JP4373163B2 - Method for manufacturing optical structure - Google Patents

Description

The present invention relates to a method for manufacturing an optical structure having a structure applicable to a polarizer, a diffraction grating, a reflector, a filter, an optical attenuator and the like used in the field of optical communication and the like.

Conventionally, various structures have been proposed for polarizers used in optical isolators, diffraction gratings used as lenses in optical systems, reflectors and filters used in spectrometers, and optical attenuators. .
JP 2000-193823 A JP 2001-66428 A JP 2001-4817 JP-A-10-282337 JP-A-11-352327 JP-A-11-167024 JP 2001-83321 A JP 2002-311242 A JP 2003-57442 A JP 2003-66232 A JP 9-311237 A "Femtosecond laser interference technology using a diffracted beam splitter for 3D optical crystal production (Femtosecond)" by T. Kondo, S. Matsuo, S. Juodkazis, and Misawa. Laser interference technique with diffractive beam splitter for fabrication of three-dimensional photonic crystals) ”Appl. Phys. Lett. 79, 6, 725-727 (August 2001)

However, all the conventional elements use vacuum deposition, sputtering, lithography, or the like in order to form a fine periodic structure on the order of submicrons suitable for integration of optical circuits. In this case, there has been a problem that the manufacturing process becomes complicated and the apparatus configuration becomes large, resulting in an increase in the cost of the optical element.
Therefore, the present invention can be manufactured easily and quickly, and a fine periodic structure on the order of submicrons can be easily realized, and the direction, width or pitch of the fine periodic structure can be arbitrarily controlled, and a three-dimensional periodic structure can be obtained. capable of obtaining, and an object thereof is to provide an excellent manufacturing how the optical structure.

By condensing and irradiating a pulsed laser beam having a pulse width of femtosecond order (10 ⁻¹² to 10 ⁻¹⁵ seconds) inside the light transmitting substrate in a specific polarization mode, the refractive index changes only at the condensing position. Regions can be formed. This phenomenon in which the refractive index changes by irradiation with femtosecond pulsed laser light is called “photoinduced refractive index change”, and an example of manufacturing an optical waveguide is known.

The inventor has found that a periodic structure in which a region having a high refractive index and a region having a low refractive index are repeatedly formed at a pitch of 1 μm or less is formed in the region causing the change in the refractive index of light.
In this periodic structure, a surface where high refractive index regions or low refractive index regions are connected is defined as a “main surface”. Note that regions with a high refractive index and regions with a low refractive index are alternately formed adjacent to each other. Therefore, even if the surface where the regions with a high refractive index are connected is defined as the “main surface”, the refractive index Even if the surface where the low region is connected is defined as the “main surface”, it is substantially the same. However, in the following, in order to clarify the definition, the connected surface of the regions having a high refractive index is referred to as “main surface”.

The main surface is formed parallel to the direction of the polarized magnetic field of the irradiated pulsed laser light. Since the pulse laser beam is an electromagnetic wave, it has the property of propagating while changing at a predetermined frequency while maintaining an orthogonal relationship between the electric field and the magnetic field. In this specification, the direction of the magnetic field of the pulsed laser light is referred to as “polarized magnetic field direction”.
The periodic structure is formed by interference between the irradiated pulsed laser light and plasma generated inside the focusing position. Therefore, only one pulse laser beam is required to be irradiated.

As reported so far, there is an example in which at least two pulsed laser beams to be irradiated are used and a periodic structure is formed by interference of these pulsed laser beams. In the present invention, since only one pulse laser beam is used, the apparatus configuration and the like can be extremely simplified.
Of course, the pulse laser beam may be divided into at least two beams by a beam splitter or the like, or two or more pulse laser beams may be used to simultaneously irradiate different parts of the light transmitting substrate. is there. As a result, a periodic structure in which a region having a high refractive index and a region having a low refractive index are repeatedly formed at a predetermined pitch or less, for example, 1 μm or less, can be formed in each pulse laser beam condensing position.

The pitch of the periodic structure depends on the wavelength of the irradiated pulse laser beam, the number of irradiation pulses, or the pulse energy.
Since the periodic structure is formed by the interference between the irradiated pulse laser beam and the plasma generated inside the focusing position, the wave number vector of the pulse laser beam to be irradiated is k _w and the wave vector of the generated plasma is k _p, when the repetition of the modulation vector of the refractive index of high and low regions of the periodic structure formed placing the k _d, the law of conservation of momentum, the following expression is established (1).

k _d = k _p −k _w (1)
Here, if the wavelength of the pulse laser beam to be irradiated is λ, k _w = 2π / λ, and if the pitch of the periodic structure is Λ, the relationship k _d = 2π / Λ is established.
Therefore, from equation (1), when the wavelength λ of the irradiated pulse laser beam is reduced, k _w is increased and k _d is decreased, and as a result, the pitch Λ of the periodic structure is increased.

The frequency ω _p in the longitudinal optical mode of the plasma is
n _e : electron density of generated plasma,
e: charge of electrons in generated plasma,
ε ₀ : vacuum dielectric constant,
m _e : electron mass of generated plasma,
κ _B : Boltzmann constant,
When T _{e is} the electron temperature of the generated plasma, it is expressed by the following equation (2).

Increasing the irradiation pulse number and pulse energy of the pulsed laser light irradiation, electron density n _e and generating plasma electron temperature T _e of the generated plasma is increased in proportion to their, k _p decreases. As a result, the modulation vector k _d of the periodic structure is reduced, and the pitch Λ of the periodic structure is increased.
The power density of the pulsed laser light varies depending on the type of the light transmissive substrate, but the periodic structure of the present invention is formed in which a region having a high refractive index and a region having a low refractive index are repeatedly generated at a predetermined pitch or less inside the condensing position. In order to achieve this, 10 ⁸ W / cm ² or more is preferable.

Here, the power density is a value expressed by dividing the output power (W) represented by “peak value of output energy (J) / pulse width (second)” per unit irradiation area of the pulse laser beam. is there. If the power density is less than 10 ⁸ W / cm ² , an effective periodic structure may not be formed inside the condensing position. The higher the pulse energy, the clearer the repetition of the high and low refractive index regions (the larger the difference in refractive index).

  However, when a laser beam having an excessively large pulse energy amount is irradiated, a cavity defect is formed at the condensing position due to a thermal effect. For this reason, although it depends on the composition of the light-transmitting substrate, the threshold at which the power density of the pulse laser beam is a predetermined value or less, for example, 1 μm or less, is formed inside the condensing position, and the threshold at which a cavity defect is formed It is good to adjust by repetition frequency so that it may be between. Specifically, considering productivity, the lower limit of the repetition frequency of the pulsed laser light in a certain time (for example, 1 second) is set to 1 Hz, preferably 10 kHz, more preferably 100 kHz, and the upper limit that can be taken is 100 MHz. Set to. The pulsed laser light may be a single shot light pulse.

  In addition, even with pulsed laser light having a high repetition frequency, if a power density that causes a photoinduced refractive index change can be obtained, a periodic structure of a predetermined value or less can be formed inside the condensing position. Conversely, even in the case of pulsed laser light having a low repetition frequency of 10 kHz or less, by using a ND filter or the like, the power density is adjusted below the power density threshold at which cavity defects are formed, so A periodic structure having a predetermined value or less can be formed.

  The energy of the pulsed laser beam is adjusted between the threshold value at which a predetermined or less periodic structure is formed inside the focusing position and the threshold value at which a cavity defect is formed, and the periodic pitch is uniform and the width of the main surface In order to form a periodic structure with the same periodicity in the same direction and good periodicity, the energy per pulse of the pulsed laser light to be irradiated is different depending on the type of the light transmitting substrate. It is desirable to adjust between 0.1 μJ / pulse and 10 μJ / pulse.

  The pulse laser beam is condensed by a condensing element such as a lens. The shape of the region having the periodic structure is basically spherical. The pulse laser beam having the pulse energy causing the light-induced refractive index change is subjected to a spatial Kerr effect which is a third-order nonlinear optical effect while propagating through the light-transmitting substrate, thereby condensing the pulse laser beam. The shape of the position is preferably focused on a sphere, and the diameter of the sphere is preferably in the range of 0.1 μm to 1 mm.

If the condensing position at this time is continuously moved relative to the light-transmitting substrate in a fixed direction, the optical structure in which the region having the periodic structure extends in a string having a circular cross section or a columnar shape. The body can be made.
In addition, a plurality of spherical regions having the periodic structure are repeatedly arranged in parallel by intermittently moving the light collection position at a predetermined interval and in a fixed direction with respect to the light-transmitting base material. An optical element having a periodic structure can be manufactured.

Further, a plurality of periodic structures having a circular cross-section or a columnar shape are repeatedly arranged side by side by continuously moving the condensing position at a predetermined interval and in a fixed direction with respect to the light-transmitting substrate. In other words, an optical element having a double periodic structure can be produced.
If these double periodic structures are three-dimensionally formed in a light-transmitting substrate, a diffraction effect, a polarization effect, and a birefringence effect can be simultaneously obtained for a multiwavelength optical signal.

The birefringence effect is generally not manifested in glass materials because the structure is isotropic. However, this birefringence effect is imparted to an isotropic material that does not exhibit a birefringence effect by forming a periodic structure in which a region having a high refractive index and a region having a low refractive index are repeatedly generated at a pitch equal to or less than the predetermined pitch. Can do.
When a wavelength-multiplexed light is incident on an optical element having a double periodic structure in which a plurality of periodic structures in which a region having a high refractive index and a region having a low refractive index are repeatedly generated at a predetermined pitch or less are repeatedly arranged in parallel, Depending on the structure, the reflectance of a specific wavelength can be increased.

As described above, according to the method for manufacturing an optical structure of the present invention, it is possible to form a periodic structure in which a region having a high refractive index and a region having a low refractive index are repeatedly generated at a predetermined pitch or less in a condensing position. . This structure can be produced at an arbitrary position inside the light-transmitting substrate. When an optical signal in a predetermined wavelength region is incident on this optical structure, a polarization effect and interference / diffraction effect can be obtained. .
Furthermore, according to the method for producing an optical structure of the present invention, it can be formed on an isotropic material such as a light-transmitting substrate that does not inherently exhibit a birefringence phenomenon, and a birefringence phenomenon can be caused, such as an optical isolator. It can function as a polarizer.

Furthermore, according to the method for manufacturing an optical structure of the present invention, the wavelength-multiplexed light is incident on the optical structure having the double period, thereby having a specific wavelength depending on the periodic structure. The reflectance can be increased, and it functions as a reflector, filter, or optical attenuator that reflects only light of a specific wavelength.
According to the method for manufacturing an optical structure of the present invention, a single pulse is obtained by utilizing interference between a pulsed laser beam focused on a light-transmitting substrate and plasma generated inside the focused position. An optical structure in which a region having a periodic structure in which a region having a high refractive index and a region having a low refractive index are repeatedly generated at a predetermined pitch or less simply by irradiating a laser beam without any complicated process. The body can be manufactured.

  The optical structure is applied as a control element for the polarization direction of an optical signal used for optical communication, an optical element having a diffraction effect, a reflector filter for reflecting an optical signal of a specific wavelength, or an optical element such as an optical attenuator. can do.

FIG. 1 is a schematic view of an optical structure manufacturing apparatus according to the present invention.
The optical structure manufacturing apparatus includes an excitation light generator 3 that generates excitation light, a pulse light generator 4 that generates pulse laser light based on the excitation light, and an optical amplifier 5 that amplifies the pulse laser light. .
The excitation light generator 3 is composed of a gas laser such as Ar or a semiconductor laser such as GaAs.

The pulse generator 4 is composed of a Ti: Al ₂ O ₃ (titanium-doped sapphire crystal) laser. The Ti: Al ₂ O ₃ laser oscillates pulsed light having a pulse width of the order of femtoseconds (10 ⁻¹² to 10 ⁻¹⁵ seconds) by its mode lock mechanism. The wavelength of the pulsed light is variable (100 nm to 2000 nm), but is set to, for example, 800 nm so that the pulsed laser light can pass through the glass material 1.

The optical amplifying unit 5 is composed of a crystal solid laser such as a Q switch Nd: YAG laser.
The pulse laser beam output from the optical amplifying unit 5 is reflected by the mirror 9, linearly polarized light is extracted by the linearly polarizing plate 8, and is condensed on the surface or inside of the glass material 1 by the condensing member 6 such as a lens. The The glass material 1 is installed on an electric stage 7 capable of scanning in the XYZ directions.

The role of the linearly polarizing plate 8 will be described. The polarization of the pulsed laser light output from the optical amplifying unit 5 is generally linearly polarized light. By inserting the linearly polarizing plate 8 in the optical path, The polarization angle can be freely changed.
As the glass material 1 to which the pulse laser beam is irradiated, glass materials such as oxide glass, halide glass and chalcogenide glass, and crystal materials such as sapphire and quartz are used. Examples of the oxide glass include silicate-based, borate-based, phosphate-based, fluorophosphate-based, and bismuth-based glasses, and halide glasses include BeF ₂ -based, ZrF ₄ -based, InF ₃ -based, and Cd- There are Zn-Cl system, sulfide glass includes Ga-La-S system, and chalcogenide glass includes S-As system.

Since the pulse laser beam having a power density of 10 ⁸ W / cm ² or more is collected with respect to the condensing position on the surface of glass material 1 or inside, the phenomenon of light-induced refractive index change inside the condensing position. Happens. As a result, a substantially spherical refractive index change region is formed. The size of the refractive index changing region is determined by the performance of the condensing member 6, the wavelength of the pulse laser beam, and the pulse energy, but is in the range of 1 μm to 1 mm.

Furthermore, a periodic structure is formed in which a region having a high refractive index and a region having a low refractive index are repeatedly present at a pitch of 1 μm or less (submicron) within the refractive index changing region.
2A to 2C are cross-sectional views showing a periodic structure formed in the refractive index changing region.
Within the refractive index changing region S, regions 17 having a high refractive index and regions 18 having a low refractive index are periodically and alternately formed. The pitch of the period is represented by P, and the width of the region 17 having a high refractive index is represented by L. Since the pitch P and the width L depend on the polarization direction, wavelength, number of irradiation pulses, pulse energy, etc. of the pulsed laser light to be irradiated, by setting these as variables, a period suitable for an optical signal in an arbitrary wavelength region A structure can be made.

FIG. 2A shows a state of a periodic structure formed by irradiating a pulse laser beam whose magnetic field direction is horizontally polarized perpendicularly to the paper surface. Of the periodic structure formed in the spherical refractive index changing region S (whose diameter is indicated by D), the surface (referred to as the main surface) connecting the region 17 having a high refractive index is parallel to the polarization direction of the magnetic field, It is formed in a ring-cut state.
FIG. 2B shows a formation state of the periodic structure when the pulse laser beam is irradiated horizontally from the right side of the drawing. The pulse laser beam is perpendicular to the paper surface.

FIG. 2C shows a formation state of the periodic structure when the pulse laser beam is irradiated from the lower side to the upper side of the drawing.
The relationship between the main surface formation direction and the polarization of the pulsed laser beam is shown in FIGS. 3A and 3B. FIG. 3A shows a state of a periodic structure formed by irradiating a pulse laser beam whose magnetic field direction is horizontally polarized perpendicularly to the paper surface, and FIG. 3B shows that a pulse laser beam whose magnetic field direction is vertically polarized is perpendicular to the paper surface. The state of the periodic structure formed by irradiation is shown. Thus, the direction of the main surface constituted by the region 17 having a high refractive index is the same as the direction of the polarization magnetic field.

Thus, according to the embodiment of the present invention, it is possible to form a periodic structure in which the refractive index changes in the submicron order in the refractive index change region. The direction of the period of this periodic structure can be set to an arbitrary direction by setting the direction of the polarization magnetic field of the pulse laser beam to be irradiated.
4A to 4C are produced by changing the direction of the principal surface of the periodic structure or the pitch P of the period by setting the polarization direction, wavelength, number of irradiation pulses, pulse energy, etc. of the pulsed laser light to be irradiated. 3 is a cross-sectional view showing a structure of a refractive index changing region S. FIG.

  In the refractive index changing region S of FIG. 4A, the direction of the main surface is formed horizontally. On the other hand, wavelength-multiplexed signal light is incident vertically. In the refractive index changing region S in FIG. 4B, the pitch P of the period is the same as that in FIG. 4A, but the direction of the main surface is formed perpendicularly. Wavelength multiplexed signal light is incident in parallel to this main surface. FIG. 4C shows the case where the wavelength-multiplexed signal light is perpendicularly incident on the main surface as in FIG. 4A, but the period pitch P is different.

Depending on the difference in the incident angle of the wavelength-multiplexed signal light or the difference in the pitch P, an effect of increasing the reflectance of a specific wavelength can be expected depending on the incident angle and the pitch P with respect to the main surface. Specifically, the reflected light A reflected from FIG. 4A, the reflected light B reflected from FIG. 4B, and the reflected light C reflected from FIG. 4C are light of different wavelengths.
Although the case where a single refractive index change region is formed is shown as it is, a plurality of refractive index change regions may be formed. Further, the shape of the refractive index change region is not necessarily spherical.

In FIG. 1, after applying the laser beam to the glass material 1, the laser beam is turned off, the glass material is moved by a predetermined distance in the X, Y, and Z directions, and the laser beam is repeatedly applied. A plurality of spherical refractive index changing regions having the periodic structure can be set discretely and repeatedly in one surface or glass material 1.
By continuously moving the glass material by a predetermined distance in the X, Y, and Z directions while applying the laser beam, the refractive index changing region having the periodic structure is formed on the surface of the glass material 1 or in the glass material 1. It can also be formed in the shape of a curved string having a columnar shape or a circular cross section.

  In addition, the glass material 1 is continuously moved in any one direction selected from the X, Y, and Z directions while irradiating the laser beam. When the movement is finished, the laser beam is turned off, and the laser beam is turned off and interrupted by a predetermined distance in the other direction. If the laser beam is turned on again and the laser beam is turned on again and the continuous movement in one direction is repeated, a plurality of columnar refractive index changing regions can be repeatedly set on or in the glass material 1. it can.

In addition, it is continuously moved in a curved shape in any direction, and when the movement is finished, the laser beam is turned off and moved intermittently by a predetermined distance in the other direction. If the curved movement is repeated, a plurality of refractive index change regions having a circular cross-section having a circular cross section can be set on the surface of the glass material 1 or in the glass material 1.
In this way, by arranging a plurality of refractive index changing regions in parallel at a predetermined interval and in a fixed direction, an optical structure whose refractive index changes in a double cycle is produced at an arbitrary location in the glass substrate. be able to. The “predetermined interval” can be set within a range of 1 μm to 1 mm, for example.

  As shown in FIG. 5, when an optical signal having an arbitrary wavelength and an arbitrary polarization is incident on this optical structure having a double period, it is diffracted in a predetermined direction for each wavelength, and at the same time a constant polarization Expected to be effective as a diffraction grating / polarizer. Furthermore, it is possible to function as an optical isolator with two Faraday rotators sandwiched between two polarizers thus configured.

The optical structure of the present invention was wavelength-multiplexed by changing the direction / pitch P of the principal surface of the periodic structure for each layer to form a three-dimensionally laminated structure as shown in FIG. It is also possible to function as a reflector filter that reflects only a specific wavelength from an optical signal with high efficiency.
It should be noted that the above-described embodiment is merely an example, and modifications can be appropriately made without departing from the gist of the present invention.

<Example 1>
A plurality of refractive index change regions were repeatedly set on a 10 mm × 10 mm × 5 mm quartz glass substrate 10. As shown in FIG. 7, the pulse laser beam 11 is condensed by the lens 12 and irradiated to the quartz glass substrate 10 so that the condensing position 13 of the pulse laser beam 11 is located inside the quartz glass substrate 10. did. As the pulse laser beam, a laser having a pulse width of 150 femtoseconds, a repetition frequency of 200 kHz, a wavelength of 800 nm, an average output of 600 mW, and a horizontally polarized magnetic field oscillated from an argon laser-excited Ti: Al ₂ O ₃ laser was used. The irradiation time is 4 seconds per focusing position.

In the condensing position 13, a striped periodic structure in which first regions and second regions having different refractive indexes with a pitch of 1 μm or less are alternately generated was formed.
The refractive index changing region constituting the periodic structure thus formed has a diameter of about 2 μm, the pitch P of the periodic structure is 200 nm, the width L of the first region is about 30 nm, and the width of the second region is about 170 nm. It was.

The first region has oxygen defects and changes to the composition of SiO _2−x (0 <x <2). Therefore, the first region is refracted relative to the surrounding refractive index (the refractive index of the glass substrate excluding the periodic structure). The rate is likely to be high. In the second region, oxygen moves from the first region, is taken into the structure, and changes to the composition of SiO _{2 + x} , so that the refractive index of the surroundings (the refractive index of the glass substrate excluding the periodic structure) The refractive index is considered to be the same or lower. However, it is conceivable that the refractive index decreases as oxygen decreases, and the refractive index increases as oxygen increases. Therefore, it cannot be said that the relationship between oxygen and refractive index has been established at this stage. However, there is no doubt that the refractive index changes in the first region and the second region.

  The size D of the refractive index changing region is variable in the range of about 1 to about 100 μm depending on the pulse energy of the pulse laser beam to be irradiated and the magnification of the lens at the time of focusing. The width of the first region is about 10 to 50 nm, and the width of the second region is about 50 to 190 nm, depending on the wavelength of the pulse laser beam to be irradiated, the number of irradiation pulses, the pulse energy, and the refractive index of the glass substrate. It is variable.

When the light condensing position 13 is intermittently moved relative to the quartz glass substrate 10 at predetermined intervals in the X, Y, and Z directions (irradiation time is 4 seconds per light condensing position), as shown in FIG. 8A. In addition, the spherical refractive index change region 14 is set repeatedly. FIG. 8B shows a plan view of the quartz glass substrate 10 in which the refractive index change region 14 is repeatedly set.
When the pulse laser beam 11 is intermittently relatively moved in the X and Y directions and continuously moved in the Z direction (the relative movement speed in the Z direction is 100 μm / sec), a circular shape is obtained as shown in FIG. 9A. The columnar refractive index change region 15 is repeatedly set. FIG. 9B shows a plan view of the quartz glass substrate 10 in which the columnar refractive index change region 15 is repeatedly set.

Further, when the pulse laser beam 11 is intermittently relatively moved in the direction from X to 60 ° (Y to 30 °) and continuously in the Z direction at the above speed, a circle as shown in FIG. The quartz glass substrate 10 in which the columnar refractive index change regions 15 are set in a triangular lattice shape can be produced.
When the pulse laser beam 11 is intermittently relatively moved in the X direction and continuously moved in the Y direction (the relative movement speed in the Y direction is 100 μm / sec), as shown in FIG. The refractive index changing region 16 is set repeatedly. FIG. 11B shows a plan view of the quartz glass substrate 10 on which the cylindrical refractive index change region 16 is repeatedly set.

<Example 2>
In the same manner as in Example 1, irradiation was performed so that the focused position of the pulsed laser light 11 was positioned inside the quartz glass substrate 10 of 10 mm × 10 mm × 5 mm. The irradiation conditions of the pulse laser beam are the same as those in the first embodiment.
However, irradiation was performed by changing the polarization direction (magnetic field) of the pulsed laser light to be irradiated to horizontal polarization or vertical polarization by the linearly polarizing plate 8 shown in FIG.

As shown in FIGS. 3A and 3B, a striped periodic structure in which a region having a high refractive index and a region having a low refractive index are repeatedly formed is formed in a direction depending on the polarization direction (magnetic field) of the pulse laser beam. That is, a striped periodic structure was formed in the horizontal direction (FIG. 3A) in the case of horizontal polarization, and in the vertical direction (FIG. 3B) in the case of vertical polarization.
Similar to the first embodiment, the light collection position is intermittently or continuously moved relative to the glass substrate at a predetermined interval and in a fixed direction, and the refractive index changing region is a string having a spherical shape, a cylindrical shape, or a circular cross section. Was repeatedly formed.

It is a schematic diagram which shows the manufacturing apparatus of the optical structure of this invention. It is front sectional drawing of the light irradiation direction which shows the periodic structure formed in a refractive index change area | region. It is side surface sectional drawing of the light irradiation direction which shows the periodic structure formed in a refractive index change area | region. It is a plane sectional view of a light irradiation direction showing a periodic structure formed in a refractive index change region. It is sectional drawing which shows the periodic structure formed in the refractive index change area | region at the time of irradiating and irradiating the pulsed laser beam whose polarization magnetic field direction is horizontal. It is sectional drawing which shows the periodic structure formed in the refractive index change area | region at the time of irradiating and irradiating the pulsed laser beam with a perpendicular polarization magnetic field direction. It is sectional drawing which shows the periodic structure formed in the refractive index change area | region, and shows the case where the wavelength multiplexed optical signal is irradiated perpendicularly with respect to the main surface of the periodic structure formed in the refractive index change area | region. ing. It is sectional drawing which shows the periodic structure formed in the refractive index change area | region, and shows the case where the optical signal wavelength-division-multiplexed in parallel is irradiated with respect to the main surface of the periodic structure formed in the refractive index change area | region. ing. It is sectional drawing which shows the periodic structure formed in the refractive index change area | region, and irradiates the optical signal wavelength-multiplexed perpendicularly with respect to the main surface of the periodic structure formed in the refractive index change area | region. The case where the pitch P of a structure is enlarged is shown. It is a perspective view which shows the example which used the optical structure which has a double period as a diffraction grating and a polarizer. It is a perspective view which shows the example which used the optical structure which has a double period as a reflector filter. It is a perspective view which shows the state which irradiated the pulsed laser beam to the quartz glass substrate. FIG. 5 is a perspective view showing an optical structure in which a plurality of spherical refractive index change regions are arranged side by side in a three-dimensional lattice pattern by intermittently moving relative to a glass substrate at predetermined intervals and in three directions. It is the same top view. It is a perspective view which shows the optical structure which arranged two or more column-shaped refractive index change area | regions in two dimensions. It is the same top view. FIG. 6 is a plan view showing an optical structure in which a plurality of refractive index changing regions are arranged in a triangular lattice pattern. It is a perspective view which shows the structure for optics which arranged two or more two-dimensionally the refractive index change area | region of a cross-sectional circular belt (column) shape. It is the same top view.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Glass material 2 Pulsed laser beam 3 Excitation light generation part 4 Pulsed light generation part 5 Optical amplification part 6 Condensing apparatus 7 such as a lens Electric stage 8 capable of scanning in XYZ directions Linearly polarizing plate 9 Mirror 10 Quartz glass substrate 11 Pulse laser Light 12 Condensing lens 13 Condensing position 14 Spherical refractive index changing region 15 having periodic structure Cylindrical refractive index changing region 16 having periodic structure Band-shaped refractive index changing region S having periodic structure Spherical refractive index changing region P having a pitch L of the periodic structure in the refractive index changing region S The width of the high refractive index region in the refractive index changing region S

Claims (14)

A base material that transmits laser light is irradiated with a focused single linearly polarized pulsed laser light having an energy amount that causes a light-induced refractive index change,
A periodic structure in which a region having a high refractive index and a region having a low refractive index are repeatedly generated at the condensing position, and a surface connected to a region having a high refractive index or a surface connected to a region having a low refractive index in the periodic structure. A method for manufacturing an optical structure , wherein a defined main surface forms a region formed in parallel to a direction of a polarized magnetic field of the irradiated pulsed laser beam . The pitch of the periodic structure, the wavelength of an emitted pulse laser beam, the manufacturing method of the optical structure of claim 1 Symbol placement are formed depending on the irradiation pulse number or the pulse energy. Pitch of the periodic structure, manufacturing method of the optical structure according to claim 1 or claim 2 is 1μm or less. Method of manufacturing an optical structure according to any one of claims 1 to 3 region having the periodic structure is a sphere. The method for manufacturing an optical structure according to claim 4, wherein the diameter of the sphere is in a range of 0.1 μm to 1 mm. The method for manufacturing an optical structure according to any one of claims 1 to 3 , wherein the region having the periodic structure is a string having a circular cross section or a columnar shape. Method of manufacturing an optical structure according to a plurality, any one of claims 1 to 6 that are repeatedly arranged in the region having the periodic structure is constant intervals. The method for manufacturing an optical structure according to claim 7 , wherein the predetermined interval is in a range of 1 μm to 1 mm. Method of manufacturing an optical structure according to any one of claims 1 to 8, wherein a region having a periodic structure was formed in the isotropic material originally does not exhibit birefringence phenomenon. The method for manufacturing an optical structure according to any one of claims 1 to 9, wherein a pulse width of the pulsed laser light is ^10-12 to ^10-15 sec. The method for manufacturing an optical structure according to any one of claims 1 to 10, wherein a pulse repetition period of the pulse laser beam is 100 MHz or less. Pulse of the pulsed laser light, a manufacturing method of an optical structure according to any one of claims 1 to 10 is a single pulse. Method of manufacturing an optical structure according to any one of claims 1 to 12 power density of the pulsed laser light is condensed on the substrate is 10 ⁸ W / cm ² or more. Method of manufacturing an optical structure according to any one of the substrate according to claim 1 pulse energy of the pulsed laser beam is focused is 10 .mu.J / pulse from 0.1μJ / pulse to ~ claim 13.

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