JP4717531B2 - Suspension, head gimbal assembly, and method of manufacturing head gimbal assembly - Google Patents

Description

  The present invention relates to a suspension, a head gimbal assembly, and a method for manufacturing the head gimbal assembly, and more particularly to holding a head slider on the suspension.

  As data storage devices, devices using various types of media such as optical disks and magnetic tapes are known. Among them, a hard disk drive (HDD) is widely used as a computer storage device, and is one of the storage devices indispensable in the current computer system. Furthermore, not only computer systems, but also the use of HDDs, such as moving image recording / playback devices, car navigation systems, mobile phones, and removable memories used in digital cameras, are increasingly expanding due to their superior characteristics. .

  The HDD includes a magnetic disk for storing data and a head slider for accessing the magnetic disk. The head slider has a head element portion that reads and / or writes data from and to the magnetic disk, and a slider on which the head element portion is formed. The head element section includes a recording element that converts an electric signal into a magnetic field according to recording data on the magnetic disk and / or a reproducing element that converts a magnetic field from the magnetic disk into an electric signal. The HDD further includes an actuator that moves the head slider to a desired position on the magnetic disk. The actuator is driven by a voice coil motor (VCM), and rotates about the rotation axis to move the head slider in the radial direction on the rotating magnetic disk. As a result, the head element section can access a desired track formed on the magnetic disk and perform data read / write processing.

  The actuator includes a suspension having a spring property, and the head slider is fixed to the suspension with an adhesive. The pressure of the air between the ABS (Air Bearing Surface) surface of the head facing the magnetic disk and the rotating magnetic disk balances with the pressure applied in the direction of the magnetic disk by the suspension. It can float on the disk with a certain gap.

  This head slider / suspension assembly is called a head gimbal assembly (HGA). FIG. 10 shows an example of the HGA, and shows the structure of the HGA as viewed from the recording surface side of the magnetic disk. As shown in FIG. 10, the HGA 400 includes a head slider 401, a suspension 402, and a trace 403 that is transmission wiring. The suspension 402 includes a flexible gimbal 404 that holds the head slider 401 on the side facing the magnetic disk, a load beam 405 that holds the gimbal 404 on the side facing the magnetic disk, and a mount plate 406. The HGA 400 of FIG. 10 is a load / unload type, and includes a tab 407 for retracting to the ramp mechanism at the tip of the load beam 405. A plurality of terminals connected to the head element portion are formed on the front surface (tab side) of the head slider 401. Each terminal and each wiring of the trace 403 are formed by using solder or gold ball bonding. It is connected.

  In manufacturing the HGA, a test called a dynamic electric test (DET) is performed. The DET sets the HGA in the test apparatus and performs actual read / write processing on the rotating magnetic disk. Thus, the flying characteristics and recording / reproducing characteristics of the head slider are evaluated. The HGA that satisfies the specifications in the DET proceeds to the next manufacturing process, and the HGA that is determined to be rejected is discarded. Therefore, when the head slider does not meet the specifications, the suspension to which the head slider is fixed is also discarded, resulting in a loss in manufacturing the HGA.

  In order to eliminate the loss of this suspension in the manufacture of HGA, a DET device capable of detaching the head slider has been proposed (see, for example, Patent Document 1). As described above, by using the test apparatus with the head slider alone, DET can be performed before the head slider is mounted on the suspension, and the loss of the suspension due to the failure of the head slider can be prevented.

Alternatively, a technique for removing a defective head slider from the suspension by improving an adhesive for fixing the head slider to the suspension has been proposed (see, for example, Patent Document 2). DET evaluates the characteristics of the head slider in the HGA state. The adhesive is in a gel state at a low temperature, becomes a molten state at a high temperature, and further cures at a high temperature. The head slider and the suspension are temporarily fixed with an adhesive in a gel state, and DET is executed in this state. If the head slider is defective, the adhesive is heated to a molten state, and the head slider is removed from the suspension. When the head slider satisfies the specifications, the adhesive is thermally cured and this connection is made.
JP 2004-86976 A JP 2002-150734 A

  However, it is difficult for a test apparatus dedicated to the head slider to perform DET under exactly the same conditions as the HGA. As recording density increases and track pitch and head sliders become finer, it is required to perform DET under conditions that more closely match the actual usage conditions. Test equipment dedicated to head sliders that do not use ordinary suspensions is difficult to meet such demands. In particular, since normal suspensions that can be used for product HDDs are not used, high-speed off-track testing is possible. Measurement is impossible. In addition, when a special adhesive is used as described above, a complicated heat treatment is required for detaching the head slider. Further, the temporary fixing with the gel adhesive does not necessarily obtain a sufficient strength, and the head slider may be displaced from a desired position.

  The present invention has been made against the background of such circumstances, and one of its purposes is to securely fix the head slider to the suspension in the DET, and to remove the head slider from the suspension according to the test result. It is to be easily removable.

  A first aspect of the present invention is a suspension for holding a head slider that floats on a rotating medium provided with a head element portion, and for applying a force against the flying force to the head slider. A load beam, a tongue fixed on the surface of the load beam, for placing the head slider, and a contact with a terminal of the head slider to interconnect the terminal and the transmission wiring A flexible gimbal comprising a connection terminal and a pressing portion for pressing and holding the terminal forming surface on which the terminal of the head slider is formed without making electrical contact with the terminal. is there. By providing the pressing portion for holding the head slider separately from the connection terminal, it is possible to suppress the deterioration of the connection terminal due to the attachment / detachment of the head slider.

According to a second aspect of the present invention, in the first aspect, the pressing portion is a stopper for positioning the head slider. As a result, the head slider can be arranged at an accurate position on the tongue.
According to a third aspect of the present invention, in the second aspect, the gimbal includes a spring clamp for pressing and holding the head slider on the opposite side of the connection terminal. As a result, the head slider can be held, and the head slider can be easily attached and detached in DET or the like.
According to a fourth aspect of the present invention, in the second aspect, in the state where the head slider is not disposed on the tongue, the connection terminal protrudes toward the tongue from the pressing portion. Thereby, the electrical contact of the connection terminal can be made more reliable.

According to a fifth aspect of the present invention, in the first aspect, the pressing portion is a spring clamp. Accordingly, the head slider can be held and the head slider can be easily detached in DET or the like. The sixth aspect of the present invention is the above fifth aspect, wherein the gimbal is opposite to the connection terminal. On the side, a stopper for positioning the head slider is provided. As a result, the head slider can be arranged at an accurate position on the tongue.

According to a seventh aspect of the present invention, in the first aspect, the pressing portion is formed by bending a part of the tongue. Accordingly, the pressing portion can be easily formed without increasing the number of members.
According to an eighth aspect of the present invention, in the first aspect, the connection terminal is formed by bending a part of the gimbal and a gimbal layer formed on the gimbal layer via an insulating layer. A conductive layer protruding from the gimbal layer is provided. Thus, electrical contact between the conductive layer and the terminal can be obtained in a state where the gimbal layer is separated from the terminal of the head slider.
According to a ninth aspect of the present invention, in the first aspect, the pressing portion is in contact with a position outside the terminal on the terminal formation surface. Accordingly, it is possible to easily avoid electrical contact between the pressing portion and the terminal, and to prevent deterioration of the terminal due to the pressing portion.

  A head gimbal assembly according to a tenth aspect of the present invention includes a head slider provided with a head element portion, a tongue for disposing the head slider, and a terminal of the head slider in contact with the terminal. And a connection terminal that interconnects the transmission wiring and a pressing portion that presses and holds the terminal forming surface on which the terminal of the head slider is formed without making electrical contact with the terminal. A gimbal and a load beam for holding the gimbal on the opposite side of the head slider are provided.

According to an eleventh aspect of the present invention, in the tenth aspect, the pressing portion is a stopper for positioning the head slider. As a result, the head slider can be arranged at an accurate position on the tongue.
According to a twelfth aspect of the present invention, in the tenth aspect, the pressing portion is a spring clamp. As a result, the head slider can be held, and the head slider can be easily attached and detached in DET or the like.
In a thirteenth aspect of the present invention, in the tenth aspect, the pressing portion is in contact with a position outside the terminal on the terminal formation surface. Accordingly, it is possible to easily avoid electrical contact between the pressing portion and the terminal, and to prevent deterioration of the terminal due to the pressing portion.
A fourteenth aspect of the present invention is the above tenth aspect, further comprising an adhesive layer between the head slider and the tongue. Thereby, the head slider and the tongue can be firmly connected in mounting on the product.
According to a fifteenth aspect of the present invention, in the tenth aspect, a fifteenth aspect further includes a conductor layer that fixes the terminal of the head slider and the connection terminal. Thereby, the electrical contact of the connection portion can be strengthened in mounting on the product.

  According to a sixteenth aspect of the present invention, there is provided a method of manufacturing a head gimbal assembly including a head slider having a head element portion and a suspension for holding the head slider, the load beam, and the load beam on the load beam. A suspension comprising a flexible gimbal fixed to a terminal, and a terminal forming surface on which the connection terminal connected to the transmission wiring contacts the terminal of the head slider and the terminal of the head slider is formed The head slider is disposed on the tongue surface of the gimbal so that the pressing portion is pressed and held without making electrical contact with the terminal, and is rotated by the head slider held by the suspension. By accessing the media, the electrical characteristics of the head slider are tested, and the defective head slider is removed from the suspension. Removed from Pensions is a new head slider which disposed in the suspension. By providing the pressing portion for holding the head slider separately from the connection terminal, it is possible to suppress the deterioration of the connection terminal due to the attachment / detachment of the head slider.

According to a seventeenth aspect of the present invention, in the sixteenth aspect, when the test result of the head slider is good, the head slider and the gimbal tongue are fixed with an adhesive. Thereby, the head slider and the tongue can be firmly connected in mounting on the product.
According to an eighteenth aspect of the present invention, in the sixteenth aspect, when the test result of the head slider is good, the head slider terminal and the connection terminal are fixed by a conductor. Thereby, the electrical contact of the connection portion can be strengthened in mounting on the product.
According to a nineteenth aspect of the present invention, in the sixteenth aspect, the pressing portion is in contact with a position outside the terminal on the terminal forming surface. Accordingly, it is possible to easily avoid electrical contact between the pressing portion and the terminal, and to prevent deterioration of the terminal due to the pressing portion.
In a twentieth aspect of the present invention, when the test result of the head slider is good in the sixteenth aspect, the head slider is detached from the suspension and mounted on another product suspension. Thus, the head slider can be securely fixed in the test, and the defective head slider can be easily replaced without discarding the suspension.

  According to the present invention, for example, in DET, the head slider is securely fixed to the suspension, and the head slider can be easily detached from the suspension according to the test result.

  Hereinafter, embodiments to which the present invention can be applied will be described. In addition, in each drawing, the same code | symbol is attached | subjected to the same element and the duplication description is abbreviate | omitted as needed for clarification of description. The present embodiment relates to a head slider holding technique in a head slider dynamic electric test (DET). The DET of this embodiment is tested by attaching a head slider to a suspension having the same configuration as that of a suspension used in a hard disk drive (HDD) as a product, and evaluates its characteristics. One of the features of this embodiment is the head slider holding mechanism of this suspension. In this specification, the assembly of the suspension and the head slider is called a head gimbal assembly (HGA). When the DET evaluation result satisfies a desired specification, the tested HGA is mounted on the HDD as a product.

  First, in order to facilitate understanding of the present invention, the entire configuration of the HDD will be described. FIG. 1 is a plan view schematically showing the configuration of HDD 100 according to the present embodiment. The HDD 100 includes a magnetic disk 101 as a recording medium for recording data. The magnetic disk 101 is a non-volatile memory that records data by magnetizing a magnetic layer. Each component of the HDD 100 is accommodated in the base 102. The base 102 constitutes a disk enclosure by being fixed via a cover (not shown) and a gasket (not shown) that close the upper opening of the base 102, and can accommodate each component of the HDD 100 in a sealed state. .

  The magnetic disk 101 is fixed to a spindle motor (SPM) 103. The head slider 105 includes a head element unit for writing and / or reading data to / from the magnetic disk 101 with respect to data input / output with a host (not shown). The head element unit includes a recording element that converts an electric signal into a magnetic field according to data stored in the magnetic disk 101 and / or a reproducing element that converts a magnetic field from the magnetic disk 101 into an electric signal, and a recording element and / or reproducing element. Has a slider formed on the surface.

  The actuator 106 holds and moves the head slider 105. The actuator 106 is rotatably held on a rotary shaft 107 and is driven by a VCM (voice coil motor) 109 as a drive mechanism. The actuator 106 includes constituent members coupled in the order of the suspension 110, the arm 111, the coil support 112, and the flat coil 113 from the tip in the longitudinal direction where the head slider 105 is disposed. The configuration of the suspension 110 will be described in detail later. The VCM 109 includes a flat coil 113, a stator magnet (not shown) fixed to the upper stator magnet holding plate 114, and a stator magnet (not shown) fixed to the lower stator magnet holding plate. .

  The magnetic disk 101 is integrally held by an SPM 103 fixed to the bottom surface of the base 102 and is rotationally driven by the SPM 103 at a predetermined speed. The magnetic disk 101 rotates counterclockwise in FIG. When the HDD 100 is not operating, the magnetic disk 101 is stationary. The VCM 109 rotates the actuator 106 in the short direction about the rotation shaft 107 in accordance with a drive signal sent from the controller (not shown) to the flat coil 113. Thus, the actuator 106 can move the head slider 105 on the magnetic disk 101 or move the head slider 105 to the outside of the magnetic disk 101.

  In order to read / write data from / to the magnetic disk 101, the actuator 106 moves the head slider 105 over the data area on the surface of the rotating magnetic disk 101. As the actuator 106 rotates, the head slider 105 moves along the radial direction of the surface of the magnetic disk 101. As a result, the head slider 105 can access a desired track. A signal between the head slider 105 and the controller is transmitted by the trace 201 and the FPC 117 which are transmission wirings. In the head slider 105, pressure due to the viscosity of air between the ABS (Air Bearing Surface) surface of the slider facing the magnetic disk 101 and the rotating magnetic disk 101 is applied in the direction of the magnetic disk 101 by the suspension 110. By balancing with the pressure, the head slider 105 floats on the magnetic disk 101 with a certain gap.

  When the rotation of the magnetic disk 101 is stopped, the head slider 105 comes into contact with the surface of the magnetic disk 101, and problems such as the occurrence of scratches on the data area and the inability to rotate the magnetic disk occur due to the adsorption phenomenon. When stopping, the actuator 106 retracts the head 105 from the data area to the ramp mechanism 115. The actuator 106 rotates in the direction of the ramp mechanism 115, the tab 116 at the tip of the actuator moves while sliding on the surface of the ramp mechanism 115, and rests on the parking surface on the ramp mechanism 115, thereby causing the head slider 105 to move. Unloaded. At the time of loading, the actuator 106 supported on the parking surface is detached from the ramp mechanism 115 and moves over the surface of the magnetic disk 101.

  Note that the present invention can also be applied to a CSS (Contact Start and Stop) system in which the head slider 105 retreats to a zone disposed on the inner periphery of the magnetic disk 101 when data writing / reading processing is not performed. Is possible. In the above description, for the sake of simplicity, a single-sided hard disk drive having a single magnetic disk 101 is described. However, the HDD 100 can include one or a plurality of double-sided storage magnetic disks. .

  As described above, the head slider 105 is a DET target in the manufacturing process before being mounted on the HDD 100. In DET, a head slider 105 is mounted on a suspension 110 to form an HGA, the HGA is set in a test apparatus, and an actual read / write process is performed on a rotating magnetic disk. Thus, the flying characteristics and recording / reproducing characteristics of the head slider 105 are evaluated.

  Specifically, as shown in the flowchart of FIG. 2, first, the suspension 110 is manufactured (S11). Next, the head slider 105 is mounted on the prepared suspension 110 to configure the HGA (S12). The head slider 105 is detachably attached to the suspension 110. The head slider 105 holding mechanism of the suspension 110 will be described in detail later. The configured HGA is set in a DET test apparatus, and DET is executed (S13).

  If the DET evaluation result in S13 is “error (defective, NG)”, the head slider 105 is removed from the suspension 110, and the head slider 105 is discarded (S14). The suspension 110 is reused, and another new head slider 105 is mounted on the suspension 110 (S12), and DET is performed (S13).

  If the DET evaluation result in S13 is “pass (good, OK)”, the head slider 105 and the suspension 110 are fully connected (S15). Specifically, the head slider 105 and the suspension 110 are fixed with an adhesive, and the terminal portions are electrically and physically connected by solder ball bonding or gold ball bonding. Thereafter, the HGA is mounted on the HDD 100 as a product (S16).

  The configuration of the HGA 200 used in this embodiment will be described with reference to FIG. FIG. 3A is a plan view showing a partial configuration of the HGA 200 in a state used in the DET, and shows the configuration of the HGA 200 viewed from the magnetic disk 101 side. FIG. 3B is a side view thereof. In addition, the part which is not shown by FIG. 3 is the structure similar to the conventional HGA. In this embodiment, the HGA 200 includes a plurality of constituent members, and includes a head slider 105, a suspension 110, and a trace 201. The suspension 110 is composed of a plurality of components and includes a gimbal 202 and a load beam 203.

  The trace 201 transmits a signal of the head element unit in the head slider 105. In the trace 201, a plurality of leads are integrally formed on an insulating sheet formed of a polyimide film without contacting each other. In FIG. 3, two leads for the reproducing element and two leads for recording are shown. The number of leads varies depending on the configuration of the head slider 105, and may be 2, 4 or 6, for example. One end of each lead constitutes a multi-connector (not shown) connected to an internal circuit such as a head amplifier. The other end of each lead on the head slider 105 side is connected to each connection terminal 221 a-221 d formed on the gimbal 202. The trace 201 is fixed to the gimbal 202 with an adhesive, and the outside is covered with an epoxy resin or the like as necessary.

  The load beam 203 is formed of stainless steel or the like and functions as a precise thin plate spring. The shape of the load beam 203 is devised so as to extend vertically in the direction of rotation, to be thin and lightweight, and to maintain necessary rigidity (larger than the gimbal 202). A tab 116 is formed at the front end of the load beam 203 on the front side in the longitudinal direction (on the counter-rotating shaft 107 side). The load beam 203 has elasticity to generate a load that opposes the flying force of the head slider 105. The head slider 105 floats at a desired height by balancing the weight and the buoyancy of the head slider 105.

  The gimbal 202 is welded to the surface of the magnetic disk 101 of the load beam 203 by laser spot welding. The gimbal 202 can be formed of stainless steel, for example. The gimbal 202 is formed to have desired elasticity and be deformable so that the head slider 105 can be tilted in a predetermined direction in order to absorb surface vibration of the magnetic disk 101. An opening 222 is formed in the front part of the gimbal 202. A tongue-shaped gimbal tongue 223 protruding toward the center of the opening 222 is formed at the center of one side of the front side (tab 106 side) of the opening 222. The head slider 105 is disposed on the gimbal tongue 223 that protrudes from the front side of the opening 222 to the rear side (inflow side of the head slider 105). The head slider 105 is held by a spring clamp 224 and a stopper 227 formed on the gimbal 202. The holding mechanism for the head slider 105 will be described in detail later.

  The gimbal 202 is welded to the load beam 203 at its rear part (not shown) by a laser spot, and the front part of the gimbal 202 including the gimbal arm 225 and the gimbal tongue 223 is not welded. It has become. Two gimbal arms 225 extending from the back of the gimbal 202 along the side edges of the opening 222 define the ends of the opening 222 and are formed in the front of the gimbal arm 225 in their front. The tongue 223 is elastically supported. Note that, unlike the configuration shown in the figure, the gimbal 202 and the load beam 203 can be formed integrally instead of as separate members.

  As shown in FIG. 3B, the load beam 203 is formed with a dimple 231 that protrudes toward the gimbal 202 side (head slider 105 side (upward in the drawing)) at a position facing the head slider 105. ing. The gimbal tongue 223 is supported at one point by the dimple 231 of the load beam 203. The gimbal arm 225 is warped, and the gimbal tongue 223 is pressed against the dimple 231 by an elastic force. The gimbal tongue 223 can rotate the head slider 105 in the pitch direction or the roll direction, absorbs the surface vibration of the magnetic disk 101 and the inclination caused by the assembly, and at the same time, has high followability to the tracking of the magnetic disk 101. Can be demonstrated.

  As described above, the head slider 105 is detachably held on the gimbal tongue 223. A clamp 224 having a bent portion and having a spring property is formed at the rear end portion of the gimbal tongue 223, that is, the inflow side of the head slider 105. The spring clamp 224 is formed to face the inflow side surface 151 of the head slider 105. The spring clamp 224 is in contact with the inflow side surface 151 and presses the surface in the forward direction (outflow side of the head slider 105) and presses it toward the gimbal tongue 223. That is, the direction of the pressing force is oblique with respect to the surface of the gimbal tongue 223 where the head slider 105 is disposed.

  Two stoppers 227 a and 227 b are formed on the same side as the connection terminal 221, that is, on the opposite side of the spring clamp 224. The two stoppers 227 support the head slider 105 so as to resist the pressing force of the spring clamp 224 on each side of the connection terminal 221 row. That is, the head slider 105 is sandwiched between the spring clamp 224 and the stopper 227 by these pressing forces. The stopper 227 is formed so as to face the outflow side surface 152 of the head slider 105 and is in contact with the surface 152. The stopper 227 positions the head slider 105 on the gimbal tongue 223 by supporting the head slider 105 against the pressing force of the spring clamp 224. By using the spring clamp 224, the head slider 105 can be securely held and can be easily replaced. In addition, although it is preferable that there are a plurality of stoppers 227, for example, one stopper 227 may be arranged at the center of the connection terminal 221 row.

  Further, as described above, the pressing force of the spring clamp 224 includes a component in a direction in which the head slider 105 is pressed against the gimbal tongue 223, and the pressing force between the head slider 105 and the gimbal tongue 223 is Therefore, the head slider 105 is held. By pressing the head slider 105 against the gimbal tongue 223 with the spring clamp 224, the head slider 105 can be more securely fixed on the gimbal tongue 223.

  In the gimbal 202, an opening 226 is formed on the front side of the terminal formation surface 152, and the connection terminal 221 is formed so as to protrude into the opening 226. Four terminals (not shown in FIG. 3) are formed on the front surface of the head slider 105, that is, the outflow side surface 152 thereof. Each terminal is connected to the head element portion. Each connection terminal 221 a-221 d of the gimbal 202 has elasticity and is in contact with each terminal of the head slider 105. Due to this elasticity, the connection terminal 221 can reliably obtain electrical contact with the terminal of the head slider 105.

  As described above, the head slider having a bad DET result is removed from the suspension 101 and another head slider 105 is attached to the suspension 101. Although the head slider 105 may be replaced a plurality of times, when the head slider 105 is held by the connecting terminal 221 pressing force, the tip of the connecting terminal 221 deteriorates. In order to obtain an accurate flying characteristic of the head slider 105, it is important that the head slider 105 is accurately positioned with respect to the dimple 231. 105 misalignment can be caused. Alternatively, a poor electrical contact between the connection terminal 221 and the terminal portion can be caused.

  The HGA 200 of this embodiment includes a stopper 227 as a pressing portion separately from the connection terminal 221 arrangement side. The stopper 227 and the spring clamp 224 mechanically hold the head slider 105, and the connection terminal 221 is in contact with the head slider 105 for electrical contact. For this reason, the deterioration of the connection terminal 221 is suppressed, and the holding of the head slider 105 on the gimbal tongue 223 and the desired electrical contact can be obtained together.

  4A and 4B show a state in which one of the head slider terminals 153 and one of the connection terminals 221 are connected, and further one of the stoppers 227 presses and supports the terminal forming surface (outflow side surface) 152. This is shown schematically. Each connection terminal 221 and terminal 153 have the same structure. The connection terminal 221 includes a plurality of layers, and includes a lowermost gimbal layer 301, an insulating layer 302 such as polyimide thereon, and an uppermost conductive layer 303. The conductive layer 303 is formed of a metal such as copper. The conductive layer 303 is in press contact with the terminal 153 of the head slider, thereby ensuring electrical connection between them. Since the conductive layer 303 protrudes from the gimbal layer 401 and the insulating layer 302, the gimbal layer 301 can be separated from the terminal 153 of the head slider.

  The stopper 227 is preferably formed by bending a part of the gimbal 202. Typically, a part of the gimbal 202 is cut, and a protrusion is formed on the gimbal 202 by pressing. Accordingly, the stopper 227 can be easily formed without increasing the number of members. The stopper 227 presses the surface 152 of the head slider terminal forming surface 152 without making electrical contact with the terminal 153. Specifically, the stopper 227 is in contact with a position outside the terminal 153 in order to prevent damage to the terminal 153 and save the trouble of insulation treatment.

  The stopper 227 is required to hold the head slider 105 with a much larger pressing force than the connection terminal 221 and to have sufficient rigidity for positioning. The stopper 227 is formed in a shape that satisfies the requirements, and is formed so that its thickness or width is larger than that of the gimbal layer 301 of the connection terminal 221. In the example of FIG. 4, both of the stoppers 227 are larger than the connection terminal 221.

  FIG. 5 schematically shows the mounting of the head slider 105 on the gimbal tongue 223. As shown in FIG. 5A, when the head slider 105 is not mounted on the gimbal tongue 223, the connection terminal 241 protrudes from the stopper 227 to the gimbal tongue 223 side. Thus, reliable contact between the connection terminal 241 and the terminal 153 of the head slider 105 is ensured.

  As shown in FIG. 5B, the conductive layer 403 of the connection terminal and the terminal 153 come in contact before the stopper 227. The connection terminal 241 is pressed by the head slider 105 and bent to the opposite side of the head slider 105 (direction away from the terminal forming surface 152). The terminal forming surface 152 comes into contact with the stopper 227, and the head slider 105 is positioned there. As described above, the connection terminal 241 is in press contact with the terminal 153 due to its elasticity, so that the electrical contact can be made more reliable.

  In DET, as shown in FIG. 3, the head slider 105 is held on the gimbal tongue 223 only by the spring-like pressing force by the clamp 224. As described with reference to FIG. 2, when the DET evaluation result is a pass, the main connection of the head slider 105 is executed (S15). FIG. 6 schematically shows a method of this connection of the head slider 105. As shown in FIG. 6A, the bottom surface of the head slider 105 is fixed to the gimbal tongue 223 surface with an adhesive layer 281. Typically, these are fixed by a low elastic epoxy resin or the like.

  Further, the connection terminal 221 and the head slider terminal 153 are connected by solder ball bonding or gold ball bonding. Specifically, as shown in FIG. 6A, a conductor ball 282 made of solder or gold is disposed between the connection terminal 221 and the head slider terminal 153 and irradiated with laser light. The conductor ball is melted by the laser irradiation, and as shown in FIG. 6B, a conductor layer 283 that electrically and physically connects the connection terminal 221 and the head slider terminal 153 is formed.

  In this manner, the head slider 105 is physically or electrically connected by the adhesive layer 281 and / or the conductive layer 283, so that the head slider 105 can be held after being mounted on the HDD 100 or electrically Connection can be ensured. If a sufficient holding force can be obtained by the pressing force of the spring clamp 224, the HGA 200 can be mounted on the HDD 100 without using the adhesive layer 281 and the conductive layer 283.

  FIG. 7 shows an example of another preferable holding mechanism of the head slider 105. In the example of FIG. 3, the head slider 105 is pressed and held between the inflow side clamp 224 and the outflow side stopper 227, but as shown in FIG. 7, the connection terminal is connected to the same outflow side as the connection terminal 221. Spring clamps 228a and 228b are formed on both sides of the 221 row. Further, a stopper 229 is formed on the opposite inflow side. The clamp 228 provided separately from the connection terminal 221 is a pressing portion that presses and holds the head slider 105 by having a spring property. The clamp 228 protrudes toward the outflow side surface 152 of the head slider 105 and is in contact with the inclined surface. The connection terminal 221 presses the terminal 153 for electrical contact, but the force is weak. The clamp 228 presses the terminal forming surface 152 of the head slider 105 with a larger force than the connection terminal 221, and the head slider is pressed by a pressing force between the clamp 228 and the stopper 229 provided facing the center of the inflow side surface 151. 105 is sandwiched.

  In this manner, by providing the clamp 228 on the same side as the connection terminal 221, wear of the connection terminal 221 can be suppressed even when the head slider 105 is repeatedly attached and detached. The clamp 228 can be formed by processing a part of the gimbal 202 to form a protrusion toward the head slider 105 and bending it by press working. In order to give a balanced pressing force, it is preferable to provide a plurality of clamps 228a, b as in this example.

  FIG. 8 shows an example of another preferable holding mechanism of the head slider 105. In FIG. 8, the configuration other than the stoppers 251a and 251b is the same as that of the HGA 200 shown in FIG. The stoppers 251a and 251b position the head slider 105 in the longitudinal direction of the suspension 101 and perform positioning in the short direction. By positioning the head slider 105 in two different directions on the gimbal tongue 223, the direction in which the connection terminal 201 presses and the direction crossing the stopper 251a, 251b, the head can be easily positioned at an accurate position. A slider 105 can be disposed.

  Note that the stoppers 251a and 251b can be formed by the same method as the stopper 229. Further, the stopper may be formed separately in two different directions. As shown in FIG. 9, the present invention can be applied to a head slider 105 that includes six connection terminals 221. For example, as shown in FIG. 9A, it is possible to provide clamps 228a and 228b on both sides of the six connection terminals 221, respectively, or to provide clamps 228a and b between different connection terminals. The same applies to the stopper 227.

  It is preferable that the HGA tested as described above is mounted on the HDD as it is, but the above suspension can also be used as a DET test suspension. After completion of DET, the head slider is removed from the suspension, and the head slider is mounted on the product suspension mounted on the HDD. The product suspension can have the same configuration as a conventional suspension. Thus, the head slider can be securely fixed in the test, and the defective head slider can be easily replaced without discarding the suspension. The suspension of this embodiment can also be used for evaluating the head slider with a strong magnetic field, examining the transmission path of the suspension, and examining mechanical vibration.

  The above description describes the embodiment of the present invention, and the present invention is not limited to the above-described embodiment. A person skilled in the art can easily change, add, and convert each element of the above-described embodiment within the scope of the present invention.

1 is a schematic plan view showing a configuration of a hard disk drive in the present embodiment. It is a flowchart which shows the manufacturing process of the head gimbal assembly in this embodiment. It is a figure which shows typically the structure of the head gimbal assembly in DET in this embodiment. It is a figure which shows typically the connection structure of the connection terminal of a gimbal and the terminal of a head slider in this embodiment. It is a figure which shows typically the mounting method of the head slider to the gimbal tongue in this embodiment. It is a figure which shows typically this connection of the head slider for HDD mounting in this embodiment. It is a figure which shows typically the structure of the head gimbal assembly in another preferable aspect. It is a figure which shows typically the structure of the head gimbal assembly in another preferable aspect. It is a figure which shows typically the structure of a head gimbal assembly provided with 6 connection terminals. It is a perspective view which shows typically the structure of the head gimbal assembly in a prior art.

Explanation of symbols

100 Hard disk drive, 101 Magnetic disk, 102 Base 103 Spindle motor, 104 Hub, 105 Head slider 106 Actuator, 107 Rotating shaft, 108 Actuator arm 109 VCM, 110 Suspension, 111 Head arm 112 Coil support, 113 Flat coil 114 Upper stator magnet holding plate, 115 Ramp mechanism, 116 Tab 200 Head gimbal assembly, 201 Trace, 202 Gimbal 203 Load beam, 221 Connection terminal, 222 Opening 223 Gimbal tongue, 224 Spring clamp 225 Gimbal arm 226 Opening, 227 Stopper, 228 Spring clamp 229, 251 Stopper, 231 Dimple 281 Adhesive layer 282 Body Ball, 283 conductive layer 301 gimbal layer, 302 an insulating layer, 303 a conductor layer

Claims (7)

A suspension for holding a head slider that floats on a rotating medium with a head element portion,
A load beam for applying a force to the head slider against the flying force;
A tongue fixed on the surface of the load beam, for placing the head slider, a connection terminal for contacting the terminal of the head slider and interconnecting the terminal and the transmission wiring; and the terminal forming surface terminals of the head slider is formed, Bei example a pressing portion for pressing to hold without the terminals and electrical contacts, a flexible gimbal comprising, a
The pressing portion is a stopper for positioning the head slider,
In the state where the head slider is not disposed on the tongue, the connection terminal protrudes toward the tongue from the pressing portion . The suspension according to claim 1 , wherein the gimbal includes a spring clamp for pressing and holding the head slider on the opposite side of the connection terminal.   The suspension according to claim 1, wherein the pressing portion is a spring clamp. The suspension according to claim 3 , wherein the gimbal includes a stopper that positions the head slider on a side opposite to the connection terminal.   The suspension according to claim 1, wherein the pressing portion is formed by bending a part of the tongue.   The connection terminal includes: a gimbal layer formed by bending a part of the gimbal; and a conductive layer formed on the gimbal layer via an insulating layer and protruding from the gimbal layer. The suspension according to 1. The suspension according to claim 1, wherein the pressing portion is in contact with a position outside the terminal on the terminal forming surface.

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