JP4421579B2 - Rotating device - Google Patents

Description

  The present invention relates to a rotating device that includes a rotating body that can be rotated and includes a pipe that connects a radial side of the rotating body to a fixed side near the center.

In a processing apparatus that performs liquid crystal glass processing such as laser annealing, there is a case where processing is performed by rotating glass (for example, 90 degrees), and in this apparatus, a glass sample stage on which the glass is placed is rotated and precisely positioned. A mechanism is attached. In addition, the glass sample stage is equipped with a pipe for adsorbing glass in preparation for processing, a pushing mechanism and a slip ring that pushes up the glass after processing, and these pipes and mechanisms are used when rotating the sample stage. Rotates with sample stage. In particular, the slip ring or the like is disposed at the lower center of the rotating body.
For this reason, it is necessary to arrange | position the said piping etc. so that it may not get entangled or interfere with another member in the case of rotation. Conventionally, it has been proposed that an arcuate guide is provided at the bottom of the sample stage, away from the center, and the cable support is stored in a folded state in this guide, and piping or wiring is passed through this cable support. (For example, refer to Patent Document 1).

An example of the proposed apparatus will be described with reference to FIG.
A center unit 31 that houses a rotation mechanism, wiring, and the like of the sample table 30 is installed below the sample table (rotation stage) 30, and an arcuate guide groove 32 is provided on the outer peripheral side of the center unit 31. The cable support 33 is housed in the guide groove 32 in a folded state. One end of the cable support 33 is fixed to the fixed side near the center unit 31, and the other end is fixed to the rotation side of the sample stage 30. A pipe 34 or the like is inserted into the cable support 33 and disposed at predetermined positions on the fixed side and the rotating side.
The operation of the above apparatus will be described. When the sample table 30 is rotated, the cable support 33 to follow the rotation by folding-back portion moves within the guide groove 32. Thereby, the piping 34 etc. in the cable support 33 can move according to rotation of the sample stand 30 without being entangled.

However, the above-described conventional apparatus has the following problems, and has not been satisfied as a practical apparatus.
1. The mechanism that houses the cable support occupies a large space below the rotating body, making it difficult to maintain the device.
2. The mass of the mechanism such as the cable support increases, and the mass of the entire device increases.
3. Maintenance of mechanisms such as cable support is difficult.
4). The cable support is easily damaged over time due to rotational movement.

  The present invention has been made against the background of the above circumstances, and an object of the present invention is to provide a rotating device that can perform piping arrangement that can follow rotation without increasing weight, is easy to maintain, and has excellent durability. And

That is, the invention according to claim 1 of the rotating device according to the present invention includes a connecting portion fixed on a radial side of a rotating body capable of rotating, and an inner side of the rotating body that is offset from the rotating body rotating shaft. And a fixed portion that is fixedly installed at a position where a first hollow rotary joint having a rotation axis substantially along the rotation axis direction of the rotary body is attached to the fixed portion, and the rotary body rotation is connected to the connection portion. A third hollow rotary joint having a rotation axis substantially along the axial direction is attached, and substantially between the first hollow rotary joint and the third hollow rotary joint along the rotary body rotation axis direction. One or more second hollow rotary joints having a rotation axis and movable along a substantially plane direction of the rotary body, and arranged along the substantially plane direction of the rotary body, both ends of the rotary part of the hollow rotary joint 2 or more pipes connected to Characterized in that it is set.

According to the first aspect of the present invention, the connection portion fixed to the rotating body and the fixing portion installed inside the rotating body and near the rotating shaft displaced from the rotating shaft of the rotating body are rotated. A fixed portion installed in the vicinity of the shaft is connected by the first to third hollow rotary joints and the pipe, so that a fluid or the like can be transferred through the pipe. Further, when the rotator rotates, the respective hollow rotary joints rotate, and the piping rotates and slides to follow the rotation of the rotator. The piping needs to have a length that can follow the rotation in the total length. In particular, since the fixed portion is deviated from the center of the rotating body, the distance between the fixed portion and the connecting portion changes as the rotating body rotates. The total length of each pipe needs to be able to cope with this change in distance.
The piping and the hollow rotary joint can be configured without increasing the mass, and an increase in the mass of the entire apparatus can be suppressed as much as possible. In addition, since the configuration is simple, there is almost no hindrance to maintenance of other rotating device parts.

  The rotation axis of the hollow rotary joint is not limited to the rotation axis direction of the rotation body, but should be able to rotate following the rotation of the rotation body by being substantially along the rotation axis direction of the rotation body. . The structure of the hollow rotary joint is not particularly limited as the present invention, but it is a hollow structure so that the fluid transferred through the pipe can pass without leakage, and the rotary side rotates with respect to the fixed side by the rotary shaft described above, Or it is set as the structure which two rotation sides rotate, respectively. Further, the number of the second hollow rotary joint may be one or two or more, and a plurality of pipes are interposed between the plurality of hollow rotary joints. The second hollow rotary joint can move along the substantially plane direction of the rotating body, and this movement enables each hollow rotating joint and the pipe to follow the rotation of the rotating body.

  The rotating device of the present invention is suitable for a liquid crystal glass processing device (laser annealing device or the like) having a precision positioning function, but in addition to various devices for processing by sucking and holding a workpiece. Application is possible, and the scope of application of the present invention is not particularly limited.

  According to a second aspect of the present invention, there is provided the rotating device according to the first aspect, wherein the position of the rotating device is different between the first hollow rotating joint and the third hollow rotating joint in the rotating body rotating shaft direction. Two second hollow rotary joints are provided, and axial connection pipes that extend so that both end positions change in the rotation axis direction of the rotary body are respectively connected to the rotating portions of the second hollow rotary joints. It is characterized by.

According to the second aspect of the present invention, by using the axial connection pipe, the connection part and the fixed part, which are different in the axial direction, are connected via the axial connection pipe and the second hollow rotary joint. be able to. Note that the axial connecting pipe only needs to extend so as to change both end positions in the rotation axis direction of the rotating body, the shape substantially along the rotation axis direction of the rotating body, the oblique shape, the rotation of the rotating body, and the like. It can be constituted by a combination of a shape substantially along the axial direction and a shape substantially along the rotation axis surface direction, or a combination thereof.
In addition, in the piping connected to the first and third hollow rotary joints, it is also possible to have a part that extends so as to change the position in the direction of the rotating body rotation axis.

  According to a third aspect of the present invention, there is provided the rotating device according to the first aspect, wherein the pipe is configured to transfer a fluid.

  As described in the invention of claim 3, in the present invention, gas or fluid can be transferred through the pipe and the hollow rotary joint. Moreover, in this invention, it is not limited to this, In addition to this, it is also possible to transfer a solid granular material etc. through piping and each hollow rotary joint.

  According to a fourth aspect of the present invention, there is provided the rotating device according to the second aspect, wherein the fluid is evacuated from the connecting portion to the fixing portion or compressed air sent from the fixing portion to the connecting portion. It is characterized by being.

  According to the fourth aspect of the present invention, the pipe and the hollow rotary joint can be used for evacuation when sucking and holding a work to be processed, supply of compressed air for detaching the work, and the like.

  The invention of a rotating device according to a fifth aspect is the invention according to any one of the first to third aspects, wherein the fixed portion and the connecting portion, and each hollow rotary joint and pipe are arranged below the rotating body. It is characterized by that.

According to the fifth aspect of the present invention, it is possible to prevent interference with the work area above the rotating body by arranging the pipe and the hollow rotary joint below the rotating body.
Since the pipe and the hollow rotary joint have a simple configuration even at a position below the rotary body, maintenance is easy.

  The invention of the rotating device according to claim 6 is the invention according to any one of claims 1 to 5, wherein an electric wiring system is placed at a rotating body rotation center position that does not interfere with the fixed portion and the pipe. It is characterized by.

  In addition, an electrical wiring system such as a slip ring can be placed in a position where it does not interfere with the fixed portion and the pipe, and each mechanism can be provided without complicating the device configuration, and each maintenance is easy. It becomes possible to do.

As described above, according to the rotating device of the present invention, the connecting portion fixed on the radial direction side of the rotatable rotating body, and the inner side of the rotating body, which is displaced from the rotating body rotating shaft. And a first hollow rotation joint having a rotation axis substantially along the rotation axis direction of the rotating body is attached to the fixing portion, and the rotation axis direction of the rotation body is connected to the connection portion. A third hollow rotary joint having a rotary axis substantially along the axis is attached, and a rotary axis substantially along the rotary body rotary axis direction is provided between the first hollow rotary joint and the third hollow rotary joint. And one or more second hollow rotary joints that are movable along substantially the surface direction of the rotating body, and are arranged along the substantially surface direction of the rotating body, both ends of which are connected to the rotating part of the hollow rotating joint With two or more pipes Therefore, the fixed portion and the connecting portion can be connected by a pipe without requiring a complicated configuration, and the pipe can move following the rotation of the rotating body. Regardless of the rotational position, fluid or the like can be transferred between the fixed portion and the connecting portion. In addition, maintenance can be easily performed with the above configuration, and the overall mass is lighter than that of the conventional apparatus. In particular, in an apparatus provided with a precision positioning mechanism, the lighter the apparatus, the easier it is to obtain positioning accuracy. Therefore, reducing the weight contributes to improving accuracy and reliability. Further, since the piping stably moves with the rotation of the rotating body, there is an effect that durability is improved because it is hard to break.

Below, one Embodiment of this invention is described based on FIGS. 1-4.
The rotating device has a rotating stage 1 that is a rotating body on which a workpiece is set, and a fixed unit 2 is set below the center of the rotating stage 1. The fixing unit 2 is provided with wiring of a pushing mechanism that pushes up glass, a slip ring, and the like (not shown). Note that the slip ring is installed at the center of the stage rotation axis in the mechanism.

  The fixed unit 2 is provided with fixed portions 3 and 3 for connecting pipes at positions displaced from the stage rotation axis. Thereby, interference with the wiring etc. arrange | positioned in the vicinity of a rotating stage rotating shaft is avoided. The fixed portions 3 and 3 are connected to fixed portions 5a and 5a of first hollow rotary joints 5 and 5 having a rotation axis along the stage rotation axis direction.

  The rotating part 5b of the hollow rotary joint 5 is provided with a connecting port 5c facing in the lateral direction, and a pipe 6 arranged along the lower surface of the rotary stage 1 is connected to the connecting port 5c. . The material of the pipe 6 is not particularly limited, but a tetrafluoroethylene tube having excellent durability can be used. The pipe 6 is disposed in a groove 1 a provided on the lower surface side of the rotary stage 1.

  On the other hand, an air supply / exhaust block 14 communicating with a workpiece suction portion (not shown) is fixed to the lower surface side located on the radial side of the rotary stage 1, and a connection portion 13 is provided on the lower surface side of the air supply / exhaust block 14. ing. The connection portion 13 is connected to a fixed portion 12a of a third hollow rotary joint 12 having a rotation axis along the stage rotation axis direction. On the other hand, the rotating portion 12b of the third hollow rotary joint 12 is provided with a connecting port 12c facing in the lateral direction, and a pipe disposed along the lower surface direction of the rotary stage 1 at the connecting port 12c. 11 is connected. The pipe 11 can also be made of the same material as the pipe 6. The end portions of the pipe 6 and the pipe 11 are located at substantially the same rotational stage radial position between the first hollow rotary joint 5 and the third hollow rotary joint 12, and the first hollow rotary joint The position has shifted slightly from the linear direction between the joint 5 and the third hollow rotary joint 12.

  The other end of the pipe 6 is connected to a connecting port 7c provided laterally on the rotating portion 7b of the second hollow rotating joint 7 having a rotating shaft along the stage rotating shaft direction. An axial connection pipe 10 is connected to the other rotary part 7a of the second hollow rotary joint 7 along the stage rotation axis direction. The axial connection pipe 10 can also be made of the same material as the pipes 6 and 11. The other end of the axial connection pipe 10 is connected to a rotating portion 8a of a second hollow rotary joint 8 having a rotation axis along the stage rotation axis direction. The length may be adjusted by providing a connecting portion (not shown) in the axial direction connecting pipe 10. Further, the other rotating portion 8b of the second hollow rotary joint 8 is provided with a laterally connecting port 8c, and the end of the pipe 11 is connected to the connecting port 8c. As described above, the second hollow rotary joints 7 and 8 and the axial connection pipe 10 are slidable in the surface direction of the rotary stage 1 as the rotary stage 1 rotates.

Next, the operation of the rotating device will be described.
In a state where the rotary stage 1 is at a predetermined rotational position, the pipes 6 and 11 and the axial connection pipe 10 are at predetermined positions, and the connecting portion 13 and the fixed portion 3 are connected by these pipes. . When a workpiece (not shown) is installed on the rotary stage 1, suction is performed from the fixed portion 3 via the fixed unit 2 by a suction device (not shown). Then, evacuation is performed from the work suction unit (not shown), the exhaust is sucked from the supply and exhaust block 14 to the connection part 13, the further, third hollow rotating joint 12, pipe 11, a second hollow rotary joint 8, It is sucked into the axial connection pipe 10, the second hollow rotary joint 7, the pipe 6 and the first hollow rotary joint 5 and exhausted to the suction device. As a result, the workpiece is reliably adsorbed. When releasing the adsorption of the workpiece, the suction is stopped, and compressed air is supplied to the fixed portion 3 as necessary. Compressed air passes through the first hollow rotary joint 5, and further includes a pipe 6, a second hollow rotary joint 7, an axial connection pipe 10, a second hollow rotary joint 8, a pipe 11, and a third hollow rotary joint. 12 is sent to the connection portion 13 and the intake / exhaust block 14 to facilitate the separation of the workpiece. When a pushing mechanism that pushes up the workpiece is provided, the mechanism is operated to release the workpiece. At this time, the operation is smoothly performed without interfering with the piping or the like at a fixed position.

  Further, when it is necessary to rotate the rotary stage 1, the rotary stage 1 is rotated by 90 degrees, for example, as shown in FIGS. In response to the rotation, the third hollow rotary joint 12 connected to the connecting portion 13 rotates, and accordingly, the rotating portion 12a and the pipe 11 rotate. This rotational force is transmitted to the rotating portion 8b of the second hollow rotary joint 8, and the hollow rotary joint 8 rotates. This rotation is transmitted from the rotating portion 8a to the pipe 10, and the second hollow rotary joint 7 further rotates. The slide and rotation are transmitted from the second hollow rotary joint 7 to the pipe 6, and the pipe 6 rotates around the first hollow rotary joint 5. In the first hollow rotary joint 5, the rotating portion 5 b rotates as the pipe 6 rotates. In the above operation, since the fixed portion 3 is displaced from the rotation axis of the rotary stage, the distance between the fixed portion 3 and the connecting portion 13 changes as the rotary stage 1 rotates. This change in distance is absorbed by the second hollow rotary joints 7 and 8 and the axial connection pipe 10 being slightly slid in the surface direction of the rotary stage 1 in the above operation.

  With the above operation, the third hollow rotary joint 12, the pipe 11, the second hollow rotary joint 8, the axial connection pipe 10, the second hollow rotary joint 7, the pipe 6, and the first one as the rotary stage 1 rotates. The second hollow rotary joint 5, the second hollow rotary joint 7, the axial connection pipe 10, and the second hollow rotary joint 8 slide in addition to the rotational movement. Thereby, even if the fixed portion 3 is deviated from the rotation axis of the rotary stage 1, these pipes can smoothly follow the rotation of the rotary stage 1.

In addition, since the path | route of piping from the fixing | fixed part 3 to the connection part 13 is only comprised by each piping and each hollow rotary joint as mentioned above, it can be comprised simply and lightweight, and maintenance of these piping systems Of course, other parts can be easily maintained.
In addition, although the said embodiment demonstrated the form which has an axial direction connection piping, when the position adjustment in an axial direction is not required, it is also possible to abbreviate | omit an axial direction connection piping. Moreover, although the said embodiment demonstrated what has several 2nd hollow rotation joints in which a position differs in an axial direction, it has several 2nd hollow rotation joints in which a position differs in a rotation stage surface direction. There may be.
As mentioned above, although this invention was demonstrated based on the said embodiment, this invention is not limited to the content of the said description, In the range which does not deviate from the scope of the present invention, an appropriate change is possible.

It is a schematic perspective view which shows the rotating apparatus of one Embodiment of this invention. Similarly, it is a partial front view. Similarly, it is a figure which shows some piping. Similarly, it is a top view which shows a rotation apparatus in a different rotation position. It is a perspective view which shows a part of conventional rotation apparatus.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Rotation stage 2 Fixed unit 3 Fixed part 5 First hollow rotary joint 5a Fixed part 5b Rotating part 6 Pipe 7 Second hollow rotary joint 7a Rotating part 7b Rotating part 8 Second hollow rotating joint 8a Rotating part 8b Rotating part DESCRIPTION OF SYMBOLS 10 Axial connection piping 11 Piping 12 3rd hollow rotation joint 12a Fixing part 12b Rotation part 13 Connection part

Claims (6)

A connecting portion fixed on the radial side of the rotating body capable of rotating; and a fixing portion fixedly installed at a position inside the rotating body and deviated from the rotating shaft of the rotating body. Is attached with a first hollow rotary joint having a rotation axis substantially along the rotary body rotation axis direction, and a third hollow rotary joint having a rotation axis substantially along the rotary body rotation axis direction is attached to the connecting portion. It is attached and has a rotation axis substantially along the rotation axis direction of the rotating body between the first hollow rotation joint and the third hollow rotation joint, and is movable along a substantially plane direction of the rotation body. One or more second hollow rotary joints and two or more pipes that are disposed along the substantially plane direction of the rotating body and that are connected to the rotating portion of the hollow rotary joint are interposed. Rotating device characterized.   Between the first hollow rotary joint and the third hollow rotary joint, two second hollow rotary joints having different positions in the rotary body rotary axis direction are provided, the second hollow rotary joint 2. The rotating device according to claim 1, wherein an axial connection pipe extending so as to change both end positions in the rotation axis direction of the rotating body is connected to each of the rotating parts.   The rotating device according to claim 1, wherein a fluid is transferred to the pipe.   The rotating device according to claim 2, wherein the fluid is air that is evacuated from the connection portion to the fixed portion or compressed air that is sent from the fixed portion to the connection portion.   The rotating device according to any one of claims 1 to 3, wherein the fixed portion and the connecting portion, and each hollow rotary joint and pipe are arranged below the rotating body.   The rotating device according to any one of claims 1 to 5, wherein an electric wiring system is housed in a rotating body rotation center position that does not interfere with the fixed portion and the pipe.

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