JP4734904B2 - Humidifier - Google Patents

Description

  The present invention relates to a humidifier for generating a humidified gas body.

  In order to dissolve (humidify) a liquid represented by water in a gas body such as air, the liquid is made into fine particles by a method such as ultrasonic waves, or vaporized by means such as heating, or a nebulizer (nebulizer). Humidified air was obtained by releasing it into the atmosphere.

However, such conventional humidification techniques have caused the following problems.
(1) Humidified particles are large In the method of humidifying by releasing a large amount of water particles, such as ultrasonic waves, heat vaporization, and spraying, large water particles (steam) are released, so measures such as particle separation must be taken. I must. Moreover, since the separated water particles remain in the separation part as they are, they cause contamination and the like.
(2) It is difficult to provide precise humidity control and a small amount of humidified atmosphere gas. Since humidification mechanisms such as ultrasonic waves, heat vaporization, and spraying are aimed at obtaining a large amount of vaporized atmosphere, the amount of humidified steam generated In many cases, precise humidity control is not possible within a short time. For these reasons, it is difficult to provide (generate) a small amount of humidified atmosphere gas of several milliliters / min to several milliliters / min.
(3) Usage conditions are limited In a humidifying device using glass, the device may be damaged at high pressures or reduced pressures exceeding 0.1 MPa. Further, in the ultrasonic method, continuous humidification cannot be performed for a long time due to the life of the vibrator.

  Furthermore, the above method generally assumes water and air.

Thus, with the conventional humidification technique, the fluctuation in the amount of generation is large, and it is not possible to finely control the humidity or humidify multiple components. For this reason, the optimal (arbitrary) humidification state requested A means to make it was anxious.
JP 2002-75421 A

  In consideration of the above facts, the present invention can arbitrarily and stably control the humidification amount and the humidification ratio of the liquid in obtaining a gas body that is desirably humidified by containing a liquid in a fine particle state in the gas body. And it aims at providing the humidification apparatus which can implement | achieve this by simple structure.

The humidifying device of the invention according to claim 1 is provided in communication with a supply unit to which a predetermined gas body is supplied from a gas body supply source and above the supply unit , and has lyophilicity or water retention and permeability. A liquid retaining material configured to retain a predetermined liquid supplied from a liquid supply source and capable of releasing the retained liquid in a fine particle state by the gas body distributed from the supply unit. A liquid retaining part and a liquid that is provided above the liquid retaining part and is made of a lyophobic material and is discharged from the liquid retaining part by the gas body distributed from the liquid retaining part. A liquid-stopping portion having a liquid-stopping material that is released in the form of fine particles, and a space that is provided between the liquid-holding portion and the liquid-stopping portion and suppresses the formation of a particle film of the liquid discharged from the liquid-holding portion And is discharged from the liquid stop portion into the flowing gas body While humidifying contain a liquid serial particulate state, positioned the liquid retaining portion is downwardly provided with a humidifier provided the stop liquid portion is inclined so as to be positioned above the gas supply source A main flow path through which the gas body is fed independently from the humidifier, and a liquid stop portion of the humidifier is connected to the main flow path, and the main stream is supplied from the gas body supply source. The gas body fed to the road is mixed with the gas body supplied from the humidifier to generate a humidified gas body.

  The humidifier according to claim 1 is provided with a humidifier, and the humidifier performs basic (as a previous stage) humidification of the gas body. That is, the humidifier is composed of a liquid retaining part that retains a liquid, a space layer, and a liquid stopping part that discharges the liquid in the form of fine particles. It is contained in a fine particle state, humidified, and delivered to the downstream side.

In addition, as a liquid retention material for the liquid retention part, a material that temporarily stores a solution such as a polymer water retention material, a filter paper material, absorbent cotton, synthetic fiber, glass fiber, or ceramics is used. By changing this material, the humidification characteristics can be greatly changed. For example, a material having higher liquid retention and better liquid separation performance is more efficient, and corresponds to vinylidene fluoride resin, nylon (registered trademark) resin, and the like. Humidity can be changed (controlled) according to the amount of liquid retained (contact area with the circulating gas body), efficiency (material separation properties), contact flow velocity / distance, temperature, pressure, and the like. On the other hand, a thin film filter such as a membrane filter made of Teflon (registered trademark), ceramics, or the like is used as the liquid stopping material of the liquid stopping portion.

  When the humidification process is shown by taking nylon wool as an example, first, when the gas body passes through the nylon wool thread (liquid holding material) containing liquid, the gas body that takes away the fine solution on the fiber surface is humidified. Thereafter, the internal solution is supplied to the resurface by capillary action or the like. The humidified gas body passes only fine particles with a liquid-stopping material, and large particles are stopped and are subjected to humidification again. In this way, the flowing gas body is humidified with the liquid in the fine particle state.

  Note that the present applicant has already proposed a configuration suitable as a humidifier as described above (Japanese Patent Application No. 2003-186207).

  Further, the gas body delivered from the humidifier as described above (the gas body after the previous humidification is performed) is the gas body supplied from the gas body supply source to the main flow path (that is, the humidifier is installed). Non-humidified gas body that is not allowed to pass through, thereby generating a predetermined humidified gas body that is discharged (provided).

  Here, in the humidifier according to claim 1, a gas body fed from the gas body supply source to the main channel (that is, a non-humidified gas body that does not pass through the humidifier), and a gas body delivered from the humidifier (The gas body after the previous humidification is performed) is mixed to generate a predetermined humidified gas body, so that the gas body (non-humidified non-humidified) fed to the main flow path is generated. If the mixing ratio of the gas body) and the gas body delivered from the humidifier (the gas body after the previous stage of humidification) is arbitrarily changed (controlled), a gas body that is humidified as desired at a desired timing can be obtained. Can do.

  That is, the humidifier of the present humidifier is a humidifier based on the feature that can be continuously humidified by a configuration in which a liquid retaining part (liquid retaining material), a space layer, and a liquid stopping part (liquid stopping material) are combined. The amount of humidification can be controlled easily and stably by controlling the supply amount, temperature, and the like of the gas body.

  In addition, for example, if a resistance is added to the supply-side flow path (exit-side piping) of the humidifier, humidification at or above the original pressure (gas body pressure supplied from the gas body supply source) becomes possible. Thereby, in addition to the above-mentioned humidification amount control factor, the humidification amount can be controlled by pressure.

  Furthermore, the degree of humidification of the gas body delivered from the humidifier (the gas body after the previous stage of humidification) depends on the amount of liquid retaining material inside the humidifier, the shape and inner diameter / length of the humidifier (for the circulating gas body) It can also be set / changed appropriately according to the contact area / distance).

  In addition, since the degree of humidification of the gas body (generation of the humidified gas body) changes substantially constant, it is possible to estimate the humidification ratio. For example, the previously analyzed humidification behavior and physical property values such as viscosity and boiling point are stored in the database. If the humidification control is performed with reference to the data, the generation of the humidified gas body can be controlled more stably and finely.

  Thus, in the humidifying device according to claim 1, when the gas body contains the liquid in a fine particle state to obtain a gas body that is desirably humidified, the humidification amount and the humidification ratio of the liquid are arbitrarily and stably controlled. And this can be realized with a simple configuration.

Moreover, in the humidifier according to claim 1, since the liquid stop part (gas body delivery side) of the humidifier is provided so as to be positioned upward, the liquid retained by the liquid stop part (liquid stop material) Moves to the bottom of the instrument due to gravity. After the movement, the liquid holding part (liquid holding material) is sucked up by a capillary phenomenon or the like and used again.

Therefore, the liquid is not consumed unnecessarily and is not wasted. Further, the liquid retaining material layer for recovering the liquid which has been provided on the inner surface of the cylinder in the conventional device is not required. Moreover, even when the shortage of liquid occurs, it is sufficient to add only the necessary amount.

A humidifying device according to a second aspect of the present invention is the humidifying device according to the first aspect , wherein the gas body supply amount from the gas body supply source to the main flow path and the gas body supply source The supply amount of the gas body to the humidifier can be independently controlled .

3. The humidifying apparatus according to claim 2, wherein a gas body (non-humidified gas body) is supplied from a gas body supply source to the main flow path, and a gas body is supplied to the humidifier from the gas body supply source. Since the supply amount of (non-humidified gas body) can be controlled independently, the supply amount of the gas body (gas body after the previous humidification) delivered from the humidifier can be controlled, As a result, the mixing ratio of both (the non-humidified gas body and the gas body after the previous humidification) can be arbitrarily changed, and a desired humidified gas body can be obtained at a desired timing. .

The humidifying device according to a third aspect of the present invention is the humidifying device according to the first or second aspect , wherein the pressure of the gas body supplied from the gas body supply source to the humidifier can be controlled. It is characterized by.

In the humidifier according to claim 3, since the supply pressure of the gas body (non-humidified gas body) supplied from the gas body supply source to the humidifier can be controlled , the gas body delivered from the humidifier (front The amount of gas (after humidification in the stage) can be controlled, and as a result, the mixing ratio with the gas (non-humidified gas) fed to the main flow path can be arbitrarily changed A gas body that is humidified as desired can be obtained at a desired timing.

A humidifier according to a fourth aspect of the present invention is the humidifier according to any one of the first to third aspects, wherein the temperature of the humidifier can be controlled .

In the humidifier according to claim 4 , since the temperature of the humidifier can be controlled, it is possible to control the delivery amount of the gas body (gas body after the previous humidification) delivered from the humidifier. In addition, the mixing ratio with the gas body (non-humidified gas body) fed to the main flow path can be arbitrarily changed, and a gas body that is humidified as desired can be obtained at a desired timing.

A humidifier according to a fifth aspect of the present invention is the humidifier according to any one of the first to fourth aspects, wherein the humidifier includes a plurality of the humidifiers, and the humidifiers are connected in parallel. It is characterized by that.

In the humidifying device according to claim 5 , since a plurality of humidifiers are provided and the humidifiers are connected in parallel, the humidified state of the generated gas body is changed (granulated at an arbitrary rate at an arbitrary time). Can be made. Moreover, since each humidifier has an independent configuration, installation is easy, and since each can operate independently, a plurality of humidified gas bodies to be generated can be mixed based on conditions such as time and flow rate. It becomes easy. For example, the gas body can be generated such that the humidity is 50% after 5 minutes from the dry state and a scent component is added after 10 minutes. Furthermore, mixing / switching as described above can be performed instantaneously, or can be generated so as to reach a target concentration at a predetermined time by gradually changing as called a gradient.

A humidifier according to a sixth aspect of the present invention is the humidifier according to any one of the first to fifth aspects, wherein the humidifier is supplied from the humidifier to the connection flow path of the humidifier to the main flow path. A sensor for detecting the physical property of the gas body is provided.

In the humidifying device according to the sixth aspect , since the physical property of the gas body delivered from the humidifier can be detected, it is easy to perform fine generation control of the humidified gas body as described in the respective claims. . For example, the CPU collects and analyzes information based on detection signals from various sensors and appropriately processes valves, flow regulators, etc., so that the humidified gas body as described in the above claims can be refined. Generation control can be performed.

  As the sensor, various sensors such as humidity and temperature, or a detector such as a hydrogen flame detector used in a gas chromatograph apparatus can be used. In the case of a hydrogen flame detector or the like that detects a change in the composition of a gas or a solution, a sorting channel is provided to sort and detect a part of the humidified gas body. In this case, it is easy to automatically correct the collected amount by the CPU. Even in the case of a concentration exceeding the detection upper limit of the sensor, dilution measurement can be performed within the guaranteed operation of the sensor by fractionation / dilution as described above. In addition, by creating a database of physical property information of gas bodies and liquids in advance, the humidification ratio and the like can be controlled more easily.

A humidifying device according to a seventh aspect of the present invention is the humidifying device according to any one of the first to sixth aspects, wherein the gas body supplied from the gas body supply source is air, carbon dioxide, nitrogen , Hydrogen, helium, and argon, and the liquid supplied from the liquid source includes one or more of water, alcohol, and other organic compounds. It is said.

In the humidifier according to claim 7 , gas such as air, carbon dioxide, nitrogen, hydrogen, helium, argon is used as the gas body. As the liquid to be humidified, water, alcohol, other organic compounds, or a mixture of a plurality of mixed compounds such as water and alcohol can be used. In a mixed compound, physical properties can be changed by mixing so as to be called azeotropic, and the humidification ratio of a component with little vaporization or a component with much vaporization can be optimally controlled.

The humidifying device according to an eighth aspect of the present invention is the humidifying device according to any one of the first to seventh aspects, wherein the gas body from the gas body supply source is sent independently of the main flow path. A sub-flow path to be supplied, and the main flow path on the downstream side of the connection point of the humidifier to the main flow path is connected to the sub-flow path, and is supplied to the main flow path. Separating the gas body after the gas body delivered from the humidifier is mixed and humidified, and mixing the separated gas body into the gas body fed to the sub-flow path; It is characterized by producing a gas body humidified with

Such humidifiers described above, may be used in the same configuration from a large the same shape to small, but in generating a small amount of humidified gas body some can deal with the use of the compact system, according to claim 8 According to the humidifier, this can be easily realized.

  That is, the gas body (the non-humidified gas body that does not pass through the humidifier) supplied from the gas body supply source to the gas body (the gas after the previous stage of humidification is performed) Body) is mixed and a predetermined humidified gas body is generated, and the mixed humidified gas body is further discharged to the sub-flow channel and separated. Further, the separated gas body is further mixed with a gas body (that is, a non-humidified gas body that does not pass through the humidifier) fed to the sub-flow path, and thus a minute amount that has been humidified to a predetermined degree. A gas body is generated and discharged (provided).

Thus, in the humidifier according to claim 8 , the mixed humidified gas body flows out into the sub-flow channel, and a predetermined amount is separated, and the separated gas body is further fed to the sub-flow channel. Can be further mixed with the desired gas body to produce the desired minute amount of humidified gas body.

  As described above, the humidifying device according to the present invention controls the humidification amount and the humidification ratio of the liquid arbitrarily and stably when the gas body contains a liquid in a fine particle state to obtain a desired humidified gas body. And has an excellent effect that it can be realized with a simple configuration.

  FIG. 1 shows an overall configuration diagram of a humidifying device 10 according to an embodiment of the present invention.

  The humidifier 10 includes a humidifier 12 and a humidifier 14. The humidifier 12 and the humidifier 14 have basically the same configuration, and are provided independently of each other.

Here, FIG. 2 shows a schematic sectional view of the configuration of the humidifier 12, and FIG. 3 shows a principle diagram of the humidifier 12. The humidifier 12 includes a supply unit 16, a liquid retaining unit 18, a liquid stopping unit 20, and a space layer 22. The supply unit 16 is supplied with a predetermined gas body G ₀ (for example, air) from the gas body supply source 24 via the flow path 26. The liquid retention unit 18 is provided in communication with the supply unit 16 and includes a liquid retention material 18A made of a material having lyophilicity or water retention and permeability. The liquid retaining unit 18 is supplied with a predetermined liquid E (humidified substance, for example, water) from the liquid supply source 28 via the flow path 30, and also retains the liquid E with the liquid retaining material 18 A and the liquid retaining material 18 A. The liquefied liquid can be discharged in the form of fine particles by the gas body G ₀ circulated from the supply unit 16. The liquid stopping part 20 is provided in communication with the liquid holding part 18 and has a liquid stopping material 20A made of a lyophobic material. The liquid stopping part 20 can discharge the liquid E released from the liquid holding part 18 in a predetermined fine particle state by the gas body G ₀ circulated from the liquid holding part 18. Furthermore, the space layer 22 is provided between the liquid retaining part 18 and the liquid stopping part 20, and suppresses generation of a particle film of the liquid E released from the liquid retaining part 18.

As a result, the humidifier 12 contains the fine liquid E discharged from the liquid stopping part 20 in the flowing gas body G ₀ (passes through the inside), and humidifies the humidified gas body (humidified gas body). G ₁ can be generated). In addition, in the present embodiment, the liquid retaining part 18 is inclined and provided so that the liquid retaining part 18 is located below and the liquid stopping part 20 is located above.

  Furthermore, the humidifier 12 having the above configuration can be heated or cooled, and the temperature can be controlled as necessary.

The other humidifier 14 has the same configuration as the humidifier 12 described above, and the gas body G ₀ that circulates (passes through the inside) contains the liquid E in a particulate state and humidifies it at a certain rate (humidification). Produced gas body G ₂ ).

  A valve 31 is provided in the flow path 30 for supplying the liquid E from the liquid supply source 28 to the liquid retaining part 18 of the humidifier 12 having the above configuration, and the liquid retaining part 34 of the humidifier 14 is provided. A valve 41 is provided in the flow path 40 for supplying the liquid E from the liquid supply source 28.

Further, a mass flow controller 44 is provided in the flow path 26 for supplying the gas body G ₀ from the gas body supply source 24 to the supply section 16 of the humidifier 12, and similarly, the supply section of the humidifier 14. A mass flow controller 46 is provided in the flow path 42 for supplying the gas body G ₀ to the gas body 32 from the gas body supply source 24.

On the other hand, the gas supply source 24 supplies a flow path 26 and the humidifier 14 predetermined gas body G ₀ to the supply portion 32 for supplying the predetermined gas body G ₀ to the supply portion 16 of the humidifier 12 The main channel 48 is connected independently of the channel 42 for the purpose. The gas body G ₀ from the gas body supply source 24 is supplied to the main channel 48 independently of the humidifier 12 and the humidifier 14. A mass flow controller 50 is provided in the main channel 48.

Further, the main flow path 48 is connected to the delivery side of the humidifier 12 and the humidifier 14. That is, the liquid stop part 20 of the humidifier 12 is connected to the main flow path 48 by the supply path 52, and the liquid stop part 36 of the humidifier 14 is connected to the main flow path 48 (connection of the supply path 52 by the supply path 54. It is connected downstream). That is, each humidifier 12 and humidifier 14 are configured to be connected in parallel to the main flow path 48. Thus, the body of gas G ₀ which is fed to the main channel 48 from a gas supply source 24, to produce a body of gas G ₃ newly humidified mixed gas body G ₁ fed out of the humidifier 12 Further, the humidifier 14 is added to the gas body G ₃ after the gas body G ₁ fed from the gas body supply source 24 to the main flow path 48 and further supplied from the humidifier 12 is mixed. the body of gas G ₂ fed out by mixing new a configuration capable of generating a gas material G _4.

  Further, a sensor 56 and a three-way valve 58 are provided in the supply path 52 of the humidifier 12. Similarly, a sensor 60 and a three-way valve 62 are provided in the supply path 54 of the humidifier 14.

Furthermore, a sub flow path 64 is connected to the gas supply source 24 independently of the main flow path 48. The gas body G ₀ from the gas body supply source 24 is supplied to the sub-flow path 64 independently of the main flow path 48. The sub flow path 64 is provided with a mass flow controller 66 and a sensor 68.

The main flow path 48 is connected to the sub flow path 64. That is, a branch path 72 is connected to the main flow path 48 on the downstream side of the connection position of the supply path 54 of the humidifier 14 to the main flow path 48 via a three-way valve 70. It is connected to the sub flow path 64 (between the mass flow controller 66 and the sensor 68). Thereby, the gas body G ₄ flowing through the main flow path 48 after the gas body G ₂ delivered from the humidifier 14 is mixed is separated, and the separated gas body G ₄ is sent to the sub-flow path 64. and it has a configuration capable of generating a gas material G ₅ newly humidified by mixing the gas body G ₀ to be fed. The branch path 72 is provided with a mass flow controller 74.

The above-described valve 31 and valve 41 are connected to the CPU 76 and can control the supply of the liquid E to the humidifier 12 or the humidifier 14. Similarly, the mass flow controller 44, the mass flow controller 46, the mass flow controller 50, the mass flow controller 66, and the mass flow controller 74 are also connected to the CPU 76, and can independently control the flow rates of the gas bodies flowing through the respective flow paths. it can. Further, the three-way valve 58, the three-way valve 62, and the three-way valve 70 are also connected to the CPU 76, and each channel can be controlled to open and close. Further, the sensor 56, the sensor 60, and the sensor 68 are also connected to the CPU 76, and the physical properties of the gas bodies G ₁ , G ₂ , G ₅ flowing through the respective flow paths can be detected.

In the CPU 76, the gas bodies G _{0 to} G ₅ and the physical properties such as the boiling point and viscosity of the liquid E, the conversion coefficient in each sensor, the humidifying operation control method, and the like are described in advance in the database. Detection from each sensor Based on the flow rate and control method input by the signal and the user, the optimum control conditions are determined to control each valve and each mass flow controller described above. When the CPU 76 cannot process due to lack of data, the user can input necessary information and control method.

The liquid E supplied from the liquid supply source 28 is generally water, but may be configured to include, for example, alcohol or both. Further, the liquid E supplied to the humidifier 12 and the humidifier 14 may be different from each other (using two liquids A and B). Further, the gas body G ₀ supplied from the gas body supply source 24 is generally air, but additionally includes, for example, one or more of carbon dioxide, nitrogen, hydrogen, helium, and argon. It can be configured. In this case, for example, the humidified gas body amount can be assumed to be a flow rate from a very small amount of about several mL / min to several tens L / min.

  Next, the operation of the present embodiment will be described.

In the humidifying device 10 having the above configuration comprises a humidifier 12 and the humidifier 14, these humidifiers 12 and the humidifier 14 performs basic (as previous step) humidifying the gas body G _0.

That is, first, the humidifier 12 includes a liquid retaining part 18 that retains the liquid E, a space layer 22, and a liquid stopping part 20 that discharges the liquid E in a fine particle state, and flows through the gas body G ₀ . As a result, the liquid E is contained in the passing gas in a fine particle state, is humidified, and is supplied to the downstream side (the supply passage 52).

When showing the humidifying process nylon yarn as an example, first, when the gas body G ₀ nylon yarn (Hoekizai 18A) containing the liquid E to pass, the body of gas G ₀ which passes steal fine liquid on the fiber surface Humidified. Thereafter, the internal liquid E is supplied to the resurface by capillary action or the like. The humidified gas body G ₀ passes only fine particles by the liquid stopping material 20A, and the large particles are stopped and used for humidification again. In this way, the flowing gas body G ₀ is humidified with the liquid E in the fine particle state to generate the gas body G ₁ .

Further, the gas body G ₁ supplied from the humidifier 12 through the supply passage 52 as described above (the gas body after the previous humidification is performed) is sent from the gas supply source 24 to the main flow path 48. The gas body G ₃ is mixed with the supplied gas body G ₀ (that is, a non-humidified gas body that does not pass through the humidifier 12).

Further, similar to this, the gas body G ₀ even in the humidifier 14 is humidified, the body of gas G ₃ after the humidifier 12 Gas body G ₁ which is let out from are mixed, supply-out path from the humidifier 14 The gas body G ₂ delivered via the gas is further added and mixed, whereby a predetermined humidified gas body G ₄ is generated and discharged (provided).

Here, in the humidifier 10, the gas body G ₀ (that is, the non-humidified gas body that does not pass the humidifier 12) fed from the gas body supply source 24 to the main flow path 48 and the humidifier 12 are supplied. Gas body G ₁ (gas body after the previous humidification has been performed) is mixed to generate a predetermined humidified gas body G ₃ , and the gas body delivered from the humidifier 12 the body of gas G ₃ after the G ₁ is mixed, the humidifier 14 was further added and mixed gas body G ₂ fed out of a configuration for generating a body of gas G ₄ humidified to a predetermined, further The supply amount of the gas body G ₀ supplied from the gas body supply source 24 to the main flow path 48 and the supply amount of the gas body G ₀ supplied from the gas body supply source 24 to the humidifier 12 and the humidifier 14. bets for a can be controlled independently, the main channel 48 the gas body G ₀ fed into (non-pressurized The gas body), the mixing ratio of the humidifier 12 Gas body G ₁ fed out (gas after humidification of the previous step), or the further mixing ratio of the gas body G ₂ fed out of the humidifier 14 By arbitrarily changing (controlling), it is possible to obtain a gas body G ₄ that is humidified as desired at a desired timing.

That is, the humidifier 12 and the humidifier 14 of the humidifier 10 include the liquid retaining portions 18 and 34 (liquid retaining materials 18A and 34A), the space layers 22 and 38, the liquid stopping portions 20 and 36 (the liquid stopping materials 20A and 36A). ) Is a humidification based on a feature that can be continuously humidified by a combination of the above), and the humidification amount can be easily and stably controlled by controlling the supply amount, temperature, etc. of the gas body G ₀ to the humidifier 12 and the humidifier 14. Can be controlled.

The addition, in the humidifier 10, because the humidifier 12 and the humidifier 14 humidifier 14 has moreover a respective humidifier 12 comprises a are parallelly connected, optionally humidified gas body G ₄ to be generated It is possible to change (gradient) at an arbitrary rate in the period of time. Further, each of the humidifiers 12 and the humidifiers 14 is easy to install because they are independent of each other, and each of the humidifiers 12 and 14 can operate independently. It becomes easy to mix based on conditions. For example, the gas body can be generated such that the humidity is 50% after 5 minutes from the dry state and a scent component is added after 10 minutes. Furthermore, mixing / switching as described above can be performed instantaneously, or can be generated so as to reach a target concentration at a predetermined time by gradually changing as called a gradient.

  Further, for example, when a resistance is added to the supply side flow path (the supply path 52 and the supply path 54) of the humidifier 12 and the humidifier 14, the original pressure (the gas body pressure supplied from the gas body supply source 24) is used. ) Humidification can be performed as described above, whereby the humidification amount can be controlled by pressure in addition to the aforementioned humidification amount control factor.

Similarly, since the temperatures of the humidifier 12 and the humidifier 14 can be controlled, the delivery amounts of the gas bodies G ₁ and G ₂ delivered from the humidifier 12 or the humidifier 14 can be controlled. In addition, the mixing ratio with the gas body G ₀ (non-humidified gas body) fed to the main flow path 48 can be arbitrarily changed, and a gas body G ₄ that is humidified as desired is obtained at a desired timing. Can do.

Furthermore, the degree of humidification of the gas bodies G ₁ and G ₂ (gas bodies after humidification in the previous stage) supplied from the humidifier 12 or the humidifier 14 is determined by the amount of the liquid retaining material 18A inside the humidifier 12 or the humidifier 14. Further, it can be set and changed as appropriate depending on the shape, inner diameter and length of the instrument (contact area / distance to the circulating gas body G ₀ ).

Further, since the degree of humidification of the gas body G ₀ (generation of the humidified gas body G ₄ ) changes substantially constant, it is possible to estimate the humidification ratio. For example, the humidification behavior, viscosity, boiling point, etc. analyzed in advance are possible. the physical properties and database, if humidification control with reference to the data, can control the generation of the humidified gases member G ₄ more stable and precise.

Furthermore, since the humidifier 10 is provided with the sensor 56 and the sensor 60 for detecting physical properties of the gas bodies G ₁ and G ₂ delivered from the humidifier 12 and the humidifier 14, the humidified gas body G as described above is provided. _4. Fine generation control can be easily performed. For example, it performs CPU76 on the basis of the detection signal is the information collection and analysis from the sensors, and the like valves and mass flow controllers by properly processed, can be carried out fine control of generation of humidified gases member G ₄ .

As the sensor 56 and the sensor 60, various sensors such as humidity and temperature, or a detector such as a hydrogen flame type detector used in a gas chromatograph apparatus can be used. Further, by previously storing the physical property information of the gas bodies G _{1 to} G ₄ and the liquid E in a database, the humidification ratio and the like can be controlled more easily.

When the sensor is out of the detection range, when the flow path or sensor is contaminated, or when the physical properties of the gas bodies G _{1 to} G ₄ or the liquid E are likely to change as in a gas chromatograph detector. The three-way valve 58 or the three-way valve 62 may be provided with a fractionation and dilution circuit to detect the diluted gas body and the fractionated gas body within the sensor response range by the sensor. Alternatively, it is possible to control by estimation using the feature of humidification by a certain amount, which is a feature of the humidifying device 10. In this case, it can be applied to both low and high values.

Furthermore, in this humidifier 10, the humidifier 12 and the humidifier 14 are provided so as to be inclined so that the liquid stop portions 20 and 36 (the delivery side of the gas bodies G ₁ and G ₂ ) are located above. The liquid E held by the liquid stop parts 20, 36 (the liquid stop materials 20A, 36A) moves to the instrument bottom side by gravity. After the movement, the liquid holding portions 18 and 34 (liquid holding materials 18A and 34A) are sucked up by a capillary phenomenon or the like and used again. Therefore, the liquid E is not consumed unnecessarily and is not wasted. Further, the liquid retaining material layer for recovering the liquid which has been provided on the inner surface of the cylinder in the conventional device is not required. Moreover, even when the shortage of liquid occurs, it is sufficient to add only the necessary amount.

  Further, the supply of the liquid E (humidified substance) to the humidifier 12 and the humidifier 14 can be performed only by intermittent replenishment by utilizing a certain amount of humidification which is a feature of the present invention. For this reason, the reduced amount is simply injected into the humidifier 12 and the humidifier 14 by means such as press fitting.

Further, here, in the humidifying device 10 according to the present embodiment, when the gas body G ₄ humidified as described above is applied to, for example, a hydrogen flame detector that detects a change in composition, a predetermined minute amount is used. Only a small amount can be collected.

That is, a branch path 72 is connected to the main flow path 48 on the downstream side of the supply path 54 of the humidifier 14 via a three-way valve 70, and the branch path 72 is further connected to the sub flow path 64 (the mass flow controller 66 and the sensor). 68). Thus, by controlling the three-way valve 70, the mass flow controller 74, and the mass flow controller 66, the gas body G ₄ flowing through the main flow path 48 after the gas body G ₂ delivered from the humidifier 14 is mixed is separated. The separated gas body G ₄ can be mixed with the gas body G ₀ fed to the sub-flow path 64 to generate a slightly humidified gas body G ₅ .

  The sorting by the branch path 72 and the sub-flow path 64 is used, for example, when the required amount is small, when it is desired to supply stably in a short time, or when it is always detected, as in physics and chemistry.

That is, the fraction management part that fractions from the three-way valve 70 has many roles such as monitoring the flow rate of the outlet gas, a safety valve, and monitoring the concentration. For example, when the outlet flow rate below the flow path control range of the mass flow controller 66 or the mass flow controller 74 is required, the gas body G ₅ that is humidified within the set range can be separated and supplied in an appropriate amount. Furthermore, there are constant monitoring of the humidified concentration of the gas body G ₄ and separation supply in two directions.

As described above, in the humidifying apparatus 10 according to the present embodiment, the liquid G ₄ or the gas body G ₅ is obtained by adding the gas body G ₀ to the liquid G in the particulate state to obtain the desired gas body G ₄ or gas body G _5. The humidification amount and humidification ratio of E can be arbitrarily and stably controlled, and this can be realized with a simple configuration.

1 is an overall configuration diagram of a humidifier according to an embodiment of the present invention. It is a schematic sectional drawing which shows the structure of the humidifier of the humidification apparatus which concerns on embodiment of this invention. It is a schematic sectional drawing for demonstrating the principle of the humidifier of the humidification apparatus which concerns on embodiment of this invention.

Explanation of symbols

DESCRIPTION OF SYMBOLS 10 Humidifier 12 Humidifier 14 Humidifier 16 Supply part 18 Liquid retention part 20 Liquid stop part 22 Spatial layer 24 Gas body supply source 28 Liquid supply source 32 Supply part 34 Liquid retention part 36 Liquid stop part 38 Spatial layer 48 Main flow path 64 auxiliary flow channel E liquid G ₁ ~G ₅ gas body

Claims (8)

A supply unit to which a predetermined gas body is supplied from a gas body supply source;
Provided to communicate with the upper side of the supply unit, a liquid that has the liquid retaining while liquid retaining a predetermined liquid supplied from the lyophilic or water retention and permeability liquid supply source consists of a material having therein A liquid-retaining part having a liquid-retaining material that can be discharged in a fine particle state by the gas body circulated from the supply part;
It provided to communicate with the upper side of the liquid holding portion, releasing the liquid discharged from the liquid retaining portion by lyophobic formed of a material the body of gas which is circulated from the liquid retaining section in a predetermined state of fine particles A liquid-stopping part having a liquid-stopping material,
A space layer that is provided between the liquid retaining part and the liquid stopping part and suppresses generation of a particle film of the liquid discharged from the liquid retaining part;
The gas body that is distributed is mixed with the liquid in the fine particle state that is discharged from the liquid stop portion and is humidified, and the liquid holding portion is positioned below and the liquid stop portion is positioned above Equipped with a humidifier that is inclined to
Providing a main flow path through which the gas body from the gas body supply source is fed independently of the humidifier, and connecting a liquid stop portion of the humidifier to the main flow path;
A humidifying apparatus that generates a humidified gas body by mixing the gas body fed from the humidifier with the gas body fed from the gas body supply source to the main flow path.   The supply amount of the gas body from the gas body supply source to the main flow path and the supply amount of the gas body from the gas body supply source to the humidifier can be independently controlled. The humidifier according to claim 1.   The humidification device according to claim 1 or 2, wherein the pressure of the gas body supplied from the gas body supply source to the humidifier is controllable.   The humidifier according to any one of claims 1 to 3, wherein the temperature of the humidifier is controllable. The humidifier according to any one of claims 1 to 4 , wherein a plurality of the humidifiers are provided, and the humidifiers are connected in parallel . 6. The sensor according to claim 1, wherein a sensor for detecting physical properties of a gas body delivered from the humidifier is provided in a flow path connected to the main flow path of the humidifier. The humidifier described in 1. The gas body supplied from the gas body supply source includes one or more of air, carbon dioxide, nitrogen, hydrogen, helium, and argon, and the liquid supplied from the liquid supply source is water. The humidifier according to any one of claims 1 to 6, comprising one or more of alcohol, alcohol, and other organic compounds . The gas body from the gas body supply source is provided with a sub-flow path through which the gas body is supplied independently of the main flow path, and the main flow path on the downstream side of the connection point of the humidifier to the main flow path is provided. , Connected to the sub-flow path,
The gas body fed to the main channel and fed from the humidifier is mixed and humidified, and the separated gas body is fed to the sub-channel. The humidifying device according to any one of claims 1 to 7, wherein the humidified gas body is generated by mixing with the gas body .

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