JP4515301B2 - Electric double layer capacitor manufacturing method and manufacturing apparatus thereof - Google Patents

Description

  The present invention relates to a method for manufacturing an electric double layer capacitor and an apparatus for manufacturing an electric double layer capacitor used in the manufacturing method.

  2. Description of the Related Art In recent years, attention has been focused on application technologies of electric double layer capacitors that are excellent in high-speed charge / discharge, charge / discharge depth, and charge / discharge cycle characteristics as various power storage elements. The electric double layer capacitor includes a laminate composed of a positive electrode body, a negative electrode body, and a separator interposed therebetween, a container for sealing the laminate together with an electrolyte solution, and a pair of electrodes disposed outside the container. And a pair of terminals are connected to a bundling portion of the positive and negative electrodes having the same polarity.

  A container is formed from the resin film of the laminated structure containing the intermediate | middle layer of metal foil (refer patent document 1, patent document 2, reference). It is also known that non-porous carbon is used instead of porous activated carbon as the main raw material of the polarizable electrode (Non-Patent Document 1).

Non-porous carbon is obtained by dry distillation and alkali activation of graphitized charcoal, and has a specific surface area of 100 m ² / g or less, which is so small that it can be regarded as almost only the external specific surface area, and the interlayer distance of the carbon structure is small. It is 0.36 to 0.37 nm graphite-like carbon. For an electric double layer capacitor using a polarizable electrode formed of such non-porous carbon as a main raw material, capacitance is generated for the first time by charging. Before charging, even though non-porous carbon does not have pores that can take in various electrolyte ions, solvents, N ₂ gas, etc., the capacitance is generated by charging because of the solvent between the layers of the carbon structure. It is presumed that this is due to intercalation of electrolyte ions accompanied by (solvent co-intercalation).
JP 2002-299168 A JP2003-124078 "High energy density electric double layer capacitor" (Applied Physics Vol. 37, No. 8, 2004)

  An object of the present invention is to provide an electric double layer capacitor manufacturing method and an apparatus for manufacturing the electric double layer capacitor capable of sufficiently extracting the characteristics of the carbonaceous material used as the main raw material of the polarizable electrode in consideration of such a conventional technique. .

The first invention includes a step of forming a polarizable electrode using a carbonaceous material as a main raw material and attaching a current collector to the carbon electrode to form a positive electrode body and a negative electrode body, and a positive electrode body, a negative electrode body, and a separator. A step of composing a predetermined laminated body, a step of joining a pair of terminals to the bundling portions of the same polarity as lead portions of the positive electrode body and the negative electrode body, and a state in which a part of the pair of terminals protrudes from the laminated body A method of manufacturing an electric double layer capacitor comprising: sequentially impregnating an electrolyte solution injected in a container and impregnating the electrolyte solution; and applying a voltage between a pair of terminals to perform electric field activation of a carbon electrode. in, comprising the step, heating to above the temperature 200 ° C. the following reduced pressure vacuum 10 ^-5 Pa a positive electrode and the negative electrode body was carried into a vacuum drying oven before composing the stack, the positive electrode body and the negative electrode body In a vacuum drying oven Heating input to a temperature 200 ° C. or higher in the following reduced pressure vacuum 10 ^-5 Pa in the processing of vacuum drying is completed the positive electrode body and the negative electrode body normal pressure low dew point inert gas before unloading Filling the inside of the vacuum drying furnace, and filling the furnace with an inert gas having a normal pressure and low dew point, the vacuum drying furnace and the interior are maintained in an inert atmosphere having a normal pressure and low dew point, A vacuum drying furnace for removing inert gas from the glove box through a passage connecting between the glove box in which a step of composing a predetermined laminate from the positive electrode body, the negative electrode body, and the separator is performed, and a valve for opening and closing the passage. It is characterized by supplying to .

According to a second aspect of the present invention, in the electric double layer capacitor manufacturing apparatus used in the method for manufacturing the electric double layer capacitor according to the first aspect of the invention, the vacuum drying furnace is a means for depressurizing the inside of the furnace to a degree of vacuum of 10 ^-5 Pa or less. And a means for heating the inside of the furnace to a temperature of 200 ° C. or higher, and the vacuum drying furnace comprises means for filling the furnace with an inert gas having a normal pressure and a low dew point. A means for filling the inert gas is a glove box in which a vacuum drying furnace and the inside are maintained in an inert atmosphere with a low dew point at normal pressure, and a step of composing a predetermined laminate from the positive electrode body, the negative electrode body, and the separator is performed. The inert gas is supplied to the vacuum drying furnace from the glove box through a passage connecting the two and a valve for opening and closing the passage .

A third invention is a manufacturing apparatus for an electric double layer capacitor according to the second invention, a vacuum drying oven, an electric double, characterized in that it is connected via a sealable door to pass box glove box Multilayer capacitor.

A fourth invention is a manufacturing apparatus for an electric double layer capacitor according to the second invention, a vacuum drying furnace, characterized in that it is configured therein by using the pass box glove box.

A fifth invention is a manufacturing apparatus for an electric double layer capacitor according to the second invention, the means for reducing the pressure in the furnace below the vacuum degree of 10 ^-5 Pa is characterized in that it comprises a turbo molecular pump, a.

In the first invention, impurities such as moisture can be sufficiently removed from the positive electrode body and the negative electrode body by the step of heating to a temperature of 200 ° C. or higher in a reduced pressure state with a degree of vacuum of 10 ⁻⁵ Pa or less. As a result, generation of decomposition products due to impurities is reduced in the electric field activation step, and the characteristics of the carbonaceous material can be maximized by electric field activation. That is, a high performance electric double layer capacitor can be manufactured. As the carbonaceous material forming the polarizable electrode, it is conceivable to use non-porous carbon or porous activated carbon.

And, by filling an inert gas having a low dew point (for example, a dew point temperature of −90 ° C.), the inside of the furnace is returned to normal pressure, so that the positive electrode body and the negative electrode body are maintained in a sufficiently dry state. Can be carried out to the next step.

In the second invention, the vacuum drying furnace enables heating to a temperature of 200 ° C. or higher in a reduced pressure state with a vacuum degree of 10 ⁻⁵ Pa or less, and sufficiently removes impurities such as moisture from the positive electrode body and the negative electrode body. be able to.

When vacuum drying (treatment of heating to a temperature of 200 ° C. or higher in a reduced pressure state with a vacuum degree of 10 ⁻⁵ Pa or lower) is completed, an inert gas having a low dew point (for example, a dew point temperature of −90 ° C.) is filled. Thus, the inside of the furnace is returned to the normal pressure, so that the positive electrode body and the negative electrode body can be carried out while maintaining a sufficiently dry state.

Then, by opening and closing the valve, for the glove box can be filled with low dew point inert gas atmospheric pressure in the furnace, it is unnecessary to provide a dedicated facility for supplying an inert gas into a vacuum drying oven.

In the third invention, after the vacuum drying treatment, the positive electrode body and the negative electrode body can be transferred from the vacuum drying furnace to the glove box through the pass box without touching the outside air.

In a fourth aspect of the present invention, (in the following reduced pressure vacuum 10 ^-5 Pa, the process of heating to a temperature 200 ° C. or higher) vacuum drying, since performed inside the Path box, dedicated vacuum drying oven is not necessary .

In the fifth invention, the inside of the furnace can be depressurized to a vacuum degree of 10 ⁻⁵ Pa or less by the turbo molecular pump. The turbo molecular pump has a limited operating pressure, and an auxiliary pump is used.

  FIG. 1 illustrates an apparatus 10 for processing electric field activation and the like in the manufacturing process of an electric double layer capacitor. The tank 11 is installed inside the glove box together with the processing means of each process. The inside of the glove box is managed (maintained) in an inert atmosphere having a low dew point at normal pressure (for example, a dew point temperature of −90 ° C.).

  In FIG. 1, reference numeral 21 denotes a container for accommodating a laminated body 22, which is formed from a resin film (laminate film) having a laminated structure including an intermediate layer of metal foil. The laminate 22 is composed of a positive electrode body and a negative electrode body, and a separator interposed therebetween. The positive electrode body and the negative electrode body are composed of a polarizable electrode and a current collector. The polarizable electrode is formed using non-porous carbon (carbonaceous material) as a main raw material. The current collector is formed from a high-purity aluminum foil and is attached to a polarizable electrode (carbon electrode). The separator is made of 100 μm glass fiber in a compressed state, and is set to a thickness equal to or greater than that of the polarizable electrode in order to provide a retainer function for the electrolyte solution. The current collectors of the polarizable electrodes are bundled with the same polarity, and the terminals 24 corresponding to the polarities are joined to the respective binding portions. The pair of terminals 24 is formed from a high purity aluminum plate.

  The tank 11 that stores the container 21 in a predetermined state includes an opening 12 for piping connected to a vacuum pump, a passage 13 that opens the inside of the tank 11 to a glove box, and a valve 13a that opens and closes this. When the valve 13a and the lid 14 are closed, the inside of the tank 11 is maintained in a highly sealed state. Reference numeral 15 denotes a connector connected to the charging / discharging device. In the tank 11, a pair of terminals 24 protruding from the opening of the container 21 are detachably connected via a wire (cord) opening extending from the connector 15. Is done. Reference numeral 25 denotes a jig that holds the container 21 in a predetermined state, and is provided with plates 28 and 29 that are screwed onto the plate 26 so that the fastening bolts 27 can be advanced and retracted, and are slidably supported on the fastening bolts 27. When the spring 30 is interposed between the plates 28 and 29 and the tightening bolt 27 is screwed from the initial position, the spring 30 between the plates 28 and 29 is compressed, and the pressing force applied to the container 21 between the plates 26 and 29 ( Surface pressure). Although not shown, the tank 11 includes equipment for injecting the electrolyte solution into the container 21 and equipment for recovering excess electrolyte solution in the container 21.

  The electrolyte solution is selected from an ionic liquid group consisting of cations such as imidazolium and various anions. An ionic liquid is a relatively new developed substance, and as such, has both the properties of an electrolyte and a solvent.

The electric double layer capacitor has the following steps: (1) forming a polarizable electrode using non-porous carbon as a main raw material and attaching a current collector to the carbon electrode to create a positive electrode body and a negative electrode body; (2) a positive electrode body And a step of placing the negative electrode body in a vacuum drying furnace and heating to a temperature of 200 ° C. or higher in a reduced pressure state with a degree of vacuum of 10 ⁻⁵ Pa or less, (3) a step of composing the laminate 22 from the positive electrode body, the negative electrode body, and the separator; (4) a step of joining a pair of terminals 24 to the bundling portions of the same polarity as lead portions of the positive electrode body and the negative electrode body, and (5) a state in which a part of the pair of terminals 24 protrudes from the laminated body 22 And (6) a step of applying a voltage between the pair of terminals 24 to activate the carbon electrode before the container is sealed.

In (1), the non-porous carbon is graphite-like carbon having a specific surface area of 100 m ² / g or less and a carbon structure interlayer distance of 0.36 to 0.37 nm, and graphitizable coke or pitch (precursor). Is obtained by a process (alkali activation) in which caustic (for example, KOH) is mixed with the raw coal and heated to 650-850 ° C. in an inert atmosphere. When carbonization is not performed, porous activated carbon is generated.

  Non-porous carbon is processed into a sheet-like form after being subjected to treatments such as washing and pulverization by a normal method, and a conductive material (for example, carbon black) and a binder (for example, polytetrafluoroethylene) are added and kneaded. A positive electrode body and a negative electrode body are formed by forming a polarizable electrode and attaching a current collector to the carbon electrode.

In (2), the positive electrode body and the negative electrode body are placed in a vacuum drying furnace and heated to a temperature of 200 ° C. or higher in a reduced pressure state with a vacuum degree of 10 ⁻⁵ Pa or lower. Turbo molecular pumps are used to ensure extreme pressure reduction. After this treatment (vacuum drying) is completed, the positive and negative electrode bodies are filled with an inert gas having a low dew point (for example, a dew point temperature of −90 ° C.) to return the inside of the furnace to normal pressure before carrying it out of the vacuum drying furnace. To do. The glass fiber separator is also put in a vacuum drying furnace together with the positive electrode body and the negative electrode body and heated to a temperature of 200 ° C. or higher in a reduced pressure state with a vacuum degree of 10 ⁻⁵ Pa or lower.

  In (3), the laminate 22 is composed of a positive electrode body, a negative electrode body, and a separator interposed therebetween. The laminated body 22 after the composition is wound and bound so as not to be separated in the subsequent steps. In (4), the current collectors of the laminate 22 are bundled with the same polarity, and the terminals 24 corresponding to the polarities are welded to the binding portions.

  In (5), the laminated body 22 is housed in the container 21 in a state in which part of the pair of terminals 24 (front end side) protrudes from the opening, and is stored in the tank 11 of FIG. The inside of the sealed tank 11 is depressurized to 10 Pa or less, and when a predetermined time elapses while maintaining a depressurized state of 10 Pa or less, the tank is filled with an inert gas having a low dew point (for example, a dew point temperature of −90 ° C.). 11 is returned to normal pressure, and the electrolyte solution is injected into the container 21 while maintaining the normal pressure state. After the injection, the process of maintaining the inside of the tank 11 in a reduced pressure state of 10 Pa or less and the process of maintaining the normal pressure state by filling with an inert gas having a low dew point are alternately repeated. As a result, the electrolyte solution can sufficiently penetrate the carbon electrode (polarizable electrode) and the separator, and the impregnation time is also shortened.

In (6), primary electric field activation and secondary electric field activation are processed. The primary electric field activation is a charge / discharge cycle that is performed while an open container 21 containing the laminate 22 is placed in the tank 11 and the inside of the sealed tank 11 is maintained in a reduced pressure state of 10 Pa or less, and the current density is The voltage is gradually increased over a long period of time by constant current charging less than a predetermined value (for example, 1 mA / cm ² ), and the voltage is maintained when a predetermined maximum voltage that can be applied (for example, 3 V to 5 V) is reached. However, when a predetermined time elapses, the voltage is reduced to 0 V by constant current discharge. The secondary electric field activation includes a charge cycle performed while maintaining the inside of the sealed tank 11 in an inert atmosphere having a low pressure dew point (for example, a dew point temperature of −90 ° C.) and a reduced pressure state (inactive) of 10 Pa or less. And a charge / discharge cycle performed while maintaining the atmosphere) alternately, a predetermined number of times (for example, 2 to 15 times), and in each charge / discharge cycle, the current density is a predetermined value (for example, 1 mA / cm ² ). With the above constant current charging, when the voltage is increased in a short time and reaches a predetermined maximum voltage that can be applied (for example, 3 V to 5 V), when the predetermined time has passed while maintaining the voltage, constant current discharge is performed. Reduce the voltage to 0V.

  In the final charge / discharge cycle, which is performed while maintaining the inside of the sealed tank 11 of the secondary electric field activation in an inert atmosphere with a low pressure dew point at normal pressure, a predetermined maximum voltage that can be applied is maintained for a certain period of time. Thereafter, in a state where the lid 14 of the tank 11 is opened, the spring bolt of the jig 25 (see FIG. 1) is screwed by a predetermined amount from the initial position, thereby increasing the spring force of the spring 30 and increasing the inside of the container 21. The excess electrolyte solution is recovered. Thereafter, the opening of the container 21 is sealed in a discharge state at a voltage of 0.

Non-porous carbon is graphite-like carbon having a specific surface area of 100 m ² / g or less and a carbon structure interlayer distance of 0.36 to 0.37 nm, and can take in electrolyte ions, solvents, N ₂ gas, and the like before charging. Although there are no pores of the degree, when the applied voltage exceeds the threshold value due to charging, an electric double layer is formed between the layers due to the intrusion (intercalation) of the electrolyte ions with the solvent into the carbon structure. Capacitance is generated. The solvent mediates electrolyte ions in and out. Intercalation increases the distance between the layers, and the volume of the carbon electrode expands. This expansion increases and decreases according to the applied voltage.

  Since the primary electric field activation is based on long-time charging, intercalation can efficiently penetrate between the layers of the carbon structure. Even when a gaseous decomposition product is generated with charging, the solubility of the gaseous decomposition product also decreases under a reduced pressure environment of 10 Pa or less, so that the gaseous decomposition product is quickly released from the electrolyte solution. Can be made. In the secondary electric field activation, each cycle is charged for a relatively short time. By repeating this, the increase and decrease of the expansion of the carbon electrode (polarizable electrode) is stabilized. The solvent that mediates the entry / exit of the electrolyte ions efficiently brings out the gaseous decomposition products adsorbed in the inner part of the carbon structure, and promotes the removal of the gaseous decomposition products accompanying charging. In a reduced pressure environment of 10 Pa or less, the gaseous decomposition product is rapidly released from the electrolyte solution. In a normal pressure environment of an inert atmosphere, penetration of the solvent that mediates the entry and exit of electrolyte ions is promoted.

  In the manufacturing method that includes the steps (1) to (6), impurities such as moisture are sufficiently removed by the step (2). The generation of materials is reduced, and the characteristics of non-porous carbon can be maximized by electric field activation. That is, a high performance electric double layer capacitor can be manufactured.

FIG. 2 is a block diagram for explaining a vacuum drying furnace used in the step (2), 40 is a furnace body, means 45 for depressurizing (evacuating) the inside of the furnace to a degree of vacuum of 10 ⁻⁵ Pa or less, furnace Means (not shown) for heating the interior to a temperature of 200 ° C. or higher, and means 60 for filling the furnace with an inert gas having a normal pressure and a low dew point.

Reference numeral 41 denotes a turbo molecular pump that exhausts air by spinning blades at high speed, 42 is a trap, and 43 is a rotary pump (vacuum pump). A means 45 for reducing the pressure (vacuum) to a degree of vacuum of 10 ⁻⁵ Pa or less is configured. Since the turbo molecular pump 41 has a limited operating pressure, a rotary pump 43 is provided as an auxiliary pump.

When the pressure in the furnace is reduced to 10 ^-5 Pa or less, only the rotary pump 43 is operated first. When the inside of the furnace reaches a predetermined degree of vacuum, the operation of the turbo molecular pump 41 is started while maintaining the rotary pump 43 in an operating state in order to further reduce the pressure to a target degree of vacuum (10 ⁻⁵ Pa or less). .

61 is a passage for connecting the furnace body 40 and the glove box (see FIG. 3), 62 is a valve for opening and closing the passage 61, and thereby, an inert gas having a normal pressure and a low dew point in the furnace. The means 60 for filling is configured. In FIG. 3, 50 is a glove box that houses the processing means of each process including the apparatus 10 (see FIG. 1), 51 is a pass box, and the furnace body 40 is disposed outside the glove box 50, and passes It is connected to the box 51 via an opening / closing door.

  52 is an opening / closing door of the pass box 51 with respect to the inside of the glove box 50, 53 is a work glove mounting portion (opens a hand slot on the outer wall of the glove box 50), and 54 is an operating glove box. It is a window part, and the operation | work and operation required for each process can be performed from the outside of the glove box 50 using these. The required number of gloves and windows 54 are arranged in the glove box 50.

In the step (2), the composition material (the positive electrode body, the negative electrode body, and the glass fiber separator) of the laminated body 22 is placed in the furnace from the opening and closing door. In the sealed state of the furnace body 40, the inside of the furnace is depressurized to 10 ⁻⁵ Pa or less by the rotary pump 43 and the turbo molecular pump 41. Then, the inside of the furnace is heated to a temperature of 200 ° C. or higher in a reduced pressure state with a degree of vacuum of 10 ⁻⁵ Pa or less. When this process is completed, the valve 62 of the passage 61 is opened, and the furnace is filled with an inert gas having a normal pressure and a low dew point from the glove box 50. Thereafter, the opening / closing door 52 of the pass box 51 and the opening / closing door for carrying out the furnace body 40 are opened, the composition material is transferred to the pass box 51 and carried into the glove box 50.

According to such a vacuum drying furnace, heating at a temperature of 200 ° C. or higher is possible in a reduced pressure state with a degree of vacuum of 10 ⁻⁵ Pa or less, and impurities such as moisture can be sufficiently removed from the composition material. After this treatment (vacuum drying), the inside of the furnace is returned to normal pressure by an inert gas having a low dew point, so that it is possible to carry them out while maintaining a sufficiently dry state of the composition material. At this time, since the furnace body 40 is connected to the pass box 51 via an opening / closing door, the composition material can be carried into the glove box 50 from the furnace through the pass box 51 without touching the outside air. Since the inert gas for filling the furnace is supplied from the glove box 50 through the passage 61 and the valve 62, there is no need to provide a dedicated facility for supplying the inert gas to the vacuum drying furnace. It is.

FIG. 4 is a block diagram for explaining another vacuum drying furnace used in the step (2). Reference numeral 40A denotes a furnace body, and means 45A for depressurizing (evacuating) the inside of the furnace to a degree of vacuum of 10 ⁻⁵ Pa or less. , A means (not shown) for heating the inside of the furnace to a temperature of 200 ° C. or higher, and a means 60A for filling the furnace with an inert gas having a low dew point at normal pressure. The furnace main body 40A is not disposed outside the glove box, but is configured inside using a pass box.

Reference numeral 41 denotes a turbo molecular pump that exhausts air by spinning blades at high speed, 42 is a trap, and 43 is a rotary pump (vacuum pump). Means 45A for depressurizing (evacuating) the inside to a degree of vacuum of 10 ⁻⁵ Pa or less is configured. A three-way switching valve 46 is interposed in the circuit 45A. The three-way switching valve 46 can be switched between two positions: a position where the ports (a)-(b) communicate with each other and a position where the ports (a)-(c) communicate with each other.

When the pressure in the furnace is reduced to 10 ^-5 Pa or less, the ports (a)-(b) of the three-way selector valve 46 are communicated. In this state, only the rotary pump 43 is operated first as in the vacuum drying furnace of FIG. When the inside of the furnace reaches a predetermined degree of vacuum, the operation of the turbo molecular pump 41 is started while maintaining the rotary pump 43 in an operating state in order to further reduce the pressure to the target degree of vacuum (10 ⁻⁵ Pa or less). . When the ports (a)-(c) of the three-way switching valve 46 are communicated, the circuit 45A that passes through the turbo molecular pump 41 is switched to the circuit 47 that does not pass through. Therefore, based on the operation of the rotary pump 43 only, Can be depressurized to a predetermined degree of vacuum. As a result, in a vacuum drying furnace, a process that requires a vacuum of 10 ⁻⁵ Pa or less, such as a positive electrode body and a negative electrode body, and a process that does not require that much vacuum, such as the terminal 24 (see FIG. 1). It becomes possible to support both. 61A is a passage that connects the pass box (furnace body 40A) and the glove box, and 62A is a valve that opens and closes the passage. By these, the furnace is filled with an inert gas at a normal pressure and a low dew point. A means 60A is configured.

In the step (2), the composition material (the positive electrode body, the negative electrode body, and the glass fiber separator) of the laminated body 22 is placed in the furnace from the opening and closing door. In the sealed state of the pass box 40A, the pressure in the furnace is reduced to 10 ⁻⁵ Pa or less by the rotary pump 43 and the turbo molecular pump 41. Then, the inside of the furnace is heated to a temperature of 200 ° C. or higher in a reduced pressure state with a degree of vacuum of 10 ⁻⁵ Pa or less. When this processing is completed, the valve 62A of the passage 61A is opened, and an inert gas having a normal pressure and a low dew point is filled into the furnace from the glove box. Thereafter, the opening / closing door of the pass box 40A is opened to carry the composition material into the glove box (see FIG. 3).

According to such a vacuum drying furnace, vacuum drying (a process of heating to a temperature of 200 ° C. or higher in a reduced pressure state with a degree of vacuum of 10 ⁻⁵ Pa or lower) can be performed inside the pass box 40A. It becomes unnecessary and can greatly reduce the equipment cost.

It is explanatory drawing of the apparatus (tank) which concerns on embodiment of this invention. It is explanatory drawing of a vacuum drying furnace similarly. It is sectional drawing explaining a glove box similarly. It is explanatory drawing of the vacuum-drying furnace which concerns on another embodiment.

Explanation of symbols

21 Container for Electric Double Layer Capacitor 22 Laminate 24 Terminal 40, 40A Furnace Body 41 Turbo Molecular Pump 42 Trap 43 Rotary Pump (Vacuum Pump)
45, 45A Depressurization (evacuation) means 60, 60A Inert gas filling means 61, 61A Passage 62, 62A Valve

Claims (5)

Forming a polarizable electrode from a carbonaceous material as a main raw material and attaching a current collector to the carbon electrode to create a positive electrode body and a negative electrode body, composing a predetermined laminate from the positive electrode body, the negative electrode body, and a separator A step of bonding a pair of terminals to the bundling portions of the same polarity as lead portions of the positive electrode body and the negative electrode body, and an electrolyte in which the laminated body is put in a state in which a part of the pair of terminals protrudes In the method of manufacturing an electric double layer capacitor, the step of impregnating in a solution and the step of applying a voltage between a pair of terminals to perform electric field activation of the carbon electrode are sequentially formed. comprising the step, heating to above the temperature 200 ° C. the following reduced pressure vacuum 10 ^-5 Pa a positive electrode and the negative electrode body was carried into a vacuum drying oven before, carrying a positive electrode and a negative electrode body into a vacuum drying oven And the degree of vacuum 0 ^-5 Pa heating above a temperature 200 ° C. at a reduced pressure of not more than state, the vacuum drying oven to inert gas treatment ends and before unloading of the positive electrode body and the negative electrode body normal pressure low dew point of the vacuum drying The step of filling the furnace with an inert gas having a normal pressure and a low dew point is maintained in a vacuum drying furnace and an inert atmosphere having a low pressure and a normal dew point. Supplying an inert gas from the glove box to the vacuum drying furnace through a passage connecting between the glove box and a glove box in which a step of composing a predetermined laminate is performed from the separator and a valve for opening and closing the passage. A manufacturing method of an electric double layer capacitor characterized in that In the electric double layer capacitor manufacturing apparatus used in the method for manufacturing an electric double layer capacitor according to claim 1, the vacuum drying furnace includes means for reducing the pressure in the furnace to a degree of vacuum of 10 ^-5 Pa or less, and the temperature in the furnace is 200 ° C. The vacuum drying furnace includes a means for filling the furnace with an inert gas having a normal pressure and a low dew point, and a means for filling the furnace with an inert gas having a normal pressure and a low dew point. Is a passage connecting between a vacuum drying furnace and a glove box in which the inside is maintained in an inert atmosphere with a low dew point at normal pressure, and a step of composing a predetermined laminate is performed from the positive electrode body, the negative electrode body, and the separator An apparatus for producing an electric double layer capacitor, characterized in that an inert gas is supplied from a glove box to a vacuum drying furnace through a valve for opening and closing the passage . The apparatus for manufacturing an electric double layer capacitor according to claim 2, wherein the vacuum drying furnace is connected to a pass box of the glove box via a sealable open / close door. 3. The apparatus for manufacturing an electric double layer capacitor according to claim 2, wherein the vacuum drying furnace is configured inside using a pass box of a glove box. The electric double layer capacitor manufacturing apparatus according to claim 2, wherein the inside of the furnace has a degree of vacuum of 10 ^-Five The means for reducing the pressure to Pa or less includes a turbo molecular pump.

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