JP4386147B2 - Film-like circuit connection material, circuit member connection structure and manufacturing method thereof - Google Patents

Description

  The present invention relates to a film-like circuit connection material, a circuit member connection structure, and a method for manufacturing the same.

  A liquid crystal driving IC is mounted on the glass panel for liquid crystal display by COG (Chip-On-Glass) mounting or COF (Chip-On-Flex) mounting. In COG mounting, a liquid crystal driving IC is directly bonded onto a glass panel using a circuit connecting material containing conductive particles. In COF mounting, a liquid crystal driving IC is bonded to a flexible tape having metal wiring, and these are bonded to a glass panel using a circuit connecting material containing conductive particles.

  However, with the recent high definition of liquid crystal displays, the gold bumps, which are the circuit electrodes of liquid crystal driving ICs, have been narrowed in pitch and area, so that the conductive particles in the circuit connecting material are between adjacent circuit electrodes. There is a problem that a short circuit occurs. In addition, if conductive particles flow out between adjacent circuit electrodes, the number of conductive particles in the circuit connection material captured between the gold bumps and the glass panel decreases, and the connection resistance between the opposing circuit electrodes increases. There is a problem of causing defects.

  Therefore, as a method for solving these problems, a method of preventing deterioration in bonding quality in COG mounting or COF mounting by forming an insulating adhesive layer on at least one surface of the circuit connection material (see, for example, Patent Document 1). In addition, a method of covering the entire surface of the conductive particles with an insulating film (for example, see Patent Document 2) has been developed.

JP-A-8-279371 Japanese Patent No. 2794209 (FIG. 2)

However, in the method of forming an insulating adhesive layer on one side of the circuit connection member, when the bump area is less than 3000 μm ² and the number of conductive particles is increased in order to obtain a stable connection resistance, adjacent circuit electrodes There is still room for improvement in the insulation between them. Further, in the method of covering the entire surface of the conductive particles with an insulating film, there is a problem that the connection resistance between the circuit electrodes facing each other increases and a stable electric resistance cannot be obtained.

  Accordingly, the present invention provides a film-like circuit connection material, a circuit member connection structure, and a manufacturing method thereof that can sufficiently reduce the connection resistance between opposing circuit electrodes and can sufficiently improve the insulation between adjacent circuit electrodes. The purpose is to provide.

  In order to solve the above-described problems, the film-like circuit connecting material of the present invention includes a first circuit member in which a plurality of first circuit electrodes are formed on a main surface of a first circuit board, and a second circuit. A film-like circuit connection material for connecting a second circuit member having a plurality of second circuit electrodes formed on a main surface of a substrate so that the first and second circuit electrodes face each other. The adhesive composition and the first layer containing coated particles in which a part of the surface of the conductive particles is coated with insulating fine particles, and provided on one side of the first layer, without containing the coated particles, And a specific gravity of the coated particles is 97/100 to 99/100 of the specific gravity of the conductive particles. According to another aspect of the invention, there is provided a circuit connection material comprising: a first circuit member having a plurality of first circuit electrodes formed on a main surface of a first circuit board; and a plurality of first circuits on a main surface of a second circuit board. A circuit connection material for connecting a second circuit member formed with two circuit electrodes so that the first and second circuit electrodes face each other, the adhesive composition and the surface of the conductive particles Part of which is coated with insulating fine particles, and the specific gravity of the coated particles is 97/100 to 99/100 of the specific gravity of the conductive particles.

  When this circuit connection material is interposed between the first and second circuit members, heated and pressurized through the first and second circuit members, and cured to obtain a circuit member connection structure, In the obtained circuit member connection structure, the connection resistance between the facing circuit electrodes is sufficiently reduced, and the insulation between the adjacent circuit electrodes is sufficiently improved.

  Here, if the specific gravity of the coated particles is less than 97/100 of the specific gravity of the conductive particles, the insulating fine particles will cover the conductive particles excessively. For this reason, even if the conductive particles connect the opposing circuit electrodes, the connection resistance in the thickness direction of the circuit board increases. On the other hand, when the specific gravity of the coated particles exceeds 99/100 of the specific gravity of the conductive particles, the conductive particles are not sufficiently covered with the insulating fine particles. For this reason, insulation between adjacent circuit electrodes, that is, insulation in the surface direction of the circuit board becomes insufficient.

  In the coated particles, it is preferable that 5 to 60% of the surface of the conductive particles is covered with insulating fine particles.

  When the surface of the conductive particles is covered by less than 5%, the conductive particles are not sufficiently covered by the insulating fine particles, so that the insulating property between adjacent circuit electrodes is larger than when the surface is covered by 5% or more. That is, the insulation in the surface direction of the circuit board is insufficient. On the other hand, if the surface of the conductive particles is covered by more than 60%, the insulating fine particles cover the conductive particles excessively, so that even if the conductive particles connect the opposing circuit electrodes, the surface is 60%. The connection resistance in the thickness direction of the circuit board is increased as compared with the case where it is covered below.

  The average particle diameter of the insulating fine particles is preferably 1/40 to 1/10 of the average particle diameter of the conductive particles.

  If the average particle size of the insulating fine particles is within the above range, the surface of the conductive particles is more easily covered with a large number of insulating fine particles compared to the case where the average particle size is outside the above range. When the circuit member connection structure is manufactured using the material, the insulation between adjacent circuit electrodes, that is, the insulation in the surface direction of the circuit board can be further improved.

  The insulating fine particles are preferably made of a polymer of a radical polymerizable substance. In this case, since the insulating fine particles are likely to adhere to the surface of the conductive particles, when a circuit member connection structure is manufactured using such a circuit connection material, the insulation between adjacent circuit electrodes, that is, the surface of the circuit board. The insulation in the direction can be further improved.

  The adhesive composition preferably contains a radical polymerizable substance and a curing agent that generates free radicals upon heating. With the circuit connecting material containing such an adhesive composition, the first and second circuit members are easily connected during heating.

  The circuit connecting material preferably further contains a film forming material made of phenoxy resin. Thereby, it becomes possible to process the circuit connection material into a film.

  Moreover, it is preferable that a phenoxy resin contains the molecular structure resulting from a polycyclic aromatic compound in a molecule | numerator. Thereby, the circuit connection material excellent in adhesiveness, compatibility, heat resistance, mechanical strength, etc. is obtained.

  The polycyclic aromatic compound is preferably fluorene.

  Moreover, the film-like circuit connecting material of the present invention is formed by forming the circuit connecting material of the present invention into a film shape. As a result, problems such as tearing, cracking, and stickiness of the circuit connection material hardly occur, and the circuit connection material can be easily handled.

  The circuit member connection structure according to the present invention includes a first circuit member in which a plurality of first circuit electrodes are formed on the main surface of the first circuit board, and a main surface of the second circuit board. The first and second circuit electrodes are provided between the second circuit member on which the plurality of second circuit electrodes are formed, and the main surface of the first circuit board and the main surface of the second circuit board. A circuit connecting member for connecting the first and second circuit members so that the two are opposed to each other, wherein the circuit connecting member is a cured product of the film-like circuit connecting material of the present invention. The first circuit electrode and the second circuit electrode are electrically connected via the coated particles. According to another aspect of the invention, there is provided a circuit member connection structure including a first circuit member having a plurality of first circuit electrodes formed on a main surface of a first circuit board and a plurality of circuit members on a main surface of a second circuit board. The second circuit member formed with the second circuit electrode is provided between the main surface of the first circuit board and the main surface of the second circuit board, and the first and second circuit electrodes are provided A circuit member connection structure comprising a circuit connection member for connecting the first and second circuit members to face each other, the circuit connection member is made of a cured product of the circuit connection material of the present invention, The first circuit electrode and the second circuit electrode are electrically connected via the coated particles.

  In such a circuit member connection structure, the connection resistance between the opposing circuit electrodes can be sufficiently reduced, and the insulation between adjacent circuit electrodes is sufficiently improved.

Further, when a DC voltage of 50 V is applied between adjacent circuit electrodes, the resistance value between adjacent circuit electrodes is preferably 10 ⁹ Ω or more.

  According to such a circuit member connection structure, the insulation between adjacent circuit electrodes during the operation, that is, the insulation in the surface direction of the circuit board becomes extremely high, and a short circuit between adjacent circuit electrodes can be sufficiently prevented. It becomes possible to do.

  Further, it is preferable that at least one of the first and second circuit members is an IC chip.

  Moreover, it is preferable that the connection resistance between the first circuit electrode and the second circuit electrode is 1Ω or less. In such a circuit member connection structure, the connection resistance between the circuit electrodes facing each other, that is, the connection resistance in the thickness direction of the circuit board is sufficiently reduced.

  In addition, the circuit member connection structure is configured such that at least one of the first and second circuit electrodes is at least one selected from the group consisting of gold, silver, tin, a platinum group metal, and indium tin oxide. It is preferable to have an electrode surface layer.

  In the circuit member connection structure, at least one of the first and second circuit members has a substrate surface layer composed of at least one selected from the group consisting of silicon nitride, a silicone compound, and a polyimide resin. preferable. Thereby, the adhesive strength between the circuit member and the circuit connection member is further improved as compared with the case where the substrate surface layer is not composed of the above material.

  The circuit member connection structure manufacturing method according to the present invention includes a first circuit member having a plurality of first circuit electrodes formed on a main surface of the first circuit board, and a main circuit board of the second circuit board. The film-like circuit connecting material of the present invention with the first circuit electrode and the second circuit electrode facing each other between the second circuit member having a plurality of second circuit electrodes formed on the surface And a step of curing the film-like circuit connecting material by heating and pressing. According to another aspect of the present invention, there is provided a circuit member connection structure manufacturing method comprising: a first circuit member having a plurality of first circuit electrodes formed on a main surface of a first circuit board; and a main surface of a second circuit board. The circuit connection material of the present invention is interposed between the second circuit member on which the plurality of second circuit electrodes are formed, with the first circuit electrode and the second circuit electrode facing each other. And a step of curing the circuit connecting material by heating and pressing.

  By using this manufacturing method, it is possible to obtain a circuit member connection structure in which the connection resistance between facing circuit electrodes is sufficiently reduced and the insulation between adjacent circuit electrodes is improved.

  According to the present invention, in COG mounting or COF mounting, a film-like circuit connection material and a circuit member that can obtain a low resistance electrical connection between opposing circuit electrodes and can suppress a short-circuit occurrence rate between adjacent circuit electrodes. The connection structure and the manufacturing method thereof can be provided.

  Further, it is possible to provide a film-like circuit connection material with high connection reliability, a circuit member connection structure, and a method for manufacturing the same for a driving IC having a short distance between adjacent circuit electrodes, that is, between bumps.

It is sectional drawing which shows one Embodiment of the connection structure of the circuit member of this invention. It is sectional drawing which shows an example of the coating particle used for the film-form circuit connection material of this invention. It is sectional drawing which shows one Embodiment of the film-form circuit connection material of this invention. It is sectional drawing which shows 1 process of the manufacturing method of the connection structure of the circuit member of this invention.

  Hereinafter, embodiments of the film-like circuit connecting material, the circuit member connecting structure, and the manufacturing method thereof according to the present invention will be described. In all the drawings, the same reference numerals are used for the same elements, and duplicate descriptions are omitted.

(Circuit member connection structure)
FIG. 1 is a cross-sectional view showing an embodiment of a circuit member connection structure (hereinafter referred to as “connection structure”) according to the present invention. The connection structure 10 of the present embodiment includes a circuit member 20 (first circuit member) and a circuit member 30 (second circuit member) facing each other. Is provided with a circuit connecting member 60 for connecting them.

  The circuit member 20 includes a circuit board 21 (first circuit board) and a plurality of circuit electrodes 22 (first circuit electrodes) formed on the main surface 21 a of the circuit board 21. The plurality of circuit electrodes 22 are arranged in a stripe shape, for example. On the other hand, the circuit member 30 includes a circuit board 31 (second circuit board) and a plurality of circuit electrodes 32 (second circuit electrodes) formed on the main surface 31 a of the circuit board 31. The plurality of circuit electrodes 32 are also arranged in a stripe shape, for example.

  Specific examples of the circuit members 20 and 30 include a chip component such as a semiconductor chip, a resistor chip or a capacitor chip, or a substrate such as a printed circuit board. Examples of the connection form of the connection structure 10 include connection between an IC chip and a chip mounting substrate, connection between electric circuits, connection between an IC chip and a glass substrate or a flexible tape in COG mounting or COF mounting.

  In particular, it is preferable that at least one of the circuit members 20 and 30 is an IC chip.

  The circuit electrodes 22 and 32 are formed by forming electrode surface layers 24 and 34 made of gold, silver, tin, platinum group metal, indium tin oxide (ITO), or a combination of two or more thereof on the electrode portions 23 and 33. It is preferable to have each.

  The circuit member 30 preferably has a substrate surface layer 35 composed of silicon nitride, silicone compound, polyimide resin, or a combination of two or more thereof. The substrate surface layer 35 is coated on or attached to the circuit board 31. The substrate surface layer 35 improves the adhesive strength between the circuit member 30 and the circuit connection member 60.

  In particular, when the circuit board 31 is a flexible tape, the board surface layer 35 is preferably made of an organic insulating material such as polyimide resin. Moreover, when the circuit board 31 is a glass substrate, it is preferable that the board | substrate surface layer 35 is comprised by a silicon nitride, a silicone compound, a polyimide resin, a silicone resin, or these 2 or more types of combinations.

  The circuit connection member 60 is provided between the main surface 21a of the circuit board 21 and the main surface 31a of the circuit board 31, and connects the circuit members 20 and 30 so that the circuit electrodes 22 and 32 face each other. Yes. The circuit connection member 60 includes an insulating member 40 and coated particles 50 in which a part of the surface 51 a of the conductive particles 51 is covered with insulating fine particles 52. The specific gravity of the coated particles 50 is 97/100 to 99/100 of the specific gravity of the conductive particles 51. The circuit electrode 22 and the circuit electrode 32 are electrically connected through the coated particle 50.

  Here, since the circuit connection member 60 is made of a cured product of a circuit connection material, which will be described later, in the connection structure 10, the connection resistance between the circuit electrodes 22 and 32 facing each other can be sufficiently reduced, and the adjacent circuit electrodes 22, The insulation between 32 is also sufficiently improved.

When attention is paid to the insulation between the adjacent circuit electrodes 22 and 32, in the connection structure 10, when a DC voltage of 50 V is applied between the adjacent circuit electrodes 22 and 32, the resistance between the adjacent circuit electrodes 22 and 32. The value is preferably 10 ⁹ Ω or more. In such a connection structure 10, the insulation between the adjacent circuit electrodes 22 and 32, that is, the insulation in the surface direction of the circuit boards 21 and 31 is extremely high during the operation, and the adjacent circuit electrodes 22 and 32 are separated from each other. It is possible to sufficiently prevent a short circuit.

  Focusing on the connection resistance between the circuit electrodes 22 and 32 facing each other, in the connection structure 10, the connection resistance between the circuit electrode 22 and the circuit electrode 32 is preferably 1Ω or less. In such a connection structure 10, the connection resistance between the opposing circuit electrodes 22 and 32, that is, the connection resistance in the thickness direction of the circuit boards 21 and 31 is sufficiently reduced.

(Circuit connection material)
The circuit connection material according to the present embodiment contains the adhesive composition and the coated particles 50. When this circuit connection material is interposed between the circuit members 20 and 30, heated and pressurized through the circuit members 20 and 30, and cured to obtain the connection structure 10, The connection resistance between the circuit electrodes 22 and 32 is sufficiently reduced, and the insulation between the adjacent circuit electrodes 22 and 32 is sufficiently improved.

<Adhesive composition>
The adhesive composition preferably contains a radical polymerizable substance and a curing agent that generates free radicals upon heating. With the circuit connecting material containing such an adhesive composition, the circuit members 20 and 30 are easily connected during heating.

  The radically polymerizable substance is a substance having a functional group that is polymerized by radicals. Examples of such a radically polymerizable substance include acrylate (including corresponding methacrylates, the same applies hereinafter) compounds, maleimide compounds, and the like. The radically polymerizable substance may be used in the state of a monomer or an oligomer, and the monomer and the oligomer can be used in combination.

  Specific examples of the acrylate compound include methyl acrylate, ethyl acrylate, isopropyl acrylate, isobutyl acrylate, ethylene glycol diacrylate, diethylene glycol diacrylate, trimethylolpropane triacrylate, tetramethylolmethane tetraacrylate, 2-hydroxy-1,3-dia Acryloxypropane, 2,2-bis [4- (acryloxymethoxy) phenyl] propane, 2,2-bis [4- (acryloxypolyethoxy) phenyl] propane, dicyclopentenyl acrylate, tricyclodecanyl acrylate, Examples include tris (acryloyloxyethyl) isocyanurate, urethane acrylate and the like. These can be used alone or in admixture of two or more. Moreover, you may use polymerization inhibitors, such as a hydroquinone and methyl ether hydroquinone, as needed. From the viewpoint of improving heat resistance, the acrylate compound preferably has at least one substituent selected from the group consisting of a dicyclopentenyl group, a tricyclodecanyl group, and a triazine ring.

  The maleimide compound contains at least two maleimide groups in the molecule, and examples of such a maleimide compound include 1-methyl-2,4-bismaleimidebenzene, N, N′-m-phenylene. Bismaleimide, N, N′-p-phenylenebismaleimide, N, N′-m-toluylene bismaleimide, N, N′-4,4-biphenylenebismaleimide, N, N′-4,4- (3 , 3′-dimethylbiphenylene) bismaleimide, N, N′-4,4- (3,3′-dimethyldiphenylmethane) bismaleimide, N, N′-4,4- (3,3′-diethyldiphenylmethane) bis Maleimide, N, N′-4,4-diphenylmethane bismaleimide, N, N′-4,4-diphenylpropane bismaleimide, N, N′-3,3′-di Enylsulfone bismaleimide, N, N′-4,4-diphenyl ether bismaleimide, 2,2-bis (4- (4-maleimidophenoxy) phenyl) propane, 2,2-bis (3-s-butyl-4, 8- (4-maleimidophenoxy) phenyl) propane, 1,1-bis (4- (4-maleimidophenoxy) phenyl) decane, 4,4′-cyclohexylidene-bis (1- (4-maleimidophenoxy)- Examples include 2-cyclohexylbenzene, 2,2-bis (4- (4-maleimidophenoxy) phenyl) hexafluoropropane, etc. These can be used alone or in admixture of two or more.

  The curing agent that generates free radicals upon heating is a curing agent that decomposes upon heating to generate free radicals, and examples of such curing agents include peroxide compounds and azo compounds. Such a curing agent is appropriately selected depending on the intended connection temperature, connection time, pot life (pot life), and the like. Among these, since it is possible to increase the reactivity and improve the pot life, the organic peroxidation has a half-life of 10 hours at a temperature of 40 ° C. or more and a half-life of 1 minute at a temperature of 180 ° C. or less. Organic peroxides having a half-life of 10 hours at a temperature of 60 ° C. or higher and a half-life of 1 minute at a temperature of 170 ° C. or lower are more preferable.

  When the connection time is 10 seconds or less, the compounding amount of the curing agent is 0 with respect to 100 parts by weight of the sum of the radical polymerizable substance and the film-forming material blended as necessary in order to obtain a sufficient reaction rate. It is preferably 1 to 30 parts by weight, and more preferably 1 to 20 parts by weight.

  When the blending amount of the curing agent is less than 0.1 parts by weight, a sufficient reaction rate cannot be obtained, and good adhesive strength or small connection resistance tends to be hardly obtained. When the compounding amount of the curing agent exceeds 30 parts by weight, the fluidity of the adhesive composition decreases, the connection resistance increases, or the pot life of the adhesive composition tends to be shortened.

  More specifically, examples of the curing agent that generates free radicals upon heating include diacyl peroxide, peroxydicarbonate, peroxyester, peroxyketal, dialkyl peroxide, hydroperoxide, silyl peroxide, and the like. Further, from the viewpoint of suppressing the corrosion of the circuit electrodes 22 and 32, the curing agent preferably has a concentration of chlorine ions or organic acid contained in the curing agent of 5000 ppm or less, and is generated after thermal decomposition. A thing with little organic acid is more preferable. Specifically, such a curing agent is selected from peroxyesters, dialkyl peroxides, hydroperoxides, and silyl peroxides, and more preferably selected from peroxyesters that provide high reactivity. The said hardening | curing agent can be mixed suitably and used.

  Diacyl peroxides include isobutyl peroxide, 2,4-dichlorobenzoyl peroxide, 3,5,5-trimethylhexanoyl peroxide, octanoyl peroxide, lauroyl peroxide, stearoyl peroxide, succinic peroxide, benzoyl Examples include peroxytoluene and benzoyl peroxide.

  As peroxydicarbonate, di-n-propyl peroxydicarbonate, diisopropyl peroxydicarbonate, bis (4-t-butylcyclohexyl) peroxydicarbonate, di-2-ethoxymethoxyperoxydicarbonate, di ( 2-ethylhexylperoxy) dicarbonate, dimethoxybutylperoxydicarbonate, di (3-methyl-3methoxybutylperoxy) dicarbonate and the like.

  Peroxyesters include cumylperoxyneodecanoate, 1,1,3,3-tetramethylbutylperoxyneodecanoate, 1-cyclohexyl-1-methylethylperoxynoedecanoate, and t-hexyl. Peroxyneodecanodate, t-butylperoxypivalate, 1,1,3,3-tetramethylbutylperoxy-2-ethylhexanate, 2,5-dimethyl-2,5-di (2- Ethylhexanoylperoxy) hexane, 1-cyclohexyl-1-methylethylperoxy-2-ethylhexanoate, t-hexylperoxy-2-ethylhexanoate, t-butylperoxy-2-ethylhexanoate Nate, t-butylperoxyisobutyrate, 1,1-bis (t-butylperoxy) cyclohexane, -Hexylperoxyisopropyl monocarbonate, t-butylperoxy-3,5,5-trimethylhexanonate, t-butylperoxylaurate, 2,5-dimethyl-2,5-di (m-toluoyl par Oxy) hexane, t-butyl peroxyisopropyl monocarbonate, t-butyl peroxy-2-ethylhexyl monocarbonate, t-hexyl peroxybenzoate, t-butyl peroxyacetate and the like.

  Peroxyketals include 1,1-bis (t-hexylperoxy) -3,3,5-trimethylcyclohexane, 1,1-bis (t-hexylperoxy) cyclohexane, 1,1-bis (t- Butyl peroxy) -3,3,5-trimethylcyclohexane, 1,1- (t-butylperoxy) cyclododecane, 2,2-bis (t-butylperoxy) decane and the like.

  Dialkyl peroxides include α, α′-bis (t-butylperoxy) diisopropylbenzene, dicumyl peroxide, 2,5-dimethyl-2,5-di (t-butylperoxy) hexane, and t-butyl. Cumyl peroxide and the like.

  Examples of the hydroperoxide include diisopropylbenzene hydroperoxide and cumene hydroperoxide.

  Examples of silyl peroxides include t-butyltrimethylsilyl peroxide, bis (t-butyl) dimethylsilyl peroxide, t-butyltrivinylsilyl peroxide, bis (t-butyl) divinylsilyl peroxide, and tris (t-butyl). Examples thereof include vinylsilyl peroxide, t-butyltriallylsilyl peroxide, bis (t-butyl) diallylsilyl peroxide, and tris (t-butyl) allylsilyl peroxide.

  These curing agents can be used alone or in admixture of two or more, and may be used by mixing a decomposition accelerator, an inhibitor and the like. In addition, those encapsulating these curing agents with a polyurethane-based or polyester-based polymer substance and making them into microcapsules are preferable because the pot life is extended.

<Coated particles>
The coated particles 50 are those in which a part of the surface 51 a of the conductive particles 51 is coated with insulating fine particles 52. The specific gravity of the coated particles 50 is 97/100 to 99/100 of the specific gravity of the conductive particles 51.

  If the specific gravity of the covering particles 50 is less than 97/100 of the specific gravity of the conductive particles 51, the insulating fine particles 52 will cover the conductive particles 51 excessively. For this reason, even if the conductive particles 51 connect the circuit electrodes 22 and 32 facing each other, the connection resistance in the thickness direction of the circuit boards 21 and 31 increases. On the other hand, when the specific gravity of the coated particles 50 exceeds 99/100 of the specific gravity of the conductive particles 51, the conductive particles 51 are not sufficiently covered with the insulating fine particles 52. For this reason, the insulation between the adjacent circuit electrodes 22 and 32, that is, the insulation in the surface direction of the circuit boards 21 and 31 becomes insufficient.

  In the coated particle 50, it is preferable that 5 to 60% of the surface 51 a of the conductive particle 51 is covered with the insulating fine particles 52.

  If the surface 51a of the conductive particles 51 is covered by less than 5%, the conductive particles 51 are not sufficiently covered by the insulating fine particles 52, so that the adjacent circuit is compared with the case where the surface 51a is covered by 5% or more. The insulation between the electrodes 22 and 32, that is, the insulation in the surface direction of the circuit boards 21 and 31 is insufficient. On the other hand, if the surface 51a of the conductive particles 51 is covered by more than 60%, the insulating particles 52 cover the conductive particles 51 excessively, so that the conductive particles 51 connect between the circuit electrodes 22 and 32 facing each other. Even so, the connection resistance in the thickness direction of the circuit boards 21 and 31 is increased as compared with the case where the surface 51a is covered by 60% or less.

The average particle diameter d _i of the insulating fine particles 52 is preferably 1/40 to 1/10 of the average particle diameter d _c of the conductive particles 51.

If the average particle size d _i of the insulating fine particles 52 is within the above range, as compared with the case where the average particle size d _i is outside the range, the surface 51a of the conductive particles 51 is covered by a number of insulating fine particles 52 When the connection structure 10 is manufactured using such a circuit connection material, the insulation between the adjacent circuit electrodes 22 and 32, that is, the insulation in the surface direction of the circuit boards 21 and 31 can be further improved.

  Examples of the conductive particles 51 include metal particles made of Au, Ag, Ni, Cu, solder, etc., or particles made of carbon or the like. The conductive particles 51 are preferably hot-melt metal particles. In this case, since the conductive particles 51 are easily deformed by heating and pressurization when the circuit electrodes 22 and 32 are connected to each other, the contact area between the conductive particles 51 and the circuit electrodes 22 and 32 is increased, and the connection reliability is improved. To do.

  As shown in FIG. 2, the conductive particles 51 may include a core 51x and an outer layer 51y formed so as to cover the surface of the core 51x. In addition, FIG. 2 is sectional drawing which shows an example of the covering particle | grains used for the circuit connection material of this invention.

  In order to obtain a sufficient pot life, the outer layer 51y is preferably made of a noble metal such as Au, Ag or a platinum group, and more preferably made of Au, rather than a transition metal such as Ni or Cu. Further, the conductive particles 51 may be obtained by coating a core 51x made of a transition metal such as Ni with an outer layer 51y made of a noble metal such as Au.

  The conductive particles 51 are preferably formed by forming an outer layer 51y made of a noble metal on the surface of a core 51x made of non-conductive glass, ceramic, plastic, or the like. In this case, since the conductive particles 51 are easily deformed by heating and pressurization when the circuit electrodes 22 and 32 are connected to each other, the contact area between the conductive particles 51 and the circuit electrodes 22 and 32 is increased, and the connection reliability is improved. To do.

  The thickness of the noble metal outer layer 51y is preferably 100 angstroms or more. In this case, a good connection resistance can be obtained between the circuit electrodes 22 and 32. Further, when the outer layer 51y made of a noble metal is formed on the surface of the core 51x made of a transition metal such as Ni, the thickness of the outer layer 51y made of a noble metal is preferably 300 angstroms or more. If the thickness of the outer layer 51y of the noble metal is less than 300 angstroms, for example, when the conductive particles 51 are mixed and dispersed, defects or the like occur in the outer layer 51y. There is a possibility that free radicals due to the oxidation-reduction action are generated at the place where the defect or the like occurs, and the storage stability of the circuit connecting material is lowered. And since the effect of the outer layer 51y will be saturated if the thickness of the outer layer 51y becomes thick, it is preferable that the thickness of the outer layer 51y is 1 micrometer or less.

  The conductive particles 51 are preferably added in an amount of 0.1 to 30 parts by volume with respect to 100 parts by volume of the adhesive composition. In addition, in order to prevent the adjacent circuit electrode from being short-circuited by the excessive conductive particles 51, it is more preferable to add 0.1 to 10 parts by volume.

  The insulating fine particles 52 are preferably made of a polymer of a radical polymerizable substance. In this case, since the insulating fine particles 52 are likely to adhere to the surface 51a of the conductive particles 51, when the connection structure 10 is manufactured using such a circuit connection material, the insulation between the adjacent circuit electrodes 22, 32, that is, The insulation in the surface direction of the circuit boards 21 and 31 can be further improved.

  Examples of the radical polymerizable substance include those similar to the radical polymerizable substance contained in the adhesive composition.

  The circuit connecting material preferably further contains a film forming material made of phenoxy resin. Thereby, a circuit connection material can be processed into a film shape, and a film-form circuit connection material can be obtained.

  FIG. 3 is a cross-sectional view showing an embodiment of the film-like circuit connecting material of the present invention. The film-like circuit connecting material 61 of this embodiment includes a film-like insulating member 41 made of the above adhesive composition and coated particles 50. The film-like circuit connecting material 61 is formed by forming the circuit connecting material into a film shape. As a result, problems such as tearing, cracking, and stickiness of the circuit connecting material are unlikely to occur, and handling of the circuit connecting material is facilitated in a normal state (normal temperature and normal pressure). Furthermore, when the film-like circuit connecting material 61 is divided into two or more layers including a layer containing a curing agent that generates free radicals upon heating and a layer containing the coated particles 50, the pot life is improved.

<Film forming material>
The film-forming material is a material that solidifies a liquid material and forms a composition composition into a film shape, which facilitates handling of the film and imparts mechanical properties that do not easily tear, crack, or stick. Yes, it can be handled as a film in a normal state (normal temperature and pressure). Examples of the film forming material include phenoxy resin, polyvinyl formal resin, polystyrene resin, polyvinyl butyral resin, polyester resin, polyamide resin, xylene resin, polyurethane resin and the like. Among these, a phenoxy resin is preferable because of excellent adhesiveness, compatibility, heat resistance, and mechanical strength.

  The phenoxy resin is a resin obtained by reacting a bifunctional phenol and epihalohydrin to a high molecular weight or by polyaddition of a bifunctional epoxy resin and a bifunctional phenol. The phenoxy resin is obtained by reacting, for example, 1 mol of a bifunctional phenol and 0.985 to 1.015 mol of epihalohydrin in a non-reactive solvent at a temperature of 40 to 120 ° C. in the presence of a catalyst such as an alkali metal hydroxide. Can be obtained. Moreover, as a phenoxy resin, especially from the point of the mechanical characteristic and thermal characteristic of resin, the mixing | blending equivalent ratio of bifunctional epoxy resin and bifunctional phenols is epoxy group / phenol hydroxyl group = 1 / 0.9- An organic solvent such as an amide, ether, ketone, lactone, or alcohol having a boiling point of 120 ° C. or higher in the presence of a catalyst such as an alkali metal compound, an organic phosphorus compound, or a cyclic amine compound. Among them, those obtained by heating to 50 to 200 ° C. under a condition where the reaction solid content is 50 parts by weight or less and performing a polyaddition reaction are preferable.

  Examples of the bifunctional epoxy resin include bisphenol A type epoxy resin, bisphenol F type epoxy resin, bisphenol AD type epoxy resin, and bisphenol S type epoxy resin. Bifunctional phenols have two phenolic hydroxyl groups, and examples of such bifunctional phenols include bisphenols such as bisphenol A, bisphenol F, bisphenol AD, and bisphenol S.

  Further, the phenoxy resin preferably contains a molecular structure derived from a polycyclic aromatic compound in the molecule. Thereby, the circuit connection material excellent in adhesiveness, compatibility, heat resistance, mechanical strength, etc. is obtained.

  Examples of the polycyclic aromatic compound include dihydroxy compounds such as naphthalene, biphenyl, acenaphthene, fluorene, dibenzofuran, anthracene, and phenanthrene. Here, the polycyclic aromatic compound is preferably fluorene. Furthermore, the polycyclic aromatic compound is particularly preferably 9,9'-bis (4-hydroxyphenyl) fluorene.

  The phenoxy resin may be modified with a radical polymerizable functional group. Moreover, a phenoxy resin may be used independently or may be used in mixture of 2 or more types.

<Other components>
The circuit connection material of the present embodiment may further include a polymer or copolymer having at least one selected from the group consisting of acrylic acid, acrylic acid ester, methacrylic acid ester and acrylonitrile as a monomer component. Here, since it is excellent in stress relaxation, it is preferable to use together the copolymer type acrylic rubber containing glycidyl acrylate and glycidyl methacrylate containing a glycidyl ether group. The molecular weight (weight average molecular weight) of these acrylic rubbers is preferably 200,000 or more from the viewpoint of increasing the cohesive strength of the adhesive.

  In addition, the circuit connection material of the present embodiment further includes a filler, a softener, an accelerator, an anti-aging agent, a flame retardant, a dye, a thixotropic agent, a coupling agent, a phenol resin, a melamine resin, and isocyanates. Etc. can also be contained.

  It is preferable to include a filler in the circuit connection material because connection reliability and the like are improved. The filler can be used if its maximum diameter is less than the average particle diameter of the conductive particles 51. It is preferable that the compounding quantity of a filler is 5-60 volume parts with respect to 100 volume parts of adhesive compositions. If the blending amount exceeds 60 parts by volume, the effect of improving the connection reliability tends to be saturated, and if it is less than 5 parts by volume, the effect of adding the filler tends to be insufficient.

  As the coupling agent, a compound containing a ketimine, vinyl group, acrylic group, amino group, epoxy group or isocyanate group is preferable because the adhesiveness is improved.

  Specifically, as the silane coupling agent having an amino group, N-β (aminoethyl) γ-aminopropyltrimethoxysilane, N-β (aminoethyl) γ-aminopropylmethyldimethoxysilane, γ-aminopropyltrimethoxysilane. Examples include ethoxysilane, N-phenyl-γ-aminopropyltrimethoxysilane, and the like. Examples of the silane coupling agent having ketimine include those obtained by reacting the above silane coupling agent having an amino group with a ketone compound such as acetone, methyl ethyl ketone, and methyl isobutyl ketone.

  Next, with reference to FIG.4 and FIG.1, one Embodiment of the manufacturing method of the connection structure of the circuit member of this invention is described. In the present embodiment, a method for manufacturing the connection structure 10 will be described.

(Method for manufacturing circuit member connection structure)
FIG. 4 is a cross-sectional view showing one step of the method for manufacturing the connection structure 10. First, the circuit members 20 and 30 are prepared. On the other hand, a film-like circuit connection material 61 formed into a film is prepared. Next, the film-like circuit connecting material 61 is interposed between the circuit member 20 and the circuit member 30 with the circuit electrode 22 and the circuit electrode 32 facing each other. Specifically, for example, the film-like circuit connection material 61 is placed on the circuit member 30, and then the circuit member 20 is placed on the film-like circuit connection material 61. Here, since the film-like circuit connecting material 61 is a film, it is easy to handle. For this reason, according to this film-like circuit connection material 61, when connecting the circuit members 20, 30, the circuit connection material can be easily interposed between them, and the connection work of the circuit members 20, 30 can be performed. It can be done easily.

  Next, the film-like circuit connecting material 61 is heated through the circuit members 20 and 30 and heated and pressed in the directions of arrows A and B in FIG. 4 to perform a curing process (see FIG. 4). A circuit connection member 60 is formed between them (see FIG. 1). During the heating and pressurization, the circuit electrodes 22 and 23 may be aligned by irradiating light from one of the circuit members 20 and 30. The curing treatment can be performed by a general method, and the method is appropriately selected depending on the adhesive composition.

  By using this manufacturing method, it is possible to obtain the connection structure 10 in which the connection resistance between the opposing circuit electrodes 22 and 32 is sufficiently reduced and the insulation between the adjacent circuit electrodes 22 and 32 is sufficiently improved. it can.

  As mentioned above, although preferred embodiment of this invention was described in detail, this invention is not limited to the said embodiment.

  For example, in the above embodiment, the circuit electrodes 22 and 32 both have the electrode surface layers 24 and 34, but at least one of the circuit electrodes 22 and 32 may have the electrode surface layer.

  In the above embodiment, the circuit member 30 has the substrate surface layer 35. However, at least one of the circuit members 20 and 30 may have the substrate surface layer.

  Moreover, in the said embodiment, although the connection structure 10 is manufactured using the film-form circuit connection material 61, it is not restricted to the film-form circuit connection material 61, You may use the circuit connection material which does not contain a film formation material. Even in this case, the circuit connection material can be interposed between the circuit members 20 and 30 if the circuit connection material is dissolved in a solvent, and the solution is applied to any of the circuit members 20 and 30 and dried.

  Moreover, in the said embodiment, although the circuit connection material contained the electrically-conductive particle 51, it does not need to contain the electrically-conductive particle 51. FIG. Even in this case, electrical connection is obtained by the circuit electrodes 22 and 32 facing each other being in direct contact with each other. In addition, when the conductive particles 51 are contained, a more stable electrical connection can be obtained as compared with the case where the conductive particles 51 are not contained.

  Hereinafter, the content of the present invention will be described more specifically with reference to examples, but the present invention is not limited to these examples.

Example 1
First, a phenoxy resin having a glass transition temperature of 80 ° C. was synthesized from bisphenol A type epoxy resin and bisphenol A. 50 g of this phenoxy resin was dissolved in a mixed solvent of toluene (boiling point 110.6 ° C., SP value 8.90) / ethyl acetate (boiling point 77.1 ° C., SP value 9.10) = 50/50 by weight ratio. A solution having a solid content of 40% by weight was obtained. And the solution was adjusted so that it might become 60 g of phenoxy resin, 39 g of dicyclopentenyl dialcohol diacrylate, 1 g of phosphate ester type acrylate, and 5 g of t-hexylperoxy-2-ethylhexanate in solid content weight ratio.

  On the other hand, insulating fine particles made of a polymer of a radical polymerizable substance (acrylate monomer) are used to cover 20% of the surface of the conductive particles so that the specific gravity after coating is 98/100 with respect to the specific gravity before coating. Thus, coated particles were obtained. The conductive particles have a nickel layer having a thickness of 0.2 μm on the surface of a core made of polystyrene, and a gold layer having a thickness of 0.04 μm outside the nickel layer. As the conductive particles, conductive particles having an average particle diameter of 5 μm were used.

  The coated particles were mixed and dispersed in the above solution at 5% by volume to prepare a solution. Then, this solution was applied to a PET (polyethylene terephthalate) film having a thickness of 80 μm, which was surface-treated on one side, and dried with hot air at 70 ° C. for 10 minutes to form a first 10 μm-thickness on the PET film. A film-like material was obtained.

  In addition, another solution was prepared so as to be 60 g of phenoxy resin, 39 g of dicyclopentenyl dialcohol diacrylate, 1 g of phosphate ester acrylate, and 5 g of t-hexylperoxy-2-ethylhexanate in solid content weight ratio. . This solution was applied to a PET (polyethylene terephthalate) film having a thickness of 80 μm on one side using a coating apparatus, and dried with hot air at 70 ° C. for 10 minutes to form an adhesive composition having a thickness of 10 μm on the PET film. A second film-like material consisting of

  The first film-like material and the second film-like material were bonded together with a laminator to obtain a film-like circuit connection material having a two-layer structure.

(Example 2)
First, a phenoxy resin having a glass transition temperature of 80 ° C. was synthesized from bisphenol A type epoxy resin and 9,9′-bis (4-hydroxyphenyl) fluorene. 50 g of this phenoxy resin was dissolved in a mixed solvent of toluene (boiling point 110.6 ° C., SP value 8.90) / ethyl acetate (boiling point 77.1 ° C., SP value 9.10) = 50/50 by weight ratio. A solution having a solid content of 40% by weight was obtained. And the solution was adjusted so that it might become 60 g of phenoxy resin, 39 g of dicyclopentenyl dialcohol diacrylate, 1 g of phosphate ester type acrylate, and 5 g of t-hexylperoxy-2-ethylhexanate in solid content weight ratio.

  On the other hand, 40% of the surface of the conductive particles is coated with insulating fine particles made of a polymer of a radical polymerizable substance (acrylate monomer) so that the specific gravity after coating is 97/100 with respect to the specific gravity before coating. Thus, coated particles were obtained. The conductive particles have a nickel layer having a thickness of 0.2 μm on the surface of a core made of polystyrene, and a gold layer having a thickness of 0.04 μm outside the nickel layer. As the conductive particles, conductive particles having an average particle diameter of 5 μm were used.

  The coated particles were mixed and dispersed in the above solution at 5% by volume to prepare a solution. Then, this solution was applied to a PET (polyethylene terephthalate) film having a thickness of 80 μm, which was surface-treated on one side, and dried with hot air at 70 ° C. for 10 minutes to form a first 10 μm-thickness on the PET film. A film-like material was obtained.

  In addition, another solution was prepared so as to be 60 g of phenoxy resin, 39 g of dicyclopentenyl dialcohol diacrylate, 1 g of phosphate ester acrylate, and 5 g of t-hexylperoxy-2-ethylhexanate in solid content weight ratio. . This solution was applied to a PET (polyethylene terephthalate) film having a thickness of 80 μm on one side using a coating apparatus, and dried with hot air at 70 ° C. for 10 minutes to form an adhesive composition having a thickness of 10 μm on the PET film. A second film-like material consisting of

  The first film-like material and the second film-like material were bonded together with a laminator to obtain a film-like circuit connection material having a two-layer structure.

(Comparative Example 1)
A film-like circuit connecting material having a two-layer structure was obtained in the same manner as in Example 1 except that conductive particles not coated with insulating fine particles were used instead of the coated particles in Example 1. That is, the coverage of the conductive particles is 0%.

(Comparative Example 2)
A film-like circuit connecting material having a two-layer structure was obtained in the same manner as in Example 1 except that the following coated particles were used instead of the coated particles in Example 1.

  Using insulating fine particles made of a polymer of a radical polymerizable substance (acrylate monomer), 70% of the surface of the conductive particles is coated so that the specific gravity after coating is 95/100 with respect to the specific gravity before coating, Coated particles were obtained. The conductive particles have a nickel layer having a thickness of 0.2 μm on the surface of a core made of polystyrene, and a gold layer having a thickness of 0.04 μm outside the nickel layer. As the conductive particles, conductive particles having an average particle diameter of 5 μm were used.

(Production of circuit member connection structure)
First, as a first circuit member, an IC chip was prepared in which gold bumps having a bump area of 50 μm × 50 μm, a pitch of 100 μm, and a height of 20 μm were arranged. Next, as a second circuit member, an ITO substrate (surface resistance <20Ω / □) in which a circuit of indium tin oxide (ITO) was formed by vapor deposition on a glass substrate having a thickness of 1.1 mm was prepared.

  Then, the film-like circuit connecting materials of Examples 1 and 2 and Comparative Examples 1 and 2 are interposed between the IC chip and the ITO substrate, and the IC chip, the film-like circuit connecting material and the ITO substrate are made of quartz glass and a pressure head. And heated and pressurized at 200 ° C. and 100 MPa for 10 seconds. In this way, the IC chip and the ITO substrate were connected via the film-like circuit connecting material. At this time, one adhesive surface of the film-like circuit connecting material was previously applied to the ITO substrate by heating and pressing at 70 ° C. and 0.5 MPa for 5 seconds. Thereafter, the PET film was peeled off, and the other adhesive surface of the film-like circuit connecting material was connected to the IC chip.

  As described above, circuit member connection structures A to D were produced. The circuit member connection structures A to D were produced using the film-like circuit connection materials of Examples 1 and 2 and Comparative Examples 1 and 2, respectively.

(Measurement of specific gravity)
For each of the film-like circuit connecting materials of Examples 1 and 2 and Comparative Examples 1 and 2, 3.5 cc of each of the conductive particles before coating and the coated particles after coating were sampled, and a hydrometer (Shimadzu) was obtained at room temperature in a helium atmosphere. The specific gravity was measured using Seiko Seisakusho Co., Ltd., Accupic 1330-01), and the specific gravity (specific gravity ratio) of the coated particles after coating to the specific gravity of the conductive particles before coating was determined. The results are shown in Table 1.

(Measurement of connection resistance between circuit electrodes facing each other)
For the circuit member connection structures A to D, the connection resistance after initial (right after connection) and the connection resistance after holding 500 cycles in a temperature cycle bath at −40 ° C. for 30 minutes and at 100 ° C. for 30 minutes is 2 terminals. It measured with the multimeter using the measuring method. The results are shown in Table 2. Here, the connection resistance means a resistance between circuit electrodes facing each other.

(Measurement of insulation resistance between adjacent circuit electrodes)
For circuit member connection structures A to D, the insulation resistance after applying a direct current (DC) voltage of 50 V for 1 minute was measured with a multimeter using a two-terminal measurement method. The results are shown in Table 2. Here, the insulation resistance means a resistance between adjacent circuit electrodes.

  In the circuit member connection structures A and B obtained by using the film-like circuit connection materials of Examples 1 and 2, the connection resistance is sufficiently low both in the initial stage and after the temperature cycle, and the insulation resistance is also sufficient. It was high.

  In contrast, the circuit member connection structure C obtained using the film-like circuit connection material of Comparative Example 1 had a lower insulation resistance than the connection structures A and B. Moreover, in the connection structure D of the circuit member obtained using the film-form circuit connection material of the comparative example 2, the connection resistance was higher than the connection structures A and B both in the initial stage and after the temperature cycle. .

  As described above, when a circuit member connection structure is manufactured using the circuit connection material of the present invention, the connection resistance between the circuit electrodes facing each other in the obtained circuit member connection structure can be sufficiently reduced and adjacent to each other. It was confirmed that the insulation between the circuit electrodes can be sufficiently improved.

  DESCRIPTION OF SYMBOLS 10 ... Connection structure of a circuit member, 20 ... Circuit member (1st circuit member), 21 ... Circuit board (1st circuit board), 21a ... Main surface, 22 ... Circuit electrode (1st circuit electrode), 24 , 34 ... electrode surface layer, 30 ... circuit member (second circuit member), 31 ... circuit board (second circuit board), 31a ... main surface, 32 ... circuit electrode (second circuit electrode), 35 ... Substrate surface layer, 50 ... coated particles, 51 ... conductive particles, 51a ... surface, 52 ... insulating fine particles, 60 ... circuit connecting member, 61 ... film-like circuit connecting material.

Claims (15)

A first circuit member having a plurality of first circuit electrodes formed on the main surface of the first circuit board;
A second circuit member having a plurality of second circuit electrodes formed on the main surface of the second circuit board;
A film-like circuit connecting material for connecting the first and second circuit electrodes to face each other,
An adhesive composition, and a first layer containing coated particles in which a part of the surface of the conductive particles is coated with insulating fine particles;
A second layer that is provided on one side of the first layer, does not contain the coated particles, and is made of an adhesive composition;
With
The film-like circuit connecting material, wherein the specific gravity of the coated particles is 97/100 to 99/100 of the specific gravity of the conductive particles.   The said adhesive composition contains a radically polymerizable substance and the hardening | curing agent which generate | occur | produces a free radical by heating, The film-form circuit connection material of Claim 1 characterized by the above-mentioned.   The adhesive composition contained in the first layer does not contain a curing agent that generates free radicals upon heating, and the adhesive composition that forms the second layer generates free radicals upon heating. The film-form circuit connection material of Claim 1 or 2 which contains a hardening | curing agent.   4. The film-like circuit connection material according to claim 1, wherein an average particle size of the insulating fine particles is 1/40 to 1/10 of an average particle size of the conductive particles. .   The film-like circuit connecting material according to claim 1, wherein the insulating fine particles are made of a polymer of a radical polymerizable substance. The film-form circuit connecting material according to any one of claims 1 to 5, further comprising a film forming material made of a phenoxy resin.   The said phenoxy resin contains the molecular structure resulting from a polycyclic aromatic compound in a molecule | numerator, The film-form circuit connection material of Claim 6 characterized by the above-mentioned.   The film-like circuit connecting material according to claim 7, wherein the polycyclic aromatic compound is fluorene. A first circuit member having a plurality of first circuit electrodes formed on the main surface of the first circuit board;
A second circuit member having a plurality of second circuit electrodes formed on the main surface of the second circuit board;
The first and second circuits are provided between the main surface of the first circuit board and the main surface of the second circuit board so that the first and second circuit electrodes face each other. A circuit connecting member for connecting members;
A circuit member connection structure comprising:
The circuit connection member comprises a cured product of the film-like circuit connection material according to any one of claims 1 to 8,
A circuit member connection structure in which the first circuit electrode and the second circuit electrode are electrically connected via the coated particles. 10. The circuit member connection structure according to claim 9, wherein a resistance value between the adjacent circuit electrodes is 10 ⁹ Ω or more when a DC voltage of 50 V is applied between the adjacent circuit electrodes. 11.   The circuit member connection structure according to claim 9 or 10, wherein at least one of the first and second circuit members is an IC chip.   12. The circuit member connection structure according to claim 9, wherein a connection resistance between the first circuit electrode and the second circuit electrode is 1Ω or less.   At least one of the first and second circuit electrodes has an electrode surface layer composed of at least one selected from the group consisting of gold, silver, tin, a platinum group metal, and indium tin oxide. The circuit member connection structure according to any one of claims 9 to 12.   14. At least one of the first and second circuit members has a substrate surface layer composed of at least one selected from the group consisting of silicon nitride, silicone compound, and polyimide resin. The connection structure for a circuit member according to any one of the above. A first circuit member having a plurality of first circuit electrodes formed on a main surface of the first circuit board; and a second circuit member having a plurality of second circuit electrodes formed on a main surface of the second circuit board. The film-like circuit connecting material according to any one of claims 1 to 8 is interposed between the second circuit member and the first circuit electrode and the second circuit electrode facing each other. Process,
Curing the film-like circuit connecting material by heating and pressing; and
The manufacturing method of the connection structure of the circuit member provided with this.

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