JP4579423B2 - 試料を非破壊計測するためのシステム - Google Patents

試料を非破壊計測するためのシステム Download PDF

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Publication number
JP4579423B2
JP4579423B2 JP2000617398A JP2000617398A JP4579423B2 JP 4579423 B2 JP4579423 B2 JP 4579423B2 JP 2000617398 A JP2000617398 A JP 2000617398A JP 2000617398 A JP2000617398 A JP 2000617398A JP 4579423 B2 JP4579423 B2 JP 4579423B2
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sample
frequency
radiation
dopant
change
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JP2002544501A (ja
JP2002544501A5 (enExample
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リー，シング
ニコナハッド，メールダッド
チェン，キシング
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KLA Corp
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/21—Polarisation-affecting properties
    • G01N21/211—Ellipsometry
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
    • G01B11/0616—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating
    • G01B11/0641—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating with measurement of polarization
    • G01B11/065—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating with measurement of polarization using one or more discrete wavelengths
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J4/00—Measuring polarisation of light

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Analytical Chemistry (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Spectrometry And Color Measurement (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP2000617398A 1999-05-11 2000-05-03 試料を非破壊計測するためのシステム Expired - Fee Related JP4579423B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US09/310,017 1999-05-11
US09/310,017 US6268916B1 (en) 1999-05-11 1999-05-11 System for non-destructive measurement of samples
PCT/US2000/012008 WO2000068656A1 (en) 1999-05-11 2000-05-03 System for non-destructive measurement of samples

Publications (3)

Publication Number Publication Date
JP2002544501A JP2002544501A (ja) 2002-12-24
JP2002544501A5 JP2002544501A5 (enExample) 2007-07-19
JP4579423B2 true JP4579423B2 (ja) 2010-11-10

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JP2000617398A Expired - Fee Related JP4579423B2 (ja) 1999-05-11 2000-05-03 試料を非破壊計測するためのシステム

Country Status (3)

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US (1) US6268916B1 (enExample)
JP (1) JP4579423B2 (enExample)
WO (1) WO2000068656A1 (enExample)

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JP2002544501A (ja) 2002-12-24
US6268916B1 (en) 2001-07-31
WO2000068656A1 (en) 2000-11-16

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