JP4456613B2 - Correction pattern image generation apparatus and correction pattern image generation method - Google Patents

Description

  The present invention relates to a correction pattern image generation apparatus and a correction pattern image generation method, and relates to, for example, a pattern inspection technique for inspecting a pattern defect of an object serving as a sample used for semiconductor manufacture, and for lithography used for manufacturing a semiconductor element The present invention relates to an image correction method suitable for use in a pattern inspection for inspecting a defect of a mask, and a pattern defect inspection method using the image correction method.

  In recent years, the circuit line width required for a semiconductor element has been increasingly narrowed as a large scale integrated circuit (LSI) is highly integrated and has a large capacity. These semiconductor elements use an original pattern pattern (also referred to as a mask or a reticle, hereinafter referred to as a mask) on which a circuit pattern is formed, and the pattern is exposed and transferred onto a wafer by a reduction projection exposure apparatus called a stepper. It is manufactured by forming a circuit.

  In addition, improvement in yield is indispensable for manufacturing an LSI that requires a large amount of manufacturing cost. One of the major factors that reduce the yield is a pattern defect of a mask used when an ultrafine pattern is exposed and transferred onto a semiconductor wafer. In recent years, with the miniaturization of LSI pattern dimensions formed on semiconductor wafers, the dimensions that must be detected as pattern defects have become extremely small. Therefore, it is necessary to improve the accuracy of a pattern inspection apparatus that inspects defects in a transfer mask used in LSI manufacturing.

  Methods for inspecting pattern defects are roughly classified into die-to-die comparison (Die to Die comparison: DD comparison) inspection and die-to-database comparison (Die to Database comparison: DB comparison) inspection. The DD comparison inspection is a method of detecting a defect by comparing measurement data (inspection reference pattern image and inspection pattern image) of two dies on a reticle, and the DB comparison inspection is sensor data (inspection pattern of a die). Image) and die design data (inspection reference pattern image) generated from CAD data for LSI design are used to detect defects.

  In the inspection method in such an inspection apparatus, the sample is placed on the stage, and the stage is moved so that the light beam scans on the sample and the inspection is performed. The sample is irradiated with a light beam by a light source and an illumination optical system. The light transmitted or reflected by the sample is imaged on the sensor via the optical system. The image picked up by the sensor is sent to the comparison circuit as measurement data. The comparison circuit compares the measured data and the design data after aligning the images according to an appropriate algorithm, and determines that there is a pattern defect if they do not match.

Here, in recent years, with the miniaturization of the pattern on the lithography mask, it has become necessary to detect minute defects that are buried in the image misalignment of images to be compared, image expansion / contraction, undulation, sensing noise, and the like. . For this purpose, it is necessary to align the inspection reference pattern image and the pattern image to be inspected with high accuracy. Furthermore, image correction is important for detecting these defects. Therefore, conventionally, in the first stage of comparing and inspecting two images of the inspection reference pattern image and the pattern image to be inspected, after the alignment of both images, correction of the expansion / contraction of the image (for example, see Patent Document 1) and the swell of the image Image correction such as correction, resizing correction, and noise averaging processing were sequentially performed. However, repeating such corrections causes a cumulative error, which is a major factor for image deterioration. Furthermore, if the inspection reference pattern image and the pattern image to be inspected are too close to each other after correction, it becomes difficult to detect the defect. That is, excessive correction is counterproductive.
JP 2000-241136 A

  Accordingly, the present invention provides an apparatus and a method for generating a corrected image in which an image of a sample to be inspected is appropriately corrected in order to overcome the above-described problems and appropriately inspect the image of the sample to be inspected. With the goal.

A correction pattern image generation device according to an aspect of the present invention includes:
A correction pattern image generation device that generates a correction pattern image by correcting an inspection reference pattern image of the inspection target sample using an inspection pattern image of the inspection target sample and an inspection reference pattern image of the inspection target sample,
Generating simultaneous equations based on a first prediction model using the inspection pattern image data at arbitrary coordinates, the inspection reference pattern image data at arbitrary coordinates, and the inspection reference pattern image data at peripheral coordinates And
A coefficient calculator that solves the simultaneous equations and calculates a coefficient to be multiplied by the inspection reference pattern image data of each coordinate in the simultaneous equations;
An element sum calculation unit for calculating the element sum of the first direction component and the element sum of the second direction component for the first matrix having the coefficients as elements;
Based on the relative displacement between the inspection reference pattern image and the pattern image to be inspected, the coefficient of the first direction component and the coefficient of the second direction component of the simultaneous equations based on the second prediction model are calculated. A second parameter calculation unit for calculating;
A combining unit that combines the element sum of the first direction component based on the first prediction model and the coefficient of the second direction component based on the second prediction model;
A correction pattern image data calculation unit that calculates the correction pattern image data of the arbitrary coordinates using the combination coefficient obtained as a result of the combination as a coefficient of simultaneous equations based on the first prediction model, and outputs a calculation result; ,
It is provided with.

A correction pattern image generation method according to an aspect of the present invention includes:
A correction pattern image generation method for generating a correction pattern image obtained by correcting an inspection reference pattern image of the inspection target sample using an inspection pattern image of the inspection target sample and an inspection reference pattern image of the inspection target sample,
Generating a simultaneous equation based on a first prediction model using the inspection pattern image data of arbitrary coordinates, the inspection reference pattern image data of arbitrary coordinates, and the inspection reference pattern image data of peripheral coordinates;
Solving the simultaneous equations and calculating a coefficient by which the inspection reference pattern image data of each coordinate in the simultaneous equations is multiplied;
Calculating an element sum of a first direction component and an element sum of a second direction component for a first matrix having the coefficients as elements;
Based on the relative displacement between the inspection reference pattern image and the pattern image to be inspected, the coefficient of the first direction component and the coefficient of the second direction component of the simultaneous equations based on the second prediction model are calculated. A step of calculating;
Combining the element sum of the first direction component based on the first prediction model and the coefficient of the second direction component based on the second prediction model;
Using the combined coefficient obtained as a result of combining as a coefficient of simultaneous equations based on the first prediction model, calculating the correction pattern image data of the arbitrary coordinates, and outputting the calculation result;
It is provided with.

  According to the present invention, it is possible to suppress the occurrence of cumulative error and to suppress overcorrection of an image. As a result, it is possible to generate a corrected image in which the image of the inspection target sample is appropriately corrected.

  Hereinafter, in the embodiment, the final fine adjustment alignment from the sub-pixel level and image correction are integrated, and image correction using an input / output prediction model that is effective image correction with less image deterioration will be described. . In this image correction, for example, alignment and image correction in units of sub-pixels are realized at the same time using a two-dimensional input / output linear prediction model with the inspection reference pattern image as input data and the inspection pattern image as output data. In this case, model parameters are identified by creating a matrix relational expression from image data and solving simultaneous equations. Then, a correction pattern image is generated based on the identified two-dimensional linear prediction model. Here, when an image having pattern edge information biased, such as a line and space pattern or a plain pattern, is input, an appropriate model parameter may not be generated due to a lack of input information. In such a case, when there is a defect image in the inspection reference pattern image, the defect image may be deteriorated. This hinders the inspection of the sample to be inspected. Therefore, in the following embodiment, when image correction is performed in a pattern inspection apparatus such as a mask inspection apparatus for lithography, model parameters generated based on two-dimensional linear prediction are evaluated. Correct. Thus, an effective image correction method adapted to various pattern images will be described.

Embodiment 1 FIG.
FIG. 1 is a conceptual diagram showing the configuration of the sample inspection apparatus in the first embodiment.
In FIG. 1, an inspection apparatus 100 that inspects a defect of a sample such as an exposure mask or wafer on which a pattern is formed includes an optical image acquisition unit 150 and a control system circuit 160. The optical image acquisition unit 150 includes an XYθ table 102, a light source 103, an enlargement optical system 104, a photodiode array 105, a sensor circuit 106, a laser length measurement system 122, an autoloader 130, and an illumination optical system 170. In the control system circuit 160, the control computer 110 serving as a computer transmits a position circuit 107, a comparison circuit 108, a development circuit 111, a reference circuit 112, an autoloader control circuit 113, and a table control circuit 114 via a bus 120 serving as a data transmission path. , Magnetic disk device 109, magnetic tape device 115, flexible disk device (FD) 116, CRT 117, pattern monitor 118, and printer 119. The XYθ table 102 is driven by an X-axis motor, a Y-axis motor, and a θ-axis motor. In FIG. 1, description of components other than those necessary for describing the first embodiment is omitted. Needless to say, the sample inspection apparatus 100 usually includes other necessary configurations.

FIG. 2 is a conceptual diagram showing an internal configuration of the comparison circuit of FIG.
In FIG. 2, the comparison circuit 108 includes a memory 142, a memory 144, an alignment unit 140, a correction pattern image generation unit 200, and a comparison unit 146. The memory 142 stores reference data (inspection standard pattern image data) input from the reference circuit 112. The memory 144 stores measurement data (inspected pattern image data) input from the sensor circuit 106. The correction pattern image generation unit 200 is an example of a correction pattern image generation device. The correction pattern image generation unit 200 includes a simultaneous equation generation unit 210, a parameter calculation unit 212, a parameter element partial sum calculation unit 214, a determination unit 216, a parameter element sum calculation unit 217, a cubic parameter calculation unit 218, a synthesis unit 220, And a correction pattern image data calculation unit 222. In FIG. 2, description of components other than those necessary for describing the first embodiment is omitted. The comparison circuit 108 or the correction pattern image generation unit 200 may include other configurations. The functions of the alignment unit 140, the correction pattern image generation unit 200, and the comparison unit 146 may be configured by software that can be executed by a computer, for example. However, the present invention is not limited to this. For example, it may be implemented by hardware using an electric circuit. Or you may make it implement by the combination of the hardware and software by an electrical circuit. Alternatively, a combination of such hardware and firmware may be used. Similarly, simultaneous equation generation unit 210, parameter calculation unit 212, parameter element partial sum calculation unit 214, determination unit 216, parameter element sum calculation unit 217, cubic parameter calculation unit 218, synthesis unit 220, and correction pattern image data calculation unit Each function 222 may be configured by software that can be executed by a computer, for example. Or you may carry out by the hardware by an electric circuit. Or you may make it implement by the combination of the hardware and software by an electrical circuit. Alternatively, a combination of such hardware and firmware may be used.

  Hereinafter, the operation of the inspection apparatus 100 will be described. First, as an optical image acquisition step, the optical image acquisition unit 150 acquires an optical image on the photomask 101 serving as a sample on which a pattern is formed based on the design data. Specifically, the optical image is acquired as follows.

  A photomask 101 to be inspected is placed on an XYθ table 102 provided so as to be movable in a horizontal direction and a rotation direction by motors of XYθ axes, and the pattern formed on the photomask 101 includes an XYθ table. Light is emitted by a suitable light source 103 disposed above 102. The light beam emitted from the light source 103 irradiates the photomask 101 via the illumination optical system 170. A magnifying optical system 104, a photodiode array 105, and a sensor circuit 106 are arranged below the photomask 101, and the light transmitted through the photomask 101 is optically imaged on the photodiode array 105 via the magnifying optical system 104. Is imaged and incident. The magnifying optical system 104 may be automatically focused by an unillustrated autofocus mechanism.

FIG. 3 is a diagram for explaining an optical image acquisition procedure.
As shown in FIG. 3, the inspection area is virtually divided into a plurality of strip-shaped inspection stripes having a scan width W in the Y direction, and each of the divided inspection stripes is continuously scanned. Thus, the operation of the XYθ table 102 is controlled, and an optical image is acquired while moving in the X direction. In the photodiode array 105, images having a scan width W as shown in FIG. 3 are continuously input. Then, after acquiring the image of the first inspection stripe, the image of the scan width W is continuously input in the same manner while moving the image of the second inspection stripe in the opposite direction. When an image in the third inspection stripe is acquired, the image moves while moving in the direction opposite to the direction in which the image in the second inspection stripe is acquired, that is, in the direction in which the image in the first inspection stripe is acquired. To get. In this way, it is possible to shorten a useless processing time by continuously acquiring images.

  The pattern image formed on the photodiode array 105 is photoelectrically converted by the photodiode array 105 and further A / D (analog-digital) converted by the sensor circuit 106. The photodiode array 105 is provided with a sensor such as a TDI (Time Delay Integrator) sensor. By continuously moving the XYθ table 102 serving as a stage in the X-axis direction, the TDI sensor images the pattern of the photomask 101 serving as a sample. These light source 103, magnifying optical system 104, photodiode array 105, and sensor circuit 106 constitute a high-magnification inspection optical system.

  The XYθ table 102 is driven by the table control circuit 114 under the control of the control computer 110. It can be moved by a drive system such as a three-axis (XY-θ) motor that drives in the X, Y, and θ directions. For example, step motors can be used as these X motor, Y motor, and θ motor. The movement position of the XYθ table 102 is measured by the laser length measurement system 122 and supplied to the position circuit 107. The photomask 101 on the XYθ table 102 is automatically conveyed from the autoloader 130 driven by the autoloader control circuit 113, and is automatically discharged after the inspection is completed.

  Measurement data (pattern image data to be inspected: optical image) output from the sensor circuit 106 is sent to the comparison circuit 108 together with data indicating the position of the photomask 101 on the XYθ table 102 output from the position circuit 107. The measurement pattern data is, for example, 8-bit unsigned data, and represents the brightness gradation of each pixel. The measurement data is compared for each image data of 512 pixels × 512 pixels, for example.

On the other hand, design data used at the time of pattern formation of the photomask 101 is stored in a magnetic disk device 109 which is an example of a storage device.
Then, as a design data input process, the data is read from the magnetic disk device 109 to the development circuit 111 through the control computer 110. Then, as a development process, the development circuit 111 converts the read design graphic data of the photomask 101 to be inspected into binary or multivalue image data, and sends the image data to the reference circuit 112. It is done. Here, the design data is a rectangle or triangle as a basic figure. For example, the coordinates (x, y) at two vertex positions of the figure, or a figure code serving as an identifier for distinguishing the figure type such as a rectangle or a triangle. The graphic data defining the shape, size, position, etc. of each pattern graphic is stored in the information. When design data as such graphic data is input to the expansion circuit 111, it is expanded to data for each graphic. Then, a graphic code indicating a graphic shape of the graphic data, a graphic dimension, and the like are interpreted. Then, it is developed into binary or multi-value graphic pattern data as a pattern arranged in a grid having a grid of a predetermined quantization dimension as a unit. In other words, the design data is read, and the occupation ratio occupied by the graphic indicated by the graphic data in the design data is calculated for each cell formed by virtually dividing the inspection area as a cell having a predetermined dimension as a unit, and the n-bit Occupancy data is generated and output to the internal pattern memory. For example, it is preferable to set one square as one pixel. If a resolution of 1/2 ⁸ (= 1/256) is given to one pixel, 1/256 small areas are allocated by the figure area arranged in the pixel, and the occupation ratio in the pixel is set. Calculate. Then, it is generated as 8-bit occupancy data and stored in an internal pattern memory. Then, the reference circuit 112 creates reference data (inspection standard pattern image data) for comparison with measurement data from the graphic image data sent from the development circuit 111. The reference data to be compared is created as image data of 512 pixels × 512 pixels, for example, like the measurement data.

  Here, reference data is created based on design data in order to perform “die to database inspection”, but the present invention is not limited to this. A “die to die inspection” can also be performed. In that case, reference data may be created based on another measurement data (optical image) to be compared. Then, the reference data is sent to the comparison circuit 108.

  The comparison circuit 108 captures reference data and measurement data. Reference data (inspection standard pattern image data) is stored in the memory 142. Measurement data (pattern image data to be inspected) is stored in the memory 144. Then, the alignment unit 140 shifts pixel by pixel and corrects the pixel position deviation. That is, the positional deviation between both images is driven to less than one pixel. The evaluation function represented by the sum of squares of the gradation differences of the corresponding pixels of both images may be adjusted in advance to a position where the evaluation function is minimized. Similarly, the amount of positional deviation in units of sub-pixels is obtained, and the amount of positional deviation in the horizontal direction is 1 and the amount of positional deviation in the vertical direction is m. Thereafter, after correcting the reference data to generate a corrected pattern image, the corrected pattern image data and the measurement data are compared according to a predetermined algorithm to determine the presence or absence of a defect.

FIG. 4 is a flowchart showing the main steps of the correction pattern image generation method according to the first embodiment.
4, the correction pattern image generation method includes simultaneous equation generation step (S102), parameter generation step (S104), parameter determination step (S106), parameter decomposition step (S108), parameter estimation step (S110), correction model parameter. A series of steps of a generation step (S112) and a correction pattern image generation step (S114) are performed. Then, the inspection method performs a comparison step (S116) for comparing the correction pattern image with the pattern image to be inspected.

  In step (S) 102, as a simultaneous equation generation step, the simultaneous equation generation unit 210 generates inspection coordinate pattern image data of arbitrary coordinates corresponding to inspection pattern image data of arbitrary coordinates and inspection reference pattern image data of peripheral coordinates. The simultaneous equations based on the following two-dimensional input / output linear prediction model (first prediction model) are generated.

First, a method for setting a two-dimensional input / output linear prediction model by regarding the inspection reference pattern image as two-dimensional input data and regarding the inspection pattern image as two-dimensional output data will be described.
FIG. 5 is a diagram for explaining the two-dimensional input / output linear prediction model in the first embodiment. Here, a 5 × 5 order two-dimensional linear prediction model using a 5 × 5 pixel region is taken as an example. The suffixes used in this model are shown in Table (1) below.

  As shown in Table (1), the suffix is taken, and the two-dimensional input data (gradation value) and the two-dimensional output data (gradation value) are u (i, j) and y (i, j), respectively. The suffixes (coordinates) of the pixel 20 of interest in the pattern image 10 to be inspected in FIG. Then, the suffixes of a total of 25 pixels including the pixels 22 of the same coordinates in the inspection reference pattern image 12 and the pixels 24 around 2 rows and 2 columns surrounding the pixels 22 are set as shown in Table (1). Then, a relational expression such as Expression (1) shown below is set for a set of pixel data in a 5 × 5 region.

Here, b _{00 to} b ₄₄ multiplied by the inspection reference pattern image data u (i, j) of each coordinate in the relational expression shown in Expression (1) are model parameters (coefficients) to be identified. The expression (1) means that the data y _k = y (i, j) of one pixel 20 in the pattern image to be inspected 10 is one pixel 22 of the corresponding inspection reference pattern image 12 and the surrounding pixels. This means that the data can be expressed by a linear combination of 5 × 5 pixel data composed of 24. Thus, by performing the convolution operation with the linear prediction model, it is possible to correct the swell and noise of the image. When Expression (1) is expressed in a vector format (matrix format), it can be expressed as Expression (2-1) to Expression (2-3).

  Here, in the equations (2-1) to (2-3), if the coordinates (i, j) of the inspection reference pattern image 12 and the inspection pattern image 10 are scanned and 25 sets of data are combined, Model parameters can be identified. Here, from a statistical point of view, n (> 25) sets of data are prepared as in the following equation (3-1), and 25 based on the least square method as in the following equation (3-2). It is also preferable to solve α-dimensional simultaneous equations and identify α. As a method of solving such an equation, there is a maximum likelihood estimation method in addition to the least square method, and any method may be used.

Here, A = [x ₁ , x ₂ ,... X _n ] ^T , y = [y ₁ , y ₂ ,... Y _n ] ^T , k = 1, 2,. For example, if the inspection reference pattern image 12 and the inspected pattern image 10 are each 512 × 512 pixels, the surrounding two pixels cannot be modeled, and therefore the periphery of the image is reduced by two pixels by scanning the 5 × 5 model. . Therefore, n = (512-4) × (512-4) = 258064 sets of data are obtained, and a sufficient number can be secured from a statistical viewpoint. The simultaneous equation generation unit 210 generates simultaneous equations of Expressions (3-1) and (3-2) from the inspection reference pattern image and the pattern image to be inspected, that is, a 25 × 25 element matrix (A ^T A), 25 Generate a vector of elements A ^T y.

In S104, as a parameter generation step, the parameter calculation unit 212 solves the simultaneous equations of the equations (3-1) and (3-2), and multiplies the inspection reference pattern image data of each coordinate in the simultaneous equations by the parameter α. (Coefficient) is calculated. That is, the parameters b _{00 to} b ₄₄ (coefficients) are calculated. The parameter calculation unit 212 is an example of a coefficient calculation unit.

Here, parameters b _{00 to} b ₄₄ conforming to the equation (1) are obtained. However, if the parameters b _{00 to} b ₄₄ are used in the equation (1) as they are, the defects are excessively approximated. May be missed. That is, there is a possibility of excessive correction. Therefore, it is determined whether it is excessive in the next step.

In S106, as a parameter determination step, the parameter element partial sum calculation unit 214 calculates a partial sum of a plurality of elements of this matrix with respect to a matrix (first matrix) having parameters b _{00 to} b ₄₄ as elements.
FIG. 6 is a diagram showing a matrix of parameters b _{i, j in} the first embodiment.
Here, a matrix 30 of parameters b _{i, j} is defined as shown in FIG. 6 and, for example, u (becomes a pixel to be inspected as shown in the following equations (4-1) to (4-4). A partial sum including the parameter b ₂₂ to be multiplied by i, j) is calculated. The matrix 30 is configured to correspond to each coordinate of each 5 × 5 inspection reference pattern data in Table (1).

In Expression (4-1), the partial sum Dx ₁ of the elements of the matrix 36 that is long in the y direction can be obtained. In the formula (4-2), it is possible to obtain partial sums Dx ₂ elements of the long line 38 in the y-direction. In the formula (4-3), it is possible to obtain partial sums Dy ₁ of the elements of a long line 32 in the x-direction. In Expression (4-4), the partial sum Dy ₂ of the elements of the matrix 34 that is long in the x direction can be obtained.

Then, the determination unit 216 determines whether or not these partial sums are out of a predetermined threshold range. The larger the value, the clearer the image. The smaller the value, the more blurred the image. Therefore, when it falls below the predetermined threshold, it is determined that the signal is deteriorated. Here, it is determined that both of Dx ₁ and Dx ₂ is if below a predetermined threshold value, there is a need for correction in the x-direction. If both Dy ₁ and Dy ₂ are below a predetermined threshold, it is similarly determined that correction in the y direction is necessary. The direction in which correction is necessary can be determined by making the number of rows and columns of the matrix for calculating the partial sum inconsistent. The predetermined threshold value in the x direction and the predetermined threshold value in the y direction may be obtained by experiments or the like according to the inspection accuracy.

In S108, as a parameter decomposition step, the parameter element sum calculation unit 217 applies the following equation (5-1) and equation (5-2) to the matrix 30 having the parameters b _{00 to} b ₄₄ as elements. Then, an element sum px _i of the x direction component (first direction component) and an element sum py _i of the y direction component (second direction component) are calculated. Also, i, j = 0 to 4.

By calculating the equations (5-1) and (5-2), the model parameters b _{00 to} b ₄₄ are decomposed into a vertical direction (y direction) component and a horizontal direction (x direction) component.

In S110, as a parameter estimation step, the cubic parameter calculation unit 218 (second parameter calculation unit) performs the following based on the relative displacement (l, m) between the inspection reference pattern image and the pattern image to be inspected. Parameters px ′ _i (coefficients) and y of the x-direction component of the simultaneous equations based on the bicubic interpolation (bicubic interpolation) model (second prediction model) shown in Expressions (6-1) and (6-2) The direction component parameter py ′ _i (coefficient) is calculated. As described above, when the shift amount l in the x direction and the shift amount m in the y direction in units of sub-pixels obtained in advance are used, the image u ″ obtained by shifting the image u by the bicubic interpolation method by l and m is as follows. (6-1) and (6-2).

Here, the cubic parameter px ′ _i is defined by the following equations (7-1) to (7-5).

Further, the cubic parameter py ′ _i is defined by the following equations (7-1) to (7-5).

As described above, the element sum px _i of the x direction component, the element sum py _i of the y direction component, and the cubic parameter px ′ _i of the x direction component and the y direction component of the matrix 30 having the parameters b _{00 to} b ₄₄ as elements. The cubic parameter py ′ _i of A model parameter for obtaining a final correction pattern image is composed of the four combinations. In the determination step described above, there are four cases. That is, (i) when correction is required in the y direction, (ii) when correction is required in the x direction, (iii) when correction is required in both the x direction and the y direction, (iX) the x direction and y This is the case where no correction is required for both directions. A correction model parameter is generated under each condition. This will be described below.

In step S112, as a correction model parameter generation step, in the case of condition (i), as shown in the following formula (9-1), the synthesis unit 220 performs element summation of x-direction components based on the prediction model of formula (1). It is synthesized by multiplying px _i and the cubic parameter py ′ _i of the y direction component based on the bicubic interpolation prediction model. Then, a correction model parameter b ′ _{i, j} is obtained.
In the case of the condition (ii), as shown in the following equation (9-2), the synthesis unit 220 uses the element sum py _i of the y-direction component based on the prediction model of the equation (1) and bicubic interpolation. It is synthesized by multiplying the cubic parameter px ′ _i of the x direction component based on the prediction model. Then, a correction model parameter b ′ _{i, j} is obtained.
In the case of the condition (iii), as shown in the following equation (9-3), the synthesis unit 220 includes the element sum px ′ _i of the x direction component based on the prediction model of bicubic interpolation and the y direction component. The cubic parameter py ′ _i is multiplied and synthesized. Then, a correction model parameter b ′ _{i, j} is obtained.
In the case of the condition (iX), the correction model parameter b ′ _{i, j} is set using the parameter b _{i, j} of the original equation (1) without combining. In any condition, i, j = 0-4.

As described above, the model parameter b ′ _{i, j} is generated by multiplying the cubic parameter in the direction determined to be corrected in the parameter determination step by the parameter element sum of the direction component perpendicular thereto. In cubic interpolation, the signal in the data is preserved and does not deteriorate. However, the signal may disappear in the least square method. Therefore, there is a possibility that the data will be deteriorated. Therefore, as described above, the correction model parameter b ′ _{i, j} (composition coefficient) in which the overcorrection is suppressed can be obtained by using the cubic parameter for the overcorrection direction component.

In S114, the correction pattern image generation step, the correction pattern image data calculation unit 222, the parameters b _i of simultaneous equations based on the predictive model of the combined results obtained correction model parameters b _'i, equation _j (1) _{, J} is used as shown in the following equation (10) to calculate the correction pattern image data u ′ _{i, j} at arbitrary coordinates (i, j). Then, the calculation result is output to the comparison unit 146.

  As described above, the correction pattern image generation unit 200 generates a correction pattern image obtained by correcting the inspection reference pattern image of the inspection target sample using the inspection target pattern image and the inspection reference pattern image of the inspection target sample.

In S116, as a comparison step, the comparison unit 146 compares the corrected pattern image data u ′ _{i, j} with the inspected pattern image data y (i, j) using a predetermined algorithm. Then, the presence or absence of a defect is inspected, and the result is output.

  As described above, the correction pattern image u ′ generated in the above-described step corresponds to an image obtained by shifting the inspection reference image u in accordance with the inspection pattern image y while suppressing overcorrection. By comparing the correction pattern u ′ obtained here and the pattern to be inspected y, a highly accurate inspection can be performed.

Embodiment 2. FIG.
In the first embodiment, the determination is made using the partial sum of the parameters b _{i, j} in Expression (1), but the present invention is not limited to this. In the second embodiment, a configuration will be described in which determination is made based on the center of gravity of the matrix of parameters b _{i, j} instead. The configuration of the inspection apparatus 100 is the same as that of FIG. 1 except for the internal configuration of the comparison circuit 108. Further, the main steps of the correction pattern image generation method according to the second embodiment are the same as those in FIG. 4 except for the contents of the parameter determination step (S106).

FIG. 7 is a conceptual diagram showing an internal configuration of the comparison circuit according to the second embodiment.
In FIG. 7, the comparison circuit 108 is the same as FIG. 2 except that it has a parameter element centroid operation unit 215 instead of the parameter element partial sum operation unit 214. The simultaneous equation generation unit 210, the parameter calculation unit 212, the parameter element centroid calculation unit 215, the determination unit 216, the parameter element sum calculation unit 217, the cubic parameter calculation unit 218, the synthesis unit 220, and the correction pattern image data calculation unit 222 Each function may be configured by software executable on a computer, for example. Or you may carry out by the hardware by an electric circuit. Or you may make it implement by the combination of the hardware and software by an electrical circuit. Alternatively, a combination of such hardware and firmware may be used.

S102 to S104 are the same as those in the first embodiment. In S106, as a parameter determining step, the parameter elements gravity calculation unit 215, with respect to the matrix 30 for the parameters _b 00 _{~b 44} and element, calculates the center of gravity of a plurality of elements of the matrix. The center of gravity can be obtained by Expression (11-1) and Expression (11-2), where w _x is the center of gravity in the x direction and w _y is the center of gravity in the y direction.

Then, the determination unit 216 determines whether or not these partial sums are out of a predetermined threshold range. For example, it is determined whether -1 <w _x and w _y <1. Since there is already only a sub-pixel level displacement, if it exceeds ± 1, it is determined that the signal is deteriorated. Here, it is determined that W _x is the case of out of a predetermined range, there is a need for correction in the x-direction. Further, if W _y is out of the predetermined range, it is similarly determined that correction in the y direction is necessary.

  In the second embodiment, as in the first embodiment, (i) when correction is required in the y direction, (ii) when correction is required in the x direction, (iii) correction is performed in both the x direction and the y direction. (IX) There is a case where correction is not necessary in both the x direction and the y direction. Therefore, thereafter, as in the first embodiment, a correction model parameter may be generated under each condition to generate a correction pattern image.

  As described above, the correction pattern image u ′ generated in the above-described steps corresponds to an image obtained by shifting the inspection reference image u in accordance with the inspection pattern image y while suppressing overcorrection. By comparing the correction pattern u ′ obtained here and the pattern to be inspected y, high-accuracy inspection can be performed.

  The case where the partial sum as in the first embodiment cannot be detected may be detected at the center of gravity as in the second embodiment. The reverse is also true. Therefore, the determination based on the partial sum and the determination based on the center of gravity are performed by interpolating each other. Therefore, if both are performed, the determination accuracy can be further improved.

FIG. 8 is a diagram for explaining another optical image acquisition method.
In the configuration of FIG. 1, the photodiode array 105 that simultaneously enters the number of pixels of the scan width W (for example, 2048 pixels) is used. However, the present invention is not limited to this, and as shown in FIG. Each time a constant pitch movement is detected by a laser interferometer while scanning at a constant speed in the direction, a laser scanning optical device (not shown) scans the laser beam in the Y direction, detects transmitted light, A technique of acquiring a two-dimensional image for each size area may be used.

  In the above description, what is described as “˜circuit” or “˜step” can be configured by a computer-operable program. Or you may make it implement by not only the program used as software but the combination of hardware and software. Alternatively, a combination with firmware may be used. When configured by a program, the program is recorded on a recording medium such as a magnetic disk device, a magnetic tape device, an FD, or a ROM (Read Only Memory). For example, the table control circuit 114, the expansion circuit 111, the reference circuit 112, the comparison circuit 108, and the like that constitute the arithmetic control unit may be configured by electrical circuits, or as software that can be processed by the control computer 110. It may be realized. Moreover, you may implement | achieve with the combination of an electrical circuit and software.

The embodiments have been described above with reference to specific examples. However, the present invention is not limited to these specific examples. For example, in each embodiment, transmitted light is used, but reflected light or transmitted light and reflected light may be used simultaneously. Although the reference image serving as inspection standard pattern data is generated from design data, data of the same pattern captured by a sensor such as a photodiode array may be used. In other words, a die to die inspection or a die to database inspection may be used. In addition, although cubic interpolation is used in the parameter estimation step, other algorithms such as linear interpolation may be used. For example, in the case of linear interpolation, the shifted image u ″ using the shift amount 1 in the x direction and the shift amount m in the y direction in units of subpixels obtained in advance is expressed by the equations (6-1) and (6-2). ). In that case, it is sufficient that px ′ ₀ = px ′ ₁ = px ′ ₄ = 0, px ′ ₂ = (1−l), and px ′ ₃ = 1. Similarly, py ′ ₀ = py ′ ₁ = py ′ ₄ = 0, py ′ ₂ = (1−m), and py ′ ₃ = m.

  In addition, although descriptions are omitted for parts and the like that are not directly required for the description of the present invention, such as a device configuration and a control method, a required device configuration and a control method can be appropriately selected and used.

  In addition, all inspection apparatuses or inspection methods that include elements of the present invention and that can be appropriately modified by those skilled in the art are included in the scope of the present invention.

1 is a conceptual diagram showing a configuration of a sample inspection apparatus in Embodiment 1. FIG. It is a conceptual diagram which shows the internal structure of the comparison circuit of FIG. It is a figure for demonstrating the acquisition procedure of an optical image. FIG. 5 is a flowchart showing a main process of the correction pattern image generation method according to the first embodiment. 3 is a diagram for explaining a two-dimensional input / output linear prediction model in Embodiment 1. FIG. 6 is a diagram showing a matrix of parameters b _{i, j} in Embodiment 1. FIG. FIG. 5 is a conceptual diagram showing an internal configuration of a comparison circuit in a second embodiment. It is a figure for demonstrating another optical image acquisition method.

Explanation of symbols

10 inspection pattern image 12 inspection reference pattern image 20, 22, 24 pixels 30, 32, 34, 36, 38 matrix 100 inspection apparatus 101 photomask 102 XYθ table 103 light source 104 magnifying optical system 105 photodiode array 106 sensor circuit 107 position Circuit 108 Comparison circuit 109 Magnetic disk device 110 Control computer 111 Expansion circuit 112 Reference circuit 115 Magnetic tape device 120 Bus 150 Optical image acquisition unit 160 Control system circuit 140 Positioning unit 142, 144 Memory 146 Comparison unit 200 Correction pattern image generation unit 210 Simultaneous equation generation unit 212 Parameter calculation unit 214 Parameter element partial sum calculation unit 215 Parameter element centroid calculation unit 216 Determination unit 217 Parameter element sum calculation unit 218 Cubic parameter calculation unit 220 Generating unit 222 correction pattern image data calculation unit

Claims (6)

A correction pattern image generation device that generates a correction pattern image by correcting an inspection reference pattern image of the inspection target sample using an inspection pattern image of the inspection target sample and an inspection reference pattern image of the inspection target sample,
Generating simultaneous equations based on a first prediction model using the inspection pattern image data at arbitrary coordinates, the inspection reference pattern image data at arbitrary coordinates, and the inspection reference pattern image data at peripheral coordinates And
A coefficient calculator that solves the simultaneous equations and calculates a coefficient to be multiplied by the inspection reference pattern image data of each coordinate in the simultaneous equations;
An element sum calculation unit for calculating the element sum of the first direction component and the element sum of the second direction component for the first matrix having the coefficients as elements;
Based on the relative displacement between the inspection reference pattern image and the pattern image to be inspected, the coefficient of the first direction component and the coefficient of the second direction component of the simultaneous equations based on the second prediction model are calculated. A second parameter calculation unit for calculating;
A combining unit that combines the element sum of the first direction component based on the first prediction model and the coefficient of the second direction component based on the second prediction model;
A correction pattern image data calculation unit that calculates the correction pattern image data of the arbitrary coordinates using the combination coefficient obtained as a result of the combination as a coefficient of simultaneous equations based on the first prediction model, and outputs a calculation result; ,
A correction pattern image generation apparatus comprising:   The correction pattern according to claim 1, further comprising: a determination unit that calculates a partial sum of a plurality of elements of the first matrix and determines whether the partial sum is out of a predetermined threshold range. Image generation device.   The correction pattern according to claim 1, further comprising: a determination unit that calculates a centroid of a plurality of elements of the first matrix and determines whether the centroid is out of a threshold range of a predetermined value. Image generation device. A correction pattern image generation method for generating a correction pattern image obtained by correcting an inspection reference pattern image of the inspection target sample using an inspection pattern image of the inspection target sample and an inspection reference pattern image of the inspection target sample,
Generating a simultaneous equation based on a first prediction model using the inspection pattern image data of arbitrary coordinates, the inspection reference pattern image data of arbitrary coordinates, and the inspection reference pattern image data of peripheral coordinates;
Solving the simultaneous equations and calculating a coefficient by which the inspection reference pattern image data of each coordinate in the simultaneous equations is multiplied;
Calculating an element sum of a first direction component and an element sum of a second direction component for a first matrix having the coefficients as elements;
Based on the relative displacement between the inspection reference pattern image and the pattern image to be inspected, the coefficient of the first direction component and the coefficient of the second direction component of the simultaneous equations based on the second prediction model are calculated. A step of calculating;
Combining the element sum of the first direction component based on the first prediction model and the coefficient of the second direction component based on the second prediction model;
Using the combined coefficient obtained as a result of combining as a coefficient of simultaneous equations based on the first prediction model, calculating the correction pattern image data of the arbitrary coordinates, and outputting the calculation result;
A correction pattern image generation method comprising:   The correction pattern image according to claim 4, further comprising a step of calculating a partial sum of a plurality of elements of the first matrix and determining whether the partial sum is out of a predetermined threshold range. Generation method.   The correction pattern image according to claim 4, further comprising a step of calculating a centroid of a plurality of elements of the first matrix and determining whether the centroid is out of a threshold range of a predetermined value. Generation method.

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