JP4772438B2 - Link actuator - Google Patents

Link actuator Download PDF

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JP4772438B2
JP4772438B2 JP2005270417A JP2005270417A JP4772438B2 JP 4772438 B2 JP4772438 B2 JP 4772438B2 JP 2005270417 A JP2005270417 A JP 2005270417A JP 2005270417 A JP2005270417 A JP 2005270417A JP 4772438 B2 JP4772438 B2 JP 4772438B2
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spherical
stationary
movable member
movable
rod
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JP2007078157A (en
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啓助 曽根
浩量 大場
浩 磯部
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NTN Corp
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Description

本発明は、三次元空間における複雑な加工や物品の取り回し等の作業を高速かつ精密に実行するパラレルリンク機構やロボット関節などのリンク機構に利用されるリンク作動装置に関する。   The present invention relates to a link operating device used for a link mechanism such as a parallel link mechanism or a robot joint that performs complicated processing or article handling in a three-dimensional space at high speed and precisely.

例えば、三次元空間における複雑な加工や物品の取り回し等の作業を高速かつ精密に実行するパラレルリンク機構を具備した作業装置がある(例えば、特許文献1参照)。   For example, there is a working device equipped with a parallel link mechanism that performs high-speed and precise operations such as complicated processing and article handling in a three-dimensional space (see, for example, Patent Document 1).

この作業装置は、ベースプレートとトラベリングプレートとの間を接続する複数のリンクを協調させて伸縮させることでベースプレートに対するトラベリングプレートの位置および姿勢を変化させるパラレルリンク機構を具備する。このパラレルリンク機構のトラベリングプレートにツールを取り付け、ワークを保持するテーブルを回転可能に配設することにより、テーブル上のワークに対するツールの位置および姿勢を自由に変えられるようにして、ツールによる三次元空間内での複雑な加工や物品の取り回しを可能にしている。   This working apparatus includes a parallel link mechanism that changes the position and posture of the traveling plate with respect to the base plate by cooperatively expanding and contracting a plurality of links connecting the base plate and the traveling plate. By attaching a tool to the traveling plate of this parallel link mechanism and rotatably arranging a table to hold the workpiece, the position and posture of the tool with respect to the workpiece on the table can be freely changed. It enables complex processing and handling of articles in the space.

前記パラレルリンク機構では、可動部分の質量を軽減することができ、また、各リンクの位置決め誤差がその先端部で平均化されるなど、三次元空間における複雑な加工や物品の取り回し等の作業を高速かつ精密に実行する上で大きな特徴を具備している。
特開2000−94245号公報 特開2004−9276号公報
In the parallel link mechanism, the mass of the movable part can be reduced, and the positioning error of each link is averaged at the tip, and complicated work in three-dimensional space and handling of articles are performed. It has great features in executing at high speed and precision.
JP 2000-94245 A JP 2004-9276 A

しかしながら、前述したパラレルリンク機構では、各リンクの作動角が小さいため、トラベリングプレートの作動範囲を大きく設定しようとすると、リンク長が長くなることにより、機構全体の寸法が大きくなって装置の大型化を招来するという問題があった。また、機構全体の剛性が低く、トラベリングプレートに搭載されるツールの重量、つまり、トラベリングプレートにおける可搬重量も小さいものに制限されるという問題もあった。   However, in the parallel link mechanism described above, since the operating angle of each link is small, if the operating range of the traveling plate is set to be large, the link length becomes long, which increases the overall size of the mechanism and increases the size of the device. There was a problem of inviting. There is also a problem that the rigidity of the entire mechanism is low and the weight of the tool mounted on the traveling plate, that is, the loadable weight of the traveling plate is limited to a small one.

この問題点を解消するため、本出願人は、剛性が高く、しかも可搬重量が大きいリンク機構を具備したリンク作動装置を先に提案している(例えば、特許文献2参照)。   In order to solve this problem, the present applicant has previously proposed a link actuating device having a link mechanism having a high rigidity and a large portable weight (see, for example, Patent Document 2).

このリンク作動装置は、入力部材と出力部材のそれぞれに設けたリンクハブに対して回転可能に端部リンク部材を連結し、入力側と出力側のそれぞれの端部リンク部材を中央リンク部材に対して回転可能に連結したリンク機構を三組以上有し、各リンク機構の中央部における横断面に関して入力側と出力側を幾何学的に同一とし、前記入力部材と連結された各リンク機構の回転対偶のうち、二組以上のリンク機構について各組一箇所以上の回転対偶の回転部に、出力部材を任意の位置で静止させるための静止機構を設けたものである。   In this link actuating device, the end link members are rotatably connected to the link hubs provided on the input member and the output member, and the end link members on the input side and the output side are connected to the central link member. 3 or more link mechanisms connected in a rotatable manner, the input side and the output side are geometrically identical with respect to the cross section at the center of each link mechanism, and the rotation of each link mechanism connected to the input member Among the kinematic pairs, two or more sets of link mechanisms are provided with a stationary mechanism for stopping the output member at an arbitrary position on the rotating part of one or more rotating pairs of each group.

しかしながら、このリンク作動装置では、リンク機構を構成する部材が多く、リンク機構の干渉により装置全体のコンパクト化が困難で、また、リンク機構の回転対偶の回転部を剛性の高い軸受構造としていることから、装置全体が高価なものとなる。   However, in this link operating device, there are many members constituting the link mechanism, and it is difficult to make the entire device compact due to interference of the link mechanism, and the rotating portion of the rotating pair of the link mechanism has a highly rigid bearing structure. Therefore, the entire apparatus becomes expensive.

そこで、本発明は前記問題点に鑑みて提案されたもので、その目的とするところは、構造が簡単で、軽量コンパクトなリンク作動装置を提供することにある。   Accordingly, the present invention has been proposed in view of the above-mentioned problems, and an object of the present invention is to provide a link operating device that is simple in structure and lightweight and compact.

前述の目的を達成するための技術的手段として、本発明は、静止部材に対する可動部材に、その軸線に対して垂直な平面内で軸中心から半径方向に三つの受け部を円周等配位置に設け、可動部材の各円筒溝に球面部材を半径方向に摺動可能にそれぞれ配置し、球面部材中心の静止部材への投影位置が円周等配位置でそれぞれのPCR位置を保持するように、球面部材を軸方向に摺動可能に静止部材に設け、球面部材と静止部材間あるいは球面部材と可動部材間のいずれか一方に、可動部材を静止部材に対して所定の姿勢で静止させる機構を設けたことを特徴とする。ここで、「球面部材中心の静止部材への投影位置」とは、静止部材と可動部材が角度をとっていない時における球面部材の軸線に対して垂直な平面上の位置を意味する。 As a technical means for achieving the above-mentioned object, the present invention provides a movable member with respect to a stationary member and circumferentially equidistant positions of three receiving portions in a radial direction from the axis center within a plane perpendicular to the axis. The spherical member is arranged in each cylindrical groove of the movable member so as to be slidable in the radial direction, and the projection position onto the stationary member at the center of the spherical member is held at the circumferentially equidistant position to hold the respective PCR positions. The spherical member is provided on the stationary member so as to be slidable in the axial direction, and the movable member is stationary in a predetermined posture with respect to the stationary member between the spherical member and the stationary member or between the spherical member and the movable member. Is provided . Here, the “projection position of the center of the spherical member onto the stationary member” means a position on a plane perpendicular to the axis of the spherical member when the stationary member and the movable member are not at an angle.

このリンク作動装置では、静止部材に対する可動部材に、その軸線に対して垂直な平面内で軸中心から半径方向に三つの受け部を円周等配位置に設け、可動部材の各受け部に球面部材を半径方向に摺動可能にそれぞれ配置し、球面部材中心の静止部材への投影位置が円周等配位置でそれぞれのPCR位置を保持するように、球面部材を軸方向に摺動可能に静止部材に設け、球面部材と静止部材間あるいは球面部材と可動部材間のいずれか一方に、可動部材を静止部材に対して所定の姿勢で静止させる機構を設けたことにより、構造が簡単で軽量コンパクトなリンク作動装置を実現することができ、可動部材を静止部材に対して、所定の姿勢、つまり、静止部材から任意の距離だけ離間した位置で任意の傾き状態で固定させることができる。 In this link actuating device, the movable member with respect to the stationary member is provided with three receiving portions at circumferentially equidistant positions in the radial direction from the axis center within a plane perpendicular to the axis thereof, and a spherical surface is provided at each receiving portion of the movable member. The members are arranged so as to be slidable in the radial direction, and the spherical member can be slid in the axial direction so that the projection position onto the stationary member at the center of the spherical member holds the respective PCR positions at circumferentially equidistant positions. The structure is simple and lightweight by providing a mechanism for stopping the movable member in a predetermined position with respect to the stationary member between the spherical member and the stationary member or between the spherical member and the movable member. It can be realized a compact link actuator, the movable member relative to the stationary member, a predetermined posture, i.e., Ru can be fixed at any inclination state only spaced locations given distance from the stationary member.

前述したリンク作動装置のおける受け部は、可動部材に、その軸線に対して垂直な平面内で軸中心から半径方向で円周等配位置に設けられた円筒溝であり、球面部材は、外周面が球面状で内径に円筒状孔を有する球面リングであり、静止部材にその円周等配位置でそれぞれのPCR位置に固定されて相互に平行配置された三本の軸に、球面リングを介して可動部材を軸方向に移動可能に装設し、可動部材を静止部材に対して所定の姿勢で静止させる機構を可動部材に設けられたストッパねじとした構造が可能である。The receiving portion in the above-described link operating device is a cylindrical groove provided on the movable member at a circumferentially equidistant position in the radial direction from the center of the axis within a plane perpendicular to the axis thereof. A spherical ring with a spherical surface and a cylindrical hole on the inner diameter. The spherical ring is attached to three axes that are fixed to each PCR position at the circumferentially equidistant position of the stationary member and arranged parallel to each other. The movable member can be mounted so as to be movable in the axial direction, and a mechanism for stopping the movable member in a predetermined posture with respect to the stationary member can be used as a stopper screw provided on the movable member.

前述したリンク作動装置のおける受け部は、可動部材に、その軸線に対して垂直な平面内で軸中心から半径方向で円周等配位置に設けられた円筒溝であり、球面部材は、外周面が球面状で内径に円筒状孔を有する球面リングであり、静止部材にその円周等配位置でそれぞれのPCR位置に固定されて相互に平行配置された三本の軸に、球面リングを介して可動部材を軸方向に移動可能に装設し、軸をボールねじ軸とすると共にそのボールねじ軸に螺合するナット部材を球面リングに内装し、可動部材を静止部材に対して所定の姿勢で静止させる機構をボールねじ軸の軸端に連結されたモータとした構造が可能である。 Put that accept portion of the aforementioned link actuating device, the movable member has a cylindrical groove provided circumferentially equidistant positions in the radial direction from the shaft center in a plane perpendicular to the axis, the spherical member , A spherical ring having a spherical outer peripheral surface and a cylindrical hole on the inner diameter, and fixed to each PCR position at the circumferentially equidistant position on the stationary member, and the spherical surface on the three axes arranged in parallel to each other A movable member is installed so as to be movable in the axial direction via the ring, and the shaft is used as a ball screw shaft, and a nut member screwed into the ball screw shaft is provided in the spherical ring, and the movable member is mounted on the stationary member. A structure in which the mechanism that is stationary in a predetermined posture is a motor connected to the shaft end of the ball screw shaft is possible.

また、前述したリンク作動装置のおける受け部は、可動部材に、その軸線に対して垂直な平面内で軸中心から半径方向で円周等配位置に設けられた球面保持ブロックであり、球面部材は、球面部およびその球面部から延びるロッド部からなり、可動部材の各球面保持ブロックに球面ロッドの球面部を受ける球面受けホルダを半径方向に摺動可能にそれぞれ配置し、球面ロッドの球面部中心の静止部材への投影位置が円周等配位置でそれぞれのPCR位置を保持するように、球面ロッドのロッド部を軸方向に摺動可能に静止部材に装設し、可動部材を静止部材に対して所定の姿勢で静止させる機構をロッド部の端部に連結された直動アクチュエータとした構造が可能である。 Further, the receiving portion in the above-described link actuating device is a spherical holding block provided on the movable member at a circumferentially equidistant position in the radial direction from the axis center within a plane perpendicular to the axis thereof. Is composed of a spherical portion and a rod portion extending from the spherical portion, and a spherical receiving holder for receiving the spherical portion of the spherical rod is arranged on each spherical holding block of the movable member so as to be slidable in the radial direction. so that the projection position of the center of the stationary member to hold the respective PCR position at the circumference equidistant positions, and So設slidably stationary member rod portion of the spherical rod axially stationary member movable member On the other hand, it is possible to adopt a structure in which the mechanism that is stationary in a predetermined posture is a linear actuator connected to the end of the rod portion.

さらに、前述したリンク作動装置のおける受け部は、可動部材に、その軸線に対して垂直な平面内で軸中心から半径方向で円周等配位置に設けられた円筒溝であり、球面部材は、球面部およびその球面部から延びるロッド部を有する球面ロッドであり、球面ロッドのロッド部を静止部材に軸方向に摺動可能に装設し、可動部材を静止部材に対して所定の姿勢で静止させる機構を、球面ロッドのロッド部に設けられたラック部とギヤで結合されたモータとした構造が可能である。 Furthermore, the receiving part in the above-described link operating device is a cylindrical groove provided on the movable member at a circumferentially equidistant position in the radial direction from the axis center within a plane perpendicular to the axis thereof. A spherical rod having a spherical portion and a rod portion extending from the spherical portion, the rod portion of the spherical rod being mounted on the stationary member so as to be slidable in the axial direction, and the movable member being in a predetermined posture with respect to the stationary member It is possible to adopt a structure in which the stationary mechanism is a motor coupled with a rack portion provided on the rod portion of the spherical rod with a gear.

本発明によれば、静止部材に対する可動部材に、その軸線に対して垂直な平面内で軸中心から半径方向に三つの受け部を円周等配位置に設け、可動部材の各受け部に球面部材を半径方向に摺動可能にそれぞれ配置し、球面部材中心の静止部材への投影位置が円周等配位置でそれぞれのPCR位置を保持するように、球面部材を軸方向に摺動可能に静止部材に設け、球面部材と静止部材間あるいは球面部材と可動部材間のいずれか一方に、可動部材を静止部材に対して所定の姿勢で静止させる機構を設けたことにより、構造が簡単で軽量コンパクトなリンク作動装置を実現することができ、可動部材を静止部材に対して、所定の姿勢、つまり、静止部材から任意の距離だけ離間した位置で任意の傾き状態で固定させることができる。 According to the present invention, the movable member with respect to the stationary member is provided with three receiving portions at circumferentially equidistant positions in the radial direction from the center of the axis within a plane perpendicular to the axis thereof, and a spherical surface is provided at each receiving portion of the movable member. The members are arranged so as to be slidable in the radial direction, and the spherical member can be slid in the axial direction so that the projection position onto the stationary member at the center of the spherical member holds the respective PCR positions at circumferentially equidistant positions. The structure is simple and lightweight by providing a mechanism for stopping the movable member in a predetermined position with respect to the stationary member between the spherical member and the stationary member or between the spherical member and the movable member. It can be realized a compact link actuator, the movable member relative to the stationary member, a predetermined posture, i.e., Ru can be fixed at any inclination state only spaced locations given distance from the stationary member.

本発明に係るリンク作動装置の各実施形態を以下に詳述する。図1〜図4は第一の実施形態、図5および図6は第二の実施形態、図7〜図9は第三の実施形態、図10〜図14は第四の実施形態をそれぞれ説明するためのものである。   Each embodiment of the link actuator according to the present invention will be described in detail below. 1 to 4 illustrate the first embodiment, FIGS. 5 and 6 illustrate the second embodiment, FIGS. 7 to 9 illustrate the third embodiment, and FIGS. 10 to 14 illustrate the fourth embodiment. Is to do.

[第一の実施形態]   [First embodiment]

図1〜図3に示す第一の実施形態におけるリンク作動装置は、静止部材としての円形の静止台1上に三本の軸2を円周等配位置で同一のPCR位置に垂設し、それら各軸2の上端部を補強リング3で連結一体化した構造を具備する。この静止台1上の三本の軸2はそれぞれ平行に配置されている。ここで、PCR位置とは、静止台1の中心から軸2の中心までの距離(ピッチ円半径)を意味する。また、各軸2の上端部を補強リング3で連結一体化することにより、三本の軸2の平行度を確保して剛性アップを図っている。   The link actuating device in the first embodiment shown in FIG. 1 to FIG. 3 suspends three shafts 2 at the same PCR position at circumferentially equidistant positions on a circular stationary base 1 as a stationary member, A structure in which the upper end portions of these shafts 2 are connected and integrated by a reinforcing ring 3 is provided. The three shafts 2 on the stationary table 1 are arranged in parallel. Here, the PCR position means the distance (pitch circle radius) from the center of the stationary table 1 to the center of the shaft 2. Further, by connecting and integrating the upper end portions of the respective shafts 2 with the reinforcing ring 3, the parallelism of the three shafts 2 is ensured to increase the rigidity.

前述の静止台1の上方には可動部材としての可動台4が配置され、球面部材としての球面リング5を介して静止台1上に垂設された各軸2と連結されている。可動台4は、円盤状のボス部4aとそのボス部4aの外周の円周等配位置から半径方向に一体的に突設した連結部4bとを有する。この可動台4の連結部4bには、可動台4の円周等配位置で半径方向に延びる受け部である円筒溝6が形成されている。この円筒溝6は、可動台4の半径方向に平行な断面がストレート状で、かつ、その半径方向に垂直な断面が円弧状の溝面を有する。   A movable table 4 as a movable member is disposed above the stationary table 1 and is connected to each shaft 2 suspended on the stationary table 1 through a spherical ring 5 as a spherical member. The movable table 4 includes a disk-like boss portion 4a and a connecting portion 4b protruding integrally in the radial direction from a circumferentially equidistant position on the outer periphery of the boss portion 4a. A cylindrical groove 6, which is a receiving portion extending in the radial direction at the circumferentially equidistant position of the movable table 4, is formed in the connecting portion 4 b of the movable table 4. The cylindrical groove 6 has a groove surface in which the cross section parallel to the radial direction of the movable table 4 is straight, and the cross section perpendicular to the radial direction is arc-shaped.

球面リング5は、外径が球面状をなし、内径の円筒状孔に軸2が挿通されている。この球面リング5は、連結部4bの円筒溝6に半径方向に摺動可能に配置されている。従って、この球面リング5の外径は、円筒溝6の半径方向での摺動が可能なように円筒溝6の内径とほぼ一致させている。この球面リング5の静止台1への投影位置が可動台4の円周等配位置でそれぞれ同一のPCR位置を保持するように、球面リング5は、静止台1の台面に対して垂直方向に摺動可能に軸2に支持された構造となっている。   The spherical ring 5 has a spherical outer diameter, and the shaft 2 is inserted through a cylindrical hole having an inner diameter. The spherical ring 5 is disposed in the cylindrical groove 6 of the connecting portion 4b so as to be slidable in the radial direction. Therefore, the outer diameter of the spherical ring 5 is made substantially equal to the inner diameter of the cylindrical groove 6 so that the cylindrical groove 6 can slide in the radial direction. The spherical ring 5 is perpendicular to the surface of the stationary table 1 so that the projection positions of the spherical ring 5 on the stationary table 1 hold the same PCR position at the circumferentially equidistant positions of the movable table 4. The structure is supported by the shaft 2 so as to be slidable.

このリンク作動装置では、静止台1に対して可動台4を傾き方向で2自由度(X軸方向とY軸方向)と垂直方向で1自由度(Z軸方向)に可動させることができる。その可動台4の姿勢を保持するため、可動台4の静止機構としてのストッパねじ7を球面リング5に可動台4の半径方向外側から螺合させ、そのストッパねじ7の先端を球面リング5の内径の軸2に押し当て可能としている。   In this link actuating device, the movable base 4 can be moved with respect to the stationary base 1 with two degrees of freedom (X-axis direction and Y-axis direction) in the tilt direction and one degree of freedom (Z-axis direction) in the vertical direction. In order to maintain the posture of the movable table 4, a stopper screw 7 as a stationary mechanism of the movable table 4 is screwed into the spherical ring 5 from the outside in the radial direction of the movable table 4, and the tip of the stopper screw 7 is connected to the spherical ring 5. It can be pressed against the shaft 2 of the inner diameter.

従って、静止台1に対して可動台4をXY軸方向に傾け、かつ、Z軸方向(上下方向)に移動させ、所定の姿勢になった時点で前述の三つのストッパねじ7を球面リング5に対してねじ込むことにより、球面リング5を軸2に固定すれば、可動台4を静止台1に対して所定の姿勢で静止させることが可能となる。   Accordingly, the movable table 4 is tilted in the XY-axis direction with respect to the stationary table 1 and moved in the Z-axis direction (vertical direction), and when the predetermined posture is reached, the above-described three stopper screws 7 are attached to the spherical ring 5. If the spherical ring 5 is fixed to the shaft 2 by screwing in, the movable base 4 can be made stationary with respect to the stationary base 1 in a predetermined posture.

なお、ストッパねじ7は、球面リング5と共に軸回りに回転しないようにその軸2に平行な溝8を設け(図2参照)、ストッパねじ7のねじ込み時にその先端が軸2の溝8に入り込むことにより、ストッパねじ7と球面リング5の両者の回り止めを実現している。   The stopper screw 7 is provided with a groove 8 parallel to the shaft 2 so as not to rotate around the axis together with the spherical ring 5 (see FIG. 2), and the tip of the stopper screw 7 enters the groove 8 of the shaft 2 when the stopper screw 7 is screwed. Thus, both the stopper screw 7 and the spherical ring 5 are prevented from rotating.

このストッパねじ7からなる静止機構は、球面リング5と軸2との間に設けているが、その他、可動台4と球面リング5との間などに設けることも可能である。また、球面リング5と軸2との間および可動台4と球面リング5との間の二箇所、あるいはそれら二箇所以上に静止機構を設けるようにすれば、可動台4の静止時の支持剛性を高くすることが容易となる。   The stationary mechanism including the stopper screw 7 is provided between the spherical ring 5 and the shaft 2, but can also be provided between the movable table 4 and the spherical ring 5. If a stationary mechanism is provided at two places between the spherical ring 5 and the shaft 2 and between the movable base 4 and the spherical ring 5, or at two or more places, the support rigidity when the movable base 4 is stationary. It is easy to increase the value.

また、図4は静止機構の他の構造例を示すもので、球面リング5’はその円周方向一部に切り欠き部5a’を有し、可動台4’の連結部4b’の先端二股状部分に半径方向と直交する方向でストッパねじ7’を螺合させた構造を具備する。なお、球面リング5’と軸2との間には、球面リング5’が軸回りに回転しないように回り止め8’が設けられている。   FIG. 4 shows another example of the structure of the stationary mechanism. The spherical ring 5 ′ has a notch 5a ′ at a part in the circumferential direction, and the forked end of the connecting portion 4b ′ of the movable base 4 ′. A stopper screw 7 'is screwed onto the shaped part in a direction perpendicular to the radial direction. A rotation stopper 8 'is provided between the spherical ring 5' and the shaft 2 so that the spherical ring 5 'does not rotate about the axis.

この静止機構では、ストッパねじ7’を可動台4’の連結部4b’にねじ込むことにより、その連結部4b’の先端二股状部分の間隔を狭めることで球面リング5’を縮径するように変形させ、球面リング5’を軸2に固定すれば、可動台4’を静止台1に対して所定の姿勢で強固に静止させることができる。   In this stationary mechanism, the spherical ring 5 ′ is reduced in diameter by screwing the stopper screw 7 ′ into the connecting portion 4 b ′ of the movable base 4 ′, thereby narrowing the interval between the bifurcated portions of the connecting portion 4 b ′. If the spherical ring 5 ′ is deformed and fixed to the shaft 2, the movable table 4 ′ can be firmly fixed in a predetermined posture with respect to the stationary table 1.

[第二の実施形態]   [Second Embodiment]

図5および図6に示す第二の実施形態におけるリンク作動装置は、前述した第一の実施形態と同様、静止部材としての円形の静止台11上に三本の軸12を円周等配位置で同一のPCR位置に垂設し、それら各軸12の上端部を補強リング13で連結一体化した構造を具備する。この静止台11上の三本の軸12はそれぞれ平行に配置されている。静止台11の上方には可動部材としての可動台14が配置され、球面部材としての球面リング15を介して静止台11上に垂設された各軸12と連結されている。可動台14は、円盤状のボス部14aとそのボス部14aの外周の円周等配位置から半径方向に一体的に突設した連結部14bとを有する。この可動台14の連結部14bには、可動台14の円周等配位置で半径方向に延びる受け部としての円筒溝16が形成されている。この円筒溝16は、可動台14の半径方向に平行な断面がストレート状で、かつ、その半径方向に垂直な断面が円弧状の溝面を有する。   5 and 6, the link actuating device according to the second embodiment has three shafts 12 arranged at equal circumferential positions on a circular stationary base 11 as a stationary member, as in the first embodiment described above. Are provided at the same PCR position, and the upper ends of the shafts 12 are connected and integrated by the reinforcing ring 13. The three shafts 12 on the stationary table 11 are arranged in parallel. A movable table 14 as a movable member is arranged above the stationary table 11 and is connected to each shaft 12 suspended on the stationary table 11 via a spherical ring 15 as a spherical member. The movable table 14 includes a disk-shaped boss portion 14a and a connecting portion 14b that protrudes integrally in the radial direction from a circumferentially equidistant position on the outer periphery of the boss portion 14a. A cylindrical groove 16 is formed in the connecting portion 14 b of the movable table 14 as a receiving portion extending in the radial direction at a circumferentially equidistant position of the movable table 14. The cylindrical groove 16 has a groove surface in which the cross section parallel to the radial direction of the movable base 14 is straight and the cross section perpendicular to the radial direction is an arc.

球面リング15は、外径が球面状をなし、連結部14bの円筒溝16に半径方向に摺動可能に配置されている。従って、この球面リング15の外径は、円筒溝16の半径方向での摺動が可能なように円筒溝16の内径とほぼ一致させている。この球面リング15の静止台11への投影位置が可動台14の円周等配位置でそれぞれ同一のPCR位置を保持するように、球面リング15は、静止台11の台面に対して垂直方向に移動可能に軸12に支持された構造となっている。なお、球面リング15と可動台14との間には、その球面リング15が軸回りに回転しないように回り止め18が設けられている。   The spherical ring 15 has a spherical outer diameter, and is arranged in the cylindrical groove 16 of the connecting portion 14b so as to be slidable in the radial direction. Therefore, the outer diameter of the spherical ring 15 is made to substantially coincide with the inner diameter of the cylindrical groove 16 so that the cylindrical groove 16 can slide in the radial direction. The spherical ring 15 is perpendicular to the surface of the stationary table 11 so that the projection position of the spherical ring 15 on the stationary table 11 maintains the same PCR position at the circumferentially equidistant position of the movable table 14. The structure is supported by the shaft 12 so as to be movable. A rotation stopper 18 is provided between the spherical ring 15 and the movable base 14 so that the spherical ring 15 does not rotate about the axis.

前述した軸12は、外周面にねじが刻設されたボールねじ軸(以下、ボールねじ軸12とする)であり、球面リング15は、その内径にボールねじ軸12と螺合するナット部材19が同軸的に内装されている。このボールねじ軸12は、静止台11及び補強リング13に転がり軸受17a,17bを介して支持することにより回転自在となっている。ボールねじ軸12の下端部には、カップリング20aを介して駆動源としてのモータ20の出力軸が同軸的に取り付けられている。   The above-described shaft 12 is a ball screw shaft (hereinafter, referred to as a ball screw shaft 12) having a screw engraved on its outer peripheral surface, and the spherical ring 15 has a nut member 19 that is screwed into the inner diameter of the ball screw shaft 12. Are coaxially furnished. The ball screw shaft 12 is rotatable by being supported on the stationary base 11 and the reinforcing ring 13 via rolling bearings 17a and 17b. An output shaft of the motor 20 as a drive source is coaxially attached to the lower end portion of the ball screw shaft 12 via a coupling 20a.

このリンク作動装置では、静止台11に対して可動台14を傾き方向で2自由度(X軸方向とY軸方向)と垂直方向で1自由度(Z軸方向)に可動させることができる。この静止台11に対する可動台14の可動は、各ボールねじ軸12に設けられたモータ20を駆動制御することにより、各ボールねじ軸12にナット部材19を螺合させた球面リング15を介して、静止台11に対して可動台14をXY軸方向に傾け、Z軸方向(上下方向)に移動させ、所定の姿勢が得られる。   In this link actuating device, the movable table 14 can be moved with respect to the stationary table 11 with two degrees of freedom (X-axis direction and Y-axis direction) in the tilt direction and one degree of freedom (Z-axis direction) in the vertical direction. The movable table 14 is movable with respect to the stationary table 11 through a spherical ring 15 in which a nut member 19 is screwed to each ball screw shaft 12 by driving and controlling a motor 20 provided on each ball screw shaft 12. The movable table 14 is tilted in the XY axis direction with respect to the stationary table 11 and moved in the Z axis direction (vertical direction) to obtain a predetermined posture.

[第三の実施形態]   [Third embodiment]

図7〜図9に示す第三の実施形態におけるリンク作動装置は、静止部材としての静止台21に球面部材としての三本の球面ロッド25のロッド部25bを円周等配位置で同一のPCR位置に垂設し、可動部材としての円盤状の可動台24の下面にその円周等配位置で同一のPCR位置に三つの球面保持ブロック22を固設し、静止台21から延びる球面ロッド25の球面部25aを可動台24の球面保持ブロック22の受け部としての球面受けホルダ23に連結した構造を具備する。   The link actuating device in the third embodiment shown in FIGS. 7 to 9 has the same PCR in which the rod portions 25b of the three spherical rods 25 as the spherical members are arranged at the circumferentially equidistant positions on the stationary base 21 as the stationary member. Three spherical holding blocks 22 are fixedly provided at the same PCR position at the circumferentially equidistant position on the lower surface of a disk-shaped movable table 24 as a movable member, and suspended from the stationary table 21. The spherical surface portion 25 a is connected to a spherical surface receiving holder 23 as a receiving portion of the spherical surface holding block 22 of the movable base 24.

球面ロッド25の球面部25aの静止台21への投影位置が可動台24の円周等配位置でそれぞれ同一のPCR位置を保持するように、球面部25aは、静止台21に対して垂直方向にスライド可能に支持された構造となっている。球面ロッド25のロッド部25bは、静止台21に直動軸受27を介して垂直方向にスライド自在に支持されており、三本のロッド部25bはそれぞれ平行に配置されている。各ロッド部25bの下端部には、駆動源としての直動アクチュエータ30が連結されて静止台21の内部空間に配置されている。一方、球面ロッド25の球面部25aを球面受けホルダ23で受け、その球面受けホルダ23を転動体28を介して球面保持ブロック22に半径方向に沿って摺動可能に保持している。これら三つの球面保持ブロック22は、球面受けホルダ23の摺動方向が円周等配位置で半径方向と一致する位置で可動台24に固定されている。   The spherical portion 25 a is perpendicular to the stationary table 21 so that the projection position of the spherical portion 25 a of the spherical rod 25 on the stationary table 21 holds the same PCR position at the circumferentially equidistant position of the movable table 24. The structure is supported so as to be slidable. The rod portion 25b of the spherical rod 25 is supported by the stationary base 21 via a linear motion bearing 27 so as to be slidable in the vertical direction, and the three rod portions 25b are arranged in parallel. A linear motion actuator 30 as a drive source is connected to the lower end of each rod portion 25 b and is disposed in the internal space of the stationary table 21. On the other hand, the spherical portion 25a of the spherical rod 25 is received by the spherical receiving holder 23, and the spherical receiving holder 23 is held by the spherical holding block 22 via the rolling elements 28 so as to be slidable in the radial direction. These three spherical holding blocks 22 are fixed to the movable base 24 at a position where the sliding direction of the spherical receiving holder 23 coincides with the radial direction at the circumferentially equidistant position.

このリンク作動装置では、静止台21に対して可動台24を傾き方向で2自由度(X軸方向とY軸方向)と垂直方向で1自由度(Z軸方向)に可動させることができる。この静止台21に対する可動台24の可動は、球面ロッド25のロッド部25bに設けられた直動アクチュエータ30を駆動制御することにより、各球面ロッド25を静止台21に対して垂直方向にスライドさせることで、球面ロッド25の球面部25aと球面受けホルダ23間での相対回転、球面受けホルダ23の半径方向でのスライドにより、静止台21に対して可動台24をXY軸方向に傾け、Z軸方向(上下方向)に移動させ、所定の姿勢が得られる。   In this link actuating device, the movable table 24 can be moved with respect to the stationary table 21 with two degrees of freedom (X-axis direction and Y-axis direction) in the tilt direction and one degree of freedom (Z-axis direction) in the vertical direction. The movable base 24 is movable relative to the stationary base 21 by slidingly controlling each spherical rod 25 in the vertical direction with respect to the stationary base 21 by drivingly controlling a linear actuator 30 provided on the rod portion 25b of the spherical rod 25. Thus, the relative rotation between the spherical portion 25a of the spherical rod 25 and the spherical receiving holder 23 and the sliding of the spherical receiving holder 23 in the radial direction cause the movable table 24 to be tilted in the XY axis direction with respect to the stationary table 21, and Z A predetermined posture is obtained by moving in the axial direction (vertical direction).

なお、静止台21と球面ロッド25のロッド部25bとの間に直動軸受27を介在させ、また、球面受けホルダ23と球面保持ブロック22との間に転動体28を介在させていることから、球面ロッド25および球面受けホルダ23の滑らかな可動が可能となっている。また、球面ロッド25の球面部25aと球面受けホルダ23との間では、球対球で受ける構造となっていることから、両者での支持剛性を向上させることができる。   The linear motion bearing 27 is interposed between the stationary base 21 and the rod portion 25 b of the spherical rod 25, and the rolling element 28 is interposed between the spherical receiving holder 23 and the spherical holding block 22. The spherical rod 25 and the spherical receiving holder 23 can be moved smoothly. In addition, since the spherical portion 25a of the spherical rod 25 and the spherical receiving holder 23 are configured to be received by a ball-to-sphere, the supporting rigidity of both can be improved.

[第四の実施形態]   [Fourth embodiment]

図10〜図14に示す第四の実施形態におけるリンク作動装置は、静止部材としての静止台31上に球面部材としての三本の球面ロッド35,35’を円周等配位置で垂設し、それら球面ロッド35,35’上に可動部材としての可動台34を配置した構造を具備する。可動台34の下面にはその円周等配位置で半径方向に沿って受け部としての円筒溝36,36’が形成されている。三本の球面ロッド35,35’は、可動台34の直下に位置する球面部35a,35a’とその球面部35a,35a’から垂直方向に延びるロッド部35b,35b’とからなり、各球面部35a,35a’は可動台34の円筒溝36,36’に摺動可能に配置され、各ロッド部35b,35b’はそれぞれ平行に配置されている。これら三本の球面ロッド35,35’のうち、一本の球面ロッド35’は、静止台31に固定されており、残り二本の球面ロッド35は、そのロッド部35bが直動軸受37を介して静止台31に垂直方向にスライド可能に設けられている。球面ロッド35の球面部35aの静止台31への投影位置が可動台34の円周等配位置でそれぞれPCR位置を保持するように、球面部35aは、静止台31に対して垂直方向にスライド可能に支持された構造となっている。   The link actuating device in the fourth embodiment shown in FIGS. 10 to 14 has three spherical rods 35 and 35 ′ as spherical members suspended from a stationary base 31 as a stationary member at circumferentially equidistant positions. The movable base 34 as a movable member is disposed on the spherical rods 35 and 35 '. Cylindrical grooves 36 and 36 'serving as receiving portions are formed on the lower surface of the movable table 34 along the radial direction at equal circumferential positions. The three spherical rods 35 and 35 'are composed of spherical portions 35a and 35a' located immediately below the movable base 34 and rod portions 35b and 35b 'extending vertically from the spherical portions 35a and 35a'. The portions 35a and 35a ′ are slidably disposed in the cylindrical grooves 36 and 36 ′ of the movable table 34, and the rod portions 35b and 35b ′ are respectively disposed in parallel. Of these three spherical rods 35, 35 ′, one spherical rod 35 ′ is fixed to the stationary base 31, and the remaining two spherical rods 35 have their rod portions 35 b that have linear motion bearings 37. It is provided on the stationary table 31 so as to be slidable in the vertical direction. The spherical portion 35a slides in the vertical direction with respect to the stationary table 31 so that the projection position of the spherical portion 35a of the spherical rod 35 on the stationary table 31 holds the PCR position at the circumferentially equidistant position of the movable table 34, respectively. The structure is supported as possible.

静止台31にスライド可能に設けられた二本の球面ロッド35のロッド部35bの軸方向略中央部位にはラック部32が形成されており、静止台31の内部空間に配置された駆動源としてのモータ40の出力に同軸的に設けられたギヤ33を前述のラック部32に噛合させている。   A rack portion 32 is formed at a substantially central portion in the axial direction of the rod portion 35b of the two spherical rods 35 slidably provided on the stationary base 31, and serves as a drive source disposed in the internal space of the stationary base 31. A gear 33 provided coaxially with the output of the motor 40 is engaged with the rack portion 32 described above.

このリンク作動装置では、一本の球面ロッド35’が静止台31に固定され、残り二本の球面ロッド35が静止台31にスライド可能に取り付けられていることから、静止台31に対して可動台34を傾き方向で2自由度(X軸方向とY軸方向)で可動させることができる。この静止台31に対する可動台34の可動は、二本の球面ロッド35のロッド部35bにラック部32およびギヤ33を介して連結されたモータ40を駆動制御することにより、各球面ロッド35の球面部35aを介して静止台31に対して可動台34をXY軸方向に傾け、所定の姿勢が得られる。   In this link actuating device, one spherical rod 35 ′ is fixed to the stationary table 31, and the remaining two spherical rods 35 are slidably attached to the stationary table 31. The table 34 can be moved in the tilt direction with two degrees of freedom (X-axis direction and Y-axis direction). The movable table 34 is movable with respect to the stationary table 31 by driving and controlling a motor 40 connected to the rod portions 35 b of the two spherical rods 35 via the rack portion 32 and the gear 33. The movable table 34 is tilted in the XY axis direction with respect to the stationary table 31 via the part 35a, and a predetermined posture is obtained.

三本の球面ロッド35,35’の軸中心の半径方向位置、つまりPCR位置は同一でなくてもよく、図示例では、固定された一本の球面ロッド35’の球面部35a’の外径を他の二本の球面ロッド35の球面部35aの外径よりも小さくし、かつ、PCRも小さくしている。従って、可動台34の円筒溝36,36’についても、球面ロッド35’の球面部35a’が収容された円筒溝36’の溝内径が他の二本の球面ロッド35の球面部35aが収容された円筒溝36の溝内径よりも小さくなっている。このようにすることにより、装置全体のコンパクト化を図っている。逆に、二本の球面ロッド35の球面部35aの外径を大きくすることにより、可動台34との接触部を大きくして保持力を向上させ、PCRを大きくすることにより、可動台34の可動角度量に対する球面ロッド35のスライド量が大きく取れることになって角度精度の向上が図れる。   The radial positions of the shaft centers of the three spherical rods 35, 35 ′, that is, the PCR positions may not be the same. In the illustrated example, the outer diameter of the spherical portion 35a ′ of one fixed spherical rod 35 ′. Is smaller than the outer diameter of the spherical portion 35a of the other two spherical rods 35, and the PCR is also reduced. Accordingly, the cylindrical grooves 36 and 36 ′ of the movable table 34 also have the inner diameter of the cylindrical groove 36 ′ in which the spherical portion 35 a ′ of the spherical rod 35 ′ is accommodated in the spherical portions 35 a of the other two spherical rods 35. It is smaller than the groove inner diameter of the cylindrical groove 36 formed. In this way, the entire apparatus is made compact. Conversely, by increasing the outer diameter of the spherical portion 35a of the two spherical rods 35, the contact portion with the movable table 34 is increased to improve the holding force, and the PCR is increased by increasing the PCR. Since the slide amount of the spherical rod 35 with respect to the movable angle amount can be increased, the angle accuracy can be improved.

本発明に係るリンク作動装置の第一の実施形態を示す平面図である。It is a top view which shows 1st embodiment of the link actuator which concerns on this invention. 図1のリンク作動装置を示す正面図である。It is a front view which shows the link action | operation apparatus of FIG. 図2のA−A線に沿う断面図である。It is sectional drawing which follows the AA line of FIG. 図3のリンク作動装置の変形例を示す要部拡大断面図である。It is a principal part expanded sectional view which shows the modification of the link action | operation apparatus of FIG. 本発明の第二の実施形態を示す一部省略部分を含む平面図である。It is a top view including the one part omission part which shows 2nd embodiment of this invention. 図5のリンク作動装置を示す一部断面部分を含む正面図である。It is a front view containing the partial cross section which shows the link action | operation apparatus of FIG. 本発明の第三の実施形態を示す平面図である。It is a top view which shows 3rd embodiment of this invention. 図7のB−B線に沿う断面図である。It is sectional drawing which follows the BB line of FIG. 図8のC−C線に沿う断面図である。It is sectional drawing which follows the CC line of FIG. 本発明の第四の実施形態を示す平面図である。It is a top view which shows 4th embodiment of this invention. 図10のD−D線に沿う断面図である。It is sectional drawing which follows the DD line | wire of FIG. 図11のE−E線に沿う断面図である。It is sectional drawing which follows the EE line | wire of FIG. 図11のF−F線に沿う断面図である。It is sectional drawing which follows the FF line of FIG. 第四の実施形態のリンク作動装置の動作状態を示す概略斜視図である。It is a schematic perspective view which shows the operation state of the link actuator of 4th embodiment.

符号の説明Explanation of symbols

1 静止部材(静止台)
2 軸
4 可動部材(可動台)
5 球面部材(球面リング)
6 受け部(円筒溝)
7 静止機構(ストッパねじ)
11 静止部材(静止台)
12 軸(ボールねじ軸)
14 可動部材(可動台)
15 球面部材(球面リング)
16 受け部(円筒溝)
20 駆動源(モータ)
21 静止部材(静止台)
22 球面保持ブロック
23 球面受けホルダ
24 可動部材(可動台)
25 球面部材(球面ロッド)
25a 球面部
25b ロッド部
30 駆動源(直動アクチュエータ)
31 静止部材(静止台)
32 ラック部
33 ギヤ
34 可動部材(可動台)
35,35’ 球面部材(球面ロッド)
35a,35a’ 球面部
35b,35b’ ロッド部
36,36’ 受け部(円筒溝)
1 Stationary member (stationary stand)
2 axis 4 movable member (movable stand)
5 Spherical member (spherical ring)
6 Receiving part (cylindrical groove)
7 Static mechanism (stopper screw)
11 Stationary member (stationary stand)
12 shafts (ball screw shaft)
14 Movable member (movable stand)
15 Spherical member (spherical ring)
16 Receiving part (cylindrical groove)
20 Drive source (motor)
21 Stationary member (stationary stand)
22 Spherical surface holding block 23 Spherical surface holder 24 Movable member (movable base)
25 Spherical member (spherical rod)
25a Spherical section 25b Rod section 30 Drive source (linear actuator)
31 Stationary member (stationary stand)
32 Rack part 33 Gear 34 Movable member (movable stand)
35,35 'Spherical member (spherical rod)
35a, 35a 'spherical surface portion 35b, 35b' rod portion 36, 36 'receiving portion (cylindrical groove)

Claims (5)

静止部材に対する可動部材に、その軸線に対して垂直な平面内で軸中心から半径方向に三つの受け部を円周等配位置に設け、前記可動部材の各受け部に球面部材を半径方向に摺動可能にそれぞれ配置し、前記球面部材中心の静止部材への投影位置が円周等配位置でそれぞれのPCR位置を保持するように、前記球面部材を軸方向に摺動可能に静止部材に設け、前記球面部材と静止部材間あるいは球面部材と可動部材間のいずれか一方に、可動部材を静止部材に対して所定の姿勢で静止させる機構を設けたことを特徴とするリンク作動装置。 In the movable member with respect to the stationary member, three receiving portions are provided at circumferentially equidistant positions in the radial direction from the center of the axis within a plane perpendicular to the axis, and a spherical member is provided in each receiving portion of the movable member in the radial direction. Each spherical member is slidably arranged in the axial direction so that the respective PCR positions are held at the circumferentially equidistant positions. A link actuating device, characterized in that a mechanism is provided between the spherical member and the stationary member or between the spherical member and the movable member, and a mechanism for causing the movable member to remain stationary with respect to the stationary member . 前記受け部は、可動部材に、その軸線に対して垂直な平面内で軸中心から半径方向で円周等配位置に設けられた円筒溝であり、前記球面部材は、外周面が球面状で内径に円筒状孔を有する球面リングであり、前記静止部材にその円周等配位置でそれぞれのPCR位置に固定されて相互に平行配置された三本の軸に、球面リングを介して可動部材を軸方向に移動可能に装設し、前記可動部材を静止部材に対して所定の姿勢で静止させる機構を、前記可動部材に設けられたストッパねじとした請求項1に記載のリンク作動装置。 The receiving portion is a cylindrical groove provided in the movable member at a circumferentially equidistant position in a radial direction from the axis center within a plane perpendicular to the axis thereof, and the spherical member has a spherical outer peripheral surface. A spherical ring having a cylindrical hole on its inner diameter, and a movable member via a spherical ring on three shafts fixed to each PCR position at the circumferentially equidistant position of the stationary member and arranged parallel to each other The link actuating device according to claim 1 , wherein a mechanism for suspending the movable member in a predetermined posture with respect to the stationary member is a stopper screw provided on the movable member . 前記受け部は、可動部材に、その軸線に対して垂直な平面内で軸中心から半径方向で円周等配位置に設けられた円筒溝であり、前記球面部材は、外周面が球面状で内径に円筒状孔を有する球面リングであり、前記静止部材にその円周等配位置でそれぞれのPCR位置に固定されて相互に平行配置された三本の軸に、球面リングを介して可動部材を軸方向に移動可能に装設し、前記軸をボールねじ軸とすると共にそのボールねじ軸に螺合するナット部材を前記球面リングに内装し、前記可動部材を静止部材に対して所定の姿勢で静止させる機構を、ボールねじ軸の軸端に連結されたモータとした請求項に記載のリンク作動装置。 The receiving portion is a cylindrical groove provided in the movable member at a circumferentially equidistant position in a radial direction from the axis center within a plane perpendicular to the axis thereof, and the spherical member has a spherical outer peripheral surface. A spherical ring having a cylindrical hole on its inner diameter, and a movable member via a spherical ring on three shafts fixed to each PCR position at the circumferentially equidistant position of the stationary member and arranged parallel to each other Are mounted so as to be movable in the axial direction, the shaft is used as a ball screw shaft, a nut member screwed into the ball screw shaft is provided in the spherical ring, and the movable member is in a predetermined posture with respect to the stationary member. The link actuating device according to claim 1 , wherein the mechanism to be stopped by the motor is a motor connected to a shaft end of a ball screw shaft. 前記受け部は、可動部材に、その軸線に対して垂直な平面内で軸中心から半径方向で円周等配位置に設けられた球面保持ブロックであり、前記球面部材は、球面部およびその球面部から延びるロッド部からなり、前記可動部材の各球面保持ブロックに球面ロッドの球面部を受ける球面受けホルダを半径方向に摺動可能にそれぞれ配置し、前記球面ロッドの球面部中心の静止部材への投影位置が円周等配位置でそれぞれのPCR位置を保持するように、前記球面ロッドのロッド部を軸方向に摺動可能に静止部材に装設し、前記可動部材を静止部材に対して所定の姿勢で静止させる機構を、ロッド部の端部に連結された直動アクチュエータとした請求項に記載のリンク作動装置。 The receiving portion is a spherical holding block provided on the movable member at a circumferentially equidistant position in the radial direction from the axis center within a plane perpendicular to the axis thereof. The spherical member includes the spherical portion and the spherical surface thereof. A spherical receiving holder that receives the spherical portion of the spherical rod in each spherical holding block of the movable member so as to be slidable in the radial direction, and to the stationary member at the center of the spherical portion of the spherical rod. The spherical rods are slidably mounted in the stationary member so that the projected positions of the circularly spaced projection positions hold the respective PCR positions, and the movable member is attached to the stationary member. The link actuating device according to claim 1 , wherein the mechanism that is stationary in a predetermined posture is a linear motion actuator that is coupled to an end of the rod portion. 前記受け部は、可動部材に、その軸線に対して垂直な平面内で軸中心から半径方向で円周等配位置に設けられた円筒溝であり、前記球面部材は、球面部およびその球面部から延びるロッド部を有する球面ロッドであり、前記球面ロッドのロッド部を静止部材に軸方向に摺動可能に装設し、前記可動部材を静止部材に対して所定の姿勢で静止させる機構を、球面ロッドのロッド部に設けられたラック部とギヤで結合されたモータとした請求項に記載のリンク作動装置。 The receiving portion is a cylindrical groove provided in the movable member at a circumferentially equidistant position in the radial direction from the axis center within a plane perpendicular to the axis thereof, and the spherical member includes the spherical portion and the spherical portion thereof. A spherical rod having a rod portion extending from, a mechanism for slidably mounting the rod portion of the spherical rod on the stationary member in the axial direction, and causing the movable member to be stationary in a predetermined posture with respect to the stationary member , The link actuating device according to claim 1 , wherein the motor is coupled to a rack portion provided on a rod portion of the spherical rod with a gear.
JP2005270417A 2005-09-16 2005-09-16 Link actuator Expired - Fee Related JP4772438B2 (en)

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JPH0615584A (en) * 1992-06-30 1994-01-25 Akazawa Tekkosho:Kk Work marking-off device and work fitting device
JP2573842Y2 (en) * 1993-04-27 1998-06-04 三菱重工業株式会社 Workbench
US6085670A (en) * 1998-05-05 2000-07-11 Genmark Automation, Inc. Tiltable Z-axis platform based on uni-directional tilt platform

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