JP4471783B2 - Hot isostatic pressing method and hot isostatic pressing device - Google Patents

Description

  The present invention relates to a hot isostatic pressing method and a hot isostatic pressurizing apparatus for subjecting a workpiece to a high temperature and high pressure treatment in a high pressure vessel filled with a high temperature and high pressure medium.

Conventionally, in a hot isostatic pressing apparatus, an apparatus using an inert gas such as Ar as a pressure medium is known, and this kind of inert gas is, for example, a high pressure of 98 MPa (1000 Kgf / cm ² ) or more. In addition, high-temperature and high-pressure treatment (hot isostatic pressure treatment) such as sintering of powder moldings and diffusion bonding of the same or different materials in a high-temperature and high-pressure gas atmosphere maintained at a high temperature of 1000 ° C. or higher. Is done.

  For example, when Ar gas is maintained at a high temperature and high pressure as described above, its density increases to about 30% of water and the viscosity coefficient increases to about 15% of water. Ar has a large coefficient of thermal expansion. Therefore, when Ar gas is filled in a high pressure vessel as a pressure medium gas (hereinafter referred to as a pressure medium gas) of a hot isostatic pressurizer, intense natural convection due to the pressure medium gas is generated in the high pressure vessel ( For details, see: Nihon Kogyo Shimbun, “Isotropic Pressing Technology-HIP / CIP Technology and Application to Material Development”, Mitsue Koizumi, edited by Masao Nishihara, pages 94-113).

  Due to such a phenomenon, it has been confirmed that a temperature gradient of several hundred degrees (100 ° C. to 1000 ° C.) may occur in the vertical direction inside the high pressure vessel. For this reason, when a plurality of products to be processed are accommodated in a multistage shape in the vertical direction in a processing section in a high-pressure vessel in order to process a large number of products to be processed at a time, a temperature gradient as described above occurs. As a result, the quality of the processed product after processing may vary.

Therefore, in this type of hot isostatic pressing device, in order to keep the quality of the processed product constant regardless of the vertical processing position in the processing unit, the vertical direction in the processing unit It is a big problem how to maintain the soaking property of.
In order to solve such a problem, Patent Document 1 (Japanese Patent Application Laid-Open No. 2004-085134) includes a processing chamber in which a processing product is to be accommodated in a multistage shape in a high-pressure container that can be filled with a pressure medium gas. There has been proposed a hot isostatic pressing device provided with a processing unit and provided with a fan for stirring a pressure medium gas below the processing unit.

In the hot isostatic pressurization device, a pressure medium gas circulation path is formed in the casing, for example, by lowering the inside of the processing section and moving up the outside side of the processing section by rotating the fan at a high speed. As a result, the occurrence of a temperature gradient in the processing section is suppressed.
JP 2004-085134 A

  By the way, in the hot isostatic pressing apparatus, the processing chambers of each stage are connected in series by a plurality of gas insertion holes provided in a partition plate that partitions the upper and lower sides of each processing chamber. Therefore, when the pressure medium gas is flowed from the upper side to the lower side of the processing section by the fan, the pressure medium gas flows into the lower processing chambers in order from the uppermost processing chamber, and is processed in each processing chamber. Heat exchange between the gas and the pressure medium gas. For this reason, there is a large difference in the amount of heat of the inflowing pressure medium gas between the uppermost and lowermost processing chambers, which makes it difficult to maintain the heat uniformity in the vertical direction in the processing section. there were.

Therefore, in view of the above problems, the present invention provides a hot isostatic pressing method capable of maintaining the thermal uniformity of each stage of processing chambers arranged in multiple stages with an easy configuration. It is a thing.
In addition, in view of the above problems, the present invention provides a hot isostatic pressurizing device capable of maintaining the thermal uniformity of each stage of processing chambers arranged in multiple stages with an easy configuration. It is a thing.

  In order to achieve the above object, the present invention has taken the following measures. That is, a high-pressure container capable of being filled with a high-temperature and high-pressure pressure medium and a forced flow means for causing the pressure medium in the high-pressure container to flow in a predetermined direction are provided. In the hot isostatic pressurizing method, in which a processing section having multi-stage processing chambers to be stored is provided, and a processed product stored in each processing chamber is processed at a high temperature and high pressure by the pressure medium, the forced flow means The step of temporarily storing the pressure medium flowing by the step of supplying the stored pressure medium to the processing chamber of each stage is provided.

  According to this configuration, a constant amount of the pressure medium is temporarily stored before being supplied to each processing chamber, so that the stored pressure medium is maintained at a constant heat amount (temperature) and a flow rate. By supplying a part of the medium to each processing chamber, the pressure medium having a certain amount of heat flows into each processing chamber at substantially the same flow rate. Therefore, regardless of the nature of the pressure medium, the amount of heat flowing into each processing chamber is substantially constant, so that the thermal uniformity of each processing chamber is maintained.

  In order to achieve the above object, the present invention has taken the following measures. That is, a high-pressure container capable of being filled with a high-temperature and high-pressure pressure medium and a forced flow means for causing the pressure medium in the high-pressure container to flow in a predetermined direction are provided. In the hot isostatic pressurizing apparatus, in which a processing unit having multi-stage processing chambers to be stored is disposed, and a processing object stored in each processing chamber is processed at a high temperature and high pressure by the pressure medium, the forced flow means The pressure medium supply header part which stores the pressure medium which flows by temporarily and supplies the stored pressure medium to the processing chamber of each stage is provided.

  According to this configuration, a predetermined amount of the pressure medium is temporarily stored in the pressure medium supply header section before being supplied to each processing chamber, so that the stored pressure medium is stored in the pressure medium supply header section. A constant amount of heat (temperature) and a flow rate are maintained, and a part of the pressure medium is supplied to each processing chamber, so that a pressure medium having a constant amount of heat flows into each processing chamber at substantially the same flow rate. It will be. Therefore, regardless of the nature of the pressure medium, the amount of heat flowing into each processing chamber is substantially constant, so that the thermal uniformity of each processing chamber is maintained.

The pressure medium supply header section includes a pressure medium storage chamber for storing the pressure medium, an inflow section for allowing the pressure medium to flow into the pressure medium storage chamber, and processing of the pressure medium storage chamber at each stage. It is preferable to provide communication means communicating in parallel with the chamber.
According to this configuration, the pressure medium flowing into the pressure medium storage chamber through the inflow portion is not immediately supplied to each processing chamber through the communication means, but is first stored in the pressure medium storage chamber. As a result, the pressure medium to be supplied to each processing chamber is maintained at a certain amount of heat and flow rate. In addition, the pressure medium in the pressure medium storage chamber is supplied to each processing chamber through the communication means that connects the pressure medium storage chamber and each processing chamber in parallel, so that substantially the same amount of pressure medium is supplied to each processing chamber. It is done.

Moreover, it is preferable that the said communication means is provided with the supply hole for supplying the pressure medium of the said pressure medium storage chamber to each process chamber, and each supply hole is each formed in the same magnitude | size.
According to this configuration, the flow rate of the pressure medium supplied to the processing chamber through each supply hole is substantially the same regardless of the properties of the pressure medium stored in the pressure medium storage chamber.
In addition, the processing unit is provided with the pressure medium supply header unit and a pressure medium recovery unit that recovers the pressure medium supplied to each processing chamber, and the pressure medium recovery unit includes the recovered pressure medium. It is preferable to provide a discharge unit that discharges the liquid to the outside of the processing unit.

  According to this configuration, a flow path is formed in the processing section to flow the pressure medium in one direction from the pressure medium supply header section to the pressure medium recovery section, and the pressure medium passes through the flow path. Flow smoothly in the processing section. Therefore, there is no bias in the flow of the pressure medium in the processing section due to the retention of the pressure medium in each processing chamber or the backflow of the pressure medium in the processing section. It is kept in a soaking state by a smooth flow.

The processing unit includes a processing shelf that forms the plurality of processing chambers in a multistage shape in the vertical direction, and a bottomed processing cylinder that surrounds an outer peripheral portion and a bottom of the processing shelf, and the pressure medium supply One of the header part and the pressure medium recovery part is preferably provided by extending in the vertical direction at the center part of the processing shelf, and the other is provided along the inner peripheral surface of the processing cylinder. .
According to this configuration, the pressure medium supply header portion is disposed adjacent to one of the central portion and the outer portion of each processing chamber, and the pressure medium recovery portion is disposed adjacent to the other, thereby reducing the size of the entire apparatus. It is done. In addition, the pressure medium flowing into each processing chamber from the pressure medium supply header portion flows from the central portion toward the outside toward the pressure medium recovery portion, and the retention of pressure medium in each processing chamber Backflow does not occur, and the temperature state in the processing chamber is not biased.

  In the high-pressure vessel, the processing unit, the pressure medium forced flow means, and a pressure medium heating means for heating the pressure medium are arranged, and the pressure medium forced flow means is connected to the pressure medium recovery part. The discharged pressure medium is made to flow toward the pressure medium supply header section, and the pressure medium heating means heats the pressure medium flowing from the pressure medium recovery section toward the pressure medium supply header section. It is preferable.

According to this configuration, the pressure medium discharged to the outside of the processing unit due to heat exchange with the workpiece in the processing unit is discharged outside the processing unit by the forced flow means from the pressure medium recovery unit to the pressure medium supply header unit. In addition, the pressure medium is heated by the pressure medium heating means while flowing outside the processing section, and thus the pressure medium can be circulated in the high pressure vessel.
As the most preferable means for achieving the object of the present invention, a high-pressure container capable of being filled with a high-temperature and high-pressure medium, and a forced flow means for causing the pressure medium in the high-pressure container to flow in a predetermined direction. A processing unit including a plurality of processing chambers in which the article to be processed is to be accommodated is disposed inside the high-pressure vessel, and the processing unit is a processing shelf that forms the plurality of processing chambers in a multi-stage shape in the vertical direction. And an isostatic pressurizing apparatus for hot isostatic pressurization of a product to be processed contained in each processing chamber by the pressure medium at a high temperature and a high pressure, and a bottomed processing cylinder surrounding the outer periphery and bottom of the processing shelf A pressure medium supply header portion for supplying the pressure medium flowing by the forced flow means to the processing chamber of each stage, and the pressure medium supply header portion includes a plurality of mounting plates having an opening at a central portion. Are connected by a wall and the opening of the lowermost mounting plate is closed. The pressure medium supply header portion is provided on the uppermost mounting plate so as to allow the pressure medium to flow into the pressure medium supply header portion. It is possible to employ a hot isostatic pressure pressurizing device provided with the inflow portion and communication means communicating with each processing chamber.

Preferably, the communication means includes a supply hole for supplying the pressure medium to each processing chamber, and each supply hole is formed to have the same size.
In addition, the processing unit is provided with the pressure medium supply header unit and a pressure medium recovery unit that recovers the pressure medium supplied to each processing chamber, and the pressure medium recovery unit includes the recovered pressure medium. It is good to provide the discharge part which discharges to the outside of the processing part.

Further, with respect to the pressure medium supply header part and the pressure medium recovery part, either one is provided by extending vertically in the central part of the processing shelf, and the other is provided along the inner peripheral surface of the processing cylinder. It is good to have.
In addition, the processing section, the forced flow means, and a heating means for heating the pressure medium are provided in the high-pressure vessel, and the forced flow means is the pressure medium discharged from the pressure medium recovery section. The pressure
It is good to make it flow toward the medium supply header part, and the heating means heats the pressure medium which flows toward the pressure medium supply header part from the pressure medium recovery part.

As the most preferable means for achieving the object of the present invention, the above-mentioned hot isostatic pressurizing apparatus is used, and when the stored article to be processed is subjected to high-temperature and high-pressure treatment, the pressure medium flowing by the forced flow means is used. After flowing into the pressure medium supply header, the pressure medium may flow in one direction into the processing chamber.

According to the hot isostatic pressing method of the present invention, it is possible to maintain the thermal uniformity of the processing chambers of each stage arranged in a multistage shape with an easy configuration.
Moreover, according to the hot isostatic pressure pressurization apparatus of this invention, it is possible to maintain the soaking | uniform-heating property of the process chamber of each step | stage arrange | positioned by multi-stage with easy structure.

Hereinafter, embodiments of the present invention will be described with reference to the drawings.
1 to 6 show a first embodiment according to the present invention, and FIG. 1 shows a main body portion of a hot isostatic pressing apparatus 1 according to the present invention.
In the present invention, a pressure medium gas made of an inert gas is used as the pressure medium.
As shown in FIG. 1, a hot isostatic pressurizing device 1 of the present invention is configured to flow a high-pressure vessel 2 that can be filled with a high-temperature and high-pressure pressure medium and a pressure medium in the high-pressure vessel 2 in a predetermined direction. The forced flow means 3 is provided, and inside the high-pressure vessel 2, a processing section 5 having a plurality of processing chambers 4 in which the articles to be processed T are to be accommodated is arranged, and each processing chamber is provided by the pressure medium. The article to be processed T accommodated in 4 is subjected to a high-temperature and high-pressure process (hot isostatic pressing process).

  In the high-pressure vessel 2, a processing unit 5, a forced flow unit 3, and a heating unit 6 for heating the pressure medium are provided. The forced flow unit 3 stores the pressure medium discharged from the pressure medium recovery unit 41 described later. The heating means 6 heats the pressure medium flowing from the pressure medium recovery part 41 toward the pressure medium supply header part 40. Further, in the high-pressure vessel 2, a heat insulating structure 7 that covers the outer peripheral portion and the upper portion of the processing unit 5 is provided.

The high-pressure vessel 2 includes a high-pressure cylinder 10 having a vertical axis and having an upper and lower opening shape, an upper lid 11 that closes an upper end opening of the high-pressure cylinder 10, and a lower lid 12 that closes a lower end opening of the high-pressure cylinder 10. The load acting on the upper lid 11 and the lower lid 12 by the pressure of the pressure medium in the high-pressure vessel 2 is supported by a window frame-shaped press frame (not shown).
The lower lid 12 is provided with a plurality of (two in the present embodiment) pressure medium supply pipes 13 for supplying a plurality of types of pressure medium into the high pressure vessel 2. A pressure medium discharge pipe 14 for discharging the pressure medium inside the container 2 to the outside of the high pressure container 2 is provided.

The lower lid 12 is supported so as to be movable up and down, and closes the lower end opening of the high-pressure vessel 2 so as to be freely opened and closed.
The forced flow means 3 and the heating means 6 are fixedly attached to the lower lid 12.
The forced flow means 3 includes a fan 16 that can rotate at a high speed to forcibly circulate the pressure medium, a shaft member 17 that extends downward from the rotation center of the fan 16, and a motor that is connected to the lower end of the shaft member 17. The forced flow means 3 is arranged with the shaft member 17 aligned with the axis of the high-pressure vessel 2.

  The motor 18 is accommodated in a recess 12 a formed downward from the upper surface of the lower lid 12. The portion of the motor 18 protruding from the recess 12 a is surrounded by a heat insulating member 19 provided on the upper surface of the lower lid 12, and a pressure medium is accommodated in the motor of the lower lid 12 on the upper surface of the heat insulating member 19. A partition wall 20 is provided for preventing the heat from flowing into the space and preventing heat transfer to the heat insulating member 19.

The fan 16 is configured to suck in the pressure medium from above the fan 16 and send out the pressure medium in the radially outward direction (horizontal direction) of the rotation locus of the fan 16.
On the upper surface of the partition wall 20, a plurality of support legs 21 project radially from the axis of the fan 16, and a cylindrical member 22 surrounding the outer periphery of the processing unit 5 is provided.
As shown in FIGS. 1, 3, and 4, heaters 6 a that serve as the heating means 6 are attached to the support legs 21 and the cylindrical member 22, respectively. The bottom portion is surrounded and the outer periphery of the fan 16 is covered.

The heat insulating structure 7 has a cylindrical body part 23 covering the cylindrical member 22 and the processing part 5, and a lower end opening shape by an upper wall 24 that closes the upper end opening of the body part 23 and covers the upper part of the processing part 5. Formed so as to cover the processing unit 5, the fan 16, and the heater 6a.
As shown in FIG. 1, the processing unit 5 includes a processing shelf 25 in which the plurality of processing chambers 4 are formed in a multistage shape in the vertical direction, and a bottomed processing cylinder 26 that surrounds the outer periphery and the bottom of the processing shelf 25. It consists of and.

The processing shelf 25 includes a plurality of mounting plates 27 on which the article to be processed T is to be mounted, and a wall body 28 that supports the plurality of mounting plates 27 in a multistage shape in the vertical direction (five levels in the present embodiment). The mounting plate 27 is formed in an annular shape having an opening 27a in the center.
The wall body 28 has an inner peripheral wall 29 that supports the inner peripheral portion of the mounting plate 27 and an outer peripheral wall 30 that supports the outer peripheral portion of the mounting plate 27. The mounting plate 27 is connected to the mounting plate 27 in the vertical direction by the inner peripheral wall 29 and the outer peripheral wall 30 so that the vertical direction is surrounded by the mounting plates 27 and 27 and the radial direction is surrounded by the inner peripheral wall 29 and the outer peripheral wall 30. The processed chamber 4 is formed in a multistage shape.

The processing cylinder 26 is formed of a disk-shaped bottom plate 31 supported by the plurality of support legs 21 and a cylindrical rectifying cylinder 32 having upper and lower ends opened. An insertion hole 31 a is formed in the central portion that is at a position opposite to 16.
As shown in FIG. 5, in the present embodiment, the lower end portion of the flow straightening cylinder 32 is fixed to the outer peripheral portion of the bottom plate 31 via the welded portion 32a. However, as shown in FIG. It may be connected to the bottom plate 31 via the means 32b.

As shown in FIGS. 3 and 4, a flow passage R for circulating a pressure medium is provided between the outer peripheral surface of the rectifying cylinder 32 and the cylindrical member 22 disposed so as to surround the outer peripheral surface. Yes.
Further, the processing shelf 25 is accommodated in the processing cylinder 26 with a certain clearance S between the outer peripheral portion thereof and the inner peripheral surface of the processing cylinder 26 (rectifying cylinder 32).
As shown in FIG. 1, the processing section 5 is provided with a pressure medium supply header section 40 that temporarily stores the pressure medium flowing by the forced flow means 3 and supplies the stored pressure medium to the processing chambers 4 of each stage. In addition, a pressure medium recovery unit 41 that recovers the pressure medium supplied to each processing chamber 4 is provided.

In the present embodiment, the pressure medium supply header portion 40 is provided extending vertically in the central portion of the processing shelf 25, and the pressure medium recovery portion 41 is provided on the inner peripheral surface and the bottom surface (the upper surface of the bottom plate 31) of the processing tube 26. ).
The pressure medium supply header section 40 closes the opening 27 a of the lowermost mounting plate 27 of the processing shelf 25, and connects the inner peripheral portions of the mounting plates 27 with the inner peripheral wall 29. The part is provided by extending vertically.

The pressure medium supply header section 40 includes a pressure medium storage chamber 42 for storing the pressure medium, an inflow section 43 for allowing the pressure medium to flow into the pressure medium storage chamber 42, and the pressure medium storage chamber 42. Are connected to the processing chambers 4 of each stage in parallel.
The pressure medium storage chamber 42 is surrounded by the inner peripheral wall 29 of the processing shelf 25, the inner peripheral edge of the mounting plate 27, and the lowermost mounting plate 27, and is provided extending vertically in the center of the processing shelf 25. The inflow portion 43 is formed by the opening 27 a of the uppermost mounting plate 27.

In addition, the communication means 44 includes a supply hole 45 for supplying the pressure medium in the pressure medium storage chamber 42 to each processing chamber 4. A plurality of supply holes 45 are formed in the same number on the inner peripheral wall 29 of each stage of the processing shelf 25. Each supply hole 45 is formed in substantially the same size.
The pressure medium recovery unit 41 connects the outer peripheral edge of the uppermost mounting plate 27 of the processing shelf 25 to the inner peripheral surface of the processing cylinder 26 without a gap, and connects the outer peripheral portion of each mounting plate 27 by the outer peripheral wall 30. Thus, the processing tube 26 is provided along the inner peripheral surface and the bottom surface (the upper surface of the bottom plate 31).

The pressure medium recovery unit 41 includes a pressure medium recovery chamber 46 that recovers the pressure medium from each processing chamber 4, and a communication unit 47 that connects each processing chamber 4 and the pressure medium recovery chamber 46 in parallel.
The pressure medium recovery chamber 46 is surrounded by the inner peripheral surface of the processing cylinder 26, the outer peripheral wall 30, the outer peripheral edge of the mounting plate 27, and the uppermost mounting plate 27, and surrounds the outer periphery of the processing shelf 25 in the vertical direction. Stretched and provided.

In addition, the communication means 47 includes a discharge hole 48 for discharging the pressure medium supplied to each processing chamber 4 to the pressure medium recovery chamber 46. A plurality of discharge holes 48 are formed in the same number on the outer peripheral wall 30 of each stage of the processing shelf 25. Moreover, each discharge hole 48 is formed in substantially the same size.
Further, the pressure medium recovery part 41 includes a discharge part 49 for discharging the recovered pressure medium to the outside of the processing part 5. In the present embodiment, the discharge part 49 is formed by the insertion hole 31 a of the bottom plate 31. ing.

The embodiment of the present invention has the above-described configuration. By placing the products to be processed T in the processing chambers 4 of the processing unit 5, a large number of products to be processed T are placed in the processing unit 5 at a time. In this state, the high-pressure vessel 2 is filled with a pressure medium and high-temperature and high-pressure treatment is performed.
In the present embodiment, the lowermost mounting table 27 is supported by the inner peripheral wall 29 and the outer peripheral wall 30 with a space that can accommodate the workpiece T between the upper surface of the bottom plate 31 of the processing cylinder 26. As a result, the processed product T can be placed on the upper surface of the bottom plate 31, but the above-described interval is not provided between the lowermost stage mounting table 27 and the bottom plate 31, and the upper surface of the bottom plate 31 is processed. The structure which does not mount the goods T may be sufficient.

As indicated by arrows in FIG. 2, by rotating the fan 16 at a high speed, a flow path R between the outer peripheral surface of the processing cylinder 26 of the processing unit 5 and the inner peripheral surface of the cylindrical member 22 is provided inside the high-pressure vessel 2. And flows into the space above the processing unit 5 (the lower space of the upper wall 24 of the heat insulating structure 7), descends inside the processing unit 5 and is discharged from the opening 31a of the bottom plate 31 to the lower side of the processing chamber 5. A pressure medium circulation path is formed.
Here, since the heater 6a is provided in the cylindrical member 22 which covers the outer peripheral surface of the support leg 21 and the processing cylinder 26 located on the side of the fan 16, the low-temperature pressure medium discharged from the processing unit 5 is the fan. 16 wraps around from the lower side of the processing unit 5 to the side and is heated by the heater 6a while ascending the flow path R, whereby the pressure medium is again maintained at a high temperature and the processing unit 5 It flows into the space above.

Then, the pressure medium filled in the space flows into the pressure medium storage chamber 42 through the inflow portion 43 (the opening 27 a of the uppermost mounting plate 27) of the pressure medium supply header 40. The pressure medium that has flowed into the pressure medium storage chamber 42 does not immediately flow into each processing chamber through the supply hole 45 of the communication means 44, but is temporarily stored in the pressure medium storage chamber 42.
In addition, since the lower end portion of the pressure medium storage chamber 42 is blocked by the lowermost mounting plate 27, the pressure medium that has flowed into the pressure medium storage chamber 42 does not pass through each processing chamber 4. It is not discharged to the outside.

Here, when the pressure medium is temporarily stored in the pressure medium storage chamber 42, the inside of the pressure medium storage chamber 42 is maintained at a constant temperature regardless of the vertical position. That is, the entire pressure medium in the pressure medium storage chamber 42 is maintained at a constant amount of heat.
Thereafter, the pressure medium in the pressure medium storage chamber 42 is supplied to each processing chamber 4 through the supply hole 45 of the communication means 44. At this time, since each supply hole 45 is formed to have substantially the same size, the pressure medium having substantially the same flow rate is supplied to each processing chamber 4 through the supply hole 45, and thereby, each processing chamber 4. The same amount of heat is supplied inside. Moreover, since the pressure medium supply header 40 is formed at the center of each processing chamber 4 and the pressure medium recovery portion 41 is disposed surrounding each processing chamber 4 in the radially outward direction of each processing chamber 5, The pressure medium supplied to each processing chamber 4 through the supply hole 45 flows in one direction in the processing chamber 4 in the radially outward direction. No backflow will occur.

  Then, the pressure medium flowing into each processing chamber 4 changes from a high temperature state to a low temperature state by heat exchange with the workpiece T, and the discharge hole of the communication means 47 of the pressure medium recovery unit 41 from each processing chamber 4. It flows into the pressure medium recovery chamber 46 through 48. Thereafter, the pressure medium descends in the pressure medium recovery chamber 46 in accordance with the pressure medium circulation path by the fan 16 and flows on the bottom plate 31 along the bottom plate 31 of the processing cylinder 26 in the radially inward direction. 41 is discharged from the discharge portion 49 (the insertion hole 31a of the bottom plate 31) and sucked into the fan 16 again.

Here, since the upper end portion of the pressure medium recovery chamber 46 is closed by the outer peripheral portion of the uppermost mounting plate 27, the low-temperature pressure medium flowing into the pressure medium recovery chamber 46 rises and is above the processing unit 5. Never flow into the space.
According to this embodiment, since the pressure medium having the same amount of heat is supplied to each processing chamber 4 of the processing unit 5 at substantially the same flow rate, each processing chamber 4 is maintained at a constant amount of heat. As a result, the soaking state of the processing chambers 4 is maintained, and as a result, the temperature gradient in the vertical direction of the processing unit 5 that conventionally has a temperature difference of several hundred degrees is contained in the difference of several degrees. .

  Since the processing unit 5 is detachable from the inside of the high-pressure vessel 2, the mounting plate 27 and the wall body 28 are assembled into the processing cylinder 26 one by one in a state where the processing unit 5 is taken out from the high-pressure vessel 2. At the same time as 25 is formed, the products to be processed T can be stored in the respective processing chambers 4, and the operation of storing the products to be processed T is easily performed outside the high-pressure vessel 2. Here, when the lower ends of the inner peripheral wall 29 and the outer peripheral wall 30 of the lowermost wall body 28 are connected to the bottom plate 31, a product transport bucket in which the processing cylinder 26 and the processing shelf 25 are integrated is formed. In addition, the processing unit 5 can be easily transported before and after the high-temperature and high-pressure treatment process.

FIG. 7 shows a second embodiment of the present invention.
In this embodiment, the components having the same reference numerals as those in FIG. 1 showing the first embodiment are basically the same as those in FIG.
In this embodiment, the outer peripheral edge of the uppermost mounting table 27 is connected to the inner peripheral surface of the processing tube 26 without a gap via an annular rectifying plate 50 arranged on the uppermost mounting table 27. Yes.

  According to this embodiment, the mounting plate 27 having the same specifications as the other stages excluding the lowermost mounting plate 27 can be adopted as the uppermost mounting plate 27, and the cost of the processing shelf 25 can be reduced. It is planned. Further, even when the processing cylinder 26 is deformed by the pressurization of the pressure medium, a gap between the outer peripheral edge of the uppermost mounting table 27 and the inner peripheral surface of the processing cylinder 26 is attached by attaching a current plate 50 corresponding to the deformation. The pressure medium recovery unit 41 can be formed without being connected, and can easily cope with the deformation of the processing cylinder 26 as described above.

What is shown in FIG. 8 is a form shown as a reference example .
In this embodiment, the components having the same reference numerals as those in FIG. 1 showing the first embodiment are basically the same as those in FIG.
In this embodiment, the pressure medium supply header portion 140 is provided along the inner peripheral surface of the processing cylinder 26, and the pressure medium recovery portion 141 is provided extending vertically in the center portion of the processing shelf 25. It has been.

The pressure medium supply header 140 connects the outer edge of the lowermost mounting plate 27 of the processing shelf 25 to the inner peripheral surface of the processing cylinder 26 without a gap, and connects the outer peripheral portion of each mounting plate 27 by the outer peripheral wall 30. As a result, it is provided to extend in the vertical direction along the inner peripheral surface of the processing cylinder 26.
The pressure medium supply header section 140 includes a pressure medium storage chamber 142 for storing the pressure medium, an inflow section 143 for allowing the pressure medium to flow into the pressure medium storage chamber 142, and the pressure medium storage chamber 142. Is connected to the processing chamber 4 of each stage in parallel.

  The pressure medium storage chamber 142 is formed by extending the outer edge of the lowermost mounting plate 27 to be connected to the inner peripheral surface of the processing cylinder 26 without a gap, and by connecting the outer peripheral portion of each mounting plate 27 by the outer peripheral wall 30. The processing tube 26 is provided between the inner peripheral surface of the processing tube 26 and the outer peripheral wall 30 of the processing shelf 25 and the outer peripheral edge of the mounting plate 27, and the inflow portion 143 is connected to the outer edge of the uppermost mounting plate 27 and the processing tube. It is formed by the clearance gap between 26 inner peripheral surfaces.

In addition, the communication means 144 includes a supply hole 145 for supplying the pressure medium stored in the pressure medium storage chamber 142 to each processing chamber 4. The same number of each supply hole 145 is formed in the outer peripheral wall 30 of each step of the processing shelf 25. Each supply hole 145 is formed in substantially the same size.
The pressure medium recovery unit 141 closes the opening 27 a of the uppermost mounting plate 27 of the processing shelf 25, and connects the inner peripheral portion of each mounting plate 27 with the inner peripheral wall 29, so that the central portion of the processing shelf 25 is connected. Are extended in the vertical direction.

The pressure medium recovery unit 141 includes a pressure medium recovery chamber 146 that recovers the pressure medium from each processing chamber 4, a communication unit 147 that connects each processing chamber 4 and the pressure medium recovery chamber 146, and a pressure medium recovery chamber. 146 includes a discharge unit 149 that discharges the recovered pressure medium to the outside of the processing unit 5.
The pressure medium recovery chamber 141 is surrounded by the inner peripheral wall 29 of the processing shelf 25, the inner peripheral edge of the mounting plate 27, and the uppermost mounting plate 27, and is provided extending vertically in the center of the processing shelf 25. The discharge portion 149 is formed by connecting the opening 27 a of the lowermost mounting plate 27 and the insertion hole 31 a of the bottom plate 31 of the processing cylinder 26 via the inner peripheral wall 29.

The communication unit 147 includes a discharge hole 148 for discharging the pressure medium supplied to each processing chamber 4 to the pressure medium recovery chamber 146. The same number of each discharge hole 148 is formed in the inner peripheral wall 29 of each step of the processing shelf 25. Moreover, each discharge hole 148 is formed in substantially the same size.
In the present embodiment, the pressure medium supply header portion 140 is provided surrounding each processing chamber 4 in the radially outward direction of each processing chamber 4, and the pressure medium recovery portion 141 is provided in the central portion of each processing chamber 4. Therefore, the pressure medium supplied to each processing chamber 4 through the supply hole 145 flows in one direction in the radial direction in the processing chamber 4 as indicated by an arrow in the figure, and thereby In this way, no stagnation or backflow of the pressure medium in each processing chamber 4 occurs.

The present invention is not limited to that shown in the above embodiment.
For example, when the opening 27a of the mounting plate 27 is closed to form the pressure medium storage chamber 42, it may be closed by a lid member that covers the opening 27a.
The mounting plate 27 may have any shape as long as it can be provided with a predetermined gap between the inner peripheral surface of the processing tube 26 such as a polygonal shape or an elliptical shape. . Further, in order to secure the strength of the mounting plates 27, reinforcing members such as ribs may be attached to the back surfaces of the mounting plates 27.

Moreover, it is also possible to make the opening 27a of the mounting plate 27 smaller as it goes downward. Similarly, the size of the gap between the outer peripheral edge of the mounting table 27 and the inner peripheral surface of the processing cylinder 26 can be reduced as it goes downward.
Further, the number of stages of the mounting plate 27 and the interval between the mounting plates 27 can be set in accordance with the size of the product T to be processed, and the number of stages of 5 or more can be set.

The same effect as the present embodiment can also be obtained when a pressure medium circulation path is formed in the high-pressure vessel 2 in which the pressure medium rises from the lower side to the upper side in the processing unit 5 and descends to the outside of the processing unit 5. Is obtained.
From another point of view, in the present invention, the pressure medium flow path for causing the pressure medium to flow substantially uniformly in each processing chamber 4 is formed by the processing shelf 25 and the processing cylinder 26 constituting the processing unit 5. There is to do.

  That is, in the first embodiment, the outer edge of the uppermost mounting plate 27 of the processing shelf 25 is connected to the processing cylinder 26 without a gap, and the opening 27a of the lowermost mounting plate 27 is closed. As a result, a pressure medium flow path is formed in the processing section 5 for allowing the pressure medium to flow in one direction from the opening 27a of the uppermost mounting plate 27 toward the insertion hole 31a of the bottom plate 31 of the processing cylinder 26. . As a result, the pressure medium flows only from the opening 27 a of the uppermost mounting plate 27, and the pressure medium flowing into the processing unit 5 does not leak upward from the processing unit 5. Further, the pressure medium flowing into the processing unit 5 does not flow out of the insertion hole 31a without passing through the processing chamber 4.

Since each processing chamber 4 is connected in parallel to the pressure medium flow path in the processing unit 5, the pressure medium flowing into the processing unit 5 has a diameter of approximately the same amount in each processing chamber 4. Since it flows in one direction from the inner direction to the outer diameter direction and flows on the bottom plate 31 of the processing cylinder 26 from the outer diameter direction to the inner diameter direction, it is discharged out of the processing section 5 from the insertion hole 31a. is there.
Thus, the pressure medium flow path that connects the processing chambers 4 in parallel in the processing unit 5 is formed, so that the pressure medium having the same amount of heat is supplied to each processing chamber 4 at substantially the same flow rate. Therefore, each processing chamber 4 is maintained at a constant amount of heat. As a result, the soaking state of each processing chamber 4 is maintained, and as a result, the temperature gradient in the vertical direction of the processing unit 5 that conventionally has a temperature difference of several hundred degrees is included in the difference of several degrees.

It is sectional drawing which looked at the main-body part of the hot isostatic pressurization apparatus of 1st Embodiment which concerns on this invention from the front. It is sectional drawing which showed the pressure medium circulation path in a high pressure container. It is sectional drawing which follows the AA line of FIG. It is sectional drawing which follows the BB line of FIG. It is a principal part expanded sectional view which shows the attachment state to the baseplate of a rectification | straightening cylinder. It is a principal part expanded sectional view which shows the other attachment state to the baseplate of a rectification | straightening cylinder. It is sectional drawing which looked at the main-body part of the hot isostatic pressing apparatus of 2nd Embodiment which concerns on this invention from the front. It is sectional drawing which looked at the main-body part of the hot isostatic pressing apparatus shown as a reference example from the front.

DESCRIPTION OF SYMBOLS 1 Hot isostatic press 2 High pressure vessel 3 Forced flow means 4 Processing chamber 5 Processing part 6 Heating means 16 Fan 20 Bulkhead 21 Support leg 22 Cylindrical member 25 Processing shelf 26 Processing cylinder 27 Mounting plate 27a opening 28 Wall body DESCRIPTION OF SYMBOLS 29 Inner peripheral wall 30 Outer peripheral wall 31 Bottom plate 32 Rectification cylinder 40 Pressure medium supply header part 41 Pressure medium collection | recovery part 42 Pressure medium storage chamber 43 Inflow part 44 Communication means 45 Supply hole 46 Pressure medium recovery chamber 47 Communication means 48 Exhaust hole 49 Exhaust part DESCRIPTION OF SYMBOLS 50 Current plate 140 Pressure medium supply header part 141 Pressure medium collection | recovery part 142 Pressure medium storage chamber 143 Inflow part 144 Communication means 145 Supply hole 146 Pressure medium recovery chamber 147 Communication means 148 Exhaust hole 149 Exhaust part

Claims (6)

A high-pressure vessel (2) capable of being filled with a high-temperature and high-pressure pressure medium; and a forced flow means (3) for causing the pressure medium in the high-pressure vessel (2) to flow in a predetermined direction. inside the) processor which example Bei plurality of processing chambers to be accommodated to a workpiece (T) to (4) (5) is deployed, wherein the processing unit (5), said plurality of processing chambers (4 ) In a multistage shape in the vertical direction and a bottomed processing cylinder (26) surrounding the outer periphery and bottom of the processing shelf (25). In the hot isostatic pressurizing apparatus for high-temperature and high-pressure treatment of the article to be treated (T) accommodated in (4),
The pressure medium flowing the by forced flow means (3) have a pressure medium supply header (40) to the treatment chamber (4) in each stage,
The pressure medium supply header section (40) connects a plurality of mounting plates (27) having openings (27a) in the central portion thereof by wall bodies (28) and is provided on the lowermost mounting plate (27). By closing the opening (27a), it is provided extending in the vertical direction at the center of the processing shelf (25),
The pressure medium supply header section (40) includes an inflow section (43) provided in the uppermost mounting plate (27) to allow the pressure medium to flow into the pressure medium supply header section (40), and each process. A hot isostatic pressurizing device comprising communication means (44) communicating with the chamber (4). Said communicating means (44) is provided with a supply hole (45) for supplying pressure medium to the processing chamber (4), each supply hole (45) is formed in each the same size The hot isostatic pressing device according to claim 1 , wherein the device is a hot isostatic pressing device. The processing section (5) is provided with the pressure medium supply header section (40) and a pressure medium recovery section (41) for recovering the pressure medium supplied to each processing chamber (4). The hot medium according to claim 1 or 2, wherein the pressure medium recovery part (41) includes a discharge part (49) for discharging the recovered pressure medium to the outside of the processing part (5). Isostatic pressure press. Before SL medium supply header section (40) and the medium recovery section relates (41), one is provided to extend in the vertical direction in the central portion of the processing rack (25) and the other said processing tube ( 26) The hot isostatic pressurizing device according to claim 3 , wherein the hot isostatic pressurizing device is provided along the inner peripheral surface of No. 26). In the high-pressure vessel (2), the processing section (5), the forced flow means (3), and a heating means (6) for heating the pressure medium are provided, and the forced flow means (3) The pressure medium discharged from the pressure medium recovery part (41) is caused to flow toward the pressure medium supply header part (40), and the heating means (6) includes the pressure medium recovery part (41). The hot isostatic pressurizing device according to claim 3 or 4 , wherein the pressure medium flowing toward the pressure medium supply header section (40) is heated. Using the hot isotropic pressure pressurization device according to any one of claims 1 to 5, when the stored article to be processed (T) is subjected to high-temperature and high-pressure treatment,
A hot medium characterized by causing the pressure medium flowing by the forced flow means (3) to flow into the pressure medium supply header (40) and then flowing the pressure medium in one direction into the processing chamber (3). Isotropic pressure method.

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