JP4599092B2 - Manufacturing method of electret film for electrostatic actuator - Google Patents

Description

  The present invention relates to a method for producing an electret film used for an electrostatic actuator that can be used as a drive source using electrostatic force.

  Scanning electrostatic actuators are promising as microactuators capable of large displacement and good positioning accuracy.

  As an example, the electrostatic actuator described in Patent Document 1 generally includes a stator in which a plurality of band-shaped electrodes are formed in an insulator, and a movement made of an insulator and a high-resistance body disposed to face the stator. And a voltage supply circuit for supplying a multilayer voltage to each electrode of the stator. Such an electrostatic actuator induces electric charge to the high resistance body of the moving element by supplying electric charge to the electrode of the stator, and supplies the electric charge induced to the high resistance element of the moving element and the electrode of the stator. The moving element is driven by utilizing the repulsive force and the attractive force acting between the generated charges.

  However, since such an electrostatic actuator must induce a charge in the moving element, a high voltage is required for driving. In addition, low voltage drive can be realized by attaching an electrode to the mover and supplying electric charge, but in that case, wiring is required for the mover, which is disadvantageous in terms of downsizing and drive reliability. .

  Therefore, an electrostatic actuator using a permanent-polarized electret for the mover is superior in that the mover wiring is unnecessary and it can be driven at a relatively low voltage that does not require charge induction during driving. I can say that.

Thus, when an electret is used as a moving element of an electrostatic actuator, a band-shaped permanent polarized electrostatic pattern accompanying the band-shaped electrode of the stator is required. An example of a method for producing an electret film having a strip-like electrostatic pattern is disclosed in Patent Document 2. This is a method in which the discharge electrode is brought into contact with an electret formation scheduled position and a voltage is applied to the discharge electrode to locally form an electret. By scanning the discharge electrode, an electret film having a fine belt-like electrostatic pattern can be created.
JP-A-6-22562 Japanese Patent Laid-Open No. 4-112683

  However, since the manufacturing method disclosed in Patent Document 2 uses a method in which the discharge electrode is brought into contact with the region to be electreted and charged, when the charged portion in the electret film is patterned, the discharge electrode is formed into a pattern. Since it must be scanned together, it takes a long time to perform charging.

  The present invention has been made in view of the above points. An electrostatic actuator capable of efficiently charging in a short time at a high charge density in producing a film subjected to fine patterning charging. An object of the present invention is to provide a method for producing an electret film.

One aspect of the method for producing an electret film for an electrostatic actuator of the present invention is
The discharge in a discharge device comprising: a discharge electrode; a flat plate electrode disposed opposite to the discharge electrode; and a voltage source that generates a discharge by applying a voltage between the discharge electrode and the flat plate electrode. Between the electrode and the flat plate electrode, the electret member is disposed with a gap from the discharge electrode,
The state in which patterned antistatic member to protect the electret member from locally discharged in the predetermined region is in close contact with the object to be electret member, discharge line stomach by the discharge device, the target electret The charged region of the member is charged in a lump .

Moreover, another aspect of the manufacturing method of the electret film for electrostatic actuators of this invention is as follows.
The discharge device according to the above aspect of the present invention, comprising: a discharge electrode; a flat plate electrode disposed opposite the discharge electrode; and a voltage source that generates a discharge by applying a voltage between the discharge electrode and the flat plate electrode. Between the discharge electrode and the flat plate electrode, the electret member is disposed with a gap from the discharge electrode,
A local conductive member patterned so as to conduct electricity locally in a predetermined region is disposed in close contact with or electrically connected to the flat plate electrode and opposed to the discharge electrode,
The surface which is opposed to the discharge electrode of the local conductive member in close contact with the object to be electret member, have rows of discharge by the discharge device, characterized in that it charged collectively charged region of the object to be electret member.

  According to the present invention, there is provided a method for producing an electret film for an electrostatic actuator capable of efficiently performing charging in a short time with a high charge density in producing a film subjected to fine patterning charging. can do.

  The best mode for carrying out the present invention will be described below with reference to the drawings.

  In addition, the manufacturing method of the electret film for electrostatic actuators of the present invention involves a discharge process, and the following embodiment will be described on the assumption that the corona discharge is performed as the discharge process.

  Here, a corona discharge treatment apparatus 100 for performing corona discharge has a configuration as shown in FIG. That is, the discharge electrode 1, the plate electrode 2, and the electret member 3 are installed on the plate electrode 2 with a gap from the discharge electrode 1, and a voltage source 4 that can apply a high voltage between the discharge electrode 1 and the plate electrode 2. The plate electrode 2 is grounded. By performing a discharge with the voltage source 4 between the discharge electrode 1 and the flat plate electrode 2, the electret member 3 is permanently charged to become an electret. Corona discharge is a technique generally known as an electretization technique, and it is known that a higher discharge voltage value enables higher density charging.

[First Embodiment]
FIG.1 (b) is an example of the schematic diagram which showed the process of the discharge in the manufacturing method of the electret film for electrostatic actuators concerning 1st Embodiment of this invention.

  The figure shows a process in which the electret member 3 is installed on the flat plate electrode 2 of the corona discharge treatment apparatus 100 and discharge is performed in a state in which the antistatic member 5 having a plurality of strip-shaped regions is in close contact with the electret member 3.

  According to this embodiment, by preventing the electret member 3 from being charged in a predetermined region by the antistatic member 5, it is possible to efficiently produce an electret film with a high charge density and a fine pattern.

  Hereinafter, examples of the first embodiment will be described.

[First embodiment]
FIGS. 2A to 2D are examples of schematic views showing respective steps of the method for producing an electret film for an electrostatic actuator according to the first example of the first embodiment of the present invention.

  Here, FIG. 2A shows a process in which the electret member 3 is laminated with the conductive member 51 serving as the antistatic member 5. The conductive member 51 is made of Al and laminated by sputtering.

  FIG. 2B is a perspective view showing a state after the conductive member 51 as described above is patterned by lithography.

  In FIG. 2C, the electret member 3 on which the conductive member 51 patterned in this way is stacked is placed on the flat plate electrode 2, and the conductive member 51 and the flat plate are formed by the conductive member 21 made of a conductor. It is a figure which shows the process of making the state electrically connected with the electrode 2 and performing the discharge by the corona discharge treatment apparatus 100. FIG. The electrons discharged from the discharge electrode 1 strike the conductive member 51 before entering the electret member 3 in the region where the conductive member 51 exists. Since the conductive member 51 is electrically connected to the flat plate electrode 2, electrons incident on the conductive member 51 flow to the ground via the flat plate electrode 2, and only in a region where the conductive member 51 does not exist. The electret member 3 is charged. By performing corona discharge at a high voltage, charging with a high charge density is possible, and since the conductive member 51 is patterned by a lithography technique, charging with a fine pattern is possible. Further, since the charging area can be charged in a lump, the charging time is shortened.

  FIG. 2D is a schematic view showing the electret member 3 obtained by the step of removing the conductive member 51. By removing the conductive member 51, the planarity of the electret member 3 that becomes a moving element of the actuator is improved.

[Second Embodiment]
FIGS. 3A to 3D are examples of schematic views showing respective steps of the method for producing an electret film for electrostatic actuator according to the second example of the first embodiment of the present invention.

  Here, FIG. 3A shows a process of laminating the insulating member 52 serving as the antistatic member 5 on the electret member 3. The insulating member 52 is made of a resist and laminated by coating.

  FIG. 3B is a perspective view showing a state after the insulating member 52 is patterned by lithography.

  FIG. 3 (c) is a diagram showing a process in which the electret member 3 on which the insulating members 52 patterned in this way are stacked is placed on the flat plate electrode 2 and discharged by the corona discharge treatment apparatus 100. The electrons discharged from the discharge electrode 1 do not enter the electret member 3 in the region where the insulating member 52 exists, but enter the insulating member 52 and do not affect the electret member 3. Therefore, the electret member 3 is charged only in the region where the insulating member 52 does not exist. The insulating member 52 need not be grounded.

  FIG. 3D is a schematic view showing the electret member 3 obtained by the process of removing the thin film of the insulating member 52. By removing the insulating member 52, the planarity of the electret member 3 that becomes a moving element of the actuator is improved.

[Third embodiment]
4 (a) to 4 (d) are examples of schematic views showing respective steps of the method for manufacturing an electret film for electrostatic actuator according to the third example of the first embodiment of the present invention.

  Here, FIG. 4A shows a process of laminating the conductive member 51 described in the first embodiment and the insulating member 52 described in the second embodiment on the electret member 3. . In this embodiment, an Al thin film is used as the conductive member 51, and a resist thin film is used as the insulating member 52. The Al thin film is laminated by sputtering, and the resist thin film is laminated by coating.

  FIG. 4B is a perspective view showing a state after the conductive member 51 and the insulating member 52 stacked on the electret member 3 are patterned by a lithography technique. The conductive member 51 and the insulating member 52 were both processed in the same pattern.

  FIG. 4C shows a step in which the electret member 3 in which the conductive member 51 and the insulating member 52 patterned in this manner are stacked is placed on the flat plate electrode 2 and discharged by the corona discharge treatment apparatus 100. FIG. In the region where the conductive member 51 and the insulating member 52 exist, electrons discharged from the discharge electrode 1 hit the conductive member 51 and escape to the ground, even if they pass through the conductive member 51. By being absorbed by the insulating member 52, it does not reach the electret member 3. Therefore, the electret member 3 is charged only in the region where the conductive member 51 and the insulating member 52 do not exist. Due to the presence of the insulating member 52, the electret member 3 has a patterned charging region even if the conductive member 51 is laminated very thinly. Since a lithography technique is used, it is possible to form a fine charged pattern. The same effect can be obtained even if the order of stacking the conductive member 51 and the insulating member 52 is changed.

  FIG. 4D is a schematic view showing the electret member 3 obtained by the process of removing the conductive member 51 and the insulating member 52. By removing the conductive member 51 and the insulating member 52, the planarity of the electret member 3 serving as a mover is improved.

[Fourth embodiment]
FIGS. 5A and 5B are examples of schematic views showing respective steps of the method for producing the electret film for electrostatic actuator according to the fourth example of the first embodiment of the present invention.

  Here, FIG. 5A shows a process in which the conductive thin plate member 53 serving as the antistatic member 5 is brought into close contact with the electret member 3. In the present embodiment, unlike the first embodiment, the conductive member 51 is laminated, and the conductive thin plate member 53 is only brought into close contact. Therefore, the electret member 3 and the conductive thin plate member 53 are different from each other. It can be easily removed. The conductive thin plate member 53 has a pattern in which a gap exists in a strip shape.

  FIG. 5B shows that the electret member 3 and the conductive thin plate member 53 that are in close contact with each other are installed on the flat plate electrode 2, and the conductive thin plate member 53 and the flat plate electrode 2 are electrically connected by the electric conduction member 21. It is the figure which shows the process of discharging by the corona discharge processing apparatus 100 in the state which was in the state. Electrons discharged from the discharge electrode 1 flow to the ground in the region where the conductive thin plate member 53 exists, and enter the electret member 3 only in the region where the conductive thin plate member 53 does not exist. Therefore, the electret member 3 has a locally patterned charged region.

  Further, the conductive thin plate member 53 does not require a step of laminating by sputtering or the like as compared with the case of laminating the conductive member 51 as in the first embodiment, and is easily removed from the electret member 3. Therefore, the total process phase time for charging the electret member 3 is shortened. Further, since the same conductive thin plate member 53 can be used many times, the production cost is also reduced.

[Fifth embodiment]
6 (a) and 6 (b) are examples of schematic views showing respective steps of the method for producing an electret film for electrostatic actuator according to the fifth example of the first embodiment of the present invention.

  Here, FIG. 6A shows a process in which the insulating thin plate member 54 serving as the antistatic member 5 is brought into close contact with the electret member 3. In this embodiment, unlike the second embodiment, the insulating member 52 is laminated, and the insulating thin plate member 54 is only brought into close contact with each other. Therefore, the electret member 3 and the insulating thin plate member 54 are different from each other. It can be easily removed. The insulating thin plate member 54 has a pattern in which a gap exists in a strip shape.

  FIG. 6B is a diagram illustrating a process in which the electret member 3 and the insulating thin plate member 54 that are in close contact with each other are placed on the flat plate electrode 2 and discharged by the corona discharge treatment apparatus 100. Electrons discharged from the discharge electrode 1 are absorbed by the insulating thin plate member 54 in the region where the insulating thin plate member 54 exists, and enter the electret member 3 only in the region where the conductive thin plate member 53 does not exist. Therefore, the electret member 3 has a locally patterned charged region.

  Further, the insulating thin plate member 54 does not require a step of laminating by coating or the like, and can be easily removed from the electret member 3 as compared with the case where the insulating member 52 is laminated as in the second embodiment. Therefore, the total process time for charging the electret member 3 is shortened. Further, since the same insulating thin plate member 54 can be used many times, the production cost is also reduced.

[Second Embodiment]
Fig.7 (a) is an example of the schematic diagram which showed the process of the discharge in the manufacturing method of the electret film for electrostatic actuators concerning 2nd Embodiment of this invention. That is, the conductive local conducting member 22 having a strip-shaped gap is disposed in close contact with the electret member 3 and the plate electrode 2 and is discharged by the corona discharge treatment apparatus 100.

  In this case, as shown in FIG. 7B, the electrons discharged from the discharge electrode 1 are guided to the region where the local conducting member 22 exists, pass through the electret member 3, and the local conducting member 22, It flows to the plate electrode 2 and escapes to the ground. Therefore, the electret member 3 is charged in a pattern equivalent to the pattern of the local conductive member 22.

  When the local conductive member 22 is held in a state where the flat plate electrode 2 is in close contact, the electret member 3 is brought into close contact, discharge is performed, the electret member 3 is charged, and then the electret member 3 is removed. Other than the discharge, the process is to make the electret member 3 in close contact with each other. Therefore, the process of charging the electret member 3 is simplified, and the total time of all processes is shortened. Moreover, since the local conduction | electrical_connection member 2 can be used many times, cost is also reduced.

[Modification]
FIG. 8 is an example of a schematic diagram illustrating a discharging process in a modification of the method for manufacturing the electret film for electrostatic actuator according to the second embodiment of the present invention. That is, in this modified example, instead of the plate electrode 2 of the corona discharge treatment apparatus 100 in the second embodiment, a conductive and strip-like gap having a role of the plate electrode 2 and the local conductive member 22 is provided. A corona discharge treatment apparatus 110 having a conductive plate electrode 23 is used.

  In this modification, the corona discharge treatment apparatus 110 performs discharge in a state where the electret member 3 is in close contact with the local conductive flat plate electrode 23. In this case, since the electrons discharged from the discharge electrode 1 are guided to the region where the local conducting plate electrode 23 exists, the electret member 3 has a charging region having the same pattern as the pattern of the local conducting plate electrode 23. It will be.

  As described above, the local conductive plate electrode 23 itself, which is the electrode facing the discharge electrode 1 of the corona discharge treatment apparatus 110, has a pattern, whereby the configuration of the corona discharge treatment apparatus for charging is simplified, and the electret member 3 It is possible to shorten the entire process of charging the battery and reduce the cost.

[Third Embodiment]
FIG. 9A to FIG. 9C are examples of schematic views showing respective steps of the method for producing an electret film for electrostatic actuator according to the third embodiment of the present invention.

  Here, FIG. 9A is a diagram illustrating the surface directions of the A surface and the B surface of the electret member 3.

  FIG. 9B shows a process in which the electret member 3 is brought into close contact with the plate electrode 2 by the corona discharge treatment apparatus 100 and discharge is performed on the A surface of the electret member 3 at a discharge voltage value of −5 kV. .

  FIG. 9 (c) shows an electret member 3 in the process shown in FIG. 9 (b) turned upside down and brought into close contact with the flat plate electrode 2 and charged with a conductive strip-like gap on the B surface of the electret member 3. The preventive member 5 is brought into close contact, and the antistatic member 5 is electrically connected to the flat plate electrode 2 by an electric conduction member (not shown). The process which performed discharge is shown.

  In this embodiment, SUS is used for the antistatic member 5, and Al is used for the electrical conduction member 21. After the step of uniformly discharging and electrifying the A-side of the electret member 3 at -5 kV, the voltage value is -10 kV, which is higher in absolute value than the voltage value when the other B-side is discharged to the A side. By discharging, the charge due to the discharge at -5 kV is offset by the charge due to the discharge at -10 kV and becomes the charge value due to the discharge at -10 kV. Further, the discharge of −10 kV is patterned by the antistatic member 5 and charged to the electret member 3. The region other than the portion charged and charged at -10 kV remains charged by the discharge at -5 kV, but since the discharge surface is opposite to -10 kV, it is patterned and charged at -10 kV. The opposite polarity of the charged region remains.

  Therefore, when the electret member 3 that has been electretized through the above discharge process is used as a moving element of the electrostatic actuator, the electrostatic force of the pulling that works between the electrode that drives the moving element and the moving element is used. Since the mainstream is to drive the moving element, if the charged pattern other than the desired charging pattern as the moving element of the electrostatic actuator is charged with a reverse polarity, the electrostatic force acting between the driving electrode is efficiently Can be used.

  Although the present invention has been described above based on the embodiments, the present invention is not limited to the above-described embodiments, and various modifications and applications are naturally possible within the scope of the gist of the present invention.

(Appendix)
The invention having the following configuration can be extracted from the specific embodiment.

(1) A discharge device comprising: a discharge electrode; a flat plate electrode disposed opposite to the discharge electrode; and a voltage source that generates a discharge by applying a voltage between the discharge electrode and the flat plate electrode. Between the discharge electrode and the flat plate electrode, the electret member is arranged with a gap from the discharge electrode,
In a state where an antistatic member that locally protects the electret member from discharge in a predetermined region is in close contact with the electret member, discharge is performed by the discharge device.
A method for producing an electret film for an electrostatic actuator.

(Corresponding embodiment)
1st Embodiment respond | corresponds to embodiment regarding the manufacturing method of the electret film for electrostatic actuators as described in this (1).

(Function and effect)
According to the method for producing an electret film for an electrostatic actuator described in (1), the electret member is prevented from being charged in a predetermined region by the antistatic member, thereby forming the electrostatic pattern patterned by one discharge. An electret film with a pattern can be created. If electrification is performed by strong discharge, an electret film having a high charge density and a fine pattern can be efficiently produced.

(2) The antistatic member is composed of a conductive member,
Laminating the antistatic member on the electret member;
Patterning the antistatic member into a predetermined pattern by lithography,
A step of discharging in the discharge device by disposing the stacked electret member and the surface of the antistatic member on the side of the antistatic member facing the discharge electrode, and grounding the antistatic member; ,
Removing the antistatic member from the electret member;
(1) The manufacturing method of the electret film for electrostatic actuators according to (1).

(Corresponding embodiment)
The embodiment relating to the method for producing the electret film for an electrostatic actuator described in (2) corresponds to the first embodiment, particularly the first embodiment.

(Function and effect)
According to the method for producing an electret film for an electrostatic actuator described in (2), since electrons discharged from the discharge electrode flow to the ground in the patterned metal region, only the region other than the patterned metal portion is present. It is charged and local electretization is possible. The distance between the discharge electrode and the electretized film can be increased, and the shape of the discharge electrode can be shaped to allow efficient discharge, such as a needle shape. It is possible to charge with charge density. In addition, since the entire surface of the electret film can be charged at once, efficient charging with reduced charging time is possible. Furthermore, since a lithography technique is used, a very fine pattern is possible.

(3) The antistatic member is composed of an insulating member,
Laminating the antistatic member on the electret member;
Patterning the antistatic member into a predetermined pattern by lithography,
In the discharge device, the step of discharging by placing the electret member stacked and the antistatic member side surface of the antistatic member facing the discharge electrode; and
Removing the antistatic member from the electret member;
(1) The manufacturing method of the electret film for electrostatic actuators according to (1).

(Corresponding embodiment)
The embodiment relating to the method for producing the electret film for an electrostatic actuator described in (3) corresponds to the first embodiment, particularly the second embodiment.

(Function and effect)
According to the method for producing an electret film for an electrostatic actuator described in (3), the patterned insulating region of the antistatic member becomes a sacrificial layer in charging, and the electret member in the region other than the insulating region is discharged. In response, it is patterned and charged. That is, the electret member is charged with a pattern in which the pattern of the antistatic member is reversely transferred. The distance between the discharge electrode and the electretized film can be increased, and the shape of the discharge electrode can be shaped to allow efficient discharge, such as a needle shape. It is possible to charge with charge density. In addition, a large fixed charge can be charged. Furthermore, since the entire surface of the electret film can be charged at once, efficient charging with reduced charging time is possible.

(4) The antistatic member is composed of a conductive member and an insulating member,
A step of laminating the conductive member and the insulating member on the electret member so that the antistatic member is laminated on the electret member;
Patterning the antistatic member into a predetermined pattern by lithography,
In the discharge device, the stacked electret member and the surface of the antistatic member on the side of the antistatic member are arranged to face the discharge electrode, and the conductive member layer of the antistatic member is grounded. A process of discharging,
Removing the antistatic member from the electret member;
(1) The manufacturing method of the electret film for electrostatic actuators according to (1).

(Corresponding embodiment)
The embodiment relating to the method for producing the electret film for an electrostatic actuator described in (4) corresponds to the first embodiment, particularly the third embodiment.

(Function and effect)
According to the method for producing an electret film for an electrostatic actuator described in (4), the antistatic member has a two-layer structure of an insulating layer and a conductive layer, and the insulating layer becomes a sacrificial layer in charging and shields discharge electrons. Therefore, the electret member escapes the influence of the discharge in a predetermined pattern of the antistatic member, and therefore the electrostatic pattern patterned by the discharge treatment is used. Can have. In addition, since the effect of preventing the influence of the discharge by the pattern is high, the discharge at a higher voltage is possible, so that the charge with a high charge density is possible. Furthermore, since a lithography technique is used, a very fine pattern is possible.

(5) The antistatic member is composed of a conductive thin plate member having a predetermined pattern,
Adhering the antistatic member to the electret member;
In the discharge device, a step of disposing the stacked electret member and the surface of the antistatic member on the side of the antistatic member facing the discharge electrode, and grounding the antistatic member and discharging.
(1) The manufacturing method of the electret film for electrostatic actuators according to (1).

(Corresponding embodiment)
The embodiment relating to the method for manufacturing the electret film for an electrostatic actuator described in (5) corresponds to the first embodiment, particularly the fourth embodiment.

(Function and effect)
According to the method for producing an electret film for an electrostatic actuator described in (5), since the electret member is in a state in which the metal is not laminated after performing the discharge treatment, compared with the case where the metal is laminated. The uniformity of the film surface is improved. In addition, since it is not necessary to deposit the metal by sputtering or the like every time, the total process time is shortened and the cost is reduced.

(6) The antistatic member is composed of an insulating thin plate member having a predetermined pattern,
Adhering the antistatic member to the electret member;
In the discharge device, the step of disposing the stacked electret member and the antistatic member side surface of the antistatic member facing the discharge electrode, and discharging,
(1) The manufacturing method of the electret film for electrostatic actuators according to (1).

(Corresponding embodiment)
The embodiment relating to the method for producing the electret film for an electrostatic actuator described in (6) corresponds to the first embodiment, particularly the fifth embodiment.

(Function and effect)
According to the method for manufacturing an electret film for an electrostatic actuator described in (6), since the electret film is not laminated without performing the removing step after the discharge treatment, The uniformity of the film surface is improved as compared with the case of laminating. Moreover, since it is not necessary to laminate | stack an insulating member every time, time and cost reduce. In the case of an insulating member, the process is simplified because it is not necessary to ground the mask as compared to the conductive member.

(7) The discharge comprising: a discharge electrode; a flat plate electrode disposed opposite to the discharge electrode; and a voltage source that generates a discharge by applying a voltage between the discharge electrode and the flat plate electrode. Between the discharge electrode and the flat plate electrode in the apparatus, the electret member is disposed with a gap from the discharge electrode,
A local conduction member that conducts electricity locally in a predetermined region is disposed in close contact with or electrically connected to the flat plate electrode and opposed to the discharge electrode,
The electret member is in close contact with the surface of the local conducting member facing the discharge electrode,
Discharging by the discharge device,
A method for producing an electret film for an electrostatic actuator.

(Corresponding embodiment)
2nd Embodiment respond | corresponds to embodiment regarding the manufacturing method of the electret film for electrostatic actuators as described in this (7).

(Function and effect)
According to the method for producing an electret film for an electrostatic actuator described in (7), only the patterned portion of the local conductive member is charged, and an electret film having a patterned fixed charge portion can be obtained. Since the electret member is charged by being brought into close contact with the local conductive member, the time is reduced when considering the total process time. In addition, when charging a different pattern, it is easy to replace the local conductive member of a different pattern.

(8) The plate electrode is composed of a member that conducts electricity locally in a predetermined region,
The electret member is disposed in close contact with the surface of the flat plate electrode facing the discharge electrode,
Having a step of discharging by the discharge device,
The manufacturing method of the electret film for electrostatic actuators as described in (7) characterized by the above-mentioned.

(Corresponding embodiment)
The embodiment relating to the method for producing the electret film for an electrostatic actuator described in (8) corresponds to the second embodiment, in particular, the modification.

(Function and effect)
According to the method for producing an electret film for an electrostatic actuator described in (8), only the patterned portion of the flat plate electrode is charged, so that the time is shortened in consideration of the total process time. Further, patterned charging can be performed with a simple configuration.

(9) performing a first discharge at the first voltage value on the electret member by the discharge device;
When the first discharge of the electret member is performed, the surface facing the discharge electrode is brought into close contact with the flat plate electrode, and the antistatic member is not brought into close contact with the flat plate electrode of the electret member. A step of performing discharge at a second voltage value larger than the first voltage value by the discharge device while being in close contact with the other surface;
(1) The manufacturing method of the electret film for electrostatic actuators according to (1).

(Corresponding embodiment)
The third embodiment corresponds to the embodiment related to the method for manufacturing the electret film for electrostatic actuator described in (9).

(Function and effect)
According to the method for producing an electret film for an electrostatic actuator described in (9), after the first discharge is performed to charge one surface of the electret member, the patterned mask is placed on the other surface. By performing the second discharge with a voltage value larger than the discharge of 1, the patterned portion and the non-patterned portion of the metal mask can be charged with opposite polarities.

(A) is the schematic which showed the structure of the corona discharge processing apparatus for performing a corona discharge, (b) is the discharge process in the manufacturing method of the electret film for electrostatic actuators concerning 1st Embodiment of this invention. It is the schematic which showed. It is the schematic which showed each process of the manufacturing method of the electret film for electrostatic actuators which concerns on 1st Example of 1st Embodiment. It is the schematic which showed each process of the manufacturing method of the electret film for electrostatic actuators concerning 2nd Example of 1st Embodiment. It is the schematic which showed each process of the manufacturing method of the electret film for electrostatic actuators which concerns on 3rd Example of 1st Embodiment. It is the schematic which showed each process of the manufacturing method of the electret film for electrostatic actuators which concerns on 4th Example of 1st Embodiment. It is the schematic which showed each process of the manufacturing method of the electret film for electrostatic actuators which concerns on 5th Example of 1st Embodiment. (A) is the schematic which showed the process of the discharge in the manufacturing method of the electret film for electrostatic actuators concerning 2nd Embodiment of this invention, (b) is a figure for demonstrating the flow of an electron. It is the schematic which showed the process of the discharge in the modification of the manufacturing method of the electret film for electrostatic actuators concerning 2nd Embodiment. It is the schematic which showed each process of the manufacturing method of the electret film for electrostatic actuators concerning 3rd Embodiment of this invention.

Explanation of symbols

    DESCRIPTION OF SYMBOLS 1 ... Discharge electrode, 2 ... Flat plate electrode, 3 ... Electret member, 4 ... Voltage source, 5 ... Antistatic member, 21 ... Electrical conduction member, 22 ... Local conduction member, 23 ... Local conduction plate electrode, 51 ... Conductivity 52, insulating member, 53 ... conductive thin plate member, 54 ... insulating thin plate member, 100, 110 ... corona discharge treatment apparatus.

Claims (9)

The discharge in a discharge device comprising: a discharge electrode; a flat plate electrode disposed opposite to the discharge electrode; and a voltage source that generates a discharge by applying a voltage between the discharge electrode and the flat plate electrode. Between the electrode and the flat plate electrode, the electret member is disposed with a gap from the discharge electrode,
The state in which patterned antistatic member to protect the electret member from locally discharged in the predetermined region is in close contact with the object to be electret member, discharge line stomach by the discharge device, the target electret A method for producing an electret film for an electrostatic actuator, wherein a charged region of a member is charged together . The antistatic member is composed of a conductive member,
Laminating the antistatic member on the electret member;
Patterning the antistatic member into a predetermined pattern by lithography,
A step of discharging in the discharge device by disposing the stacked electret member and the surface of the antistatic member on the side of the antistatic member facing the discharge electrode, and grounding the antistatic member; ,
Removing the antistatic member from the electret member;
The manufacturing method of the electret film for electrostatic actuators of Claim 1 characterized by the above-mentioned. The antistatic member is composed of an insulating member,
Laminating the antistatic member on the electret member;
Patterning the antistatic member into a predetermined pattern by lithography,
In the discharge device, the step of discharging by placing the electret member stacked and the antistatic member side surface of the antistatic member facing the discharge electrode; and
Removing the antistatic member from the electret member;
The manufacturing method of the electret film for electrostatic actuators of Claim 1 characterized by the above-mentioned. The antistatic member is composed of a conductive member and an insulating member,
A step of laminating the conductive member and the insulating member on the electret member so that the antistatic member is laminated on the electret member;
Patterning the antistatic member into a predetermined pattern by lithography,
In the discharge device, the stacked electret member and the surface of the antistatic member on the side of the antistatic member are arranged to face the discharge electrode, and the conductive member layer of the antistatic member is grounded. A process of discharging,
Removing the antistatic member from the electret member;
The manufacturing method of the electret film for electrostatic actuators of Claim 1 characterized by the above-mentioned. The antistatic member is composed of a conductive thin plate member having a predetermined pattern,
Adhering the antistatic member to the electret member;
In the discharge device, a step of disposing the stacked electret member and the surface of the antistatic member on the side of the antistatic member facing the discharge electrode, and grounding the antistatic member and discharging.
The manufacturing method of the electret film for electrostatic actuators of Claim 1 characterized by the above-mentioned. The antistatic member is composed of an insulating thin plate member having a predetermined pattern,
Adhering the antistatic member to the electret member;
In the discharge device, the step of disposing the stacked electret member and the antistatic member side surface of the antistatic member facing the discharge electrode, and discharging,
The manufacturing method of the electret film for electrostatic actuators of Claim 1 characterized by the above-mentioned. The discharge device according to the above aspect of the present invention, comprising: a discharge electrode; a flat plate electrode disposed opposite the discharge electrode; and a voltage source that generates a discharge by applying a voltage between the discharge electrode and the flat plate electrode. Between the discharge electrode and the flat plate electrode, the electret member is disposed with a gap from the discharge electrode,
A local conductive member patterned so as to conduct electricity locally in a predetermined region is disposed in close contact with or electrically connected to the flat plate electrode and opposed to the discharge electrode,
Static, characterized in that the surface which is opposed to the discharge electrode of the local conductive member in close contact with the object to be electret member, have rows of discharge by the discharge device, charged collectively charged region of the object to be electret member Manufacturing method of electret film for electric actuator. The plate electrode is composed of a member that conducts electricity locally in a predetermined region,
The electret member is disposed in close contact with the surface of the flat plate electrode facing the discharge electrode,
Having a step of discharging by the discharge device,
The manufacturing method of the electret film for electrostatic actuators of Claim 7 characterized by the above-mentioned. A step of performing a first discharge at a first voltage value on the electret member by the discharge device;
When the first discharge of the electret member is performed, the surface facing the discharge electrode is brought into close contact with the flat plate electrode, and the antistatic member is not brought into close contact with the flat plate electrode of the electret member. A step of performing discharge at a second voltage value larger than the first voltage value by the discharge device while being in close contact with the other surface;
The manufacturing method of the electret film for electrostatic actuators of Claim 1 characterized by the above-mentioned.

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