JP4359789B2 - Liquid flow equipment - Google Patents

Description

  The present invention relates to a liquid flow apparatus for flowing a liquid.

  As a conventional apparatus for flowing a liquid, there are a ship screw and various pumps. Fish fins and the like can also be regarded as devices for flowing liquid. It can be said that the shape and operation of this type of mechanism are selected so that the liquid can flow efficiently. In recent years, it has become necessary to further improve the efficiency of an apparatus for flowing a liquid, and to further reduce the size according to the application.

The structure and principle of fish fins may be applied to pumps by applying this. For example, Japanese Patent Application Laid-Open No. 5-272497 discloses a pump that causes a liquid to flow by reciprocatingly driving a fin (fin) around a rotation axis within a predetermined angular range. There is a description that the pump of the publication is small and includes a small number of components.
JP-A-5-272497

  However, in the case of a pump driven by a mechanism having such a rotating shaft, a bearing for receiving the rotating shaft, a sealing for sealing a fluid, and the like are required. Such sealing may be an obstacle to downsizing the pump. Similarly, a pump using a screw mechanism also requires sealing or the like for sealing a fluid, and there is a limit to downsizing. In addition, the screw mechanism has a drawback that if the rotational speed is increased to increase the flow rate of the liquid, the efficiency becomes very poor.

  One object of the present invention is to provide a liquid flow apparatus having a novel mechanism for flowing a liquid.

The liquid flow device according to the present invention is:
A plate-like vibrator,
A drive unit for vibrating the vibrating body in a thickness direction;
Have
At least a part of the end portion in the in-plane direction of the vibrating body is continuously thinner toward the end.

  Such a liquid flow apparatus can flow a liquid.

In the liquid flow apparatus of the present invention,
The drive unit can bend and vibrate the vibrating body.

In the liquid flow apparatus of the present invention,
The drive unit can be vibrated so that the position of the entire vibrator is translated.

In the liquid flow apparatus of the present invention,
At least the thinned area of the vibrating body is immersed in a liquid, and the liquid flows with a velocity component in an in-plane direction of the vibrating body and in a direction in which the vibrating body becomes thin. be able to.

In the liquid flow apparatus of the present invention,
The driving unit may include a piezoelectric element.

In the liquid flow apparatus of the present invention,
The driving unit may have a solenoid.

In the liquid flow apparatus of the present invention,
The frequency at which the vibrating body vibrates may be a resonance frequency of the vibrating body or the entire liquid flowing device.

  Preferred embodiments of the present invention will be described below with reference to the drawings. The following embodiment will be described as an example of the present invention.

1. Liquid Flow Device An example of the liquid flow device 100 according to the present embodiment will be described with reference to the drawings. FIG. 1 is a plan view schematically showing a liquid flow device 100 according to the present embodiment. FIG. 2 is a cross-sectional view schematically showing the liquid flow device 100 according to the present embodiment. A cross section taken along line AA in FIG. 1 corresponds to FIG. 3 and 4 are perspective views showing an example of the vibrating body 20 of the present embodiment, respectively.

  The liquid flow device 100 includes a drive unit 10 and a vibrating body 20.

  As shown in FIGS. 1 and 2, the drive unit 10 has piezoelectric layers 14 a and 14 b above and below the base material 12, and electrodes 16 a and 16 b on the outside thereof. The drive unit 10 has two piezoelectric elements formed on the top and bottom with a base material 12 as the center.

  The base 12 is a base of the drive unit 10 and is a member for taking out the mechanical output of the drive unit 10 to the outside. The shape of the base material 12 is a plate shape in the illustrated example, and a part of the base material 12 protrudes outward from the piezoelectric layers 14a and 14b so that it can be connected to other members. The substrate 12 can be deformed by the piezoelectric layers 14a and 14b. The base material 12 can drive other members connected by being deformed. The base material 12 can be subjected to expansion / contraction deformation in the illustrated longitudinal direction (direction along the line AA) and in-plane and out-of-plane bending deformation of the base material 12. In the present embodiment, a case where the base material 12 undergoes expansion and contraction will be described. Although the material of the base material 12 is arbitrary, in the example of illustration, the material which has electroconductivity is used. Therefore, the base material 12 is one electrode of a pair of electrodes for applying an electric field to the piezoelectric layers 14a and 14b. In the illustrated example, the substrate 12 is configured as a common electrode for the upper and lower piezoelectric layers 14a and 14b. When the base material 12 is made of a material having no electrical conductivity, conductive layers and the like may be provided above and below the base material 12 in order to apply an electric field to the piezoelectric layers 14a and 14b.

The piezoelectric layers 14 a and 14 b are provided above and below the base material 12. The piezoelectric layers 14a and 14b expand and contract when an electric field is applied thereto. As the piezoelectric layers 14a and 14b expand and contract, the substrate 12 is deformed. The direction of expansion and contraction of the piezoelectric layers 14a and 14b can be arbitrarily designed depending on the polarity of the applied voltage and the direction in which the piezoelectric layers 14a and 14b are polarized. In the example of FIGS. 1 and 2, the polarization direction of the upper and lower piezoelectric layers 14a and 14b and the direction of the electric field applied to the upper and lower electrodes 16a and 16b are in the illustrated longitudinal direction (the direction along the line AA). It is configured to extend and contract. Note that if the polarization direction and the direction of the electric field are changed, the substrate 12 can be bent in the out-of-plane direction. Piezoelectric layers 14a, 14b may, for example, lead zirconate titanate _{(Pb (Zr, Ti) O} 3), formed of a piezoelectric material such as lead zirconate titanate niobate (Pb (Zr, Ti, Nb ) O 3) Can be done.

  The electrodes 16a and 16b are provided outside the base material 12 of the piezoelectric layers 14a and 14b. The electrodes 16a and 16b are one of a pair of electrodes for applying an electric field to the piezoelectric layers 14a and 14b. The electrodes 16 a and 16 b supply electric power for expanding and contracting the base material 12. The electrodes 16a and 16b are formed of a conductive material.

  As shown in FIGS. 1 and 2, the vibrating body 20 is provided in the vicinity of the tip of the base material 12 of the driving unit 10. The shape of the vibrating body 20 is a plate shape. In the present embodiment, the direction of deformation of the drive unit 10 is the longitudinal direction of the drive unit 10 (base material 12) (the direction along the line AA in the figure). The vibrating body 20 can continuously expand and contract, and can vibrate in the direction of the vibration direction B (arrow in the figure). The vibrating body 20 is provided in such a direction that the thickness direction of the vibrating body 20 is along the longitudinal direction (vibration direction B) of the drive unit 10. That is, the vibrating body 20 is provided so as to have an operation component in the thickness direction. The vibrating body 20 is fixed to the base material 12 of the driving unit 10 in the illustrated example. The joining of the vibrating body 20 and the base material 12 may be performed via another member such as a jig as long as the operation of the driving unit 10 can be transmitted to the vibrating body 20.

  As shown in FIG. 3, when the plate-like vibrating body 20 is viewed from the thickness direction (X and number in the figure), the end 22 (outside the imaginary line L in the figure) is at least a part (in the figure). The end 24) is continuously thinner towards the end E1. The vibrating body 20 has a slope T1 that is inclined at an angle φ and a slope T2 that is inclined at an angle ψ with respect to a plane perpendicular to the thickness direction X (a plane indicated by a shading in the figure). Further, as shown in FIG. 4, a plane perpendicular to the thickness direction X (shown by hatching (same as above)) and the inclined surface T2 may coincide (ψ = 0 °).

  In the present embodiment, the thickness direction of the plate-like object refers to the direction along the shortest side of the rectangular parallelepiped that contains the plate-like object and has the smallest volume. In the case where there is no slope inclined with respect to the plane perpendicular to the thickness direction of the plate-like object, the thickness direction is the direction along the second shortest side of the rectangular parallelepiped.

2. Operation of Liquid Flow Device FIG. 5A, FIG. 5B, and FIG. 5C are cross-sectional views schematically showing the operation of the liquid flow device of this embodiment. FIG. 5 shows a state in which the inclined surface T1 and the inclined surface T2 of the vibrating body 20 move while being immersed in a liquid. FIGS. 5A and 5B show a state in which the vibrating body 20 moves in the direction indicated by the solid line arrow. FIG. 5C shows a state in which the vibrating body 20 is reciprocally vibrated in the directions of arrows in both directions of the solid line. The broken-line arrows in FIG. 5 schematically show how the liquid flows.

  As shown in FIG. 5A, when the vibrating body 20 moves in the direction of the arrow, the liquid present on the slope T2 side is pushed by the slope T2 and generates a flow along the slope T2 (the broken line on the left side). See arrow). On the other hand, at this time, the liquid existing on the slope T1 side is pulled by the slope T1, and a flow along the slope T1 is generated. However, since the liquid on the slope T1 side is pulled by the slope T1, the turbulence of the flow is large, and the speed of the liquid flow is smaller than the speed of the liquid flow on the slope T2 side (see the broken line arrow on the right side). . Therefore, the liquid flow generated around the vibrating body 20 is the sum of the liquid flows existing on the slope T2 side and the slope T1 side, and the liquid flow is generated in the direction in which the vibrating body 20 becomes thinner. Similarly, as shown in FIG. 5B, when the vibrating body 20 moves in the direction opposite to that in FIG. 5A, the liquid around the vibrating body 20 flows in the direction in which the vibrating body 20 becomes thinner. Occurs.

  In FIG.5 (c), the vibrating body 20 reciprocates in the direction of the arrow of the solid line in both directions. Therefore, the liquid flow generated around the vibrating body 20 is the sum of the liquid flows represented by a total of four dashed arrows shown in FIGS. 5 (a) and 5 (b). Therefore, when the vibrating body 20 vibrates in the thickness direction, the liquid around the vibrating body 20 flows in the direction in which the vibrating body 20 becomes thinner.

  The shape of the vibrating body 20 that can vibrate the liquid 20 as shown in FIG. 5C by vibrating the vibrating body 20 in the thickness direction is as follows. (1) As for the vibrating body 20, at least one part of the edge part 22 of the in-plane direction is thin toward the end. (2) The vibrating body 20 has at least one inclined surface that is inclined with respect to a plane perpendicular to the vibration direction. The inclined surface is not limited to a flat surface but may be a curved surface.

  6 and 7 are schematic diagrams illustrating the relationship between the shape of the vibrating body 20 and the vibration direction. The direction in which the vibrating body 20 is vibrated by the driving unit 10 may be a direction having a component in the thickness direction of the vibrating body 20. For example, as shown in FIG. 6, even if the vibration direction is inclined by θ with respect to the thickness direction, the liquid flows according to the sum of the flows (broken arrows) generated around the vibrating body 20. As a result, a flow can be generated in the direction in which the vibrating body 20 becomes thinner. As shown in the figure, this effect can occur even when the angle θ is larger than the angle φ. Further, if the vibration direction is selected so that the liquid flows in the same direction when the vibrating body 20 reciprocates (that is, θ ≦ φ or θ ≦ ψ), the efficiency of flowing the liquid is improved. Furthermore, as shown in FIG. 7, when the vibration direction and the thickness direction of the vibrating body 20 coincide (θ = 0 °), the liquid flow can be generated more efficiently.

  On the other hand, the entire liquid flow device 100 or the vibrating body 20 has a resonance frequency. When the vibration described above is in the vicinity of the resonance frequency, energy loss is reduced, and a liquid flow can be generated more efficiently. Moreover, the frequency of vibration when vibrating the vibrating body 20 can be freely set. The frequency of the vibration can be optimized in consideration of the shape and size of the vibrating body 20 and the liquid flow device 100 and the properties of the liquid. For example, the vibration frequency when vibrating the vibrating body 20 can be 20 kHz to 1 MHz.

3. Method for Producing Liquid Flow Device The liquid flow device 100 of the present embodiment can be produced, for example, as follows. The liquid flow device 100 can be manufactured by manufacturing the driving unit 10 and the vibrating body 20 and joining them together.

  The manufacturing method of the drive unit 10 can include a step of forming the piezoelectric layers 14a and 14b on the base 12 and a step of forming the electrodes 16a and 16b outside the piezoelectric layers 14a and 14b. The step of forming the piezoelectric layers 14a and 14b on the substrate 12 can be performed, for example, by a sol-gel method or CVD (Chemical Vapor Deposition). The step of forming the electrodes 16a and 16b can be performed by a sputtering method, a vapor deposition method, or the like. The polarization treatment of the piezoelectric layers 14a and 14b can be performed by applying an electric field to the base 12 and the electrodes 16a and 16b. The vibrating body 20 can be manufactured by processing a metal plate, for example. The drive unit 10 manufactured as described above and the vibrating body 20 can be joined by, for example, welding, adhesion, fixing with screws, or the like.

4). Variations The liquid flow device of the present embodiment can be variously modified as described below.

4.1. FIG. 8 is a cross-sectional view schematically showing a liquid flow device 200 according to a modification. FIG. 9 is a plan view schematically showing a liquid flow device 200 according to a modification. A cross section taken along line AA in FIG. 9 corresponds to FIG.

  FIGS. 8 and 9 schematically show a liquid flow device 200 of a modification in which the drive unit 10 is configured by a solenoid 30. The solenoid 30 includes an iron core 32 and a coil 34. When an electric current is applied to the coil 34, the iron core 32 slides in a direction along the line AA in the drawing according to the electric current. If the current applied to the coil 34 is an alternating current, the iron core 32 vibrates along the vibration direction B. As shown in FIG. 9, the vibrating body 20 is fixed to the iron core 32 as appropriate. In the liquid flow device 200, the vibrating body 20 can vibrate in the thickness direction and flow the liquid in the same manner as described in the above embodiment.

  FIG. 10 is a cross-sectional view schematically showing a liquid flow device 300 according to another modification. The drive unit 10 of the liquid flow device 300 is configured by a piezoelectric element, and the base material 12 can bend and vibrate in the thickness direction. The piezoelectric element is the same as the piezoelectric element of the liquid flow device 100 except that the piezoelectric layers 14a and 14b and the electrodes 16a and 16b are divided. As shown in FIG. 10, the liquid flow device 300 is provided with a vibrating body 20 via a jig 11 above the base material 12. The direction of thinning toward the end in the in-plane direction of the vibrating body 20 is upward as viewed from the base material 12. When the drive unit 10 is bent and vibrated in the thickness direction, the central portion to which the vibrator 20 is connected is inclined as schematically shown by the broken line p in the figure. Thus, the vibrating body 20 can vibrate as shown by the arrows in the figure. In this case, the vibrating body 20 is displaced about the base portion, but does not have a rotation axis. In this way, also with the liquid flow device 300 in which the drive unit 10 is deformed, the vibrating body 20 is vibrated in the thickness direction as described in the above embodiment, and the liquid can flow.

  FIG. 11 is a plan view schematically showing a liquid flow device 400 according to another modification. FIG. 12 is a cross-sectional view schematically showing the liquid flow device 400. A cross section taken along line CC in FIG. 11 corresponds to FIG.

  The liquid flowing device 400 is different from the above-described liquid flowing devices 100 and 200 in the vibration direction B of the driving unit 10. Further, the liquid flow device 400 is different from the liquid flow devices 100 and 200 in that the end in the in-plane direction of the vibrating body 20 becomes thinner toward the end. The direction in which the drive unit 10 of the liquid flow device 400 vibrates the vibrating body 20 is the thickness direction of the base material 12. In this example, the vibrating body 20 is integrally continuous with the base material 12. The drive unit 10 of the liquid flow device 400 has the same configuration as the drive unit 10 of the liquid flow device 100. In the liquid flow device 400, the polarization direction of the piezoelectric layers 14a and 14b of the drive unit 10 or the direction of the electric field applied to the piezoelectric layers 14a and 14b is different from the liquid flow devices 100 and 200, and the deformation of the base material 12 The direction is out of the plane. Also in the liquid flow device 400, the vibrating body 20 is vibrated in the thickness direction. As a result, when the liquid flow device 400 operates in a state where the vibrating body 20 is immersed in the liquid, a liquid flow can be generated in the direction in which the vibrating body 20 becomes thinner, like the liquid flow devices 100 and 200.

  FIG. 13 is a cross-sectional view schematically showing a liquid flow device 500 according to another modification. The liquid flow device 500 is the same as the liquid flow device 400 except that the direction in which the vibrating body 20 becomes thinner is different from the liquid flow device 400. The vibrating body 20 of the liquid flow device 500 is formed integrally with the base material 12 of the driving unit 10. In addition, the vibrating body 20 of the liquid flow device 500 is thinner in a direction away from the driving unit 10. Also in the liquid flow device 500, the vibrating body 20 is vibrated in the thickness direction. As a result, when the liquid flow device 400 is operated in a state where the vibrating body 20 is immersed in the liquid, a liquid flow can be generated in the direction in which the vibrating body 20 becomes thinner, like the liquid flow devices 100 to 400. In the liquid flow device 500, the vibrating body 20 is bent along the vibration direction B so that the vibrating body 20 itself bends. Thus, even when the vibrating body 20 itself is flexibly vibrated, a liquid flow can be generated in the direction in which the vibrating body 20 becomes thinner.

  As described above, in the present embodiment, the drive unit 10 can be variously modified. The drive part 10 will not be limited if the vibrating body 20 can be vibrated in the thickness direction. The drive unit 10 can appropriately select the mechanism, form, vibration direction, and the like according to the application of the liquid flow device.

4.2. FIG. 14 to FIG. 17 are perspective views schematically showing a vibrating body according to a modified example. The solid arrows in both directions in the figure indicate the vibration direction B.

  The vibrating body 20a shown in FIG. 14 has a surface parallel to a plane perpendicular to the thickness direction. Even when the vibrating body 20a is deformed in this way, at least a part (end portion 24) of the end portion 22 in the in-plane direction (outside of the imaginary line L in the drawing) becomes thinner toward the end. Therefore, by vibrating in the thickness direction, a liquid flow can be generated in the direction in which the vibrating body 20 becomes thinner.

  A vibrating body 20b shown in FIG. 15 has a surface parallel to a plane perpendicular to the thickness direction, and a part of the vibrating body 20b extends in the depth direction of the figure like a handle (a part indicated by a broken line). Since the vibration body 20b can connect the drive unit 10 to the handle 26, the degree of freedom of arrangement of each member when the liquid flowing device is used can be increased. In addition, when the handle portion 26 is used as the base material 12 of the drive unit 10, the vibration body 20b can be configured by integrating the vibration body and the base material as in the liquid flow device 400 illustrated in FIG.

  The vibrating body 20c illustrated in FIG. 16 has only one surface that is inclined with respect to a surface perpendicular to the thickness direction. Even when only one inclined surface is provided like the vibrating body 20c, a part of the end portion 22 in the in-plane direction (end portion 24) is thinned toward the end, so that it is vibrated in the thickness direction. The liquid flow can be generated in the direction in which the vibrating body 20c becomes thinner. Further, like the vibrating body 20c, the vibrating body 20 of the present embodiment may have an asymmetric shape on the front and back sides.

  The vibrating body 20d shown in FIG. 17 has four surfaces (slopes T1 to T4) that are inclined with respect to a surface perpendicular to the thickness direction, and the end 24 in the in-plane direction becomes thinner toward the end. It has two directions to go. FIG. 18 is a cross-sectional view of the surface of the vibrating body 20d shown in FIG. In FIG. 18, the flow of the liquid that is generated when the vibrating body 20 d vibrates in the thickness direction is schematically shown by broken-line arrows. When the vibrating body 20d has a shape that becomes thinner in a plurality of directions, a liquid flow can be generated in each direction when vibrating in the thickness direction.

  FIG. 19 is a perspective view schematically showing a vibrating body 20e of still another modified example. The vibrating body 20e shown in FIG. 19 has a curved surface inclined with respect to a surface perpendicular to the thickness direction. Thus, even if the vibrating body 20a is deformed, a part of the end portion in the in-plane direction becomes thinner toward the end. Therefore, by vibrating in the thickness direction, a liquid flow can be generated in the direction in which the vibrating body 20 becomes thinner. Further, the direction in which the vibrating body becomes thinner can be freely selected by changing the shape as shown in FIG.

  As described above, in the present embodiment, the vibrator 20 can be modified in many ways. The shape of the vibrating body 20 is not limited as long as at least a part of the end 22 in the in-plane direction becomes thinner toward the end. The vibrating body 20 can select a shape, a vibration direction, etc. suitably according to the use of a liquid flow apparatus.

4.3. FIG. 20 is a cross-sectional view schematically showing a state in which the vibrating body 20 of the liquid flow device 600 capable of bending and vibrating the base material 12 in the thickness direction is immersed in the liquid. In the figure, a boundary s represents a wall of a container, a tube, or the surface of a liquid. The vibrator 20 of the liquid flow device 600 is immersed in the liquid. Broken lines t and u in the figure schematically show how the liquid flow device 600 is deformed. Moreover, the arrow shown by the code | symbol B in FIG. 20 shows a vibration direction.

  As shown in FIG. 20, in the liquid flow device 600, the vibrating body 20 can vibrate in the thickness direction by the driving unit 10. This vibration can have a plurality of modes as shown by broken lines in the figure under the control of the drive unit 10. Dashed lines t and u are shown as examples of vibration modes. Looking at the broken line t, the base material 12 is displaced at the position of the boundary s. Even if there is a displacement at the position of the boundary s, the liquid flow device 600 can cause the liquid to flow. When the boundary s is a pipe wall, a partition wall (diaphragm) may be provided so that the base material 12 can penetrate the pipe wall and allow the base material 12 to vibrate. Further, when looking at the broken line u, a vibration node of the liquid flow device 600 exists in the vicinity of the boundary s. The liquid flow device 600 can also be operated so that a vibration node occurs near the boundary s. In this way, it is possible to provide a simpler partition wall in which the base material 12 penetrates the tube wall and allows small vibrations. Thereby, the reliability of the liquid flow apparatus 600 can be improved.

  FIG. 21 is a cross-sectional view schematically showing a state in which the vibrating body 20 of the liquid flow device 700 capable of stretching and vibrating the base material 12 is immersed in a liquid. In the figure, a boundary s represents a wall of a container, a tube, or the surface of a liquid. And the vibrating body 20 of the liquid flow apparatus 700 is immersed in the liquid. A broken line v in the figure is an example of a mode of vibration, schematically showing a displacement in the horizontal direction of the drawing at each part when the liquid flow device 700 is expanded and contracted in the vertical direction of the drawing, corresponding to the part of the liquid flow device 700. It is drawn in. An arrow indicated by a symbol B in FIG. 21 indicates a vibration direction.

  As shown in FIG. 21, in the liquid flow device 700, the vibrating body 20 can vibrate in the thickness direction by the driving unit 10. This vibration can be obtained by controlling the drive unit 10 in the same manner as in the liquid flow device 100. Looking at the broken line v, the vibration node of the liquid flow device 700 exists near the boundary s. Similar to the liquid flow device 600 described above, the liquid flow device 700 can also be operated so that a vibration node is generated in the vicinity of the boundary s. In this way, it is possible to provide a simple partition that allows the base material 12 to penetrate the tube wall and to allow smaller vibrations of the base material 12. Similarly to the liquid flow device 600 described above, in the liquid flow device 700, even if there is a displacement at the position of the boundary s, the liquid can be flowed if an appropriate partition wall is used.

  FIG. 22 is a cross-sectional view schematically showing a state in which the vibrating body 20 of the liquid flow device 800 capable of stretching and vibrating the base material 12 is immersed in a liquid. In the figure, a boundary s represents a wall of a container, a tube, or the surface of a liquid. And the vibrating body 20 of the liquid flow apparatus 800 is immersed in the liquid. A broken line w in the figure is an example of a vibration mode. When the liquid flow device 800 undergoes stretching vibration, a displacement in the depth direction of the paper in each part is taken in the vertical direction of the paper, and is schematically corresponding to the part of the liquid flow device 800. It is drawn in. 22 indicates the vibration direction, and in this figure, indicates the depth direction of the drawing.

  As shown in FIG. 22, in the liquid flow device 800, the vibrating body 20 can vibrate in the thickness direction by the driving unit 10. This vibration can be obtained by appropriately controlling the drive unit 10. Looking at the broken line w, a vibration node of the liquid flow device 800 exists in the vicinity of the boundary s. Similar to the liquid flow device 600 described above, the liquid flow device 800 can also be operated so that a vibration node is generated in the vicinity of the boundary s. In this way, it is possible to provide a simple partition wall that allows the base material 12 to penetrate the tube wall and allow the base material 12 to vibrate. Similarly to the liquid flow device 600 described above, even if the liquid flow device 800 has a displacement at the position of the boundary s, the liquid can be flowed by providing a partition that can tolerate this.

  As described above, the embodiments of the present invention have been described. However, it will be easily understood by those skilled in the art that many modifications can be made without departing from the novel matters and effects of the present invention. Accordingly, all such modifications are intended to be included in the scope of the present invention.

FIG. 2 is a plan view schematically showing the liquid flow device 100 according to the embodiment. FIG. 3 is a cross-sectional view schematically showing the liquid flow device 100 according to the embodiment. The perspective view which shows typically the vibrating body 20 concerning embodiment. The perspective view which shows typically the vibrating body 20 concerning embodiment. Schematic which shows typically operation | movement of the vibrating body 20 concerning embodiment. Schematic which shows typically operation | movement of the vibrating body 20 concerning embodiment. Schematic which shows typically operation | movement of the vibrating body 20 concerning embodiment. Sectional drawing which shows typically the liquid flow apparatus 200 concerning a modification. The top view which shows typically the liquid flow apparatus 200 concerning a modification. The side view which shows typically the liquid flow apparatus 300 concerning a modification. The top view which shows typically the liquid flow apparatus 400 concerning a modification. Sectional drawing which shows typically the liquid flow apparatus 400 concerning a modification. Sectional drawing which shows typically the liquid flow apparatus 500 concerning a modification. The perspective view which shows typically the vibrating body 20a concerning a modification. The perspective view which shows typically the vibrating body 20b concerning a modification. The perspective view which shows typically the vibrating body 20c concerning a modification. The perspective view which shows typically the vibrating body 20d concerning a modification. Sectional drawing which shows typically the vibrating body 20d concerning a modification. The perspective view which shows typically the vibrating body 20e concerning a modification. The side view which shows typically operation | movement of the liquid flow apparatus 600 concerning a modification. The side view which shows typically operation | movement of the liquid flow apparatus 700 concerning a modification. The top view which shows typically operation | movement of the liquid flow apparatus 800 concerning a modification.

Explanation of symbols

DESCRIPTION OF SYMBOLS 10 Drive part, 11 Jig, 12 Base material, 14 Piezoelectric layer, 16 Electrode, 20 Vibrating body, 22, 24 End part, 26 Handle part, 30 Drive part, 32 Base material, 34 Coil, 100, 200, 300 , 400,500,600,700,800 Liquid flow device, T1, T2, T3, T4 slope, E1 end, s boundary, B vibration direction, X thickness direction

Claims (6)

A plate-like vibrator,
A drive unit for vibrating the vibrating body in a thickness direction;
Have
At least a part of the end portion in the in-plane direction of the vibrating body is continuously thinned toward the end ,
At least the thinned area of the vibrator is immersed in a liquid,
The liquid flow apparatus , wherein the liquid is flowed with a velocity component in an in-plane direction of the vibrating body and in a direction in which the vibrating body becomes thinner . In claim 1,
The driving unit is a liquid flow device that bends and vibrates the vibrating body. In claim 1,
The driving unit is a liquid flow device that vibrates so that the position of the entire vibrating body moves in parallel. In any one of Claims 1 thru | or 3 ,
The drive unit has a piezoelectric element, and is a liquid flow device. In any one of Claims 1 thru | or 3 ,
The drive unit includes a solenoid and a liquid flow device. In any one of Claims 1 thru | or 5 ,
The liquid flow device, wherein a frequency at which the vibration body vibrates is a resonance frequency of the vibration body or the entire liquid flow device.

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