JP4418712B2 - Tilt measuring instrument - Google Patents

Description

  The present invention relates to an inclination measuring device that uses a light beam from a semiconductor laser light source, and is capable of measuring the horizontal and vertical inclinations of the installation surface when this measuring device is installed on an object to be measured. .

A laser level that uses a semiconductor laser as a light source and uses the luminous flux as an inking line when assembling various members is used in many fields as an instrument that can measure the inclination. This is because the linearity characteristic of the laser beam itself functions well as the inking line, which is the reason for the evaluation. However, on the other hand, there are some points that have been pointed out as problems. One of them is the inclination of the installation surface of the object to be measured on which the level is installed. In order to confirm the degree of inclination of the installation surface, measurement level materials such as bubbles and weights are generally provided in the level. However, when using bubbles, JIS
As described in 7510-1993, the inclination accuracy with respect to a length of about several meters is used, and when the length is several tens of meters, it cannot be dealt with. A thing using a weight known as a gimbal structure requires time until the weight swings. And the first important thing is that there is no reliable guarantee relating the connection accuracy between the measurement auxiliary material such as bubbles attached to the level and the laser beam emitted from the level. It is that. Secondly, when an auxiliary material such as air bubbles is used, a reading error is caused by an individual during measurement.
As another problem, the drawback of the laser beam itself has been pointed out. That is, the diameter of the laser beam influences the accuracy of the marking line. For example, when assembling a steel frame or the like at a building construction site where the height exceeds 50 m, if a laser beam is emitted from the level attached to the rooftop to the ground side, the laser beam diameter on the ground side is 5 to 10 mm. It often exceeds. That is, there is a possibility that a measurement error occurs within a range of 5 to 10 mm in diameter. Also, when multiple marking lines are required in both the vertical and horizontal directions, using multiple levels will not only cause an error for each level, but also multiple horizontal lines generated from the levels. The accuracy of verticality or verticality cannot be determined.
Japanese Patent Laid-Open No. 11-153436 JP 2004-4086 A

In order to enable tilt measurement without individual differences, the present invention uses a single semiconductor laser light source to simultaneously generate light beams in both horizontal and vertical directions, and the horizontal and vertical accuracy of the generated light beams. It is to obtain a tilt measuring device that can always guarantee. When the measuring instrument is installed on the measurement surface of the measurement object without relying on auxiliary materials such as bubbles and weights, the horizontal inclination of the installation surface and the vertical direction of another measurement object installed in the vertical direction Is to be able to easily measure the inclination of the two simultaneously with the two light beams. Then, even when the object to be measured exceeds 50 m, it is possible to measure the tilt with an accuracy that is not bothered by the laser beam diameter. Further, when a plurality of marking lines are required, each line level can be measured and judged so that a plurality of laser levels can be handled freely.

In order to achieve the above object, the present invention is directed to a semiconductor laser light source mounted on a main body so as to emit a light beam in a vertical direction below, and a light beam from the laser light source is received by a first collimator lens and directed to the outside of the main body as a parallel light beam. a first optical path light beam, a beam splitter having the laser light source and the reflecting surface of 45 degrees was placed between the first collimator lens, reflected by the beam splitter this, a light beam from the laser light source is horizontally second Two optical images of the second optical path light beam received by the collimator lens and directed to the outside of the main body as a parallel light beam, and the first optical path light beam directed to the outside and the inverted light beam of the second optical path light beam are directed toward a predetermined reference point. and one light receiving portion projected via the beam splitter, a display unit for displaying a light image projected on the light receiving portion to the index position, it is configured to have a city, horizontal the body When installed in the measurement object measurement surface countercurrent, the first optical path light beam to the installation measuring surface thereof directs vertically measurement surface of the object to be measured was placed second optical path light beam in the vertical direction, due to the two inverted light beam The optical image is displayed on the display unit, and the vertical measurement surface inclination of the object to be measured is detected as a deviation between the index position of the display unit and the optical image display position .
According to a second aspect of the present invention, there is provided the tilt measuring instrument according to the first aspect, wherein the reflecting portion in which the liquid reflecting material is enclosed and the lid is made transparent is placed in the first optical path light beam that has passed through the first collimator lens. When the main body is installed on the measurement object measurement surface in the horizontal direction, the vertical measurement surface of the measurement object in which the first optical path light beam is applied to the liquid reflecting material of the reflecting portion and the second optical path light beam is installed in the vertical direction. And display the optical image of the both inverted light fluxes on the display unit, and detect the horizontal measurement surface tilt and the vertical measurement surface tilt of the object to be measured as a deviation between the index position of the display unit and the optical image display position. It is characterized by doing so.
According to a third aspect of the present invention, there is provided a semiconductor laser light source attached to the main body so as to emit a light beam in a vertical direction below, and a first optical path light beam that is received by the first collimator lens as a parallel light beam. , Installed in the first optical path light beam that has passed through the first collimator lens, installed in the first optical path light beam that has passed through the reflective part, and a reflective part in which the lid and bottom plate are transparent and encapsulated with a liquid reflective material An autofocus objective lens that forms an image by extending the first optical path light beam to an arbitrary position outside the main body, and an arbitrary imaging position of the first optical path light beam that is extended by the autofocus objective lens, and is predetermined. A focusing plate with an index at the reference position, a beam splitter having a reflection surface of 45 degrees installed between the laser light source and the first collimator lens, and reflected by the beam splitter, A second optical path light beam that is received by the second collimator lens and is directed to the outside of the main body as a parallel light beam, and a first optical path light beam that is reflected by the liquid reflecting material and the focusing plate of the reflecting portion; , One light receiving unit in which an optical image by the inverted light beam of the second optical path light beam is projected via a beam splitter toward a predetermined reference point, and a display unit that displays the light image projected on the light receiving unit at the index position When the main body 1 is installed on the surface to be measured in the horizontal direction, the first optical path beam is installed at an arbitrary position in the extending direction of the liquid reflecting material of the reflecting portion and the first optical path beam. The second optical path light beam is directed to the vertical measurement surface of the object to be measured installed in the vertical direction, the light image by the inverted light beam is displayed on the display unit, and the main body installation measurement by the first optical path light beam Horizontal tilt of surface and focusing screen installation The vertical inclination of the location, the vertical measurement surface tilt of the second light flux optical path, characterized in that it has detected as the deviation of the index position and the optical image display position of the display unit.
According to a fourth aspect of the present invention, there is provided the tilt measuring instrument according to the third aspect , wherein the liquid reflecting material is enclosed in the conical reflection cell, and the lid and the bottom plate are inclined by an angle θ in advance. It is characterized in that it is a reflection part that is installed in a light beam of one optical path and that can adjust the angle θ with an adjusting member .

The present invention provides a measuring instrument that generates horizontal and vertical light fluxes simultaneously using one semiconductor laser light source, and can always guarantee the accuracy of horizontal and verticality of the generated light fluxes. I can do it. When this measuring instrument is installed on the measurement surface of the object to be measured, the horizontal inclination of the installation surface and the vertical inclination of another object to be measured installed in the vertical direction can be easily measured simultaneously using the two light beams. I can do it. As a result, measurement without individual differences can be performed without relying on auxiliary materials such as bubbles and weights. When a plurality of marking lines are required, a plurality of laser levels can be installed to measure and use each line accuracy. This allows multiple levels to be used in the same environment. By these, the measurement accuracy of inclination can be improved as a whole.
In addition, since the reflective part installed in the measuring instrument body can be used as a reference plane for measurement during use, it is possible to always maintain a horizontal reference accuracy and obtain a measuring instrument that is not easily affected by changes over time. I can do it. In addition, since the autofocus objective lens is installed at the subsequent stage of the reflecting part, the position of the imaging surface can be extended, and even when the distance exceeds 50 m, it is possible to carry out highly accurate measurement that is not bothered by the diameter of the laser beam. I can do it.

  An inclination measuring instrument according to the present invention will be described below with reference to the drawings.

First, the configuration of the tilt measuring instrument according to the present invention and the internal optical system will be described. FIG. 1 is an explanatory side sectional view showing an outline of an internal optical system of a tilt measuring instrument. In the figure, the measuring instrument main body 1 is installed on an adjustment jig 2. The jig 2 is composed of a horizontal base 3 and a vertical wall 4 upright from the horizontal base 3, and the mounting portions 5 of both are configured with an angle of 90 degrees accurately. The mirrors 6 and 7 are fixed to the vertical wall 4 and the horizontal base 3, and the reflection surfaces thereof are accurately managed in the vertical and horizontal directions and function as reference accuracy surfaces. A plurality of precision adjusting screws 8 are attached to the bottom of the main body 1 as intermediate members, and the position and inclination of the main body height direction on the horizontal table 3 are corrected by adjusting the tightening degree. Various optical members to be described later are accommodated in the main body 1 to form an optical system. One of them, a semiconductor laser light source 9, is attached to the upper portion of the main body 1, and a light beam emitted therefrom passes through a beam splitter 10 having a reflection surface of 45 degrees attached to the main body 1. The light beam is parallel and travels from the window 12 at the bottom of the main body toward the mirror 7 fixed on the horizontal table 3. Then, the light is reflected and inverted, passes through the first collimator lens 11, is reflected by the reflecting surface of the beam splitter 10, and reaches the light receiving unit 13 attached to the front of the main body 1. Hereinafter, this light beam is referred to as a first light path light beam 14.
On the other hand, of the light beam from the light source 9, the light beam separated and reflected by the reflecting surface of the beam splitter 10 proceeds in the horizontal direction as it is, passes through the second collimator lens 15, becomes a parallel light beam, and becomes a vertical wall of the jig 2. Reflected by the mirror 6 fixed to 4 and inverted. Then, it passes through the second collimator lens 15 and the beam splitter 10 and reaches the light receiving unit 13. Hereinafter, this light beam is referred to as a second light path light beam 16. As a result, an optical system of the first optical path light beam 14 and the second optical path light beam 16 is formed in the main body 1 and reflected by the external mirrors 7 and 6 installed outside the main body, respectively, and the inverted light beams pass through the beam splitter 10. It goes to the light-receiving part 13 via. The light receiving unit 13 includes a photoelectric conversion unit such as a CCD or PSD, and a display unit that receives a signal from the photoelectric conversion unit and displays it as an image. Therefore, when the light receiving unit 13 receives the light beams from the two optical paths 14 and 16, an optical image by the two light beams is displayed on the display unit. Then, the inclination accuracy in the vertical and horizontal directions is determined from the collective state of the two displayed images, and details thereof will be described sequentially. In the figure, reference numeral 17 denotes a metal fitting for defining the position of the main body 1 on the horizontal table 3. Further, a power source for turning on the light source 9 and a switch for instructing on / off thereof are omitted in the drawing because they are appropriately attached to the main body 1.

FIG. 2 is a front view of the light receiving unit 13. The light receiving unit 13 includes the photoelectric conversion unit and the display unit 18 as described above. An indicator 19 such as a crosshair is provided on the display unit 18, and further, by adjusting the tightening degree of the adjusting precision screw 21 as an intermediate member provided in the mounting unit 20 integrated with the main body 1, Can be moved vertically and horizontally. Thereby, for example, when a light beam 14 (hereinafter referred to as an inverted light beam) of the first optical path reflected and inverted by the external mirror 7 is displayed on the display unit 18, the display image can be adjusted to coincide with the intersection of the index 19. I can do it. Of course, when the inverted luminous flux 16 by the second optical path in the horizontal direction that has passed through the second collimator lens 15 and reflected by the external mirror 6 is displayed on the display unit 18, the image is adjusted so as to coincide with the intersection of the index 19. You can also Therefore, if it is assumed that the first optical path light beam 14 and the second optical path light beam 16 are accurately in the vertical and horizontal directions, the reversal light beams passing through the beam splitter 10 toward the light receiving unit 13 are assumed. The optical images 14 and 16 are projected on a predetermined reference position through the same optical path , and the images are projected and displayed at the intersection of the indicator 19 on the display unit 18 or in the vicinity thereof.
When the measuring device main body 1 configured in this way is installed on the measurement surface of the object to be measured, if the object measurement surface in a direction perpendicular to the installation surface has an inclination, the light image corresponds to the index 19 intersection according to the inclination. Move from position. Therefore, the inclination of the measurement surface can be measured by confirming the relationship between the optical image projection position and the index 19 on the display unit 18. However, in this case, the horizontal inclination of the object to be measured on which the measuring device main body 1 is installed cannot be measured accurately. The countermeasure will be described later with reference to FIG.
Since the function of the light receiving unit 13 is as described above, an equivalent function can be obtained even if the photoelectric conversion unit such as a CCD is eliminated and only the display unit 18 such as ground glass is used. If a photoelectric conversion unit such as a CCD is installed, the display unit 18 can be separated from the main body 1 and made independent. In this way, the installation location of the main body 1 and the location where the display unit 18 is checked can be separated. In the figure, M is a dial of a micrometer or the like that operates in conjunction with the tightening operation of the screw 21. When the display unit 18 is moved to match the projection position of the optical image, the amount of movement is confirmed as a numerical value. I can do it.

Next, an optical system adjustment method and confirmation work for ensuring the accuracy of the two light beams 14 and 16 in the vertical and horizontal directions will be described. FIG. 3 is an explanatory diagram of the first optical path, and A shows a side cross section of the main body 1. In the figure, 22a is a shielding plate, which is temporarily installed in the main body 1, and the light beam from the light source 9 is reflected and separated by the beam splitter 10, and the second optical path light beam 16 traveling in the horizontal direction by changing the direction by 90 degrees is blocked. To do. Then, the measuring instrument main body 1 is placed on the horizontal base 3 of the jig 2 and the light source 9 is turned on. Then, the light beam is reversed toward the mirror 7 on the jig 2 through the beam splitter 10 and the first collimator lens 11 omitted in FIG. 3A. Then, the light image is projected onto the light receiving unit 13 through the first collimator lens 11 and the beam splitter 10. Therefore, the inverted light beam reflected by the mirror 7 and returning to the beam splitter 10 forms the same optical path as the forward light beam if the reflecting surface of the beam splitter 10 is correctly installed at 45 degrees with respect to the first optical path 14. In the figure, for convenience, the return beam and the outbound beam are shown as separate optical paths.
An optical image of the first optical path 14 projected on the light receiving unit 13 and displayed on the display unit 18 is assumed to be 23 in FIG. 3B. FIG. 3B shows the front of the display unit 18 as in FIG. 2, but it can be confirmed that the image 23 displayed here is shifted from the intersection of the index 19. Therefore, the position of the light image 23 with respect to the index 19 is adjusted using the precision screw 21 as the intermediate member shown in FIG. 2 or the main body bottom screw 8 of FIG. 3A, and the intersection of the light image 23 and the index 19 as shown in FIG. To match. The amount of movement of the display unit 18 at this time can be confirmed with the dial M as necessary.
When the relationship between the first optical path light beam 14 and the index 19 is adjusted in this way, the shielding plate 22a is removed. However, at this time, it has not yet been confirmed what inclination the first optical path light beam 14 and the reflecting surface of the mirror 7 have. That is, since it has not been confirmed whether the first optical path light beam 14 is perpendicular to the surface of the mirror 7, the adjustment described later is necessary.

FIG. 4 is a side sectional view for explanation showing an intermediate member for adjusting the position and angle of the reflecting surface of the beam splitter 10. The beam splitter 10 is attached to the holder 25 by a plurality of adjusting precision screws 24. The holder 25 is fixed to the mounting portion 26 fixed to the main body 1. In the figure, the screws 24 in the direction perpendicular to the paper surface are omitted, but by adjusting the tightening degree of the screws 24 provided in the respective surface directions of the beam splitter 10, the reflection surface angle of the beam splitter 10, front and rear, left and right Correct the vertical position. Thereby, the traveling direction of the first and second optical path light beams 14 and 16 is changed to adjust the projection position of the light receiving portion 13 of the light image 23 by the inverted light flux.

FIG. 5 is a side sectional view of the optical system for explaining the principle when adjusting the verticality of the first optical path light beam 14 and the horizontality of the second optical path light beam 16. FIG. A shows a state in which the first light path light beam 14 is perpendicular to the external mirror 7 and the reflecting surface 10a of the beam splitter is set to be correctly 45 degrees with respect to the first optical path. The collimator lenses 11 and 15 are omitted. In such a state, the inverted light flux of the first optical path 14 emitted from the laser light source 9 and directed downward in the vertical direction and reflected by the external mirror 7 is reflected by 90 degrees on the reflecting surface 10 a and reflected by the light receiving unit 13. Projected at position 27. The projected state is the state shown in FIG. 3C, and the projected light image 23 coincides with the intersection of the index 19.
On the other hand, the second optical path light beam 16 reflected and separated by the reflecting surface 10 a is also reflected by the external mirror 6, inverted, and projected onto the light receiving unit 13. In this case, as described above, since the reflecting surface 10a is installed so as to be correctly 45 degrees with respect to the first optical path light beam 14, the second optical path light beam 16 is related to be perpendicular to the first optical path light beam 14. . As a result, the position at which the optical image 23 in the second optical path is projected is the same position as the optical image projection position by the first optical path 14 or a position 27 in the vicinity thereof. Accordingly, the two light images 23 are projected on the light receiving unit 13 in a superimposed state or in a state of being gathered in the vicinity , and this position becomes a normal reference position. In the drawing, in order to simplify the explanation of the reflecting surface 10a, the beam splitter 10 is not shown as a block-shaped beam splitter but as a planar beam splitter including the case of FIG.
FIG. B shows a state when it is assumed that the reflecting surface 10a is inclined with respect to the first optical path light beam 14 by θ1. When the reflecting surface 10a is installed at an angle θ1 with respect to the first optical path 14, the vertical first optical path light beam 14 that has traveled straight through the reflecting surface 10a is reflected by the external mirror 7 and reversed, and then the reflecting surface 10a is reflected in accordance with the angle θ1, and thus proceeds in the direction of the arrow 28 in the figure and projects the optical image at a position 27a on the light receiving unit 13. Since the projected position 27a is a position changed according to the angle θ1 with respect to the normal position 27 in FIG. A, the projected position 27a is displayed on the display unit 18 in a state as shown in FIG. 3B, for example. On the other hand, the second optical path light beam 16 reflected by the reflecting surface 10a in the direction of the arrow 29 in the figure is reflected and reversed on the external mirror 6 according to the angle θ1, but the light beam has a limited size of the light receiving unit 13. If it is a thing, it will be outside the area of a light-receiving part, and cannot be confirmed as an optical image. In such a case, the light receiving unit 13 can confirm only the optical image 23 by the first optical path light beam 14.
FIG. C shows a state when it is assumed that the reflecting surface 10a is installed with an inclination of θ2 in the opposite direction to θ1. When the reflecting surface 10a is installed at an angle θ2 with respect to the first optical path 14, the vertical first optical path light beam 14 that has traveled straight through the reflecting surface 10a is reversed by the external mirror 7 in the direction of the arrow 28b in the figure. The optical image is projected onto the position 27 b on the advance light receiving unit 13. The projected position 27b is a position changed according to the angle θ2 with respect to the normal position 27 in FIG. On the other hand, the second optical path light beam 16 reflected by the reflecting surface 10a in the direction of the arrow 29b in the figure is reflected and reversed on the external mirror 6 according to the angle θ2, but the light beam is limited in size of the light receiving unit 13. In that case, you will not be able to see the image because it will be outside the area. In such a case, the light receiving unit 13 can confirm only the light image 23 by the first optical path light beam 14.
As described above, assuming that the first optical path light beam 14 maintaining the perpendicularity is set as an optical system as in the examples of FIGS. B and C, the reflecting surface 10a of the beam splitter must be correctly installed at 45 degrees. In this case, it is not possible to display the optical image 23 by the two inverted light beams at the normal position 27 on the display unit 18. Therefore, the angle of θ1 and θ2 is gradually corrected to adjust the position of the reflecting surface 10a, and when the projection positions of the two light images 23 coincide with the index 19, or when the projection positions of the two images are gathered in the vicinity positions. It is assumed that the position of the reflecting surface 10a is fixed and the position of the reflecting surface 10a with respect to the first optical path light beam 14 is defined for the time being.

6 is also a side sectional view of the optical system for explaining the adjustment of the first optical path light beam 14 and the second optical path light beam 16 as in FIG. 5A differs from FIG. 5A in that the first optical path 14 is inclined by an angle θ3 with respect to the normal vertical optical axis 30 and the reflecting surface 10a is correctly installed at a position of 45 degrees with respect to the normal optical axis 30. Shows the state. When such an inclination θ3 occurs, when the first optical path light beam 14 that has passed through the reflecting surface 10a is reflected by the external mirror 7, the inverted light beam is also reflected according to θ3, and is reflected by the reflecting surface 10a. Thus, the light beam 31 traveling toward the light receiving unit 13 also travels at an angle corresponding to θ3. Therefore, if the size of the light receiving unit 13 is limited, the light beam 31 cannot reach the light receiving unit 13. At least the light image cannot be directed to the normal projection position 27. Similarly, since the second optical path light beam 16 reflected by the reflecting surface 10a is also reflected and inverted on the external mirror 6 in accordance with the angle θ3, the inverted light beam 32 goes out of the area of the light receiving unit 13 and becomes normal for the light receiving unit 13. A light image cannot be projected at the position 27. Therefore, on the display unit 18, the optical image 23 by the second optical path light beam 16 and the optical image of the first optical path light beam 14 cannot be confirmed near the same point. The reflected light beams 31 and 32 are parallel to each other.
FIG. B shows a state when it is assumed that the first optical path 14 is installed with an inclination of θ4 with respect to the normal optical axis 30 in the direction opposite to θ3. When such an inclination θ4 occurs, when the first optical path light beam 14 that has passed through the reflecting surface 10a is reflected by the external mirror 7, the inverted light beam is also reflected according to θ4, and is reflected by the reflecting surface 10a. Thus, the light beam 33 traveling toward the light receiving unit 13 travels at an angle corresponding to θ4 and eventually cannot reach the normal position 27 of the light receiving unit 13. Similarly, the second optical path light beam 16 reflected by the reflecting surface 10a is also reflected and inverted on the external mirror 6 according to the angle θ4, but the inverted light beam 34 is directed outside the area of the light receiving unit 13 and is received by the light receiving unit 13. The normal position 27 cannot be reached. Therefore, on the display unit 18, the optical image 23 by the second optical path light beam 16 and the optical image of the first optical path light beam 14 cannot be confirmed near the same point. The reflected light beams 33 and 34 are parallel to each other.
As shown in the examples of FIGS. A and B, if the optical axis of the first optical path light beam 14 has an angle of θ3 and θ4 with respect to the reflecting surface 10a installed according to the regular optical axis 30, the display unit 18 The two light images 23 cannot be confirmed near the same point. Therefore, while adjusting the position of the light source 9 shown in FIG. 1, the angles of θ3 and θ4 are gradually corrected to adjust the angle of the optical axis, and when the two light image 23 projection positions and the index 19 coincide, or both It is assumed that the first optical path light beam 14 optical axis with respect to the reflecting surface 10a is defined for the time being when the image projection positions are gathered in the vicinity.
The adjustment of the first optical path light beam 14 and the second optical path light beam 16 is not limited to the examples of FIGS. 5 and 6 described above, and various combinations may occur. However, the optical image 23 projected on the display unit 18 may be adjusted. While confirming the gathering status, make the primary adjustments for the time being.

Next, a second adjustment for reconfirming the verticality of the first light beam 14 and the horizontal property of the second light beam 16 will be described. FIG. 7 is a detailed explanatory diagram of a first optical path light beam for performing this secondary adjustment. In the drawing, the light from the light source 1 attached to the main body 1 is focused on the pinhole 37 of the pinhole plate 36 by the lens 35 not shown in FIG. Since the light source 1 and the beam splitter 10 have their primary positions adjusted as described with reference to FIGS. 6 and 5, the second optical path light beam 16 reflected and separated by the beam splitter 10 has a lens 38. After that, the amount of light is detected toward the second light amount detection unit 39 constituted by a photodiode or the like. The lens 38 and the second light quantity detection unit 39 are installed at a position for receiving light from a half mirror (not shown) installed between the second collimator lens 15 and the beam splitter 10. When the light quantity is detected by the second light quantity detection unit 39, the light source 9 whose position is adjusted is loosened and moved slightly forward and backward and left and right on the main body 1 to obtain a position where the detection value of the second light quantity detection part 39 is maximized, The position of the light source 1 at that time is temporarily fixed.
On the other hand, the first optical path light beam 14 that has passed through the beam splitter 10 becomes a parallel light beam by the first collimator lens 11, is reflected by the mirror 7 on the horizontal base 3, and is inverted, and passes through the first collimator lens 11 and the beam splitter 10. Head to the pinhole plate 36. At this time, if the perpendicularity of the first optical path light beam 14 with respect to the external reference plane mirror 7 remains after the adjustment described with reference to FIG. 6, the inverted light beam cannot pass through the pinhole 37. . Therefore, adjustment is made so that the inverted light beam from the external reference plane mirror 7 passes through the pinhole 37 by moving the temporarily fixed light source 9 or moving the pinhole plate 36 again. This adjustment is determined based on a detection value of the light amount that is extracted by the half mirror 40 from the light beam that has passed through the pinhole 37 and directed to the first light amount detection unit 41 configured by a photodiode or the like. If the detected light quantity is small, the optical axis of the first optical path 14 is still inclined with respect to the external mirror 7 or the optical axis position of the first optical path 14 is deviated with respect to the pinhole 37. to decide. After adjustment until the first light quantity detection unit 41 detects the maximum light quantity, the detection values of the first light quantity detection unit 41 and the second light quantity detection unit 39 are compared. If there is a difference between the two detection values, the adjustment is further advanced. If the two values coincide or approximate, the first optical path light beam 14 is guaranteed to be perpendicular to the external mirror 7 , and the second optical path light beam 16. Determines that the horizontality of the external mirror 6 is guaranteed .
While comparing the detection values of the first and second light quantity detectors 41 and 39 as described above, the verticality of the first optical path light flux 14 and the horizontality of the second optical path light flux 16 are established, and in this state, the light source 9 The positions of the optical members such as the pinhole plate 36 and the beam splitter 10 are fixed. Then, it is confirmed that the positional relationship between the display unit 18 and the optical image 23 described in FIG. 3 is in the state as shown in FIG. 3C or in the state where the two optical images 23 are gathered near the intersection position of the index 19. Then, the second adjustment work is completed. In this way, by installing the pinhole 37 in the optical system and further detecting and comparing the light amounts of the two inverted light beams by the detection units 39 and 41, the accuracy of verticality and horizontality can be improved. In addition, it is preferable to remove the above-described pinhole plate 36 from the first optical path light flux after the completion of this operation.

Next, a third adjustment for confirming the horizontality of the second optical path light beam 16 will be described with reference to FIG. The figure shows a side cross section of the optical system as in FIG. 1, and after removing the shielding plate 22a shown in FIG. 3A, the shielding plate 22b for shielding the first optical path light beam 14 in the vertical direction is attached to the main body 1. Temporary installation inside. Then, the light beam traveling in the vertical direction is interrupted, and the second optical path light beam 16 reflected by the reflecting surface of the beam splitter 10 and changing the traveling direction to the horizontal direction travels straight to the external mirror 6 through the second collimator lens 15. Since the reflecting surface of the external mirror 6 is controlled in advance so as to be parallel to the vertical wall 4 as the adjustment jig 2, it is a reference accuracy surface. Therefore , the reflected light beam reflected by the external reference surface mirror 6 and returned to the beam splitter 10. Passes through the same optical path as the light flux in the forward path. In the figure, the light beam 16 on the forward path and the light beam on the return path are shown as separate optical paths for convenience, but the reflection surface 10a of the beam splitter and the optical axis of the first optical path 14 are as described with reference to FIGS. If adjusted, the index 19 and the light image 23 should match as shown in FIG. 3C. That is, if the optical image of the first optical path light beam 14 is projected within a regular optical image projection position on a predetermined light receiving unit, the horizontality of the second optical path light beam 16 should be obtained at the same time. If a fine adjustment error has occurred, the position of the light image 23 projected in the vicinity of the intersection of the index 19 is confirmed to determine the necessity for readjustment. When there is no necessity, the verticality and horizontality of the first and second light beams 14 and 16 are guaranteed, and the measuring instrument 1 to be obtained can be obtained. If the measuring device 1 obtained in this way is installed on an object to be measured in an arbitrary horizontal direction , the indicators 19 and 2 are used if there is no inclination on the measuring surface of the object to be measured installed in the vertical direction. The two images 23 are collected and displayed near each other. If there is an inclination, the light image of the vertical light beam 14 and the light image of the horizontal light beam 16 are displayed with a distance from the index 19. Therefore, thereafter, the vertical and horizontal inclinations may be determined from the display positions of the two light images that change depending on the measurement surface.

A case where readjustment is necessary for the second optical path light beam 16 will be described with reference to FIG. FIG. 9 is a side sectional view showing details of the second collimator lens 15 inside the main body 1 and a reflecting portion 45 described later. In the figure, the second collimator lens 15 is composed of an outer lens barrel 46 fixed to the main body 1 and an inner lens barrel 47 accommodated in the outer lens barrel 46. The inner barrel 47 holds a collimator lens and is attached to the outer barrel 46 by an intermediate member such as a position adjusting precision screw 48. If the tightening degree of the screw 48 is adjusted, the position and angle of the second collimator lens with respect to the main body 1 can be adjusted. Therefore, when it becomes necessary to finely adjust the traveling direction of the light beam 16 traveling in the horizontal direction, it can be dealt with by adjusting the collimator lens. In this way, the third-order adjustment for ensuring the horizontality of the second optical path light beam 16 is completed. Although not shown in the figure, the first collimator lens 11 has the same configuration, and the position and angle of the first collimator lens 11 are adjusted by adjusting a precision screw as an intermediate member (not shown). Thus, the traveling direction of the light beam 14 traveling in the vertical direction can be finely adjusted.

Next, the reflector 45 that maintains the display accuracy of the optical image 23 will be described. Reflecting portion 45 of FIG. 9 is placed downstream of the first collimator lens 11, the portion where the light beam 14 of the cover plate 49a passes consists of reflecting cell 49 which is a transparent body. A liquid reflecting material 50 is sealed inside the reflection cell 49 and fixed to the main body 1 by the mounting portion 51. The liquid reflecting material 50 is, for example, a liquid material such as oil. Since the liquid reflecting material 50 is always level with respect to the ground, when the first optical path light beam 14 reaches this surface, the liquid reflecting material 50 is reflected and inverted there. Head to 13. At this time, no matter what angle the reflection cell 49 is installed with respect to the main body 1, the liquid reflection material 50 sealed inside always maintains its horizontal plane accuracy as described above. As long as the characteristics are maintained, the inverted light flux is also correctly reflected and travels toward the light receiving unit 13. Therefore, the reflecting portion 45 functions as a substitute for the external mirror 7 and is in the same state as always including a reference surface with guaranteed accuracy in the main body of the measuring instrument 1. If such a reflector 45 is installed in the main body 1 after the third adjustment described with reference to FIG. 8, the verticality of the first optical path 14 can be rechecked by the installation .

FIG. 10 is an explanatory diagram showing the relationship between the optical image on the display unit 18 and the first and second collimator lenses 11 and 15. In the present invention, as described above, the inclination of the measurement surface is measured from the positional relationship between the position of the optical image 23 displayed on the display unit 18 and the index 19. Therefore, one method for increasing the measurement accuracy is to reduce the size of the optical image 23 so that the matching accuracy with the intersection of the index 19 is increased. The higher the matching accuracy, the more individual differences at the time of measurement are eliminated. In the figure, D is the diameter of the collimator lenses 11 and 15, f is its focal length, and φ is the size of the light image 23 projected on the light receiving unit 13. In such a case, the size φ of the optical image is
φ = α × f / D × λ
It is expressed by α is a constant and is usually 1.22. λ is 0.65 μm for red and 0.45 μm for blue. When light having a long wavelength is used, φ increases accordingly. The relationship between the collimator lenses 11 and 15 and the light receiving unit 13 is obtained as described above,
If the optical system as shown in FIG. 9 is formed, the size φ of the optical image can be determined.

Next, a first example when such a measuring device is actually used will be described. Bring this measuring instrument 1 to an assembly site or the like, for example, install it on an arbitrary base material H (not shown) to be assembled while measuring the level, and turn on the light source 9. Then, the first optical path light beam 14 in the vertical direction irradiates the liquid reflecting material 50 in the reflecting portion 45 of FIG. 9, is reflected there, returns the first optical path 14, and projects the optical image 23 onto the light receiving portion 13. As shown in FIG. 1, when the reflecting portion 45 is not installed in the main body 1, the first optical path light beam 14 in the vertical direction receives the inverted light beam from the measurement surface of the substrate H on which the main body 1 is installed as the optical image 23. Project to the unit 13. If the optical image 23 at this time is as shown in FIG. 3B, it is determined that the substrate H is inclined. Therefore, as shown in FIG. 3C, the inclination of the base material H is corrected until the index 19 and the optical image 23 coincide. A horizontal light beam 16 is also applied to an arbitrary base material V (not shown) assembled to the base material H, and this is used as an external substitute mirror so that an inverted light beam is directed from the beam splitter 10 to the light receiving unit 13. And if the optical image of the light beam is confirmed on the display part 18, the attachment precision of the base material V can be judged. Actually, since the two images 23 are displayed on the display unit 18, the inclinations of the base materials H and V are adjusted while confirming their positions, and the two light images are made to coincide as shown in FIG. 3C. Alternatively, they are gathered near the index intersection position. If the base materials H and V measured in this way are fixed, the assembly is assured of verticality and horizontality.
As described above, this measuring instrument fixes the position of the index 19 on the display unit 18 at a reference position in advance, and the optical position displayed on the display unit 18 when the measuring instrument is installed on the measurement surface. The position of 23 is compared and confirmed, and the inclination in the horizontal and vertical directions is determined. If the reflector 45 shown in FIG. 9 is always used at the time of actual measurement , if the measurement surface is inclined, the first optical path light beam 14 is a liquid in which the horizontality is maintained while the verticality is impaired. Incident on the surface of the reflector 50. For this reason, the inverted luminous flux cannot form an image at the position of the index 19 determined as the reference position, and displays that a tilt has occurred. In this way, the installation of the reflecting portion 45 creates the same state as that in which the one external mirror 7 used as the reference surface is always installed in the measuring device main body 1.

Next, Usage Example 2 will be described with reference to FIG. In FIG. A, the measuring instrument main body 1 is installed on the base material H1, and the optical image at the light receiving unit 13 and the index intersection are in agreement. The conventional laser level 52 is installed on the base material H2, and the base material H2 maintains the horizontal accuracy at the level of the laser level 52. The window 53 of the main body of the laser level 52 has a bubble 54 and a notch 55, and a laser light source 56 is incorporated. If the bubble 54 is located in the center with respect to the notch 55, it is determined that the horizontal accuracy of the base material H2 is obtained. At this time, when the laser light source 56 of the level 52 is turned on, the luminous flux 57 becomes a reference marking line. However, as described above in the conventional example, the light beam 57 remains unreliable in relation to the position of the bubble 54 with respect to the notch 55. Therefore, the light beam 57 from the laser level 52 is taken into the measuring device main body 1 so that the light image is received by the light receiving unit 13. That is, the light beam 57 is taken in from the second collimator lens 15 of the measuring instrument 1 as if it was the second optical path light beam 16 inverted light beam from the external mirror 6, and is directed to the light receiving unit 13 through the beam splitter 10. Then, depending on the horizontality of the light beam 57, there may be a case where it coincides with the index intersection of the display unit 18. If they coincide with each other, the light beam 57 becomes the same as the second optical path light beam 16 in which the horizontality is guaranteed, and the horizontality of the substrate H2 is the same as that measured by the measuring instrument 1, and the accuracy is also measured by the measuring instrument 1. It will be the same as Therefore, individual differences that occur when reading the position of the bubble 54 relative to the notch 55 are eliminated. If it does not coincide with the intersection point of the index 19, the horizontal inclination of the substrate H2 is adjusted while comparing the optical image of the light beam 57 with the intersection point of the index 19 on the display unit 18 of the measuring instrument 1.
As described above, in the usage example 2, the conventional laser level 52 and the measuring device 1 of the present invention are used together so that the level of the laser beam 57 emitted from the level 52 can be measured. Thereby, the conventional laser level 52 acts as if the bubble 54 sensitivity has been increased.

  FIG. 11B is a perspective view when the laser level 52 of FIG. A is installed on a plurality of units 52a, 52b, 52c and separate substrates H3, H4, H5 because a plurality of marking lines are required. If the light beams 57a, 57b, and 57c emitted from the plurality of laser levels 52a to 52c are sequentially received by the single measuring device 1 installed on the base material H1, the parallelism of the light beams 57a to 57c. And the parallelism of the substrates H3 to H5, and the parallelism of the substrate H1 and the substrates H3 to H5 can be measured. Until now, it has been difficult to compare the performance of a plurality of laser levels, but this problem can be easily solved by installing one main measuring device 1. That is, by using the laser level 52 as a slave unit and using the measuring instrument 1 as a master unit, a plurality of level levels can be used in the same environment.

  Next, Usage Example 3 will be described with reference to FIG. This figure is a side view for explaining the optical path of the laser level 52 as in FIG. 11A. The laser level is set on the base plate 58 on the same substrate H1 with the measuring instrument 1 installed on the substrate H1. The light beam 57 from the container 52 is received. When the light beam 57 travels toward the light receiving unit 13, an error occurs in the range of θ5 depending on how the laser light source 56 is attached. The height of the leg 59 attached to the bottom of the level 52 and the mounting condition of the laser light source 56 are adjusted in order to correct the error of θ5 while checking the optical image of the light receiving unit 13. As a result, the leg 59 is adjusted as an intermediate member in the same manner as the precision screw 8 at the bottom of the main body 1, so that the level 52 guarantees the relationship between the position of the bubble 54 and the laser beam 57 with respect to the notch 55. Accordingly, the measuring instrument 1 can be used as an adjustment master for the laser level 52.

Next, a usage example 4 will be described with reference to FIG. This figure is a perspective view showing an example when the measuring instrument 1 and a plurality of autocollimators 60a, 60b, 60c are installed on the same substrate H6. Each autocollimator 60 is held by a pedestal 61 and a support 62, and directs light beams 63a, 63b, and 63c from a laser light source accommodated in the autocollimator 60 to one measuring instrument 1. The measuring device 1 sequentially receives each light beam 63 and adjusts the height and angle of the autocollimator 60 while checking the position on the display unit 18 for each light image. When the optical image of each light beam 63 coincides with the intersection of the index 19, each light beam 63 is guaranteed to be accurate in the horizontal direction. As a result, the starting end position of the light beam 63 generated from each autocollimator 60 is unified on the virtual reference line 64. This reference line 64 is not at the same dimensional position from the surface of the base material H6, but a horizontal position with respect to the ground surface is extracted by the measuring instrument 1.
Next, the measurement performed using the reference line 64 will be described. A scanner 65 having a polygon mirror is installed in the vicinity of the measuring instrument 1. Then, the polygon mirror is rotated, and the reflected light flux 66 is directed to the autocollimator 60 side. If the light beam 66 reflected by the first surface of the polygon mirror scans on the reference line 64, the first surface becomes an accurate reflecting surface with no surface tilt. Whether or not the reference line 64 is being scanned can be confirmed by monitoring whether or not each light beam 63 from each autocollimator 60 and the light beam 66 from the scanner 65 cross each other correctly. Next, it is confirmed whether or not the reflected light beam 66 from the second surface of the polygon mirror matches the reference line 64. If there is a deviation such as an inclination or a bending with respect to the reference line 64, the amount of deviation is the amount of defect that the second surface has. Thereafter, in the same manner, if each surface of the polygon mirror is compared with the reference line 64, the actual state of accuracy of the polygon mirror can be known.
Thus, the accuracy of the object to be measured, for example, a polygon mirror, can be confirmed by setting the reference line 64 using the measuring instrument 1 and comparing it with this line. As a result, no effective means for measuring the horizontality of a light beam from a light generator such as a scanner has been found so far, but this problem can be solved by using the measuring instrument 1.

FIG. 14 is an explanatory view of Usage Example 5 and has a flat cross section. In the figure, reference numeral 67 denotes an adapter barrel, in which a lens 67a and a cylindrical lens 67b are accommodated. The lens barrel 67 is detachably attached to the main body 1 with a screw (not shown) or the like, and can be attached only when necessary. When the light beam from the light source is reflected by the beam splitter 10 and becomes a parallel light beam by the second collimator lens 15, the second light beam 16 is subjected to the action of the cylindrical lens 67 b via the lens 67 a in the adapter barrel 67. Thereby, the light beam 16 in the second optical path is formed into a line shape and projected onto the projection surface 68 as a line 68a. Accordingly, if the mounting accuracy of the adapter barrel 67 with respect to the main body 1 is examined, the second optical path light beam 16 with guaranteed horizontality is used, so that the line 69a can be used as an ink marking line with excellent horizontal accuracy. . If the adapter barrel 67 is rotated 90 degrees, a vertical marking line is obtained.
By attaching the adapter barrel 67 to the main body 1 in such a manner as described above, the main body as the inclination measuring device 1 can be used as an inking line generator.

In the above, Example 1 was demonstrated with the usage example. As is apparent from this description, the present invention uses a single laser light source 9 to simultaneously generate horizontal and vertical light fluxes 14 and 16, so that both light fluxes become accurate horizontal and vertical level light fluxes. Adjustment is performed on the adjustment jig 2 in advance. In use, a light image by horizontal and vertical light beams is used as a confirmation material for accuracy determination. If it is also to use a liquid reflective material 50 of the reflection section 45 installed in the main body 1 as a substitute for an external mirror 7, it is wear to constantly maintain the accuracy of the instrument itself.

  Next, Example 2 will be described with reference to FIG. This figure is an explanatory side sectional view showing an outline of a measuring instrument provided with an optical system that can extend the first optical path light beam 14 in the vertical direction to the outside of the main body 1. In the figure, the light beam from the light source 9 is separated into the first optical path 14 and the second optical path 16 by the beam splitter 10 as in the first embodiment. Various optical members such as the beam splitter 10, the first and second collimator lenses 11 and 15, and the light receiving unit 13 are accompanied by intermediate members as described in the first embodiment, and can be adjusted by using them. A light image 23 as shown in FIG. 3C is obtained on the display unit 18. The reflector 45 will be described in detail later. In this example, a conical reflection cell 49b having a shape different from that shown in FIG. 9 is held by the attachment portion 70 and fixed to the main body 1. As in FIG. 9, the reflective cell 49b is filled with the liquid reflective material 50, and the lid plate and the bottom plate through which the vertical luminous flux 14 passes are made of a transparent body. Reference numeral 71 denotes an autofocus objective lens installed at a rear stage position of the reflection unit 45, and is connected to a drive unit 73 that operates in response to a command from the control unit 72. Reference numeral 74 denotes an input unit such as a keyboard, which transmits various commands to the control unit 72. Reference numerals 75 and 76 are fixed to the pedestal 77 by pillars, and the pedestal 77 is attached to the base 78. Several rods 79 for vertical accuracy confirmation are attached to the columns 75 and 76 with bolts, a focusing plate 80 is fixed to the tip, and the objective lens 71 is focused. All the lengths of the rods 79 are correctly managed at a common L1, the focusing screen 80 is made of an acrylic plate, and an index 81 such as a crosshair is provided as shown in a plan view in FIG. 16A. Reference numeral 82 denotes a fixed base material connected to the upper ends of the columns 75 and 76, and a hole 83 through which the first optical path light beam 14 from the main body 1 installed thereon is passed.

The case where the perpendicularity of two support | pillars 75 and 76 is measured using such a measuring device 1 is demonstrated. When the measuring device main body 1 is installed on the base material 82, the inclination of the base material 82 is adjusted so that the two images 23 projected on the display unit 18 in front of the measuring device coincide with the intersection of the index 19 as shown in FIG. 3C. . When the image 23 and the intersection of the index 19 coincide with each other, the input unit 74 commands the position in the length direction to be measured by the columns 75 and 76. That is, the first optical path light beam 14 is commanded to form an image at an arbitrary extended position. In the example of FIG. 15, the position to be measured first is the position of the length L2 from the pedestal 77 of the support column 75. Therefore, the value of the length L2 is input from the input unit 74. Then, the control unit 72 gives a command to the objective lens 71 from the drive unit 73. Although the objective lens 71 is appropriately supported by the main body 1 and its supporting means is omitted in the figure, the objective lens 71 that has received the command moves the lens position and transfers the first optical path light flux L2 outside the main body. The focal point of the first optical path light beam is focused on the focusing plate 80a at the tip of the rod 79 fixed at the position. FIG. 16B shows the optical image 84b as an example. If the optical image 84b is deviated from the intersection position of the index 81 of the reference position managed by the length L1 as in this example, the deviation amount is generated in the support column 75. Judged as a malfunction such as tilting or bending. If the optical image coincides with the intersection of the index 81 as indicated by 84a, it is determined that the first measurement position L2 of the column 75 is correctly positioned. Since the optical image 84 formed on the focusing screen 80a is always focused by the autofocus objective lens 71, a clear image can be compared with the index 81. When an error is confirmed as in the optical image 84b, the inclination and bending of the support column 75 are corrected by an appropriate means and method, but the description of the warpage is omitted here. Further, when adjusting the focus state of the image 84 projected on the focusing screen 80, a command is given from the input unit 74, and the autofocus objective lens 71 may be moved up and down on the optical axis of the first light beam. .

Next, the first measurement position of the other column 76 is measured. Since the first measurement position of the column 76 is located at a length L3 from the pedestal 77, L3 is input from the input unit 74. Then, the control unit 72 issues a command to the drive unit 73 to move the objective lens 71, and forms an optical image on the focusing screen 80b installed at the L3 position. At this time, the light beam from the objective lens 71 becomes a light beam that has passed through the focusing screen 80a installed at the first measurement position L2 of the support column 75. Therefore, if the length between L2 and L3 is limited, the focal point can be obtained. The light beam passing through the plate 80a and the image 84 projected on the focusing screen 80b can be viewed at the same time. If there are no problems such as tilting or bending in the support column 76, an image is projected at the intersection of the index 81 on the focusing screen 80b as in the image 84a in FIG. 16B. At this time, since the inverted light beams from the two focusing plates 80a and 80b are projected on the display unit 18, the state of the focusing screen 80 can be confirmed on the display unit 18 as well.
Next, in order to measure the perpendicularity at the second measurement position set in the support column 75, the length L 4 is input from the input unit 74. Then, the objective lens 71 moves and projects the image 84 on the focusing screen 80c as in the above case. Also in this case, if the image 84a is projected at the intersection position of the index 81 of the focusing screen 80c, the support column 75 from the first measurement position 80a to the second measurement position 80c is in a state where there is no problem such as inclination or bending. Confirm.
When the confirmation is completed, L5 is input from the input unit 74 in order to measure the second measurement position of the column 76. Then, the objective lens 71 moves and projects an image at the second measurement position L5. In the example of this figure, the focusing screen 80d is arranged at a position greatly deviated to the right. Therefore, an image cannot be confirmed on the focusing screen 80d. Therefore, it is confirmed that there is a major problem near the second measurement position L5 of the support column 76.
Next, L6 is input from the input unit 74, and the third measurement position of the support column 75 is measured. Then, similarly to the focusing screen 80a at the first measurement position and the focusing screen 80c at the second measurement position, the relationship between the image projected on the focusing screen 80e and the position of the intersection of the index 81 is confirmed. As a result, as shown in FIG. 16B, if the intersection of the index 81 and the image 84a coincide with each other, it is confirmed that there is no inclination or bending near the third measurement position of the support column 75.
Finally, in order to measure the third measurement position of the column 76, L7 is input from the input unit 74, the objective lens 71 is moved to the designated position, and an optical image is projected onto the focusing screen 80f. Then, in the example shown in the figure, the position of the focusing screen 80f is shifted to the left, so that an image cannot be confirmed on the focusing screen 80f. However, in FIG. 16C, the image 84c is shown at a position away from the intersection position of the index 81 for convenience. From the temporarily shown image 84c position, it can be confirmed that an inclination or a bend occurs in the vicinity of the third measurement position L7 of the column 76.

As described above, the case where the first to third positions of the two support columns 75 and 76 are measured has been described using FIG. 15 as an example. However, the positions to be measured, the number thereof, the number of installed support columns, and the like are arbitrarily determined. In this example, the support column 75 is correctly installed, while the other support column 76 is bent or inclined in the middle. If L2 exceeds 50m, this bend and inclination are expected to be quite complicated. However, even if a complicated error occurs, or even if the number of positions to be measured is increased to perform precise measurement, measurement under the same conditions can always be performed.
The input unit 74, the control unit 72, and the display unit 18 can be substituted by a single personal computer. At this time, the personal computer and the measuring instrument main body 1 are connected with a cable, but one measuring person can also visually measure the focusing screen 80 while sequentially moving the measuring positions from L2 to L7. . Therefore, for example, assuming that the columns 75 and 76 are buildings exceeding 50 m, and the measurement positions from L2 to L7 are the equivalent portions of each floor from the sixth floor to the first floor, the verticality of the columns on each floor is determined by one person. The measurer can measure while moving from floor to floor. Of course, the image of the display unit 18 can also be confirmed while stopping without moving. Moreover, if the measuring instrument 1 used at the time of measurement is fixed to the base member 82 with a bolt or the like after the columns 75 and 76 are installed, the change in the vertical accuracy of the column can be measured under the same conditions as the measurement. I can do it. This can also be used when checking accuracy after an earthquake.

As described above, the second embodiment is characterized in that the autofocus objective lens 71 that receives the first optical path light beam 14 that has passed through the reflecting portion 45 and extends the position of the image plane is installed. As a result, the first optical path light beam 14 is extended, and the measurement can proceed with an optical image in which each measurement point set on the optical path is in focus. Accordingly, in this example, the focusing screen 80 installed at each measurement point is an imaging position where the first optical path light beam 14 is extended, and the surface of the focusing screen 80 is a vertical measurement surface.

FIG. 17 is a partial detailed explanatory view of the reflecting portion 45 shown in FIG. The conical reflecting cell 49b held by the holding member 85 in FIG. A, further kicked up in taking One only part 70 by several precision screw 86 as an intermediate member. The precision screw 86 can adjust the mounting state of the reflection cell 49b with respect to the mounting portion 70, as in the case of some of the screws 8, 24, and 48 described above. The cover plate 87 and the bottom plate 88 of the reflection cell 49b are configured as a transparent portion through which the first optical path light beam 14 passes, and are inclined in advance so as to have an angle θ6 with respect to the first optical path light beam 14, A liquid reflector 50 is sealed inside. When such a reflection cell 49b is installed in the first light beam 14, it is not clear what angle the reflection cell 49b can be attached to the main body 1. Of course, no matter what the angle is, since the liquid reflector 50 in the interior maintains the level, there is no functional problem. However, depending on the mounting angle, the adjustment of the first optical path light beam 14 is complicated.
Figure B is a view for explaining it, a reflection cell 49 b is not perpendicular to the light beam 14, mounted by temporarily at an angle of .theta.6. First light path beam 14 Then will the light beam 14a to pass the light beam 14h reflected according to θ6 in cover plate 49a the surface of the reflective cells 49 b. The passed light beam 14a becomes a light beam 14j reflected by the horizontal surface of the liquid reflecting material 50 and a passed light beam. Regardless of the angle θ6, the reflected light beam 14j is directed to the light receiving unit 13 as an inverted light beam as described above, but this light beam 14j is shown as a separate optical path in the figure to be distinguished from the passing light beam 14a. The light beam 14 a that has passed through the liquid reflecting material 50 becomes a light beam 14 k that is reflected at an angle corresponding to θ 6 on the surface of the bottom plate 49 c of the reflection cell 49 and a light beam 14 m that passes. The passed light beam 14m travels in the direction of the objective lens 71 in FIG. Reference numeral 89 denotes a central axis of the reflection cell 49 shown for reference. If the reflection cell 49 is thus attached to the main body 1 at an angle θ6, three reflected light beams 14h, 14j, and 14k are generated. Of these luminous fluxes, those other than the luminous flux 14j which is the inverted luminous flux of the first optical path luminous flux 14 become unnecessary reflected luminous fluxes. However, the unwanted luminous fluxes 14h and 14k are also directed toward the light receiving unit 13.

FIG. 17C shows an example when three reflected light beams 14 h, 14 j, 14 k from the reflection cell 49 installed at an angle of θ 6 are displayed on the display unit 18. If the image 23a displayed at the intersection of the index 19 in the figure is the light beam 14j reflected by the liquid reflector 50 in FIG. B, the image 23h is the light beam 14h reflected by the cover plate 49a of the reflection cell 49, and the image 23k. Is caused by the light beam 14k reflected by the bottom plate 49c. However, when three images are displayed on the display unit 18, it is difficult to determine which image is reflected where, and a necessary image and an unnecessary image are confused. When the angle θ6 of the reflection surface is increased, the reflected light beams 14h and 14k on the cover plate 49a and the bottom plate 49c may be outside the display area of the display unit 18, or may be repeatedly reflected on the inner wall of the reflection cell. Thus, the image projected on the display unit 18 increases or decreases. Therefore, the adjustment of the first optical path 14 described with reference to FIGS.
FIG. 17D is an explanatory diagram of the reflection cell 49b shown in FIG. 17A. When the reflection cell 49b is attached to the attachment portion 70 and installed in the first optical path light beam 14, it is impossible to predict how the angle and the inclination are as described above. If it is assumed that the central axis of the reflection cell 49b and the first optical path light beam 14 coincide with each other as shown in FIG. 17A, the cover plate 87 has an angle θ6 with respect to the horizontal plane. Accordingly, the state is the same as in FIG. 16B, and three reflected light beams 14h, 14j, and 14k are generated in the reflection cell 49b. Therefore, since it is displayed on the display unit 18 as shown in FIG. 17C, the inclination of θ6 is adjusted while observing the relationship between the images 23a, 23h, and 23k.
This adjustment is performed using the precision screw 86 of FIG. 17A, and it is assumed that the lid plate 87 and the first optical path light beam 14 are just 90 degrees as shown in FIG. 17D by this adjustment. Then, the tilt angle θ6 disappears, and the reflected light beams 14h and 14k on the cover plate 87 and the bottom plate 88 pass through the same optical path as the forward path, and an image 23a is displayed at the intersection of the index 19 on the display unit 18 as shown in FIG. By looking at the image 23 a displayed on the display unit 18, it is determined that the reflection cell 49 b is correctly installed with respect to the first optical path light beam 14. In this way, the reflection plate 49b is configured by attaching the lid plate 87 and the bottom plate 88 having an angle of θ6 in advance, and it is installed in the first optical path 14 so that the reflected light beams 14h and 14k are generated. A state as shown in FIG. 17C is created on the display unit 18, and θ 6 is adjusted while confirming that the cover plate 87 is installed at an angle θ 6 with respect to the light beam 14. As shown in FIG. 15, when the objective lens 71 is installed and the first optical path 14 is extended, the amount of light dissipated as the reflected light 14h and 14k can be reduced and an efficient optical system can be obtained. Further, since the shape of the reflection cell 49b is conical, it is possible to reduce the swaying of the liquid reflecting material 50 enclosed therein due to vibration or the like.

   As described above with reference to the drawings, each precision screw 8, 21, 24, 48, 86 as an intermediate member can naturally be replaced by a mechanism equivalent to that, and is not limited to the screw. Further, if an autofocus objective lens 71 installed in the first optical path 14 is also installed in the second optical path 16 and a focusing screen 80 is attached for each measurement position, horizontal measurement that is not bothered by the diameter of the light beam can be performed. Can be done.

BRIEF DESCRIPTION OF THE DRAWINGS FIG. The front view for demonstrating a light-receiving part. Explanatory drawing of a 1st optical path. The sectional side view of the intermediate member which adjusts the attachment position of a beam splitter. The optical system side sectional view explaining the adjustment principle of the 1st optical path and the 2nd optical path. FIG. 5 is a side sectional view of a second optical system for explaining the adjustment principle of the first optical path and the second optical path. The sectional side view explaining the secondary adjustment of the 1st optical path light beam. The sectional side view explaining the 3rd adjustment of the 2nd optical path light beam. The sectional side view which showed the reflection part etc. in a measuring device main body. The figure explaining the relationship between a collimator lens and an optical image. The figure explaining the usage example 2 of an inclination measuring device. The figure explaining the usage example 3 of an inclination measuring device. The figure explaining the usage example 4 of an inclination measuring device. FIG. 6 is a plan sectional view for explaining a usage example 5 of the inclination measuring device. FIG. 6 is a schematic diagram of an optical system for explaining Example 2. Explanatory drawing of a light image when a 1st optical path light beam is extended, and a focusing screen. The sectional side view for demonstrating the reflection part of FIG.

Explanation of symbols

    DESCRIPTION OF SYMBOLS 1 ... Measuring device body 2 ... Adjustment jig 3 ... Horizontal stand 4 ... Vertical wall 6 ... Mirror 7 ... Mirror 8 ... Precision screw 9 ... Semiconductor laser light source DESCRIPTION OF SYMBOLS 10 ... Beam splitter 11 ... 1st collimator lens 13 ... Light-receiving part 14 ... 1st optical path light beam 15 ... 2nd collimator lens 16 ... 2nd optical path light beam 18 ... Display part 19 ... Indicator 21 ... Precision screw 22 ... Shielding plate 23 ... Light image 24 ... Precision screw 30 ... Optical axis 35 ... Lens 36 ... Pinhole plate 37 ... Pinhole 38 ... Lens 39 ... Second light quantity detection unit 41 ... First light quantity detection unit 45 ... Reflection unit 46 ... External lens tube 47・ Inner barrel 48 ... Precision screw 49 ... Reflection cell 50 ... Liquid reflector 52 ... Laser level 54 ... Bubble 56 ... Laser light source 57 ... Flux 59 ... Leg part 60 ... Autocollimator 64 ... Virtual reference line 65 ... Scanner 66 ... Light beam 67 ... Adapter barrel 71 ... Objective lens 72 ... Control part 73 ... Drive part 74 ... Input unit 75 ... Support 76 ... Support 79 ... Bar material 80 ... Focal plate 81 ... Indicator 84 ... Light image 86 ... Precision screw 87 ... Lid Plate 88 ... Bottom plate

Claims (4)

A semiconductor laser light source mounted on the main body so as to emit a light beam in a vertical direction below, a first optical path light beam that receives the light beam from the laser light source by a first collimator lens and directs it as a parallel light beam outside the main body, and the laser light source; and lifting one beam splitter reflecting surface of 45 degrees was placed between the first collimator lens, reflected by the beam splitter this, parallel to the body outside the light beam from the laser light source is horizontally received in the second collimator lens Two optical images of a second optical path light beam that is directed as a light beam, and an inverted light beam of the first optical path light beam and the second optical path light beam that are directed to the outside, are projected onto a predetermined reference point via a beam splitter. a light receiving unit, a display unit for displaying a light image projected on the light receiving portion to the index position, is configured to have a city, and was placed the body to be measured measurement surface in the horizontal direction , The first optical path light beam to the installation measuring surface thereof, a second optical path light beam was directed to the vertical direction measurement surface of the measured object is placed in the vertical direction, it is displayed on the display unit the light image formed by the two reversal light flux to be measured A tilt measuring instrument characterized in that the vertical measuring plane tilt of an object is detected as a deviation between an index position of a display unit and a light image display position . When a reflective part with a liquid reflecting material sealed inside and a lid as a transparent body is installed in the first optical path light beam that has passed through the first collimator lens, and this main body is installed on the measurement object measuring surface in the horizontal direction The first optical path light beam is directed to the liquid reflecting material of the reflecting part, the second optical path light beam is directed to the vertical measuring surface of the object to be measured, and the light image by the both inverted light beams is displayed on the display part. 2. The tilt measuring instrument according to claim 1 , wherein the horizontal measuring surface tilt and the vertical measuring surface tilt of the object to be measured are detected as a deviation between the index position of the display unit and the optical image display position . A semiconductor laser light source attached to the main body so as to emit a light beam in a vertical direction below, a first optical path light beam that is received by the first collimator lens as a parallel light beam, and a first light beam that has passed through the first collimator lens. Installed in a single optical path beam, with the lid and bottom plate transparent and encapsulating a liquid reflector inside, and in the first optical path beam that has passed through the reflective part, the first optical path beam is outside the body. An autofocus objective lens that extends to an arbitrary position and forms an image, and an arbitrary imaging position of the first optical path light beam that the autofocus objective lens extends, and an index is attached to a predetermined reference position A focusing plate, a beam splitter having a reflection surface of 45 degrees installed between the laser light source and the first collimator lens, and a laser light source reflected horizontally by the beam splitter Received by the second collimator lens and directed to the outside of the main body as a parallel light beam, a first light beam reflected by the liquid reflecting material and the focusing plate of the reflecting portion, and an inverted light beam of the second light beam Is configured to include one light receiving unit projected via a beam splitter toward a predetermined reference point, and a display unit that displays the light image projected on the light receiving unit at an index position. When the main body 1 is installed on the surface to be measured in the horizontal direction, the first optical path light beam is directed to the liquid reflecting material of the reflecting portion and the focusing screen installed at an arbitrary position in the extension direction of the first optical path light beam. The two-light path light beam is directed to the vertical measurement surface of the object to be measured installed in the vertical direction, a light image by the inverted light beam is displayed on the display unit, the horizontal inclination of the main body installation measurement surface by the first light path light beam, and the focal point The vertical inclination of the board installation position and the second light Inclination measuring device, characterized in that the vertical measurement surface tilt due to the optical path, and detected as a deviation of the index position and the optical image display position of the display unit. A liquid reflecting material is sealed inside the conical reflecting cell, and the lid and bottom plate are preliminarily inclined by an angle θ and installed in the first light path beam so that the angle θ can be adjusted by an adjusting member. 4. The inclination measuring device according to claim 3 , wherein the tilt measuring device is a reflecting portion .