JP4608227B2 - Substrate processing system, external connection apparatus, substrate processing apparatus, and display method for substrate processing system - Google Patents

Description

  The present invention relates to a substrate processing system, and more particularly to an apparatus for grasping an event occurring in an apparatus.

Currently, high productivity is desired in the semiconductor manufacturing line, and the performance of the semiconductor manufacturing apparatus is emphasized. Of the performance required for semiconductor manufacturing equipment, high availability, high throughput, and high turnaround time are particularly important.
However, in the semiconductor manufacturing line, when operating the manufacturing equipment, due to various factors such as stoppage due to equipment failure, inefficient operation of the equipment and time loss in cassette transportation between wafer transport equipment, inefficient maintenance work, etc. There are many times when a wafer is not processed in the manufacturing apparatus. Moreover, although a semiconductor manufacturing apparatus is prepared, there are many factors that cause a decrease in productivity, such as a wafer not being provided.
In order to eliminate these factors, manufacturing equipment manufacturers improve the performance of semiconductor manufacturing equipment, and device manufacturers improve production lines, etc., and repeatedly strive to improve productivity.

  For example, the manufacturer of the manufacturing apparatus measures the effect of the measure for improving the device performance with a stopwatch or the like if it is time, and determines whether or not the effect of the measure taken is effective from the result. In addition, device manufacturers have recorded production by semiconductor manufacturing equipment, implemented productivity improvement measures or improved work, and recorded the results again to determine whether the measures / improvements were effective.

As a prerequisite technique, there is a technique that supplies a control program to a controller that controls a semiconductor manufacturing apparatus via a communication line (see, for example, Patent Document 1).
JP 2002-217182 A

However, in the method of measuring with the stopwatch etc. of the manufacturing equipment manufacturer, at the place where many drive parts etc. operate in a complex manner, it is confirmed from the measurement result of the stopwatch etc. whether the measures taken are indeed effective. I could not do it.
In addition, production records performed by device manufacturers are mainly about the start and completion times of lots (cassettes), and include fine equipment such as peripheral equipment and substrate processing equipment such as wafer transfer machines and self-propelled transfer vehicles. Since we could not grasp the situation of communication between them, it was not possible to accurately confirm whether the measure was efficient or effective.
These causes are due to the fact that details of the operation of the apparatus cannot be known.

  An object of the present invention is to provide a substrate processing system capable of solving the above-described problems of the prior art and grasping details of the operation of the apparatus.

  In the substrate processing apparatus which comprises a substrate processing system, this invention outputs the event which generate | occur | produces inside a substrate processing apparatus outside, attaches time to an event by an external connection apparatus, records, processes (edits), and displays Accordingly, the direction of the productivity improvement method of the substrate processing apparatus is indicated, and an external connection device that can confirm the effect of the implementation measure is provided. An internal control device may be used instead of the external connection device. More specifically, it refers to the following inventions.

  A first invention includes a substrate processing apparatus for processing a substrate and an external connection device connected to the substrate processing apparatus, wherein the external connection device is extracted from a plurality of events occurring in the substrate processing apparatus. A setting means for presetting an event to be performed, a storage means for storing the time at which each of the extracted events occurs in association with the extracted event, a display means for displaying the data, and the data An editing means for editing the substrate.

  When the substrate processing apparatus operates to process a substrate, a plurality of events occur in the substrate processing apparatus with the operation. The plurality of events that have occurred are sent to the external connection device. An event preset by the setting means is extracted from a plurality of events sent to the external connection device. The extracted events are stored in the storage means as data in association with the time at which each of the events occurs. The data stored in the storage means is displayed as it is by the display means or after being edited by the editing means.

As the data related to the time of occurrence of the event is displayed as it is or edited and displayed on the display means, the occurrence, fluctuation, and disappearance of the event become clear, and details of the operation of the device that could not be visualized until now, It can be grasped outside the device.
Events that occur in the substrate processing apparatus include operator operations of the substrate processing apparatus, and the interlocking status between the substrate processing apparatus and apparatus peripheral equipment.

According to a second aspect of the present invention, there is provided a substrate processing apparatus for processing a substrate, wherein setting means for presetting an event to be extracted from a plurality of events occurring in the substrate processing apparatus, and each of the extracted events is Substrate processing characterized by comprising storage means for storing time of occurrence as time-series data in association with the extracted event, display means for displaying the data, and editing means for editing the data Device.

  When the substrate processing apparatus operates to process a substrate, a plurality of events occur in the substrate processing apparatus with the operation. The plurality of events that have occurred are processed in the substrate processing apparatus as follows. An event preset by the setting means is extracted from the plurality of events. The extracted events are stored in the storage means as data in association with the time at which each of the events occurs. The data stored in the storage means is displayed as it is by the display means or after being edited by the editing means.

  Since the event is displayed as data associated with the time of its occurrence, or edited and displayed on the display means, the occurrence, change and disappearance (termination) of the event become clear, and the operation of the device that could not be visualized so far Details can be grasped inside the apparatus.

  A third invention includes a substrate processing apparatus for processing a substrate and an external connection device connected to the substrate processing apparatus, and the external connection device is extracted from a plurality of events occurring in the substrate processing apparatus. Event code setting means for setting an event code in advance to an event to be associated and associating the event code with the event, and the time at which each of the events for which the event code is set occurs is set to the set event Data creation means for creating event data consisting of the time, the event code, and the event, and two desired events corresponding to the event code and the operation between the two events A time code setting means for setting a time code in time and associating the time code with the two events or the required time; storage means for storing the event data and the time code; and the event data Substrate processing comprising: display means for displaying a time code; and editing means for editing the event code, an event corresponding to the event code, and an operation between the time code and two events corresponding to the time code System.

  When the substrate processing apparatus operates to process a substrate, a plurality of events occur in the substrate processing apparatus with the operation. The plurality of events that have occurred are sent to the external connection device. By the event code setting means, a preset event is extracted from a plurality of events sent to the external connection device, and an event code is assigned to the extracted event.

  The data creation means creates event data in which the event to which the event code is assigned is associated with the time at which each event occurs. Further, the time code setting means assigns a time code to the desired two event codes and the time between the two desired event codes. The aforementioned event data and time code are stored in the storage means. The data and code stored in the storage means are displayed as they are by the display means or after being edited by the editing means.

  Since the time code is given to the desired two event codes and the required time between the two desired event codes, the occurrence, fluctuation, and disappearance of the events become clear from the time code, and the operation of the device that could not be visualized so far The details can be ascertained outside the apparatus.

  A fourth invention includes a substrate processing apparatus for processing a substrate and an external connection device connected to the substrate processing apparatus, wherein the external connection device is extracted from a plurality of events occurring in the substrate processing apparatus. Event code setting means for setting an event code in advance to an event to be associated and associating the event code with the event, and the time at which each of the events for which the event code is set occurs is set to the set event Data creation means for creating event data consisting of the time, the event code, and the event, and two desired events corresponding to the event code and the operation between the two events Time code setting means for setting a time code in time and associating the time code with the two events or the required time, and one action is a combination of a plurality of inter-event actions. Events required A period setting means for setting so as to be associated with each other, or setting a total time required for one operation as an event processing period obtained by adding the time required for the operation between the plurality of events, and the event data, time code, and event processing Storage means for storing a period; display means for displaying the event data, time code, and event processing period; an event corresponding to the event code and the event code; and two events corresponding to the time code and the time code And an editing means for editing a combination of a plurality of inter-event operations constituting one operation.

  When the substrate processing apparatus operates to process a substrate, a plurality of events occur in the substrate processing apparatus with the operation. The plurality of events that have occurred are sent to the external connection device. By the event code setting means, a preset event is extracted from a plurality of events sent to the external connection device, and an event code is assigned to the extracted event.

  The data creation means creates event data in which the event to which the event code is assigned is associated with the time at which each event occurs. Further, the time code setting means assigns a time code to the desired two event codes and the time between the two desired event codes. The period setting means sets the events required for one operation so as to be associated with each other, or sets the total time required for one operation as an event processing period obtained by adding the times required for the operations between the plurality of events. The event data, time code, and event processing period described above are stored in the storage means. The event data, time code, and event processing period stored in the storage means are displayed as they are by the display means or after being edited by the editing means.

  Since the time code and the period code are added to the desired two event codes and the required time between the two desired event codes, the occurrence, fluctuation, and disappearance of the event will be clarified from the time code and the period code. Details of the operation of the device that could not be performed can be grasped inside the device.

  According to the present invention, it is possible to visualize and grasp the operation of an apparatus that could not be visualized until now. Accordingly, the manufacturing apparatus manufacturer can obtain clues for improving the performance of the apparatus and the device manufacturer for improving the production line, and the effect of the implementation measure can be easily confirmed.

Embodiments of the substrate processing system of the present invention will be described below.
The structure of the substrate processing apparatus which comprises the substrate processing system of this invention is demonstrated using drawing. In the following description, a case where the substrate processing apparatus is applied to a vertical apparatus that performs diffusion processing, CVD processing, or the like on the substrate will be described. FIG. 9 is an external perspective view of a substrate processing apparatus applied to the present invention. This figure is drawn as a perspective view. FIG. 10 is a side view of the substrate processing apparatus shown in FIG.

  In the substrate processing apparatus, a pod (substrate storage container) 100 storing a wafer (substrate) 200 made of silicon or the like is inserted from the outside into the housing 101 and vice versa. An I / O stage (holder holding member) 105 is attached to the front surface of the housing 101, and a cassette shelf (mounting means) 109 for storing the pod 100 inserted into the housing 101 is laid. Yes. Note that in an apparatus with a cassette-compatible specification instead of a pod-compatible specification, a shutter is provided on the front surface of the casing 101 corresponding to the I / O stage 105, and the cassette is inserted into the casing 101 via this shutter. .

In addition, an airtight N ₂ purge chamber 102 serving as a transfer area for the wafer 200 and serving as a loading / unloading space for a boat (substrate holding means) 217 described later is provided. The N ₂ purge chamber 102 is hermetically sealed so that the inside of the N ₂ purge chamber 102 when processing the wafer 200 is filled with an inert gas such as N ₂ gas in order to prevent a natural oxide film on the wafer 200. It is a container.

As the pod 100 described above, the FOUP type is currently mainly used, and the opening provided on one side of the pod 100 is closed with a lid (not shown) to isolate the wafer 200 from the atmosphere. The wafer 200 can be transferred into and out of the pod 100 by removing the lid. A pod opener (opening / closing means) 108 is provided on the front side of the N ₂ purge chamber 102 in order to remove the lid of the pod 100 and to communicate the atmosphere in the pod and the atmosphere of the N ₂ purge chamber 102. Yes. Instead of the pod corresponding specification, in the apparatus of the cassette corresponding specification, a gate valve is provided on the front surface of the N ₂ purge chamber 102 are connected by a gate valve and the N ₂ purge chamber 102 and the conveying space.

  The cassette loader 114 carries the pod 100 between the pod opener 108, the cassette shelf 109, and the I / O stage 105. Note that in a cassette-compatible specification apparatus, not a pod-compatible specification, the cassette loader 114 includes a rotation stage. Air that has been cleaned by a clean unit (not shown) provided in the casing 101 is caused to flow in the conveyance space of the pod 100 by the cassette loader 114.

Inside the N ₂ purge chamber 102, a boat 217 for loading a plurality of wafers 200 in multiple stages, a substrate alignment device 106 for adjusting the position of the notch (or orientation flat) of the wafers 200 to an arbitrary position, and a pod opener 108 A wafer transfer machine (carrying means) 112 that carries the wafer 200 between the upper pod 100, the substrate alignment device 106, and the boat 217 is provided. Further, a processing furnace 202 for processing the wafer 200 is provided in the upper part of the N ₂ purge chamber 102, and the boat 217 is loaded into the processing furnace 202 by the boat elevator (lifting means) 115 or unloaded from the processing furnace 202. Can be loaded.

Next, the operation of the substrate processing apparatus of the present invention will be described.
First, the pod 100 that has been transported from the outside of the housing 101 by an AGV (self-propelled transport vehicle) or an OHT (ceiling suspended transport device) is placed on the I / O stage 105. The pod 100 placed on the I / O stage 105 is inserted into the transfer space via the shutter and then directly transferred onto the pod opener 108 by the cassette loader 114 or once stored in the cassette shelf 109. And then conveyed onto the pod opener 108. Note that, in a cassette-compatible specification apparatus instead of a pod-compatible specification, a gate valve provided between the transfer space and the N ₂ purge chamber 102 is opened. The pod 100 transferred to the pod opener 108 is removed from the pod 100 by the pod opener 108, and the internal atmosphere of the pod 100 is communicated with the atmosphere of the N ₂ purge chamber 102.

Next, the wafer 200 is taken out from the pod 100 in communication with the atmosphere of the N ₂ purge chamber 102 by the wafer transfer device 112. The taken-out wafer 200 is aligned so that a notch is determined at an arbitrary position by the substrate alignment device 106, and is transferred to the boat 217 after alignment.
When the transfer of the wafer 200 to the boat 217 is completed, the furnace port shutter 116 of the processing chamber 201 is opened, and the boat 217 loaded with the wafer 200 is loaded by the boat elevator 115.
After loading, an arbitrary process is performed on the wafer 200 in the processing furnace 202. After the process, the wafer 200 and the pod 100 are discharged out of the casing 101 in the reverse procedure described above.

  As shown in FIG. 11, a plurality of the substrate processing apparatuses described above, for example, semiconductor manufacturing apparatuses, are installed in a factory (# 1 to #n), and the operation of these semiconductor manufacturing apparatuses is controlled by a controller. Each semiconductor manufacturing apparatus controls a temperature controller 21 that controls a heating temperature such as a temperature in a reaction chamber, a mechanical controller 22 that controls the operation of a mechanical part such as an elevator or a robot arm, and a pressure such as a reaction pressure in the reaction chamber. A pressure controller 23, a gas controller 24 for controlling a gas flow supplied to the reaction chamber, and a main controller 25 for controlling these controllers 21 to 24 through a communication line 26 such as a LAN are provided. Further, the factory is provided with a block controller 27 that controls the main controller 25 of the plurality of semiconductor manufacturing apparatuses through a communication line 28 such as a LAN.

  Of these controllers 21 to 24, for example, the mechanical controller 22 is connected to the motor 13, the electromagnetic valve 12, the sensor 11, and the like. A pressure valve 14 and a pressure sensor 15 are connected to the pressure controller 23. These controllers 21 to 24, 25, and 27 are configured by a computer, and execute predetermined control processing by executing a predetermined control program by hardware such as a processor and a memory. Such a control program is stored in, for example, a hard disk memory provided in the controller, or stored in advance in a ROM provided in the controller and set in the controller.

By the way, the substrate processing system of the present embodiment is intended to grasp a plurality of events that occur in each of the above-described substrate processing apparatuses. Here, the phenomenon refers to a phenomenon such as operation start and operation of a mechanism constituting the substrate processing apparatus, sensor ON, sensor OFF, instruction and history of substrate processing apparatus operation, or a communication result of a production line installation device described later. Say. An operation element is composed of a plurality of events, and one operation is composed of the plurality of operation elements.
This one operation will be described by taking, for example, a cassette payout operation composed of a plurality of operations 1 to 10 (operation elements).

12 to 14 show a series of operating elements for executing such a cassette dispensing operation.
FIG. 12A shows a schematic basic equipment configuration for performing the cassette payout operation. Note that the basic equipment configuration here is not necessarily the same as the equipment of the substrate processing apparatus shown in FIGS. 9 and 10 due to the difference in the pod and cassette and the difference in the model type.
The spare chamber (LL chamber) 33 and the load lock chamber 35 are connected via a gate 34. The entrance of the LL chamber 33 on the side opposite to the gate 34 can be opened and closed by a shutter 31. A stage 32 on which a cassette 37 is mounted is provided between the shutter 31 and the LL chamber 33. The stage 32 has an L-shaped cross section for loading and unloading the cassette 37 into and from the LL chamber 33, and is rotatable about a CY axis (stage rotation axis) 36.

  In the initial state, the cassette 37 exists in the LL chamber 33, and the LL chamber 33 is in a vacuum state (FIG. 12B).

  In the operation 1, the LL chamber 33 is vented by the following plurality of events. (1) An LL chamber vent command is issued to a pressure valve (corresponding to the pressure valve 14 in FIG. 11), (2) the LL chamber 33 is vented, and (3) an atmospheric pressure sensor (pressure sensor in FIG. 11). (Corresponding to 15) The LL chamber venting is completed by turning on (FIG. 12C).

  In the operation 2, the shutter 31 is opened by the following plurality of events. (1) A shutter open command is issued to an electromagnetic valve (corresponding to the electromagnetic valve 12 in FIG. 11) that operates the shutter 31, (2) the shutter 31 opens, and (3) an open sensor (to the sensor 11 in FIG. 11). Equivalent) Shutter opening ends when ON (FIG. 12 (d)).

  In the operation 3, the stage 32 is taken out by the following plurality of events. (1) A CY-axis rotation command is issued to the motor (corresponding to the motor 13 in FIG. 11), (2) the CY-axis 36 rotates and the stage 32 rotates counterclockwise, and (3) the motor operation is completed. The CY-axis rotation is completed, the stage 32 is half-rotated and stopped, the cassette 37 is transferred from one placement portion of the L-shaped stage 32 to the other placement portion, and is discharged out of the LL chamber 33 ( FIG. 12 (e)).

  In operation 4, the cassette 37 is delivered to the AGV (not shown) by the following plurality of events. (1) Request AGV to take out cassette, (2) Start cassette delivery communication between AGV and device, (3) Start cassette delivery operation between AGV and device, (4) Cassette delivery between AGV and device The operation is terminated, and (5) the cassette delivery communication is completed between the AGV and the apparatus (FIG. 13 (a)).

  In the operation 5, the stage 32 rotates for the next cassette payout due to the following plurality of events. (1) CY axis rotation command is issued, (2) CY axis 36 rotates, stage 32 reverses, (3) CY axis 36 rotates upon completion of motor operation, and stage 32 moves to LL chamber 33. (FIG. 13B).

  In the operation 6, the shutter 31 is closed by the following plurality of events. (1) A shutter close command is issued to the solenoid valve, (2) the shutter 31 is closed, the LL chamber 33 is sealed, and (3) the closing of the shutter 31 is ended by the close sensor ON (FIG. 13C). ).

  In the operation 7, the LL chamber 33 is evacuated (which means that the pressure is reduced until a vacuum is reached) by the following plurality of events. (1) An LL chamber evacuation command is issued, (2) evacuation processing of the LL chamber 33 is performed, and (3) evacuation of the LL chamber 33 is completed by the vacuum pressure sensor ON (FIG. 13 (d)).

  In the operation 8, the gate 34 between the LL chamber 33 and the load lock chamber 35 is opened by the following plurality of events. (1) A gate open command is issued to the solenoid valve, (2) the gate 34 is opened, and (3) the opening of the gate 34 is completed when the open sensor is turned ON, so that the LL chamber 33 and the load lock chamber 35 communicate with each other. (FIG. 14A).

  In operation 9, the next cassette 37 is carried from the load lock chamber 35 to the LL chamber 33 due to the following plurality of events. (1) A cassette loading command is issued, (2) the cassette transfer machine enters a cassette loading operation from the load lock chamber 35 to the LL chamber 33, and (3) completes loading of the cassette 37 into the LL chamber 33. The cassette 37 is transferred to one mounting portion of the L-shaped stage 32 (FIG. 14B).

In operation 10, the gate 34 is closed by the following plurality of events. (1) A gate close command is issued, (2) the gate 34 enters a close operation, and (3) the gate close is terminated by the close sensor ON, and the communication between the LL chamber 33 and the load lock chamber 35 is cut off. (FIG. 14 (c)).
When the operation 10 ends, the process returns to the operation 1.

  In the embodiment, a substrate processing system as shown in the block of FIG. 2 is constructed in order to grasp a plurality of events or one operation that occurs in the substrate processing apparatus such as the cassette dispensing operation described above. The substrate processing system includes a substrate processing apparatus 1 that moves by an operator's apparatus operation to process a substrate, apparatus peripheral equipment (production line installation equipment 2), and an external connection device (external tool 3). The external tool 3 is connected to the substrate processing apparatus 1 and the production line installation device 2. Usually, the production line installation device 2 and the external tool 3 are connected by communication.

  The substrate processing apparatus 1 refers to a semiconductor manufacturing apparatus or an LCD apparatus, and refers to general industrial equipment that processes a substrate after productivity is evaluated.

  The production line installation device 2 is, for example, a plurality of modules (chambers) arranged in a cluster if the AGV system, host computer (device manufacturer host computer, etc.), measuring instrument, and substrate processing apparatus are single wafer devices. Is a module that has an independent control unit and needs to be connected to the main controller, and is a general device that exchanges articles and information with the apparatus.

  The external tool 3 is configured to receive, via the substrate processing apparatus 1, an event that occurs in the substrate processing apparatus 1 or an event that indicates an interlocking state between the production line installation device 2 and the substrate processing apparatus 1. In addition, the external tool 3 directly receives events that occur in the production line installation device 2. The external tool 3 that receives these events is configured to set events to be described later and to collect, store, process, and display event data. For this purpose, event data collection, storage, processing, and display devices are installed in the external tool 3.

  For example, as shown in FIG. 1, the external tool 3 includes an event code setting unit 51, a data forming unit 52, a storage unit 53, an editing unit 54, and a display unit 55. For editing, the external tool 3 serves as a time code setting unit. A time definition table 56 and a period definition table 57 as period setting means are used.

  The event code setting means 51 sets an event code (hereinafter referred to as an event code) in advance for an event to be extracted from a plurality of events that occur in the substrate processing apparatus 1, and associates the event code with the event. Do. The data creation means 52 creates event data composed of the time, the event code, and the event by associating the time at which each of the events for which the event code is set occurs with the set event. The time definition table 56 associates two desired events corresponding to the event code, or sets a time code for the time required for the operation between the two events, and associates the time code with the required time. I do. The period definition table 57 selects a plurality of time codes set in the time definition table 56, sets operation names, associates the operation names with the plurality of time codes, or sets one operation between a plurality of events. It consists of a combination of actions, and the total time required for one action is set as an event processing period obtained by adding the time required for the plurality of actions between events. The storage means 53 stores the edited time definition table, period definition table, event data, time code, and event processing period. The display means 55 displays event data, a time code, and an event processing period. The editing unit 54 edits an event code and an event corresponding to the event code, an operation between the two events corresponding to the time code and the time code, or a combination of a plurality of inter-event operations constituting one operation. The edited data is stored in the storage means 53.

  Next, the operation of the above-described configuration will be described. When the substrate processing apparatus 1 operates to process a substrate, a plurality of events occur in the substrate processing apparatus 1 along with the operation. The plurality of events that have occurred are sent to the external tool 3. The event code setting means 51 extracts a preset event from a plurality of events sent to the external tool 3, and assigns an event code to the extracted event.

  The data creation means 52 creates event data in which an event to which an event code is assigned is associated with the time at which each event occurs. Further, by referring to or selecting the time definition table 56, a time code can be given to the time between two desired event codes. By referring to or selecting the period definition table 57, the total time required for one operation can be set as an event processing period obtained by adding the time required for a plurality of inter-event operations. The aforementioned event data and time code are stored in the storage means 53. The event data and time code stored in the storage means 53 are displayed as they are by the display means 55 or after being edited by the editing means 54. Since a time code is given to the required time between two desired event codes, the occurrence, fluctuation, and disappearance of events are clarified from the time code, and details of the operation of the apparatus that could not be visualized so far are shown in the substrate processing apparatus. 1 can be easily grasped by the external tool 3.

  Next, the event definition, event setting, event collection / accumulation, and processing data display will be described in detail.

Definition of an event Here, an event is an event that is recorded in the substrate processing apparatus 1 or an event that occurs due to the operation of the substrate processing apparatus 1 or in conjunction with the production line installation equipment 2 along with the time at which the event occurred. Say. Events are given a systematic code for their classification. The code also includes information that represents some event attributes. The main event information is shown in FIG.
As shown in FIG. 3, one event includes an occurrence time, an event code, and an event name. The occurrence time is indicated by, for example, [yy / mm / dd hh: mm: ss]. The event code is represented by, for example, an 8-digit code [△△ □□□ ○○○ ×××], where Δ △ is an attribute code represented by a 2-digit number, and □□□ is represented by a 3-digit number. Position code, XXX means a part code indicated by a three-digit number, and XXX means a serial number indicated by a three-digit number.

As shown in FIG. 3, the attribute code defines the nature of the event. The position code defines the event occurrence location. The part code defines a part such as a sensor. The event name is a name given to an event to be extracted from a plurality of events that occur in the substrate processing apparatus 1. In the illustrated example, an example of L / L1 gate opening is shown. This means that the gate of the first spare chamber (L / L1) among the plurality of spare chambers (L / L chambers) has been opened.
The attribute code, position code, part code, and serial number constituting the event code are all open so that they can be defined by the user or the apparatus, and the definition can be changed depending on the purpose of use. Therefore, the definition can be changed depending on whether you want to understand the macro operation such as the operation rate or the detailed movement of one operation.

Event setting The event configuration described above is set as follows. Events occurring in the substrate processing apparatus 1 and the production line installation equipment 2 are reported to the external tool 3 at the time of occurrence. The reported event is accepted by the external tool 3 only if it is an event to be extracted. The external tool 3 sets a predetermined event code to an event to be extracted by the event code setting means 51 when receiving the event. Further, the data forming means 52 forms event data to which the time that is the event occurrence time is given, and collects and accumulates (records) it in the storage means 53 in the external tool 3. Information (occurrence time and event name) corresponding to the event code can be acquired from the event code.

Event Collection / Accumulation FIG. 4 shows the recording status of a plurality of event data recorded in the storage means 53 in the external tool 3. As shown in the figure, the event data has a data structure including an occurrence time, an event code, and an event name. In the storage means (event data collection device) 53, event data is recorded in time series in this structure. The event data in the illustrated example indicates the first operation 1 to operation 3 among a plurality of operations for executing the above-described cassette payout operation (one operation).

Event data processing The event data collected and stored in the storage means 53 is processed by the editing means 54 by referring to or referring to the time definition table 56 or the period definition table 57 created according to the user's intention. The data is edited and the editing result is displayed on the display means 55. By setting how the event data is processed according to the purpose, the user can display the intended processing data on the screen and obtain information.
In order to set the event data processing method by time elements, here, a time definition table 56 and a period definition table 57 shown in FIGS. 5 and 6 are used. These definition tables 56 and 57 are registered in the storage means 53 in advance.
Here, the meaning of the table is the positioning of a work area where the user (including the device manufacturer) can define and register an event in order to implement the target time and improve productivity. For example, the user reads the “registration screen” from the storage unit 53 to the display unit 55, constructs this table from the “registration screen”, and “registers” the storage unit 53 of the external tool 3, so that the target tool can be easily obtained. Can be used. The user recommends the setting work in the order of event code creation → time definition table creation → period definition table creation.

  First, the time definition table 56 shown in FIG. 5 will be described. The time definition table 56 is a table in which the time required between two desired events is set as a time code, and the time code is associated with the required time. A plurality of definition tables are prepared in order to be able to cope with cases where the operation methods of functions are different. The time definition table in the illustrated example includes a time name field, a measurement start event code field, and a measurement end event code field. In the name field to which a time code is assigned, two events and the name of an inter-event operation attached to the required time between the two events are entered. In the measurement start event code field and the measurement end event code field, two events for defining the name are respectively input. The contents of the input event here are the two items of the event code and the event name described in FIG. 4, but may further include the time of occurrence. The time in the name column of the operation time between events is defined as from the occurrence of the measurement start event to the occurrence of the measurement end event. The above-described time code is registered, and information corresponding to the time code (inter-event operation time name, measurement start and measurement end event data) can be acquired. At this time, the editing means 54 calculates the required time between the measurement start event and the measurement end event, and provides the required time column in the time definition table 56 so that it is calculated and displayed when two events are set. Also good.

  The case of the time code 1 will be described as an example. The L / L1 shutter open time is a time required from the L / L1 shutter open command to the end of the L / L1 shutter open operation. By using this time definition table 56, it is possible to acquire from the time code 1 all of the two event information (including the occurrence time) of the shutter open command and the shutter open operation end corresponding to the time code 1.

  Next, the period definition table 57 shown in FIG. 6 will be described. One operation refers to a series of operations or operation information including operations between a plurality of events. The total time of one operation is defined as a time obtained by adding all the time data of time codes related to a plurality of registered inter-event operations. A plurality of definition tables are also prepared in order to be able to cope with cases where the operation methods of functions are different. The period definition table in the illustrated example includes an operation name field and a registration code field. The name of one action is entered in one action name column. Here, a name limited to the cassette unloading operation is entered as one operation name, but the desired one operation name is described. In the registration code column, a plurality of registration code numbers are entered, and in each registration code number column, the time code and the inter-event operation time name described in FIG. 5 are entered. Information such as a time code and a name corresponding to the registration code can be acquired from the registration code.

  The “cassette unloading operation” in the illustrated example includes an L / L1 cassette unloading operation and time lag time details. The L / L1 cassette payout operation and operation time are as follows: L / L1 vent time for time code 2, L / L1 shutter open time for time code 1, L / L1 stage takeout time for time code 6 Or the sum of all of them. The time lag time details are the time code 3 L / L1 vent command time lag time, the time code 4 L / L1 air return time lag time, the L / L1 evacuation time lag time, and the time obtained by adding all of them. By using the period definition table 57, all the event information (including the occurrence time) of “cassette unloading operation” in the name column of one operation corresponding to a plurality of registration codes and the time definition table which is information of one operation are stored. Based on the total time, the operation time name between events can be acquired. At this time, the editing means 54 can calculate all the times entered in the selected column or a part of the times. For example, the time code 2 L / L1 vent time, the time code 1 L / L1 shutter open time, and the time code 6 L / L1 stage extraction time in FIG. A time field may be provided and calculated when a registration code is set and displayed.

Processing Data Display The processing result processed by the editing unit 54 based on the definition table is stored in the storage unit 53 and displayed on the display screen 55. In addition, it may print out instead of the display or together with the display.
FIG. 7 shows such an event processing period data display screen 60. Similar to FIGS. 5 and 6, the display contents relate to the L / L1 cassette payout operation (one operation), and the L / L1 vent time, L / L1 shutter open time, L constituting the total time of this one operation. The composition ratio of the / L1 stage take-out time with respect to the total time and the measured value of each time code are shown. Measurements are automatically made multiple times. The composition ratio is displayed as a percentage with the sum of the definition times in the period definition table 57 as the denominator. By knowing the ratio of each time code to the total time, it is possible to improve the performance of the apparatus and use it as a guide for improvement.

  A reset button 61 on the screen 60 initializes time accumulation by a reset operation by the user. As a result of the reset operation, the data “currently being measured” before resetting is transferred to “previous”. With the save button 62 on the screen, the data displayed on the screen is saved in the storage unit 53 together with the data before “previous” which is not displayed, by the saving operation by the user.

The measurement reset trigger event designation button 63 registers a trigger event by a designation operation by the user, and enables a “reset” operation by the event. This measurement reset trigger event designation is a mechanism in which a new measurement is started at the occurrence of a certain event because time measurement is automatically performed a plurality of times. For example, when you want to pay out a cassette several times and want to measure the time of each time continuously, if the “L / L1 vent command”, which is the start event of the cassette payout operation, is used as the trigger event, the cassette for each time The time for payout operation can be measured. If, for example, a fault event is triggered instead of the L / L1 vent command, MTTR and MTBF can be measured.
Since the operation method of the function differs depending on the user, a plurality of this screen are prepared.
When the measurement reset trigger event designation button 63 is pressed, the screen shifts to the measurement reset trigger event setting screen shown in FIG. FIG. 8 is an example of a measurement reset trigger event setting screen. The measurement reset trigger event setting screen consists of a trigger designation field and an event name field. For each event name in this event name field, the event name that constitutes the registration code can be selected in the period definition table. The setting is completed by selecting the trigger designation column of the desired event to be performed.

  As described above, according to the embodiment, the substrate processing apparatus 1 and the external tool 3 are provided. The external tool 3 includes the event code setting unit 51, the data creation unit 52, the time definition table 56, and the period definition table 57. By providing the storage means 53, the display means 55, and the editing means 54, it is possible to visualize temporal information on the operation of the substrate processing apparatus 1 and the linkage status between the operation of the substrate processing apparatus 1 and the production line installation equipment 2. Therefore, it is possible to grasp the details of the operation of the device that could not be visualized until now (for example, the time required for one operation and the time required for the operation between two events) and the interlocking status with the production line installation equipment 2, and the substrate processing apparatus. As a result, the device manufacturer will be able to improve the production line, etc., and also be able to confirm the effect of the implementation measures.

  In the above-described embodiment, the case where the external tool 3 provided outside the substrate processing apparatus 1 is used has been described. According to this, it can be used and operated for solving problems of both the device manufacturer and the device manufacturer. However, the present invention is not limited to this. For example, when a control unit corresponding to the external tool 3 is provided in the substrate processing apparatus 1, the present invention can also be realized by providing the control unit with the same function as the external tool. According to this, it can be used and operated particularly for solving problems of equipment manufacturers.

  In the embodiment, it is not necessary to use the table form described for the case where the time definition table and the period definition table are used when editing the event data. In short, in the time definition table, the time code is set to the operation between the two desired events corresponding to the event code and the required time between the two events. Any time code setting means for associating with each other may be used. Also, in the period definition table, one action consists of a combination of actions between events, and it is set to associate events required for one action, or the total time required for one action is set to multiple actions between events. Any period setting means may be used as long as it is set as an event processing period in which the required time is added.

  Further, examples of the substrate processing apparatus include a semiconductor manufacturing apparatus and an LCD manufacturing apparatus, but the present invention is not limited to these, and can be applied to general industrial equipment whose productivity is widely evaluated.

It is a block diagram of the external tool by embodiment. 1 is a block diagram of a substrate processing system according to an embodiment. It is a block diagram of 1 event by embodiment. It is explanatory drawing which shows the recording condition of the event data by embodiment. It is explanatory drawing of the time definition table by embodiment. It is explanatory drawing of the period definition table by embodiment. It is explanatory drawing of the event process period data display screen by embodiment. It is a figure which shows the measurement reset trigger event setting screen by embodiment. It is an external appearance perspective view of the processing apparatus applied to this invention. It is a side view of the processing apparatus applied to this invention. It is explanatory drawing which shows an example of the control system of the semiconductor manufacturing apparatus applied to this invention. It is explanatory drawing for performing the cassette payout operation | movement by embodiment. It is explanatory drawing for performing the cassette payout operation | movement by embodiment. It is explanatory drawing for performing the cassette payout operation | movement by embodiment.

Explanation of symbols

1 Substrate processing equipment 3 External tool (external connection equipment)
51 Event code setting (setting method)
52 Data creation means 53 Storage means 54 Editing means 55 Display means 56 Time definition table 57 Period definition table

Claims (4)

A substrate processing apparatus for processing a substrate and an external connection device connected to the substrate processing apparatus;
The external connection device is:
Setting means for presetting the event to be extracted from a plurality of events occurring on the substrate processing apparatus,
Storage means for storing the time at which each of the extracted events occurs in association with the extracted events as data;
Display means for displaying the data;
I have a,
When the substrate processing apparatus operates to process the substrate, a plurality of events that occur in the substrate processing apparatus along with the operation are transmitted to the external connection device,
The external connection device extracts a preset event from the plurality of events, and displays data associated with a time at which each of the extracted events occurs. system. An external connection device connected to a substrate processing apparatus for processing a substrate,
Setting means for presetting an event to be extracted from a plurality of events occurring in the substrate processing apparatus;
Storage means for storing the time at which each of the extracted events occurs in association with the extracted events as data;
Display means for displaying the data;
Have
When the substrate processing apparatus is operated to process the substrate and a plurality of events occurring in the substrate processing apparatus are transmitted along with the operation, a preset event is extracted from the plurality of events. And displaying data associated with the time at which each of the plurality of extracted events occurs.
An external connection device characterized by that. A substrate processing apparatus for processing a substrate,
Settings for presetting events to be extracted from a plurality of events occurring in the substrate processing apparatus
Connected to an external storage device comprising: means; storage means for storing time at which each of the extracted events occurs in association with the extracted events as time series data; and display means for displaying the data. ,
When operating to process the substrate, send a plurality of events that occur to the substrate processing apparatus in accordance with the operation, let the external storage device extract a preset event from the plurality of events, Causing the external storage device to display data associated with the time at which the plurality of extracted events occur
A substrate processing apparatus. A display method for a substrate processing system implemented by a substrate processing system comprising a substrate processing apparatus for processing a substrate and an external connection device connected to the substrate processing apparatus,
A step of setting in advance an event to be extracted from a plurality of events occurring in the substrate processing apparatus by the setting means of the external connection apparatus;
Storing the time at which each of the extracted events occurs as data in association with the extracted events, the storage means of the external connection device;
A display means of the external connection device displaying the data;
When the substrate processing apparatus operates to process the substrate, a step of transmitting a plurality of events that occur in the substrate processing apparatus along with the operation;
The external connection device extracting a preset event from the plurality of events and displaying data associated with a time at which each of the extracted events occurs.
A display method for a substrate processing system.

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