JP4734929B2 - Carbon nanotube transfer device - Google Patents
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本発明は、カーボンナノチューブ生成基板に導電性シートを重ね合わせ、カーボンナノチューブを基板から同シートへ転写する装置に関するものである。 The present invention relates to an apparatus for superposing a conductive sheet on a carbon nanotube production substrate and transferring the carbon nanotubes from the substrate to the sheet.
近年、カーボンナノチューブは、大比表面積等のメリットを生かし、例えば、キャパシタや燃料電池、フィールドエミッションディスプレイ（ＦＥＤ）に応用されている。 In recent years, carbon nanotubes have been applied to, for example, capacitors, fuel cells, and field emission displays (FED), taking advantage of a large specific surface area.
一方、カーボンナノチューブ生成には、平滑な基板上にＦｅ等からなる触媒金属膜を形成し、基板温度を７００℃前後にした後、アセチレンガスを流すことで製造されてきた（特許文献１）。 On the other hand, carbon nanotubes have been produced by forming a catalytic metal film made of Fe or the like on a smooth substrate, bringing the substrate temperature to around 700 ° C., and then flowing acetylene gas (Patent Document 1).
しかし、カーボンナノチューブの生成には、６００℃以上の雰囲気における化学蒸着法（ＣＶＤ）を用いるので、カーボンナノチューブを生成させるための基板は、例えば、ガラスや金属のような耐熱性の高い材料からなるものに限られていた。 However, since the carbon nanotubes are produced by chemical vapor deposition (CVD) in an atmosphere of 600 ° C. or higher, the substrate for producing the carbon nanotubes is made of a material having high heat resistance such as glass or metal. It was limited to things.
そこで、発明者らは、カーボンナノチューブ導電性材料を生成するのに転写法を適用して、導電性フィルム上にブラシ状のカーボンナノチューブを転写したカーポンナノチューブ導電性材料を用いることで、耐熱性がない材料にもカーボンナノチューブを生成することができるとともに、垂直配向のブラシ状カーボンナノチューブを有する導電性材料を大量に生産できる方法を見出した（特許文献２）。
ところが、前記のように導電性フィルムにブラシ状のカーボンナノチュープを転写する方法では、転写時間および冷却温度、転写圧力の調整が不適切であると、カーボンナノチュープが導電性フィルムに均一に転写されないため、大量生産においては、歩留まり低下の原因となり、生産性が上がらないという問題があった。 However, in the method of transferring the brush-like carbon nanotube to the conductive film as described above, if the transfer time, the cooling temperature, and the transfer pressure are inappropriately adjusted, the carbon nanotube is uniformly transferred to the conductive film. Therefore, in mass production, there is a problem that yield is lowered and productivity is not increased.
本発明は、このような問題に鑑み、常に導電性フィルムに均一にカーボンナノチューブを均一に転写でき、かつ、連続生産が可能なカーボンナノチューブの転写装置を提供することを課題とする。 In view of such problems, it is an object of the present invention to provide a carbon nanotube transfer device that can always transfer carbon nanotubes uniformly to a conductive film and that can be continuously produced.
本発明の第１のものは、
カーボンナノチューブ生成基板に導電性シートを重ね合わせ、カーボンナノチューブを基板から同シートへ転写する装置であって、
上記装置は、カーボンナノチューブ生成基板と導電性シートの重ね合わせ体を加熱する加熱ゾーンと、加熱ゾーンの下流に隣接して設けられ、かつ加熱状態の上記重ね合わせ体を冷やす冷却ゾーンとからなり、
加熱ゾーンは、テーブルの上にあって、導風管と上部送りローラを備えた加熱室と、テーブルの下にある下部送りローラとからなり、上部送りローラと下部送りローラは上記重ね合わせ体を挟んでテーブル上を移動させ、
冷却ゾーンは、テーブル上を送られて来る上記重ね合わせ体に冷風を当てる冷却ファンからなる、
カーボンナノチューブの転写装置に係るものである。
The first of the present invention is
An apparatus for superimposing a conductive sheet on a carbon nanotube generation substrate and transferring the carbon nanotubes from the substrate to the sheet,
The apparatus comprises a heating zone for heating the superposed body of the carbon nanotube production substrate and the conductive sheet, and a cooling zone provided adjacent to the downstream of the heating zone and cooling the superposed body in the heated state,
The heating zone is on a table, and includes a heating chamber having an air guide tube and an upper feed roller, and a lower feed roller below the table. Move it across the table,
The cooling zone is composed of a cooling fan that applies cold air to the superposed body sent on the table.
The present invention relates to a carbon nanotube transfer apparatus.
第２の発明は、
第１の発明において、上記上部送りローラの内部に加熱源を設けたカーボンナノチューブの転写装置に係るものである。
The second invention is
In the first invention, the present invention relates to a carbon nanotube transfer apparatus in which a heating source is provided inside the upper feed roller.
第３の発明は、
カーボンナノチューブ生成基板に導電性シートを重ね合わせ、カーボンナノチューブを基板から同シートへ転写する装置であって、
上記装置は、カーボンナノチューブ生成基板と導電性シートの重ね合わせ体を加熱する加熱ゾーンと、加熱ゾーンの下流に隣接して設けられ、かつ加熱状態の上記重ね合わせ体を冷やす冷却ゾーンとからなり、
加熱ゾーンは、テーブルの上にあって、内部に加熱源を有する上部送りローラを備えた加熱室と、テーブルの下にある下部送りローラとからなり、上部送りローラと下部送りローラは上記重ね合わせ体を挟んでテーブル上を移動させ、
冷却ゾーンは、テーブル上を送られて来る上記重ね合わせ体に冷風を当てる冷却ファンからなる、
カーボンナノチューブの転写装置に係るものである。
The third invention is
An apparatus for superimposing a conductive sheet on a carbon nanotube generation substrate and transferring the carbon nanotubes from the substrate to the sheet,
The apparatus comprises a heating zone for heating the superposed body of the carbon nanotube production substrate and the conductive sheet, and a cooling zone provided adjacent to the downstream of the heating zone and cooling the superposed body in the heated state,
The heating zone is located on the table, and includes a heating chamber having an upper feed roller having a heating source therein, and a lower feed roller below the table. The upper feed roller and the lower feed roller are overlapped with each other. Move across the table across the body,
The cooling zone is composed of a cooling fan that applies cold air to the superposed body sent on the table.
The present invention relates to a carbon nanotube transfer apparatus.
本発明のカーボンナノチューブの転写装置によれば、常に均一に基板から導電性フィルムにカーボンナノチューブを転写でき、かつ、連続生産が可能である。 According to the carbon nanotube transfer apparatus of the present invention, carbon nanotubes can be transferred from a substrate to a conductive film uniformly and continuously, and continuous production is possible.
つぎに、本発明を具体的に説明するために、本発明の実施例を挙げる。 Next, in order to describe the present invention specifically, examples of the present invention will be given.
実施例１
図１〜５において、カーボンナノチューブの転写装置は、トレー(1) 上にその長さ方向に配列された複数のカーボンナノチューブ生成基板(2) に導電性シート(3) を重ね合わせ、カーボンナノチューブを基板から同シートへ転写する装置である。この実施例では同装置はカーボンナノチューブ生成基板(2) と導電性シート(3) の重ね合わせ体を加熱する加熱ゾーンと、加熱ゾーンの下流に隣接して設けられ、かつ加熱状態の上記重ね合わせ体を冷やす冷却ゾーンとからなる。
Example 1
1 to 5, the carbon nanotube transfer apparatus is configured such that a conductive sheet (3) is superimposed on a plurality of carbon nanotube generation substrates (2) arranged in the length direction on a tray (1), and the carbon nanotubes are stacked. An apparatus for transferring from the substrate to the same sheet. In this embodiment, the apparatus is provided with a heating zone for heating the superposed body of the carbon nanotube generating substrate (2) and the conductive sheet (3), and adjacent to the downstream of the heating zone. It consists of a cooling zone that cools the body.
加熱ゾーンは、テーブル(11)の上にあって、熱風を導入する導風管(10)と複数の上部送りローラ(4)(9) を備えた加熱室(6) と、テーブル(11)の下にあって複数の下部送りローラ(5) とからなる。複数の上部送りローラ(4)(9) と複数の下部送りローラ(5) はそれぞれ対を成し、各対が上記重ね合わせ体を挟んでテーブル(11)上を移動させる。 The heating zone is on the table (11), and includes a heating chamber (6) having an air guide pipe (10) for introducing hot air and a plurality of upper feed rollers (4) (9), and a table (11). And a plurality of lower feed rollers (5). The plurality of upper feed rollers (4), (9) and the plurality of lower feed rollers (5) form a pair, and each pair moves on the table (11) with the overlapped body interposed therebetween.
導風管(10)は熱風発生器(14)から加熱室(6) の頂部に配されている。加熱室(6) にはアルミニウム製の導風板(16)が設けられ、導風管(10)から導入された熱風を上部送りローラ(9)に向ける。導風管(10)において熱風発生器(14)から加熱室(6) に至る部分は、グラスウールからなる断熱カバー(17)で被覆されている。加熱室(6) は熱風温度の低下を防ぐために木製であり、室内面はシリコーンシートで内張りされている。 The air guide pipe (10) is arranged from the hot air generator (14) to the top of the heating chamber (6). The heating chamber (6) is provided with an air guide plate (16) made of aluminum, and directs hot air introduced from the air guide tube (10) toward the upper feed roller (9). The portion of the air guide tube (10) from the hot air generator (14) to the heating chamber (6) is covered with a heat insulating cover (17) made of glass wool. The heating chamber (6) is made of wood to prevent a decrease in hot air temperature, and the interior surface is lined with a silicone sheet.
上部送りローラ(4)(9) および下部送りローラ(5) はいずれもステンレスパイプとこれを覆うシリコーンゴムチューブからなる。シリコーンゴムチューブ被覆によりトレーの滑りを防ぐことができる。下部送りローラ(5) はチェーン(8) およびスプロケット(13)を介して駆動手段(20)により回転させられる。上部送りローラ(4)(9) はプラスチックギヤ(19)を介して下部送りローラ(5) と連動する。 The upper feed rollers (4), (9) and the lower feed roller (5) are each composed of a stainless steel pipe and a silicone rubber tube covering the stainless steel pipe. The sliding of the tray can be prevented by the silicone rubber tube coating. The lower feed roller (5) is rotated by the drive means (20) through the chain (8) and the sprocket (13). The upper feed rollers (4) and (9) are interlocked with the lower feed roller (5) through the plastic gear (19).
冷却ゾーンはテーブル(11)上を加熱ゾーンから送られて来る上記重ね合わせ体に冷風を当てる冷却ファン(7) からなる。テーブル(11)の下には複数の下部送りローラ(5) が設けられ、テーブル(11)の上には複数の押えローラ(18)が設けられている。押えローラ(18)もステンレスパイプとこれを覆うシリコーンゴムチューブからなる。 The cooling zone is composed of a cooling fan (7) that applies cold air to the superposed body sent from the heating zone on the table (11). A plurality of lower feed rollers (5) are provided below the table (11), and a plurality of press rollers (18) are provided above the table (11). The presser roller (18) is also composed of a stainless steel pipe and a silicone rubber tube covering the stainless steel pipe.
下部送りローラ(5) および押えローラ(18)によってカーボンナノチューブ生成基板(2) と導電性シート(3) の重ね合わせ体がテーブル(11)上のトレー(1) にばねの付勢力で押付けられ、この状態で加熱後の重ね合わせ体が冷却ファン(7) によって冷やされる。 The superposed body of the carbon nanotube generating substrate (2) and the conductive sheet (3) is pressed against the tray (1) on the table (11) by the spring force of the lower feed roller (5) and presser roller (18). In this state, the superposed body after heating is cooled by the cooling fan (7).
上記構成のカーボンナノチューブ転写装置において、トレー(1) 上にその長さ方向に配列されたカーボンナノチューブ生成基板(2) と、導電性シート(3) とが重ね合わされた状態でテーブル(11)の上を加熱ゾーンに送り込まれ、同ゾーンを通過する間に、上部送りローラ(4)(9) と下部送りローラ(5) によって圧着されると共に、導風管(10)から来る熱風により１０％未満（よりよくは５％前後０〜１７０℃に加熱される。次いで基板(2) の先端が加熱ゾーンから冷却ゾーンへ出た時点で冷却ゾーンにおいて冷却ファン(7) が駆動し始める。テーブル(11)の下には複数の下部送りローラ(5) が設けられ、基板(2) と導電性シート(3) の重ね合わせ体は５０℃以下まで冷却される。その後、基板(2) から導電性シート(3) が剥される。こうして、基板(2) から導電性フィルム(3) にカーボンナノチューブが転写される。 In the carbon nanotube transfer device having the above configuration, the carbon nanotube generating substrate (2) arranged in the length direction on the tray (1) and the conductive sheet (3) are superposed on each other in the table (11). While being fed into the heating zone and passing through the zone, it is pressed by the upper feed roller (4) (9) and the lower feed roller (5) and 10% by the hot air coming from the air guide tube (10). (Better 5% around 0-170 ° C. Then, when the tip of the substrate (2) goes out of the heating zone to the cooling zone, the cooling fan (7) starts to be driven in the cooling zone. Table ( A plurality of lower feed rollers (5) are provided under 11), and the superposed body of the substrate (2) and the conductive sheet (3) is cooled to 50 ° C. or less. The conductive sheet (3) is peeled off, and the conductive film (2) is removed from the substrate (2). The carbon nanotubes are transferred to Rum (3).
実施例２
この実施例では、上記加熱ゾーンの熱源として、導風管(10)による熱風供給の外、内部に加熱源を設けた上部送りローラを用いる。図６において、上流側の上部送りローラ(4)は中空構造をなし、円筒状のローラ軸(15)とその外側のローラ本体(12)とその外側のシリコンゴム外層(21)とからなる。その内部に加熱源としてシーズヒータ(22)が配設されている。
Example 2
In this embodiment, as the heat source for the heating zone, an upper feed roller provided with a heat source inside and outside the hot air supply by the air guide tube (10) is used. In FIG. 6, the upstream upper feed roller (4) has a hollow structure, and includes a cylindrical roller shaft (15), an outer roller body (12), and an outer silicon rubber outer layer (21). A sheathed heater (22) is disposed inside as a heating source.
上流側の上部送りローラ(4)自体の加熱と導風管(10)による熱風供給との組み合わせにより、導電性シート全体がほぼ均一な温度分布となるため、カーボンナノチューブを導電性シートに確実に転写することができる。 The combination of heating of the upstream upper feed roller (4) itself and the supply of hot air by the air guide tube (10) results in a substantially uniform temperature distribution throughout the conductive sheet. Can be transferred.
実施例３
この実施例では、上記加熱ゾーンの熱源として、内部に加熱源を設けた上部送りローラ(4) だけを用いる。内部に加熱源を設けた上部送りローラ(4) の構成は、図６に基づいて実施例２で説明した通りである。
Example 3
In this embodiment, only the upper feed roller (4) provided with a heating source therein is used as the heat source of the heating zone. The configuration of the upper feed roller (4) provided with a heating source inside is as described in the second embodiment based on FIG.
このように上流側の上部送りローラ(4) だけでも導電性シートを確実に加熱できる。 As described above, the conductive sheet can be reliably heated only by the upstream upper feed roller (4).
(1) ：トレー
(2) ：カーボンナノチューブ生成基板
(3) ：導電性シート
(4) ：上流側の上部送りローラ
(5) ：下部送りローラ
(6) ：加熱室
(7) ：冷却ファン
(8) ：チェーン
(9) ：下流側の上部送りローラ
(10)：導風管
(11)：テーブル
(12)：ローラ本体
(13)：スプロケット
(14)：熱風発生器
(15)：ローラ軸
(16)：導風板
(17)：断熱カバー
(18)：押えローラ
(19)：プラスチックギヤ
(20)：駆動手段
(21)：シリコンゴム外層
(22)：シーズヒータ
(1): Tray
(2): Carbon nanotube production substrate
(3): Conductive sheet
(4): Upper feed roller on the upstream side
(5): Lower feed roller
(6): Heating chamber
(7): Cooling fan
(8): Chain
(9): Downstream upper feed roller
(10): Air duct
(11): Table
(12): Roller body
(13): Sprocket
(14): Hot air generator
(15): Roller shaft
(16): Air guide plate
(17): Insulation cover
(18): Presser roller
(19): Plastic gear
(20): Driving means
(21): Silicon rubber outer layer
(22): Seeds heater
Claims (3)
上記装置は、カーボンナノチューブ生成基板と導電性シートの重ね合わせ体を加熱する加熱ゾーンと、加熱ゾーンの下流に隣接して設けられ、かつ加熱状態の上記重ね合わせ体を冷やす冷却ゾーンとからなり、
加熱ゾーンは、テーブルの上にあって、導風管と上部送りローラを備えた加熱室と、テーブルの下にある下部送りローラとからなり、上部送りローラと下部送りローラは上記重ね合わせ体を挟んでテーブル上を移動させ、
冷却ゾーンは、テーブル上を送られて来る上記重ね合わせ体に冷風を当てる冷却ファンからなる、
カーボンナノチューブの転写装置。 An apparatus for superimposing a conductive sheet on a carbon nanotube generation substrate and transferring the carbon nanotubes from the substrate to the sheet,
The apparatus comprises a heating zone for heating the superposed body of the carbon nanotube production substrate and the conductive sheet, and a cooling zone provided adjacent to the downstream of the heating zone and cooling the superposed body in the heated state,
The heating zone is on a table, and includes a heating chamber having an air guide tube and an upper feed roller, and a lower feed roller below the table. Move it across the table,
The cooling zone is composed of a cooling fan that applies cold air to the superposed body sent on the table.
Carbon nanotube transfer device.
上記装置は、カーボンナノチューブ生成基板と導電性シートの重ね合わせ体を加熱する加熱ゾーンと、加熱ゾーンの下流に隣接して設けられ、かつ加熱状態の上記重ね合わせ体を冷やす冷却ゾーンとからなり、
加熱ゾーンは、テーブルの上にあって、内部に加熱源を有する上部送りローラを備えた加熱室と、テーブルの下にある下部送りローラとからなり、上部送りローラと下部送りローラは上記重ね合わせ体を挟んでテーブル上を移動させ、
冷却ゾーンは、テーブル上を送られて来る上記重ね合わせ体に冷風を当てる冷却ファンからなる、
カーボンナノチューブの転写装置。 An apparatus for superimposing a conductive sheet on a carbon nanotube generation substrate and transferring the carbon nanotubes from the substrate to the sheet,
The apparatus comprises a heating zone for heating the superposed body of the carbon nanotube production substrate and the conductive sheet, and a cooling zone provided adjacent to the downstream of the heating zone and cooling the superposed body in the heated state,
The heating zone is located on the table, and includes a heating chamber having an upper feed roller having a heating source therein, and a lower feed roller below the table. The upper feed roller and the lower feed roller are overlapped with each other. Move across the table across the body,
The cooling zone is composed of a cooling fan that applies cold air to the superposed body sent on the table.
Carbon nanotube transfer device.
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| JPH08122520A (en) * | 1994-10-24 | 1996-05-17 | Dainippon Printing Co Ltd | Transfer method and transfer device using this method |
| JPH08122521A (en) * | 1994-10-24 | 1996-05-17 | Dainippon Printing Co Ltd | Transfer device |
| JP3962862B2 (en) * | 2002-02-27 | 2007-08-22 | 日立造船株式会社 | Conductive material using carbon nanotube and method for producing the same |
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2005
- 2005-01-12 JP JP2005005376A patent/JP4734929B2/en not_active Expired - Fee Related
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| US10196271B2 (en) | 2004-11-09 | 2019-02-05 | The Board Of Regents, The University Of Texas System | Fabrication and application of nanofiber ribbons and sheets and twisted and non-twisted nanofiber yarns |
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