JP4394190B2 - Quartz crucible wrapping equipment - Google Patents

Description

[0001]
BACKGROUND OF THE INVENTION
The present invention relates to a quartz crucible wrapping apparatus used for pulling single crystal silicon, and preferably relates to an apparatus capable of automatically wrapping a manufactured quartz crucible in a clean state.
[0002]
[Prior art]
In general, quartz crucibles are manufactured, cleaned, inspected, packaged, etc., and shipped. However, as the purity of semiconductor materials increases, quartz crucibles are also required to minimize contamination. Is used for single crystal pulling, it is further washed with ultrapure water or the like. On the other hand, the size of the quartz crucible tends to increase gradually in order to increase the production efficiency of single crystal silicon. For this reason, the handling of the crucible is not easy, and it is contaminated during operations such as inspection after inspection and bagging. It is easy to become.
[0003]
In order to avoid such problems, the quartz crucible may be mechanically packaged in a clean state after washing the quartz crucible, but it is not always easy to package a large crucible. In addition, the inner peripheral part of the crucible is required to be as pure as possible than the outer peripheral part. However, if the entire crucible is simply packed, there is a risk that deposits on the outer periphery of the crucible may enter the inner peripheral part. It is difficult to keep the periphery highly pure. Furthermore, there is a concern that the inside of the crucible may be contaminated during the work from opening the entire crucible package to installing it in the lifting device.
[0004]
[Problem to be Solved by the Invention]
SUMMARY OF THE INVENTION The present invention solves the above-mentioned problems in a conventional quartz crucible, and an object of the present invention is to provide an apparatus for lapping a cleaned quartz crucible in a clean state, preferably automatically.
[0005]
[Means for solving the problems]
That is, the present invention relates to a quartz crucible wrapping apparatus having the following configuration.
(1) What apparatus der wrapping the opening of the quartz crucible, for supplying the holding means A for holding facing the opening of the quartz crucible wrapping position, the sheet for wrapping the wrapping position the seat Supplying means B, sheet covering means C for covering the sheet at the wrapping position, and sheet fixing means D for fixing the sheet are provided, and the holding means A is extendable and retractable to hold the quartz crucible. It has such an arm (A10), organic support table the sheet covering means C is placed on the quartz crucible and (C10), and a guide member which is disposed to surround the supporting table provided in the wrapping position (C20) and, wherein at least one of the support and guide member is vertically movable moving, the peripheral portion of the sheet Rukoto periphery of the sheet is pressed against the front Symbol opening peripheral surface by the guide member is bent to the crucible side Is, the guide member in a temporarily fixed pressed against the quartz crucible opening peripheral surface, the quartz crucible opening on the support base coated with the sheet, the sheet fixing unit from the outer surface of the sheet in this coating state A quartz crucible automatic lapping apparatus, wherein the quartz crucible opening is fixed to the peripheral surface of the quartz crucible opening by D.
[0006]
The wrapping apparatus of the present invention includes the following aspects.
(2) The quartz crucible holding means A has a plurality of extendable arms (A10), a frame (A20) to which the arms are attached, a traveling means and a lifting means for the frames, and the arm (A10) is a quartz crucible. The wrapping apparatus according to (1), wherein the wrapping apparatus is installed so as to face each other so as to be sandwiched from both sides.
(3) The sheet supply means B has a roll (B10) for holding the sheet, a sheet drawing means (B20), and a cutting means (B30), and the drawing means (B20) is located between the lapping position and the roll. The cutting means (B30) is provided between the lapping position and the roll, and the end of the sheet held by the roll has a predetermined length by the traveling chuck. The wrapping apparatus according to (1) or (2), wherein the wrapping apparatus is pulled out, cut and installed at a wrapping position.
(4) The support base (C10) of the sheet covering means C is annularly arranged so as to support the quartz crucible opening downward, and the sheet is pulled out so that the quartz crucible is placed between the drawn sheets. The lift is provided on the support base, and the quartz crucible is lowered together with the support base to be guided by the guide member so that the periphery of the sheet is pressed against the quartz crucible opening. The wrapping apparatus according to any one of (1) to (3).
(5) The sheet fixing means D is means for fitting a rubber band onto a sheet covering the opening of the quartz crucible, and has a cassette (D10) for holding the rubber band and means (D20) for expanding the rubber band from the opening of the quartz crucible. The cassette (D10) is provided so as to be movable up and down with respect to the lapping position, and the expansion means (D2) is formed by the telescopic arm (D22) having a hook (D21) engaged with a rubber band at the tip. The wrapping apparatus according to any one of (1) to (4), wherein a plurality of extendable arms surrounding the cassette are provided.
(6) The sheet fixing means D is a means for heat-sealing the sheet to the quartz crucible opening, and is provided with a heater at the tip and heat-sealed so as to expand and contract toward the quartz crucible opening at the lapping position. The wrapping device according to any one of (1) to (4), wherein the wrapping device is formed by an arm.
(7) The quartz crucible holding means A, the sheet supply means B, the sheet covering means C, and the sheet fixing means D are provided with a control means E for automatically automating the operations of the quartz crucible, and the quartz crucible is automatically wrapped (1 The wrapping apparatus according to any one of) to (6).
[0007]
DETAILED DESCRIPTION OF THE INVENTION
Hereinafter, the apparatus of the present invention will be described in detail based on embodiments shown in the drawings. 1, 2 and 3 are a front view, a plan view and a side view, respectively, showing a configuration example of the apparatus of the present invention, FIG. 4 is a schematic perspective view of a quartz crucible holding means A, and FIG. 5 is a schematic perspective view of a sheet supply means B. FIG. 6 is a schematic perspective view of the lapping position, and FIG. 7 is a schematic diagram showing an outline of the sheet fixing means. 8 and 9 are explanatory views of the lapping process by the apparatus of the present invention.
[0008]
( I ) Overall configuration of the apparatus As shown in Figs. 1 to 7, the lapping apparatus of the present invention comprises means A for holding the opening (R1) of the quartz crucible R facing the lapping position, for lapping. Means B for supplying the sheet S to the wrapping position, means C for covering the sheet S over the opening (R1) at the wrapping position, and means D for fixing the sheet S to the opening (R1).
[0009]
The holding means A has a telescopic arm (A10) for holding the quartz crucible R. The arm (A10) may hold and hold the quartz crucible from both sides, or may suck and hold the quartz crucible. The quartz crucible is held by the expansion and contraction of the arm (A10) and installed at the lapping position. Preferably, the arm (A10) is attached to a frame (A20) movable relative to the lapping position, and the quartz crucible is carried into the lapping position by the movement of the frame (A20), and the lapped quartz Remove the crucible.
[0010]
The sheet supply unit B is provided at a position facing the holding unit A or on the side facing the side of the holding unit A with the lapping position in between so as not to hinder the movement of the holding unit A. The supply means B may be a roll-shaped sheet S which is pulled out to a wrapping position and separated by a necessary length, or a plurality of sheets S of a predetermined length are held in advance and supplied one by one to the wrapping position. Good. Before and after the quartz crucible is carried into the wrapping position, the sheet S is supplied to the wrapping position by the supply means B.
[0011]
The sheet covering means C is formed by a support base (C10) on which a quartz crucible is placed and a guide member (C20). The support base (C10) is provided at the lapping position, and the guide member (C20) is disposed so as to surround the support base (C10). The support base (C10) may be shared by the arm (A10) of the holding means A, or may be provided separately from the arm (A10). When the arm (A10) also serves as the support base (C10), the position of the guide member (C20) may be above or below the arm (A10). On the other hand, when the support base (C10) is provided so as to place a quartz crucible separately from the arm (A10), the guide member (C20) is located above the support base so as to surround the quartz crucible opening on the support base. Is provided. Furthermore, the aspect in which the quartz crucible is placed on the support base (C10) may be an aspect in which the opening of the quartz crucible is placed upward or an aspect in which the opening is placed downward. When the opening is set upward, the sheet S is pulled out above the quartz crucible opening (R1) after placing the quartz crucible R on the support base (C10). When the opening (R1) is installed downward, the quartz crucible R is placed on the support base (C10) with the sheet sandwiched after the sheet S is pulled out above the support base (C10).
[0012]
As described above, the quartz crucible opening is moved by the up-and-down movement of the support base (C10) or the guide member (C20) in a state where the sheet S is applied to the opening (R1) of the quartz crucible placed on the support base (C10). The portion (R1) passes through the space surrounded by the guide member (C20), and at this time, the peripheral edge (S1) of the sheet is pressed against the peripheral surface of the quartz crucible opening by the guide member (C20). For this purpose, at least one of the support base (C10) and the guide member (C20) is provided with lifting means. Instead of raising and lowering the support base (C10), or along with raising and lowering the support base, the guide member (C20) is provided with sliding means toward the quartz crucible opening, and the guide means is moved to the quartz crucible opening by the sliding means. It may be pressed.
[0013]
The sheet fixing means D may be a means for fitting the rubber band W on the sheet covering the opening (R1) of the quartz crucible or a means for heat-sealing the sheet to the quartz crucible opening. As a means for fitting the rubber band W, for example, a means (D20) for expanding the rubber band by means of a cassette (D10) for holding the rubber band and a telescopic arm (D22) having a hook (D21) engaged with the rubber band at the tip. It is formed. The cassette (D10) is provided so as to be raised and lowered with respect to the lapping position so as not to hinder the raising and lowering movement of the support base (C10). On the other hand, the rubber band extending means (D20) is provided so as to surround the support base (C10) in the lapping position. The arm (D22) extends from the periphery toward the cassette (D10) raised to the wrapping position and engages the rubber band W with the hook (D21), and the arm (D22) moves backward to expand the rubber band W. (D10) descends to the standby position, and after the quartz crucible R enters the expanded rubber band W with the opening covered with a sheet, the hook (D22) is disengaged and the outer periphery of the opening The rubber band W is fitted on the sheet.
[0014]
The telescopic arm (D22) may be provided on the upper side of the guide member (C20) in the aspect in which the quartz crucible is placed upward on the support base (C10), while the aspect in which the quartz crucible is placed downward. Then, it may be provided at a height between the support base (C10) and the guide member (C20). In any embodiment, when the opening of the quartz crucible passes through the space surrounded by the guide member (C20) by the rising or lowering of the support base (C10), the end of the sheet covering the opening is the guide member ( C20) is pressed against the outer periphery of the opening, and in this state, enters the inside of the rubber band W in which the opening is expanded.
[0015]
In order to form the sheet fixing means D by the heat fusion means, for example, a heat fusion arm provided with a heater portion at the tip and arranged to expand and contract toward the quartz crucible opening at the lapping position is supported by a support base (C10 ) To surround.
[0016]
The preferred embodiment of the quartz crucible wrapping apparatus of the present invention has a control means for automatically automating the operations of the quartz crucible holding means A, sheet supply means B, sheet coating means C and sheet fixing means D, Automatic wrapping of quartz crucible. More preferably, the quartz crucible is installed in a clean room associated with the manufacturing process of the quartz crucible, and the quartz crucible is lapped while being kept in a clean state immediately after the manufacturing. In order to prevent mixing of metals, it is preferable to use resins such as Teflon and urethane rubber for contact portions such as an arm, a chuck, and a support base that are in direct contact with the quartz crucible and the wrapping sheet.
[0017]
Specific examples of the configuration of each of the quartz crucible holding means A, sheet supply means B, sheet covering means C, and sheet fixing means D described above will be described below.
(II) Quartz crucible holding means A
A suitable example of the quartz crucible holding means A is shown in FIGS. As shown in the figure, the holding means A is formed by a plurality of extendable arms (A10) that sandwich and hold a quartz crucible and a movable frame (A20) to which the arms (A10) are attached. (A20) is attached to the outer frame portion (A30). The outer frame portion (A30) is disposed along the carry-in path of the quartz crucible, and a pair of rails (A31) are formed on the ceiling portion. Further, a drive motor (A32) is provided at the end of the rail (A31).
[0018]
The travel frame (A20) is formed by a base (A21) and a suspension (A22). The base (A21) is slidably mounted on the rail (A31), and is connected to the drive motor (A32) via a shaft (A33). On the other hand, the suspension part (A22) is mounted to the base part (A21) via the elevating means (A23) so as to be movable up and down. The elevating means (A23) is formed by a gear (A24) provided on the base (A10) and a stem (A25) meshing with the gear, and the stem is erected on the upper part of the suspension (A22). On the other hand, a plurality of arms (A10) are attached to the lower end of the suspension part (A22).
[0019]
In the example shown in the figure, three arms (A10) are mounted so as to stably sandwich the quartz crucible R, and each arm (A10) is disposed from three positions 60 degrees away from each other toward the center. Yes. These arms (A10) are provided with telescopic means such as an air cylinder and a pressure sensor (not shown) that controls the clamping pressure.The arms (A10) extend toward the center of the space enclosed by the arms (A10), and quartz Insert the crucible R from both sides. The number of arms may be two or more.
[0020]
In the holding means A, as shown in FIG. 1, the traveling frame (A20) stands by on one side of the outer frame (A30), and the quartz crucible R is carried below the traveling frame (A20) by the roller conveyor (A40). Then, the suspension part (A22) of the frame (A40) is lowered toward the quartz crucible R, and the arm (A10) extends inward at a predetermined position, and the quartz crucible R is pressed and sandwiched from both sides. Next, the suspension part (A22) is lifted while holding the quartz crucible R, and the entire frame (A20) is moved together with the quartz crucible R along the rail (A31) above the lapping position by the traveling mechanism of the base part (A21). Moving. After the movement, the suspension part (A22) is lowered and the quartz crucible R is placed on the support base (C10) in the lapping position. After the arm (A10) retreats and the pressure is released, the suspension part (A22) rises and again The frame (A20) is returned to the standby position by the traveling mechanism of the base (A21). Note that a control circuit including a normal position sensor and pressure sensor may be used to control these series of operations.
[0021]
(III) Sheet supply means B
As shown in FIGS. 1 and 5, the sheet supply means B is composed of a roll (B10) for winding and holding the sheet, a sheet drawing means (B20), and a sheet cutting means (B30). A30) is provided along the rail (B40) provided in the longitudinal direction, and is further provided on the opposite side of the holding means A with the lapping position in between so as not to hinder the movement of the holding means A. . A long wrapping sheet S is wound around the roll (B10), and the roll (B10) is sequentially pulled out by the pulling means (B20). Preferably, the roll (B10) around which the sheet is wound is housed in a clean booth to prevent external contamination.
[0022]
As a preferred example of the drawing means (B20), as shown in FIG. 5, the pair of traveling bodies (B21) reciprocating between the lapping position and the roll (B10) and the chuck (B22) provided at the tip thereof Is formed by. A pair of traveling bodies (B21) opposite to the rails (B40) arranged on both sides of the sheet S along the pulling direction are slidably mounted, and the sheets S of the traveling body (B21) are slidably mounted. A chuck (B22) is provided at the facing tip. As an example of the chuck (B22), a chuck that opens and closes and grips the sheet can be used. The illustrated example has a structure for gripping both side portions of the leading end of the sheet, but it may be configured to grip the leading end portion facing the sheet drawing direction. A pair of traveling chucks (drawing means: B20) comprising a traveling body (B21) provided with the chuck (B22) is moved on the rails synchronously by driving means (not shown).
[0023]
The cutting means (B30) is formed by a pinch roll (B31) that holds the drawn sheet S, a U-shaped clamp (B32), a cutter (B33), and a flat clamp (B34). It is provided between the wrapping position and the roll (B10) in order along the pulling direction of S. The pinch roll (B31), the U-shaped clamp (B32), the cutter (B33), and the flat clamp (B34) are arranged so as to cross the sheet S, and the traveling chuck (B20) It runs on both sides of the U-shaped clamp (B32), cutter (B33), and flat clamp (B34).
[0024]
When the quartz crucible is carried into the lapping position, the leading end portion of the sheet S is sandwiched between the pinch roll (B31) and the U-shaped clamp (B32), and the flat clamp (B34) is open. In response to a command to pull out the sheet S, the traveling chuck (B20) moves to the position of the U-shaped clamp (B32), and the leading end of the traveling chuck (B20) is inserted inside the chuck (B32) so that both sides of the leading end of the sheet are placed. Hold it. Next, the U-shaped clamp (B32) is opened, and the traveling chuck (B20) is moved toward the lapping position (sheet fixing means D) while holding the leading end of the sheet, and the sheet S is pulled out by a predetermined length. Thereafter, the U-shaped clamp (B32) and the flat clamp (B34) are closed to fix the sheet S, and a portion between the chucks (B32, B34) is cut by the cutter (B33). After cutting, the flat clamp (B34) is opened, and the traveling chuck (B20) is subsequently moved to place the cut sheet S on the upper side of the support base (C10). After the quartz crucible lapping, the traveling chuck (B20) is moved again and the above operation is repeated.
[0025]
(IV) Sheet covering means C
As shown in FIGS. 1, 2 and 6, the sheet covering means C has a support base (C10) and a guide member (C20) provided at the lapping position. In the example shown in the figure, the support base (C10) is formed by a plurality of support pieces (C10a to C10h) arranged in an annular shape so as to support the quartz crucible with its opening facing downward. Since the sheet is pulled out above the support base (C10), each of the support pieces (C10a to C10h) is positioned below the sheet pull-out position. In addition, lifting means (not shown) for moving the support pieces (C10a to C10h) up and down integrally or synchronously is attached, so that the support base (C10) can be moved up and down with the quartz crucible mounted thereon. It is possible to move.
[0026]
The guide member (C20) is disposed around the support base (C10) so as to surround the quartz crucible opening placed on the support base (C10). The guide member (C20) is positioned below the sheet drawing position so that the drawn sheet can be supported. In the example shown in the drawing, a space facing the support base (C10) is formed at the center of the guide member (C20), and support pieces (C10a to C10h) are annularly arranged inside the space.
[0027]
In the sheet covering means C, after the sheet S is drawn and cut on the upper surface of the guide member (C20), a quartz crucible R is placed on the support base (C10) by the holding means A with the sheet S in between. It is done. When the support base (C10) descends and the opening of the quartz crucible passes through the space surrounded by the guide member (C20), the peripheral edge of the sheet that extends outward from the space on the upper surface of the guide member is guided. Guided by the member, it is folded inside the space (crucible side) and pressed against the peripheral surface of the quartz crucible.
[0028]
The guide member (C20) may be slidably formed toward the circumferential surface of the crucible so that the peripheral edge of the sheet folded inside the space is surely pressed against the circumferential surface of the crucible. Specifically, a plurality of plate materials are used, and these plate materials (guide plates) are slidably provided so as to surround the space to form the guide member (C20). When the support base descends and the opening of the quartz crucible passes through the space, by sliding the guide plate toward the crucible peripheral surface with the sheet peripheral edge protruding from the space being pushed inside the space, The peripheral edge of the sheet is further pressed against the circumferential surface of the crucible.
In this case, the guide member may be provided in two stages, the upper stage may be a fixing member provided so as to surround the support base, and the lower stage may be formed by a slidable guide plate.
[0029]
(V) Seat fixing means D
A preferred example of the sheet fixing means D is shown in FIG. The fixing means D shown in the figure is a type in which a rubber band W is fitted to a sheet covering the opening of the quartz crucible. A cassette (D10) for holding the rubber band, and a rubber band expansion means provided around the cassette. (D20). The cassette (D10) is provided inside the support pieces (C10a to C10h) arranged in an annular shape. In the cassette (D10), a plurality of pins (not shown) are annularly arranged to stretch a rubber band. Further, the cassette (D10) is provided with elevating means (not shown), and is formed to elevate and lower independently of the support base (C10).
[0030]
On the other hand, the expansion means (D20) has a plurality of telescopic arms (D22) and a hook (D21) attached to the tip thereof. The extendable arm (D22) surrounds the cassette (D10), and is provided so as to surround the support (C10) so that the rubber band expanded by the expansion and contraction of the arm is larger than the diameter of the crucible. Further, each arm (D22) is provided so that the arms can be extended and contracted between adjacent support bases so that the expansion and contraction is not hindered by the support bases. As the expansion / contraction means of the arm (D22), a cylindrical drive means as shown in the figure can be used.
[0031]
In the fixing means D, upon receiving a command from a control circuit (not shown), the cassette (D10) is raised and the position where the rubber band is stretched is adjusted to the height of the telescopic arm (D22). Subsequently, the arm (D22) extends from the periphery toward the rubber band of the cassette (D10), and the rubber band W is engaged with the hook (D21) attached to each end [FIG. 7 (a)]. In this state, each arm (D22) retreats and waits with the rubber band W expanded (FIG. 7 (b)), and the cassette (D10) is lowered to the standby position. Thereafter, the quartz crucible R enters the inside of the expanded rubber band W with the opening covered with a sheet, the hook (D22) is disengaged, the rubber band W is released from the arm (D22), and the quartz crucible It is hung on the opening.
[0032]
A lapping process of the automatic lapping apparatus will be described with reference to FIGS. In the initial state (a), the support base (C10) and the cassette (D10) are in the standby position. When the cassette (D10) is raised to the rubber band mounting position, the telescopic arm (D22) extends toward the cassette (D10), and the rubber band W is engaged with the hook of the arm (D22) (FIG. 8b). When the arm (D22) moves backward and returns to the standby position where the rubber band W is expanded, the cassette (D10) is lowered to the standby position, and the support base (C10) is raised to the receiving position above the arm standby position (see FIG. 8c). The receiving position is at the same height as the guide member (C20), and then the sheet S is pulled out on the upper surface of the support base (C10) and the guide member (C20). In a state where the sheet S is sandwiched, the quartz crucible R is placed on the support base (C10) with its opening facing downward (FIG. 8e).
[0033]
Next, the support base (C10) is lowered downward from the standby position of the expanded rubber band W with the sheet S and the crucible R placed thereon. At this time, the peripheral edge portion (S1) of the sheet that has been projected on the upper surface of the guide member is guided by the guide member (C20) and bent to the crucible side (FIG. 9f). Here, it is preferable to slide the guide member (C20) toward the quartz crucible R and press the peripheral edge of the sheet against the circumferential surface of the crucible (FIG. 9g). Next, the hook (D21) at the tip of the arm is disengaged, and the rubber band W is hung from the outside of the sheet S to the quartz crucible opening peripheral surface and fixed in a state where the sheet S is sandwiched (FIG. 9h). Thereafter, the arm (D22) and the guide member (C20) retreat and return to the original position, and the support base (C10) rises to the receiving position (FIG. 9i). The wrapped quartz crucible R is lifted from the support base (C10) by the holding means A, and is unloaded from the lapping position (FIG. 9j) and returns to the initial state (FIG. 8a).
[0034]
【The invention's effect】
According to the lapping apparatus of the present invention, the manufactured quartz crucible can be lapped in a clean state, which is suitable for lapping a large quartz crucible which is difficult to handle. In particular, since the lapping apparatus of the present invention seals the opening of the quartz crucible, the inner periphery of the crucible can be kept highly pure.
[Brief description of the drawings]
FIG. 1 is an external view showing an outline of the overall configuration of a device of the present invention.
FIG. 2 is a schematic plan view of the apparatus.
FIG. 3 is a schematic side view of the apparatus.
4 is a schematic perspective view of holding means A. FIG.
FIG. 5 is a schematic perspective view of a sheet supply unit B.
FIG. 6 is a schematic perspective view of a wrapping mechanism.
FIG. 7 is a schematic diagram of sheet fixing means D.
FIG. 8 is an explanatory diagram of a lapping process by the apparatus of the present invention.
FIG. 9 is an explanatory diagram of the above wrapping process.
A: holding means, B: sheet supply means, C: sheet coating means,
D: sheet fixing means, R: quartz crucible, S: sheet,
A10: Arm, A20: Traveling frame, A30: Outer frame,
B10: Holding roll, B20: Pulling means, B30: Cutting means,
C10: support base, C10a to C10h: support piece, C20: guide member,
D10: cassette, D20: expansion means, D21: hook, D22: telescopic arm,
W: Rubber band

Claims (7)

What apparatus der wrapping the opening of the quartz crucible, retaining means for retaining facing the opening of the quartz crucible in the wrapping position A, the sheet feeding means B for supplying a sheet wrapping position for wrapping , A sheet covering means C for covering the opening at the lapping position, and a sheet fixing means D for fixing the sheet , and the holding means A is a telescopic arm for holding a quartz crucible ( A10), and the sheet covering means C includes a support base (C10) on which the quartz crucible is placed, and a guide member (C20) disposed around the support base provided at the lapping position, at least one of the support and guide member are possible lifting and lowering, the peripheral edge of the sheet is the peripheral portion of the sheet in Rukoto pressed against the front Symbol opening peripheral surface by the guide member is folded on the crucible side, The serial guide member temporarily fixed pressed against the quartz crucible opening peripheral surface, the quartz crucible opening on the support base coated with the sheet, by the sheet fixing unit D from the outer surface of the sheet in this coating state A quartz crucible automatic lapping apparatus, wherein the quartz crucible opening is fixed to the peripheral surface of the quartz crucible opening . The quartz crucible holding means A has a plurality of extendable arms (A10), a frame (A20) to which the arms are attached, a traveling means and lifting means for the frames, and the arm (A10) holds the quartz crucible from both sides. The wrapping apparatus according to claim 1, wherein the wrapping apparatus is installed so as to be opposed to each other. The sheet supply means B has a roll (B10) for holding the sheet, a sheet drawing means (B20), and a cutting means (B30), and the drawing means (B20) reciprocates between the lapping position and the roll. It is formed by a traveling chuck, and the cutting means (B30) is provided between the wrapping position and the roll, and the end of the sheet held by the roll is pulled out by a predetermined length by the traveling chuck. The wrapping apparatus according to claim 1, wherein the wrapping apparatus is cut and installed at a wrapping position. The support (C10) of the sheet covering means C is arranged in an annular shape so as to support the quartz crucible opening downward, and below the sheet drawing position so that the quartz crucible is placed between the drawn sheets. Furthermore, when the quartz crucible descends together with the support base, the support base is provided with lifting means, and the periphery of the sheet is pressed against the quartz crucible opening when the quartz crucible descends. 4. A wrapping apparatus according to any one of 3 above. The sheet fixing means D is means for fitting a rubber band onto a sheet covering the opening of the quartz crucible, and includes a cassette (D10) for holding the rubber band and means (D20) for expanding the rubber band from the opening of the quartz crucible. (D10) is formed to be movable up and down with respect to the wrapping position, and the expansion means (D20) is formed by an extendable arm (D22) having a hook (D21) that engages with a rubber band at the tip, The wrapping apparatus according to any one of claims 1 to 4, wherein a plurality of telescopic arms are disposed so as to surround the cassette. The sheet fixing means D is a means for heat-sealing the sheet to the quartz crucible opening, and is formed by a heat-welding arm that is provided with a heater at the tip and that is arranged to be stretchable toward the quartz crucible opening at the lapping position. The wrapping apparatus according to any one of claims 1 to 4. The quartz crucible holding means A, the sheet supply means B, the sheet covering means C, and the control means E for automatically automating the operations of the sheet fixing means D, and automatically wrapping the quartz crucible. The wrapping apparatus described in any one.

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