 1 as described above, since the substrate 2 and the cover plate 5 are friction stir welded in a solid state at the opening of the groove 6 formed in advance in the substrate 2, conventional welding is performed. Can prevent pinholes and gas entrainment. Moreover, since it forms from the board | substrate 2 which has the ditch | groove 6, and the cover plate 5 which obstruct | occludes the opening part of the ditch | groove 6 and seals, the thickness of the heat plate 1 whole can be made thin and lightweight. Therefore, for example, when used for cooling in a vacuum in a semiconductor manufacturing apparatus, problems such as gas leakage can be solved and manufacturing can be performed at low cost with fewer materials and man-hours.

A manufacturing method that is a manufacturing method for obtaining the heat plate 1 as described above and that is also applied to the present invention for obtaining the heat plates 1c and 1d described later will be described with reference to FIG.
As shown in FIG. 4, a step of forming the above-described meandering concave groove 6 along the surface 3 of the substrate 2 by, for example, cutting using an end mill or a milling cutter is performed. At this time, in addition to the method of cutting using two types of end mills of large diameter and small diameter one after another, the method of cutting continuously by using one type of end mill whose tip portion having a cutting edge has a reverse hat shape is used. The concave groove 6 composed of the step portions 8 and 8 and the heat medium flow path 7 may be formed in one pass. As shown in FIG. 4, the heat medium flow path 7 is surrounded by a bottom surface 7b and a pair of side walls 7a and 7a, and each step portion 8 has a bottom surface 8b and a vertical wall 8a.
Next, as shown in FIG. 5, a step of placing the cover plate 5 across the step portions 8, 8 of the groove 6 and closing the opening of the groove 6 is performed.

Next, as shown in enlarged views in FIGS. 6 and 7, the groove 6 rotates at a high speed along the abutting surface 9 between the vertical wall 8 a of the step 8 on one side (right side) and the side edge of the lid plate 5. Place the friction welding tool 10 and insert its stirring pin 14. The friction welding tool 10 is an integrated body including a cylindrical tool body 11 and a stirring pin 17 that hangs down near the center of the bottom surface 12 thereof, and is formed of a tool steel such as SKD61.
As shown in FIGS. 8 and 9, a ring-shaped convex portion 13 having a circular bottom view is suspended from the bottom surface 12 of the tool body 11 of the tool 10, and a ring groove having a substantially triangular cross section is formed on the inner side thereof. (Outer metal reservoir groove) 14 is formed.

Further, on the bottom surface 12 of the tool body 11, a spiral ridge 15 is formed so as to spiral from the base of the stirring pin 17 to the periphery thereof and expands in about one turn in a bottom view. A spiral inner metal reservoir 16 is located between 15 and the stirring pin 17. As shown in FIG. 9, the inner metal reservoir 16 is positioned closer to the tip (lower end) of the friction welding tool 10 than the ring groove (outer metal reservoir groove) 14. Furthermore, the stirring pin 17 has a screw portion 17a for promoting stirring on its peripheral surface. It should be noted that the spiral ridges 15 may be formed in a plurality of forms that are approximately half-circular when viewed from the bottom, and these may be arranged symmetrically from the stirring pin 17.
The tool 10 is rotated rightward at a moving speed of 0.05 to 2 m / min as indicated by an arrow in FIG. 7 while rotating at a high speed of 100 to 1500 rpm. At this time, the tool body 11 and the stirring pin 17 are accompanied by a pressing force (pushing force) of several kN to 30 kN in the axial direction. Also, as shown in FIGS. 6 and 7, the tool body 11 is rotated and moved in a vertical posture so that the bottom surface 12 is in contact with the surface 3 of the substrate 2 and the surface of the cover plate 5. The tip surface 18 at the tip of the stirring pin 17 is located at a position slightly higher than the corner between the vertical wall 8a and the bottom surface 8b of the step portion 8.

As shown in FIGS. 6 and 7, an agitation pin 17 that rotates at a high speed is inserted with a pushing force, whereby an aluminum alloy (material: hereinafter referred to as metal) of the substrate 2 and the cover plate 5 in the vicinity of the abutting surface 9. ) Is plastically fluidized by stirring with frictional heat. In addition, a part of the metal pushed out to the side or near the base by the stirring pin 17 once enters the inner metal pool portion 16 on the bottom surface 12 of the tool body 11, along the rotation direction of the stirring pin 17. After passing the side, the stirring pin 17 spreads in the width direction and solidifies while moving to the position where it was located immediately before.
Further, after a part of the metal enters the ring groove (outer metal reservoir portion) 14, the metal expands stepwise toward the surface 3 side of the substrate 2 and solidifies. For this reason, it is possible to form a joint S having a surface with few burrs along the butt surface 9.
As described above with reference to FIG. 1, the joining portion S as described above is applied continuously along the entire periphery of the meandering-shaped lid plate 5, that is, in one pass. Thereby, the said heat plate 1 with which the heat-medium flow path 7 meandering along the surface 3 was sealed can be obtained. In addition, the code | symbol 19 in FIG. 6 shows the outer peripheral end of the stirring pin 17 mentioned below.

Here, a specific example in the joining process using the friction welding tool 10 will be described together with a comparative example. As shown in FIG. 10, a plurality of substrates 2 made of an aluminum alloy (A6061-T5) with a thickness of 30 mm have an opening width of 30 mm and a step 8 width and depth of 5 mm, respectively. Concave grooves 6 each having a width and depth of the flow path 7 of 20 mm were formed individually.
Further, a plurality of lid plates 5 made of the same aluminum alloy as described above having a width of 29.8 mm and a thickness of 5 mm are individually inserted and placed between the step portions 8 and 8 of the respective concave grooves 6, and FIG. As shown in FIG. 2, after closing the opening of the concave groove 6, the substrate 2 and the cover plate 5 were restrained by a jig (not shown) in such a state.

Furthermore, a friction welding tool 10 made of SKD61 having a tool body 11 with a diameter of 25 mm, a stirring pin 17 with a diameter of 10 mm, and a length of 10 mm was prepared. Friction stir by individually changing the position of the outer peripheral end 19 near the concave groove 6 on the tip surface 18 of the stirring pin 17 of the friction welding tool 10 for the plurality of substrates 2 whose concave grooves 6 are closed by the cover plate 5. Bonding was performed.
At this time, the rotation speed of the tool body 11 and the stirring pin 17 is 900 rpm, the moving speed along the abutting surface 9 is 0.3 m / min, the pushing force along the axial direction of the stirring pin 17 is 1 kN, and bonding (moving). The length was 200 mm and all were common.

In the case illustrated in FIG. 10, the center of the tip surface 18 of the stirring pin 17 is on the vertical wall 8 a (overlapping the butting surface 9) of the stepped portion 8 on the left side of the groove 6 and the tip surface of the stirring pin 17. The outer peripheral end 19 near the concave groove 6 in 18 is located at a position slightly higher than the bottom surface 8 b of the step portion 8. Friction stir welding similar to that described above was performed by changing the position of the outer peripheral edge 19 for each of the plurality of substrates 2. And the junction part S vicinity obtained for every board | substrate 2 was cut | disconnected, and the quality was determined. The results are shown in FIG.
In the graph of FIG. 11, a circle mark indicates a bonding portion S that has no internal defect and the bonding position is appropriate, a triangle mark indicates a bonding portion S that has no defect but is misaligned, and a mark X indicates a position. The joining part S which the internal defect by shift | offset | difference produced and the cross section of the heat medium flow path 7 became narrow is shown.

10 and 11, x is the distance from the position just above the left side wall 7 a in the heat medium flow path 7 to the right peripheral surface of the stirring pin 14, and y is the bottom surface 8 b of the left step 8. 10 to the tip surface 18 of the stirring pin 17, z in FIG. 10 indicates a center described later, and p indicates a vertical line described later.
According to the graph of FIG. 11, in each example, when the outer peripheral end 19 near the concave groove 6 on the tip surface 18 of the stirring pin 17 is on the left side of the curve K in the graph of FIG. The part S was marked with a circle or a triangle, and when it was located on the right side or below the curve K (comparative example), it was marked with a cross.

  As illustrated in FIG. 10, the curve K has a center z near the middle of the vertical wall 8 a of the left step portion 8 (near the center of gravity of the stirring pin 17), and a radius r of the stirring pin 17 from the center z. A vertical line p that hangs down to the bottom surface 8b is formed by rotating 90 ° from a corner between the vertical wall 8a and the bottom surface 8b of the step 8 to a position directly above the left side wall 7a of the heat medium passage 7. Is a quarter circumference. In addition, the curve K and the axisymmetric curve K are illustrated in the step 8 on the right side of FIG. 10 for reference.

  That is, the outer peripheral end 19 near the concave groove 6 on the tip surface 18 of the stirring pin 17 is on the bottom surface 8 b of the step portion 8 on the left side (one side) of the concave groove 6, and the heat medium flow path 7 of the concave groove 6. The height of the stirrer pin 17 from the upper end of the left side wall 7a by the radius r of the stirrer pin 17 is close to the vertical wall 8a of the step 8 (corresponding to the vertical wall 8a in FIG. 10). A vertical line p centering on the position z (in FIG. 10 substantially coincides with the midpoint of the vertical wall 8a) and hanging from the center z to the bottom surface 8b by the radius r of the stirring pin 17 is taken as the vertical wall 8a of the step portion 8. And the bottom surface 8b from the corner of the heat medium flow path 7 to the position just above the left side wall 7a by 90.degree. In the example located near the vertical wall 8a, the joint S is marked with a circle or a triangle.

On the other hand, the joint portion S of the comparative example located on the right side or the lower side of the curve K was marked with x having a misalignment defect. Since the distance x between the stirring pin 17 and the side wall 7a of the heat medium flow path 7 is too small, the joint S of the comparative example includes internal defects (holes) and flows into the heat medium flow path 7 ( A softened metal enters, and its cross section is narrowly deformed.
By carrying out the friction stir welding process within the proper range from each of the above embodiments, the heat plate 1 of the present invention in which the heat medium flow path 7 of the concave groove 6 is strictly sealed along the surface 3 of the substrate 2 is surely obtained. Can be manufactured.

FIGS. 12 and 13 are a plan view and a partially enlarged view showing a heat plate 1a of a reference form similar to the heat plate 1 and a method of manufacturing the same. As shown in FIG. 12, along the surface 3 of the substrate 2, the friction welding tool 10 is rotated and moved along the entire periphery of the cover plate 5 with the opening of the groove 6 closed by the method described above. Let
The tool 10 has a step 8 of the cover plate 5 and the recessed groove 6 covered by the cover plate 5 along the arrow indicated by the solid line in FIG. 12 from the lower left start point (S start) on the surface 3 of the substrate 2. 12 is moved along a meandering-shaped path (outward path: S-out) along the upper-right corner of the surface 3 of the substrate 2 and along the arrow indicated by a broken line in FIG. Move the route (return: S return). As a result, the entire periphery of the lid plate 5 is bonded to the substrate 2 via the bonding portion S.

As shown in an enlarged view in FIG. 13, when the friction welding tool 10 returns to the lower left start point (S start), the friction welding tool 10 passes through this and is away from the cover plate 5, that is, the heat medium flow path 7. At the position away from directly above, the end (S end) is set, and the stirring pin 17 is extracted.
The heat plate 1a (1) can be efficiently manufactured by performing friction stir welding by one path (one-stroke writing) that moves while rotating the tool 10 along the long movement path as described above. Moreover, since the heat medium flow path 7 of the concave groove 6 covered by the cover plate 5 is away from the terminal end (S end) of the movement trajectory of the tool 10, it is not affected by the concave portion of the stir pin 14. Sealed with sufficient airtightness. Therefore, the heat plate 1a which is thin and lightweight and has high reliability can be provided at low cost.

14 and 15 are schematic views showing a heat plate 1b of a different reference form and a manufacturing method thereof. As shown in FIG. 14, the heat plate 1b has a circular shape by joining a ring disk-like lid plate 5a between the inner and outer concentric joints S1 and S2 on the surface of the square substrate 2b in plan view. The opening of the concave groove (including the heat medium flow path) is sealed. That is, the concave groove located between the circular joint portions S1 and S2 is circular in plan view and formed only from the curved portion.
In order to obtain the heat plate 1b, the stirring pin 17 of the friction welding tool 10 is inserted from the position of the start point (S start) near the lower right corner of the substrate 2b as shown in FIG. The part S1 is formed by moving in a circle along the inner periphery of the cover plate 5a and in the clockwise direction, as indicated by the solid line arrows in FIGS.

Next, as shown in FIG. 15, when the tool 10 returns to the start point (S start), after passing through the tool 10 and moving to the outside of the substrate 2b, the outer peripheral side joining portion S2 is As shown by the broken-line arrows in FIGS. 14 and 15, the cover plate 5 a is formed so as to move circularly along the outer periphery of the lid plate 5 a and along the clockwise direction. Then, after forming the outer peripheral side joining portion S2, as shown in FIG. 15, the position where the friction welding tool 10 is moved toward the lower right corner of the substrate 2b is set as the end (S end), and the stirring pin 17 is extracted. .
Thereby, the dent formed in the trace of the stirring pin 17 is formed at a position away from directly above the same-shaped (similar) heat medium flow path in the ring-shaped concave groove. As a result, it is possible to obtain a thin and light heat plate 1b including a ring-shaped heat medium flow path in a plan view by performing friction stir welding by one pass (one stroke writing) that moves while rotating the tool 10. it can.

FIG. 16 relates to a heat plate 1c obtained by the present invention using the following lid plate 5b.
As shown in FIG. 16, the cover plate 5 b is inserted between the steps 8 and 8 of the groove 6 formed along the surface 3 of the substrate 2, thereby closing the opening of the groove 6. At the same time, the cross section has a substantially inverted hat shape integrally having a thick portion 5c that enters the heat medium flow path 7 from the bottom. By fitting the thick part 5c into the upper part of the heat medium flow path 7, it is possible to prevent the cover plate 5b itself from shifting in the width direction during the friction stir welding, and the restraint treatment used in the joining process. It becomes possible to reduce tools.
As shown in FIG. 16, the heat plate 1 c is obtained by performing the same friction stir welding along the abutting surface between the surface 3 of the substrate 2 and the lid plate 5 b to form a pair of joints S. . Therefore, according to the heat plate 1c, by using the cover plate 5b, the heat medium flow path 7 is closed with high airtightness while suppressing the shift in the width direction of the groove 6 and the required cross section is accurate. Will be formed.
The heat plate 1c as described above can also be manufactured based on the manufacturing method of the heat plate 1 of the preferential reference form .

On the other hand, FIG. 17 relates to different forms heat plate 1 d by Ri obtained that the present invention is to use the following cover plate 5d.
As shown in FIG. 17, the cover plate 5d is inserted between the step portions 8 and 8 of the recessed groove 6 formed along the surface 3 of the substrate 2, closes the opening, and heat medium from the bottom surface. The channel 7 has a substantially gettered cross section integrally including a pair of parallel protrusions 5e and 5e that hang down along the side walls 7a. Also with this lid plate 5d, it is possible to prevent displacement in the width direction during friction stir welding and to reduce the restraining jig.
As shown in FIG. 17, the heat plate 1 d is obtained by performing the same friction stir welding along the abutting surface between the surface 3 of the substrate 2 and the lid plate 5 d to form a pair of joints S. It is done. Therefore, according to the heat plate 1d, by using the cover plate 5d, the heat medium flow path 7 is closed with high airtightness while suppressing the shift in the width direction of the concave groove 6, and the required cross section is accurately set. It will be formed.
Note that an extruded shape of an aluminum alloy may be used for the cover plates 5b and 5d as described above. The heat plates 1c and 1d using the cover plates 5c and 5d can be applied to the forms of the heat plates 1a and 1b.
The heat plate 1d as described above can also be manufactured based on the manufacturing method of the heat plate 1 of the preferential reference form .

18 and 19 relate to a friction welding tool 20 of a reference form.
As shown in FIGS. 18 and 19, the friction welding tool 20 is an integrally formed product made of tool steel such as SKD61, and is coaxial with the main body 22 from the center of the cylindrical tool main body 22 and the circular bottom surface 24 thereof. And a cylindrical stirring pin 26 that hangs down.
Further, as shown in FIGS. 18 and 19, the bottom surface 24 of the tool body 22 is provided with a concave portion 25 that is deeper toward the base of the stirring pin 26, and the circumferential surface of the stirring pin 26 including the tip surface 28. Are engraved with a screw portion (not shown) for promoting stirring.
The friction welding tool 20 as described above is rotated and moved along the abutting surface 9 between the substrates 2 and 2b and the cover plates 5 and 5b in the heat plates 1, 1a and 1b. Portions S, S1, and S2 can be formed. At this time, the axes of the tool body 22 and the stirring pin 26 are used in a state where they are inclined by 3 to 5 degrees on the opposite side (left side) of the moving direction (right side) indicated by the straight arrow in FIG.
A part of the metal plastically fluidized by the stirring pin 26 once enters the recess 25 and then spreads and solidifies on the surface 3 side of the substrate 2 or the like. As a result, by using the friction welding tool 20 for each joining step, it is possible to provide the heat plates 1, 1a, 1b that are thin and lightweight and have high reliability at low cost.

The present invention is not limited to the embodiments and examples described above.
For example, the materials of the substrates 2 and 2b and the cover plates 5b and 5d are not limited to aluminum alloys, but are similar metals such as steel, stainless steel, and titanium alloys capable of friction stir welding with the metal or alloy of the substrate or cover plate. Or a dissimilar metal is also contained.
The concave groove is not limited to the form having the stepped portions 8 and 8 on both sides of the opening, but may be a square such as a square or a rectangle, or an inverted trapezoidal shape in which the opening side of the cross-sectional shape is wide. good. Alternatively, the bottom may be wider than the opening, for example, a cross-section hat-shaped bottom wide concave groove, and may have stepped portions 8 and 8 on both sides of the opening of the concave groove.
Further, the concave groove 6 may be formed by using two or more types of drills, or by plastic working using a forging die or a press die that can form a straight portion or a curved portion as appropriate.
Further, the substrate of the heat plate of the present invention is not limited to the flat substrates 2 and 2b, but a curved shape whose surface is appropriately curved or a bent shape with a required angle according to the shape of the object to be cooled or heated. It is good also as a shape or a cylindrical shape or a polygonal cylinder shape.
Furthermore, the concave groove (heat medium flow path) may be composed of only a straight portion or a curved portion.
The heat plate of the present invention can be applied to any of cooling, heating, and heat retention.

The top view which shows one form of the heat plate of the premise reference form of this invention. Sectional drawing of the viewing angle along the arrow of the BB line in FIG. The enlarged view of the dashed-dotted line part C in FIG. Schematic which shows 1 process in the manufacturing method of the said heat plate. Schematic which shows the manufacturing process following FIG. Schematic which shows the manufacturing process following FIG. Sectional drawing in the viewing angle along the arrow of the DD line | wire in FIG. The perspective view which shows the friction welding tool used for the said manufacturing method. The vertical sectional view showing the above-mentioned friction welding tool. Sectional drawing which shows the outlines of the Example etc. in the joining process of the said manufacturing method. The graph which shows the quality of the junction part by the position which has arrange | positioned the friction welding tool. The top view which shows the deformation | transformation form of the said heat plate. The enlarged view of the dashed-dotted line part B in FIG. The top view which shows the heat plate of a different form. The enlarged view of the dashed-dotted line part D in FIG. Schematic diagram showing the vicinity groove of one form of the heat plate that obtained Ri by the present invention. Schematic diagram showing the vicinity groove of the heat plate by Ri obtained that different forms of the present invention The perspective view which shows the friction welding tool of a reference form. The vertical sectional view showing the above-mentioned friction welding tool.

Explanation of symbols

1c, 1d ……………… Heat plate 2, 2b ……………… Substrate 3 ……………………… Surface 5b, 5d …………… Cover plate 6 …………………… ... concave groove 7 ………………………… Heat channel 7a …………………… Side wall 8 ………………………… Step 8a …………………… Vertical wall 8b …………………… Bottom surface 9 ……………………… Mating surface (boundary)
1 0 ... .................. friction welding tool 1 7 ... .................. stirring pin 18 ........................ tip surface 19 ........................ outer peripheral end S ............ …………… Junction S end …………………… End r ……………………… Agitation pin radius z ……………………… Center p ……………… ……… Vertical line K ……………………… Curve (1/4 circumference)

Claims (3)

A pair of stepped portions formed on at least one of a straight portion and a bent portion along the surface, and located on both sides of the opening of the concave groove, on the surface of the substrate made of a metal or an alloy; and Forming a groove formed of a flow path for a heat medium that is located between the pair of stepped portions and deeper than these stepped portions;
A step of closing the opening of the groove by placing a cover plate made of a metal or an alloy across a pair of steps in the groove,
A step of joining the lid plate along a pair of steps in the opening of the concave groove by performing friction stir welding along the vicinity of the boundary between the peripheral edge of the lid plate and the substrate. A method of manufacturing a plate,
The lid plate used in the closing and joining step is inserted between the pair of stepped portions to close the opening of the concave groove, and has a pressed portion that enters the upper portion in the heat medium channel on the bottom surface. or exhibits a cross-section substantially reversed hat shape having integrally or state, and are not exhibiting cross almost Geta shape having a pair of parallel ridges extending downward along the bottom surface on both side walls of the heating medium passage integrated ,
On the bottom surface of the tool body of the friction welding tool used in the above-mentioned joining process, spiral ridges extending in a spiral shape from the root of the stirring pin to the periphery thereof are projected, and a spiral is formed between the spiral ridge and the stirring pin. The inner metal reservoir of the mold is located
In the friction welding tool used in the joining step, the outer peripheral end near the concave groove on the tip surface of the stirring pin is more than the position directly above one side wall of the concave groove in the heat medium flow path where the outer peripheral end is close. Located near the vertical wall of the step adjacent to the side wall ,
The outer peripheral end near the concave groove on the tip surface of the stirring pin of the friction welding tool used in the bonding step is on the bottom surface of one step portion of the concave groove and is the upper end of the side wall of the heat medium flow path of the concave groove From the center of the position of the height of the radius of the stirrer pin on the position near the vertical wall of the stepped portion by the radius of the stirrer pin. The wire is positioned closer to the vertical wall of the one step than the circumference of a quarter circle formed by rotating approximately 90 ° toward the directly above the side wall of the heat medium flow path ,
The terminal end of the movement path of the stirring pin in the friction welding tool used in the bonding step is located on the substrate away from directly above the heat medium flow path in the groove .
The manufacturing method of the heat plate characterized by the above-mentioned. The spiral ridge protruding from the bottom surface of the tool body of the friction welding tool is wound about one turn or about half turn in a bottom view .
The manufacturing method of the heat plate of Claim 1 . The friction stir welding in the joining step is performed by one pass that continuously moves the friction welding tool while rotating around the boundary between the peripheral edge of the lid plate and the substrate.
The manufacturing method of the heat plate of Claim 1 or 2.

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