JP4429975B2 - Micro drive device - Google Patents

Description

  The present invention relates to a micro-driving device that displaces a small functional element by a small amount using an electrostatic actuator.

  Currently, there is an increasing demand for a mechanism for displacing a small functional element by a small amount, as represented by a mechanism for driving a pickup lens such as an optical disk or a mechanism for driving a focus lens of a small imaging module.

  In general, an electromagnetic actuator such as a voice coil motor is used for such a drive mechanism. However, a drive mechanism using an electrostatic actuator has been proposed for further miniaturization, light weight, and low power consumption. Yes.

  For example, according to Patent Document 1, a stator made of a conductor and a mover made of a dielectric are provided, one end of the mover is supported by the stator, and the driven member is supported by the other end. And the method of driving a to-be-driven member is proposed by applying a voltage between a stator and a needle | mover by a voltage application means.

Japanese Patent Laid-Open No. 9-9649

  However, in the configuration described in Patent Document 1, one end of the mover is supported by the stator, and the driven member is supported by the other end to form a drive mechanism. In this case, as a general manufacturing process, the mover is first formed on either the stator or the driven member, and the other needs to be connected to the tip of the mover using an adhesive or a connecting member. There is. In some cases, connection in consideration of electrical continuity and insulation is also required. Furthermore, as the drive mechanism is downsized, the stator and the mover become extremely small parts. Thereby, the process of connecting and fixing these element parts becomes very difficult.

  The present invention has been made in view of the above, and provides a small micro-driving device having an extremely simple configuration without fixing (adhering) a movable element (moving element) to a stator or a driven member. For the purpose.

  In order to solve the above-described problems and achieve the object, according to the present invention, a stator formed with a first stator electrode, a mover formed with a mover electrode and a conductive elastic body, A stator and a mover facing each other, and a guide for keeping a distance between the stator and the mover to a predetermined value or less, the mover holding a functional element, and at least one of conductive elastic bodies Is in contact with the first stator electrode through an insulating layer, and generates a potential difference between the first stator electrode and the conductive elastic body, thereby changing the distance between the stator and the mover. It is possible to provide a micro drive device characterized by the above.

  Moreover, according to a preferable aspect of the present invention, it is desirable that the insulating layer is formed on the first stator electrode.

  Moreover, according to the preferable aspect of this invention, it is desirable that the insulating layer is formed in the place where a conductive elastic body contact | connects a 1st stator electrode.

  According to a preferred aspect of the present invention, the stator is provided with the second stator electrode, and at least one of the conductive elastic bodies is in contact with and electrically connected to the second stator electrode. It is desirable.

  According to a preferred aspect of the present invention, the protrusion is formed on the moving element, the groove is formed on the guide, and the protrusion is inserted into the groove formed on the guide, thereby suppressing the rotation of the moving element. It is desirable.

  Further, according to a preferred aspect of the present invention, it is desirable that a protrusion is formed on the stator, and the movement range of the mover is defined by the protrusion formed on the stator.

  According to a preferred aspect of the present invention, it is desirable that a protrusion is formed on the guide, and the movement range of the moving element is defined by the protrusion formed on the guide.

  According to a preferred aspect of the present invention, it is desirable that the conductive elastic body has a spiral shape.

  According to a preferred aspect of the present invention, it is desirable that the conductive elastic body has a bent shape.

  Moreover, according to the preferable aspect of this invention, it is desirable that a functional element is an optical lens.

  Moreover, according to the preferable aspect of this invention, it is desirable that a functional element is a mirror.

  The micro-driving device according to the present invention includes a guide that is provided and has a moving element facing each other and holds a distance between the stator and the moving element below a predetermined value. The mover holds functional elements. Further, at least one of the conductive elastic bodies is in contact with the first stator electrode through the insulating layer. Then, a potential difference is generated between the first stator electrode and the conductive elastic body, and the distance between the stator and the mover is changed. Thus, in the present invention, the stator, the movable element, the conductive elastic body, and the stator electrode are simply in contact with each other. For this reason, it is possible to provide a small micro-drive device having an extremely simple configuration without fixing (joining) the mover to the stator or the driven member.

  Embodiments of a micro drive device according to the present invention will be described below in detail with reference to the drawings. Note that the present invention is not limited to the embodiments.

  A microdrive device 100 according to a first embodiment of the present invention will be described with reference to FIGS. FIG. 1 is a side view of the moving element 120 and the stator 130 of the micro-driving device of the present embodiment, FIG. 2 is a bottom view of the moving element 120 as viewed from below in FIG. FIG. 4 is a top view of the stator 130 as viewed from above in FIG. 1, FIG. 5 is a perspective view of the micro-driving device according to the present embodiment, and FIG. Side views when the light is partially transmitted are shown.

  As shown in FIGS. 1 and 2, the mover substrate 121 has a hollow cylindrical shape. The mover electrode 123 is formed on the mover substrate 121. The conductive elastic body 122 is formed on the mover electrode 123. The mover substrate 121, the conductive elastic body 122, and the mover electrode 123 constitute a mover 120.

  In addition, the optical lens 110 that is a functional element is held in the hollow portion of the mover substrate 121. Here, as shown in FIG. 3, the conductive elastic body 122 has a spiral shape. In addition, the conductive elastic body 122 is electrically connected through the mover electrode 123. As shown in FIGS. 1 and 4, the stator 130 includes a stator substrate 131 having a hollow cylindrical shape, a first stator electrode 132 formed on the stator substrate 131, and an insulating layer 140. Yes.

  Next, as shown in FIGS. 5 and 6, the mover 120 and the stator 130 are arranged to face each other. The distance between the moving element 120 and the stator 130 is kept below a certain value by the guide 150. The guide 150 is formed with a restricting portion 151.

  Here, a procedure for fixing the moving element 120 and the stator 130 by the guide 150 will be described in more detail. The stator 130 is joined to the inner wall of the guide 150 by an adhesive or the like at the outer peripheral portion thereof. Note that “joining” means a state of being bonded and bonded. On the other hand, “contact” refers not to a fixed state, but to a state where it is simply movably touched.

  The moving element 120 is held by the restricting portion 151 of the guide 150 in a state in which the conductive elastic body 122 is in contact with the insulating layer 140 on the stator 130 and a certain amount of stress is applied. Here, the mover 120 can move in the vertical direction on the paper along the guide 150. Furthermore, the conductive elastic body 122 only needs to be in contact with the insulating layer 140 and does not need to be bonded (fixed) using an adhesive or the like.

  Next, the operation of the micro drive device 100 according to the present embodiment will be described with reference to FIG. FIG. 7 is a diagram illustrating a state in which the driving power supply 160 is connected to the micro driving device 100 according to the present embodiment.

  As shown in FIG. 7, a driving power supply 160 is connected between the first stator electrode 132 and the mover electrode 123 to apply a voltage. Due to the applied voltage, a potential difference is generated between the conductive elastic body 122 and the first stator electrode 132, and an electrostatic attractive force corresponding to the potential difference is generated. Thereby, the conductive elastic body 122 is deformed so as to be attracted to the stator 130 side. As a result, the moving element 120 and the optical lens 110 move to the stator 130 side. As described above, by incorporating the micro-driving device 100 into the optical system, it is possible to move the slider 120 and obtain an effect such as focusing.

  Here, when an elastic body having no conductivity is used instead of the conductive elastic body 122, an electrostatic attractive force is generated between the first stator electrode 132 and the mover electrode 123. Even in this case, a force that moves toward the stator 130 acts on the moving element 120 by electrostatic attraction. And since electrostatic attraction is inversely proportional to the square of the distance between both electrodes, the electrostatic attraction required to attract the moving element 120 toward the stator 130 will increase. As a result, the drive voltage necessary for driving is increased.

  On the other hand, in this embodiment, an elastic body having conductivity is used. The leading end of the conductive elastic body 122 is close to the first stator electrode 132 through the insulating layer 140. For this reason, a large electrostatic attraction can be generated even when the drive voltage is low. As a result, the drive voltage can be reduced.

  Next, each component in a present Example is demonstrated. The conductive elastic body 122 can be formed on the mover electrode 123 using, for example, a method applying a semiconductor manufacturing technique described in Japanese Patent No. 3210966. Here, the conductive elastic body 122 has a spiral shape. By adopting such a shape, when the conductive elastic body 122 is attracted to the stator side 300 side and deformed by electrostatic attraction, the connection point between the conductive elastic body 122 and the mover 120 is in the direction perpendicular to the paper surface. Move directly. For this reason, the movement in the direction of the stator 130 can be realized stably without the movement of the moving element 120 in the rotational direction.

  Further, as described above, the electrostatic attractive force generated between the electrodes is inversely proportional to the square of the distance between both electrodes. Therefore, the insulating layer 140 is preferably formed to be thinner as long as dielectric breakdown due to the driving voltage does not occur. In addition, the insulating layer 140 is formed on the stator 130 side in this embodiment, but may be formed on the surface of the conductive elastic body 122. Thus, according to the present embodiment, it is possible to provide a small micro-driving device 100 having a very simple configuration without fixing (adhering) the moving element 120 to the stator 130. Moreover, the micro drive device 100 can be manufactured extremely easily by such a configuration.

  Next, the configuration of the micro-driving device 200 according to the second embodiment of the present invention will be described with reference to FIGS. The same parts as those in the first embodiment are denoted by the same reference numerals, and redundant description is omitted. 8 is a side view of the moving element 120 and the stator 130 of the micro-driving device 200 according to the present embodiment, FIG. 9 is a top view of the stator 130 viewed from above in FIG. 8, and FIG. Side views when transmitted are shown.

  As shown in FIG. 8, the mover 120 includes a mover substrate 121, a mover electrode 123, and conductive elastic bodies 122a, 122b, 122c, and 122d. The mover substrate 121 has a hollow cylindrical shape. The mover electrode 123 is formed on the mover substrate 121. The conductive elastic bodies 122a, 122b, 122c, and 122d are formed on the mover electrode 123. Hereinafter, as appropriate, the conductive elastic bodies 122a, 122b, 122c, and 122d are collectively referred to as the “conductive elastic body 122”.

  Although the conductive elastic body 122d is omitted in the drawing, the conductive elastic bodies 122a, 122b, 122c, and 122d are arranged in the same manner as in FIG. In addition, the conductive elastic bodies 122a, 122b, 122c, and 122d are electrically connected via the mover electrode 123. Further, an optical lens 110 that is a functional element is held in the hollow portion of the mover substrate 121.

  As shown in FIGS. 8 and 9, the stator 130 includes a stator substrate 131 having a hollow cylindrical shape, a first stator electrode 132 and a second stator electrode 133 formed on the stator substrate 131, It consists of an insulating layer 140. Here, the insulating layer 140 has an opening 134 formed in the second stator electrode 133.

  Next, as shown in FIG. 10, the moving element 120 and the stator 130 are arranged to face each other. In addition, the guide 150 keeps the distance between the moving element 120 and the stator 130 below a certain value. The guide 150 is formed with a restricting portion 151.

  Next, a method for fixing the moving element 120 and the stator 130 by the guide 150 will be described in more detail. The stator 130 is joined to the inner wall of the guide 150 by an adhesive or the like at the outer peripheral portion thereof. Of the conductive elastic body 122, the three conductive elastic bodies 122a, 122c, and 122d are in contact with the insulating layer 140. Only one conductive elastic body 122b is in contact with the second stator electrode 133 through the opening 134.

  The conductive elastic bodies 122a, 122b, 122c, and 122d are fastened by the restricting portion 151 of the guide 150 in a state where a certain amount of stress is applied. The mover 120 can move in the vertical direction on the paper surface along the guide 150. Here, among the conductive elastic bodies 122a, 122b, 122c, and 122d, the conductive elastic bodies 122a, 122c, and 122d may be in contact with the insulating layer 140. For this reason, it is not necessary to join using the adhesive agent. In addition, the conductive elastic body 122b only needs to be electrically connected by contacting the second stator electrode 133. For this reason, it is not necessary to join using the conductive paste material or the like.

  Next, the operation of the micro drive device 200 according to the present embodiment will be described with reference to FIG. FIG. 11 is a side view showing a state in which the driving power supply 160 is connected to the micro driving device 200 according to the present embodiment.

  As shown in FIG. 11, a driving power source 160 is connected between the first stator electrode 132 and the second stator electrode 133 to apply a voltage. The voltage applied to the second stator electrode 133 is applied to the conductive elastic bodies 122a, 122c, and 122d via the conductive elastic body 122b and the mover electrode 123. An electrostatic attractive force is generated between the conductive elastic bodies 122a, 122c, 122d and the first stator electrode 132 by the applied voltage. Accordingly, the conductive elastic bodies 122a, 122c, and 122d are deformed so as to be attracted to the stator side. As a result, the moving element 120 and the optical lens 110 move to the stator 130 side.

  Next, each component in a present Example is demonstrated. The conductive elastic body 122b for electrically connecting the second stator electrode 133 and the mover electrode 123 has a conductive elasticity for moving the mover 120 toward the stator 130 with the generation of electrostatic attraction. The action is different from that of the bodies 122a, 122c, 122d, but the form is the same. For this reason, these can be simultaneously formed without distinguishing them.

  The amount of movement of the moving element 120 is determined by the balance between the elastic force of the conductive elastic body 122 and the electrostatic attractive force generated by the driving voltage of the driving power source 160. Further, the electrostatic attractive force generated between both electrodes is proportional to the opposing area of both electrodes. Further, the dynamic behavior of the moving element 120 greatly depends on the mechanical resonance frequency of the conductive elastic body 122. Therefore, it is desirable that the shape, spring constant, area, thickness, and the like of the conductive elastic body 122 are set to appropriate values from these factors. For example, the conductive elastic body 122b acts to electrically connect the second stator electrode 133 and the mover electrode 123, and electrostatic attractive force for moving the mover 120 to the stator 130 side. Does not occur. Therefore, it is desirable that the conductive elastic body 122b has a lower spring constant by making the line width thinner than the other conductive elastic bodies 122a, 122c, and 122d. In this embodiment, the insulating layer 140 is formed on the stator 130 side, but may be formed on the surface of the conductive elastic bodies 122a, 122c, and 122d. Moreover, it is not necessary to connect wiring to the conductive elastic bodies 122a, 122b, 122c, and 122d.

  Next, the configuration of the micro-driving device 300 according to the third embodiment of the present invention will be described with reference to FIGS. 12, 13, and 14. The same parts as those in the first embodiment are denoted by the same reference numerals, and redundant description is omitted. 12 is a side view of the moving element 120 and the stator 130 of the micro-driving device 300 according to the present embodiment, FIG. 13 is a top view of the stator 130 viewed from above in FIG. 12, and FIG. Side views when transmitted are shown.

  As shown in FIG. 12, the mover 120 includes a mover substrate 121, a mover electrode 123, and conductive elastic bodies 122a, 122b, 122c, and 122d. The mover substrate 121 has a hollow cylindrical shape. The mover electrode 123 is formed on the mover substrate 121. The conductive elastic bodies 122a, 122b, 122c, and 122d are formed on the mover electrode 123.

  Although the conductive elastic body 122d is omitted in the drawing, the conductive elastic bodies 122a, 122b, 122c, and 122d are arranged in the same manner as in FIG. In addition, the conductive elastic bodies 122a, 122b, 122c, and 122d are electrically connected via the mover electrode 123. Further, an optical lens 110 that is a functional element is held in the hollow portion of the mover substrate 121. As shown in FIGS. 12 and 13, the stator 130 includes a stator substrate 131 having a hollow cylindrical shape, first stator electrodes 132 a and 132 b formed on the stator substrate 131, and an insulating layer 140.

  Next, as shown in FIG. 14, the moving element 120 and the stator 130 are arranged to face each other, and the distance between the moving element 120 and the stator 130 is held below a certain value by the guide 150. The guide 150 is formed with a restricting portion 151. Here, a method of fixing the moving element 120 and the stator 130 by the guide 150 will be described in more detail.

  The stator 130 is joined to the inner wall of the guide 150 by an adhesive or the like at the outer peripheral portion thereof. In addition, the conductive elastic body 122a and the conductive elastic body 122b are in contact with the insulating layer 140 in a state of facing the first stator electrode 132a. The conductive elastic body 122c and the conductive elastic body 122d are in contact with the insulating layer 140 in a state of facing the first stator electrode 132b. In addition, the conductive elastic bodies 122a, 122b, 122c, and 122d are fastened by the restricting portion 151 of the guide 150 in a state where a certain amount of stress is applied. Thereby, the mover 120 can move in the vertical direction on the paper surface along the guide 150. Here, the conductive elastic bodies 122a, 122b, 122c, and 122d may be in contact with the insulating layer 140. For this reason, it is not necessary to join using the adhesive agent.

  Next, the operation of the micro drive device 300 according to the present embodiment will be described with reference to FIG. FIG. 15 is a side view showing a state in which the driving power supply 160 is connected to the micro-driving device 300 according to the present embodiment.

  Here, the first stator electrode 132a, the contact point between the conductive elastic body 122a and the conductive elastic body 122b, and the contact point between the first stator electrode 132b and the conductive elastic body 122c and 122d are electrically connected, respectively. Is equivalent to a capacitor. Therefore, as shown in FIG. 15, a driving power supply 160 is connected between the first stator electrode 132a and the first stator electrode 132b to apply a voltage. As a result, the conductive elastic bodies 122a, 122b, 122c, and 122d have a potential corresponding to the capacitance of the capacitor. For example, when the conductive elastic bodies 122a, 122b, 122c, 122d are molded in exactly the same form, the first stator electrode 132a is grounded, and 100V is applied to the second stator electrode 132b, the conductive elastic body The bodies 122a, 122b, 122c, 122d are at 50V.

  Here, the potential difference between the first stator electrode 132a and the conductive elastic bodies 122a and 122b and between the second stator electrode 132b, the conductive elastic body 122c, and the conductive elastic body 122d is 50 V. It becomes. For this reason, electrostatic attraction is generated between the first stator electrode 132a and the second stator electrode 132b and the conductive elastic bodies 122a, 122b, 122c, and 122d. For this reason, the conductive elastic bodies 122a, 122b, 122c, and 122d are deformed so as to be attracted to the stator side. As a result, the moving element 120 and the optical lens 110 move to the stator 130 side.

  Next, the configuration of the micro drive device 400 according to the fourth embodiment of the present invention will be described with reference to FIGS. 16, 17, 18, and 19. The same parts as those in the first embodiment are denoted by the same reference numerals, and redundant description is omitted. 16 is a side view of the mover 120 and the stator 130 of the micro-driving device 400 according to the present embodiment, FIG. 17 is a top view of the stator 130 as viewed from above in FIG. 16, and FIG. 18 is a mover in FIG. FIG. 19 is a side view when the guide part 150 is partially transmitted.

  As shown in FIGS. 16 and 17, the stator 130 includes a cylindrical stator substrate 131, first stator electrodes 132a and 132b formed on the stator substrate 131, and a second stator electrode 133a. 133b and the insulating layer 140. Here, in the insulating layer 140, an opening 134a is formed in the second stator electrode 133a, and an opening 134b is formed in the second stator electrode 133b.

  As shown in FIGS. 16 and 18, the mover 120 includes a mover substrate 121, mover electrodes 123a and 123b, conductive elastic bodies 122a and 122b, and conductive elastic bodies 122c and 122d. The mover substrate 121 has a cylindrical shape. The mover electrodes 123 a and 123 b are formed on the mover substrate 121. The conductive elastic bodies 122a and 122b are formed on the mover electrode 123a. The conductive elastic bodies 122c and 122d are formed on the mover electrode 123b.

  In addition, the conductive elastic bodies 122a and 122b are electrically connected via the mover electrode 123a. The conductive elastic bodies 122c and 122d are electrically connected via the mover electrode 123b. Further, in the movable substrate 121, a mirror 111 as a functional element is formed on the surface opposite to the surface on which the movable electrodes 123a and 123b are formed.

  Next, as shown in FIG. 19, the moving element 120 and the stator 130 are arranged to face each other. The distance between the moving element 120 and the stator 130 is kept below a certain value by the guide 150. The guide 150 is formed with a restricting portion 151. Here, a method of fixing the moving element 120 and the stator 130 by the guide 150 will be described in more detail.

  The stator 130 is joined to the inner wall of the guide 150 by an adhesive or the like at the outer peripheral portion thereof. The conductive elastic bodies 122a and 122c are in contact with the insulating layer 140 in a state of facing the first stator electrodes 132a and 132b, respectively. Further, the conductive elastic bodies 122b and 122d are in contact with and electrically connected to the second stator electrodes 133a and 133b, respectively.

  In addition, the conductive elastic bodies 122a, 122b, 122c, and 122d are fastened by the restricting portion 151 of the guide 150 in a state where a certain amount of stress is applied. The mover 120 can move in the vertical direction on the paper surface along the guide 150, and at the center of the guide 150 when not operating due to the slanted portion formed at the boundary between the guide portion 150 and the restricting portion 151. Placed in the section. Here, the conductive elastic bodies 122 a and 122 c may be in contact with the insulating layer 140. For this reason, it is not necessary to join using the adhesive agent. Further, the conductive elastic bodies 122b and 122d need only be electrically connected by contacting the second stator electrodes 133a and 133b. For this reason, it is not necessary to join using the conductive paste material or the like.

  Next, the operation of the micro drive device 400 according to the present embodiment will be described with reference to FIG. FIG. 19 is a side view showing a state in which the driving power source 160 is connected to the micro driving device 400 according to the present embodiment.

  As shown in FIG. 20, a driving power source 160 is connected between the first stator electrode 132a and the second stator electrode 133a to apply a voltage. The voltage applied to the second stator electrode 133a is applied to the conductive elastic body 122a through the conductive elastic body 122b and the mover electrode 123a. Due to the applied voltage, an electrostatic attractive force is generated between the conductive elastic body 122a and the first stator electrode 132a. As a result, the conductive elastic body 122a is deformed so as to be attracted to the stator 130 side. As a result, the moving element 120 and the mirror 111 which is a functional element are inclined. In this way, by incorporating the micro drive device 400 into the optical system, the moving element 120 can be moved to obtain the effect of light deflection.

  Similarly, a driving power supply 160 is connected between the first stator electrode 132b and the second stator electrode 133b to apply a voltage. The voltage applied to the second stator electrode 133b is applied to the conductive elastic body 122c via the conductive elastic body 122d and the mover electrode 123b. Due to the applied voltage, an electrostatic attractive force is generated between the conductive elastic body 122c and the first stator electrode 132b, and the conductive elastic body 122c is deformed to be attracted to the stator 130 side. As a result, a tilt different from the above occurs in the movable element 120 and the mirror 111 which is a functional element.

  The configuration of the micro-driving device 500 according to the fifth embodiment of the present invention will be described with reference to FIG. The same parts as those in the first embodiment are denoted by the same reference numerals, and redundant description is omitted. FIG. 21 is a perspective view of the micro-driving device 500 according to the present embodiment. As shown in FIG. 21, the mover 120 and the stator 130 are arranged to face each other. The moving element 120 is formed with a hole 124 through which the pin-shaped guide 150 passes. The mover 120 and the stator 130 are fixed by a pin-shaped guide 150. The pin-shaped guide 150 is formed with a restricting portion 151. Here, a method of fixing the moving element 120 and the stator 130 by the pin-shaped guide 150 will be described in more detail.

  One end of the pin-shaped guide 150 is coupled to the stator 130 by an adhesive or the like, and a regulating portion 151 is formed at the other end. In addition, the conductive elastic bodies 122a, 122c, and 122d are in contact with the insulating layer 140. Only the conductive elastic body 122 b is in contact with the second stator electrode 133 through the opening 134. Further, the conductive elastic bodies 122a, 122b, 122c, and 122d are fastened by the restricting portion 151 of the pin-shaped guide 150 in a state where a certain amount of stress is applied. Furthermore, the mover 120 can move in the vertical direction on the paper surface along the pin-shaped guide 150. Here, among the conductive elastic bodies, 122a, 122c, and 122d may be in contact with the insulating layer 140. For this reason, it is not necessary to join using the adhesive agent. In addition, the conductive elastic body 122b only needs to be electrically connected by contacting the second stator electrode 133. For this reason, it is not necessary to join using the conductive paste material or the like. With such a configuration, it is possible to move the mover 120 in the vertical direction of the paper and to restrict movement in the rotational direction.

(Modification)
FIG. 22 shows a perspective configuration of a conductive elastic body 622 according to a modification. As shown in FIG. 22, the conductive elastic body 622 has a bent shape, for example, a shape typified by a so-called pantograph, which is a telescopic current collector disposed on the roof of a train / electric locomotive. . By adopting such a shape, when the conductive elastic body 622 is deformed to the stator side 300 side by electrostatic attraction, the connection point between the moving element 120 and the conductive elastic body 122 moves linearly in the vertical direction of the drawing. For this reason, the movement in the direction of the stator 130 can be realized stably without the movement of the moving element 120 in the rotational direction.

  The configuration of the micro-drive device according to Embodiment 6 of the present invention will be described with reference to FIG. The same parts as those in the first embodiment are denoted by the same reference numerals, and redundant description is omitted. FIG. 23 is a top view showing the moving member 120 and the guide 150. As shown in FIG. 23, a protrusion 125 is formed on the mover substrate 121 of the mover 120. A groove 152 corresponding to the protrusion 125 is formed in the guide 150. By adopting such a configuration, the movement of the moving element 120 in the rotational direction can be suppressed, and the movement in the stator direction can be realized stably.

  The configuration of the micro driving device according to the seventh embodiment of the present invention will be described with reference to FIG. The same parts as those in the first embodiment are denoted by the same reference numerals, and redundant description is omitted. FIG. 24 shows a side view when the guide part 150 is partially transmitted. As shown in FIG. 24, a protrusion 135 is formed on the insulating layer 140 of the stator 130. By adopting such a form, when the moving element 120 moves in the vertical direction on the paper surface along the guide 150, the moving range is defined from a position in contact with the restricting portion 151 of the guide 150 to a position in contact with the protruding portion 135. can do. Therefore, the length of the guide 150 and the height of the protrusion 135 may be determined so that the amount of displacement necessary for driving the optical lens 110 is obtained.

  The configuration of the micro-drive device 800 according to Embodiment 8 of the present invention will be described with reference to FIG. The same parts as those in the first embodiment are denoted by the same reference numerals, and redundant description is omitted. FIG. 25 shows a side view when the guide part 150 is partially transmitted. As shown in FIG. 25, the guide part 150 and the regulation part 151 are formed separately. In addition, the guide 150 is formed with a protrusion 153. By adopting such a configuration, when the moving element 120 moves in the vertical direction on the paper surface along the guide 150, the movement range is defined from a position that contacts the restricting portion 151 of the guide 150 to a position that contacts the protruding portion 153. can do. Therefore, the position and length of the protrusion 153 of the guide 150 may be determined so that the amount of displacement necessary for driving the optical lens 110 is obtained. Moreover, since the moving range of the moving element 120 is determined by the processing accuracy of the guide 150 and the restricting portion 151, very high accuracy can be obtained.

  The present invention can take various modifications without departing from the spirit of the present invention.

  As described above, the micro drive device according to the present invention is useful for a small micro drive device having an extremely simple configuration.

It is a side view which shows the cross-sectional structure of the micro drive device which concerns on Example 1 of this invention. It is a bottom view of the micro drive device of Example 1. 1 is a perspective view of a conductive elastic body according to Example 1. FIG. FIG. 3 is a top view of the stator of Example 1. FIG. 3 is a perspective view of the micro drive device according to the first embodiment. It is another side view which shows the cross-sectional structure of the micro drive device which concerns on Example 1. FIG. FIG. 6 is still another side view showing a cross-sectional configuration of the micro drive device according to Embodiment 1. It is a side view which shows the cross-sectional structure of the micro drive device which concerns on Example 2. FIG. 6 is a top view of a stator of Example 2. FIG. It is another side view which shows the cross-sectional structure of the micro drive device which concerns on Example 2. FIG. FIG. 12 is still another side view showing a cross-sectional configuration of the micro-drive device according to Embodiment 2. It is a side view which shows the cross-sectional structure of the micro drive device which concerns on Example 3. FIG. FIG. 6 is a top view of the stator of Example 3. It is another side view which shows the cross-sectional structure of the micro drive device which concerns on Example 3. FIG. FIG. 10 is still another side view showing a cross-sectional configuration of the micro-drive device according to Embodiment 3. It is a side view which shows the cross-sectional structure of the micro drive device which concerns on Example 4. FIG. FIG. 6 is a top view of a stator of Example 4. FIG. 10 is a bottom view of a moving element according to a fourth embodiment. FIG. 10 is another side view showing a cross-sectional configuration of the micro-drive device according to Embodiment 4. FIG. 10 is still another side view showing a cross-sectional configuration of the micro-drive device according to Embodiment 4. FIG. 10 is a perspective view of a micro drive device according to a fifth embodiment. It is a perspective view of the modification of a conductive elastic body. FIG. 10 is a top view of a mover and a guide according to a sixth embodiment. FIG. 10 is a side view showing a cross-sectional configuration of a micro drive device according to Embodiment 7. It is a side view which shows the cross-sectional structure of the micro drive device which concerns on Example 8. FIG.

Explanation of symbols

DESCRIPTION OF SYMBOLS 100 Micro drive device 110 Optical lens 120 Mover 121 Mover substrate 122, 122a, 122b, 122c, 122d Conductive elastic body 123, 123a, 123b Mover electrode 124 Hole 125 Protrusion part 130 Stator 131 Stator substrate 132, 132a 132b First stator electrode 133, 133a, 133b Second stator electrode 134, 134a, 134b Opening 135 Protruding part 140 Insulating layer 150 Guide 151 Restricting part 152 Groove 153 Protruding part 160 Driving power supply 200, 300, 400, 500, 600 Micro-drive device 622 Conductive elastic body

Claims (11)

A stator on which a first stator electrode is formed;
A mover formed with a mover electrode and a conductive elastic body;
The stator and the mover are arranged to face each other, and a guide for holding the interval between the stator and the mover at a predetermined value or less,
The mover holds functional elements;
At least one of the conductive elastic bodies is in contact with the first stator electrode through an insulating layer,
Causing a potential difference between the first stator electrode and the conductive elastic body;
A micro-drive device characterized in that an interval between the stator and the mover is changed.   The micro-driving device according to claim 1, wherein the insulating layer is formed on the first stator electrode.   2. The micro-drive device according to claim 1, wherein the insulating layer is formed where the conductive elastic body is in contact with the first stator electrode. A second stator electrode is formed on the stator;
4. The micro-driving device according to claim 1, wherein at least one of the conductive elastic bodies is in contact with and electrically connected to the second stator electrode. 5. A protrusion is formed on the moving element,
A groove is formed in the guide;
5. The micro-driving device according to claim 1, wherein rotation of the moving element is suppressed by inserting the protrusion into a groove formed in the guide. 6. A protrusion is formed on the stator;
By the protrusions formed on the stator,
The micro-driving device according to any one of claims 1 to 5, wherein a moving range of the moving element is defined. A protrusion is formed on the guide,
By the protrusion formed on the guide,
The micro-driving device according to any one of claims 1 to 5, wherein a moving range of the moving element is defined.   The micro-drive device according to claim 1, wherein the conductive elastic body has a spiral shape.   The micro-drive device according to claim 1, wherein the conductive elastic body has a bent shape.   The micro-driving device according to any one of claims 1 to 9, wherein the functional element is an optical lens.   The micro-driving device according to any one of claims 1 to 9, wherein the functional element is a mirror.

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