JP4478794B2 - 量子サイズ効果を有する酸化亜鉛超微粒子の製造方法 - Google Patents
量子サイズ効果を有する酸化亜鉛超微粒子の製造方法 Download PDFInfo
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- XLOMVQKBTHCTTD-UHFFFAOYSA-N Zinc monoxide Chemical compound [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 title claims description 68
- 239000011882 ultra-fine particle Substances 0.000 title claims description 54
- 239000011787 zinc oxide Substances 0.000 title claims description 34
- 238000004519 manufacturing process Methods 0.000 title claims description 19
- 230000005476 size effect Effects 0.000 title claims description 11
- 230000003287 optical effect Effects 0.000 claims description 38
- 239000000463 material Substances 0.000 claims description 25
- 229910044991 metal oxide Inorganic materials 0.000 claims description 25
- 150000004706 metal oxides Chemical class 0.000 claims description 25
- 238000000034 method Methods 0.000 claims description 24
- 150000003751 zinc Chemical class 0.000 claims description 24
- 239000002245 particle Substances 0.000 claims description 21
- 239000003054 catalyst Substances 0.000 claims description 19
- 239000000243 solution Substances 0.000 claims description 19
- 229910052751 metal Inorganic materials 0.000 claims description 16
- 239000002184 metal Substances 0.000 claims description 16
- 239000012266 salt solution Substances 0.000 claims description 16
- 239000010419 fine particle Substances 0.000 claims description 14
- 239000004065 semiconductor Substances 0.000 claims description 13
- 239000002904 solvent Substances 0.000 claims description 10
- 150000003839 salts Chemical class 0.000 claims description 9
- 230000002194 synthesizing effect Effects 0.000 claims description 9
- 238000002156 mixing Methods 0.000 claims description 8
- ONDPHDOFVYQSGI-UHFFFAOYSA-N zinc nitrate Chemical compound [Zn+2].[O-][N+]([O-])=O.[O-][N+]([O-])=O ONDPHDOFVYQSGI-UHFFFAOYSA-N 0.000 claims description 6
- 239000013078 crystal Substances 0.000 claims description 5
- 238000010992 reflux Methods 0.000 claims description 5
- 229910052984 zinc sulfide Inorganic materials 0.000 claims description 5
- QTBSBXVTEAMEQO-UHFFFAOYSA-M Acetate Chemical compound CC([O-])=O QTBSBXVTEAMEQO-UHFFFAOYSA-M 0.000 claims description 3
- BVKZGUZCCUSVTD-UHFFFAOYSA-L Carbonate Chemical compound [O-]C([O-])=O BVKZGUZCCUSVTD-UHFFFAOYSA-L 0.000 claims description 3
- 230000003301 hydrolyzing effect Effects 0.000 claims description 3
- 229910000000 metal hydroxide Inorganic materials 0.000 claims description 2
- 150000004692 metal hydroxides Chemical group 0.000 claims description 2
- 229910000010 zinc carbonate Inorganic materials 0.000 claims description 2
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 11
- 230000000694 effects Effects 0.000 description 9
- WMFOQBRAJBCJND-UHFFFAOYSA-M Lithium hydroxide Chemical compound [Li+].[OH-] WMFOQBRAJBCJND-UHFFFAOYSA-M 0.000 description 8
- 230000015572 biosynthetic process Effects 0.000 description 7
- 239000000084 colloidal system Substances 0.000 description 7
- 238000003756 stirring Methods 0.000 description 7
- 230000005284 excitation Effects 0.000 description 6
- 238000003786 synthesis reaction Methods 0.000 description 6
- 150000001875 compounds Chemical class 0.000 description 5
- 239000011521 glass Substances 0.000 description 5
- 238000011160 research Methods 0.000 description 5
- 238000003980 solgel method Methods 0.000 description 5
- 238000001308 synthesis method Methods 0.000 description 5
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 4
- 238000010521 absorption reaction Methods 0.000 description 4
- 150000004770 chalcogenides Chemical class 0.000 description 4
- 239000010949 copper Substances 0.000 description 4
- 239000007788 liquid Substances 0.000 description 4
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 4
- 239000011701 zinc Substances 0.000 description 4
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 3
- ZMXDDKWLCZADIW-UHFFFAOYSA-N N,N-Dimethylformamide Chemical compound CN(C)C=O ZMXDDKWLCZADIW-UHFFFAOYSA-N 0.000 description 3
- KWYUFKZDYYNOTN-UHFFFAOYSA-M Potassium hydroxide Chemical compound [OH-].[K+] KWYUFKZDYYNOTN-UHFFFAOYSA-M 0.000 description 3
- HEMHJVSKTPXQMS-UHFFFAOYSA-M Sodium hydroxide Chemical compound [OH-].[Na+] HEMHJVSKTPXQMS-UHFFFAOYSA-M 0.000 description 3
- 150000004703 alkoxides Chemical class 0.000 description 3
- -1 chalcogenide compounds Chemical class 0.000 description 3
- 229910052802 copper Inorganic materials 0.000 description 3
- 239000013307 optical fiber Substances 0.000 description 3
- 239000002994 raw material Substances 0.000 description 3
- 239000000126 substance Substances 0.000 description 3
- 231100000331 toxic Toxicity 0.000 description 3
- 230000002588 toxic effect Effects 0.000 description 3
- 239000002341 toxic gas Substances 0.000 description 3
- HCHKCACWOHOZIP-UHFFFAOYSA-N Zinc Chemical group [Zn] HCHKCACWOHOZIP-UHFFFAOYSA-N 0.000 description 2
- ZOIORXHNWRGPMV-UHFFFAOYSA-N acetic acid;zinc Chemical compound [Zn].CC(O)=O.CC(O)=O ZOIORXHNWRGPMV-UHFFFAOYSA-N 0.000 description 2
- HUCVOHYBFXVBRW-UHFFFAOYSA-M caesium hydroxide Chemical compound [OH-].[Cs+] HUCVOHYBFXVBRW-UHFFFAOYSA-M 0.000 description 2
- 238000009826 distribution Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 238000003912 environmental pollution Methods 0.000 description 2
- PQVSTLUFSYVLTO-UHFFFAOYSA-N ethyl n-ethoxycarbonylcarbamate Chemical compound CCOC(=O)NC(=O)OCC PQVSTLUFSYVLTO-UHFFFAOYSA-N 0.000 description 2
- 239000007789 gas Substances 0.000 description 2
- 230000007062 hydrolysis Effects 0.000 description 2
- 238000006460 hydrolysis reaction Methods 0.000 description 2
- GLXDVVHUTZTUQK-UHFFFAOYSA-M lithium hydroxide monohydrate Substances [Li+].O.[OH-] GLXDVVHUTZTUQK-UHFFFAOYSA-M 0.000 description 2
- 229940040692 lithium hydroxide monohydrate Drugs 0.000 description 2
- 230000009022 nonlinear effect Effects 0.000 description 2
- GLDOVTGHNKAZLK-UHFFFAOYSA-N octadecan-1-ol Chemical compound CCCCCCCCCCCCCCCCCCO GLDOVTGHNKAZLK-UHFFFAOYSA-N 0.000 description 2
- 229920000642 polymer Polymers 0.000 description 2
- 239000002244 precipitate Substances 0.000 description 2
- 239000010453 quartz Substances 0.000 description 2
- CPRMKOQKXYSDML-UHFFFAOYSA-M rubidium hydroxide Chemical compound [OH-].[Rb+] CPRMKOQKXYSDML-UHFFFAOYSA-M 0.000 description 2
- 238000002211 ultraviolet spectrum Methods 0.000 description 2
- YZYKBQUWMPUVEN-UHFFFAOYSA-N zafuleptine Chemical compound OC(=O)CCCCCC(C(C)C)NCC1=CC=C(F)C=C1 YZYKBQUWMPUVEN-UHFFFAOYSA-N 0.000 description 2
- 229910052725 zinc Inorganic materials 0.000 description 2
- 239000004246 zinc acetate Substances 0.000 description 2
- 229910004613 CdTe Inorganic materials 0.000 description 1
- RWSOTUBLDIXVET-UHFFFAOYSA-N Dihydrogen sulfide Chemical compound S RWSOTUBLDIXVET-UHFFFAOYSA-N 0.000 description 1
- 239000004372 Polyvinyl alcohol Substances 0.000 description 1
- 238000001069 Raman spectroscopy Methods 0.000 description 1
- 229910006404 SnO 2 Inorganic materials 0.000 description 1
- 229910010413 TiO 2 Inorganic materials 0.000 description 1
- 238000002835 absorbance Methods 0.000 description 1
- 238000000862 absorption spectrum Methods 0.000 description 1
- 239000002253 acid Substances 0.000 description 1
- 239000003463 adsorbent Substances 0.000 description 1
- 238000004458 analytical method Methods 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 150000001661 cadmium Chemical class 0.000 description 1
- 229910052793 cadmium Inorganic materials 0.000 description 1
- BDOSMKKIYDKNTQ-UHFFFAOYSA-N cadmium atom Chemical compound [Cd] BDOSMKKIYDKNTQ-UHFFFAOYSA-N 0.000 description 1
- UHYPYGJEEGLRJD-UHFFFAOYSA-N cadmium(2+);selenium(2-) Chemical compound [Se-2].[Cd+2] UHYPYGJEEGLRJD-UHFFFAOYSA-N 0.000 description 1
- 238000004364 calculation method Methods 0.000 description 1
- 239000013522 chelant Substances 0.000 description 1
- 239000002738 chelating agent Substances 0.000 description 1
- 239000003638 chemical reducing agent Substances 0.000 description 1
- 238000000366 colloid method Methods 0.000 description 1
- 230000000295 complement effect Effects 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 229920001577 copolymer Polymers 0.000 description 1
- 239000002178 crystalline material Substances 0.000 description 1
- 238000000354 decomposition reaction Methods 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 238000002189 fluorescence spectrum Methods 0.000 description 1
- 230000006870 function Effects 0.000 description 1
- 229910052739 hydrogen Inorganic materials 0.000 description 1
- 229910000037 hydrogen sulfide Inorganic materials 0.000 description 1
- 238000009776 industrial production Methods 0.000 description 1
- 229910010272 inorganic material Inorganic materials 0.000 description 1
- 239000011147 inorganic material Substances 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- VASIZKWUTCETSD-UHFFFAOYSA-N manganese(II) oxide Inorganic materials [Mn]=O VASIZKWUTCETSD-UHFFFAOYSA-N 0.000 description 1
- 230000015654 memory Effects 0.000 description 1
- 229910021645 metal ion Inorganic materials 0.000 description 1
- 239000002923 metal particle Substances 0.000 description 1
- 239000013081 microcrystal Substances 0.000 description 1
- 239000011259 mixed solution Substances 0.000 description 1
- 239000003960 organic solvent Substances 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 230000010287 polarization Effects 0.000 description 1
- 229920000015 polydiacetylene Polymers 0.000 description 1
- 229920002451 polyvinyl alcohol Polymers 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 238000000634 powder X-ray diffraction Methods 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 239000000047 product Substances 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- 238000001179 sorption measurement Methods 0.000 description 1
- 229910052950 sphalerite Inorganic materials 0.000 description 1
- 239000003381 stabilizer Substances 0.000 description 1
- 239000011550 stock solution Substances 0.000 description 1
- 239000003440 toxic substance Substances 0.000 description 1
- 239000002699 waste material Substances 0.000 description 1
- 229920003169 water-soluble polymer Polymers 0.000 description 1
Landscapes
- Optical Modulation, Optical Deflection, Nonlinear Optics, Optical Demodulation, Optical Logic Elements (AREA)
- Oxygen, Ozone, And Oxides In General (AREA)
- Inorganic Compounds Of Heavy Metals (AREA)
Description
(1)金属酸化物半導体を超微粒子化して量子サイズ効果を有する金属酸化物超微粒子材料を製造する方法において、溶媒中で還流して溶解した金属塩溶液を、同じく溶媒中に溶解した金属水酸化物の触媒溶液と混合して金属塩を加水分解し、金属酸化物の5nm以下、1nm以上の直径を有する超微粒子を合成する方法であって、
1)その際に、金属塩を溶媒中で少なくとも2時間還流して溶解した金属塩溶液に、触媒溶液を撹拌しつつ一気に流下して混合し、直ちに金属酸化物の核を迅速に生成させることにより、粒成長が抑制された微細な粒子を生成させ、超微粒子化された超微細結晶質の酸化物超微粒子を作製する、2)前記金属塩として、亜鉛塩を用いることにより酸化亜鉛超微粒子を生成させる、ことを特徴とする金属酸化物超微粒子の製造方法。
(2)亜鉛塩溶液の濃度が、0.01〜0.5Mである前記(1)記載の金属酸化物超微粒子の製造方法。
(3)亜鉛塩溶液と触媒溶液を混合する温度が、−80〜80℃である前記(1)記載の金属酸化物超微粒子の製造方法。
(4)亜鉛塩溶液に触媒溶液を撹拌しつつ一息に流下して混合することを特徴とする前記(1)記載の金属酸化物超微粒子の製造方法。
(5)亜鉛塩として、亜鉛の硝酸塩、炭酸塩、又は酢酸塩を用いる前記(1)記載の金属酸化物超微粒子の製造方法。
(6)亜鉛塩を加水分解する際の触媒が、塩基触媒である前記(1)記載の金属酸化物超微粒子の製造方法。
(7)前記(1)から(6)のいずれかに記載の方法で作製された、安定相のウルツ鉱構造を有し、直径2〜3nmの単結晶に超微粒子化された超微細結晶質酸化亜鉛粒子からなる非線形光学材料であって、当該酸化亜鉛超微粒子の励起子閉じ込めによる非線形光学効果を有することを特徴とする無機非線形光学材料。
本発明は、前記の様に、金属塩を溶媒中で還流溶解し、同じく溶媒に溶かした酸あるいは塩基を触媒として、金属塩を加水分解し、酸化亜鉛超微粒子を得ることを特徴とするものである。これ以降、この方法を「加水分解法」と記す。本発明によって得られる酸化亜鉛超微粒子は、直径2〜5nmの非常に微細なものである。得られた超微粒子は、その直径と可視紫外スペクトルから求められたバンドギャップエネルギーの関係から、量子サイズ効果が現れていることが確認され、3次非線形光学材料として用いることができるものである。
本発明の二液混合法による合成方法は、上記酸化亜鉛の超微粒子化に限らず、他の酸化物半導体の超微粒子化方法として同様に適用することが可能であり、例えば、Cu2 O、TiO2 、SnO2 、MnO、Fe2 O3 、CoO、NiOの超微粒子化に適用される。
酢酸亜鉛2水和物を0.1Mとなるように125mlの特級エタノール中75℃で2時間還流した。水酸化リチウム1水和物0.83gを75mlの特級エタノールに撹拌溶解した。両者を所定の温度(−15℃、40℃)に保ち、液温が所定の温度になったのを確認後、水酸化リチウム溶液を酢酸亜鉛溶液に激しく撹拌しつつ一気に流下し30分撹拌を続け、透明なコロイドを得た。
エタノール中に結晶質の酸化亜鉛が生成していることを確認するために、コロイドの溶媒をロータリーエバポレーターでエタノールを蒸発させると、フラスコ中に粉末が残った。これを粉末X線回折で観察すると、合成温度に関係なく、酸化亜鉛の回折パターンを示した。
冒頭にも述べたように、バンドギャップ幅が広がり、超微粒子の半径とボーア半径の関係によって励起子閉じ込め効果あるいは電子・正孔対閉じ込め効果が生じる。励起子閉じ込めの場合、図4の直線に示すようなバンドギャップエネルギーと半径の−2乗の関係を示す。
Claims (7)
- 金属酸化物半導体を超微粒子化して量子サイズ効果を有する金属酸化物超微粒子材料を製造する方法において、溶媒中で還流して溶解した金属塩溶液を、同じく溶媒中に溶解した金属水酸化物の触媒溶液と混合して金属塩を加水分解し、金属酸化物の5nm以下、1nm以上の直径を有する超微粒子を合成する方法であって、
1)その際に、金属塩を溶媒中で少なくとも2時間還流して溶解した金属塩溶液に、触媒溶液を撹拌しつつ一気に流下して混合し、直ちに金属酸化物の核を迅速に生成させることにより、粒成長が抑制された微細な粒子を生成させ、超微粒子化された超微細結晶質の酸化物超微粒子を作製する、2)前記金属塩として、亜鉛塩を用いることにより酸化亜鉛超微粒子を生成させる、ことを特徴とする金属酸化物超微粒子の製造方法。 - 亜鉛塩溶液の濃度が、0.01〜0.5Mである請求項1記載の金属酸化物超微粒子の製造方法。
- 亜鉛塩溶液と触媒溶液を混合する温度が、−80〜80℃である請求項1記載の金属酸化物超微粒子の製造方法。
- 亜鉛塩溶液に触媒溶液を撹拌しつつ一息に流下して混合することを特徴とする請求項1記載の金属酸化物超微粒子の製造方法。
- 亜鉛塩として、亜鉛の硝酸塩、炭酸塩、又は酢酸塩を用いる請求項1記載の金属酸化物超微粒子の製造方法。
- 亜鉛塩を加水分解する際の触媒が、塩基触媒である請求項1記載の金属酸化物超微粒子の製造方法。
- 請求項1から6のいずれかに記載の方法で作製された、安定相のウルツ鉱構造を有し、直径2〜3nmの単結晶に超微粒子化された超微細結晶質酸化亜鉛粒子からなる非線形光学材料であって、当該酸化亜鉛超微粒子の励起子閉じ込めによる非線形光学効果を有することを特徴とする無機非線形光学材料。
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US20100144088A1 (en) * | 2008-12-05 | 2010-06-10 | Electronics And Telecommunications Research Institute | Method for forming metal oxide and method for forming transistor structure with the same |
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FR3008103B1 (fr) * | 2013-07-03 | 2015-09-11 | Genes Ink Sas | Composition d encre a base de nanoparticules |
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