JP4697481B2 - Amplitude equalizer - Google Patents

Description

  The present invention relates to an amplitude equalizer that is used in traveling wave tubes, high-frequency semiconductor amplifiers, and the like, and that flattens gain frequency characteristics.

  In traveling wave tube amplifiers such as microwave bands and millimeter wave bands, semiconductor amplifiers, etc., when the amplitude of the output signal varies depending on the frequency, that is, when the gain frequency characteristics are not flat, the input side or output side of the amplifier An amplitude equalizer (gain equalization device) is mounted to connect to the terminals, suppress the amplitude difference, and flatten the frequency characteristics. It also functions as a band rejection filter for suppressing unnecessary waves such as second harmonics generated by the nonlinearity of the amplifier.

  With respect to the amplitude equalizer, for example, in Japanese Patent Application Laid-Open No. 8-125401, FIG. 2 (see Patent Document 1), as an application of a traveling wave tube (TWT) as a channel amplifier, an RF input port 20 and an RF output port are disclosed. 40, and a stub tube coupled to a T-joint 31 located substantially at the center of the main microstrip transmission line. A gain equalizing device is disclosed comprising a receiver and variable resistance means 54 coupled to the stub tuner.

  Further, in FIG. 2 (see Patent Document 2) of Japanese Patent Application Laid-Open No. 2004-28997, a series circuit of a resistor 7, a transmission line 11, and an inductor 12 is provided between the main line 6 through which the microwave signal propagates and the ground, By connecting the open-ended line 13 between the transmission line 11 and the inductor 12 of this series circuit, and selecting the electrical length of the transmission line 11 and the open-ended line 13 to be shorter than ¼ wavelength in a desired frequency band. A frequency equalizer is disclosed which also has a frequency characteristic of a concave loss.

  Further, in FIG. 1 (see Patent Document 3) of Japanese Patent Laid-Open No. 2002-217619, the input end of the microstrip sub-line is arranged opposite to the side edge of the microstrip main line to form a pattern gap constituting the capacitance. Width of the pattern gap by arranging the adjustment pattern near the input end of the microstrip sub-line and along the side edge of the microstrip main line, and connecting with the input end with gold wire or gold ribbon as necessary An equalizer is disclosed in which the above is changed.

JP-A-8-125401 (FIG. 2)

Japanese Patent Laying-Open No. 2004-287949 (FIG. 2)

Japanese Patent Laid-Open No. 2002-217619 (FIG. 1)

  However, in the thing of patent document 1, since it was an amplitude equalizer of a MMIC structure, much expense was required for the initial manufacture of MMIC, and there existed a subject that it was not suitable for low-volume production.

  The devices described in Patent Document 2 and Patent Document 3 have a problem that the resistance element has a two-dimensional expansion, so that the loss at the minimum loss frequency increases.

It is an object of the present invention to provide an amplitude equalizer using a planar substrate configuration and a coaxial tube that can reduce processing costs while maintaining low loss performance at a minimum loss frequency.

An amplitude equalizer according to claim 1 is located in the vicinity of a first insulating substrate having a back surface as a ground conductor, a main line having an input / output end formed on the surface of the first insulating substrate, and the main line. A strip conductor formed on the surface of the first insulating substrate having a pattern in which one end is an open end and the other end is a short-circuited end; and a second insulating substrate placed on the surface of the strip conductor; the center from both sides through the central conductor, a resistive film along the central conductor to form the strip conductor shorter coplanar line than the strip conductor formed on a surface of the second insulating substrate along the pattern of a ground pattern so as to sandwich the conductor pattern formed distribution to be short-circuited with said strip conductor, said center conductor and electrically that electrically connects the main line located on the open end side of said strip conductors And a connection means, connected in series with the strip line resonator formed by short-circuiting the other end of the strip conductor to the ground conductor, the center conductor, the resistor film, the resistor is constituted by the ground pattern addition coplanar line Is connected to the main line, and an amplitude attenuation region is provided in a microwave frequency band passing through the main line.

An amplitude equalizer according to claim 2 is located in the vicinity of a first insulating substrate having a back conductor as a ground conductor, a main line having an input / output end formed on the surface of the first insulating substrate, and the main line. A strip conductor formed on the surface of the first insulating substrate having a pattern in which one end is an open end and the other end is a short-circuited end; and a second insulating substrate placed on the surface of the strip conductor; the center from both sides through the central conductor, a resistive film along the central conductor to form the strip conductor shorter coplanar line than the strip conductor formed on a surface of the second insulating substrate along the pattern of a ground pattern so as to sandwich the conductor pattern formed distribution to be short-circuited with the strip conductors, a plate-shaped adjustment blocks placed apart from the second insulating substrate, the opening of the strip conductors And an electrical connection means for electrically connecting the said central conductor located on the side the main line, is connected in series with the strip line resonator formed by short-circuiting the other end of the strip conductor to the ground conductor, the center conductor A resistor-added coplanar line constituted by the resistor film and the ground pattern is connected to the main line to provide an amplitude attenuation region in a microwave frequency band passing through the main line, and the second insulating substrate. The amount of attenuation is increased by reducing the distance between the adjustment block and the adjustment block, and the amount of attenuation is decreased by increasing the distance.

An amplitude equalizer according to claim 3 includes a stripline resonator formed by short-circuiting the other end of the strip conductor to a ground conductor , and a resistor-added coplanar line configured by the center conductor , the resistor film, and the ground pattern. 2. A plurality of devices are provided along the main line.

An amplitude equalizer according to a fourth aspect is located in the vicinity of a first insulating substrate having a back surface as a ground conductor, a main line having an input / output end formed on the surface of the first insulating substrate, and the main line. A strip conductor formed on the surface of the first insulating substrate with a pattern having one end as an open end and the other end as a short-circuited end, a second insulating substrate with a back surface as a conductor pattern, and the strip conductor a central conductor which forms the shorter coplanar line than the strip conductor formed on a surface of the second insulating substrate along the pattern of, to sandwich the central conductor from both sides through the resistive film along the center conductor in a patterned the strip conductor and topographically shorted was ground pattern, and electrical connection means for electrically connecting said central conductor and said main line located on the open end side of said strip conductors For example, the second insulating substrate back surface and said strip conductor and said second other end strip line resonator formed by short-circuited to the ground conductor of the strip conductor and the conductor layer by the conductor pattern of the insulating substrate by bonding Attenuation of amplitude in a microwave frequency band that is connected in series to a capacitor and connects the main line with a resistor-added coplanar line composed of the central conductor , the resistor film, and the ground pattern. An area is provided.

According to a fifth aspect of the present invention, there is provided an amplitude equalizer including a first insulating substrate having a back conductor as a ground conductor, a main line having an input / output end formed on a surface of the first insulating substrate, and the first line near the main line. A wide pattern formed on the surface of the first insulating substrate extending a pattern that short-circuits with the back surface of the one insulating substrate, a first insulating layer having a back surface as a conductor pattern, and a surface of the first insulating layer A strip conductor formed by extending one end located near the main line with an open end and the other end electrically connected to the wide pattern is spaced along the strip conductor and sandwiched from both sides An outer conductor formed on the surface of the first insulating layer with a pattern in which one end located in the vicinity of the main line is an open end and the other end is electrically connected to the wide pattern, and the outer conductor and the On strip conductor A second insulating layer kicked, formed on a surface of the second insulating layer, and the center conductor forming a short coplanar line than the strip conductor which is provided along the pattern of the strip conductors, along the center conductor A ground pattern formed so as to sandwich the central conductor from both sides via a resistor film and distributedly short-circuited with the strip conductor, and extends away from the ground pattern and distributed along the outer conductor An out-of-surface conductor formed on the surface of the second insulating layer which is short-circuited, and an electrical connection means for electrically connecting the central conductor located on the open end side of the strip conductor and the main line, by bonding with the wide pattern and the back surface of the first insulating layer, formed by short-circuiting the other end of the conductor film by the conductive pattern of the first insulating layer the strip conductor to the ground conductor string Connected in series to the flop-line resonator, the center conductor, the resistor film, the resistor is constituted by the ground pattern adding coplanar line to the main line and the microwave frequency band passing through the main line by connecting An amplitude attenuation region is provided.

The amplitude equalizer according to claim 6 is located in the vicinity of the first insulating substrate having the back surface as a ground conductor, a main line having an input / output end formed on the surface of the first insulating substrate, and the main line. A strip conductor formed on the surface of the first insulating substrate with a pattern having one end as an open end and the other end as a short-circuited end, and an inner peripheral conductor and an outer peripheral conductor along the strip conductor pattern. A coaxial pipe line shorter than the strip conductor filled with a radio wave absorber between the inner peripheral conductor and the outer peripheral conductor, an inner peripheral conductor of the coaxial pipe line located on the open end side of the strip conductor, and the main conductor and an electrical connection means for electrically connecting the line, in series with the strip line resonator formed by short-circuiting the other end of the outer peripheral conductor and the strip conductor and by Ri before Symbol strip conductor to adhere to the ground conductor are connected, Serial inner conductor, the wave absorber, those having a damping area of amplitude microwave frequency band passing through the main line and connected so to the main line of the outer circumferential conductor resistor additional coaxial tube line which is constituted by It is.

An amplitude equalizer according to a seventh aspect includes a first insulating substrate having a back conductor as a ground conductor, a main line having an input / output end formed on a surface of the first insulating substrate, and the first line near the main line. A wide pattern formed on a surface of the first insulating substrate extending a pattern to be short-circuited with a back surface of the insulating substrate; an inner peripheral conductor and an outer peripheral conductor along the wide pattern; A coaxial pipe line shorter than the strip conductor filled with a radio wave absorber between a conductor and the outer conductor, and an outer conductor in which one end covering the coaxial pipe line with an insulator is opened and the other end is short-circuited with the outer conductor And an electrical connection means for electrically connecting the inner peripheral conductor of the coaxial pipe line with the one end side of the outer conductor located on the main line side and the main line, and the outer conductor and the wide pattern. Ri due to be bonded before Kigaihi conductor Which is connected in series to the other end of the outer conductor coaxial waveguide line resonator formed by shorting to the earth conductor, the inner peripheral conductor, said wave absorber, the main resistor additional coaxial tube line constituted by the outer peripheral conductor An amplitude attenuation region is provided in a microwave frequency band that is connected to a line and passes through the main line.

An amplitude equalizer according to an eighth aspect includes a first insulating substrate having a back conductor as a ground conductor, a main line having an input / output end formed on a surface of the first insulating substrate, an inner peripheral conductor, and an outer peripheral conductor. A coaxial pipe line filled with a radio wave absorber between the inner peripheral conductor and the outer peripheral conductor, and an outer sheath whose one end is covered with the coaxial pipe line via an insulator and whose other end is short-circuited with the outer peripheral conductor. A conductor, an electrical connection means for electrically connecting the inner peripheral conductor of the coaxial waveguide line and the main line located on the main line side corresponding to one end side of the outer conductor, and the back surface of the first insulating substrate wherein a conductor base for mounting the outer covering conductor, short circuit the other end of the outer covering conductor and the first insulating substrate and by Ri before Kigaihi conductor to adhere to the outer circumferential conductor to the ground conductor and connected in series to the coaxial waveguide line resonator is formed by the inner conductor, the wave absorption Body, is provided with a damping region of amplitude microwave frequency band passing through the main line and connected so to the main line of the outer circumferential conductor resistor additional coaxial tube line configured in.

According to the amplitude equalizer according to the present invention, the amplitude control of the microwave frequency passing through the main line is performed by connecting the coplanar line with the resistor connected in series to the strip resonator composed of the strip conductor and the main line. By forming a line with a resistor film on the strip conductor of the stripline resonator, the input impedance seen from the main line side becomes infinite at the frequency where the loss is minimized, and the resistor film There is an effect of enabling a lossless characteristic in which no current flows.

  Further, according to the amplitude equalizer according to the present invention, by filling the electromagnetic wave absorber between the inner peripheral conductor and the outer peripheral conductor of the coaxial pipe line, at the frequency at which the loss is minimized, the input viewed from the main line side Impedance is infinite, and lossless characteristics can be maintained even when a coaxial pipe line is used, like a coplanar line with a resistor added.

  Further, according to the amplitude equalizer according to the present invention, the equalizer circuit is configured by using an insulating substrate such as a dielectric or a coaxial tube, so that machining such as cutting is unnecessary, the manufacturing cost can be reduced, and the size can be reduced. This has the advantage of contributing to weight reduction.

Embodiment 1 FIG.
Hereinafter, an amplitude equalizer according to Embodiment 1 of the present invention will be described. FIG. 1 is an external view of an amplitude equalizer according to the first embodiment. 2 is a cross-sectional view of the amplitude equalizer shown in FIG. 1 taken along the line AA. FIG. 3 is a BB cross-sectional view of the amplitude equalizer shown in FIG. 1 to 3, 1 is a first insulating substrate (dielectric substrate) based on a ceramic material or a printed wiring material, and 2 is a conductor film formed entirely on the back surface of the first insulating substrate 1. (Ground conductor) 3 is a main line having an input / output end formed on the surface of the first insulating substrate 1, 4 is an open end with one end orthogonal to the vicinity of the main line 3, and a pattern toward the other end It is a strip conductor (strip line resonator pattern) formed on the surface of the extended first insulating substrate 1.

5 is a second insulating substrate having a back surface placed on the surface of the strip conductor 4 using a ceramic material or a printed wiring material as a base material, and 6 is disposed on the terminal end side of the pattern extending from one end of the strip conductor 4; A via hole 7 connected to the ground conductor 2 is provided along the strip conductor 4, formed on the surface of the second insulating substrate 5, a strip line forming a central conductor forming a coplanar line, and 8 along the strip line 7. A strip-shaped resistor film 9 is formed in a thick film or thin film pattern so as to be in contact with both sides of the strip line 7 from both sides, and a ground 9 is provided on both sides of the strip line 7 via the resistor film 8. Patterns 10 are via holes provided at predetermined intervals along the ground pattern 9, and 11 is a conductor wire such as a gold ribbon or a gold wire that electrically connects the strip line 7 and the main line 3. Configuration was an electrical connection means.

  A circuit composed of the strip line 7, the resistor film 8, the ground pattern 9, and the via hole 10 disposed on the surface of the second insulating substrate 5 is called a resistor film loaded coplanar line 12 and is located near the main line 3. From the open end of the installed strip conductor 4 to the end of the strip conductor 4 short-circuited to the ground conductor 2 by the via hole 6 is collectively referred to as a stripline resonator 13. 1 to 3, the same reference numerals indicate the same or corresponding parts.

Next, the operation will be described. FIG. 4 is a circuit diagram of the amplitude equalizer according to the first embodiment. In FIG. 4, 12 is a resistor film loaded coplanar line shown in the block diagram, 13 is a strip line resonator shown in the block diagram, and the strip line resonator 13 is a distributed constant of single or plural different characteristic impedances. Consists of tracks that connect tracks.

  Since the ground pattern 9 is connected to the ground conductor 2 through the via hole 6 at the end of the strip conductor 4, the strip conductor 4 is regarded as the ground conductor of the strip line resonator 13, and from the main line 3 side to the conductor line 11. The impedance Zt seen from the stripline resonator 13 and the resistor film loaded coplanar line 12 side can be regarded as a series connection of the input impedance Zr of the stripline resonator 13 and the input impedance Zc of the resistor film loaded coplanar line 12. it can. That is, it can be expressed by Zt = Zr + Zc. Therefore, the entire amplitude equalizer circuit can be expressed by an equivalent circuit shown in FIG. 5 in which a circuit of impedance Zt is connected in parallel to the main line 3.

  The stripline resonator 13 resonates at a frequency that has an electrical length (wavelength in the line) that is an odd multiple of a quarter wavelength, such as a quarter wavelength or a quarter wavelength, and the input impedance at the open end at that time. Is infinite, that is, at one point of the open end, it is open and becomes a node of a current standing wave. At this time, a high-frequency current does not flow physically into this branch line. For this reason, no high frequency current flows through the resistor film loaded coplanar line 12 connected in series therewith. Therefore, the main line 3 is in a state similar to a state where nothing is connected in parallel, and the input signal appears as it is at the output terminal without being attenuated.

  At frequencies other than the above-described resonance frequency, the input impedance at the open end of the stripline resonator 13 becomes finite and high-frequency current flows. Therefore, a high-frequency current also flows through the resistor film loaded coplanar line 12 connected in series therewith. Therefore, a resistance corresponding to the real part of the input impedance of the resistor film loaded coplanar line 12 is connected in parallel to the main line 3, and the input signal is attenuated and appears at the output terminal. FIG. 6 shows the amplitude of the amplitude equalizer in the pass band. In an example of the frequency characteristic of the attenuation, the attenuation increases as the distance from the resonance frequencies f1 and f2 increases, and the attenuation is maximized near the center of both resonance frequencies.

  As shown in FIG. 7, the frequency characteristics of the gain of a single traveling wave tube amplifier (TWT) are generally such that the gain is minimal at both ends of the lower limit frequency f1 and the upper limit frequency f2 of the required frequency band, and the gain is greatest near the center frequency. It has the characteristic which becomes. Therefore, when the characteristic impedance of the strip resonator 13 is adjusted so that the Nth-order resonance frequency of the stripline resonator 13 of the amplitude equalizer according to the first embodiment of the present invention is set to f1, and the N + 1-order resonance frequency is set to f2. By connecting the traveling wave tube amplifier and the amplitude equalizer in series, the total gain frequency characteristic can be flattened as shown in FIG. The maximum value of the attenuation amount of the amplitude equalizer can be set by the material constant of the resistor film 8, the pattern width of the strip line 7, and the distance between the strip line 7 and the ground pattern 9.

  As described above, according to the first embodiment of the present invention, the signal attenuation is theoretically eliminated. Therefore, when the gain frequency characteristic of the high power amplifier is flattened or applied as a harmonic suppression filter, a good communication line can be realized. It is possible to achieve low power consumption and high efficiency.

Embodiment 2. FIG.
An amplitude equalizer according to the second embodiment of the present invention will be described with reference to FIGS. FIG. 9 is an external view of an amplitude equalizer according to the second embodiment. 10 is a cross-sectional view taken along the line C-C in the case where a case is added to the amplitude equalizer shown in FIG. FIG. 11 is a cross-sectional view taken along the line DD when a case is added to the amplitude equalizer shown in FIG. 9 as a reference. 9 to 11, reference numeral 14 denotes a plate which is made of any of insulating materials such as a conductor, a radio wave absorber, and a ceramic material, and adjusts the characteristic impedance of the coplanar line 12 by changing the electromagnetic coupling amount of the line. Shaped adjustment block, 15 is a mounting block, 16 is a housing for storing an amplitude equalizer, 17 is a lid that forms a sealed space together with the housing 16, and 18 is stored in the housing 16 through the lid 17. An adjustment screw (screw) for adjusting the height of the adjustment block 14 located above the coplanar track, 19 is a nut for fixing the adjustment screw 18, and 20 is a telescopic spring. 9 to 11, the same reference numerals as those in FIG. 1 denote the same or corresponding parts.

  Next, the operation will be described. In the second embodiment, a casing 16 and a lid 17 are added to the amplitude equalizer shown in the first embodiment, and the casing 16 is a wall except for the input / output portion of the main line 3. It is set as the structure containing the covered frame.

  An adjustment block 14 is arranged near the upper part of the resistor film loaded coplanar line 12, and the distance from the resistor film loaded coplanar line 12 is adjusted by a screw 18. The attachment block 15 connects the adjustment block 14 and the screw 18 and is adhesively fixed to the adjustment block 14. The position of the adjustment block 14 is fixed by the nut 19 and the spring 20. With this configuration, the characteristic impedance of the resistor film loaded coplanar line 12 is changed. That is, by bringing the adjustment block 14 at the top of the resistor film loaded coplanar line 12 closer to the resistor film loaded coplanar line 12, the real part of the input impedance of the resistor film loaded coplanar line 12 is reduced, and the attenuation amount of the amplitude equalizer is As it becomes larger and away, the real part of the amplitude equalizer becomes larger and the attenuation amount of the amplitude equalizer becomes smaller.

  From the above, it is possible to adjust the attenuation amount of the TWT by installing the amplitude equalizer in the input unit or output unit of the TWT.

Embodiment 3 FIG.
An amplitude equalizer according to Embodiment 3 of the present invention will be described with reference to FIG. FIG. 12 is an external view of an amplitude equalizer according to the third embodiment. In the third embodiment, a plurality of stripline resonators 13 and resistor film loaded coplanar lines 12 shown in the first embodiment are arranged along the main line 3. By arranging a plurality, when the attenuation amount in the single stripline resonator 13 and the resistor film loaded coplanar line 12 is insufficient, the attenuation amount can be compensated and the required attenuation amount can be obtained. Further, when reflection is large in a single configuration, by arranging a plurality of reflections, it is possible to cancel each reflection, and the reflection can be reduced as the entire amplitude equalizer, and there is an effect of removing unnecessary ripples in the pass characteristics within the operating frequency band.

Embodiment 4 FIG.
An amplitude equalizer according to the fourth embodiment of the present invention will be described with reference to FIGS. FIG. 13 is an external view of an amplitude equalizer according to the fourth embodiment. 14 is an EE cross-sectional view of the amplitude equalizer shown in FIG. 15 is a cross-sectional view of the amplitude equalizer shown in FIG. 13 taken along the line F-F. 13 to 15, reference numeral 21 denotes a conductor film (ground conductor) formed on the entire back surface of the second insulating substrate 5 by metallization. In FIG. 13, the resistor film-loaded coplanar line 12 is shown in a development view separated from the stripline resonator 13 in order to clearly explain the structure. 13-15, the same code | symbol as FIG. 1 shows the same or equivalent part.

  Next, the operation will be described. A conductor film 21 is provided on the entire back surface of the resistive film loaded coplanar line 12 separately from the strip line resonator 13, that is, the strip conductor pattern 4. As shown in FIGS. 14 and 15, the final shape is that the resistive film loaded coplanar line 12 is disposed on the stripline resonator 13, the conductor film 21 and the stripline resonator 13 are electrically connected, and the conductor wire 11. Thus, the resistor film loaded coplanar line 12 and the main line 3 are connected.

  From the above, when the resistor film loaded coplanar line 12 is separated from the substrate of the main line 3 on the second insulating substrate 5, the input impedance Zc is accurately measured by the resistor film loaded coplanar line 12 alone, and the adhesiveness is reversible. By assembling and fixing as an amplitude equalizer by bonding and fixing with a certain ultraviolet (UV) curable resin, there is an advantage that the performance of the product can be stabilized during the production process.

Embodiment 5 FIG.
An amplitude equalizer according to Embodiment 5 of the present invention will be described with reference to FIGS. FIG. 16 is an external view of an amplitude equalizer according to the fifth embodiment. FIG. 17 is a GG cross-sectional view of the amplitude equalizer shown in FIG. 18 is an HH sectional view of a region including the strip conductor of the amplitude equalizer shown in FIG. 19 is a cross-sectional view taken along the line II of the region including the ground pattern 9 of the amplitude equalizer shown in FIG. 16 to 19, reference numeral 22 denotes a wide pattern formed on the surface of the first insulating substrate 1 with one end disposed in the vicinity of the main line 3 and a wide pattern extending toward the other end, and reference numeral 23 denotes a wide pattern. Via holes arranged on the surface at predetermined intervals over the entire area of the pattern 22, 24 is a first insulating layer, 25 is a conductor pattern placed on the outer layer (back surface) of the first insulating layer 24, 26 is a second insulating layer, 27 Is a surface conductor pattern installed on the outer layer surface of the second insulating layer 26. The surface conductor pattern 27 includes a strip line 27a installed at the center, surface conductors 27b and 27c installed at both ends, and a strip line 27a and a surface conductor. It consists of a grounding pattern 9 located between 27b and 27c.

  The strip line 27 a and the ground pattern 9 are connected by the resistor film 8. Reference numeral 28 denotes an inner layer conductor pattern sandwiched between the first insulating layer 24 and the second insulating layer 26. The inner layer conductor pattern 28 includes an inner layer conductor 28a (strip conductor) disposed at the center and inner layer conductors (outer layers) disposed at both ends. Conductor) 28b, 28c. 16 to 19, the same reference numerals as those in FIG. 1 denote the same or corresponding parts.

  The first insulating layer 24, the conductor pattern 25 installed on the surface of the first insulating layer 24, the second insulating layer 26, the surface conductor pattern 27 installed on the surface of the second insulating layer, the first insulating layer 24 and the second insulating layer A multilayer substrate is formed by the inner layer conductor pattern 28 and the resistor film 8 sandwiched between the layers 26, and a circuit formed by the multilayer substrate is referred to as a multilayer circuit substrate circuit. In FIG. 16, the multilayer substrate is shown in a development view separated from the wide pattern 22 of the first insulating substrate 1 in order to clearly explain the structure.

  Next, the operation will be described. The wide pattern 22 functions as a ground conductor by being electrically connected to the ground conductor 2 through the via hole 23 to the wide pattern 22 installed on the surface of the first insulating substrate 1. Therefore, the conductor pattern 25 installed on the outer layer (surface) of the first insulating layer 24 in contact with the wide pattern 22 also serves as a ground conductor. The inner layer conductor 28a installed at the center of the inner layer conductor pattern 28 serves as a stripline resonator, and the inner layer conductors (outer conductors) 28b and 28c installed at both end portions serve as side conductors.

  The substrate is multilayered by the strip line 27a and the surface conductors 27b and 27c installed at the center of the surface of the second insulating layer 26, and the resistor film loaded coplanar line 12 is formed by the resistor film 8 and the ground pattern 9 as in the first embodiment. To do.

  Via hole 6 that electrically connects conductor pattern 25 with inner layer conductors 28b and 28c and surface conductors 27b and 27c, and the end of strip line resonator (inner layer conductor 28a) on the side away from main line 3 and the conductor pattern 25, and a via hole 6 for connecting the strip line resonator (inner layer conductor) 28a and the ground pattern 9 to each other by providing an interlayer connection between the strip line resonator (inner layer conductor) 28a and the resistor. A multilayer substrate circuit (multilayer circuit substrate) 30 in which the film loaded coplanar lines 12 are integrated is formed.

  17, 18, and 19 as final shapes, the conductor pattern 25 of the multilayer circuit board 30 is arranged so as to be electrically connected to the wide pattern 22, and the strip line 27 a and the main line 3 are connected to the conductor line 11. When connected in the same manner as in the first embodiment, it operates as an amplitude equalizer.

  From the above, when this multilayer substrate circuit 30 is separated from the substrate of the main line 3, the multilayer substrate circuit 30 alone measures the series input impedance Zt (= Zc + Zr) of the stripline resonator 28a and the resistor film loaded coplanar line 12 comprehensively. In addition, there is an advantage that assembly can be performed after the frequency characteristic of the attenuation amount is accurately confirmed. As in the fourth embodiment, the performance of the product can be stabilized during the production process.

Embodiment 6 FIG.
An amplitude equalizer according to the sixth embodiment of the present invention will be described with reference to FIG. FIG. 20 is an external view of an amplitude equalizer according to the sixth embodiment. In FIG. 20, 31 is an inner peripheral conductor of a coaxial tube, 32 is an outer peripheral conductor of the coaxial tube, 33 is a radio wave absorber as a resistor containing carbon material or metal powder, and 34 is a resistor-loaded coaxial tube line. The resistor-loaded coaxial waveguide 34 has a stripline structure in which the main line 3 and the stripline resonator 4 use the first insulating substrate 1 as in the first embodiment. The resistor film loaded coplanar line 12 is replaced with a resistor loaded coaxial tube line 34 including an inner conductor 31, an outer conductor 32, and a radio wave absorber 33. Similarly to the fourth embodiment, if this resistor-loaded coaxial tube line 34 is separated from the substrate of the main line 3, the resistor-loaded coaxial tube line 34 can be assembled after the input impedance Zc is accurately measured by itself. The performance can be stabilized. In the figure, the same reference numerals as those in FIG. 1 denote the same or corresponding parts.

Embodiment 7 FIG.
An amplitude equalizer according to Embodiment 7 of the present invention will be described with reference to FIGS. FIG. 21 is an external view of an amplitude equalizer according to the seventh embodiment. 22 is a JJ cross-sectional view of the amplitude equalizer shown in FIG. 21 to 22, 35 is a dielectric, 36 is an outer conductor of a coaxial tube, and 37 is a resistor-loaded double coaxial tube line. 21 to 22, the same reference numerals as those in FIG. 1 denote the same or corresponding parts.

The surface of the first insulating substrate 1 forms a wide pattern 22 that is electrically connected to the ground conductor 2 through a via hole 23. The multilayer substrate circuit 30 shown in the fifth embodiment is replaced with a resistor-loaded double coaxial pipe line 37 including an inner peripheral conductor 31, an outer peripheral conductor 32, a radio wave absorber 33, a dielectric 35, and an outer conductor 36. The dielectric 35 portion may be a cavity. When viewed from the outer conductor 36, the outer conductor 32 has the function of an inner conductor of a coaxial line using the dielectric 35 as a medium. The end of the outer conductor 32 on the side away from the main line 3 is short-circuited to the outer conductor 36 and the outer conductor 32. The outer conductor 36 and the dielectric 35 form a short-circuited resonator. As the final shape, as shown in FIG. 22, the outer conductor 36 of the resistor-loaded double coaxial pipe line 37 is arranged so as to be electrically connected to the wide pattern 22 that is the ground conductor, and the inner conductor 31, the main line 3, Are connected by the conductor wire 11, it operates as an amplitude equalizer as in the fifth embodiment.

  By separating the resistor-loaded double coaxial tube line 37 from the substrate of the main line 3, the resistor-loaded double coaxial tube line 37 alone can comprehensively measure the series input impedance Zt (= Zc + Zr), and the attenuation frequency Compared to the sixth embodiment, it is possible to further stabilize the performance at the time of mass production because there is a feature that can be assembled after confirming the characteristics accurately.

Embodiment 8 FIG.
An amplitude equalizer according to the eighth embodiment of the present invention will be described with reference to FIG. FIG. 23 is an external view of an amplitude equalizer according to the eighth embodiment. In FIG. 23, reference numeral 38 denotes a conductor base such as a metal housing, which also forms a resistor-loaded double coaxial pipe line 37. In the figure, the same reference numerals as those in FIG. 1 denote the same or corresponding parts.

  By disposing the resistor loaded double coaxial pipe line 37 on the conductor base 38 of the amplitude equalizer, there is an effect that the via hole processing can be reduced by eliminating the strip conductor 4 and the wide pattern 22.

1 is an external view of an amplitude equalizer according to Embodiment 1 of the present invention. It is AA sectional drawing of the amplitude equalizer shown in FIG. 1 which concerns on Embodiment 1 of this invention. It is BB sectional drawing of the amplitude equalizer shown in FIG. 1 which concerns on Embodiment 1 of this invention. 1 is a circuit diagram of an amplitude equalizer according to Embodiment 1 of the present invention. 3 is an equivalent circuit of an amplitude equalizer according to Embodiment 1 of the present invention. It is the attenuation frequency characteristic of the amplitude equalizer which concerns on Embodiment 1 of this invention. It is a figure explaining the gain frequency characteristic of a single traveling wave tube amplifier. It is a figure explaining a total gain frequency characteristic. It is an external view of the amplitude equalizer which concerns on Embodiment 2 of this invention. FIG. 10 is a CC cross-sectional view of the amplitude equalizer shown in FIG. 9 according to Embodiment 2 of the present invention. FIG. 10 is a DD cross-sectional view of the amplitude equalizer shown in FIG. 9 according to Embodiment 2 of the present invention. It is an external view of the amplitude equalizer which concerns on Embodiment 3 of this invention. It is an external view of the amplitude equalizer which concerns on Embodiment 4 of this invention. It is EE sectional drawing of the amplitude equalizer shown in FIG. 13 which concerns on Embodiment 4 of this invention. It is FF sectional drawing of the amplitude equalizer shown in FIG. 13 which concerns on Embodiment 4 of this invention. It is an external view of the amplitude equalizer which concerns on Embodiment 5 of this invention. It is GG sectional drawing of the amplitude equalizer shown in FIG. 16 which concerns on Embodiment 5 of this invention. It is HH sectional drawing containing the stripline of the amplitude equalizer shown in FIG. 16 which concerns on Embodiment 5 of this invention. It is II sectional drawing containing the grounding pattern of the amplitude equalizer shown in FIG. 16 which concerns on Embodiment 5 of this invention. It is an external view of the amplitude equalizer which concerns on Embodiment 6 of this invention. It is an external view of the amplitude equalizer which concerns on Embodiment 7 of this invention. It is JJ sectional drawing of the amplitude equalizer shown in FIG. 21 which concerns on Embodiment 7 of this invention. It is an external view of the amplitude equalizer which concerns on Embodiment 8 of this invention.

Explanation of symbols

1..First insulating substrate 2..Conductor film (ground conductor) 3..Main line 4..Strip conductor (strip line resonator pattern)
5 .. Second insulating substrate 6 .. Via hole 7 .. Strip line 8 .. Resistor film 9 .. Ground pattern 10 .. Via hole 11 .. Electrical connection means (conductor wire)
12. · Resistor loaded coplanar line 13 ·· Strip line resonator 14 ·· Adjustment block 15 ·· Mounting block 16 ·· Case 17 ·· Lid 18 ·· Adjustment screw 19 ·· Nut 20 ·· Extension spring ( Spring)
21 .. Conductor film (ground conductor) 22. Wide pattern (ground conductor) 23. Via hole 24. First insulation layer 25. Conductor pattern (ground conductor) 26. Second insulation layer 27. Surface conductor Pattern 27a ・ ・ Strip line 27b ・ ・ Surface conductor (Ground conductor)
27c ·· Surface conductor (ground conductor) 28 · · Inner layer conductor pattern 28a · · Inner layer conductor (strip conductor) 28b · · Inner layer outer conductor 28c · · Inner layer outer conductor 30 · · Multilayer board circuit (multilayer circuit board)
31 .. Inner conductor 32 .. Outer conductor 33 .. Wave absorber (resistor) 34 .. Resistor loaded coaxial tube 35 .. Dielectric 36 .. Outer conductor 37 .. Resistor loaded double coaxial tube Line 38 ... Conductor base

Claims (8)

A first insulating substrate having a back conductor as a ground conductor, a main line having an input / output end formed on the surface of the first insulating substrate, one end located in the vicinity of the main line as an open end, and the other end A strip conductor formed on the surface of the first insulative substrate extending a pattern as a short-circuit end, a second insulative substrate placed on the surface of the strip conductor, and along the pattern of the strip conductor a central conductor to form the second shorter coplanar line than the strip conductor formed on the surface of the insulating substrate, wherein the central conductor is patterned so as to sandwich the both sides through the resistive film along the center conductor includes a ground pattern and the strip conductors topographically are shorted, and electrical connection means for electrically connecting said central conductor located in the open end of the strip conductor and the main line, the strip Connected in series to the other end of the body to the strip line resonator formed by shorting to the earth conductor, the center conductor, the resistor film, and a resistor additional coplanar line constituted by the ground pattern is connected to the main line An amplitude equalizer having an amplitude attenuation region in a microwave frequency band passing through the main line. A first insulating substrate having a back conductor as a ground conductor, a main line having an input / output end formed on the surface of the first insulating substrate, one end located in the vicinity of the main line as an open end, and the other end A strip conductor formed on the surface of the first insulative substrate extending a pattern as a short-circuit end, a second insulative substrate placed on the surface of the strip conductor, and along the pattern of the strip conductor a central conductor to form the second shorter coplanar line than the strip conductor formed on the surface of the insulating substrate, wherein the central conductor is patterned so as to sandwich the both sides through the resistive film along the center conductor wherein the strip conductors and the distribution grounded pattern is short-circuited, a plate-shaped adjustment blocks placed apart from the second insulating substrate, and the central conductor located in the open end of said strip conductor And an electrical connection means for electrically connecting the line, is connected in series with the strip line resonator formed by short-circuiting the other end of the strip conductor to the ground conductor, the center conductor, the resistor film, with the ground pattern The constructed resistor-added coplanar line is connected to the main line to provide an amplitude attenuation region in the microwave frequency band passing through the main line and to reduce the distance between the second insulating substrate and the adjustment block. An amplitude equalizer that increases the amount of attenuation and decreases the amount of attenuation by increasing the interval. A plurality of strip line resonators formed by short-circuiting the other end of the strip conductor to a ground conductor , and a resistor-added coplanar line composed of the center conductor , the resistor film, and the ground pattern along the main line. The amplitude equalizer according to claim 1 provided. A first insulating substrate having a back conductor as a ground conductor, a main line having an input / output end formed on the surface of the first insulating substrate, one end located in the vicinity of the main line as an open end, and the other end a strip conductor formed on said extended a pattern and the short-circuited end first insulating surface of a substrate, and a second insulating substrate backside conductive pattern, the second insulation along the pattern of the strip conductors a central conductor which forms the shorter coplanar line than the strip conductor formed on the surface of sexual substrate, this along the center conductor through the resistor film to form the pattern so as to sandwich the central conductor on both sides the strip conductor distribution a ground pattern that is shorted, the provided with electrical connection means for electrically connecting said central conductor and said main line located on the open end of the strip conductor, and the rear surface of the second insulating substrate Serial connected in series to the strip line resonator formed by short-circuiting the other end of the conductor film by the conductive pattern of the second insulating substrate wherein the strip conductor to the ground conductor by adhering the strip conductor, said center conductor, An amplitude equalizer in which a resistor-added coplanar line constituted by the resistor film and the ground pattern is connected to the main line and an amplitude attenuation region is provided in a microwave frequency band passing through the main line. A first insulating substrate having a back conductor as a ground conductor, a main line having an input / output end formed on the surface of the first insulating substrate, and a short circuit with the back surface of the first insulating substrate in the vicinity of the main line A wide pattern formed on the surface of the first insulating substrate with the pattern extended, a first insulating layer having a back surface as a conductor pattern, and formed on the surface of the first insulating layer, in the vicinity of the main line One end located at the open end, and the other end is located near the main line so as to be sandwiched from both sides of the strip conductor, and a strip conductor extending the pattern electrically connected to the wide pattern. An outer conductor formed on the surface of the first insulating layer having a pattern in which one end is an open end and the other end is electrically connected to the wide pattern, and a second provided on the outer conductor and the strip conductor. The insulating layer and this second It is formed on the surface of the edge layer, and a central conductor to form the strip conductor shorter coplanar line than the strip conductor which is provided along a pattern of, the center conductor from both sides through the resistive film along the center conductor A ground pattern formed in a sandwiched manner and distributed short-circuited with the strip conductor, and a surface of the second insulating layer extending away from the ground pattern and distributed short-circuited along the outer conductor And an electrical connection means for electrically connecting the central conductor located on the open end side of the strip conductor and the main line, the back surface of the first insulating layer and the wide pattern. by adhering, connected in series with the strip line resonator formed by short-circuiting the other end of the conductor film by the conductive pattern of the first insulating layer the strip conductors to the earth conductor, Serial center conductor, the resistor film, the amplitude equalizer which is provided an amplitude attenuation region in the microwave frequency band passing through the main line by connecting to the main line resistor additional coplanar line which is constituted by the ground pattern. A first insulating substrate having a back conductor as a ground conductor, a main line having an input / output end formed on the surface of the first insulating substrate, one end located in the vicinity of the main line as an open end, and the other end A strip conductor formed on the surface of the first insulating substrate extending a pattern as a short-circuit end, and an inner peripheral conductor and an outer peripheral conductor along the strip conductor pattern, the inner peripheral conductor and the A coaxial pipe line shorter than the strip conductor filled with a radio wave absorber between outer peripheral conductors, and an electrical connection means for electrically connecting the inner peripheral conductor of the coaxial pipe line located on the open end side of the strip conductor and the main line with the door, the outer peripheral conductor and the connected in series to the other end of the strip conductor and by Ri before Symbol strip conductor to adhere to the strip line resonator formed by shorting to the earth conductor, the inner peripheral conductor, said Front wave absorber Amplitude equalizer having a damping area of amplitude microwave frequency band passing through the resistor additional coaxial tube line which is constituted by an outer peripheral conductor the main line and connected so to the main line. A first insulating substrate having a back conductor as a ground conductor, a main line having an input / output end formed on the surface of the first insulating substrate, and a short circuit with the back surface of the first insulating substrate in the vicinity of the main line A wide pattern formed on the surface of the first insulating substrate extended from the pattern, and an inner peripheral conductor and an outer peripheral conductor along the wide pattern, and radio wave absorption between the inner peripheral conductor and the outer peripheral conductor A coaxial pipe line shorter than the strip conductor filled with a material, an outer conductor in which one end covering the coaxial pipe line via an insulator is opened and the other end is short-circuited with the outer peripheral conductor, and one end side of the outer conductor and an electrical connection means for electrically connecting the inner peripheral conductor and the main line of was positioned in the main line side the coaxial pipe line, before Ri by the adhering and the wide pattern and the outer covering conductor Kigaihi short and the other end of the conductor and the outer circumferential conductor to the ground conductor Connected in series to the coaxial waveguide line resonator is formed by the inner conductor, the wave absorber, said resistor additional coaxial tube line which is constituted by an outer peripheral conductor is connected to the main line passing through the main line An amplitude equalizer with an amplitude attenuation region in the microwave frequency band. A first insulating substrate having a back surface as a ground conductor; a main line having an input / output end formed on the surface of the first insulating substrate; an inner peripheral conductor; and an outer peripheral conductor; A coaxial pipe line filled with a radio wave absorber between outer peripheral conductors, an outer conductor in which one end covering the coaxial pipe line via an insulator is opened and the other end is short-circuited with the outer peripheral conductor, and one end side of the outer conductor An electrical connection means for electrically connecting the inner peripheral conductor of the coaxial pipe line and the main line, which are positioned on the main line side corresponding to the main line, and a back surface of the first insulating substrate and the outer conductor. a conductor base, the coaxial waveguide line resonator formed by short-circuiting the other end of the outer covering conductor and the first insulating substrate and by Ri before Kigaihi conductor to adhere to the outer circumferential conductor to the ground conductor are connected in series, the inner conductor, the wave absorber was constituted by the outer peripheral conductor resistance Amplitude equalizer having a damping region of the amplitude in the microwave frequency band to pass through the additional coaxial tube line to the main line and connected so to the main line.

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