JP4540415B2 - Method for manufacturing acoustic matching member - Google Patents

Method for manufacturing acoustic matching member Download PDF

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JP4540415B2
JP4540415B2 JP2004209277A JP2004209277A JP4540415B2 JP 4540415 B2 JP4540415 B2 JP 4540415B2 JP 2004209277 A JP2004209277 A JP 2004209277A JP 2004209277 A JP2004209277 A JP 2004209277A JP 4540415 B2 JP4540415 B2 JP 4540415B2
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film
acoustic matching
matching member
mold
hole
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JP2006029982A (en
JP2006029982A5 (en
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良文 田口
善一 谷垣
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Panasonic Corp
Panasonic Holdings Corp
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Panasonic Corp
Matsushita Electric Industrial Co Ltd
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Description

本発明は、超音波を利用して気体や液体(すなわち流体)の流量、流速を測定する超音波流量計の音響整合部材の製造方法に関するものである。 The present invention relates to the production how the acoustic matching member of the ultrasonic flowmeter for measuring the flow rate, the flow velocity of the gas or liquid by utilizing ultrasonic waves (i.e., fluid).

従来の超音波流量計に用いる超音波振動子としては、圧電体と、ケースと、整合部材とからなる構成のものが開示されている(例えば、特許文献1参照)。図5および図6に、前記特許文献1に記載された従来の超音波流量計に用いる超音波振動子の断面図および斜視図を示す。超音波振動子51は、圧電体53をケース52で覆い、ケース52の天面52aに音響整合部材54を接着した構成となっている。   As an ultrasonic transducer used in a conventional ultrasonic flowmeter, a configuration including a piezoelectric body, a case, and an alignment member is disclosed (for example, see Patent Document 1). 5 and 6 are a cross-sectional view and a perspective view of an ultrasonic transducer used in the conventional ultrasonic flowmeter described in Patent Document 1. FIG. The ultrasonic vibrator 51 has a configuration in which a piezoelectric body 53 is covered with a case 52 and an acoustic matching member 54 is bonded to a top surface 52 a of the case 52.

音響整合部材54は、中空球体と、前記中空球体を包囲する結合材料の混合物とから構成されており、内部にガラス中空球体と気泡とを有する樹脂材料からなる整合部材の構成が開示されている(例えば、特許文献2参照)。また、この種の音響整合部材54を成形する成形型に関して、例えば特許文献3に、樹脂中の気体を除去する構造の成形型が開示されている。
特開平11−118550号公報 特許2559144号公報 特開2003−236843号公報
The acoustic matching member 54 is composed of a hollow sphere and a mixture of binding materials surrounding the hollow sphere, and a configuration of an alignment member made of a resin material having a glass hollow sphere and bubbles inside is disclosed. (For example, refer to Patent Document 2). In addition, regarding a mold for molding this type of acoustic matching member 54, for example, Patent Document 3 discloses a mold having a structure for removing gas in a resin.
Japanese Patent Laid-Open No. 11-118550 Japanese Patent No. 2559144 JP 2003-236843 A

しかしながら、前記特許文献2に記載の従来の音響整合部材は、成形された音響整合部材中に気泡を多く含むため、音響整合部材の密度が安定せず、従って製造された超音波振動子51の性能が安定しないという課題を有する。   However, since the conventional acoustic matching member described in Patent Document 2 contains many bubbles in the molded acoustic matching member, the density of the acoustic matching member is not stable. There is a problem that the performance is not stable.

また、前記特許文献3に記載の従来の成形方法は、プレス構造の成形型を用いるため、この方法を音響整合部材の成形に用いようとした場合に、圧力で破損し易い中空球体を充填すると、中空球体が損傷するおそれがある。したがって、この成形方法を音響整合部材の成形に用いるには適しておらず、また厚いセラミック部材を通して細密に充填された中空球体の間の気体を除去する必要があるため、十分に気体を除去することができないという課題も有している。   In addition, since the conventional molding method described in Patent Document 3 uses a press-shaped mold, when this method is used for molding an acoustic matching member, it is filled with hollow spheres that are easily damaged by pressure. The hollow sphere may be damaged. Therefore, this forming method is not suitable for use in forming the acoustic matching member, and it is necessary to remove the gas between the hollow spheres closely packed through the thick ceramic member. There is also a problem that it cannot be done.

本発明は上記課題を解決するもので、性能の安定した音響整合部材を良好に成形することができる音響整合部材の製造方法を提供することを目的とするものである。 The present invention is intended to solve the above problems, it is an object to provide a manufacturing how acoustic matching member capable of satisfactorily forming a stable acoustic matching member performance.

上記目的を達成するために、本発明の請求項1に記載の音響整合部材の製造方法は、貫通孔およびこの貫通孔につながり貫通孔外周からの開口寸法が貫通孔の径より小さい空隙部が前記貫通孔の外周に設けられた成形型の貫通孔内壁面に略筒形状の多孔質のフィルムを配設して保持させる工程と、成形型により保持したフィルム内に中空球体を充填する工程と、中空球体が充填されたフィルム内に結合材料を供給し、この結合材料の供給時に、前記空隙部から前記フィルムを通して前記成形型の内部を減圧した状態で、前記結合材料を吸引しながらフィルム内に導入する工程と、前記中空球体と前記結合材料とを硬化させて音響整合部材用の成形物を得る工程とを有する。 To achieve the above object, a manufacturing method of the acoustic matching member according to claim 1 of the present invention, the through-hole and smaller than the diameter gap portion of the opening dimension through hole from the through-hole periphery Ri connected to the through hole A step of disposing and holding a substantially cylindrical porous film on the inner wall surface of the through hole of the molding die provided on the outer periphery of the through hole, and a step of filling the hollow sphere in the film held by the molding die And supplying a binding material into the film filled with hollow spheres, and at the time of supplying the binding material, the film is sucked from the gap through the film while sucking the binding material while the inside of the mold is decompressed. And a step of curing the hollow sphere and the binding material to obtain a molded product for an acoustic matching member.

また、本発明の請求項に記載の音響整合部材の製造方法は、フィルムから成形物を取り出した後に、切断して音響整合部材を得る。
また、本発明の請求項に記載の音響整合部材の製造方法は、成形物が硬化したフィルムごと成形型から取り出し、フィルムとともに成形物を切断して音響整合部材を得る。
Moreover, the manufacturing method of the acoustic matching member of Claim 2 of this invention cuts, after taking out a molding from a film, and obtains an acoustic matching member.
Moreover, the manufacturing method of the acoustic matching member of Claim 3 of this invention takes out from the shaping | molding die with the film in which the molded object hardened | cured, cuts a molded object with a film, and obtains an acoustic matching member.

また、本発明の請求項に記載の音響整合部材の製造方法は、成形型に配設したフィルム内に中空球体を充填する際に、成形型に振動を与える。
また、本発明の請求項に記載の音響整合部材の製造方法は、フィルムは、金属粉焼結体またはセラミック部材をコーティング処理したものであり、前記コーティング材料は、結合材料に対して低密着性を有する。
In the method for manufacturing an acoustic matching member according to the fourth aspect of the present invention, when the hollow sphere is filled in the film disposed in the mold, the mold is vibrated.
In the method for manufacturing an acoustic matching member according to claim 5 of the present invention, the film is obtained by coating a metal powder sintered body or a ceramic member, and the coating material has low adhesion to the binding material. Have sex.

また、本発明の請求項に記載の音響整合部材の製造方法は、フィルムは、フッ素樹脂繊維で構成されている In the method for manufacturing an acoustic matching member according to claim 6 of the present invention, the film is made of a fluororesin fiber .

上記請求項1〜に記載の製造方法を実行することで、中空球体を圧力で破損させることなく、中空球体を細密に充填させることができるとともに、細密に中空球体が充填された成形型内の残存気体および結合材料から発生した気体を速やかに除去して結合材料を吸引しながら、成形型内に結合材料を導入することができ、中空球体が細密かつ均一に結合した成形品を得ることも可能となる。また、フィルムは貫通孔の内壁面によって保持されるため、その変形を抑えることができ、気体の除去と成形品の良好な寸法精度をも両立できる。 By executing the manufacturing method according to any one of claims 1 to 6 , the hollow sphere can be finely filled without damaging the hollow sphere with pressure, and the hollow sphere is filled with the fine hollow sphere. The residual gas and the gas generated from the binding material can be quickly removed and the binding material can be sucked in while the binding material can be introduced into the mold to obtain a molded product in which the hollow spheres are closely and uniformly bonded. Is also possible. Moreover, since a film is hold | maintained by the inner wall face of a through-hole, the deformation | transformation can be suppressed and both the removal of gas and the favorable dimensional accuracy of a molded article can be made compatible.

以上のように、本発明の音響整合部材の製造方法によれば、細密に中空球体が充填された成形型内であっても、速やかに気泡を抜くことができ、したがって音響整合部材の密度が安定し、超音波振動子の性能を安定させることができる。 Density above manner, according to the manufacturing method of the acoustic matching member of the present invention, even in the finely mold hollow spheres filled quickly can remove bubbles, hence acoustic matching member Is stabilized, and the performance of the ultrasonic transducer can be stabilized.

以下、本発明の実施の形態について、図面を参照しながら説明する。
(実施の形態1)
図1(a)および(b)は、本発明の実施の形態1に係る音響整合部材の製造方法に用いる成形型を縦方向に2分割したものの平面断面図および正面断面図を示し、図2は音響整合部材の製造装置を簡略的に示す図、図3は、成形型から、音響整合部材の成形品を取り出す様子を示す縦断面図である。
Hereinafter, embodiments of the present invention will be described with reference to the drawings.
(Embodiment 1)
1 (a) and 1 (b) show a plan sectional view and a front sectional view of a mold used for the acoustic matching member manufacturing method according to Embodiment 1 of the present invention, which is divided into two in the longitudinal direction. FIG. 3 is a view schematically showing an apparatus for manufacturing an acoustic matching member, and FIG. 3 is a longitudinal sectional view showing a state in which a molded product of the acoustic matching member is taken out from a mold.

この図1(a)および(b)に示す、音響整合部材を成形するための成形型1は、真鍮材料にフッ素樹脂によるコーティングを施したものであるが、成形型1の材料として利用可能なものであればよく、この限りではない。また、成形型1の内部には、上下に貫通する貫通孔2が形成され、この貫通孔2の内壁面(後述する内壁保持部)は、必ずしも必要ではないが離型処理を施したものが好適である。貫通孔2は、成形品4の外形と略同じ形状をしており、その外周側に、断面半円形の溝部などからなる空隙部3が、貫通孔2につながって開口した状態で、貫通孔2の外周に対して等間隔あるいは不等間隔に複数設けられている。なお、この実施の形態では貫通孔2は成形型1内の中央部の1箇所だけに設けている場合を示しているが、成形型1内において上下方向に貫通する貫通孔2を複数箇所に設けても良い。   A molding die 1 for molding an acoustic matching member shown in FIGS. 1A and 1B is a brass material coated with a fluororesin, but can be used as a material for the molding die 1. Anything can be used, and not limited to this. Further, a through-hole 2 penetrating vertically is formed inside the mold 1, and an inner wall surface (an inner wall holding portion to be described later) of the through-hole 2 is not necessarily required but is subjected to a mold release process. Is preferred. The through-hole 2 has substantially the same shape as the outer shape of the molded product 4, and a through-hole is formed on the outer peripheral side of the through-hole 2 with a gap portion 3 including a groove portion having a semicircular cross section connected to the through-hole 2. Two or more are provided at equal intervals or non-uniform intervals with respect to the outer periphery of 2. In this embodiment, the through hole 2 is provided only at one central portion in the mold 1. However, the through hole 2 penetrating in the vertical direction in the mold 1 is provided at a plurality of positions. It may be provided.

成形型1における貫通孔2の内壁面は、略円筒形状のフィルム5により被覆され、このフィルム5内に、多数の中空球体7と、これらの中空球体7同士を結合させる結合材料9とが充填される(図1(a)および(b)においては、中空球体7および結合材料9が充填されている状態を示している)。このフィルム5は、フッ素樹脂繊維を引き伸ばして、結合材料9としての溶融樹脂が通過しない程度の通気性を持たせ、その内面形状が成形品4の外形となる略円筒形状に形成し、外面形状を貫通孔2の内壁保持部2aに沿って保持されるように構成したものである。また、このフィルム5は、肉厚が20μm〜1mmのものであるが、通気性と、結合材料9に対する低密着性、および強度が確保されれば、材料および肉厚はこの限りでなく、例えばセラミック部材や金属粉焼結体に、低密着性のコーティング材料を離型コーティング処理させたものであってもよい。   The inner wall surface of the through hole 2 in the mold 1 is covered with a substantially cylindrical film 5, and the film 5 is filled with a large number of hollow spheres 7 and a bonding material 9 for bonding the hollow spheres 7 to each other. (FIGS. 1A and 1B show a state in which the hollow sphere 7 and the binding material 9 are filled). This film 5 is formed by extending the fluororesin fiber so that the molten resin as the binding material 9 does not pass through, and is formed in a substantially cylindrical shape whose inner shape is the outer shape of the molded product 4. Is configured to be held along the inner wall holding portion 2 a of the through hole 2. The film 5 has a thickness of 20 μm to 1 mm. However, the material and the thickness are not limited as long as air permeability, low adhesion to the bonding material 9 and strength are ensured. A ceramic member or a metal powder sintered body may be obtained by subjecting a low adhesion coating material to a release coating treatment.

また、前記中空球体7は、中空構造を有する中空ガラスであり、それぞれ10μmから150μmの粒径を有しているが、中空構造を有するものであれば材料および粒径はこの限りではない。また、結合材料9として、この実施の形態では2液性のエポキシ樹脂を用いたが、もちろん接着が可能な材料であれば材質はこの限りではない。   The hollow sphere 7 is a hollow glass having a hollow structure and has a particle diameter of 10 μm to 150 μm. However, the material and the particle diameter are not limited as long as the hollow sphere 7 has a hollow structure. In this embodiment, a two-component epoxy resin is used as the bonding material 9. However, the material is not limited to this as long as the material can be bonded.

前記成形型1を用いて、音響整合部材のもととなる成形品4を製造する場合には、まず、成形型1の下面にフィルタ6を設置して、貫通孔2の底面を含めた成形型1の下面側を覆った後、フィルム5で囲まれた空間内に、中空球体7を細密に充填し、その後、成形型1の上面にもフィルタ8を設置する(図2参照)。このとき、貫通孔2内に保持したフィルム5内に中空球体7を細密に充填させるため、成形型1を加振装置上に設置して振動させながら中空球体7を充填する。もちろん、貫通孔1内に保持したフィルム5内に中空球体7を細密に充填できるなら、この方法に限るものではない。   When manufacturing the molded product 4 that is the basis of the acoustic matching member using the molding die 1, first, the filter 6 is installed on the lower surface of the molding die 1 and the molding including the bottom surface of the through hole 2 is performed. After covering the lower surface side of the mold 1, the hollow sphere 7 is finely filled in the space surrounded by the film 5, and then the filter 8 is also installed on the upper surface of the mold 1 (see FIG. 2). At this time, in order to finely fill the hollow spheres 7 into the film 5 held in the through holes 2, the hollow spheres 7 are filled while the mold 1 is placed on a vibration device and vibrated. Of course, the method is not limited to this method as long as the hollow spheres 7 can be finely filled in the film 5 held in the through hole 1.

次に、貫通孔2内に結合材料9を含浸させるために、吸引ブロック10、11を成形型2の上下両端に設置し、一方の吸引ブロック(例えば、下側の吸引ブロック11)に設けた樹脂供給口12を、結合材料9の入った容器13と連結する。同様に、他方の吸引ブロック(例えば、上側の吸引ブロック10)に設けた吸引口14を真空ポンプ15に接続し、この真空ポンプ15により容器13内の結合材料9を吸引する。   Next, in order to impregnate the bonding material 9 into the through-hole 2, the suction blocks 10 and 11 are installed at the upper and lower ends of the mold 2 and provided in one suction block (for example, the lower suction block 11). The resin supply port 12 is connected to the container 13 containing the binding material 9. Similarly, a suction port 14 provided in the other suction block (for example, the upper suction block 10) is connected to a vacuum pump 15, and the bonding material 9 in the container 13 is sucked by the vacuum pump 15.

なお、吸引時には結合材料9の粘度を低くすると、流動性が高くなり吸引しやすくなるが、粘度を低くしようとして結合材料9を高温にすると、結合材料9からの気体16の発生が増え、また結合材料9が硬化するため、流動性がある程度ありながら、結合材料9が硬化または発泡せず、かつ粘度が低くなる所定の温度で吸引することが好ましい。本実施の形態では、使用した結合材料9は硬化条件が80℃×2時間、その後150℃×2時間であるエポキシ樹脂を使用したため、結合材料9を60℃に保持した状態で吸引した。   If the viscosity of the bonding material 9 is lowered during suction, the fluidity becomes higher and the suction becomes easier. However, if the bonding material 9 is heated to a high temperature in order to reduce the viscosity, the generation of the gas 16 from the bonding material 9 increases. Since the bonding material 9 is cured, it is preferable that the bonding material 9 is sucked at a predetermined temperature at which the bonding material 9 is not cured or foamed and has a low viscosity, while having some fluidity. In the present embodiment, the bonding material 9 used was an epoxy resin having a curing condition of 80 ° C. × 2 hours and then 150 ° C. × 2 hours. Therefore, the bonding material 9 was sucked while being held at 60 ° C.

次に、成形型1から吸引ブロック10、11を取外し、成形型1を恒温槽内に設置し、成形型1を加熱して結合材料9を硬化させる。本実施の形態では加熱硬化工程おいて恒温槽を使用しているが、加熱硬化が可能であれば加熱方法はその限りではなく、電熱線や誘導加熱を用いて硬化させても良い。   Next, the suction blocks 10 and 11 are removed from the mold 1, the mold 1 is placed in a thermostat, and the mold 1 is heated to cure the bonding material 9. In the present embodiment, a thermostatic bath is used in the heat curing step, but the heating method is not limited as long as heat curing is possible, and the heat curing may be performed using heating wire or induction heating.

加熱硬化が終了した後、成形型1を冷却し、成形型1内の成形品4を取り出す。この成形品4をそのまま所定厚みに切削加工して、音響整合部材17を得る。
なお、本実施の形態においては、成形品4を切削加工することにより所定厚みを得たが、貫通孔2の厚みを音響整合部材17の1枚分の厚みとしておいてもよく、この場合には切断工程を省くことができる。
After the heat curing is completed, the mold 1 is cooled, and the molded product 4 in the mold 1 is taken out. The molded product 4 is cut into a predetermined thickness as it is to obtain the acoustic matching member 17.
In the present embodiment, the predetermined thickness is obtained by cutting the molded product 4. However, the thickness of the through hole 2 may be set to the thickness of one acoustic matching member 17, and in this case Can omit the cutting step.

かかる構成によれば、中空球体7を圧力で破損させることなく、中空球体7を細密に充填させることができるとともに、細密に中空球体7が充填された成形型1内の残存気体および結合材料9から発生した気体16を速やかに除去して結合材料9を吸引することができ、中空球体7が細密かつ均一に結合した成形品4を得ることができる。また、フィルム5は貫通孔2に複数設けられた内壁保持部2aによって保持されるため、その変形を抑えることができ、気体の除去と成形品4の良好な寸法精度を両立できる。かかる構成の成形品4は、細密に中空球体7が充填されていながら、密度も安定しているので、超音波振動子に用いる音響整合部材17として好適である。また、フィルム5は取外しが容易なため、通気性や離型性が悪化した際に容易に交換できる。
(実施の形態2)
図4は、本発明の実施の形態2における音響整合部材の製造工程(成形品4の取出工程)を示す図である。なお、上記実施の形態1と同じ構成要素については同じ符号を用い、説明を省略する。
According to such a configuration, the hollow sphere 7 can be finely filled without damaging the hollow sphere 7 with pressure, and the residual gas and the bonding material 9 in the mold 1 filled with the hollow sphere 7 finely can be obtained. The bonding material 9 can be sucked by quickly removing the gas 16 generated from the above, and the molded product 4 in which the hollow spheres 7 are finely and uniformly bonded can be obtained. Moreover, since the film 5 is hold | maintained by the inner-wall holding | maintenance part 2a provided in multiple numbers in the through-hole 2, the deformation | transformation can be suppressed and gas removal and the favorable dimensional accuracy of the molded article 4 can be made compatible. The molded product 4 having such a configuration is suitable as the acoustic matching member 17 used for the ultrasonic vibrator because the molded product 4 is densely filled with the hollow spheres 7 and has a stable density. Moreover, since the film 5 is easy to remove, it can be easily replaced when the air permeability and releasability deteriorate.
(Embodiment 2)
FIG. 4 is a diagram showing an acoustic matching member manufacturing process (a process of taking out the molded product 4) in the second embodiment of the present invention. Note that the same components as those in the first embodiment are denoted by the same reference numerals, and description thereof is omitted.

この実施の形態2においても、上記実施の形態1に記載の製造方法と同様に、成形型1の貫通孔2における内壁保持部2aによって保持したフィルム5内に中空球体7を充填した後、結合材料9を吸引し、これらの中空球体7および結合材料9を加熱して結合材料9を硬化させる。しかし、この実施の形態2では、この後に、フィルム5と成形品4とを、一緒に成形型1から取り出し、その後、フィルム2と成形品4とが付着した状態のままで所定厚みに切削加工を行い、音響整合部材17を得る。   In the second embodiment, similarly to the manufacturing method described in the first embodiment, the hollow sphere 7 is filled in the film 5 held by the inner wall holding portion 2a in the through hole 2 of the mold 1 and then bonded. The material 9 is sucked, and the hollow sphere 7 and the bonding material 9 are heated to cure the bonding material 9. However, in the second embodiment, after that, the film 5 and the molded product 4 are taken out from the mold 1 together, and then cut into a predetermined thickness while the film 2 and the molded product 4 remain attached. To obtain the acoustic matching member 17.

なお、本実施の形態2において、成形品4を切削加工することにより所定厚みを得たが、貫通孔2の厚みを音響整合部材17の1枚分の厚みとしておくことで切断工程を省くことができる。   In the second embodiment, the predetermined thickness is obtained by cutting the molded product 4, but the cutting process is omitted by setting the thickness of the through-hole 2 to the thickness of one acoustic matching member 17. Can do.

かかる構成によれば、貫通孔2の内壁保持部2aによって部分的に支持されたフィルム5を、成形型1の貫通孔2から抜き取るので、例えば抜きテーパの無い直円筒の貫通孔2であっても取り出された成形品4に傷が入らず、取出し後の成形品4や音響整合部材17の研磨や表面処理が必要ない。したがって、製造工程における手間や時間を少なめに抑えることができて、製造コストを低減させることができる。   According to such a configuration, since the film 5 partially supported by the inner wall holding portion 2a of the through hole 2 is extracted from the through hole 2 of the mold 1, for example, the through hole 2 is a straight cylinder without a drawing taper. In addition, the taken-out molded product 4 is not damaged, and polishing and surface treatment of the molded product 4 and the acoustic matching member 17 after the removal are not necessary. Therefore, labor and time in the manufacturing process can be reduced to a small extent, and the manufacturing cost can be reduced.

本発明の音響整合部材の製造方法は、整合部材の内部に気泡を含まず均一な音響整合部材の製造方法として用いることができるだけでなく、フィラー等の充填材を含有する樹脂材料の成形方法としても適用できる。 Method for producing acoustic matching member of the present invention not only can be used as a method for producing an internal uniform free of air bubbles in the acoustic matching member of the matching member, the molding method of a resin material containing a filler of fillers such as It can also be applied.

(a)および(b)は、本発明の実施の形態1、2に係る音響整合部材の製造方法に用いる成形型(縦方向に2分割したもの)の平面断面図および正面断面図(A) And (b) is a plane sectional view and a front sectional view of a mold (those divided into two in the longitudinal direction) used in the manufacturing method of the acoustic matching member according to Embodiments 1 and 2 of the present invention. 本発明の実施の形態1、2に係る音響整合部材の製造方法に用いる製造装置を簡略的に示す図The figure which shows simply the manufacturing apparatus used for the manufacturing method of the acoustic matching member which concerns on Embodiment 1, 2 of this invention. 本発明の実施の形態1に係る音響整合部材の製造方法において音響整合部材の成形品を取り出す様子を示す縦断面図The longitudinal cross-sectional view which shows a mode that the molded article of an acoustic matching member is taken out in the manufacturing method of the acoustic matching member which concerns on Embodiment 1 of this invention. 本発明の実施の形態2に係る音響整合部材の製造方法において音響整合部材の成形品を取り出す様子を示す縦断面図The longitudinal cross-sectional view which shows a mode that the molded article of an acoustic matching member is taken out in the manufacturing method of the acoustic matching member which concerns on Embodiment 2 of this invention. 従来の超音波振動子の斜視図A perspective view of a conventional ultrasonic transducer 同従来の超音波振動子の断面図Cross-sectional view of the conventional ultrasonic transducer

符号の説明Explanation of symbols

1 成形型
2 貫通孔
2a 内壁保持部(貫通孔内壁面)
3 空隙部
4 成形品
5 フィルム
6、8 フィルタ
7 中空球体
9 結合材料
10、11 吸引ブロック
12 樹脂供給口
13 容器
14 吸引口
15 真空ポンプ
16 気体
17 音響整合部材
DESCRIPTION OF SYMBOLS 1 Mold 2 Through-hole 2a Inner wall holding | maintenance part (through-hole inner wall surface)
DESCRIPTION OF SYMBOLS 3 Cavity part 4 Molded product 5 Film 6, 8 Filter 7 Hollow sphere 9 Bonding material 10, 11 Suction block 12 Resin supply port 13 Container 14 Suction port 15 Vacuum pump 16 Gas 17 Acoustic matching member

Claims (6)

貫通孔およびこの貫通孔につながり貫通孔外周からの開口寸法が貫通孔の径より小さい空隙部が前記貫通孔の外周に設けられた成形型の貫通孔内壁面に略筒形状の多孔質のフィルムを配設して保持させる工程と、
成形型により保持したフィルム内に中空球体を充填する工程と、
中空球体が充填されたフィルム内に結合材料を供給し、この結合材料の供給時に、前記空隙部から前記フィルムを通して前記成形型の内部を減圧した状態で、前記結合材料を吸引しながらフィルム内に導入する工程と、
前記中空球体と前記結合材料とを硬化させて音響整合部材用の成形物を得る工程とを有することを特徴とする音響整合部材の製造方法。
The through holes and the porous substantially cylindrical shape into the mold through-hole wall face of which is provided on the outer circumferential opening dimension is smaller than the diameter gap portion is the through hole of the through hole of the through hole periphery Ri connected to the through hole Arranging and holding the film;
Filling the hollow spheres in the film held by the mold; and
A bonding material is supplied into a film filled with hollow spheres, and when the bonding material is supplied, the bonding material is sucked into the film while sucking the bonding material in a state where the inside of the mold is decompressed through the film from the gap. Introducing the process;
And a step of curing the hollow sphere and the binding material to obtain a molded product for the acoustic matching member.
フィルムから成形物を取り出した後に、切断して音響整合部材を得ることを特徴とする請求項1に記載の音響整合部材の製造方法。   The method for producing an acoustic matching member according to claim 1, wherein the acoustic matching member is obtained by cutting after removing the molded product from the film. 成形物が硬化したフィルムごと成形型から取り出し、フィルムとともに成形物を切断して音響整合部材を得ることを特徴とする請求項1に記載の音響整合部材の製造方法。   The method for producing an acoustic matching member according to claim 1, wherein the molded product is taken out of the mold together with the cured film, and the molded product is cut together with the film to obtain an acoustic matching member. 成形型に配設したフィルム内に中空球体を充填する際に、成形型に振動を与えることを特徴とする請求項1〜3の何れか1項に記載の音響整合部材の製造方法。   The method for producing an acoustic matching member according to any one of claims 1 to 3, wherein the mold is vibrated when the hollow sphere is filled in the film disposed in the mold. フィルムは、金属粉焼結体またはセラミック部材をコーティング処理したものであり、前記コーティング材料は、結合材料に対して低密着性を有することを特徴とする請求項1〜4の何れか1項に記載の音響整合部材の製造方法。   5. The film according to claim 1, wherein the film is obtained by coating a metal powder sintered body or a ceramic member, and the coating material has low adhesion to the binding material. The manufacturing method of the acoustic matching member of description. フィルムは、フッ素樹脂繊維で構成されていることを特徴とする請求項1〜4の何れか1項に記載の音響整合部材の製造方法。   The method for manufacturing an acoustic matching member according to any one of claims 1 to 4, wherein the film is made of a fluororesin fiber.
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JP2001260149A (en) * 1994-01-27 2001-09-25 “ドリー・ペー”ライセンシング・ベー・ベー Method for housing electronic part in cured plastic case
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JP2003166863A (en) * 2001-11-30 2003-06-13 Matsushita Electric Ind Co Ltd Matching member and its manufacturing method
JP2004129145A (en) * 2002-10-07 2004-04-22 Matsushita Electric Ind Co Ltd Manufacturing method for matching material and ultrasonic sensor using it
JP2004179954A (en) * 2002-11-27 2004-06-24 Matsushita Electric Ind Co Ltd Matching material, its manufacturing method, and ultrasonic sensor using the same

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JP2001260149A (en) * 1994-01-27 2001-09-25 “ドリー・ペー”ライセンシング・ベー・ベー Method for housing electronic part in cured plastic case
JP2002058099A (en) * 2000-08-11 2002-02-22 Murata Mfg Co Ltd Method for producing acoustic matching layer, acoustic matching layer produced by the method, ultrasonic sensor comprising the layer, and electronic apparatus using the layer
JP2003166863A (en) * 2001-11-30 2003-06-13 Matsushita Electric Ind Co Ltd Matching member and its manufacturing method
JP2004129145A (en) * 2002-10-07 2004-04-22 Matsushita Electric Ind Co Ltd Manufacturing method for matching material and ultrasonic sensor using it
JP2004179954A (en) * 2002-11-27 2004-06-24 Matsushita Electric Ind Co Ltd Matching material, its manufacturing method, and ultrasonic sensor using the same

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