JP4638394B2 - Method for manufacturing adiabatic millimeter wave or submillimeter wave waveguide - Google Patents

Description

The present invention relates to a method of manufacturing an adiabatic millimeter wave or submillimeter wave waveguide.

A receiver system for receiving weak signals in the millimeter wave and submillimeter wave bands from celestial bodies and the like includes a receiver that transmits the signal, converts it to an amplifiable intermediate frequency, and outputs it. Such a receiver Then, it is preferable to use a low-noise superconducting element.
And in the receiver using a superconducting element, it is necessary to cool a superconducting element to a very low sound, and it is comprised including the refrigerator.
On the other hand, weak signals in the millimeter wave and submillimeter wave bands are generally guided from the outside to the inside of the receiving apparatus by a waveguide.
Therefore, even if the superconducting element is cooled to a very low frequency by the refrigerator, the temperature (heat) of the atmosphere outside the receiving device is guided to the receiving device through the waveguide, and reception using the waveguide is performed. The apparatus is disadvantageous in cooling the superconducting element to a very low sound.
In a receiver system used in a cold region, warm indoor temperature (heat) is guided to the outside through the waveguide, melting snow and ice around the outer end of the waveguide, and the waveguide There is a disadvantage that it is difficult to receive by freezing it on the outer edge.
In order to eliminate such problems, conventionally, a thin film that defines a waveguide is provided on the inner surface of a tubular body made of synthetic resin or fiber reinforced plastic, and the waveguide is provided with heat insulation properties. (For example, Patent Document 1 and Patent Document 2).
JP 59-226502 JP 7-326910 A

However, in such a conventional waveguide, a thin film is formed by plating or vapor deposition on the inner surface of a tube made of synthetic resin or fiber reinforced plastic. When the thickness is small, the thin film easily adheres to the inner surface of the tube and can be manufactured. However, if the waveguide has a small cross-sectional area and the length of the waveguide is increased, the thin film is formed on the inner surface of the tube. Are difficult to adhere and difficult to manufacture.
The present invention has been devised to solve such problems, and the object of the present invention is to provide a heat insulation that can be easily manufactured even when the waveguide has a small cross-sectional area and a long waveguide length. An object of the present invention is to provide a method for manufacturing a conductive millimeter wave or submillimeter wave waveguide.

In order to achieve the above object, a method for manufacturing a heat-insulating millimeter-wave or submillimeter-wave waveguide according to the present invention is provided with a bar having the same cross-sectional outline as a waveguide to be formed of a metal material. A thin film body made of a thin film having a thickness of 2 to 3 μm covering the outer surface is formed on the outer surface of the bar member by using a metal material different from the metal material and having a high waveguiding efficiency, thereby forming the thin film body A metal cylinder having a thickness of 50 to 150 μm covering the outer surface is formed on the outer surface of the thin film body with a metal material having higher strength and lower thermal conductivity than the metal material, and the metal cylinder body A metal flange for connecting a waveguide is joined to the longitudinal end of the metal tube, and the outer surface of the metal cylinder is in close contact with the outer surface to cover the outer surface, and the shape of the thin film body and the metal cylinder Metal material which has sufficient strength to hold the shape of the thin film and constitutes the thin film body Forming a synthetic resin cylindrical body made of a synthetic resin having a lower thermal conductivity and integrated with each other, the bar, the thin film body, the metal cylindrical body, the metal flange, and the synthetic resin cylindrical body The rod is dissolved in a drug to obtain a waveguide comprising the thin film body, the metal cylinder, the metal flange, and the synthetic resin cylinder.
In addition, the present invention provides a rod material having a cross-sectional contour that is the same shape as the cross-sectional contour of a waveguide to be formed of a metal material, and is made of a metal material that is different from the metal material and has high waveguide efficiency. A metal material having a strength higher than that of the metal material constituting the thin film body and having a low thermal conductivity is formed on the outer surface of the bar material by forming a thin film body made of a thin film having a thickness of 2 to 3 μm covering the outer surface. To form a metal cylinder having a thickness of 150 to 500 μm having sufficient rigidity to cover the outer surface and maintain the shape of the thin film body on the outer surface of the thin film body, and to end the longitudinal direction of the metal cylinder body A metal flange for connecting a waveguide is joined to the portion, and the outer surface of the metal cylinder is in close contact with the outer surface to cover the outer surface and has a lower thermal conductivity than the metal material constituting the thin film body A synthetic resin cylinder made of resin is formed and integrated with each other The bar, the thin film, the metal cylinder, the metal flange, and the synthetic resin cylinder are immersed in a chemical to dissolve the bar, and the thin film, the metal cylinder, and the metal A waveguide comprising a flange and the synthetic resin cylinder is obtained.

According to the method for manufacturing a heat-insulating millimeter-wave or sub-millimeter-wave waveguide of the present invention, first, a bar material having the same cross-sectional contour as the cross-sectional contour of the waveguide to be formed of a metal material is prepared, A thin film is obtained by forming a thin film on the outer surface of the bar by plating or vapor deposition.
Moreover, since the thin film body is formed on the outer surface of the bar, and the metal cylinder, the metal flange, and the synthetic resin cylinder are formed on the outer surface of the thin film body, the bar is located inside the thin film body. Therefore, a metal cylinder and a synthetic resin cylinder can be formed by firmly and firmly adhering to the outer surface of the thin film body without deforming the thin film body . A flange and a synthetic resin cylinder are easily obtained.
Thereafter, by dissolving the rod, a metal cylinder having a thin film body inside, a metal flange, and a synthetic resin cylinder, that is, an adiabatic millimeter wave or submillimeter wave waveguide can be easily obtained. .
According to the first aspect of the present invention, the thin film body is reinforced by the metal cylinder, the shape of the thin film body and the shape of the metal cylinder are maintained by the synthetic resin cylinder, and the metal cylinder has a metal flange . A heat-insulating millimeter-wave or submillimeter-wave waveguide with improved heat insulation is obtained by the tubular body and the synthetic resin tubular body. According to the invention of claim 2, the thin-film body is reinforced by the metallic tubular body. The shape of the thin film body is maintained, and a heat insulating millimeter wave or submillimeter wave waveguide having a metal flange and having improved heat insulating properties by a metal cylinder and a synthetic resin cylinder is obtained.
Therefore, even if the cross-sectional area of the bar is small and the length is long, the thin film is formed on the outer surface rather than the inner surface of the bar, so that the thin film can be easily formed and the thin film body constituting the waveguide can be easily obtained. .
Therefore, it is possible to easily and reliably obtain a millimeter wave or submillimeter wave waveguide having heat insulation and having a small cross-sectional area of the waveguide and a long waveguide length.

The method of the present invention will be described below with reference to the accompanying drawings.
FIG. 1A is a sectional front view of a heat insulating waveguide manufactured by the method of the present invention, and FIG.
The heat insulating waveguide 10 ( heat insulating millimeter wave or submillimeter wave waveguide ) includes a synthetic resin cylinder 20, a metal cylinder 30 provided on the inner surface of the synthetic resin cylinder 20, and a metal cylinder. 30 and a thin film body 40 provided on the inner surface of 30.

The thin film body 40 is made of a metal thin film 4002 having a high waveguiding efficiency, and a waveguide 4004 having a rectangular cross section is formed on the inside thereof. Accordingly, the thin film body 40 has a cylindrical shape with a rectangular cross section.
Examples of the metal material having a high waveguiding efficiency constituting the thin film body 40 include gold, silver, and copper.
The thinner the thin film 4002, the more advantageous in suppressing heat conduction in the longitudinal direction of the waveguide. However, from the viewpoint of reliably mass-producing a thin film body having transmission characteristics and a certain quality, the thickness of the thin film 4002 Is preferably 2 to 3 μm.

The metal cylinder 30 is formed of a metal material having higher strength than the metal material constituting the thin film body 40 and having a lower thermal conductivity than the metal material constituting the thin film body 40, and as such a metal material For example, nickel is mentioned.
The metallic cylinder 30 is in close contact with and covers the outer surface of the thin film body 40, and has a rectangular cross section corresponding to the shape of the thin film body 40.
The metal cylinder 30 reinforces the thin film body 40, is integrated with the thin film body 40 to increase the rigidity of the thin film body 40, and also functions as a heat insulating material for the waveguide 4004.
In this case, the thickness of the metal cylinder 30 is about 50 to 150 μm although it depends on the cross-sectional area of the waveguide 4004 and the like.

The synthetic resin cylinder 20 is formed of a synthetic resin material having a thermal conductivity smaller than that of the metal material constituting the thin film body 40. In this embodiment, the synthetic resin cylinder 20 is more thermally conductive than the metal material constituting the metal cylinder 30. It is made of a synthetic resin material with a low rate, and as such a synthetic resin material, various conventionally known synthetic resin materials can be used, and fiber reinforced plastics that are a combination of glass fiber or carbon fiber and a synthetic resin material Etc.
The synthetic resin cylinder 20 has sufficient strength to be in close contact with the outer surface of the metal cylinder 30 to cover the outer surface and maintain the shape of the thin film body 40 and the metal cylinder 30, and therefore the synthetic resin. The cylindrical body 20 functions as a heat insulating material for the waveguide 4004 and functions as a reinforcing material for the thin film body 40 and the metallic cylindrical body 30 (a reinforcing material for the waveguide 4004).
The cross section of the synthetic resin cylinder 20 is a rectangular cylinder corresponding to the shape of the thin film body 40 and the metal cylinder 30 because the thin film body 40 and the metal cylinder 30 have a rectangular frame shape. Yes.
Note that the cross-sectional shape of the waveguide 4004 may be, for example, a circle or the like, and is not limited to a rectangle. The waveguide 4004 may extend linearly or may extend curvedly. The shapes of the metal cylinder 30 and the synthetic resin cylinder 20 are determined according to the shape of the waveguide 4004.

Next, a method for manufacturing the heat insulating waveguide 10 will be described with reference to FIGS.
First, as shown in FIG. 2A, a bar member 50 having a cross-sectional outline that is the same shape as the cross-sectional outline of a waveguide 4004 to be formed of a metal material is provided.
The bar 50 may be hollow or solid.
As will be described later, the metal material constituting the bar 50 is the bar 50 when the integrated bar 50, thin film body 40, metal cylinder 30, and synthetic resin cylinder 20 are immersed in the drug. Since only the metal is dissolved, a metal different from the metal constituting the thin film body 40 and the metal cylinder 30 is used. For example, when the thin film body 40 is formed of gold, silver, or copper, aluminum is used as the bar 50, and when the thin film body 40 is formed of gold, brass is used as the bar 50. It is done. Note that nickel can be used for the metal cylinder 30 in any case.

  Next, as shown in FIG. 2 (B), a metal material having a high wave guide efficiency made of a material different from the metal material constituting the bar 50 is attached to the outer surface of the bar 50 by plating or vapor deposition. A thin film body 40 made of a thin film 4002 covering the outer surface of the bar 50 is formed.

  Next, as shown in FIG. 2C, the outer surface of the thin film body 40 has higher strength than the metal material constituting the thin film body 40 and has a higher thermal conductivity than the metal material constituting the thin film body 40. A small metal material is attached to the outer surface of the thin film body 40 by plating or vapor deposition to form the metal cylinder 30 that covers the outer surface of the thin film body 40.

Next, as shown in FIG. 2 (D), a plastic that is a material having a lower thermal conductivity than the metal material constituting the thin film body 40 is closely attached to the outer surface of the metal cylinder 30, and in this embodiment, A plastic material having a lower thermal conductivity than that of the metal material constituting the metal cylinder 30 is in close contact, and the outer surface of the metal cylinder 30 is covered to hold the shapes of the thin film body 40 and the metal cylinder 30. A synthetic resin cylinder 20 having strength is formed.
When fiber reinforced plastic is used as the plastic, a reinforcing fiber such as glass fiber or carbon fiber is wound around the outer surface of the metal cylinder 30 and laminated, and a plastic in a fluid state is applied and hardened thereon, or A reinforced fiber such as glass fiber or carbon fiber impregnated with plastic in a fluid state is wound and laminated to cure the plastic.
Next, the bar 50, the thin film body 40, the metal cylinder 30, and the synthetic resin cylinder 20 integrated with each other are immersed in a drug to dissolve the bar 50, and the thin film body shown in FIG. The heat insulating waveguide 10 is obtained which is composed of 40, the metal cylinder 30 and the synthetic resin cylinder 20 and in which the waveguide 4004 is formed inside the thin film body 40.

In the heat insulating waveguide 10 obtained by such a manufacturing method, the metal material part constituting the waveguide 4004 is a thin film body 40 made of an extremely thin thin film 4002, and therefore, the longitudinal direction of the heat insulating waveguide 10 is In this case, the heat conduction through the thin film body 40 can be kept extremely small.
Furthermore, the outer surface of the thin film body 40 is covered with the metal cylinder body 30 and the synthetic resin cylinder body 20 made of a material having a lower thermal conductivity than the metal material constituting the waveguide 4004, and therefore, the heat insulating waveguide. Of course, the heat conduction through the metal cylinder 30 and the synthetic resin cylinder 20 in the longitudinal direction of the tube 10 is extremely small, and it is advantageous to further reduce the heat conduction through the thin film body 40.
In addition, since the thin film body 40 is formed of an extremely thin film 4002, it is difficult to maintain the shape of the waveguide 4004 with only the thin film body 40, but the thin film body 40 is formed by the metal cylinder 30 that is in close contact with the outer surface of the thin film body 40. Since the shape of the waveguide 4004 is maintained by the synthetic resin cylinder 20 that is reinforced and in close contact with the outer surface of the metal cylinder 30, transmission in the waveguide 4004 is reliably performed.
Therefore, it is extremely advantageous when a weak signal in the millimeter wave or submillimeter wave band from a celestial body or the like is guided to the receiving device by the heat insulating waveguide 10.

Next, functions and effects will be described.
In the method for manufacturing a heat insulating waveguide according to the present invention, a bar 50 having the same cross-sectional outline as the cross-sectional outline of the waveguide 4004 to be formed is prepared, and plating or vapor deposition is performed on the outer surface of the bar 50. Thus, the thin film 4002 was formed, and the thin film body 40 was obtained.
Therefore, even if the cross-sectional area of the waveguide 4004 is small and the length of the waveguide 4004 is large to be formed, that is, even if the cross-sectional area of the bar 50 is small and the length is long, it is not on the inner surface of the bar 50 but on the outer surface. Since the thin film 4002 is formed, the thin film 4002 can be easily and reliably formed, and the thin film body 40 can be easily obtained.
In addition, when the thin film body 40 is a single body, the thin film 4002 constituting the thin film body 40 is extremely thin, and thus other materials are adhered to the outer surface of the thin film body 20 without deforming the shape of the thin film body 40 (waveguide 4004). However, in this embodiment, the thin film body 40 is formed on the outer surface of the bar 50, and the metal cylinder body 30 and the synthetic resin cylinder body 20 are formed on the thin film body 40 in this embodiment. Since it is formed, the rod 50 that is in close contact with the inside of the thin film body 40 is located, and without being deformed, the metal cylinder 30 that securely adheres to the outer surface of the thin film body 40 and covers the outer surface. The synthetic resin cylinder 20 can be obtained easily and reliably.

In this case, when fiber reinforced plastic is used, since the rod 50 is located inside the thin film body 40, a reinforcing fiber such as glass fiber or carbon fiber is tightly wound around the metal cylinder 30 and laminated. Therefore, the synthetic resin cylinder 20 that reliably adheres to the outer surface of the metal cylinder 30 and is integrated with the thin film body 40 and the metal cylinder 30 and maintains the shape of the thin film body 40 can be easily and reliably obtained. .
The synthetic resin cylinder 20 can be formed by molding a rod 50 in which the thin film body 40 and the metal cylinder 30 are formed in a mold and pouring plastic into the mold. If the synthetic resin cylindrical body 20 is obtained using the above-described fiber reinforced plastic, it is advantageous to reduce the cost because a mold is unnecessary.
Then, by finally dissolving the rod member 50, the heat insulating waveguide 10 composed of the thin film body 40, the metal cylinder body 30, and the synthetic resin cylinder body 20 can be easily obtained. A waveguide having a waveguide 4004 with a small cross-sectional area and a large length can be obtained easily and reliably.
In this case, if a hollow member such as a tube having a rectangular cross section (or a tube having a circular cross section when the waveguide has a circular cross section) is used as the rod 50, a solid rod is used. It can be dissolved more easily than 50, so the time required for dissolution can be shortened, and even when the cross-section of the waveguide to be formed is very small, it can be dissolved more reliably, which is advantageous for increasing the production efficiency. It becomes.

Next, a second embodiment will be described.
3A is a front view of the flange portion of the heat insulating waveguide, and FIG. 3B is a cross-sectional view of the flange portion of the heat insulating waveguide.
In the second embodiment, a flange 60 is added to the heat insulating waveguide 10 of the first embodiment.
That is, the heat-insulating waveguide 10 of the second embodiment is composed of the synthetic resin cylinder 20, the metal cylinder 30, and the thin film body 40, as in the first embodiment. The flange 60 is integrally formed with the metal cylinder 30 at the longitudinal ends of the synthetic resin cylinder 20, the metal cylinder 30, and the thin film body 40.
The flange 60 is provided at the end of the heat insulating waveguide 10 so as to extend on a plane orthogonal to the extending direction of the heat insulating waveguide 10.

The heat insulating waveguide 10 having such a flange 60 is manufactured as follows.
First, the flange 60 is formed in advance.
As shown in a front view in FIG. 4A and a cross-sectional view in FIG. 4B, the flange 60 is formed through a disc-shaped main body 6002 and a central portion of the main body 6002 so that the metal cylinder 30 is inserted. And a plurality of bolt insertion holes 6006 formed at equal intervals in the circumferential direction on the outer peripheral portion of the main body 6002.
After the metal cylinder 30 is formed and before the synthetic resin cylinder 20 is formed, the end of the metal cylinder 30 is inserted into the square hole 6004 of the flange 60, and the flange is formed by soldering or brazing. It is manufactured by joining 60 to the metal cylinder 30. At this time, the flange 60 is not directly joined to the thin film body 40 but is joined to the metal cylinder 30, and the metal cylinder 30 reinforces the thin film body 40 and is stronger than the thin film body 40. For this reason, problems such as deformation of the thin film body 40 due to the influence of heat are prevented.
In addition, at the time of formation of the synthetic resin cylindrical body 20, the back surface and the outer peripheral surface of the flange 60, that is, the portions other than the mating surface of the flange 60 are arbitrarily covered with the synthetic resin.
Further, the metal material constituting the flange 60 is a metal material having higher strength than the metal material constituting the thin film body 40 and having a lower thermal conductivity than the metal material constituting the thin film body 40. The same metal material that constitutes the metal cylinder 30 can be used. For example, nickel is used.
In the second embodiment, even though the heat insulating waveguide 10 has the waveguide 4004 made of an extremely thin thin film 4002, they can be connected by the flange 60 and used.

In the first and second embodiments, the synthetic resin cylinder 20 has sufficient strength to cover the outer surface of the metal cylinder 30 and maintain the shapes of the thin film body 40 and the metal cylinder 30. However, the metal cylinder 30 may be formed so as to have sufficient rigidity to maintain the shape of the thin film body 40.
In this case, the thickness of the metal cylinder 30 is about 150 to 500 μm although it depends on the cross-sectional area of the waveguide 4004 and the like.
In this case, in the first and second embodiments, the synthetic resin cylinder 20 functions as a heat insulating material for the waveguide 4004, and as a reinforcing material for the thin film body 40 and the metal cylinder 30. In contrast to the function, the synthetic resin cylinder 20 mainly functions as a heat insulating material.
Further, the metal cylinder 30 is formed to have sufficient rigidity to hold the shape of the thin film body 40, the synthetic resin cylinder 20 is made to function as a heat insulating material for the waveguide 4004, and the thin film body 40 is formed. Alternatively, it may function as a reinforcing material for the metal cylinder 30.
In addition, the shape and size of the waveguide 4004 are appropriately changed according to the purpose and application.
Moreover, the heat insulating waveguide 10 which is the object of the manufacturing method of the present invention includes both rigid and flexible ones.

(A) is a cross-sectional front view of a heat insulating waveguide manufactured by the method of the present invention, and (B) is a cross-sectional side view of the same. It is explanatory drawing of the manufacturing method of the heat insulation waveguide of this invention. (A) The front view of the heat insulation waveguide which has a flange, (B) is the same sectional drawing. (A) Front view of flange, (B) is a sectional view of the same.

Explanation of symbols

DESCRIPTION OF SYMBOLS 10 ... Thermal insulation waveguide, 20 ... Synthetic resin cylinder, 30 ... Metal cylinder, 40 ... Thin film body, 4002 ... Thin film, 4004 ... Waveguide, 50 ... Bar material, 60 ...... Flange.

Claims (11)

A bar material having a cross-sectional contour of the same shape as the cross-sectional contour of the waveguide to be formed of a metal material is provided.
A thin film body made of a thin film having a thickness of 2 to 3 μm covering the outer surface is formed on the outer surface of the bar by a metal material different from the metal material and having a high waveguiding efficiency,
A metal cylinder having a thickness of 50 to 150 μm covering the outer surface is formed on the outer surface of the thin film body with a metal material having higher strength than the metal material constituting the thin film body and low thermal conductivity,
Bonding a metal flange for connecting a waveguide to the longitudinal end of the metal cylinder,
From the metal material constituting the thin film body, the outer surface of the metal cylinder body has sufficient strength to cover the outer surface in close contact with the outer surface and hold the shape of the thin film body and the shape of the metal cylinder body Forming a synthetic resin cylinder made of synthetic resin with low thermal conductivity,
The bar material, the thin film body, the metal cylinder, the metal flange, and the synthetic resin cylinder, which are integrated with each other, are immersed in a drug to dissolve the bar,
A waveguide made of the thin film body, the metal cylinder, the metal flange, and the synthetic resin cylinder was obtained.
A method of manufacturing an adiabatic millimeter wave or submillimeter wave waveguide. A bar material having a cross-sectional contour of the same shape as the cross-sectional contour of the waveguide to be formed of a metal material is provided.
A thin film body made of a thin film having a thickness of 2 to 3 μm covering the outer surface is formed on the outer surface of the bar by a metal material different from the metal material and having a high waveguiding efficiency,
Thickness sufficient to hold the shape of the thin film body on the outer surface of the thin film body with a metal material having higher strength and lower thermal conductivity than the metal material constituting the thin film body Forming a metal cylinder of 150 to 500 μm,
Bonding a metal flange for connecting a waveguide to the longitudinal end of the metal cylinder,
On the outer surface of the metal cylinder, a synthetic resin cylinder made of a synthetic resin having a thermal conductivity smaller than that of the metal material constituting the thin film body covering the outer surface in close contact with the outer surface is formed,
The bar material, the thin film body, the metal cylinder, the metal flange, and the synthetic resin cylinder, which are integrated with each other, are immersed in a drug to dissolve the bar,
A waveguide made of the thin film body, the metal cylinder, the metal flange, and the synthetic resin cylinder was obtained.
A method of manufacturing an adiabatic millimeter wave or submillimeter wave waveguide.   The method of manufacturing a heat insulating millimeter wave or submillimeter wave waveguide according to claim 1 or 2, wherein the thin film body is formed on an outer surface of the bar by plating or vapor deposition.   3. The method for manufacturing an adiabatic millimeter wave or submillimeter wave waveguide according to claim 1, wherein the metal cylinder is formed on the outer surface of the thin film body by plating or vapor deposition.   The method for manufacturing a heat insulating millimeter wave or submillimeter wave waveguide according to claim 1, wherein the bar has a hollow shape. The synthetic resin is a fiber-reinforced plastic, the plastic tubular body, the outer surface of the metallic tubular body, by winding reinforcing fibers made of glass fiber or carbon fiber are stacked, the plastic flow state thereon 3. The resin composition according to claim 1 or 2, characterized in that it is formed by solidifying and curing, or by winding and laminating reinforcing fibers made of glass fibers or carbon fibers impregnated with plastic in a fluid state, and curing the plastics. Manufacturing method of adiabatic millimeter wave or submillimeter wave waveguide.   3. The heat insulating millimeter wave according to claim 1, wherein the metal material forming the thin film body is gold, silver, or copper, and the metal material forming the bar is aluminum. Submillimeter wave waveguide manufacturing method.   3. The method for manufacturing an adiabatic millimeter wave or submillimeter wave waveguide according to claim 1, wherein the metal material having a high waveguiding efficiency constituting the thin film body is gold, and the bar is brass. .   The method for manufacturing a heat insulating millimeter-wave or submillimeter-wave waveguide according to claim 1 or 2, wherein the metal material constituting the metal cylinder is nickel. The metal flange is formed of the same material as the metal material constituting the metal cylinder.
The method for manufacturing a heat-insulating millimeter wave or submillimeter wave waveguide according to claim 1 or 2. The metal flange includes a disk-shaped main body, a hole formed through the center of the main body and into which an end of the metal cylinder is inserted, and a plurality of bolt insertion holes provided in the outer peripheral portion of the main body. And
Wherein the bonding of the metallic cylindrical body of the metal flanges, the ends of the metallic tubular member into the hole is made by soldering or brazing is inserted is made,
The method for manufacturing a heat-insulating millimeter wave or submillimeter wave waveguide according to claim 1 or 2.

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