JP4463502B2 - Method for recovering chlorosilanes - Google Patents

Description

[0001]
BACKGROUND OF THE INVENTION
The present invention relates to a novel method for recovering chlorosilanes from a chlorosilane liquid containing aluminum chloride. Specifically, the present invention provides a method capable of recovering chlorosilanes with a high recovery rate over a long period of time while preventing scaling of a distillation column reboiler or the like from chlorosilanes containing aluminum chloride.
[0002]
[Prior art]
The most typical method for producing chlorosilanes is a method of chlorinating or hydrochlorinating metallurgical grade silicon. Since metallurgical grade silicon usually contains about 0.01 to 10% by weight of impurities such as aluminum, iron and titanium, when synthesizing chlorosilanes from metallurgical grade silicon, Contains impurities such as aluminum chloride, iron chloride and titanium chloride.
[0003]
Since chlorosilanes are used as raw materials for producing semiconductor grade high-purity silicon or photovoltaic power generation grade silicon, crude chlorosilanes containing impurities are used after purification.
[0004]
Generally, these metal chlorides have a boiling point higher than that of useful chlorosilanes such as trichlorosilane (hereinafter also referred to as TCS) and silicon tetrachloride (hereinafter also referred to as STC). Thus, a method of evaporating and recovering chlorosilanes has been implemented.
[0005]
A typical conventional technique for separating impurities such as chlorosilanes and aluminum chloride is a method for continuously or intermittently withdrawing the bottom liquid of a distillation column to prevent concentration of aluminum chloride and other impurities. (See Patent Document 1). Here, the reason for preventing the concentration of impurities is that aluminum chloride in the impurities precipitates as a solid on the reboiler's heated surface, etc., not only lowering the heat transfer efficiency, but finally leading to a clogging state, hindering continuous operation It is to do. However, this method is not economical because a large amount of useful chlorosilanes are also discarded along with impurities.
[0006]
On the other hand, as a method for recovering chlorosilanes, as shown in FIG. 2, the reboiler 12 is installed on the outside of the bottom 13 of the distillation column 11 and the reboiler 12 is installed on the two liquid communication passages 10 and 14. A method has been proposed in which a settling chamber 15 is further expanded below the passage 10 below the liquid communication passage with the reboiler at the bottom of the distillation column, and the precipitated aluminum chloride 16 is accumulated in the settling chamber. (See Patent Document 2).
[0007]
As shown in FIG. 2, the feature of Patent Document 2 is that the heating surface of the reboiler 2 and the upper liquid communication passage 9 are disposed below the liquid surface of the distillation tower bottom 3, and further, the lower liquid communication passage 10 is further provided. This is because an aluminum chloride sedimentation chamber 8 is expanded at the lower position.
[0008]
In the above method, when the chlorosilane liquid A is heated by the reboiler 12, the chlorosilane liquid in the reboiler rises with a reduced density due to volume expansion, and the heated chlorosilane liquid passes through the upper liquid communication passage 14 to distill the column. It flows into the tower bottom 13. Using this flow as a driving force, chlorosilanes flow from the lower liquid communication passage 10, and convection is promoted between the distillation column bottom 13 and the reboiler 12. And the extreme concentration of the aluminum chloride concentration in the reboiler 12 is suppressed by the convection, and the solid aluminum chloride deposited exceeding the supersaturated stable concentration is naturally excluded from the convection to the settling chamber 15 by its own weight. Purified chlorosilanes effluent B is withdrawn from the top of the distillation column, and discharged chlorosilanes liquid D containing solid aluminum chloride is withdrawn from the bottom of sedimentation chamber 15.
[0009]
Although this method is clever and can be operated continuously for about half a year, the presence of a supersaturated state of aluminum chloride in the heated chlorosilanes causes the occurrence of scale, so 1 It was not enough to continue to prevent reboiler scaling over the long term of the year.
[0010]
Further, as a method completely different from the above-described method, a fluid containing hydrogen, chlorosilane vapor, aluminum chloride vapor, and silicon fine powder is treated with chlorosilane in a settler vessel at a high temperature of about 180 ° C. and a high pressure of about 3 MPaG. There has been proposed a method in which a silicon fine powder and an aluminum chloride precipitate are precipitated together in a chlorosilane liquid and separated by contacting with a liquid (Non-Patent Document 1).
[0011]
However, this method often suffers from equipment problems such as damage to equipment materials due to high temperature, high pressure, and corrosive environment, and damage to valves that quantitatively extract slurry from the high pressure environment. It was.
[Patent Document 1]
Japanese Patent Laid-Open No. 62-277193
[Patent Document 2]
JP-A-56-136601
[Non-Patent Document 4]
DOE / JPL contract 955334-10, “LOW-COST SOLAR ARRAY PROJECT;
[0012]
[Problems to be solved by the invention]
Therefore, the object of the present invention is to reduce aluminum chloride precipitation / clogging trouble in a reboiler in a distillation column from chlorosilane liquids containing aluminum chloride, under safe operating conditions, and with simple equipment and low energy. To propose a method for purifying and recovering chlorosilanes more efficiently.
[0013]
[Means for Solving the Problems]
As a result of intensive studies to solve the above problems, the present inventor has convection and circulation in the reboiler of Patent Document 2 as a factor that hinders long-term operation by the method of heating concentration, particularly the method of Patent Document 2. The concentration of dissolved aluminum chloride in the chlorosilanes that have reached the supersaturation just before the precipitation, the convection in the reboiler is weak, the chlorosilane bubbles generated by giving too much heating energy, etc., It was found that this is because the deposition of aluminum chloride may start on the reboiler's heated surface.
[0014]
In order to prevent reboiler scaling and clogging over a long period of one year, the inventor essentially reduced the concentration of aluminum chloride dissolved in the chlorosilanes supplied in the reboiler to below a certain concentration. Established the hypothesis that it must be maintained. Here, as a result of continuing investigations based on the above-mentioned phenomenon of the previous case, the inventors have come up with a method that utilizes the temperature dependence of the solubility of aluminum chloride in chlorosilane liquids.
[0015]
FIG. 3 shows the results of measuring the solubility of aluminum chloride in a chlorosilane liquid in units of 10 ° C. When the temperature is 50 ° C. or more, 2% by weight, 40 ° C., 0.5% by weight, and further 30 ° C. or less. It was found to be 0.1% by weight.
[0016]
Considering the above hypothesis and the solubility line of FIG. 3, when chlorosilanes are distilled at 50 ° C. or higher, the saturated solubility of aluminum chloride is about 2% by weight. That is, if the dissolved aluminum chloride concentration in the bottom liquid of the column is maintained at less than 2% by weight, it is predicted that the distillation column can be stably operated for a long period of time without causing reboiler clogging trouble. The operation of maintaining the dissolved aluminum chloride concentration at the bottom of the column at less than about 2% by weight was carried out while appropriately discarding useful chlorosilanes. As a result, the distillation column could be operated stably for one year continuously, and the above hypothesis could be verified.
[0017]
Further investigation continued to recover useful chlorosilanes. According to FIG. 3, it has been found that the saturated solubility of dissolved aluminum chloride can be reduced to 0.1% by weight only by cooling to 30 ° C. or lower. That is, if the tower bottom liquid containing about 2% by weight of dissolved aluminum chloride at 50 ° C. or higher is cooled to 30 ° C., 95% of dissolved aluminum chloride is precipitated as a solid and changed into a form that can be easily separated and removed. be able to.
[0018]
In order to keep the concentration of dissolved aluminum chloride in the bottom liquid of the distillation column below the saturation solubility, it is only necessary to deposit and separate the amount of aluminum chloride corresponding to the amount of aluminum chloride flowing into the system with the crude chlorosilanes. . In other words, the amount of aluminum chloride to be removed by cooling and precipitation is extremely small. Therefore, using this method, which can obtain high aluminum chloride removal efficiency with a simple operation, a part of the column bottom liquid is extracted and separated. It can be recycled to the distillation column.
[0019]
In addition, the precipitation due to cooling is less likely to produce a dry part on the surface of the apparatus than the precipitation due to the heat concentration, and the generated fine particulate aluminum chloride is excellent in sedimentation and redispersibility. The present invention has been completed by confirming that there is an effect that hardly occurs.
[0020]
That is, the present invention, when recovering chlorosilanes purified by distilling a chlorosilane liquid containing aluminum chloride as an effluent,
(1) In the distillation tower , Operating the column bottom liquid heating temperature to be 50 ° C. or higher, and A distillation step of distilling the chlorosilane liquid while adjusting the concentration of aluminum chloride dissolved in the bottom liquid to a concentration below the saturation solubility at the temperature of the bottom liquid;
(2) A part of the bottom liquid of the distillation column in the distillation step is extracted, So that the temperature is below 40 ℃ A precipitation step of cooling and precipitating an aluminum chloride solid;
(3) Aluminum chloride solid deposited in the precipitation process And chlorosilane solution Separation And solid particles of aluminum chloride are present in the separated chlorosilane liquid at a concentration of 0.1 to 10% by weight. Separation process,
as well as
(4) Separated from the separation step Contains and dissolves solid particles of aluminum chloride Circulating chlorosilane liquid with reduced aluminum chloride concentration into the distillation process And used to adjust the aluminum chloride concentration in the process Circulation process,
A method for recovering chlorosilanes, comprising:
[0021]
According to further studies by the present inventor, the solubility curve of FIG. 3 is established only when the temperature goes from high temperature to low temperature, unlike the generally well-known relationship between dissolution and precipitation by a salt and a solvent. It is a unidirectional solubility curve. That is, solid aluminum chloride once precipitated by cooling is not substantially redissolved even when the chlorosilane liquid is heated to 50 ° C. or higher.
[0022]
Therefore, even when the concentration of aluminum chloride dissolved in the chlorosilane liquid is low, the precipitated solid aluminum chloride can be present. Utilizing such a phenomenon, it is preferable to perform incomplete separation of the aluminum chloride deposited in the cooling step and to make the solid particles of aluminum chloride exist in the separated chlorosilane liquid. That is, the solid particles remain in a solid state from the distillation step to the cooling step, and act as seed crystals in the cooling step, so that aluminum chloride can be precipitated efficiently.
[0023]
DETAILED DESCRIPTION OF THE INVENTION
In the present invention, the chlorosilane liquid containing aluminum chloride includes metallurgical grade silicon having a purity of about 90 to 99% containing aluminum, iron, titanium, etc., chlorine, or hydrogen chloride, or hydrogen and silicon tetrachloride, etc. A typical example is one obtained by condensing a mixed gas of chlorosilanes produced by reacting at a temperature of 300 to 600 ° C.
[0024]
The chlorosilanes synthesis reaction is different in the type and production rate of chlorosilanes produced depending on the reaction raw materials and reaction conditions, but TCS (SiHCl ₃ ), STC (SiCl ₄ ) And dichlorosilane (SiH) ₂ Cl ₂ ) And other representative chloromonosilanes. In addition to these, pentachlorodisilane (Si ₂ HCl ₅ ) And hexachlorodisilane (Si ₂ Cl ₆ ) And other multimeric chlorosilanes may also be contained.
[0025]
In addition, in chlorosilanes synthesis reaction using metallurgical grade silicon as raw material, some impurities contained in metallurgical grade silicon are also chlorinated, and crude chlorosilanes contain impurity elements such as aluminum chloride, iron chloride, titanium chloride, calcium chloride, etc. Is also contained.
[0026]
Since the above-mentioned synthesis reaction is generally carried out industrially in a fluidized bed reaction, metal fines of metallurgical grade silicon are often accompanied with the reaction exhaust gas.
[0027]
Therefore, the chlorosilane liquid containing aluminum chloride according to the present invention may include a part or all of the accompanying silicon fine powder. Alternatively, a process of removing a silicon fine powder by installing a filter prior to the condensation operation may be inserted so that the silicon fine powder is not contained.
[0028]
Hereinafter, the present invention will be described with reference to a typical embodiment shown in FIG.
[0029]
The distillation step (1) for purifying the chlorosilane liquid by distillation is a step of substantially separating high-boiling impurities such as aluminum chloride and chlorosilanes to be recovered and purified.
[0030]
In the distillation step (1), a known distillation column such as the distillation column 1 having the reboiler 2 can be used. That is, as the distillation column tray, a commonly used one can be used without limitation. For example, a filling type filled with regular packing, irregular packing, etc., a bubble cap type, a perforated plate type, and the like can be mentioned.
[0031]
The chlorosilane liquid A containing aluminum chloride supplied to the distillation step (1) can be supplied to any part of the distillation column, but is supplied directly to the bottom of the distillation column in order to prevent contamination of the tray. Is more preferable.
The reboiler 2 for applying energy for evaporating chlorosilanes may be a direct heating method with a jacket around the bottom of the distillation column, or a heat exchanger installed outside the bottom of the distillation column. Moreover, the system which installs a heat exchanger in the inside of the distillation column tower bottom 3 is also employable.
[0032]
As a heat exchanger, a shell and tube method is generally preferably used in order to increase a heat transfer area, but a serpentine type or an electric heater can also be used.
[0033]
Since the chlorosilane liquid stays in the heat exchanger to which the energy of distillation is applied and aluminum chloride is highly concentrated, it causes scaling, and therefore, it is preferable to have a structure in which the liquid does not easily stay. As a method in which the liquid does not easily stay, a method using convection by heating may be used, and a method of forcibly flowing the liquid using a pump or the like can also be suitably employed.
[0034]
Since the boiling point difference between the chlorosilanes to be recovered and purified and the impurities to be separated and removed is very large, distillation does not require a particularly high rectification. That is, it may be in a range where the distillation operation can be maintained, and the reflux ratio may be about 0.1 to 1.
[0035]
In the distillation step (1), the temperature of the bottom liquid is 50 ° C. or higher, more preferably 70 to 150 ° C., and most preferably 80 to 120 ° C. Thus, by setting the temperature of the bottom liquid to 50 ° C. or higher, the solubility of aluminum chloride in the chlorosilane liquid can be increased to about 2% by weight, and the concentration of dissolved aluminum chloride in the bottom liquid can be controlled. The range can be widened and there is room for driving.
[0036]
In addition, the amount of solid aluminum chloride precipitated in the precipitation step (2) depends on the difference between the dissolved aluminum chloride concentration in the tower bottom liquid and the saturated dissolved concentration after cooling, so that the dissolved aluminum chloride concentration in the tower bottom liquid is as much as possible. The higher one is preferable because the removal efficiency of aluminum chloride can be increased while reducing the treatment circulation amount of the present invention.
[0037]
On the other hand, in order to prevent aluminum chloride from precipitating and clogging in the reboiler 2 and to achieve stable operation over a long period of time, the concentration of aluminum chloride dissolved in the tower bottom liquid is the saturation solubility at the temperature of the tower bottom liquid. It is necessary to adjust to less than. For example, when the temperature of the column bottom liquid is 50 ° C. or higher, the concentration of dissolved aluminum chloride in the column bottom liquid is maintained in the range of 0.5 to 1.8% by weight, preferably 0.8 to 1.5% by weight. It is preferable to do.
[0038]
The method for measuring the dissolved aluminum chloride concentration and the solid aluminum chloride concentration in the chlorosilane liquid containing solid aluminum chloride can be easily carried out by the methods exemplified below. First, the chlorosilane liquid in the tower bottom liquid is sampled without changing its temperature and the weight is measured. Subsequently, the precipitate and the supernatant liquid are separated by filtration without changing the temperature. The precipitate is dried at a temperature of 50 ° C. or less in an inert gas atmosphere and weighed, and the solid aluminum chloride concentration is calculated from the relationship with the initial sampling weight of the chlorosilane solution.
[0039]
On the other hand, a part or all of the supernatant is weighed and evaporated to dryness at a temperature of 50 ° C. or lower in an inert gas atmosphere, and the weight of the residue is measured. The dissolved aluminum chloride concentration is calculated from the relationship between the residue weight, the amount of collected supernatant, the solid aluminum chloride concentration, and the initial sampling amount of the chlorosilane solution. Most of the residues are aluminum chloride. To confirm this, use fluorescent X-ray method, or dissolve the residue and use ICP (inductively coupled plasma) method to confirm the elemental composition of the residue. Correct the density as appropriate.
[0040]
In the present invention, a part of the liquid in the distillation step (1) is withdrawn and sent to a precipitation step (2) for cooling and precipitating a part of the dissolved aluminum chloride.
[0041]
The liquid feeding method from the distillation step (1) to the precipitation step (2) can be used without particular limitation as long as it can move the liquid. That is, any of the methods using the weight of the liquid, the pressure difference between the processes, or a pump can be suitably employed.
[0042]
In the precipitation step (2), it is necessary to cool the liquid. At this time, in order to sufficiently reduce the concentration of the dissolved matter while increasing the precipitation rate of the aluminum chloride solid, it is preferable to employ a temperature of the chlorosilane liquid that is sufficiently lower than the temperature of the tower bottom liquid. Specifically, when the temperature of the column bottom liquid is 50 ° C. or higher, it is preferably cooled to 40 ° C. or lower, preferably −50 to 30 ° C., more preferably −20 to 20 ° C.
[0043]
As a method for cooling the chlorosilane liquid in the precipitation step (2), it is most convenient and preferable to use a known liquid cooling device 4 for circulating a refrigerant inside or outside the container used in the step. At this time, aluminum chloride slightly deposits and scales on the cooled wall surface, and the heat exchange capacity for cooling may gradually decrease, but such scale is extremely easy to remove. Therefore, even if a scale is generated by providing a means for scraping the scale on the wall to be cooled, it can be easily removed. As a method for scraping off the scale, there are a method of rotating a paddle, a helical ribbon or the like with an electric motor, a method of circulating a sponge ball or the like together with a chlorosilane liquid, and any of them can be suitably employed.
[0044]
In this invention, in order to discharge | emit at least one part of the aluminum chloride solid precipitated in the said precipitation process out of the system, the separation process (3) which isolate | separates a chlorosilane liquid and solid aluminum chloride is required.
[0045]
Since the precipitated aluminum chloride solid 7 has extremely good sedimentation properties, it is most preferable to use the sedimentation tank 5 as shown in the figure because the apparatus is simple.
[0046]
As another aspect of the method for separating the aluminum chloride solid from the chlorosilane liquid, a filtration method using a filter, a centrifugal separator method, or the like can be suitably employed.
[0047]
The aluminum chloride solid separated from the chlorosilane liquid by sedimentation, filtration, or centrifugal separation is discharged from the separation step (3) as a discharged chlorosilane liquid D in a slurry or sludge state containing some chlorosilane liquid. Is done. At this time, the smaller the amount of chlorosilanes discharged together, the higher the recovery rate of useful chlorosilanes. The purified chlorosilane effluent B is taken out from the top of the distillation column.
[0048]
What should be noted here is that solid aluminum chloride hardly re-dissolves even when heated, as described in the solubility curve of FIG. In addition, since the dissolved aluminum chloride is precipitated and solidified in the form of particles, the redispersibility is also very good. Therefore, if the liquid is not suspended, there is almost no trouble of depositing on the reboiler and blocking it. .
[0049]
Therefore, in the separation step (3) of the present invention, without separating and removing the total amount of precipitated solid aluminum chloride, a part of the solid aluminum chloride is present in the separated chlorosilane liquid, through the circulation line 6, It can be recycled to the distillation process. In this case, the concentration of dissolved aluminum chloride is not substantially increased by re-dissolution of the solid aluminum chloride.
[0050]
The solid aluminum chloride effectively acts as a seed crystal during the precipitation of aluminum chloride in the subsequent precipitation step, and can increase the deposition rate and, consequently, the processing rate.
[0051]
As an example of a preferred embodiment for carrying out the above embodiment, in the separation by filtration, an embodiment in which the opening of the filtration surface is widened to facilitate the passage of fine aluminum chloride particles, as shown in FIG. In the sedimentation separation in the tank 5, there may be mentioned a mode in which the liquid is extracted in a state where the sedimentation is not completely completed.
[0052]
As described above, when solid particles of aluminum chloride are present in the chlorosilane liquid circulating in the distillation step, the concentration of the particles may be adjusted to about 0.1 to 10% by weight of a device such as a pump using solid particles. It is preferable in order to prevent trouble. The size of the solid particles is preferably about 0.1 to 10 μm.
[0053]
In addition, as another method for causing the aluminum chloride solid particles to exist as seed crystals in the precipitation step, a mode in which a part of the slurry or sludge separated in the separation step (3) is recycled to the precipitation step (2) is also available. It can be suitably employed.
[0054]
In the present invention, the precipitation step (2) and the separation step (3) may be performed using an apparatus having a function of simultaneously performing the same in the same container. Examples of the apparatus include a crystal-Oslo crystallizer, a DTB crystallizer, and a DP crystallizer.
[0055]
In the present invention, chlorosilanes in which aluminum chloride is partially separated as a solid by the separation step (3) and the dissolved aluminum chloride concentration is reduced are finally recycled to the distillation step (1) by the circulation step (4). Therefore, the concentration of aluminum chloride dissolved in chlorosilanes reaching the reboiler in the distillation step (1) can be maintained at a low concentration, preventing troubles caused by precipitation of aluminum chloride and long-term continuous operation for one year. Can be achieved.
[0056]
【The invention's effect】
As understood from the above description, according to the present invention, it is possible to reduce the trouble of clogging a distillation column reboiler from chlorosilane liquids containing aluminum chloride and to efficiently purify and recover chlorosilanes with less energy. It is possible and industrially very useful.
[0057]
【Example】
EXAMPLES Hereinafter, although the Example for demonstrating this invention in detail is given and demonstrated, this invention is not limited to these Examples.
[0058]
Example 1
A 10,700 kg / H chlorosilane synthesis reactor condensate containing 84% by weight STC, about 16% by weight TCS, and about 0.01% by weight dissolved aluminum chloride is fed to a distillation column to remove heavy metal components and distilled. Went. The bottom liquid of the distillation column in the distillation step (1) was adjusted to about 80 ° C.
[0059]
The bottom liquid was extracted from the bottom of the distillation tower at a rate of 80 kg / H, and cooled to 20 ° C. using a heat exchanger with scraping blades in the precipitation step (2). In the separation step (3), the chlorosilane liquid which was cooled to 20 ° C. and precipitated a solid was passed through a filter facility having a 1 μm mesh Teflon (registered trademark) bag filter, and the precipitated aluminum chloride solid was separated by filtration.
[0060]
The filter equipment was of two series, and when the filtration differential pressure increased, the flow path was switched to another series and then backwashed with the filtrate. While the precipitate was continuously filtered in this manner, the filter backwash liquid containing aluminum chloride solid was withdrawn from the lower part of the filter equipment at an average rate of about 12 kg / H and neutralized and discarded. The filtrate was returned to the distillation column bottom at an average of about 68 kg / H in the circulation step (4).
[0061]
When this operation is continued for about 500 hours, the concentration of dissolved aluminum chloride in the bottom liquid of the distillation column is about 1.5% by weight, and the concentration of dissolved aluminum chloride in the return liquid of the distillation column is about 0.1% by weight. The aluminum chloride concentration therein was about 21% by weight. The operation was further continued, and finally a stable continuous operation was performed for 8000 hours, followed by a planned stop operation. The amount of chlorosilanes discarded in 8000 hours was about 96 tons.
[0062]
Example 2
In the same distillation operation as in Example 1, a 150-liter sedimentation vessel was used instead of the bag filter in the separation step (3). The precipitated aluminum chloride solid was allowed to settle in the sedimentation vessel, while the concentrate on which the aluminum chloride solid had settled was continuously extracted from the lower portion of the sedimentation vessel at a rate of 6 kg / H and neutralized and discarded. The supernatant liquid from the separation step (3) was returned to the bottom of the distillation column at about 74 kg / H in the circulation step (4).
[0063]
When this operation was continued for about 500 hours, the concentration of dissolved aluminum chloride in the bottom liquid of the distillation column was about 1.5% by weight, and the concentration of dissolved aluminum chloride in the return liquid of the distillation column was about 0.1% by weight. The solid aluminum chloride concentration in the return liquid was about 0.5% by weight, and the aluminum chloride concentration in the concentrate was about 21% by weight.
[0064]
The operation was further continued, and finally a stable continuous operation was performed for 8000 hours, followed by a planned stop operation. The amount of chlorosilanes discarded in 8000 hours was about 40 tons.
[0065]
When the solid aluminum chloride not separated in the separation step (3) is circulated to the precipitation step (2) via the distillation step (1), the existing aluminum chloride solid becomes a seed crystal and a well-precipitated solid. Since the particles were produced, it is assumed that aluminum chloride could be separated efficiently with a simple sedimentation vessel.
[0066]
Comparative Example 1
In the same distillation operation as in Example 1, the liquid extracted from the bottom of the distillation tower was directly neutralized at 80 kg / H without passing through the precipitation step (2), separation step (3), and circulation step (4). Discarded. When this operation was continued for about 500 hours, the concentration of dissolved aluminum chloride in the bottom liquid of the distillation column was about 1.5% by weight. The operation was further continued, and finally a stable continuous operation was performed for 8000 hours, followed by a planned stop operation. The amount of chlorosilanes discarded in 8000 hours was about 630 tons.
[0067]
Comparative Example 2
In the same distillation operation as in Example 1, the amount extracted from the bottom liquid of the distillation column is reduced to 50 kg / H, and the other steps are the same as the precipitation step (2), separation step (3), and circulation step in Example 1. The processing liquid was returned to the bottom of the distillation tower via (4). When this operation is continued for about 500 hours, the concentration of dissolved aluminum chloride in the bottom liquid of the distillation column is about 2.5% by weight, and the concentration of aluminum chloride in the return liquid of the distillation column is about 0.1% by weight. The aluminum chloride concentration of was about 20% by weight. When the operation was further continued, the distillation column reboiler was blocked after about 5000 hours, and it was difficult to continue the distillation operation. The operation was stopped for about 0.5 months to open and clean the distillation tower.
[Brief description of the drawings]
FIG. 1 is a process chart showing a position aspect of a method of the present invention
FIG. 2 is a process diagram showing a conventional method.
FIG. 3 is a graph showing the relationship between chlorosilanes station temperature and dissolved aluminum chloride concentration.
[Explanation of symbols]
1 Distillation tower
2 Reboiler
3 Bottom of distillation tower
4 Liquid cooling device
5 Settling tank
6 Circulation line
7 Aluminum chloride solid
8 Settling chamber
9 Liquid communication passage
10 Liquid communication passage
A Chlorosilane liquid
B Purified chlorosilane effluent
C Circulating chlorosilane liquid
D discharged chlorosilane liquid

Claims (1)

In collecting chlorosilanes purified by distilling chlorosilane liquid containing aluminum chloride as an effluent,
(1) In the distillation tower, the heating temperature of the bottom liquid is operated to be 50 ° C. or higher, and the concentration of aluminum chloride dissolved in the bottom liquid is set to a concentration lower than the saturation solubility at the temperature of the bottom liquid. Distillation process to distill chlorosilane liquid while adjusting,
(2) A precipitation step of extracting a part of the bottom liquid of the distillation column in the distillation step and cooling the bottom liquid to a temperature of 40 ° C. or lower to precipitate an aluminum chloride solid,
(3) A separation step of separating the aluminum chloride solid precipitated in the precipitation step and the chlorosilane liquid, and causing solid particles of aluminum chloride to be present in the separated chlorosilane liquid at a concentration of 0.1 to 10% by weight ;
And (4) circulating the chlorosilane liquid containing solid aluminum chloride particles separated from the separation step and having a reduced concentration of aluminum chloride to the distillation step, and adjusting the aluminum chloride concentration in the step. circulation step of,
A method for recovering chlorosilanes, comprising:

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